JP5067279B2 - Processing equipment - Google Patents

Description

  The present invention provides a technology in which a rectifying member is provided so as to surround a target object such as a glass substrate for an FPD (flat panel display) in a processing container, and processing is performed by supplying a processing gas to the target object. About.

In a manufacturing process of an LCD (Liquid Crystal Display), there is a process of performing, for example, an etching process on an aluminum (Al) film formed on a glass substrate. As shown in FIG. 17, for example, an etching processing apparatus that performs this process includes a vacuum chamber 1 and a mounting table 11 for mounting, for example, an FPD substrate S (hereinafter abbreviated as substrate S) that is an object to be processed. And a processing gas supply unit 12 for supplying an etching gas such as a chlorine (Cl ₂ ) -based gas to the substrate S on the mounting table 11. Then, the etching gas is supplied from the processing gas supply unit 12 to the substrate S on the mounting table 11, the inside of the vacuum chamber 1 is evacuated from the exhaust path 13, and high frequency power is applied to the mounting table 11 from the high frequency power supply 14. The etching gas is turned into plasma, and the aluminum film on the surface of the substrate S is etched by this plasma.

  By the way, in such etching of the aluminum film, the etching rate (reaction rate) is rate-controlled by the supply amount of the etching gas, that is, increases in proportion to the supply amount of the etching gas. Therefore, as shown in FIG. 18, for example, in the peripheral region 15 of the substrate S, the ratio of the film to be etched, that is, the aluminum film, is smaller than that in the central region 16. The aluminum film 15 is supplied with a larger amount of etching gas than the aluminum film in the central region 16, so that the etching proceeds faster than in the central region 16.

  In order to suppress such a loading effect, a gas reservoir is formed in the peripheral region 15 of the substrate S by providing a rectifying member 17 surrounding the periphery of the substrate S, for example, as shown in FIGS. Thus, the amount of etching gas supplied to the peripheral region 15 is suppressed, and the uniformity of the etching rate within the surface of the substrate S is increased. The rectifying member 17 is configured by combining four rectifying walls 171 made of horizontally long rectangular plates along each side of the substrate S so that the overall shape is a square. Further, for example, a projecting portion 172 is provided on the side surface of two of the four rectifying walls 171 facing each other so as to extend to the outside of the mounting table 11, and is connected to the lower surface of the projecting portion 172. By moving the support shaft 181 up and down by the elevating mechanism 18, as shown in FIG. 19B, the entire rectifying member 17 can be raised and lowered when the substrate S is loaded and unloaded. When the substrate S is large, for example, when one side of the substrate S is about 2 m, the rectifying wall 171 connects two plate-like bodies having a length dimension L of, for example, about 1 m in the length direction. Will be configured.

Here, such a rectifying wall 171 needs to have high resistance to the plasma because it touches the plasma of the etching gas, and does not adversely affect the high frequency power applied to the mounting table 11. It must have high electrical insulation. Therefore, the rectifying wall 171 is made of ceramics such as alumina (Al ₂ O ₃ ). Such ceramics are usually made of normal ceramics, which are dense sintered bodies. Therefore, the surface is extremely smooth as shown in FIG. 20, and the surface roughness Ra is, for example, about 1.0 μm. By the way, as shown in FIG. 21A, for example, when chlorine reacts with aluminum, a product (reaction product) is generated. The product flows to the outer peripheral side of the substrate S together with unreacted etching gas and the like, and reaches the inner wall of the rectifying member 17, gets over the rectifying member 17 and is exhausted to the exhaust passage 13 described above. It will be. Here, when this product touches the inner wall of the rectifying wall 171, it may adhere to the inner wall as a deposit as shown in FIG. Since the surface of the flow straightening wall 171 is smooth, the deposit is easily peeled off due to weak adhesion to the alumina sintered body as the base material, causing particles to cause a pattern defect on the surface of the substrate S, etc. End up.

Accordingly, the surface of the rectifying wall 171 is increased by roughening (roughening) the surface of the rectifying wall 171 by, for example, blasting in advance, and the adhesion between the rectifying wall 171 and the deposit is improved by an anchor (wedge) effect. There is an attempt to suppress the falling off of the deposit, but since the alumina sintered body is extremely hard, the surface roughness Ra can be roughened only to about 5 to 6 μm at most. Such a rough surface is insufficient to prevent the deposits from dropping off, and the rectifying wall 171 may be warped, deformed, or cracked by the blast treatment.
On the other hand, as a method for roughening the rectifying wall 171 in the same manner, for example, a method of spraying ceramics is known, but this method can also provide a rough surface enough to suppress the falling of deposits. In addition, a separate thermal spraying process is required, leading to an increase in cost.

  Patent Document 1 and Patent Document 2 describe that a porous body is used as a material or shield plate that covers the periphery of a wafer in an apparatus using plasma, and Patent Document 3 describes that a shield ring or Although a technique for forming a rough surface on the focus ring is described, no problem has been studied on the problem with the rectifying wall 171.

JP-A-61-276322 (2nd page, right column, lines 6-9) JP 2002-217172 (paragraph 0017) JP2004-289003 (paragraph 0021)

  The present invention has been made in view of such circumstances, and an object of the present invention is to provide a rectifying member in a processing apparatus in which a rectifying member for suppressing a loading effect is provided around a target object and processing is performed with a processing gas. It is an object of the present invention to provide a processing apparatus capable of reducing particle contamination of an object to be processed by suppressing detachment of attached deposits.

The processing apparatus of the present invention
A mounting table provided inside the processing container and provided with a mounting surface for mounting the object to be processed;
A processing gas supply means for supplying a processing gas for processing the object to be processed from above the mounting table;
A gas exhaust unit for exhausting the atmosphere in the processing container;
A rectifying member provided so as to surround the object to be processed on the mounting table,
The surface portion of the side surface on the mounting surface side in the rectifying member is constituted by a porous body ,
The rectifying member is supported by a support member having a strength higher than that of the porous body .
The rectifying member may be provided between the object to be processed and the gas exhaust part . The rectifying member may include a rectifying wall made of a porous body.
The support member is preferably engaged with the rectifying wall so as to receive the weight of the rectifying wall.

The rectifying wall is formed so as to extend from one side to the other side along the outer edge of the mounting surface, and is divided into a plurality of divisions between the one end and the other end. It may be divided into parts, in which case the adjacent divided parts are connected by a connecting member having a strength higher than that of the porous body,
The connecting member is preferably engaged with the rectifying wall so as to receive the weight of the rectifying wall.
The connecting member may be fitted into the divided parts across the divided parts adjacent to each other.
The rectifying member may be constituted by a main body portion having a strength higher than that of the porous body and a porous body laminated on the mounting surface side in the main body portion. In this case, the porous body is preferably configured to be detachable from the main body portion.
The porous body is preferably made of porous ceramics.
It is preferable that the support member, the connecting member, or the main body portion is made of ceramics.
Moreover, said processing apparatus may be provided with the raising / lowering mechanism which raises / lowers the said supporting member via an raising / lowering axis | shaft.

According to the present invention, in the processing apparatus for mounting the object to be processed on the mounting surface of the mounting table and providing a rectifying member for suppressing the loading effect around the object to be processed with the processing gas, A surface portion of the side surface on the mounting surface side of the flow regulating member is formed of a porous body. Therefore, even if the product generated by the treatment of the object to be processed adheres to and accumulates on the rectifying member, the surface of the rectifying member is in a very rough surface state, so that the adhesion between the deposit and the rectifying member is large. Therefore, detachment of the deposit can be suppressed, and particle contamination of the object to be processed can be reduced.

  An example of the processing apparatus according to the embodiment of the present invention will be described with reference to FIGS. The etching processing apparatus 2 shown in the longitudinal sectional view of FIG. 1 performs an etching process on an aluminum (Al) film formed on the surface of an object to be processed, for example, a square substrate S which is an FPD (flat panel display) substrate. It is an apparatus for performing, and includes a rectangular processing container 20 which is a vacuum chamber. The processing container 20 is made of a material having good heat conductivity and conductivity, such as aluminum. A loading / unloading port 22 for loading the substrate S into the processing container 20 is formed on one surface side of the side wall 21 of the processing container 20. The loading / unloading port 22 is configured to be opened and closed by a gate valve 23. Yes. The processing container 20 is grounded.

Inside the processing container 20, a mounting table 3 is disposed on the upper surface, which forms a lower electrode for mounting a square substrate S having a length of, for example, about 2.5 m square. The mounting table 3 is electrically connected to a first high frequency power supply unit 311 for generating plasma and a second high frequency power supply unit 312 for drawing ions in the plasma, and generates plasma in the processing vessel 20. The ions in the plasma are drawn into the surface of the substrate S. The mounting table 3 is disposed on the bottom surface of the processing container 20 via an insulating member 32, and is thus in an electrically floating state from the processing container 20.
Further, the peripheral edge and side surfaces of the upper surface of the mounting table 3 and the side surfaces of the insulating member 32 are covered with a focus ring 33 made of, for example, a ceramic material. For example, the focus ring 33 collects plasma above the mounting table 3 on the substrate S to improve the etching rate within the surface of the substrate S.

  Further, the mounting table 3 is formed with a through hole 34a into which a lifting pin 34 projects and sinks for transferring the substrate S to and from a substrate transfer device (not shown) provided outside the etching processing apparatus 2. . An elevating mechanism 35 connected to the elevating pins 34 is provided at a position below the processing container 20, and the elevating pins 34 transfer the substrate S to and from the transfer means by the elevating mechanism 35. It is configured to move up and down between the position and the lower position where the substrate S is placed on the placement table 3.

Above the mounting table 3 in the processing container 20, a square plate-shaped gas shower head 40 made of, for example, aluminum is provided as a processing gas supply unit so as to face the mounting table 3. The gas shower head 40 is fixed to the top wall of the processing vessel 20 and is provided on the lower surface of the upper electrode base 41 so as to close the upper electrode base 41 having a rectangular opening on the lower side and the opening of the upper electrode base 41. The plate-like upper electrode 4 is electrically connected to the processing vessel 20. A space surrounded by the upper electrode base 41 and the upper electrode 4 constitutes a gas diffusion space 42 for the etching gas. A number of gas supply holes 45 are formed in the upper electrode 4, and the central position of the upper surface of the upper electrode base 41 is connected to the gas diffusion space 42 through the top wall of the processing vessel 20. Then, one end side of the processing gas supply path 43 is connected. A processing gas supply unit 44 in which an etching gas such as a processing gas, for example, a chlorine (Cl ₂ ) -based gas is stored is connected to the other end side of the processing gas supply path 43.
One end side of an exhaust passage 24 that is a gas exhaust portion is connected to a plurality of locations on the bottom surface of the processing container 20 so as to surround the periphery of the mounting table 3, and the other end side of the exhaust passage 24 is not illustrated. A vacuum pump is connected.

Furthermore, the etching processing apparatus 2 of the present invention includes a rectifying member 5 for suppressing the loading effect described above. The rectifying member 5 will be described in detail below.
As shown in FIGS. 2 and 3, the rectifying member 5 includes four strip-shaped rectifying walls 51 made of a plate-like body having, for example, a height dimension H, a width dimension W, and a length dimension L of 5 cm, 1 cm, and 250 cm, respectively. Are arranged so as to be along the four sides of the substrate S, respectively, and a processing atmosphere is formed in the upper region of the substrate S by the rectifying member 5. Looking at these four rectifying walls 51 in, for example, a clockwise arrangement, by sequentially taking a connection form in which the next (adjacent) end face comes into contact with a side surface slightly from the center from the tip of one rectifying wall 51. The overall shape is formed in a rectangular frame shape, and the tip portion on one end side of each rectifying wall 51 is in a protruding state. Then, in the L-shaped portion formed by the protruding portion of one rectifying wall 51 and the end of the next rectifying wall 51, the L-shaped fixing member 52 straddling the side surfaces of both rectifying walls 51 is rectified. The L-shaped one part of the fixing member 52 and the side surface of the one rectifying wall 51 are fixed by bolts 52a from the fixing member 52 side, while being adapted from the outside of the member 5. The other part of the mold and the side surface of the end portion of the next rectifying wall 51 are fixed from the fixing member 52 side by bolts 52a, thus connecting the rectifying walls 51 adjacent to each other.

The rectifying wall 51 is made of, for example, a porous body made of ceramic, which is an insulator having a porosity of 10% to 50%, such as porous alumina (Al ₂ O ₃ ). As shown in FIG. 4, it is about 50 μm to 60 μm. On the other hand, the fixing member 52 is made of an ordinary dense sintered body such as alumina, which is a ceramic having a higher density (higher strength) than the rectifying wall 51, such as a so-called normal ceramic.
Two support members 53 for supporting the rectifying wall 51 are provided on the outer surfaces of the left and right rectifying walls 51 (surfaces facing the side wall portion 21 of the processing container 20) as viewed from the loading / unloading port 22. The rectifying walls 51 are provided apart in the length direction. The support member 53 is fixed to the rectifying wall 51 from the outside of the rectifying wall 51 via, for example, bolts 54. The support member 53 has a substantially T-shaped planar shape, and the rectifying wall is positioned at both sides of the convex portion 53a so that the convex portion 53a extends horizontally from the rectifying wall 51 toward the side wall portion 21. 51 is fixed. Further, like the fixing member 52, the support member 53 is made of ceramic having a higher strength than the rectifying wall 51, for example, a normal dense sintered body such as alumina.

  The lower end portion of the rectifying wall 51 at a position supported by the support member 53 is cut out in a rectangular shape from the outer surface side, and as shown in FIG. 5, a protruding portion 56 that protrudes horizontally from the lower end portion of the support member 53. Enters the notch 51a and the two are engaged with each other. The support member 53 is configured to be fixed to the rectifying wall 51 by the bolt 54 in a state where the weight of the rectifying wall 51 is received at the protruding portion 56. For this reason, the rectifying wall 51 is prevented from concentrating and adding the weight of the rectifying wall 51 to the fixing portion by the bolt 54, and therefore, the rectifying wall 51 is prevented from cracking with the fixing portion as a base point. In FIG. 1 described above, the position of the support member 53 is drawn away from the mounting table 3 for convenience.

  On the lower surface side of the convex portion 53a of the support member 53, one end side of a support shaft 55 that also serves as an elevating shaft for raising and lowering the rectifying wall 51 is fixed by a bolt 55a via the convex portion 53a. As described above with reference to FIG. 1, the support shaft 55 passes through the bottom surface of the processing container 20, and the other end side of the support shaft 55 is provided outside the processing container 20 via an elevating plate 62. The elevator mechanism 61 is connected. Then, by raising and lowering the support shaft 55 via the elevating mechanism 61, a lower position where the lower end of the rectifying member 5 contacts the mounting table 3 and a gap between the lower end side of the rectifying member 5 and the mounting table 3. Thus, the entire rectifying member 5 can be moved up and down between the upper position where the substrate S is carried in and out. A bellows 63 is provided between the lower end surface of the processing container 20 and the lifting plate 62 so as to cover the support shaft 55 in order to keep the processing container 20 airtight.

In this example, since the length L of the rectifying wall 51 is long as described above, two rectifying walls 51 are provided between , for example, one end and the other end in the length direction . (Rectifying walls 511, 512) are divided, and the central part of the rectifying walls 511, 512 at this connecting portion is cut into a rectangle from the outer surface side to form a notch 51b as shown in FIG. ing. The rectifying wall 51 is connected by a plate-like connecting member 57 made of, for example, dense ceramics such as alumina and disposed so as to straddle the rectifying walls 511 and 512 in the connecting portion. And the protrusion part 59 which protrudes horizontally from the center part of the connection member 57 enters into said notch part 51b, and is in the state which mutually engaged. Therefore, like the supporting member 53 described above, the connecting member 57 is fixed to the rectifying wall 51 by the bolt 58a from the connecting member 57 side in a state where the weight of the rectifying wall 51 is received by the protruding portion 59. It is configured.
The above-described fixing member 52 is also formed with a projection (not shown) as in the case of the support member 53 and the connecting member 57, and is fixed by a bolt 52a while receiving the weight of the rectifying wall 51 at the projection. It is comprised so that.

  Further, as shown in FIG. 1 described above, the control unit 7 is connected to the etching processing apparatus 2. The control unit 7 includes, for example, a computer having a CPU, a memory, a program, and the like (not shown). The operation of the etching processing apparatus 2, that is, the substrate S is carried into the processing container 20 into the program, and the mounting table 3. A group of steps (commands) for control and the like related to the operation until the substrate S is etched and then the substrate S is unloaded from the processing container 20 is assembled. This program is stored in a storage medium such as a hard disk, a compact disk, a magnetic optical disk, or a memory card, and is installed in the computer from this storage medium.

Next, the operation of the etching processing apparatus 2 of the present invention will be described below. First, as shown in FIG. 7A, the rectifying member 5 is raised to the upper position, and the gate valve 23 is opened. Then, through the gap between the flow regulating member 5 and the mounting table 3, the substrate S on which the aluminum film is formed is carried into the processing container 20 by a transfer means (not shown), and the transfer is performed on the upper side of the mounting table 3. The substrate S is transported to the position. Next, the substrate S is received by the elevating pins 34, the conveying means is withdrawn from the processing container 20, and the elevating pins 34 are lowered to place the substrate S on the mounting surface on the mounting table 3. Thereafter, the loading / unloading port 22 is closed, and the rectifying member 5 is lowered to the lower position (FIG. 7B).

Then, the inside of the processing vessel 20 is adjusted to a predetermined degree of vacuum by a vacuum pump (not shown), and an etching gas such as chlorine gas is supplied from the processing gas supply unit 44 through the gas diffusion space 42 and the gas supply hole 45 onto the mounting table 3. Discharge toward the substrate S. Further, high frequency power is supplied from the high frequency power supply units 311 and 312 to the mounting table 3 to form plasma of an etching gas in the space above the substrate S, and this plasma is drawn toward the substrate S side. When the etching gas plasma reaches the substrate S, it reacts with the aluminum film on the surface of the substrate S mainly based on the following equation (1).
3Cl ^* + Al → AlCl ₃ (1)
Aluminum chloride (AlCl ₃ ), which is a product generated by this reaction, flows to the peripheral region side along the surface of the substrate S together with unreacted etching gas and the like. Then, when these products and unreacted etching gas reach the rectifying wall 51 that surrounds the periphery of the substrate S, the flow is blocked by the rectifying wall 51, so that the region inside the rectifying wall 51, that is, the substrate S A gas reservoir is formed in the peripheral region. For this reason, the flow rate of the etching gas is reduced in the peripheral region of the substrate S, so that the supply amount of the etching gas is suppressed in the peripheral region of the substrate S as compared with the central region, and thus the loading effect is suppressed. Therefore, the etching process proceeds at a uniform etching rate within the surface of the substrate S.

Then, as shown in FIG. 8A, the gas pool formed inside the rectifying wall 51 then passes over the rectifying wall 51 and is formed between the focus ring 33 (mounting table 3) and the side wall portion 21 of the processing container 20. The air is exhausted to the exhaust passage 24 through the space therebetween. At this time, when the above-described product contained in the gas reservoir touches the rectifying wall 51, it may be deposited as a deposit 100 on the surface of the rectifying wall 51. As shown in FIG. The rectifying wall 51 is made of a porous body, and thus has large irregularities on the surface. Therefore, the deposit 100 is pushed into the concave portion on the surface of the rectifying wall 51 by the gas flow, and is strongly adhered to the surface of the rectifying wall 51 by the anchor (wedge) effect. Then, the product sequentially adheres to the surface of the rectifying wall 51 as the deposit 100 so that the concave portion on the surface of the rectifying wall 51 is filled. As a result, the etching process proceeds in a state where the deposit 100 is prevented from falling off.
After that, after performing an etching process until a predetermined time elapses, the supply of the etching gas and the high frequency power is stopped, the inside of the processing container 20 is evacuated, and the substrate S is processed in the reverse order to the loading time. Remove from inside.

According to the above-described embodiment, in the etching processing apparatus 2 provided with the rectifying member 5 for suppressing the loading effect around the substrate S in the processing container 20, the rectifying wall 51 constituting the rectifying member 5 is made of a porous body. It is constituted by. Therefore, even if the product generated by the etching process is deposited on the rectifying wall 51 as the deposit 100, the surface of the rectifying wall 51 is in a very rough surface state. Therefore, the desorption of the deposit 100 can be suppressed. Therefore, contamination of the substrate S due to particles or the like can be suppressed.
Moreover, when the surface of the rectifying wall 51 is roughened as described above, since the blasting process described above is not performed, the rectifying wall 51 is not warped, deformed, or cracked due to this process. Further, since the ceramic is not sprayed, the rectifying wall 51 having a rough surface state can be obtained without increasing the number of extra steps.
Further, when using a relatively weak material such as a porous body as the rectifying wall 51, the support member 53, the connecting member 57, and the fixing member 52 are provided with protrusions as described above, and the rectifying wall 51 is provided at the protrusions. The rectifying wall 51 is fixed with a bolt in a state where the weight of the rectifier is received. For this reason, the rectifying wall 51 does not add the rectifying wall 51 in a concentrated manner to the fixing portion by the bolt, so that it is possible to suppress the occurrence of cracks and the like based on the fixing portion.

  Here, in the above example, the entire rectifying wall 51 is made of porous alumina, but the surface portion may be made of a porous body and the inside may be made of ordinary ceramics. FIG. 9 shows such an example. In the exposed surface of the plate-like main body portion 102 made of ordinary ceramics which is a dense sintered body such as an insulator, for example, alumina, the surface other than the lower surface is connected to the above surface. The rectifying wall 51 is configured by laminating a porous body made of the same material as that of the rectifying wall 51 and joining, for example, a thin plate 101 made of the porous body. In this case, the thin plate 101 and the main body portion 102 are fixed by, for example, an adhesive or a bolt (not shown). Thus, by providing the thin plate 101 made of a porous body detachably with respect to the main body portion 102 on the surface portion of the rectifying wall 51, for example, maintenance for removing the deposit 100 deposited on the surface of the rectifying wall 51 is performed. When performing, it is only necessary to replace the thin plate 101, and therefore, the handling work of the rectifying wall 51 is simplified, and there is an advantage that the maintainability can be improved.

Further, since the above-described deposit 100 tends to be particularly easily deposited on the processing atmosphere side (the space side surrounded by the rectifying wall 51), for example, as shown in FIG. The thin plate 101 may not be provided on this surface (the surface facing the side wall portion 21 of the processing container 20), or the thin plate 101 may not be provided on the upper surface of the rectifying wall 51 as shown in FIG. Thus, in this invention, said effect can be acquired by comprising at least the surface by the side of the process atmosphere of the baffle wall 51 with a porous body. Further, even if the entire surface of the rectifying wall 51 on the treatment atmosphere side is not made of a porous body, for example, as shown in FIG. 12, the inner region is recessed in a rectangular shape from the outer edge of the facing surface to form a recess. The plate-like thin plate 101 may be fitted into the recess.
Moreover, although the protrusion part 56 was formed in the lower end side of the support member 53, as shown in FIG. 13, you may make it form in the center vicinity. Further, the protruding portion 56 may be formed on the upper end side of the support member 53, or as shown in FIG. 14, for example, when the strength of the rectifying wall 51 is strong, the protruding portion 56 is not formed. Good.

Further, when the rectifying wall 51 is divided in the length direction, for example, as shown in FIGS. 15 and 16, for example, a dense sintered body straddling the divided rectifying walls 511 and 512 with respect to the connecting method of the divided portions. A core material 103 made of ceramic such as alumina may be fitted, and the core material 103 may receive the weight of the rectifying wall 51 (511, 512). In this example, a rectangular recess 104 into which the core member 103 is closely fitted is formed along the length direction of the rectifying walls 511 and 512 at the joining end surfaces of the divided rectifying walls 511 and 512. A through hole 105 that is slightly larger than the bolt 58a to be used is formed on the outer surface of the rectifying walls 511 and 512. The connecting member 57 and the core member 103 are fixed by bolts 58a from the connecting member 57 side through the through hole 105. The rectifying wall 51 is fixed in a state where the weight of the rectifying wall 51 (511, 512) is received by the core member 103. 15 and 16, the number of bolts 58a is for convenience.
In the above example, the rectifying wall 51 is fixed by the bolts 52a, 54, 58a, but may be bonded by an adhesive or the like.

In the above example, the rectifying wall 51, the fixing member 52, the supporting member 53, and the connecting member 57 are made of alumina. Examples of these members include ceramics such as silicon nitride (Si ₃ N ₄ ) and quartz (SiO ₂ ). In the case of plasma treatment, an insulator is preferable. The fixing member 52, the support member 53, and the connecting member 57 may be any material that is stronger than the rectifying wall 51.
In the above example, the rectifying walls 51 on each side are divided in the length direction, but may be not divided.

Further, the support shaft 55 is connected to the rectifying member 5 so that the rectifying member 5 can be moved up and down. However, the rectifying member 5 is fixed on the mounting table 3, and the substrate is interposed via the position above the rectifying member 5. S may be transported, or a transport port (not shown) may be formed at a central position in the height direction of the rectifying wall 51, and the substrate S may be transported through the transport port.
Furthermore, in the above example, the etching process of the aluminum film has been described. However, the present invention is applicable to a process in which deposits such as products are generated regardless of the loading effect, such as an etching process other than the aluminum film or a film forming process. The processing apparatus may be applied. In addition to the rectangular substrate S, the present invention may be applied to a circular substrate such as a semiconductor wafer.

It is a longitudinal cross-sectional view which shows an example of the etching processing apparatus of this invention. It is a horizontal sectional view showing the above-mentioned etching processing apparatus. It is a perspective view which shows an example of the baffle member in said etching processing apparatus. It is a schematic diagram which expands and shows the surface of the rectification wall which comprises said rectification | straightening member. It is explanatory drawing which shows an example of the supporting member which supports said rectification | straightening member. It is explanatory drawing which shows an example of the connection part which connects said rectifying walls. It is a longitudinal cross-sectional view which shows an effect | action of said etching processing apparatus. It is a schematic diagram which shows a mode at the time of performing the etching process in said etching processing apparatus. It is a longitudinal cross-sectional view which shows the other example of said rectifying wall. It is a longitudinal cross-sectional view which shows the other example of said rectifying wall. It is a longitudinal cross-sectional view which shows the other example of said rectifying wall. It is explanatory drawing which shows the other example of said rectifying wall. It is a longitudinal cross-sectional view which shows the other example of said connection part. It is a longitudinal cross-sectional view which shows the other example of said connection part. It is explanatory drawing which shows the other example of said connection part. It is a horizontal sectional view showing other examples of the above-mentioned connecting part. It is a longitudinal cross-sectional view which shows the conventional etching processing apparatus. It is a top view of the board | substrate for demonstrating the conventional loading effect. It is a perspective view which shows the effect | action of the conventional etching processing apparatus. It is a longitudinal cross-sectional view which shows the surface of the rectification | straightening member in said conventional etching processing apparatus. It is a schematic diagram which shows the effect | action in said conventional etching process.

Explanation of symbols

S FPD substrate (substrate)
2 Etching apparatus 3 Mounting table 5 Rectification member 20 Processing vessel 24 Exhaust passage 40 Gas shower head 51 Rectification wall 52 Fixing member 53 Support member 56 Projection part 57 Connection member 59 Projection part

Claims (13)

A mounting table provided inside the processing container and provided with a mounting surface for mounting the object to be processed;
A processing gas supply means for supplying a processing gas for processing the object to be processed from above the mounting table;
A gas exhaust unit for exhausting the atmosphere in the processing container;
A rectifying member provided so as to surround the object to be processed on the mounting table,
The surface portion of the side surface on the mounting surface side in the rectifying member is constituted by a porous body ,
The processing apparatus , wherein the rectifying member is supported by a support member having a strength higher than that of the porous body .   The processing apparatus according to claim 1, wherein the rectifying member is provided between the object to be processed and the gas exhaust unit. The rectifying member, the processing apparatus according to claim 1 or 2, characterized in that it comprises a baffle wall made of a porous material. The processing apparatus according to claim 3, wherein the support member is engaged with the rectifying wall so as to receive the weight of the rectifying wall. The rectifying wall is formed so as to extend from one side to the other side along the outer edge of the mounting surface, and is divided into a plurality of divisions between the one end and the other end. Divided into parts ,
The divided parts adjacent to each other are connected by a connecting member having a strength higher than that of the porous body,
The coupling member includes a processing unit according to claim 3 or 4, characterized in that engaged in the baffle wall to receive the weight of the baffle wall. The processing apparatus according to claim 5, wherein the connecting member is fitted into the divided parts across the divided parts adjacent to each other. The said rectification | straightening member is comprised by the main body part whose intensity | strength is larger than a porous body, and the porous body arrange | positioned in the said mounting surface side in this main body part, The Claim 1 or 2 characterized by the above-mentioned. The processing apparatus as described in. The processing apparatus according to claim 7 , wherein the porous body is configured to be detachable from the main body portion. The porous body, the processing apparatus according to any one of claims 1 to 8, characterized in that it is constituted by a porous ceramic. The support member, the processing apparatus according to any one of claims 1 to 9, characterized in that it is constituted by ceramic. The connecting member, the processing apparatus according to claim 5 or 6, characterized in that it is constituted by ceramic. Wherein the body portion, the processing apparatus according to claim 7 or 8, characterized in that it is constituted by ceramic. Processing apparatus according to any one of claims 1 to 12, characterized in that it comprises a lifting mechanism for raising and lowering the support member through the elevator shaft.

Images