JP5035382B2 - Manufacturing method of glass disk for information recording medium and manufacturing apparatus used for the method - Google Patents

Description

  The present invention relates to a method for manufacturing a glass disk for information recording medium for processing a side peripheral surface of a glass disk laminate in which a large number of glass disks for information recording medium are stacked, and a manufacturing apparatus used in the method.

  As magnetic disks become smaller and higher in density, glass disks with excellent surface smoothness and mechanical strength are increasingly used as information recording medium disks. The glass disk for information recording medium is produced by lapping the side peripheral surface of the glass disk and then polishing, and further lapping the front and back recording surfaces of the glass disk and polishing.

  The mechanical processing of the side peripheral surface of the glass disk can be performed individually one by one, but the working efficiency is very poor. Therefore, the mechanical processing of the side peripheral surface of the glass disk is generally performed on a glass disk laminated body in which a large number of glass disks are laminated (see, for example, Patent Document 1).

JP-A-11-219521

  The core drilling method of the glass disk laminated body disclosed in Patent Document 1 is such that the glass disk laminated body is core drilled by a cantilever support state in which the glass disk laminated body as a workpiece rotates at high speed while the core drill is fixed. Has been. In response to the desire to increase the number of laminated glass disk stacks as much as possible in order to increase the processing efficiency, increasing the number of laminated glass disks has the effect of rotational axis blurring of the cantilevered glass disk stack. It becomes easy to receive. Accordingly, there is a problem in that the core processing accuracy of the glass disk is reduced due to the rotational axis center blur at the initial stage of processing where the core drill starts to contact the glass disk laminate.

  Further, in an integrated core drill in which an inner peripheral blade and an outer peripheral blade are integrally formed, an inner peripheral blade and an outer peripheral blade having the same grinding ability are generally used. However, when using an inner peripheral blade and an outer peripheral blade having the same grinding ability, the peripheral speed of the outer peripheral blade is faster than the peripheral speed of the inner peripheral blade when the integrated core drill is rotated. The outer peripheral portion of the glass disk is quickly ground, but the inner peripheral portion is difficult to be ground, resulting in a problem that the ground surface becomes rough and the finished surface is poor.

  Therefore, the technical problem to be solved by the present invention is for an information recording medium capable of processing the inner peripheral surface and outer peripheral surface of a glass disk laminate in which a large number of glass disks for information recording medium are laminated with high accuracy. It is providing the manufacturing method of a glass disc, and the manufacturing apparatus used for the said method.

  In order to solve the above technical problem, according to the present invention, the following method for producing a glass disk for information recording medium and a production apparatus used for the method are provided.

That is, in the invention of claim 1, the glass disk laminate in which a large number of glass disks for information recording media are laminated is fixed to the holding table,
A separation-type core drill in which the inner peripheral blade and the outer peripheral blade are separately rotated on the same rotation axis is driven to rotate about the rotation axis and is slid to the glass disk laminate side along the rotation axis. In the method for manufacturing a glass disk for information recording medium, which processes the inner and outer peripheral surfaces of the glass disk laminate ,
By making the count of the grindstone of the inner peripheral blade smaller than the count of the grindstone of the outer peripheral blade, the grinding ability of the inner peripheral blade is higher than the grinding ability of the outer peripheral blade .

The invention according to claim 2 is a separation type core drill in which the inner peripheral blade and the outer peripheral blade are separately driven to rotate on the same rotating shaft,
A drive unit for rotationally driving the separated core drill;
A holding table to which a glass disk laminate in which a plurality of glass disks for information recording media are laminated is detachably fixed;
A holding member which separated axially supported to be slidable separately and the inner peripheral edge of the shaft and the outer peripheral edge of the shaft of the core drill rotates, the provided,
By making the count of the grindstone of the inner peripheral blade smaller than the count of the grindstone of the outer peripheral blade, the grinding ability of the inner peripheral blade is higher than the grinding ability of the outer peripheral blade .

According to the first aspect of the present invention, the glass core laminated body is firmly fixed to the holding base, and the separated core drill that is less likely to cause shaft center blurring rotates at high speed. Therefore, even when the integrated core drill rotated at a high speed does not cause shaft center blur even at the initial stage of processing where the integrated core drill starts to come into contact with the glass disc laminate, even a glass disc laminate in which a large number of glass discs are laminated. Core processing can be performed with high accuracy. And since the rotational speeds of the inner peripheral blade and the outer peripheral blade of the separable core drill can be adjusted separately, the rotational speed of the inner peripheral blade that reduces the rotational speed by decreasing the rotational speed of the outer peripheral blade that increases the peripheral speed. The degree of grinding can be appropriately changed by increasing. Furthermore, by making the grindstone count of the inner peripheral blade smaller than that of the outer peripheral blade, the grinding ability of the inner peripheral blade is made higher than the grinding ability of the outer peripheral blade, so that the inner peripheral blade and the outer peripheral blade are at the same rotational speed. Even in the case of grinding, the inner peripheral grinding degree and the outer peripheral grinding degree can be made substantially the same.

According to the second aspect of the present invention, the glass core laminate is firmly fixed to the holding base, and the separation type core drill that is less likely to cause shaft center blurring rotates at high speed. Therefore, even when the integrated core drill rotated at a high speed does not cause shaft center blur even at the initial stage of processing where the integrated core drill starts to come into contact with the glass disk laminate, even a glass disk laminate in which a large number of glass disks are laminated Core processing can be performed with high accuracy. And since the rotational speeds of the inner peripheral blade and the outer peripheral blade of the separable core drill can be adjusted separately, the rotational speed of the inner peripheral blade that reduces the rotational speed by decreasing the rotational speed of the outer peripheral blade that increases the peripheral speed. The degree of grinding can be appropriately changed by increasing. Furthermore, by making the grindstone count of the inner peripheral blade smaller than that of the outer peripheral blade, the grinding ability of the inner peripheral blade is made higher than the grinding ability of the outer peripheral blade, so that the inner peripheral blade and the outer peripheral blade are at the same rotational speed. Even in the case of grinding, the inner peripheral grinding degree and the outer peripheral grinding degree can be made substantially the same.

It is a typical perspective view of the manufacturing apparatus of the glass disc for information recording media which concerns on 1st embodiment of this invention. It is a bottom view of the integrated core drill of the manufacturing apparatus of the glass disc for information recording media shown in FIG. It is a typical perspective view after carrying out a core drill process of the glass disk laminated body. It is a typical front view of the manufacturing apparatus of the glass disc for information recording media which concerns on 2nd embodiment of this invention.

  Below, the manufacturing method of the glass disk 12 for information recording media which concerns on 1st embodiment of this invention, and the manufacturing apparatus 2 used for it are demonstrated in detail, referring FIG.

  FIG. 1 is a schematic perspective view of a manufacturing apparatus 2 for an information recording medium glass disk 12 according to a first embodiment of the present invention. FIG. 2 is a bottom view of the integrated core drill 20 of the apparatus 2 for manufacturing the information recording medium glass disk 12 shown in FIG. FIG. 3 is a schematic perspective view after the core drilling of the glass disk laminate 10.

  The glass disk 12 that is the target of core drilling corresponds to various sizes. For example, a glass disk for magnetic recording built in a hard disk drive, which has a 1.8-inch size or 2.5-inch size. Of size.

  As shown in FIG. 1, the apparatus 2 for manufacturing the information recording medium glass disk 12 is mainly composed of an integrated core drill 20, a holding shaft 29, and a holding table 42.

  As shown in FIGS. 1 and 2, the integrated core drill 20 has an inner peripheral blade 22 and an outer peripheral blade 26 integrally formed. That is, the inner peripheral blade 22 and the outer peripheral blade 26 have a substantially cylindrical shape, their upper end portions are connected to each other, and the lower end portions are open. A through hole through which the holding shaft 29 can slide in the vertical direction of the rotation shaft 56 is provided in the upper surface portion of the inner peripheral blade 22. The lower end portions of the inner peripheral blade 22 and the outer peripheral blade 26 form a blade edge 23 and a blade edge 27, respectively. The rotating shaft of the inner peripheral blade 22, the rotating shaft of the outer peripheral blade 26, and the holding shaft 29 are coaxial about the rotating shaft 56, and the cutting edge 23, the cutting edge 27, and the outer peripheral surface of the holding shaft 29 are connected to the rotating shaft 56. It draws a concentric circle with a center.

  There is a possibility that the glass disk 12 may be damaged when the small-diameter cutting edge 23 comes into point contact with the glass disk 12 in an initial stage of core drilling and an excessive grinding force is applied to the glass disk 12. Therefore, the cutting edge 23 of the inner peripheral blade 22 is configured to be slightly retracted from the cutting edge 27 of the outer peripheral blade 26 so that the cutting edge 27 of the outer peripheral blade 26 contacts the glass disk 12 first.

For example, the inner peripheral edge 22 has a grindstone count of # 80 to 300, and the material is diamond, silicon carbide (SiC), silicon nitride (Si ₃ N ₄ ), or tungsten carbide (WC). Is 0.2 to 1.0 mm.

For example, the outer peripheral blade 26 has a grinding wheel count of # 150 to 800, and the material is diamond, silicon carbide (SiC), silicon nitride (Si ₃ N ₄ ), tungsten carbide (WC), or hardened steel, and the cutting edge 27 has a thickness of 0.3 to 3.0 mm.

  When grinding is performed at the same rotational speed using the inner peripheral edge 22 and the outer peripheral edge 26 having the same grinding ability, the peripheral speed at the outer peripheral part becomes faster than the peripheral speed at the inner peripheral part. The part is ground quickly, but the inner peripheral part is difficult to grind. In order to solve such a problem, the grinding wheel count of the inner peripheral blade 22 is made smaller than that of the outer peripheral blade 26, and the grinding ability of the inner peripheral blade 22 is made higher than the grinding ability of the outer peripheral blade 26. The inner peripheral grinding degree and the outer peripheral grinding degree when grinding is performed at the same rotational speed are configured to be substantially the same.

  A rotation drive mechanism (not shown) for rotating the integrated core drill 20 is provided on the upper part of the integrated core drill 20. For example, the gear portion formed on the outer peripheral upper surface of the outer peripheral blade 26 of the integrated core drill 20 is engaged with the gear portion of the rotational drive mechanism, and the rotational drive force of the motor of the rotational drive mechanism is passed through both gear portions. Are transmitted to the integrated core drill 20. And the glass disk laminated body 10 is ground by pushing down the integral core drill 20 which rotates at high speed toward the glass disk laminated body 10. The number of rotations per minute of the integrated core drill 20 is, for example, 100 to 1000 rpm.

  For example, the glass disk laminate 10 includes a thin-walled bonding agent or spacer in which a glass disk 12 made of a roughly rectangular or roughly circular borosilicate glass having an outer diameter of 50 to 100 mm and a thickness of 0.6 to 1.35 mm. It is laminated through. The bonding agent is selected from general adhesives, waxes, thermosetting resins, photocuring resins and the like. The spacer is selected from a resin material, a fiber material, a rubber material, a metal material, a ceramic material, and the like. The number of laminated glass disks 12 is 10 to 100. By core drilling, for example, a donut plate having an inner diameter of 20 mm, an outer diameter of 85 mm, and a thickness of 0.65 mm, an inner diameter of 12 mm, an outer diameter of 40 mm, and a thickness of 0.6 mm, an inner diameter of 15 mm, an outer diameter of 45 mm, and a thickness of 1.1 mm Or a glass disk 12 of a donut plate having an inner diameter of 12 mm, an outer diameter of 65 mm, and a thickness of 1.35 mm.

  The holding shaft 29 and the holding base 42 are made of a rigid material such as a stainless material (for example, SUS304). The cylindrical outer surface and bottom surface of the holding shaft 29 and the upper surface of the holding table 42 are smoothed by electrolytic polishing to reduce friction between the inner surface of the integrated core drill 20 and the glass disk 12. Of course, in order to prevent an impact stress from being applied to the glass disk laminate 10, an elastic buffer material such as rubber is provided between the glass disk laminate 10 and the holding shaft 29 and between the glass disk laminate 10 and the holding table 42. It is preferable that each intervenes.

  The cylindrical holding shaft 29 extends vertically downward with respect to the holding base 42. The holding shaft 29 is biased toward the holding table 42, that is, downward, and the glass disk stack 10 is sandwiched between the holding shaft 29 and the holding table 42. Therefore, the integrated core drill 20 can rotate at a high speed in a state in which shaft center blurring hardly occurs.

  Since the integrated core drill 20 rotated at a high speed is pressed against the glass disk laminated body 10 in a state in which shaft center blurring hardly occurs, as shown in FIG. 3, the outer peripheral surface 17 and the inner peripheral surface 18 are core drilled with high accuracy. The obtained glass disk laminated body 10 is obtained. The glass disk 12 is not damaged at the initial stage of processing when the integrated core drill 20 starts to contact the glass disk 12.

  Thus, the glass disk laminated body 10 in which the outer peripheral surface 17 and the inner peripheral surface 18 are core-drilled is subjected to a chemical finishing process that is immersed in an etching solution containing hydrofluoric acid and sulfuric acid while maintaining the laminated state. Is done. Then, by removing the bonding agent or spacer from the glass disk laminate 10, the glass disk laminate 10 is separated into a large number of glass disks 12 that have been subjected to coring. As a result, the outer peripheral surface 18 and the inner peripheral surface 17 of each glass disk 12 are smooth surfaces from which latent scratches have been removed, and the edge portion of each glass disk 12 is chamfered.

  Next, the manufacturing method of the information recording medium glass disk 12 according to the second embodiment of the present invention and the manufacturing apparatus 2 used therefor will be described in detail with reference to FIG. The difference will be mainly described.

  As shown in FIG. 4, the apparatus 2 for manufacturing the information recording medium glass disk 12 is mainly composed of a separate core drill 30, a support column 50, an arm 52, and a holding table 42.

  As shown in FIG. 4, the separation-type core drill 30 is configured such that the inner peripheral blade 32 and the outer peripheral blade 36 are separately rotationally driven on the same rotation shaft 56. That is, the inner peripheral blade 32 and the outer peripheral blade 36 have a substantially cylindrical shape, and their upper end portions are connected to the inner shaft 34 and the outer shaft 38, respectively. The lower end portions of the inner peripheral blade 32 and the outer peripheral blade 36 form a blade edge 33 and a blade edge 37, respectively. The inner shaft 34 and the outer shaft 38 inserted through the shaft hole of the outer shaft 38 are disposed coaxially with the rotation shaft 56. The cutting edge 33 of the inner peripheral blade 32 and the cutting edge 37 of the outer peripheral blade 36 draw concentric circles around the rotation axis 56. For example, the thickness of the blade edge 33 is 0.2 to 1.0 mm, and the thickness of the blade edge 37 is 0.3 to 3.0 mm.

  When core drilling is performed using the inner peripheral edge 32 and the outer peripheral edge 36 at the same time, the cutting edge 33 of the inner peripheral edge 32 contacts the glass disk 12 in a point at the initial stage of the core drilling process, and an excessive grinding force is applied to the glass disk 12. The blade edge 33 of the inner peripheral blade 32 is positioned so as to be slightly retracted from the blade edge 37 of the outer peripheral blade 36 so that the glass disk 12 is not damaged by being loaded.

  The holding table 42, the support column 50, and the arm 52 are made of a rigid material such as a stainless material (for example, SUS304). A ring-shaped elastic buffer member 46 is disposed on the upper surface of the holding table 42. An adsorption passage 44 is disposed in the elastic buffer member 46 and the holding table 42. The glass disk laminate 10 is fixed to the holding table 42 by adsorbing the lower surface of the glass disc laminate 10 with an adsorption pump (not shown) communicating with the adsorption passage 44. Although the lower surface of the glass disk laminate 10 is separated from the upper surface of the holding table 42 by the installation of the elastic buffer member 46, the inner blade 32 collides with the holding table 42 at the center of the upper surface of the holding table 42. A relief recess 47 for the inner blade to prevent is provided. Further, an annular outer blade relief recess 49 is provided on the upper surface of the holding table 42 to prevent the outer blade 36 from colliding with the holding table 42.

  The support column 50 extends vertically upward of the holding table 42, and the arm 52 extends in the horizontal direction (lateral direction) of the support column 50. A drive motor 54 is attached to the upper surface of the arm 52. An inner shaft 34 and an outer shaft 38 are inserted coaxially with the rotary shaft 56 in a shaft support portion 58 that penetrates the arm 52 in the vertical direction. By switching the gear portion of the drive motor 54, it is rotationally driven in three patterns: driving only the inner shaft 34, driving only the outer shaft 38, or simultaneously driving the inner shaft 34 and the outer shaft 38. be able to. Then, the inner shaft 34 and the outer shaft 38 can be slid in the vertical direction of the rotary shaft 56 independently by pressing means (not shown). Therefore, the inner shaft 34 and the outer shaft 38 that are rotationally driven at high speed can slide independently in the vertical direction of the rotating shaft 56, and can be used for core drilling of the glass disk stack 10.

In the separated core drill 30, the rotation speeds of the inner peripheral blade 32 and the outer peripheral blade 36 can be adjusted separately. Therefore, when the inner peripheral blade 32 and the outer peripheral blade 36 having the same grinding ability are used, the rotational speed of the inner peripheral blade 32 that decreases the rotational speed of the outer peripheral blade 36 that increases the peripheral speed and decreases the peripheral speed. The degree of grinding can be appropriately changed by increasing. For example, the grindstone count is # 150 to 800, and the material is diamond, silicon carbide (SiC), silicon nitride (Si ₃ N ₄ ) or tungsten carbide (WC) and the grindstone is used in common for each inner peripheral edge 32. By setting the number of revolutions to 300 to 2000 rpm and the number of revolutions of the outer peripheral blade 36 to 50 to 500 rpm, the grinding ability can be made substantially the same by changing the number of revolutions. By making the grinding ability of the inner peripheral blade 32 and the outer peripheral blade 36 substantially the same and adjusting the life of the grindstone to the same level, the management of the inner peripheral blade 32 and the outer peripheral blade 36 becomes very easy.

  In addition, as described above, the rotation speeds of the outer peripheral blade 36 and the inner peripheral blade 32 can be adjusted independently. However, as in the first embodiment, the grindstone count of the inner peripheral blade 32 is set to the outer peripheral blade 36. By making it smaller than that, the grinding ability of the inner peripheral blade 32 can be made higher than the grinding ability of the outer peripheral blade 36, and the inner peripheral grinding degree and the outer peripheral grinding degree can be made substantially the same.

  Therefore, the glass disk laminated body 10 can be core-processed with high accuracy, and substantially the same degree of grinding can be realized in the inner peripheral portion and the outer peripheral portion.

2: Glass disk manufacturing apparatus for information recording medium 10: Glass disk laminate 12: Glass disk 14: Spacer 17: Outer peripheral surface 18: Inner peripheral surface 20: Integrated core drill 22: Inner peripheral blade 23: Cutting edge 26: Outer peripheral blade 27: Cutting edge 29: Holding shaft 30: Separable core drill 32: Inner peripheral blade 33: Cutting edge 34: Inner shaft 36: Outer blade 37: Cutting edge 38: Outer shaft 42: Holding base 44: Suction passage 46: Buffer member 47: Inner Blade relief recess 49: Outer blade relief recess 50: Strut 52: Arm 54: Drive motor 56: Rotating shaft 58: Shaft support

Claims (2)

A glass disk laminate in which a large number of information recording medium glass disks are laminated is fixed to a holding table,
A separation-type core drill in which the inner peripheral blade and the outer peripheral blade are separately rotated on the same rotation axis is driven to rotate about the rotation axis and is slid to the glass disk laminate side along the rotation axis. In the method for manufacturing a glass disk for information recording medium, which processes the inner and outer peripheral surfaces of the glass disk laminate ,
A glass for an information recording medium, wherein the grinding ability of the inner peripheral blade is higher than the grinding ability of the outer peripheral blade by making the count of the grindstone of the inner peripheral blade smaller than the count of the grindstone of the outer peripheral blade. Disc manufacturing method. A separate core drill in which the inner peripheral blade and the outer peripheral blade are separately driven to rotate on the same rotational axis;
A drive unit for rotationally driving the separated core drill;
A holding table to which a glass disk laminate in which a plurality of glass disks for information recording media are laminated is detachably fixed;
A holding member which separated axially supported to be slidable separately and the inner peripheral edge of the shaft and the outer peripheral edge of the shaft of the core drill rotates, the provided,
A glass for an information recording medium, wherein the grinding ability of the inner peripheral blade is higher than the grinding ability of the outer peripheral blade by making the count of the grindstone of the inner peripheral blade smaller than the count of the grindstone of the outer peripheral blade. Disc manufacturing equipment.

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