JP5160672B2 - Coaxial multi-axis output mechanism - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a multiple coaxial-shaft output mechanism which is arranged to extract outputs of a plurality of coaxial shafts (two or more shafts) of simple structures using an eccentric rocking type reduction gear. <P>SOLUTION: The multiple coaxial-shaft output mechanism comprises a plurality of pairs of eccentric rocking type reduction gears (70) each of which is composed of an eccentric body shaft (71), an eccentric body (72) provided in the eccentric body shaft, an inner gear rocking body (75) rotated rockingly by the rotation of the eccentric body, and outer gears (15 and 25) engaged with the inner gear rocking body; and output shafts (12 and 22) which are arranged coaxially as many as the pairs of the eccentric rocking type reduction gears. The outer gears of the plurality of pairs of eccentric rocking type reduction gears are attached to respective output shafts which correspond to them with spaces in the axial direction, and a support (31) which supports the eccentric body shafts of the plurality of pairs of eccentric rocking type reduction gears rotatably is fixed, and thus the mechanism is constituted so that it may receive rotation from the eccentric body shafts and output it coaxially to the plurality of output shafts from the outer gears. <P>COPYRIGHT: (C)2012,JPO&amp;INPIT

Description

  The present invention relates to a coaxial multi-axis output mechanism capable of outputting from a plurality of output shafts arranged coaxially.

  In fields that require elaborate processing that dislikes particles such as semiconductor wafers and LCD (liquid crystal display) glass substrates, the conveyed product cannot be conveyed (cannot be gripped) by chucking (carrying the conveyed product). For this reason, as a handling method in such a transfer field, the transfer is performed by a transfer device of a method in which a transfer object is only placed (supported only) on a hand (end effector) portion.

  However, in such a transport apparatus, there are also supports for organic substances (such as rubber) and supports for inorganic substances (such as ceramics), and the organic substance support has a relatively large frictional force, but cannot be used for high-temperature parts. There is a problem.

  For this reason, in many cases, the conveyed product (wafer or the like) is held only by the frictional force with the hand support portion. However, if the transported object is suddenly moved or moved while vibrating, the transported object slips and causes a deviation, resulting in problems such as generation of particles / positioning defects and damage to the transported object. . For this reason, a transport apparatus that can be transported (smoothly transported) with as little vibration (acceleration) as possible is required for the transport apparatus used in such an elaborate transport field.

  Conventionally, a direct drive (DD) type drive device has been used in such a transfer device that dislikes particles and requires elaborate processing, such as a semiconductor wafer or LCD (liquid crystal display) glass substrate ( JP-A-3-281183). However, the DD drive device has a problem that the drive device is large and the power supply capacity is large because the output density (torque / volume, torque / motor capacity) is small.

  On the other hand, there is also a transport device that uses a reduction gear having a gear mechanism in order to make the drive device compact. By using a reduction gear having a gear mechanism, the drive device can be made compact.

  Japanese Patent Application Laid-Open No. 2-107846 discloses an eccentric body shaft, an eccentric body provided on the eccentric body shaft, an internal tooth rocking body that penetrates through the eccentric body and is rotated by rotation of the eccentric body, An eccentric oscillating speed reducer that includes an external gear that meshes with an internal oscillating body is disclosed.

Japanese Patent Laid-Open No. 3-281183 Japanese Patent Laid-Open No. 2-107846

  In the transfer device such as the semiconductor wafer or LCD glass substrate as described above, it is preferable to use a coaxial multiple (for example, two) axis drive device in order to extend and rotate the arm having the link mechanism.

  However, when a reduction gear having a gear mechanism used in the above-described transport device is to be connected to a plurality of coaxial axes, a plurality of reduction gears are arranged on the same plane (not on the same axis), and further a gear or the like. There was a limit to the arrangement.

  Further, the one described in Japanese Patent Laid-Open No. 2-107846 does not have a structure that can output a plurality of coaxial (for example, two) axes. In order to provide two or more axes of output, the reduction gears must be arranged in parallel, and the one described in Japanese Patent Laid-Open No. 2-107846 cannot be configured coaxially. When used in a transfer device such as a base, the transfer device has become large.

  The present invention provides a coaxial multi-axis output mechanism that can solve the various problems associated with the prior art as described above and can take out the output of a coaxial multi-axis (two or more axes) with a simple structure. Objective.

The present invention, the foregoing problems, the eccentric body shaft, an eccentric body provided on the eccentric body shaft, said eccentric member is penetrated, the inner teeth swinging body is swung rotated by the rotation of the eccentric, made from the UchihaYura element and meshing external gears and a plurality of sets of the eccentric oscillating speed reducer and said eccentric oscillating speed reducer set speed and the output shaft disposed in the same number of coaxial consisting plurality The set of eccentric oscillating speed reducers are driven by a plurality of drive motors , and the external gears of the plurality of sets of eccentric oscillating speed reducers are attached to the corresponding output shafts at intervals in the axial direction. , it is fixed a support for rotatably supporting the eccentric body shaft of the plurality of sets of the eccentric oscillating speed reducer, enter the rotation from the sets of the eccentric bodies shaft plurality, the plurality of the said external gear This is achieved by a coaxial multi-axis output mechanism that enables coaxial output to each output shaft.

  In the eccentric oscillating speed reducer, the carrier for rotating and supporting the eccentric body shaft is composed of a rigid body. Therefore, according to the present invention, even if the transported material is heavy, it can be a small and compact transport device. It is possible to carry heavy objects.

  Further, in an embodiment of the present invention, the transport device has a plurality of output shafts arranged coaxially, a plurality of the eccentric oscillating speed reducers are arranged in the axial direction, and the plurality of output shafts are arranged. It is preferable to use a transport device using an eccentric oscillating speed reducer that can extract a coaxial output from the shaft. By adopting this configuration, a plurality of eccentric oscillating speed reducers can be arranged vertically in the axial direction, and the conveying device can be made small and compact.

  According to the present invention, there is provided a coaxial multi-axis output mechanism which can solve various problems associated with the prior art and can take out the output of a simple coaxial multi-axis (two or more axes).

  According to the present invention, it is possible to make the drive unit of the coaxial biaxial configuration, so that it is possible to reduce the size.

  In the eccentric oscillating speed reducer, since the carrier for rotating and supporting the eccentric body shaft is composed of a rigid body, the present invention is used in the transport device, so that the transported device is small and compact even if the transported material becomes heavy. It is possible to carry heavy objects.

  In addition, the coaxial multi-axis output mechanism according to the present invention is used in the conveying device, and a plurality of eccentric oscillating type speed reducers are arranged in the axial direction, so that the coaxial output can be taken out from the plurality of output shafts. By using a transfer device that uses a mold speed reducer, a plurality of eccentric oscillating speed reducers can be arranged vertically in the axial direction, and the transfer device can be made compact and compact.

It is a longitudinal cross-sectional view of one Example of this invention. It is XX sectional drawing of FIG. It is a cross-sectional view of FIG. 1, (a) is AA sectional drawing, (b) is BB sectional drawing, (c) is CC sectional drawing. It is a longitudinal cross-sectional view of a reference example. It is DD sectional drawing of FIG. It is a longitudinal cross-sectional view of another reference example.

  Hereinafter, the present invention will be described in detail with reference to the accompanying drawings. 1 and 2 show an embodiment of a transport apparatus using a coaxial multi-axis output mechanism according to the present invention in which two output shafts are arranged coaxially, and FIG. 1 is a longitudinal section of an embodiment of the present invention. 2 is a cross-sectional view taken along line XX of FIG. 1, FIG. 3 is a cross-sectional view of FIG. 1, (a) is a cross-sectional view taken along line AA, (b) is a cross-sectional view taken along line BB, ) Is a C-C cross-sectional view.

  The arms 11 and 21 of the transfer apparatus 10 are provided in a processing chamber for processing semiconductor wafers, LCD (liquid crystal display) glass substrates and the like such as a clean room, and the processing chamber is depressurized (so-called vacuum state). A drive device 30 for driving the arms 11 and 21 is provided outside the processing chamber, and the boundary of the drive device 30 is a mounting mount 40 for the transfer device 10. A known transfer table (not shown) on which a semiconductor wafer, a substrate or the like is placed is connected to the tips of the arms 11 and 21.

  The conveying device 10 has a plurality of (2 in the embodiment) output shafts coaxially, which are a hollow output shaft (outer shaft) 12 and a solid output shaft (inner shaft) 22 that penetrates the hollow portion of the hollow output shaft 12. . Reference numeral 31 denotes a carrier of the driving device 30.

  A hollow output shaft (outer shaft) 12 and a solid output shaft (outer shaft) 12 which are coaxial with each other by providing a bellows 41 which can be expanded and contracted between the lower surface of the mounting mount 40 and the carrier 31 of the transport device 10 in a sealed manner. A drive device 30 that seals the periphery of the inner shaft 22 and drives the arms 11 and 21 is provided outside the processing chamber.

  A vacuum seal 19 is provided on the hollow output shaft (outer shaft) 12, and a vacuum seal 29 is provided on the solid output shaft (inner shaft) 22. The vacuum seals 19 and 21 are for maintaining a vacuum inside the processing chamber and preventing dust from being released into the processing chamber. In the illustrated embodiment, three vacuum seals 19 and 21 are stacked in the axial direction. Two on the lower side prevent air from leaking from the drive device side to the processing chamber side, while one on the arm 11 and 21 side prevents dust from being released into the processing chamber. As the vacuum seals 19 and 21, for example, a contact-type seal in which a lip seal is pressed against a shaft, a magnetic fluid seal, or the like is used. The contact-type seal has the advantage that the apparatus can be made compact and maintenance can be easily performed.

  A hollow output shaft (outer shaft) 12 and a solid output shaft (inner shaft) 22 that are coaxial with each other are rotatably supported by bearings 13 and 23 with respect to the carrier 31 of the transport device 10. That is, the hollow output shaft (outer shaft) 12 is rotatably supported by a bearing 13 provided inside the carrier 31, and the solid output shaft (inner shaft) 22 is provided inside the hollow output shaft (outer shaft) 12. The bearing 23 is rotatably supported in the hollow output shaft (outer shaft) 12.

  A hollow output shaft (outer shaft) 12 and a solid output shaft (inner shaft) 22 are respectively provided with a first arm 11 and a second arm 21 for handling a semiconductor wafer, an LCD (liquid crystal display) glass substrate and the like by bolts 14 and 24, respectively. It is worn.

  The hollow output shaft (outer shaft) 12 and the solid output shaft (inner shaft) 22 that are coaxial with each other are provided with corresponding eccentric oscillating speed reducers 70 from the outer shaft drive motor 51 and the inner shaft drive motor 61, respectively. Via the external gears 15 and 25 which are attached to the hollow output shaft (outer shaft) 12 and the solid output shaft (inner shaft) 22 at an interval in the axial direction, the driving force is transmitted.

  As described above, the external gears 15 and 25 are attached to the plurality (two) of the output shafts 12 and 22 at intervals in the axial direction. That is, one external gear (external gear for outer shaft) 15 having a donut shape is fastened to the lower end portion of the hollow output shaft (outer shaft) 12 by the bolt 16. The solid output shaft (inner shaft) 22 passes through the hollow portion of the hollow output shaft (outer shaft) 12 and the outer gear 15 for the outer shaft, and the other disk-shaped external gear at the lower end thereof. (External gear for inner shaft) 25 is fastened by a bolt 26.

  Both external gears (external gears for external shafts, external gears for internal shafts) 15 and 25 attached to a plurality of (two) output shafts 12 and 22 at intervals in the axial direction are respectively eccentric. This is an external gear of the dynamic reduction gear 70.

(In the embodiment of FIG. 1, indicated by reference numeral 70 ₁ and 70 ₂₎ each eccentrically oscillating speed reducer 70 (in the embodiment of FIG. 1, indicated by reference numeral 71 ₁ and 71 ₂₎ is eccentric body shafts 71 and (in the example of FIG. 1, reference numeral 72 ₁ and 72 shown in ₂₎ eccentric bodies 72 provided on the eccentric body shaft 71 and the eccentric member 72 penetrates, is swung rotated by rotation of the eccentric member 72 (in the embodiment of FIG. 1, reference numeral 75 ₁ and 75 shown in ₂₎ UchihaYura body 75 and is constituted by a UchihaYura body 75 and meshing with the above-described external gears 15 and 25 Prefecture, eccentrics The carrier 31 supporting the shaft 71 is a support of the present invention and is fixed against rotation.

  Both external teeth attached to the output shafts 12 and 22 with an interval in the axial direction from the outer shaft driving motor 51 and the inner shaft driving motor 61 through the eccentric oscillating speed reducer 70 with the structure described below. Power is transmitted to gears 15 and 25 (external gears for the outer shaft and external gears for the inner shaft). The structures of the eccentric oscillating speed reducers 70 are similar. In the figure, the driving element of the hollow output shaft (outer shaft) 12 is given a subscript 1 and the solid output shaft (inner Although the subscript 2 is attached to the driving element of the shaft 22, the subscript is omitted in the following description.

  As shown in FIG. 1, an outer shaft speed reducer center gear 18 and an inner shaft speed reducer center gear 28 are respectively provided on the lower extension lines of the rotation axis of the hollow output shaft (outer shaft) 12 and the solid output shaft (inner shaft) 22. It is provided coaxially so that it can rotate. Each of the center gears 18 and 28 is integrally formed with upper and lower gears and a boss connecting them.

  Further, as shown in FIG. 1, an outer shaft driving motor 51 and an inner shaft driving motor 61 are attached to the lower end portion of the carrier 31 of the transport device 10. Pinions 52 and 62 are provided on the output shafts of the outer shaft drive motor 51 and the inner shaft drive motor 61, respectively. The pinions 52 and 62 correspond to the center gear 18 for the outer shaft reducer and the center gear 28 for the inner shaft reducer, respectively. Meshes with the lower gear. The upper gears of the center gears 18 for the outer shaft speed reducers and the center gears 28 for the inner shaft speed reducers mesh with the corresponding transmission gears 73 via the idler gears 17 for the outer shaft speed reducers and the idler gears 27 for the inner shaft speed reducers. .

  In this embodiment, three transmission gears 73 are provided around the axis of each output shaft (hollow output shaft (outer shaft) 12, solid output shaft (inner shaft) 22), and each transmission gear 73 corresponds. Meshing with the idler gears 17 and 27 to transmit the driving force. Note that the number of transmission gears 73 is not limited to three, but one or more is sufficient.

  Each transmission gear 73 is provided on a corresponding eccentric body shaft 71, and the eccentric body shaft 71 has an eccentric body 72. Each eccentric body shaft 71 is supported by a bearing 74. The eccentric body 72 penetrates the two internal tooth rocking bodies 75, and a roller 77 (FIG. 3A) is provided between the outer periphery of the eccentric body 72 and the inner periphery of the through hole of the internal tooth rocking body 75. . The internal oscillating body 75 has internal teeth including pins 76, and as described above, the external gear (the external gear for the external shaft) 15 fastened to the hollow output shaft (the external shaft) 12 and the solid output. The external gear (an external gear for the internal shaft) 25 is engaged with the shaft (inner shaft) 22.

  With the configuration described above, the rotation of the output shafts of the drive motors 51 and 61 is transmitted to the transmission gear 73 via the pinions 52 and 62, the center gears 18 and 28, and the idler gears 17 and 27. The shaft 71 is rotated. The rotation of the eccentric body shaft 71 causes the eccentric body 72 to rotate, and the internal gear rocking body 75 rocks and rotates. On the other hand, as described above, the carrier 31 that rotatably supports the eccentric shaft 71 is fixed with respect to the rotation. For this reason, the external gears 15 and 25 meshing with the internal tooth rocking body 75 are decelerated and rotated.

  In this embodiment, rotations from the drive motors 51 and 61 are simultaneously input to the three eccentric body shafts 71 via the plurality of idler gears 17 and 27. Rotation from the drive motors 51 and 61 may be directly input, and in this way, when a speed reduction mechanism is provided in the previous stage, they can be arranged in parallel at the tip of each eccentric body shaft.

  Further, in this embodiment, as shown in FIG. 2, a plurality of known types of linear guides 33 are provided between the bracket 32 installed above and below the carrier 31 of the transport device 10 and the inside of the housing 34 of the transport device 10. The carrier 31 of the conveying apparatus 10 can be moved up and down inside the housing 34.

  Further, a female screw portion 35 for linear movement is attached to the center of the bottom surface of the carrier 31, and a ball screw 36 portion that is screwed into the female screw portion 35 is provided vertically on the bottom surface inside the housing 34, and installed inside the housing 34. The vertical drive motor 37 and the ball screw portion 36 are connected by gears 38 and 39.

  Accordingly, the conveyance device 10 moves up and down with respect to the housing 34 with respect to the housing 34 via the ball screw portion 36 and the female screw portion 35 by the rotation of the vertical drive motor 37. During this ascent and descent, the seal is maintained by the above-described telescopic bellows 41.

  According to this embodiment, a compact and compact conveying device is provided, and a driving unit having a coaxial two-axis configuration can be provided, so that it is possible to reduce the size.

  4 is a longitudinal sectional view of a reference example, and FIG. 5 is a DD sectional view of FIG. In this reference example, two eccentric oscillating speed reducers respectively connected to two drive motors arranged in parallel are arranged up and down, the carriers of both eccentric oscillating speed reducers are connected and fixed members are connected. Two outputs are extracted from the internal gears of the two eccentric oscillating type speed reducers. The same reference numerals are assigned to the same members as those in FIGS. 1 and 2, and the detailed description thereof is omitted.

  In FIG. 4, two eccentric oscillating speed reducers 70 arranged vertically are respectively supported by an eccentric body shaft 71, a carrier 31 that supports both ends of the eccentric body shaft 71, and an outer tooth. And an internal gear 75 having internal teeth meshing with the external teeth.

  4, an outer shaft drive motor 51 and an inner shaft drive motor 61 are arranged in parallel on the left and right, and the outer shaft drive motor 51 and the inner shaft drive motor 61 are arranged in two eccentric oscillating speed reducers (up and down). The lower outer shaft eccentric oscillating speed reducer and the upper inner shaft eccentric oscillating speed reducer 70, 70 are connected. That is, the output shaft of the outer shaft drive motor 51 is provided with a pinion 52, and the pinion 52 is an eccentric body of the outer shaft eccentric oscillating speed reducer 70 via the upper and lower outer shaft speed reducer center gear 18. The shaft 71 is connected. Further, a pinion 62 is provided on the output shaft of the inner shaft driving motor 61, and the pinion 62 is hollow through the center gear 28 for the inner shaft speed reducer of the upper and lower two stages. This is connected to the eccentric body shaft 71 of the eccentric oscillating speed reducer 70 for the inner shaft.

  The carriers 31, 31 of the two eccentric oscillating speed reducers 70, 70 arranged above and below are connected by a bolt 81. Further, the carriers 31 and 31 connected to each other are connected to a housing 34 of the transport device which is a fixing member by a bolt 82.

  With this configuration, the rotation of the outer shaft drive motor 51 is decelerated by the lower outer shaft eccentric oscillating speed reducer 70, and passes through the internal gear 75 of the outer shaft eccentric oscillating speed reducer 70. It is transmitted to the first arm 11 from the outer shaft 12 connected to the gear 75 by a bolt 84. On the other hand, the rotation of the inner shaft driving motor 61 is decelerated by the upper inner shaft eccentric oscillating speed reducer 70, and the internal gear 75 is bolted to the inner gear 75 via the inner gear 75 of the inner shaft eccentric oscillating speed reducer 70. Is transmitted from the inner shaft 22 connected at 85 to the second arm 21.

  FIG. 6 is a longitudinal sectional view of still another reference example. In this reference example, two eccentric oscillating speed reducers for driving and driven (lower lower driving gears) respectively connected to two driving motors 51 and 61 for driving and driving arranged in parallel on the left and right. (Eccentric oscillating speed reducer, upper driven eccentric oscillating speed reducer) 70 and 70 are arranged vertically, and the carrier 31 of the eccentric oscillating speed reducer disposed on the lower side is connected to a fixed member. At the same time, the output of the drive arm for driving is taken out from the internal gear 75, and the driven eccentric oscillating speed reducer is connected to the internal gear of the eccentric oscillating speed reducer for driving to drive the driven from the carrier. The output of the arm is taken out. The same members as those in FIGS. 1 to 5 are denoted by the same reference numerals, and detailed description thereof is omitted.

  In FIG. 6, two eccentric oscillating type speed reducers 70 arranged vertically are provided with an eccentric body shaft 71, a carrier 31 that supports both ends of the eccentric body shaft 71, and an outer body, as in the reference example of FIG. It consists of an external gear 78 having teeth and supported by the carrier 31 and an internal gear 75 having internal teeth meshing with the external teeth.

  The driving outer shaft driving motor 51 and the driven inner shaft driving motor 61 are arranged in parallel at the lower end of FIG. 6, and the driving outer shaft driving motor 51 and the driven inner shaft driving motor 61 are arranged on the lower side. And it is connected with two eccentric rocking | fluctuation type reduction gears 70 and 70 for the drive arrange | positioned above. That is, the output shaft of the driving outer shaft drive motor 51 is provided with a pinion 52, and the pinion 52 is eccentric with the eccentric oscillating speed reducer 70 for driving through the center gear 18 for the upper and lower outer shaft speed reducers. It is connected to the body axis 71. Further, a pinion 62 is provided on the output shaft of the inner shaft drive motor 61, and the pinion 62 is a hollow portion of the eccentric oscillating speed reducer 70 for driving via the center gear 28 for the inner shaft speed reducer in two stages. Is connected to the eccentric body shaft 71 of the driven eccentric oscillating speed reducer 70.

  The internal gears 75, 75 of the two eccentric oscillating speed reducers 70, 70 arranged above and below are connected by a bolt 81.

  With this configuration, the rotation of the driving outer shaft drive motor 51 is decelerated by the lower driving outer shaft eccentric oscillating speed reducer 70, and the inner teeth of the driving outer shaft eccentric oscillating speed reducer 70 are reduced. The power is transmitted to the driving arm 11 from the driving outer shaft 12 connected to the internal gear 75 by a bolt 84 via the gear 75. On the other hand, since the internal gear 75 of the driven eccentric oscillating speed reducer 70 is connected to the internal gear 75 of the driving speed reducer, the carrier 31 of the driven eccentric oscillating speed reducer 70 is the driving motor for the driving. The speed is decelerated by the difference in rotation between the motor 51 and the driven motor 61. The internal gear 75 of the driven eccentric oscillating speed reducer 70 is connected to the driven shaft (inner shaft) 22 by a bolt 86, and the driven shaft (inner shaft) 22 is driven by the driving motor 51 and the driven motor 61 for driving. And the driven arm (second arm) 21 is driven by the driving arm 11 to rotate.

  An example of the operation of the reference example having this configuration will be described. For example, when the outer shaft 12 and the inner shaft 22 are rotated in substantially the same amount in the same direction, the outer shaft 12 is rotated by the driving drive motor 51 via the eccentric oscillating speed reducer 70 for the driving outer shaft. The inner shaft 22 is also rotated by a predetermined amount by the driving motor 51 for driving. Therefore, the inner shaft 22 can be operated and rotated so as to be in the target position by the driven motor 61 for driving and the eccentric oscillating speed reducer 70 for driven outer shaft. The above description is an example of differential rotation, and the differential rotation can be appropriately adopted in various cases without being limited to this embodiment.

  In the reference examples shown in FIGS. 4 to 6, two drive motors for driving the inner shaft and the outer shaft are arranged side by side, and the speed reducers for the inner shaft and the outer shaft are provided vertically in the axial direction. The carriers or internal gears of the two speed reducers are connected and connected to the fixed member, so that a small and compact conveying device can be obtained.

  Moreover, since the speed reducer has a hollow hole, even if the speed reducer is provided vertically in the axial direction, the (hollow) output shaft and the member that transmits the output rotation of the drive motor can be penetrated, and a coaxial output is easily obtained. Become.

10 Conveying device 11, 21 Arm 12 Hollow output shaft (outer shaft)
15, 25 External gear 22 Solid output shaft (inner shaft)
30 Drive device 31 Carrier (support)
34 Housing (fixing member)
51, 61 Drive motor 70 Eccentric oscillating speed reducer 71 Eccentric body shaft 72 Eccentric body 73 Transmission gear 75 Internal tooth oscillating body (internal gear)
78 External gear

Claims (1)

An eccentric body shaft, an outer and an eccentric member provided on said eccentric body shaft, said eccentric body penetrates, the internal teeth rocking and body, said UchihaYura body meshes with the swing rotation by the rotation of the eccentric A plurality of sets of eccentric oscillating type speed reducers, and the same number of coaxially arranged output shafts as the number of eccentric oscillating type speed reducers. Driven by a plurality of drive motors , external gears of the plurality of sets of eccentric oscillating type reduction gears are attached to corresponding output shafts at intervals in the axial direction, and the plurality of sets of eccentric oscillating type is fixed a support for rotatably supporting the eccentric body shaft of the speed reducer, enter the rotation from the sets of the eccentric bodies shaft plurality, and the coaxial can be output from the external gear to the plurality of output shafts Coaxial multi-axis output mechanism.

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