JP5320221B2 - Electromechanical transducer and fluid control assembly including the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an electromechanical transducer including a high precision and high responsive movable member and free from lowering in durability caused by a working fluid to be used. <P>SOLUTION: A solenoid 21 drives a control valve 22 by moving the movable member 24 and opens and closes a valve passage 47 in which a corrosive working fluid flows. The movable member 24 receives a secondary pressure p<SB>2</SB>of the valve passage 47 by a first pressure receiving surface P1 and receives the secondary pressure p<SB>2</SB>introduced to a back pressure chamber 37 by a second pressure receiving surface P2 and the secondary pressures p<SB>2</SB>received by the first pressure receiving surface P1 and the second pressure receiving surface P2 resisting to each other. A bearing member 25 intervenes between a solenoid coil 23 and the movable member 24 of the solenoid 21 and a first diaphragm 33 and a second diaphragm 34 are arranged on both sides of the bearing member 25. First and second sealing members 33, 34 respectively form part of the first and second pressure receiving surfaces P1, P2 and have an equal effective area. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention is an electromechanical converter that opens and closes a valve passage of the control valve through which a corrosive working fluid flows by moving a movable member inserted into the excitation means by exciting the excitation means to drive a control valve. For example, the present invention relates to an electromechanical transducer used for a fluid control valve such as a flow control valve and a pressure control valve, and a fluid assembly including the same.

  A fluid control assembly including a control valve having a valve body that opens and closes a valve passage through which a working fluid flows and a solenoid for driving the valve body to open and close has been put to practical use. As a solenoid, there exists a thing as described in patent document 1, for example. As shown in FIG. 6, the first prior art solenoid 1 includes a housing 2 made of a magnetic material, and an excitation coil 3 and a movable iron core 4 are accommodated in the housing 2. The movable iron core 4 is made of a magnetic material, and a cylindrical bearing 5 made of a nonmagnetic material is externally provided on the outer peripheral surface thereof. The movable iron core 4 is inserted into the exciting coil 3 with the bearing 5 being sheathed. Thereby, the bearing 5 is interposed between the movable iron core 4 and the exciting coil 3, and the movable iron core 4 can slide in the axial direction of the housing 2.

  One end 4 a of the movable iron core 4 protrudes from the exciting coil 3 and penetrates the yoke 6. The yoke 6 is made of a magnetic material, and when magnetized by the excitation coil 3, the movable iron core 4 is pulled up into the excitation coil 3. The tip (not shown) of one end of the movable iron core 4 abuts on the ball 7, and the ball 7 is pushed by the movable iron core 4 to be seated on the valve seat 2 a and close the fluid introduction passage 8. ing. When a current is passed through the exciting coil 3 in the closed state and the movable iron core 4 is pulled up into the exciting coil 3, the ball 7 is separated from the valve seat 2a by the fluid pressure in the fluid introducing passage 8, and the fluid introducing passage 8 is opened.

  In the solenoid 1 configured as described above, a diaphragm 9 is provided at one end portion 4 a of the movable iron core 4, and a gap between the movable iron core 4 and the yoke 6 is isolated from the fluid introduction passage 8 by the diaphragm 9. Thus, the working fluid flowing in the fluid introduction passage 8 is prevented from entering between the movable iron core 4 and the bearing 5. There are various types of working fluids handled by the solenoid 1, and corrosive fluids such as hydrogen gas may be used. When such a corrosive fluid is used, the corrosion resistance of the bearing 5 becomes a problem. However, in the solenoid 1, since the bearing 5 is isolated from the fluid introduction passage 8 by the diaphragm 9, the bearing 5 is not exposed to the corrosive fluid. Therefore, a material having no corrosion resistance can also be used for the bearing 5.

JP-A-8-4934

  However, in the configuration as described above, the diaphragm 9 receives a secondary pressure that pulls up the movable iron core 4 into the exciting coil 3 from the fluid supplied from the fluid introduction passage 8. Thereby, the acting force that separates the movable iron core 4 from the ball 7 and opens the fluid introduction passage 8 acts on the movable iron core 4. In order to close the fluid introduction passage 8 against this acting force, the movable iron core 4 is provided with a spring 10 that biases the movable iron core 4. The urging force of the spring 10 needs to be changed according to the secondary pressure received by the diaphragm 9, and becomes larger as the secondary pressure becomes higher.

  However, when the fluid introduction passage 8 is opened, it is necessary to generate an exciting force against the urging force of the spring 10 by the exciting coil 3. If the urging force of the spring 10 is increased, the exciting force to be generated must also be increased. Don't be. Therefore, when the urging force of the spring 10 is increased, the exciting coil 3 inevitably becomes larger and the solenoid 1 becomes larger. Further, by providing the diaphragm 9, the movable iron core 4 is affected by the pressure fluctuation of the working fluid flowing through the fluid introduction passage 8, and the position and responsiveness of the movable iron core 4 are lowered.

  Accordingly, an object of the present invention is to provide an electromechanical converter that has durability against a corrosive working fluid, has high positional accuracy and responsiveness of a movable member corresponding to a movable iron core, and can be miniaturized. Yes.

  An electromechanical converter of the present invention is an electromechanical converter that opens and closes a valve passage through which a corrosive working fluid flows by moving a movable member inserted into the excitation means by exciting the excitation means to drive a control valve. The movable member receives the fluid pressure of the corrosive working fluid flowing through the valve passage at the first pressure receiving surface, and is separated from the valve passage by the communication passage formed in the movable member at the second pressure receiving surface. The fluid pressure guided to the back pressure chamber is received, and the fluid pressure received by the first and second pressure receiving surfaces is opposed to each other, and a bearing is provided between the exciting means and the movable member. A first seal member for isolating the bearing member from the back pressure chamber and a second seal member for isolating the bearing member from the valve passage are provided on both sides of the bearing member, respectively. The first and second sealing members are Each forms part of the first and second pressure-receiving surface, the effective area of the first and second pressure receiving surfaces are those equal to each other.

  According to the present invention, the fluid pressure received by the first and second pressure receiving surfaces oppose each other, and the first and second pressure receiving surfaces are equal to each other. Therefore, the fluid pressure received at each pressure receiving surface is completely canceled, and the acting force acting on the movable member becomes substantially zero. Thereby, the movable member can be moved with a small force, and the positional accuracy and responsiveness of the movable member can be increased. Further, by reducing the acting force acting on the valve body, the exciting force to be generated by the exciting means can be reduced, and the exciting means can be miniaturized. Thereby, size reduction of an electromechanical converter can be achieved.

  Moreover, in this invention, the movement of a movable member becomes smooth by interposing a bearing member, and the positional accuracy and responsiveness of a movable member are improving. First and second seal members are provided on both sides of the bearing member, and the first and second seal members isolate the bearing member from the valve passage and the back pressure chamber so that the corrosive working fluid is used. The bearing member is prevented from being exposed. Thereby, even if a material having low corrosion resistance against the corrosive working fluid is used for the bearing member, the durability of the electromechanical transducer is not lowered.

In another electromechanical converter of the present invention, a movable member moves by exciting excitation means inserted in a ferromagnetic body in a housing to move a control valve, and the corrosive working fluid is moved by the control valve. An electromechanical converter in which a flowing valve passage is opened and closed, wherein one end side in the housing is connected to the valve passage, and a back pressure chamber is formed on the other end side in the housing. A communication passage that communicates the valve passage and the back pressure chamber is provided therein, and is supported by the housing via a bearing member. Between the housing and the movable member, the bearing is connected to the bearing from the back pressure chamber. A first seal member for isolating the member and a second seal member for isolating the bearing member from the valve passage are provided, and the second seal member is corrosive to flow through the valve passage together with the movable member. Working fluid fluid Forms a first pressure receiving surface for receiving the said first seal member, together with the movable member, it forms a second pressure receiving surface for receiving the fluid pressure guided to the back pressure chamber by the communication passage The first pressure receiving surface and the second pressure receiving surface are arranged so that the fluid pressure received by them is opposed to each other, and their effective areas are equal to each other.

  If the said structure is followed, the fluid pressure received by the 1st and 2nd pressure receiving surface will mutually oppose, and the 1st and 2nd pressure receiving surface is mutually equal. Therefore, the fluid pressure received at each pressure receiving surface is completely canceled, and the acting force acting on the movable member becomes substantially zero. Thereby, the movable member can be moved with a small force, and the positional accuracy and responsiveness of the movable member can be increased. Further, by reducing the acting force acting on the movable member, the exciting force to be generated by the exciting means can be reduced, and the exciting means can be downsized. Thereby, size reduction of an electromechanical converter can be achieved.

  Moreover, in this invention, the movement of a movable member becomes smooth by interposing a bearing member, and the positional accuracy and responsiveness of a movable member are improving. In order to isolate the bearing member from the valve passage and the back pressure chamber, first and second sealing members are provided between the housing and the movable member. As a result, the bearing member is prevented from being exposed to the corrosive working fluid flowing through the valve passage and the back pressure chamber. Thereby, even if a material having low corrosion resistance against the corrosive working fluid is used for the bearing member, the durability of the electromechanical transducer does not deteriorate.

  In the above invention, the first and second sealing members are preferably diaphragms. If the said structure is followed, a movable member will not slide with respect to a diaphragm, and the frictional force which arises in a movable member can be reduced. Thereby, even if it provides a sealing member in a movable member, a movable member can be moved smoothly and the position accuracy and responsiveness of a movable member do not fall remarkably.

  In the above invention, the bearing member is preferably a rolling bearing member. If the said structure is followed, a movable member can be moved smoothly and the positional accuracy and responsiveness of a movable member will improve.

  In the above invention, the bearing member is preferably grease lubricated. If the said structure is followed, durability of a bearing member can be improved by grease lubrication. In addition, the grease lubrication smoothens the movement of the valve body, improving the positional accuracy and responsiveness of the movable member. Thus, although it is a grease which improves durability, a positional accuracy, and a responsiveness, when this grease is exposed to a corrosive working fluid, it is possible to mix in this corrosive working fluid. However, since the bearing member is isolated from the valve passage and the back pressure chamber by the first and second seal members, the grease is not exposed to the corrosive working fluid and is mixed into the corrosive working fluid. Can be prevented.

  In the above invention, the bearing member is preferably a sliding bearing member. If the said structure is followed, a movable member can be moved smoothly and the positional accuracy and responsiveness of a movable member will improve.

  A fluid control assembly of the present invention includes any one of the electromechanical transducers described above and the control valve that opens and closes the valve passage. The control valve includes a valve body that can be driven by the movable member, and the valve. The valve body receives the secondary pressure on the secondary side of the valve passage at the pressure receiving surface on one end side, and receives the secondary pressure on the valve body on the other end side. The secondary pressure introduced from the valve passage to the valve-side back pressure chamber is received by the formed valve-side communication passage, and the secondary pressure received by the two pressure-receiving surfaces is opposed to each other, A valve bearing member is interposed between the valve body and the guide, and a primary side seal member and the valve bearing are provided on both sides of the valve bearing member to isolate the valve bearing member from the valve passage. A secondary side sealing member for isolating the member from the back valve side pressure chamber is provided.

  According to the present invention, the secondary pressures received by the two pressure receiving surfaces in the control valve oppose each other. Therefore, the secondary pressures received by the pressure receiving surfaces cancel each other, and the acting force acting on the valve body is reduced. As a result, the valve body can be moved with a small force, the position accuracy and responsiveness of the valve body are improved, and as a result, the opening degree of the valve passage can be adjusted with high accuracy. Further, since the acting force acting on the valve body is reduced, a mechanism for moving the valve body, for example, a compression coil spring can be reduced in size, and the control valve can be reduced in size. The size of the control assembly can be reduced.

  Further, in the present invention, since the bearing member is interposed, the movement of the valve body becomes smooth, and the opening degree of the valve passage can be adjusted more accurately. Primary and secondary seal members are provided on both sides of the bearing member, and the bearing member is isolated from the valve passage and the back pressure chamber by the primary and secondary seal members, and the corrosion that flows through them is separated. The bearing member is prevented from being exposed to the sexual working fluid. Thereby, even if a material having low corrosion resistance against the corrosive working fluid is used for the bearing member, the durability of the control valve is not lowered.

  As described above, by using the electromechanical converter for the control valve, the opening degree of the valve passage can be adjusted with high accuracy, the size can be reduced, and a durable fluid control assembly can be realized.

  ADVANTAGE OF THE INVENTION According to this invention, it has durability with respect to a corrosive working fluid, the positional accuracy and responsiveness of a movable member are high, and size reduction can be achieved.

1 is a sectional view showing a fluid control assembly according to an embodiment of the present invention. It is sectional drawing which expands and shows the solenoid of 1st Embodiment. It is sectional drawing which shows the solenoid of 2nd Embodiment. It is sectional drawing which shows the solenoid of 3rd Embodiment. It is sectional drawing which shows the force motor of other embodiment of this invention. It is sectional drawing which shows the solenoid of a prior art.

(Fluid control assembly)
FIG. 1 is a cross-sectional view illustrating a fluid control assembly 20 according to an embodiment of the present invention. The fluid control assembly 20 is configured to control the flow rate (or pressure) of a corrosive high-pressure combustible gas (hereinafter, also simply referred to as “working fluid”) such as hydrogen gas. The fluid control assembly 20 includes a solenoid 21 and a control valve 22.

  Hereinafter, for convenience of explanation, a direction parallel to the axis of the fluid control assembly 20 is referred to as an axial direction, and the right side in FIG. 1 is referred to as one axial direction and the opposite side is referred to as the other axial direction. Note that these directional concepts do not limit the position and orientation of each component provided in the fluid control assembly 20 of the present invention.

[Solenoid of the first embodiment]
FIG. 2 is an enlarged cross-sectional view of the solenoid 21 of the first embodiment. This will be described with reference to FIG. The solenoid 21 is configured to drive the control valve 22 and includes a solenoid coil 23, a movable member 24, a bearing member 25, and a casing 26. The casing 26 is attached to the housing 41 of the control valve 22. The casing 26 communicates with a valve passage 47 formed in the housing 41, and the solenoid coil 23, the movable member 24, and the bearing member 25 are accommodated in the casing 26.

  The solenoid coil 23 includes a bobbin 27 and a coil 28. The bobbin 27 is fitted in the casing 26 and has outward flanges 27a and 27b projecting outwardly at one end and the other end in the axial direction of the outer peripheral portion thereof. Between these two outward flanges 27a and 27b, a coil 28 formed by winding a coil wire is provided. The solenoid coil 23 configured in this manner has one end in the axial direction in contact with the bottom 26a of the casing 26, and a yoke 29 is provided at the other end.

  The yoke 29 is made of a magnetic material such as electromagnetic stainless steel, and is fitted in the casing 26. The inner diameter of the yoke 29 is smaller than that of the bobbin 27. The outer edge portion 29 a of the yoke 29 protrudes in one axial direction from the inner edge portion 29 b and is in contact with the solenoid coil 23. The yoke 29 is pushed into the casing 26 by mounting the casing 26 on the housing 41 of the control valve 22, and sandwiches the solenoid coil 23 together with the bottom portion 26a. A movable member 24 is inserted through the yoke 29 and the solenoid coil 23.

  The movable member 24 is made of a magnetic material such as electromagnetic stainless steel, and has an insertion portion 24a and a rod 24b. The insertion part 24 a is inserted in the solenoid coil 23. One end portion (right end portion in FIG. 2) in the axial direction of the insertion portion 24 a protrudes from the solenoid coil 23 and is inserted into the insertion hole 26 b of the casing 26. The insertion hole 26b passes through the bottom portion 26a of the casing 26, and the outer opening is closed by the lid body 26c. One end of the insertion portion 24a in the axial direction and the lid body 26c face each other, and a compression coil spring 31 is provided between them. The compression coil spring 31 urges the insertion portion 24 a toward the yoke 29. A rod 24b is integrally provided at the other axial end of the insertion portion 24a (left end portion in FIG. 2), and the outer diameter of the rod 24b is smaller than the outer diameter of the insertion portion 24a.

  The other end of the insertion portion 24a is opposed to the yoke 29 because it has a larger diameter than the inner hole of the yoke 29. A rod 24b provided at one end of the insertion portion 24a passes through the yoke 29 and It extends to the valve passage 47. The tip of the rod 24 b is in contact with a valve body 43 of the control valve 22 described later, and the rod 24 b receives a force from the valve body 43 to separate the insertion portion 24 a from the yoke 29. That is, the movable member 24 receives a force against the compression coil spring 31 from the valve body 43. As a result, the insertion portion 24a is separated from the lid body 26c by the first predetermined distance d1, and from the yoke 29 by the second predetermined distance d2. The first predetermined distance d1 is approximately three times or more the second predetermined distance d2. Therefore, when a current is passed through the coil 28, the yoke 29 is magnetized and the insertion portion 24 a is attracted to the yoke 29.

  In addition, a circumferential groove 24c is formed in the outer peripheral portion of the insertion portion 24a so as to be immersed inward. The circumferential groove 24c is formed in the axially intermediate portion over the entire circumference in the circumferential direction, and a cylindrical guide member 30 is fitted therein. The guide member 30 is made of a nonmagnetic material, for example, austenitic stainless steel such as SUS316L. The outer peripheral surface of the guide member 30 is flush with the outer peripheral surface of the insertion portion 24 a, and the outer diameter thereof is smaller than the inner diameter of the solenoid coil 23. Therefore, an annular gap 32 is formed between the guide member 30 and the bobbin 27. A bearing member 25 is disposed in the gap 32.

  The bearing member 25 is a rolling bearing, and is a ball guide in this embodiment. However, it is not limited to the ball guide, and may be a ball bearing. The bearing member 25 is externally mounted on the guide member 30 in a state where a lubricant such as grease is applied, and is interposed between the guide member 30 and the solenoid coil 23. The bearing member 25 supports the movable member 24 so as to be slidable in the axial direction, reduces the frictional force generated between the bobbin 27 and the guide member 30, and smoothes the sliding displacement of the movable member 24. Thus, the 1st and 2nd diaphragms 33 and 34 are each provided in the both sides of the bearing member 25 which makes the movement of the movable member 24 smooth.

  The first diaphragm 33 is disposed on one axial side of the gap 32 (right side in FIG. 2), and the second diaphragm 34 is disposed on the other axial side of the gap 32 (left side in FIG. 2). The first and second diaphragms 33 and 34 are annular seal members, and the inner edge portions 33a and 34a are sandwiched between the guide member 30 and the side wall 24d that defines the circumferential groove 24c. Further, the outer edge portion 33 b of the first diaphragm 33 is fixed to the bobbin 27. As a fixing method, for example, the outward flange 27b on the bottom 26a side is configured to be divided in the axial direction, and the divided member is fastened by sandwiching the radially outer portion 33b between the divided members. There is a method of holding and fixing the radially outer portion 33b. Further, the outer edge portion 34 b of the second diaphragm 34 is sandwiched and fixed between the bobbin 27 and the yoke 29.

  In addition, the first and second diaphragms 33 and 34 are curved so that the intermediate portions in the radial direction protrude toward the bearing member 25. Since this portion becomes a surplus portion, even if the first and second diaphragms 33 and 34 are fixed to the movable member 24 and the solenoid coil 23, the movable member 24 can move in the solenoid coil 23. The bobbin 27 is formed with an atmosphere communication hole 27d for communicating the gap 32 with the atmosphere.

  The first and second diaphragms 33 and 34 thus fixed are fixed so as to be bridged between the insertion portion 24 a and the solenoid coil 23, and block both sides in the axial direction of the bearing member 25. That is, the gap between the back pressure chamber 37 and the gap 32 is sealed by the first diaphragm 33, and the gap between the gap 32 and the pressure chamber 38 is sealed by the second diaphragm 34. The back pressure chamber 37 is a space defined by the casing 26 and the end of one side in the axial direction of the movable member 24, and is a space located on one side in the axial direction from the gap 32. The pressure chamber 38 is a space defined by the yoke 29 and the end of the movable member 24 on the other side in the axial direction, and is a space on the other side in the axial direction from the gap 32.

  A communication path 35 is formed in the movable member 24 so as to connect the back pressure chamber 37 and the pressure chamber 38 thus defined. The communication path 35 has a first opening 35a at one end (right end in FIG. 2) in the axial direction of the insertion portion 24a, and has second and third openings 35b and 35c on the outer periphery of the rod 24b. doing. The communication path 35 connects the first opening 35 a to the second and third openings 35 b and 35 c and communicates the back pressure chamber 37 and the pressure chamber 38. As a result, the back pressure chamber 37 communicates with the valve passage 47 of the control valve 22 through the communication passage 35.

[Control valve]
Hereinafter, returning to FIG. 1, the control valve 22 will be described. The control valve 22 includes a housing 41, a valve guide member 42, a valve body 43, and a valve bearing member 44. The housing 41 is formed with a primary port 45 that is a supply side of a fuel gas such as hydrogen gas and a secondary port 46 that is an output side of a valve. Further, the housing 41 is formed with a valve passage 47 that connects the primary port 45 and the secondary port 46, and the working fluid supplied to the primary port 45 flows through the valve passage 47 to the secondary port 46. It is like that. The valve passage 47 has an insertion hole 48 connected to the secondary port 46 and a valve body chamber 49 connected to the primary port 45.

  The insertion hole 48 has an opening on one side in the axial direction, and the rod 24b of the movable member 24 of the solenoid 21 is inserted through the opening. The other axial direction side of the insertion hole 48 is connected to the valve body chamber 49 via the valve port 51, and a valve seat 52 is formed around the valve port 51. The valve body chamber 49 is formed to have a larger diameter than the valve port 51, and a valve guide member 42 is accommodated therein. The opening on the other side in the axial direction of the valve body 49 is closed by the valve-side lid 53 in a state in which the valve guide member 42 is accommodated.

  The valve guide member 42 is disposed so that the end on the other side in the axial direction (the left end in FIG. 1) abuts on the valve-side lid 53, and the end on the one side in the axial direction (in FIG. 1). An annular spring receiving member 54 is disposed at the right end). The spring receiving member 54 is biased toward the valve guide member 42 by a later-described valve compression coil spring 55, and the valve guide member 42 is sandwiched between the spring receiving member 54 and the valve-side lid 53. Has been. A valve body 43 is inserted into the valve guide member 42.

  The valve body 43 includes a sliding portion 43a, a spring receiving portion 43b, a valve portion 43c, and a contact portion 43d. A spring receiving portion 43b is integrally provided at one end portion (right end portion in FIG. 1) in the axial direction of the sliding portion 43a. The outer diameter of the spring receiving portion 43 b is formed larger than the inner diameter of the insertion hole 48. A valve portion 43c is provided integrally with the spring receiving portion 43b. The valve portion 43c has a tapered shape that decreases inward as the distance from the spring receiving portion 43b increases. A contact portion 43d that protrudes in one axial direction is formed at the tip of the valve portion 43c.

  The valve body 43 formed in this way is inserted through the valve guide member 42, the sliding portion 43 a is in the valve guide member 42, and the point beyond the spring receiving portion 43 b is from the valve guide member 42. Out. The spring receiving portion 43 b faces the spring receiving member 54, and the valve portion 43 c is seated on the valve seat 52. A valve compression coil spring 55 is provided between the spring receiving portion 43 b and the spring receiving member 54, and the valve portion 43 c is urged toward the valve seat 52 by the valve compression coil spring 55. . Further, the abutting portion 43 d extends to the insertion hole 48 and abuts on the tip portion of the rod 24 b of the solenoid 21.

  The outer diameter of the sliding portion 43 a of the valve body 43 is smaller than the inner diameter of the valve guide member 42, and an annular valve-side gap 56 is provided between the sliding portion 43 a and the valve guide member 42. Is formed. A valve bearing member 44 is disposed in the valve side gap 56. The valve bearing member 44 is a rolling bearing that supports the valve body 43 so as to be slidable in the axial direction, and is a ball guide formed in a cylindrical shape in the present embodiment. However, it is not limited to the ball guide, and may be a ball bearing. The valve bearing member 44 is externally mounted on the sliding portion 43 a in a state where a lubricant such as grease is applied, and is interposed between the sliding portion 43 a and the valve guide member 42. A convex portion 42 a is formed on one side in the axial direction of the inner wall of the valve guide member 42, and the valve bearing member 44 is regulated by the convex portion 42 a so as not to move relative to the valve guide member 42. Yes. The bearing member 44 provided in this manner reduces the frictional force generated between the valve guide member 42 and the sliding portion 43a, and makes the valve body 43 move smoothly.

An O-ring 57 and a diaphragm 58, which are primary and secondary seal members, are provided on both axial sides of the valve bearing member 44, respectively, and both sides in the axial direction of the valve-side gap 56 are closed by the O-ring 57 and the diaphragm 58. It is peeling off. Thereby, the valve-side pressure chamber 60 is formed on one side in the axial direction of the valve body 43, and the valve-side back pressure chamber 59 is formed on the other side in the axial direction of the valve body 43. That is, the O-ring 57 seals between the valve side pressure chamber 60 and the valve side gap 56, and the diaphragm 58 seals between the valve side back pressure chamber 59 and the valve side gap 56. The valve-side pressure chamber 60 is a space on the primary side of the valve passage 47 to which the primary pressure p ₁ is supplied from the primary port 45, and is a space on one side in the axial direction with respect to the valve-side gap 56 in the valve body chamber 49. is there. The valve-side back pressure chamber 59 is a space defined by the valve-side lid 53 and the valve body 43, and is a space on the other side in the axial direction with respect to the valve-side gap 56 in the valve body chamber 49.

  A valve-side communication path 61 is formed in the valve body 43 configured as described above. The valve-side communication passage 61 has a first opening 61a at the other end in the axial direction of the sliding portion 43a, and has second and third openings 61b and 61c at the outer peripheral portion of the contact portion 43d, respectively. doing. The valve-side communication path 61 connects these first openings 61 a to the second and third openings 61 b and 61 c, and communicates the valve-side back pressure chamber 59 and the insertion hole 48 that is the secondary side of the valve path 47. doing.

[Operation of fluid control assembly]
The fluid control assembly 20 is a normally closed electromagnetic proportional control valve device. In a state where no current flows through the solenoid coil 23, the valve body 43 is seated on the valve seat 52, and the valve passage 47 is closed. When a current is passed through the solenoid coil 23, the solenoid coil 23 is excited. As a result, the yoke 29 is magnetized and the movable member 24 is attracted to the yoke 29. As the movable member 24 is sucked, the valve body 43 is pushed to the other side in the axial direction. When the current flowing through the solenoid coil 23 exceeds a predetermined current value, that is, when the attracting force acting on the movable member 24 exceeds a predetermined value, the valve element 43 moves to the other side in the axial direction, and the valve element 43 moves to the valve seat. Leave 52. As a result, the blocked valve passage 47 is opened, and the working fluid of the primary pressure p ₁ flowing from the primary port 45 becomes the secondary pressure p ₂ at the valve port 51 and flows to the secondary port 46. The opening degree of the valve passage 47 is controlled according to the current flowing through the solenoid coil 23.

  When there is no current flowing through the solenoid coil 23, the attractive force acting on the movable member 24 is lost. Since the biasing force of the valve compression coil spring 55 is larger than that of the compression coil spring 31, the valve body 43 and the movable member 24 are pushed to one side in the axial direction by the valve compression coil spring 55, and the valve body 43 is moved to the valve seat 52. Move towards. Eventually, when the valve body 43 is seated on the valve seat 52 and the valve passage 47 is closed, the movement of the movable member 24 stops.

[Action force on movable member]
In the solenoid 21, the movable member 24 receives the secondary pressure p ₂ directed in the axial direction from the working fluid in the pressure chamber 38 and the insertion hole 48. In the solenoid 21, the working fluid in the insertion hole 48 is guided to the back pressure chamber 37 through the communication passage 35, and the secondary pressure p ₂ is guided to the back pressure chamber 37. That is, the movable member 24 is configured to receiving one of the axially secondary pressure p ₂ from the working fluid in the pressure chamber 38 and the insertion hole 48, from the working fluid of the back pressure chamber 37 in the second axial direction of the secondary pressure p ₂ Receive pressure. These secondary pressure p ₂ is acting on the movable member 24 so cancel each other.

In the movable member 24, the first pressure receiving surface P <b> 1 is configured by the second axial end of the insertion portion 24 a and the tip end of the rod 24 b, and the second diaphragm 34. The diaphragm 33 forms a second pressure receiving surface P2. The first pressure receiving surface P1 on the other end side of the movable member 24, an insertion hole 48 and the secondary pressure p ₂ from the working fluid in the pressure chamber 38 and the pressure receiving one axial direction, a second pressure receiving surface at one end side P2 is in pressure from the working fluid of the back pressure chamber 37 of the secondary pressure p ₂ in the axial direction the other. The effective area A1 of the first pressure receiving surface P1 and the effective area A2 of the second pressure receiving surface P2 are defined by the effective diameters of the pressure receiving surfaces of the second and first diaphragms 34 and 33, respectively. In the present embodiment, the effective diameters r ₁ of the pressure receiving surfaces of the first and second diaphragms 33 and 34 are equal. Therefore, the secondary pressure p ₂ to the pressure receiving at first and second pressure receiving surfaces P1, P2 mutually cancel, action force the movable member 24 receives from the secondary pressure p ₂ becomes substantially zero. Thereby, the movable member 24 can be moved with a small force, and the positional accuracy and responsiveness of the movable member 24 can be increased. Further, by reducing the acting force acting on the movable member 24, the exciting force to be generated by the solenoid coil 23 can be reduced, and the solenoid coil 23 can be reduced in size. Thereby, size reduction of the solenoid 21 can be achieved.

Similarly, in the control valve 22, the working fluid in the insertion hole 48 is guided to the valve-side back pressure chamber 59 by the valve-side communication passage 61. In the present embodiment, the primary pressure p ₁ and the secondary pressure p ₂ received by the valve body 43, the O-ring 57 and the diaphragm 58 are designed to cancel each other, and the primary pressure p ₁ acting on the valve body 43 and acting force by the secondary pressure p ₂ becomes substantially zero. Therefore, the valve element 43 can be accurately moved regardless of the pressure fluctuations of the primary pressure p ₁ and the secondary pressure p ₂ , and the opening degree of the valve passage 47 is accurately adjusted to the opening degree corresponding to the current flowing through the solenoid 23. Can be adjusted. Therefore, the flow rate flowing through the secondary port 46 can be accurately adjusted by the control valve 22.

[Effects of fluid control assembly]
In the fluid control assembly 20 configured as described above, the movable member 24 and the valve body 43 are supported by the bearing member 25 and the valve bearing member 44, so that the movement of the movable member 24 and the valve body 43 becomes smooth, These positional accuracy and responsiveness are improved. Therefore, the opening degree of the valve passage 47 can be adjusted with higher accuracy. On both sides of the bearing member 25 and the valve bearing member 44 having such an effect, first and second diaphragms 33 and 34, and an O-ring 57 and a diaphragm 58 are provided. The first and second diaphragms 33 and 34 are separated from the back pressure chamber 37 and the pressure chamber 38, and the valve bearing member 44 is provided with a valve-side back pressure chamber 59 and a valve-side pressure chamber 60 by an O-ring 57 and a diaphragm 58. Isolated from. Therefore, the bearing member 25 and the valve bearing member 44 can be prevented from being exposed to the working fluid. Then, erosion (especially hydrogen embrittlement in the case of hydrogen) is likely to occur due to the working fluid, but the durability of the solenoid 21 and the control valve 22 is reduced even if a high hardness material with low sliding resistance is used for the bearing members 25 and 44 I will not let you. Therefore, the opening degree of the valve passage 47 can be accurately adjusted while maintaining durability.

  Further, by separating the bearing member 25 and the valve bearing member 44, the grease attached to the bearing member 25 and the valve bearing member 44 is not exposed to the working fluid and mixed therein. Therefore, grease lubrication of the bearing member 25 and the valve bearing member 44 becomes possible, and durability of the bearing member 25 and the valve bearing member 44 can be improved. Further, the grease lubrication makes the movement of the movable member 24 and the valve body 43 smoother, the positional accuracy and responsiveness of the movable member 24 and the valve body 43 are improved, and the opening degree of the valve passage 47 is adjusted with higher accuracy. Can do.

  The solenoid 21 is fixed as described above using the first and second diaphragms 33 and 34 to prevent the movable member 24 from sliding with respect to the first and second diaphragms 33 and 34, and friction. Power is reduced. Thereby, the movable member 24 and the valve body 43 can be moved smoothly, and the positional accuracy and responsiveness of the movable member 24 are improved. Furthermore, since the first and second diaphragms 33 and 34 have surplus portions, the first and second diaphragms 33 and 34 are easily deformed. Therefore, the first and second diaphragms 33 and 34 do not hinder the sliding displacement of the movable member 24. Therefore, even if the first and second diaphragms 33 and 34 are provided, the movable member 24 can be moved smoothly, and the positional accuracy and responsiveness of the movable member 24 are not significantly reduced.

In the control valve 22, the O-ring 57 is used to isolate the valve bearing member 44 from the valve-side pressure chamber 60 so that the primary pressure p ₁ supplied to the primary port 45 can withstand even a high pressure. ing. That is, even when the primary pressure p ₁ is high, the working fluid does not leak into the valve-side gap 56 and the valve bearing member 44 is not exposed to the working fluid. On the contrary, since the secondary pressure p ₂ is lower than the primary pressure p ₁ and can withstand even the diaphragm 58, the valve bearing member 44 is isolated from the valve-side back pressure chamber 59. A diaphragm 58 is used. By using the diaphragm 58, the frictional resistance with the valve body 43 can be suppressed, and the valve body 43 can be moved smoothly. Therefore, even if the diaphragm 58 is provided, the positional accuracy and responsiveness of the valve body 43 are not significantly reduced.

  Thus, since the movable member 24 and the valve body 43 can be moved smoothly, the attractive force which acts on the movable member 24 can be made smaller than the conventional one. Therefore, the solenoid coil 23 can be downsized, and the fluid control assembly 20 can be downsized.

  Further, by interposing the bearing member 25 between the guide member 30 made of a nonmagnetic material and the solenoid coil 23, it is possible to prevent the insertion portion 24a from being attracted by the magnetized bearing member 25 to become a resistance. This also improves the positional accuracy and responsiveness of the movable member 24.

  Hereinafter, another embodiment of the solenoid 21 will be described.

[Solenoid of Second Embodiment]
FIG. 3 is a cross-sectional view showing a solenoid 21A of the second embodiment. The solenoid 21A of the second embodiment is similar in configuration to the solenoid 21 of the first embodiment. Below, only a different point is demonstrated about the structure of 21 A of solenoids, about the structure same as the solenoid 21 of 1st Embodiment, the same code | symbol is attached | subjected and the description is abbreviate | omitted. The same applies to the solenoid 21B of the third embodiment described later.

  The solenoid 21A is provided with a sliding bearing member 25A in the gap 32. The sliding bearing member 25 </ b> A is a so-called sliding bearing, is formed in an annular shape, is externally mounted on the guide member 30, and is interposed between the solenoid coil 23 and the guide member 30.

  The sliding bearing member 25A is prevented from moving in the other axial direction by a convex portion 27c formed on the bobbin 27, and is lubricated with grease. The sliding bearing member 25A arranged in this way reduces the frictional force between the guide member 30 and the solenoid coil 23, and makes the sliding displacement of the movable member 24 smooth. The solenoid 21A has the same operational effects as the solenoid 21 of the first embodiment.

[Solenoid of Third Embodiment]
FIG. 4 is a cross-sectional view showing a solenoid 21B of the third embodiment. In the solenoid 21B, the inner diameter of the inner edge portion 29b of the yoke 29B is increased, and one end portion in the axial direction of the insertion portion 24a protrudes from the solenoid coil 23, passes through the yoke 29, and protrudes outside the casing 26. Moreover, the axial direction one end part of the insertion part 24a does not protrude from the solenoid coil 23, but is contained in the inside.

  In the solenoid 21 </ b> B configured as described above, the movable member 24 is biased in advance to the other side in the axial direction (left side in FIG. 4) by the compression coil spring 31, and the valve body 43 of the control valve 22 is separated from the valve seat 52. It is like that. When a current is passed through the solenoid coil 23, the solenoid coil 23 is excited and the insertion portion 24a is pulled to one side in the axial direction (right side in FIG. 4). As a result, the valve body 43 of the control valve 22 moves toward the valve seat 52 (see FIG. 1), and the valve body 43 is eventually seated on the valve seat 52 and the valve passage 47 is closed. When there is no current flowing through the solenoid coil 23, the movable member 24 moves to the other side in the axial direction, the valve body 43 of the control valve 22 moves away from the valve seat 52, and the valve passage 47 is opened.

  The solenoid 21B configured as described above is used when configuring a normally open type electromagnetic proportional control valve. The solenoid 21B has the same effects as the solenoid 21 of the first embodiment, except that the control valve 22 is closed when a current is passed through the solenoid coil 23 and the control valve 22 is opened when the current is exhausted. .

(Force motor)
FIG. 5 is a cross-sectional view showing a force motor 100 according to another embodiment of the present invention. A force motor 100, which is an electromechanical transducer of another form of the solenoids 21 to 21B, is provided in the control valve 22, for example, and moves the valve body 43 of the control valve 22 according to the current that flows as in the case of the solenoids 21 to 21B. The opening degree of the valve passage 47 is adjusted. Below, the force motor 100 with which the control valve 22 is mounted | worn is demonstrated.

  The force motor 100 includes a casing 101, a movable member 102, a permanent magnet 103, and a bearing member 104. The casing 101 is made of a magnetic material such as electromagnetic stainless steel. The bottom 101a of the casing 101 is provided with a movable member support 101b extending toward the opening side. An insertion hole 101c penetrating in the axial direction is formed in the movable member support portion 101b. The insertion hole 101c also penetrates the bottom 101a, the opening on the outside thereof is closed by the lid body 101d, and the movable member 102 is inserted from the opening on the inside.

  The movable member 102 is made of nonmagnetic austenitic stainless steel such as SUS316L or aluminum alloy steel such as A6061-T6, and includes a movable element 102a and a rod 102b. The movable element 102a is integrally provided with a rod 102b at the end on the other side in the axial direction (left side in FIG. 5). The rod 102b is formed in a cylindrical shape. A movable coil 105 is provided on the outer periphery of the mover 102a.

  The movable coil 105 has a bobbin 106 and a coil 107. The bobbin 106 is made of nonmagnetic austenitic stainless steel, aluminum alloy steel, or resin, and is integrally provided on the other axial side portion of the outer periphery of the mover 102a. The bobbin 106 is erected on the one side in the axial direction (right side in FIG. 5) from the outer periphery of the disk-shaped disk part 106a extending radially outward from the outer periphery of the mover 102a. And a cylindrical coil holding portion 106b. A coil 107 is formed by winding a coil wire around the outer peripheral surface of the coil holding portion 106b.

  The movable coil 105 configured as described above is inserted into a coil housing space 108 formed in the casing 101. The coil housing space 108 is an annular space formed on the radially outer side with respect to the movable member support portion 101b. A permanent magnet 103 is accommodated in the coil accommodating space 108. The permanent magnet 103 is provided on the wall surface of the casing 101 that surrounds the movable member support portion 101 b and faces the coil 107. The permanent magnet 103 has a south pole on the inside and a north pole on the outside, and generates a magnetic field. The magnetic field lines of the magnetic field pass through the coil housing space 108 from the inner surface of the permanent magnet 103 and return to the outer surface through the casing 101.

  In the movable member 102 arranged in this way, a gap 109 is formed between the movable element 102a and the movable member 101b, and the bearing member 104 is arranged in the gap 109. The bearing member 104 is a rolling bearing, and in this embodiment is a ball guide. However, it is not limited to a ball guide, and may be a ball bearing and a sliding bearing. The bearing member 104 is externally mounted on the movable element 102a in a state where a lubricant such as grease is applied, and is interposed between the movable element 102a and the movable member support portion 101b. The bearing member 104 supports the movable member 102 so as to be slidable in the axial direction, reduces a frictional force generated between the movable element 102a and the movable member support portion 101b, and makes the movement of the movable element 102a smooth. . An annular convex portion 101e protruding radially inward therefrom is formed on the inner wall of the movable member support portion 101b, and the bearing member 104 is relative to the movable member support portion 101b by the convex portion 101e. It is designed not to be displaced.

  Since the mover 102a is arranged in this way, the end of the mover 102a on one side in the axial direction faces the lid 101d. A compression coil spring 110 is provided between the opposite end and the lid 101d, and the movable element 102a is urged to the other side in the axial direction by the compression coil spring 110. The end of the movable element 102a on the other side in the axial direction protrudes from the casing 101. In the force motor 100 attached to the control valve 22, this protruding portion is in the insertion hole 48 of the control valve 22, and the compression coil spring 110 is provided. As a result, the tip of the rod 102b is in contact with the contact portion 43d of the valve body 43.

  First and second diaphragms 111 and 112 are provided on the outer peripheral portion of the mover 102a on one side and the other side in the axial direction, respectively. Inner edge portions 111 a and 112 a of the first and second diaphragms 111 and 112 are fixed to the movable element 102 a, and outer edge portions 111 b and 112 b are fixed to the movable member support portion 101 b and the housing 41. As for the fixing method, for example, the movable element 102a is divided, and the inner edge portions 111a and 112a are sandwiched between the divided bodies, and the inner edge portions 111a and 112a are clamped and fixed. There is a way. By making the casing 101 and the housing 41 into divided bodies, the outer edge portions 111b and 112b can be clamped and fixed to the casing 101 and the housing 41 in the same manner. In addition, the 1st and 2nd diaphragms 111 and 112 have the surplus part similarly to the 1st and 2nd diaphragms 33 and 34, and the movement of the movable member 102 is permitted.

  By fixing in this way, the first diaphragm 111 is fixed so as to be bridged between the movable member 102 and the casing 101, and the second diaphragm 112 is bridged between the movable member 102 and the housing 41. Fixed to. As a result, a back pressure chamber 114 is formed on one side in the axial direction of the movable member 102, and a pressure chamber 115 is formed on the other side in the axial direction of the movable member 102. The first diaphragm 111 isolates the atmosphere communication space 113 including the coil housing space 108 and the gap 109 from the back pressure chamber 114, and the second diaphragm 112 isolates the atmosphere communication space 113 from the pressure chamber 115. That is, the first diaphragm 111 isolates the bearing member 104 from the back pressure chamber 114, and the second diaphragm 112 isolates the bearing member 104 from the pressure chamber 115. The casing 101 has an air communication hole 116 for opening the air communication space 113 to the atmosphere.

  In addition, a communication path 117 is formed in the movable member 102 so as to connect the back pressure chamber 114 and the pressure chamber 115. The communication path 117 has a first opening 117a at one end in the axial direction of the mover 102a, and second and third openings 117b and 117c at the outer periphery of the rod 102b. The communication path 117 connects the first opening 117a to the third openings 117b and 117c, and connects the back pressure chamber 114 and the pressure chamber 115 to each other.

In the force motor 100 configured as described above, the movable member 102 is pushed by the valve body 43 in one axial direction in a state where no current flows through the movable coil 105. When a current is passed through the movable coil 105, the movable coil 105 is excited. Since the magnetic field penetrating the coil housing space 108 is generated by the permanent magnet 103, the movable member 102 is pushed to the other side in the axial direction by excitation of the movable coil 105. When the current flowing through the movable coil 105 exceeds a predetermined current value, that is, when the force pushing the movable member 102 exceeds a predetermined value, the valve element 43 moves to the other side in the axial direction, and the valve element 43 moves from the valve seat 52. Leave. As a result, the blocked valve passage 47 is opened, and the working fluid of the primary pressure p ₁ flowing from the primary port 45 becomes the secondary pressure p ₂ at the valve port 51 and flows to the secondary port 46. The opening degree of the valve passage 47 is controlled according to the current flowing through the movable coil 105.

  When there is no current flowing through the movable coil 105, the electromagnetic force acting on the movable coil 105 is lost. Therefore, the valve body 43 and the movable member 102 are pushed to one side in the axial direction by the valve compression coil spring 55, and the valve body 43 moves toward the valve seat 52. Eventually, when the valve body 43 is seated on the valve seat 52 and the valve passage 47 is closed, the movement of the movable member 102 stops.

In force motor 100 of the present embodiment, similarly to the solenoid 21, the movable member 102 is receiving the secondary pressure p ₂ in the one axial direction from the working fluid in the pressure chamber 115. Further, the working fluid in the pressure chamber 115, that is, the working fluid in the valve passage 47 is led to the back pressure chamber 114 by the communication passage 117, and the secondary pressure is led to the back pressure chamber 114. is pressure from the working fluid chamber 114 of the secondary pressure p ₂ in the axial direction the other. These secondary pressure p ₂ is acting on the movable member 102 so as to cancel each other.

In the movable member 102, the first pressure receiving surface P1 is configured by the second axial end of the movable element 102a and the distal end of the rod 24b, and the second diaphragm 112, and the first axial end of the movable element 102a. The second pressure receiving surface P <b> 2 is configured by the portion and the first diaphragm 111. The first pressure receiving surface P1 is located at one end of the movable member 102, and receiving a secondary pressure p ₂ in the one axial direction from the working fluid in the pressure chamber 115, the second pressure receiving surface P2 is other movable member 102 on the edge side, and pressure from the working fluid of the back pressure chamber 114 of the secondary pressure p ₂ in the axial direction the other. The effective area A1 of the first pressure receiving surface P1 and the effective area A2 of the second pressure receiving surface P2 are respectively defined by the effective diameters of the pressure receiving surfaces of the second and first diaphragms 112 and 111. In this embodiment, the effective diameters of the pressure receiving surfaces of the second and first diaphragms 112 and 111 are equal to r ₁ . Therefore, the secondary pressure p ₂ to the pressure receiving at first and second pressure receiving surfaces P1, P2 mutually cancel, action force the movable member 102 receives from the secondary pressure p ₂ becomes substantially zero. Thereby, the movable member 102 can be moved with a small force, and the positional accuracy and responsiveness of the movable member 102 can be increased. Further, by reducing the acting force acting on the movable member 102, the exciting force to be generated by the movable coil 105 can be reduced, and the movable coil 105 can be reduced in size. Thereby, size reduction of the force motor 100 can be achieved.

  In the force motor 100 configured as described above, since the movable member 102 is supported by the bearing member 104, the movable member 102 moves smoothly, and the positional accuracy and responsiveness of the movable member 102 are improved. Therefore, the opening degree of the valve passage 47 can be adjusted with higher accuracy. The first and second diaphragms 111 and 112 are provided on both sides of the bearing member 104 exhibiting the above-described effects, and the bearing member 104 is connected to the back pressure chamber by the first and second diaphragms 111 and 112. 114 and the pressure chamber 115. Therefore, the bearing member 104 can be prevented from being exposed to the working fluid. Then, erosion (especially hydrogen embrittlement with hydrogen) is likely to occur due to the working fluid, but even if a high-hardness material with low sliding resistance is used for the bearing member 104, the durability of the force motor 100 is not reduced. Therefore, the opening degree of the valve passage 47 can be accurately adjusted while maintaining durability.

  Further, by isolating the bearing member 104, the grease adhering to the bearing member 104 is not exposed to the working fluid and mixed therein. Therefore, grease lubrication of the bearing member 104 is possible, and durability of the bearing member 104 can be improved. Moreover, the movement of the movable member 102 is smoothed by the grease lubrication, the positional accuracy and responsiveness of the movable member 102 are improved, and the opening degree of the valve passage 47 can be adjusted more accurately.

  Further, since the first and second diaphragms 111 and 112 are used, the movable member 102 is prevented from sliding with respect to the first and second diaphragms 111 and 112, and the frictional force generated in the movable member 102 is reduced. ing. Thereby, the movable member 102 can be moved smoothly, and the positional accuracy and responsiveness of the movable member 102 are improved. Furthermore, since the first and second diaphragms 111 and 112 have surplus portions, the movement of the movable member 102 is also facilitated by this.

  Thus, since the movable member 102 and the valve body 43 can be moved smoothly, the electromagnetic force which acts on the movable member 102 can be made smaller than the conventional one. Therefore, the moving coil 105 can be downsized, and the force motor 100 can be downsized.

  In the force motor 100 of the present embodiment, the bearing member 104 may be replaced with a sliding bearing member, and the first and second diaphragms 111 and 112 may be replaced with O-rings.

The fluid control assembly 20 of this embodiment is an electromagnetic proportional control assembly, but is adapted to adjust the opening corresponding the opening of the valve passage 47 to the current, the secondary pressure p ₂ in the current may be such as to control the corresponding pressure, also it is opening and secondary pressure p ₂ of the valve passage 47 is applied to a solenoid selector valve, or solenoid valves not proportional to the current value it can.

  The present invention is not limited to the embodiments, and can be added, deleted, and changed without departing from the spirit of the invention.

  The present invention is applied to an electromechanical converter that opens and closes a valve passage of the control valve through which a corrosive working fluid flows by moving a movable member inserted in the excitation means by exciting the excitation means. can do.

DESCRIPTION OF SYMBOLS 20 Fluid control assembly 21-21B Solenoid 22 Control valve 23 Solenoid coil 24 Movable member 25,25A Bearing member 33 1st diaphragm 34 2nd diaphragm 35 Communication path 37 Back pressure chamber 38 Pressure chamber 42 Valve guide member 43 Valve body 44 Bearing member 47 Valve passage 55 Valve compression coil spring 57 O-ring 58 Diaphragm 59 Valve side back pressure chamber 60 Valve side pressure chamber 61 Valve side communication passage 100 Force motor 101 Casing 102 Movable member 103 Permanent magnet 104 Bearing member 105 Movable coil 111 First Diaphragm 112 Second Diaphragm 114 Back Pressure Chamber 115 Pressure Chamber 117 Communication Path

Claims (7)

An electromechanical converter that opens and closes a valve passage through which a corrosive working fluid flows by moving a movable member inserted into the excitation means by exciting the excitation means,
The movable member receives the fluid pressure of the corrosive working fluid flowing through the valve passage at the first pressure receiving surface, and the back pressure from the valve passage by the communication passage formed in the movable member at the second pressure receiving surface. Receiving the fluid pressure guided to the chamber, the fluid pressures received by the first and second pressure receiving surfaces are opposed to each other;
A bearing member is interposed between the excitation means and the movable member,
A first seal member that isolates the bearing member from the back pressure chamber and a second seal member that isolates the bearing member from the valve passage are provided on both sides of the bearing member, respectively.
The first and second sealing members respectively form part of the first and second pressure receiving surfaces,
The electromechanical transducer according to claim 1, wherein effective areas of the first and second pressure receiving surfaces are equal to each other. An electromechanical converter in which a movable member is moved by exciting an exciting means inserted in a ferromagnetic body in a housing to move a control valve, and a valve passage through which a corrosive working fluid flows is opened and closed by the control valve. And
One end side in the housing is connected to the valve passage, and the other end side in the housing is formed with a back pressure chamber,
The movable member has a communication passage communicating the valve passage and the back pressure chamber therein, and is supported by the housing via a bearing member,
A first seal member that isolates the bearing member from the back pressure chamber and a second seal member that isolates the bearing member from the valve passage are provided between the housing and the movable member,
The second seal member forms a first pressure receiving surface that receives the fluid pressure of the corrosive working fluid flowing through the valve passage together with the movable member,
The first seal member, together with the movable member, forms a second pressure receiving surface that receives the fluid pressure guided to the back pressure chamber by the communication path,
The electromechanical transducer according to claim 1, wherein the first and second pressure receiving surfaces are arranged so that fluid pressures received by the first and second pressure receiving surfaces are opposed to each other, and their effective areas are equal to each other.   The electromechanical converter according to claim 1, wherein the first and second sealing members are diaphragms.   The electromechanical converter according to any one of claims 1 to 3, wherein the bearing member is a rolling bearing member.   The electromechanical transducer according to claim 4, wherein the bearing member is grease-lubricated.   The electromechanical converter according to claim 1, wherein the bearing member is a sliding bearing member. An electromechanical transducer according to any one of claims 1 to 6;
The control valve for opening and closing the valve passage,
The control valve has a valve body that can be driven by the movable member, and a guide into which the valve body is inserted,
The valve body receives a secondary pressure on the secondary side of the valve passage at a pressure receiving surface on one end side, and the valve passage by a valve side communication passage formed on the valve body on a pressure receiving surface on the other end side. Receiving the secondary pressure led to the valve-side back pressure chamber, and the secondary pressures received by the two pressure receiving surfaces are opposed to each other,
A valve bearing member is interposed between the valve body and the guide,
On both sides of the valve bearing member, a primary side seal member that isolates the valve bearing member from the valve passage and a secondary side seal member that isolates the valve bearing member from the back valve side pressure chamber are provided. A fluid control assembly.

Images