JP5148445B2 - Semiconductor device manufacturing method and semiconductor device manufacturing apparatus - Google Patents

Description

  The present invention relates to a semiconductor device manufacturing method and a semiconductor device manufacturing apparatus, and more particularly to a method of manufacturing a semiconductor device by sealing a semiconductor element mounted on a substrate with a resin and the manufacturing apparatus thereof.

  Conventionally, in a method of manufacturing a semiconductor device such as a BGA (Ball Grid Array) or a CSP (Chip Size Package) among semiconductor devices, a resin sealing technique called a batch molding method is employed.

  The batch molding method is a method in which a substrate having a plurality of device regions on which a plurality of semiconductor elements are mounted is resin-sealed using a molding die. Specifically, a cavity of the molding die is used. The above-mentioned substrate is disposed, and a resin is injected into the cavity through a resin injection gate, and the semiconductor elements disposed in each device region on the substrate are collectively sealed with the resin.

  A method for manufacturing a semiconductor device employing such a collective molding method is disclosed in, for example, Patent Document 1 and Patent Document 2 below.

  FIG. 8 is a plan view showing a state in which a substrate is arranged in a molding die in a resin sealing process by a semiconductor device manufacturing method according to Patent Document 1. In FIG. 8, 100 is a mold for molding, 102 is a pot for molding resin tablet injection, 103 is a runner, 104 is a gate, 105 is a cavity, 107 is an air vent provided in the mold for molding, 120 is a substrate , 121 is a mold region, 122 is a device region, and 140 is a semiconductor element.

  FIG. 9 is a plan view for explaining the macroscopic flow of the mold molten resin in the cavity in the resin sealing process by the semiconductor device manufacturing method according to Patent Document 1. FIG. FIG. 9 has the same configuration as that of FIG. 8, but is different from FIG. 8 in that a macroscopic (rough) flow direction A ′ of the mold molten resin is added.

  As shown in FIGS. 8 and 9, according to the prior art such as Patent Document 1, first, a substrate 120 in which a plurality of semiconductor elements 140 are mounted on a device region 122 on one main surface of the substrate 120 is molded. It is arranged in the cavity 105 of the mold 100.

  In this state, resin is injected. That is, the mold resin tablet is injected into the mold resin tablet injection pot 102, and the mold resin tablet is pressed and supplied by a plunger or the like installed in the mold 100 for molding. The pressed mold resin tablet is melted, and the melted mold resin melt passes through the runner 103 and the gate 104 from the mold resin tablet injection pot 102 and is then injected into the cavity 105. Thereby, the plurality of semiconductor elements 140 mounted in the mold region 121 on one main surface of the substrate 120 are collectively resin-sealed.

  In the resin sealing step, when air is present in the cavity 105, the air is sent to the outside of the mold via the air vent 107 provided in the mold for mold 100 by the flow pressure of the mold molten resin. It is configured to be leaked to.

  By such a resin sealing step, it is possible to form a semiconductor device sealing body in which a plurality of semiconductor elements 140 mounted on one main surface on the substrate 120 are collectively sealed.

  However, according to the prior art such as Patent Document 1, since there is a difference in filling time of the mold molten resin inside the cavity, the increase in viscosity over time causes a difference in the resin flow rate inside the cavity, and the flow of the mold molten resin is Problems such as unfilled resin and voids that occur due to air entrainment are likely to occur at locations where they are likely to stay.

  Hereinafter, this problem will be specifically described with reference to FIGS.

FIG. 10 is a plan view for explaining the flow of mold molten resin and the air pool in the resin sealing step by the semiconductor device manufacturing method according to Patent Document 1. FIG. Further, FIG. 11, in the resin sealing step is a plan view showing an enlarged (portion indicated by C ₂₎ part of FIG. 10.

As shown in FIGS. 10 and 11, according to Patent Document 1, a corner portion (for example, a mold region 121 inside the cavity 105, which is physically far from the gate 104 and has a small amount of mold molten resin supplied, for example, 10 parts indicated by C ₁ in), or, in the vertical direction of the flow path with respect to macroscopic flow direction of the mold the molten resin within the cavity 105 (the flow direction a in FIG. 9 '), the semiconductor element 140 corners formed by the side far side and the substrate 120 from the gate 104 (e.g., a portion indicated by C ₂ in Fig. 10, i.e., areas of shadow by the semiconductor device) in such flows of the molding molten resin Tends to stay.

In such a staying portion (for example, a portion indicated by C ₁ or C ₂ ), the flow becomes dull due to the increase in the viscosity of the mold molten resin over time, and resin unfilled or voids generated by entrainment of air or the like A problem occurs. As a result, the quality at the time of resin-sealing a semiconductor element will fall.

  On the other hand, in order to solve the above problem, Patent Document 2 discloses the following manufacturing method.

  FIG. 12 is a plan view for explaining a macro flow of mold molten resin and a state in which a substrate is arranged in a molding die in a resin sealing process according to a semiconductor device manufacturing method according to Patent Document 2.

  The configuration of Patent Document 2 is shown in FIG. 9 except that the side of each semiconductor element 140 is arranged so as to be inclined with respect to the long side and short side directions of the substrate 120 as shown in FIG. It is the same as that of the structure of the patent document 1 shown.

According to the configuration of Patent Document 2, in the resin sealing process, the sides of each semiconductor element 140 are arranged so as to be oblique to the macroscopic flow direction A ′ of the mold molten resin inside the cavity 105. . For this reason, it is difficult to supply the resin and the above-mentioned corner portions and corner portions where the air is liable to stay stagnant, which is a problem in Patent Document 1, the resin is not filled due to the entrainment of air and the like. And voids can be reduced.
Japanese Unexamined Patent Publication No. 2000-12578 (published on January 14, 2000) JP 2002-319595 A (published October 31, 2002)

  However, when the semiconductor elements are arranged obliquely as in the above-mentioned Patent Document 2, it is necessary to obliquely cut the resin-sealed substrate in the semiconductor device sealing body cutting process when the semiconductor device is manufactured. There is a problem that high alignment accuracy is required with respect to the cutting direction. Further, since it is necessary to cut the semiconductor device sealing body in an oblique direction, the number of cutting times increases with respect to cutting in the vertical and parallel directions with respect to the sides of the semiconductor device sealing body, and as a result, the manufacturing cost of the semiconductor device As a result, production efficiency declines. In this case, since the semiconductor elements are arranged obliquely, it is necessary to redesign the substrate with respect to the conventional substrate, and the number of mounted devices is reduced.

  The present invention has been made in view of the above-described problems, and a purpose thereof is a semiconductor capable of suppressing unfilled resin and voids generated by air entrainment or the like in a semiconductor device manufacturing method. An object of the present invention is to provide a device manufacturing method and a semiconductor device manufacturing apparatus.

  Another object of the present invention is to provide a semiconductor device manufacturing method and a semiconductor device manufacturing apparatus capable of improving the productivity of a semiconductor device sealing body with respect to the semiconductor device manufacturing method and the semiconductor device manufacturing apparatus. Is to provide.

In order to achieve the above two objects, a method of manufacturing a semiconductor device according to the present invention includes a cavity on which a substrate on which a semiconductor element is mounted is placed, and a plurality of pots that can supply resin to the cavity. A method of manufacturing a semiconductor device by sealing the semiconductor element with the resin using a provided mold, wherein after placing the substrate in the cavity, a part of the plurality of pots Is a dummy pot to which no resin is supplied, and while the air in the cavity is moved to the dummy pot, the flow of the resin in the cavity is circular when viewed macroscopically. Resin is supplied to the cavity from a part.

According to said structure, after manufacturing the said board | substrate in the said cavity, the manufacturing method of the semiconductor device of this invention is such that the flow of the resin in the said cavity becomes a circular arc shape macroscopically (roughly). The resin is supplied to the cavity from a part of the plurality of pots. For this reason, the resin can be concentrated on the pot at one end of the cavity provided in the mold. Therefore, when the semiconductor element is sealed with the resin, the macroscopic flow of the resin in the cavity becomes an arc shape, which is physically far from the resin injection gate provided in the cavity, for example. In the cavity part of the mold region inside the cavity, or the flow path in the direction perpendicular to the macroscopic resin flow direction inside the cavity, the side surface of the semiconductor element far from the gate and the substrate In the corners and the like formed by, the flow of the resin is less likely to stay, so that unfilled resin, voids, and the like generated by air entrainment can be suppressed. Furthermore, according to said structure, since resin is supplied, moving the air of the said cavity to the said dummy pot, resin unfilling, a void, etc. which generate | occur | produce by entrainment of air etc. can be suppressed further.

  In the semiconductor device manufacturing method according to the present invention, it is more preferable to supply the resin so that the flow of the resin with respect to each side of the semiconductor element is macroscopically along each side.

  According to said structure, since resin flows along each edge | side of the said semiconductor element, resin unfilling, a void, etc. which generate | occur | produce by the entrainment of air etc. can be suppressed further.

  In the method for manufacturing a semiconductor device according to the present invention, the mold is provided with a first air vent for discharging the air in the dummy pot to the outside of the mold, and the air is discharged through the first air vent. It is more preferable to supply the resin while discharging.

  According to said structure, since resin is supplied, discharging the air of a dummy pot via a 1st air vent, it can prevent that an air retains in a dummy pot.

  In the method of manufacturing a semiconductor device according to the present invention, a plurality of the pots may be dummy pots, and the mold may be provided with a first communication path that allows the dummy pots to communicate with each other. preferable.

  According to said structure, since the 1st communicating path which mutually connects between dummy pots is provided, the pressure in a dummy pot can be equalized.

  In the method of manufacturing a semiconductor device according to the present invention, a plurality of the pots are pots that supply resin to the cavity, and the mold is provided with a second one that communicates between the pots that supply resin. It is preferable that a communication path is provided.

  According to said structure, since the 2nd communicating path which mutually connects between the said pots which supply resin is provided, the pressure in the pot which supplies resin, and the pressure in the flow path of a metal mold | die are equalized. It can be made.

  In the method for manufacturing a semiconductor device according to the present invention, the mold is provided with a second air vent for discharging the air in the cavity to the outside of the mold, and the air is discharged through the second air vent. More preferably, the resin is supplied.

  According to the above configuration, since resin is supplied while discharging air from the cavity via the second air vent, it is possible to prevent air from staying in the cavity, Voids and the like can be further suppressed.

  In the method for manufacturing a semiconductor device according to the present invention, it is more preferable that a plurality of the cavities are formed in the mold.

  According to said structure, resin can be simultaneously supplied with respect to a some cavity.

  In the method for manufacturing a semiconductor device according to the present invention, a semiconductor element can be molded.

  In order to achieve the above two objects, a semiconductor device manufacturing apparatus according to the present invention includes a cavity on which a substrate on which a semiconductor element is mounted and a plurality of pots capable of supplying resin to the cavity. An apparatus for manufacturing a semiconductor device comprising a provided mold and sealing the semiconductor element with the resin, wherein a part of the plurality of pots is a dummy pot to which no resin is supplied, The mold is characterized in that a first air vent for discharging the air in the dummy pot to the outside of the mold is provided.

  According to the above configuration, in the semiconductor device manufacturing apparatus according to the present invention, a part of the plurality of pots is a dummy pot to which resin is not supplied, and the mold is filled with air from the dummy pot. Since the first air vent for discharging to the outside of the mold is provided, the resin can be supplied while discharging the air from the dummy pot via the first air vent, so that the air stays in the dummy pot. Can be prevented.

  In the semiconductor device manufacturing apparatus according to the present invention, it is more preferable that the dummy pot is disposed in the mold at a position where the flow of the resin in the cavity becomes an arc shape when viewed macroscopically.

  According to the above configuration, in the semiconductor device manufacturing apparatus of the present invention, the dummy pot is disposed at a position where the flow of the resin in the cavity becomes an arc shape when viewed macroscopically. Yes. Therefore, when the semiconductor element is sealed with resin, the macroscopic resin flow in the cavity becomes an arc shape, and is physically distant from the resin injection gate provided in the cavity and the resin is supplied. Depending on the side surface of the semiconductor element that is far from the gate and the substrate in the flow path in the direction perpendicular to the macroscopic resin flow direction inside the cavity, or the corner portion of the mold region inside the cavity, the amount of which is reduced In the formed corners and the like, the flow of the resin is less likely to stay, and thereby it is possible to suppress unfilled resin, voids, and the like that are generated by air entrainment.

  In the semiconductor device manufacturing apparatus according to the present invention, for each side of the semiconductor element, a pot for supplying the resin is disposed at a position where the flow of the resin is macroscopically along the side. It is more preferable.

  According to said structure, since resin flows along each edge | side of the said semiconductor element, resin unfilling, a void, etc. which generate | occur | produce by the entrainment of air etc. can be suppressed further.

  In the semiconductor device manufacturing apparatus according to the present invention, a plurality of the pots are dummy pots, and the mold is provided with a first communication path that allows the dummy pots to communicate with each other. More preferred.

  According to said structure, since the 1st communicating path which mutually connects between dummy pots is provided, the pressure in a dummy pot can be equalized.

  In the semiconductor device manufacturing apparatus according to the present invention, a plurality of the pots are pots that supply resin to the cavity, and the mold is provided with a second one that communicates between the pots that supply resin. More preferably, a communication path is provided.

  According to said structure, since the 2nd communicating path which mutually connects between the said pots which supply resin is provided, the pressure in the pot which supplies resin, and the pressure in the flow path of a metal mold | die are equalized. It can be made.

  In the semiconductor device manufacturing apparatus according to the present invention, it is more preferable that the mold is provided with a second air vent for discharging the air in the cavity to the outside of the mold.

  According to the above configuration, since resin is supplied while discharging air from the cavity via the second air vent, it is possible to prevent air from staying in the cavity, Voids and the like can be further suppressed.

  In the semiconductor device manufacturing apparatus according to the present invention, it is more preferable that a plurality of the cavities are formed in the mold.

  According to said structure, resin can be simultaneously supplied with respect to a some cavity.

In the semiconductor device manufacturing method according to the present invention, after placing the substrate in the cavity, a part of the plurality of pots is a dummy pot to which no resin is supplied, and the air in the cavity is used as the dummy pot. The resin is supplied to the cavity from a part of the plurality of pots so that the flow of the resin in the cavity becomes an arc shape when viewed macroscopically.

  Thus, in the method for manufacturing a semiconductor device according to the present invention, when the semiconductor element is sealed with the resin, the macroscopic flow of the resin in the cavity becomes an arc shape. Therefore, for example, the corner of the mold region inside the cavity, which is physically far from the resin injection gate provided in the cavity and the amount of resin supplied is small, or in the macroscopic resin flow direction inside the cavity. The flow of the resin is less likely to stay at the corner portion formed by the side surface of the semiconductor element far from the gate and the substrate in the flow path in the direction perpendicular to the semiconductor element. Resin unfilling and voids that occur can be suppressed.

  In the semiconductor device manufacturing apparatus according to the present invention, a part of the plurality of pots is a dummy pot to which resin is not supplied, and the mold is configured to discharge air from the dummy pot to the outside of the mold. 1 air vent is provided.

  Accordingly, in the semiconductor device manufacturing apparatus according to the present invention, a part of the plurality of pots is a dummy pot to which no resin is supplied, and air in the dummy pot is transferred to the mold outside the mold. Since the first air vent for discharging is provided, the resin can be supplied while discharging the air from the dummy pot through the first air vent, so that the air stays in the dummy pot. Can be prevented.

  The embodiment of the present invention will be described with reference to FIGS. 1 to 7 as follows. Note that components having the same function are denoted by the same reference symbols throughout the drawings for describing the embodiments of the present invention, and the repetitive description thereof is omitted.

[Embodiment 1]
FIG. 1 shows a substrate placed in a mold for molding (mold) in a resin sealing process (a process of sealing a semiconductor element with a resin) by a semiconductor device manufacturing apparatus according to Embodiment 1 of the present invention. 2 is a plan view showing the state, and FIG. 2 is a cross-sectional view taken along the line X-X in FIG. 1 showing a state in which the substrate is arranged in the mold for molding in the resin sealing step.

  As shown in FIGS. 1 and 2, when manufacturing a semiconductor device, first, for example, a plurality of semiconductor elements 40 cut out in a chip shape from a wafer, a substrate 20 on which the plurality of semiconductor elements 40 are mounted, A molding die 1 for forming a resin sealing body (semiconductor device sealing body) by sealing a plurality of semiconductor elements 40 with a resin is prepared. For example, an integrated circuit can be incorporated in the semiconductor element 40. Note that the number of semiconductor elements 40 mounted on the substrate 20 may be one.

  The substrate 20 has, for example, a multilayer wiring structure in which each of an insulating layer and a conductive layer is sequentially stacked. Also, as shown in FIG. 1, in the present embodiment, the planar shape of the substrate 20 is rectangular, but it may be formed in a square or other suitable shape.

  Further, a plurality of mold regions 21 are provided on one main surface of the substrate 20, a plurality of device regions 22 are provided in each mold region 21, and each device region 22 includes A semiconductor element 40 is mounted. The semiconductor elements 40 mounted in each device region 22 are arranged so that the sides of the semiconductor elements 40 are parallel to the long and short sides of the substrate 20.

  As shown in FIGS. 1 and 2, the molding die 1 includes an upper die 1A and a lower die 1B, and a cavity 5 is formed between the upper die 1A and the lower die 1B. .

  A plurality of pots are provided in the lower mold 1B of the mold 1 for molding. The plurality of pots include a plurality of mold resin tablet injection pots (pots) 2 that are arranged at one end of the cavity and for intensive injection of mold resin tablets (resins) used for resin sealing. . Of the plurality of pots, the pots other than the mold resin tablet injection pot 2 are dummy pots 6.

  The molding die 1 is formed between the upper die 1A and the lower die 1B, and connected to the mold resin tablet injection pot 2 or the dummy pot 6 for resin sealing. , A runner 3 is provided through which the mold molten resin pressed and supplied by the mold resin tablet injection pot 2 passes, or the air flowing out of the cavity 5 or the mold molten resin passes therethrough. A gate 4 is provided at the tip of the runner 3, and the gate 4 is connected to the cavity 5.

  The mold resin tablet injection pot 2 is intensively arranged, for example, at the center of the mold 1 so that the mold molten resin is uniformly filled along the outer periphery of the cavity 5 throughout the cavity. The dummy pot 6 is intensively arranged at the end of the mold 1 so that the molten mold resin flowing along the outer periphery inside the cavity 5 flows into the dummy pot 6.

  Hereinafter, a method for manufacturing a semiconductor device using the semiconductor element 40, the substrate 20, and the molding die 1 will be described with reference to FIGS.

  The semiconductor device manufacturing method according to the present embodiment employs a batch molding method. That is, as shown in FIG. 1, as a substrate 20, a substrate having a plurality of device regions 22 on one main surface is used, and a semiconductor element disposed in each device region 22 of the substrate 20 in a resin sealing process described later. A plurality of semiconductor devices are manufactured by sealing 40 together into one resin sealing body and then dividing the plurality of device regions 22 of the substrate 20 together with the resin sealing body.

  First, the semiconductor element 40, the substrate 20, and the molding die 1 are prepared. Then, as shown in FIG. 2, the substrate 20 on which the semiconductor element 40 is mounted is connected to the upper mold 1A of the molding die 1. Position and set between the lower mold 1B. At this time, as shown in FIG. 1, positioning is performed so that the length direction of the four sides of the cavity 5 of the molding die 1 coincides with the length direction of the four sides of the substrate 20. Next, resin sealing is performed on the substrate 20 set in the molding die 1.

  FIG. 3 is a plan view for explaining the macroscopic (rough) flow of the mold molten resin in the resin sealing step in the method of manufacturing a semiconductor device according to the embodiment of the present invention. The structure is the same as that of FIG. 1 except that a macroscopic flow direction A of the mold molten resin is added. FIG. 4 is an enlarged plan view of the device region 22 indicated by B in FIG.

  As shown in FIG. 3, in the resin sealing step, after the mold mold 1 is heated to a temperature at which the mold resin tablet melts, the mold resin is intensively arranged at the center of the mold mold 1. A mold resin tablet is injected into the tablet injection pot 2. Then, the mold resin tablet is pressed and supplied to the molding die 1 by a plunger (not shown) or the like installed in the molding die 1.

  The pressed mold resin tablet melts, passes through the runner 3 and the gate 4 from the mold resin tablet injection pot 2, and is then injected into the cavity 5 as mold molten resin.

  After the mold molten resin is injected, the air flowing out of the cavity 5 and excess mold molten resin pass through the gate 4 connected to the cavity 5 and the runner 3 connected to the tip of the gate 4, and then the dummy pot. 6 flows into the interior.

  The mold molten resin is cured after a predetermined time has elapsed. Thereby, the resin sealing body is obtained. That is, a resin sealing body in which a plurality of semiconductor elements 40 mounted in the mold region 21 on one main surface of the substrate 20 are collectively sealed is formed.

  Thereafter, the resin sealing body is taken out from the mold 1 for molding, and a plurality of semiconductor devices are obtained by dividing the substrate 20 along a partition line of the device region 22 by, for example, a dicing apparatus.

  As described above, the pot 2 for injecting the mold resin tablet is intensively arranged at the center of the mold 1 for molding, and the dummy pot 6 is intensively arranged at the end of the mold 1 for molding. In addition, in order to supply the resin to the cavity 5 from a part of the plurality of pots (that is, the mold resin tablet injection pot 2), the mold molten resin injected into the cavity 5 in the resin sealing step As shown in FIG. 3, the macroscopic flow direction A of the gate 4 is connected to the runner 3 extending from the dummy pot 6 from the position of the gate 4 connected to the runner 3 extending from the mold resin tablet injection pot 2. It becomes an arc shape toward the position.

  As shown in FIG. 3, the semiconductor element 40 mounted in each device region 22 is arranged so that the side of the semiconductor element 40 is parallel to the long side and the short side of the cavity 5. Since the macroscopic flow direction A of the mold molten resin inside the cavity 5 is an arc in a direction oblique to the long side of the cavity 5, the semiconductor element 40 mounted in each device region 22. The direction of this side is inclined with respect to the macroscopic flow direction A of the mold molten resin inside the cavity 5.

  The flow direction A in the cavity 5 is not particularly limited as long as it is an oblique direction with respect to each side of the semiconductor element. For example, the flow direction A has an arc shape as described above (for example, a semicircular shape). Alternatively, an elliptical arc shape or other suitable curved shape may be used.

  Specifically, for example, as shown in FIG. 4 in which a portion indicated by B in FIG. 3 (the device region 22 and the semiconductor element 40 provided in the device region 22) is enlarged, the flow direction A is the same as the semiconductor element 40. In addition, it may be in a direction surrounding the device region 22. In other words, the mold molten resin may be supplied so that the flow direction of the mold molten resin with respect to each side of the semiconductor element 40 is along the respective sides as viewed macroscopically.

  Therefore, according to the manufacturing method of the semiconductor device according to the above embodiment, the following effects can be obtained.

  Mold molten resin is supplied from the mold resin tablet injection pot 2 provided at one end of the cavity 5 to the cavity 5 to seal the substrate 20 on which the semiconductor element 40 is mounted with the mold molten resin. For this reason, in the resin sealing step, the macroscopic flow direction of the mold molten resin in the cavity 5 is inclined in the cavity 5 of the mold 1 and the resin injection gate provided in the cavity 5 4 in the corner portion of the mold region 21 inside the cavity 5 or the flow path in the direction perpendicular to the flow direction inside the cavity 5, which is physically far from 4 and the amount of resin supplied is small. In the corner portion formed by the side surface of the semiconductor element 40 far from the gate 4 and the substrate 20, the resin flow is less likely to stay, thereby causing no resin filling or voids caused by air entrainment or the like. Etc. can be suppressed.

  In the resin sealing step, the pot 2 for mold resin tablet injection is arranged at the center of the mold 1 for molding, and the dummy pot 6 is concentrated at the end of the mold 1 for molding. The resin is uniformly filled over the entire inside of the cavity along the outer periphery inside the cavity 5, and the resin that has flowed in from the mold resin tablet injection pot 2 through the gate 4 or the like is outside the cavity 5. It flows out into the dummy pot 6 along the periphery, and the macroscopic flow direction A of the mold molten resin in the cavity 5 advances obliquely (for example, in an arc shape) from the position of the gate 4 of the mold 1 for molding. Therefore, the resin flow stagnation at the corners or corners is more effectively reduced, and the resin not generated by air entrainment or the like is reduced. Hama and voids or the like can be further suppressed.

  Even if air is caught in the corner or corner, the air moves in the cavity 5 along the macroscopic flow direction A of the molten mold resin without staying at the location. , Flows out into the dummy pot 6. In addition, since resin unfilling, voids, and the like can be suppressed, the yield of the semiconductor device can be improved in the manufacturing method of the semiconductor device that employs the batch molding method.

  Furthermore, in the present embodiment, since the substrate 20 having a structure in which the side of each semiconductor element 40 is arranged in parallel with the long side and the short side of the substrate is used, In addition, it is not necessary to redesign the substrate in which the side of the semiconductor element 40 is inclined with respect to the long side and the short side of the substrate 20, and the side of the semiconductor element 40 is inclined with respect to the long side and the short side of the substrate. Unlike a substrate having a different structure, it is not necessary to cut the substrate obliquely, so that high alignment accuracy is not required with respect to the cutting direction. In addition, in the present embodiment, since the substrate 20 is cut in a direction perpendicular to and parallel to the side of the substrate, the number of times of cutting is smaller than that in the oblique direction. As a result, resin unfilling, voids, and the like can be suppressed without increasing the manufacturing cost of the semiconductor device.

[Embodiment 2]
Hereinafter, a semiconductor device manufacturing apparatus and method according to another embodiment of the present invention will be described with reference to FIG.

  FIG. 5 is a plan view showing a state in which the substrate 20 is arranged in the mold 1 for the resin molding process. As shown in FIG. 5, the mold 1 for batch molding used for manufacturing the semiconductor device in the present embodiment is basically the same as the mold 1 in the first embodiment. However, it differs in the following points.

  That is, the molding die 1 of the present embodiment further has a configuration in which the first air vent 8 is provided in the dummy pot 6 and the second air vent 7 is provided along the side of the cavity 5. It has become.

  Therefore, by providing the first air vent 8 in the dummy pot 6, the air flowing into the dummy pot 6 is efficiently discharged out of the dummy pot 6 along the macroscopic flow of the mold molten resin. Is done.

  Also, by providing the second air vent 7 in the mold 1 for molding, the air entrained in the mold molten resin inside the cavity 5 moves along the macroscopic flow of the mold molten resin in the mold region. It is efficiently discharged out of 21.

  Here, the macroscopic flow of the mold molten resin is substantially the same as that shown in FIG. 3 of the first embodiment.

  As described above, according to the semiconductor device manufacturing apparatus and manufacturing method of the second embodiment, an effect of further suppressing resin unfilling, voids, and the like generated by air entrainment or the like can be obtained.

[Embodiment 3]
Hereinafter, a semiconductor device manufacturing apparatus and method according to still another embodiment of the present invention will be described with reference to FIG.

  FIG. 6 is a plan view showing a state in which the substrate 20 is arranged in the mold 1 for the resin molding process. As shown in FIG. 6, a mold 1 for batch molding used in the method for manufacturing a semiconductor device according to the present embodiment has basically the same configuration as that of the second embodiment. It differs in the following points.

  That is, the mold 1 for molding in the present embodiment communicates between the second communication passage 9 that communicates between the plurality of mold resin tablet injection pots 2 and between the plurality of dummy pots 6. The first communication path 10 is further provided.

  Therefore, by providing the mold molding die 1 with the second communication passage 9 that allows the mold resin tablet injection pots 2 to communicate with each other, the mold resin tablets that are put into the individual mold resin tablet injection pots 2 are provided. Even if the amount varies, it is possible to equalize the pressure in the pot 2 for injecting individual mold resin tablets and the pressure in the flow path of the mold 1 for molding.

  Moreover, the pressure in each dummy pot 6 can be equalized by providing the 1st communication path 10 which connects between the dummy pots 6 mutually.

  As described above, according to the semiconductor device manufacturing apparatus and manufacturing method according to the present embodiment, the flow path of the molding die 1 is equalized by equalizing the pressure in the flow path of the molding die 1. The effect of making the flow of the mold molten resin smooth and uniform inside is obtained.

  Hereinafter, the effect of the present invention over the prior art will be described with reference to FIG.

  FIG. 7 shows a semiconductor device according to Japanese Patent Application Laid-Open No. 2003-260260, in which a defect occurrence rate is determined by combining defects such as voids and resin unfilled in an example resin sealing body molded by the semiconductor device manufacturing apparatus according to Embodiment 3 of the present invention. It is the graph compared with the said defect incidence rate of the resin sealing body shape | molded by this manufacturing apparatus.

  In FIG. 7, α indicates a defect occurrence rate of the resin sealing body in the semiconductor device manufacturing method of Patent Document 1, and β indicates a resin sealing body defect in the semiconductor device manufacturing method according to Embodiment 3 of the present invention. Indicates the incidence. As is apparent from FIG. 7, the defect occurrence rate β (0.1%) of the resin encapsulant according to the present invention is significantly lower than the defect occurrence rate α (50%) of the resin encapsulant according to Patent Document 1. You can see that

  As described above, in Embodiments 1 to 3, the pot at one end of the cavity 5 among the plurality of pots is the mold resin tablet injection pot 2 for intensively arranging the mold resin tablets, and the remaining pots The pot is handled as a dummy pot 6.

  In the first to third embodiments, the mold 1 is divided into the upper mold 1A and the lower mold 1B, but the functions of the upper mold 1A and the lower mold 1B are interchanged. It may be configured.

  The present invention is not limited to the above-described embodiments, and various modifications can be made within the scope shown in the claims. That is, embodiments obtained by combining technical means appropriately modified within the scope of the claims are also included in the technical scope of the present invention.

  The semiconductor device manufacturing method and the semiconductor device manufacturing apparatus according to the present invention can be applied to the manufacture of a semiconductor device employing, for example, a batch molding method.

It is a top view which shows the state which has arrange | positioned the board | substrate to the metal mold for molding in the resin sealing process by the manufacturing apparatus of the semiconductor device which concerns on Embodiment 1 of this invention. FIG. 2 is a cross-sectional view taken along line XX in FIG. 1. It is a top view for demonstrating the macroscopic flow direction A of mold molten resin in the resin sealing process by the manufacturing apparatus of the semiconductor device which concerns on Embodiment 1 of this invention. FIG. 4 is an enlarged plan view showing a portion indicated by B in FIG. 3 with respect to a resin sealing process performed by the semiconductor device manufacturing apparatus according to Embodiment 1 of the present invention; It is a top view which shows the state which has arrange | positioned the board | substrate to the metal mold for molding in the resin sealing process by the manufacturing apparatus of the semiconductor device which concerns on Embodiment 2 of this invention. It is a top view which shows the state which has arrange | positioned the board | substrate to the metal mold for molding in the resin sealing process by the manufacturing apparatus of the semiconductor device which concerns on Embodiment 3 of this invention. 6 is a graph comparing a defect occurrence rate of a resin encapsulant in the method for manufacturing a semiconductor device of Patent Document 1 and a defect occurrence rate of a resin encapsulant in a method for manufacturing a semiconductor device according to Embodiment 3 of the present invention. In the resin sealing process by the manufacturing method of the semiconductor device of patent document 1, it is a top view which shows the state which has arrange | positioned the board | substrate to the metal mold | die for molding. FIG. 10 is a plan view for explaining a macroscopic flow direction A ′ of a mold molten resin in a resin sealing step according to the method for manufacturing a semiconductor device of Patent Document 1. FIG. 10 is an enlarged plan view illustrating a part of FIG. 9 for explaining a flow of a mold molten resin and an air reservoir in a resin sealing process according to a manufacturing method of a semiconductor device of Patent Document 1; In the resin sealing step according to the method of manufacturing the semiconductor device of Patent Document 1 is a plan view showing an enlarged portion indicated by C ₂ in Fig. In the resin sealing process by the manufacturing method of the semiconductor device of patent document 2, it is a top view for demonstrating the state which has arrange | positioned the board | substrate to the metal mold for molding, and macroscopic flow direction A 'of mold molten resin.

Explanation of symbols

1,100 Mold for mold (mold)
1A Upper mold 1B Lower mold 2,102 Mold resin tablet injection pot (pot)
3, 103 runner 4, 104 gate 5, 105 cavity 6 dummy pot (pot)
7 Second air vent 107 Air vent 8 First air vent 9 Second communication path 10 First communication path 20, 120 Substrate 21, 121 Mold area 22, 122 Device area 40, 140 Semiconductor element A Mold molten resin Macroscopic flow direction B of one device region C ₁ , C ₂ Unfilled resin or void generated by entrainment of air, etc.

Claims (15)

A semiconductor device using a mold provided with a cavity in which a substrate on which a semiconductor element is mounted is placed and a plurality of pots capable of supplying resin to the cavity is sealed with the resin. A method of manufacturing
After placing the substrate in the cavity,
A part of the plurality of pots is a dummy pot to which resin is not supplied, and while moving the air of the cavity to the dummy pot,
A method of manufacturing a semiconductor device, comprising: supplying resin from a part of the plurality of pots to the cavity so that a flow of the resin in the cavity has an arc shape when viewed macroscopically.   The method of manufacturing a semiconductor device according to claim 1, wherein the resin is supplied so that a flow of the resin with respect to each side of the semiconductor element is macroscopically along the side. The mold is provided with a first air vent for discharging the air in the dummy pot to the outside of the mold, and the resin is supplied while discharging air through the first air vent. A method for manufacturing a semiconductor device according to claim 1 . 4. A plurality of the pots are used as dummy pots, and the mold is provided with a first communication path that allows the dummy pots to communicate with each other. A method for manufacturing the semiconductor device according to the item . A plurality of the pots are pots that supply resin to the cavity, and the mold is provided with a second communication path that connects the pots that supply the resin to each other. the method of manufacturing a semiconductor device according to any one of claims 1 to 4. The mold is provided with a second air vent for discharging air from the cavity to the outside of the mold, and the resin is supplied while discharging air through the second air vent. the method of manufacturing a semiconductor device according to any one of claims 1 to 5. The above mold, a method of manufacturing a semiconductor device according to any one of claims 1 to 6, characterized in that the cavity is formed in plural. The method of manufacturing a semiconductor device according to any one of claims 1 to 7, characterized in that molding the semiconductor device. A semiconductor device comprising: a mold having a cavity on which a substrate on which a semiconductor element is mounted is placed; and a plurality of pots capable of supplying resin to the cavity, wherein the semiconductor element is sealed with the resin. Manufacturing equipment,
A part of the plurality of pots is a dummy pot to which resin is not supplied, and the mold is provided with a first air vent that discharges air from the dummy pot to the outside of the mold. A semiconductor device manufacturing apparatus. 10. The apparatus for manufacturing a semiconductor device according to claim 9 , wherein the dummy pot is arranged at a position where the flow of the resin in the cavity becomes an arc shape when viewed macroscopically. . For each side of the semiconductor element, the flow of the resin when viewed macroscopically position along the sides, to claim 9 or 10, characterized in that the pot for supplying a resin is disposed The manufacturing apparatus of the semiconductor device of description. A plurality dummy pot of the pot, the above-mentioned mold, either one of claims 9 to 11, characterized in that the first communication path communicating between the dummy pots each other are provided 2. A semiconductor device manufacturing apparatus according to item 1. A plurality of the pots are pots that supply resin to the cavity, and the mold is provided with a second communication path that connects the pots that supply the resin to each other. The apparatus for manufacturing a semiconductor device according to any one of claims 9 to 12 . The above mold apparatus for manufacturing a semiconductor device according to any one of to 9 claims, characterized in that the second air vent for discharging air from the cavity to the mold outside is provided 13. The above mold apparatus for manufacturing a semiconductor device according to any one of claims 9 to 14, characterized in that the cavity is formed in plural.

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