JP5326138B2 - Inspection apparatus and inspection method for magnetic foreign matter in powder material - Google Patents

Description

  The present invention relates to an inspection device for a magnetic foreign material in a powder material and an inspection method thereof.

  Thermosetting resin compositions capable of transfer molding are widely used for sealing semiconductor devices such as ICs and LSIs. Among thermosetting resin compositions, epoxy resin compositions are usually premixed with a predetermined amount of each raw material weighed in a mixing device, and then a single-screw kneader, twin-screw kneader, heating roll, continuous kneader, etc. After being melt-kneaded using a heating kneader, the mixture is pulverized by a pulverizer and tableted by a tablet machine. In these steps, manufacturing apparatuses such as a mixing device, a heat kneader, and a pulverizer are worn, and a magnetic material such as iron powder may be slightly mixed into the resin material as a foreign substance (see Patent Document 1 below). ).

  The ceramic raw material powder used as a raw material in the ceramic molding process itself contains a magnetic element such as iron or nickel as an impurity component. That is, in such a raw material substance, a magnetic element already dissolved in a solid solution such as iron or the like is often incorporated as an impurity in a component constituting the raw material powder in the course of manufacturing the raw material powder (see Patent Document 2 below). ).

  In addition, when magnetic foreign matter or the like is mixed in cosmetics for a base, for example, cosmetic powder (containing iron oxide 1 to 10%), which is a powdered powder mixed with oil, there is a problem that the reliability as a cosmetic is impaired. there were.

On the other hand, a non-sensitive device using a SQUID (Superconducting Quantum Interference Device) magnetic detection device (sensor) having a sensitivity that is 10 ³ times that of a conventional high-sensitivity magnetic sensor and 10 ⁶ times that of a Hall element. A destructive inspection method has been proposed (see Patent Document 3 below).

JP 2008-128941 A Japanese Patent Laid-Open No. 10-268013 Japanese Patent Application Laid-Open No. 07-077516

  However, in the magnetic detection method as described above, when inspecting a magnetic foreign substance in a solid material such as cosmetic powder and semiconductor encapsulant, the base material is magnetized, so the background noise becomes large and cannot be measured. There was a problem.

  Until now, it has been possible to detect magnetic foreign substances contained in a base material that is slightly magnetized by using a horizontal magnetization method or a SQUID gradiometer, but the base material is used as the cosmetic powder or semiconductor sealing material. In the case of powder, the magnetization of the base material that is powder after magnetizing becomes a detection signal of a very large gradient magnetic field, which makes it difficult to determine the magnetic foreign matter signal.

  In order to solve the above problems, the present invention reduces the background noise by performing magnetization of the powder material as the base material and then canceling the magnetization of the powder as the base material. It is an object of the present invention to provide an inspection apparatus for magnetic foreign substances in a powder material and an inspection method thereof that can accurately detect magnetic foreign substances.

In order to achieve the above object, the present invention provides
[1] In an inspection apparatus for magnetic foreign matter in a powder material, a magnet for applying a magnetic field to the powder material in the state of the powder material, and the powder after magnetism that is disposed downstream of the magnet for magnetism It comprises a stirring means for stirring the body material, and a SQUID magnetic detection device that is arranged downstream of the stirring means and detects a magnetic foreign substance in the powder material after stirring.

  [2] In the inspection apparatus for magnetic foreign matter in the powder material according to [1] above, the magnet for magnetism is configured to perform horizontal magnetization on the powder material.

  [3] In the inspection apparatus for magnetic foreign matter in the powder material according to [1] above, the magnet for magnetism is configured to perform vertical magnetization on the powder material.

  [4] In the inspection apparatus for magnetic foreign matter in the powder material according to [1] above, a container made of a non-magnetic material in which the powder material is sealed is conveyed.

  [5] The inspection apparatus for magnetic foreign matter in the powder material according to [4] above, wherein the container is a capsule or a sachet.

  [6] The inspection apparatus for magnetic foreign matter in the powder material according to [5], wherein the capsule or the sachet is conveyed by a belt.

  [7] In the inspection apparatus for magnetic foreign matter in the powder material according to [5] above, the capsule or sachet is transported through a tube for transporting with gas.

  [8] In the inspection apparatus for magnetic foreign matter in the powder material according to [7] above, a branch pipe is formed in the tube, and a blower device is disposed in the branch pipe. And a blade.

  [9] The inspection apparatus for magnetic foreign matter in the powder material according to [1] above, wherein the powder material is a cosmetic powder.

  [10] The inspection apparatus for magnetic foreign matter in the powder material according to [1], wherein the powder material is a resin composition used for sealing a semiconductor device.

  [11] In the inspection apparatus for magnetic foreign matter in the powder material according to [10] above, the resin composition is a thermosetting resin composition.

  [12] In the inspection apparatus for magnetic foreign matter in the powder material according to [1], the magnetic foreign matter is iron, nickel, or cobalt, or an alloy containing any of iron, nickel, or cobalt. It is characterized by.

  [13] In the inspection apparatus for magnetic foreign matter in the powder material according to [1] above, the magnet for magnetism is a permanent magnet.

  [14] In the inspection apparatus for magnetic foreign matter in the powder material according to [1], the magnet for magnetism is an electromagnet.

  [15] In a method for inspecting a magnetic foreign material in a powder material, a step of preparing a container enclosing the powder material, a step of applying a magnetic field to the powder material by a magnet for magnetism, and a magnetization of the powder material A step of stirring the powder material later, and a step of detecting magnetic foreign substances in the powder material by a SQUID magnetic detection device after the powder material is stirred.

  [16] In the inspection method for magnetic foreign matter in the powder material according to [15], the powder material is moved in the X direction while the position of the SQUID magnetic detection device is fixed. One-dimensional scanning is performed.

  [17] The method for inspecting a magnetic foreign material in a powder material according to [15] above, wherein the two-dimensional scanning of the powder material is performed by moving the position of the SQUID magnetic detection device two-dimensionally. To do.

  [18] In the inspection method for magnetic foreign matter in the powder material according to [15] above, a plurality of SQUID magnetic detection devices are arranged in a direction orthogonal to the moving direction of the powder material, It is characterized by carrying out the inspection in the traveling direction and the width direction at the same time.

  According to the present invention, the following effects can be achieved.

  (1) Magnetic foreign matter in the powder material can be clearly detected without being affected by the magnetization of the base material.

  (2) Magnetization is performed in the state of powder before solidification, and after the powder is once stirred, magnetic noise in the inspection stage is removed by measuring with a SQUID magnetic sensor (SQUID gradiometer), Accurate inspection of magnetic foreign matter can be performed.

It is a schematic diagram of the inspection apparatus of the magnetic foreign material in the powder material which shows 1st Example of this invention. It is a figure which shows the to-be-inspected object with which the powder material before magnetization provided to the inspection apparatus of the magnetic foreign material in the powder material which shows 1st Example of this invention is enclosed. It is a figure which shows the magnetization of the to-be-inspected object in the test | inspection of the magnetic foreign material in the powder material which shows 1st Example of this invention. It is a figure which shows stirring of the powder material in a to-be-inspected object in the test | inspection of the magnetic foreign material in the powder material which shows 1st Example of this invention. It is a figure which shows the state after stirring of the powder material in a to-be-inspected object in the test | inspection of the magnetic foreign material in the powder material which shows 1st Example of this invention. It is a figure which shows the state of the test | inspection of the powder material in a to-be-inspected object by the SQUID magnetic detection apparatus in the test | inspection of the magnetic foreign material in the powder material which shows 1st Example of this invention. It is a figure which shows the mode of the vertical magnetization of the to-be-inspected object by the gas conveying apparatus which shows 2nd Example of this invention. It is a figure which shows the mode of the vertical magnetism and stirring of a to-be-inspected object by the gas conveying apparatus which shows 3rd Example of this invention. It is a flowchart which shows the inspection method of the magnetic foreign material in the powder material which shows the Example of this invention. It is a schematic diagram which shows the front of the experimental apparatus of the powder material which concerns on this invention. It is a schematic diagram which shows the cross section of the experimental apparatus of the powder material which concerns on this invention. It is a figure which shows the signal output result of the gradient magnetic field by the SQUID magnetism detection apparatus (gradiometer) at the time of carrying out horizontal magnetization of the cosmetic powder which concerns on this invention. It is a figure which shows the signal output result of the gradient magnetic field by a SQUID magnetic detection apparatus (gradiometer) at the time of carrying out horizontal magnetization of the cosmetic powder in which the magnetic foreign material which concerns on this invention was mixed. It is a figure which shows the signal output result of the gradient magnetic field by a SQUID magnetic detection apparatus (gradiometer) at the time of carrying out the vertical magnetization of the cosmetic powder which concerns on this invention. It is a figure which shows the signal output result of the gradient magnetic field by a SQUID magnetic detection apparatus (gradiometer) at the time of carrying out the vertical magnetization of the cosmetic powder in which the magnetic foreign material which concerns on this invention was mixed. It is a plane schematic diagram of the two-dimensional scanning (X-axis and Y-axis direction scanning) in the inspection apparatus for magnetic foreign substances in the powder material of the present invention. It is a schematic plan view when a plurality of SQUID magnetic detection devices are used in the inspection device for magnetic foreign matter in the powder material of the present invention.

  An inspection apparatus for magnetic foreign matter in a powder material according to the present invention includes a magnet for applying a magnetic field to the powder material in the state of the powder material, the magnet after being magnetized, disposed downstream of the magnet for magnetism. An agitation unit for agitating the body material and a SQUID magnetic detection device that is disposed downstream of the agitation unit and detects magnetic foreign matter in the agitated powder material.

  Hereinafter, embodiments of the present invention will be described in detail.

  FIG. 1 is a schematic diagram of an inspection apparatus for magnetic foreign substances in powder material according to a first embodiment of the present invention, and FIG. 2 is a powder material before magnetization provided to the inspection apparatus for magnetic foreign substances in the powder material. It is a figure which shows the to-be-inspected object which is enclosed.

  In these drawings, 1 is a control device, 2 is a conveyor, 2A is a drive pulley with an electric motor on the drive side of the conveyor 2, 2B is a driven pulley of the conveyor 2, 3 'is a powder material containing magnetic foreign matter 3C in a capsule 3A 3B is an object to be inspected before magnetization, 4 is a magnet for horizontal magnetization (tunnel-shaped (cylindrical) permanent magnet) for magnetizing the object to be inspected 3 'before magnetization in the longitudinal direction, and 5 It is a stirrer as a stirring means for stirring the magnetized inspection object 3 disposed downstream of the horizontal magnetic magnet 4. Further, 6 is a magnetic shield, 7 is a SQUID cooling container, 8 is a SQUID magnetic detector (SQUID gradiometer or SQUID magnetometer), and 9 is an inspection stage. The magnetic shield 6 may be provided with an electromagnetic shield made of a conductive material such as aluminum in order to avoid the influence of electromagnetic waves.

  An inspected object 3 ′ before magnetization in which a powder material (a material in a state of powder before solidification or a material in the form of a temporarily formed powder) 3B including magnetic foreign matter 3C is set in a capsule 3A is as follows: It is conveyed by a conveyor 2 through a tunnel-like horizontal magnetized magnet 4 in which N and S poles of permanent magnets are arranged in the longitudinal direction, and as shown in FIG. 3, the powder material 3B and magnetic foreign matter 3C in the capsule 3A. Is continuously magnetized. Therefore, the powder material 3B and the magnetic foreign matter 3C are both magnetized and stirred with a stirrer 5 as shown in FIG. Then, the magnetization of the powder material 3B as the base material cancels each other during stirring, but the magnetization of the magnetic foreign matter 3C that is relatively larger than that of the powder material 3B remains (see FIG. 5). When the inspection object 3 in which the magnetization of the magnetic foreign matter 3C is left is conveyed to the inspection stage 9 and measured by the SQUID magnetic detection device 8 as shown in FIG. 6, a significant signal of the magnetized magnetic foreign matter 3C is obtained. Can be obtained.

  In the present invention, the powder material 3B is enclosed in a container (capsule 3A) and conveyed by a conveyor for processing. However, the powder material 3B is set on a receiving tray or paper (laying paper) and conveyed. You may make it process.

  FIG. 7 is a view showing a state of vertical magnetization of an object to be inspected by the gas conveyance device showing the second embodiment of the present invention.

  In this figure, reference numeral 10 denotes a transfer tube for transferring an object to be inspected 3 'in which a magnetic material 3C is contained in a powder material 3B by gas, and reference numeral 11 is for vertical magnetization to magnetize the object to be inspected 3' before magnetization. It is a magnet (substantially U-shaped permanent magnet).

  In the first embodiment, as shown in FIG. 1, the inspection object 3 'is magnetized with a horizontal permanent magnet with a tunnel (cylindrical) permanent magnet. It is transported by the gas flowing in the transport tube 10 and magnetized by the vertical magnet 11.

  Further, the inspection object 3 magnetized in the transfer tube 10 is configured to be stirred by a stirring device 13 having an axial flow screw 12 disposed in the transfer tube 10.

  In this embodiment, the powder material 3B including the magnetic foreign matter 3C as the object to be inspected is transported in the transport tube 10 by a transport fan (not shown). Thereafter, the magnetized inspection object 3 is stirred by a stirring device 13 having an axial flow screw 12 and conveyed to an inspection stage (not shown).

  FIG. 8 is a diagram showing the state of vertical magnetization and stirring of the object to be inspected by the gas conveying device according to the third embodiment of the present invention, FIG. 8 (a) is a diagram showing the magnetization processing unit, and FIG. Is a diagram showing an agitation processing unit, and FIG. 8C is a schematic diagram showing an example of a capsule in which a powder material 3B containing magnetic foreign matter 3C is enclosed.

  In this figure, reference numeral 10 denotes a transfer tube for transferring an object to be inspected 3 'in which a powder material 3B containing magnetic foreign matter 3C is encapsulated in a capsule 3A by gas, and 11 is a magnetic field applied to the object to be inspected 3' before magnetization. It is a vertical magnet for magnetism (substantially U-shaped permanent magnet).

  In the third embodiment, the powder material 3B containing the magnetic foreign matter 3C is set directly on the transfer tube 10 as the inspection object 3 '. In this embodiment, the powder containing the magnetic foreign matter 3C in the capsule 3A is used. The inspection object 3 ′ enclosing the body material 3 </ b> B is configured to be transported in the transport tube 10. Furthermore, the capsule 3A in which the powder material 3B containing the magnetic foreign matter 3C is sealed includes a lid 3D, a conveying blade 3E formed at the rear end portion, and a stirring blade 3F formed in the axial direction at the peripheral portion. Have.

  In the agitation processing unit, a blower (fan) 15 is disposed in the branch pipe 14 of the transfer tube 10.

  The inspection object 3 ′ in which the powder material 3 </ b> B containing the magnetic foreign matter 3 </ b> C is sealed in the capsule 3 </ b> A is transported in the transport tube 10 by a transport fan (not shown) and magnetized by the vertical magnet 11. Thereafter, the magnetized inspection object 3 is agitated by an agitating unit having a blower 15 and conveyed to an inspection stage (not shown). That is, the inspected object 3 after magnetizing receives the wind from the blower 15 arranged in the branch pipe 14 by the stirring blade 3F formed in the axial direction around the capsule 3A, and the capsule 3A rotates, The powder material 3B containing the magnetic foreign matter 3C enclosed in the capsule 3A is stirred.

  FIG. 9 is a flowchart showing a method for inspecting magnetic foreign matter in the powder material of the present invention.

  (1) First, a powder material 3B containing magnetic foreign matter 3C is prepared as an inspection object 3 '(step S1).

  (2) The inspection object 3 'before magnetization is conveyed, and a magnetic field is applied by a magnet for magnetism (step S2).

  (3) The powder material 3B of the magnetized inspection object 3 is agitated (step S3).

  (4) The agitated inspection object 3 is scanned with the SQUID magnetic detection device to detect the magnetic foreign matter 3C in the powder material 3B (step S4).

  The powder material 3B containing the magnetic foreign matter 3C as the object to be inspected is enclosed in a capsule or a sachet and placed on the conveyor 2 as shown in FIG. 1 or conveyed, or a gas is flowed as shown in FIG. Various processes and inspections are performed by conveying the inside of the transfer tube 10. Further, as shown in FIG. 7, the powder material 3B containing the magnetic foreign matter 3C as the object to be inspected can be directly conveyed through the conveying tube 10 without being put in a capsule or a sachet.

  The experimental results relating to the present invention will be described below.

  FIG. 10 is a schematic diagram showing the front of an experimental apparatus for inspecting magnetic foreign matter in the powder material of the present invention, and FIG. 11 is a schematic diagram showing a cross section of the experimental apparatus for inspecting an object of the present invention.

  In these drawings, 21 is a conveyor frame, 22 is a pedestal set on the conveyor frame 21, and 23 is a sachet with a fastener 25 enclosing cosmetic powder 24 placed on the pedestal 22. A magnetic foreign material 26 is set on the surface 23. Reference numeral 27 denotes a SQUID magnetic detection device. Here, the height of the base 22 is 10 mm, the height of the pouch 23 is about 4 mm, and the height of the SQUID magnetic detector 27 from the conveyor frame 21 is 22.5 mm.

  As measurement conditions, the sensitivity is Med / High, the input range is ± 10 V, LPF (−24 dB) 20 Hz is used, the sampling rate is 1 ms, the data point is 10,000 (10 seconds), and the measurement reference position is directly under the element. In the vicinity, a horizontal magnetism was performed using a ring magnet having a conveyance speed of the inspection object of 6.0 m / min (≈100 mm / sec) and a center magnetic field of about 0.2 T. Further, the sample is cosmetic powder (containing iron oxide 5.0%), and the magnetic foreign matter contained therein is SUJ-2 (high carbon chrome steel), a sphere having a diameter of 0.5 and 0.8 mm.

  Here, the SQUID magnetic detection device 27 is fixed in position, and the sachet 23 enclosing the powder material 24 is moved in the X direction to perform one-dimensional scanning of the powder material. Yes.

  FIG. 12 is a diagram showing a signal output result of a gradient magnetic field by a SQUID magnetic detection device (SQUID gradiometer) when cosmetic powder is horizontally magnetized, and FIG. 12A shows a state in which horizontal magnetism before stirring is applied. As a result, FIG. 12B shows the result of stirring after horizontal magnetization.

  The pouch 23 without the magnetic foreign material 26 enclosing the cosmetic powder 24 is horizontally magnetized as shown in FIG. 3 and placed in the experimental apparatus shown in FIGS. Since the cosmetic powder before stirring is magnetized, a detection signal of a large gradient magnetic field (Gradient Magnetic Field) is obtained as shown in FIG. 12 (a), but as shown in FIG. 12 (b). Moreover, almost no gradient magnetic field detection signal is observed after stirring. This indicates that the magnetized cosmetic powders 24 cancel each other's magnetization by stirring.

  FIG. 13 is a diagram showing a signal output result of the gradient magnetic field by the SQUID magnetic detection device (SQUID gradiometer) when the cosmetic powder mixed with the magnetic foreign matter is horizontally magnetized, and FIG. FIG. 13 (b) shows the result of the state after stirring when a steel ball having a diameter of 0.5 mm is mixed as a magnetic foreign substance. .

  The sachet 23 in which the magnetic foreign material 26 enclosing the cosmetic powder 24 is set is horizontally magnetized as shown in FIG. 3 and placed in the experimental apparatus shown in FIGS. When the cosmetic powder 24 containing a steel ball having a diameter of 0.8 mm is stirred as the magnetic foreign matter 26 and inspected by the SQUID magnetic detection device (SQUID gradiometer) 27, only the steel ball is found as shown in FIG. Since it is magnetized, a signal with a large gradient magnetic field can be obtained. Further, the cosmetic powder 24 containing a steel ball having a diameter of 0.5 mm as the magnetic foreign material 26 is stirred, and the cosmetic powder 24 containing the steel ball after stirring is stirred with a SQUID magnetic detection device (SQUID gradiometer) 27. When inspected, as shown in FIG. 13B, a signal of a gradient magnetic field corresponding to a steel ball having a diameter of 0.5 mm is obtained. In addition, the magnitude | size of the signal of the gradient magnetic field is about 1/5 compared with the case of the steel ball of diameter 0.8mm.

  FIG. 14 is a diagram showing a signal output result of a gradient magnetic field by a SQUID magnetic detection device (SQUID gradiometer) when cosmetic powder is vertically magnetized, and FIG. 14A shows a state in which the vertical magnetism before stirring is applied. FIG. 14 (b) shows the result obtained after stirring in the vertical magnetization.

  The sachet 23 in which the cosmetic powder 24 encapsulated and the magnetic foreign material 26 is not set is vertically magnetized as shown in FIGS. 7 and 8 and placed in the experimental apparatus shown in FIGS. 10 and 11. Since the cosmetic powder 24 before stirring is magnetized, a large gradient magnetic field detection signal is obtained as shown in FIG. 14 (a). However, as shown in FIG. 14 (b), the cosmetic powder 24 is stirred. There are almost no gradient magnetic field detection signals. This indicates that the magnetized cosmetic powders 24 cancel each other's magnetization by stirring.

  FIG. 15 is a diagram showing a signal output result of a gradient magnetic field by a SQUID magnetic detection device (SQUID gradiometer) when cosmetic powder mixed with magnetic foreign matters is vertically magnetized, and FIG. FIG. 15 (b) shows the result of the state after stirring when a steel ball having a diameter of 0.5 mm is mixed as a magnetic foreign substance. .

  The sachet 23 in which the magnetic foreign material 26 enclosing the cosmetic powder 24 is set is vertically magnetized as shown in FIGS. 7 and 8 and placed in the experimental apparatus shown in FIGS. 10 and 11. When the cosmetic powder 24 containing a steel ball having a diameter of 0.8 mm is stirred as the magnetic foreign material 26 and inspected by the SQUID magnetic detection device (SQUID gradiometer) 27, only the steel ball is found as shown in FIG. A large gradient magnetic field signal is obtained because it is magnetized, but as shown in FIG. 15B, the cosmetic powder 24 containing a steel ball having a diameter of 0.5 mm is stirred as the magnetic foreign matter 26, and after the stirring, When the cosmetic powder 24 containing the steel balls is inspected by the SQUID magnetic detector (SQUID gradiometer) 27, a signal of a gradient magnetic field corresponding to the steel balls having a diameter of 0.5 mm is obtained. In the case of a steel ball having a diameter of 0.5 mm, the magnitude of the gradient magnetic field signal is about 1/10 compared to a steel ball having a diameter of 0.8 mm.

  As described above, the cosmetic powder 24 that has been magnetized as a whole by the horizontal magnetization or the vertical magnetization is not magnetized by canceling magnetization with each other by stirring, and magnetic noise at the time of inspection is reduced. Recognize.

  FIG. 16 is a schematic plan view of two-dimensional scanning (X-axis and Y-axis direction scanning) in the inspection apparatus for magnetic foreign matter in the powder material of the present invention.

  In this figure, 31 is a conveyor, 32 is an object to be inspected placed on the conveyor 31, and this object 32 comprises a powder material 33 and a magnetic foreign material 34 mixed therein. Reference numeral 35 denotes a SQUID magnetic detection device. The SQUID magnetic detection device 35 can move not only in the X-axis direction of the conveyor 31 but also in the Y-axis direction, and can perform two-dimensional scanning.

  FIG. 17 is a schematic plan view when a plurality of SQUID magnetic detection devices are used in the inspection device for magnetic foreign matter in the powder material of the present invention.

  In this figure, 41 is a conveyor, 42 to 45 are a plurality of SQUID magnetic detection devices fixed above the conveyor 41, 46 is an inspection object placed on the conveyor 41, and this inspection object 46 is It consists of a powder material 47 and magnetic foreign matters 48 to 50 mixed therein.

  As shown in this figure, since a plurality of SQUID magnetic detection devices (SQUID gradiometers) 42 to 45 are arranged in a direction orthogonal to the moving direction of the inspection object 46, magnetic foreign matter in the inspection object 46 is provided. 48 to 50 can be accurately inspected. That is, two-dimensional scanning in the width direction (Y-axis direction) of the inspection object 46 as well as the traveling direction (X-axis direction) of the inspection object 46 can be performed at a time.

  As described above, by performing scanning in a direction orthogonal to the moving direction of the inspected objects 32 and 46 after magnetization, it is possible to accurately detect the position of the magnetic foreign matter in any position of the inspected objects 32 and 46. Can be inspected.

  As described above, when scanning is performed using the SQUID magnetic detection apparatus of the present invention, only the gradient magnetic field due to the magnetic foreign matter appears prominently, and the presence of the magnetic foreign matter is accurately measured including most position information. . That is, the magnetization of the powder material is canceled by stirring, and the magnetized magnetic foreign matter is detected by the SQUID magnetic detection device.

  In the above description, a typical SQUID gradiometer is used as the SQUID magnetic detection device. However, a SQUID magnetometer may be used.

  Moreover, as a magnetic foreign material, iron, nickel, or cobalt, or an alloy containing either iron, nickel, or cobalt can be accurately detected.

  Furthermore, the powder material is not limited to cosmetic powder, and may be a resin composition as a sealing material for a semiconductor device or, in particular, a thermosetting resin composition. In particular, when a magnetic foreign substance is mixed in the sealing material of the semiconductor device, the pins and wirings in the semiconductor package are short-circuited, causing an electrical failure. In particular, in recent years, semiconductor packages have been extremely reduced in size and thickness, and if fine magnetic foreign matters are included, it causes electrical failure. In order to solve this, the inspection apparatus and method for magnetic foreign matter in the powder material of the present invention are effective and preferable.

  It is also suitable for inspection of ceramic raw material powder, which is a raw material in the ceramic molding process. In particular, the inclusion of magnetic foreign matter in the ceramic raw material powder deteriorates the insulating properties of the ceramic member and loses reliability. In such a case as well, the magnetic foreign matter in the powder material of the present invention is lost. An inspection device is preferred.

  In addition, capsules, sachets, and the like can be used as the container for enclosing the powder material, and the conveying method may be a belt conveyor or a tube that is conveyed by gas.

  Further, since the magnetization to the powder material is easy to arrange and maintain, as shown in FIGS. 3, 7, and 8, it is mainly performed by a permanent magnet. ), A magnetic path may be formed, and an electromagnet may be configured by winding an excitation coil around the magnetic path. In the case of such an electromagnet, the intensity of the magnetic field applied to the object to be inspected can be arbitrarily adjusted by adjusting the excitation current flowing through the excitation coil, so that the accuracy is improved in combination with the performance of the SQUID magnetic detection device. There are advantages that can be adjusted.

  Further, the stirring means of the container for enclosing the powder material is usually used to agitate the object to be inspected by a stirrer. Instead, the container for enclosing the powder material is used by a robot hand (not shown). You may make it grip and stir and return to a belt conveyor again after the stirring. In short, it is important to sufficiently agitate the powder material to cancel the magnetization of the powder material.

  On the inspection stage, the powder material is moved in the X direction while the position of the SQUID magnetic detector is fixed, and the powder material is scanned one-dimensionally, or the position of the SQUID magnetic detector is two-dimensional. 2D scanning is performed, and a plurality of SQUID magnetic detection devices are arranged in a direction orthogonal to the moving direction of the powder material so that the inspection of the moving direction and the width direction of the powder material is performed simultaneously. Can be configured.

  In addition, this invention is not limited to the said Example, Based on the meaning of this invention, a various deformation | transformation is possible and these are not excluded from the scope of the present invention.

  The inspection apparatus and the inspection method for magnetic foreign matter in the powder material of the present invention can be used as a tool that can accurately determine the signal of the magnetic foreign matter mixed in the powder material.

DESCRIPTION OF SYMBOLS 1 Control apparatus 2,31,41 Conveyor 2A Drive pulley with an electric motor 2B Driven pulley 3 Inspection object after magnetization 3 'Inspection object before magnetization 3A Capsule 3B, 33, 47 Powder material 3C, 26, 34, 48-50 Magnetic foreign matter 3D Lid 3E Conveying blade 3F Stirring blade 4 Horizontal magnet (tunnel-shaped permanent magnet)
5 Stirring means (stirrer)
6 Magnetic shield 7 SQUID cooling vessel 8, 27, 35, 42 to 45 SQUID magnetic detector (SQUID gradiometer or SQUID magnetometer)
9 Inspection stage 10 Transport tube 11 Magnet for vertical magnetization (substantially U-shaped permanent magnet)
12 Axial flow screw 13 Stirrer 14 Branch pipe 15 Blower (fan)
21 Conveyor frame 22 Pedestal 23 Small bag 24 Cosmetic powder 25 Fastener 32,46 Inspected object

Claims (18)

(A) a magnet for magnetism that applies a magnetic field to the powder material in the state of the powder material;
(B) a stirring means that is arranged downstream of the magnet for magnetism and that stirs the powder material after magnetisation;
(C) An inspection apparatus for magnetic foreign matter in powder material, comprising a SQUID magnetic detection device that is arranged downstream of the stirring means and detects magnetic foreign matter in the powder material after stirring.   2. The inspection apparatus for magnetic foreign matter in powder material according to claim 1, wherein the magnet for magnetism is configured to perform horizontal magnetization on the powder material. Inspection equipment.   2. The inspection apparatus for magnetic foreign matter in powder material according to claim 1, wherein the magnet for magnetism is configured to perform vertical magnetization on the powder material. Inspection device.   2. The inspection apparatus for magnetic foreign matter in powder material according to claim 1, wherein a container made of a non-magnetic material enclosing said powder material is conveyed. apparatus.   5. The inspection apparatus for magnetic foreign matter in a powder material according to claim 4, wherein the container is a capsule or a bag.   6. The inspection apparatus for magnetic foreign matter in powder material according to claim 5, wherein said capsule or bag is conveyed by a belt.   6. The inspection apparatus for magnetic foreign matter in a powder material according to claim 5, wherein said capsule or bag is conveyed in a tube for transferring the capsule or bag by gas.   8. The inspection apparatus for magnetic foreign matter in a powder material according to claim 7, wherein a branch pipe is formed on the tube, a blower device is disposed on the branch pipe, and the capsule includes a conveying blade and a stirring blade. An inspection apparatus for magnetic foreign matter in a powder material.   2. The inspection apparatus for magnetic foreign matter in powder material according to claim 1, wherein the powder material is cosmetic powder.   2. The inspection apparatus for magnetic foreign matter in powder material according to claim 1, wherein the powder material is a resin composition used for sealing a semiconductor device.   11. The inspection apparatus for magnetic foreign matter in a powder material according to claim 10, wherein the resin composition is a thermosetting resin composition.   2. The inspection apparatus for magnetic foreign matter in a powder material according to claim 1, wherein the magnetic foreign matter is iron, nickel, or cobalt, or an alloy containing iron, nickel, or cobalt. Inspection device for magnetic foreign substances in powder materials.   2. The inspection apparatus for magnetic foreign matter in powder material according to claim 1, wherein the magnet for magnetism is a permanent magnet.   2. The inspection apparatus for magnetic foreign matter in powder material according to claim 1, wherein the magnet for magnetism is an electromagnet. (A) preparing a container enclosing a powder material;
(B) applying a magnetic field to the powder material by a magnet for magnetism;
(C) stirring the powder material after magnetization of the powder material;
(D) After stirring the powder material, a step of detecting a magnetic foreign material in the powder material with a SQUID magnetic detection device is performed.   16. The method for inspecting magnetic foreign matter in a powder material according to claim 15, wherein the powder material is moved in the X direction while the position of the SQUID magnetic detection device is fixed, thereby performing one-dimensional scanning of the powder material. A method for inspecting magnetic foreign matter in a powder material, characterized in that:   16. The method for inspecting magnetic foreign matter in a powder material according to claim 15, wherein the powder material is two-dimensionally scanned by moving the position of the SQUID magnetic detection device two-dimensionally. Inspection method for magnetic foreign matter inside.   16. The method for inspecting magnetic foreign matter in a powder material according to claim 15, wherein a plurality of SQUID magnetic detectors are arranged in a direction orthogonal to the moving direction of the powder material, and the traveling direction and width of the powder material. A method for inspecting magnetic foreign substances in a powder material, characterized in that direction inspection is also performed at the same time.