JP4986280B2 - Immersion processing equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide immersion treatment equipment capable of regulating an attaching position of a roll unit, capable of stably installing the roll unit to make the same easily detachable and enhanced in treatment capacity, workability and maintenance properties. <P>SOLUTION: The immersion treatment equipment is equipped with a treatment tank 2 for storing a treatment liquid 4 and the detachable roll unit 3 constituted by vertically parallelly providing roll bodies 3b, each of which is composed of a drive roll 3c and a follower roll 3d, in the treatment tank 2 to integrate them. Attaching members 7 are fixedly provided to the outsides of the right and left side plates 3a of the roll unit 3 and a receiving stand 6, on which the attaching members 7 are mounted, is fixedly provided to the insides of the right and left side plates 2b of the treatment tank 2 while a clamping member 8 for fixing the roll unit 3 in the treatment tank 2 is provided to the attaching members 7 and the receiving stand 6. Further, a regulation member 9 for regulating the installation height and angle of inclination of the roll unit 3 is provided to the attaching members 7 and the receiving stand 6. The drive roll 3c is driven by a drive source through the detachable pinion shaft 12a provided to the roll unit 3. <P>COPYRIGHT: (C)2008,JPO&amp;INPIT

Description

  The present invention includes a treatment tank storing a treatment liquid, and a detachable roll unit in which a roll body composed of a drive roll and a driven roll is vertically arranged and integrated in the treatment tank. Regarding immersion treatment equipment that is immersed in a treatment liquid while being transferred by a roll in a treatment tank, more specifically, an attachment member is fixed to the outside of the left and right side plates of the roll unit and is attached to the inside of the left and right side plates of the treatment tank. The present invention relates to providing a fastening base for fixing a roll unit in a processing tank to a mounting member and a receiving base by fixing a receiving base on which members are loaded.

  As a conventional method for imparting functions such as washing, dyeing, degreasing, alkalinizing, extraction, etc. to a sheet-like or thread-like intermediate treatment product, the treatment product is immersed in a treatment tank in which a treatment liquid is stored. There are methods, and in order to perform these treatments efficiently, effective treatment liquid selection, adjustment of treatment temperature and pressure, and concentration differences in treatment liquids are applied to increase the concentration difference between the processed material and the treatment liquid. Various methods such as holding have been devised. In addition, as a processing method, there are a batch type and a continuous type, and the batch type is performed by a method of immersing the processed product in a scroll shape or a sheet shape and immersing it in the processing liquid. Therefore, it is often applied when processing a relatively small amount of processed material. In the continuous type, a multi-stage roll is installed in the treatment tank, and the processed material is passed through the multi-stage roll and brought into contact with the processing liquid, thereby efficiently processing the processed material without generating wrinkles. be able to. The continuous processing method in this processing tank includes, for example, a tank main body for storing a processing liquid, and a film material continuous processing tank that continuously performs a predetermined process on a film material that is detoured and conveyed between conveying rollers. An upper roller, a lower roller disposed in the processing liquid, and a belt stretched between the two rollers, the belt is formed to be able to rotate in the same direction as the conveying direction of the film material, and A belt guide device disposed between both inner surfaces of a film material suspended in a U shape in the tank body, and each inner surface of the film material suspended in a U shape in the tank body on each outer surface of the belt There is a liquid ejecting means for ejecting liquid from the outer surface side of the film material so as to be able to be pressed (Patent Document 1). With this configuration, the film material guided into the processing liquid is removed from the liquid ejecting means. The inner surface is It is pressed against the outer surface of the belt of the guide device to prevent the movement in the processing liquid, and the film material is bypassed in the processing liquid together with the rotating belt, so that the frictional resistance with the driven roller increases. It is said that the situation can be wiped out, and high-quality and high-efficiency continuous processing can be performed with smooth conveyance. Also, a development processing apparatus having a processing liquid tank having fixing ability and at least three multi-stage counter-current type water washing or stabilizing baths, wherein the water washing tank or water washing tank other than the first tank and the final tank is washed with water in the tank. There is also a pump (Patent Document 2) equipped with a pump for sending water or a stabilizing solution to the treatment solution tank having the fixing ability. With such a configuration, the amount of treatment waste liquid is reduced more than the conventional multi-stage countercurrent washing method. In addition, it is possible to provide a photographic light-sensitive material processing apparatus that is free from defects due to reduction.

Japanese Utility Model Publication No. 6-31865 JP 2000-89436 A

However, in such a continuous treatment tank, since the number of rolls (number of treatment stages) is small, the concentration difference between the treatment liquid and the treatment product gradually decreases with treatment, and the treatment product of the necessary components in the treatment solution. Since the mass transfer speed at the interface decreases, there is a problem that the processing speed also decreases. Therefore, in order to increase the processing capacity, rolls in the processing tank are installed in the processing liquid and in the upper and lower positions from the processing liquid, and a large number of processing stages are provided to immerse the processed material. In order to increase the concentration difference between the two, there is a method in which the flow direction of the processed material and the flow direction of the processing liquid are counter-flowed. In this case, simply increasing the number of rolls to increase the number of processing stages will lead to an increase in the size of the equipment, and increase the amount of harmful processing liquid having corrosiveness or erosion into the enlarged equipment. In addition, the large amount of rolls must be stored, and the increased number of fixed rolls cannot easily maintain the inside of the treatment tank and each roll, resulting in a problem that safety and maintainability deteriorate. Therefore, by using a detachable roll unit in which a plurality of rolls are vertically arranged and integrated, the number of processing stages is increased without increasing the size of the equipment and the amount of processing liquid, and the processing capacity is improved. Maintenance can also be improved. However, this roll unit has a structure in which the notch portions of the left and right side plates are positioned on the partition provided in the processing tank, and the right and left side plates of the processing tank and the left and right side plates of the roll unit are fastened with bolts or the like. When installing a roll unit in a processing tank that makes it difficult to attach and detach the roll unit easily and stably, and repeatedly attach and detach, adjust the height and inclination of the slightly shifted roll unit to an appropriate position. However, if the treatment is carried out as it is, there is a problem that the processed material transported on the roll is wrinkled or broken due to meandering or the like, and the roll is caught to cause a trouble. In addition, since the drive source for driving the drive roll of the roll unit is fixed outside the processing tank, it is necessary to remove and attach the sealed bearing and transmission mechanism each time the roll unit is attached and detached. There was also a problem that workability deteriorated.
Accordingly, the object of the present invention is to enable the roll unit to be stably installed in the treatment tank as the first object, to adjust the mounting position of the roll unit as the second object, and to easily install the roll unit as the third object. An object of the present invention is to provide an immersion treatment facility which can be attached and detached and has improved processing ability, workability and maintainability.

The invention according to claim 1, which achieves the first object, integrates a processing tank storing a processing liquid and a roll body composed of a driving roll and a driven roll in parallel in the processing tank. In a dipping process facility that includes a detachable roll unit, and dipping the processed material in the processing liquid while being transferred by the roll in the processing tank, an attachment member is fixed outside the left and right side plates of the roll unit. And a fastening member for fixing the roll unit in the processing tank to the mounting member and the receiving base, wherein a receiving base for loading the mounting member is fixed inside the left and right side plates of the processing tank. It is characterized by that.

The invention according to claim 2 that achieves the second object is characterized in that an adjustment member that adjusts an installation height and an inclination angle of the roll unit is provided on the mounting member and the cradle.

The invention according to claim 3 that achieves the third object is characterized in that the drive roll is driven from a drive source via a detachable pinion shaft provided in the roll unit.

  According to the first aspect of the present invention, a detachable roll unit in which a treatment tank storing a treatment liquid and a roll body composed of a drive roll and a driven roll are arranged in parallel vertically in the treatment tank. In the immersion treatment equipment for immersing the treatment product in the treatment tank while being transferred by a roll in the treatment tank, mounting members are fixed to the outside of the left and right side plates of the roll unit, and the inside of the left and right side plates of the treatment tank A mounting base for mounting the mounting member is fixed, and the mounting member and the receiving base are provided with a fastening member for fixing the roll unit in the processing tank, so by fastening the mounting member and the base, The roll unit can be stably installed in the treatment tank, and it is possible to prevent troubles in which the processed material moving on the roll is wrinkled or broken due to meandering or caught on the roll. Accordingly, it is possible to provide an immersion treatment facility with improved processing capability and workability.

  According to the second aspect of the present invention, since the mounting member and the cradle are provided with the adjusting member for adjusting the installation height and the inclination angle of the roll unit, when the roll unit that repeatedly attaches and detaches is installed in the processing tank The height and inclination of the slightly misaligned roll unit can be adjusted to an appropriate position to prevent problems that the processed material moving on the roll is wrinkled or broken due to meandering or caught on the roll. be able to. Accordingly, it is possible to provide an immersion treatment facility with improved processing capability and workability.

  According to the third aspect of the present invention, the drive roll is driven from the drive source via the detachable pinion shaft provided in the roll unit. Therefore, when the roll unit is attached / detached, the connecting portion of the power source of the drive roll is connected. In this case, it is only necessary to attach and detach the pinion shaft from the through shaft housing, and the roll unit can be easily attached and detached. Therefore, it is possible to provide an immersion treatment facility with improved workability and maintainability.

Hereinafter, the best mode for carrying out the present invention will be described in detail with reference to the drawings.
FIG. 1 is a schematic side view showing an example of the immersion treatment equipment of the present invention, FIG. 2 is a perspective view of a part of the treatment tank constituting the immersion treatment equipment as viewed from the rear, and FIG. 3 is a roll constituting the immersion treatment equipment. It is the perspective view which looked at the unit from back.

  As shown in FIG. 1, the immersion treatment facility 1 of this example includes, for example, cleaning, dyeing, degreasing, alkalinizing, extraction, and the like on an intermediate treatment product 5 such as a film material, a semiconductor wafer substrate, a fiber, or a sheet or thread. A roll unit 3 is provided in a treatment tank 2 storing a treatment liquid 4 having corrosiveness or erodibility for imparting a function. The treatment liquid 4 is, for example, a cleaning liquid composed of a fluorine compound, an organic solvent, an anticorrosive, and the like, and a bleaching agent such as sulfite (for example, sodium sulfite, potassium sulfite, methyl ethyl ketone, methylene chloride, ammonium sulfite, and water), heavy Sulfite ion releasing compounds such as sulfites (eg, ammonium bisulfite, sodium bisulfite, potassium bisulfite, etc.), metabisulfites (eg, potassium metabisulfite, sodium metabisulfite, ammonium metabisulfite, etc.) Some of them contain allylsulfinic acid such as p-toluenesulfinic acid and m-carboxybenzenesulfinic acid, and these have corrosiveness and erodibility. Therefore, the immersion treatment equipment 1 is an intermediate treatment product 5 in the equipment. All except the entrance 1a and exit 1b (Not shown) is, vapor of the treatment liquid 4 and the treatment solution 4 is a structure that does not appear to the outside. Note that the types of the intermediate processed product 5 and the processing liquid 4 are not limited to the above.

  As shown in FIG. 2, the processing tank 2 is made of a stainless steel tank, and a partition plate 2a made of a plurality of stainless steel is fixed inside the left and right side plates 2b and on the bottom plate 2c at equal intervals by welding or the like. . The number of partition plates 2a to be installed is not limited, but is preferably n or (n-1) equal to the number n of rolls provided on the upper part of a roll unit 3 described later.

  As shown in FIG. 3, the roll unit 3 has a front and rear position shifted between the upper part between the comb-shaped left and right side plates 3 a having uneven portions and the lower part (the lower part of the convex portions of the left and right side plates 3 a). A plurality of roll bodies 3b are provided, and the plurality of roll bodies 3b includes at least one drive roll 3c and other driven rolls 3d. In FIG. 1 and FIG. 3, there are four stages in which four upper rolls 3 e are provided on the upper side and three lower rolls 3 f are provided on the lower side. The installation interval of the upper rolls 3e can be appropriately changed according to the number of installed partition plates 2a and the processing conditions, and an arbitrary number can be provided. The number of lower rolls 3f installed is not limited, but is preferably n 'or (n'-1) equal to the number n of upper rolls 3e. Further, the length between the left and right side plates 3 a of the roll unit 3 is configured to be shorter than the length between the left and right side plates 2 b of the treatment tank 2.

  Furthermore, between the left and right side plates 3a of the upper roll unit 3 and between the respective roll bodies 3b of the upper roll 3e, the treatment liquid 4 adhered to the surface layer of the intermediate treatment product 5 moving on the roll body 3b. A driven liquid draining roll 3g for peeling the boundary film is provided. Although the diameter of the liquid draining roll 3g is not limited, it is preferable that the diameter of the driving roll 3c and the driven roll 3d be equal to or smaller than that. Further, the number of the liquid draining rolls 3g is not limited, but the number n of the upper rolls 3e is reduced. It is preferable that the number is equal to n ″ or (n ″ −1).

  The drive roll 3c, which is one of the essential parts of the present invention, will be described in detail later, but the power from a drive motor (not shown) provided outside the processing tank 2 is supplied to the drive roll 3c via the pinion shaft 12a. The driving roll 3c is rotated by being transmitted to the shaft core s. And between the right and left side plates 3a having the comb shape of the roll unit 3, between the lower part between the two roll bodies 3b of the upper roll 3e and the upper part of one roll body 3b of the lower roll 3f. A partition plate 3h made of stainless steel or the like is provided through upper and lower stays 3i at equal intervals or the like. The number of installed partition plates 3g is preferably equal to the number of installed lower roll bodies 3f. In FIG. 3, only the upper and lower mounting members 3 i and the partition plate 3 g that are provided at the rear portion of the roll unit 3 are illustrated.

  And each partition plate 2a of the processing tank 2 is inserted into the respective concave portions of the left and right side plates 3a having the comb shape of the roll unit 3, and the roll unit 3 which is the main part of the present invention to be described later is attached. The member 7 is loaded on the cradle 6 in the processing tank 2 and fixed by the fastening member 8, and the roll unit 3 is detachably installed in the processing tank 2.

  Here, when the intermediate treatment product 5 is subjected to immersion treatment using the immersion treatment equipment 1, the intermediate treatment product 5 supplied from the inlet 1a of the immersion treatment equipment 1 is in the direction of the arrow A in FIG. Among the upper rolls 3e arranged between the left and right side plates 3a, the upper roll 3ea closest to the inlet 1a is moved rearward by the rotational driving force of the drive roll 3c, and the lower side of the processing tank 2 It is immersed in the processing liquid 4 which is provided in the first stage of the processing stage 2d partitioned by the partition plate 2aa closest to the inlet 1a. Next, the intermediate processed product 5 is in the first stage processing liquid 4 of the processing stage 2d, and is the lower part closest to the inlet 1a among the lower rolls 3f arranged in parallel at the lower part between the left and right side plates 3a of the roll unit 3. It moves on the roll 3fa, reverses upward, exits from the processing liquid 4, and moves toward the rear of the immersion treatment equipment 1 on the next upper roll 3eb that is behind the upper roll 3ea closest to the inlet 1a. .

  Then, when the intermediate treatment product 5 moves between the upper roll 3eb and the liquid draining roll 3g provided behind the upper roll 3eb, the boundary film that adheres to the surface layer of the intermediate treatment product 5 flows into the liquid By breaking on the surface of the cutting roll 3g, the concentration difference between the surface layer of the intermediate treatment product 5 and the treatment liquid 4 is ensured, the moving speed of the active substance contained in the intermediate treatment product 5 is increased, and the processing efficiency is improved. Is done. Next, the intermediate processed product 5 moves downward again on the upper roll 3eb, and is immersed in the processing liquid 4 in the second stage of the processing stage 2d partitioned by the partition plate 2ab.

  At this time, each partition plate 2a of the processing tank 2 is provided with a height decreasing in order from the rear, and the processing liquid 4 in the processing tank 2 is transferred to the arrow B in FIG. 1 by each partition plate 3h of the roll unit 3. Therefore, the direction of movement of the intermediate treatment product 5 (arrow A) and the flow direction of the treatment liquid 4 (arrow B) are countercurrent. Since the treatment liquid 4 of each treatment stage 2d always flows, the concentration difference between the intermediate treatment product 5 and the treatment liquid 4 is ensured in the same manner as described above, and the transfer rate of the active substance contained in the intermediate treatment product 5 is increased. It is set as the structure which raises and improves processing efficiency. The treatment liquid 4 flowing from the rear to the front in the treatment tank 2 can be sent to the rear of the treatment tank 2 by a pump (not shown) and circulated.

  And the intermediate processed material 5 which came out of the process liquid 4 which has in the last stage of the process stage 2d divided | segmented by the partition plate 2ac nearest to the exit 1b of the immersion treatment equipment 1 is on the upper roll 3ec located in the backmost part. Through the outlet 1b.

  Next, details of the fastening member, the adjusting member, and the pinion shaft of the roll unit, which are features of the present invention, will be described. FIG. 4 is a schematic front view of the roll unit for explaining the attachment of the roll unit and the roll.

First, as shown in FIG. 3 and FIG. 4, a cradle 6 made of stainless steel or the like is fixedly provided on the upper side of each of the left and right side plates 2 b of the processing tank 2, for example. The cradle 6 is provided such that the upper surface 6a thereof is at a height near the upper surface of the partition plate 2a of the processing tank 2, and a fitting hole 6b of a fastening member 8 such as a bolt is provided at the upper part. The front and rear installation positions of the cradle 6 in the processing tank 2 are arbitrary positions inside and outside the processing stage 2d, and the number of installations may be three or more according to each of the left and right side plates 2b, and is not limited.

  Next, as shown in FIG. 2 and FIG. 4, the upper surface 6 a of the cradle 6 provided in the processing tank 2 when the roll unit 3 is installed in the processing tank 2 above the left and right side plates 3 a of the roll unit 3. A mounting member 7 made of a metal such as stainless steel in a side view, an L-shaped mounting plate, an L-shaped mounting plate, or the like is fixedly installed at a position in contact with. On the horizontal surface 7a of the mounting member 7, two through holes 7b and 7c are provided for a fastening member 8 such as a bolt and an adjustment member 9, respectively.

  Here, when the roll unit 3 is installed in the processing tank 2, as described above, the partition plates 2a of the processing tank 2 are replaced with the concave portions of the left and right side plates 3a having the comb-shaped shape of the roll unit 3, respectively. The mounting member 7 of the roll unit 3 is stacked on the receiving base 6 in the processing tank 2, and the fastening member 8 is fastened by aligning the positions of the through holes 7b and 6b. A roll unit 3 is fixedly installed in the tank 2.

  With this configuration, when the roll unit 3 is attached or detached, the operator loads the mounting member 7 of the roll unit 3 on the cradle 6 of the processing tank 2 and fastens or removes the fastening member 8. Thus, the roll unit 3 can be easily attached and detached by one person.

  Further, when the roll unit 3 is repeatedly attached and detached and the installation position of the roll unit 3 slightly deviates due to wear or deformation of the contact portion between the treatment tank 2 and the roll unit 3, the cradle 6 The adjusting unit 9 provided on the upper surface 6a of the mounting member 7 through the through hole 7c of the mounting member 7 is tightened or loosened with a tool or the like, thereby adjusting the installation height and the inclination angle of the roll unit 3 to optimize the roll unit 3. Since it can be installed horizontally and horizontally, the processed material moving on the roll body 3b is prevented from being wrinkled or broken due to meandering or the like, and troubles that are caught on the roll body 3b, etc. are prevented, and the processing is performed smoothly. be able to. The adjusting member 9 is not limited to being provided on both the left side plate 3a and the right side plate 3a of the roll unit 3, and may be provided on either the left side plate 3a or the right side plate 3a, and the number of installations is also limited. Not. Further, the installation positions of the fastening member 8 and the adjustment member 9 on the cradle 6 and the attachment member 7 are not limited.

  Next, the structure of the detachable pinion shaft that transmits power to the drive roll 3c will be described. The drive roll 3c of this example can use the upper roll 3ea closest to the entrance 1a among the upper rolls 3e arranged in parallel between the left and right side plates 3a of the roll unit 3 as the drive roll 3c. The drive roll 3c is not limited to one of the upper rolls 3ea, and a plurality of the roll bodies 3b provided may be used as the drive roll 3c regardless of the upper roll 3e or the lower roll 3f.

  The upper roll 3ea, which is the drive roll 3c in the roll unit 3, is attached to the left and right side plates 3a of the roll unit 3 by attaching the shaft core s to the bearing housing 10 and the bearing 10a assembled in the bearing housing 10. The unit 3 is rotatably provided between the left and right side plates 3a. In addition, the lower roll 3fa and the roll body 3b of the driven roll 3d are also attached to the left and right side plates 3a of the roll unit 3 by the shaft housing s and the bearing 10a 'assembled in the bearing housing 10'. It is attached. Further, the liquid draining roll 3g is also attached to the left and right side plates 3a of the roll unit 3 by a shaft housing (not shown) having a shaft housing (not shown) and a bearing (not shown) assembled in the bearing housing 10 ''. Then, driven gears such as reference numeral 17 may be provided at the end portions of the driven roll 3d and the liquid draining roll 3g via bearing housings 10 'and 10' '. The bearings 10a, 10a 'and the like are made of mounting members and the like. Further, in order to extend the life of the bearing from the toxic processing liquid 4, air purge can be performed so that the processing liquid 4 does not enter the bearing.

  One shaft core s of the drive roll 3c penetrates the bearing housing 10 provided on the left side plate 3a or the left and right side plate 3a, and the drive pinion is provided outside the left side plate 3a or the right side plate 3a of the roll unit 3. 12 is extended to a driven pinion 11 that meshes with 12. The driven pinion 11 is made of a metal such as stainless steel, and the driving pinion 12 is made of a synthetic resin such as cast nylon (the driven pinion 11 is made of a synthetic resin such as cast nylon and the driving pinion 12 is made of a metal such as a mounting member. In the long-term continuous operation, lubricating oil is not required and the drive can be transmitted smoothly.

  Further, a through shaft housing 13 is fixed to the left side plate 2b or the right side plate 2b (the drive pinion 12 and the driven pinion 11 side) of the processing tank 2 with a bolt or the like, and a roll unit provided in the through shaft housing 13 A pinion shaft 12a of the drive pinion 12 and a drive shaft 14 linked to the drive motor are attached to the 3-side bearing 13a via a treatment tank 2-side bearing 13b provided in the through-shaft housing 13. Reference numeral 15 denotes a shaft seal, and reference numeral 16 denotes a driving timing pulley.

  With this configuration, the driving force of the driving shaft 14 rotated by the driving motor is transmitted from the pinion shaft 12a to the driving pinion 12 via the bearing 13a, and the driven pinion 11 meshing with the driving pinion 12 is obtained. To the shaft center s of the drive roll 3c through the bearing 10a, and the drive roll 3c rotates.

  And when removing the roll unit 3 from the processing tank 2, while removing the above-mentioned fastening member 8 and removing only the pinion shaft 12a of the drive pinion 12 from the bearing 13a of the penetration shaft housing 13, it is linked as before. The roll unit 3 can be easily removed from the processing tank 2 without having to remove many parts such as each bearing. In addition, when the roll unit 3 is attached to the treatment tank 2, by attaching only the pinion shaft 12a to the bearing 13a together with the fastening member 8, there is no need to reattach many parts such as a bearing as in the prior art. The roll unit 3 can be easily attached to the tank 2.

  As described above in detail, the immersion treatment facility 1 of this example includes the treatment tank 2 storing the treatment liquid 4, and the roll body 3b composed of the drive roll 3c and the driven roll 3d in the treatment tank 2 up and down. A detachable roll unit 3 that is arranged side by side and integrated, and the mounting member 7 is fixed to the outside of the left and right side plates 3a of the roll unit 3, and the mounting member 7 is set to the inside of the left and right side plates 2b of the processing tank 2. The cradle 6 to be loaded is fixed, and the mounting member 7 and the cradle 6 are provided with a fastening member 8 for fixing the roll unit 3 in the processing tank 2. In addition, the attachment member 7 and the cradle 6 are provided with an adjustment member 9 that adjusts the installation height and the inclination angle of the roll unit 3, and the drive roll 3c is detachably provided on the roll unit 3 from a drive source. It is driven via the pinion shaft 12a.

It is a side surface schematic diagram which shows an example of the immersion treatment equipment of this invention. It is the perspective view which looked at a part of processing tank which constitutes immersion treatment equipment from back. It is the perspective view which looked at the roll unit which comprises immersion treatment equipment from back. It is a front schematic diagram of the roll unit explaining the attachment of a roll unit and a roll.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Immersion processing equipment 2 Processing tank 2b, 3a Left right side plate 3 Roll unit 3b Roll body 3c Drive roll 3d Driven roll 3g Liquid draining roll 6 Receptacle 6a Upper surface 6b Fitting hole 7 Mounting member 7a Horizontal surface 7b, 7c Through-hole 8 Fastening member 9 adjusting member 11 driven pinion 12 drive pinion 12a pinion shaft 13 through shaft housing 13a, 13b bearing 14 drive shaft 15 shaft seal

Claims (3)

A treatment tank storing a treatment liquid;
A detachable roll unit in which a roll body composed of a drive roll and a driven roll is vertically arranged and integrated in the treatment tank,
In a dipping treatment facility for dipping in the treatment liquid while transferring a treatment product by the roll in the treatment tank,
Attaching a mounting member to the outside of the left and right side plates of the roll unit, and fixing a mounting base for loading the mounting member inside the left and right side plates of the processing tank, the mounting member, and the receiving base, An immersion treatment facility comprising a fastening member for fixing the roll unit in the treatment tank.   The immersion treatment facility according to claim 1, wherein an adjustment member that adjusts an installation height and an inclination angle of the roll unit is provided on the attachment member and the cradle.   The immersion treatment facility according to claim 1, wherein the drive roll is driven from a drive source via a detachable pinion shaft provided in the roll unit.

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