JP4915302B2 - Route search system and method, transport system, and computer program - Google Patents

Description

  The present invention provides, for example, a route search that searches for an optimum route in a transport system that transports an object to be transported such as various substrates for manufacturing a semiconductor device with a transport vehicle such as a vehicle that moves on a track laid in a factory. It relates to the technical field of systems and methods. The present invention further relates to the technical field of a computer program that causes such a transport system and a computer to function as such a route search system.

  As this type of route search system, for example, Patent Document 1 discloses a so-called “Dijkstra method” for searching for an optimum route from a starting point to a destination point on a trajectory stretched around a plurality of branches and junctions. A technique using "" is disclosed. In this technique, each of all routes is set as a candidate for the optimum route. The travel cost (that is, the time taken to travel between nodes corresponding to branch points and junctions, or an evaluation value corresponding to the time) in the links constituting each candidate is integrated from the departure point to the target point. The Thereafter, the candidate having the lowest cost of travel from the departure point to the destination point is determined as the optimum route.

JP-A-10-320047

  However, according to the background art described above, the movement cost is set with the working devices as nodes and the path portions located between the working devices as links. For this reason, the number of data handled in the route search becomes enormous, and there is a technical problem that the load on the computer becomes enormous especially as the route becomes more sophisticated and the number of working devices has increased recently.

  The present invention has been made in view of the above-described problems, for example, a route search system and method capable of searching for an optimum route while reducing the number of data to be handled and a calculation load, a transport system including the same, and It is an object of the present invention to provide a computer program that causes a computer to function as such a route search system.

  In order to solve the above problems, the route search system of the present invention searches for an optimum route when moving a transport vehicle for transporting an object to be transported from a starting point to a target point on the route of the transport vehicle. In the system, each of a plurality of sets including at least one set including a plurality of work devices that perform various processes on the object to be conveyed and are arranged along the route is set as a node. Storage means for storing the movement cost of the transport vehicle, which is defined as a link between the two sets, and connecting the plurality of sets with at least a part of the optimum route based on the stored movement cost. The route search means for searching in units, at least a part of the searched, and the one or a plurality of sets included in the searched at least a part of the plurality of sets By integrating a portion of the road, and a path identifying means for identifying the optimum path.

  According to the route search system of the present invention, prior to the actual route search operation, the moving cost of the transport vehicle on the route is stored in storage means such as a database or a memory. Here, the “route” means a route on which the transport vehicle can move with or without a transported object such as a rail mounted thereon. The “conveyor vehicle” means a vehicle such as a carriage configured to move on a route such as a vehicle and to be loaded with an object to be conveyed.

  Particularly in the present invention, the movement cost is defined as a node in each of a plurality of sets including at least one set including a plurality of work devices, and a link between the plurality of sets. Here, the “working apparatus” includes, for example, a manufacturing apparatus that performs film formation, heating, wiring, etching, and the like on a transferred object such as a semiconductor substrate, and a stocker that temporarily stores the transferred object. It means an apparatus that performs various types of processing on a conveyed object. The working devices are arranged alongside the route or arranged to form a part of the route. As a case of forming a part of the route, for example, there are cases where the positions of the carry-in port and the carry-out port in a single work device are different from each other so as to form a part of the route. The “set” according to the present invention includes a set including a plurality of such work devices. However, a set composed of one of the work devices may be included. Between the sets, there is a route along which the transport vehicle is moved (hereinafter referred to as “inter-set route” as appropriate), and within the set, a route along which the transport vehicle is moved (hereinafter referred to as “in-set route” as appropriate). Exists. For example, an individual set may correspond to an individual production line, or a plurality of sets may exist in a single production line.

  The “movement cost” according to the present invention is defined in such a manner that the path portions between the sets including a plurality of work devices are each a link and each set is a node. A “link” is a straight, curved, or curved path that directly connects between branching points, merge points, intersections, etc. in the path, and has only a choice as to how to move. Corresponds to the part. The “node” is located at the end of the link in the route. Typically, the “node” is a branching point, a junction point, an intersection, a dead end point, and a moving method in the conveying route such as a stocker loading / unloading point. This corresponds to a point or location where there are a plurality of selected branches. “Movement cost” is the time taken to move from one node to a node adjacent to it when performing a route search with such a set as a node and a link between sets. Or it means the cost which is an index proportional to time. For example, even if the distance is the same, if the movement time is long due to congestion or the like, the value of the movement cost increases. If such a movement cost is used, as will be described below, typically, a route search in units connecting a plurality of sets can be performed by the Dijkstra method using the movement cost corresponding to the set as described above. .

  In particular, since the set including a plurality of work devices as a node and the movement cost is defined, compared to the case where the work device is a node, the amount of the work devices collected in a set is as follows: The total number of travel costs used for route search is reduced. That is, the data amount of the movement cost stored in the storage means is first reduced. Further, when a facility such as a work apparatus is newly installed, the new facility is installed at any node. In the correction of the movement cost in the route including any one of the nodes, it is only necessary to calculate the movement cost only in the node where the new equipment is installed. Can be diverted in the route. For this reason, the time to start up a new facility can be shortened.

  The travel cost as described above may be specified in advance from the average travel time for each set in the past and stored in the storage means. Alternatively, when performing an actual route search operation, it is necessary to first detect or calculate the travel cost in consideration of the congestion situation on the route, and store it in the storage means or update the stored content. Good. Alternatively, during the transport operation, the travel time required for the transport vehicle to move through each set is measured, and immediately after the transport operation is completed, the cost calculation for the route is executed or re-executed. The stored contents of the storage means may be newly established or updated. In this case, the movement cost reflects the congestion status of the latest route.

  Thereafter, at the time of the actual route search operation, at least a part of the optimum route is set to a plurality of sets based on the movement cost stored in the storage unit as described above by the route search unit including, for example, a processor and a memory. It is searched in the unit connecting. For example, a route from a starting set including a starting point among a plurality of sets to a target set including a destination point among the plurality of sets is searched in a form connecting the plurality of sets from the starting set to the target set. In other words, first, at least a part of the optimum route is subjected to a rough route search by a unit for connecting a set such as a production line unit by the route search means.

  As described above, in the route search by the route search means, at least a part of the optimal route, the route portion connecting the individual work devices within the set is not treated as a link, but a route connecting the sets to each other. Each part is treated as a link. At the same time, each work device is not treated as a node, but a set is treated as a node. Accordingly, the amount of data and the amount of calculation are drastically reduced as compared to the route search in the case where the route portions connecting the individual work devices are each treated as a link and each work device is treated as a node. In particular, the reduction in the amount of data and the amount of calculation in the route search based on the movement cost is extremely remarkable, as compared with the reduction in the total number of movement costs stored in the storage means. Even a small reduction in the total number of travel costs used in route search leads to a large amount of data and computation reduction in route search.

  At least a part of the optimum route searched for by the route specifying means including, for example, a processor, a memory, etc., in parallel with or in parallel with the search by the route search means, and one included in this at least part Alternatively, the whole of the optimum route is specified by integrating the route portions existing in the plurality of sets. Here, “integrate” means that an inter-set route connecting the searched sets and an intra-set route existing inside each searched set are combined into a single route to be an optimum route. Means. For example, after the search by the route search means, the search for the route within the set by the Dijkstra method is performed by the route specifying means for each of the inside of the searched set. Alternatively, before the search by the route search means, the route specifying means searches for the route in the set by the Dijkstra method for each of the inside of the set, and the searched route in the set is associated with the set. The intra-set route corresponding to the set stored in the storage means or the like and then searched by the route search means may be called from the storage means or the like.

  Here, in particular, according to the study of the present inventor, even if the route is complicated and sophisticated as a whole, the route and the movement through the route are relatively simple in terms of one set. It has been found that the time required for movement is short. In other words, it has been found that there is no significant difference in time or cost regardless of which work device the target point is within the same set. Therefore, the search or determination of the route in the set by the route specifying means described above is dramatically simpler than the search or determination of a route across a plurality of production lines, for example, when searching for a route within the same production line. Things are enough. For example, even if the Dijkstra method is used, the structure of links and nodes is simple when viewed for each set, and the amount of data and calculation processing for route search are drastically reduced. Therefore, first, a rough route search is performed in units of connecting sets, and after determining the sets and inter-set routes that form the optimal route, the intra-set routes within each set are identified, and the optimal route obtained by connecting these routes Compared with the optimum route obtained when the route is searched by the Dijkstra method by looking at the route to the maximum detail from the beginning, it is practically inferior or not inferior.

  Therefore, in the present invention, when the route search unit performs a rough route search in units of connecting sets, and the route specifying unit performs route search or route determination within the set, the optimum route to be determined is practiced. The above is almost or exactly the same as the true optimum path in theory. Or, at least, it is very close to the true optimum route. On the other hand, when obtaining such an appropriate route, the amount of data and the amount of computation required to search for a route in a set unit and the amount of data and the amount of computation required to perform a route search or determination within the set The summation is drastically reduced compared to the case of searching for the true optimum route in one step.

  As a result, the optimum route or the optimum route in a practical sense can be searched while reducing the number of data to be handled and the calculation load. Therefore, it is easy to search for a route in real time or in a form close to that, and quick transportation is possible in the transportation system. Furthermore, it is possible to effectively avoid the use of a high-performance computer that does not match the economic efficiency in order to implement these.

  Note that, from the viewpoint of improving the accuracy of the optimum route searched for in the present invention, a plurality of working devices grouped together as one set have a difference in the finally searched route even if they are treated as the same node on the route search. It is better to have a plurality of working devices that are not closely related, typically side by side. For example, if the production line is a small-scale production line that can be moved within the production line in a short time, it is preferable that one set corresponds to one production line. On the other hand, if the production line is a large-scale production line that can be moved in the production line for a long time, it is preferable to associate a plurality of sets with one production line.

  On the other hand, the greater the number of locations where a plurality of work devices are grouped together, the lower the total number of travel costs. Therefore, the effect of reducing the amount of data and the amount of computation during route search can be obtained more significantly. However, even if there is only one place to be collected in the set, the effect of reducing the amount of data and the amount of calculation during route search can be obtained accordingly.

  In addition, there may be a plurality of connection points between the paths between the sets and the sets, that is, the exits and the entrances of each set. If one set is treated as one node, the route search using the travel time or travel cost as described above can be greatly simplified. Alternatively, when there are a plurality of at least one of the carry-out port and the carry-in port, they can be treated as a plurality of sets according to the carry-out port or the carry-in port, that is, treated as a plurality of nodes (therefore, links are increased accordingly). ), Route search using travel time or travel cost can still be significantly simplified as compared to the case where all work devices are treated as nodes.

  In one aspect of the route search system of the present invention, the route specifying unit includes a link of each part of the route connecting the plurality of work devices, respectively, and the transport vehicle having the plurality of work devices as nodes. Based on the movement cost, the route portion is searched, and the optimum route is specified by integrating at least the searched portion and the searched route portion.

  According to this aspect, the route search in each set is typically performed by the Dijkstra method using the movement cost with the working device as a node and between the working devices as a link. Searching for routes within the same set. For this reason, the data amount and calculation load required for the route search by the route specifying means do not increase excessively.

  Alternatively, in another aspect of the route search system of the present invention, the storage means further stores in-set route information indicating a portion of the route in the set in association with the node and the link, The route specifying means determines a portion of a route connected to the searched at least part by referring to the stored intra-set route information, and determined as the searched at least part. The optimal route is specified by integrating the route portion.

  According to this aspect, the route in each set is determined by referring to the in-set route information stored in the storage means. For example, the route in the same set such as the same manufacturing line is determined. is there. For this reason, the amount of data and the calculation load required for determining the route by the route specifying means do not increase excessively.

  In another aspect of the route search system of the present invention, the route search system further includes state detection means for detecting a movement situation when the transport vehicle moves, the route search means corresponding to the detected movement situation, Search the route again.

  According to this aspect, for example, the state detection means having a processor, a sensor, etc., for example, the average movement speed when moving in each set, the congestion state, the average movement speed when moving between sets, the congestion state, etc. The movement status when the transport vehicle moves is detected. Then, the route is searched again by the route search means corresponding to the detected movement situation. Therefore, the average moving speed changes in a specific set or between specific sets, congestion or deadlock occurs due to failure or excessive transport amount, and congestion occurs due to recovery or decrease in transport amount. When the deadlock is resolved, the optimum route is searched again. Therefore, an optimum route suitable for each time point is searched in real time, which is extremely convenient in practice. In particular, since the calculation load is reduced, this is particularly advantageous when performing a re-search. Even if re-searching is performed frequently, no particular problem occurs.

  In addition to or instead of such re-searching by the route searching means, re-specification by the optimum route by the route specifying means may be performed in accordance with the movement status detected by the state detecting means.

  In another aspect of the route search system of the present invention, the route search unit further includes setting means for setting a part of the route to be unusable when searching for the optimum route by the route search means. The route is searched by excluding a part set as unusable.

  According to this aspect, a part of the route is set to be unusable when the user searches for the optimum route by the route search unit by the setting unit including a keyboard, a mouse, a processor, and the like. Alternatively, a part of the route is optimized by the route search means according to the diagnosis result by the means for performing the failure diagnosis or the means for performing the congestion diagnosis, or according to the specification result by the means for specifying the place where the maintenance is performed. When searching for a route, it is set to be unusable. For example, when an abnormality in the movement situation is detected based on the detection result of the above-described situation detection unit, the flag may be set to be substantially unusable by setting an unusable flag on the corresponding route. . Then, the route search unit searches for a route after excluding a part that has been set to be substantially unusable in this way. Alternatively, when a route has already been set and a part of the route is set to be substantially unusable by the setting means, the route search means is thus substantially unusable. The route is re-searched after a part set to is excluded. Therefore, the amount of data and the calculation load in route search are drastically reduced by the amount calculated by excluding a part of the route, and the optimum route including the unusable part can be determined in advance. Can be prevented.

  In addition to or instead of the route search that excludes a part that is set to be unusable by such a route search unit, a part that is set to be unusable by a route specifying unit is excluded. All the optimum routes may be identified.

  Alternatively, in another aspect of the route search system of the present invention, the route search unit further includes a setting unit that sets a part of the route to be usable or adds a part that can be used to the route. The route is searched with the part set to be usable or added.

  According to this aspect, for example, a part of the route is set to be usable by the user by the setting unit including a keyboard, a mouse, a processor, and the like. Alternatively, a part of the route is set to be usable according to a diagnosis result by a means for performing a failure diagnosis or a means for performing a congestion diagnosis, or according to a specification result by a means for specifying a place where maintenance is performed. The For example, it may be set to be usable according to the detection result of the above-described situation detection means. Then, the route is searched by the route search means after the part that has been set to be usable or added in this way is entered. Alternatively, when a route has already been set, if a part of the route is set to be usable or added by the setting unit, the part that has been set to be usable or added by the route search unit Is entered, and the route is searched again. Therefore, since a part that can be used is excluded, it is possible to prevent an inappropriate route (that is, a route with a minimum cost) from being determined as the optimum route.

  In addition to or instead of the route search that includes a part that is set to be usable by such a route search unit, an optimum route that includes a part that is set to be usable by a route specifying unit. Identification may be performed.

  In another aspect of the route search system of the present invention, the route search system further includes cost calculation means for calculating the movement cost for each link, and the storage means stores the calculated movement cost.

  According to this aspect, prior to the route search by the route search means, the movement cost is calculated by the cost calculation means including, for example, a processor, a memory, etc., and stored in the storage means such as a database.

  In this aspect, the cost calculation means calculates the travel cost for the route actually transported by the transport vehicle from actual time data required for the transport vehicle for actual transport work, and the storage means calculates the calculation The stored contents may be updated at the travel cost.

  If comprised in this way, as soon as a conveyance vehicle arrives at the target point on a path | route for example by a cost calculation means, a conveyance vehicle will move about the path | route which the conveyance vehicle actually conveyed from the performance time data required for the actual conveyance work. Cost is calculated. Further, the stored contents of the storage means are updated with the calculated movement cost. For this reason, when the congestion status of the route changes, the travel cost necessary for the route search can be updated to the latest one, and the optimum route that matches the actual route status can be searched in real time.

  In order to solve the above-described problems, the transport system of the present invention includes the above-described route search system according to the present invention (including various aspects thereof), the route, the transport vehicle, and the transport vehicle. And moving means for moving above.

  According to the transport system of the present invention, since the route search system according to the present invention described above is included, the optimum route can be searched while reducing the number of data to be handled and the calculation load, and the route search is performed in real time or close to it. Is also easier. As a result, for example, the moving means including a vehicle propulsion device, rails, and the like enables the transport vehicle to quickly move within, for example, the same production line or between different production lines. For example, a single production line is composed of a plurality of work devices, a plurality of conveyance lines are provided corresponding to the plurality of production lines, and a conveyance line is also provided between the plurality of conveyance lines. Can be moved via an optimal route.

  The transport system of the present invention can also adopt various aspects similar to the various aspects of the above-described route search system of the present invention.

  In order to solve the above problems, the route search method of the present invention searches for an optimum route when moving a transport vehicle for transporting a transported object from a starting point to a target point on the route of the transport vehicle. A method of performing a variety of processes on the object to be conveyed and including each of a plurality of sets including at least one set including a plurality of work devices arranged along the path as a node. Based on the movement cost stored in the storage means for storing the movement cost of the transport vehicle, which is defined as a link between the sets of the plurality of sets, at least a part of the optimum route is a unit connecting the plurality of sets. Integrating a search step for searching, at least a part of the searched part, and a part of the route existing inside one or a plurality of sets included in the searched at least part of the plurality of sets In Rukoto, and a path specifying step of specifying the optimum path.

  According to the route search method of the present invention, as in the case of the route search system according to the present invention described above, the optimum route can be searched while reducing the number of data to be handled and the calculation load, and the route search can be performed in real time or close to it. It is also easy to perform.

  In the route search method of the present invention, various aspects similar to the various aspects of the above-described route search system of the present invention can be employed.

  In order to solve the above problems, a computer program according to the present invention searches for an optimum route for moving a transport vehicle for transporting an object to be transported from a starting point to a target point on the route of the transport vehicle. The computer included in the computer is configured to process each of the objects to be conveyed and each of a plurality of sets including at least one set including a plurality of work devices arranged along the path as a node, and Storage means for storing the movement cost of the transport vehicle defined as a link between a plurality of sets, and at least a part of the optimum route based on the stored movement cost, A route searching means for searching by a unit to be connected, at least a part of the searched, and one or a plurality of parts included in the searched at least part of the plurality of sets By integrating a portion of the path that exists inside the case, to function as a route identifying means for identifying the optimum path.

  According to the computer program of the present embodiment, if the computer program is read from a recording medium such as a CD-ROM or DVD-ROM storing the computer program into a computer provided in the route search system and executed, Alternatively, the route search system according to the present invention described above can be constructed relatively easily if the computer program is executed after being downloaded via communication means. As a result, as in the case of the route search system according to the present invention described above, the optimum route can be searched while reducing the number of data to be handled and the calculation load, and the route search can be easily performed in real time or in a form close thereto. .

  Note that the computer program of the present invention can also adopt various aspects similar to the various aspects of the above-described route search system of the present invention.

  The operation and other advantages of the present invention will become apparent from the best mode for carrying out the invention described below.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  First, the configuration of a manufacturing system including a route search system according to the present embodiment will be described. FIG. 1 is a block diagram of a manufacturing system including the route search system according to the present embodiment, and FIG. 2 is a schematic plan view showing a conveyance path of the route search system of FIG.

  1 and 2, the manufacturing system 200 mainly includes a manufacturing instruction unit 1, a vehicle 2, a CPU 10, and a moving device 11. The route search system 100 according to the present embodiment is incorporated in the manufacturing system 200 as the CPU 10. The CPU 10 includes a route setting unit 3, a travel detection unit 4, a cost calculation unit 5, a first route search unit 6, a route specification unit 7, a transport controller 8, and a memory 9. The moving device 11 is configured to be able to transport the vehicle 2 to a desired manufacturing device 21 and stocker 21b.

  In FIG. 2, the moving device 11 is an example of the “moving means” according to the present invention, and moves the vehicle 2, such as a linear motor control line and a power supply device, in addition to the conveyance path 12, in a linear motor system. A set of mechanical and electrical mechanisms for More specifically, the conveyance path 12 has a pair of rails each extending in the conveyance direction and having rolling surfaces on which the wheels of the vehicle 2 roll, and a plurality of rails arranged in the conveyance direction between the pair of rails. Having a permanent magnet. The conveyance path 12 is also a traveling path on which a linear motor provided on the vehicle 2 travels, and a power signal for traveling the vehicle 2 and various signals for controlling the traveling are exchanged. It also has a function as a wired control line.

  The moving device 11 connects the modules M1 to M4 by the transport path 12. Here, “module” means a unit for carrying out control control of an OHT (intra-process carrying device) system configured by one or a plurality of bays, and “bay” can be carried by the OHT system. A group of one or a plurality of manufacturing apparatuses. Modules M1 to M4 constitute a large-scale OHT. In the large-scale OHT, the vehicle 2 can travel inside each of the modules M1 to M4 by the part of the moving device 11 constituting the large-scale OHT. Furthermore, the moving device 11 connects the modules M1 to M4 arranged in four directions with each other via the stockers STK1 to STK4 by the transport path 12. The transport control between the modules M1 to M4 is managed by an OHS (inter-process transport device) system. In the OHS, the vehicle 2 can travel between the modules M1 to M4 by the part of the moving device 11 constituting the OHS.

  As an example of the “transport vehicle” according to the present invention, the vehicle 2 travels along the transport path 12 by a linear motor, and transports a carrier in which objects to be transported such as various substrates in semiconductor device manufacture are stored. The vehicle 2 includes a controller (not shown) for independently controlling each vehicle and a position information transmitter for transmitting position information.

  As an example of the “working apparatus” according to the present invention, the manufacturing apparatus 21 performs various processes leading to a product on a transported object transported by the vehicle 2 under the control of the manufacturing apparatus controller 22.

  As an example of the “working apparatus” according to the present invention, the stocker 21b performs a partial process on a carrier (for example, a container for transport) or a transported object transported by the vehicle 2 under the control of the stocker controller 23. The implemented carrier is configured to be carried into an internal storage or carried out to the outside. The stocker 21b may form part of the transport unit together with the moving device 11 by carrying in from a part of the transport path 12 and carrying out to the other part of the transport path 12.

  Each of the stockers 21b is provided with a loading / unloading port STK-1 for the OHT and a loading / unloading port STK-2 for the OHS in order to load or unload the carrier. These two loading / unloading ports STK-1 and STK-2 are provided for switching the moving means from OHT to OHS or vice versa. The stocker 21b is also provided with a stocker robot (not shown). The stocker robot moves the carrier inside the stocker 21b, and carries out the carrier from the desired loading / unloading port STK-1 or STK-2, thereby switching the OHT and OHS moving means. Specifically, when the vehicle 2 moved by OHT reaches the stocker 21b (STK1) of the group G3, the carrier transported by the vehicle 2 is moved into the stocker STK1 from the loading / unloading port STK-1 by the stocker robot. After being loaded, it is unloaded from the loading / unloading port STK-2. As a result, the moving means of the vehicle 2 is switched from OHT to OHS, and the vehicle 2 is moved by OHS.

  As shown in FIG. 2, groups G1 to G10 including a plurality of manufacturing apparatuses 21 and stockers 21b are set in the transport path 12. Each of the modules M1 to M4 corresponds to a group G3 and G4, a group G5 and G6, a group G7 and G8, and a group G9 and G10, respectively. The stocker STK1 of the module M1 and the stocker STK2 of the module M2 correspond to the group G1, and the stocker STK3 of the module M3 and the stocker STK4 of the module M4 correspond to the group G2. When each of the groups G1 to G10 is an example of the “set” according to the present invention, each of the groups G1 to G10 is treated as a “node”, and the groups G1 to G10 are “links”. The cost is calculated for each link. As an example of the “movement cost” according to the present invention, the cost is calculated from, for example, an average value of movement times measured in the past in each of the groups G1 to G10. Alternatively, this average value is set by performing correction according to the current state of the route.

  Each of the groups G1 to G10 serves as a division when searching for a rough optimum route in a unit connecting the groups. Further, this is a range for determining the optimum route within the group after such a rough optimum route is determined. That is, each group G1 to G10 is a basic division that separates stages when performing route search in two stages.

  Referring again to FIG. 1, the manufacturing instruction unit 1 inputs manufacturing instruction data for instructing manufacturing into the CPU 10, the manufacturing apparatus controller 22, and the stocker controller 23 according to the manufacturing process schedule, thereby giving an instruction for manufacturing the semiconductor device. Do.

  The CPU 10 executes the semiconductor device manufacturing process in response to the manufacturing instruction data input by the manufacturing instruction unit 1, and causes the vehicle 2 to reach the target point via, for example, an optimal route described in detail later. Control each part.

  The route setting unit 3 is an example of the “setting unit” according to the present invention, and is a part of the conveyance path 12 according to instructions from the manufacturing instruction unit 1 and the travel detection unit 4 before the semiconductor device manufacturing is started. That is, one of the partial paths is set to be usable or unusable. Specifically, the route setting unit 3 changes the flag set in advance to either usable or unusable for the partial route to be set. This partial path setting change data is input to the cost calculation unit 5.

  As an example of the “state detection unit” according to the present invention, the travel detection unit 4 is similar to the route setting unit 3, and the conveyance path 12 is in accordance with an instruction from the manufacturing instruction unit 1 before the semiconductor device manufacturing is started. The traveling state of the vehicle 2 is detected based on position information transmitted from the plurality of vehicles 2 traveling on the road. Specifically, the traveling detection unit 4 detects, based on the position information, for example, that the traveling of the vehicle 2 is abnormally slow or that the traveling is stopped on the conveyance path 12 to be traveled. This detection data is input to the route setting unit 3 and the cost calculation unit 5.

  As an example of the “cost calculation unit” according to the present invention, the cost calculation unit 5 basically includes the groups G1 to G10 according to instructions from the manufacturing instruction unit 1 prior to the start of semiconductor device manufacturing. Route, that is, the cost for each link is calculated.

  As shown in FIG. 2, the group G1 includes a stocker STK1 and a stocker STK2, and the group G2 includes a stocker STK3 and a stocker STK4. In the group G3, the manufacturing apparatuses EQ11 and EQ12 and the stocker STK1, the group G4, the manufacturing apparatuses EQ14 and EQ13, the group G5, the manufacturing apparatuses EQ21 and EQ22, the stocker STK2, and the group G6, the manufacturing apparatus EQ24 , EQ23, group G7 is stocker STK3, manufacturing equipment EQ31, EQ32, group G8 is manufacturing equipment EQ34, EQ33, group G9 is stocker STK4, manufacturing equipment EQ41, EQ42, and group G10 is from manufacturing equipment EQ44, EQ43, respectively. Composed.

  Specifically, the cost calculation unit 5 causes the moving device 11 to move the predetermined vehicle 2 for cost calculation a predetermined number of times between the groups G1 to G10. An average value of the time required for this movement is calculated as a cost and stored in the memory 9 in advance. Alternatively, the average value of the travel time required when one or a plurality of vehicles 2 that have been transported in the past moved between the groups G1 to G10 is calculated as a cost and stored in the memory 9 in advance. Is done. Alternatively, a default value based on empirical or theoretical calculation is stored in the memory 9 in advance as a cost.

  Even after the semiconductor device manufacturing is started, the cost calculation unit 5 is set for each link according to the partial route setting change input from the route setting unit 3 and the detection result of the driving condition input from the driving detection unit 4. The cost data stored in the memory 9 is updated.

  Regarding the optimum route search method, in this embodiment, a two-step search is performed by the first route search unit 6 and the second route search unit 7a.

  When the semiconductor device manufacture is started, the first route search unit 6 determines an optimum route in units of connecting groups for the vehicle 2 to carry carriers from the starting point to the target point according to the instruction from the manufacturing instruction unit 1. Explore. Here, first, a plurality of candidates from the group including the transport source to the group including the transport destination are specified as a plurality of candidates for the optimum route in a unit connecting the groups. Further, the first route search unit 6 determines a candidate having a small total cost (that is, a total cost) among the plurality of candidates as an optimum route in a unit connecting groups. Therefore, the first route search unit 6 reads the group unit cost corresponding to each candidate from the memory 9 and sums the plurality of read costs to calculate the total cost of each candidate. The route specifying unit 7 selects a candidate having the smallest one of the calculated total costs. The total cost here is the total or total of the costs of a series of groups constituting each candidate shown in FIG. 2, and when each candidate is adopted as a route, the transport destination is determined from the group including the transport source. It is a rough indicator of the time it takes to move to the group that contains it.

  In the present embodiment, in particular, the first route search unit 6 searches again for the optimum route in units connecting groups in response to the update of the cost data by the cost calculation unit 5. Specifically, when one of the partial routes is set to be unusable by the route setting unit 3, the first route searching unit 6 connects the groups except for the route set to be unusable. The optimum route in units is searched again. In addition, when any of the partial routes is set to be usable by the route setting unit 3 or when a usable partial route is added, including the partial route set to be usable or added, The optimum route in the unit connecting the groups is searched again. Furthermore, the optimum route in the unit connecting the groups is searched again according to the traveling state detected by the traveling detection unit 4.

  Next, the route specifying unit 7 specifies a route that passes through each group in the optimum route in a unit connecting the groups input from the first route searching unit 6. For this reason, the route specifying unit 7 includes a second route searching unit 7a. The second route search unit 7a is a route that passes through each of a plurality of groups among the groups G1 to G10 constituting the optimum route of the unit connecting the groups in a short time (that is, the optimum route within the group). The same Dijkstra method as that of the first route search unit 6 is used to calculate the cost related to movement within the group (that is, the cost defined as a link between the manufacturing apparatus and stocker existing in the group as nodes). It is searched by using. As a result, an optimum intra-group route that connects a plurality of manufacturing apparatuses 21 or stockers 21b existing in each group is specified.

  Note that the route within the group may be simple. Therefore, such an intra-group optimum route may be specified as a normal route that communicates between preset manufacturing apparatuses or between ports without performing a search by cost calculation. Alternatively, it may be specified in accordance with a simple rule such as a route length or clockwise or counterclockwise instead of cost.

  In this way, the route specifying unit 7 is configured to connect the optimum route in a group within each group searched by the second route search unit 7a and the optimum route in units connecting the groups input from the first route search unit 6. Finally, a single route obtained by integrating the two is specified as the optimum route, and optimum route data indicating this is input to the transport controller 8.

  The transport controller 8 controls the vehicle 2 based on the optimum route data input from the route specifying unit 7. By this control, the carrier conveyed to the vehicle 2 reaches the target point in the shortest time.

  The memory 9 stores cost for each group and intra-group route information as an example of the “storage unit” according to the present invention. The cost is calculated in advance by the cost calculation unit 5 for each link connecting the groups, and is updated according to the setting change by the route setting unit 3 and the traveling state detected by the traveling detection unit 4. The intra-group route information indicates an intra-group route within each of the groups G1 to G10, and is referred to as appropriate by the second route search unit 7a.

  Next, an operation process for specifying the optimum route will be described. FIG. 3 is a specific example of the cost table for each group of the manufacturing system including the route search system according to this embodiment, and FIG. 4 is a comparison table of the total cost of the optimum route in the route search system of FIG. Is a specific example.

  In FIG. 3, the cost for each group is shown. Each cost is set for each manufacturing apparatus 21, stocker 21b, OHT, and OHS, and is a transfer source (that is, a starting point at the beginning of transfer or a relay point in the middle of transfer) and a transfer destination (that is, a relay point in the middle of transfer). Or the final target point) combination. That is, each cost is defined in a form corresponding to a link connected by using a transport source and a transport destination as nodes. Specifically, when the work device is the stocker STK1, as a transport source, “SHELF” indicating that the carrier to be transported is inside the stocker STK1, and that the carrier is in the OHS loading / unloading port STK-2. “OHSin” shown, and “OHTin” showing that the carrier is at the OHT loading / unloading port STK-1 are shown. As a transport destination for this transport source, “OHSout” indicating that the transported carrier is heading toward OHS, “OHTout” indicating that the carrier is heading toward OHT, and “SHELF” indicating that the carrier is heading inside stocker STK1 It is shown. For example, when the carrier in the stocker STK1 goes to OHT, “SHELF” is selected as the transport source and “OHTout” is selected as the transport destination, and the cost is “10” as shown in FIG.

  Furthermore, when the working device is OHT and OHS which are moving means, any one of groups G1 to G10 is shown as the transfer source and transfer destination. That is, particularly in the case of OHT and OHS, each group is defined as a node, and each cost is defined in a form corresponding to a link connected by these groups. For example, when a carrier is transported between the group G1 and the group G2 for OHS, “G1” is selected as the transport source, “G2” is selected as the transport destination, and the cost is “40”. Here, grouping is performed so that a plurality of adjacent or adjacent work devices that do not have a large difference in travel time on the route network belong to the same group.

  In FIG. 2 again, when the manufacturing instruction unit 1 gives an instruction to transport the carrier accommodated in the stocker 21b (STK1) to the manufacturing apparatus 21 (EQ44), the first route search unit 6 stores the stocker STK1. To search for the optimum route from the manufacturing apparatus EQ44. In this search, four candidate TRs as candidates for the optimum route in units connecting groups, the first candidate (transport route No. 1 in FIG. 4) to the fourth candidate (transport route No. 4 in FIG. 4). Cost comparison is performed. In FIG. 3, the cost of the group which comprises the candidate TR4 of 4th optimal path | route is shown.

  The first candidate first indicates a route that starts from the loading / unloading exit STK-1 of the stocker STK1 and reaches the manufacturing apparatus EQ44 of the group G10 via the OHT. This first candidate includes two groups of an inter-group route (STK1: SHELF → STK1: OHTout) corresponding to the group G3 and an inter-group route (STK1: OHTout → EQ44) between the groups G3 to G10 in the OHT. It consists of an inter-path.

  First, the second candidate starts from the loading / unloading port STK-2 of the stocker STK1, reaches the loading / unloading port STK-2 of the stocker STK2 via the group G1 in the OHS, and then passes through the loading / unloading port STK2 of the stocker STK2. The path | route which reaches | attains the manufacturing apparatus EQ44 of group G10 via OHT from STK-1 is shown. The second candidate is an inter-group route corresponding to the group G3 (STK1: SHELF → STK1: OHSout), an inter-group route corresponding to the group G1 in the OHS (STK1: OHSout → STK2: OHSin), and a group corresponding to the group G5. The inter-group path (STK2: OHSin → STK2: OHTout) and the inter-group path (STK2: OHTout → EQ44) between the groups G5 to G10 in the OHT are configured.

  The third candidate first departs from the loading / unloading port STK-2 of the stocker STK1, reaches the loading / unloading port STK-2 of the stocker STK3 via the groups G1 and G2 in the OHS, and then passes through the inside of the loading / unloading port STK3. The path | route which reaches | attains the manufacturing apparatus EQ44 of the group G10 through the group G7 from the loading / unloading exit STK-1 is shown. This third candidate corresponds to the inter-group route corresponding to the group G3 (STK1: SHELF → STK1: OHSout), the inter-group route corresponding to the groups G1 and G2 in the OHS (STK1: OHSout → STK3: OHSin), and the group G7. The inter-group route (STK3: OHSin → STK3: OHTout) and the inter-group route (STK3: OHTout → EQ44) between the groups G7 to G10 in the OHT are configured.

  First, the fourth candidate starts from the loading / unloading port STK-2 of the stocker STK1, reaches the loading / unloading port STK-2 of the stocker STK4 via the groups G1 and G2 in the OHS, and then passes through the inside of the loading / unloading port STK4. The path | route which reaches | attains the manufacturing apparatus EQ44 of the group G10 from the loading / unloading exit STK-1 via OHT is shown. The fourth candidate is an inter-group route (STK1: SHELF → STK1: OHSout) of the group G3, an inter-group route (STK1: OHSout → STK4: OHSin) corresponding to the groups G1 and G2 in the OHS, and a group corresponding to the group G9. The inter-group route (STK4: OHSin → STK4: OHTout) and the inter-group route (STK4: OHTout → EQ44) between the groups G9 to G10 in the OHT are configured.

  In this way, the total cost in the unit connecting the groups for the four candidates is calculated by integrating the cost for each group read from the memory 9. The total costs of the first candidate to the fourth candidate are “125”, “205”, “185”, and “95” as shown as “total cost” in FIG. As a result, the fourth candidate whose total cost is the minimum value “95” is selected as the optimum route TR4.

  When the optimum route TR4 in the unit connecting the groups is specified in this way, the intra-group routes existing inside each of the groups constituting the group are combined to form a single route. The optimum route is identified.

Next, a route specifying process that is an operation process of the route search system according to the present embodiment will be described with reference to FIG.
(Route identification process)
FIG. 5 is a flowchart showing route specifying processing of the route search system according to the present embodiment.

  Specifically, in FIG. 5, first, the first route searching unit 6 searches for a plurality of candidates for the optimum route in units of connecting groups (step S11). Subsequently, for any of the partial routes constituting the plurality of searched candidates, the route setting unit 3 makes the route change usable or unusable, or the travel detection unit 5 makes a running abnormality such as a failure of the vehicle 2 It is determined whether or not there has been (step S12).

  Here, if it is determined that either a route change or a running abnormality has occurred (step S12: YES), the vehicle passes because there is a partial route that is subject to a route change and the vehicle 2 that is considered to be running abnormally. The partial path assumed to be impossible is set to be unusable (step S13). Specifically, the candidate including the substantially unusable partial path is excluded from the cost calculation target for each candidate to be performed next. Alternatively, the movement cost for the unusable partial route is set to a very high value. Thereby, since the total cost in the cost calculation for each candidate performed next becomes large, it is excluded from the candidates at an early stage.

  On the other hand, when it is determined that there is neither a route change nor a running abnormality (step S12: NO), the process proceeds to the next process without setting the partial route to be unusable in step S13.

  Subsequently, the cost in the group unit is calculated by the cost calculation unit 5, and the cost data stored in the memory 9 is updated (step S14). Subsequently, the first route search unit 6 selects a candidate having the smallest total cost after the update. That is, the optimum route for each group is completed at this stage.

  Subsequently, the intra-group route information inside each of the groups constituting the optimum route in the specified group unit is read from the memory 9, and the intra-group route based on the read intra-group route information is specified. The Furthermore, the optimum route is finally identified by integrating the identified intra-group route and the optimum route in a unit connecting the groups (step S15).

  Thereafter, the transport controller 8 controls the vehicle 2 along the specified optimum route, and the carrier transported to the vehicle 2 reaches the target point (step S16). Thereby, a series of route specifying processes is completed.

  Note that as soon as the vehicle 2 actually reaches the target point in step S16, the travel cost for each of these links is calculated from the time taken to transport the links that make up the optimal route traveled. Further, the stored contents in the memory 9 are updated with the calculated travel cost and used for the optimum route search thereafter.

  As described above, according to the route specifying system of the embodiment, since the cost is calculated in units of connecting groups, the number of data required for the route search using the cost is extremely reduced. This makes it possible to search for the optimum route or the optimum route in a practical sense while reducing the number of data to be handled and the calculation load.

  Further, since the cost is calculated again for each link in response to the change of the transport route or the traveling abnormality of the vehicle 2, the optimum route is always selected based on the latest cost. For this reason, it is possible to eliminate the loss of transport time due to the failure of the transport vehicle and the congestion of the transport route, and the performance can be further improved.

  The present invention is not limited to the above-described embodiment, and can be appropriately changed without departing from the spirit or idea of the invention that can be read from the claims and the entire specification, and a route search system with such a change and Methods, transport systems, and computer programs are also within the scope of the present invention.

It is a block diagram which shows the structure of the route search system which concerns on embodiment. It is a top view which shows the conveyance path of the route search system which concerns on embodiment. It is a cost table | surface which shows the cost according to group of the route search system which concerns on embodiment. It is a total cost comparison table | surface which shows the total cost of the optimal path | route of the route search system which concerns on embodiment. It is a flowchart which shows the route specific process of the route search system which concerns on embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Conveyance path, 2 ... Vehicle, 3 ... Route setting part, 4 ... Travel detection part, 5 ... Cost calculation part, 6 ... 1st path | route specific part, 7 ... Path | route specific part, 7a ... 2nd path | route search part, 8 DESCRIPTION OF SYMBOLS ... Conveyance controller, 11 ... Movement apparatus, 21 ... Manufacturing apparatus, 21b ... Stocker, 100 ... Path search system, 200 ... Manufacturing system

Claims (11)

A route search system for searching for an optimum route when moving a transport vehicle for transporting an object to be transported from a departure point to a target point on the route of the transport vehicle,
Each of a plurality of sets including at least one set that includes a plurality of work devices that perform various processes on the transported object and that are arranged along the path is a node between the plurality of sets. Storage means for storing the movement cost of the transport vehicle,
Route search means for searching for at least a part of the optimum route in units of connecting the plurality of sets based on the stored travel cost;
The optimal route is obtained by integrating the searched at least part and the part of the route existing inside one or a plurality of sets included in the searched at least part of the plurality of sets. A route search system comprising: a route specifying means for specifying.   The route specifying means determines the portion of the route based on the moving cost of the transport vehicle having the route portions connecting the plurality of work devices as links and the work devices as nodes, respectively. The route search system according to claim 1, wherein the optimum route is specified by searching and integrating at least a part of the searched route and a portion of the searched route. The storage means further stores in-set route information indicating the portion of the route in the set in association with the node and the link,
The route specifying means determines a portion of a route connected to the searched at least part by referring to the stored intra-set route information, and determined as the searched at least part. The route search system according to claim 1, wherein the optimum route is specified by integrating a route portion. It further comprises a state detection means for detecting a movement situation when the transport vehicle moves,
The route search system according to any one of claims 1 to 3, wherein the route search means re-searches the route according to the detected movement state. A setting unit that sets a part of the route to be unusable when searching for the optimum route by the route searching unit;
5. The route search system according to claim 1, wherein the route search unit searches for the route by excluding a part of the route that is set to be unusable. 6. Setting means for setting a part of the route to be usable or adding a usable part to the route;
5. The route search system according to claim 1, wherein the route search unit searches the route by including the part that is set to be usable or added. 5. A cost calculation means for calculating the movement cost for each link;
The route search system according to claim 1, wherein the storage unit stores the calculated travel cost. The cost calculating means calculates the travel cost for the route actually transported by the transport vehicle from actual time data required by the transport vehicle for actual transport work,
The route search system according to claim 7, wherein the storage unit updates storage contents with the calculated travel cost. A route search system according to any one of claims 1 to 8,
The pathway;
The transport vehicle;
And a moving means for moving the transport vehicle on the route. A route search method for searching for an optimal route when moving a transport vehicle for transporting an object to be transported from a departure point to a target point on the route of the transport vehicle,
Each of a plurality of sets including at least one set that includes a plurality of work devices that perform various processes on the transported object and that are arranged along the path is a node between the plurality of sets. A search step for searching for at least a part of the optimum route by a unit connecting the plurality of sets, based on the movement cost stored in the storage means for storing the movement cost of the transport vehicle. ,
The optimal route is obtained by integrating the searched at least part and the part of the route existing inside one or a plurality of sets included in the searched at least part of the plurality of sets. A route search method comprising: a route specifying step for specifying. A computer provided in a route search system for searching for an optimum route when moving a transport vehicle for transporting an object to be transported from a starting point to a target point on the route of the transport vehicle;
Each of a plurality of sets including at least one set that includes a plurality of work devices that perform various processes on the transported object and that are arranged along the path is a node between the plurality of sets. Storage means for storing the movement cost of the transport vehicle,
Route search means for searching for at least a part of the optimum route in units of connecting the plurality of sets based on the stored travel cost;
The optimal route is obtained by integrating the searched at least part and the part of the route existing inside one or a plurality of sets included in the searched at least part of the plurality of sets. A computer program that functions as a path specifying means for specifying.

Images