JP5076233B2 - Method for adjusting initial position and orientation of exposure mask - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for checking a positional relation between each of a plurality of exposure masks in a mask holder and a substrate as an exposure object and for easily adjusting the initial position and posture of each of the plurality of exposure masks. <P>SOLUTION: The method includes steps of: photographing a second alignment mark on a substrate W with a CCD camera 6 and setting a position of the CCD camera 6 so as to position the photographed image at a predetermined position on an image of the camera 6; memorizing a position data of the second alignment mark at the set position on the image of the CCD camera 6; comparing the position data of a first alignment mark on the image of the CCD camera 6 obtained by photographing the first alignment mark of a mask 4a with the CCD camera 6, with the position data of the second alignment mark; and adjusting the initial position and posture of the exposure mask 4a so as to minimize a positional shift amount between the first alignment mark and the second alignment mark. <P>COPYRIGHT: (C)2009,JPO&amp;INPIT

Description

  The present invention relates to a method for adjusting the initial position and orientation of a proximity exposure mask. More specifically, the present invention relates to the initial position and orientation of an exposure mask in an exposure apparatus that performs continuous proximity exposure using a mask smaller than an exposure target substrate. It relates to the adjustment method.

With the recent increase in the size of substrates such as color filters of liquid crystal display devices, the exposure apparatus used for exposure has an exposure mask smaller than the exposure target substrate placed closer to the exposure target substrate and the exposure pattern of the exposure mask is set. An apparatus (hereinafter referred to as “proximity exposure apparatus”) that performs transfer exposure on a substrate to be exposed has been proposed.
In this proximity exposure apparatus, the exposure target substrate is moved while being stepped to a predetermined exposure position (Patent Document 1) and the exposure target substrate is moved while being continuously moved to a predetermined exposure position. (Patent Document 2) However, in any method, the exposure pattern of the exposure mask is intermittently or continuously transferred to the exposure target substrate held below the mask holder. While performing alignment with the target substrate at each step or continuously, the exposure pattern of the exposure mask is transferred and exposed to the exposure target substrate.
JP 2002-265810 A JP 2006-323188 A

However, when a plurality of exposure masks smaller than the exposure target substrate are arranged in a plane on a mask holder and used as one mask unit, the initial position and orientation of each of the plurality of exposure masks is step-feed, or If the position and posture are not correct with respect to the substrate to be continuously fed, there is a problem that the exposure target substrate is repeatedly exposed with the exposure pattern due to the incorrect position and posture.
In particular, when the exposure pattern of the exposure mask is slit-shaped as shown in FIG. 3, the exposure target substrate is wider than the slit width unless the slit is parallel to the transport direction of the exposure target substrate. Therefore, when the continuous proximity exposure apparatus is assembled, it is necessary to set the position and orientation of the exposure mask so as to be in an appropriate position in parallel with the transport direction of the exposure target substrate.
In order to set the position and orientation of the exposure mask in advance so as to be in an appropriate position parallel to the transport direction of the exposure target substrate, each of the exposure mask and the exposure target is set when the continuous proximity exposure apparatus is assembled. It is necessary to set the initial position of the exposure mask while checking the positional relationship with the substrate, and there is a problem that the assembly work time of the continuous proximity exposure apparatus cannot be shortened.

  Accordingly, in view of the above-described conventional problems, the present invention checks the positional relationship between at least one exposure mask in the mask holder and the exposure target substrate, and easily determines the initial position and each of the exposure masks. It aims to provide a way to set posture.

The present invention is characterized by the following points in order to solve the above problems.
An exposure mask exposure pattern is disposed, a mask holder arranged at least one said exposure mask, the mask drive control means for controlling the attitude or position of each of the exposure mask in said mask holder If it has a substrate conveying means for continuously conveying a substrate to be exposed in the direction perpendicular to the array direction of the front Symbol dew light mask, along the front Symbol dew light patterns in the moving direction of the exposure target substrate, continuous to expose, that put a continuous proximity exposure apparatus,
A plurality of first alignment marks provided on the light-shielding portion of the exposure mask, the corresponding first alignment mark, a plurality of second alignment marks provided on the unexposed areas of the exposure target substrate If, continuous proximity exposure apparatus, the exposure target is provided at a position below the substrate, carried out using a plurality of imaging means for imaging said plurality of first and second alignment marks, the exposure mask a initial position and orientation adjustment method, a second alignment mark of the exposure target substrate from moving upward of the imaging means, and imaging the second alignment mark in said image pickup means, as the center of the image of the second alignment mark that are image pickup is positioned substantially at the center of the image of the imaging means, after fixing the position of the imaging means, the SL image pickup means is fixed In position, after storing the location data on the image of the imaging unit of the center of the second alignment mark, once the second alignment marks of the exposure target substrate, moved out of the imaging region of the imaging means It was allowed to, by imaging the first alignment mark in said image pickup means, after storing the location data on the image of the imaging unit of the center of the alignment mark of the first, the first, which is the storage A positional shift between the first alignment mark and the second alignment mark is performed by comparing the position data of the center position of the alignment mark and the corresponding position data of the center position of the stored second alignment mark. calculating the amount, based on the positional deviation amount issued the calculated, so that the positional displacement amount is minimized, and characterized in that the drive control of the exposure mask That, adjusting method of an exposure mask initial position and orientation in the continuous proximity exposure device.

The present invention has the following excellent effects.
In the invention according to claim 1, by using the above-described method, the second alignment mark of the substrate to be exposed is moved above the imaging unit, and then the second alignment mark is imaged by the imaging unit. Then, in order to set the position of the imaging means so that the image of the imaged second alignment mark is located within a predetermined range of the image of the imaging means, the position of the second alignment mark and the imaging The rough alignment of the means can be easily performed.
Then, the first alignment mark of the exposure mask is imaged by the imaging unit whose position has been adjusted, so that the position data of the first alignment mark is shifted with reference to the position data of the second alignment mark. Since each mask for exposure is driven and controlled by the mask moving means so that the amount of deviation is minimized, the initial position and orientation of each mask for exposure can be easily set. Yes.

Hereinafter, an exposure mask setting method according to an embodiment of the present invention will be described with reference to the accompanying drawings (FIGS. 1 to 8).
First, FIG. 1 is a conceptual diagram showing a continuous proximity exposure apparatus 1. Based on the continuous proximity exposure apparatus 1, an exposure mask setting method according to an embodiment of the present invention is performed.

  The continuous proximity exposure apparatus 1 is provided below the exposure station 2 and the exposure station 2, and a substrate transport means 5 that advances and retracts an exposure target substrate (hereinafter referred to as “substrate”) W in the direction of the arrow A to the exposure station 2. The imaging means 6 for imaging an alignment mark (hereinafter referred to as “second eye mark”) provided on the substrate W, which will be described later, from the lower side of the substrate W, and a specific part that is an exposure reference of the substrate W An exposure reference imaging means (not shown), an image recognition light source (not shown) for illuminating the substrate W from below, and a contact control device 7 are provided. The exposure pattern of 4a is transferred and exposed to the substrate W.

The exposure station 2 includes an exposure light source 3 and a mask holder 4 installed below the exposure light source 3.
As shown in FIG. 3, the mask holder 4 has a plurality of masks 4 a (FIG. 2) perpendicular to the transport direction of the substrate W in the same plane perpendicular to the optical axis (optical path) L of the exposure light source 3. They are arranged in series in various directions.
Further, a mask driving device (not shown) is attached to each of the plurality of masks 4a, and each mask 4a is moved in the mask holder 4 in the X and Y axis directions by the mask driving device. And it can be rotated on an axis perpendicular to the mask 4a (direction perpendicular to the paper surface of FIG. 2).

As shown in FIG. 2c, the mask 4a includes a rectangular transparent plate 40 and a light shielding film 41 applied to one surface of the transparent plate 40 (a surface on which exposure light is irradiated). A plurality of slit-shaped openings (hereinafter referred to as “slits”) 42 are provided at predetermined intervals along the long side direction (Y-axis direction) of the mask 4a in parallel with the short-side direction (X-axis direction). In addition, alignment marks (hereinafter referred to as “first eye marks”) are provided at the corners on the surface side of the transparent plate 40 facing the light shielding film 41 (FIG. 2b).
Furthermore, the length α of the slit 42 is set to be the same as the length β in the X-axis direction (the transport direction of the substrate W) of a pixel Wa of the substrate W, which will be described later, and the width D is in the Y-axis direction of the pixel W1. The width P is set to be slightly larger than the width d, and the mutual interval P between the slits 42 and 42 is set to be the same as the pitch interval p in the X-axis direction of each colored layer of the pixel W1.
In addition to the fact that the lines connecting the centers of the slits 42 and 42 of the respective masks 4a can be positioned on the optical axis L by the mask driving device, as described later, It can be matched with a second eye mark of the substrate W, which will be described later, corresponding to the first eye mark.

  Further, the mask holder 4 is moved and adjusted in the X and Y axes in the horizontal plane perpendicular to the optical axis L by a mask holder driving means having a servo motor, a linear motor, a required transmission mechanism and the like (not shown), position adjustment, and mask holder. The position of the turning angle about an axis centering on the center of 4 (direction perpendicular to the paper surface of FIG. 3) can be adjusted.

The substrate transport means 5 is disposed along the horizontal plane perpendicular to the optical axis L in the exposure station 2, and the substrate W can be placed parallel to the horizontal plane and moved forward and backward in the direction of arrow A toward the exposure station 2. A servo motor, a required transmission mechanism, and a position sensor (none of which is shown) for detecting the position of the substrate W in the direction of arrow A in FIG. 1 are provided, and based on the detection value of the position sensor. The operation of the substrate transfer means 5 is feedback-controlled by a control device 7 which will be described later.
Below the substrate transport means 5, a CCD camera 6 for imaging the first eye mark of the mask 4a or the second eye mark of the substrate W from below is the number of second eye marks on the substrate W. A number equal to is provided.
Each CCD camera 6 images a predetermined region (two-dimensional) including the first eye mark of the corresponding mask 4a or the second eye mark of the substrate W, and the substrate W is placed at a predetermined position. When transported, all the second eye marks on the substrate W are set at an initial position so as to be accommodated in the image of the corresponding CCD camera 6.

The substrate W is, for example, a color filter substrate, and as shown in FIG. 4, each colored layer (red R, green G) linearly aligned in the black matrix in the transport direction (Y-axis direction) of the substrate W, as shown in FIG. , Blue B) pixels (reference patterns) Wa which are rectangular openings are arranged in a plurality of rows in the Y-axis direction perpendicular to the transport direction, and the surface of the substrate W is exposed at the exposure station 2. It moves along a horizontal plane perpendicular to the optical axis L of the exposure light source 3.
A plurality of second eye marks are provided in the non-exposure area on the front side (left side in FIG. 4) of the substrate W in the transport direction.
Note that the second eye mark is the first eye mark of the mask 4a when the mask 4a is set at a predetermined position and posture with respect to the substrate W (the posture in which the slit 42 of the mask 4a is parallel to the pixel Wa). It is provided at a position on the substrate W corresponding to the eye mark.

The control device 7 controls the operation of the entire apparatus, and includes a substrate transport means 5, an exposure light source 3, the mask driving device and mask holder driving means, a CCD camera 6, an external input means (personal computer) (hereinafter referred to as a “computer”). "External PC") is connected.
The control device 7 is provided with respective controllers (not shown) for the substrate transport means 5, the exposure light source 3, the mask drive device and the mask holder drive means, and the image is taken by the CCD camera 6. An A / D converter (not shown) that converts an image signal into a digital signal, an image processing unit (not shown) that processes the digitally converted image signal, and a memory that stores the image processed data And a calculation unit (not shown) for extracting the data stored in the memory and comparing and calculating the coordinates of the first eye mark and the second eye mark. Yes.

The difference (position shift amount) (Δx, Δy in FIG. 7c) between the coordinate data of the first eye mark and the second eye mark (Δx, Δy in FIG. 7c) obtained by the comparison operation in the arithmetic unit is determined in advance. When it is out of the range, a signal is sent from the calculation unit to the controller of the mask driving device, and the controller of the mask driving device is driven and controlled based on this signal.
Further, the respective controllers are controlled based on the exposure conditions stored in advance in the external PC, and the operations of the substrate transport means 5, the exposure light source 3, and the mask holder driving means are appropriately controlled. ing.

Next, a method for adjusting the initial position and orientation of the mask 4a according to an embodiment of the present invention will be described based on the continuous proximity exposure apparatus 1 configured as described above.
First, in step 1 (S1), a substrate W provided with a second eye mark in advance is placed at a predetermined position and posture on the substrate transport means 5 of the continuous proximity exposure apparatus 1, and the control device 7 is operated. In this state, after the CCD camera 6 is operated, the substrate transport means 5 is operated, and the image of the second eye mark on the substrate W is advanced to a position where it is approximately in the center of the screen of the CCD camera 6 in the X-axis direction. And hold it (shown by broken lines in FIG. 5).

  Thereafter, in step 2 (S2), the position of each CCD camera 6 is adjusted so that the second eye mark of the substrate W is positioned at the center of the screen of each CCD camera 6 in the X-axis and Y-axis directions. (FIGS. 7a and b), each CCD camera 6 is fixed at the position (FIG. 7b), the coordinates of the center position of each second eye mark at the fixed position are calculated, and the results are respectively obtained. Is stored in the memory as the center coordinate data of the second eye mark.

Thereafter, in step 3 (S3), the substrate transfer means 5 is operated again, and the substrate W is moved to a position where the first eye mark image of each mask 4a can be picked up by each CCD camera 6. The substrate W is held by retreating in the direction opposite to the direction (a).
Thereafter, in step 4 (S4), the first eye mark of each mask 4a is imaged by each CCD camera 6 (FIG. 6), and the coordinates of the center position of each first eye mark are calculated. The result is stored in the memory as the center position data of each first eye mark.

Thereafter, in step 5 (S5), the arithmetic unit compares the center coordinate data of each second eye mark stored in the memory with the center position data of each first eye mark. Then, it is determined whether the positional deviation amount (Δx, Δy in FIG. 7c) is within an allowable range.
If it is determined that the predetermined range is not satisfied (FIG. 6c), a signal is sent from the arithmetic unit to the mask driving unit, the mask driving unit is controlled, and the positional deviation amount is within an allowable range (FIG. 6d). ), The position and posture of the mask 4a are adjusted.
The allowable range of the deviation amount is determined in advance according to the exposure allowable width of the pixel (reference pattern) Wa of the substrate W.
If it is determined in the determination that the value is within the allowable range, no signal is sent from the calculation unit to the mask driving means, and the position and orientation of the mask 4a are not adjusted.

  Therefore, according to the setting method for exposure according to the embodiment, the position of the CCD camera 6 of the detection means for positioning is set on the basis of the substrate W, and the CCD camera 6 fixed at that position is placed on the mask 4a. Therefore, even when a plurality of small masks 4a are used, the initial positions and postures of the plurality of masks 4a with respect to the substrate W can be easily set. Can do.

It is a conceptual diagram which shows the continuous proximity exposure apparatus which concerns on the 1st Embodiment of this invention. It is the schematic for demonstrating the structure of a mask. It is the schematic for demonstrating the structure of a mask holder. It is explanatory drawing for demonstrating the structure of a workpiece | work, Comprising: (a), (b), (c) is the schematic seen from the upper surface, the back surface, and the side surface, respectively. It is the schematic for demonstrating the method of imaging each eye mark of a board | substrate with a CCD camera. It is the schematic which shows the image which imaged each eye mark of the board | substrate and mask by a CCD camera, (a) shows the state which imaged the 2nd eye mark, (b) shows the center of the image of a CCD camera. An image in a state where the position is set substantially at the center of the eye mark of the table 2 is shown, (c) is an image of the first eye mark by the CCD camera after the position is set, and (d) is a mask driving means for each mask. The image of the 1st eye mark after the position and attitude | position of this are controlled is shown. It is the schematic for demonstrating the method of imaging the eye mark of each mask in a mask holder with a CCD camera. It is a flowchart explaining the initial position and attitude | position adjustment procedure of a mask.

Explanation of symbols

1 Continuous proximity exposure system 2 Exposure station (exposure section)
3 Exposure light source 4 Mask 5 Substrate transport means 6 Imaging means 7 Control device W Work L Optical axis (optical path)

Claims (1)

An exposure mask provided with an exposure pattern; a mask holder in which at least one of the exposure masks is arranged; and a mask drive control means for controlling the posture or position of the exposure mask in the mask holder. And substrate transport means for continuously transporting the exposure target substrate in a direction perpendicular to the arrangement direction of the exposure mask, and continuously exposing the exposure pattern along the movement direction of the exposure target substrate. , In continuous proximity exposure equipment,
A plurality of first alignment marks provided on the light-shielding portion of the exposure mask, the corresponding first alignment mark, a plurality of second alignment marks provided on the unexposed areas of the exposure target substrate And a plurality of imaging means for imaging the plurality of first and second alignment marks provided at a position below the exposure target substrate of the continuous proximity exposure apparatus. An initial position and posture adjustment method for
The second alignment marks of the exposure target substrate from moving upward of the imaging means, and imaging the second alignment mark by the imaging means, the image of the second alignment marks which are image pickup center so as to be located substantially at the center of the image of the imaging means, after fixing the position of the imaging means, in the SL position where the imaging means is fixed, the imaging unit center of said second alignment mark after storing the position data of the image, the temporarily second alignment mark of an exposure target substrate, from moving out of the imaging region of the imaging means, imaging the first alignment mark in said image pickup means Te, after storing the location data on the image of the imaging unit of the center of the alignment mark of the first, the position of the center position of the first alignment marks which are the storage data If, by comparing the position data of the center position of the second alignment mark the stored corresponding thereto to calculate the positional shift amount between the second alignment mark and the first alignment marks, issued the calculated The exposure mask initial position and orientation adjustment method in the continuous proximity exposure apparatus, wherein the exposure mask is driven and controlled so that the positional deviation amount is minimized based on the positional deviation amount.