JP5482831B2 - Metal foil with adhesion aid, printed wiring board using the same, and method for producing the same - Google Patents
Metal foil with adhesion aid, printed wiring board using the same, and method for producing the same Download PDFInfo
- Publication number
- JP5482831B2 JP5482831B2 JP2012142230A JP2012142230A JP5482831B2 JP 5482831 B2 JP5482831 B2 JP 5482831B2 JP 2012142230 A JP2012142230 A JP 2012142230A JP 2012142230 A JP2012142230 A JP 2012142230A JP 5482831 B2 JP5482831 B2 JP 5482831B2
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- JP
- Japan
- Prior art keywords
- metal foil
- resin
- epoxy resin
- weight
- adhesion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000011888 foil Substances 0.000 title description 65
- 229910052751 metal Inorganic materials 0.000 title description 65
- 239000002184 metal Substances 0.000 title description 65
- 238000004519 manufacturing process Methods 0.000 title description 9
- 239000003822 epoxy resin Substances 0.000 claims description 39
- 229920000647 polyepoxide Polymers 0.000 claims description 39
- 229920005989 resin Polymers 0.000 claims description 30
- 239000011347 resin Substances 0.000 claims description 30
- 239000002245 particle Substances 0.000 claims description 24
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 claims description 18
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 17
- 229920003986 novolac Polymers 0.000 claims description 17
- 125000003710 aryl alkyl group Chemical group 0.000 claims description 16
- JYEUMXHLPRZUAT-UHFFFAOYSA-N 1,2,3-triazine Chemical group C1=CN=NN=C1 JYEUMXHLPRZUAT-UHFFFAOYSA-N 0.000 claims description 15
- 229920000459 Nitrile rubber Polymers 0.000 claims description 15
- DHKHKXVYLBGOIT-UHFFFAOYSA-N 1,1-Diethoxyethane Chemical compound CCOC(C)OCC DHKHKXVYLBGOIT-UHFFFAOYSA-N 0.000 claims description 13
- 239000011354 acetal resin Substances 0.000 claims description 13
- 239000003795 chemical substances by application Substances 0.000 claims description 13
- 229920006324 polyoxymethylene Polymers 0.000 claims description 13
- 229920002554 vinyl polymer Polymers 0.000 claims description 13
- 229920001971 elastomer Polymers 0.000 claims description 10
- 239000005060 rubber Substances 0.000 claims description 10
- 239000000203 mixture Substances 0.000 claims description 8
- 239000004925 Acrylic resin Substances 0.000 claims description 6
- 229920000178 Acrylic resin Polymers 0.000 claims description 6
- 239000011258 core-shell material Substances 0.000 claims description 6
- NTXGQCSETZTARF-UHFFFAOYSA-N buta-1,3-diene;prop-2-enenitrile Chemical class C=CC=C.C=CC#N NTXGQCSETZTARF-UHFFFAOYSA-N 0.000 claims description 5
- 239000005062 Polybutadiene Substances 0.000 claims 1
- 229920002857 polybutadiene Polymers 0.000 claims 1
- 239000010410 layer Substances 0.000 description 30
- 238000000034 method Methods 0.000 description 25
- 239000000126 substance Substances 0.000 description 18
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 15
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 14
- 230000003746 surface roughness Effects 0.000 description 12
- 239000004020 conductor Substances 0.000 description 11
- 239000005011 phenolic resin Substances 0.000 description 10
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 9
- -1 carboxylic acid modified acrylonitrile butadiene Chemical class 0.000 description 9
- 125000003118 aryl group Chemical group 0.000 description 8
- 239000011889 copper foil Substances 0.000 description 8
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical group C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 8
- 238000011156 evaluation Methods 0.000 description 8
- 239000011342 resin composition Substances 0.000 description 8
- 239000002904 solvent Substances 0.000 description 8
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 7
- 229930003836 cresol Natural products 0.000 description 7
- 239000003063 flame retardant Substances 0.000 description 7
- 238000007788 roughening Methods 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- 238000012360 testing method Methods 0.000 description 7
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 239000000654 additive Substances 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- 238000007772 electroless plating Methods 0.000 description 6
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 5
- 239000006087 Silane Coupling Agent Substances 0.000 description 5
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
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- 229910000679 solder Inorganic materials 0.000 description 5
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- 229910052725 zinc Inorganic materials 0.000 description 5
- 239000011701 zinc Substances 0.000 description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 4
- 239000002671 adjuvant Substances 0.000 description 4
- 239000012752 auxiliary agent Substances 0.000 description 4
- 239000004305 biphenyl Chemical group 0.000 description 4
- 235000010290 biphenyl Nutrition 0.000 description 4
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 4
- 239000011651 chromium Substances 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 239000011256 inorganic filler Substances 0.000 description 4
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- 238000002156 mixing Methods 0.000 description 4
- 125000001624 naphthyl group Chemical group 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 4
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- 239000011574 phosphorus Substances 0.000 description 4
- 239000010959 steel Substances 0.000 description 4
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 229910017052 cobalt Inorganic materials 0.000 description 3
- 239000010941 cobalt Substances 0.000 description 3
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 3
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 3
- 230000001965 increasing effect Effects 0.000 description 3
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
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- 238000006116 polymerization reaction Methods 0.000 description 3
- 239000011135 tin Substances 0.000 description 3
- 229910052718 tin Inorganic materials 0.000 description 3
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 2
- JHWIEAWILPSRMU-UHFFFAOYSA-N 2-methyl-3-pyrimidin-4-ylpropanoic acid Chemical compound OC(=O)C(C)CC1=CC=NC=N1 JHWIEAWILPSRMU-UHFFFAOYSA-N 0.000 description 2
- VEORPZCZECFIRK-UHFFFAOYSA-N 3,3',5,5'-tetrabromobisphenol A Chemical group C=1C(Br)=C(O)C(Br)=CC=1C(C)(C)C1=CC(Br)=C(O)C(Br)=C1 VEORPZCZECFIRK-UHFFFAOYSA-N 0.000 description 2
- SJECZPVISLOESU-UHFFFAOYSA-N 3-trimethoxysilylpropan-1-amine Chemical compound CO[Si](OC)(OC)CCCN SJECZPVISLOESU-UHFFFAOYSA-N 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
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- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 2
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 2
- ZCDOYSPFYFSLEW-UHFFFAOYSA-N chromate(2-) Chemical compound [O-][Cr]([O-])(=O)=O ZCDOYSPFYFSLEW-UHFFFAOYSA-N 0.000 description 2
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- 239000007822 coupling agent Substances 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
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- 238000005566 electron beam evaporation Methods 0.000 description 2
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 2
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- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
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- RLSSMJSEOOYNOY-UHFFFAOYSA-N m-cresol Chemical compound CC1=CC=CC(O)=C1 RLSSMJSEOOYNOY-UHFFFAOYSA-N 0.000 description 2
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- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
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- KMUONIBRACKNSN-UHFFFAOYSA-N potassium dichromate Chemical compound [K+].[K+].[O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O KMUONIBRACKNSN-UHFFFAOYSA-N 0.000 description 2
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- 239000000377 silicon dioxide Substances 0.000 description 1
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- 229910052623 talc Inorganic materials 0.000 description 1
- 229940095064 tartrate Drugs 0.000 description 1
- RYCLIXPGLDDLTM-UHFFFAOYSA-J tetrapotassium;phosphonato phosphate Chemical compound [K+].[K+].[K+].[K+].[O-]P([O-])(=O)OP([O-])([O-])=O RYCLIXPGLDDLTM-UHFFFAOYSA-J 0.000 description 1
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- 125000003396 thiol group Chemical group [H]S* 0.000 description 1
- DQZNLOXENNXVAD-UHFFFAOYSA-N trimethoxy-[2-(7-oxabicyclo[4.1.0]heptan-4-yl)ethyl]silane Chemical compound C1C(CC[Si](OC)(OC)OC)CCC2OC21 DQZNLOXENNXVAD-UHFFFAOYSA-N 0.000 description 1
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 1
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Landscapes
- Laminated Bodies (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Adhesive Tapes (AREA)
- Adhesives Or Adhesive Processes (AREA)
Description
本発明は、接着補助剤付金属箔、及びそれを用いたプリント配線板およびその製造方法に関する。さらに、本発明は、接着補助剤付金属箔を用いた多層配線板、半導体チップ搭載基板及び半導体パッケージ基板に関する。 The present invention relates to a metal foil with an adhesion assistant, a printed wiring board using the same, and a method for manufacturing the same. Furthermore, the present invention relates to a multilayer wiring board, a semiconductor chip mounting substrate, and a semiconductor package substrate using a metal foil with an adhesion assistant.
近年、電子機器の小型化・軽量化・高速化の要求が高まり、プリント配線板の高密度化が進んでおり、近年、電気めっきを用いたセミアディティブ法によるプリント配線板の製造方法が注目されている。このセミアディティブ法は、例えば、特許文献1にあるように回路を形成したい樹脂表面にレーザー等でIVHとなる穴を形成した後に、化学粗化やプラズマ処理等により数μmの凹凸を樹脂上に形成し、Pd触媒を付与し、1μm程度の無電解めっきを行い、パターン電気めっきレジストを形成し、パターン電気めっきにより回路形成を行った後にレジスト及び回路以外の部分に存在する給電層を除去する手法であり、サイドエッチングの大きいサブトラクティブ法に比べ、より微細な配線形成を可能とするものである。さらに、樹脂付金属箔上にセミアディティブ法により回路形成を行う方法もある。近年は金属箔の厚みを薄くするために、例えば、特許文献2にあるような支持金属箔上に5μm以下の厚みの金属箔が形成されている引き剥がし可能なタイプの金属箔が用いられる。この手法では、絶縁樹脂層の表面に無電解めっきを施す必要がなく、より信頼性の高いプリント配線板を作製できる。また、例えば、特許文献3にあるようにポリイミドフィルムの片面に電子ビーム蒸着装置を用いて1μm程度の銅層を形成し、接着剤やプリプレグを介して内層回路に積層し、給電層とする方法もある。 In recent years, there has been an increasing demand for smaller, lighter, and faster electronic devices, and the density of printed wiring boards has been increasing. In recent years, a method for manufacturing printed wiring boards using a semi-additive method using electroplating has attracted attention. ing. In this semi-additive method, for example, as described in Patent Document 1, after forming a hole to be IVH with a laser or the like on the surface of a resin on which a circuit is to be formed, unevenness of several μm is formed on the resin by chemical roughening or plasma treatment. Form, apply Pd catalyst, perform electroless plating of about 1μm, form pattern electroplating resist, form circuit by pattern electroplating, and then remove power supply layer existing in parts other than resist and circuit This is a technique that enables finer wiring formation than a subtractive method with large side etching. Further, there is a method of forming a circuit on a metal foil with resin by a semi-additive method. In recent years, in order to reduce the thickness of the metal foil, for example, a peelable type metal foil in which a metal foil having a thickness of 5 μm or less is formed on a supporting metal foil as described in Patent Document 2 is used. In this method, it is not necessary to perform electroless plating on the surface of the insulating resin layer, and a printed wiring board with higher reliability can be manufactured. In addition, for example, as disclosed in Patent Document 3, a copper layer having a thickness of about 1 μm is formed on one surface of a polyimide film using an electron beam evaporation apparatus, and is laminated on an inner layer circuit via an adhesive or a prepreg to form a power feeding layer. There is also.
上記公知の方法の内、数μmの凹凸を樹脂上に形成する方法や樹脂付金属箔上にセミアディティブ法により回路形成を行う方法は、粗化形状が微細配線形成の妨げになるだけでなく、粗化形状により電気特性が低下する不具合が発生する。また、ポリイミドフィルムの片面に電子ビーム蒸着装置を用いて1μm程度の銅層を形成し、接着剤やプリプレグを介して内層回路に積層し、給電層とする方法は粗化形状を形成しないため、微細配線形成や電気特性上有利であるが、基板自体が高価になってしまい汎用性が乏しい。 Among the above known methods, the method of forming unevenness of several μm on the resin and the method of forming the circuit on the resin-added metal foil by the semi-additive method not only hinders the formation of fine wiring, but also the roughened shape. In addition, the roughened shape causes a problem that the electrical characteristics are degraded. In addition, a method of forming a copper layer of about 1 μm on one side of a polyimide film using an electron beam evaporation apparatus and laminating it on an inner layer circuit via an adhesive or a prepreg, and forming a power feeding layer does not form a rough shape, Although it is advantageous in terms of formation of fine wiring and electrical characteristics, the substrate itself becomes expensive, and versatility is poor.
一方,粗化処理を施していない金属箔を用いると,微細配線形成や電気特性の向上が可能であるが,金属箔と絶縁樹脂の接着力が著しく低下するため,実用性に乏しい。さらに金属箔と絶縁樹脂間の接着力だけでなく,多層板作製する際に内層板を回路加工する必要があるが,回路加工したことにより剥き出しになった平滑な絶縁樹脂と多層化プリプレグの界面の接着力が同様に低下することが明らかになった。 On the other hand, if a metal foil that has not been roughened is used, fine wiring can be formed and electrical characteristics can be improved. However, since the adhesive strength between the metal foil and the insulating resin is significantly reduced, the practicality is poor. In addition to the adhesive strength between the metal foil and the insulating resin, it is necessary to process the inner layer board when manufacturing the multilayer board. The interface between the smooth insulating resin and the multilayered prepreg exposed by the circuit processing It became clear that the adhesive strength of the same declined as well.
本発明は公知の方法の不具合点を解消し、微細配線形成や電気特性、製造コストの上で有利な配線板を提供するものであり、尚且つ信頼性が高く、高周波特性が良好な配線板を提供するものである。 The present invention solves the problems of the known methods and provides a wiring board that is advantageous in terms of formation of fine wiring, electrical characteristics, and manufacturing cost, and has high reliability and good high-frequency characteristics. Is to provide.
本発明は、表面の十点平均粗さがRz=2.0μm以下の金属箔上に,(A)アラルキル型エポキシ樹脂と(B)エポキシ樹脂硬化剤としてフェノール性水酸基を有するアラルキル型樹脂とを含むエポキシ樹脂組成物からなる厚さ0.1〜10μmの接着補助剤層を有する接着補助剤付金属箔に関する。(B)エポキシ樹脂硬化剤として、さらに,フェノール性水酸基を有するトリアジン環含有ノボラック型樹脂を3〜50当量%含んでいてもよい。 The present invention includes (A) an aralkyl type epoxy resin and (B) an aralkyl type resin having a phenolic hydroxyl group as an epoxy resin curing agent on a metal foil having a surface ten-point average roughness of Rz = 2.0 μm or less. The present invention relates to a metal foil with an adhesion assistant having an adhesion assistant layer having a thickness of 0.1 to 10 μm made of an epoxy resin composition. (B) As an epoxy resin hardening | curing agent, you may contain 3-50 equivalent% of triazine ring containing novolak-type resin which has phenolic hydroxyl group further.
エポキシ樹脂組成物に、さらに、(C)ゴム成分を含んでいてもよく、この場合には、(A)成分100重量部に対し (C)成分が0.5〜25重量部であることが好ましい。(C)成分は、アクリロニトリルブタジエンゴム,カルボン酸変性アクリロニトリルブタジエンゴム,カルボン酸変性アクリロニトリルブタジエンゴム粒子,ブタジエンゴム−アクリル樹脂のコアシェル粒子,ポリビニルアセタール樹脂,カルボン酸変性ポリビニルアセタール樹脂から選択される少なくとも一種を含むことが好ましい。 The epoxy resin composition may further contain (C) a rubber component. In this case, the component (C) is preferably 0.5 to 25 parts by weight per 100 parts by weight of the (A) component. Component (C) is at least one selected from acrylonitrile butadiene rubber, carboxylic acid modified acrylonitrile butadiene rubber, carboxylic acid modified acrylonitrile butadiene rubber particles, butadiene rubber-acrylic resin core shell particles, polyvinyl acetal resin, and carboxylic acid modified polyvinyl acetal resin. It is preferable to contain.
接着補助剤付金属箔に含まれる金属箔の表面は、粗化処理が施されていないことが好ましい。金属箔は、ニッケル、錫、亜鉛、クロム、モリブデン、コバルト及びこれらの酸化物から選択される少なくとも一種により防錆処理された銅箔であることが好ましい。 It is preferable that the surface of the metal foil contained in the metal foil with an adhesion assistant is not roughened. The metal foil is preferably a copper foil that has been rust-prevented with at least one selected from nickel, tin, zinc, chromium, molybdenum, cobalt, and oxides thereof.
また、本発明は、上記の接着補助剤付金属箔を用いて,作製されたプリント配線板に関する。さらに、本発明は、上記の接着補助剤付金属箔を用いたプリント配線板の製造方法に関する。 Moreover, this invention relates to the printed wiring board produced using said metal foil with an adhesion adjuvant. Furthermore, this invention relates to the manufacturing method of the printed wiring board using said metal foil with an adhesion adjuvant.
本発明の接着補助剤付金属箔によると、微細配線形成や電気特性、製造コストの上で有利であって、尚且つ信頼性が高く、高周波特性が良好な配線板を提供することが可能となる。
また、本発明の接着補助剤付金属箔を使用することにより,微細配線の形成が可能でありながら,通常の銅箔を使用した場合とほぼ同等の引き剥がし強さを有することができ,かつ吸湿耐熱性に優れた多層配線板を作製することができる。
According to the metal foil with an adhesion aid of the present invention, it is advantageous in terms of fine wiring formation, electrical characteristics, and manufacturing cost, and it is possible to provide a wiring board with high reliability and good high frequency characteristics. Become.
In addition, by using the metal foil with an adhesion aid of the present invention, it is possible to form a fine wiring, while having a peeling strength almost equal to that when using a normal copper foil, and A multilayer wiring board having excellent moisture absorption heat resistance can be produced.
本発明に用いる金属箔の表面粗さはJISB0601に示す10点平均粗さ(Rz)が両面とも2.0μm以下であることが電気特性上好ましい。金属箔には銅箔、ニッケル箔、アルミ箔などを用いることができるが、通常は銅箔を使用する。金属箔が銅箔の場合には、銅箔の製造条件は、硫酸銅浴の場合、硫酸50〜100g/L、銅30〜100g/L、液温20℃〜80℃、電流密度0.5〜100A/dm2の条件、ピロリン酸銅浴の場合、ピロリン酸カリウム100〜700g/L、銅10〜50g/L、液温30℃〜60℃、pH8〜12、電流密度1〜10A/dm2の条件が一般的によく用いられ、銅の物性や平滑性を考慮して各種添加剤をいれる場合もある。金属箔は,通常粗し処理とよばれる粗面化処理を行うが、本発明では実質的な粗化処理を行わず、金属箔が足を有さないことを特徴とする。「金属箔が足を有さない」とは、金属箔の凹凸が少ないことを意味する。金属箔の凹凸が少ないと、エッチングの際に樹脂上の回路がない部分に銅箔残さが残らない。 As for the surface roughness of the metal foil used in the present invention, the 10-point average roughness (Rz) shown in JISB0601 is preferably 2.0 μm or less on both sides in terms of electrical characteristics. Although copper foil, nickel foil, aluminum foil, etc. can be used for metal foil, copper foil is usually used. When the metal foil is a copper foil, the production conditions of the copper foil are 50 to 100 g / L sulfuric acid, 30 to 100 g / L copper, 20 to 80 ° C. liquid temperature, and 0.5 to 100 A current density in the case of a copper sulfate bath. / Dm 2 conditions, in the case of a copper pyrophosphate bath, potassium pyrophosphate 100-700 g / L, copper 10-50 g / L, liquid temperature 30 ° C.-60 ° C., pH 8-12, current density 1-10 A / dm 2 Conditions are generally used, and various additives may be added in consideration of the physical properties and smoothness of copper. The metal foil is usually subjected to a roughening process called a roughening process, but the present invention is characterized in that a substantial roughening process is not performed and the metal foil has no legs. “The metal foil does not have legs” means that the metal foil has few irregularities. If the metal foil has few irregularities, the copper foil residue does not remain in a portion where there is no circuit on the resin during etching.
また,Rz=2.0μm以下であれば,金属箔の粗化処理がされていない光沢面を用いることもできる。 Moreover, if Rz = 2.0 μm or less, a glossy surface on which the metal foil is not roughened can be used.
金属箔の厚みは,特に限定されるものではない。一般にプリント配線板に用いられている,厚み105μm以下の金属箔で構わないが,表面粗さRzが両面とも2.0μm以下である金属箔を用いると良い。より微細配線を形成するためには、好ましくは、厚みが5.0μm以下のピーラブルタイプであり、かつ表面粗さRzが両面とも2.0μm以下である金属箔を用いると良い。尚、ピーラブルタイプの代わりに,アルミキャリアやニッケルキャリアを有するようなエッチャブルタイプの金属箔を用いることもできる。 The thickness of the metal foil is not particularly limited. A metal foil having a thickness of 105 μm or less that is generally used for a printed wiring board may be used, but a metal foil having a surface roughness Rz of 2.0 μm or less on both sides may be used. In order to form finer wiring, it is preferable to use a metal foil of a peelable type having a thickness of 5.0 μm or less and a surface roughness Rz of 2.0 μm or less on both sides. Instead of the peelable type, an etchable type metal foil having an aluminum carrier or a nickel carrier can also be used.
金属箔の樹脂接着面に行う防錆処理は、ニッケル、錫、亜鉛、クロム、モリブデン、コバルト及びこれらの酸化物のいずれか、若しくはそれらの合金を用いて行うことができるが、亜鉛及びクロムから選択される少なくとも一種により行われることが好ましい。これらはスパッタや電気めっき、無電解めっきにより金属箔上に薄膜形成を行うものであるが、コストの面から電気めっきが好ましい。具体的にはめっき層にニッケル、錫、亜鉛、クロム、モリブデン、コバルトの内一種類以上の金属塩を含むめっき層を用いてめっきを行う。後の信頼性等の観点から、亜鉛を含むめっきを行うのが好適である。金属イオンの析出を容易にするためにクエン酸塩、酒石酸塩、スルファミン酸等の錯化剤を必要量添加することも出来る。めっき液は通常酸性領域で用い、室温〜80℃の温度で行う。めっきは通常電流密度0.1〜10A/dm2、通電時間1〜60秒、好ましくは1〜30秒の範囲から適宜選択する。防錆処理金属の量は、金属の種類によって異なるが、合計で10〜2000μg/dm2が好適である。防錆処理が厚すぎるとエッチング阻害と電気特性の低下を引き起こし、薄すぎると樹脂とのピール強度低下の要因となりうる。 Rust prevention treatment performed on the resin adhesive surface of the metal foil can be performed using nickel, tin, zinc, chromium, molybdenum, cobalt and any of these oxides, or alloys thereof, but from zinc and chromium It is preferable to be performed by at least one selected. In these methods, a thin film is formed on a metal foil by sputtering, electroplating or electroless plating, but electroplating is preferable from the viewpoint of cost. Specifically, plating is performed using a plating layer containing one or more metal salts of nickel, tin, zinc, chromium, molybdenum, and cobalt. From the viewpoint of reliability and the like later, it is preferable to perform plating containing zinc. In order to facilitate the precipitation of metal ions, a complexing agent such as citrate, tartrate or sulfamic acid can be added in the required amount. The plating solution is usually used in an acidic region and is performed at a temperature of room temperature to 80 ° C. The plating is appropriately selected from the range of usually a current density of 0.1 to 10 A / dm 2 and a current application time of 1 to 60 seconds, preferably 1 to 30 seconds. The amount of the rust-proofing metal varies depending on the type of metal, but is preferably 10 to 2000 μg / dm 2 in total. If the rust preventive treatment is too thick, it may cause etching inhibition and deterioration of electrical characteristics, and if it is too thin, it may cause a reduction in peel strength with the resin.
さらに、防錆処理上にクロメート処理層が形成されていると樹脂とのピール強度低下を抑制できるため有用である。具体的には六価クロムイオンを含む水溶液を用いて行われる。クロメート処理は単純な浸漬処理でも可能であるが、好ましくは陰極処理で行う。重クロム酸ナトリウム0.1〜50g/L、pH1〜13、浴温0〜60℃、電流密度0.1〜5A/dm2、電解時間0.1〜100秒の条件で行うのが良い。重クロム酸ナトリウムの代わりにクロム酸或いは重クロム酸カリウムを用いて行うことも出来る。 Furthermore, if a chromate treatment layer is formed on the rust prevention treatment, it is useful because a reduction in peel strength with the resin can be suppressed. Specifically, it is performed using an aqueous solution containing hexavalent chromium ions. The chromate treatment can be performed by a simple immersion treatment, but is preferably performed by a cathode treatment. It is good to carry out under conditions of sodium dichromate 0.1-50 g / L, pH 1-13, bath temperature 0-60 ° C., current density 0.1-5 A / dm 2 , electrolysis time 0.1-100 seconds. It can also carry out using chromic acid or potassium dichromate instead of sodium dichromate.
本発明においては、金属箔の最外層にさらにシランカップリング剤が吸着していることが好ましい。シランカップリング剤としては例えば、3-グリシドキシプロピルトリメトキシシラン、2-(3,4−エポキシシクロヘキシル)エチルトリメトキシシラン等のエポキシ官能性シラン、3−アミノプロピルトリメトキシシラン、N−2−(アミノエチル)3−アミノプロピルトリメトキシシラン、N−2−(アミノエチル)3−アミノプロピルメチルジメトキシシラン等のアミノ官能性シラン、ビニルトリメトキシシラン、ビニルフェニルトリメトキシシラン、ビニルトリス(2−メトキシエトキシ)シラン等のオレフィン官能性シラン、3−アクリロキシプロピルトリメトキシシラン等のアクリル官能性シラン、3−メタクリロキシプロピルトリメトキシシラン等のメタクリル官能性シラン、3−メルカプトプロピルトリメトキシシラン等のメルカプト官能性シランなどが用いられる。後に塗工する接着補助剤との相性を考えると、分子内にエポキシ基あるいはアミノ基を有することが望ましい。これらは単独で用いることもできるし、複数を混合して用いても良い。 In the present invention, it is preferable that a silane coupling agent is further adsorbed on the outermost layer of the metal foil. Examples of the silane coupling agent include 3-glycidoxypropyltrimethoxysilane, epoxy-functional silanes such as 2- (3,4-epoxycyclohexyl) ethyltrimethoxysilane, 3-aminopropyltrimethoxysilane, and N-2. Amino-functional silanes such as-(aminoethyl) 3-aminopropyltrimethoxysilane, N-2- (aminoethyl) 3-aminopropylmethyldimethoxysilane, vinyltrimethoxysilane, vinylphenyltrimethoxysilane, vinyltris (2- Olefin functional silane such as methoxyethoxy) silane, acrylic functional silane such as 3-acryloxypropyltrimethoxysilane, methacryl functional silane such as 3-methacryloxypropyltrimethoxysilane, 3-mercaptopropyltrimethoxysilane, etc. Mercapto functionality Orchids, such as is used. Considering compatibility with an adhesion aid to be applied later, it is desirable to have an epoxy group or an amino group in the molecule. These can be used alone or in combination.
これらのカップリング剤は、水などの溶媒に0.1〜15g/Lの濃度で溶解させて室温〜50℃の温度で金属箔に塗布したり、電着させたりして吸着させる。これらのシランカップリング剤は金属箔表面の防錆金属の水酸基と縮合結合することで皮膜を形成する。シランカップリング処理後は加熱、紫外線照射等によって安定的結合を形成する。加熱であれば100〜200℃の温度で2〜60秒乾燥させる。紫外線照射であれば200〜400nm、200〜2500mJ/cm2の範囲で行う。 These coupling agents are dissolved in a solvent such as water at a concentration of 0.1 to 15 g / L and applied to a metal foil at a temperature of room temperature to 50 ° C. or electrodeposited to be adsorbed. These silane coupling agents form a film by condensation bonding with a hydroxyl group of a rust-preventing metal on the surface of the metal foil. After the silane coupling treatment, a stable bond is formed by heating, ultraviolet irradiation or the like. If heated, it is dried at a temperature of 100 to 200 ° C. for 2 to 60 seconds. In the case of ultraviolet irradiation, it is carried out in the range of 200 to 400 nm and 200 to 2500 mJ / cm2.
シランカップリング剤処理を行った金属箔上にエポキシ樹脂組成物からなる接着補助剤を塗布する。塗布する厚みは0.1〜10μmとなることが望ましく、2.0〜5.0μmの範囲であることが更に望ましい。0.1μm未満では,その接着補助効果が発現できない場合があり,10μmを超えると,層間絶縁材料の有する耐熱性や誘電特性等の特徴を低下させる原因となる場合がある。 An adhesion aid made of an epoxy resin composition is applied on the metal foil that has been treated with the silane coupling agent. The applied thickness is preferably 0.1 to 10 μm, and more preferably 2.0 to 5.0 μm. If it is less than 0.1 μm, the adhesion assisting effect may not be manifested, and if it exceeds 10 μm, it may cause deterioration in characteristics such as heat resistance and dielectric properties of the interlayer insulating material.
本発明の接着補助剤は、(A)アラルキル型エポキシ樹脂と、(B)エポキシ樹脂硬化剤としてフェノール性水酸基を有するアラルキル型樹脂とを含むエポキシ樹脂組成物である。 The adhesion aid of the present invention is an epoxy resin composition comprising (A) an aralkyl type epoxy resin and (B) an aralkyl type resin having a phenolic hydroxyl group as an epoxy resin curing agent.
(A)成分のアラルキル型エポキシ樹脂は,化学式1で表される。ここで,X及びYは,ベンゼン環,ナフタレン環,ビフェニル構造等の芳香族環を表し,またX及びYの芳香族環の水素が置換されていても構わない。置換基としては、例えば、メチル、エチル、プロピル、フェニル基が挙げられる。nは繰返し単位を表しその制限は特にない。
アラルキル型エポキシ樹脂の具体例として、以下の例には限定はされないが、化学式2〜4が挙げられる。 Specific examples of the aralkyl type epoxy resin include, but are not limited to, the following formulas 2 to 4.
例えば化学式2:
(式中、nは、1〜5を示す。)が挙げられるが,特に、分子中にビフェニル構造の芳香族環を含有したエポキシ樹脂(化学式3):
(式中、nは、1〜5を示す。)や,分子中にナフタレン構造の芳香族環を含有したエポキシ樹脂(化学式4):
(式中、nは、1〜5を示す。)が,金属箔の引き剥がし強さや耐熱性が優れているため有効である。 (In the formula, n represents 1 to 5.) However, it is effective because the peel strength and heat resistance of the metal foil are excellent.
これらの樹脂は単独で、または2種類以上混合して用いることもできる。また,(A)アラルキル型エポキシ樹脂に加えて,エポキシ樹脂の総量の50重量%以下の範囲で,ビスフェノールA型エポキシ樹脂や,フェノールノボラック型エポキシ樹脂,ゴム変性エポキシ樹脂等の,他のエポキシ樹脂を併用しても構わない。 These resins can be used alone or in admixture of two or more. In addition to (A) aralkyl type epoxy resin, other epoxy resins such as bisphenol A type epoxy resin, phenol novolac type epoxy resin, rubber-modified epoxy resin, etc. within 50% by weight or less of the total amount of epoxy resin May be used in combination.
(A)アラルキル型エポキシ樹脂の市販品の例としては、三井化学株式会社製のEXL-3Lや日本化薬株式会社製のNC−3000S、NC−3000S−H,新日鐵化学株式会社製のESN−170,ESN−480等が挙げられる。 (A) Examples of commercially available aralkyl epoxy resins include EXL-3L manufactured by Mitsui Chemicals, NC-3000S and NC-3000S-H manufactured by Nippon Kayaku Co., Ltd., manufactured by Nippon Steel Chemical Co., Ltd. ESN-170, ESN-480, etc. are mentioned.
(B)エポキシ樹脂硬化剤であるフェノール性の水酸基を有するアラルキル型樹脂は,化学式5で表される。ここで,X及びYは,ベンゼン環,ナフタレン環,ビフェニル構造等の芳香族環を表し,またX及びYの芳香族環の水素が置換されていてもよい。置換基としては、例えば、メチル、エチル、プロピル、フェニル基が挙げられる。nは繰返し単位を表しその制限は特にない。
フェノール性水酸基を有するアラルキル型樹脂の具体例としては、以下の例には限定されないが、化学式6〜8が挙げられる。 Specific examples of the aralkyl type resin having a phenolic hydroxyl group include, but are not limited to, the following formulas 6 to 8.
化学式6:
(式中、nは、1〜5を示す)が挙げられるが,特に、分子中にビフェニル構造の芳香族環を含有したフェノール樹脂(化学式7):
(式中、nは、1〜5を示す)や,ナフタレン構造の芳香族環が含有したナフトール樹脂 (化学式8):
(式中、nは、1〜5を示す)は,金属箔の引き剥がし強さや耐熱性が優れているため有効である。これらの樹脂は単独で、または2種類以上混合して用いることもできる。また,(B)成分として,50重量%以下の範囲で,ビスフェノールA等の二官能フェノールや,ノボラック型フェノール樹脂,アミノ樹脂等の,他のエポキシ樹脂硬化剤を併用しても構わない。 (In the formula, n represents 1 to 5) is effective because the peel strength and heat resistance of the metal foil are excellent. These resins can be used alone or in admixture of two or more. In addition, as the component (B), other epoxy resin curing agents such as bifunctional phenols such as bisphenol A, novolac type phenol resins, and amino resins may be used in the range of 50% by weight or less.
フェノール性水酸基を有するアラルキル型樹脂の市販品の例としては,三井化学株式会社製XLC-3L,明和化成株式会社製HEM-7851,新日鉄化学株式会社製SN-170,SN-480などが挙げられる。 Examples of commercially available aralkyl-type resins having a phenolic hydroxyl group include XLC-3L manufactured by Mitsui Chemicals, HEM-7851 manufactured by Meiwa Kasei Co., Ltd., SN-170 and SN-480 manufactured by Nippon Steel Chemical Co., Ltd. .
(B)成分として、上記のフェノール性水酸基を有するアラルキル型樹脂に、フェノール性水酸基を有するトリアジン環含有ノボラック型樹脂を併用することにより,金属箔の引き剥がし強さが向上し,さらに好ましい。フェノール性水酸基を有するトリアジン環含有ノボラック型樹脂の添加量は,エポキシ樹脂硬化剤のうち3〜50当量%にすると,耐熱性を維持したまま金属箔の引き剥がし強さの向上が可能であり,より好ましい。 As the component (B), it is more preferable to use a triazine ring-containing novolac resin having a phenolic hydroxyl group in combination with the aralkyl type resin having a phenolic hydroxyl group as described above, thereby improving the peel strength of the metal foil. When the addition amount of the triazine ring-containing novolak resin having a phenolic hydroxyl group is 3 to 50 equivalent% of the epoxy resin curing agent, it is possible to improve the peeling strength of the metal foil while maintaining the heat resistance. More preferred.
本発明における、フェノール性水酸基を有するトリアジン環含有ノボラック型樹脂とは、ノボラック型フェノール樹脂等の主鎖にトリアジン環を含むノボラック型フェノール樹脂等を示し,トリアジン環を含むクレゾールノボラック型フェノール樹脂でも構わない。窒素含有量は、トリアジン環含有ノボラック樹脂中、10〜25重量%が好ましく、より好ましくは12〜19重量%である。分子中の窒素含有量がこの範囲であると、誘電損失が大きくなりすぎることもなく、接着補助剤をワニスとする場合に、溶剤への溶解度が適切で、未溶解物の残存量が抑えられる。トリアジン環含有ノボラック型樹脂は、数平均分子量が、300〜1000であるものを用いることができる。これらは単独でも、2種以上を組み合せて用いてもよい。 In the present invention, the triazine ring-containing novolak type resin having a phenolic hydroxyl group refers to a novolak type phenol resin containing a triazine ring in the main chain, such as a novolak type phenol resin, and may be a cresol novolak type phenol resin containing a triazine ring. Absent. The nitrogen content is preferably 10 to 25% by weight, more preferably 12 to 19% by weight in the triazine ring-containing novolak resin. When the nitrogen content in the molecule is within this range, the dielectric loss does not increase too much, and when the adhesion aid is used as a varnish, the solubility in the solvent is appropriate, and the remaining amount of undissolved substances can be suppressed. . As the triazine ring-containing novolac resin, one having a number average molecular weight of 300 to 1,000 can be used. These may be used alone or in combination of two or more.
なお、トリアジン環含有ノボラック型フェノール樹脂は、フェノールとアデヒドとトリアジン環含有化合物を、pH5〜9の条件下で反応させて得ることができる。フェノールに換えクレゾールを用いるとトリアジン環含有クレゾールノボラック型フェノール樹脂となる。クレゾールは、o−、m−、p−クレゾールのいずれも使用することができ、トリアジン環含有化合物としてはメラミン、グアナミン及びその誘導体、シアヌル酸及びその誘導体を使用することができる。 The triazine ring-containing novolac type phenol resin can be obtained by reacting phenol, aldehyde, and a triazine ring-containing compound under conditions of pH 5-9. When cresol is used instead of phenol, a triazine ring-containing cresol novolac type phenol resin is obtained. Any of o-, m-, and p-cresol can be used as the cresol, and melamine, guanamine and derivatives thereof, cyanuric acid and derivatives thereof can be used as the triazine ring-containing compound.
市販品としては、以下の例には限定されないが、大日本インキ化学工業株式会社製のトリアジン環含有クレゾールノボラック型フェノール樹脂フェノライトLA−3018(窒素含有量18重量%)が挙げられる。これらの樹脂は単独で、または2種類以上混合して用いることもできる。 Although not limited to the following examples as a commercial item, Dainippon Ink Chemical Co., Ltd. triazine ring containing cresol novolac type phenol resin phenolite LA-3018 (nitrogen content 18 weight%) is mentioned. These resins can be used alone or in admixture of two or more.
(C)ゴム成分は,特に制限はないが,耐熱性を低下させないために,架橋ゴム粒子であることが好ましく、アクリロニトリルブタジエンゴム粒子,カルボン酸変性アクリロニトリルブタジエンゴム粒子,ブタジエンゴム−アクリル樹脂のコアシェル粒子から選択される少なくとも一種からなることが好ましい。 (C) The rubber component is not particularly limited, but is preferably a crosslinked rubber particle so as not to lower the heat resistance, and is preferably an acrylonitrile butadiene rubber particle, a carboxylic acid modified acrylonitrile butadiene rubber particle, a butadiene rubber-acrylic resin core shell. It is preferable to consist of at least one selected from particles.
アクリロニトリルブタジエンゴム粒子とは、アクリロニトリル、ブタジエンを共重合させ、かつ共重合する段階で、部分的に架橋させ、粒子状にしたものである。またアクリル酸,メタクリル酸等のカルボン酸を併せて共重合することにより,カルボン酸変性アクリロニトリルブタジエンゴム粒子を得ることも可能である。ブタジエンゴム−アクリル樹脂のコアシェル粒子は,乳化重合でブタジエン粒子を重合させ,引き続きアクリル酸エステル,アクリル酸等のモノマーを添加して重合を続ける二段階の重合方法で得ることができる。粒子の大きさは、一次平均粒子径で、50nm〜1μmにすることができ、好ましくは、50〜100nmである。ゴム粒子は、単独でも、2種以上を組み合せて用いてもよい。 The acrylonitrile butadiene rubber particles are those obtained by copolymerizing acrylonitrile and butadiene and partially cross-linking at the stage of copolymerization. It is also possible to obtain carboxylic acid-modified acrylonitrile butadiene rubber particles by copolymerizing together carboxylic acids such as acrylic acid and methacrylic acid. The core-shell particles of butadiene rubber-acrylic resin can be obtained by a two-stage polymerization method in which butadiene particles are polymerized by emulsion polymerization, followed by addition of monomers such as acrylic acid ester and acrylic acid. The size of the particles can be 50 nm to 1 μm, preferably 50 to 100 nm, as a primary average particle size. The rubber particles may be used alone or in combination of two or more.
例えば、カルボン酸変性アクリロニトリルブタジエンゴム粒子の市販品としてはJSR株式会社製のXER−91が挙げられ,ブタジエンゴム−アクリル樹脂のコアシェル粒子としては呉羽化学工業株式会社製のEXL−2655や武田薬品工業株式会社のAC−3832が挙げられる。 For example, as commercial products of carboxylic acid-modified acrylonitrile butadiene rubber particles, XER-91 manufactured by JSR Corporation can be mentioned, and as core shell particles of butadiene rubber-acrylic resin, EXL-2655 manufactured by Kureha Chemical Industry Co., Ltd. AC-3832 of a corporation | Co., Ltd. is mentioned.
(C)成分としてポリビニルアセタール樹脂,カルボン酸変性ポリビニルアセタール樹脂などを使用することも可能である。 As the component (C), a polyvinyl acetal resin, a carboxylic acid-modified polyvinyl acetal resin, or the like can be used.
ポリビニルアセタール樹脂の種類、水酸基量、アセチル基量は特に限定されないが、重合度は1000〜2500のものが好ましい。この範囲にあると、はんだ耐熱性が確保でき、また、ワニスの粘度、取り扱い性も良好である。ここでポリビニルアセタール樹脂の数平均重合度は、たとえば、その原料であるポリ酢酸ビニルの数平均分子量(ゲルパーミエーションクロマトグラフィによる標準ポリスチレンの検量線を用いて測定する)から決定することができる。また、カルボン酸変性品などを用いることもできる。 The kind of polyvinyl acetal resin, the amount of hydroxyl groups, and the amount of acetyl groups are not particularly limited, but those having a polymerization degree of 1000 to 2500 are preferred. Within this range, solder heat resistance can be secured, and the viscosity and handling properties of the varnish are good. Here, the number average degree of polymerization of the polyvinyl acetal resin can be determined, for example, from the number average molecular weight of polyvinyl acetate as a raw material (measured using a standard polystyrene calibration curve by gel permeation chromatography). Moreover, a carboxylic acid modified product etc. can also be used.
ポリビニルアセタール樹脂は、たとえば、積水化学工業(株)製の商品名、エスレックBX−1、BX−2、BX−5、BX−55、BX−7、BH−3、BH−S、KS−3Z、KS−5、KS−5Z、KS−8、KS−23Z、電気化学工業(株)製の商品名、電化ブチラール4000−2、5000A、6000C、6000EP等を使用することができる。これらの樹脂は単独で、または2種類以上混合して用いることもできる。 Polyvinyl acetal resin is, for example, a trade name, SLECK BX-1, BX-2, BX-5, BX-55, BX-7, BH-3, BH-S, KS-3Z, manufactured by Sekisui Chemical Co., Ltd. KS-5, KS-5Z, KS-8, KS-23Z, trade names manufactured by Denki Kagaku Kogyo Co., Ltd., electrified butyral 4000-2, 5000A, 6000C, 6000EP, and the like can be used. These resins can be used alone or in admixture of two or more.
(C)成分として架橋ゴム粒子とポリビニルアセタール樹脂を併用すると金属箔の引き剥がし強さや化学粗化後の無電解めっきの引き剥がし強さが向上しさらに好ましい。 When the crosslinked rubber particles and the polyvinyl acetal resin are used in combination as the component (C), the peeling strength of the metal foil and the peeling strength of the electroless plating after chemical roughening are further improved.
(C)成分の配合量は、(A)成分の100重量部に対し,(C)成分が0.5〜25重量部であることが好ましい。(C)成分が0.5重量部より少ないと,金属箔の引きはがし強さや化学粗化後の無電解めっきの引きはがし強さが低く,25重量部を超えるとはんだ耐熱性等や絶縁信頼性が低下する場合がある。特に架橋ゴム粒子とポリビニルアセタール樹脂とが、(A)成分に対して、それぞれ1重量部以上含まれると,金属箔の引き剥がし強さや化学粗化後の無電解めっきの引き剥がし強さが向上し,さらに好ましい。 The amount of component (C) is preferably 0.5 to 25 parts by weight of component (C) with respect to 100 parts by weight of component (A). If the component (C) is less than 0.5 parts by weight, the peel strength of the metal foil and the peel strength of the electroless plating after chemical roughening are low, and if it exceeds 25 parts by weight, solder heat resistance and insulation reliability are reduced. May decrease. In particular, when 1 part by weight or more of each of the crosslinked rubber particles and the polyvinyl acetal resin is contained relative to the component (A), the peeling strength of the metal foil and the peeling strength of the electroless plating after chemical roughening are improved. And more preferable.
さらに接着補助層のエポキシ樹脂組成物に,エポキシ樹脂の(D)反応促進剤を添加したほうが,より好ましい。(D)成分として、どのようなものを用いても構わないが,潜在性の熱硬化剤である各種イミダゾール類やBF3アミン錯体を配合することが好ましい。接着補助剤の保存安定性、Bステージにした際の取り扱い性及びはんだ耐熱性の点から、2−フェニルイミダゾール、2−エチル−4−メチルイミダゾール、1−シアノエチル−2−フェニルイミダゾリウムトリメリテートが好ましい。 Furthermore, it is more preferable to add the epoxy resin (D) reaction accelerator to the epoxy resin composition of the adhesion auxiliary layer. Any component may be used as the component (D), but it is preferable to mix various imidazoles and BF 3 amine complexes which are latent thermosetting agents. 2-Phenylimidazole, 2-ethyl-4-methylimidazole, 1-cyanoethyl-2-phenylimidazolium trimellitate from the standpoint of storage stability of adhesion aids, handleability at B-stage and solder heat resistance Is preferred.
(D)成分の配合量は、接着補助剤中の(A)エポキシ樹脂100重量部に対して、0.1〜5重量部の範囲が好ましく,0.3〜1重量部の範囲がより好ましい。これらの範囲にあると、十分なはんだ耐熱性、良好な接着補助剤の保存安定性及びBステージにした際の良好な取り扱い性が得られる。 The amount of component (D) is preferably in the range of 0.1 to 5 parts by weight and more preferably in the range of 0.3 to 1 part by weight with respect to 100 parts by weight of the epoxy resin (A) in the adhesion assistant. Within these ranges, sufficient solder heat resistance, good storage stability of the adhesion aid, and good handleability when using the B stage can be obtained.
本発明の接着補助剤には難燃性を向上させるため、(E)難燃剤を含有させてもよい。 (E)成分として臭素系難燃剤やリン系難燃剤があるが,どのような難燃剤を用いても構わない。 In order to improve flame retardancy, the adhesion aid of the present invention may contain (E) a flame retardant. There are brominated flame retardants and phosphorus flame retardants as component (E), but any flame retardant may be used.
(E)成分として例えば,テトラブロモビスフェノールA骨格を有する臭素化エポキシ樹脂やテトラブロモビスフェノールA等のエポキシ樹脂硬化剤などがある。またリン系の難燃剤として,同様にリン含有エポキシ樹脂やフェノール性水酸基含有のリン化合物などがある。 Examples of the component (E) include brominated epoxy resins having a tetrabromobisphenol A skeleton and epoxy resin curing agents such as tetrabromobisphenol A. Similarly, phosphorus-based flame retardants include phosphorus-containing epoxy resins and phenolic hydroxyl group-containing phosphorus compounds.
リン系難燃剤の市販品としては、東都化成製FX−305,三光株式会社製のHCA−HQが挙げられる。 Examples of commercially available phosphorus-based flame retardants include FX-305 manufactured by Tohto Kasei and HCA-HQ manufactured by Sanko Co., Ltd.
難燃性を付与する場合、本発明の接着補助剤における、(E)難燃剤の配合量は、(A)〜(E)成分および(F)無機フィラーの重量の合計中、臭素原子換算で1.0〜10重量%,リン原子換算で、1.0〜3.5重量%の範囲が好ましい。配合量がこの範囲にあると、難燃性が良好で、絶縁信頼性に優れ、かつ硬化塗膜のTgが低すぎることもない。 When imparting flame retardancy, the blending amount of (E) flame retardant in the adhesion aid of the present invention is calculated in terms of bromine atoms in the total weight of components (A) to (E) and (F) inorganic filler. A range of 1.0 to 3.5% by weight, preferably 1.0 to 3.5% by weight in terms of phosphorus atoms. When the blending amount is within this range, the flame retardancy is good, the insulation reliability is excellent, and the Tg of the cured coating film is not too low.
本発明における接着補助剤には信頼性向上のため、(F)無機フィラーを含有していても良い。 In order to improve reliability, the adhesion aid in the present invention may contain (F) an inorganic filler.
本発明における、(F)成分は、特に限定されないが、シリカ、溶融シリカ、タルク、アルミナ、水酸化アルミニウム、硫酸バリウム、水酸化カルシウム、アエロジル及び炭酸カルシウムが挙げられる。無機フィラーには、分散性を高める等の目的で、これらをシランカップリング剤等の各種カップリング剤で処理したものを含む。これらは、単独でも、2種以上を組み合せて用いてもよい。なお、誘電特性や低熱膨張の点からシリカが好ましい。 The component (F) in the present invention is not particularly limited, and examples thereof include silica, fused silica, talc, alumina, aluminum hydroxide, barium sulfate, calcium hydroxide, aerosil and calcium carbonate. Inorganic fillers include those treated with various coupling agents such as silane coupling agents for the purpose of enhancing dispersibility. These may be used alone or in combination of two or more. Silica is preferred from the viewpoint of dielectric properties and low thermal expansion.
(F)成分の配合量は、(A)〜(F)成分の容積の合計中、5〜35容積%の範囲であることが好ましく、より好ましくは、10〜30容積%である。配合量がこの範囲にあると、熱膨張係数と誘電損失が大きくなることもなく、絶縁層を内層回路上に形成するのに、十分なフローが得られる。なお、本発明の接着補助剤に無機フィラーを分散させるには、例えば、ニーダー、ボールミル、ビーズミル、3本ロール等既知の混練方法を用いることができる。 The blending amount of the component (F) is preferably in the range of 5 to 35% by volume, more preferably 10 to 30% by volume, in the total volume of the components (A) to (F). When the blending amount is within this range, the thermal expansion coefficient and the dielectric loss are not increased, and a sufficient flow can be obtained for forming the insulating layer on the inner layer circuit. In order to disperse the inorganic filler in the adhesion aid of the present invention, a known kneading method such as a kneader, a ball mill, a bead mill, or a three roll can be used.
本発明の接着補助剤には、必要に応じて、顔料、レベリング剤、消泡剤、イオントラップ剤等の添加剤を配合してもよい。 You may mix | blend additives, such as a pigment, a leveling agent, an antifoamer, and an ion trap agent, with the adhesion adjuvant of this invention as needed.
以上のように作製した接着補助剤は溶剤に希釈しワニスにして、銅箔に塗工する。溶剤としては、以下の例には限定されないが、例えば、アセトン、メチルエチルケトン、シクロヘキサノン等のケトン類、ベンゼン、キシレン、トルエン等の芳香族炭化水素類、エチレングリコールモノエチルエーテル等のアルコール類、エチルエトキシプロピオネート等のエステル類、N,N−ジメチルホルムアミド、N,N−ジメチルアセトアミド等のアミド類が挙げられる。これらの溶剤は、単独でも、2種以上を混合して用いてもよい。接着補助剤に対する溶剤の使用量は、特に限定されず、従来から使用されている量とすることができる。 The adhesion aid produced as described above is diluted with a solvent to form a varnish, which is applied to a copper foil. Examples of the solvent include, but are not limited to, ketones such as acetone, methyl ethyl ketone, and cyclohexanone, aromatic hydrocarbons such as benzene, xylene, and toluene, alcohols such as ethylene glycol monoethyl ether, and ethyl ethoxy. Examples thereof include esters such as propionate, and amides such as N, N-dimethylformamide and N, N-dimethylacetamide. These solvents may be used alone or in combination of two or more. The usage-amount of the solvent with respect to an adhesion adjuvant is not specifically limited, It can be set as the quantity currently used conventionally.
本発明の接着補助剤又は上記のワニスを、金属箔の片面に塗工し、半硬化させることにより、接着補助剤付金属箔が完成する。 The adhesion aid of the present invention or the above varnish is applied to one side of a metal foil and semi-cured to complete a metal foil with an adhesion aid.
接着補助剤をワニスとして、コンマコータやグラビアコータで金属箔に塗工する場合は、接着補助剤の全固形分量が、10〜30重量%となるように溶剤の使用量を調節することが好ましいが、またフィルム形成用の設備にあわせて量を調整することもできる。 When coating a metal foil with a comma coater or a gravure coater using an adhesion assistant as a varnish, it is preferable to adjust the amount of solvent used so that the total solid content of the adhesion assistant is 10 to 30% by weight. Also, the amount can be adjusted according to the equipment for film formation.
以上のような接着補助剤付金属箔を用いた基板は,接着補助剤付金属箔の接着補助剤層がプリプレグ側となるように、接着補助剤付金属箔とプリプレグとを従来公知の方法により積層一体化して得られる。以上示した方法により,2層から成る積層板が完成する。これに公知の方法で回路形成してプリント配線板を得ることができる。 The substrate using the metal foil with an adhesion auxiliary agent as described above is prepared by combining the metal foil with an adhesion auxiliary agent and the prepreg by a conventionally known method so that the adhesion auxiliary agent layer of the metal foil with an adhesion auxiliary agent is on the prepreg side. Obtained by laminating and integrating. By the method described above, a laminate consisting of two layers is completed. A printed wiring board can be obtained by forming a circuit by a known method.
以上のように作製した積層板を内層板とする場合には、導体回路の表面粗さがRz=2.0μm以下であり、内層板の絶縁層の表面粗さがRz=2.0μm以下であることが微細回路の形成性並びに電気特性上望ましい。 When the laminated board produced as described above is used as the inner layer board, the surface roughness of the conductor circuit is Rz = 2.0 μm or less, and the surface roughness of the insulating layer of the inner layer board is Rz = 2.0 μm or less. Is desirable in terms of formability of fine circuits and electrical characteristics.
さらに,多層化プリプレグと接着補助材付金属箔を重ね,公知の方法で多層化,回路形成することにより多層プリント配線板を得ることができる。以上のように作製した多層プリント配線板は導体回路の表面粗さがRz=2.0μm以下であり、内層板の絶縁層の表面粗さがRz=2.0μm以下であることが電気特性上望ましい。 Furthermore, a multilayer printed wiring board can be obtained by stacking a multilayered prepreg and a metal foil with an adhesion auxiliary material, multilayering by a known method, and forming a circuit. In the multilayer printed wiring board produced as described above, the surface roughness of the conductor circuit is preferably Rz = 2.0 μm or less, and the surface roughness of the insulating layer of the inner layer board is preferably Rz = 2.0 μm or less in terms of electrical characteristics.
(実施例1)
下記に示す樹脂組成物1を作製した。
(Example 1)
The resin composition 1 shown below was produced.
(樹脂組成物1の作製)
・アラルキル型エポキシ樹脂、ESN-480(新日鐵化学株式会社製) 62重量部
・フェノール性水酸基を有するアラルキル型樹脂,HEM−7851(明和化成株式会社製) 30重量部
・カルボン酸変性アクリロニトリルブタジエンゴム粒子、XER−91SE−15(JSR株式会社製) 8重量部
・イミダゾール誘導体化合物、1−シアノエチル−2フェニルイミダゾールリウム
トリメリテート、2PZ−CNS(四国化成工業株式会社製) 0.3重量部
・溶剤、メチルエチルケトン
(金属箔1の作製)
幅510mm、厚み18μmの電解銅箔(製品名F0-WS18:古河サーキットフォイル社製。Rz=1.2μm)の被接着面に,上記樹脂組成物1を塗工し金属箔1を作製した。塗工後は残溶剤が3%以下になるように170℃で10分程度の乾燥を行った。塗工した樹脂組成物1の厚みは,3.0μmであった。
(Preparation of resin composition 1)
Aralkyl type epoxy resin, ESN-480 (manufactured by Nippon Steel Chemical Co., Ltd.) 62 parts by weight Aralkyl type resin having a phenolic hydroxyl group, HEM-7851 (manufactured by Meiwa Kasei Co., Ltd.) 30 parts by weight Carboxylic acid modified acrylonitrile butadiene Rubber particles, XER-91SE-15 (manufactured by JSR Corporation) 8 parts by weight, imidazole derivative compound, 1-cyanoethyl-2-phenylimidazolium trimellitate, 2PZ-CNS (manufactured by Shikoku Chemicals Co., Ltd.) 0.3 part by weight, solvent , Methyl ethyl ketone
(Production of metal foil 1)
The resin composition 1 was applied to the adherend surface of an electrolytic copper foil having a width of 510 mm and a thickness of 18 μm (product name F0-WS18: manufactured by Furukawa Circuit Foil Co., Ltd. Rz = 1.2 μm) to prepare a metal foil 1. After coating, drying was performed at 170 ° C. for about 10 minutes so that the residual solvent was 3% or less. The thickness of the coated resin composition 1 was 3.0 μm.
日立化成工業株式会社製 ガラス布基材高Tgエポキシ樹脂プリプレグGEA−679F (厚み0.1mm)4枚とその上下に樹脂組成物1が塗工された面がプリプレグに接するように金属箔1を積層し、180℃、2.5MPaの条件で1時間プレス成形し,銅張積層板を製造した。 Glass foil base material high Tg epoxy resin prepreg GEA-679F (thickness 0.1 mm) manufactured by Hitachi Chemical Co., Ltd. Metal foil 1 is attached so that the surface coated with resin composition 1 on the top and bottom thereof is in contact with the prepreg. Laminated and press-molded at 180 ° C. and 2.5 MPa for 1 hour to produce a copper-clad laminate.
次に、ドライフィルムフォトレジストを、銅張積層板の表面にラミネートし、エッチングを行う箇所をマスクしたフォトマスクを介して紫外線を露光し、現像してエッチングレジストを形成した。 Next, a dry film photoresist was laminated on the surface of the copper clad laminate, exposed to ultraviolet rays through a photomask that masked a portion to be etched, and developed to form an etching resist.
最小回路導体幅/回路導体間隔(L/S)=30/30μmとなるように回路パターンを形成し,レジストを剥離して内層板を作製した。コア基板の絶縁層の表面粗さRz=1.2μmであり、導体回路の表面粗さRz=1.1μmであった。なお、表面粗さはJIS−B−0601に基づき測定した。 A circuit pattern was formed so that the minimum circuit conductor width / circuit conductor interval (L / S) = 30/30 μm, and the resist was peeled off to produce an inner layer plate. The surface roughness Rz of the insulating layer of the core substrate was 1.2 μm, and the surface roughness Rz of the conductor circuit was 1.1 μm. The surface roughness was measured based on JIS-B-0601.
次に、酸化還元処理による内層回路の接着処理を行った後,ガラス布基材高Tgエポキシ樹脂プリプレグGEA−679F (厚み0.1mm)1枚とその上下に樹脂組成物1が塗工された面がプリプレグに接するように金属箔1を積層し、180℃、2.5MPaの条件で1時間プレス成形し,銅張多層板を製造した。その後内層板と同様に,エッチングレジストを用いて回路パターンを作製し,多層配線板を作製し、これを評価用サンプルとした。コア基板の絶縁層の表面粗さRz=1.2μmであり、導体回路の表面粗さRz=1.1μmであった。 Next, after the inner layer circuit was bonded by oxidation-reduction treatment, one glass cloth base material high-Tg epoxy resin prepreg GEA-679F (thickness 0.1 mm) and the resin composition 1 were coated on the top and bottom thereof. The metal foil 1 was laminated so that the surface was in contact with the prepreg, and press-molded at 180 ° C. and 2.5 MPa for 1 hour to produce a copper-clad multilayer board. Thereafter, similarly to the inner layer board, a circuit pattern was produced using an etching resist to produce a multilayer wiring board, which was used as a sample for evaluation. The surface roughness Rz of the insulating layer of the core substrate was 1.2 μm, and the surface roughness Rz of the conductor circuit was 1.1 μm.
(実施例2)
実施例1において、金属箔1を作製する際、樹脂組成物1を6μmの厚みに塗布したこと以外は実施例1と同様に評価用サンプルを作製した。
(Example 2)
In Example 1, when producing the metal foil 1, a sample for evaluation was produced in the same manner as in Example 1 except that the resin composition 1 was applied to a thickness of 6 μm.
(実施例3)
実施例1において、アラルキル型エポキシ樹脂としてNC3000S−H(日本化薬株式会社製)62重量部,フェノール性水酸基を有するアラルキル型樹脂としてSN-480(新日鐵化学製)を20重量部、トリアジン環含有クレゾールノボラック型フェノール樹脂LA−3018(大日本インキ株式会社製)を10重量部用いた。その他は、実施例1と同様にして行った。
(Example 3)
In Example 1, 62 parts by weight of NC3000S-H (manufactured by Nippon Kayaku Co., Ltd.) as the aralkyl type epoxy resin, 20 parts by weight of SN-480 (manufactured by Nippon Steel Chemical) as the aralkyl type resin having a phenolic hydroxyl group, triazine 10 parts by weight of ring-containing cresol novolac type phenol resin LA-3018 (manufactured by Dainippon Ink Co., Ltd.) was used. The other operations were performed in the same manner as in Example 1.
(実施例4)
実施例3において,カルボン酸変性アクリロニトリルブタジエンゴム粒子8重量部の代わりに,ブタジエンゴム−アクリル樹脂のコアシェル粒子,EXL−2655(呉羽化学工業株式会社)8重量部を用いた。その他は、実施例3と同様にして行った。
(Example 4)
In Example 3, instead of 8 parts by weight of carboxylic acid-modified acrylonitrile butadiene rubber particles, 8 parts by weight of butadiene rubber-acrylic resin core-shell particles, EXL-2655 (Kureha Chemical Industry Co., Ltd.) were used. Others were performed in the same manner as in Example 3.
(実施例5)
実施例3において,ポリビニルアセタール樹脂,KS−23Z(積水化学製)を5重量部添加した。その他は、実施例3と同様にして行った。
(Example 5)
In Example 3, 5 parts by weight of polyvinyl acetal resin, KS-23Z (manufactured by Sekisui Chemical) was added. Others were performed in the same manner as in Example 3.
(比較例1)
実施例1において、金属箔1を積層する代わりにF0-WS箔18μm(古河サーキットフォイル社製)を積層したこと以外は実施例1と同様に評価用サンプルを作製した。
(Comparative Example 1)
In Example 1, an evaluation sample was prepared in the same manner as in Example 1 except that 18 μm of F0-WS foil (manufactured by Furukawa Circuit Foil) was laminated instead of laminating the metal foil 1.
(比較例2)
実施例1の樹脂組成物1を作製する際に,エポキシ樹脂にクレゾールノボラック型エポキシ樹脂,N−665(大日本インキ株式会社製)60重量部を用い,エポキシ樹脂硬化剤にノボラック型フェノール樹脂HP−850N(日立化成工業株式会社製)を30重量部とした他は,実施例1と同様に評価用サンプルを作製した。
(Comparative Example 2)
When preparing the resin composition 1 of Example 1, 60 parts by weight of cresol novolac type epoxy resin, N-665 (manufactured by Dainippon Ink Co., Ltd.) was used as the epoxy resin, and novolak type phenol resin HP was used as the epoxy resin curing agent. An evaluation sample was prepared in the same manner as in Example 1 except that -850N (manufactured by Hitachi Chemical Co., Ltd.) was changed to 30 parts by weight.
(導体引き剥がし強さの測定)
実施例1〜6、比較例1〜2用の評価サンプルの導体引き剥がし強さを測定した。引き剥がしは垂直引き剥がし強さを測定した。測定は常に20℃で行った。測定方法は,JIS-C-6481に準じた。
(Measurement of conductor peeling strength)
The conductor peeling strength of the evaluation samples for Examples 1 to 6 and Comparative Examples 1 and 2 was measured. For peeling, the vertical peeling strength was measured. Measurements were always made at 20 ° C. The measurement method conformed to JIS-C-6481.
(吸湿耐熱試験)
実施例1〜6、比較例1〜2用評価用サンプルの吸湿耐熱試験を行った。基板の試験は各サンプルを121℃、湿度100%、2気圧の条件で2時間処理し、その後288℃のはんだ浴に20秒浸漬して,基板に膨れ等が発生しないかどうかの確認を行った。試験には平山製作所製飽和型PCT装置PC-242を用いた。
(Hygroscopic heat resistance test)
The moisture absorption heat test of the sample for evaluation for Examples 1-6 and Comparative Examples 1-2 was performed. In the board test, each sample was treated for 2 hours under the conditions of 121 ° C, 100% humidity and 2 atmospheres, and then immersed in a solder bath at 288 ° C for 20 seconds to check whether the substrate was swollen. It was. A saturation type PCT device PC-242 manufactured by Hirayama Seisakusho was used for the test.
(試験結果)
試験結果を表1に示す。実施例1〜6で作製した評価用サンプルは導体引き剥がし強さはすべて0.7kN/m以上と高い値であった。一方比較例1および2で得られた評価用サンプルは導体引き剥がし強さが弱く、吸湿耐熱試験後内層導体と絶縁層の間で膨れが発生した。
The test results are shown in Table 1. The samples for evaluation produced in Examples 1 to 6 all had a high conductor peeling strength of 0.7 kN / m or higher. On the other hand, the samples for evaluation obtained in Comparative Examples 1 and 2 had a weak conductor peeling strength, and swelling occurred between the inner layer conductor and the insulating layer after the moisture absorption heat test.
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