JP5309324B2 - Substrate transfer system - Google Patents

Description

  The present invention relates to a substrate transport system including a robot for transporting a substrate. In particular, the substrate transfer system according to the present invention is suitable for transferring a heavy substrate such as a large glass substrate for a solar panel.

  Various robots are used to carry a substrate to be processed into a substrate processing apparatus such as a chemical vapor deposition apparatus (CVD apparatus) and to carry out a processed substrate.

  As an example of a substrate to be processed, there is a square glass substrate used for a solar panel, and the size of each side is over 2 m, which is a large heavy object.

  In order to safely and accurately transport a large heavy object such as a glass substrate for a solar panel, a robot that can sufficiently withstand such a weight is required.

In addition, it is desired that the floor area required for installing the substrate transfer system be as small as possible in order to enable installation in a limited space.
JP 2008-137115 A JP 2008-73788 A JP 2007-260862 A JP 2007-54939 A

  However, in the substrate transfer robot of the conventional substrate transfer system, when raising and lowering the substrate together with the end effector, not only the end effector holding the substrate but also the arm or the like to which the end effector is mounted is driven to move up and down. .

  For this reason, a large-capacity motor is required as a drive source in order to safely and accurately move up and down a large heavy glass substrate with a side exceeding 2 m, thereby increasing the size of the device and increasing its manufacturing cost. There was a problem of doing.

  In addition to the problem that the substrate transfer robot of the conventional substrate transfer system itself increases in size as described above, when the substrate processing apparatus is arranged around the robot, it interferes with the substrate and the arm. There is a problem that it is difficult to adopt a compact layout because of the prevention.

  Further, since the conventional substrate transfer robot has a structure in which the arm is extended in the horizontal direction when the end effector is horizontally moved, there has been a problem of the position shift of the end effector due to the bending of the extended arm due to its own weight.

  The present invention has been made in view of the above-described circumstances, and a substrate transfer system including a substrate transfer robot that can adopt a compact layout when arranging a substrate processing apparatus or the like around the substrate transfer robot. The purpose is to provide.

  It is another object of the present invention to provide a substrate transfer system including a substrate transfer robot that can safely and accurately transfer a heavy object such as a large glass substrate while preventing an increase in size of the structure.

  In order to solve the above problems, a substrate transport system according to the present invention is a robot for transporting a substrate, and is a substrate processing apparatus for processing the substrate disposed adjacent to the robot. A robot for loading / unloading the substrate, and a substrate loading / unloading means disposed adjacent to the robot, loading the substrate to the vicinity of the robot, and unloading the substrate received from the robot The robot includes: an end effector in which the substrate is held substantially horizontally; vertical drive means for driving the end effector in a vertical direction; and horizontal drive means for driving the vertical drive means in a horizontal direction. Rotation driving means for rotating the horizontal driving means around a rotation axis in the vertical direction, and the end of the end effector is in contact with the vertical driving means. It is, an end portion of the vertical drive means to said horizontal drive means is connected, characterized in that.

  Preferably, the substrate transport system is disposed adjacent to the robot, and the temporary storage device in which the substrate transported between the substrate carry-in / out means and the substrate processing apparatus is provisionally stored by the robot. Is further provided.

  Preferably, the end effector extends in a horizontal direction and has a proximal end portion and a distal end portion, and the proximal end portion is attached to the vertical driving means, and the robot is configured such that the vertical driving means includes the vertical driving means. The front end portion of the end effector is positioned on the rear end side with respect to the front end of the horizontal drive means when positioned at the rear end portion of the horizontal drive means. An open space having at least a side facing the robot is formed at a lower portion of at least one of the storage devices, and the robot is configured to rotate the horizontal driving unit around the rotation axis. A front end portion of the horizontal driving means is disposed so as to pass through at least one of the open spaces.

  Preferably, the substrate processing apparatus and the substrate carry-in / out means are disposed to face each other with the robot interposed therebetween, and the temporary storage device connects the substrate processing apparatus and the substrate carry-in / out means. It is arranged on a line orthogonal to.

  Preferably, the substrate transport system includes a pair of the temporary storage devices disposed to face each other with the robot interposed therebetween.

  Preferably, the rotation axis is located closer to the rear end than the center position in the front-rear direction of the horizontal driving means.

  Preferably, the horizontal drive means is a travel support member that extends in the horizontal direction and includes a front end portion and a rear end portion, and is a travel support member that is rotationally driven around the rotation axis by the rotational drive means; A travel drive mechanism that travels the vertical drive means between the front end portion and the rear end portion of the travel support member, and the travel drive mechanism includes the front end portion of the travel support member and the A horizontal conveying belt that is stretched between the rear end portion and to which the lower end portion of the vertical driving means is fixed; and a horizontal conveying motor that drives the horizontal conveying belt.

  Preferably, the vertical driving means is an elevating support member that extends in a vertical direction and includes an upper end portion and a lower end portion, the elevating support member having the lower end portion attached to the horizontal driving means, and the end effector. Elevating drive mechanism for driving up and down between the upper end portion and the lower end portion of the elevating support member, the elevating drive mechanism between the upper end portion and the lower end portion of the elevating support member And a vertical conveyance belt to which a base end portion of the end effector is fixed, and a vertical conveyance motor for driving the vertical conveyance belt.

  Hereinafter, a substrate transfer system according to an embodiment of the present invention will be described with reference to the drawings.

  As shown in FIGS. 1 and 2, the substrate transfer system according to the present embodiment includes a substrate transfer robot 1, provisional storage devices 2 and 3 and a conveyor device (substrate loading / unloading means) 4 arranged around the substrate transfer robot 1. Yes. Further, a substrate processing apparatus 5 for processing a substrate is disposed adjacent to the robot 1.

  The arrangement relationship between the robot 1 and each device 2-5 will be described. The substrate processing device 5 and the conveyor device 4 are arranged to face each other with the robot 1 in between. In addition, a pair of temporary storage devices 2 and 3 are disposed on the line perpendicular to the line connecting the substrate processing apparatus 5 and the conveyor apparatus 4 with the robot 1 interposed therebetween.

  This transfer system is particularly suitable for transferring a large glass substrate 100 for a solar panel, and the robot 1 is appropriately connected between the conveyor device 4, the pair of temporary storage devices 2, 3 and the substrate processing device 5. The glass substrate 100 is conveyed.

  Specifically, the unprocessed glass substrate 100 transported to the vicinity of the robot 1 by the conveyor device 4 is transported to the first provisional storage device 2 by the robot 1. The unprocessed glass substrate 100 temporarily stored in the first temporary storage device 2 is carried into the substrate processing device 5 by the robot 1.

  The substrate processing apparatus 5 performs chemical vapor deposition (CVD) processing or the like on the glass substrate 100, and the processed glass substrate 100 is unloaded from the substrate processing apparatus 5 by the robot 1 and transferred to the second temporary storage apparatus 3. It is conveyed.

  The processed glass substrate 100 temporarily stored in the second temporary storage device 3 is transported to the conveyor device 4 by the robot 1 and is carried out by the conveyor device 4.

  As shown in FIG. 3, the substrate transfer robot 1 has a base 10 fixedly installed on a floor 50, and the base 10 can rotate an elongated traveling support member 11 extending in the horizontal direction. It is supported by.

  Specifically, a rotation support shaft 12 is fixedly provided on the lower surface of the travel support member 11, and the rotation support shaft 12 is pivotally supported by a bearing 13 of the base 10. The rotation support shaft 12 is provided at a position slightly closer to the rear end portion 11B than the center position in the longitudinal direction of the travel support member 11.

  A servo motor 14 having an encoder is provided inside the base 10, and the rotational driving force of the servo motor 14 is transmitted to the rotary support shaft 12 through gear mechanisms 15 and 16. As a result, the travel support member 11 is rotationally driven around the rotation axis 17 in the vertical direction with respect to the base 10. The servo motor 14 and the gear mechanisms 15 and 16 constitute rotation driving means.

  Mounted on the travel support member 11 is an elevating support member 18 extending in the vertical direction so as to be movable between the front end portion 11A and the rear end portion 11B of the travel support member 11 while maintaining its upright state. Has been.

  More specifically, a horizontal transport belt that spans between the front end portion 11A and the rear end portion 11B via a pair of pulleys (horizontal transport pulleys) 19A, 19B in the internal space of the travel support member 11. 20 is provided. The upper surface of the travel support member 11 is open, and the lower end portion 18B of the elevating support member 18 is fixed to the upper surface of the horizontal conveyance belt 20. The upper opening of the travel support member 11 may be sealed with a seal belt or the like.

  One pulley 19A is rotationally driven by a servo motor 21 having an encoder, and the horizontal conveyance belt 20 is driven back and forth. Thereby, the elevating support member 18 is driven to travel between the front end portion 11A and the rear end portion 11B of the travel support member 11. The servo motor 21, the horizontal conveyance belt 20, and the pulleys 19A and 19B constitute a traveling drive mechanism that causes the elevating support member 18 to travel in the horizontal direction. The travel drive mechanism and the travel support member 11 constitute a horizontal drive means.

  An end effector 22 extending in the horizontal direction is mounted on the front surface of the elevating support member 18 so as to be able to elevate between the upper end portion 18A and the lower end portion 18B of the elevating support member 18 while maintaining the horizontal state. Has been.

  More specifically, in the internal space of the elevating support member 18, the vertical conveyance belt 24 is stretched between a pair of pulleys (vertical conveyance pulleys) 23A and 23B between the upper end portion 18A and the lower end portion 18B. Is provided. The front surface of the elevating support member 18 is open, and the base end portion 22 </ b> B of the end effector 22 is fixed to the front surface of the vertical conveyance belt 24. The front opening of the lifting support member 18 may be sealed with a seal belt or the like.

  One pulley 23A is rotationally driven by a servo motor 25 provided with an encoder, and the vertical conveying belt 24 is driven up and down. Thereby, the end effector 22 is driven to travel between the upper end portion 18A and the lower end portion 18B of the lifting support member 18. The servo motor 25, the vertical conveyance belt 24, and the pulleys 23A and 23B constitute an elevating drive mechanism that elevates and lowers the end effector 22 in the vertical direction. The elevating drive mechanism and the elevating support member 18 constitute vertical drive means.

  3 shows a state in which the lifting support member 18 is located at the rear end portion 11B of the traveling support member 11. In this standby state, the distal end portion 22A of the end effector 22 is more than the front end of the traveling support member 11. Is also located on the rear end side.

  In the transport system according to the present embodiment, as shown in FIG. 4A, an open space 2 </ b> A in which at least the side (front side) facing the robot 1 is opened below each of the temporary storage devices 2 and 3. 3A is formed.

  Also, as shown in FIG. 4B, in the substrate processing apparatus 5, an open space 5 </ b> A in which at least the side facing the robot 1 (front side) is opened is formed in the lower part. Instead of forming the open space 5A below the substrate processing apparatus 5, the substrate processing apparatus 5 may be arranged so as not to interfere with the minimum rotation radius of the robot.

  Further, as shown in FIG. 4 (c), in the conveyor device 4, an open space 4A in which at least the side facing the robot 1 (front side) is opened is formed in an area between the upper and lower belts. ing.

  When the traveling support member 11 of the robot 1 is rotated around the rotation axis 17, the front end portion 11 </ b> A of the traveling support member 11 draws a circular locus indicated by reference numeral 26 in FIG. 2.

  A part of the circular trajectory 26 of the front end portion 11 </ b> A of the traveling support member 11 overlaps the installation area of the temporary storage devices 2 and 3, the conveyor device 4, and the substrate processing device 5. The substrate processing apparatus 5 may be arranged so as not to overlap with the circular locus 26.

  However, since the open spaces 2A, 2B, 4A, and 5A shown in FIG. 4 are formed in each device, the traveling support member 11 of the robot 1 has the front end portion 11A in the open spaces 2A, 2B, and 4A when rotating. 5A inside.

  This point will be described with reference to FIGS. 5 and 6. The travel support member 11 of the robot 1 corresponds to an open space 5 </ b> A formed below the substrate processing apparatus 5 and an open space 4 </ b> A inside the conveyor apparatus 4. It is arranged at the height position. Further, with respect to the temporary storage devices 2 and 3, the travel support member 11 is disposed at a height position corresponding to each of the open spaces 2 </ b> A and 3 </ b> A.

  Thus, when the travel support member 11 rotates, the front end portion 11A can pass through the open spaces 2A, 3A, 4A, and 5A, and the travel support member 11 and each device 2-5 Interference can be prevented.

  Further, as described above, the rotation support shaft 12 is provided at a position slightly closer to the rear end portion 11B than the center position in the longitudinal direction of the travel support member 11. Thereby, even when the traveling support member 11 is rotated in a state where the lifting support member 18 is positioned at the rear end portion 11B of the traveling support member 11, the lifting support member 18 may interfere with each device 2-5. Absent.

  Further, by providing the rotation support shaft 12 at a position slightly closer to the rear end portion 11B than the center position in the longitudinal direction of the travel support member 11, the weight balance of the turning shaft at the time of turning the robot is improved, and smooth rotation operation is achieved. Can be achieved.

  That is, when the robot turns, the lifting support member 18 is positioned on the rear end portion 11B side of the travel support member 11, but the front portion of the travel support member 11 is made longer than the rear portion, so that the weight of the front portion is increased. Increases weight balance.

  In the travel drive mechanism and the lift drive mechanism in this embodiment, a belt & pulley is used as the linear motion mechanism. For example, a linear motion mechanism such as a rack and pinion, a ball screw, a linear motor, a cylinder, telescopic, and a pantograph is used. May be used.

  Further, in the rotational drive means in the present embodiment, the power of the servo motor 14 is transmitted to the travel support member 11 via the gear mechanisms 15 and 16, but for example, the travel support member 11 is connected to a high output motor. You may connect directly.

  Hereinafter, the operation of the robot 1 when the glass substrate 100 on the conveyor device 4 is transferred to the substrate processing device 5 will be described.

  In the initial state, the end effector 22 faces the direction of the conveyor device 4 as shown in FIG. 1, and at this time, the lifting support member 18 is the rear end portion 11B of the travel support member 11 as shown in FIG. Located on the side.

  In this state, the end-effector 22 is moved down by driving the lifting / lowering servomotor 25 and moved downward from the lower surface of the glass substrate 100 on the conveyor device 4 by a predetermined distance.

  Next, the traveling drive servomotor 21 is driven to move the lifting support member 18 to the front end portion 11 </ b> A side of the traveling support member 11, and the end effector 22 is positioned below the glass substrate 100.

  Subsequently, the lifting / lowering drive servomotor 25 is driven to move the end effector 22 upward by a predetermined distance, and the glass substrate 100 is held on the end effector 22.

  Then, the traveling drive servomotor 21 is driven to move the elevating support member 18 to the rear end portion 11 </ b> B side of the traveling support member 11.

  Next, the servo motor 14 for rotational driving is driven to rotate the travel support member 11 so that the end effector 22 faces the substrate processing apparatus 5.

  Subsequently, the lifting / lowering drive servo motor 25 is driven to move the end effector 22 upward by a predetermined distance from the height of the substrate mounting portion of the substrate processing apparatus 5.

  Then, the traveling drive servomotor 21 is driven to move the lifting support member 18 to the front end portion 11 </ b> A side of the traveling support member 11, and the end effector 22 is positioned above the substrate placement portion of the substrate processing apparatus 5.

  From this state, the lift drive servomotor 25 is driven to move the end effector 22 downward by a predetermined distance, and the glass substrate 100 is placed on the substrate placement portion of the substrate processing apparatus 5.

  Finally, the travel drive motor 21 is driven to move the lift support member 18 to the rear end portion 11B of the travel support member 11.

  In the present embodiment, the glass substrate 100 is carried in and out using the conveyor device 4. However, for example, a placing table for placing the glass substrate 100 is installed, and a glass or the like is installed by a robot or the like. The substrate 100 may be carried in and out of the mounting table, or the glass substrate 100 may be carried in and out in a state where a plurality of substrates are accommodated in the substrate container.

  According to the transport system of the present embodiment having the above-described configuration, each device 2-5 is connected to the robot 1 with respect to the robot 1 while preventing interference between the travel support member 11 of the robot 1 and each device 2-5. Since it can arrange | position in the near position, the layout of the whole system including the substrate processing apparatus 5 can be made more compact than before.

  Further, in the robot 1 of the transport system according to the present embodiment, when the glass substrate 100 is placed on the end effector 22 and moved up and down, only the end effector 22 of the entire robot 1 needs to be driven up and down. For this reason, the capacity | capacitance of the servomotor which comprises a drive means can be restrained small compared with the case where another arm is moved with an end effector like the prior art. Thereby, enlargement of the robot 1 can be prevented and an increase in manufacturing cost can be suppressed.

  Furthermore, since the robot 1 of the transfer system according to the present embodiment moves the end effector 22 in the horizontal direction by moving the vertical drive unit itself in the horizontal direction, the arm is moved horizontally like a conventional substrate transfer robot. There is no need to stretch in the direction. For this reason, there is no problem of bending due to the extension of the arm, and the end effector 22 can be accurately positioned at a desired position.

1 is a perspective view showing a schematic configuration of a substrate transfer system according to an embodiment of the present invention together with a substrate processing apparatus. FIG. 2 is a plan view of the substrate transfer system and the substrate processing apparatus shown in FIG. 1. 1 is a longitudinal sectional view showing a schematic configuration of a robot of a substrate transfer system according to an embodiment of the present invention. It is a figure for demonstrating the open space in the temporary storage apparatus shown in FIG. 1, a substrate processing apparatus, and a conveyor apparatus, (a) is a temporary storage apparatus, (b) is a substrate processing apparatus, (c) is a conveyor apparatus. Indicates. It is a figure for demonstrating the layout of the substrate conveyance system and substrate processing apparatus which were shown in FIG. 1, (a) is a partial top view, (b) is a partial side view. The side view for demonstrating the layout of the substrate conveyance system and substrate processing apparatus which were shown in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Substrate transport robot 2, 3 Temporary storage apparatus 2A, 3A, 5A Open space 4 Conveyor apparatus 5 Substrate processing apparatus 11 Traveling support member 18 Lifting support member 14, 15, 16 Rotation drive means 19A, 19B Horizontal transport pulley 20 Horizontal transport Belt 21 Horizontal Servo Motor 22 End Effector 23A, 23B Vertical Conveying Pulley 24 Vertical Conveying Belt 25 Vertical Conveying Servo Motor 100 Glass Substrate

Claims (6)

A robot for transporting a substrate, the robot for carrying the substrate in and out of a substrate processing apparatus for processing the substrate, which is arranged adjacent to the robot;
A conveyor device that is arranged adjacent to the robot, carries the substrate to the vicinity of the robot, and unloads the substrate received from the robot,
The robot includes an end effector in which the substrate is held substantially horizontally, vertical drive means for driving the end effector in a vertical direction, horizontal drive means for driving the vertical drive means in a horizontal direction, and the horizontal drive means Rotational drive means for rotationally driving a rotary shaft around a vertical rotation axis, the end of the end effector being connected to the vertical drive means, and the end of the vertical drive means being connected to the horizontal drive means And
A temporary storage device that is disposed adjacent to the robot and temporarily stores the substrate transported between the conveyor device and the substrate processing apparatus by the robot;
The end effector extends in the horizontal direction and has a proximal end portion and a distal end portion, and the proximal end portion is attached to the vertical driving means ,
The robot is configured such that when the vertical driving means is located at the rear end of the horizontal driving means, the tip of the end effector is located on the rear end side of the front end of the horizontal driving means. And
At least one of the substrate processing apparatus and the provisional storage apparatus is formed with an open space in which at least the side facing the robot is opened,
The robot is arranged so that a front end portion of the horizontal driving means passes through at least one of the open spaces when the horizontal driving means rotates around the rotation axis. system. The substrate processing apparatus and the conveyor apparatus are arranged to face each other with the robot interposed therebetween,
The interim storage device, the substrate transfer system according to claim 1, characterized in that it is disposed on a line perpendicular to the line connecting the said substrate processing apparatus and the conveyor apparatus. 3. The substrate transfer system according to claim 2 , further comprising a pair of provisional storage devices arranged to face each other with the robot interposed therebetween. The axis of rotation, the substrate transfer system according to any one of claims 1 to 3, characterized in that in the position of the rear end than the longitudinal center position of the horizontal driving unit. The horizontal driving means is a traveling support member that extends in a horizontal direction and includes a front end portion and a rear end portion, the traveling support member that is rotationally driven around the rotation axis by the rotational drive means, and the vertical drive. A travel drive mechanism that travels between the front end portion and the rear end portion of the travel support member;
The travel drive mechanism is spanned between the front end portion and the rear end portion of the travel support member, and drives the horizontal transport belt, and a horizontal transport belt to which a lower end portion of the vertical drive means is fixed. substrate transfer system according to any one of claims 1 to 4, characterized in that it has a horizontal conveying motor. The vertical driving means is an elevating support member that extends in the vertical direction and includes an upper end portion and a lower end portion. An elevating drive mechanism for elevating and driving between the upper end portion and the lower end portion of the support member,
The elevating drive mechanism is stretched between the upper end portion and the lower end portion of the elevating support member, and a vertical conveying belt to which a base end portion of the end effector is fixed, and a vertical driving the vertical conveying belt. substrate transfer system according to any one of claims 1 to 5, characterized in that it has a, a transport motor.

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