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JP5046330B2 - Ultrasonic flowmeter and ultrasonic transducer unit - Google Patents

Ultrasonic flowmeter and ultrasonic transducer unit Download PDF

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Publication number
JP5046330B2
JP5046330B2 JP2007167238A JP2007167238A JP5046330B2 JP 5046330 B2 JP5046330 B2 JP 5046330B2 JP 2007167238 A JP2007167238 A JP 2007167238A JP 2007167238 A JP2007167238 A JP 2007167238A JP 5046330 B2 JP5046330 B2 JP 5046330B2
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ultrasonic
measurement
transducer
fixed
pair
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JP2009008406A (en
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智夫 五明
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Aichi Tokei Denki Co Ltd
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Description

本発明は、1対の計測用超音波送受波器間で送受波される超音波を、計測ハウジングの流路内を流れる流体に伝播させて、その伝播時間に基づいて流体の流量を計測する超音波流量計及び、超音波流量計に取り付けられる超音波送受波器ユニットに関する。   The present invention propagates ultrasonic waves transmitted and received between a pair of measurement ultrasonic transducers to a fluid flowing in the flow path of the measurement housing, and measures the flow rate of the fluid based on the propagation time. The present invention relates to an ultrasonic flowmeter and an ultrasonic transducer unit attached to the ultrasonic flowmeter.

この種の従来の超音波流量計として、1対の超音波送受波器をゴム製の防振部材を介して計測管に固定することで、超音波送受波器から計測管の管壁へと伝播する超音波(所謂、筐体ノイズ)を低減させたものが知られている(例えば、特許文献1,2参照)。
特開昭61−25021号公報(第4頁第7行目〜第5頁第6行目、第1図) 特開平11−23332号公報(段落[0008],[0009]、第2図)
As a conventional ultrasonic flowmeter of this kind, by fixing a pair of ultrasonic transducers to the measurement tube via a rubber vibration isolator, from the ultrasonic transducer to the tube wall of the measurement tube There are known ones in which propagating ultrasonic waves (so-called housing noise) are reduced (see, for example, Patent Documents 1 and 2).
JP-A-61-25021 (page 4, line 7 to page 5, line 6, FIG. 1) Japanese Patent Laid-Open No. 11-23332 (paragraphs [0008], [0009], FIG. 2)

しかしながら、上述した従来の超音波流量計では、温度が低下してゴムが硬化すると、筐体ノイズを十分に低減することができなくなり、計測精度が悪化するという問題があった。   However, the above-described conventional ultrasonic flowmeter has a problem that when the temperature is lowered and the rubber is cured, the housing noise cannot be sufficiently reduced and the measurement accuracy is deteriorated.

本発明は、上記事情に鑑みてなされたもので、精度よく流量計測を行うことが可能な超音波流量計及び超音波送受波器ユニットの提供を目的とする。   The present invention has been made in view of the above circumstances, and an object thereof is to provide an ultrasonic flowmeter and an ultrasonic transducer unit that can accurately measure a flow rate.

上記目的を達成するためになされた請求項1の発明に係る超音波流量計は、流体が流れる流路を有した計測ハウジングに、流路の上流側と下流側とに分けて1対の送受波器固定壁を設けると共にそれら1対の送受波器固定壁の互いの対向面に1対の計測用超音波送受波器を固定し、1対の計測用超音波送受波器の間で送受波される超音波を流路内の流体に伝播させて、その伝播時間に基づいて流体の流量を計測する超音波流量計において、1対の送受波器固定壁のうち互いの対向面と反対側の面にそれぞれ固定され、計測用超音波送受波器が送波する超音波と逆位相の超音波を送波して、計測用超音波送受波器から送受波器固定壁に伝播する超音波をキャンセルさせるための1対のノイズキャンセル用超音波送受波器を備えたところに特徴を有する。   In order to achieve the above object, an ultrasonic flowmeter according to the first aspect of the present invention provides a measurement housing having a flow path through which a fluid flows, and a pair of transmission / reception divided into an upstream side and a downstream side of the flow path. A pair of ultrasonic transducers for measurement are fixed on the opposing surfaces of the pair of fixed transducers and a pair of ultrasonic transducers for transmission / reception are provided. In an ultrasonic flowmeter that propagates waved ultrasonic waves to the fluid in the flow path and measures the flow rate of the fluid based on the propagation time, it is opposite to the opposing surface of the pair of transducer fixed walls Ultrasonic waves that are fixed to the side surfaces and that transmit ultrasonic waves that are opposite in phase to the ultrasonic waves that are transmitted by the measurement ultrasonic transducer and propagate from the measurement ultrasonic transducer to the transducer fixed wall. Features a pair of noise canceling ultrasonic transducers for canceling sound waves To.

請求項2の発明は、請求項1に記載の超音波流量計において、ノイズキャンセル用超音波送受波器は、送受波器固定壁に伝播する超音波を受波可能に構成され、計測用超音波送受波器が超音波を受波して出力する計測用受波信号と、その受波側の計測用超音波送受波器と同じ送受波器固定壁に固定されたノイズキャンセル用超音波送受波器が超音波を受波して出力するノイズキャンセル用受波信号とに基づいて、計測用受波信号のうち計測用超音波送受波器が送受波器固定壁を介して受波した超音波による受波ノイズ成分をキャンセルする受波信号処理部を備えたところに特徴を有する。   According to a second aspect of the present invention, in the ultrasonic flowmeter according to the first aspect, the noise canceling ultrasonic transducer is configured to be able to receive an ultrasonic wave propagating to the transducer fixed wall, and to measure the ultrasonic flowmeter. Measurement signal received and output by ultrasonic transmitter / receiver, and noise canceling ultrasonic transmitter / receiver fixed to the same transmitter / receiver fixed wall as the measurement ultrasonic transmitter / receiver on the receiving side. Based on the received signal for noise cancellation that is output by the wave receiving device, the ultrasonic wave received by the measuring ultrasonic transducer through the fixed wall of the measuring device is received. It is characterized in that it includes a received signal processing unit that cancels received noise components due to sound waves.

請求項3の発明は、請求項1又は2に記載の超音波流量計において、計測用超音波送受波器とノイズキャンセル用超音波送受波器とは、同一構造かつ同一サイズの超音波送受波器であるところに特徴を有する。   The invention according to claim 3 is the ultrasonic flowmeter according to claim 1 or 2, wherein the ultrasonic transducer for measurement and the ultrasonic transducer for noise cancellation have the same structure and the same size. It is characterized by being a vessel.

請求項4の発明は、請求項1乃至3の何れかに記載の超音波流量計において、計測ハウジングには、直線状に延びた管構造をなしかつ両端寄り位置の側面に流体流入部及び流体流出部を有した計測管部と、計測管部の両端を閉塞する1対の端部閉塞壁とが備えられ、1対の送受波器固定壁を、計測管部のうち流体流入部と端部閉塞壁との間と、流体流出部と端部閉塞壁との間とに配置して、計測管部の内部に固定したところに特徴を有する。   According to a fourth aspect of the present invention, in the ultrasonic flowmeter according to any one of the first to third aspects, the measurement housing has a linearly extending tube structure, and a fluid inflow portion and a fluid are formed on side surfaces near both ends. A measuring tube portion having an outflow portion and a pair of end blocking walls that close both ends of the measuring tube portion are provided, and the pair of transducer fixed walls are connected to the fluid inflow portion and the end of the measuring tube portion. It is characterized in that it is arranged between the part closing wall and between the fluid outflow part and the end closing wall and fixed inside the measuring pipe part.

請求項5の発明は、請求項4に記載の超音波流量計において、1対の送受波器固定壁を平板形状にして、計測管部の両端に送受波器固定壁と端部閉塞壁とに挟まれた1対の端部区画領域を設け、1対の送受波器固定壁を貫通して、計測管部のうち1対の送受波器固定壁の間の領域と、1対の端部区画領域とを連通した連通路を備えたところに特徴を有する。   A fifth aspect of the invention is the ultrasonic flowmeter according to the fourth aspect, wherein the pair of transducer fixing walls is formed into a flat plate shape, and the transducer fixing wall and the end blocking wall are formed at both ends of the measurement pipe portion. A pair of end section regions sandwiched between two regions, penetrating a pair of transducer fixed walls, a region between the pair of transducer fixed walls in the measurement tube section, and a pair of ends It is characterized in that it has a communication path that communicates with the partial section area.

請求項の発明に係る超音波送受波器ユニットは、超音波流量計のうち流体が流れる流路を有した計測ハウジングに対をなして取り付けられ、超音波を送受波して流体の流量の計測に用いられる超音波送受波器ユニットであって、計測ハウジングに外縁部が固定される送受波器固定壁と、送受波器固定壁の表側面に固定されて流路を流れる流体に向けて超音波を送波可能な計測用超音波送受波器と、送受波器固定壁の裏側面に固定されて、計測用超音波送受波器が送波する超音波と逆位相の超音波を送波して、計測用超音波送受波器から送受波器固定壁に伝播する超音波をキャンセルさせるためのノイズキャンセル用超音波送受波器とを備えたところに特徴を有する。 The ultrasonic transducer unit according to the invention of claim 6 is attached in pairs to a measurement housing having a flow path through which a fluid flows in an ultrasonic flowmeter, and transmits and receives ultrasonic waves to measure the flow rate of the fluid. An ultrasonic transducer unit used for measurement, which is directed to a transducer fixed wall whose outer edge is fixed to a measurement housing, and a fluid that is fixed to the front side of the transducer fixed wall and flows through a flow path An ultrasonic transducer for measurement that can transmit ultrasonic waves, and an ultrasonic wave that is fixed to the back side of the fixed wall of the transducer and that is opposite in phase to the ultrasonic wave transmitted by the ultrasonic transducer for measurement. A noise canceling ultrasonic transducer for canceling the ultrasonic wave transmitted from the measuring ultrasonic transducer to the transducer fixing wall is characterized.

[請求項1及びの発明]
上記のように構成した請求項1及びに係る発明によれば、1対の計測用超音波送受波器の間で超音波を送受波した場合に、送波側の計測用超音波送受波器と同じ送受波器固定壁に固定されたノイズキャンセル用超音波送受波器が、送波側の計測用超音波送受波器が送波する超音波と逆位相の超音波を送波するので、計測用超音波送受波器から送受波器固定壁へと伝播する超音波がキャンセルされる(打ち消される)。即ち、計測用超音波送受波器からの超音波の送波に伴って、送受波器固定壁を介して計測ハウジングへと伝播する超音波(所謂、筐体ノイズ)を低減或いは無くすことができる。これにより、精度よく流量計測を行うことができる。
[Inventions of Claims 1 and 6 ]
According to the inventions according to claims 1 and 6 configured as described above, when ultrasonic waves are transmitted / received between a pair of ultrasonic transducers for measurement, ultrasonic transmission / reception for measurement on the transmission side is performed. Since the ultrasonic transducer for noise cancellation fixed to the same transmitter / receiver fixed wall as the transmitter transmits ultrasonic waves in the opposite phase to the ultrasonic wave transmitted by the ultrasonic transducer for measurement on the transmission side The ultrasonic wave propagating from the measurement ultrasonic transducer to the transducer fixed wall is canceled (cancelled). That is, it is possible to reduce or eliminate the ultrasonic wave (so-called housing noise) propagating to the measurement housing through the transducer fixed wall as the ultrasonic wave is transmitted from the measurement ultrasonic transducer. . Thereby, the flow rate can be accurately measured.

[請求項2の発明]
請求項2に係る発明によれば、計測ハウジング及び送受波器固定壁を超音波が伝播した場合に、受波側の計測用超音波送受波器は、流体中を伝播した超音波と、計測ハウジング及び送受波器固定壁を伝播した超音波とを両方とも受波する。また、受波側の計測用超音波送受波器と同じ送受波器固定壁に固定されたノイズキャンセル用超音波送受波器は、計測ハウジング及び送受波器固定壁を伝播した超音波だけを受波する。そして、計測用超音波送受波器が受波して出力する計測用受波信号と、ノイズキャンセル用超音波送受波器が受波して出力するノイズキャンセル用受波信号とに基づいて、計測用受波信号のうち、計測用超音波送受波器が送受波器固定壁を介して受波した受波ノイズ成分(即ち、筐体ノイズ)をキャンセルするから、仮に、送波側の計測用超音波送受波器から送受波器固定壁を介して計測ハウジングへと伝播する超音波を十分に低減できなかった場合でも、その影響を排除して精度よく流量計測を行うことができる。
[Invention of claim 2]
According to the invention according to claim 2, when the ultrasonic wave propagates through the measurement housing and the transducer fixed wall, the ultrasonic transducer for measurement on the wave receiving side includes the ultrasonic wave propagated in the fluid and the measurement. Both the ultrasonic waves propagated through the housing and the transducer fixed wall are received. In addition, the noise canceling ultrasonic transducer fixed to the same transducer fixed wall as the measurement-side ultrasonic transducer on the reception side receives only the ultrasonic waves propagated through the measurement housing and the transducer fixed wall. To wave. Measurement is performed based on the measurement reception signal received and output by the measurement ultrasonic transducer and the noise cancellation reception signal received and output by the noise cancellation ultrasonic transducer. Among the received signals, the measurement ultrasonic transmitter / receiver cancels the received noise component (ie, housing noise) received through the transmitter / receiver fixed wall. Even when the ultrasonic wave propagating from the ultrasonic transducer to the measurement housing through the transducer fixed wall cannot be sufficiently reduced, the influence can be eliminated and the flow rate can be accurately measured.

[請求項3の発明]
請求項3の発明によれば、計測用超音波送受波器とノイズキャンセル用超音波送受波器とを共通の超音波送受波器で構成することができるから、部品調達や部品管理の手間を軽減することができる。
[Invention of claim 3]
According to the invention of claim 3, since the ultrasonic transducer for measurement and the ultrasonic transducer for noise cancellation can be constituted by a common ultrasonic transducer, the labor of parts procurement and parts management is reduced. Can be reduced.

[請求項4の発明]
請求項4の発明によれば、ノイズキャンセル用超音波送受波器は、計測管部及び端部閉塞壁によって側方及び超音波の送受波面が覆われているから、計測ハウジングの外部からの不要な超音波を受波することを防止することができる。
[Invention of claim 4]
According to the invention of claim 4, the ultrasonic transducer for noise cancellation is unnecessary from the outside of the measurement housing because the side and the ultrasonic transmission / reception surface are covered by the measurement tube portion and the end blocking wall. It is possible to prevent reception of various ultrasonic waves.

[請求項5の発明]
請求項5の発明によれば、計測管部のうち、1対の送受波器固定壁の間の領域には、流体流入部から流入した流体が流れ、1対の端部区画領域には、それぞれノイズキャンセル用超音波送受波器が収容される。そして、計測管部を流れる流体の一部が連通路を通って1対の端部区画領域に流入するから、計測用超音波送受波器と同一条件下で、ノイズキャンセル用超音波送受波器による超音波の送受波を行うことができる。
[Invention of claim 5]
According to invention of Claim 5, the fluid which flowed in from the fluid inflow part flows into the area | region between a pair of transducer fixing wall among a measurement pipe part, and a pair of edge part division area | region has, Each of them accommodates an ultrasonic transducer for noise cancellation. And since a part of fluid which flows through a measurement pipe part flows in into a pair of end section area through a communicating passage, it is the ultrasonic transducer for noise cancellation under the same conditions as an ultrasonic transducer for measurement. Can transmit and receive ultrasonic waves.

[第1実施形態]
以下、本発明の第1実施形態を図1〜図4に基づいて説明する。
図1における符号11は、超音波流量計10(図2参照)における計測ハウジングであって、流体(例えばガス)が流れる送給管の途中に取り付けられている。
[First Embodiment]
Hereinafter, a first embodiment of the present invention will be described with reference to FIGS.
Reference numeral 11 in FIG. 1 is a measurement housing in the ultrasonic flowmeter 10 (see FIG. 2), and is attached in the middle of a feed pipe through which fluid (for example, gas) flows.

計測ハウジング11は、両端部が1対の端部閉塞壁15,15によって閉塞された直線状の計測管部12を備え、その計測管部12の内部に流体が流れる流路12Aが形成されている。流路12Aは、長手方向の両端部に備えた大径部13,13と、その大径部13,13に対して段付き状に縮径した小径部14とから構成されており、小径部14の内径は一定となっている。   The measurement housing 11 includes a linear measurement tube section 12 whose both ends are closed by a pair of end block walls 15, 15, and a flow path 12 </ b> A through which a fluid flows is formed inside the measurement tube section 12. Yes. 12 A of flow paths are comprised from the large diameter parts 13 and 13 with which the both ends of the longitudinal direction were equipped, and the small diameter part 14 diameter-reduced by the step shape with respect to the large diameter parts 13 and 13, and a small diameter part The inner diameter of 14 is constant.

計測管部12の長手方向の両端寄り位置からは2つの円筒部19,19が、長手方向に対して直角に起立している。円筒部19,19のうち、一方の円筒部19(図1における右側の円筒部19)の内部領域は、流路12Aに流体を導入するための流体流入路19Aであって流路12Aの一方の大径部13に連通している。また、他方の円筒部19(図1における左側の円筒部19)の内部領域は、流路12Aを通過した流体を排出するための流体流出路19Bであって、他方の大径部13に連通している。そして、両円筒部19,19に図示しない送給管が接続されると、図1の矢印に示すように、流路12Aの長手方向(図1の左右方向)の一端側から他端側に向かって流体が流れる。なお、一方の円筒部19は本発明の「流体流入部」に相当し、他方の円筒部19は本発明の「流体流出部」に相当する。   Two cylindrical portions 19 and 19 stand upright at right angles to the longitudinal direction from the positions near the both ends in the longitudinal direction of the measuring tube portion 12. Of the cylindrical portions 19, 19, the inner region of one cylindrical portion 19 (the right cylindrical portion 19 in FIG. 1) is a fluid inflow passage 19 </ b> A for introducing fluid into the flow passage 12 </ b> A, and is one of the flow passages 12 </ b> A. The large diameter portion 13 is communicated with. Further, the inner region of the other cylindrical portion 19 (left cylindrical portion 19 in FIG. 1) is a fluid outflow passage 19B for discharging the fluid that has passed through the flow path 12A, and communicates with the other large-diameter portion 13. is doing. When a feed pipe (not shown) is connected to both cylindrical portions 19 and 19, as shown by an arrow in FIG. 1, from one end side to the other end side in the longitudinal direction (left-right direction in FIG. 1) of the flow path 12A. Fluid flows toward it. One cylindrical portion 19 corresponds to the “fluid inflow portion” of the present invention, and the other cylindrical portion 19 corresponds to the “fluid outflow portion” of the present invention.

流路12Aのうち大径部13,13の内側には、本願の請求項7の発明に係る超音波送受波器ユニット60,60が固定されている。超音波送受波器ユニット60,60は、送受波器固定板18(本発明の「送受波器固定壁」に相当する)に計測用超音波送受波器20とノイズキャンセル用超音波送受波器30とを背中合わせに固定してなる。   Ultrasonic transducer units 60 and 60 according to the invention of claim 7 of the present application are fixed inside the large diameter portions 13 and 13 in the flow path 12A. The ultrasonic transmitter / receiver units 60, 60 are arranged on the transmitter / receiver fixing plate 18 (corresponding to the “transmitter / receiver fixing wall” of the present invention) and the ultrasonic transducer 20 for measurement and the ultrasonic transmitter / receiver for noise cancellation. 30 is fixed back to back.

超音波送受波器ユニット60のうち送受波器固定板18は、大径部13の内径よりも大径でかつ板厚方向の両面が平坦な円板状をなしている。そして、大径部13,13の内周面のうち、両円筒部19,19の内部開口よりも計測管部12の両端(端部閉塞壁15,15)寄り位置に陥没形成された環状の嵌合溝17,17に、各送受波器固定板18,18の外周縁部が嵌合されている。   In the ultrasonic transducer unit 60, the transducer fixing plate 18 has a disk shape that is larger in diameter than the inner diameter of the large-diameter portion 13 and flat in both sides in the plate thickness direction. And the annular | circular shape formed in the inner peripheral surface of the large diameter parts 13 and 13 at the position near both ends (end part closed walls 15 and 15) of the measurement pipe part 12 rather than the internal opening of both cylindrical parts 19 and 19 was formed. The outer peripheral edge portions of the transducer fixing plates 18 and 18 are fitted into the fitting grooves 17 and 17.

送受波器固定板18,18のうち、流路12Aを挟んで対向した対向面18A,18A(本願請求項7における「表側面」に相当する)には、それぞれ計測用超音波送受波器20,20が固定されている。計測用超音波送受波器20,20は、流路12Aの軸線上に配置されており、全体として扁平な円柱構造をなしている。詳細には、計測用超音波送受波器20の前端部は円錐台形状をなし、前端面が超音波の送受波面20Aとなっている。   The ultrasonic transducers 20 for measurement are respectively disposed on the opposing surfaces 18A and 18A (corresponding to the “front side surface” in claim 7 of the present application) facing each other across the flow path 12A among the transducer fixing plates 18 and 18. , 20 are fixed. The ultrasonic transducers 20 and 20 for measurement are arranged on the axis of the flow path 12A and have a flat cylindrical structure as a whole. Specifically, the front end portion of the measurement ultrasonic transducer 20 has a truncated cone shape, and the front end surface is an ultrasonic transmission / reception surface 20A.

送受波器固定板18,18のうち、計測用超音波送受波器20,20が固定された対向面18A,18Aと反対側の面18B,18B(本願請求項7における「裏側面」に相当する)には、計測用超音波送受波器20,20と同一構造でかつ同一サイズのノイズキャンセル用超音波送受波器30,30が固定されている。即ち、送受波器固定板18を挟んで計測用超音波送受波器20と背中合わせにしてノイズキャンセル用超音波送受波器30が固定されており、これにより計測用超音波送受波器20,20と、ノイズキャンセル用超音波送受波器30,30とが流路12Aの軸線上に並べて配置されている。   Of the transducer fixing plates 18 and 18, surfaces 18B and 18B opposite to the opposing surfaces 18A and 18A to which the measurement ultrasonic transducers 20 and 20 are fixed (corresponding to the “back side surface” in claim 7 of the present application). ), Noise canceling ultrasonic transducers 30 and 30 having the same structure and the same size as the measurement ultrasonic transducers 20 and 20 are fixed. That is, the noise canceling ultrasonic transducer 30 is fixed back-to-back with the measurement ultrasonic transducer 20 with the transducer fixing plate 18 sandwiched therebetween, whereby the measurement ultrasonic transducers 20, 20 are fixed. The noise canceling ultrasonic transducers 30 and 30 are arranged side by side on the axis of the flow path 12A.

また、計測管部12のうち、送受波器固定板18,18と端部閉塞壁15,15との間には、送受波器固定板18,18によって流路12Aと断絶されかつ閉塞された端部区画領域16,16が形成され、ここに各送受波器固定板18,18に固定されたノイズキャンセル用超音波送受波器30,30がそれぞれ収容されている。ノイズキャンセル用超音波送受波器30,30を端部区画領域16,16に収容したことで、ノイズキャンセル用超音波送受波器30,30が、計測ハウジング11の外部からの不要な超音波を受波することが防がれる。   Further, in the measuring tube section 12, between the transducer fixing plates 18 and 18 and the end blocking walls 15 and 15, the transducer fixing plates 18 and 18 are disconnected from the flow path 12A and blocked. End section regions 16 and 16 are formed, and noise canceling ultrasonic transducers 30 and 30 fixed to the respective transducer fixing plates 18 and 18 are accommodated therein. Since the noise canceling ultrasonic transducers 30 and 30 are accommodated in the end section regions 16 and 16, the noise canceling ultrasonic transducers 30 and 30 transmit unnecessary ultrasonic waves from the outside of the measurement housing 11. The reception is prevented.

なお、端部区画領域16,16には、流路12Aに流れる流体(流量の計測対象である流体)と同じ流体(本実施形態ではガス)が封入されている。   Note that the end partition regions 16 and 16 are filled with the same fluid (gas in this embodiment) as the fluid flowing in the flow path 12A (the fluid whose flow rate is to be measured).

図2に示すように、計測用超音波送受波器20,20は、送受切替部41からの切替信号によって制御され、一方が発信駆動回路42に接続されて送波器になると、他方が受信検知回路43に接続されて受波器になり、所定のタイミングでそれら送波器と受波器とが切り替えられる。   As shown in FIG. 2, the ultrasonic transducers 20 and 20 for measurement are controlled by a switching signal from the transmission / reception switching unit 41, and when one is connected to the transmission drive circuit 42 to become a transmitter, the other receives It is connected to the detection circuit 43 to become a receiver, and the transmitter and receiver are switched at a predetermined timing.

発信駆動回路42は、演算部45から発信指令を受信すると、送波側の計測用超音波送受波器20を励振させて超音波を送波させる。具体的には、図3に示すように、駆動波生成部42Aにて駆動パルスを生成し、その駆動パルスによって計測用超音波送受波器20から超音波を送波させる。   When receiving a transmission command from the calculation unit 45, the transmission drive circuit 42 excites the measurement ultrasonic transducer 20 on the transmission side to transmit ultrasonic waves. Specifically, as shown in FIG. 3, a drive pulse is generated by the drive wave generation unit 42 </ b> A, and ultrasonic waves are transmitted from the measurement ultrasonic transducer 20 by the drive pulse.

受信検知回路43では、受波側の計測用超音波送受波器20が超音波を受波して出力する計測用受波信号が所定値になったときに、時間計測部44に対して検知信号を出力する。   The reception detection circuit 43 detects the time measurement unit 44 when a measurement reception signal output by receiving and outputting an ultrasonic wave from the reception-side measurement ultrasonic transducer 20 reaches a predetermined value. Output a signal.

時間計測部44は、送波側の計測用超音波送受波器20が超音波を送波してから、受波側の計測用超音波送受波器20が超音波を受波する迄の伝播時間を計測する。具体的には、演算部45から発信駆動回路42に対して発信指令が出力されたときに時間計測部44のタイマがスタートし、受信検知回路43から検知信号が入力したときにタイマがストップする。   The time measurement unit 44 propagates from the time when the transmission-side measurement ultrasonic transducer 20 transmits ultrasonic waves to the time when the reception-side measurement ultrasonic transducer 20 receives ultrasonic waves. Measure time. Specifically, the timer of the time measuring unit 44 starts when a transmission command is output from the arithmetic unit 45 to the transmission drive circuit 42, and the timer stops when a detection signal is input from the reception detection circuit 43. .

演算部45は、時間計測部44にて計測された超音波の伝播時間を取り込む。そして、1対の計測用超音波送受波器20,20の一方から他方に向けて超音波を送受波したときの伝播時間と、他方から一方に向けて超音波を送受波したときの伝播時間との差に基づいて、公知な演算式により流体の流速及び流量を演算する。例えば、伝播時間の逆数の差が流速に比例するという原理に基づいて流速及び流量を演算する。   The calculation unit 45 takes in the propagation time of the ultrasonic wave measured by the time measurement unit 44. And the propagation time when transmitting and receiving ultrasonic waves from one of the pair of ultrasonic transducers 20 and 20 for measurement toward the other, and the propagation time when transmitting and receiving ultrasonic waves from the other to the other Based on the difference, the flow velocity and flow rate of the fluid are calculated by a known calculation formula. For example, the flow velocity and the flow rate are calculated based on the principle that the difference in the reciprocal of the propagation time is proportional to the flow velocity.

さて、本発明の超音波流量計10では、計測用超音波送受波器20,20のみならず、ノイズキャンセル用超音波送受波器30,30も送受切替部41からの信号によって制御される。具体的には、一方の計測用超音波送受波器20が発信駆動回路42に接続されると、その一方の計測用超音波送受波器20と同じ送受波器固定板18に固定された一方のノイズキャンセル用超音波送受波器30も発信駆動回路42に接続される。このとき、受波側となった他方の計測用超音波送受波器20は受信検知回路43に接続されるが、その計測用超音波送受波器20と同じ送受波器固定板18に固定された他方のノイズキャンセル用超音波送受波器30は、発信駆動回路42及び受信検知回路43の何れにも接続されない。   In the ultrasonic flowmeter 10 of the present invention, not only the measurement ultrasonic transducers 20 and 20 but also the noise canceling ultrasonic transducers 30 and 30 are controlled by signals from the transmission / reception switching unit 41. Specifically, when one of the measurement ultrasonic transducers 20 is connected to the transmission drive circuit 42, one of the ultrasonic transducers 20 fixed to the same transducer fixing plate 18 as the one of the measurement ultrasonic transducers 20 is fixed. The noise canceling ultrasonic transducer 30 is also connected to the transmission drive circuit 42. At this time, the other measurement ultrasonic transducer 20 on the receiving side is connected to the reception detection circuit 43, but is fixed to the same transducer fixing plate 18 as the measurement ultrasonic transducer 20. The other noise canceling ultrasonic transducer 30 is not connected to either the transmission drive circuit 42 or the reception detection circuit 43.

そして、送波側の計測用超音波送受波器20が超音波を送波すると、その計測用超音波送受波器20と同じ送受波器固定板18に固定されたノイズキャンセル用超音波送受波器30から、計測用超音波送受波器20が送波する超音波と逆位相の超音波が送波される(図3参照)。   Then, when the measurement ultrasonic transducer 20 on the transmission side transmits the ultrasonic wave, the noise canceling ultrasonic transducer fixed to the same transducer fixing plate 18 as the measurement ultrasonic transducer 20 is used. An ultrasonic wave having a phase opposite to that of the ultrasonic wave transmitted by the measurement ultrasonic transducer 20 is transmitted from the instrument 30 (see FIG. 3).

ここで、計測用超音波送受波器20が超音波を送波すると、その計測用超音波送受波器20から送受波器固定板18に対して、例えば、図4(A)に示す波形の超音波が伝播する。   Here, when the measurement ultrasonic transducer 20 transmits an ultrasonic wave, for example, the waveform shown in FIG. 4A is transmitted from the measurement ultrasonic transducer 20 to the transducer fixing plate 18. Ultrasound propagates.

これに対し、送波側の計測用超音波送受波器20と同じ送受波器固定板18に固定されたノイズキャンセル用超音波送受波器30が超音波を送波すると、そのノイズキャンセル用超音波送受波器30から送受波器固定板18に対して、例えば、図4(B)に示す波形の超音波が伝播する。即ち、送受波器固定板18には、計測用超音波送受波器20とノイズキャンセル用超音波送受波器30との両方から互いに逆位相の超音波が伝播する。   On the other hand, when the noise canceling ultrasonic transducer 30 fixed to the same transducer fixing plate 18 as the measuring ultrasonic transducer 20 on the transmission side transmits ultrasonic waves, the noise canceling ultrasonic transducer For example, ultrasonic waves having a waveform shown in FIG. 4B propagate from the acoustic transducer 30 to the transducer fixing plate 18. That is, ultrasonic waves having opposite phases propagate from both the measurement ultrasonic transducer 20 and the noise canceling ultrasonic transducer 30 to the transducer fixing plate 18.

これにより、送波側の計測用超音波送受波器20から送受波器固定板18へと伝播した超音波を、その計測用超音波送受波器20と同じ送受波器固定板18に固定されたノイズキャンセル用超音波送受波器30から送受波器固定板18へと伝播する超音波によってキャンセルする(打ち消す)ことができる。   Thereby, the ultrasonic wave propagated from the measurement ultrasonic transducer 20 on the transmission side to the transducer fixing plate 18 is fixed to the same transducer fixing plate 18 as the measurement ultrasonic transducer 20. Further, it can be canceled (cancelled) by the ultrasonic wave propagating from the noise canceling ultrasonic transducer 30 to the transducer fixing plate 18.

なお、他方の計測用超音波送受波器20から一方の計測用超音波送受波器20に向けて超音波を送波する場合もこれと同様であって、他方の計測用超音波送受波器20と同じ送受波器固定板18に固定されたノイズキャンセル用超音波送受波器30が、計測用超音波送受波器20が送波する超音波と逆位相の超音波を送波する。   The same applies to the case where ultrasonic waves are transmitted from the other measurement ultrasonic transducer 20 toward one measurement ultrasonic transducer 20, and the other measurement ultrasonic transducer is the same. The noise canceling ultrasonic transducer 30 fixed to the same transducer fixing plate 18 as 20 transmits ultrasonic waves having a phase opposite to that of the ultrasonic wave transmitted by the measuring ultrasonic transducer 20.

このように、本実施形態によれば、1対の計測用超音波送受波器20,20の間で超音波を送受波した場合に、送波側の計測用超音波送受波器20と同じ送受波器固定板18に固定されたノイズキャンセル用超音波送受波器30が、送波側の計測用超音波送受波器20が送波する超音波と逆位相の超音波を送波するので、送波側の計測用超音波送受波器20から送受波器固定板18へと伝播する超音波がキャンセルされる(打ち消される)。即ち、計測用超音波送受波器20からの超音波の送波に伴って、送受波器固定板18を介して計測ハウジング11へと伝播する超音波(所謂、筐体ノイズ)を低減或いは無くすことができる。これにより、精度よく流量計測を行うことができる。また、送受波器固定板18,18を平板状にして、端部区画領域16,16と流路12Aとを断絶状態にしたので、ノイズキャンセル用超音波送受波器30,30から送波され端部閉塞壁15,15に反射した超音波が流路12A内に進入することを防止することができる。   As described above, according to the present embodiment, when ultrasonic waves are transmitted and received between the pair of measurement ultrasonic transducers 20 and 20, the same as the measurement ultrasonic transducer 20 on the transmission side. The noise canceling ultrasonic transducer 30 fixed to the transducer fixing plate 18 transmits ultrasonic waves having a phase opposite to that of the ultrasonic wave transmitted by the transmitting ultrasonic transducer 20. Then, the ultrasonic wave propagating from the measurement-side ultrasonic transducer 20 on the transmission side to the transducer fixing plate 18 is canceled (cancelled). That is, the ultrasonic wave (so-called housing noise) propagating to the measurement housing 11 through the transducer fixing plate 18 as the ultrasonic wave is transmitted from the measurement ultrasonic transducer 20 is reduced or eliminated. be able to. Thereby, the flow rate can be accurately measured. Further, since the end plates 16 and 16 and the flow path 12A are disconnected from each other by making the transducer fixing plates 18 and 18 flat, the waves are transmitted from the noise canceling ultrasonic transducers 30 and 30. It is possible to prevent the ultrasonic waves reflected on the end blocking walls 15 and 15 from entering the flow path 12A.

[第実施形態]
この第実施形態は、超音波を送受波する際のノイズキャンセル用超音波送受波器30,30と発信駆動回路42及び受信検知回路43との接続状態及び、受信検知回路43における処理が、上記第1実施形態とは異なる。
[ Second Embodiment]
In the second embodiment, the connection state between the ultrasonic transducers 30 and 30 for noise cancellation when transmitting and receiving ultrasonic waves, the transmission drive circuit 42 and the reception detection circuit 43, and the processing in the reception detection circuit 43 are as follows. Different from the first embodiment.

具体的には、図に示すように、1対の計測用超音波送受波器20,20の間で超音波を送受波する場合に、受波側の計測用超音波送受波器20と同じ送受波器固定板18に固定されたノイズキャンセル用超音波送受波器30は受信検知回路43に接続されると共に、送波側の計測用超音波送受波器20と同じ送受波器固定板18に固定されたノイズキャンセル用超音波送受波器30は発信駆動回路42に接続される。 Specifically, as shown in FIG. 5 , when ultrasonic waves are transmitted and received between a pair of measurement ultrasonic transducers 20 and 20, the measurement ultrasonic transducer 20 on the reception side and The noise canceling ultrasonic transducer 30 fixed to the same transducer fixing plate 18 is connected to the reception detection circuit 43 and the same transducer fixing plate as the measuring ultrasonic transducer 20 on the transmission side. The noise canceling ultrasonic transducer 30 fixed to 18 is connected to the transmission drive circuit 42.

送波側の計測用超音波送受波器20が超音波を送波すると、その計測用超音波送受波器20から送受波器固定板18に対して、例えば、図4(A)に示す波形の超音波が伝播する。   When the measurement ultrasonic transducer 20 on the transmission side transmits an ultrasonic wave, for example, the waveform shown in FIG. 4A from the measurement ultrasonic transducer 20 to the transducer fixing plate 18. The ultrasonic wave propagates.

これに対し、送波側の計測用超音波送受波器20と同じ送受波器固定板18に固定されたノイズキャンセル用超音波送受波器30が超音波を送波すると、そのノイズキャンセル用超音波送受波器30から送受波器固定板18に対して、例えば、図4(B)に示す波形の超音波が伝播する。即ち、送受波器固定板18には、計測用超音波送受波器20とノイズキャンセル用超音波送受波器30との両方から互いに逆位相の超音波が伝播する。   On the other hand, when the noise canceling ultrasonic transducer 30 fixed to the same transducer fixing plate 18 as the measuring ultrasonic transducer 20 on the transmission side transmits ultrasonic waves, the noise canceling ultrasonic transducer For example, ultrasonic waves having a waveform shown in FIG. 4B propagate from the acoustic transducer 30 to the transducer fixing plate 18. That is, ultrasonic waves having opposite phases propagate from both the measurement ultrasonic transducer 20 and the noise canceling ultrasonic transducer 30 to the transducer fixing plate 18.

これにより、送波側の計測用超音波送受波器20から送受波器固定板18に伝わった超音波を、その計測用超音波送受波器20と同じ送受波器固定板18に固定されたノイズキャンセル用超音波送受波器30から送受波器固定板18に伝わった超音波によって打ち消すことができる。よって、計測用超音波送受波器20からの超音波の送波に伴って計測ハウジング11及び送受波器固定板18,18を伝播する超音波(所謂、筐体ノイズ)を低減或いは無くすことができる。   As a result, the ultrasonic waves transmitted from the measurement-side ultrasonic transducer 20 on the transmission side to the transducer fixing plate 18 are fixed to the same transducer fixing plate 18 as the measurement ultrasonic transducer 20. It can be canceled by the ultrasonic wave transmitted from the noise canceling ultrasonic transducer 30 to the transducer fixing plate 18. Therefore, it is possible to reduce or eliminate ultrasonic waves (so-called housing noise) propagating through the measurement housing 11 and the transmitter / receiver fixing plates 18 and 18 accompanying the transmission of ultrasonic waves from the measurement ultrasonic transducer 20. it can.

また、万が一、送波側の計測用超音波送受波器20から送受波器固定板18に伝播する超音波(筐体ノイズ)を十分に低減できなかった場合は、以下のようである。   If the ultrasonic wave (casing noise) propagating from the measuring ultrasonic transducer 20 on the transmission side to the transducer fixing plate 18 cannot be sufficiently reduced, the following is performed.

即ち、受波側の計測用超音波送受波器20は、流路12Aを流れる流体中を伝播した超音波と、計測ハウジング11及び送受波器固定板18,18を伝播した超音波との両方を受波する。なお、図7(A)には、送波側の計測用超音波送受波器20が受波して出力する計測用受波信号の一例が示されている。これに対し、受波側の計測用超音波送受波器20と同じ送受波器固定板18に固定されたノイズキャンセル用超音波送受波器30では、流体中を伝播した超音波は受波されず、計測ハウジング11及び送受波器固定板18,18を伝播した超音波だけが受波される。なお、図7(B)には、ノイズキャンセル用超音波送受波器30が受波して出力するノイズキャンセル用受波信号の一例が示されている。   That is, the receiving-side measurement ultrasonic transducer 20 includes both the ultrasonic wave propagated in the fluid flowing through the flow path 12A and the ultrasonic wave propagated through the measurement housing 11 and the transducer fixing plates 18 and 18. Receive. FIG. 7A shows an example of a reception signal for measurement output by receiving and outputting the measurement ultrasonic transducer 20 on the transmission side. On the other hand, in the noise canceling ultrasonic transducer 30 fixed to the same transducer fixing plate 18 as the measuring ultrasonic transducer 20 on the receiving side, the ultrasonic wave propagated in the fluid is received. Instead, only the ultrasonic wave propagated through the measurement housing 11 and the transducer fixing plates 18 and 18 is received. FIG. 7B shows an example of a noise canceling reception signal received and output by the noise canceling ultrasonic transducer 30.

図6に示すように、受信検知回路43では、計測用超音波送受波器20による計測用受波信号とノイズキャンセル用超音波送受波器30によるノイズキャンセル用受波信号とを取り込んでそれらを増幅し、減算器43Aにて、計測用受波信号からノイズキャンセル用受波信号を減算処理する。これにより、計測用受波信号のうち、計測用超音波送受波器20が計測ハウジング11及び送受波器固定板18,18を介して受波した超音波による受波ノイズ成分(ノイズキャンセル用受波信号)をキャンセルする。なお、図7(C)には、受波ノイズ成分をキャンセルした後の計測用受波信号の一例が示されている。   As shown in FIG. 6, the reception detection circuit 43 takes in a measurement reception signal from the measurement ultrasonic transducer 20 and a noise cancellation reception signal from the noise cancellation ultrasonic transducer 30 and outputs them. The signal is amplified and subtracted by the subtractor 43A from the received signal for measurement from the received signal for measurement. As a result, of the received signal for measurement, a received noise component (receiver for noise cancellation) by the ultrasonic wave received by the measurement ultrasonic transducer 20 via the measurement housing 11 and the transducer fixing plates 18 and 18 is received. Wave signal). FIG. 7C shows an example of a reception signal for measurement after the reception noise component is canceled.

そして、受波ノイズ成分をキャンセルした後の計測用受波信号が所定値に達したか否かを受信点検知部43Bにて判定し、所定値に達したと判定されたときに、受信検知回路43は時間計測部44に対して検知信号を出力する。これにより、時間計測部44のタイマが停止され、1対の計測用超音波送受波器20,20の間で流体中を伝播した超音波の伝播時間が計測される。なお、受信検知回路43は、本発明の「受波信号処理部」に相当する。   Then, the reception point detection unit 43B determines whether or not the measurement reception signal after canceling the reception noise component has reached a predetermined value. When it is determined that the reception signal has reached the predetermined value, reception detection is performed. The circuit 43 outputs a detection signal to the time measuring unit 44. As a result, the timer of the time measuring unit 44 is stopped, and the propagation time of the ultrasonic wave propagated in the fluid between the pair of ultrasonic transducers 20 and 20 for measurement is measured. The reception detection circuit 43 corresponds to the “received signal processing unit” of the present invention.

その他の構成については上記第1実施形態と同じであるため、同じ構成については、同一符号を付し、重複する説明は省略する。   Since other configurations are the same as those in the first embodiment, the same reference numerals are given to the same configurations, and duplicate descriptions are omitted.

このように、本実施形態によれば、1対の計測用超音波送受波器20,20の間で超音波を送受波した場合に、送波側の計測用超音波送受波器20と同じ送受波器固定板18に固定されたノイズキャンセル用超音波送受波器30が、送波側の計測用超音波送受波器20が送波する超音波と逆位相の超音波を送波するので、送波側の計測用超音波送受波器20から送受波器固定板18へと伝播する超音波がキャンセルされる(打ち消される)。即ち、計測用超音波送受波器20からの超音波の送波に伴って、送受波器固定板18を介して計測ハウジング11へと伝播する超音波(所謂、筐体ノイズ)を低減或いは無くすことができる。これにより、精度よく流量計測を行うことができる。   As described above, according to the present embodiment, when ultrasonic waves are transmitted and received between the pair of measurement ultrasonic transducers 20 and 20, the same as the measurement ultrasonic transducer 20 on the transmission side. The noise canceling ultrasonic transducer 30 fixed to the transducer fixing plate 18 transmits ultrasonic waves having a phase opposite to that of the ultrasonic wave transmitted by the transmitting ultrasonic transducer 20. Then, the ultrasonic wave propagating from the measurement-side ultrasonic transducer 20 on the transmission side to the transducer fixing plate 18 is canceled (cancelled). That is, the ultrasonic wave (so-called housing noise) propagating to the measurement housing 11 through the transducer fixing plate 18 as the ultrasonic wave is transmitted from the measurement ultrasonic transducer 20 is reduced or eliminated. be able to. Thereby, the flow rate can be accurately measured.

万が一、送波側の計測用超音波送受波器20から送受波器固定板18を介して計測ハウジング11へと伝播する超音波を十分に低減できなかった場合でも、計測用超音波送受波器20が受波して出力する計測用受波信号(図7(A)参照)と、ノイズキャンセル用超音波送受波器30が受波して出力するノイズキャンセル用受波信号(図7(B)参照)とに基づいて、計測用受波信号のうち、計測用超音波送受波器20が送受波器固定板18を介して受波した受波ノイズ成分(即ち、筐体ノイズ)をキャンセルすることができるから、精度よく流量計測を行うことができる。   Even if the ultrasonic wave propagating from the measurement ultrasonic transducer 20 on the transmission side to the measurement housing 11 via the transducer fixing plate 18 cannot be sufficiently reduced, the measurement ultrasonic transducer is not provided. A reception signal for measurement (see FIG. 7 (A)) that is received and output by 20 and a reception signal for noise cancellation (FIG. 7 (B) that is received and output by the ultrasonic transducer 30 for noise cancellation). ))), The received noise component (that is, the housing noise) received by the measurement ultrasonic transducer 20 via the transducer fixing plate 18 is canceled out of the measurement received signal. Therefore, the flow rate can be measured with high accuracy.

[他の実施形態]
本発明は、前記実施形態に限定されるものではなく、例えば、以下に説明するような実施形態も本発明の技術的範囲に含まれ、さらに、下記以外にも要旨を逸脱しない範囲内で種々変更して実施することができる。
[Other Embodiments]
The present invention is not limited to the above-described embodiment. For example, the embodiments described below are also included in the technical scope of the present invention, and various other than the following can be made without departing from the scope of the invention. It can be changed and implemented.

(1)図に示すように、両送受波器固定板18に連通路18Cを貫通形成して、端部区画領域16,16と流路12Aとを連通させておき、流路12Aを通過する流体の一部が、連通路18Cから端部区画領域16,16に流入するようにしてもよい。このようにすれば、端部区画領域16,16内に流路12Aを流れる流体が流れ込んで、計測用超音波送受波器20,20と同一条件(例えば、濃度、圧力、温度)の下で、ノイズキャンセル用超音波送受波器30,30による超音波の送受波を行うことができる。なお、連通路18Cは、送受波器固定板18の外縁部の一部を切り欠いて形成してもよい。 (1) As shown in FIG. 8 , a communication path 18C is formed through both the transducer fixing plates 18 so that the end section regions 16 and 16 and the flow path 12A are communicated with each other and pass through the flow path 12A. A part of the fluid to flow may flow into the end section regions 16 and 16 from the communication path 18C. In this way, the fluid flowing through the flow path 12A flows into the end partition regions 16 and 16 and under the same conditions (for example, concentration, pressure, and temperature) as the measurement ultrasonic transducers 20 and 20. The ultrasonic wave can be transmitted and received by the noise canceling ultrasonic transducers 30 and 30. The communication path 18 </ b> C may be formed by cutting out a part of the outer edge portion of the transducer fixing plate 18.

(2)送受波器固定板18と計測ハウジング11は別部品であったが、これらを一体形成してもよい。   (2) Although the transducer fixing plate 18 and the measurement housing 11 are separate parts, they may be integrally formed.

(3)図に示すように、計測ハウジング11の計測管部12を両端開放の筒形構造とし、その両開口部12B,12B(図には一方の開口部12Bのみが示されている)に、計測管部12とは別部品のキャップ部材50,50を嵌合或いは螺合することで、両開口部12B,12Bを閉塞しかつ、超音波送受波器ユニット60,60を計測ハウジング11内に固定する構成としてもよい。より具体的には、キャップ部材50は、開口部12Bの内側に嵌合或いは螺合する筒壁50Aと筒壁50Aの一端を閉塞して側方に張り出した端部閉塞壁50Bとから構成し、計測管部12の開口部12Bから超音波送受波器ユニット60を挿入嵌合してから、その開口部12Bの内側にキャップ部材50の筒壁50Aを嵌合或いは螺合することで、送受波器固定板18の外縁部を筒壁50Aの先端と計測管部12の内面段差部12Cとの間で挟持する構成としてもよい。なお、この場合、筒壁50Aの外周面と開口部12Bの内周面との間或いは、端部閉塞壁50Bと計測管部12の端面との間をシール部材(図示せず)でシールすることが好ましい。 (3) As shown in FIG. 9 , the measurement tube portion 12 of the measurement housing 11 has a cylindrical structure with both ends open, and both openings 12B and 12B (only one opening 12B is shown in FIG. 9 ). ), By fitting or screwing cap members 50, 50 which are separate parts from the measurement tube portion 12, both the openings 12B, 12B are closed, and the ultrasonic transducer units 60, 60 are connected to the measurement housing. It is good also as a structure fixed in 11. More specifically, the cap member 50 includes a cylindrical wall 50A that fits or is screwed into the inside of the opening 12B, and an end closed wall 50B that closes one end of the cylindrical wall 50A and projects sideways. The ultrasonic transducer unit 60 is inserted and fitted through the opening 12B of the measurement tube unit 12, and then the cylindrical wall 50A of the cap member 50 is fitted or screwed inside the opening 12B. It is good also as a structure which clamps the outer edge part of the waver fixing board 18 between the front-end | tip of 50 A of cylinder walls, and the internal surface level | step-difference part 12C of the measurement pipe part 12. In this case, a seal member (not shown) is sealed between the outer peripheral surface of the cylindrical wall 50A and the inner peripheral surface of the opening 12B or between the end blocking wall 50B and the end surface of the measuring tube portion 12. It is preferable.

(4)また、計測管部12を縦割りに(軸方向に平行な平面で)分割してなる1対の計測管構成体のうち、一方の計測管構成体に形成された嵌合溝17に、超音波送受波器ユニット60の送受波器固定板18を嵌合しておき、その状態で、計測管構成体同士を合体することで、超音波送受波器ユニット60,60を計測ハウジング11の内部に固定してもよい。   (4) In addition, the fitting groove 17 formed in one of the measurement tube components of the pair of measurement tube components formed by dividing the measurement tube part 12 in a vertically divided manner (on a plane parallel to the axial direction). The ultrasonic transducer unit 60, 60 is fitted into the measurement housing by fitting the transducer fixing plate 18 of the ultrasonic transducer unit 60 to each other and combining the measurement tube components together in this state. 11 may be fixed inside.

(5)上記第1〜第実施形態では、計測用超音波送受波器20,20及びノイズキャンセル用超音波送受波器30,30を、流路12Aの軸線上に並べて配置した構成であったが、図10に示すように、流路12Aの軸線に対して斜めに交差する方向に並べて配置してもよい。 (5) In the first to second embodiments, the measurement ultrasonic transducers 20 and 20 and the noise canceling ultrasonic transducers 30 and 30 are arranged side by side on the axis of the flow path 12A. However, as shown in FIG. 10 , they may be arranged side by side in a direction that obliquely intersects the axis of the flow path 12A.

(6)送受波器固定板18,18は、計測管部12の内周面の全周に嵌合されていたが、図11に示すように計測管部12の内周面の一部だけに嵌合されていてもよい。 (6) transducer fixing plate 18 and 18 has been fitted to the entire circumference of the inner peripheral surface of the measurement pipe section 12, only a portion of the inner peripheral surface of the measurement pipe section 12 as shown in FIG. 11 May be fitted.

本発明の第1実施形態に係る超音波流量計の計測ハウジングの断面図Sectional drawing of the measurement housing of the ultrasonic flowmeter concerning a 1st embodiment of the present invention. 超音波流量計のブロック図Ultrasonic flow meter block diagram 発信駆動回路のブロック図Block diagram of transmission drive circuit (A)計測用超音波送受波器から送受波器固定壁に漏れた超音波の波形、(B)ノイズキャンセル用超音波送受波器から送受波器固定壁に漏れた超音波の波形(A) Waveform of ultrasonic wave leaking from measurement ultrasonic transducer to transmitter / receiver fixed wall, (B) Waveform of ultrasonic wave leaking from ultrasonic transducer for noise cancellation to transducer fixed wall 第2実施形態に係る超音波流量計のブロック図Block diagram of an ultrasonic flowmeter according to the second embodiment 受信検知回路のブロック図Block diagram of reception detection circuit (A)計測用受波信号のグラフ、(B)ノイズキャンセル用受波信号のグラフ、(C)受波ノイズ成分をキャンセルした計測用受波信号のグラフ(A) Graph of received signal for measurement, (B) Graph of received signal for noise cancellation, (C) Graph of received signal for measurement with canceled received noise component 他の実施形態(1)に係る計測ハウジングの部分断面図Partial sectional view of a measurement housing according to another embodiment (1) 他の実施形態(3)に係る計測ハウジングの断面図Sectional drawing of the measurement housing which concerns on other embodiment (3) 他の実施形態(5)に係る計測ハウジングの断面図Sectional drawing of the measurement housing which concerns on other embodiment (5) 他の実施形態(6)に係る計測管部の断面図Sectional drawing of the measurement pipe part which concerns on other embodiment (6).

符号の説明Explanation of symbols

10 超音波流量計
11 計測ハウジング
12 計測管部
12A 流路
15 端部閉塞壁
16 端部区画領域
18 送受波器固定板(送受波器固定壁)
18A 対向面(表側面)
18B 対向面と反対側の面(裏側面)
19 円筒部(流体流入部、流体流出部)
20 計測用超音波送受波器
30 ノイズキャンセル用超音波送受波器(受波ノイズキャンセル用超音波送受波器)
43 受信検知回路(受波信号処理部)
50B 端部閉塞壁
60 超音波送受波器ユニット
DESCRIPTION OF SYMBOLS 10 Ultrasonic flowmeter 11 Measurement housing 12 Measurement pipe part 12A Flow path 15 End blockage wall 16 End part division area | region 18 Transmitter / receiver fixing plate (transmitter / receiver fixed wall)
18A Opposing surface (front side)
18B Opposite side and opposite side (back side)
19 Cylindrical part (fluid inflow part, fluid outflow part)
20 Ultrasonic transducer for measurement 30 Ultrasonic transducer for noise cancellation (Ultrasonic transducer for reception noise cancellation)
43 Reception detection circuit (received signal processor)
50B End blockage wall 60 Ultrasonic transducer unit

Claims (6)

流体が流れる流路を有した計測ハウジングに、前記流路の上流側と下流側とに分けて1対の送受波器固定壁を設けると共にそれら1対の送受波器固定壁の互いの対向面に1対の計測用超音波送受波器を固定し、
前記1対の計測用超音波送受波器の間で送受波される超音波を前記流路内の流体に伝播させて、その伝播時間に基づいて流体の流量を計測する超音波流量計において、
前記1対の送受波器固定壁のうち互いの対向面と反対側の面にそれぞれ固定され、前記計測用超音波送受波器が送波する超音波と逆位相の超音波を送波して、前記計測用超音波送受波器から前記送受波器固定壁に伝播する超音波をキャンセルさせるための1対のノイズキャンセル用超音波送受波器を備えたことを特徴とする超音波流量計。
A measurement housing having a flow path through which a fluid flows is provided with a pair of transducer fixed walls separately on the upstream side and the downstream side of the flow path, and the opposing surfaces of the pair of transducer fixed walls A pair of ultrasonic transducers for measurement are fixed to
In the ultrasonic flowmeter for propagating ultrasonic waves transmitted and received between the pair of ultrasonic transducers for measurement to the fluid in the flow path and measuring the flow rate of the fluid based on the propagation time,
An ultrasonic wave having a phase opposite to that of the ultrasonic wave transmitted by the ultrasonic transducer for measurement is transmitted to each of the pair of transducer fixed walls fixed to a surface opposite to the opposing surface. An ultrasonic flowmeter comprising a pair of noise canceling ultrasonic transducers for canceling ultrasonic waves propagating from the measurement ultrasonic transducers to the transducer fixed wall.
前記ノイズキャンセル用超音波送受波器は、前記送受波器固定壁に伝播する超音波を受波可能に構成され、
前記計測用超音波送受波器が超音波を受波して出力する計測用受波信号と、その受波側の計測用超音波送受波器と同じ前記送受波器固定壁に固定された前記ノイズキャンセル用超音波送受波器が超音波を受波して出力するノイズキャンセル用受波信号とに基づいて、前記計測用受波信号のうち前記計測用超音波送受波器が前記送受波器固定壁を介して受波した超音波による受波ノイズ成分をキャンセルする受波信号処理部を備えたことを特徴とする請求項1に記載の超音波流量計。
The noise canceling ultrasonic transducer is configured to be able to receive ultrasonic waves propagating to the transducer fixed wall,
The measurement ultrasonic transducer receives and outputs an ultrasonic wave, and is fixed to the same transducer fixed wall as the measurement ultrasonic transducer on the reception side. Based on the noise canceling reception signal that is output by receiving and outputting the ultrasonic wave from the noise canceling ultrasonic transmitter / receiver, the measurement ultrasonic transducer is the transmitter / receiver of the measurement reception signals. The ultrasonic flowmeter according to claim 1, further comprising: a received signal processing unit that cancels a received noise component due to the ultrasonic wave received through the fixed wall.
前記計測用超音波送受波器と前記ノイズキャンセル用超音波送受波器とは、同一構造かつ同一サイズの超音波送受波器であることを特徴とする請求項1又は2に記載の超音波流量計。   The ultrasonic flow rate according to claim 1 or 2, wherein the ultrasonic transducer for measurement and the ultrasonic transducer for noise cancellation are ultrasonic transducers having the same structure and the same size. Total. 前記計測ハウジングには、直線状に延びた管構造をなしかつ両端寄り位置の側面に流体流入部及び流体流出部を有した計測管部と、前記計測管部の両端を閉塞する1対の端部閉塞壁とが備えられ、
前記1対の送受波器固定壁を、前記計測管部のうち前記流体流入部と前記端部閉塞壁との間と、前記流体流出部と前記端部閉塞壁との間とに配置して、前記計測管部の内部に固定したことを特徴とする請求項1乃至3の何れかに記載の超音波流量計。
The measurement housing has a tube structure that extends in a straight line and has a fluid inflow portion and a fluid outflow portion on side surfaces near both ends, and a pair of ends that close both ends of the measurement tube portion. And an obstruction wall
The pair of transmitter / receiver fixed walls are arranged between the fluid inflow portion and the end closing wall and between the fluid outflow portion and the end closing wall in the measurement pipe portion. The ultrasonic flowmeter according to any one of claims 1 to 3, wherein the ultrasonic flowmeter is fixed inside the measurement tube portion.
前記1対の送受波器固定壁を平板形状にして、前記計測管部の両端に前記送受波器固定壁と前記端部閉塞壁とに挟まれた1対の端部区画領域を設け、
前記1対の送受波器固定壁を貫通して、前記計測管部のうち前記1対の送受波器固定壁の間の領域と、前記1対の端部区画領域とを連通した連通路を備えたことを特徴とする請求項4に記載の超音波流量計。
The pair of transducer fixing walls is formed into a flat plate shape, and a pair of end partition regions sandwiched between the transducer fixing wall and the end blocking wall are provided at both ends of the measurement tube portion,
A communication path that penetrates through the pair of transducer fixed walls and communicates the region between the pair of transducer fixed walls in the measurement tube section and the pair of end section regions. The ultrasonic flowmeter according to claim 4, wherein the ultrasonic flowmeter is provided.
超音波流量計のうち流体が流れる流路を有した計測ハウジングに対をなして取り付けられ、超音波を送受波して流体の流量の計測に用いられる超音波送受波器ユニットであって、An ultrasonic transducer unit that is attached in pairs to a measurement housing having a flow path through which a fluid flows, and is used to measure the flow rate of fluid by transmitting and receiving ultrasonic waves,
前記計測ハウジングに外縁部が固定される送受波器固定壁と、A transducer fixing wall whose outer edge is fixed to the measurement housing;
前記送受波器固定壁の表側面に固定されて前記流路を流れる流体に向けて超音波を送波可能な計測用超音波送受波器と、An ultrasonic transducer for measurement capable of transmitting ultrasonic waves toward the fluid flowing through the flow path fixed to the front side surface of the transducer fixed wall;
前記送受波器固定壁の裏側面に固定されて、前記計測用超音波送受波器が送波する超音波と逆位相の超音波を送波して、前記計測用超音波送受波器から前記送受波器固定壁に伝播する超音波をキャンセルさせるためのノイズキャンセル用超音波送受波器とを備えたことを特徴とする超音波送受波器ユニット。It is fixed to the back side of the transducer fixing wall, and transmits ultrasonic waves having a phase opposite to that of the ultrasonic waves transmitted by the ultrasonic transducer for measurement, from the ultrasonic transducer for measurement. An ultrasonic transducer unit comprising: a noise canceling ultrasonic transducer for canceling ultrasonic waves propagating to a transducer fixed wall.
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