JP5470537B2 - Stacked probe - Google Patents

Description

  The present invention relates to a stacked probe that can precisely test an electronic device semiconductor or the like even when a large current of 100 A to 1000 A flows.

  In recent years, in the automobile industry, the digitization of various functions of vehicles has progressed remarkably. For example, an energy power source mounted on a hybrid vehicle is mounted with a power source through which an unprecedented large current flows.

  As such a high-current probe for inspecting an electronic device semiconductor, a probe (Patent Document 1) previously registered by the present applicant as a utility model has been known.

  As shown in FIG. 4, this probe is formed by forming a contact probe with a thin plate, and forming a notch 2 behind the tip needle portion 1 so that the needle portion 1 can move in the front-rear direction. The narrow part 3 was formed in the lower part of the needle part, and a refractory metal thin plate was brazed to the tip of the needle part.

In the probe having a plate thickness of 0.7 mm, when a large current of 40 A flows, the temperature rises to 60 ° C., so the large current of 40 A was the limit. Recently, however, there has been a demand for a probe that can withstand a large current of 100 A to 1000 A, but this could not meet such a request. Further, if the plate thickness is greater than this, only the needle portion cannot be moved, so that a contact probe could not be formed.

Further, since the conventional laminated probe is formed so that only the needle portion moves, it is not sufficiently satisfactory in terms of the service life.
Utility model registration No. 3125156

  This invention is made in view of such a point, and it aims at providing the laminated probe which can test | inspect an electronic device semiconductor correctly without trouble even if the large current of 100A-1000A flows. .

  It is another object of the present invention to provide a stacked probe that has a significantly improved service life compared to the prior art.

In order to achieve the above object, as a result of earnest research, the present inventor formed a probe contact with a metal plate, formed an elastic body insertion notch behind the needle, and inserted the probe contact into the first small hole. The rod is made to be able to rotate with the rod as a fulcrum, and the rod inserted into the second small hole is made to rotate only at a predetermined angle. The rod of the second small hole is used as a screw, or the screw is screwed into another small hole (third small hole or second small hole), Both the holders can be coupled and tightened with the screw, and a screw that abuts and presses against the probe contact is screwed into another small hole (fourth small hole or fifth small hole). Control the movement of the probe contact with a screw By that, the only needle portion can be formed to a thickness not move, which can be made with the laminated type probe capable of accurately inspecting the electronic device semiconductor without hindrance a large current flows 100A～ 1000A The headline, the present invention has been reached.

That is, according to the present invention, the probe contact is formed of a metal plate, an elastic body insertion cut is formed at the rear of the needle portion, and the probe contact is formed so as to be able to rotate with the rod inserted into the first small hole as a fulcrum. The rod is inserted into the second small hole so that it rotates only a predetermined angle, and the probe contact can be lifted against the force of the elastic body by holding it with a holder. The rod of the second small hole is used as a screw or screwed into another small hole so that both the holders can be connected and tightened with the screw, and the probe contact is connected to the other small hole. The screw which contacts and presses is screwed together and the movement of the probe contact is controlled by both the screws .

  It is preferable that the elastic body insertion cut is formed in a U-shape, and a U-shaped spring is attached to the cut.

The second small hole is formed at a position closer to the needle portion than the first small hole, so that the probe can be easily moved by the lever principle (claim 3).

The other small hole is formed above the first small hole, and the other small hole is screwed into the vicinity of the other small hole with a screw that contacts and presses the probe contact via an insulating material. Preferably, the movement of the probe contact is controlled by a screw that is formed and screwed into the other small hole to connect both holders, and a screw screwed into the further small hole.

  Using the rod of the second small hole as a screw, a second other small hole is formed in the vicinity of the second small hole for screwing a screw that contacts and presses the probe contact via an insulating layer, It is preferable that the movement of the probe contact is controlled by a screw screwed into the second small hole and a screw screwed into the second other small hole.

It is preferable that the two holders are connected and fitted with a rod that serves as a stopper for preventing the needle portion from descending near the second small hole.
The plate body has a thickness of 1.0 mm to 2.0 mm, and is preferably a large current stacked probe.

It is preferable that one or a plurality of the probe contacts are laminated via an insulating material, which are sandwiched between holders, and an elastic body is sandwiched between recesses formed on the front end facing surfaces of both holders. Item 8 ).

  As described above, according to the present invention, even when a large current of 100A to 1000A that could not be measured with a conventional stacked probe flows, an electronic device semiconductor can be accurately inspected without hindrance, and only the needle portion. In addition, since the entire probe contact is moved, there is a great effect that the service life is significantly improved as compared with the conventional case.

  The cause of the effect of the present invention is that it is no longer necessary to form a narrow portion in the needle portion, and that the thickness of the plate can be increased.

It is a perspective view which shows one Example of this invention. It is a disassembled perspective view of the laminated type probe of this invention. It is a front view which shows an example of the probe which consists of a metal plate body of this invention. It is a front view which shows an example of the probe which consists of a conventional metal plate.

1,1 '... Needle part
2 ' ... U-shaped cutout 4 ... Probe contact 5, 5' ... Insulation material 6, 6 '... Holder 7 ... ... U-shaped spring 10 ... 1st small hole 11 ... Rod (fulcrum)
12 .... Second small hole 14 .... Third small hole 15 .... Four small hole 19 .... Rod (stopper)
20 ... 5th small hole 21 ... 6th small hole

  Next, embodiments of the present invention will be described with reference to the drawings.

  As shown in FIGS. 1 and 2, the probe 4 of the present invention is sandwiched and fixed by holders 6 and 6 ′ via insulating materials 5 and 5 ′.

  As shown in FIG. 3, the probe 4 of the present invention has a U-shaped notch 2 ′ formed behind the needle portion 1 ′. In this notch 2 ′, a U-shaped spring 7 is attached to the U-shaped notch 2 ′ via an insulating material 8 having the same shape.

  The holders 6 and 6 'are formed with recesses 9 and 9' having the same shape as the notch 2 '. A U-shaped spring 7 is fitted into the recesses 9 and 9 '. When the needle 1 'rises against the force of the spring 7 by pressing, as shown in FIG. 1, the lower end of the U-shaped spring 7 rises, and the upper end is in contact with the concave portions 9 and 9' of the holder and moves. do not do. When the pressure is released, the original position is restored by the force of the spring 7.

  As shown in FIG. 3, when the rod 11 is inserted into the first small hole 10, the entire probe 4 rotates around this point. When the screw 13 is inserted into the second small hole 12, the probe 4 only rotates at a predetermined angle. The rotation angle can be adjusted by the size and shape of the second small hole 12. When the holders 6 and 6 'are tightened with the screw 13, the probe does not move.

  A fifth small hole 20 is formed in the vicinity of the second small hole 12 for screwing the screw 15 that contacts the probe contact 4 through the insulating layer 5, and is screwed into the second small hole 12. The movement of the probe contact is controlled by the screw 13 and the screw 15 screwed into the fifth small hole 20. This is because the screw 15 screwed into the fifth small hole 20 gives a lifting force to the screw 13 screwed into the second small hole 12.

  As shown in FIG. 3, the second small hole 12 is formed at a position closer to the needle portion 1 ′ than the first small hole 10. By doing so, the probe is easily moved by the lever principle.

  A third small hole 14 is formed above the first small hole 10, and a fourth small hole 16 is formed in the vicinity thereof for screwing a screw that contacts the probe contact 4 via the insulating material 5. ing. The movement of the probe contact is controlled by a screw 17 screwed into the third small hole 14 to connect both holders and a screw 18 screwed into the fourth small hole 16. When the holder is strongly tightened with the screw 17, the probe does not move, but by screwing the screw 18 that contacts the probe contact 4 through the insulating material 5 into the fourth small hole 16, the third small hole 14 is engaged. This is because a lifting force is applied to the screwed screw 17.

  Near the second small hole, a sixth small hole 21 for fitting the rod 19 serving as a stopper for preventing the needle portion from descending is formed.

  As shown in FIG. 2, in order to prevent the U-shaped spring 7 from coming off, a pin 22 is inserted in the vicinity of the lower end of the U-shaped spring 7 in FIG. 2 by connecting the holders 6 and 6 '. Has been.

  When the probe of the present invention is used for a large current, the thickness of the metal plate is preferably 1.0 mm to 2.0 mm.

  Experiments have confirmed that when the stacked probe (plate thickness: 1 mm) shown in FIG. 1 is used, the temperature only rises to 40 ° C. even when a large current of 100 A flows. Preferably, a probe that can withstand a large current of 200 A to 1000 A can be obtained by laminating 1 to 5 sheets of 2.0 mm through an insulating material.

  The probe of the present invention can be an ordinary laminated probe formed from a thin metal plate, not for a large current. In this case, it is preferable to stack a large number of sheets via an insulating film rather than an insulating material. Even in this case, it is not necessary to form the narrow portion and it is not necessary to move only the needle portion, so that the service life is greatly improved. Specifically, it has been confirmed that it improves about 5 times.

  In this case, the thickness of the metal thin plate is preferably 20 μm to 0.3 mm. As the material of the metal thin plate, a material used for this kind of purpose may be used. Since only the needle portion is not moved, it is not necessary to use an elastic metal material. In this case, a large number of sheets are laminated like an ordinary laminated probe through an insulating material or an insulating film.

As shown in FIG. 3, when the needle portion of the probe of the present invention hits the surface to be measured, the first small hole 10 is lifted against the spring force with the fulcrum 10 as a fulcrum. Return to the position.

Claims (8)

The probe contact is formed of a metal plate, an elastic body insertion notch is formed behind the needle portion, and the probe contact is formed so as to be able to rotate with the rod inserted into the first small hole as a fulcrum. only a predetermined angle in the inserted rod in the hole is formed so as not to rotate, by which the sandwiching by the holder, and configured to be able to rise against the probe contacts the force of the elastic body, the second small The rod of the hole is used as a screw or screwed into another small hole so that both the holders can be connected and tightened with the screw, and a screw that abuts and presses against the probe contact in another small hole. A laminated probe characterized by being screwed and controlling the movement of the probe contact with both of the screws .   The stacked probe according to claim 1, wherein the elastic body insertion cut is formed in a U-shape, and a U-shaped spring is attached to the cut.   The stacked probe according to claim 1 or 2, wherein the second small hole is formed at a position closer to the needle portion than the first small hole. Said another small hole is formed above the first small holes, said further small holes threaded with the screw abutting pressed against the probe contacts through the insulating material in the vicinity of the small holes of said another The movement of the probe contact is controlled by a screw that is formed and screwed into the other small hole to connect both holders and a screw screwed into the further small hole. Stacked probe. Using the rod of the second small hole as a screw, a second other small hole is formed in the vicinity of the second small hole for screwing a screw that contacts and presses the probe contact via an insulating layer, The stacked probe according to any one of claims 1 to 4, wherein the movement of the probe contact is controlled by a screw screwed into the second small hole and a screw screwed into the second other small hole. The stacked probe according to any one of claims 1 to 5 , wherein the two holders are connected and fitted with a rod serving as a stopper that prevents the needle portion from descending near the second small hole. The thickness of the said board is 1.0 mm-2.0 mm, and is a laminated probe for large currents, The laminated probe in any one of Claims 1-6. Claims 1 to 7, wherein one or a plurality of the probe contacts are laminated via an insulating material, are sandwiched by holders, and the elastic body is sandwiched by recesses formed on the front end facing surfaces of both holders. Item 8. The stacked probe according to any one of Items 1 to 7.

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