JP5194363B2 - Optical sensor - Google Patents

Description

  The present invention relates to an optical sensor that can detect light in a specific wavelength range with high sensitivity.

  Conventionally, various optical sensors have been used for receiving light in a specific wavelength range.

  For example, an imaging device such as a CMOS or CCD can reproduce an image of an object by capturing visible light.

  Further, by capturing not only visible light but also infrared light, temperature management for failure analysis of electronic devices, analysis of a space containing a gas that absorbs infrared light, display of an image by a monitoring camera, and the like are possible.

  In such an optical sensor, a filter that transmits only light in a specific wavelength range is used.

  Specifically, a color filter is used in an imaging apparatus such as a COMS. Therefore, it is possible to reproduce the three primary colors of light and display a color image.

  Moreover, in the surveillance camera, infrared rays are extracted by a filter that transmits infrared rays, and the extracted infrared rays are captured by a light receiving element. Thereby, the temperature of a human body etc. can be caught (for example, refer patent document 1).

Moreover, a CCD camera that detects ultraviolet rays is used as an inspection device for inspecting semiconductors, glass, and the like (see, for example, Patent Document 2).
JP 2005-207830 A JP 2002-75815 A

  As described above, by using a filter that transmits light in a specific wavelength region, an imaging device such as a COMS or a surveillance camera can be manufactured.

  However, according to the study by the present inventors, the transmittance of a filter that transmits light in a specific wavelength range is not necessarily high, and there is room for improvement.

  For example, in a color filter used for an imaging device such as a CMOS, the color filter for extracting blue light and green light has low transmittance. In particular, since the light transmittance of the blue region of the blue (B) filter for extracting blue light or the green region of the green (G) filter for extracting green light is low, the amount of light reaching the light receiving element is small. . As a result, the image quality is deteriorated (dark image).

  In addition, with a conventional monitoring camera or temperature sensor using an optical sensor, the object cannot be observed in the visible light range. Therefore, it has been necessary to separately provide a sensor for the ultraviolet region and the infrared region and a sensor for observing the visible light region. If there is a distance between the two sensors, the parallax between the ultraviolet / infrared image and the visible image occurred.

  The present invention has been made in view of the above circumstances, and an object thereof is to provide an optical sensor that detects light in a specific wavelength range with high sensitivity and has no parallax in an image.

  The present invention takes the following means in order to solve the above problems.

According to a first aspect of the present invention, there is provided a substrate, a plurality of light receiving elements formed on the substrate for receiving incident incident light and converting them into electrical signals, and corresponding to each of the light receiving elements. A light having a unique half-value wavelength which is formed on the light-receiving element and has a light transmittance of 50%. The light on the shorter wavelength side than the half-value wavelength exhibits a transmission suppression characteristic and the light on the longer wavelength side from the half-value wavelength. Is a plurality of filters exhibiting transmission characteristics, a transparent filter having a spectral characteristic in which the half-value wavelength is in the range of 365 nm to 420 nm and has a light transmittance of 90% or more at a light wavelength of 450 nm or more, and a green region A plurality of filters including a yellow filter that transmits light from a long wavelength side to a red filter that transmits light from a red region to a long wavelength region, an infrared filter that transmits light in an infrared region, and the transparent filter Via The blue light calculating means for obtaining the intensity value of the blue light based on the electrical signal of the incident light received and the electrical signal of the incident light received via the yellow filter, and the incident received via the yellow filter Green computing means for obtaining an intensity value of green light based on an electrical signal of light and an incident light electrical signal received via the red filter, and an electrical signal of incident light received via the red filter And a red calculation means for obtaining an intensity value of red light based on an electrical signal of incident light received via the infrared filter.
According to a second aspect of the present invention, in the optical sensor according to the first aspect, the blue computing means receives light from the electrical signal of incident light received via the transparent filter via the yellow filter. The intensity signal of the blue light is obtained by subtracting the electric signal of the incident light, and the green calculating means receives light from the electric signal of the incident light received via the yellow filter via the red filter. The green light intensity value is obtained by subtracting the incident electrical signal of the incident light, and the red computing means passes the infrared filter from the incident light electrical signal received via the red filter. The light sensor obtains the intensity value of the red light by subtracting the electrical signal of the incident light received.

Invention corresponding to claim 3 is an optical sensor that corresponds to claim 1 or claim 2, wherein each filter is formed by coloring material selected from an organic pigment or dye, wherein at least the yellow filter red The color material of the filter and the infrared filter is an optical sensor that is an organic pigment .

According to a fourth aspect of the present invention, in the optical sensor according to any one of the first to third aspects, a microlens for condensing light on the light receiving element is further provided on each of the filters. It is the formed optical sensor.

Invention corresponding to claim 5, the optical sensor corresponding to any one of claims 1 to 3, before Symbol blue light, the green light, based on each intensity value of the red light, the image information Is an optical sensor comprising a creating means for creating the image information and an output means for outputting the image information.

  The invention corresponding to claim 6 is the optical sensor corresponding to claim 5, wherein the temperature measuring means for measuring the temperature based on the electrical signal of the incident light received through the infrared filter, The optical sensor includes temperature distribution creating means for creating temperature distribution information corresponding to the image information based on the temperature measured by the temperature measuring means.

  The invention corresponding to claim 7 is the optical sensor corresponding to claim 5, wherein the infrared ray projecting means for projecting the infrared ray in the wavelength region transmitting the infrared filter onto the object, and the reflection reflected from the object. When light is received through the infrared filter, the optical sensor includes a measuring unit for measuring a distance to the object based on an electric signal obtained by converting the reflected light.

The invention corresponding to claim 8 is the optical sensor corresponding to any one of claims 1 to 7, wherein the transparent filter is an optical sensor containing a coumarin-based dye.
The invention corresponding to claim 9 is the optical sensor according to any one of claims 1 to 8, wherein the half-value wavelength of the yellow filter is in the range of 490 nm to 600 nm, and the half-value wavelength of the red filter Is in the range of 590 nm to 680 nm, and the half value wavelength of the infrared filter is in the range of 620 nm to 680 nm.
The invention corresponding to claim 10 is the optical sensor according to claim 9, wherein the infrared filter includes C.I. I. Pigment red 254 and C.I. I. Pigment yellow 139 and C.I. I. It is an optical sensor having a color material mixed with pigment violet 23.
The invention corresponding to claim 11 is the optical sensor according to claim 9, wherein the infrared filter is an optical sensor configured by optical superposition of a red filter and a purple filter.
According to a twelfth aspect of the present invention, there is provided a substrate, a plurality of light receiving elements formed on the substrate for receiving incident incident light and converting them into electrical signals, and corresponding to each of the light receiving elements. A light having a unique half-value wavelength which is formed on the light-receiving element and has a light transmittance of 50%. The light on the shorter wavelength side than the half-value wavelength exhibits a transmission suppression characteristic and the light on the longer wavelength side from the half-value wavelength. Is a plurality of filters exhibiting transmission characteristics, a transparent filter having a spectral characteristic in which the half-value wavelength is in the range of 365 nm to 420 nm and has a light transmittance of 90% or more at a light wavelength of 450 nm or more, and a green region A yellow filter that transmits light on the long wavelength side from the first infrared filter, a first infrared filter that transmits light on the long wavelength side from the red region closer to the infrared region, and a half value on the longer wavelength side than the half value wavelength of the first infrared filter Second red with wavelength Intensity value of blue light based on the plurality of filters including an outer filter, an electrical signal of incident light received through the transparent filter, and an electrical signal of incident light received through the yellow filter The intensity value of the green light is calculated based on the blue calculation means for obtaining the light, the electrical signal of the incident light received through the yellow filter, and the electrical signal of the incident light received through the first infrared filter. The intensity of the red light based on the green computing means to be obtained, the electrical signal of the incident light received via the first infrared filter, and the electrical signal of the incident light received via the second infrared filter It is an optical sensor provided with a red calculation means for obtaining a value.
According to a thirteenth aspect of the present invention, in the optical sensor according to the twelfth aspect , the blue calculation means receives light from the electrical signal of incident light received via the transparent filter via the yellow filter. The intensity signal of the blue light is obtained by subtracting the electric signal of the incident light, and the green calculation means passes through the first infrared filter from the electric signal of the incident light received via the yellow filter. Then, the intensity of the green light is calculated by subtracting the received electric signal of the incident light, and the red calculation means uses the electric signal of the incident light received through the first infrared filter as the red light calculating means. It is an optical sensor that subtracts an electrical signal of incident light received through a second infrared filter to obtain an intensity value of the red light.
The invention corresponding to claim 14 is the optical sensor according to claim 12 or claim 13 , wherein each of the filters is formed of a color material selected from organic pigments or dyes , and at least the yellow filter and the first filter. The color material of the infrared filter and the second infrared filter is an optical sensor that is an organic pigment .
The invention corresponding to claim 15 is the optical sensor according to any one of claims 12 to 14 , further comprising a microlens for condensing light on the light receiving element on each of the filters. It is the formed optical sensor.

Invention corresponding to claim 16 is an optical sensor corresponding to any one of claims 12 to claim 15, half wavelength of the first infrared filter is in the range of 640 nm ～680Nm, the first The half-wavelength of the 2 infrared filter is an optical sensor in the range of 790 nm to 820 nm.
The invention corresponding to claim 17 is the optical sensor according to claim 16, wherein the second infrared filter is a C.I. I. Pigment blue 15: 6 and C.I. I. Pigment red 254 and C.I. I. Pigment yellow 139 and C.I. I. It is an optical sensor having a color material mixed with pigment violet 23.

The invention corresponding to claim 18 is the optical sensor according to any one of claims 12 to 17 , wherein the image information is obtained based on the intensity values of the blue light, the green light, and the red light. An optical sensor comprising a creating means for creating and an output means for outputting the image information.

The invention corresponding to claim 19 is the optical sensor according to claim 18 , further comprising illuminance conversion means for converting the illuminance of the output means corresponding to the intensity value of the green light obtained by the green calculation means. It is an optical sensor.

<Terminology>
In the present invention, “transmittance” is determined by setting the transmittance of a transparent glass having a refractive index of around 1.5 as 100%.

  The “half-value wavelength” is a light whose transmittance is 50% in the spectral characteristic curve of the filter where the spectral characteristic curve rises from the short wavelength side where light transmission is suppressed to the long wavelength side where light is transmitted. Means the wavelength. That is, the filter used in the present invention has a spectral characteristic curve that is substantially S-shaped as shown in FIG.

<Action>
Therefore, the present invention has the following effects by taking the above-described means.

The invention corresponding to claims 1 and 2 is a blue computing means, a green computing means, and a red computing for computing the intensity values of blue light, green light, and red light based on an electrical signal of incident light converted by each light receiving element. Since the means is provided, it is possible to provide an optical sensor that can detect light in the wavelength range of blue light, green light, and red light with high sensitivity.
In addition to the above-described actions, the invention corresponding to claims 1 and 2 has a spectral characteristic in which the half-value wavelength is in the range of 365 nm to 420 nm and the light transmittance is 90% or more at a light wavelength of 450 nm or more. Since the configuration includes a transparent filter, a yellow filter for extracting yellow light, and an infrared filter for extracting infrared light, the intensity data of the three primary colors of light can be obtained by calculation.

The invention corresponding to claim 3 is formed of a color material selected from organic pigments or dyes in addition to the action corresponding to claim 1 or claim 2 , and is a color material of at least a yellow filter, a red filter, and an infrared filter. Is an organic pigment, it is possible to provide an optical sensor including a filter having a specific half-value wavelength.

In the invention corresponding to claim 4 , in addition to the actions corresponding to claims 1 to 3 , a microlens for condensing light on the light receiving element is formed on each filter. The structure can be simplified and thinned. Thereby, a small optical sensor can be provided. Furthermore, since the distance between the microlens and the light receiving element is shortened, the incident light capturing angle can be increased, and the sensitivity of the photosensor can be increased.

Invention corresponding to claim 5, in addition to the function corresponding to claims 1 to 4, and preparing means for preparing images information, since an output means for outputting image information, a color An optical sensor capable of reproducing an image can be provided.

  In addition to the operation corresponding to claim 5, the invention corresponding to claim 6 creates temperature measuring means for measuring temperature and temperature distribution information corresponding to the image information based on the electrical signal of the incident light. With the configuration provided with the temperature distribution creating means, the parallax between the image information and the temperature distribution information can be eliminated.

In addition to the operation corresponding to claim 5, the invention corresponding to claim 7 measures the distance to the object based on the infrared projection means for projecting infrared rays onto the object and the electric signal converted from the reflected light. Image information that enables three-dimensional analysis of the shape of a living body can be created by a configuration including a measuring unit for performing the above.
The invention corresponding to claim 8 can obtain an electrical signal of light from which the influence of ultraviolet rays has been removed by the constitution in which the transparent filter contains a coumarin-based dye in addition to the actions corresponding to claims 1 to 7. An intensity value of blue light close to human visual sensitivity can be obtained. As a result, an optical sensor having good color balance and color reproducibility can be provided.
In the invention corresponding to claim 9, in addition to the actions corresponding to claims 1 to 8, the half-value wavelength of the yellow filter is in the range of 490 nm to 600 nm, and the half-value wavelength of the red filter is in the range of 590 nm to 680 nm. The configuration in which the half-value wavelength of the infrared filter is in the range of 620 nm to 680 nm enables the half-value wavelength to be in the desired range.
In the invention corresponding to claim 10, in addition to the operation corresponding to claim 9, the infrared filter does not have a laminated structure of color filters. I. Pigment red 254 and C.I. I. Pigment yellow 139 and C.I. I. It can be set as the single layer which has the color material which mixed the pigment violet 23. FIG.
In the invention corresponding to claim 11, in addition to the action corresponding to claim 9, since the infrared filter is configured by optical superposition of a red filter and a purple filter, the infrared filter is not a single layer, A laminated structure of color filters can be obtained.

The invention corresponding to claims 12, 13, and 16 has the half-value wavelength in addition to the actions corresponding to claims 1 to 3 (excluding the action of obtaining the intensity data of the three primary colors of light by calculation in claim 1). A transparent filter having a spectral characteristic within a range of 365 nm to 420 nm and having a light transmittance of 90% or more at a light wavelength of 450 nm or more, a yellow filter for extracting yellow light, and an infrared ray for extracting Since the configuration includes the first infrared filter and the second infrared filter having a half-value wavelength longer than the half-value wavelength of the first infrared filter, the intensity data of the three primary colors of light can be obtained by calculation. it can.
In the invention corresponding to claim 14 , in addition to the actions corresponding to claims 12 and 13 , each filter is formed of a color material selected from organic pigments or dyes , and at least the yellow filter and the first infrared filter Since the color material of the second infrared filter is an organic pigment, it is possible to provide an optical sensor including a filter having a specific half-value wavelength.
In the invention corresponding to claim 15 , in addition to the actions corresponding to claims 12 to 14 , a microlens for condensing light on the light receiving element is formed on each filter. The structure can be simplified and thinned. Thereby, a small optical sensor can be provided. Furthermore, since the distance between the microlens and the light receiving element is shortened, the incident light capturing angle can be increased, and the sensitivity of the photosensor can be increased.
In the invention corresponding to claim 17, in addition to the operation corresponding to claim 16, the second infrared filter is a C.I. I. Pigment blue 15: 6 and C.I. I. Pigment red 254 and C.I. I. Pigment yellow 139 and C.I. I. The second infrared filter can be formed as a near-infrared filter having a half-value wavelength of about 800 nm by a configuration having a color material mixed with pigment violet 23.

The invention corresponding to claim 18 is provided with a creation means for creating image information and an output means for outputting the image information in addition to the operation corresponding to claims 12 to 17 , so that a color image is provided. Can be provided.

The invention corresponding to the nineteenth aspect has the function corresponding to the eighteenth aspect and includes an illuminance conversion means for converting the illuminance of the output means corresponding to the intensity value of the green light. Accordingly, it is possible to provide an optical sensor that can adjust the brightness or the like of the output means.

  ADVANTAGE OF THE INVENTION According to this invention, the light sensor which detects the light of a specific wavelength range with high sensitivity with 1 set of optical sensor systems, and there is no parallax in the image obtained can be provided.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

<First Embodiment>
(1-1. Configuration)
FIG. 1 is a schematic diagram showing a configuration of the optical sensor 5 according to the first embodiment of the present invention, and FIG. 2 is a diagram showing a concept of an arrangement state when the filter in the imaging device 10 is viewed from the incident light side. is there. 3 and 4 are a cross-sectional view taken along the line II ′ and a cross-sectional view taken along the line II-II ′ of the optical sensor 510 in FIG. 1, respectively.

  The optical sensor 5 includes an imaging device 10 and an arithmetic device 20. In the present embodiment, a CMOS is exemplified as the light receiving element.

  The imaging device 10 includes a substrate 11, a light receiving element 12, a planarization layer 13, a filter 14, and a microlens 15.

  The substrate 11 is a semiconductor substrate having a wiring layer that enables transmission and reception of electrical signals. The intensity value (electric signal) of the light received by the light receiving element 12 is sent to the arithmetic unit 20 through the wiring layer.

  The light receiving element 12 is formed on the substrate 11 and photoelectrically converts incident light into an electric signal. As will be described later, in this embodiment, four types of filters 14 are formed as a transparent filter 14W, a yellow filter 14Y, a red filter 14R, and an infrared filter 14Blk. Therefore, for the sake of convenience, the light receiving elements that receive light passing through the transparent filter 14W, the yellow filter 14Y, the red filter 14R, and the infrared filter 14Blk are the white light receiving element 12W, the yellow light receiving element 12Y, the red light receiving element 12R, and the black, respectively. It will be referred to as a light receiving element 12Blk.

  The white light receiving element 12W sends an electrical signal obtained by converting the received incident light to the blue arithmetic unit 21B.

  The yellow light receiving element 12Y sends an electrical signal obtained by converting the received incident light to the blue computing unit 21B and the green computing unit 21G.

  The red light receiving element 12R sends an electrical signal obtained by converting the received incident light to the green computing unit 21G and the red computing unit 21R.

  The black light receiving element 12Blk sends an electrical signal obtained by converting the received incident light to the red computing unit 21R. In addition, the electrical signal obtained by the black light receiving element 12Blk is sent to the output unit 23 as infrared data.

  The planarization layer 13 is laminated on the surface on the incident light side of the substrate 11 on which the light receiving element 12 is formed, and the installation surface of the filter 14 is flattened. Further, the planarizing layer 13 is formed of an acrylic resin containing 5% of a coumarin dye as a UV absorber in terms of dye concentration. Thereby, the planarization layer 13 has a point (hereinafter also referred to as a half-value wavelength) having a transmittance of 50% with respect to light having a wavelength of about 420 nm. Specifically, it has a point that has a transmittance of 50% with respect to light with a wavelength of 365 nm to 420 nm, and has a spectral characteristic with a transmittance of 90% or more with respect to light with a wavelength of 450 nm or more.

  The filters 14 are individually formed on each of the light receiving elements 12 so as to be adjacent to each other. The filter 14 has a unique half-value wavelength at which the light transmittance is 50% for each type of filter. This filter exhibits transmission suppression characteristics for light shorter than the half-value wavelength and exhibits transmission characteristics for light longer than the half-value wavelength, and has a substantially S-shaped spectral characteristic curve.

  Here, four types of filters 14 are formed: a transparent filter 14W, a yellow filter 14Y, a red filter 14R, and an infrared filter 14Blk. These four types of filters are formed of a color material selected from organic pigments or dyes. One unit of color separation is formed by a total of four pixels, each of which includes a transparent filter 14W, a red filter 14R, a yellow filter 14Y, and an infrared filter 14Blk. Further, when the transparent filter 14W, the yellow filter 14Y, the red filter 14R, and the infrared filter 14Blk are expressed as W, Y, R ', and Blk, respectively, for example, a filter 14 in an array state as shown in FIG. 2 is formed.

  The transparent filter 14 </ b> W is a colorless and transparent filter formed of the same material as the planarizing layer 13. Here, the transparent filter 14W is formed from an acrylic resin containing 5% of a coumarin dye in terms of dye concentration. Thereby, the transparent filter 14W having a half-value wavelength of about 420 nm can be formed.

  The yellow filter 14Y transmits light on the long wavelength side from the green region of incident light incident on the optical sensor. That is, it is a filter that transmits wavelengths in the green region and above, including light in the red region and light in the infrared region. Moreover, it is a yellow filter visually. The half-value wavelength of the yellow filter is preferably in the range of 490 nm to 600 nm. In particular, it is desirable to be in the range of 500 ± 10 nm. The reason why the range of 500 ± 10 nm is particularly desirable is that a filter having a half-value wavelength in this range can have a spectral characteristic with a steep rising portion in the spectral characteristic curve. That is, color separation can be improved. C.I. Pigment Yellow 139 can be used as a color material for the yellow filter 14Y. In this case, a yellow filter 14Y having a half-value wavelength of about 500 nm can be formed.

  The red filter 14 </ b> R is a filter that transmits light in a long wavelength region from the red region (that is, light in the red region and light in the infrared region) out of incident light incident on the optical sensor. Moreover, it is a red filter visually. The half-value wavelength of the red filter is preferably in the range of 590 nm to 680 nm. As the color material of the red filter 14R, C.I. Pigment Red 117, C.I. Pigment Red 48: 1, and C.I. Pigment Yellow 139 can be used. In this case, a red filter 14R having a half-value wavelength of about 600 nm can be formed.

  The infrared filter 14Blk has transmission suppression characteristics for visible light, has transmission characteristics for infrared light (infrared rays), and extracts infrared rays. The half-value wavelength of the infrared filter 14Blk is preferably in the range of 620 nm to 680 nm. In particular, a range of 600 ± 10 nm is desirable. The reason why the range of 600 ± 10 nm is particularly desirable is that a filter having a half-value wavelength in this range can have spectral characteristics in which the slope of the rising portion is steep in the spectral characteristic curve. That is, color separation can be improved. Here, it is configured by optical superposition of a purple filter 14V and a red filter 14R which are violet color filters. The purple filter 14V can be formed by, for example, C.I. pigment violet 23. From these purple filter 14V and red filter 14R, an infrared filter 14Blk having a half-value wavelength of about 660 nm can be formed. In addition, the infrared filter 14Blk may not be a laminated structure of color filters but may be a single layer having a color material in which C.I. Pigment Red 254, C.I. Pigment Yellow 139, and C.I. Pigment Violet 23 are mixed.

  The spectral characteristics of the filters 14W, 14Y, 14R, and 14Blk described above are shown in FIG. In FIG. 5, a1, a2, a3, and a4 indicate the spectral characteristics of the transparent filter 14W, the yellow filter 14Y, the red filter 14R, and the infrared filter 14Blk, respectively. The spectral characteristics of each filter can be finely adjusted according to the pigment used, the ratio thereof, and the film thickness of the filter.

  The microlens 15 is for condensing light on the light receiving element 12 and is formed on the filter 14. The microlens 15 is made of the same material as the planarizing layer 13 and the transparent filter 14W.

  The computing device 20 includes a blue computing unit 21B, a green computing unit 21G, a red computing unit 21R, a creating unit 22, and an output unit 23. The arithmetic unit 20 obtains data of three primary colors of light and reproduces color image data.

  The blue calculation unit 21B obtains blue light data. Specifically, the blue calculation unit 21B receives electrical signals from the white light receiving element 12W and the yellow light receiving element 12Y. Then, the electric signal sent from the white light receiving element 12W and the electric signal sent from the yellow light receiving element 12Y are subtracted, and blue corresponding to the difference between the half-value wavelength of the transparent filter 14W and the half-value wavelength of the yellow filter 14Y. Find the intensity value of the region. Further, the intensity value of the blue region is sent to the creating unit 22 as blue light data.

  The green computing unit 21G obtains green light data. Specifically, the green computing unit 21G receives electrical signals from the yellow light receiving element 12Y and the red light receiving element 12R. Then, the electrical signal transmitted from the yellow light receiving element 12Y and the electrical signal transmitted from the red light receiving element 12R are subtracted to obtain a green color corresponding to the difference between the half-value wavelength of the yellow filter 14Y and the half-value wavelength of the red filter 14R. Find the intensity value of the region. The intensity value of the green region is sent to the creation unit 22 as green light data.

  The red calculation unit 21R obtains data for the red region. Specifically, the red calculation unit 21R receives electrical signals from the red light receiving element 12R and the black light receiving element 12Blk. Then, the electrical signal transmitted from the red light receiving element 12R and the electrical signal transmitted from the black light receiving element 12Blk are subtracted, and the red color corresponding to the difference between the half-value wavelength of the red filter 14R and the half-value wavelength of the black filter 14Blk. Find the intensity value of the region. The intensity value of the red region is sent to the creation unit 22 as red light data.

  The creating unit 22 creates image information by combining data based on the intensity values of the blue region, the green region, and the red region sent from the blue computing unit 21B, the green computing unit 21G, and the red computing unit 21R, respectively. Is for. The created image information is sent to the output unit 23.

  The output unit 23 is for outputting the image information and infrared data created by the creation unit 22. Thereby, the color image in the visible region and the image in the infrared region of the object can be output individually or in combination on a display device or the like.

(1-2. Operation)
Next, the operation of the optical sensor 5 according to the present embodiment will be described using the flowchart of FIG.

  First, when light is emitted from the observation target, a part of the light is incident on the imaging device 10 as incident light (step S1).

  Incident light is collected by the microlens 15, passes through the color filter 14, and reaches the light receiving element 12. Here, since the transparent filter 14W, the yellow filter 14Y, the red filter 14R, and the infrared filter 14Blk are formed as the color filter 14, the white light receiving element 12W, the yellow light receiving element 12Y, the red light receiving element 12R, and the black light receiving element 12Blk. In each of these, incident light, yellow light, red light, and infrared light are extracted (step S2).

  The light reaching each light receiving element 12 is converted into an electrical signal and sent to the arithmetic unit 20 (step S3). Here, the light transmitted through each of the transparent filter 14W, the yellow filter 14Y, the red filter 14R, and the infrared filter 14Blk is transmitted to the arithmetic unit 20.

  Thereafter, the intensity values of the red light, the green light, and the blue light are respectively obtained by the calculation units 21R, 21G, and 21B of the calculation device 20 (step S4). Specifically, the incident light, yellow light, red light, and infrared light obtained by each light receiving element are respectively W, Y, R ′, and Blk, and the three primary colors of blue light, green light, and red light are used. Are expressed by the following formulas (1) to (3).

B = W−Y (1)
G = Y−R ′ (2)
R = R′−Blk (3)
The intensity values of the three primary colors of light in each pixel thus obtained are sent to the creating unit 22 as apparent blue light, green light, and red light intensity values. That is, the optical sensor 5 according to the present embodiment extracts the same light as the optical sensor provided with the blue filter b1, the green filter b2, and the red filter b3 having the spectral characteristics shown in FIG.

  Subsequently, the data of the three primary colors of light are synthesized by the creating unit 22 and the color image data to be observed is created (step S5).

  The generated color image data is output by the output unit 23 (step S6).

  Further, since the black filter 14Blk has a function of transmitting infrared light and suppressing transmission of visible light, the signal obtained by the black light receiving element 12Blk can be used as infrared data as it is (step 7).

(1-3. Effect)
As described above, the optical sensor 5 according to the present embodiment has a half-value wavelength of each of the filters 14W, 14Y, 14R, and 14Blk based on the electrical signals of the light converted by the light receiving elements 12W, 12Y, 12R, and 12Blk. Since it has a blue computing unit 21B, a green computing unit 21G, and a red computing unit 21R that calculate the intensity value of the light in the wavelength region corresponding to the difference, the light in the wavelength region of blue light, green light, and red light is highly sensitive. It is possible to provide an optical sensor 5 that can detect the above.

  Supplementally, in an imaging device such as an image sensor or a linear sensor, the sensitivity greatly decreases in a region where the silicon photodiode sensitivity (SPD sensitivity) is shorter than 500 nm. Therefore, if red filters, green filters, and blue filters for extracting the three primary colors (red, green, and blue) of incident light are used, the sensitivity of blue light is lower than the other two colors. Further, as shown in FIG. 8, there is a problem that the transmittance of the blue filter for extracting blue light is lower than that of the other two colors. Further, in such a light receiving element, as shown in FIG. 9, a slight dark current flows even when no light is incident. For this reason, noise that floats the bottom of the spectral characteristics is generated, causing a problem in that the image quality is degraded.

  With respect to these problems, the optical sensor 5 according to the present embodiment reproduces a color image by arithmetic processing, and therefore can provide image data showing high color rendering properties while reducing the influence of dark current.

  Further, the structure of each filter 14 can be simplified and thinned by the structure in which the microlens 15 for condensing light on the light receiving element 12 is formed on each filter 14. Thereby, the small optical sensor 5 can be provided. For example, the aperture ratio of a light receiving element such as a CMOS or CCD is usually as low as 20 to 40%. On the other hand, according to the imaging device 10 according to the present embodiment, the distance between the microlens 15 and the light receiving element 12 can be shortened. Therefore, the incident angle of incident light can be increased, and the sensitivity of the optical sensor 5 can be increased.

  The microlens 15 may be a phenolic, polystyrene, or acrylic resin, but is preferably a polystyrene, or preferably an acrylic, from the viewpoint of heat resistance. A transparent resin having a low refractive index, such as a fluorine-containing acrylic resin, is also preferable. In a configuration in which an antireflection film or a low refractive index resin film is laminated on a microlens, the microlens material may be a microlens made of silicon nitride, silicon oxynitride, or the like.

  Moreover, since each filter 14 in the imaging device 10 is formed of a color material selected from organic pigments or dyes, it is possible to provide the optical sensor 5 including a filter having a specific half-value wavelength.

  In the present embodiment, the transparent filter 14W, the flattening layer 13, and the microlens 15 are formed of an acrylic resin containing 5% of a coumarin dye in terms of dye concentration, but not only an acrylic resin but also an epoxy resin. It may be formed of a resin containing one or a plurality of resins such as a series, a polyimide, a urethane, a melamine, a polyester, a urea, and a styrene.

  Further, a transparent resin containing one or a plurality of resins such as acrylic, polyimide, urethane, melamine, polyester, urea, and styrene may be used as a base resin for each filter 14 or microlens 15. Good.

  In addition, a half value wavelength can be adjusted by adding an ultraviolet absorber to the transparent filter 14W according to the present embodiment. Examples of ultraviolet absorbers include benzotriazole compounds, benzophenone compounds, salicylic acid compounds, coumarin compounds, or those obtained by adding a light stabilizer (for example, a hindered amine compound) or a quencher to these absorbers. Further, even if a photoinitiator or a curing agent used for the effect of the UV absorber or the resin is added, a certain degree of ultraviolet absorption can be imparted. Or you may disperse | distribute the microparticles | fine-particles of a metal oxide with an ultraviolet absorptivity.

  Further, an infrared absorbing compound or an infrared absorbing agent is added to the transparent filter 14W / flattening layer 13 or is pendant (incorporated into a resin molecular chain in the form of a reactive infrared absorbing agent such as a reactive dye). It is also possible to have an absorption function.

(Infrared filter)
Moreover, since the optical sensor 5 according to the present embodiment includes the infrared filter 14Blk and does not use the infrared cut filter, the three primary colors of light can be reproduced without causing a decrease in sensitivity. This will be supplemented below.

  Imaging devices such as CCD and CMOS have high sensitivity even in a region outside human visible light (for example, 400 nm to 700 nm). In particular, it has high sensitivity in a wavelength region longer than the visible light wavelength region (hereinafter referred to as “infrared region”, for example, a wavelength region of 700 nm to 1100 nm). Here, a normal organic color filter does not have an infrared light (infrared) cut function. Therefore, light outside the human visual sensitivity range (for example, longer wavelength than 700 nm) is also incident on the imaging device, and the color of the observation target obtained by the imaging device 10 may be different from the color of the observation target visually observed by the human. is there.

  Here, for example, the relationship between the wavelength and transmittance of human visual sensitivity, imaging device sensitivity (SPD sensitivity), and ideal infrared cut filter is shown in FIG. If incident light corresponding to the wavelength range of the shaded portion shown in FIG. 10 is cut by an infrared cut filter, a color close to human visual sensitivity can be reproduced. There are two types of infrared cut filters, a reflection type and an absorption type. The relationship between the wavelength of light and the transmittance in the reflection type infrared cut filter and the absorption type infrared cut filter is shown in FIG. 11, for example.

  However, the following problems arise when infrared rays are cut using an infrared cut filter.

  First, there is a problem that it is difficult to reduce the size of the imaging apparatus. For example, as a technique for inserting an infrared cut filter into an optical system of an image pickup apparatus, techniques proposed in Japanese Patent Laid-Open Nos. 2000-19322 and 63-73204 can be cited. However, in these techniques, an infrared cut filter is inserted so as to cover the entire device such as a CMOS or a CCD. Therefore, the thickness of the infrared cut filter makes it difficult to reduce the size of the imaging device including the optical system. For example, the absorption type infrared cut filter has a thickness of about 1 to 3 mm.

  In addition, when a color filter is used as a camera member, there is a problem that a step of incorporating an infrared cut filter into a lens system is required.

  In addition, in an imaging apparatus having a light primary color filter (R, G, B) or a complementary color filter (C, M, Y), if an infrared cut filter is used, the sensitivity of the imaging apparatus decreases. There is a problem. Specifically, the infrared cut filter sometimes absorbs light in the visible light wavelength region of 550 nm to 700 nm, and the sensitivity of the imaging device including a green or red color filter is lowered.

  In response to these problems, if the red, green, and blue light data is reproduced by calculation using the infrared filter 14Blk according to the present embodiment, a decrease in sensitivity can be avoided. Furthermore, it is not necessary to incorporate an infrared cut filter into the lens system. In addition, since no infrared cut filter is used, the electrical signal obtained by the black light receiving element 12Blk can be used as it is as infrared data of the imaging target. Therefore, it is not necessary to separately provide a light receiving element for extracting infrared data, and a small photosensor 5 with good color reproducibility can be provided.

(Transparent filter 14W)
Moreover, since the optical sensor 5 according to the present embodiment includes the transparent filter 14W, the optical sensor 5 having good color balance and color reproducibility can be provided. This will be supplemented below.

  The light receiving element 12 has a variation in sensitivity in the ultraviolet region for each manufacturer or product to be manufactured. For this reason, when the light receiving element 12 receives incident light including ultraviolet rays, the intensity value of blue light may not be reproduced uniformly depending on the type of the light receiving element 12, or the matching with the visual sensitivity of the human eye may be insufficient. .

  On the other hand, the transparent filter 14W according to the present embodiment is formed of an acrylic resin containing 5% of a coumarin-based dye as an ultraviolet absorber at a dye concentration, and the planarizing layer 13 and the transparent filter 14W are 365 nm to 420 nm. And has a spectral characteristic that has a transmittance of 50% for light of a wavelength of 90% and a transmittance of 90% or more for light of a wavelength of 450 nm or more.

  However, the transparent filter uses an acrylic resin in which the addition amount of the coumarin ultraviolet absorber is reduced or not added. Further, by using a fluorine-based acrylic resin instead of the acrylic resin, the transmittance in the ultraviolet region can be increased and utilized. Moreover, you may form the ultraviolet filter by a fluorine-type acrylic resin separately from the transparent filter by the acrylic resin which added the ultraviolet absorber depending on the case.

  Therefore, it is possible to obtain an electrical signal of light from which the influence of ultraviolet rays has been removed, and to obtain an intensity value of blue light that is close to human visual sensitivity. As a result, the optical sensor 5 having good color balance and color reproducibility can be provided.

  Further, since the flattening layer 13 absorbs the influence of halation from the substrate at the time of pattern exposure when the color filter is formed by the photolithography method, the pixel thickness of the color filter can be suppressed.

  Conversely, an optical sensor capable of detecting ultraviolet rays by adjusting the spectral characteristics of the transparent filter 14W can be provided. When a sensor for detecting ultraviolet rays is used, a fluorine-containing acrylic resin (fluorine-based acrylic resin) can be used for the transparent filter. Thereby, the half value wavelength of a transparent filter can be made into a 240 nm ultraviolet region, and an ultraviolet-ray can be extracted. In this case, it can be applied to a fire detection / suspicious fire sensor. Moreover, since the fluorescence emitted from the lesioned part can be extracted by irradiating with ultraviolet rays, it can be applied to a medical sensor.

<Second Embodiment>
In the second embodiment of the present invention, a method for manufacturing the imaging device 10 according to the first embodiment will be described with reference to the process diagrams of FIGS.

  First, the planarization layer 13 is formed on the substrate 11 on which the light receiving element 12 (12W · 12Y in FIG. 12) is formed (FIG. 12A). Here, an acrylic resin coating solution containing 5% of a coumarin-based dye is spin-coated at a rotation speed of 2000 rpm, and then hardened by a heat treatment at 200 ° C., thereby flattening a film thickness of 0.1 μm. The formation layer 13 is formed.

  Next, a yellow resin layer YL having a thickness of about 1 μm is formed on the planarizing layer 13. The yellow resin layer YL is, for example, C.I. I. This is a photosensitive resin layer obtained by adding an organic solvent such as cyclohexanone / PGMEA or a polymer varnish / monomer / initiator to CI Pigment Yellow 139.

  Subsequently, pattern exposure is performed using the mask M (FIG. 12B). Here, the exposed portion undergoes a photochemical reaction and becomes insoluble in alkali.

  Thereafter, a portion not irradiated with light is removed using a developer such as an alkaline solution to form a yellow filter 14Y (FIG. 12C).

  Although not shown, a red filter 14R having a thickness of about 1 μm is formed by a similar photolithography process. At this time, the red filter 14R is formed not only at the location where the red filter 14R is formed, but also at the location where the infrared filter 14Blk is formed. Then, a violet filter 14V is further formed on the red filter 14R formed at a position where the infrared filter 14Blk is formed, and the infrared filter 14Blk is formed by optical superposition.

After forming the yellow filter 14Y, the red filter 14R, and the infrared filter 14Blk (violet filter 14V) in this way, a transparent resin layer WL having a thickness of about 2 μm is formed (FIG. 13A). Here, the transparent resin layer WL is made of the same material as the planarizing layer 13.

  Next, the phenol resin layer 16 is formed on the transparent resin layer WL (FIG. 13B). The phenol resin layer 16 is formed in order to obtain a microlens 15 having a desired shape by controlling an etching rate during dry etching described later. The phenol resin layer 16 plays a role of controlling the heat flow when the lens matrix 17M is formed by heat flow.

  Subsequently, a photosensitive resin layer 17 is formed on the phenol resin layer 16 (FIG. 13C). The photosensitive resin layer 17 can be formed of, for example, an alkali resin having alkali solubility, photosensitivity, and heat flow.

  Next, the photosensitive resin layer 17 is formed into a rectangular pattern by a photolithography process. Then, the rectangular pattern is cured while being melted by heat treatment, and then cooled. As a result, the lens matrix 17M having a hemispherical shape can be formed by the surface tension of the resin at the time of melting (FIG. 13D).

  Subsequently, dry etching is performed using the lens matrix 17M as a mask. At this time, the dry etching amount (etching depth) is about 0.9 μm. Thereby, the yellow filter 14Y and the red filter 14R effectively have a film thickness of 1.1 μm up to their surfaces.

  Thereby, the microlens 15 is formed (FIG. 13E).

The imaging device 10 can be manufactured by the method described above. In addition, in the imaging device 10, the manufacturing process can be simplified by adopting a structure in which the transparent filter 14W and the microlens 15 are integrated.

<Third Embodiment>
FIG. 14 is a schematic diagram showing a configuration of an optical sensor 5S according to the third embodiment of the present invention.

  The optical sensor 5S according to the present embodiment further includes a temperature distribution measuring unit 30 and a temperature distribution creating unit 31 in the arithmetic device 20 of the optical sensor 5 according to the first embodiment. In the present embodiment, such an arithmetic device is denoted as 20S. In addition, the same code | symbol is attached | subjected to the part same as the already demonstrated part, and the overlapping description is abbreviate | omitted unless there is particular description. In addition, the following description is also omitted in the following embodiments.

  The temperature distribution measurement unit 30 measures the temperature distribution of the object to be photographed based on the intensity value of the infrared light received via the infrared filter 14Blk. The measured temperature distribution information is sent to the temperature distribution creation unit 31.

  The temperature distribution creation unit 31 creates temperature distribution information corresponding to the image information created by the creation unit 22 based on the temperature distribution sent from the temperature distribution measurement unit 30. The temperature distribution information is sent to the output unit 23.

  The output unit 23 outputs image information and temperature distribution information selectively or simultaneously.

  With the configuration described above, the optical sensor 5S according to the present embodiment can obtain image information and temperature distribution information from one unit of color separation. Therefore, “parallax” between the visible image (image information) and the infrared image (temperature distribution information) can be eliminated.

  Supplementally, normally, in a system using an infrared sensor, measurement and monitoring in the visible region cannot be performed simultaneously. Therefore, it is necessary to separately provide two optical systems of an infrared region sensor and a visible region sensor. As a result, since the distance between the infrared region sensor and the visible region sensor is large, parallax (parallax) occurs between the infrared image obtained by the infrared sensor and the visible image obtained by the imaging device. In this regard, in the optical sensor 5S according to the present embodiment, since the infrared region extraction unit and the visible region extraction unit are provided on one unit of the same color separation without increasing the distance, the infrared filter 14Blk. Infrared images can be obtained via That is, in the present invention, since the parallax between the infrared image and the visible image can be eliminated, the infrared image without the parallax and the visible image can be superimposed and output.

  In addition, since a visible image and an infrared image can be synthesized, it contributes to improving the accuracy of the recognition / analysis system. It is also possible to process by dividing the infrared wavelength region.

<Fourth Embodiment>
FIG. 15 is a schematic diagram showing a configuration of an optical sensor 5T according to the fourth embodiment of the present invention.

  The optical sensor 5T according to the present embodiment further includes an infrared projection unit 40 and a measurement unit 41 in the arithmetic device 20 of the optical sensor 5 according to the first embodiment. In the present embodiment, such an arithmetic device is denoted as 20T.

  The infrared projection unit 40 projects infrared rays having a wavelength that passes through the infrared filter 14Blk. Data such as the time and wavelength of the projected infrared ray is sent to the measurement unit 41.

  When the infrared ray projected from the infrared projection unit 40 is reflected by the object 3 and the reflected light from the object 3 is received via the infrared filter 14Blk, the measuring unit 41 is based on the intensity value of the reflected light. And has a function of measuring the distance to the object 3. The data necessary for the calculation for measuring the distance is based on the phase difference between the infrared rays transmitted from the infrared projection unit 40 and the infrared rays reflected from the object 3.

  With the configuration described above, the optical sensor 5T according to the present embodiment can measure the distance from the infrared projection unit 40 to the object. As a result, it is possible to create image information that enables three-dimensional analysis of the shape of the object to be photographed. Specifically, it can be used for underwear and clothing design.

  Further, if the optical sensor 5T according to the present embodiment is incorporated in a television remote controller or the like, the infrared rays from the infrared projection unit 40 can be applied to signal processing such as channel switching.

  Furthermore, if the optical sensor 5T according to the present embodiment is incorporated into a LAN sensor element (functional element) or the like, the infrared light from the infrared projection unit 40 or light emitting elements of a plurality of types of wavelengths such as LEDs are used. Compared to a wireless LAN that can be easily intercepted, it can be applied to the construction of an optical wireless LAN with high security.

<Fifth Embodiment>
FIG. 16 is a schematic diagram showing a configuration of an optical sensor 5U according to the fifth embodiment of the present invention, and FIG. 17 is a diagram showing a concept of an arrangement state when a filter in the imaging device 10U is viewed from the incident light side. is there. 18 and 19 are a cross-sectional view taken along the line III-III ′ and a cross-sectional view taken along the line IV-IV ′, respectively, of the imaging device 10U shown in FIG.

  The imaging device 10U is obtained by replacing the red filter 14R with the second infrared filter 14Blk2 in the imaging device 10 according to the first embodiment. In the present embodiment, for convenience, the infrared filter 14Blk in the first embodiment is referred to as a first infrared filter. The light receiving elements corresponding to the first infrared filter 14Blk and the second infrared filter 14Blk2 are referred to as a first black light receiving element 12Blk and a second black light receiving element 12Blk2, respectively.

  The second infrared filter 14Blk2 can be adjusted so that the half-value wavelength is 790 nm to 820 nm, and the first infrared filter 14Blk can be adjusted so that the half-value wavelength is 640 nm to 680 nm. Therefore, the second infrared filter 14Blk2 has a half-value wavelength on the longer wavelength side compared to the half-value wavelength of the first infrared filter. As a coloring material for the second infrared filter 14Blk2, a material obtained by dispersing a mixed organic pigment of CI pigment blue 15: 6, CI pigment red 254, CI pigment yellow 139, and CI pigment violet 23 in an acrylic resin is used. it can. In this case, a near-infrared filter 14Blk2 having a half-value wavelength of about 800 nm can be formed.

  The spectral characteristics of the filters 14W, 14Y, 14Blk, and 14Blk2 including 14Blk2 described above are shown in FIG. 20, c1, c2, c3, and c4 indicate the spectral characteristics of the transparent filter 14W, yellow filter 14Y, first infrared filter 14Blk, and second infrared filter 14Blk2, respectively.

  One set of the transparent filter 14W, the yellow filter 14Y, the first infrared filter 14Blk, and the second infrared filter 14Blk2 corresponds to one pixel.

  Further, when the transparent filter 14W, the yellow filter 14Y, the first infrared filter 14Blk, and the second infrared filter 14Blk2 are expressed as W, Y, Blk, and Blk2, respectively, for example, the filter 14 in an array state as shown in FIG. 17 is formed. Is done.

  Note that the imaging device 10T according to the present embodiment can be manufactured by a method similar to the manufacturing method according to the second embodiment.

  The computing device 20U has the same function as the computing device 20 according to the first embodiment, but the data computed in the green computing unit 21G and the red computing unit 21R is different.

  The green computing unit 21G receives electrical signals from the yellow light receiving element 12Y and the first black light receiving element 12Blk. Thereafter, the electrical signal from the yellow light receiving element 12Y and the electrical signal from the first black light receiving element 12Blk are subtracted to correspond to the difference between the half-value wavelength of the yellow filter 14Y and the half-value wavelength of the first infrared filter 14Blk. Find the intensity value of the green area. The intensity value of the green region is sent to the creating unit 22 as green light data.

  The red arithmetic unit 21R receives electrical signals from the first black light receiving element 12Blk and the second black light receiving element 12Blk2. Then, the electric signal transmitted from the first black light receiving element 12Blk and the electric signal transmitted from the second black light receiving element 12Blk2 are subtracted to obtain the half-value wavelength of the first infrared filter 14Blk and the second infrared filter 14Blk2. The intensity value of the red region corresponding to the difference from the half-value wavelength is obtained. The intensity value of the red region is sent to the creation unit 22 as red light data.

  With the configuration described above, the electrical signals of the light obtained by the light receiving elements 12W, 12Y, 12Blk, and 12Blk2 are respectively W, Y, Blk, and Blk2, and the intensity values of the three primary colors of blue light, green light, and red light are respectively represented. When B · G ′ · R ′, the following equations (4) to (6) are established.

B = W−Y (4)
G ′ = Y−Blk (5)
R ′ = Blk−Blk2 (6)
As a result, an optical sensor 5U having “apparent blue (B), green (G ′), and red (R ′) color filters” whose spectral characteristics are shown in FIG. 21 can be provided. That is, the optical sensor 5U according to the present embodiment extracts the same light as the optical sensor including the blue filter d1, the green filter d2, and the red filter d3 having the spectral characteristics shown in FIG.

  The intensity value (G ′) of the green light obtained by the green computing unit 21G can be used as an illuminance sensor signal that matches the visual sensitivity of the human eye. In addition, since the light sensor of the present invention can extract light in a predetermined wavelength region by subtracting signals obtained by filters having different transmission characteristics, LED light emission set to emit light in a predetermined wavelength region When combined with an element, a good optical switch can be formed.

<Sixth Embodiment>
FIG. 22 is a schematic diagram showing a configuration of an optical sensor 5V according to the sixth embodiment of the present invention.

  The optical sensor 5V according to the present embodiment further includes an illuminance conversion unit 50 in the calculation unit 20U according to the fifth embodiment.

  The illuminance conversion unit 50 converts the illuminance of the image information corresponding to the intensity data of green light. Specifically, when the green light intensity value calculated by the green calculation unit 21G exceeds a preset green light intensity value, the illuminance conversion unit 50 adjusts the brightness and the like of the output unit 23. Have.

  As described above, the optical sensor 5V according to the present embodiment includes the illuminance conversion unit 50, and thus provides the optical sensor 5V that can adjust the brightness and the like of the output unit 23 according to the environment where the optical sensor is placed. it can. For example, the brightness of the display or the camera image can be adjusted by recognizing whether the light sensor is indoor fluorescent light or outside light (sun), and whether it is cloudy or clear. It can be applied to

<Others>
Since the present invention can extract a wide range of wavelengths such as ultraviolet, visible, and infrared with high sensitivity as the specific wavelength range to be detected, an optical sensor that can handle various light sources including sunlight is provided. It is possible to provide.

  Note that the present invention is not limited to the above-described embodiment as it is, and can be embodied by modifying the constituent elements without departing from the scope of the invention in the implementation stage. In addition, various inventions can be formed by appropriately combining a plurality of components disclosed in the embodiment. For example, some components may be deleted from all the components shown in the embodiment. Furthermore, you may combine a component suitably in different embodiment.

It is a schematic diagram which shows the structure of the optical sensor 5 which concerns on the 1st Embodiment of this invention. It is a figure which shows the concept of the arrangement | sequence state when the filter in the embodiment is seen from the incident light side. It is II 'sectional drawing of the imaging device 10 in the embodiment. It is II-II 'sectional drawing of the imaging device 10 in the embodiment. It is a figure which shows the spectral characteristic of each filter 14W * 14Y * 14R * 14Blk which concerns on the embodiment. It is a flowchart for demonstrating operation | movement of the optical sensor 5 which concerns on the same embodiment. It is a figure which shows the spectral characteristic of the filter which extracts the same light as the optical sensor 5 which concerns on the embodiment. It is a figure which shows the relationship between the wavelength and relative output value in an imaging device. It is a figure which shows the relationship between the wavelength in an imaging device, and the transmittance | permeability. It is a figure which shows the relationship of the wavelength and transmittance | permeability in a human visual sensitivity, the sensitivity (SPD sensitivity) of an imaging device, and an ideal infrared cut filter. It is a figure which shows the relationship between the wavelength of light and the transmittance | permeability in a reflection type infrared cut filter and an absorption type infrared cut filter. It is process drawing for demonstrating the manufacturing method of the imaging device 10 which concerns on 2nd Embodiment of this invention. It is process drawing for demonstrating the manufacturing method of the imaging device 10 which concerns on the embodiment. It is a schematic diagram which shows the structure of the optical sensor 5S which concerns on the 3rd Embodiment of this invention. It is a schematic diagram which shows the structure of optical sensor 5T which concerns on the 4th Embodiment of this invention. It is a schematic diagram which shows the structure of the optical sensor 5U which concerns on the 5th Embodiment of this invention. It is a figure which shows the concept of the arrangement | sequence state when the filter in the embodiment is seen from the incident light side. It is III-III 'sectional drawing of imaging device 10U in the embodiment. It is IV-IV 'sectional drawing of the imaging device 10U in the embodiment. It is a figure which shows the spectral characteristic of each filter 14W * 14Y * 14Blk * 14Blk2 which concerns on the same embodiment. It is a figure which shows the spectral characteristic of the filter which extracts the same light as optical sensor 5U which concerns on the embodiment. It is a schematic diagram which shows the structure of the optical sensor 5V which concerns on the 6th Embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 5 ... Optical sensor, 10 ... Imaging device, 20 ... Arithmetic unit, 11 ... Board | substrate, 12 ... Light receiving element,
12W ... White light receiving element, 12Y ... Yellow light receiving element, 12R ... Red light receiving element,
12Blk ... 1st black light receiving element, 12Blk2 ... 2nd black light receiving element, 13 ... Planarization layer,
14 ... Filter, 14W ... Transparent filter, 14Y ... Yellow filter, 14R ... Red filter,
14Blk: first infrared filter, 14Blk2: second infrared filter,
15 ... micro lens, 20 ... arithmetic unit, 21B ... blue arithmetic unit, 21G ... green arithmetic unit,
21R ... Red calculation unit, 22 ... Creation unit, 23 ... Output unit, 30 ... Temperature distribution measurement unit,
31 ... Temperature distribution creation part, 40 ... Infrared projection part, 41 ... Measurement part, 50 ... Illuminance conversion part.

Claims (19)

A substrate,
A plurality of light receiving elements formed on the substrate for receiving incident light and converting the incident light into electrical signals;
Each of the light receiving elements is formed on the light receiving element corresponding to each of the light receiving elements, has a unique half-value wavelength with a light transmittance of 50%, and exhibits light transmission suppression characteristics for light having a wavelength shorter than the half-value wavelength. And a plurality of filters exhibiting transmission characteristics for light longer than the half-value wavelength, the half-value wavelength being in the range of 365 nm to 420 nm, and a light transmittance of 90% or more at a light wavelength of 450 nm or more. A transparent filter having spectral characteristics, a yellow filter that transmits light from the long wavelength side from the green region, a red filter that transmits light from the red region to the long wavelength region, and an infrared filter that transmits light from the infrared region The plurality of filters including:
Blue calculation means for obtaining an intensity value of blue light based on an electrical signal of incident light received via the transparent filter and an electrical signal of incident light received via the yellow filter;
Green computing means for obtaining an intensity value of green light based on an electrical signal of incident light received via the yellow filter and an electrical signal of incident light received via the red filter;
A red computing means for obtaining an intensity value of red light based on an electrical signal of incident light received via the red filter and an electrical signal of incident light received via the infrared filter;
An optical sensor comprising: The optical sensor according to claim 1,
The blue computing means subtracts the electrical signal of the incident light received via the yellow filter from the electrical signal of the incident light received via the transparent filter to obtain the intensity value of the blue light,
The green computing means subtracts the electrical signal of the incident light received via the red filter from the electrical signal of the incident light received via the yellow filter to obtain the intensity value of the green light,
The red computing means subtracts the electrical signal of the incident light received via the infrared filter from the electrical signal of the incident light received via the red filter to obtain the intensity value of the red light An optical sensor characterized by the above. The optical sensor according to claim 1 or 2,
Each of the filters is formed of a color material selected from organic pigments or dyes , and at least the color materials of the yellow filter, the red filter, and the infrared filter are organic pigments . The optical sensor according to any one of claims 1 to 3,
A microlens for further condensing light on the light receiving element is formed on each of the filters. The optical sensor according to any one of claims 1 to 4,
Creating means for creating image information based on the intensity values of the blue light, the green light, and the red light;
An optical sensor comprising output means for outputting the image information. The optical sensor according to claim 5.
Temperature measuring means for measuring temperature based on an electrical signal of incident light received via the infrared filter;
An optical sensor comprising temperature distribution creating means for creating temperature distribution information corresponding to the image information based on the temperature measured by the temperature measuring means. The optical sensor according to claim 5.
Infrared projection means for projecting infrared rays in a wavelength range that passes through the infrared filter onto an object;
A measuring means for measuring a distance to the object based on an electric signal converted from the reflected light when the reflected light reflected from the object is received via the infrared filter; An optical sensor characterized by the above.   The optical sensor according to any one of claims 1 to 7,
  The transparent filter contains a coumarin-based dye.   The optical sensor according to any one of claims 1 to 8,
  The half-value wavelength of the yellow filter is in the range of 490 nm to 600 nm,
  The half-value wavelength of the red filter is in the range of 590 nm to 680 nm,
  The half-wavelength wavelength of the infrared filter is in the range of 620 nm to 680 nm.   The optical sensor according to claim 9.
  The infrared filter includes C.I. I. Pigment red 254 and C.I. I. Pigment yellow 139 and C.I. I. An optical sensor comprising a color material mixed with pigment violet 23.   The optical sensor according to claim 9.
  The infrared filter is configured by optical superposition of a red filter and a purple filter. A substrate,
A plurality of light receiving elements formed on the substrate for receiving incident light and converting the incident light into electrical signals;
Each of the light receiving elements is formed on the light receiving element corresponding to each of the light receiving elements, has a unique half-value wavelength with a light transmittance of 50%, and exhibits light transmission suppression characteristics for light having a wavelength shorter than the half-value wavelength. And a plurality of filters exhibiting transmission characteristics for light longer than the half-value wavelength, the half-value wavelength being in the range of 365 nm to 420 nm, and a light transmittance of 90% or more at a light wavelength of 450 nm or more. A transparent filter having spectral characteristics, a yellow filter that transmits light on the long wavelength side from the green region, a first infrared filter that transmits light on the long wavelength side from the red region closer to the infrared region, and the first red A plurality of filters including a second infrared filter having a half-value wavelength on a longer wavelength side than a half-value wavelength of the outer filter;
Blue calculation means for obtaining an intensity value of blue light based on an electrical signal of incident light received via the transparent filter and an electrical signal of incident light received via the yellow filter;
Green computing means for obtaining an intensity value of green light based on an electrical signal of incident light received via the yellow filter and an electrical signal of incident light received via the first infrared filter;
Red arithmetic means for obtaining an intensity value of red light based on an electrical signal of incident light received through the first infrared filter and an electrical signal of incident light received through the second infrared filter When,
An optical sensor comprising: The optical sensor according to claim 12 .
The blue computing means subtracts the electrical signal of the incident light received via the yellow filter from the electrical signal of the incident light received via the transparent filter to obtain the intensity value of the blue light,
The green computing means subtracts the electrical signal of the incident light received via the first infrared filter from the electrical signal of the incident light received via the yellow filter to obtain an intensity value of the green light Seeking
The red arithmetic means subtracts an electrical signal of incident light received through the second infrared filter from an electrical signal of incident light received through the first infrared filter, and performs the red light processing. An optical sensor characterized by obtaining an intensity value of the sensor. The optical sensor according to claim 12 or claim 13 ,
Each of the filters is formed of a color material selected from organic pigments or dyes , and at least the color materials of the yellow filter, the first infrared filter, and the second infrared filter are organic pigments, Light sensor. The optical sensor according to any one of claims 12 to 14 ,
A microlens for further condensing light on the light receiving element is formed on each of the filters. The optical sensor according to any one of claims 12 to 15 ,
The half-wavelength wavelength of the first infrared filter is in the range of 640 nm to 680 nm,
The half-wavelength wavelength of the second infrared filter is in the range of 790 nm to 820 nm.   The optical sensor according to claim 16.
  The second infrared filter includes C.I. I. Pigment blue 15: 6 and C.I. I. Pigment red 254 and C.I. I. Pigment yellow 139 and C.I. I. An optical sensor comprising a color material mixed with pigment violet 23. The optical sensor according to any one of claims 12 to 17 ,
Creating means for creating image information based on the intensity values of the blue light, the green light, and the red light;
An optical sensor comprising output means for outputting the image information. The optical sensor according to claim 18 .
An optical sensor comprising illuminance conversion means for converting the illuminance of the output means corresponding to the intensity value of green light obtained by the green computing means.

Images