JP5329001B2 - Manufacturing method of semiconductor device - Google Patents

Description

  The present invention relates to a method for manufacturing a semiconductor device.

  2. Description of the Related Art In recent years, a solid-state imaging device having an optical waveguide has been proposed for a solid-state imaging device that is one of semiconductor devices in order to increase the amount of light incident on a photoelectric conversion unit.

  Patent Document 1 discloses a solid-state imaging device having a waveguide constituted by a low refractive index cladding layer and a high refractive index core layer embedded in a groove surrounded by the cladding layer. As a method for manufacturing such a solid-state imaging device, a method of forming a core layer on the entire surface of a clad layer having an opening corresponding to a photoelectric conversion portion is shown. It is described that a passivation film, a planarizing film, an on-chip color filter, and an on-chip microlens are formed after the core layer is formed.

JP 2010-103458 A

  The inventors have found that the solid-state imaging device manufacturing method described in Patent Document 1 has difficulty in flattening the solid-state imaging device. Therefore, it has been difficult to form on-chip color filters and on-chip microlenses with high accuracy in the prior art. As a result, the image quality was lowered. Also, semiconductor devices other than solid-state imaging devices are becoming taller as the degree of integration increases, and the difficulty of flattening in the manufacturing process has become an issue.

  As described above, in the conventional technique, it is difficult to form a semiconductor device with high accuracy. In view of the above problems, an object of the present invention is to provide a method for manufacturing a semiconductor device that can be easily planarized.

A method for manufacturing a semiconductor device according to one aspect of the present invention includes: a first region in which a plurality of photoelectric conversion units are arranged; and a second region in which a circuit for processing signals from the plurality of photoelectric conversion units is arranged. A method of manufacturing a semiconductor device comprising: a semiconductor substrate including: a first portion disposed on the first region of the semiconductor substrate; and an insulator including a second portion disposed on the second region. A first step of forming a plurality of openings at positions overlapping with each of the plurality of photoelectric conversion portions of the insulator; and after the first step, inside each of the plurality of openings, the first And a second step of forming a first member on the second portion, a third step of removing at least a portion of the portion of the first member disposed on the second region, and the third step A fourth step of flattening the first member after the step, and the plurality of openings First member formed inside the people is characterized in that it constitutes an optical waveguide.

A method for manufacturing a semiconductor device according to another aspect of the present invention includes: a first region in which a plurality of photoelectric conversion units are disposed; and a second region in which a circuit for processing signals from the plurality of photoelectric conversion units is disposed. A semiconductor device comprising: a semiconductor substrate including: a first portion disposed on the first region of the semiconductor substrate; and an insulator including a second portion disposed on the second region. A first step of forming a plurality of openings at a position overlapping each of the plurality of photoelectric conversion portions of the insulator; and after the first step, inside each of the plurality of openings, the first A second step of forming a first member on the first and second portions; a third step of removing at least a portion of the first member disposed on the second region; and After the third step, after forming the second member on the first member, the second member is flattened. Fourth includes a step, a first member formed in the interior of each of the plurality of apertures is characterized in that it constitutes an optical waveguide for.

  According to the present invention, a semiconductor device can be manufactured with high accuracy. In particular, a solid-state imaging device with high image quality can be manufactured.

FIG. 3 is a diagram illustrating a method for manufacturing the solid-state imaging device according to the first embodiment. FIG. 3 is a diagram illustrating a method for manufacturing the solid-state imaging device according to the first embodiment. 1 is a schematic diagram of a planar structure of a solid-state imaging device according to Embodiment 1. FIG. FIG. 10 is a diagram illustrating a method for manufacturing the solid-state imaging device according to the second embodiment. FIG. 10 is a diagram illustrating a method for manufacturing the solid-state imaging device according to the second embodiment. FIG. 10 is a diagram illustrating a method for manufacturing the solid-state imaging device according to the second embodiment.

  The present invention relates to a method for manufacturing a semiconductor device, and more specifically, a first region in which a plurality of openings are arranged at a first density in an insulator on a semiconductor substrate and a first region smaller than the first density. The present invention can be applied to a configuration in which a second region having a plurality of openings with a density of 2 is provided and the plurality of openings in the first region are embedded with an embedding member. Here, the second density may be zero. In such a configuration, the embedded member is thinned only in the second region.

  For example, the present invention can be applied to a method for manufacturing a solid-state imaging device. A solid-state imaging device is a semiconductor device having a semiconductor substrate on which a plurality of photoelectric conversion units are arranged. Specifically, the present invention can be applied to the case where an optical waveguide is formed by forming an opening corresponding to each of the plurality of photoelectric conversion portions and embedding a high refractive material in the opening. In this case, the second region corresponds to a peripheral region in which a circuit for processing a signal generated in the photoelectric conversion unit is arranged. This is because the peripheral region is usually not provided with an opening for forming an optical waveguide, or even if provided, it is smaller than the imaging region.

  A preferred embodiment of the present invention will be described by taking a solid-state imaging device manufacturing method as an example. The semiconductor substrate 101 includes an imaging region 103 in which a plurality of photoelectric conversion units 105 are arranged, and a peripheral region 104 in which a circuit for processing a signal from the photoelectric conversion unit 105 is arranged. An insulator is disposed on the semiconductor substrate 101. The insulator is, for example, a plurality of interlayer insulating films 113a to 113e.

First, the opening 116 is formed in the insulator. The opening is formed at a position overlapping with the plurality of photoelectric conversion portions 105 in the insulator. A large number of photoelectric conversion units 105 can be arranged in the imaging region 103.
For this reason, the imaging region 103 has a higher density of openings than the peripheral region 104.

  Next, the first waveguide member 118 is formed on the insulator in which the opening is formed. The first waveguide member 118 is formed on an insulator disposed in the imaging region 103 so as to fill the opening 116 described above. Further, the first waveguide member 118 is formed on an insulator disposed in the peripheral region 104. At this time, the entire inside of the opening need not be filled. An air gap may remain in a part of the inside of the opening.

  A portion of the first waveguide member 118 disposed in the peripheral region 104 is removed. As a removal method, etching, lift-off, or the like can be used. A portion that is a target of removal of the first waveguide member 118 will be described from a viewpoint when viewed in a plane and a viewpoint when viewed in a depth direction.

In plan view, at least a part of the portion disposed in the peripheral region 104 of the first waveguide member 118 is removed. It is preferable to remove most of the portion arranged in the peripheral region 104.
More preferably, the entire surface of the portion disposed in the peripheral region 104 is removed.

  As for the degree of removal in the depth direction, at least a part of the first waveguide member 118 may be removed. That is, the first waveguide member 118 disposed in the peripheral region 104 may be at least thinned. It is preferable to leave a part of the first waveguide member 118 so that the underlying insulator is not exposed. However, the entire first waveguide member 118 may be removed in the depth direction. That is, the first waveguide member 118 may be removed until the underlying insulator is exposed.

  After removing the portion of the first waveguide member 118 disposed in the peripheral region 104, the imaging region 103 and the peripheral region 104 are flattened.

  The effects of the manufacturing method described above will be described. When the first waveguide member 118 is formed on a surface where the density of the openings 116 is greatly different, such as the imaging region 103 and the peripheral region 104, a portion with a high density of the openings 116 and a portion with a low density of the openings 116 are formed. There is a big step between them. Therefore, the level difference cannot be sufficiently reduced in the conventional planarization process.

  On the other hand, in this invention, the part distribute | arranged to the peripheral region 104 among the 1st waveguide members 118 is removed. The portion arranged in the peripheral region 104 is a portion with a high step. By this step, the level difference between the imaging region 103 and the peripheral region 104 can be reduced to some extent before the planarization step. Therefore, the exposed surface can be sufficiently flattened in the subsequent flattening step.

  In a semiconductor device manufacturing method, a plurality of chips are generally formed on a single wafer. In particular, in the solid-state imaging device, the imaging regions 103 and the peripheral regions 104 are alternately arranged with a relatively long period. Therefore, a step with a long cycle is likely to occur. Since it is difficult to reduce such a step by a method such as CMP, the above-described problem is particularly significant in the conventional method for manufacturing a solid-state imaging device. Therefore, when the present invention is applied to a method for manufacturing a solid-state imaging device, the effect is high.

Note that the present invention is not limited to the manufacturing method of the solid-state imaging device. For example, in the formation of wiring by a damascene method, which will be described later, a metal film is formed on an insulator having openings.
At this time, if there is a density distribution in the openings arranged in the insulator, the metal film is formed relatively thick in the portion where the opening density is high, and the metal film is relatively formed in the portion where the opening density is low. May be formed thinly. The damascene method is widely used as a method of forming wiring in general semiconductor devices in addition to solid-state imaging devices. By applying the present invention in such a case, the step can be reduced.

  In the following description, a case where electrons are signal charges will be described, but holes may be signal charges. When holes are signal charges, the conductivity type of the semiconductor region may be reversed.

  A first embodiment of a method of manufacturing a solid-state imaging device according to the present invention will be described using the drawings. 1 and 2 are schematic views of a cross-sectional structure of the solid-state imaging device in each process of the present embodiment.

  The solid-state imaging device 100 includes a semiconductor substrate 101. The semiconductor substrate is a part of a semiconductor material among members constituting the solid-state imaging device. For example, the semiconductor substrate includes a semiconductor wafer having a semiconductor region formed by a known semiconductor manufacturing process. An example of the semiconductor material is silicon. The interface between the semiconductor material and another material is the main surface 102 of the semiconductor substrate. For example, another material is a thermal oxide film disposed on the semiconductor substrate in contact with the semiconductor substrate.

  In this embodiment, a known semiconductor substrate can be used as the semiconductor substrate 101. A P-type semiconductor region and an N-type semiconductor region are disposed on the semiconductor substrate 101. Reference numeral 102 denotes a main surface of the semiconductor substrate 101. In this embodiment, the main surface 102 is an interface between the semiconductor substrate 101 and a thermal oxide film (not shown) stacked on the semiconductor substrate 101. The semiconductor substrate 101 has an imaging region 103 in which a plurality of pixels are arranged, and a peripheral region 104 in which a signal processing circuit for processing signals from the pixels is arranged. Description of the imaging region 103 and the peripheral region 104 will be described later.

  In the present specification, the plane is a plane parallel to the main surface 102. For example, the main surface 102 in a region where a photoelectric conversion unit, which will be described later, is arranged, or the main surface 102 in the channel of the MOS transistor may be used as a reference. In this specification, a cross section is a plane that intersects a plane.

  In the process shown in FIG. 1A, each semiconductor region is formed in the semiconductor substrate 101, and a gate electrode and a multilayer wiring are formed on the semiconductor substrate 101. In the imaging region 103 of the semiconductor substrate 101, a photoelectric conversion unit 105, a floating diffusion (hereinafter referred to as FD) 106, and source / drain regions of a well 107 for a pixel transistor are formed. The photoelectric conversion unit 105 is, for example, a photodiode. The photoelectric conversion unit 105 includes an N-type semiconductor region disposed on the semiconductor substrate 101. Electrons generated by photoelectric conversion are collected in the N-type semiconductor region of the photoelectric conversion unit. The FD 106 is an N-type semiconductor region. Electrons generated in the photoelectric conversion unit 105 are transferred to the FD 106 and converted into a voltage. The FD 106 is electrically connected to the input node of the amplification unit. Alternatively, the FD 106 is electrically connected to the signal output line. In this embodiment, the FD 106 is electrically connected to the gate electrode 110b of the amplification transistor via the plug 114. In the pixel transistor well 107, source / drain regions such as an amplifying transistor for amplifying a signal and a reset transistor for resetting an input node of the amplifying transistor are formed. A peripheral transistor well 108 is formed in the peripheral region 104 of the semiconductor substrate 101. In the peripheral transistor well 108, the source / drain regions of the peripheral transistor constituting the signal processing circuit are formed. In addition, an element isolation portion 109 may be formed on the semiconductor substrate 101. The element isolation unit 109 electrically isolates the pixel transistor or the peripheral transistor from other elements. The element isolation unit 109 is STI (Shallow Trench Isolation), LOCOS (LOCAL Oxidation of Silicon), or the like.

  In this step, the transfer gate electrode 110a and the gate electrode 110b are formed. The transfer gate electrode 110a and the gate electrode 110b are arranged on the semiconductor substrate 101 via an oxide film (not shown). The transfer gate electrode 110a controls charge transfer between the photoelectric conversion unit 105 and the FD 106. The gate electrode 110b is a gate of a pixel transistor and a peripheral transistor.

  Further, in this step, a protective layer 111 is formed on the semiconductor substrate 101. For example, the protective layer 111 is a silicon nitride film. The protective layer 111 may be composed of a plurality of layers including a silicon nitride film and a silicon oxide film. The protective layer 111 may have a function of reducing damage given to the photoelectric conversion unit in a later step. Alternatively, the protective layer 111 may have an antireflection function. Alternatively, it may have a function of preventing metal diffusion in the silicide process. Further, an etch stop member 117 is formed on the opposite side of the protective layer 111 from the semiconductor substrate 101. The area of the etch stop member 117 is preferably larger than the area of the bottom of the opening 116 formed thereafter. Note that the protective layer 111 and the etch stop member 117 are not necessarily formed.

  Subsequently, a first wiring layer 112a, a second wiring layer 112b, and a plurality of interlayer insulating films 113a to 113e are formed. In this embodiment, the first wiring layer 112a and the second wiring layer 112b are formed by the damascene method. For convenience, the first to fifth interlayer insulating films 113 a to 113 e are sequentially formed from the side closer to the semiconductor substrate 101.

  A first interlayer insulating film 113 a is formed in the imaging region 103 and the peripheral region 104. If necessary, the surface of the first interlayer insulating film 113a opposite to the semiconductor substrate 101 may be planarized. A through hole is formed in the first interlayer insulating film 113a. A plug 114 that electrically connects the conductive member of the first wiring layer 112 a and the semiconductor region of the semiconductor substrate 101 is disposed in the through hole. The plug 114 is made of a conductive material. For example, the plug 114 is tungsten.

  Next, a second interlayer insulating film 113b is formed on the side opposite to the semiconductor substrate 101 with respect to the first interlayer insulating film 113a. A portion of the second interlayer insulating film 113b corresponding to the region where the conductive member of the first wiring layer 112a is disposed is removed by etching. Thereafter, a metal film serving as a material for the first wiring layer is formed in the imaging region 103 and the peripheral region 104. Thereafter, the metal film is removed by a method such as CMP until the second interlayer insulating film is exposed. By such a procedure, the conductive members constituting the wiring of the first wiring layer 112a are arranged in a predetermined pattern.

  Subsequently, a third interlayer insulating film 113 c and a fourth interlayer insulating film 113 d are formed in the imaging region 103 and the peripheral region 104. Here, a portion of the fourth interlayer insulating film 113d corresponding to the region where the conductive member of the second wiring layer 112b is disposed is removed by etching. Next, a portion of the third interlayer insulating film 113c corresponding to a region where a plug for electrically connecting the conductive member of the first wiring layer 112a and the conductive member of the second wiring layer 112b is disposed is removed by etching. To do.

  Thereafter, a metal film serving as a material for the second wiring layer and plug is formed in the imaging region 103 and the peripheral region 104. Thereafter, the metal film is removed by a method such as CMP until the fourth interlayer insulating film is exposed. By such a procedure, the wiring pattern of the second wiring layer 112b and the plug pattern are obtained. In addition, after the third interlayer insulating film 113c and the fourth interlayer insulating film 113d are formed, a plug for electrically connecting the conductive member of the first wiring layer 112a and the conductive member of the second wiring layer 112b is first disposed. A portion corresponding to the region to be removed may be removed by etching.

  Finally, a fifth interlayer insulating film 113e is formed in the imaging region 103 and the peripheral region 104. If necessary, the surface of the fifth interlayer insulating film 113e opposite to the semiconductor substrate 101 may be planarized by a method such as CMP.

  The first wiring layer 112a and the second wiring layer 112b may be formed by a method other than the damascene method. An example of a method other than the damascene method will be described. After the first interlayer insulating film 113a is formed, a metal film serving as a material for the first wiring layer is formed in the imaging region 103 and the peripheral region 104. Next, portions of the metal film other than the region where the conductive member of the first wiring layer 112a is disposed are removed by etching. Thereby, the wiring pattern of the first wiring layer 112a is obtained. Thereafter, a second interlayer insulating film 113b and a third interlayer insulating film 113c are formed, and a second wiring layer 112b is formed in the same manner. After the second wiring layer 112b is formed, a fourth interlayer insulating film 113d and a fifth interlayer insulating film 113e are formed. The surfaces of the third interlayer insulating film 113c and the fifth interlayer insulating film 113e opposite to the semiconductor substrate 101 are planarized as necessary.

  The first wiring layer 112 a and the second wiring layer 112 b are arranged at different heights with respect to the main surface of the semiconductor substrate 101. In this embodiment, the conductive members of the first wiring layer 112a and the second wiring layer 112b are made of copper. The conductive member may be formed of a material other than copper as long as it is a conductive material. Except for the portion electrically connected by the plug, the conductive member of the first wiring layer 112a and the conductive member of the second wiring layer 112b are insulated from each other by the interlayer insulating film 113c. The number of wiring layers is not limited to two, and the wiring layer may be a single layer or three or more layers.

  Further, an etch stop film, a metal diffusion preventing film, or a film having both functions may be disposed between the interlayer insulating films. In this embodiment, the plurality of interlayer insulating films 113a to 113e are silicon oxide films. For the silicon oxide film, the silicon nitride film serves as a metal diffusion prevention film. Therefore, a diffusion prevention film 115 is disposed between the interlayer insulating films. Note that the diffusion preventing film 115 is not necessarily arranged.

  In FIG. 1B, an opening 116 is formed in a region overlapping with the photoelectric conversion portion 105 of the plurality of interlayer insulating films 113a to 113e. When the diffusion preventing film 115 is provided, an opening is formed in the diffusion preventing film 115.

  First, a mask pattern for etching (not shown) is laminated on the side opposite to the semiconductor substrate 101 with respect to the interlayer insulating film 113e. The mask pattern for etching is disposed outside the region where the opening 116 is to be disposed. In other words, the etching mask pattern has an opening in a region where the opening 116 is to be disposed. The etching mask pattern is, for example, a photoresist patterned by photolithography and development.

  Subsequently, the plurality of interlayer insulating films 113a to 113e and the diffusion prevention film 115 are etched using the etching mask pattern as a mask. Thereby, the opening 116 is formed. Alternatively, the opening 116 may be formed by etching a plurality of times under different conditions. After the etching, the mask pattern for etching may be removed.

  When the etch stop member 117 is provided, it is preferable that etching is performed until the etch stop member 117 is exposed in the process of FIG. The etch stop member 117 preferably has an etching rate under etching conditions for etching the interlayer insulating film 113a smaller than the etching rate of the interlayer insulating film 113a. When the interlayer insulating film 113a is a silicon oxide film, the etch stop member 117 may be a silicon nitride film or a silicon oxynitride film. Further, the etch stop member 117 may be exposed by multiple times of etching under different conditions.

  Regarding the cross-sectional shape of the opening 116, the opening 116 does not necessarily have to penetrate all of the first to fifth interlayer insulating films 113a to 113e. The recess of the fifth interlayer insulating film 113e may be the opening 116. Alternatively, the opening 116 may penetrate only a part of the first to fifth interlayer insulating films 113a to 113e. Regarding the planar shape of the opening 116, the boundary of the opening 116 is a closed loop such as a circle or a rectangle. Alternatively, the planar shape of the opening 116 may be a shape like a groove extending over the plurality of photoelectric conversion units 105. That is, in this specification, when a region where the interlayer insulating film 113e is not arranged in a certain plane is surrounded or sandwiched between regions where the interlayer insulating film 113e is arranged, the interlayer insulating film 113e is opened. 116.

  Regarding the position of the opening 116 in the plane, at least a part of the opening 116 is arranged so as to overlap with the photoelectric conversion unit 105 in a plane. That is, when the opening 116 and the photoelectric conversion unit 105 are projected on the same plane, there is a region where both the opening 116 and the photoelectric conversion unit 105 are projected on the same plane.

  In this embodiment, an opening 116 is formed in a region overlapping the photoelectric conversion unit 105, and no opening 116 is formed in the peripheral region 104. However, the opening 116 may be formed in the peripheral region 104. In that case, the density of the openings 116 formed in the imaging region 103 may be higher than the density of the openings 116 formed in the peripheral region 104. The density of the openings 116 can be determined by the number of openings 116 arranged per unit area. Alternatively, the density of the openings 116 can be determined by the ratio of the area occupied by the openings 116.

  In FIG. 1C, the first waveguide member 118 is formed inside the opening 116 and on the fifth interlayer insulating film 113e. Specifically, the first waveguide member 118 a is formed in the imaging region 103 and the peripheral region 104. The first waveguide member 118 can be formed by film formation by CVD or sputtering, or by applying an organic material typified by a polyimide polymer. Note that the first waveguide member 118 may be formed by a plurality of processes having different conditions. For example, in the first process, the first waveguide member 118 is formed under the condition that the adhesion to the base is high, and in the next process, the first guide is formed under the condition that the embedding property inside the opening 116 is high. The waveguide member 118 may be formed. Alternatively, the first waveguide member 118 may be formed by sequentially forming a plurality of different materials. For example, the first waveguide member 118 may be formed by first depositing a silicon nitride film and then depositing an organic material having high embedding performance. 1B, when the first interlayer insulating film 113a is etched until the etch stop member 117 is exposed, the first waveguide member 118 is disposed so as to be in contact with the etch stop member 117. The

  The material of the first waveguide member 118 may be any material that is higher than the refractive index of the interlayer insulating films 113a to 113e. When the interlayer insulating films 113a to 113e are silicon oxide films, examples of the material of the first waveguide member 118 include a silicon nitride film and a polyimide organic material. The silicon nitride film has a refractive index in the range of 1.7 to 2.3. The refractive index of the surrounding silicon oxide film is in the range of 1.4 to 1.6. Therefore, light entering the interface between the first waveguide member 118 and the interlayer insulating films 113a to 113e is reflected based on Snell's law. Accordingly, the first waveguide member 118 can be confined inside. In addition, the hydrogen content of the silicon nitride film can be increased, and the dangling bonds of the substrate can be terminated by the hydrogen supply effect. As a result, noise such as white scratches can be reduced. The polyimide organic material has a refractive index of about 1.7. The embedding property of polyimide organic material is superior to that of silicon nitride film. The material of the first waveguide member 118 is preferably selected as appropriate in consideration of the balance between optical characteristics such as a difference in refractive index and advantages in the manufacturing process.

  Here, the positional relationship between the plurality of interlayer insulating films 113a to 113e and the first waveguide member 118 disposed in the opening 116 will be described. In a certain plane, a region where the first waveguide member 118 is disposed is surrounded or sandwiched between regions where the plurality of interlayer insulating films 113a to 113e are disposed. In other words, the first part and the first part of the plurality of interlayer insulating films 113a to 113e are along the direction intersecting the direction in which the photoelectric conversion unit 105 and the first waveguide member 118 disposed in the opening 116 are arranged. A different second portion and a first waveguide member 118 disposed in the opening 116 are arranged. The direction intersecting the direction in which the photoelectric conversion unit 105 and the first waveguide member 118 arranged in the opening 116 are aligned is, for example, a direction parallel to the main surface 102 of the semiconductor substrate 101.

  A first waveguide member 118 is disposed at a position overlapping the photoelectric conversion unit 105 on the semiconductor substrate 101. A plurality of interlayer insulating films 113 a to 113 e are arranged around the first waveguide member 118.

  The refractive index of the material forming the first waveguide member 118 is preferably higher than the refractive index of the plurality of interlayer insulating films 113a to 113e. With such a refractive index relationship, the amount of light leaking into the plurality of interlayer insulating films 113a to 113e out of the light incident on the first waveguide member 118 can be reduced. Therefore, if at least a part of the first waveguide member 118 overlaps the photoelectric conversion unit 105, the amount of light incident on the photoelectric conversion unit 105 can be increased.

  The refractive index of the first waveguide member 118 is not necessarily higher than that of the plurality of interlayer insulating films 113a to 113e. If the light incident on the first waveguide member 118 does not leak into the surrounding insulator, it functions as an optical waveguide. For example, a member that reflects light may be arranged on the side wall of the opening 116, and the first waveguide member 118 may be embedded in the other part of the opening 116. There may be an air gap between the first waveguide member 118 disposed in the opening 116 and the plurality of interlayer insulating films 113a to 113e. The air gap may be a vacuum or a gas may be provided. In these cases, the refractive index of the material forming the first waveguide member 118 and the refractive index of the material forming the plurality of interlayer insulating films 113a to 113e may have any magnitude relationship.

  Subsequently, in the process illustrated in FIG. 2A, the portion disposed in the peripheral region 104 of the first waveguide member 118 is removed. First, an etching mask (not shown) is stacked on the first waveguide member 118. The etching mask has an opening at the position of the peripheral region 104. Next, the portion disposed in the peripheral region 104 of the first waveguide member 118 is removed by etching.

  At this time, it is preferable that the first waveguide member 118 is etched so that the portion disposed in the peripheral region 104 remains with a predetermined thickness. Thus, the presence of the first waveguide member 118 with a predetermined film thickness can reduce damage to the semiconductor substrate due to etching. Of course, the first waveguide member 118 may be removed until the fifth interlayer insulating film 113e is exposed.

  In the present embodiment, all portions of the first waveguide member 118 disposed in the peripheral region 104 are etched. In other words, no etching mask is provided in the peripheral region 104. Thus, it is preferable that the area of the portion to be etched is large. However, only a part of the portion arranged in the peripheral region 104 may be etched. The area here is an area in a plane.

  Further, the method of removing the portion disposed in the peripheral region 104 of the first waveguide member 118 is not limited to etching. For example, a part of the first waveguide member 118 may be removed by lift-off. Specifically, a base film is formed in the peripheral region 104 before forming the first waveguide member 118. By removing the base film after forming the first waveguide member 118, the first waveguide member 118 disposed thereon is also removed at the same time.

  In this step, a part of the first waveguide member 118 arranged in the imaging region 103 may be removed.

  2B, the surface of the first waveguide member 118 opposite to the semiconductor substrate 101 is flattened. The planarization of the first waveguide member 118 is performed by, for example, CMP, polishing, or etching. In this embodiment, planarization is performed by CMP.

  In the process of FIG. 2B, the surface of the first waveguide member 118 opposite to the semiconductor substrate 101 does not have to be completely flat. The level difference on the surface opposite to the semiconductor substrate 101 of the first waveguide member 118 before planarization may be reduced by the planarization process.

  For example, the film thickness of the first waveguide member 118 after being planarized in the peripheral region 104 is preferably in the range of 200 nm to 500 nm. In addition, in the region where the opening 116 of the imaging region 103 is not disposed, the film thickness of the first waveguide member 118 after planarization is preferably in the range of 50 nm to 350 nm.

  In this embodiment, the surface of the first waveguide member 118 opposite to the semiconductor substrate 101 is exposed during the planarization process. Therefore, the exposed surface of the first waveguide member 118 disposed on the imaging region 103 and the exposed surface of the first waveguide member 118 disposed on the peripheral region 104 are flattened. When another member is formed on the first waveguide member 118, the exposed surface of the other member is flattened. Alternatively, in the step of FIG. 2A, when the first waveguide member 118 is removed until the underlying fifth interlayer insulating film 113e is exposed, the exposed surface of the fifth interlayer insulating film 113e is planarized.

  The planarization in this step may be performed so that a step is reduced between the exposed surface on the imaging region 103 and the exposed surface on the peripheral region 104. Alternatively, planarization may be performed within the exposed surface above the imaging region 103, and at the same time, planarization may be performed within the exposed surface above the peripheral region 104.

  2C, the sixth interlayer insulating film 119, the third wiring layer 112c, and the intralayer lens 120 are formed. First, a sixth interlayer insulating film 119 is formed on the first waveguide member 118. The sixth interlayer insulating film 119 is preferably formed of the same material as the fifth interlayer insulating film 113e. In the present embodiment, the sixth interlayer insulating film 119 is a silicon oxide film. Next, a through hole for forming a plug 121 that electrically connects the predetermined conductive member of the second wiring layer 112b and the predetermined conductive member of the third wiring layer 112c is formed. Plugs 121 are formed in the through holes.

  Next, the third wiring layer 112c is formed. In the present embodiment, the conductive member of the third wiring layer 112c is made of aluminum. As the method for forming the third wiring layer 112c, the method described in the method for forming the first wiring layer 112a or the first wiring layer 112b is appropriately used.

  Next, the in-layer lens 120 is formed. The in-layer lens 120 is disposed corresponding to the photoelectric conversion unit 105. The intralayer lens 120 is formed of, for example, a silicon nitride film. A known method can be used as a method of forming the in-layer lens 120. Thereafter, if necessary, a color filter, a microlens, or the like is formed on the opposite side of the in-layer lens 120 from the semiconductor substrate 101.

  FIG. 3 is a schematic diagram illustrating a planar structure of the solid-state imaging device according to the present embodiment. A cross section along the line AB in FIG. 3 is shown in FIGS.

In FIG. 3, the solid-state imaging device 100 includes an imaging region 103 and a peripheral region 104.
The imaging region 103 may further include a light receiving region 103a and a light shielding region 103b. A plurality of pixels are two-dimensionally arranged in the imaging region 103. The photoelectric conversion portions of the pixels arranged in the light shielding region 103b are shielded from light. The signal from such a pixel can be used as a reference for the black level.

  The peripheral area 104 is an area other than the imaging area 103. In the present embodiment, a vertical scanning circuit 302, a horizontal scanning circuit 303, a column amplifier 304, a column ADC (Analog to Digital Converter) 305, a memory 306, a timing generator 307, and a plurality of pads 308 are arranged in the peripheral region 104. The These circuits are circuits for processing signals from the pixels. Note that a part of the above circuit may not be arranged.

  In this embodiment, the region where the first waveguide member 118 is removed is a region 301 outside the broken line in FIG. As shown in FIG. 3, it is desirable that most of the peripheral region 104 is the region 301.

In the present embodiment, when the first waveguide member 118 is formed, an opening 116 is provided on a surface serving as a base thereof. This opening 116 is disposed only in the imaging region 103. Alternatively, the density of the openings 116 arranged in the imaging region 103 is higher than the density of the openings arranged in the peripheral region 104. For this reason, the first waveguide member 118 is formed thicker in a region where the number of openings 116 is smaller than in a region where many openings 116 are arranged. That is, a step is generated between an area where the opening 116 is arranged (imaging area 103) and an area where the opening 116 is small (peripheral area 104).
Therefore, this step can be reduced by removing the portion of the first waveguide member 118 disposed in the peripheral region 104.

[Modification of Example 1]
The step of FIG. 2B, that is, the step of removing the portion formed in the peripheral region 104 of the first waveguide member 118 after the first waveguide member 118 is planarized may be performed. Particularly in this step, it is preferable to remove the position where the plug 121 is disposed and the first waveguide member 118 disposed within a predetermined distance from the position where the plug 121 is disposed. Thereafter, a sixth interlayer insulating film 119 is formed.

  According to such a process, it becomes easy to form a through hole for arranging the plug 121. The reason for this will be briefly described. If the first waveguide member 118 is not removed before the sixth interlayer insulating film 119 is formed, the fifth interlayer insulating film 113e, the first waveguide member 118, and the sixth interlayer insulating film are formed from the side close to the semiconductor substrate 101. 119 are sequentially stacked. Then, in order to form a through hole, three removal steps (for example, etching) under conditions suitable for each layer are required. On the other hand, by removing the first waveguide member 118 first and then forming the sixth interlayer insulating film 119, the region where the through hole is to be formed is formed on the fifth interlayer from the side close to the semiconductor substrate 101. An insulating film 113e and a sixth interlayer insulating film 119 are sequentially stacked. By forming the fifth interlayer insulating film 113e and the sixth interlayer insulating film 119 with the same material, the removal step for forming the through hole can be performed under one condition. Therefore, the through hole can be formed in two removal steps including the removal step of the first waveguide member 118 performed previously.

  A second embodiment of the method for manufacturing a solid-state imaging device according to the present invention will be described. 4 to 6 are schematic views of the cross-sectional structure of the solid-state imaging device in each step of the present embodiment. Parts having the same functions as those in FIG. 1 or 2 are denoted by the same reference numerals, and detailed description thereof is omitted.

  FIG. 4A shows the same process as the process shown in FIG. That is, FIG. 4A shows a state in which the portion disposed in the peripheral region 104 of the first waveguide member 118 is removed. The steps up to FIG. 4A in the manufacturing method of the present embodiment are the same as the steps of FIG. 1A to FIG.

  In the step shown in FIG. 4B, the second waveguide member 122 is formed on the opposite side of the first waveguide member 118 from the semiconductor substrate 101. The second waveguide member 122 is formed in the imaging region 103 and the peripheral region 104. In this embodiment, the difference between the step of forming the first waveguide member 118 and the step of forming the second waveguide member 122 is arranged in the peripheral region 104 of the first waveguide member 118 between the two steps. The step of removing the part is performed. For this reason, the second waveguide member 122 may be formed of the same material as the first waveguide member 118. Alternatively, the second waveguide member 122 may be formed by the same method as when the first waveguide member 118 is formed. Of course, the second waveguide member 122 may be formed of a material different from that of the first waveguide member 118, or the second waveguide member 122 may be formed by a method different from the method of forming the first waveguide member 118. Also good.

  In the present embodiment, the first waveguide member 118 and the second waveguide member 122 are formed of the same material. Specifically, the second waveguide member 122 is made of silicon nitride. In this case, the second waveguide member 122 can be formed by CVD or sputtering. Alternatively, the second waveguide member 122 may be formed by applying an organic material typified by a polyimide polymer.

  In the present embodiment, both the first waveguide member 118 and the second waveguide member are formed by CVD. However, process conditions differ between the two. Note that the second waveguide member 122 may be formed by a plurality of processes having different conditions. Further, the second waveguide member 122 may be formed by sequentially forming a plurality of different materials.

  FIG. 4C shows a planarization process after the second waveguide member 122 is formed. In this embodiment, the surface of the second waveguide member 122 opposite to the semiconductor substrate 101 is flattened by CMP. The planarization can be performed by a known method. For example, planarization may be performed by polishing or etching. Further, the first waveguide member 118 or a member closer to the semiconductor substrate 101 than the second waveguide member may be exposed by planarization. In the present embodiment, the first waveguide member 118 is exposed in the peripheral region 104. The second waveguide member 122 remains in the imaging region 103. However, the second waveguide member 122 may remain in the peripheral region 104.

In the step of FIG. 4C, the surface of the second waveguide member 122 opposite to the semiconductor substrate 101 does not have to be completely flat. The level difference on the surface opposite to the semiconductor substrate 101 of the second waveguide member 122 before planarization may be reduced by the planarization process.
For example, in the peripheral region 104, the total thickness of the first waveguide member 118 and the second waveguide member 122 after planarization is preferably in the range of 200 nm to 500 nm.
In addition, in the region where the opening 116 of the imaging region 103 is not arranged, the total thickness of the first waveguide member 118 and the second waveguide member 122 after planarization is in the range of 50 nm to 350 nm. Is preferred.

  In this embodiment, the surface of the second waveguide member 122 opposite to the semiconductor substrate 101 is exposed during the planarization process. When another member is formed on the second waveguide member 122, the exposed surface of the other member is flattened.

  In the step of FIG. 5A, the low refractive index member 123 is formed. The refractive index of the low refractive index member 123 is lower than the refractive index of the member disposed on the semiconductor substrate 101 side with respect to the low refractive index folding member 123 and disposed in contact with the low refractive index member 123. The member disposed on the semiconductor substrate 101 side with respect to the low refractive index member 123 and in contact with the low refractive index member 123 is, in other words, exposed before the low refractive index member 123 is formed. It is a member. In the present embodiment, the first waveguide member 118 and the second waveguide member 122 correspond. That is, in this embodiment, the refractive index of the low refractive index member 123 is lower than the refractive indexes of the first waveguide member 118 and the second waveguide member 122. Specifically, the low refractive index member 123 is formed of a silicon oxynitride film. The refractive index of the silicon oxynitride film is about 1.72. Note that the low refractive index member 123 is not necessarily provided. When the low refractive index member 123 is not provided, the step of FIG. 5A can be omitted.

  5B, the portion formed in the peripheral region 104 of the first waveguide member 118, the portion formed in the peripheral region 104 of the second waveguide member 122, or both are removed. In particular, in this step, the first waveguide member 118 and the second waveguide member 122 disposed within a predetermined distance from the position where the plug 121 described later is disposed and the position where the plug 121 is disposed may be removed. preferable. When the low refractive index member 123 is disposed, the portion disposed in the peripheral region 104 of the low refractive index member 123 is removed.

  Depending on the process prior to this process, either the first waveguide member 118 or the second waveguide member 122 may not be disposed in the peripheral region 104. In such a case, the first waveguide member 118 or the second waveguide member 122 that is disposed in the peripheral region 104 is removed.

  A well-known method can be used for the removal method. For example, in this embodiment, the portions formed in the peripheral region 104 of the first waveguide member 118, the second waveguide member 122, and the low refractive index member 123 are removed by etching.

  In the step of FIG. 5C, a seventh interlayer insulating film 124 is formed. The seventh interlayer insulating film 124 is preferably formed of the same material as the fifth interlayer insulating film 113e. If necessary, the surface of the seventh interlayer insulating film 124 opposite to the semiconductor substrate 101 may be planarized.

  According to the process shown in FIG. 5B and FIG. 5C, it becomes easy to form the through hole 125 for arranging the plug 121. The reason for this will be briefly described. If the first waveguide member 118, the second waveguide member 122, and the low refractive index member 123 are not removed before forming the seventh interlayer insulating film 124, the fifth interlayer insulating film 113e and the seventh interlayer insulating film 124 are removed. The first waveguide member 118, the second waveguide member 122, and the low refractive index member 123 are disposed between the two. Then, in order to form the through hole 125, a removal process (for example, etching) under conditions suitable for each layer may be required. In contrast, the first waveguide member 118, the second waveguide member 122, and the low refractive index member 123 are removed before the seventh interlayer insulating film 124 is formed, and then the seventh interlayer insulating film 124 is formed. By forming, the fifth interlayer insulating film 113e and the seventh interlayer insulating film 124 are disposed in contact with each other in the region where the through hole 125 is to be formed. By forming the fifth interlayer insulating film 113e and the seventh interlayer insulating film 124 with the same material, the step of forming the through hole 125 can be performed in a single process. Therefore, the through hole 125 can be formed in two removal steps including the removal step of the first waveguide member 118 performed previously. Since it becomes easy to form the through hole 125 in this way, the process is simplified.

  In the step of FIG. 6A, the through hole 125 is formed at a position overlapping the predetermined conductive member of the second wiring layer 112b of the seventh interlayer insulating film 124. The through hole 125 is formed by etching, for example.

  In the step of FIG. 6B, the third wiring layer 112c and the intralayer lens 120 are formed. First, the plug 121 is formed in the through hole 125. The plug 121 electrically connects a predetermined conductive member of the second wiring layer 112b and a predetermined conductive member of the third wiring layer 112c.

  Next, the third wiring layer 112c is formed. In the present embodiment, the conductive member of the third wiring layer 112c is made of aluminum. As the method for forming the third wiring layer 112c, the method described in the step of forming the first wiring layer 112a or the first wiring layer 112b is appropriately used. The conductive member of the third wiring layer 112c may be made of a metal other than aluminum.

  In this step, the inner lens 120 is formed. The in-layer lens 120 is disposed corresponding to the photoelectric conversion unit 105. The intralayer lens 120 is formed of, for example, a silicon nitride film. A known method can be used as a method of forming the in-layer lens 120. In this embodiment, the material forming the in-layer lens 120 is also disposed in the peripheral region 104. However, the material forming the inner lens 120 may be disposed only in the imaging region 103.

  Further, an intermediate member having an intermediate refractive index between the inner lens 120 and the seventh interlayer insulating film 124 may be disposed. In this embodiment, a silicon oxynitride film (not shown) is disposed between the inner lens 120 and the seventh interlayer insulating film 124. Specifically, the refractive index of the silicon nitride film (inner lens 120) is about 2.00, the refractive index of the silicon oxynitride film (intermediate member) is about 1.72, and the silicon oxide film (seventh interlayer insulating film 124). Has a refractive index of about 1.45.

  With such a configuration, the reflectance can be reduced. This point will be briefly described. In general, when light travels from a medium having a refractive index n1 to a medium having a refractive index n2, the reflectance increases as the difference between n1 and n2 increases. By disposing an intermediate member having an intermediate refractive index between the inner lens 120 and the seventh interlayer insulating film 124, the difference in refractive index at the interface is reduced. As a result, compared with the case where the inner lens 120 and the seventh interlayer insulating film 124 are arranged in contact with each other, the reflectance when light enters the seventh interlayer insulating film 124 from the inner lens 120 is reduced. be able to. Similarly, the low refractive index member 123 having a refractive index intermediate between the seventh interlayer insulating film 124 and the second waveguide member 122 is arranged, so that the difference in refractive index at the interface is reduced. . As a result, the reflectance when light enters the second waveguide member 122 from the seventh interlayer insulating film 124 can be reduced.

  The degree of reduction in reflectance due to the arrangement of the intermediate member varies depending on the relationship between the film thickness d of the intermediate member, the refractive index N of the intermediate member, and the wavelength p of the incident light. This is because multiple reflected light from a plurality of interfaces cancel each other. Theoretically, when k is an arbitrary integer greater than or equal to 0, the reflectance is most reduced when the condition of the expression (1) is satisfied.

  That is, when the film thickness of the intermediate member is an odd multiple of p / 4N, the reflectance is theoretically reduced most. Therefore, what is necessary is just to set the film thickness of an intermediate member based on said Formula (1). In particular, the film thickness of the intermediate member preferably satisfies the following formula (2). Furthermore, the case where k = 0 in the formula (2) is most preferable.

  For example, the refractive index of the seventh interlayer insulating film 124 is 1.45, the refractive index of the intermediate member is 1.72, the refractive index of the inner lens 120 is 2.00, and the wavelength of incident light is 550 nm. Think. At this time, when the film thickness of the intermediate member is 80 nm, the transmittance of light transmitted from the inner lens 120 to the seventh interlayer insulating film 124 is about 1.00. On the other hand, when the inner lens 120 and the seventh interlayer insulating film 124 are arranged in contact with each other, the transmittance is about 0.97.

  In the step of FIG. 6C, the color filters 127a and 127b and the microlens 128 are formed. First, the eighth insulating film 126 is formed on the opposite side of the intralayer lens 120 from the semiconductor substrate 101. The eighth insulating film 126 is made of, for example, an organic material. If necessary, the surface of the eighth insulating film 126 opposite to the semiconductor substrate 101 is planarized. For example, the eighth insulating film 126 whose surface opposite to the semiconductor substrate 101 is planarized can be formed by applying an organic material constituting the eighth insulating film 126.

  Next, color filters 127a and 127b are formed. The color filters 127 a and 127 b are arranged corresponding to the photoelectric conversion unit 105. The wavelength of light transmitted through the color filter 127a and the wavelength of light transmitted through the color filter 127b may be different. Subsequently, a micro lens 128 is formed on the opposite side of the semiconductor substrate 101 with respect to the color filters 127a and 127b. A known method can be used as a method of forming the microlens 128.

  According to the manufacturing method of the present embodiment, it is easy to planarize after forming the first waveguide member 118. Therefore, when forming the in-layer lens 120, the color filter 127, or the micro lens 128, these members can be formed on a highly flat base. Therefore, the in-layer lens 120, the color filter 127, or the microlens 128 can be formed with high accuracy. As a result, the image quality can be improved.

  [Modification of Example 2] In Example 2, after the second waveguide member 122 was formed, the planarization step shown in FIG. 4C was performed. However, planarization may be performed after the step of FIG. 4A, and then the second waveguide member 122 may be formed.

DESCRIPTION OF SYMBOLS 100 Solid-state imaging device 101 Semiconductor substrate 103 Imaging region 104 Peripheral region 105 Photoelectric conversion part 113a-113e 1st-5th interlayer insulation film 116 Opening 118 1st waveguide member

Claims (28)

A semiconductor substrate including a first region in which a plurality of photoelectric conversion units are disposed, and a second region in which a circuit for processing signals from the plurality of photoelectric conversion units is disposed;
A semiconductor device manufacturing method comprising: a first portion disposed on the first region of the semiconductor substrate; and an insulator including a second portion disposed on the second region,
A first step of forming a plurality of apertures to overlap with the plurality of each of the photoelectric conversion portion of the insulator,
After the first step, the interior of each of the plurality of apertures, a second step of forming a first member on the first and second portions,
A third step of removing at least a part of a portion of the first member disposed on the second region of the first member;
A fourth step of flattening the first member after the third step,
A method of manufacturing a semiconductor device, wherein a first member formed inside each of the plurality of openings constitutes an optical waveguide . A wiring layer including a conductive member;
The method for manufacturing a semiconductor device according to claim 1, wherein a depth of the plurality of openings is larger than a thickness of the conductive member. 3. The method of manufacturing a semiconductor device according to claim 1, wherein no opening is formed in the second portion in the first step. The at least part of the first member remains on the first portion where the plurality of openings are not formed after the fourth step. 4. A method for manufacturing a semiconductor device according to claim 3. After the fourth step, the film thickness of the at least part of the first member that remains on the first portion where the plurality of openings are not formed is in the range of 50 nm to 350 nm. ,
5. The method of manufacturing a semiconductor device according to claim 4, wherein a film thickness of the first member remaining on the second portion after the fourth step is in a range of 200 nm to 500 nm. The semiconductor device manufacturing method according to claim 1, further comprising a fifth step of forming a second member on the first member after the fourth step. Method. The semiconductor device manufacturing method according to claim 6, further comprising a sixth step of removing a portion of the first and second members disposed on the second region after the fifth step. Method. The method for manufacturing a semiconductor device according to claim 6, wherein the first member and the second member are made of the same material. The method of manufacturing a semiconductor device according to claim 6, wherein a refractive index of the second member is smaller than a refractive index of the first member. 6. The method according to claim 1, further comprising a sixth step of removing a portion of the first member disposed on the second region after the fourth step. The manufacturing method of the semiconductor device of description. In the third step, the portion of the first member disposed on the second region is removed by etching,
The part of the portion disposed on the second region of the first member remains on the insulator after the third step. A method for manufacturing a semiconductor device according to claim 1. The method for manufacturing a semiconductor device according to claim 1, wherein a refractive index of the first member is higher than a refractive index of the insulator. An etch stop layer is disposed between the semiconductor substrate and the insulator;
The plurality of openings are each formed by performing etching on the insulator a plurality of times under different conditions until the etch stop layer is exposed in the first step. A method for forming a semiconductor device according to claim 1. A semiconductor substrate including a first region in which a plurality of photoelectric conversion units are disposed, and a second region in which a circuit for processing signals from the plurality of photoelectric conversion units is disposed;
A method for manufacturing a semiconductor device comprising: a first portion disposed on the first region of the semiconductor substrate; and an insulator including a second portion disposed on the second region,
A first step of forming a plurality of openings at positions overlapping with each of the plurality of photoelectric conversion portions of the insulator;
After the first step, a second step of forming a first member inside each of the plurality of openings, on the first and second portions,
A third step of removing at least a part of a portion of the first member disposed on the second region of the first member;
A fourth step of flattening the second member after forming the second member on the first member after the third step;
A method of manufacturing a semiconductor device, wherein a first member formed inside each of the plurality of openings constitutes an optical waveguide. A wiring layer including a conductive member;
The method of manufacturing a semiconductor device according to claim 14, wherein a depth of the plurality of openings is larger than a thickness of the conductive member. 16. The method of manufacturing a semiconductor device according to claim 14, wherein no opening is formed in the second portion in the first step. 17. The device according to claim 14, wherein after the fourth step, at least a part of the first member remains on the first portion where the plurality of openings are not formed. A manufacturing method of a semiconductor device given in any 1 paragraph. After the fourth step, the film thickness of the at least part of the first member that remains on the first portion where the plurality of openings are not formed is in the range of 50 nm to 350 nm. ,
18. The method of manufacturing a semiconductor device according to claim 17, wherein the film thickness of the first member remaining on the second portion after the fourth step is in the range of 200 nm to 500 nm. The method according to any one of claims 14 to 18, further comprising a sixth step of removing a portion of the first and second members disposed on the second region after the fourth step. A method for manufacturing a semiconductor device according to one item. The method according to any one of claims 14 to 18, further comprising a sixth step of removing a portion of the second member disposed on the second region after the fourth step. A method for manufacturing a semiconductor device. 21. The method of manufacturing a semiconductor device according to claim 14, wherein the first member and the second member are made of the same material. 21. The method of manufacturing a semiconductor device according to claim 14, wherein a refractive index of the second member is smaller than a refractive index of the first member. In the fourth step, the portion of the second member disposed on the second region is removed until the first member is exposed,
19. The method according to claim 14, further comprising a sixth step of removing a portion of the first member disposed on the second region after the fourth step. The manufacturing method of the semiconductor device of description. In the third step, the portion of the first member disposed on the second region is removed by etching,
24. Any one of claims 14 to 23, wherein after the third step, a part of the portion of the first member disposed on the second region remains on the insulator. A method for manufacturing a semiconductor device according to claim 1. 25. The method of manufacturing a semiconductor device according to claim 14, wherein a refractive index of the first member is higher than a refractive index of the insulator. An etch stop layer is disposed between the semiconductor substrate and the insulator;
The plurality of openings are each formed by performing etching on the insulator a plurality of times under different conditions until the etch stop layer is exposed in the first step. The method for forming a semiconductor device according to any one of claims 14 to 25. The method for forming a semiconductor device according to claim 14, further comprising a step of forming a third member on the second member after the fourth step. 28. The method of forming a semiconductor device according to claim 27, wherein a refractive index of the third member is lower than a refractive index of the second member.

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