JP5174975B2 - Semiconductor device manufacturing method, substrate processing method, and substrate processing apparatus - Google Patents

Description

  The present invention relates to a method for manufacturing a semiconductor device for processing a substrate, and a substrate processing apparatus.

  For example, a semiconductor device such as a DRAM includes a metal oxide film formed as a capacitor insulating film. For example, the metal oxide film is formed on a metal thin film formed as a lower electrode. Since the metal oxide film can obtain a higher dielectric constant when it is crystallized, it has been formed at a high temperature at which it is crystallized. For example, it has been formed at a temperature as high as possible within a range that can be withstood in the manufacturing process.

However, when a metal oxide film is formed at a high temperature that causes crystallization, the underlying metal thin film may be oxidized. For example, an STO (Strontium Titanate (SrTiO ₃ )) film, which is regarded as promising as a capacitor insulating film after the 40 nm generation, is formed by an ALD method that alternately supplies an organic metal source gas and ozone (O ₃ ) gas. By performing it at a high temperature of 400 ° C. or higher, it can be formed while being crystallized. However, in this case, ruthenium (Ru) constituting the underlying metal thin film is exposed to ozone (O ₃ ) gas at 400 ° C. or higher and oxidized to RuO ₂ , and the crystal grains constituting the metal thin film grow abnormally. In some cases, the STO film may be broken through.

  Therefore, an object of the present invention is to provide a method for manufacturing a semiconductor device and a substrate processing apparatus capable of suppressing oxidation of a metal thin film when a metal oxide film is formed on the metal thin film.

  According to one aspect of the present invention, at least one selected from the group consisting of hafnium, yttrium, lanthanum, aluminum, zirconium, strontium, titanium, barium, tantalum, and niobium on a substrate having a metal thin film formed on the surface. A first step of forming a metal oxide film containing the above elements at a first temperature at which the metal thin film is not oxidized and at which the metal oxide film is in an amorphous state; and A metal oxide film containing at least one element selected from the group consisting of hafnium, yttrium, lanthanum, aluminum, zirconium, strontium, titanium, barium, tantalum, and niobium is formed on the formed metal oxide film. A second step of forming a target film thickness at a second temperature exceeding one temperature; The method of manufacturing a semiconductor device having is provided.

  According to another aspect of the present invention, at least one selected from the group consisting of hafnium, yttrium, lanthanum, aluminum, zirconium, strontium, titanium, barium, tantalum, and niobium on a substrate having a metal thin film formed on the surface. A metal oxide film containing more than one kind of element is formed at a temperature at which the metal thin film does not oxidize and at a first temperature at which the metal oxide film is in an amorphous state. Thereafter, the metal oxide film is amorphous. A first step of annealing the metal oxide film while maintaining the state to densify the metal oxide film, and hafnium, yttrium, lanthanum, aluminum, zirconium on the metal oxide film formed in the first step Selected from the group consisting of strontium, titanium, barium, tantalum and niobium A metal oxide film containing Kutomo one or more elements, at the first temperature or more second temperature, a method of manufacturing a semiconductor device having a second step of forming up to a thickness of the target, is provided.

  According to still another aspect of the present invention, a processing chamber for processing a substrate and a hafnium raw material, an yttrium raw material, a lanthanum raw material, an aluminum raw material, a zirconium raw material, a strontium raw material, a titanium raw material, a barium raw material, a tantalum raw material, and a niobium raw material are included. A raw material supply system for supplying at least one raw material selected from the group; an oxidant supply system for supplying an oxidant; a heater for heating a substrate in the processing chamber; and the raw material and the oxidation in the processing chamber. And at least one selected from the group consisting of hafnium, yttrium, lanthanum, aluminum, zirconium, strontium, titanium, barium, tantalum and niobium on a substrate having a metal thin film formed on the surface. The metal oxide film containing the element is at a temperature at which the oxidation of the metal thin film does not occur, The metal oxide film is formed at a first temperature at which the metal oxide film is in an amorphous state, and is formed of hafnium, yttrium, lanthanum, aluminum, zirconium, strontium, titanium, barium, tantalum, and niobium on the metal oxide film in the amorphous state. The raw material supply system, the oxidant supply system, and the metal oxide film containing at least one element selected from the group at a second temperature exceeding the first temperature up to a target film thickness. There is provided a substrate processing apparatus having a controller for controlling a heater.

  According to the method for manufacturing a semiconductor device and the substrate processing apparatus according to the present invention, it is possible to suppress oxidation of the metal thin film when forming the metal oxide film on the metal thin film.

It is a block diagram of the gas supply system which the substrate processing apparatus concerning one Embodiment of this invention has. It is a sequence diagram which shows the opening / closing timing of each valve | bulb which the substrate processing apparatus concerning one Embodiment of this invention has. It is a sequence diagram which shows the opening / closing timing of each valve | bulb which the substrate processing apparatus concerning other embodiment of this invention has. It is a section lineblock diagram at the time of wafer processing of a substrate processing device concerning one embodiment of the present invention. It is a section lineblock diagram at the time of wafer conveyance of a substrate processing device concerning one embodiment of the present invention. (A) is a flowchart of the substrate processing process concerning one Embodiment of this invention, (b) is a flowchart of the substrate processing process concerning other embodiment of this invention. It is a schematic block diagram of the vaporizer | carburetor concerning one Embodiment of this invention. It is a flowchart of the substrate processing process concerning other embodiment of this invention. It is a schematic block diagram of the vertical processing furnace of the vertical ALD apparatus concerning other embodiment of this invention, (a) shows a processing furnace part with a longitudinal cross-section, (b) shows a processing furnace part (a ) Is a cross-sectional view taken along line AA of FIG.

<First Embodiment of the Present Invention>
As described above, when the metal oxide film is formed at a high temperature, the underlying metal thin film may be oxidized. The inventor conducted intensive research on a method for suppressing oxidation of the underlying metal thin film. As a result, after the metal oxide film is formed at the first temperature at which the metal thin film does not oxidize and the metal oxide film is in an amorphous state, the metal oxide film formed at the first temperature has a temperature equal to or higher than the first temperature. It was found that by forming the metal oxide film up to the target film thickness at the second temperature, it is possible to suppress the oxidation of the underlying metal thin film. Usually, when a metal oxide film is formed directly on the metal thin film at the second temperature, the metal thin film may be oxidized. However, according to the above method, the metal oxide film previously formed at the first temperature is oxygenated. To function as a barrier that suppresses transmission,
Even when the metal oxide film is formed at the second temperature, the oxidation of the underlying metal thin film is suppressed. The present invention has been made based on the above-mentioned knowledge obtained by the inventors. Hereinafter, an embodiment of the present invention will be described.

(1) Configuration of Substrate Processing Apparatus First, the configuration of the substrate processing apparatus according to the present embodiment will be described with reference to FIGS. 4 is a cross-sectional configuration diagram of the substrate processing apparatus according to one embodiment of the present invention during wafer processing, and FIG. 5 is a cross-sectional configuration diagram of the substrate processing apparatus according to one embodiment of the present invention during wafer transfer. is there.

<Processing chamber>
As shown in FIGS. 4 and 5, the substrate processing apparatus according to this embodiment includes a processing container 202. The processing container 202 is configured as a flat sealed container having a circular cross section, for example. The processing container 202 is made of a metal material such as aluminum (Al) or stainless steel (SUS). In the processing container 202, a processing chamber 201 for processing a wafer 200 as a substrate is configured.

A support table 203 that supports the wafer 200 is provided in the processing chamber 201. For example, quartz (SiO ₂ ), carbon, ceramics, silicon carbide (SiC), aluminum oxide (Al ₂ O ₃ ), or aluminum nitride (AlN) is formed on the upper surface of the support base 203 that the wafer 200 directly touches. A susceptor 217 is provided as a support plate. In addition, the support table 203 incorporates a heater 206 as a heating unit for heating the wafer 200 in the processing chamber 201. Note that the lower end portion of the support base 203 passes through the bottom portion of the processing container 202.

  An elevating mechanism 207 b is provided outside the processing chamber 201. The wafer 200 supported on the susceptor 217 can be moved up and down by operating (lifting) the lifting mechanism 207b. The support table 203 is lowered to the position shown in FIG. 5 (wafer transfer position) when the wafer 200 is transferred, and is raised to the position shown in FIG. 4 (wafer processing position) when the wafer 200 is processed. Note that the lower end of the support base 203 and the periphery of the elevating mechanism 207b are covered with a bellows 203a, and the inside of the processing chamber 201 is kept airtight.

  Further, for example, three lift pins 208b are provided in the vertical direction on the bottom surface (floor surface) of the processing chamber 201. Further, the support base 203 is provided with through holes 208a for allowing the lift pins 208b to pass therethrough at positions corresponding to the lift pins 208b. When the support table 203 is lowered to the wafer transfer position, the upper end portion of the lift pins 208b protrudes from the upper surface of the support table 203, and the lift pins 208b support the wafer 200 from below. Further, when the support table 203 is raised to the wafer processing position, the lift pins 208b are buried from the upper surface of the support table 203, and the susceptor 217 provided on the upper surface of the support table 203 supports the wafer 200 from below. The In addition, since the lift pins 208b are in direct contact with the wafer 200, it is desirable to form the lift pins 208b with a material such as quartz or alumina.

<Wafer transfer port>
A wafer transfer port 250 for transferring the wafer 200 into and out of the process chamber 201 is provided on the inner wall side surface of the process chamber 201. The wafer transfer port 250 is provided with a gate valve 251. By opening the gate valve 251, the processing chamber 201 and the transfer chamber (preliminary chamber) 271 communicate with each other. The transfer chamber 271 is formed in a sealed container 272, and a transfer robot 273 for transferring the wafer 200 is provided in the transfer chamber 271. The transfer robot 273 includes a transfer arm 273 a that supports the wafer 200 when the wafer 200 is transferred. With the support table 203 lowered to the wafer transfer position, the gate valve 251 is opened so that the wafer 200 can be transferred between the processing chamber 201 and the transfer chamber 271 by the transfer robot 273. It is configured. The wafer 200 transferred into the processing chamber 201 is temporarily placed on the lift pins 208b as described above.

<Exhaust system>
An exhaust port 260 for exhausting the atmosphere in the processing chamber 201 is provided on the inner wall side surface of the processing chamber 201 and on the opposite side of the wafer transfer port 250. An exhaust pipe 261 is connected to the exhaust port 260, and a pressure regulator 262 such as an APC (Auto Pressure Controller) that controls the inside of the processing chamber 201 to a predetermined pressure, a raw material recovery trap 263, and The vacuum pump 264 is connected in series in order. An exhaust system (exhaust line) is mainly configured by the exhaust port 260, the exhaust pipe 261, the pressure regulator 262, the raw material recovery trap 263, and the vacuum pump 264.

<Gas inlet>
A gas inlet 210 for supplying various gases into the processing chamber 201 is provided on the upper surface (ceiling wall) of a shower head 240 described later provided in the upper portion of the processing chamber 201. The configuration of the gas supply system connected to the gas inlet 210 will be described later.

<Shower head>
A shower head 240 as a gas dispersion mechanism is provided between the gas inlet 210 and the wafer 200 at the wafer processing position. The shower head 240 disperses the gas introduced from the gas introduction port 210 and the gas that has passed through the dispersion plate 240 a are more uniformly dispersed and supplied to the surface of the wafer 200 on the support table 203. A shower plate 240b. The dispersion plate 240a and the shower plate 240b are provided with a plurality of vent holes. The dispersion plate 240 a is disposed so as to face the upper surface of the shower head 240 and the shower plate 240 b, and the shower plate 240 b is disposed so as to face the wafer 200 on the support table 203. Note that spaces are provided between the upper surface of the shower head 240 and the dispersion plate 240a, and between the dispersion plate 240a and the shower plate 240b, respectively, and the spaces are supplied from the gas inlet 210. Function as a dispersion chamber (first buffer space) 240c for dispersing gas and a second buffer space 240d for diffusing the gas that has passed through the dispersion plate 240a.

<Exhaust duct>
On the inner wall side surface of the processing chamber 201, a step portion 201a is provided. The step portion 201a is configured to hold the conductance plate 204 in the vicinity of the wafer processing position. The conductance plate 204 is configured as a single donut-shaped (ring-shaped) disk in which a hole for accommodating the wafer 200 is provided in the inner periphery. A plurality of discharge ports 204 a arranged in the circumferential direction with a predetermined interval are provided on the outer periphery of the conductance plate 204. The discharge port 204 a is formed discontinuously so that the outer periphery of the conductance plate 204 can support the inner periphery of the conductance plate 204.

On the other hand, a lower plate 205 is locked to the outer peripheral portion of the support base 203. The lower plate 205 includes a ring-shaped concave portion 205b and a flange portion 205a provided integrally on the inner upper portion of the concave portion 205b. The recess 205b is provided so as to block a gap between the outer peripheral portion of the support base 203 and the inner wall side surface of the processing chamber 201. A part of the bottom of the recess 205b near the exhaust port 260 is provided with a plate exhaust port 205c for discharging (circulating) gas from the recess 205b to the exhaust port 260 side. The flange portion 205a is formed on the support base 203.
It functions as a locking portion that locks on the outer periphery of the upper portion. When the flange portion 205 a is locked on the upper outer periphery of the support base 203, the lower plate 205 is moved up and down together with the support base 203 as the support base 203 is moved up and down.

  When the support table 203 is raised to the wafer processing position, the lower plate 205 is also raised to the wafer processing position. As a result, the conductance plate 204 held in the vicinity of the wafer processing position closes the upper surface portion of the recess 205b of the lower plate 205, and the exhaust duct 259 having the gas passage region inside the recess 205b is formed. . At this time, due to the exhaust duct 259 (the conductance plate 204 and the lower plate 205) and the support base 203, the inside of the processing chamber 201 is above the processing chamber above the exhaust duct 259 and the processing chamber below the exhaust duct 259. It will be partitioned into a lower part. Note that the conductance plate 204 and the lower plate 205 are made of a material that can be maintained at a high temperature, for example, high temperature resistant high load quartz, in consideration of the case where the reaction product deposited on the inner wall of the exhaust duct 259 is etched. Is preferred.

  Here, the flow of gas in the processing chamber 201 during wafer processing will be described. First, the gas supplied from the gas inlet 210 to the upper part of the shower head 240 enters the second buffer space 240d through a large number of holes in the dispersion plate 240a via the dispersion chamber (first buffer space) 240c, and further the shower. It passes through a large number of holes in the plate 240 b and is supplied into the processing chamber 201, and is uniformly supplied onto the wafer 200. The gas supplied onto the wafer 200 flows radially outward of the wafer 200 in the radial direction. Then, surplus gas after contacting the wafer 200 flows radially on the exhaust duct 259 (that is, on the conductance plate 204) provided on the outer periphery of the support base 203 toward the radially outer side of the wafer 200, and is exhausted. The gas is discharged from the discharge port 204a provided on the duct 259 into the gas flow path region (in the recess 205b) in the exhaust duct 259. Thereafter, the gas flows through the exhaust duct 259 and is exhausted to the exhaust port 260 via the plate exhaust port 205c. As described above, the gas is prevented from flowing into the lower portion of the processing chamber 201, that is, the back surface of the support base 203 and the bottom surface side of the processing chamber 201.

  Next, the configuration of the gas supply system connected to the gas inlet 210 described above will be described with reference to FIGS. FIG. 1 is a configuration diagram of a gas supply system (gas supply line) included in a substrate processing apparatus according to an embodiment of the present invention, and FIG. 7 is a schematic configuration diagram of a vaporizer according to an embodiment of the present invention. is there.

A gas supply system of a substrate processing apparatus according to an embodiment of the present invention includes a hafnium (Hf) raw material, an yttrium (Y) raw material, a lanthanum (La) raw material, an aluminum (Al) raw material, a zirconium (Zr) raw material, strontium ( A raw material supply system for supplying at least one raw material selected from the group consisting of Sr) raw material, titanium (Ti) raw material, barium (Ba) raw material, tantalum (Ta) raw material, niobium (Nb) raw material, and an oxidizing agent And an oxidant supply system for supplying the oxidant. The raw material supply system according to this embodiment includes a first liquid raw material supply source 220s, a second liquid raw material supply source 220b, and a third liquid raw material supply source 220t that supply liquid raw materials, and vaporizers 229s and 229b that vaporize liquid raw materials. , 229t, liquid source supply pipes 211s, 211b, and 211t for supplying the liquid source to the vaporization units 229s, 229b, and 229t, and a source gas obtained by vaporizing the liquid source in the vaporization units 229s, 229b, and 229t in the processing chamber 201 And a source gas supply pipe 213 for supplying to the gas. The oxidant supply system according to the present embodiment includes an oxygen gas supply source 230o that supplies oxygen (O ₂ ) gas, an ozonizer 229o that generates ozone (O ₃ ) gas as an oxidant from the oxygen gas, and an ozonizer. An oxygen gas supply pipe 211o that supplies oxygen gas to 229o and an oxidant supply pipe 213o that supplies ozone gas generated by the ozonizer 229o into the processing chamber 201 are provided. Furthermore, a substrate processing apparatus according to an embodiment of the present invention includes a cleaning liquid supply system that supplies a cleaning liquid to the vaporizing unit, a purge gas supply system, and a vent (bypass) system. Hereinafter, a configuration of a raw material supply system that supplies, for example, strontium raw material, a titanium raw material, and a barium raw material as raw materials and an oxidant supply system that supplies, for example, ozone gas as an oxidizing agent will be described.

<Raw material supply system>
Outside the processing chamber 201, a first liquid source supply source 220s that supplies an organometallic liquid source (hereinafter referred to as a first liquid source) containing an Sr (strontium) element as a liquid source, and an organic containing a Ba (barium) element. A second liquid source supply source 220b that supplies a metal liquid source (hereinafter referred to as a second liquid source) and a third liquid source supply that supplies an organometallic liquid source (hereinafter referred to as a third liquid source) containing a Ti (titanium) element. A source 220t is provided. The first liquid raw material supply source 220s, the second liquid raw material supply source 220b, and the third liquid raw material supply source 220t are each configured as a tank (sealed container) capable of containing (filling) the liquid raw material therein. Each organometallic liquid raw material containing Sr, Ba, Ti elements is diluted to 0.05 mol / L to 0.2 mol / L with a solvent (solvent) such as ECH (ethylcyclohexane) or THF (tetrahydrofuran), for example. And then stored in the tank.

  Here, the first liquid source supply source 220s, the second liquid source supply source 220b, and the third liquid source supply source 220t include a first pumping gas supply pipe 237s, a second pumping gas supply pipe 237b, and a third pumping, respectively. Gas supply pipes 237t are connected to each other. A pumping gas supply source (not shown) is connected to upstream ends of the first pumping gas supply pipe 237s, the second pumping gas supply pipe 237b, and the third pumping gas supply pipe 237t. The downstream ends of the first pressurized gas supply pipe 237s, the second pressurized gas supply pipe 237b, and the third pressurized gas supply pipe 237t are respectively a first liquid source supply source 220s, a second liquid source supply source 220b, The third liquid source supply source 220t communicates with a space in the upper part, and is configured to supply a pressure gas into this space. In addition, it is preferable to use gas which does not react with a liquid raw material as pressurized gas, for example, inert gas, such as Ar gas, is used suitably.

  In addition, the first liquid raw material supply source 220s, the second liquid raw material supply source 220b, and the third liquid raw material supply source 220t include a first liquid raw material supply pipe 211s, a second liquid raw material supply pipe 211b, and a third liquid raw material, respectively. A supply pipe 211t is connected to each other. Here, upstream end portions of the first liquid source supply pipe 211s, the second liquid source supply pipe 211b, and the third liquid source supply pipe 211t are respectively the first liquid source supply source 220s and the second liquid source supply source 220b. And the liquid raw material housed in the third liquid raw material supply source 220t. The downstream end portions of the first liquid source supply pipe 211s, the second liquid source supply pipe 211b, and the third liquid source supply pipe 211t are connected to vaporizers 229s, 229b, and 229t as vaporizers that vaporize the liquid source. Each is connected. The first liquid source supply pipe 211s, the second liquid source supply pipe 211b, and the third liquid source supply pipe 211t include a liquid flow rate controller (LMFC) 221s as a flow rate control unit that controls the supply flow rate of the liquid source. 221b and 221t and open / close valves vs1, vb1 and vt1 for controlling the supply of the liquid raw material are provided, respectively. The open / close valves vs1, vb1, and vt1 are provided inside the vaporizers 229s, 229b, and 229t, respectively.

With the above configuration, the first and second pressure-feeding gas supply pipes 237s, the second pressure-feeding gas supply pipe 237b, and the third pressure-feeding gas supply pipe 237t are supplied with the first and second pressure-feeding gas supply pipes 237s and 237t. The liquid material can be pumped (supplied) from the liquid material supply source 220s, the second liquid material supply source 220b, and the third liquid material supply source 220t to the vaporizers 229s, 229b, and 229t. Mainly, the first liquid raw material supply source 220s, the second liquid raw material supply source 220b, the third liquid raw material supply source 220t, the first pressurized gas supply pipe 237s, the second pressurized gas supply pipe 237b, and the third pressurized gas supply pipe 237t. , First liquid source supply pipe 211s, second liquid source supply pipe 211b, third liquid source supply pipe 211t, liquid flow rate controller 2
A liquid source supply system (liquid source supply line) is configured by 21s, 221b, 221t and the open / close valves vs1, vb1, vt1.

  The vaporizers 229s, 229b, and 229t serving as vaporizers for vaporizing the liquid raw material generate the raw material gas by heating and vaporizing the liquid raw material with the heaters 23s, 23b, and 23t, as shown in FIG. Vaporization chambers 20s, 20b, and 20t, liquid material flow paths 21s, 21b, and 21t that are channels until liquid material is discharged into the vaporization chambers 20s, 20b, and 20t, and liquid material vaporization chambers 20s, 20b, and 20t The above-described on-off valves vs1, vb1, vt1 for controlling the supply to the inside, and the first source gas supply pipe 213s and the second source gas supply pipe 213b, which will be described later, are the source gases generated in the vaporization chambers 20s, 20b, 20t. And source gas supply ports 22s, 22b, and 22t as outlets to be supplied to the third source gas supply pipe 213t. The downstream end portions of the first liquid raw material supply pipe 211s, the second liquid raw material supply pipe 211b, and the third liquid raw material supply pipe 211t are respectively connected to the liquid raw material flow paths 21s, via the on-off valves vs1, vb1, and vt1, respectively. 21b, 21t is connected to the upstream end. Carrier liquid supply pipes 24s, 24b, and 24t as carrier gas supply systems (carrier gas supply lines) are connected to the liquid source flow paths 21s, 21b, and 21t, respectively. Ar in the vaporization chambers 20s, 20b, and 20t It is configured to supply a carrier gas such as.

  The source gas supply ports 22s, 22b, and 22t of the vaporizers 229s, 229b, and 229t have a first source gas supply pipe 213s, a second source gas supply pipe 213b, and a first source gas supply pipe 213b that supply source gas into the processing chamber 201, respectively. The upstream end portions of the three source gas supply pipes 213t are connected to each other. The downstream end portions of the first source gas supply pipe 213s, the second source gas supply pipe 213b, and the third source gas supply pipe 213t are unified so as to be merged into the source gas supply pipe 213, which is unified. The source gas supply pipe 213 is connected to the gas inlet 210. The first source gas supply pipe 213s, the second source gas supply pipe 213b, and the third source gas supply pipe 213t are provided with opening / closing valves vs3, vb3, and vt3 that control the supply of the source gas into the processing chamber 201. Each is provided.

  With the above configuration, the liquid raw material is vaporized by the vaporizers 229s, 229b, and 229t to generate the raw material gas, and the first raw material gas supply pipe 213s and the second raw material gas are opened by opening the on-off valves vs3, vb3, and vt3. The source gas can be supplied from the supply pipe 213b and the third source gas supply pipe 213t into the processing chamber 201 through the source gas supply pipe 213. A source gas supply system (source gas supply) is mainly configured by a first source gas supply pipe 213s, a second source gas supply pipe 213b, a third source gas supply pipe 213t, a source gas supply pipe 213, and open / close valves vs3, vb3, and vt3. Line). And a raw material supply system is mainly comprised by the liquid raw material supply system, the vaporization part, and the raw material gas supply system.

<Oxidant supply system>
Further, an oxygen gas supply source 230o for supplying oxygen (O ₂ ) gas is provided outside the processing chamber 201. The upstream end of the first oxygen gas supply pipe 211o is connected to the oxygen gas supply source 230o. The downstream end of the first oxygen gas supply pipe 211o is connected to an ozonizer 229o that generates a reaction gas (reactant), that is, ozone gas as an oxidant, from oxygen gas by plasma. The first oxygen gas supply pipe 211o is provided with a flow rate controller 221o as flow rate control means for controlling the supply flow rate of oxygen gas.

An upstream end of an ozone gas supply pipe 213o as an oxidant supply pipe is connected to an ozone gas supply port 22o as an outlet of the ozonizer 229o. The downstream end of the ozone gas supply pipe 213o is connected so as to join the source gas supply pipe 213. That is, the ozone gas supply pipe 213o is configured to supply ozone gas as an oxidizing agent into the processing chamber 201. The ozone gas supply pipe 213o has a processing chamber 201.
An open / close valve vo3 for controlling the supply of ozone gas to the inside is provided.

  The upstream end of the second oxygen gas supply pipe 212o is connected to the upstream side of the flow rate controller 221o of the first oxygen gas supply pipe 211o. The downstream end of the second oxygen gas supply pipe 212o is connected to the upstream side of the open / close valve vo3 of the ozone gas supply pipe 213o. The second oxygen gas supply pipe 212o is provided with a flow rate controller 222o as flow rate control means for controlling the supply flow rate of oxygen gas.

  With the above configuration, oxygen gas is supplied to the ozonizer 229o to generate ozone gas, and ozone gas can be supplied into the processing chamber 201 by opening the opening / closing valve vo3. Note that if the oxygen gas is supplied from the second oxygen gas supply pipe 212o during the supply of the ozone gas into the processing chamber 201, the ozone gas supplied into the processing chamber 201 is diluted with the oxygen gas to obtain an ozone gas concentration. Can be adjusted. Mainly, an oxygen gas supply source 230o, a first oxygen gas supply pipe 211o, an ozonizer 229o, a flow rate controller 221o, an ozone gas supply pipe 213o, an open / close valve vo3, a second oxygen gas supply pipe 212o, and a flow rate controller 222o An oxidant supply line).

<Cleaning liquid supply system (solvent supply system)>
In addition, a cleaning liquid supply source 220e that supplies ECH (ethylcyclohexane) that is a solvent (solvent) as a cleaning liquid is provided outside the processing chamber 201. The cleaning liquid supply source 220e is configured as a tank (sealed container) capable of containing (filling) the cleaning liquid therein. The cleaning liquid is not limited to ECH, and a solvent such as THF (tetrahydrofuran) can be used.

  Here, a cleaning liquid supply gas supply pipe 237e is connected to the cleaning liquid supply source 220e. A pressure gas supply source (not shown) is connected to the upstream end of the cleaning liquid pressure gas supply pipe 237e. The downstream end of the cleaning liquid pressure feed gas supply pipe 237e communicates with a space existing in the upper part of the cleaning liquid supply source 220e, and is configured to supply the pressure gas into this space. Note that an inert gas such as Ar gas is preferably used as the pressurized gas.

  A cleaning liquid supply pipe 212 is connected to the cleaning liquid supply source 220e. The upstream end of the cleaning liquid supply pipe 212 is immersed in the cleaning liquid stored in the cleaning liquid supply source 220e. The downstream end of the cleaning liquid supply pipe 212 is connected to be branched into three lines, that is, a first cleaning liquid supply pipe 212s, a second cleaning liquid supply pipe 212b, and a third cleaning liquid supply pipe 212t. The downstream end portions of the first cleaning liquid supply pipe 212s, the second cleaning liquid supply pipe 212b, and the third cleaning liquid supply pipe 212t are connected to the liquid source channels 21s, 21b, and 21t of the vaporizers 229s, 229b, and 229t, respectively. Yes. The first cleaning liquid supply pipe 212s, the second cleaning liquid supply pipe 212b, and the third cleaning liquid supply pipe 212t include liquid flow rate controllers 222s, 222b, and 222t as flow rate control means for controlling the supply flow rate of the cleaning liquid, Open / close valves vs2, vb2, and vt2 for controlling supply are provided, respectively. The open / close valves vs2, vb2, and vt2 are provided inside the vaporizers 229s, 229b, and 229t, respectively.

With the above configuration, the liquid raw material of the vaporizers 229s, 229b, and 229t is supplied by supplying the pressurized gas from the cleaning liquid pressurized gas supply pipe 237e, closing the open / close valves vs1, vb1, and vt1, and opening the open / close valves vs2, vb2, and vt2. The cleaning liquid can be pumped (supplied) into the channels 21s, 21b, and 21t to clean the liquid source channels 21s, 21b, and 21t. Mainly, a cleaning liquid supply source 220e, a cleaning liquid pressure feed gas supply pipe 237e, a cleaning liquid supply pipe 212, a first cleaning liquid supply pipe 212s, a second cleaning liquid supply pipe 212b, a third cleaning liquid supply pipe 212t, liquid flow rate controllers 222s, 222b, 222t, Open / close valves vs2, v
The cleaning liquid supply system (solvent supply system), that is, the cleaning liquid supply line (solvent supply line) is configured by b2 and vt2.

<Purge gas supply system>
In addition, an Ar gas supply source 230 a for supplying Ar gas as a purge gas is provided outside the processing chamber 201. The upstream end of the purge gas supply pipe 214 is connected to the Ar gas supply source 230a. The downstream end of the purge gas supply pipe 214 is branched into four lines, that is, a first purge gas supply pipe 214s, a second purge gas supply pipe 214b, a third purge gas supply pipe 214t, and a fourth purge gas supply pipe 214o. It is connected to the. The downstream ends of the first purge gas supply pipe 214s, the second purge gas supply pipe 214b, the third purge gas supply pipe 214t, and the fourth purge gas supply pipe 214o are the first source gas supply pipe 213s and the second source gas supply pipe 213b. The third source gas supply pipe 213t and the ozone gas supply pipe 213o are connected to the downstream sides of the open / close valves vs3, vb3, vt3, and vo3, respectively. The first purge gas supply pipe 214s, the second purge gas supply pipe 214b, the third purge gas supply pipe 214t, and the fourth purge gas supply pipe 214o have a flow rate controller 224s as a flow rate control means for controlling the supply flow rate of Ar gas. 224b, 224t, 224o and open / close valves vs4, vb4, vt4, vo4 for controlling the supply of Ar gas are provided, respectively. Mainly, Ar gas supply source 230a, purge gas supply pipe 214, first purge gas supply pipe 214s, second purge gas supply pipe 214b, third purge gas supply pipe 214t, and fourth purge gas supply pipe 214o, flow rate controllers 224s, 224b, and 224t. , 224o and open / close valves vs4, vb4, vt4, and vo4 constitute a purge gas supply system (purge gas supply line).

<Vent (bypass) system>
Further, the first vent on the upstream side of the open / close valves vs3, vb3, vt3, vo3 of the first source gas supply pipe 213s, the second source gas supply pipe 213b, the third source gas supply pipe 213t, and the ozone gas supply pipe 213o is provided. The upstream ends of the pipe 215s, the second vent pipe 215b, the third vent pipe 215t, and the fourth vent pipe 215o are connected to each other. Further, the downstream end portions of the first vent pipe 215s, the second vent pipe 215b, the third vent pipe 215t, and the fourth vent pipe 215o are unified so as to be merged into a vent pipe 215, and the vent pipe 215 is an exhaust pipe. 261 is connected upstream of the raw material recovery trap 263. The first vent pipe 215s, the second vent pipe 215b, the third vent pipe 215t, and the fourth vent pipe 215o are provided with open / close valves vs5, vb5, vt5, and vo5 for controlling gas supply, respectively.

  With the above configuration, the first source gas supply pipe 213s, the second source gas supply pipe 213b, and the third source gas are opened by closing the on-off valves vs3, vb3, vt3, and vo3 and opening the on-off valves vs5, vb5, vt5, and vo5. The gas flowing in the supply pipe 213t and the ozone gas supply pipe 213o can be bypassed and exhausted out of the process chamber 201 without being supplied into the process chamber 201.

The flow rate controller 224s is upstream of the opening / closing valves vs4, vb4, vt4, and vo4 of the first purge gas supply pipe 214s, the second purge gas supply pipe 214b, the third purge gas supply pipe 214t, and the fourth purge gas supply pipe 214o. , 224b, 224t, and 224o are connected to the fifth vent pipe 216s, the sixth vent pipe 216b, the seventh vent pipe 216t, and the eighth vent pipe 216o, respectively. Further, the downstream end portions of the fifth vent pipe 216s, the sixth vent pipe 216b, the seventh vent pipe 216t, and the eighth vent pipe 216o are unified so as to be merged into a vent pipe 216, and the vent pipe 216 is an exhaust pipe. It is connected to the downstream side of the raw material recovery trap 263 and the upstream side of the vacuum pump 264. The fifth vent pipe 216s, the sixth vent pipe 216b, the seventh vent pipe 216t, and the eighth vent pipe 216o include on-off valves vs6, vb6, vt6, v for controlling gas supply.
o6 is provided.

  With the above configuration, the first and second purge gas supply pipes 214s, 214b, 214b, and 214t are opened by closing the open / close valves vs4, vb4, vt4, and vo4 and opening the open / close valves vs6, vb6, vt6, and vo6. In addition, the Ar gas flowing in the fourth purge gas supply pipe 214o can be bypassed through the processing chamber 201 without being supplied into the processing chamber 201, and exhausted out of the processing chamber 201. Note that the first source gas supply pipe 213s, the second source gas supply pipe 213b, and the third source gas supply pipe are opened by closing the on-off valves vs3, vb3, vt3, and vo3 and opening the on-off valves vs5, vb5, vt5, and vo5. When the gas flowing in the ozone gas supply pipe 213o is bypassed into the processing chamber 201 without being supplied into the processing chamber 201 and exhausted to the outside of the processing chamber 201, the open / close valves vs4, vb4, vt4 By opening vo4, Ar gas is introduced into the first source gas supply pipe 213s, the second source gas supply pipe 213b, the third source gas supply pipe 213t, and the ozone gas supply pipe 213o, and inside each source gas supply pipe It is set to purge. The open / close valves vs6, vb6, vt6, and vo6 are set so as to perform the reverse operation of the open / close valves vs4, vb4, vt4, and vo4. When Ar gas is not supplied into each source gas supply pipe, the processing is performed. The chamber 201 is bypassed and the Ar gas is exhausted. Mainly, the first vent pipe 215s, the second vent pipe 215b, the third vent pipe 215t, the fourth vent pipe 215o, the vent pipe 215, the fifth vent pipe 216s, the sixth vent pipe 216b, the seventh vent pipe 216t, The 8 vent pipe 216o, the vent pipe 216, the open / close valves vs5, vb5, vt5, vo5, and the open / close valves vs6, vb6, vt6, vo6 constitute a vent system (bypass system), that is, a vent line (bypass line).

<Controller>
Note that the substrate processing apparatus according to the present embodiment includes a controller 280 that controls the operation of each unit of the substrate processing apparatus. The controller 280 includes a gate valve 251, an elevating mechanism 207b, a transfer robot 273, a heater 206, a pressure regulator (APC) 262, vaporizers 229s, 229b, and 229t, an ozonizer 229o, a vacuum pump 264, open / close valves vs1 to vs6, vb1. Controls the operations of vb6, vt1 to vt6, vo3 to vo6, liquid flow rate controllers 221s, 221b, 221t, 222s, 222b, 222t, flow rate controllers 224s, 224b, 224t, 221o, 222o, 224o and the like.

  As described above, the substrate processing apparatus according to the embodiment of the present invention is configured.

(2) Substrate Processing Step Subsequently, as a step of the manufacturing process of the semiconductor device according to one embodiment of the present invention, as a metal oxide film containing, for example, strontium and titanium by the ALD method using the substrate processing apparatus described above. A substrate processing step for forming an STO (SrTiO ₃ ) film will be described with reference to FIGS. 2 and 6A. FIG. 6A is a flowchart of the substrate processing process according to the embodiment of the present invention. FIG. 2 is a sequence diagram as a timing chart showing the opening / closing timing of each valve of the substrate processing apparatus according to the embodiment of the present invention. In this timing chart, the High level indicates that the valve is open, and the Low level indicates that the valve is closed. In the following description, the operation of each part constituting the substrate processing apparatus is controlled by the controller 280.

<Substrate Loading Step (S1), Substrate Placement Step (S2)>
First, the elevating mechanism 207b is operated to lower the support table 203 to the wafer transfer position shown in FIG. Then, the gate valve 251 is opened to allow the processing chamber 201 and the transfer chamber 271 to communicate with each other. Then, the wafer 200 to be processed is loaded from the transfer chamber 271 into the processing chamber 201 by the transfer robot 273 while being supported by the transfer arm 273a (S1). An oxide film such as SiO ₂ is formed on the surface of the wafer 200, and a ruthenium (Ru) thin film as a metal thin film is formed in advance on the oxide film, for example. The ruthenium thin film serves as a base for forming an STO film as a metal oxide film in a process described later. The wafer 200 carried into the processing chamber 201 is temporarily placed on the lift pins 208 b protruding from the upper surface of the support table 203. When the transfer arm 273a of the transfer robot 273 returns from the processing chamber 201 to the transfer chamber 271, the gate valve 251 is closed.

  Subsequently, the elevating mechanism 207b is operated to raise the support table 203 to the wafer processing position shown in FIG. As a result, the lift pins 208b are buried from the upper surface of the support table 203, and the wafer 200 is placed on the susceptor 217 on the upper surface of the support table 203 (S2).

<Pressure adjusting step (S3), temperature raising step (S4)>
Subsequently, the pressure regulator (APC) 262 controls the pressure in the processing chamber 201 to be a predetermined processing pressure (S3). Further, the power supplied to the heater 206 is adjusted to control the surface temperature of the wafer 200 to a predetermined processing temperature (S4).

  In the substrate carrying-in process (S1), the substrate placing process (S2), the pressure adjusting process (S3), and the temperature raising process (S4), the open / close valves vs3, vb3, vt3 are operated while operating the vacuum pump 264. By closing vo3 and opening the on-off valves vs4, vb4, vt4, and vo4, Ar gas is always allowed to flow into the processing chamber 201 (idle). Thereby, adhesion of particles on the wafer 200 can be suppressed.

  In parallel with the steps S1 to S4, a raw material gas (hereinafter referred to as a first raw material gas) obtained by vaporizing the first liquid raw material (organic metal liquid raw material containing Sr element) is generated (preliminary vaporization) (Set up). ). That is, with the on-off valve vs2 closed, the on-off valve vs1 is opened, and the pumping gas is supplied from the first pumping gas supply pipe 237s, and the first liquid source is supplied from the first liquid source supply source 220s to the vaporizer 229s. The first liquid source is vaporized (supplied) and vaporized in the vaporizer 229s to generate the first source gas. In this preliminary vaporization step, the process chamber 201 is bypassed without supplying the first source gas into the process chamber 201 by opening the open / close valve vs5 while operating the vacuum pump 264 and keeping the open / close valve vs3 closed. And exhaust.

  In parallel with steps S1 to S4, it is preferable to generate ozone gas as an oxidant (Set up). That is, oxygen gas is supplied from the oxygen gas supply source 230o to the ozonizer 229o, and ozone gas is generated in the ozonizer 229o. At this time, while the vacuum pump 264 is operated, the open / close valve vo5 is opened while the open / close valve vo3 is closed, thereby bypassing the process chamber 201 and exhausting it without supplying ozone gas into the process chamber 201.

  A predetermined time is required to stably generate the first source gas by the vaporizer 229s or to stably generate the ozone gas by the ozonizer 229o. For this reason, in this embodiment, the first source gas or ozone gas is generated in advance, and the opening and closing valves vs3, vs5, vo3, and vo5 are switched to switch the flow path of the first source gas and ozone gas. As a result, it is preferable that the stable supply of the first source gas and ozone gas into the processing chamber 201 can be started or stopped quickly by switching the opening / closing valve. Simultaneously with the preliminary vaporization step, the opening / closing valve vt2 is opened, and cleaning of the liquid raw material flow path 21t of the vaporizer 229t is started. The details of the cleaning method will be described later.

<First Step (S5)>
Subsequently, the first step (S5) is performed. In the first step (S5), for example, an STO (SrTiO ₃ ) film as a metal oxide film containing strontium and titanium is oxidized on the ruthenium thin film on the wafer 200 having a ruthenium thin film as a metal thin film formed on the surface. And the first temperature at which the STO film becomes amorphous. Specifically, an ALD process (S51) using the first source gas described below while adjusting the power supplied to the heater 206 and controlling the surface temperature of the wafer 200 to be the first temperature described above. The ALD process (S52) using the third source gas is set as one cycle, and this cycle is repeated a predetermined number of times to form an STO film having a desired thickness on the ruthenium thin film.

  The present inventors have found that the STO film crystallizes when the processing temperature (the surface temperature of the wafer 200 during film formation) is 400 ° C., but does not crystallize when it is 375 ° C. It was. That is, it is considered that there exists a temperature (point) at which the STO film crystallizes between 375 and 400 ° C., and it is considered that an amorphous STO film can be formed at least by setting the processing temperature to 375 ° C. or lower. . The ruthenium thin film is oxidized when the processing temperature is set to 375 ° C., but the oxidation can be suppressed when the processing temperature is set to 350 ° C., and the oxidation is more reliably suppressed when the processing temperature is set to 300 ° C. or lower. I found out that I could do it. However, when the processing temperature is in the range of more than 300 ° C. to 350 ° C., the ruthenium thin film as a base may be oxidized or not oxidized, and it may become unstable whether or not the oxidation can be suppressed. There is a case.

  Hereinafter, an ALD process (S51) using the first source gas and an ALD process (S52) using the third source gas will be described in this order.

  In the ALD process (S51) using the first source gas, the opening and closing valves vs4 and vs5 are closed and the opening and closing valve vs3 is opened while the vacuum pump 264 is operated to supply the first source gas into the processing chamber 201. Is started (Sr). The first source gas is dispersed by the shower head 240 and uniformly supplied onto the wafer 200 in the processing chamber 201, and the gas molecules of the first source gas are adsorbed on the surface of the wafer 200. Excess first source gas flows through the exhaust duct 259 and is exhausted to the exhaust port 260. Note that when the first source gas is supplied into the processing chamber 201, the first source gas is prevented from entering the second source gas supply pipe 213b, the third source gas supply pipe 213t, and the ozone gas supply pipe 213o. In addition, it is preferable that the open / close valves vb4, vt4, and vo4 are kept open so that Ar gas is allowed to constantly flow into the processing chamber 201 so as to promote diffusion of the first source gas in the processing chamber 201.

  After a predetermined time has elapsed after opening the on-off valve vs3 and starting the supply of the first source gas, the on-off valve vs3 is closed and the on-off valves vs4 and vs5 are opened to supply the first source gas into the processing chamber 201. To stop. At the same time, the on-off valve vs1 is closed, and the supply of the first liquid raw material to the vaporizer 229s is also stopped.

  Here, after the on-off valve vs3 is closed and the supply of the first source gas is stopped, the on-off valves vs4, vb4, vt4, and vo4 are kept open, and the Ar gas is always allowed to flow into the processing chamber 201. As a result, the first source gas remaining in the processing chamber 201 is removed, and the inside of the processing chamber 201 is purged with Ar gas (PS1).

In addition, after closing the opening / closing valve vs1 and stopping the supply of the first liquid raw material, cleaning of the vaporizer 229s is started (PS1 to PS1). That is, while supplying the pressurized gas from the cleaning liquid pressurized gas supply pipe 237e, the open / close valve vs2 is opened while the open / close valve vs1 is closed, and the cleaning liquid is supplied into the liquid raw material flow path 21s of the vaporizer 229s. The inside of the passage 21s is washed. At this time, the on-off valves vs1 and vs3 are closed and the on-off valves vs2 and vs5 are opened, so that the cleaning liquid supplied into the liquid source channel 21s cleans the liquid source channel 21s and then enters the vaporization chamber 20s. To be vaporized. At this time, the first liquid source and the solvent remaining in the liquid source channel 21s are also supplied into the vaporizing chamber 20s and vaporized. The vaporized cleaning liquid, the first liquid source, and the solvent are exhausted from the vent pipe 215s by bypassing the processing chamber 201 without being supplied into the processing chamber 201 through the first source gas supply pipe 213s. The The cleaning of the liquid raw material flow path 21s of the vaporizer 229s is continued, for example, until the next supply of the first liquid raw material to the vaporizer 229s is started (until Ti in S52).

  When the purge in the processing chamber 201 is completed, the opening / closing valves vo4, vo5 are closed, the opening / closing valve vo3 is opened, and supply of ozone gas into the processing chamber 201 is started (OxS). The ozone gas is dispersed by the shower head 240 and uniformly supplied onto the wafer 200 in the processing chamber 201, reacts with the gas molecules of the first source gas adsorbed on the surface of the wafer 200, and the Sr element on the wafer 200. An SrO film is produced as a thin film containing Excess ozone gas and reaction byproducts flow through the exhaust duct 259 and are exhausted to the exhaust port 260. When supplying ozone gas into the processing chamber 201, in order to prevent ozone gas from entering the first source gas supply pipe 213s, the second source gas supply pipe 213b, and the third source gas supply pipe 213t, It is preferable to keep the open / close valves vs4, vb4, and vt4 open so that the ozone gas is diffused in the processing chamber 201 and to keep Ar gas flowing in the processing chamber 201 at all times.

  After a predetermined time has elapsed after opening the opening / closing valve vo3 and starting the supply of ozone gas, the opening / closing valve vo3 is closed and the opening / closing valves vo4, vo5 are opened to stop the supply of ozone gas into the processing chamber 201.

  After the opening / closing valve vo3 is closed and the supply of ozone gas is stopped, the opening / closing valves vs4, vb4, vt4, vo4 are kept open, and Ar gas is always allowed to flow into the processing chamber 201. Thereby, ozone gas and reaction by-products remaining in the processing chamber 201 are removed, and the inside of the processing chamber 201 is purged with Ar gas (PS2).

  In the ALD process (S51) using the first source gas, a source gas (hereinafter referred to as a third source gas) obtained by vaporizing the third liquid source (organometallic liquid source containing Ti element) is generated in advance ( Pre-vaporization) (PS1). That is, the open / close valve vt2 is closed and the open / close valve vt1 is opened, and the pressurized gas is supplied from the third pressurized gas supply pipe 237t to supply the third liquid material from the third liquid material supply source 220t to the vaporizer 229t. Then, the third liquid source is vaporized by the vaporizer 229t to generate a third source gas. In the ALD process (S51) using the first source gas, the third source gas is supplied into the processing chamber 201 by opening the on-off valve vt5 while operating the vacuum pump 264 and keeping the on-off valve vt3 closed. The process chamber 201 is bypassed and exhausted. In this way, the third source gas is generated in advance, and the opening and closing of the open / close valves vt3 and vt5 is switched in the ALD step (S52) using the third source gas described later, thereby changing the flow path of the third source gas. Switch. Thereby, in the ALD process (S52) using the third source gas, stable supply of the third source gas into the processing chamber 201 can be started or stopped quickly, which is preferable.

  Subsequently, an ALD process (S52) using the third source gas is performed.

In the ALD process (S52) using the third source gas, the open / close valves vt4 and vt5 are closed and the open / close valve vt3 is opened while the vacuum pump 264 is operated, so that the third source gas is supplied into the processing chamber 201. Is started (Ti). The third source gas is dispersed by the shower head 240 and uniformly supplied onto the wafer 200 in the processing chamber 201, and the gas molecules of the third source gas are adsorbed on the surface of the wafer 200. Excess third source gas flows through the exhaust duct 259 and is exhausted to the exhaust port 260. When the third source gas is supplied into the processing chamber 201, the third source gas is prevented from entering the first source gas supply pipe 213s, the second source gas supply pipe 213b, and the ozone gas supply pipe 213o. Further, it is preferable that the open / close valves vs4, vb4, and vo4 are kept open so that Ar gas flows constantly in the processing chamber 201 so as to promote diffusion of the third source gas in the processing chamber 201.

  After a predetermined time has elapsed after opening the on-off valve vt3 and starting the supply of the third source gas, the on-off valve vt3 is closed and the on-off valves vt4, vt5 are opened to supply the third source gas into the processing chamber 201. To stop. At the same time, the on-off valve vt1 is closed, and the supply of the third liquid material to the vaporizer 229t is also stopped.

  Here, after the on-off valve vt3 is closed and the supply of the third source gas is stopped, the on-off valves vs4, vb4, vt4, and vo4 are kept open, and the Ar gas is always allowed to flow into the processing chamber 201. Thereby, the third source gas remaining in the processing chamber 201 is removed, and the inside of the processing chamber 201 is purged with Ar gas (PT1).

  In addition, after closing the opening / closing valve vt1 and stopping the supply of the third liquid raw material, cleaning of the vaporizer 229t is started (PT1). That is, while supplying the pressurized gas from the cleaning liquid pressurized gas supply pipe 237e, the open / close valve vt2 is opened while the open / close valve vt1 is closed, and the cleaning liquid is supplied into the liquid raw material flow path 21t of the vaporizer 229t. The inside of the passage 21t is washed. At this time, the on-off valves vt1 and vt3 are closed and the on-off valves vt2 and vt5 are opened, so that the cleaning liquid supplied into the liquid source channel 21t is cleaned in the liquid source channel 21t and then into the vaporization chamber 20t. To be vaporized. At this time, the third liquid source and the solvent remaining in the liquid source channel 21t are also supplied into the vaporizing chamber 20s and vaporized. Then, the vaporized cleaning liquid, the third liquid source, and the solvent are exhausted from the vent pipe 215t by bypassing the processing chamber 201 without being supplied into the processing chamber 201 through the third source gas supply pipe 213t. The Note that the cleaning of the vapor source 229t in the liquid source flow path 21t is continued, for example, until the next supply of the third liquid source to the vaporizer 229t is started (until Sr in S51).

When the purge in the processing chamber 201 is completed, the opening / closing valves vo4, vo5 are closed, the opening / closing valve vo3 is opened, and supply of ozone gas into the processing chamber 201 is started (OxT). The ozone gas is dispersed by the shower head 240, is uniformly supplied onto the wafer 200 in the processing chamber 201, reacts with gas molecules of the third source gas adsorbed on the surface of the wafer 200, and Ti element is formed on the wafer 200. A TiO ₂ film is produced as a thin film containing Excess ozone gas and reaction byproducts flow through the exhaust duct 259 and are exhausted to the exhaust port 260. When supplying ozone gas into the processing chamber 201, in order to prevent ozone gas from entering the first source gas supply pipe 213s, the second source gas supply pipe 213b, and the third source gas supply pipe 213t, It is preferable to keep the open / close valves vs4, vb4, and vt4 open so that the ozone gas is diffused in the processing chamber 201 and to keep Ar gas flowing in the processing chamber 201 at all times.

  After a predetermined time has elapsed after opening the opening / closing valve vo3 and starting the supply of ozone gas, the opening / closing valve vo3 is closed and the opening / closing valves vo4, vo5 are opened to stop the supply of ozone gas into the processing chamber 201.

  After the opening / closing valve vo3 is closed and the supply of ozone gas is stopped, the opening / closing valves vs4, vb4, vt4, vo4 are kept open, and Ar gas is always allowed to flow into the processing chamber 201. Thereby, ozone gas and reaction by-products remaining in the processing chamber 201 are removed, and the inside of the processing chamber 201 is purged with Ar gas (PT2).

The ALD process (S51) using the first source gas and the ALD process (S52) using the third source gas described above are set as one cycle, and this cycle is repeated a predetermined number of times, whereby a desired film thickness is formed on the ruthenium thin film. An STO film, that is, a SrTiO ₃ thin film is formed.

As a processing condition of the wafer 200 in the first step (S5), for example, when an STO film is formed,
Processing temperature (first temperature): 200 to 350 ° C., preferably 200 to 300 ° C.,
Processing pressure: 10 to 1000 Pa, preferably 10 to 500 Pa,
First liquid raw material (Sr (C ₁₄ O ₄ H ₂₅ ) ₂ (abbreviation; Sr (METHD) ₂ ) 0.1 mol / L ECH dilution) supply flow rate: 0.01 to 0.5 cc / min,
Third liquid raw material (Ti (C ₆ O ₂ H ₁₁ ) (C ₁₁ O ₂ H ₁₉ ) ₂ (abbreviation: Ti (MPD) (THD) ₂ ) 0.1 mol / L ECH dilution) Supply flow rate: 0.01 to 0.5cc / min,
Oxidant (ozone gas) supply flow rate: 500 to 2000 sccm (ozone concentration 20 to 200 g / Nm ³ )
Cleaning liquid (ECH) supply flow rate: 0.05 to 0.5 cc / min,
Film thickness: 3-5 nm (30-50 mm),
Number of cycles: 60 to 100 cycles are exemplified. By maintaining each processing condition constant at a certain value within each range, an amorphous STO film is formed on the ruthenium thin film formed on the wafer 200.

When the processing temperature is lower than 200 ° C., the adsorption mechanism when the gas molecules of the source gas are adsorbed on the underlying ruthenium thin film is physical adsorption, so that the formed STO film is easily peeled off from the underlying ruthenium thin film. End up. In addition, the probability of O ₃ decomposition (the probability that ozone gas reacts with the gas molecules of the raw material gas adsorbed on the surface of the wafer 200) may decrease, and the film formation rate may decrease. On the other hand, if the treatment temperature exceeds 350 ° C., the underlying ruthenium thin film is likely to be oxidized. On the other hand, if the processing temperature is 200 to 350 ° C., the adsorption mechanism when the gas molecules of the source gas are adsorbed on the underlying ruthenium thin film is chemical adsorption. Therefore, the formed STO film is the underlying ruthenium thin film. It can suppress that it becomes easy to peel from. In addition, when the processing temperature is 200 to 350 ° C., it is possible to suppress a decrease in the probability of O ₃ decomposition, suppress a decrease in film formation rate, and suppress oxidation of the underlying ruthenium thin film. In addition, within such a temperature range, an amorphous STO film can be formed, and the formed STO film can function as an oxygen permeation barrier.

  However, in the first step (S5), when the processing temperature is set to be over 300 ° C. to 350 ° C., the underlying ruthenium thin film may be oxidized or not oxidized, and it is unstable whether or not the oxidation can be suppressed. It may become. On the other hand, when the processing temperature is set to 300 ° C. or lower, the oxidation of the underlying ruthenium thin film can be more reliably suppressed. That is, when the processing temperature is set to 200 to 300 ° C., it is possible to suppress the formed amorphous STO film from being easily peeled off from the underlying ruthenium thin film, to suppress a decrease in the deposition rate, and to oxidize the underlying ruthenium thin film. Can be more reliably suppressed.

  Further, when the processing pressure is less than 10 Pa, the adsorption of the source gas to the underlying ruthenium thin film is hindered, and the amount of adsorbed species to the underlying ruthenium thin film, that is, the amount of gas molecules of the source gas adsorbed to the underlying ruthenium thin film. However, it becomes difficult to increase the film formation rate. On the other hand, when the processing pressure exceeds 1000 Pa, re-liquefaction of the source gas may occur depending on the partial pressure. On the other hand, if the processing pressure is 10 to 1000 Pa, the adsorption of the gas molecules of the source gas to the underlying ruthenium thin film can be promoted, the film formation rate can be increased, and the re-liquefaction of the source gas can be suppressed. it can. In addition, if processing pressure shall be 500 Pa or less, generation | occurrence | production of reliquefaction of source gas can further be suppressed.

Further, when the liquid material supply flow rate is less than 0.01 cc / min, it is difficult to increase the film formation rate. On the other hand, it becomes difficult to vaporize the liquid material as the liquid material supply flow rate increases. Therefore, in the case of a single wafer processing for processing one wafer 200 at a time, the liquid material supply flow rate is preferably about 0.01 to 0.5 cc / min. In the case of batch-type substrate processing for processing the wafer 200, it is preferable to set it to about 0.01 to 2 cc / min.

  Further, when the cleaning liquid supply flow rate is less than 0.01 cc / min, the cleaning effect of the vaporizers 229s, 229b, and 229t is lowered, and the effect of suppressing clogging of the vaporizers 229s, 229b, and 229t is insufficient, or the vaporization is performed. The time required for cleaning the devices 229s, 229b, and 229t may become long. On the other hand, as the cleaning liquid supply flow rate increases, it becomes difficult to vaporize the cleaning liquid. Accordingly, the cleaning liquid supply flow rate is preferably about 0.01 to 0.5 cc / min in the case of single-wafer substrate processing for processing one wafer 200 at a time, and a plurality of wafers at a time. In the case of batch-type substrate processing for processing 200, it is preferable to set it to about 0.01 to 2 cc / min.

  Further, if the thickness of the amorphous STO film to be formed is less than 3 nm, the function as an oxygen permeation barrier may be deteriorated because it is too thin. If the film thickness is too thin, it will be difficult to densify the STO film in the densification step (S5a) described later. On the other hand, if the film thickness exceeds 5 nm, it becomes difficult to crystallize the STO film in the crystallization step (S7) described later. On the other hand, if the film thickness is 3 to 5 nm, the formed STO film can sufficiently function as an oxygen permeable barrier, and the STO film is sufficiently densified in the densification step (S5a) described later. The STO film can be sufficiently crystallized in the crystallization step (S7) described later.

  In the first step (S5), since the surface temperature of the wafer 200 is set to the first temperature described above, an amorphous STO film can be formed as described above, and oxidation of the underlying ruthenium thin film can be suppressed. In the present embodiment, the same substance (ECH) is used as a solvent for diluting each liquid raw material and a cleaning liquid.

<Second Step (S6)>
Subsequently, the second step (S6) is performed. In the second step (S6), on the STO film formed in the first step (S5), the STO film as a metal oxide film containing, for example, strontium and titanium is targeted at a second temperature that exceeds (becomes) the first temperature. To a film thickness of Specifically, the power supplied to the heater 206 is adjusted, and the ALD process (S61) using the first source gas and the third source material are controlled so that the surface temperature of the wafer 200 becomes the second temperature described above. The SLD film having a desired thickness is formed on the STO film formed in the first step by repeating this cycle a predetermined number of times with the ALD process (S62) using gas as one cycle. The sequence of the ALD process (S61) using the first source gas and the ALD process (S62) using the third source gas is the same as the sequence of the ALD process (S51) using the first source gas and the third source gas. This is the same as the sequence of the ALD process (S52) using.

  As described above, the STO film formed in the first step (S5) needs to be in an amorphous state. In contrast, the STO film formed in the second step (S6) may be in an amorphous (amorphous) state or in a poly state (polycrystalline), but it is better to use a poly state. preferable. After the STO film is formed in the first step (S5) and the second step (S6), the entire STO film is annealed and crystallized in the crystallization step (S7) as will be described later. The second step (S6) If the STO film in the poly state is formed, the entire STO film can be easily crystallized in the crystallization step (S7). In this case, for example, the processing temperature (first temperature) in the first step (S5) is set to 300 ° C. to form an amorphous STO film, and the processing temperature (second temperature) in the second step (S6) is set to 400. A poly-state STO film may be formed at a temperature of ° C.

  In the case where an amorphous STO film is formed in the second step (S6), the processing temperature (second temperature) in the second step (S6) is changed to the processing temperature (first temperature) in the first step (S5). ) Is preferable. By making the treatment temperature (second temperature) in the second step (S6) higher than the treatment temperature (first temperature) in the first step (S5), the crystallization step (S7) described later is relatively crystallized. An amorphous STO film that can be easily formed can be formed. In this case, for example, an amorphous STO film is formed by setting the processing temperature (first temperature) in the first step (S5) to 300 ° C., and the processing temperature (second temperature) in the second step (S6) is 350. An amorphous STO film may be formed at a temperature of ° C.

  Thus, in the second step (S6), it is easier to crystallize than the poly-state STO film or the amorphous STO film formed in the first step (S5) (the amorphous formed in the first step (S5)). It is preferable to form an amorphous STO film that crystallizes at a lower temperature than the STO film in the state. That is, the second temperature is preferably a temperature equal to or higher than the first temperature, and may be the same temperature as the first temperature, but is preferably a temperature higher than the first temperature.

  The STO film formed in the second step (S6) is preferably formed so as to be thicker than the STO film formed in the first step (S5). That is, it is preferable to form a thin STO film in the first step (S5) and to form a thick STO film in the second step (S6).

As a processing condition of the wafer 200 in the second step (S6), for example, when forming an STO film,
Processing temperature (second temperature): 300 to 400 ° C, preferably 350 to 400 ° C,
Processing pressure: 10 to 1000 Pa, preferably 10 to 500 Pa,
First liquid raw material (Sr (C ₁₄ O ₄ H ₂₅ ) ₂ (abbreviation; Sr (METHD) ₂ ) 0.1 mol / L ECH dilution) supply flow rate: 0.01 to 0.5 cc / min,
Third liquid raw material (Ti (C ₆ O ₂ H ₁₁ ) (C ₁₁ O ₂ H ₁₉ ) ₂ (abbreviation: Ti (MPD) (THD) ₂ ) 0.1 mol / L ECH dilution) Supply flow rate: 0.01 to 0.5cc / min,
Oxidant (ozone gas) supply flow rate: 500 to 2000 sccm (ozone concentration 20 to 200 g / Nm ³ ),
Cleaning liquid (ECH) supply flow rate: 0.05 to 0.5 cc / min,
Film thickness: 12-15 nm (120-150 mm),
Number of cycles: 240 to 300 cycles are exemplified. By maintaining each processing condition constant at a certain value within each range, an STO film is further formed on the amorphous STO film formed in the first step (S5).

Note that the first step (S5) and the second step (S6) differ only in the processing temperature, and other conditions such as the processing pressure are the same as those in the first step (S5). In the second step (S6), when the processing temperature is lower than 300 ° C., the film formation rate may decrease, and it is difficult to crystallize even if the crystallization step (S7) described later is performed. In some cases, an amorphous STO film is formed. On the other hand, when the processing temperature exceeds 400 ° C., the source gas may be self-decomposed and ALD film formation may not be performed properly. On the other hand, if the processing temperature is set to 300 to 400 ° C., it is possible to suppress a decrease in the film formation rate, to suppress the formation of an amorphous STO film that is difficult to crystallize, and to appropriately perform ALD film formation. Can be done. Even within the range of 300 to 400 ° C., a higher film formation rate can be obtained as the processing temperature is increased, and an amorphous STO film or a crystallized poly STO film that is easily crystallized can be formed. The film quality of the film can also be improved. Therefore, the treatment temperature is more preferably 350 to 400 ° C.

  Note that when the STO film is formed in the second step (S6), the amorphous STO film previously formed in the first step (S5) functions as a barrier that suppresses the permeation of oxygen. Oxidation of the thin film is suppressed. Here, when the STO film formed in the first step (S5) is in a polycrystalline state, the crystal of the STO film formed in the first step (S5) is formed when the STO film is formed in the second step (S6). It is conceivable that oxygen permeates through the grain boundary and the underlying ruthenium thin film is oxidized. On the other hand, when the STO film formed in the first step (S5) is in an amorphous state, there is no crystal grain boundary in the amorphous STO film, so a path through which oxygen passes is not formed, and the second step. When the STO film is formed in (S6), the permeation of oxygen can be blocked and the oxidation of the underlying ruthenium thin film can be suppressed. In the present embodiment, the same substance (ECH) is used as a solvent for diluting each liquid raw material and a cleaning liquid.

<Crystalling step (S7)>
Subsequently, the power supplied to the heater 206 is adjusted, and the entire STO film formed in the first step (S5) and the second step (S6) is annealed and crystallized.

As a processing condition of the wafer 200 in the crystallization step (S7), for example, when the STO film is crystallized,
Process temperature: 500-600 degreeC,
Processing pressure: 50 to 2000 Pa,
Process gas: Ar or N ₂ supply flow rate: 0.5-5000 sccm,
Processing time: 1 to 60 minutes are exemplified, and the STO formed in the first step (S5) and the second step (S6) by maintaining each processing condition constant at a certain value within each range. The entire film crystallizes. As a result, the dielectric constant of the entire STO film increases.

<Substrate unloading step (S8)>
Thereafter, the wafer 200 after forming a thin film with a desired film thickness is transferred from the processing chamber 201 to the transfer chamber 271 by a procedure reverse to the procedure shown in the substrate carry-in step (S1) and the substrate placement step (S2). The substrate processing step according to this embodiment is completed.

  Note that when the metal oxide film forming step is performed by the ALD method, the processing temperature (first temperature and second temperature) is controlled so as to be in a temperature range in which the source gas is not self-decomposed. In this case, when supplying each source gas in the ALD process (S 51, 52, 61, 62) using each source gas, the source gas is adsorbed on the wafer 200. Further, when ozone gas is supplied, the raw material gas molecules adsorbed on the wafer 200 react with the ozone gas, whereby a thin film of less than one atomic layer (less than 1 cm) is formed on the wafer 200. At this time, impurities such as C and H mixed in the thin film can be desorbed by ozone gas.

(3) Effects According to this Embodiment According to this embodiment, one or more effects described below are exhibited.

According to the present embodiment, before the STO film is formed in the second step (S6), the STO film is formed in advance in the first step (S5). Since the STO film formed in the first step (S5) functions as a barrier for suppressing the permeation of oxygen, the second temperature (for example, 300 to 400 ° C., preferably 350 to 400 ° C.) is used in the second step (S6). Thus, when forming the STO film, it becomes difficult for the oxygen-containing gas to come into contact with the underlying ruthenium thin film, and the oxidation of the ruthenium thin film can be suppressed.

  In the first step (S5) according to the present embodiment, the first temperature (for example, 200 to 350 ° C.) at which the STO film is in an amorphous state at a temperature at which the ruthenium thin film is not oxidized on the ruthenium thin film. The STO film is preferably formed at 200 to 300 ° C.). By forming the STO film in such a temperature region, it becomes possible to suppress oxidation of the ruthenium thin film as a base.

  In addition, according to the present embodiment, after the STO film is formed at the first temperature, the target film thickness is reached at the second temperature (300 to 400 ° C., preferably 350 to 400 ° C.) that exceeds (becomes) the first temperature. The STO film is formed up to. By forming the STO film at the first temperature and then forming the STO film in such a temperature region, it becomes possible to increase the formation speed of the STO film while suppressing the oxidation of the ruthenium thin film as a base. It becomes possible to improve productivity.

  In addition, according to the present embodiment, after the STO film is formed to the target film thickness at the second temperature, the crystallization process (S7) is performed, whereby the first step (S5) and the second step (S6). The entire STO film formed in Step 1 is annealed and crystallized. As a result, the dielectric constant of the STO film can be increased. In the present embodiment, the formation of the STO film in the first step (S5) and the second step (S6) and the annealing of the STO film in the crystallization step (S7) are continuously performed in the same processing chamber 201. Although an example of performing is described, the crystallization step (S7) is performed in a processing chamber different from the processing chamber 201 in which the first step (S5) and the second step (S6) are performed, that is, a processing chamber for annealing. Also good.

<Second Embodiment of the Present Invention>
In the above-described embodiment, the amorphous STO film formed at the first temperature functions as a barrier for suppressing permeation of oxygen. In contrast, in the present embodiment, the amorphous STO film formed at the first temperature is further annealed to maintain the amorphous state and densify the STO film. Thereby, the density of the STO film can be increased, and the barrier effect for suppressing the permeation of oxygen in the amorphous STO film can be further enhanced. Hereinafter, the present embodiment will be described with reference to FIG.

  As shown in FIG. 6B, in this embodiment, in the first step (S5), the amorphous STO film formed at the first temperature is annealed while maintaining its amorphous state. The point which further has the densification process (S5a) which densifies a film | membrane differs from the above-mentioned embodiment. That is, in the first step (S5), the ALD process (S51) using the first source gas and the ALD process (S52) using the third source gas are set as one cycle, and this cycle is repeated a predetermined number of times. After forming the STO film having a thickness, the power supplied to the heater 206 is adjusted to perform the densification process (S5a) on the STO film, and the second step (S6) is performed after the densification process (S5a) is completed. This is different from the above embodiment. Others are the same as the above-mentioned embodiment.

As a processing condition of the wafer 200 in the densification step (S5a), for example, when densifying the STO film,
Process temperature: 400-600 degreeC,
Processing pressure: 50 to 2000 Pa,
Process gas: Ar or N ₂ supply flow rate: 0.5-5000 sccm,
Processing time: 1 to 10 minutes is exemplified, and by maintaining each processing condition constant at a certain value within each range, the amorphous STO film is densified while maintaining the amorphous state. The

  Note that when the processing temperature is lower than 400 ° C., it is difficult to densify the amorphous STO film. On the other hand, when the processing temperature exceeds 600 ° C., the amorphous STO film is easily crystallized, and the underlying ruthenium thin film is easily oxidized. On the other hand, if the processing temperature is 400 to 600 ° C., the amorphous STO film can be sufficiently densified without being crystallized, and the oxidation of the underlying ruthenium thin film can be suppressed. Note that by densifying the amorphous STO film in the amorphous state, the distance between molecules constituting the amorphous STO film can be reduced, thereby further enhancing the barrier effect of suppressing oxygen permeation. Can do. In addition, this densification can facilitate the crystallization of the entire STO film in the crystallization step (S7) described later.

  Further, if the processing pressure is too low, degassing from the formed STO film is likely to occur, and surface roughness is likely to occur on the surface of the STO film. On the other hand, when the processing pressure is 50 to 2000 Pa, it is possible to suppress the occurrence of degassing from the formed STO film, and it is possible to suppress the occurrence of surface roughness on the surface of the STO film.

  On the other hand, if the treatment time is too short, the amorphous STO film cannot be sufficiently densified. For example, when the processing temperature is 400 to 600 ° C. and the processing time is less than 1 minute, the densification of the amorphous STO film may be insufficient. On the other hand, if the treatment time is too long, the amorphous STO film is easily crystallized and the underlying ruthenium thin film is easily oxidized. For example, when the processing temperature is set to 400 to 600 ° C. and the processing time exceeds 10 minutes, the amorphous STO film is crystallized and does not function as an oxygen permeation barrier, and the underlying ruthenium thin film is oxidized. It becomes easy. On the other hand, when the processing temperature is set to 400 to 600 ° C. and the processing time is set to 1 to 10 minutes, the amorphous STO film can be sufficiently densified without crystallization, and the underlying ruthenium thin film is oxidized. Can be sufficiently suppressed.

  Even if the annealing temperature in the densification step (S5a) is the same as the annealing temperature in the crystallization step (S7), the annealing time is adjusted, specifically, the densification step. By making the annealing time in (S5a) shorter than the annealing time in the crystallization step (S7), the STO film can be densified while maintaining an amorphous state without being crystallized.

  As described above, the STO film formed in advance at the first temperature functions as a barrier that suppresses permeation of oxygen when the STO film is formed at the second temperature. However, according to the present embodiment, the STO film previously formed at the first temperature. By further performing a densification step (S5a) on the formed STO film to densify the amorphous STO film while remaining in an amorphous state, it is possible to further enhance the barrier effect for suppressing oxygen permeation. . As a result, it becomes possible to further suppress the oxidation of the underlying ruthenium thin film. In the present embodiment, the STO film is formed by repeating the ALD process (S51) using the first source gas and the ALD process (S52) using the third source gas in the first step (S5). Although the example in which the forming step (S5a) is continuously performed in the same processing chamber 201 has been described, the densification step (S5a) is performed in a processing chamber different from the processing chamber 201 in which the STO film is formed, that is, for annealing. You may make it carry out in a processing chamber.

  An example in which an STO film is formed on a ruthenium thin film by the flow of the second embodiment while using the substrate processing apparatus described in the first embodiment will be described below. In addition, the processing conditions of each step in a present Example are as follows.

First, in the step of repeating the ALD step (S51) using the first source gas and the ALD step (S52) using the third source gas in Step 1 (S5), the processing temperature: 275 ° C., the processing pressure: 10 to An amorphous STO film was formed on the ruthenium thin film at 500 Pa and a film thickness of 5 nm (50 mm).

  In the densification step (S5a), the processing temperature: 580 ° C., the processing pressure: 50 to 2000 Pa, the processing gas: Ar, the processing gas supply flow rate: 0.5 to 5000 sccm, the processing time: 2 minutes, and the formed STO film, It was densified while maintaining the amorphous state.

  In the step of repeating the ALD step (S61) using the first source gas and the ALD step (S62) using the third source gas in Step 2 (S6), the processing temperature is 400 ° C., the processing pressure is 10 to 500 Pa, The film thickness was 5 nm (50 mm), and a poly-state STO film was formed on the densified STO film. The total thickness of the STO film formed in Step 1 (S5) and Step 2 (S6) was 10 nm.

  In the crystallization step (S7), the processing temperature is 580 ° C., the processing pressure is 50 to 2000 Pa, the processing gas is Ar, the processing gas supply flow rate is 0.5 to 5000 sccm, the processing time is 5 minutes, and Step 1 (S5) and The STO film formed in Step 2 (S6) was crystallized.

  As a result of the film formation experiment described above, it was confirmed that the ruthenium thin film as a base was not oxidized by the method of this example. In addition, by performing the crystallization step (S7), it can be confirmed that the STO film formed in the two stages of Step 1 (S5) and Step 2 (S6) is crystallized into a single layer film. It was.

<Third Embodiment of the Present Invention>
In the above-described embodiment, the case where the STO (SrTiO ₃ ) film is formed as the metal oxide film has been described as an example. However, the present invention is not limited to the above-described embodiment. Hereinafter, as another embodiment of the present invention, a case where a BST ((Ba, Sr) TiO ₃ ) film is formed as a metal oxide film containing, for example, strontium, titanium, and barium will be described with reference to FIGS. explain. FIG. 8 is a flowchart of a substrate processing process according to another embodiment of the present invention. FIG. 3 is a sequence diagram as a timing chart showing the opening / closing timing of each valve included in the substrate processing apparatus according to another embodiment of the present invention. Also in this timing chart, the High level indicates that the valve is open, and the Low level indicates that the valve is closed. In the following description, the operation of each part constituting the substrate processing apparatus is controlled by the controller 280.

  As shown in FIG. 8, in this embodiment, in the first step (S5), the ALD process (S51) using the first source gas, the ALD process (S52) using the third source gas, and the second source gas are used. The ALD step (S53) used and the ALD step (S54) using the third source gas are set as one cycle, and this cycle is repeated a predetermined number of times to form a BST film having a desired thickness on the ruthenium thin film. Different from the above-described embodiment. In the second step (S6), the ALD process (S61) using the first source gas, the ALD process (S62) using the third source gas, the ALD process (S63) using the second source gas, The BLD (barium strontium titanate) film having a desired film thickness is formed on the BST film formed in the first step (S5) by repeating this cycle a predetermined number of times with the ALD process (S64) using three source gases as one cycle. The point which forms is different from the above-mentioned embodiment. Others are the same as the above-mentioned embodiment. Hereinafter, the first step (S5) and the second step (S6) according to the present embodiment will be described.

<First Step (S5)>
First, while adjusting the power supplied to the heater 206 and controlling the surface temperature of the wafer 200 to be the first temperature described above, an ALD process using the same first source gas as in the above embodiment (
S51) and the ALD process (S52) using the third source gas are sequentially performed. Note that the preliminary vaporization of the first liquid source in the substrate carry-in step (S1) to the temperature raising step (S4) and the preliminary vaporization of the third liquid source in the ALD step (S51) using the first source gas are as described above. It carries out similarly to embodiment. Simultaneously with the preliminary vaporization of the first liquid source, the on-off valves vb2 and vt2 are opened, and the cleaning of the liquid source channels 21b and 21t of the vaporizers 229b and 229t is started.

  In the ALD process (S52) using the third source gas, a source gas (hereinafter referred to as a second source gas) obtained by vaporizing the second liquid source (organic metal liquid source containing Ba element) is generated in advance ( Pre-vaporization) (PT1-). That is, the on-off valve vb2 is closed and the on-off valve vb1 is opened, and the pressurized gas is supplied from the second pressurized gas supply pipe 237b to supply the second liquid source from the second liquid source supply source 220b to the vaporizer 229b. Then, the second liquid source is vaporized by the vaporizer 229b to generate the second source gas. In the ALD process (S52) using the third source gas, the second source gas is supplied into the processing chamber 201 by opening the on-off valve vb5 while operating the vacuum pump 264 and keeping the on-off valve vb3 closed. The process chamber 201 is bypassed and exhausted. As described above, the second source gas is generated in advance, and the opening and closing of the on-off valves vb3 and vb5 is switched in the ALD process (S53) using the second source gas described later, thereby changing the flow path of the second source gas. Switch. This is preferable because the stable supply of the second source gas into the processing chamber 201 can be started or stopped quickly in the ALD step (S53) using the second source gas.

  Subsequently, an ALD process (S53) using the second source gas is performed.

  In the ALD process (S53) using the second source gas, the opening and closing valves vb4 and vb5 are closed and the opening and closing valve vb3 is opened while the vacuum pump 264 is operated to supply the second source gas into the processing chamber 201. Is started (Ba). The second source gas is dispersed by the shower head 240 and uniformly supplied onto the wafer 200 in the processing chamber 201, and the gas molecules of the second source gas are adsorbed on the surface of the wafer 200. Excess second source gas flows in the exhaust duct 259 and is exhausted to the exhaust port 260. When the second source gas is supplied into the processing chamber 201, the second source gas is prevented from entering the first source gas supply pipe 213s, the third source gas supply pipe 213t, and the ozone gas supply pipe 213o. Further, it is preferable to keep the open / close valves vs4, vt4, and vo4 open and to keep Ar gas flowing in the processing chamber 201 so as to promote diffusion of the second source gas in the processing chamber 201.

  After a predetermined time has elapsed after opening the on-off valve vb3 and starting the supply of the second source gas, the on-off valve vb3 is closed and the on-off valves vb4, vb5 are opened to supply the second source gas into the processing chamber 201. To stop. At the same time, the on-off valve vb1 is closed and the supply of the second liquid material to the vaporizer 229b is also stopped.

  Here, after the on-off valve vb3 is closed and the supply of the second source gas is stopped, the on-off valves vs4, vb4, vt4, and vo4 are kept open, and Ar gas is always allowed to flow into the processing chamber 201. Thereby, the second source gas remaining in the processing chamber 201 is removed, and the inside of the processing chamber 201 is purged with Ar gas (PB1).

In addition, after closing the on-off valve vb1 and stopping the supply of the second liquid raw material, cleaning in the vaporizer 229b is started (PB1). That is, while supplying the pressurized gas from the cleaning liquid pressurized gas supply pipe 237e, the open / close valve vb2 is opened while the open / close valve vb1 is closed, and the cleaning liquid is supplied into the liquid raw material flow path 21b of the vaporizer 229b. The inside of the passage 21b is washed. At this time, the on-off valves vb1 and vb3 are closed and the on-off valves vb2 and vb5 are opened, so that the cleaning liquid supplied into the liquid source channel 21b is cleaned in the liquid source channel 21b and then into the vaporization chamber 20b. To be vaporized. At this time, the second liquid source and the solvent remaining in the liquid source channel 21b are also supplied into the vaporizing chamber 20b and vaporized. The vaporized cleaning liquid, the second liquid source, and the solvent are exhausted from the vent pipe 215b by bypassing the processing chamber 201 without being supplied into the processing chamber 201 through the second source gas supply pipe 213b. The The cleaning of the liquid raw material flow path 21b of the vaporizer 229b is continued, for example, until the next supply of the second liquid raw material to the vaporizer 229b is started (until the next Ti in S52).

  When the purge in the processing chamber 201 is completed, the opening / closing valves vo4, vo5 are closed, the opening / closing valve vo3 is opened, and supply of ozone gas into the processing chamber 201 is started (OxB). The ozone gas is dispersed by the shower head 240 and uniformly supplied onto the wafer 200 in the processing chamber 201, reacts with gas molecules of the second source gas adsorbed on the surface of the wafer 200, and Ba element is formed on the wafer 200. BaO film is formed as a thin film containing Excess ozone gas and reaction byproducts flow through the exhaust duct 259 and are exhausted to the exhaust port 260. When supplying ozone gas into the processing chamber 201, in order to prevent ozone gas from entering the first source gas supply pipe 213s, the second source gas supply pipe 213b, and the third source gas supply pipe 213t, It is preferable to keep the open / close valves vs4, vb4, and vt4 open so that the ozone gas is diffused in the processing chamber 201 and to keep Ar gas flowing in the processing chamber 201 at all times.

  After a predetermined time has elapsed after opening the opening / closing valve vo3 and starting the supply of ozone gas, the opening / closing valve vo3 is closed and the opening / closing valves vo4, vo5 are opened to stop the supply of ozone gas into the processing chamber 201.

  After the opening / closing valve vo3 is closed and the supply of ozone gas is stopped, the opening / closing valves vs4, vb4, vt4, vo4 are kept open, and Ar gas is always allowed to flow into the processing chamber 201. Thereby, ozone gas and reaction by-products remaining in the processing chamber 201 are removed, and the inside of the processing chamber 201 is purged with Ar gas (PB2).

  In the ALD process (S53) using the second source gas, a source gas (hereinafter referred to as a third source gas) obtained by vaporizing the third liquid source (organometallic liquid source containing Ti element) is generated in advance ( Pre-vaporization) (PB1 ~). That is, the open / close valve vt2 is closed and the open / close valve vt1 is opened, and the pressurized gas is supplied from the third pressurized gas supply pipe 237t to supply the third liquid material from the third liquid material supply source 220t to the vaporizer 229t. Then, the third liquid source is vaporized by the vaporizer 229t to generate a third source gas. In the ALD process (S53) using the second source gas, the third source gas is supplied into the processing chamber 201 by opening the on-off valve vt5 while operating the vacuum pump 264 and keeping the on-off valve vt3 closed. The process chamber 201 is bypassed and exhausted. As described above, the third source gas is generated in advance, and the opening and closing of the open / close valves vt3 and vt5 is switched in the ALD step (S54) using the third source gas, which will be described later. Switch. Thereby, in the ALD process (S54) using the third source gas, stable supply of the third source gas into the processing chamber 201 can be started or stopped quickly, which is preferable.

Subsequently, an ALD process (S54) using the third source gas is performed to generate a TiO ₂ film as a thin film containing Ti element on the wafer 200. Note that the sequence of the ALD step (S54) using the third source gas is the same as the sequence of the ALD step (S52) using the third source gas.

After the ALD step (S54) using the third source gas, steps S51 to S54 are set as one cycle, and this cycle is repeated a predetermined number of times, whereby a BST film having a desired film thickness on the ruthenium thin film, that is, (Ba, Sr) ) A TiO ₃ thin film is formed. In the first step (S5), since the surface temperature of the wafer 200 is set to the first temperature, the BST film is in an amorphous state and the oxidation of the underlying ruthenium thin film is suppressed.

<Second Step (S6)>
Subsequently, the second step (S6) is performed. In the second step (S6), a BST film as a metal oxide film containing, for example, strontium, titanium, and barium is formed on the BST film formed in the first step (S5) at a second temperature exceeding the first temperature. Form up to film thickness. Specifically, the power supplied to the heater 206 is adjusted to control the surface temperature of the wafer 200 to be the second temperature, while the ALD step (S61) using the first source gas, The ALD process (S62), the ALD process (S63) using the second source gas, and the ALD process (S64) using the third source gas are set as one cycle, and this cycle is repeated a predetermined number of times. A BST film having a desired film thickness is formed on the formed BST film. The ALD process (S61) using the first source gas, the ALD process (S62) using the third source gas, the ALD process (S63) using the second source gas, and the ALD process using the third source gas. The sequence of (S64) includes the ALD process (S51) using the first source gas, the ALD process (S52) using the third source gas, the ALD process (S53) using the second source gas, and the third. This is the same as the sequence of the ALD process (S54) using the source gas. Here, the second temperature is preferably a temperature equal to or higher than the first temperature, and may be the same temperature as the first temperature, but is preferably a temperature higher than the first temperature. Further, the BST film formed in the second step (S6) may be in an amorphous state, but is preferably in a poly (polycrystalline) state. That is, it is preferable to crystallize while forming a film. The BST film formed in the second step (S6) is preferably formed so as to be thicker than the BST film formed in the first step (S5). That is, it is preferable to form a thin BST film in the first step (S5) and to form a thick BST film in the second step (S6). When forming the BST film in the second step (S6), the amorphous BST film previously formed in the first step (S5) functions as an oxygen permeation barrier, so that the oxidation of the underlying ruthenium thin film is suppressed. The Here, when the BST film formed in the first step (S5) is in a polycrystalline state, when forming the BST film in the second step (S6), the crystal of the BST film formed in the first step (S5) It is conceivable that oxygen permeates through the grain boundary and the underlying ruthenium thin film is oxidized. On the other hand, when the BST film formed in the first step (S5) is in an amorphous state, there is no crystal grain boundary in the amorphous BST film, so a path through which oxygen passes is not formed. When forming the BST film in (S6), the permeation of oxygen can be blocked and the oxidation of the underlying ruthenium thin film can be suppressed. Note that the method of the second embodiment described above may be applied to this embodiment. That is, the amorphous BST film formed at the first temperature may be further annealed to maintain the amorphous state and densify the BST film. As a result, it is possible to further enhance the barrier effect of suppressing the permeation of oxygen in the amorphous BST film.

<Other Embodiments of the Present Invention>
In the above-described embodiment, the case where the STO (SrTiO ₃ ) film or the BST ((Ba, Sr) TiO ₃ ) film is formed as the metal oxide film has been described, but the present invention is not limited to the above-described embodiment. That is, a metal oxide containing at least one element selected from the group consisting of hafnium, yttrium, lanthanum, aluminum, zirconium, strontium, titanium, barium, tantalum and niobium on a substrate having a metal thin film formed on the surface. The present invention can also be suitably applied when forming a film. Moreover, although the above-mentioned embodiment demonstrated the case where the ruthenium thin film was formed as a base metal thin film, this invention is not limited to the above-mentioned embodiment. That is, the present invention can be suitably applied also when a metal oxide film is formed on a substrate on which a metal thin film other than a ruthenium thin film is formed. For example, a (ZrO ₂ ) _n (Y ₂ O ₃ ) _1-n film is formed using a titanium nitride (TiN) thin film as a base, or a (ZrO ₂ ) _n (Al ₂ O ₃ ) ₁₋ is formed using a titanium nitride thin film as a base. _The present invention can be suitably applied also when forming an _n film.

  Moreover, although the above-mentioned embodiment demonstrated the example which forms the same kind of film | membrane by 1st step (S5) and 2nd step (S6), this invention is not limited to this form. For example, different types of films are formed in the first step (S5) and the second step (S6), such as forming an STO film in the first step (S5) and forming a BST film in the second step (S6). You may make it do. That is, a laminated film in which different types of films are laminated in the first step (S5) and the second step (S6) may be formed.

  In the above-described embodiment, the case where the metal oxide film is formed by the ALD method has been described. However, the present invention is not limited to the above-described embodiment, and the present invention is also applicable when the metal oxide film is formed by the CVD method. Is suitably applicable.

  Moreover, although the above-mentioned embodiment demonstrated the example which forms into a film using the single-wafer | sheet-fed ALD apparatus which processes one board | substrate at a time as a substrate processing apparatus, this invention is not limited to the above-mentioned embodiment. . For example, the film may be formed using a batch type vertical ALD apparatus that processes a plurality of substrates at a time as a substrate processing apparatus. The vertical ALD apparatus will be described below.

  FIG. 9 is a schematic configuration diagram of a vertical processing furnace of a vertical ALD apparatus suitably used in the present embodiment. FIG. 9A shows a processing furnace 302 portion in a vertical cross section, and FIG. 9B shows a processing furnace. 302 part is shown with the sectional view on the AA line of Fig.7 (a).

  As shown in FIG. 7A, the processing furnace 302 has a heater 307 as a heating means (heating mechanism). The heater 307 has a cylindrical shape and is vertically installed by being supported by a heater base (not shown) as a holding plate.

Inside the heater 307, a process tube 303 as a reaction tube is disposed concentrically with the heater 307. The process tube 303 is made of a heat-resistant material such as quartz (SiO ₂ ) or silicon carbide (SiC), and has a cylindrical shape with the upper end closed and the lower end opened. A processing chamber 301 is formed in a cylindrical hollow portion of the process tube 303 so that wafers 200 as substrates can be accommodated in a state of being aligned in multiple stages in a vertical posture in a horizontal posture by a boat 317 described later.

  A manifold 309 is disposed below the process tube 303 concentrically with the process tube 303. The manifold 309 is made of, for example, stainless steel and is formed in a cylindrical shape with an upper end and a lower end opened. The manifold 309 is engaged with the process tube 303 and is provided to support the process tube 303. An O-ring 320a as a seal member is provided between the manifold 309 and the process tube 303. Since the manifold 309 is supported by the heater base, the process tube 303 is vertically installed. A reaction vessel is formed by the process tube 303 and the manifold 309.

In the manifold 309, a first nozzle 333a as a first gas introduction part and a second nozzle 333b as a second gas introduction part penetrate through the side wall of the manifold 309, and a part thereof is a processing chamber. 301 is connected so as to communicate with each other. Each of the first nozzle 333 a and the second nozzle 333 b has an L shape having a horizontal portion and a vertical portion, the horizontal portion is connected to the manifold 309, and the vertical portion of the reaction tube 303 constituting the processing chamber 301. An arc-shaped space between the inner wall and the wafer 200 is provided on the inner wall above the lower portion of the reaction tube 303 along the loading direction of the wafer 200. A first gas supply hole 348a and a second gas supply hole 348b, which are supply holes for supplying gas, are provided on the side surfaces of the vertical portions of the first nozzle 333a and the second nozzle 333b, respectively. The first gas supply hole 348a and the second gas supply hole 348b have the same opening area from the lower part to the upper part, and are provided at the same opening pitch.

  The gas supply system connected to the first nozzle 333a and the second nozzle 333b is the same as in the above-described embodiment. However, the present embodiment is different from the above-described embodiment in that the source gas supply pipe 213 is connected to the first nozzle 333a and the ozone gas supply pipe 213o is connected to the second nozzle 333b. That is, in this embodiment, source gas (1st source gas, 2nd source gas, 3rd source gas) and ozone gas are supplied by a separate nozzle. In addition, you may make it supply each raw material gas with a separate nozzle.

  The manifold 309 is provided with an exhaust pipe 331 that exhausts the atmosphere in the processing chamber 301. As a vacuum exhaust device, a pressure sensor 345 as a pressure detector and an APC (Auto Pressure Controller) valve 342 as a pressure regulator are provided on the downstream side opposite to the connection side of the exhaust pipe 331 with the manifold 309. The vacuum pump 346 is connected so that the pressure in the processing chamber 301 can be evacuated to a predetermined pressure (degree of vacuum). The APC valve 342 is opened and closed so that the processing chamber 301 can be evacuated and stopped by evacuation, and the pressure in the processing chamber 301 can be adjusted by adjusting the valve opening. It is a valve.

  Below the manifold 309, a seal cap 319 is provided as a furnace port lid that can airtightly close the lower end opening of the manifold 309. The seal cap 319 is brought into contact with the lower end of the manifold 309 from the lower side in the vertical direction. The seal cap 319 is made of a metal such as stainless steel and is formed in a disk shape. On the upper surface of the seal cap 319, an O-ring 320b is provided as a seal member that comes into contact with the lower end of the manifold 309. On the opposite side of the seal cap 319 from the processing chamber 301, a rotation mechanism 367 for rotating a boat 317 described later is installed. A rotation shaft 355 of the rotation mechanism 367 passes through the seal cap 319 and is connected to the boat 317, and is configured to rotate the wafer 200 by rotating the boat 317. The seal cap 319 is configured to be moved up and down in the vertical direction by a boat elevator 315 as an elevating mechanism disposed vertically outside the process tube 303, whereby the boat 317 is carried into and out of the processing chamber 301. It is possible to do.

  The boat 317 as a substrate holder is made of a heat-resistant material such as quartz or silicon carbide, and is configured to hold a plurality of wafers 200 in a horizontal posture and in a state where the centers are aligned with each other and held in multiple stages. Yes. A heat insulating member 318 made of a heat resistant material such as quartz or silicon carbide is provided at the lower part of the boat 317 so that heat from the heater 307 is not easily transmitted to the seal cap 319 side. The heat insulating member 318 may be composed of a plurality of heat insulating plates made of a heat resistant material such as quartz or silicon carbide, and a heat insulating plate holder that holds the heat insulating plates in a horizontal posture in multiple stages. A temperature sensor 363 as a temperature detector is installed in the process tube 303, and the temperature in the processing chamber 301 is adjusted by adjusting the power supply to the heater 307 based on the temperature information detected by the temperature sensor 363. Is configured to have a predetermined temperature distribution. The temperature sensor 363 is provided along the inner wall of the process tube 303, similarly to the first nozzle 333a and the second nozzle 333b.

  The controller 380 as a control unit (control means) includes an APC valve 342, a heater 307, a temperature sensor 363, a vacuum pump 346, a boat rotation mechanism 367, a boat elevator 315, open / close valves vs1 to vs6, vb1 to vb6, vt1 to vt6, The operations of vo3 to vo6, liquid flow rate controllers 221s, 221b, 221t, 222s, 222b, 222t, flow rate controllers 224s, 224b, 224t, 221o, 222o, 224o and the like are controlled.

  Next, a substrate processing process for forming a thin film on the wafer 200 by the ALD method will be described as one process of the manufacturing process of the semiconductor device using the processing furnace 302 of the vertical ALD apparatus according to the above configuration. In the following description, the operation of each part constituting the vertical ALD apparatus is controlled by the controller 380.

  A plurality of wafers 200 are loaded into the boat 317 (wafer charge). 7A, the boat 317 holding the plurality of wafers 200 is lifted by the boat elevator 315 and loaded into the processing chamber 301 (boat loading). In this state, the seal cap 319 is in a state of sealing the lower end of the manifold 309 via the O-ring 320b.

  The processing chamber 301 is evacuated by an evacuation device 346 so that a desired pressure (degree of vacuum) is obtained. At this time, the pressure in the processing chamber 301 is measured by the pressure sensor 345, and the pressure regulator 342 is feedback-controlled based on the measured pressure. In addition, heating is performed by the heater 307 so that the inside of the processing chamber 301 has a desired temperature. At this time, feedback control of the power supply to the heater 307 is performed based on the temperature information detected by the temperature sensor 363 so that the inside of the processing chamber 301 has a desired temperature distribution. Then, the wafer 200 is rotated by rotating the boat 317 by the rotation mechanism 367.

Thereafter, for example, as in the first to third embodiments described above, a desired film thickness is formed on the wafer 200 by performing the first step (S5), the second step (S6), and the crystallization step (S7). SrTiO ₃ thin film and (Ba, Sr) TiO ₃ thin film are formed.

  Thereafter, the seal cap 319 is lowered by the boat elevator 315 to open the lower end of the manifold 309, and the lower end of the manifold 309 is held in the state where the wafer 200 after the thin film having a desired film thickness is held on the boat 317. From the process tube 303 to the outside (boat unloading). Thereafter, the processed wafer 200 is taken out from the boat 317 (wafer discharge).

<Preferred embodiment of the present invention>
Hereinafter, preferred embodiments of the present invention will be additionally described.

  According to one aspect of the present invention, at least one selected from the group consisting of hafnium, yttrium, lanthanum, aluminum, zirconium, strontium, titanium, barium, tantalum, and niobium on a substrate having a metal thin film formed on the surface. A first step of forming a metal oxide film containing the above elements at a first temperature at which the metal thin film is not oxidized and at which the metal oxide film is in an amorphous state; and A metal oxide film containing at least one element selected from the group consisting of hafnium, yttrium, lanthanum, aluminum, zirconium, strontium, titanium, barium, tantalum, and niobium is formed on the formed metal oxide film. The second step of forming the target film thickness at the second temperature that exceeds (becomes) one temperature. Tsu method of manufacturing a semiconductor device having a flop, is provided.

According to another aspect of the present invention, at least one selected from the group consisting of hafnium, yttrium, lanthanum, aluminum, zirconium, strontium, titanium, barium, tantalum, and niobium on a substrate having a metal thin film formed on the surface. A metal oxide film containing more than one kind of element is formed at a temperature at which the metal thin film does not oxidize and at a first temperature at which the metal oxide film is in an amorphous state. Thereafter, the metal oxide film is amorphous. A first step of annealing the metal oxide film while maintaining the state to densify the metal oxide film, and hafnium, yttrium, lanthanum, aluminum, zirconium on the metal oxide film formed in the first step Selected from the group consisting of strontium, titanium, barium, tantalum and niobium A metal oxide film containing Kutomo one or more elements, at the first temperature or more second temperature, a method of manufacturing a semiconductor device having a second step of forming up to a thickness of the target, is provided.

  Preferably, the metal oxide film formed in the second step is a poly state metal oxide film or an amorphous state metal oxide film that is easier to crystallize than the amorphous state metal oxide film formed in the first step. It is.

  Preferably, the metal thin film is a ruthenium thin film, and the metal oxide film is a strontium titanate (STO) film or a barium strontium titanate (BST) film.

  Moreover, Preferably, the said 1st temperature is 200-350 degreeC, and the said 2nd temperature is 300-400 degreeC.

  Moreover, Preferably, the said 1st temperature is 200-300 degreeC, and the said 2nd temperature is 350-400 degreeC.

  Preferably, the metal oxide film is formed by an ALD method or a CVD method.

  Preferably, the metal oxide film is formed by an ALD method.

  Preferably, the metal oxide film includes a raw material containing at least one element selected from the group consisting of hafnium, yttrium, lanthanum, aluminum, zirconium, strontium, titanium, barium, tantalum, and niobium, and an oxidizing agent. Are alternately supplied.

  Preferably, after forming the metal oxide film to the target film thickness, the metal oxide film is annealed to crystallize the entire metal oxide film formed in the first step and the second step. To do.

  According to still another aspect of the present invention, a processing chamber for processing a substrate and a hafnium raw material, an yttrium raw material, a lanthanum raw material, an aluminum raw material, a zirconium raw material, a strontium raw material, a titanium raw material, a barium raw material, a tantalum raw material, and a niobium raw material are included. A raw material supply system for supplying at least one raw material selected from the group; an oxidant supply system for supplying an oxidant; a heater for heating a substrate in the processing chamber; and the raw material and the oxidation in the processing chamber. And at least one selected from the group consisting of hafnium, yttrium, lanthanum, aluminum, zirconium, strontium, titanium, barium, tantalum and niobium on a substrate having a metal thin film formed on the surface. The metal oxide film containing the element is at a temperature at which the oxidation of the metal thin film does not occur, The metal oxide film is formed at a first temperature at which the metal oxide film is in an amorphous state, and is formed of hafnium, yttrium, lanthanum, aluminum, zirconium, strontium, titanium, barium, tantalum, and niobium on the metal oxide film in the amorphous state. The raw material supply system and the oxidant supply so that a metal oxide film containing at least one element selected from the group is formed to a target film thickness at a second temperature exceeding (above) the first temperature. There is provided a substrate processing apparatus having a system and a controller for controlling the heater.

200 wafer (substrate)
201 processing chamber 206 heater 280 controller

Claims (7)

At least one selected from the group consisting of hafnium, yttrium, lanthanum, aluminum, zirconium, strontium, titanium, barium, tantalum and niobium on a substrate having a metal thin film formed on the surface using a raw material and an oxidizing agent The metal oxide film containing the above elements is at a temperature at which abnormal growth of crystal grains constituting the metal thin film due to oxidation of the metal thin film does not occur, and at a first temperature at which the metal oxide film is in an amorphous state. A first step of forming;
Using the raw material and the oxidizing agent, the amorphous state of the metal oxide film is maintained on the amorphous metal oxide film formed in the first step, while hafnium, yttrium, lanthanum, aluminum, zirconium, strontium, A second step of forming a metal oxide film containing at least one element selected from the group consisting of titanium, barium, tantalum, and niobium to a target film thickness at a second temperature that exceeds the first temperature; A method for manufacturing a semiconductor device, comprising: 2. The method of manufacturing a semiconductor device according to claim 1, wherein the metal oxide film formed in the second step is a poly state metal oxide film or an amorphous state metal oxide film. 3. The semiconductor according to claim 1, wherein the metal oxide film formed in the first step and the metal oxide film formed in the second step are both formed by an ALD method or a CVD method. Device manufacturing method. The metal oxide film formed in the first step and the metal oxide film formed in the second step are selected from the group consisting of hafnium, yttrium, lanthanum, aluminum, zirconium, strontium, titanium, barium, tantalum, and niobium. 4. The method of manufacturing a semiconductor device according to claim 1, wherein the semiconductor device is formed by alternately supplying a raw material containing at least one kind of element and an oxidizing agent. 5. After the metal oxide film is formed to the target film thickness by the first step and the second step, the metal oxide film is annealed to form the metal oxide formed in the first step and the second step. The method for manufacturing a semiconductor device according to claim 1, wherein the entire film is crystallized. At least one selected from the group consisting of hafnium, yttrium, lanthanum, aluminum, zirconium, strontium, titanium, barium, tantalum and niobium on a substrate having a metal thin film formed on the surface using a raw material and an oxidizing agent The metal oxide film containing the above elements is at a temperature at which abnormal growth of crystal grains constituting the metal thin film due to oxidation of the metal thin film does not occur, and at a first temperature at which the metal oxide film is in an amorphous state. A first step of forming;
Using the raw material and the oxidizing agent, the amorphous state of the metal oxide film is maintained on the amorphous metal oxide film formed in the first step, while hafnium, yttrium, lanthanum, aluminum, zirconium, strontium, A second step of forming a metal oxide film containing at least one element selected from the group consisting of titanium, barium, tantalum, and niobium to a target film thickness at a second temperature that exceeds the first temperature; A substrate processing method comprising: A processing chamber for processing the substrate;
A raw material supply system for supplying at least one raw material selected from the group consisting of hafnium raw material, yttrium raw material, lanthanum raw material, aluminum raw material, zirconium raw material, strontium raw material, titanium raw material, barium raw material, tantalum raw material, niobium raw material;
An oxidant supply system for supplying an oxidant;
A heater for heating the substrate in the processing chamber;
Supplying the raw material and the oxidizing agent into the processing chamber;
A metal oxide film containing at least one element selected from the group consisting of hafnium, yttrium, lanthanum, aluminum, zirconium, strontium, titanium, barium, tantalum and niobium is formed on a substrate having a metal thin film formed on the surface. A first step of forming at a first temperature at which the abnormal growth of crystal grains constituting the metal thin film due to oxidation of the metal thin film does not occur and the metal oxide film becomes in an amorphous state; Using the oxidant, the amorphous state of the metal oxide film is maintained on the amorphous metal oxide film formed in the first step, while hafnium, yttrium, lanthanum, aluminum, zirconium, strontium, titanium, At least selected from the group consisting of barium, tantalum and niobium Performing the second step of forming a metal oxide film containing one or more elements to a target film thickness at a second temperature that exceeds the first temperature, and the raw material supply system, the oxidant supply system, and A controller for controlling the heater;
A substrate processing apparatus comprising:

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