JP4920765B2 - Nozzle structure for glass substrate temperature control - Google Patents

Description

  The present invention relates to a glass substrate temperature control nozzle structure for maintaining temperature at a predetermined temperature by blowing temperature-controlled air from a nozzle onto a glass substrate used in a liquid crystal display or the like.

  The 8th generation of glass substrates for liquid crystals is currently used, but recently, the size has been further increased, and the 10th generation, which is the largest size, has produced liquid crystal displays using glass substrates with dimensions of 2880 × 3130 mm. It has come to be. Up to now, eighteen 32-inch LCDs can be made from 8th generation glass substrates, but 28th for 32 inches and 15 for 42 inches can be made from 10th generation glass substrates. It has been developed so that a display can be produced at a lower cost.

Such a large glass substrate is subjected to various printing processes by an exposure apparatus, but the larger the size, the larger the printing displacement due to the linear expansion coefficient (8.5 × 10 ⁻⁶ / ° C.) of the glass. Therefore, temperature control that keeps the glass substrate temperature constant before exposure is required.

  In Patent Document 1, a large number of nozzles are attached to the surface of an air supply box provided facing the glass substrate at intervals of 10 to 50 mm in the front and rear, left and right, and temperature controlled air of 23 ± 0.1 ° C. from the air supply box It is proposed that the temperature of the glass substrate is set to 23 ± 0.1 ° C. within a takt time (1 minute) by spraying the glass substrate from each nozzle at a wind speed of several m to several tens m / sec.

JP 2002-72492 A

By the way, in order to precisely control the glass substrate to 23 ± 0.1 ° C. within the takt time, it is necessary to attach 1500 nozzles / m ² to the air supply box per square meter of the glass substrate. For this reason, in an ultra-large glass substrate such as the 10th generation, as many as 13,500 nozzles must be attached to the air supply box, the installation cost becomes enormous and the total weight of the nozzle and the air supply box increases. There is a problem.

  Then, the objective of this invention is providing the nozzle structure for glass substrate temperature control which can attach the nozzle which sprays temperature control air to a glass substrate to an air supply box simply to solve the said subject.

In order to achieve the above object, according to the first aspect of the present invention, in a glass substrate temperature control nozzle structure for blowing temperature control air to a glass substrate, a large number of nozzles are arranged vertically and horizontally on the plate and protrude from the surface of the plate. plates nozzle integrally formed with, a large number of sheets and molded using a mold and engineering plastic, and the nozzle hole diameter of the tip is formed in 1 to 3 mm, to the plate, staggered in 10~30mm intervals The plate nozzle is formed in a grid pattern or a grid pattern, and a plurality of the plate nozzles are arranged and supported in accordance with the size of the glass substrate and are attached to an air supply box for supplying temperature-controlled air. It is the nozzle structure for glass substrate temperature control characterized.

The invention according to claim 2 is the glass substrate temperature control nozzle structure according to claim 1, wherein the plate nozzle is formed by adding an antistatic agent to the engineering plastic .

  According to a third aspect of the present invention, the engineering plastic is made of any one of polyacetal, polyimide, polycarbonate, modified polyphenylene ether, and polybutylene terephthalate, and the antistatic agent is made of conductive powder, nonionic or anionic surfactant. Item 2. A nozzle structure for controlling a glass substrate temperature according to Item 2.

A fourth aspect of the present invention is the glass substrate temperature adjusting nozzle structure according to the first aspect , wherein the nozzle is formed in a reverse funnel shape.

According to the present invention, a plate nozzle in which a large number of nozzles having a tip hole diameter of 1 to 3 mm are arranged on a plate at intervals of 10 to 30 mm in a staggered pattern or a grid pattern is used with a mold. By forming them in the same shape by resin molding and arranging them side by side and attaching them to the air header for temperature control, an excellent effect that a nozzle structure corresponding to an increase in the size of the glass substrate can be achieved.

1 is an overall front view showing an embodiment of the present invention. It is a principal part expanded sectional view of FIG. FIG. 2 is an assembled partial perspective view of the glass substrate temperature adjustment nozzle structure of FIG. 1. In FIG. 1, FIG. 2, it is a reverse view of the support frame which attached the plate nozzle. It is a whole assembly perspective view of the nozzle structure for glass substrate temperature control of FIG. It is a top view of the plate nozzle in this invention. It is an AA line end view of FIG. It is a reverse view of FIG. It is a principal part expanded sectional view which shows other embodiment of this invention. It is a whole front view which shows other embodiment of this invention. It is an assembly perspective view showing other embodiments of the present invention.

  A preferred embodiment of the present invention will be described below in detail with reference to the accompanying drawings.

  First, the plate nozzle 10 used for the glass substrate temperature control nozzle structure of the present invention will be described with reference to FIGS.

  6 to 8, the plate nozzle 10 is formed by resin-molding a large number of nozzles 12 vertically and horizontally on a plate 11 formed in a thin box shape.

  In the illustrated example, the nozzles 12 are arranged in a regular triangular zigzag shape, and the interval between the diagonally adjacent nozzles 12 is 10 to 30 mm, and the nozzle tip hole diameter is 1 to 3 mm. In the illustrated example, the nozzles 12 are formed at an interval of 21 mm, the hole diameter of the tip portion 12a of the nozzle 12 is 2 mm and the hole diameter of the bottom portion 12b is 15 mm, and the height from the surface of the plate 11 is 20 mm. It is formed.

  The size of the plate 11 is about 440 × 400 mm square so that the temperature can be controlled by two plates 11 with respect to a glass substrate of a 32-inch display (about 700 mm × 400 mm). A total of 504 nozzles 12 are formed integrally in 24 rows. Further, the nozzles 12 on the outermost periphery of the plate nozzle 10 are arranged such that when the plate nozzles 10 are arranged, the nozzles 12 and 12 that are obliquely adjacent to each other between the plate nozzles 10 and 10 have the above-described 21 mm intervals.

  Although the nozzles 12 are arranged in a staggered pattern in the illustrated example, a total of 400 nozzles in a horizontal 20 rows and a vertical 20 rows may be arranged in a grid pattern.

  On the side wall 13 around the plate 11, three screw grooves 14 for screwing, which will be described later, are formed on each side.

  In the thin box-shaped plate 11, reinforcing ribs 16 are integrally formed vertically and obliquely. The reinforcing ribs 16 are formed lower than the height of the plate 11 so that the spaces defined by the reinforcing ribs 16 are connected to each other.

  As for this plate nozzle 10, the plate 11 and the nozzle 12 are integrally molded by resin molding using a metal mold | die.

  The resin to be used is engineering plastic, and can be selected from polyacetal, polyimide, polycarbonate, modified polyphenylene ether, and polybutylene terephthalate.

  In addition, since the plate nozzle 10 is easily charged during mounting work or use, an antistatic agent is added to the engineering plastic. As the antistatic agent, a conductive powder such as carbon black, graphite powder, zinc oxide, or a nonionic or anionic surfactant can be used, and the addition amount thereof is 1 to 15 parts per 100 parts by mass of the engineering plastic. It is preferable to add part by mass.

  Furthermore, you may add a coloring agent, antioxidant, etc. to engineering plastics.

  Next, a glass substrate temperature control nozzle structure using the plate nozzle 10 will be described with reference to FIGS.

  First, the plate nozzle 10 is supported side by side on a support frame 20 formed of a metal square pipe such as SUS or aluminum. As shown in FIG. 4, the support frame 20 is formed by connecting rectangular frames 21 and 21 that support 4 × 4 plate nozzles 10. The rectangular frame 21 is formed by combining a rectangular member 22 with a horizontal member 23 and a vertical member 24 in a cross beam shape, and a frame portion 25 that supports the plate nozzle 10 is formed by the horizontal member 23 and the vertical member 24. As shown in FIG. 3, a dowel hole 26 for screwing the plate nozzle 10 is formed in the portion 25.

  Further, when the plate nozzle 10 is attached to the support frame 20, a sealing material 27 is provided for sealing between them. The sealing material 27 is formed in a cross-like frame shape like the rectangular frame 22 constituting the support frame 20, and a screw hole 28 is formed at a position coinciding with the dowel hole 26 of the support frame 20.

  The plate nozzle 10 is attached to the support frame 20, as shown in FIG. 3, by placing a frame-shaped seal material 27 on the support frame 20, and arranging the plate nozzles 10 on the seal material 27 in the front, rear, left and right directions. In this state, screw insertion holes 15 are formed between adjacent screw grooves 14 as shown in FIG. 2. Screws 18 pass through the screw insertion holes 15, and dowel holes in the support frame 20 pass through screw holes 28 in the sealing material 27. It is attached by being screwed into 26.

  In this way, the plate nozzle 10 is attached to the support frame 20 with screws through the seal member 27. The support frame 20 is attached in advance to the air supply box 31, and then the seal material as described above. A glass substrate temperature control nozzle structure 30 is configured by attaching the plate nozzle 10 to the support frame 20 through the support 27.

  The air supply box 31 will be described with reference to FIG.

  As shown in FIG. 5, the air supply box 31 includes a box frame 32 formed in a rectangular parallelepiped shape with a square pipe, and a side plate 33 is interposed on each side surface of the box frame 32 via a side plate sealing material 34 (see FIG. 2). Further, an air supply box top plate 35 is attached to the upper surface of the box frame 32 via a sealing material (not shown), and a high performance air filter 41 is accommodated in the air supply box top plate 35. A box 40 is attached and configured.

  An attachment frame 36 is formed integrally with the box frame 32 on the upper part of the box frame 32, and is supported by the support device 37 shown in FIG.

  A support frame 20 is attached to the lower surface of the box frame 32 of the air supply box 31 via a support frame sealing material 38 with bolts and nuts 39 (see FIG. 2) such as pop nuts. A plate nozzle 10 is attached to 20 through a sealing material 27 to form a glass substrate temperature adjusting nozzle structure 30.

  In the glass substrate temperature adjusting nozzle structure 30, the number of plate nozzles 10 to be arranged is determined according to the size of the glass substrate 50 to be temperature adjusted. The size and the number of frames of the support frame 20 are set according to the number of arrangement of the plate nozzles 10, and the size of the box frame 32 is also set according to the support frame 20.

  The filter box 40 contains a high performance air filter 41 made of HEPA, and an air supply duct 42 is connected to the filter box 40. The air supply duct 42 is connected to a temperature-controlled air supply device (not shown) that supplies temperature-controlled air (23 ± 0.1 ° C.) controlled in temperature and humidity. A plurality (four in the illustrated example) of the filter boxes 40 are assembled according to the size of the glass substrate 50 and attached to the air supply box top plate 35 with the flange 43 of the filter box 40.

  The mounting frame 36 of the glass substrate temperature adjustment nozzle structure 30 is supported by a support device 37 so as to be positioned above the glass substrate 50 held by the support pins 51, and in this state, the temperature adjustment air is supplied from each nozzle 12. Is blown out with a jet of 10 to 40 m / sec., And the temperature of the glass substrate 50 is controlled to 23 ± 0.1 ° C. within the tact time.

  In the present invention, since the plate nozzle 10 is attached to the air supply box 31 via the support frame 20, there is no need to attach each nozzle as in Patent Document 1, and the attaching operation can be greatly improved. it can.

  Further, since the plate nozzle 10 is made of engineering plastic and its weight can be reduced, the total weight of the glass substrate temperature adjusting nozzle structure 30 itself can be reduced. Therefore, when controlling the temperature of the glass substrate 50, the glass substrate temperature adjusting nozzle structure 30 itself can be reciprocated back and forth and left and right by the support device 37 by the nozzle interval (10 to 30 mm). It is possible to eliminate the temperature distribution unevenness in the meantime.

  The plate nozzle 10 is formed of an engineering plastic such as polycarbonate. By adding an antistatic agent to the plastic to form the plate nozzle 10, the plate nozzle 10 is charged during its mounting operation or use. In the same manner as in the conventional metal nozzle, it is possible to prevent the electric charge from being accumulated in the plate nozzle 10.

  If the antistatic agent is less than 1 part by mass with respect to 100 parts by mass of the engineering plastic, the antistatic effect cannot be exhibited, and if it exceeds 15 parts by mass, the mechanical strength is undesirably lowered. Further, instead of adding an antistatic agent, an aluminum vapor deposition film or an aluminum plating film may be formed on the front and back surfaces of the plate nozzle 10.

  9 to 11 show other embodiments of the glass substrate temperature adjusting nozzle structure 30, respectively.

  In the embodiment of FIG. 9, the glass substrate temperature control nozzle structure 30 is configured by directly attaching the filter box 40 to the support frame 20 without using the air supply box 31 described in FIGS. 1 to 5. It is.

  In this case, the flange 43 of the filter box 40 is placed on the upper surface of the support frame 20 via the sealing material 44, and in this state, the filter box 40 is attached to the support frame 20 using the angle material 45. At this time, a sealing material 46 is provided on the inner peripheral surface of the filter box 40, the filter box 40 is attached with screws 47, and the support frame 20 is attached to the angle material 45 via the sealing material 44 with the screws 47. It is attached.

  In this embodiment, since the support frame 20 is directly attached to the filter box 40, the glass substrate 50 is suitable for a small size.

  FIG. 10 shows an embodiment in which a plurality of glass substrate temperature adjustment nozzle structures 30 shown in FIG. 9 are assembled, and the glass substrate temperature adjustment nozzle structure 30 attached to the filter box 40 is assembled in the support frame 20. The upper portions of the filter boxes 40 are connected by suspension support brackets 48, and the suspension support brackets 48 are suspended by wires 49.

  In this embodiment, since the assembled glass substrate temperature control nozzle structure 30 is suspended by the wire 49, it can be easily swung back and forth and left and right, and its swing width can also be freely changed. The unevenness of the temperature distribution of the substrate 50 can be further eliminated.

  FIG. 11 is an exploded view of the glass substrate temperature control nozzle structure 30 shown in FIG. 9 when they are arranged independently, and the support frame 20 is attached to each filter box 40. The plate nozzle 10 is attached to the lower surface of the support frame 20 via a sealing material 27 to constitute the glass substrate temperature adjusting nozzle structure 30.

  The glass substrate temperature adjusting nozzle structures 30 may be integrated together as described with reference to FIG. 10 or may be provided independently on the glass substrate 50.

10 Plate nozzle 11 Plate 12 Nozzle 20 Support frame 31 Air supply box 40 Filter box 50 Glass substrate

Claims (4)

In a glass substrate temperature control nozzle structure that blows temperature control air on a glass substrate, a plate nozzle that is formed integrally with a plate so that many nozzles are arranged vertically and horizontally and protrude from the surface of the plate is used with a mold and engineering plastic. multiple sheets and resin molded Te and the nozzle, is formed on the hole diameter of the tip is 1 to 3 mm, to the plate, is the plate nozzles are arranged zigzag or in grid form in 10~30mm intervals molding is, the plate nozzle, a glass substrate temperature control nozzle structure, characterized in that attached to the air supply box for supplying temperature control air while supporting side by side a plurality according to the size of the glass substrate.   The glass substrate temperature control nozzle structure according to claim 1, wherein the plate nozzle is formed by adding an antistatic agent to the engineering plastic.   The glass substrate temperature according to claim 2, wherein the engineering plastic is composed of any one of polyacetal, polyimide, polycarbonate, modified polyphenylene ether, and polybutylene terephthalate, and the antistatic agent is composed of conductive powder, nonionic surfactant, or anionic surfactant. Adjustment nozzle structure. The nozzle structure for glass substrate temperature control according to claim 1, wherein the nozzle is formed in a reverse funnel shape .

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