JP4984176B2 - Single crystal rod growth equipment - Google Patents

Description

  The present invention relates to a single crystal rod growing facility provided with a growing apparatus for growing a single crystal rod.

In such a single crystal rod growing facility, a crucible containing a raw material of a single crystal rod such as polycrystalline silicon is loaded on a support base of a growth apparatus, and the loaded crucible is heated with a heater to melt the raw material and melt it. A single crystal rod such as a silicon single crystal rod is obtained by immersing a seed crystal in a raw material and pulling it up while rotating the seed crystal to grow a single crystal rod. Is to be manufactured.
In such single crystal rod growing equipment, conventionally, a crucible loading device for manual operation for loading a crucible near the growing device and a crucible on a support base of the growing device is provided. The crucible carrying the crucible is pushed and pulled to carry the crucible to the vicinity of the growth apparatus, and the crucible loading apparatus is manually operated to carry the crucible to the vicinity of the growth apparatus. It was loaded (see, for example, Patent Document 1).

JP 7-172975 A

However, since crucibles and single crystal rods containing raw materials are heavy, transporting the crucible with a cart or loading the crucible with a crucible loading device is a heavy burden on the worker, and it is necessary to reduce the burden on the worker. It was done.
In addition, when the crucible is loaded at a position shifted from an appropriate position with respect to the support base in the horizontal direction, the temperature uniformity of the crucible decreases when the crucible is heated by the heater provided around the crucible. However, since the quality of the grown single crystal rod deteriorates, it is desirable to load the crucible at an appropriate position with respect to the support base. Conventionally, a skilled worker uses a jig or the like to crucible. Was loaded at an appropriate position with respect to the support base, and loading of the crucible was troublesome.

  The present invention has been made in view of the above situation, and its purpose is to reduce the burden on the operator and to automatically load the crucible at an appropriate position with respect to the support base. The point is to provide equipment for growing rods.

The single crystal rod growing facility according to the present invention is provided with a growing apparatus for growing a single crystal rod, and the first characteristic configuration thereof is:
A crucible transport vehicle is provided at a crucible receiving position for receiving a crucible containing the raw material of the single crystal rod and a crucible loading position for loading the crucible into the growing apparatus, and the growing apparatus is connected to the crucible from above. It is provided with a support base to be loaded, and is located on the lifting platform of the crucible transport vehicle on the side where the crucible support for supporting the crucible is positioned on the lifting platform and the growth device is located. Moving operation means for moving the crucible carrier to the crucible loading position, and the crucible for supporting the lifting platform supported by the crucible support above the support base. A first moving operation for moving up and down to a height located at a position, a second moving operation for moving the crucible support from the transfer position to the loading position by the moving operation means after the completion of the first moving operation, and This second transition After the operation is completed, the crucible transport vehicle is moved and moved up and down in order to place the crucible on the support base by a third moving operation for lowering the lift base to a height at which the crucible is loaded on the support base. Control means for controlling the lifting operation of the table and the movement operation of the moving operation means, and a support means for supporting the crucible support in a state of free movement in the horizontal direction when the third movement operation is executed, A guide positioning means for guiding the crucible support lowered by the third movement operation in a horizontal direction and positioning the crucible support at an appropriate position with respect to the support ;
The support means is formed of an elastic member that is provided between the crucible support and the movement operation means and allows the crucible support to move in a horizontal direction with respect to the movement operation means. In the point.

That is, the control means controls the traveling operation of the crucible transport vehicle, the lifting operation of the lifting platform, and the moving operation of the transfer operation means, and the first moving operation causes the crucible transport vehicle to travel to the crucible loading position and The lifting platform is moved up and down to a height where the crucible is located above the support platform of the growing apparatus, and then the second moving operation is used to move the crucible support from the transfer position to the loading position by the moving operation means. Next, the crucible can be loaded on the support base of the growing apparatus by lowering the lifting platform to a height at which the crucible is loaded on the support base by the third movement operation. It can be automatically loaded on the support base of the growing device.
Then, when lowering the lifting platform in the third movement operation, the crucible support that is supported in a state of free movement in the horizontal direction by the support means is guided in the horizontal direction by the guide positioning means and is moved relative to the support table. Is positioned at the appropriate position. Therefore, when the position of the crucible transport vehicle is deviated from the crucible loading position in the traveling direction or the crucible support is deviated from the loading position in the moving direction of the crucible support, the lifting platform is lowered to remove the crucible. Even when the crucible support is displaced horizontally above the proper position when loading, the crucible support can be guided to the proper position and positioned by the support means and the guide positioning means. It can be loaded at an appropriate position with respect to the support base.
Therefore, since the crucible can be automatically loaded on the support base of the growing apparatus by the crucible transporter, the burden on the operator can be reduced, and when the crucible is loaded by lowering the lifting platform. Even if the crucible support is displaced in the horizontal direction above the proper position, the support means and the guide positioning means can load the crucible at the proper position with respect to the support base, so that the operator It is possible to provide a single crystal rod growing facility that can reduce the burden of the crucible and can automatically load the crucible at an appropriate position with respect to the support base.
Further, it is possible to allow the crucible support to move in the horizontal direction with respect to the movement operation means when the third movement operation is performed only by providing an elastic member between the crucible support and the movement operation means. Therefore, the support means can be configured simply.
That is, for example, the support means is constituted by a crucible transport vehicle or a movement operation means, and the crucible transport vehicle is released by releasing the braking, or the crucible support body is loaded by the movement operation means. It is conceivable that the crucible support can be moved freely in the horizontal direction when the third movement operation is performed by releasing the holding at the operation position and setting the moving operation means to the free operation state. In this case, since the position of the crucible transport vehicle and the position of the crucible support change, the control means needs to update the position information of the crucible transport vehicle and the position information of the crucible support to the information after the position change.
Accordingly, it has been possible to provide a single crystal rod growing facility in which the support means can have a simple configuration.

The single crystal rod growing facility according to the present invention is provided with a growing apparatus for growing a single crystal rod, and the second characteristic configuration thereof is:
A crucible transport vehicle is provided at a crucible receiving position for receiving a crucible containing the raw material of the single crystal rod and a crucible loading position for loading the crucible into the growing apparatus, and the growing apparatus is connected to the crucible from above. It is provided with a support base to be loaded, and is located on the lifting platform of the crucible transport vehicle on the side where the crucible support for supporting the crucible is positioned on the lifting platform and the growth device is located. Moving operation means for moving the crucible carrier to the crucible loading position, and the crucible for supporting the lifting platform supported by the crucible support above the support base. A first moving operation for moving up and down to a height located at a position, a second moving operation for moving the crucible support from the transfer position to the loading position by the moving operation means after the completion of the first moving operation, and This second transition After the operation is completed, the crucible transport vehicle is moved and moved up and down in order to place the crucible on the support base by a third moving operation for lowering the lift base to a height at which the crucible is loaded on the support base. Control means for controlling the lifting operation of the table and the movement operation of the moving operation means, and a support means for supporting the crucible support in a state of free movement in the horizontal direction when the third movement operation is executed, A guide positioning means for guiding the crucible support lowered by the third movement operation in a horizontal direction and positioning the crucible support at an appropriate position with respect to the support;
The crucible support is configured to freely support the upper part of the crucible, and the crucible mounting position on which the crucible mounting body for mounting the crucible is positioned on the lifting platform and the crucible fork device for moving into a position for scooping the crucible loading point was shown located on the side located is provided, wherein an upper portion of the crucible in which the placed on a crucible mounting body positioned in the placement transport position crucible An approaching state in which the crucible support body and the crucible mounting body are brought close to each other in a vertical direction to be held by a support body, and the crucible support body and the crucible mounting body to suspend and support the held crucible, Switching operation means for switching to a separated state separated vertically is provided, and the control means travels the crucible transport vehicle to the crucible receiving position, scrapes the crucible located at the crucible loading position, Next, the crucible support and Switching between serial crucible mounting body in the approaching state by the crucible support after holding the crucible, said at the crucible support switching between the crucible mounting body and the crucible support separated state Controls the traveling operation of the crucible carrier, the lifting operation of the lifting platform, the operation of the crucible support, the retracting operation of the fork device, and the switching operation of the switching operation means so as to suspend and support the crucible. The point is that it is configured to do.

That is, the control means controls the traveling operation of the crucible transport vehicle, the lifting operation of the lifting platform, and the moving operation of the transfer operation means, and the first moving operation causes the crucible transport vehicle to travel to the crucible loading position and The lifting platform is moved up and down to a height where the crucible is located above the support platform of the growing apparatus, and then the second moving operation is used to move the crucible support from the transfer position to the loading position by the moving operation means. Next, the crucible can be loaded on the support base of the growing apparatus by lowering the lifting platform to a height at which the crucible is loaded on the support base by the third movement operation. It can be automatically loaded on the support base of the growing device.
Then, when lowering the lifting platform in the third movement operation, the crucible support that is supported in a state of free movement in the horizontal direction by the support means is guided in the horizontal direction by the guide positioning means and is moved relative to the support table. Is positioned at the appropriate position. Therefore, when the position of the crucible transport vehicle is deviated from the crucible loading position in the traveling direction or the crucible support is deviated from the loading position in the moving direction of the crucible support, the lifting platform is lowered to remove the crucible. Even when the crucible support is displaced horizontally above the proper position when loading, the crucible support can be guided to the proper position and positioned by the support means and the guide positioning means. It can be loaded at an appropriate position with respect to the support base.
Therefore, since the crucible can be automatically loaded on the support base of the growing apparatus by the crucible transporter, the burden on the operator can be reduced, and when the crucible is loaded by lowering the lifting platform. Even if the crucible support is displaced in the horizontal direction above the proper position, the support means and the guide positioning means can load the crucible at the proper position with respect to the support base, so that the operator It is possible to provide a single crystal rod growing facility that can reduce the burden of the crucible and can automatically load the crucible at an appropriate position with respect to the support base.
In addition, since the crucible support is configured to be capable of hanging and supporting the upper part of the crucible, the crucible can be easily loaded into the growth apparatus from above. For example, when the heater for heating the crucible placed on the support base from the lateral side is provided in an annular shape in plan view, the heater is moved by the second movement operation or the third movement operation. When the crucible is loaded from the upper side of the mounting table, the crucible is loaded from the upper side of the mounting table. In addition, the crucible support and the moving operation means do not easily interfere with the heater, and the crucible can be easily loaded into the growing apparatus.
Then, the crucible transporting vehicle is moved to the crucible receiving position, the crucible located at the crucible carrying position is scooped up by the fork device, and the crucible support body and the crucible mounting body are switched to the close state by the switching operation means. After holding the crucible with the support, the crucible support and the crucible mounting body are switched to the separated state by the switching operation means, and the crucible is suspended and supported by the crucible support. Since it can be scooped up with a fork device so that it is placed and supported by the support, the crucible is stably supported by the crucible placing body when receiving the crucible from the crucible carry-in location or when performing the first movement operation. can do.
Therefore, when the second movement operation or the third movement operation is performed, the crucible support is suspended and supported so that the crucible can be easily loaded into the growing apparatus, while the crucible is received from the crucible loading position or the second movement operation. When carrying out one moving operation, a crucible support was placed and supported on the crucible support to provide a single crystal rod growing facility capable of stably supporting the crucible.

  The third characteristic configuration of the single crystal rod growing facility according to the present invention is the second characteristic configuration, wherein the crucible mounting body of the fork device is allowed to place the crucible in a state allowing the movement in the horizontal direction. When the crucible mounting body is located at the mounting and transporting position and in the allowable state, the crucible mounting body is configured to be switchable between a state and a restricted state in which the crucible is placed in a state of restricting movement in the horizontal direction. And pressing the crucible from the lateral side of the crucible mounted on the crucible mounting body to move the crucible to an appropriate mounting position suitable for being held by the crucible support. The operation means is provided.

That is, when the crucible mounting body is located at the mounting transport position and is in an allowable state, the crucible mounted on the crucible mounting body is pressed by the pressing operation means from the lateral side thereof, thereby Even if the crucible placed on the mounting body is shifted from the proper mounting position suitable for being held by the crucible support, the crucible is moved in the horizontal direction and moved to the appropriate mounting position. Can be made. Therefore, since the crucible can be held by the crucible support in a state where the crucible is moved in the horizontal direction and the crucible is positioned at the proper mounting position, the crucible can be properly held by the crucible support. it can. Thereby, when the crucible is loaded on the support base, the crucible is easily loaded at an appropriate position with respect to the support base.
In addition, when the crucible support is switched to the regulated state, the crucible located at the crucible loading position is scraped by the fork device, so that when the crucible is scraped, the crucible unexpectedly moves horizontally and the crucible mounting body It is possible to prevent the crucible from falling.
Accordingly, it has been possible to provide a single crystal rod growing facility capable of properly holding the crucible with the crucible support while preventing the crucible from dropping when the crucible is scraped.

According to a fourth characteristic configuration of the single crystal rod growing facility according to the present invention, in the second or third characteristic configuration , the supporting means is provided between the crucible support and the moving operation means, and the crucible support. Is composed of an elastic member that allows the moving operation means to move in the horizontal direction.

That is, by providing an elastic member between the crucible support and the movement operation means, the crucible support can be allowed to move in the horizontal direction with respect to the movement operation means when performing the third movement operation. Therefore, the support means can be configured simply.
That is, for example, the support means is constituted by a crucible transport vehicle or a movement operation means, and the crucible transport vehicle is released by releasing the braking, or the crucible support body is loaded by the movement operation means. It is conceivable that the crucible support can be moved freely in the horizontal direction when the third movement operation is performed by releasing the holding at the operation position and setting the moving operation means to the free operation state. In this case, since the position of the crucible transport vehicle and the position of the crucible support change, the control means needs to update the position information of the crucible transport vehicle and the position information of the crucible support to the information after the position change.
Accordingly, it has been possible to provide a single crystal rod growing facility in which the support means can have a simple configuration.

  The fifth characteristic configuration of the single crystal rod growing facility according to the present invention is any one of the first to fourth characteristic configurations, wherein the crucible support body supports the crucible, and the moving operation means. And a lifting operation means for moving the supporting action part up and down with respect to the supporting body part, and the guide positioning means is provided in the rearing apparatus. It is in the point which is provided with the engaging part and the engaging part which can be engaged with the said to-be-engaged part from the upper side, and is provided in the said support body part.

That is, when the third movement operation is performed and the lifting platform is lowered to a height at which the crucible supported by the crucible support is loaded on the support platform, the engaging portion provided in the support main body portion becomes the growth device. The engaged portion provided is engaged from above, and by this engagement, the crucible support is guided in the horizontal direction and positioned at an appropriate position with respect to the support base.
And in a state where the crucible support is positioned at an appropriate position in this way, the support operation part is moved down with respect to the support main body part by the lifting operation means, and the crucible support is positioned by the guide positioning means. Then, since the support main body part is positioned in the horizontal direction with respect to the support base of the growth apparatus, the support action part can be moved downward without moving in the horizontal direction as much as possible. It becomes easy to load properly.
For example, when the heater for heating the crucible placed on the support base from the lateral side is provided in an annular shape in plan view, the heater is moved by the second movement operation or the third movement operation. The crucible is inserted into the support base so that the crucible is inserted from above, and in this case, when the entire crucible support is moved downward and the crucible is inserted from above, the crucible support is Although it is easy to interfere with the heater, the crucible support is unlikely to interfere with the heater by moving only the support working part of the crucible support downward and inserting the crucible from above, and the crucible is easily loaded into the growth apparatus. It will be a thing.
As described above, it has been possible to provide a single crystal rod growing facility that can easily load the crucible into the growing apparatus properly.

  A sixth feature configuration of the single-crystal rod growing facility according to the present invention is any one of the first to fifth feature configurations, wherein a plurality of the growing devices are arranged in a straight line, and the crucible carrier vehicle is It exists in the point provided so that movement is possible along the linear travel path | route along the row direction of a some growing apparatus.

That is, a crucible transport vehicle that can travel along a linear traveling path along the direction in which a plurality of growing apparatuses are arranged can freely travel to a crucible receiving position and a plurality of crucible loading positions for loading the crucible into the growing apparatus. Therefore, after the crucible transport vehicle is moved to the crucible receiving position and the crucible is received from the loading device or the like, the crucible transport vehicle is moved to the crucible loading position and the crucible is loaded into the growing device. The crucible can be transported by the crucible transporter and loaded into the growing apparatus.
In other words, by arranging a plurality of growth devices in a straight line, a plurality of the growth devices can be aggregated and arranged in a space-saving manner, and the travel path of the crucible transport vehicle is a straight line along the alignment direction of the plurality of growth devices. Since the length of the travel route can be shortened without making the travel route detour unnecessarily, the crucible transport vehicle can be configured with a stacker crane that travels along the straight travel route. Therefore, the crucible transporter can be easily installed and the crucible transport efficiency can be increased, while the travel path can be shortened, so that the single crystal rod transporter can be downsized.
Accordingly, it has become possible to provide a single crystal rod manufacturing facility capable of reducing the size of the facility.

  According to a seventh characteristic configuration of the single crystal rod growing facility according to the present invention, in any one of the first to sixth characteristic configurations, the crucible transport vehicle receives the single crystal rod grown by the growing device. The single crystal rod receiving position and the single crystal rod supply position for supplying the single crystal rod to the single crystal rod unloading position for unloading the single crystal rod are configured to run freely, and the single crystal rod is mounted on the lifting platform. The apparatus comprises a single crystal rod transfer device that transfers between the growth device and the self and between the self and the single crystal rod unloading location, and the control means moves the crucible transport vehicle to the single crystal rod. After traveling to the receiving position and transferring the single crystal rod from the growing device to the single crystal rod transfer device, the crucible transporter is moved to the single crystal rod unloading location to move the single crystal rod to the single crystal rod transfer position. In order to transfer from the single crystal rod transfer device to the single crystal rod unloading location, Running operation of 堝 transport vehicle, wherein the lifting table lifting operation, and, in that the is configured to control the transfer operation of the single crystal ingot transfer device.

That is, since the crucible transport vehicle is configured to be able to travel to the single crystal rod receiving position and the single crystal rod supply position and includes the single crystal rod transfer device, the crucible transport vehicle travels to the single crystal rod receiving device. The single crystal rod is transferred from the growing device to the single crystal rod transfer device, and then the crucible transporter is moved to the single crystal rod transfer position to transfer the single crystal rod from the single crystal rod transfer device. By transferring to the location, the single crystal rod can be automatically conveyed from the growth apparatus to the location where the single crystal rod is unloaded.
Therefore, the crucible can be loaded and the single crystal rod can be transported by a single crucible transport vehicle. For example, two transport vehicles including a transport vehicle for transporting the crucible and a transport vehicle for transporting the single crystal rod. Compared with the case of providing, the number of conveyance vehicles can be reduced, and the configuration of the single crystal rod growing facility can be simplified.
Therefore, the single crystal rod growing facility capable of simplifying the configuration can be provided.

Hereinafter, the single crystal rod growing facility according to the present invention will be described with reference to the drawings.
As shown in FIG. 1, in the single crystal rod growing equipment, a pulling device 1 as a growing device for growing the single crystal rod 4 and a carry-in device 5 for carrying in the crucible 3 storing the raw material of the single crystal rod 4 from the outside. A crucible stacker crane 20 serving as a crucible carrier for loading the crucible 3 received from the carry-in device 5 into the pull-up device 1, and a single unit received from the pull-up device 1. A single crystal rod stacker crane 50 is provided as a single crystal rod carrier for supplying the crystal rod 4 to the carry-out device 6.
Incidentally, the crucible 3 is a quartz crucible containing polycrystalline silicon as a raw material, and the single crystal rod 4 is a silicon single crystal rod. Further, as shown in FIGS. 4 and 5, the crucible 3 carried in by the carry-in device 5 is placed and supported on the crucible pallet 7 while being positioned in the horizontal direction (hereinafter referred to as a carry-in state). Is called in).

As shown in FIG. 1, a plurality of pulling devices 1 are provided in a straight line so as to form two parallel rows, and the carry-in device 5 is arranged on one side of the pulling device 1 in the arranging direction. The carry-out device 6 is provided in a line with the pulling device 1 on the other side in the line-up direction of the pulling device 1. Further, the crucible stacker crane 20 and the single crystal rod stacker crane 50 are configured to travel along a linear travel path L along the direction in which the plurality of pulling devices 1 are arranged.
The travel route L is positioned approximately in the middle of each row of the lifting devices 1 in the route width direction, and is set to be parallel to each row of the plurality of lifting devices 1 arranged in a straight line. Since each row of the lifting device 1 is arranged on both sides of the traveling route L with a distance corresponding to the route width of the traveling route L, the traveling route L is close to each row of the lifting device 1. It is in a state.

Then, the crucible 3 in the carry-in state carried in by the carry-in device 5 is transferred from the carry-in device 5 to the crucible stacker crane 20 and is loaded into any of the plurality of lifting devices 1 by the crucible stacker crane 20. The The single crystal rod 4 grown by the pulling device 1 is transferred from the pulling device 1 to the single crystal rod stacker crane 50 and supplied to the unloading device 6 by the single crystal rod stacker crane 50. 6 to the outside.
By the way, the crucible pallet 7 remaining in the crucible stacker crane 20 by loading the crucible 3 into the pulling device 1 is supplied to the carry-in device 5 by the crucible stacker crane 20 and carried out to the outside by the carry-in device 5. Is done. As shown in FIG. 3, the single crystal rod 4 carried out to the outside by the carry-out device 6 is transported while being placed and supported on the single crystal rod pallet 8.

  As shown in FIGS. 4 and 5, each of the pulling devices 1 is placed and supported on a setting table P provided above the floor F by a predetermined height, and a plurality of pulling devices 1 forming each row. Are arranged in a straight line so that the side receiving the crucible 3 and the side receiving the single crystal rod 4 face each other with the pulling device 1 forming the other row. The crucible stacker crane 20 and the single crystal rod stacker crane 50 travel on the floor surface along the travel path L in a moving passage formed between the pulling devices 1 arranged in two lines in a straight line. The crucible 3 can be supplied to any of the two rows of pulling devices 1 by the crucible stacker crane 20, and any one of the two rows by the single crystal rod stacker crane 50. The single crystal rod 4 can also be received from the pulling device 1.

Next, the pulling device 1 will be described.
As shown in FIGS. 4 to 7, each of the pulling apparatuses 1 includes a lower chamber 9 in which the crucible 3 is loaded and an upper chamber 10 in which the single crystal rod 4 is pulled up and accommodated.
As shown in FIG. 9, the lower chamber 9 is provided with a support base 13 on which the crucible 3 is loaded from above and on which the loaded crucible 3 is placed. At the upper end of the lower chamber 9, an opening 14 is formed that opens upward just above the support base 13 so that the crucible 3 can be loaded into the support base 13 from above. In addition, although illustration is abbreviate | omitted, the heater for heating the crucible 3 loaded in the support stand 13 and melting the raw material accommodated in the crucible 3 is provided in the lower chamber 9.
Further, as shown in FIG. 10, the upper chamber 10 is provided with a winding device 12 capable of winding and feeding the wire cable 11 supporting the seed crystal at the tip. The upper chamber 10 has a pulling position (see FIG. 10A) for growing the single crystal rod 4 by closing the opening 14 of the lower chamber 9, and the crucible 3 is moved from the pulling position to the upper lateral side. It is configured to be movable to a retracted position (see FIG. 10B) that opens the opening 14 of the lower chamber 9 so as to be able to be loaded into the support base 13.

The single crystal rod 4 grown in the pulling apparatus 1 with the upper chamber 10 positioned at the pulling position is accommodated in the upper chamber 10, and the upper chamber 10 is moved from the pulling position to the retracted position. After that, when the wire cable 11 is fed out by the winding device 12, the single crystal rod 4 suspended by the wire cable 11 is positioned below the upper chamber 10 at the retracted position. 15 will be wholesaled.
The pulling device 1 is provided with a cutting device 16 for cutting the wire cable 11 connected to the single crystal rod 4 in a state where the single crystal rod 4 is lowered to the single crystal rod portion 15. The single crystal rod 4 positioned at the single crystal rod portion 15 is transferred to the single crystal rod stacker crane 50 after the wire cable 11 is cut by the cutting device 16.

Next, a description will be given of the carry-in device 5 and the carry-out device 6.
As shown in FIG. 2, the carry-in device 5 includes a carry-in roller conveyor 5a for loading and carrying the carry-in crucible 3 carried in from the outside, and a lift to lift the carry-in crucible 3 from the carry-in roller conveyor 5a. It is provided with a moving lifting platform 5b. In other words, the transport device 5 transports the carry-in crucible 3 carried in from the outside by the carry-in roller conveyor 5 a, and then the carry-in crucible 3 is ready to be transferred to the crucible stacker crane 20. The crucible 3 is lifted from the carry-in roller conveyor 5a by the carry-in lifting platform 5b, and the crucible 3 in the carry-in state is delivered to the crucible stacker crane 20.

Further, as shown in FIG. 3, the unloading device 6 includes an unloading roller conveyor 6a for unloading the single crystal rod 4 to the outside while the single crystal rod 4 is placed on the single crystal rod pallet 8, and a single crystal. The single crystal rod 4 in the standing posture is received from the rod stacker crane 50, and the posture of the received single crystal rod 4 is changed to the falling posture, and then placed on the single crystal rod pallet 8 on the carry-out roller conveyor 6a. And a posture changing mechanism 6b to be placed.
As shown in FIG. 11, the posture changing mechanism 6 b is configured such that a support arm 18 for supporting a pair of single crystal rods is orthogonal to the horizontal axis on a support 17 that is rotatable around a horizontal axis along the traveling path L. The other support arm 18 is movable and supported in such a manner that it can move in the distance direction. Then, the single crystal rod 4 in the standing posture is received from the stacker crane 50 for single crystal rods by the perspective movement of the pair of support arms 18 and the movement in the direction orthogonal to the horizontal axis. The crystal rod 4 is placed on the single crystal rod pallet 8 on the carry-out roller conveyor 6a. Further, the posture of the single crystal rod 4 supported by the pair of support arms 18 is changed from the standing posture by rotating the pair of support bodies 17 around the horizontal axis and changing the posture of the pair of support arms 18. The posture is changed to the falling posture.

Next, the crucible stacker crane 20 will be described.
As shown in FIG. 4, the crucible stacker crane 20 is movable up and down along a traveling carriage 21 that can travel along the direction in which the plurality of pulling devices 1 are arranged, and a column 22 that stands on the traveling carriage 21. The elevator 23 is provided with a crucible transport control device h1 (see FIG. 8) as control means for controlling the operation of the crucible stacker crane 20.
The crucible stacker crane 20 travels along the travel path L so that it can travel between a crucible receiving position for receiving the crucible 3 from the carry-in device 5 and a plurality of crucible loading positions for loading the crucible 3 into the pulling device 1. It is configured.

  On the lifting platform 23 of the crucible stacker crane 20, the crucible placing body 24 on which the crucible 3 is placed is positioned on the lifting platform 23, and the side where the crucible loading location of the crucible 3 is located. A crucible receiving fork device 25 as a fork device to be moved to the scooping position, a conveying position in which a crucible support 26 capable of hanging and supporting the crucible 3 is positioned on the lifting platform 23; A crucible loading fork device 27 as a moving operation means for moving to a loading position located on the side where the growing device 1 is located, and a side of the crucible 3 placed in a crucible placing body 24 in a loading state. A pressing operation means 28 for pressing from the side, and provided between the crucible support 26 and the crucible loading fork device 27, the crucible support 26 is horizontal with respect to the crucible loading fork device 27. A coil spring 29 as an elastic member that allows the movement is provided. The coil spring 29 corresponds to support means for supporting the crucible support 26 in a state of free movement in the horizontal direction, and the place where the loading device 5 (loading platform 5b) is installed corresponds to the crucible loading position. .

The crucible receiving fork device 25 exits to at least one side (the side on which the loading device 5 is located) in the lateral direction of the travel path L so as to move the crucible mounting body 24 to the mounting conveyance position and the scooping position. It is configured to retreat.
The crucible mounting body 24 switches between an allowable state in which the crucible 3 is allowed to move in a horizontal direction and a restricted state in which the crucible 3 is placed in a state where movement in the horizontal direction is restricted. It is configured to be possible. In other words, the crucible mounting body 24 includes a plurality of ball bodies 24a for mounting and supporting the crucible 3 in the loading state, and the plurality of ball bodies 24a are switched between a rotatable state and a non-rotatable state. It is configured freely. In other words, the crucible mounting body 24 is switched to an allowable state by switching the plurality of ball bodies 24a to a rotatable state, and is switched to a restricted state by switching the plurality of ball bodies 24a to a non-rotatable state. It is configured.

As shown in FIG. 8, when the crucible placing body 24 is located at the placement and transfer position and is in the allowable state, the pressing operation means 28 is provided on the crucible placed on the crucible placing body 24. 3, the crucible 3 is pressed from the lateral side, and the crucible 3 is moved to an appropriate mounting position suitable for being held by the crucible support 26.
In other words, the pressing operation means 28 is provided with four pressing bodies 28a so as to press the crucible pallet 7 mounted on the crucible mounting body 24 from four directions. When the body 28a moves close to the crucible pallet 7 and presses the crucible pallet 7, the crucible 3 is indirectly pressed. Incidentally, in order to avoid interference with the crucible pallet 7 placed on the crucible placing body 24 when the crucible placing body 24 moves, the pressing operation means 28 has a quadrangular crucible pallet 7 in plan view with the four pressing bodies 28a. These corners are configured to be pressed toward the center of the crucible pallet 7. FIG. 8 schematically shows that the crucible pallet 7 is pressed by the pressing body 28a.
By pressing the crucible 3 with the pressing operation means 28 in this way, the crucible 3 positioned in the horizontal direction is rotated from the proper placement position suitable for being held by the crucible support 26. It is possible to move the ball on the plurality of free ball bodies 24a in the horizontal direction so as to be positioned at an appropriate placement position.

The crucible loading fork device 27 can be moved back and forth on both sides in the lateral direction of the travel path L so as to move the crucible support 26 to the transport position and the loading positions located on both sides of the travel path L in the lateral width direction. It is configured. This crucible loading fork device 27 is provided above the crucible receiving fork device 25 so that the transport position of the crucible support 26 overlaps the mounting and transporting position of the crucible mounting body 24 in the vertical direction.
In addition, the fork device 27 for loading the crucible has a fork tip portion 27a that suspends and supports the crucible support 26 with respect to the fork base portion 27b fixed to the lifting platform 23 along the lateral width direction of the travel path L. It is comprised so that a slide movement may be carried out below.
Incidentally, the crucible receiving fork device 25 is configured such that the tip of the fork for mounting and supporting the crucible mounting body 24 slides on the upper side of the fork base.

Next, the crucible support 26 will be described.
As shown in FIGS. 8 and 9, the crucible support 26 is supported by being suspended and supported by a supporting action portion 31 for hanging and supporting the crucible 3 and the crucible loading fork device 27. 27, and a lifting operation means 33 for connecting the supporting action part 31 and the supporting body part 32 and moving the supporting action part 31 up and down relative to the support body part 32. Configured.

The supporting action portion 31 has an annular seal rubber 34 matched to the shape of the upper end of the crucible 3 on the lower surface thereof, and a crucible adsorbing and holding member that sucks air below the supporting action portion 31 through the air hose 35 inside the seal rubber 34. And a suction device (not shown).
That is, the seal rubber 34 is in close contact with the upper end portion of the crucible 3 by lowering the support action portion 31 with respect to the support main body portion 32 (the crucible mounting body 24) by the lifting operation means 33 and entering an approaching state described later. In this state, the upper end portion of the crucible 3 can be adsorbed and held by the support action portion 31 by sucking the air in the crucible 3 that is the air below the support action portion 31 by the suction device. Further, in a state where the upper end portion of the crucible 3 is sucked and held by the support action portion 31, the support action portion 31 is raised with respect to the support main body portion 32 (the crucible mounting body 24) by the lifting operation means 33, which will be described later. By setting it in the separated state, the crucible 3 can be lifted from the crucible mounting body 24 and the crucible 3 can be suspended and supported by the support action portion 31.
By the way, the crucible 3 is supported so that the crucible 3 does not come into contact with the crucible support 26 when the crucible 3 is received by the crucible receiving fork device 25 by separating the upper end of the crucible 3 without sucking and holding it. The body 26 can be retracted upward.

The support main body 32 is suspended and supported by a fork tip 27a of the crucible loading fork device 27 via a swinging body 36 and a coil spring 29 that can swing around a horizontal axis along the lateral width direction of the travel path L. ing. Therefore, the support main body portion 32 can be swung around the axis along the lateral width direction of the travel path L by the rocking body 36 and can be moved in the horizontal direction with respect to the crucible loading fork device 27 by the coil spring 29. In addition, it is biased back to a predetermined position with respect to the crucible loading fork device 27.
The support main body portion 32 is provided with an engaging pin 38 as an engaging portion that can be engaged with an engaged body 37 as an engaged portion provided in the pulling device 1 from above. Three engagement pins 38 are provided in a state of projecting downward around the support main body portion 32 so as to be located laterally outward from the support operation portion 31. Further, at least a portion around the engagement pin 38 (a portion contacting the engaged body 37) on the lower surface of the support main body portion 32 is formed on a flat surface like the upper surface of the engaged body 37. Incidentally, the to-be-engaged body 37 is provided in the lower chamber 9 in the pulling device 1, and a recessed portion that is recessed downward is formed. The engaging pin 38 is provided at the position shown in FIG. 6, and the engaged body 37 is provided at the position shown in FIGS. 2 and 3, and the engaging pin 38 shown in FIGS. The position of the engaged body 37 is schematically shown.

The engagement pin 38 is formed in a columnar shape having a diameter of about 30 mm, and the tip portion thereof is formed so as to be thinner toward the tip side. In addition, the engaged body 37 is formed in a circular shape having a diameter that is 1 to 2 percent larger than the diameter of the engaging pin 38 with which the diameter of the recessed portion that engages the engaging pin 38 is about 30.5 mm.
That is, the engaging pin 38 and the engaged body 37 constitute a guide positioning means 43 that guides the crucible support body 26 to be lowered in a horizontal direction and positions the crucible support body 26 at an appropriate position with respect to the support base 13.

  Therefore, if the crucible support 26 is displaced from the appropriate position with respect to the support base 13 when the elevating base 23 is lowered so as to load the crucible 3 onto the support base 13, the engagement pin 38 is not covered. When engaging the engagement body 37, the crucible support 26 is guided to an appropriate position by the inclination formed at the tip of the engagement pin 38. Then, when the engagement pin 38 is engaged with the engaged body 37, the horizontal position of the crucible support 26 is positioned at an appropriate position. Even when the crucible support 26 is tilted due to bending of the crucible loading fork device 27 when the crucible 3 is loaded into the pulling device 1, the support main body portion 32 contacts the engaged body 37 and the swinging body. The crucible support 26 can be changed to a horizontal posture by integrally swinging the crucible 36 and the crucible support 26 around the horizontal axis.

The elevating operation means 33 includes an elevating drive part 39 attached to the support main body part 32 and a rack 40 attached to the support action part 31 and meshing with a pinion (not shown) of the elevating drive part 39. By rotating the pinion of the elevating drive unit 39 and moving the rack 40 up and down, the support action portion 31 is configured to move up and down relative to the engagement pin 38 (support body portion 32).
That is, as described above, in the state where the engaging pin 38 is engaged with the engaged body 37 and the position of the crucible support 26 in the horizontal direction is positioned at an appropriate position, the support operating portion 31 is moved by the lifting operation means 33. By moving downward, the crucible 3 is loaded on the support base 13.

Further, the raising / lowering operation means 33 is configured such that the supporting action portion 31 moves far and away with respect to the crucible mounting body 24 by moving the supporting action portion 31 up and down in this way.
That is, the raising / lowering operation means 33 moves the supporting portion 31 relative to the crucible mounting body 24 in a state where the crucible mounting body 24 is positioned at the mounting transport position and the crucible support body 26 is positioned at the transporting position. by lowering the crucible placed and the crucible support 26 to retain the crucible mounting upper portion of the crucible 3 placed on the mounting body 24 located at the mounting transport position in the crucible support 26 The body 24 can be switched to an approaching state in which the body 24 is approached in the vertical direction, and the supporting action portion 31 is raised with respect to the crucible mounting body 24 to suspend and support the held crucible 3. The crucible support 26 and the crucible mounting body 24 can be switched to a separated state in which the crucible support 26 and the crucible mounting body 24 are separated in the vertical direction. Therefore, the raising / lowering operation means 33 is configured to function also as a switching operation means 41 for switching the crucible support body 26 and the crucible mounting body 24 between the approaching state and the separation state.
Incidentally, the crucible support body 26 is provided with an elevating guide means 42 for elevating and guiding the supporting action portion 31. The elevating and lowering guide means 42 includes a guide block attached to the support main body portion 32 and a guide rail attached to the support action portion 31 and guided by the guide block.

Next, the crucible conveyance control device h1 will be described.
As shown in FIG. 13, the crucible transport control device h1 drives the crucible stacker crane 20 to the crucible receiving position based on a command from the host controller H, and scoops the crucible 3 located at the crucible loading position. Then, crucible receiving control is performed in which the crucible 3 in the loading state of the loading device 5 is received by the crucible stacker crane 20, and then the crucible stacker crane is moved to the crucible loading position, and the crucible 3 is pulled up. The crucible 3 is loaded into the support stand 13, and the crucible 3 in the loading state received from the loading device 5 is loaded into the pulling device 1 with the crucible stacker crane 20. In order to mount the crucible 3 on the pulling device 1 with the crucible stacker crane 20, the operation of the crucible stacker crane 20, specifically, the crucible stacker crane 0 travel operation, lifting platform 23 lifting operation, crucible mounting body 24 operation, crucible receiving fork device 25 moving operation, crucible support body 26 operation, crucible loading fork device 27 moving operation, and pressing It is comprised so that the press action of the operation means 28 may be controlled.

  The crucible loading control will be described below. In the crucible loading control, as shown in FIGS. 2 and 6, the crucible stacker crane 20 is moved to the crucible loading position and the lifting platform 23 is moved to the crucible support 26. A first moving operation in which the crucible 3 to be supported is moved up and down to a height located above the support base 13, as shown in FIG. 9A, the crucible loading fork device after the completion of the first moving operation. 27, the second movement operation for moving the crucible support 26 from the transfer position to the loading position, and as shown in FIG. 9B, the lift table 23 is moved after the second movement operation is completed. In order to place the crucible 3 on the support table 13 by a third movement operation for lowering the crucible 3 to a height at which the support table 13 is loaded, the crucible stacker crane 20 is moved and moved up and down. Lifting operation of 23, and controls the movement operation of the crucible loading fork device 27.

Then, during the first moving operation, first, after switching the crucible mounting body 24 located at the mounting and conveying position from the restricted state to the allowable state, the pressing operation means 28 is pressed to operate the crucible mounting body 24. The operation of the crucible mounting body 24 and the operation of the pressing operation means 28 are controlled so as to move the mounted crucible 3 to an appropriate mounting position.
Next, after the crucible support 26 and the crucible mounting body 24 are switched to the close state and the crucible 3 is adsorbed and held by the crucible support 26, the crucible support 26 and the crucible mounting body are used. 24, the crucible support 26 is suspended and supported by the crucible support 26, the crucible support 26 is operated, the crucible loading fork device 27 is retracted, and the switching is performed. The switching operation of the operating means 41 is controlled.
Incidentally, the first movement operation may be performed after the crucible receiving control is finished and before the start of the second movement operation of the crucible loading control, and the crucible placing body 24 on which the crucible 3 is placed is placed in the scooping position. What is necessary is just to move the crucible support 26 that supports the suspension of the crucible 3 from the transfer position to the loading position after moving from the transfer position to the mounting transfer position. In addition, the crucible mounting body 24 that is executing the crucible receiving control is switched to the restricted state.

When the elevating platform 23 is lowered to a height at which the crucible 3 is loaded on the support platform 13 by the third moving operation, the engaging pin 38 is engaged with the engaged body 37, and the engaging pin 38 is engaged. By engaging with the united body 37, the crucible support 26 is guided in the horizontal direction and positioned at an appropriate position with respect to the support base 13. When performing the third movement operation, the crucible support 26 is supported by the coil spring 29 so as to freely move in the horizontal direction.
Then, as described above, the crucible 3 is moved to the support table by moving the support operation portion 31 downward by the lifting operation means 33 in a state where the engagement pin 38 is engaged with the engaged body 37 by the lowering of the lift table 23. 13 is loaded.

Next, the stacker crane 50 for single crystal rods will be described.
As shown in FIGS. 3 and 5, the single crystal rod stacker crane 50 includes a traveling carriage 51 that can travel along the direction in which the plurality of pulling devices 1 are arranged, and a column 52 that is erected on the traveling carriage 51. A lifting platform 53 that can be moved up and down along with a single crystal rod transport control device h2 (see FIG. 8) that controls the operation of the stacker crane 50 for single crystal rods.
Then, the single crystal rod stacker crane 50 travels along the travel path L, so that the single crystal rod receiving position for receiving the single crystal rod 4 grown by the growing apparatus 1 and the single crystal rod carrying-out position. It is configured to be able to run to a single crystal rod supply position for supplying the single crystal rod 4 to the unloading device 6 provided at the single crystal rod unloading location.

As shown in FIGS. 7 and 10, the single crystal rod 4 is placed on the lifting platform 53 of the single crystal rod stacker crane 50 between the growing device 1 and itself and between the self and the unloading device 6. A single crystal rod transfer device 54 for transfer is provided. The single crystal rod transfer device 54 is composed of a placement support fork device 55 and a fall regulation fork device 56, and the single crystal rod transfer device 54 is placed on the placement support fork device 55 in a standing posture. A crystal rod support 55a is provided.
The fork device 55 for supporting the placement of the single crystal rod support portion 55a and the one-side regulating member 55b on the lifting / lowering base 53 and the regulation conveyance position for regulating the fall and the travel path L It is configured to be able to move in and out on both sides in the lateral width direction of the travel route L so as to move to the delivery position located on both sides in the lateral width direction. As with the placement support fork device 55, the overturning restriction fork device 56 moves in and out of the travel path L in the lateral direction so as to move the other-side restriction member 56a to the restricted conveyance position and the transfer position. It is configured freely.

  The single crystal rod transfer device 54 will be described. As shown in FIG. 10, the mounting support fork device 55 and the overturning restriction fork device 56 are provided side by side in the traveling direction. The device 55 is provided with a single crystal rod support portion 55a and a one-side regulating member 55b that regulates the single crystal rod 4 supported by the single crystal rod support portion 55a from falling to one side in the traveling direction. In addition, the fork device 56 for regulating overturning is provided with the other side regulating member 56a for regulating that the single crystal rod 4 supported by the single crystal rod support portion 55a falls over to the other side in the traveling direction. The plurality of one-side regulating members 55b are arranged side by side in the up-down direction, and the plurality of one-side regulating members 55b located on the lower side are arranged in the vertical direction more than the plurality of one-side regulating members 55b located on the upper side. It is provided in a state in which the interval between adjacent ones becomes narrow. Also, a plurality of other side regulating members 56a are provided in the vertical direction in the same arrangement state as the one side regulating member 55b. Each of the one-side restricting portion 55b and the other-side restricting portion 56a is provided with a restricting portion having an arc shape in plan view on the side facing the other.

The single crystal rod transfer device 54 is configured such that the mounting support fork device 55 and the overturning restriction fork device 56 are movable in the traveling direction. In the state where the mounting support fork device 55 and the overturning restriction fork device 56 are separated from each other, the single crystal rod 4 can pass between the one side regulating portion 55b and the other side regulating portion 56a, and the The single crystal rod 4 can be received from the apparatus 1 and supplied to the carry-out device 6. In addition, in the state where the mounting support fork device 55 and the overturning restriction fork device 56 are close to each other, the single crystal rod 4 can pass between the one side restriction portion 55b and the other side restriction portion 56a. The overturn of the single crystal rod 4 placed and supported by the crystal rod support portion 55a is restricted.
Incidentally, although detailed explanation is omitted, each of the pair of support arms 18 of the posture changing mechanism 6b is provided with a regulating member having the same shape as the one-side regulating member 55b and the other-side regulating member 56a. The regulating member is provided so as to be positioned at a different height from the one-side regulating member 55b and the other-side regulating member 56a in a posture for receiving the single crystal rod 4. One of the pair of support arms 18 is provided with a support portion that supports the single crystal rod 4, and this support portion is provided between the single crystal rod support portion 55a and the one-side regulating member 55b. The rod 4 is formed in a shape that supports a small-diameter portion.

Next, the single crystal rod conveyance control device h2 will be described.
As shown in FIG. 14, the single crystal rod transport control device h2 receives the single crystal rod stacker crane 50 based on a command from the host controller H based on the operation of the growth completion switch 58. The single crystal rod receiving control is executed to move the single crystal rod 4 from the pulling device 1 to the single crystal rod transfer device 54 by moving to the position, and then the single crystal rod stacker crane 50 is moved to the single crystal rod transfer device 54. In order to execute the single crystal rod supply control in which the single crystal rod 4 is transferred to the single crystal rod unloading device 6 from the single crystal rod transfer device 54 by traveling to the single crystal rod unloading location. The traveling operation of the bar stacker crane 50, the lifting operation of the lifting platform 53, and the transfer operation of the single crystal rod transfer device 54 are controlled.
Incidentally, in this control, the single crystal rod 4 is transferred from the pulling device 1 to the single crystal rod transfer device 54 (specifically, the single crystal rod stacker crane 50 is stopped at the single crystal rod receiving position). In this state, the mounting support fork device 55 and the overturning restriction fork device 56 are protruded in a state of being separated from each other and then brought close to each other, and the lifting platform 53 is raised so that the single crystal is supported by the single crystal rod support portion 55a. The operation of the stacker crane 2 is stopped once in a state in which the rod 4 is received and supported from below and the regulation members 55b and 56a regulate the fall of the single crystal rod 4. After the stop, the stopped state body is maintained until the cutting completion switch 59 is operated. When the operator completes the cutting completion switch 59 after cutting the wire cable 11 using the cutting device 16, the operation of the stacker crane 2 is resumed.

[Another embodiment]
(1) In the above embodiment, the crucible carrier 20 is provided with the fork device 25 for moving the crucible mounting body 24 between the mounting and transporting position and the scooping position on the lifting platform 23 of the crucible transporting vehicle 20. The lifting platform 23 of the transport vehicle 20 may not include the fork device 25.
That is, the moving operation means 27 is configured to be moved to the transfer position, the loading position, and the support position that is located on the side where the crucible loading position of the crucible 3 is located, and the control means h1 is configured to be the crucible transport vehicle. 20 is moved to the crucible receiving position, and the crucible 3 located at the crucible loading position is supported by the crucible support 26, and then the crucible 3 is placed on the support base 13 by the first operation, the second operation, and the third operation. In order to place it, the traveling operation of the crucible carrier 20, the lifting operation of the lifting platform 23, and the moving operation of the moving operation means 27 may be controlled. The loading position and the support position may be the same position.

(2) In the above embodiment, the crucible support 26 is configured to support the upper part of the crucible 3 so that it can be suspended. Alternatively, the crucible 3 may be configured to be graspable from the lateral side, or may be configured to support the lower portion of the crucible 3.

(3) In the above-described embodiment, the crucible mounting body 24 of the fork device 25 is configured to be switchable between an allowable state and a restricted state, but the crucible mounting body 24 of the fork device 25 is simply placed horizontally on the crucible 3. You may comprise so that it may mount in the state which controlled the movement to a direction.
Moreover, in the said embodiment, although what provided the press operation means 28 was illustrated, you may not provide the press operation means 28. FIG.
In the above embodiment, the elastic member 29 is provided between the crucible support 26 and the movement operation means 27. However, the elastic member 29 may be provided between the movement operation means 27 and the lifting platform 23. Good.

(4) In the above embodiment, the guide positioning means 43 is provided in the engaged portion 37 provided in the growing apparatus 1 and the support main body portion 32 and can be engaged with the engaged portion 37 from above. The guide positioning means 43 may be configured to include a lower portion of the crucible 3 formed in a hemispherical shape and a support base 13 formed in a bowl shape.

(5) In the above embodiment, the crucible transport vehicle 20 and the single crystal rod transport vehicle 50 travel on the same travel path L, and the crucible transport vehicle 20 and the single crystal rod transport vehicle 50 travel on the same travel path. However, the crucible transport vehicle 20 and the single crystal rod transport vehicle 50 may be configured to travel in different travel paths.
That is, either one of the crucible transport vehicle 20 and the single crystal rod transport vehicle 50 is caused to travel linearly along the arrangement direction of the plurality of growing apparatuses 1 on the floor F side, and the remaining one is grown on the ceiling side. The traveling path of the crucible transport vehicle 20 and the traveling path of the single crystal rod transport vehicle 50 are shifted in the vertical direction so as to travel linearly along the arrangement direction of the apparatus 1, and the crucible transport vehicle 20 and the single crystal rod transport vehicle. 50 may be configured to travel on different travel paths.
Further, the crucible transport vehicle 20 is caused to travel linearly along one side in the lateral direction of the travel path L in the growth apparatus 1 along the alignment direction of the plurality of growth apparatuses 1, and the single crystal rod transport vehicle 50 is traveled in the growth apparatus 1. The other side of the lateral width direction of L is made to travel linearly along the plurality of growing devices 1, and the traveling path of the crucible carrier 20 and the traveling path of the single crystal rod carrier 50 are shifted in the lateral direction, The transport vehicle 20 and the single crystal rod transport vehicle 50 may be configured to travel in different travel paths.

(6) In the above embodiment, the crucible transport vehicle 20 provided with the moving operation means 27 is configured to travel to the crucible receiving position and the crucible loading position by traveling along the direction in which the plurality of growing apparatuses 1 are arranged. The single crystal rod transfer vehicle 50 provided with the single crystal rod transfer device 54 can travel to the single crystal rod receiving position and the single crystal rod supply location by traveling along the direction in which the plurality of growing devices 1 are arranged. However, as shown in FIG. 15, the single crucible transport vehicle 20 is provided with the moving operation means 27 and the single crystal rod transfer device 54, and the single crucible transport vehicle 20 has a plurality of growths. By traveling along the direction in which the devices 1 are arranged, the crucible receiving position, the crucible loading position, the single crystal rod receiving position, and the single crystal rod supply location may be configured to be freely movable.

(7) In the above-described embodiment, the growing devices 1 are arranged in two lines in a straight line with respect to the traveling route L. However, the growing devices 1 are arranged in a line in a straight line with respect to the traveling route L. Also good.

(8) In the above embodiment, the crucible transport vehicle 20 and the single crystal rod transport vehicle 50 are configured by a stacker crane. However, one or both of the crucible transport vehicle 20 and the single crystal rod transport vehicle 50 are connected to the floor F. It may be constituted by an article transport vehicle provided with a link mechanism that moves the lifting platform up and down on the traveling body, or a ceiling transportation vehicle that supports the traveling body that travels on the ceiling by hanging and supporting a column that guides the lifting platform. .

(9) In the above-described embodiment, the growing devices 1 are arranged in a straight line in the horizontal direction. However, the growing devices may be arranged in a straight line in the vertical direction. In this case, it is conceivable that the crucible transport vehicle 20 and the single crystal rod transport vehicle 50 are configured by a lifting and lowering traveling body that travels up and down along a support column erected on the floor F.

Plan view of single crystal rod growth equipment Plan view on the carry-in side of single crystal rod growth equipment Plan view on the carry-out side of single crystal rod growth equipment Longitudinal side view of single crystal rod growth equipment Longitudinal side view of single crystal rod growth equipment Longitudinal front view of single crystal rod growth equipment Longitudinal front view of single crystal rod growth equipment The figure which shows the raising / lowering base of the transport vehicle for crucibles Action diagram showing loading of crucible Action diagram showing the receipt of a single crystal rod Action diagram showing supply of single crystal rod Control block diagram Flow chart of crucible conveyance Single crystal rod transfer flowchart Plan view of single crystal rod growing facility of another embodiment

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Growth apparatus 3 Crucible 4 Single crystal rod 13 Support stand 20 Crucible carrier 23 Lifting table 24 Crucible mounting body 25 Fork device 26 Crucible support 27 Moving operation means 28 Press operation means 29 Elastic member (support means)
31 Supporting action part 32 Supporting body part 33 Elevating operation means 37 Engagement part 38 Engagement part 41 Switching operation means 43 Guide positioning means 54 Single crystal rod transfer device h1 Control means

Claims (7)

A single crystal rod growing facility provided with a growth apparatus for growing a single crystal rod,
A crucible transporting vehicle is provided that can travel between a crucible receiving position for receiving a crucible containing raw material of the single crystal rod and a crucible loading position for loading the crucible into the growing apparatus,
The growing apparatus is configured to include a support base on which the crucible is loaded from above.
A moving operation for moving the crucible support for supporting the crucible to a lifting position on the lifting platform and a loading position positioned on the side where the growing device is positioned on the lifting platform of the crucible transport vehicle Means are provided,
A first moving operation in which the crucible transport vehicle is moved to the crucible loading position and the elevating table is moved up and down to a height at which the crucible supported by the crucible support is located above the support table; A second movement operation for moving the crucible support from the transfer position to the loading position by the movement operation means after the movement operation is completed; and the crucible supports the lift table after the second movement operation is completed. In order to place the crucible on the support table by a third movement operation that lowers to a height loaded on the table, the crucible transport vehicle traveling operation, the lifting table lifting operation, and the moving operation means Control means for controlling the movement operation;
Support means for supporting the crucible support in a state of free movement in the horizontal direction when performing the third movement operation;
A guide positioning means for guiding the crucible support lowered by the third movement operation in a horizontal direction and positioning the crucible support at an appropriate position with respect to the support ;
The support means is formed of an elastic member that is provided between the crucible support and the movement operation means and allows the crucible support to move in a horizontal direction with respect to the movement operation means. Single crystal rod growing equipment. A single crystal rod growing facility provided with a growth apparatus for growing a single crystal rod,
A crucible transporting vehicle is provided that can travel between a crucible receiving position for receiving a crucible containing raw material of the single crystal rod and a crucible loading position for loading the crucible into the growing apparatus,
The growing apparatus is configured to include a support base on which the crucible is loaded from above.
A moving operation for moving the crucible support for supporting the crucible to a lifting position on the lifting platform and a loading position positioned on the side where the growing device is positioned on the lifting platform of the crucible transport vehicle Means are provided,
A first moving operation in which the crucible transport vehicle is moved to the crucible loading position and the elevating table is moved up and down to a height at which the crucible supported by the crucible support is located above the support table; A second movement operation for moving the crucible support from the transfer position to the loading position by the movement operation means after the movement operation is completed; and the crucible supports the lift table after the second movement operation is completed. In order to place the crucible on the support table by a third movement operation that lowers to a height loaded on the table, the crucible transport vehicle traveling operation, the lifting table lifting operation, and the moving operation means Control means for controlling the movement operation;
Support means for supporting the crucible support in a state of free movement in the horizontal direction when performing the third movement operation;
A guide positioning means for guiding the crucible support lowered by the third movement operation in a horizontal direction and positioning the crucible support at an appropriate position with respect to the support;
The crucible support is configured to freely support the upper part of the crucible,
The crucible mounting body on which the crucible is placed is moved on the lifting platform to a placement transport position where the crucible mounting body is positioned on the lifting platform and a scooping position which is located on the side where the crucible loading position of the crucible is located. A fork device is provided,
The upper portion of the crucible in which the placed on a crucible mounting body positioned in the mounting conveyor positions the crucible support and said crucible mounting body is close to the vertical direction to retain in said crucible support Switching operation means is provided for switching between an approaching state and a separated state in which the crucible support and the crucible mounting body are separated in the vertical direction to suspend and support the held crucible,
The control means causes the crucible transport vehicle to travel to the crucible receiving position, scoops out the crucible located at the crucible loading position, and then brings the crucible support and the crucible mounting body into the approaching state. After switching and holding the crucible with the crucible support, the crucible support and the crucible mounting body are switched to a separated state and the crucible is suspended and supported by the crucible support. running operation of the transport vehicle, the lifting operation of the lifting platform, the actuation of the crucible support, projecting and retracting operation of the fork device, and the switching operation single crystal rod grown that is configured to control the switching operation of the means Facility. The crucible placing body of the fork device is in an allowed state where the crucible is placed in a state allowing movement in the horizontal direction and a restricted state where the crucible is placed in a state where movement in the horizontal direction is restricted. Configured to be switchable,
When the crucible mounting body is located at the mounting and transporting position and is in the allowable state, the crucible is pressed from the lateral side of the crucible mounted on the crucible mounting body, and the crucible is pressed. The single crystal rod growing facility according to claim 2, further comprising a pressing operation means for moving the plate to an appropriate mounting position suitable for being held by the crucible support. The support means is formed of an elastic member that is provided between the crucible support and the movement operation means and allows the crucible support to move in a horizontal direction with respect to the movement operation means. The single crystal rod growing facility according to claim 2 or 3 . The crucible support includes a support action part that supports the crucible, a support body part that is moved by the movement operation means, and a lifting operation means that moves the support action part up and down relative to the support body part. Configured with
The guide positioning means includes an engaged portion provided in the growing device and an engaging portion provided in the support main body portion and engageable with the engaged portion from above. The single crystal rod growing equipment according to any one of claims 1 to 4. A plurality of the growing devices are arranged in a straight line,
The single crystal rod growing facility according to any one of claims 1 to 5, wherein the crucible transport vehicle is provided so as to be able to travel along a linear traveling path along an arrangement direction of the plurality of growing devices. The crucible transport vehicle receives a single crystal rod receiving position for receiving the single crystal rod grown by the growing apparatus and a single crystal rod supply position for supplying the single crystal rod to a single crystal rod unloading position for unloading the single crystal rod And a single crystal rod transfer device for transferring the single crystal rod between the growing device and the self and between the self and the single crystal rod unloading location. Configured with
The control means moves the crucible transport vehicle to the single crystal rod receiving position to transfer the single crystal rod from the growing device to the single crystal rod transfer device, and then moves the crucible transport vehicle to the single crystal rod. In order to move the single crystal rod from the single crystal rod transfer device to the single crystal rod carry-out location by running to the crystal rod carry-out location, the running operation of the crucible carrier, the lifting operation of the lifting platform, and The single crystal rod growing facility according to any one of claims 1 to 6, wherein the single crystal rod transfer device is configured to control a transfer operation of the single crystal rod transfer device.

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