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JP5336707B2 - Levitation transfer device - Google Patents

Levitation transfer device Download PDF

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Publication number
JP5336707B2
JP5336707B2 JP2007135978A JP2007135978A JP5336707B2 JP 5336707 B2 JP5336707 B2 JP 5336707B2 JP 2007135978 A JP2007135978 A JP 2007135978A JP 2007135978 A JP2007135978 A JP 2007135978A JP 5336707 B2 JP5336707 B2 JP 5336707B2
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workpiece
processing stage
pressure gas
work
levitation
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JP2008290814A (en
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晃 植原
昌之 都田
優 梅田
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Watanabe Shoko KK
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Watanabe Shoko KK
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Drying Of Semiconductors (AREA)

Description

本発明は、板状のワークに対して圧力気体を噴射することによってワークを浮上した状態にし、この状態でワークを移動・停止・静止・方向転換させつつ搬送経路の搬送面よりも下方に設けたワーク処理ステージにて処理を行うようにした浮上搬送方法に関する。   In the present invention, a workpiece is levitated by injecting a pressure gas onto a plate-like workpiece, and in this state, the workpiece is moved, stopped, stopped, and changed in direction while being provided below the conveyance surface of the conveyance path. The present invention relates to a levitating and conveying method in which processing is performed at a workpiece processing stage.

特開2006−008347号公報JP 2006008347 A 特開2005−154059号公報JP 2005-154059 A 特開2005−154057号公報 従来から、成形・加工工程における液晶ディスプレイ等に用いられるガラス板や半導体装置が形成されるウエハ等の板状のワークを圧力気流を噴射することによって浮上搬送する浮上搬送装置が知られている(例えば、特許文献1〜3参照。)。Japanese Laid-Open Patent Publication No. 2005-154057 Conventionally, levitation conveyance that levitates and conveys a plate-like workpiece such as a glass plate used for a liquid crystal display or the like in a molding / processing process or a wafer on which a semiconductor device is formed by injecting a pressure airflow An apparatus is known (for example, refer to Patent Documents 1 to 3).

このような浮上搬送装置は、ローラコンベアの上に被搬送体を載置して搬送する構成に比べ、ローラコンベアの表面に付着したゴミがワークの裏面に付着してしまうことを防止することができるうえ、近年の被搬送体の大型化に伴う生産工程のスピード化への対応を可能とすることができ、しかも、ワークの薄型化に伴う隣接した次段のローラへの追突時の破損等を防止することが可能となる。   Such a levitating and conveying device can prevent dust adhering to the surface of the roller conveyor from adhering to the back surface of the workpiece, compared to a configuration in which the object to be conveyed is placed on the roller conveyor and conveyed. In addition, it is possible to cope with the speeding up of the production process due to the recent increase in the size of the transported body, and damage due to a collision with the next-stage roller due to the thinner workpiece Can be prevented.

また、ワークを搬送する際、その方向転換(右左折など)は圧力気体の噴射方向によって制御可能となるため、搬送経路の短縮化に貢献することができ、成形・加工ライン全体の小型化にも大きく貢献することができる。   In addition, when transferring workpieces, the direction change (such as turning left or right) can be controlled by the pressure gas injection direction, which can contribute to shortening the transfer path and reduce the size of the entire molding and processing line. Can also contribute greatly.

ところで、上述した浮上搬送装置にあっては、ワークを浮上搬送するワーク浮上搬送ユニットとワークを実質的に成形・加工するワーク処理ステージとに大略分別されるが、ワーク浮上搬送ユニットとワーク処理ステージとの間でのワークの受け渡しはロボットアーム等で行う場合があった。   By the way, in the above-described levitation conveyance apparatus, the workpiece levitation conveyance unit and the workpiece processing stage are roughly divided into a workpiece levitation conveyance unit that levitates and conveys a workpiece and a workpiece processing stage that substantially forms and processes the workpiece. In some cases, workpieces were transferred to and from a robot arm.

即ち、ワークをワーク浮上搬送ユニットからワーク処理ステージへと受け渡す際、成形・加工ライン全体の設計等には、ある程度の制約が発生する場合がある。   That is, when a workpiece is transferred from the workpiece floating transfer unit to the workpiece processing stage, a certain degree of restriction may occur in the design of the entire forming / processing line.

例えば、成形・加工工場における敷地面積や敷地形状に制約があり、成形・加工ライン中、隣接する前後の成形・加工工程への搬送経路に対して直交してワーク処理ステージを配置せざるを得ない場合や、図11に示すように、複数のワーク浮上搬送ユニットHを隣接して搬送経路を形成すると共に、この搬送経路と直交する位置に異なったワーク処理ステージS1,S2を配置し、ワークW1,W2の大きさや種類等に応じて異なったワーク処理ステージS1,S2を選択して経由しなければならない場合等がある。   For example, there are restrictions on the site area and site shape in a molding / processing plant, and in the molding / processing line, work processing stages must be arranged perpendicular to the conveyance path to adjacent molding / processing processes. If not, or as shown in FIG. 11, a plurality of workpiece floating conveyance units H are adjacent to each other to form a conveyance path, and different workpiece processing stages S1 and S2 are arranged at positions orthogonal to the conveyance path. There are cases where different work processing stages S1 and S2 must be selected and passed depending on the size and type of W1 and W2.

尚、ワークW1,W2の大きさや種類等に応じて異なったワーク処理ステージS1,S2を経由する理由としては、複数種類のワークW1,W2を同時期に同一成形・加工ラインにて行う必要がある場合(例えば、注文生産時等)や、ワーク処理ステージS1,S2が大型であるために設置場所を1箇所に固定して必要に応じてワーク処理ステージS1,S2を交換することが困難な場合、等が想定される。   The reason why the workpieces W1 and W2 pass through different workpiece processing stages S1 and S2 depending on the sizes and types of the workpieces W1 and W2 is that it is necessary to perform a plurality of types of workpieces W1 and W2 on the same molding / processing line at the same time. In some cases (for example, at the time of order production), since the work processing stages S1 and S2 are large, it is difficult to fix the installation place at one place and replace the work processing stages S1 and S2 as necessary. In this case, etc. are assumed.

そして、このように浮上搬送ラインに対してワーク処理ステージS1(S2)が直交した位置にある場合、図12に示すように、ワーク処理ステージS1では、浮上搬送ラインに沿う浮上搬送(矢印A1参照)、停止(矢印A2参照)、ワーク処理ステージS1への受け渡し(矢印A3参照)、ワーク処理ステージS1からの受け取り(矢印A4参照)、停止(矢印A5参照)、浮上搬送ラインに沿う浮上搬送(矢印A6参照)の少なくとも4方向6形態の動きを制御する必要がある。   When the workpiece processing stage S1 (S2) is at a position orthogonal to the levitation conveyance line in this way, as shown in FIG. 12, the workpiece processing stage S1 levitates along the levitation conveyance line (see arrow A1). ), Stop (see arrow A2), delivery to the workpiece processing stage S1 (see arrow A3), receipt from the workpiece processing stage S1 (see arrow A4), stop (see arrow A5), floating transfer along the floating transfer line (see FIG. It is necessary to control at least four directions and six forms of movement (see arrow A6).

一方、ワーク処理ステージS1では、ワーク浮上搬送ユニットHからの受け取り(矢印B1参照)、停止(矢印B2参照)、ワーク処理ステージS1の内部への取り込み(矢印C1参照)、ワーク処理ステージS1の内部からの浮上(矢印C2参照)、停止(矢印B3参照)、ワーク浮上搬送ユニットHへの受け渡し(矢印B4参照)の実質6方向6形態の動きを制御する必要がある。   On the other hand, in the workpiece processing stage S1, receiving from the workpiece floating conveyance unit H (see arrow B1), stopping (see arrow B2), taking in the workpiece processing stage S1 (see arrow C1), and inside the workpiece processing stage S1 It is necessary to control the movement of the six forms in the six directions substantially (see arrow C2), stop (see arrow B3), and transfer to the workpiece floating conveyance unit H (see arrow B4).

従って、ワークW1の一連の動きを浮上搬送形態のみで行うことは、ワーク加工・処理本来の機能に兼備することは非常に困難であるため、ワーク浮上搬送ユニットとワーク処理ステージとの間でのワークの受け渡しはロボットアーム等で行っているのが実情となっていた。   Therefore, since it is very difficult to perform a series of movements of the workpiece W1 only in the floating conveyance mode, it is very difficult to combine the original functions of the workpiece machining and processing. Therefore, the workpiece W1 is moved between the workpiece floating conveyance unit and the workpiece processing stage. The actual situation is that workpieces are delivered by robot arms.

そして、このようなロボットアームを使用してのワーク受け渡しは、ロボットアームの配置(移動)スペースを確保しなければならないことは勿論であるが、その受け渡しの際にワークに傷が付き易く、しかも、近年のガラス基板等のようなワークの大型化や薄型化への対応が困難であるという問題が生じていた。   And, of course, workpiece transfer using such a robot arm must secure space for the placement (movement) of the robot arm, but the workpiece is easily damaged during the transfer. However, there has been a problem that it is difficult to cope with the increase in size and thickness of a workpiece such as a glass substrate in recent years.

そこで、本発明は、上記事情を考慮し、ロボットアーム等の浮上搬送以外の受け渡しを廃止することができ、よってワークの傷付きを防止することができるうえ、ワークの大型化や薄型化に容易に対応することができる浮上搬送装置を提供することを目的とする。   Therefore, in consideration of the above circumstances, the present invention can eliminate the transfer of the robot arm or the like other than the floating transfer, and thus can prevent the workpiece from being damaged, and can easily increase the size and thickness of the workpiece. An object of the present invention is to provide a levitating and conveying apparatus that can cope with the above.

請求項1に記載の浮上搬送装置は、所定方向に圧力気体を噴射してワークを浮上搬送する搬送経路の搬送面よりも下方にワーク処理ステージが配置され、該ワーク処理ステージの上方に対して出没可能に前記搬送経路の一部を形成する櫛歯状の圧力気体噴射台が配置され、前記ワーク処理ステージに前記圧力気体噴射台の隙間から上方に向けて圧力気体を噴射する噴射部が設けられ、前記圧力気体噴射台が前記搬送面と該ワーク処理ステージの間で前記ワーク処理ステージワークを浮上させたまま受け渡しを行い、前記圧力気体噴射台は、互いに接近・離反可能に変位することで前記ワーク処理ステージの上方に対して形成する一対のスライド噴射台であることを特徴とする。
前記受け渡しは、前記搬送経路の上流側から前記ワーク処理ステージの上方にワークが浮上搬送されてきた際には前記圧力気体噴射台が前記ワーク処理ステージの上方に位置してワークを浮上させたまま受け取った後に前記ワーク処理ステージの上方から退避して前記噴射部によりワークを前記ワーク処理ステージへと受け渡し、前記ワーク処理ステージでの処理が終了した際には前記噴射部によりワークを搬送面よりも上方へと浮上させた後に前記圧力気体噴射台が前記ワーク処理ステージの上方に位置してワークを浮上させたまま受け取った後に前記搬送経路へと受け渡すことを特徴とする。
The levitation conveyance apparatus according to claim 1, wherein a workpiece processing stage is disposed below a conveyance surface of a conveyance path for injecting a pressure gas in a predetermined direction to levitate and convey a workpiece, and above the workpiece processing stage. A comb-like pressure gas injection table that forms part of the conveyance path so as to be capable of appearing and retracting is disposed, and an injection unit that injects pressure gas upward from the gap of the pressure gas injection table is provided on the work processing stage. al is performed passing while the pressurized gas injection block has floated to the work processing stage workpiece between the conveying surface and the workpiece processing stage, the pressurized gas injection block, it is displaced so as to be capable of approach to and separate from each other And a pair of slide jets formed above the workpiece processing stage.
In the delivery, when the work is lifted and transported from the upstream side of the transport path to above the work processing stage, the pressure gas injection table is positioned above the work processing stage and the work is left floating. After receiving, the workpiece is retreated from above the workpiece processing stage, and the workpiece is transferred to the workpiece processing stage by the injection unit. When the processing at the workpiece processing stage is completed, the injection unit transfers the workpiece from the transport surface. After the surface is lifted upward, the pressurized gas injection table is positioned above the workpiece processing stage and receives the workpiece while floating, and then delivers the workpiece to the transfer path.

上記の浮上搬送装置によれば、搬送経路の上流側からワーク処理ステージの上方に浮上搬送されたワークは、ワーク処理ステージの上方に位置する圧力気体噴射台によって浮上状態で受け取られた後に圧力気体噴射台がワーク処理ステージの上方から退避してワーク処理ステージへと受け渡される。また、ワーク処理ステージでの処理が終了したワークは、ワーク処理ステージから浮上されてワーク処理ステージの上方に突出された圧力気体噴射台へと受け渡された後に再び搬送経路へと受け渡されることにより、ワークと直接接触するロボットアーム等を用いることなくワークを浮上させたまま受け渡しする
ことができ、ワークの傷付きを防止することができるうえ、ワークの大型化や薄型化に容易に対応することができる。
According to the above-described levitation transfer apparatus, the workpiece that has been levitated and conveyed above the workpiece processing stage from the upstream side of the conveyance path is received in a floating state by the pressure gas ejection table located above the workpiece processing stage, and then the pressure gas The spray table is retracted from above the work processing stage and transferred to the work processing stage. In addition, the workpiece that has been processed at the workpiece processing stage is transferred from the workpiece processing stage to the pressure gas injection table that protrudes above the workpiece processing stage and then is transferred to the conveyance path again. This makes it possible to deliver the workpiece while it is floating without using a robot arm or the like that is in direct contact with the workpiece, which can prevent the workpiece from being damaged and can easily cope with an increase in the size and thickness of the workpiece. be able to.

請求項3に記載の浮上搬送装置は、前記圧力気体噴射台は、出没方向に沿って延びる一対のフレーム枠を備え、該フレーム枠に圧力気体供給用のダクト部を形成したことを特徴とする。   The levitation conveyance apparatus according to claim 3, wherein the pressure gas injection table includes a pair of frame frames extending along a protruding and retracting direction, and a duct portion for supplying a pressure gas is formed in the frame frame. .

請求項4に記載の浮上搬送装置は、前記フレーム枠に形成されたダクト部が複数に分割されていることを特徴とする。   The levitation conveyance apparatus according to claim 4 is characterized in that a duct portion formed in the frame is divided into a plurality of parts.

本発明の浮上搬送装置によれば、ロボットアーム等の浮上搬送以外の受け渡しを廃止することができ、よってワークの傷付きを防止することができるうえ、ワークの大型化や薄型化に容易に対応することができる。   According to the levitation transfer device of the present invention, delivery other than levitation transfer such as a robot arm can be abolished, so that the workpiece can be prevented from being damaged, and the workpiece can be easily increased in size and thickness. can do.

次に、本発明の一実施形態に係る浮上搬送装置について、図面を参照して説明する。   Next, a levitation transport apparatus according to an embodiment of the present invention will be described with reference to the drawings.

図1乃至図6は本発明の一実施形態に係る浮上搬送装置の斜視図で、ワークの搬送位置に応じて時系列で変化している状態を示している。尚、ワーク成形・加工処理システム全体は、ワークの種類や大きさ、成形・加工工場における敷地面積や敷地形状等によって任意に設計されるため、ここでは図示並びにその説明は省略する。   1 to 6 are perspective views of a levitating and conveying apparatus according to an embodiment of the present invention, showing a state that changes in time series according to the conveying position of a workpiece. The entire workpiece forming / processing system is arbitrarily designed depending on the type and size of the workpiece, the site area and site shape in the forming / processing plant, and the illustration and description thereof are omitted here.

図に示すように、浮上搬送装置100は、ワーク浮上搬送ユニット200と、このワーク浮上搬送ユニット200に隣接設置されたワーク処理ステージ300と、ワーク受渡装置400とを備えている。   As shown in the figure, the levitating and conveying apparatus 100 includes a work levitating and conveying unit 200, a work processing stage 300 that is installed adjacent to the work levitating and conveying unit 200, and a work delivery device 400.

ワーク浮上搬送ユニット200は、その縦横に複数隣接設置することで所定のワーク搬送経路を構築するが、その配置は自由である。また、ワーク浮上搬送ユニット200は、ここでは躯体フレーム201に上下2段の浮上搬送ステージ202,203が設けられている。尚、各浮上搬送ステージ202,203の構成は同一である。   A plurality of workpiece floating conveyance units 200 are installed adjacent to each other in the vertical and horizontal directions to construct a predetermined workpiece conveyance path, but the arrangement thereof is free. Further, in the workpiece levitation conveyance unit 200, two vertical levitation conveyance stages 202 and 203 are provided on the housing frame 201 here. Note that the structures of the floating transfer stages 202 and 203 are the same.

浮上搬送ステージ202,203は、図7に示すように、天板204の下方に配置された複数列の噴射ユニット10を備えている。   As shown in FIG. 7, the levitation transfer stages 202 and 203 include a plurality of rows of injection units 10 arranged below the top plate 204.

この噴射ユニット10は、コンプレッサー等の圧力気体供給源(図示せず)に配管11aを介して接続されたコントロールバルブ11と、このコントロールバルブ11が一端に固定された供給管12と、供給管12の側壁に複数固定された噴射部20とを備えている。   The injection unit 10 includes a control valve 11 connected to a pressure gas supply source (not shown) such as a compressor via a pipe 11a, a supply pipe 12 having the control valve 11 fixed at one end, and a supply pipe 12 And a plurality of injection units 20 fixed to the side wall.

コントロールバルブ11は、図8,図9に示すように、配管12への圧力気体の流量を制御するもので(例えば、Parker Hannifin CorporationのPNEUTRONICS)、天板204と上下で対向する基板205にビス13を介して固定された断面L字形状の長尺なフレーム14の一端寄りに配置されて、供給管12の一端に固定されている。この供給管12はフレーム14に図示を略するブラケットを介して保持されている。   As shown in FIGS. 8 and 9, the control valve 11 controls the flow rate of the pressure gas to the pipe 12 (for example, PNEUTRONICS of Parker Hannifin Corporation). 13 is disposed near one end of a long frame 14 having an L-shaped cross section fixed through 13, and is fixed to one end of the supply pipe 12. The supply pipe 12 is held by a frame 14 via a bracket (not shown).

噴射部20は、基板205とフレーム14とで挟持されると共にボルト15によって基板205に固定されたベース部21と、各ベース部21に水平面内で回転可能に保持されたノズル部材22と、各ベース部21に固定された電磁弁23と、供給管12の外壁とベース部材21の外壁との間に介装された環状パッキン24とを備えている。   The injection unit 20 is sandwiched between the substrate 205 and the frame 14 and fixed to the substrate 205 by bolts 15, the nozzle member 22 held by each base unit 21 rotatably in a horizontal plane, An electromagnetic valve 23 fixed to the base portion 21 and an annular packing 24 interposed between the outer wall of the supply pipe 12 and the outer wall of the base member 21 are provided.

ベース部21は、略クランク形状の連通路21aと、シャフト保持穴21bと、このシャフト保持穴21bに連通する供給穴21cと、常開ポート挿入穴21dとが形成されている。また、連通路21aの傾斜部分の延長上にある穴21eは形成時にできたもので常時はパッキン25により閉成されている。さらに、連通路21aの上流端には供給管12に固定されて環状パッキン24を貫通した状態でボルト状のポート部材18の先端が臨んでいる。このポート部材18の軸線には、供給管12と連通路21aとを連通する貫通穴(図示せず)が形成されている。   The base portion 21 is formed with a substantially crank-shaped communication passage 21a, a shaft holding hole 21b, a supply hole 21c communicating with the shaft holding hole 21b, and a normally open port insertion hole 21d. Further, the hole 21e on the extension of the inclined portion of the communication passage 21a is formed at the time of formation and is normally closed by the packing 25. Furthermore, the front end of the bolt-shaped port member 18 faces the upstream end of the communication passage 21 a in a state of being fixed to the supply pipe 12 and passing through the annular packing 24. A through hole (not shown) that connects the supply pipe 12 and the communication path 21 a is formed in the axis of the port member 18.

ノズル部材22は、その外周全体が環状に凹陥されてシャフト保持穴21bの内壁と協働して環状の供給路26(図9にのみ図示)を形成する環状凹部22aと、環状凹部22aの内壁面間に軸線を経由して貫通する連通穴22bと、ノズル部材22の軸線上に形成されて連通穴22bと連通する軸穴22cと、軸穴22cの上端部と連通してノズル部材22の上端面に開口するノズル22dとを備えている。このノズル22dは、必要に応じて(設置場所に応じて)ノズル部材22に垂直若しくは傾斜状態で形成されている。尚、ノズル部材22は、鋳型若しくは射出成形等によって形成された後、環状凹部22aの内壁面間を貫通するように連通穴22bを形成すると共に、ノズル部材22の下端面から軸線上に軸穴22cを形成した後、ノズル22dを穿孔している。これにより、軸穴22cの連通穴22bよりも下方はパッキン27により密閉されている。さらに、ノズル部材22の下端面には、ノズル部材22を水平面内で手動若しくは自動で回転させる際の工具先端が挿入されるスリット22eが形成されている。このため、ノズル部材22の上端及び下端は、天板204の上面並びに基板205の底面と面一となるように各板204,205に臨んでいる。   The nozzle member 22 has an annular recess 22a whose entire outer periphery is recessed in an annular shape to form an annular supply path 26 (shown only in FIG. 9) in cooperation with the inner wall of the shaft holding hole 21b, and an inner portion of the annular recess 22a. A communication hole 22b penetrating between the wall surfaces via the axis, a shaft hole 22c formed on the axis of the nozzle member 22 and communicating with the communication hole 22b, and an upper end portion of the shaft hole 22c are communicated with the nozzle member 22. And a nozzle 22d opened at the upper end surface. The nozzle 22d is formed vertically or inclined with respect to the nozzle member 22 as necessary (depending on the installation location). The nozzle member 22 is formed by casting or injection molding, and then formed with a communication hole 22b so as to penetrate between the inner wall surfaces of the annular recess 22a. After forming 22c, the nozzle 22d is perforated. Accordingly, the packing hole 27 is sealed below the communication hole 22b of the shaft hole 22c. Furthermore, the lower end surface of the nozzle member 22 is formed with a slit 22e into which a tool tip is inserted when the nozzle member 22 is rotated manually or automatically within a horizontal plane. Therefore, the upper end and the lower end of the nozzle member 22 face the plates 204 and 205 so as to be flush with the upper surface of the top plate 204 and the bottom surface of the substrate 205.

電磁弁23は、連通路21aの他端に接続されたコモンポート23aと、供給穴21cに接続される常閉ポート23bと、常開ポート挿入穴21dに接続される常開ポート23cとを備えている。   The electromagnetic valve 23 includes a common port 23a connected to the other end of the communication path 21a, a normally closed port 23b connected to the supply hole 21c, and a normally open port 23c connected to the normally open port insertion hole 21d. ing.

そして、コンプレッサー等のコントロールバルブ11が駆動すると、その圧力気体が供給管12並びにポート部材18を介してベース部材21へと供給され、連通路21a、コモンポート23a、電磁弁23、常閉ポート23b、供給穴21c、供給路26(環状凹部22a)、連通穴22b、軸穴22cをこの順に介してノズル22dから噴射される。   When the control valve 11 such as a compressor is driven, the pressurized gas is supplied to the base member 21 through the supply pipe 12 and the port member 18, and the communication path 21a, the common port 23a, the electromagnetic valve 23, and the normally closed port 23b. The nozzle 22d is sprayed through the supply hole 21c, the supply path 26 (annular recess 22a), the communication hole 22b, and the shaft hole 22c in this order.

この際、ノズル部材22は、ベース部21に対して水平面内で回転可能となっていることから、ノズル22dから噴射される圧力気体の噴射方向を調整することができる。また、供給穴21cから供給される圧力気体は、環状凹部22aによってノズル部材22の水平面内での回転位置に拘わらず供給することができる。   At this time, since the nozzle member 22 is rotatable in a horizontal plane with respect to the base portion 21, the injection direction of the pressure gas injected from the nozzle 22d can be adjusted. The pressurized gas supplied from the supply hole 21c can be supplied regardless of the rotational position of the nozzle member 22 in the horizontal plane by the annular recess 22a.

ワーク処理ステージ300は、ワーク種類(例えば、半導体チップ、ウエハ、液晶、ガラス基板、表示装置のパネルなど)に応じ、その作業工程(例えば、成膜、レジスト塗布、露光、現像、エッジング、レジスト剥離、洗浄、検査等)に応じて順序だてして配置される。この際、ワーク処理ステージ300のワーク受け渡し高さは、ワーク浮上搬送ユニット200によって浮上されているワーク浮上位置(搬送面)よりも下方に位置する。また、ワーク処理ステージ300には、垂直方向(真上)に向けて圧力気体を噴射する噴射部(図示せず)が設けられており、ワークWの受け渡しの際にワークWを浮上させる。この際、噴射部は圧力気体の噴射圧力を制御することによってワークWを昇降させる。   The work processing stage 300 is a work process (for example, film formation, resist coating, exposure, development, edging, resist stripping) according to a work type (for example, semiconductor chip, wafer, liquid crystal, glass substrate, display device panel, etc.). , Cleaning, inspection, etc.). At this time, the workpiece transfer height of the workpiece processing stage 300 is positioned below the workpiece floating position (transfer surface) that is lifted by the workpiece floating transfer unit 200. In addition, the work processing stage 300 is provided with an injection unit (not shown) that injects the pressure gas in the vertical direction (directly above), and the work W is floated when the work W is delivered. At this time, the injection unit moves the workpiece W up and down by controlling the injection pressure of the pressure gas.

このため、噴射部は、その噴射圧力のみが制御されれば、上述したノズル部材22のような回転等は不要であるため、ワーク処理のための装置であっても容易に組み付けることができる。   For this reason, if only the injection pressure is controlled, since the rotation etc. like the nozzle member 22 mentioned above are unnecessary, the injection part can be easily assembled even if it is an apparatus for work processing.

ワーク受渡装置400は、躯体フレーム401と、この躯体フレーム401に固定されたスライドレール402に案内されて互いに接近・離反可能な一対のスライド噴射台403とを備えている。   The workpiece delivery device 400 includes a housing frame 401 and a pair of slide ejection tables 403 that are guided by a slide rail 402 fixed to the housing frame 401 and can approach and separate from each other.

躯体フレーム401のうち、少なくともスライド噴射台403の変位方向に延在されてスライドレール402を固定した主フレーム404には、比較的軽量なアルミ等の金属材料の押し出し成形フレームが用いられており、図10(A),(B)に示すように、2つのダクト部405,406を形成することで各スライド噴射台403への圧力気体の供給を可能としている。   The main frame 404 that extends in at least the displacement direction of the slide injection table 403 and fixes the slide rail 402 in the housing frame 401 uses a relatively lightweight extruded frame of a metal material such as aluminum, As shown in FIGS. 10A and 10B, by forming two duct portions 405 and 406, it is possible to supply the pressure gas to each slide injection table 403.

スライド噴射台403は、櫛歯状に分割された複数の噴射台本体407を備え、上述したワーク処理ステージ300の噴射部から噴射された圧力気体は、この複数の噴射台本体407の各隙間から真上に向けて噴射される。   The slide injection table 403 includes a plurality of injection table main bodies 407 divided into comb teeth, and the pressure gas injected from the injection unit of the work processing stage 300 described above is discharged from each gap between the plurality of injection table main bodies 407. It is jetted right above.

各噴射台本体407には、例えば、上述した1列分の噴射ユニット10(ここでは図示せず)が設けられ、これにより、ワークWの浮上搬送並びに浮上停止が可能となっている。この際、主フレーム404から噴射台本体407の噴射ユニット10への圧力気体の供給は、例えば、可撓性又は伸縮性を有する供給パイプ(図示せず)等を用いて供給することができる。   For example, each of the injection table main bodies 407 is provided with the above-described one row of the injection units 10 (not shown here), thereby enabling the workpiece W to be floated and stopped. At this time, the pressure gas can be supplied from the main frame 404 to the injection unit 10 of the injection table main body 407 using, for example, a supply pipe (not shown) having flexibility or stretchability.

尚、ワークWの浮上搬送は、全てのノズル22dを搬送方向に向けることにより実現することができる。また、ワークWの浮上停止(浮遊停止)は各ノズル22dの向きを交互に逆向きとするなど、ワークWに対する圧力を調整することで実現することができる。さらに、浮上搬送と浮上停止との中間、即ち、ワークWを浮上搬送しつつ所定の位置で浮上停止させるためには、ワークWの浮上搬送による慣性を考慮してその搬送方向と逆向きのノズル22dの噴射量(又は数)を制御することで徐々に浮上搬送速度を弱めることで実現することができる。   The floating conveyance of the workpiece W can be realized by directing all the nozzles 22d in the conveyance direction. Further, the floating stop (floating stop) of the workpiece W can be realized by adjusting the pressure with respect to the workpiece W such that the directions of the nozzles 22d are alternately reversed. Further, in order to stop floating at a predetermined position while floating and conveying the workpiece W, in consideration of the inertia due to the floating conveyance of the workpiece W, the nozzle in the direction opposite to the conveyance direction is used. This can be realized by gradually decreasing the flying conveyance speed by controlling the injection amount (or number) of 22d.

上記の構成において、ワーク搬送方向上流側から搬送されてきたワークWは(図1参照)、ワーク浮上搬送ユニット200の下段の浮上搬送ステージ203にて一旦浮上停止される(図2参照)。   In the above configuration, the workpiece W conveyed from the upstream side in the workpiece conveyance direction (see FIG. 1) is temporarily suspended (see FIG. 2) at the lower conveyance conveyance stage 203 of the workpiece floating conveyance unit 200.

ここで(或いは、予め)、スライド噴射台403は互いに接近され(図3参照)てワーク処理ステージ300の上方に突出しているため、ワーク浮上搬送ユニット200の下段の浮上搬送ステージ203にて一旦浮上停止されたワークWの受け渡しが可能となっている(図4参照)。   Here (or in advance), since the slide ejection tables 403 are close to each other (see FIG. 3) and protrude above the work processing stage 300, the slide injection table 403 is temporarily lifted by the floating transfer stage 203 at the lower stage of the workpiece floating transfer unit 200. The stopped workpiece W can be delivered (see FIG. 4).

スライド噴射台403にワークWが受け渡されて一旦浮上停止となると、ワーク処理ステージ300の噴射部から垂直方向(真上)に向けて圧力気体が噴射されると共にスライド噴射台403からの圧力気体の噴射が停止される。   Once the workpiece W is delivered to the slide injection table 403 and once suspended, the pressure gas is injected in the vertical direction (directly above) from the injection unit of the workpiece processing stage 300 and the pressure gas from the slide injection table 403. Is stopped.

この際、ワークWの大きさや重量等を考慮して、ワーク処理ステージ300の噴射部からの圧力気体の噴射開始とスライド噴射台403からの圧力気体の噴射停止は徐々に切替えられるように噴射制御される。   At this time, in consideration of the size and weight of the workpiece W, the injection control is performed so that the injection of the pressure gas from the injection unit of the workpiece processing stage 300 and the stop of the injection of the pressure gas from the slide injection table 403 are gradually switched. Is done.

このスライド噴射台403からワーク処理ステージ300への圧力気体の噴射切替が完了すると、スライド噴射台403がワーク処理ステージ300の上方から退避され(図5参照)、ワーク処理ステージ300の噴射部からの圧力気体の噴射量を加減制御することでワークWをワーク処理ステージ300内へと取り込むことができる(図6参照)。   When the injection switching of the pressure gas from the slide injection table 403 to the work processing stage 300 is completed, the slide injection table 403 is retracted from above the work processing stage 300 (see FIG. 5), and the discharge from the injection unit of the work processing stage 300 is performed. The workpiece W can be taken into the workpiece processing stage 300 by adjusting the injection amount of the pressure gas (see FIG. 6).

尚、ワーク処理ステージ300でのワークWの成形・加工処理が終了すると、再び図5に示した状態へと復帰され、以下、上記の取り込みとは逆の順序にてワークWをワーク浮上搬送ユニット200の下段の浮上搬送ステージ203へと戻すことができる。   Note that when the forming / processing of the workpiece W at the workpiece processing stage 300 is completed, the workpiece W is returned to the state shown in FIG. 5. Thereafter, the workpiece W is transferred to the workpiece floating transport unit in the reverse order of the above-described loading. It is possible to return to the lower floating transport stage 203 of 200.

この際、ワーク浮上搬送ユニット200を昇降可能とし、成形・加工処理後のワークを上段の浮上搬送ステージ202へと戻すことも可能である。   At this time, the workpiece floating / conveying unit 200 can be moved up and down, and the workpiece after molding / processing can be returned to the upper floating conveying stage 202.

本発明の一実施形態に係る浮上搬送装置の斜視図である。It is a perspective view of the levitation conveyance device concerning one embodiment of the present invention. 本発明の一実施形態に係る浮上搬送装置の斜視図である。It is a perspective view of the levitation conveyance device concerning one embodiment of the present invention. 本発明の一実施形態に係る浮上搬送装置の斜視図である。It is a perspective view of the levitation conveyance device concerning one embodiment of the present invention. 本発明の一実施形態に係る浮上搬送装置の斜視図である。It is a perspective view of the levitation conveyance device concerning one embodiment of the present invention. 本発明の一実施形態に係る浮上搬送装置の斜視図である。It is a perspective view of the levitation conveyance device concerning one embodiment of the present invention. 本発明の一実施形態に係る浮上搬送装置の斜視図である。It is a perspective view of the levitation conveyance device concerning one embodiment of the present invention. 本発明の一実施形態に係る浮上搬送装置に使用される浮上搬送ステージの平面図である。It is a top view of the levitation conveyance stage used for the levitation conveyance apparatus which concerns on one Embodiment of this invention. 本発明の一実施形態に係る浮上搬送装置に使用される噴射部の斜視図である。It is a perspective view of the injection part used for the levitation conveyance device concerning one embodiment of the present invention. 本発明の一実施形態に係る浮上搬送装置に使用される噴射部の断面図である。It is sectional drawing of the injection part used for the levitation conveyance apparatus which concerns on one Embodiment of this invention. 本発明の一実施形態に係る浮上搬送装置に使用されるフレームを示し、(A)はフレームの一例の拡大断面図、(B)はフレームの他例の拡大断面図である。The flame | frame used for the levitation conveyance apparatus which concerns on one Embodiment of this invention is shown, (A) is an expanded sectional view of an example of a frame, (B) is an expanded sectional view of the other example of a frame. ワーク搬送経路の説明図である。It is explanatory drawing of a workpiece conveyance path | route. ワーク受け渡し例の説明図である。It is explanatory drawing of the example of a workpiece | work delivery.

符号の説明Explanation of symbols

300…ワーク処理ステージ
400…ワーク受け渡し装置
403…スライド噴射台(圧力気体噴射台)
DESCRIPTION OF SYMBOLS 300 ... Work processing stage 400 ... Work delivery device 403 ... Slide injection table (pressure gas injection table)

Claims (4)

所定方向に圧力気体を噴射してワークを浮上搬送する搬送経路の搬送面よりも下方にワーク処理ステージが配置され、該ワーク処理ステージの上方に対して出没可能に前記搬送経路の一部を形成する櫛歯状の圧力気体噴射台が配置され、前記ワーク処理ステージに前記圧力気体噴射台の隙間から上方に向けて圧力気体を噴射する噴射部が設けられ、
前記圧力気体噴射台が前記搬送面と該ワーク処理ステージの間で前記ワーク処理ステージワークを浮上させたまま受け渡しを行い、
前記圧力気体噴射台は、互いに接近・離反可能に変位することで前記ワーク処理ステージの上方に対して形成する一対のスライド噴射台であることを特徴とする浮上搬送装置。
A work processing stage is disposed below the transfer surface of the transfer path for injecting the pressure gas in a predetermined direction to float and transfer the work, and a part of the transfer path is formed so as to be able to appear and move above the work process stage. A comb-like pressure gas injection table is arranged, and an injection unit for injecting pressure gas upward from the gap of the pressure gas injection table is provided on the work processing stage,
The pressure gas injection table performs delivery while the workpiece processing stage workpiece is floated between the transfer surface and the workpiece processing stage,
The levitation transfer apparatus according to claim 1, wherein the pressure gas injection table is a pair of slide injection tables formed with respect to an upper side of the work processing stage by being displaced so as to approach and separate from each other.
前記受け渡しは、前記搬送経路の上流側から前記ワーク処理ステージの上方にワークが浮上搬送されてきた際には前記圧力気体噴射台が前記ワーク処理ステージの上方に位置してワークを浮上させたまま受け取った後に前記ワーク処理ステージの上方から退避して前記噴射部によりワークを前記ワーク処理ステージへと受け渡し、前記ワーク処理ステージでの処理が終了した際には
前記噴射部によりワークを搬送面よりも上方へと浮上させた後に前記圧力気体噴射台が前記ワーク処理ステージの上方に位置してワークを浮上させたまま受け取った後に前記搬送経路へと受け渡すことを特徴とする請求項1に記載の浮上搬送装置。
In the delivery, when the work is lifted and transported from the upstream side of the transport path to above the work processing stage, the pressure gas injection table is positioned above the work processing stage and the work is left floating. After receiving, the workpiece is retreated from above the workpiece processing stage, and the workpiece is transferred to the workpiece processing stage by the injection unit. When the processing at the workpiece processing stage is completed, the injection unit transfers the workpiece from the transport surface. 2. The method according to claim 1, wherein the pressure gas injection table is positioned above the workpiece processing stage after being levitated upward and then received while the workpiece is levitated, and then transferred to the conveyance path. Levitation transport device.
前記圧力気体噴射台は、出没方向に沿って延びる一対のフレーム枠を備え、該フレーム枠に圧力気体供給用のダクト部を形成したことを特徴とする請求項1又は請求項2に記載の浮上搬送装置。   3. The levitation according to claim 1, wherein the pressure gas injection table includes a pair of frame frames extending along a protruding and retracting direction, and a duct portion for supplying a pressure gas is formed on the frame frame. Conveying device. 前記フレーム枠に形成されたダクト部が複数に分割されていることを特徴とする請求項3に記載の浮上搬送装置。   The levitation conveyance apparatus according to claim 3, wherein a duct portion formed in the frame frame is divided into a plurality of parts.
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