JP5076063B2 - Actuator - Google Patents

Description

  The present invention relates to an actuator that performs highly accurate positioning within a fine operation range.

  In the fields of manufacturing semiconductors, liquid crystal display panels, and plasma displays, precision processing, and precision measurement, the minimum resolution is nanometer level, and high-speed and high-precision positioning technology is required. In applications that require an operating range of about 10 mm to several meters, in many cases, a stage that combines a static linear bearing guide or a linear guide supported by a ball or roller bearing with a synchronous linear motor, or synchronization In order to convert the rotary servo motor of the mold and the rotational force into a thrust, a stage configured by combining a ball screw, an oil static pressure, an air static pressure screw or the like is used.

  In applications that require an operating range of several μm to 500 μm, there are actuators that combine a multilayer piezoelectric element with a mechanism that expands displacement, or unimorph or bimorph actuators that have a piezoelectric ceramic bonded to a metal plate. Many applications have been made (for example, Patent Document 1 and Patent Document 2).

There are various types of drive mechanisms and support mechanisms that constitute the precision positioning mechanism, and the mechanism that is considered to be optimal is usually selected in accordance with the required positioning accuracy specifications and operation range. However, when high speed as well as positioning accuracy is obtained as a condition for selecting an actuator, the basic characteristics of the actuator potentially require a high primary resonance frequency and a small amplitude peak value at that time. In order to satisfy such a requirement, it is necessary to eliminate sliding friction that hinders the increase of the resonance frequency. For these reasons, aerostatic bearings are used in precision stages and linear motion actuators whose operating range is several tens of millimeters or more. In addition, fine movement stages and actuators having an operation range of several hundred μm or less are mainly provided with a support mechanism using elastic deformation (for example, Patent Document 3).
Japanese Patent Laid-Open No. 3-60084 Patent No. 3334450 JP-A-2-131373

  However, when considering an actuator that can be positioned with high speed and high accuracy within an operating range of 100 μm to 10 mm or less, a static pressure air bearing has a complicated mechanism and is not suitable for downsizing of the actuator. In addition, a support mechanism using elastic deformation cannot follow the operating range as described above.

  If the actuator thrust generation part is also assumed to be downsized, the electromagnetic type that forms the basis of the synchronous servo motor has a complicated structure and cannot be said to be suitable for downsizing. Piezoelectric and electrostatic actuators cannot be said to be suitable for actuators having an operating range of mm or more. Therefore, when ultra-precision positioning at the nm level is possible and the operation range is limited to the linear motion type actuators at the mm level, the optimum thrust generator and support mechanism for these actuators are not included even if high speed requirements are not included. There is no standard.

  As described above, an actuator having a positioning accuracy of less than nm and an operation range of several millimeters is provided with a configuration that can be said to be a standard drive mechanism and support mechanism in spite of potentially many demands. However, if a request for higher speed is included, it is an undeveloped area at present.

  The present invention has been made in view of the above points, and an object of the present invention is to provide an actuator that has a wide operating range and can be positioned with high accuracy at high speed.

  In order to achieve the above object, an actuator according to an aspect of the present invention includes a support spring mechanism whose operation direction is restricted in one direction, a movable portion supported by the support spring mechanism, and an operation direction of the support spring mechanism. And a thrust generating mechanism that generates a thrust along the movable portion and applies the thrust to the movable portion.

The support spring mechanism includes a block spring formed in a frame shape, and the block spring includes a support portion, the movable portion facing the support portion with a gap therebetween, and the support portion and the movable portion. A pair of substantially parallel spring portions extending along the one direction, each spring portion being elastically deformable in the one direction and being restrained from being displaced in the other direction,
The thrust generating mechanism includes a cylindrical stator yoke that is fixed to the support portion of the block spring and extends coaxially with the one direction, and passes between the support portion and between the pair of spring portions and in the stator yoke. And a movable support having an end connected to the movable portion and between the movable support and the stator yoke in the stator yoke. A coil and a magnet .
The support spring mechanism has a pair of spring portions and positively elastically deforms due to the generation of thrust in the operating direction, that is, the linear motion direction, but is structurally highly rigid and deforms except in the linear motion direction. It is supported not to. Therefore, there is no frictional friction affecting the resonance frequency, and the actuator is accurately operated only in the linear motion direction while keeping the spring constant high, and the movable portion of the actuator is linearly moved with high accuracy.

  According to the present invention, it is possible to provide an actuator that has a wide operating range and can be positioned with high accuracy at high speed.

Hereinafter, an actuator according to an embodiment of the present invention will be described in detail with reference to the drawings.
FIG. 1 and FIG. 2 are a perspective view and a cross-sectional view showing an electromagnetic actuator 10. As shown in these drawings, the actuator 10 includes a support spring mechanism 12 in which an operation direction, here, a linear movement direction B is constrained in one direction, a movable portion 14 supported by the support spring mechanism, and a support spring. An electromagnetic thrust generating mechanism 16 that generates an electromagnetic force along the operation direction of the mechanism is integrally provided.

  The support spring mechanism 12 has a rectangular frame-shaped block spring 20. The block spring 20 includes a prismatic support portion 22, a prismatic movable portion 14 facing the support portion 22 in a substantially parallel manner with a gap therebetween, and parallel to each other extending between the support portion 22 and the movable portion 14. It has a pair of prismatic spring portions 25 and is formed in a substantially rectangular frame shape as a whole. The block spring 20 has a central axis C extending through the centers of the support portion 22 and the movable portion 14, here, a longitudinal axis of the block spring, and the pair of spring portions 25 extend in parallel with the central axis C. Yes. A disk-shaped flange 23 is formed on the support portion 22 and extends outward from the entire circumference of the support portion 22. A through hole 21 extending coaxially with the central axis C is formed in the support portion 22.

  The block spring 20 including the flange 23 is integrally formed of a highly rigid material such as a metal such as duralumin (high-strength aluminum), stainless steel, copper alloy, titanium alloy, or ceramics. The material of the block spring 20 is selected according to the balance between the required amount of displacement and rigidity.

  In each spring portion 25, a plurality of, for example, three spring slits 26 a are formed on one side surface extending in parallel with the central axis C. These spring slits 26a are formed in parallel with a gap therebetween and extend in a direction perpendicular to the central axis C. In each spring portion 25, a plurality of, for example, two spring slits 26 b are formed on the other side surface extending in parallel with the central axis C and facing the side surface. These spring slits 26b are formed in parallel with a gap therebetween and extend in a direction perpendicular to the central axis C. In addition, the spring slits 26b are provided alternately with the spring slits 26a in a direction parallel to the central axis C.

  Each of the pair of spring portions 25 constitutes a parallel spring that is restricted in operation only in the buckling direction, here, in the linear motion direction B parallel to the central axis C and extends in the linear motion direction B. The movable portion 14 is supported by the support portion 22 via the pair of spring portions 25, and is movable in a constrained direction B in accordance with the direct movement of the spring portion 25.

  The support spring mechanism 12 is a highly rigid spring support mechanism that constrains deformation other than the linear movement direction by extending the spring portion 25 that constitutes a parallel spring in the buckling direction, and realizes a large operating range of several millimeters. Is realized. The spring structure itself is elastically deformed and deforms flexibly in one direction. However, the spring structure is highly rigid around the moving axis and other two orthogonal axes, and unnecessary operations other than linear motion are restricted. . Therefore, the support spring mechanism 12 can support the highly accurate linear movement of the movable portion 14.

  As shown in FIGS. 1 and 2, the thrust generating mechanism 16 is fixed to a cylindrical stator yoke 30 fixed to the flange 23 of the block spring 20 by screwing, and an open end of the stator yoke. A disc-shaped back yoke 32 is provided. The stator yoke 30 has an outer diameter substantially equal to that of the flange 23 and is arranged coaxially with the central axis C of the block spring 20. In the present embodiment, the stator yoke 30 including the back yoke 32 is used.

  A cylindrical magnet 34 and a columnar center yoke (pole piece) 36 are disposed in the stator yoke 30. The magnet 34 is fixed to the inner surface of the back yoke 32, and the center yoke 36 is fixed to the magnet and extends from the magnet to the block spring 20 side. The magnet 34 and the center yoke 36 are provided coaxially with the central axis C.

  The thrust generating mechanism 16 includes a cylindrical coil frame 38 whose one end is closed and a moving coil 40 wound around the outer periphery of the coil frame. The coil frame 38 that functions as a movable support is disposed in the block spring 20, the through hole 21 of the support portion 22, and the stator yoke 30, and extends coaxially with the central axis C. The closed end of the coil frame 38 is fixed to the inner surface of the movable portion 14 of the block spring 20 with screws. A center yoke 36 is inserted through the other end of the coil frame 38, that is, an end located in the stator yoke 30 with a gap. The moving coil 40 is wound around the outer periphery of the other end of the coil frame 38, and is disposed between the center yoke 36 and the stator yoke 30 coaxially with these yokes. These magnet 34, yoke and moving coil 40 constitute a voice coil motor (hereinafter referred to as VCM).

  According to the thrust generating mechanism 16, the magnetic flux generated from the magnet 34 flows from the center yoke 36 through the moving coil 40, the stator yoke 30 and the back yoke 32. A magnetic field is generated by energizing the moving coil 40, and an electromagnetic force parallel to the linear motion direction B in accordance with Fleming's left-hand rule by interlinking the magnetic field and the magnetic flux generated from the magnet 34, that is, Thrust D is generated. This thrust D is applied to the movable portion 14 via the coil frame 38. Therefore, the movable portion 14 is moved in the linear motion direction B together with the moving coil 40 and the coil frame 38 by the thrust D generated from the thrust generating mechanism 16.

  In general, in the case of a VCM structure having a square cross section of the coil portion, only one or two surfaces of the coil portion contribute to the thrust. On the other hand, according to the thrust generation mechanism 16 according to the present embodiment, since the entire coil surface contributes to thrust generation by using a cylindrical VCM, it is possible to increase efficiency and increase the thrust density. it can.

  The electromagnetic actuator 10 configured as described above uses a support spring mechanism 12 having a parallel spring in which operations other than the linear motion direction B are constrained, whereby vertical and horizontal straightness is 50 nm or less, and rolling and pitching is 5 seconds or less It is possible to realize a highly accurate linear motion within a range of several mm. Further, by combining the thrust generating mechanism 16 having the cylindrical VCM and the support spring mechanism 12, the control band is 1 kHz or more and the positioning accuracy is ± 0.1 nm or less (3σ: variation in positioning accuracy becomes a normal distribution. In this case, the movable portion 14 can be moved at high speed and with high accuracy within an operating range of several millimeters with a positioning accuracy of 99.7%). Therefore, it is possible to realize an actuator that has a wide operating range of several millimeters and can be positioned at high speed with high accuracy.

  Next, an actuator according to another embodiment of the present invention will be described.

  FIG. 3 shows an electromagnetic actuator 10 according to a second embodiment of the present invention. According to the present embodiment, the block spring 20 constituting the support spring mechanism 12 has a pair of spring portions 25. Each spring portion 25 is configured as a spring portion of a bellows strip that is bent a plurality of times, and each bent portion extends in a direction perpendicular to the linear movement direction B of the movable portion 14 and parallel to each other. As a result, the pair of spring portions 25 constitutes a parallel spring, and elastic deformation occurs due to the generation of thrust in the linear motion direction B, but movement other than the linear motion direction is restricted.

  In the second embodiment, the other configuration of the actuator is the same as that of the first embodiment described above, and the same parts are denoted by the same reference numerals and detailed description thereof is omitted. Also in the second embodiment, the same operational effects as in the first embodiment can be obtained.

  FIG. 4 shows an electromagnetic actuator 10 according to a third embodiment of the present invention. The actuator thrust generation mechanism is preferably a VCM type in consideration of control performance. According to the third embodiment, the thrust generating mechanism 16 includes a prismatic center yoke 36 and a rectangular tubular coil frame 38. The center yoke 36 is fixed to the back yoke 32 and extends coaxially with the central axis C of the block spring 20. The coil frame 38 is disposed in the block spring 20, the through hole 21 of the support portion 22, and the stator yoke 30, and extends coaxially with the central axis C. One end of the coil frame 38 is fixed to the movable portion 14 of the block spring 20 with screws. A center yoke 36 is inserted through the other end of the coil frame 38, that is, an end located in the stator yoke 30 with a gap. The moving coil 40 is wound around the outer periphery of the other end of the coil frame 38 in a rectangular shape.

  The thrust generating mechanism 16 includes, for example, two plate-shaped magnets 34, which are provided to face each other with the moving coil 40 interposed therebetween, and are fixed to the stator yoke 30. These magnet 34, yoke and moving coil 40 constitute a VCM.

  According to the actuator 10 according to the fourth embodiment shown in FIG. 5, the thrust generating mechanism 16 is configured as a cylindrical VCM. That is, the thrust generation mechanism 16 has a columnar center yoke 36 and a cylindrical coil frame 38. The center yoke 36 is fixed to the back yoke 32 and extends coaxially with the central axis C of the block spring 20. The coil frame 38 is disposed in the block spring 20, the through hole 21 of the support portion 22, and the stator yoke 30, and extends coaxially with the central axis C. One end of the coil frame 38 is fixed to the movable portion 14 of the block spring 20 with screws. A center yoke 36 is inserted through the other end of the coil frame 38, that is, an end located in the stator yoke 30 with a gap. The moving coil 40 is wound around the outer periphery of the other end of the coil frame 38.

  The thrust generating mechanism 16 has a magnet 34 formed in a cylindrical shape. The magnet 34 is magnetized along its radial direction, and has an S pole on the inner peripheral side and an N pole on the outer peripheral side. The magnet 34 is fixed to the inner peripheral surface of the stator yoke 30 and is positioned coaxially with the central axis C and faces the outer periphery of the moving coil 40.

  According to the above-described embodiment, the VCM is configured such that the magnet is fixed and the coil is movable, but conversely, the coil may be fixed and the magnet may be movable. According to the actuator 10 according to the fifth embodiment shown in FIG. 6, the thrust generating mechanism 16 has a configuration in which the arrangement of the VCM, magnet and coil of the actuator according to the first embodiment shown in FIG. 2 is reversed. Have. That is, the thrust generating mechanism 16 includes a cylindrical stator yoke 30 fixed to the flange 23 of the block spring 20 by screwing, and a disk-shaped back yoke fixed to the open end of the stator yoke and closing the open end. 32.

  A cylindrical end yoke 33 and a cylindrical center yoke 36 are disposed in the stator yoke 30. The thrust generating mechanism 16 includes a cylindrical frame 39 whose one end is closed. The frame 39 functioning as a movable support is disposed in the block spring 20, the through hole 21 of the support portion 22, and the stator yoke 30, and extends coaxially with the central axis C. The closed end of the frame 39 is fixed to the inner surface of the movable portion 14 of the block spring 20 with screws. One end of the center yoke 36 is fixed to the other end of the frame 39, that is, an end located in the stator yoke 30. As a result, the center yoke 36 extends coaxially with the central axis C.

A magnet 34 is fixed to the other end of the center yoke 36. The end yoke 33 is fixed to the back yoke 32. The magnet 34 and the end yoke 33 extend coaxially with the central axis C and face each other with a gap therebetween. A coil 41 is fixed to the inner peripheral surface of the stator yoke 30 and is opposed to the magnet 34 with a gap. These magnet 34, yoke and coil 41 constitute a VCM.

  According to the actuator 10 according to the sixth embodiment shown in FIG. 7, the thrust generating mechanism 16 has a configuration in which the arrangement of the VCM, magnet and coil of the actuator according to the third embodiment shown in FIG. 4 is reversed. Have. That is, the thrust generating mechanism 16 has a prismatic center yoke 36 and a rectangular tube frame 39. The center yoke 36 is fixed to the back yoke 32 and extends coaxially with the central axis C of the block spring 20. The frame 39 is disposed in the block spring 20, the through hole 21 of the support portion 22, and the stator yoke 30, and extends coaxially with the central axis C. One end of the frame 39 that functions as a movable support is fixed to the movable portion 14 of the block spring 20 with screws. A center yoke 36 is inserted through the other end of the frame 39, that is, an end located in the stator yoke 30 with a gap.

  The thrust generating mechanism 16 includes, for example, two plate-shaped magnets 34, which are fixed to the outer periphery of the other end of the frame 39 and arranged opposite to each other with the center yoke 36 interposed therebetween. Yes. A coil 41 is fixed to the inner surface of the stator yoke 30 and faces the magnet 34 with a gap. These magnet 34, yoke and coil 41 constitute a VCM.

  According to the actuator 10 according to the seventh embodiment shown in FIG. 8, the thrust generating mechanism 16 has a configuration in which the arrangement of the VCM, magnet and coil of the actuator according to the fourth embodiment shown in FIG. 5 is reversed. Have. That is, the thrust generating mechanism 16 includes a cylindrical stator yoke 30 fixed to the flange 23 of the block spring 20 by screwing, and a disk-shaped back yoke fixed to the open end of the stator yoke and closing the open end. 32.

  A cylindrical end yoke 33 and a cylindrical center yoke 36 are disposed in the stator yoke 30. The thrust generating mechanism 16 includes a cylindrical frame 39 whose one end is closed. The frame 39 functioning as a movable support is disposed in the block spring 20, the through hole 21 of the support portion 22, and the stator yoke 30, and extends coaxially with the central axis C. The closed end of the frame 39 is fixed to the inner surface of the movable portion 14 of the block spring 20 with screws. The other end of the frame 39, that is, the end located in the stator yoke 30 is formed integrally with the center yoke 36. The end yoke 33 is fixed to the back yoke 32. The center yoke 36 and the end yoke 33 extend coaxially with the central axis C and are arranged with a gap therebetween.

  A cylindrical magnet 34 is fixed around the center yoke 36 and supported so as to be movable integrally with the frame 39. The magnet 34 is magnetized with an S pole on the inner peripheral surface side and an N pole on the outer peripheral surface side. A coil 41 is fixed to the inner peripheral surface of the stator 30 and is opposed to the magnet 34 with a gap therebetween. These magnet 34, yoke and coil 41 constitute a VCM.

  In the third, fourth, fifth, sixth, and seventh embodiments, other configurations of the actuator are the same as those of the first embodiment described above, and the same parts are denoted by the same reference numerals. The detailed explanation was omitted. In the third, fourth, fifth, sixth, and seventh embodiments, the same effects as those of the first embodiment can be obtained.

According to the actuator 10 according to the eighth embodiment shown in FIG. 9, the thrust generation mechanism 16 is configured as a solenoid type that is advantageous for thrust generation using magnetic attraction and repulsion.
According to the actuator 10 according to the eighth embodiment, the thrust generating mechanism 16 includes the columnar magnet 34 and the columnar center yoke 36 disposed in the stator yoke 30. The magnet 34 is fixed to the back yoke 32 and is provided coaxially with the central axis C.

  The thrust generating mechanism 16 includes a frame 39 that functions as a movable support. The frame 39 is disposed in the block spring 20, the through hole 21 of the support portion 22, and the stator yoke 30, and extends coaxially with the central axis C. The closed end of the frame 39 is fixed to the inner surface of the movable portion 14 of the block spring 20 with screws. The other end of the frame 39, that is, the end located in the stator yoke 30 is formed integrally with the center yoke 36. The center yoke 36 extends coaxially with the central axis C and is aligned with the magnet 34 with a gap therebetween. A pole piece 35 is fixed to the magnet 34 and faces the center yoke 36. A moving coil 40 is wound around the center yoke 36.

  The magnet 34, the yokes 30, 32, and 36 and the moving coil 40 constitute a solenoid. By energizing the moving coil 40 to form an electromagnet, a thrust D utilizing magnetic attraction and repulsion between the moving coil and the magnet 34 is generated.

  In the solenoid type thrust generating mechanism 16, the magnet 34 may be movable and the coil may be fixed. According to the ninth embodiment shown in FIG. 10, the end yoke 33 and the magnet 34 are fixed side by side at the end of the frame 39, and the frame, the end yoke and the magnet are coaxial with the central axis C of the block spring 20. It extends to. The end yoke 33 and the magnet 34 are located in the stator 30.

  The thrust generating mechanism 16 includes a cylindrical center yoke 36 disposed in the stator yoke 30. The center yoke 36 is fixed to the back yoke 32, extends coaxially with the center axis C, and faces the magnet 34 with a gap. A coil 41 is wound around the center yoke 36 and faces the inner peripheral surface of the stator 30 with a gap. A magnet 34, yokes 30, 32, 33, 36 and a coil 41 constitute a solenoid.

  In the eighth and ninth embodiments, the other configuration of the actuator is the same as that of the first embodiment described above, and the same reference numerals are given to the same portions, and detailed description thereof is omitted. In the sixth and seventh embodiments, the same function and effect as in the first embodiment can be obtained.

  Note that the present invention is not limited to the above-described embodiment as it is, and can be embodied by modifying the constituent elements without departing from the scope of the invention in the implementation stage. In addition, various inventions can be formed by appropriately combining a plurality of components disclosed in the embodiment. For example, some components may be deleted from all the components shown in the embodiment. Furthermore, constituent elements over different embodiments may be appropriately combined.

  For example, the thrust generation mechanism of the actuator is not limited to an electromagnetic force such as a VCM or a solenoid type, and a mechanism for generating a thrust such as a laminated piezoelectric element can be used although there is a difference in displacement. For the purpose of improving the control performance of the actuator, for example, a viscoelastic body as disclosed in Japanese Patent No. 3612670 may be sandwiched between the support spring mechanism of the actuator and the restraint plate. In this case, the elastic body provided between the restraining plates is distorted according to the direct movement of the support spring mechanism, and a very large amplitude at the resonance frequency can be converted into heat and dissipated. As a result, the damping effect of the actuator can be obtained.

FIG. 1 is an exploded perspective view showing an actuator according to a first embodiment of the present invention, partially broken away. FIG. 2 is a cross-sectional view of the actuator taken along line AA in FIG. FIG. 3 is an exploded perspective view showing the actuator according to the second embodiment of the present invention with a part broken away. FIG. 4 is an exploded perspective view showing the actuator according to the third embodiment of the present invention with a part thereof broken. FIG. 5 is an exploded perspective view showing an actuator according to a fourth embodiment of the present invention with a part broken away. FIG. 6 is a sectional view of an actuator according to a fifth embodiment of the present invention. FIG. 7 is a sectional view of an actuator according to a sixth embodiment of the present invention. FIG. 8 is a sectional view of an actuator according to a seventh embodiment of the present invention. FIG. 9 is a sectional view of an actuator according to an eighth embodiment of the present invention. FIG. 10 is a sectional view of an actuator according to the ninth embodiment of the present invention.

Explanation of symbols

10 ... Actuator, 12 ... Support spring mechanism, 14 ... Movable part,
16 ... thrust generating mechanism, 20 ... block spring, 22 ... support part, 25 ... spring part,
26a, 26b ... spring slit, 30 ... stator yoke, 33 ... end yoke,
34 ... Magnet, 36 ... Center yoke, 38 ... Coil frame,
39 ... Frame, 40 ... Moving coil, 41 ... Coil

Claims (11)

A support spring mechanism whose operation direction is constrained in one direction, a movable part supported by the support spring mechanism, and a thrust generation mechanism for generating a thrust along the operation direction of the support spring mechanism and applying the thrust to the movable part And comprising
The support spring mechanism includes a block spring formed in a frame shape, and the block spring includes a support portion, the movable portion facing the support portion with a gap therebetween, and the support portion and the movable portion. A pair of substantially parallel spring portions extending along the one direction, each spring portion being elastically deformable in the one direction and being restrained from being displaced in the other direction,
The thrust generating mechanism includes a cylindrical stator yoke that is fixed to the support portion of the block spring and extends coaxially with the one direction, and passes between the support portion and between the pair of spring portions and in the stator yoke. And a movable support having an end connected to the movable portion and between the movable support and the stator yoke in the stator yoke. An actuator having a coil and a magnet . The thrust generating mechanism includes a stator yoke, the movable support, a moving coil wound around the movable support and provided in the stator yoke, and the moving coil and the stator yoke. The actuator of Claim 1 provided with the voice coil motor which has a magnet provided facing . The actuator according to claim 2 , wherein the movable support is formed in a cylindrical shape, and the boil coil motor has a center yoke provided in the movable support and facing the moving coil. The actuator according to claim 3 , wherein the magnet is provided coaxially with the one direction along with the center yoke, and is fixed to the stator yoke. The movable support is formed in a rectangular tube shape, the center yoke is formed in a prismatic shape, and the voice coil motor includes a plate-like magnet provided to face at least one side of the movable support. The actuator according to claim 3 . The movable support is formed in a cylindrical shape, the center yoke is formed in a columnar shape, and the voice coil motor includes a cylindrical magnet fixed to the stator yoke and disposed opposite to the periphery of the moving coil. The actuator according to claim 3 . The thrust generating mechanism includes the stator yoke, the movable support, a magnet fixed to the movable support and provided in the stator yoke, and fixed to the stator yoke and opposed to the magnet. The actuator of Claim 1 provided with the boil coil motor which has a coil . The thrust generating mechanism includes the stator yoke, the movable support, a moving coil wound around the movable support and provided in the stator yoke, and fixed to the stator yoke. The actuator according to claim 1 , further comprising a solenoid having a moving coil and a magnet provided coaxially with the one direction. The thrust generating mechanism includes the stator yoke, the movable support, a magnet fixed to the movable support and provided in the stator yoke, and fixed to the stator yoke and aligned with the magnet. The actuator of Claim 1 provided with the solenoid which has a coil provided coaxially with one direction. The support portion and the spring portion of the block spring are formed in a column shape, and each spring portion extends in a direction orthogonal to the one direction, and includes a plurality of spring slits formed with a gap in the one direction. The actuator according to any one of claims 1 to 9, further comprising: Each spring portion of said block spring is formed in a plurality of times folded bellows conditions, any one of the direction the bent portion is orthogonal to the one direction, and claims 1 and extend parallel to one another 9 The actuator according to item .

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