JP4963069B2 - Pressure sensor - Google Patents

Description

  The present invention relates to a semiconductor pressure sensor that detects the level of hot water and the like.

The water level in a container such as a bathtub is converted into a pressure change and detected.
Since the pressure sensor uses a semiconductor-type pressure detection element and cannot directly apply water pressure, a pressure transmission medium that does not affect the pressure detection element between the pressure detection element and water ( However, there is no shielding member between the pressure transmission medium and the water, and both are in direct contact with each other.
For this reason, when the water temperature rises or the like, the pressure transmission medium may flow out to the container side, and water may enter the pressure transmission medium side instead.
When this situation is made little by little during the long-term use of the sensor, the invading water directly acts on the pressure detection element. As a result, since the pressure detection element is a semiconductor type, the electric insulation is disturbed and cannot be used.
Therefore, various proposals have been made to deal with such problems (Patent Documents 1 to 4).

8A and 8B are diagrams showing an example of a conventionally proposed water level detection pressure sensor, where FIG. 8A is a cross-sectional view of the main part, and FIG. 8B is a right side view thereof.
In this figure, 51 is a resin main body housing (hereinafter simply referred to as “main body”), 52 is a joint formed on the main body 51, and 53 is a semiconductor sensor chip (hereinafter simply referred to as “sensor chip”). , 54 is a glass pedestal for mounting the sensor chip 53, and 55 is a resin adapter inserted into an opening formed in the joint portion 52 of the main body 51. A step portion 56 is formed on the inner wall of the opening of the joint portion 52 for positioning and preventing rotation when the adapter 55 is inserted, and an outer peripheral portion of the adapter 55 corresponds to the step portion 56. A flat portion is formed on the surface.
The sensor chip 53 is formed by etching the center of the back surface of a silicon substrate to form a diaphragm (silicon diaphragm). A plurality of pressure detecting elements (bridges are formed on the upper portion of the silicon diaphragm (left side in the figure)) ( Piezoresistive element) is formed, and is connected to an electronic circuit portion formed on a substrate (not shown) by wire bonding.
As shown in the figure, a through hole (pressure transmission path) 57 communicating with the side opposite to the side where the piezoresistive element of the silicon diaphragm of the sensor chip 53 is formed is formed in the pedestal 54 and the main body 51. A pressure introduction path 58 is formed inside the adapter 55. A pressure transmission chamber 59 is formed by the end of the opening of the main body 51 and the end of the adapter 55, and the pressure introduction path 58 and the pressure transmission path 57 communicate with each other via the pressure transmission chamber 58. is doing. In the pressure transmission path 57, the pressure transmission chamber 59, and the pressure introduction path 58, a pressure transmission medium 60 that is a fluorine-based or silicon-based oil is injected.

In the pressure sensor having such a configuration, the joint 52 and the tip of the adapter 55 (the end on the right side in the figure) are installed so as to be located in the bathtub or in a pipe line communicating with the bathtub. Acts on the sensor chip 53 via the pressure introduction medium 58, the pressure transmission chamber 59 and the pressure transmission medium 60 in the pressure transmission path 57, and a signal corresponding to the water pressure is detected and output by the sensor chip 53.
Here, in the pressure sensor shown in FIG. 8, since the pressure introduction path 58 is provided at a position higher than the pressure transmission path 57 (upward in the figure), the pressure introduction path 58 and the pressure transmission path are arranged. Therefore, the length of the pressure transmission path (that is, the distance until the invaded moisture reaches the sensor chip 53) can be made longer than the case where the intruding moisture reaches the sensor chip 53. Since it takes a long time to affect the pressure sensor, the durability of the pressure sensor can be improved.
Further, by using a material having a specific gravity greater than that of water as the pressure transmission medium 60, even if water enters the pressure introduction path 58 located above, it is difficult for water to enter the pressure transmission path 57. I am doing so.
Further, it has been proposed to narrow a part of the pressure introduction path 58 so as to prevent the flow of the pressure transmission medium 60.
Japanese Patent No. 2568666 JP 2000-205986 A JP 2000-214031 A JP 2000-346736 A

Various proposals have been made as described above, but the processing becomes complicated when a part of the pressure introduction path is narrowed.
Further, there is a demand for further downsizing the apparatus, and there is a need for a pressure sensor that can maintain high accuracy even if the pressure sensor is downsized.
For example, in the pressure sensor shown in FIG. 8, in order to reduce the size of the device, the diameter of the pressure transmission path 57 is 0.8 mm, the diameter of the pressure introduction path 58 is 0.9 mm, and the adapter 55 is larger. Suppose the diameter is 4 mm. At this time, when the pressure introduction path 58 is formed in the adapter 55, it is necessary to give a predetermined thickness between the pressure introduction path 58 and the outer peripheral portion of the adapter 55. That is, the thickness of at least 0.4 mm or more is preferable by sufficiently considering that it can cope with resin molding of the adapter and that the adapter 55 can be pressed into the joint portion 52 of the main body housing. Thus, the difference between the center position of the adapter 55 and the center position of the pressure introduction path 58 is about 1 mm. At this time, the length between the upper end of the pressure transmission path 57 and the lower end of the pressure introduction path 58 (stepped portion) is 0.15 mm.
Increasing the distance of the stepped portion reduces the degree to which moisture that has entered from the pressure introduction path 58 via the pressure transmission path 57 contacts the sensor chip 53 and adversely affects the operating characteristics.
In view of the dimensional configuration of the adapter 55 described above, if the distance between the step portions is set to about 1 mm, the diameter of the adapter 55 becomes larger as indicated by a broken line 61 in FIG. The joint portion 52 of the housing that houses the adapter 55 also becomes larger due to the necessity of ensuring a thickness that can accommodate the press-fitting of the adapter 55, and the objective of downsizing the sensor as a whole cannot be achieved.
Even when the apparatus is downsized, it is desirable to increase the path length of the pressure transmission medium 60 passing through the pressure introduction path 58, the pressure transmission chamber 59, and the pressure transmission path 57.

  Therefore, an object of the present invention is to provide a pressure sensor that improves durability so that stable accuracy can be maintained, is easy to process, and can cope with downsizing.

In order to achieve the above object, a pressure sensor according to the present invention includes a main body housing having a pressure transmission path, a semiconductor sensor chip connected to the main body housing, and an opening formed in a joint portion of the main body housing. An adapter to be inserted, a joint part of the main body housing, a pressure introduction path communicating between the end of the adapter and the pressure transmission path, and a pressure transmission medium filled in the pressure transmission path and the pressure introduction path. The pressure sensor has a horizontal direction in which the cross section is longer in the horizontal direction than in the vertical direction when the direction of gravity is the vertical direction and the direction perpendicular thereto is the horizontal direction. and a shape, its position is, when the leading end portion of the joint portion and the adapter is installed so as to be positioned at a predetermined position, is also formed to be higher than the pressure transmitting passage It is.
The pressure introduction path is formed by a groove formed in an outer peripheral portion of the adapter and an inner wall of a joint portion of the main body housing.
Further, the pressure introduction path is formed by an outer peripheral portion of the adapter and a groove formed in an inner wall of the joint portion of the main body housing.
Further, the pressure introduction path has a cross-sectional shape in which irregularities are formed.
Furthermore, a convex portion in the direction opposite to the direction of gravity is formed at an intermediate position of the pressure introduction path.
Furthermore, the pressure transmission medium is a fluorinated oil having a specific gravity greater than that of water.

According to such a pressure sensor of the present invention, when the pressure sensor is downsized, it is possible to reduce the possibility that water that has intruded affects the pressure detection element, and to maintain high accuracy as the sensor. Can do.
That is, by making the cross-sectional shape of the pressure introduction path horizontally long, compared with the case where the cross-sectional shape is circular, the gap between the upper end of the pressure transmission path and the lower end of the pressure introduction path (stepped portion) becomes longer. Since the distance from the place where the pressure transmission medium is in contact with hot water to the sensor chip can be increased, even if hot water enters, the time to reach the sensor chip can be increased, and the durability of the pressure sensor can be increased. Can be high.
Further, according to the present invention in which the cross-sectional shape of the pressure introduction path is a horizontally long shape or a shape in which the inner peripheral length is long, the inner peripheral length is longer than that in the case where the cross-sectional shape is circular, so that the fluid resistance of the pressure transmission medium is As the pressure increases, the amount of the pressure transmission medium flowing out from the pressure introduction path decreases, and the amount of hot water entering can be reduced.
Furthermore, according to the present invention in which the pressure introduction path is formed by the groove formed in the outer peripheral portion of the adapter and the inner wall of the joint portion, the manufacturing process can be simplified.
Furthermore, according to the present invention in which a convex portion is formed in the upper portion of the pressure introduction path, when a pressure transmission medium having a specific gravity greater than that of water is used, the invaded hot water is collected in the convex portion. It is possible to lengthen the time until it reaches the sensor chip, and to improve durability.

FIG. 1 is a cross-sectional view showing a configuration of an embodiment of a pressure sensor of the present invention.
In this figure, 11 is a resin-made (for example, PPS (polyphenylene sulfide) resin) main body housing ("main body"), 12 is a joint formed on the main body 11, and 13 is a semiconductor sensor chip ("sensor chip"). ), 14 is a glass base for mounting the sensor chip 13, 15 is a resin (for example, PPS) adapter inserted in an opening formed in the joint portion 12 of the main body 11, and 16 is the above-mentioned Step portions formed on the inner wall of the opening portion of the joint portion 12 for positioning and preventing rotation of the adapter 15, respectively, the main body 51, the joint portion 52, the sensor chip 53, the pedestal 54, the adapter 55 and the adapter 55 in FIG. This is the same as the stepped portion 56.
Reference numeral 17 denotes a pressure transmission path formed inside the base 14 and the main body 11, and 19 denotes a pressure transmission chamber formed by the opening of the main body 11 and the tip of the adapter 15, respectively. 8 is the same as the pressure transmission path 57 and the pressure transmission chamber 59 in FIG.
Reference numeral 18 denotes a pressure introduction path that penetrates between the pressure transmission chamber 19 and the end of the joint portion 12 and the end of the adapter 15 opposite to the pressure transmission chamber 19 side. The pressure transmission path 17, the pressure introduction path 18 and the pressure transmission chamber 19 are filled with a pressure transmission medium 20 similar to the pressure transmission medium 60. Although details will be described later, in this embodiment, the pressure introduction path 18 is formed by a groove formed in the outer peripheral portion of the adapter 15 and an inner wall of the opening portion of the joint portion 12.

Reference numeral 21 denotes a circuit board on which an electronic circuit (not shown) for processing an output signal from the sensor chip 13 is mounted, and 22 denotes a connector for connecting to an external device. As shown in the figure, the pressure detecting element on the sensor chip 13 and the electronic circuit on the circuit board 21 are connected by wire bonding. The connector 22 is mounted on the circuit board 21, and pins 23 of the connector 22 are soldered to electronic circuits on the circuit board 21.
The circuit board 21 is fixed to the main body housing 11 with an adhesive 24 such as epoxy bond, and the periphery of the circuit board 21 is filled with a coating material 25 such as silicon-based gel. Thereby, the circuit board 21 can be protected from humidity.
Reference numeral 26 denotes a resin cover (for example, ABS, PPS, etc.) that is engaged with the main body 11 by using an engaging claw portion. The cover 26 is formed with a hole for the connector 22. ing. The cover 26 and the main body 11 are engaged to cover and protect the circuit board 21, the sensor chip 13, and the coating material 25.

2A and 2B are diagrams for explaining the pressure introduction path 18 in the pressure sensor of the present invention shown in FIG. 1, wherein FIG. 2A is a cross-sectional view of the main part of the pressure sensor, and FIG. 2B is a right side view thereof. It is.
As shown in FIG. 2, in this embodiment, the pressure introduction path 18 is formed by a groove formed in the outer peripheral portion of the adapter 15 and an inner wall of the opening of the joint portion 12 into which the adapter 15 is inserted. As shown in FIG. 2B, the cross section has a flat shape in which the horizontal length (width) is larger than the vertical length (height). Moreover, the pressure introduction path 18 is formed above the pressure transmission path 17 (the direction of gravity is downward) as in the case of FIG.

If the cross-sectional shape of the pressure introduction path 18 is thus horizontally long, and the cross-sectional area is the same as the pressure introduction path 58 having a circular cross section in FIG. And the lower end of the pressure introducing path 18 (stepped portion) can be increased. In the case of FIG. 8, the length of the step portion is 0.15 mm, whereas in this embodiment of the present invention, the length of the step portion can be 1 mm.
Therefore, the distance from the end of the pressure introduction path 18 in contact with the hot water to the sensor chip 13 is increased, and even if hot water enters the pressure transmission medium 20, the time until it reaches the sensor chip 13 is increased. Since it becomes long, the precision of a pressure sensor is maintained for a long period of time, and durability can be improved.

Further, in this embodiment of the present invention, the pressure introduction path 18 is formed by the groove formed in the outer peripheral portion of the adapter 15 and the inner wall of the opening of the joint portion 12, so that the outer peripheral portion of the adapter 15 is flat. It is only necessary to form a groove having a cross section. Thereby, the manufacturing process of the adapter 15 can be simplified as compared with the conventional pressure sensor that has been used as the pressure introduction path by forming a hole having a circular cross section in the adapter 15.
Furthermore, since the cross-sectional shape of the pressure introduction path 18 is a horizontally long shape as described above, the inner peripheral length of the pressure introduction path 18 is longer than that of a circular shape having the same cross-sectional area. For example, the circumference of a circle having an inner diameter of 0.9 mm is 2.8 mm, and the outer circumference of a rectangle (1.6 mm in width and 0.4 mm in length) having the same area is 4 mm.
As a result, the fluid resistance of the pressure transmission medium 20 becomes larger than when the cross section is circular, and the amount of the pressure transmission medium 20 flowing out from the pressure introduction path 18 in response to a temperature change or a pressure change is reduced. Therefore, the amount of hot water entering is reduced.
As the pressure transmission medium 20, it is desirable to use a fluorine-based oil having a specific gravity greater than that of hot water. As a result, the hot water that has entered is less likely to come into contact with the pressure detection element so as to be positioned above the pressure introduction path 18, and the possibility that the measurement accuracy is reduced is reduced.

The manufacturing process of the pressure sensor shown in FIGS. 1 and 2 is as follows.
(1) The sensor chip 13 is bonded to the base 14 by anodic bonding.
(2) The adapter 15 is press-fitted into the main body 11 with an adhesive.
(3) The base 14 to which the sensor chip 13 is bonded is bonded to the main body 11 by die bonding with an adhesive.
(4) The circuit board 21 is fixed to the main body 11 with an adhesive (epoxy bond) 24 and connected to the sensor chip 13 by wire bonding. A connector 22 is already attached to the circuit board 21.
(5) The pressure transmission medium 20 is injected into the pressure transmission path 17, the pressure transmission chamber 19, and the pressure introduction path 18 by a vacuum replacement method or the like.
(6) Perform operation adjustment, and laser trim the circuit constants according to the result.
(7) The coating material 25 is filled.
(8) The cover 26 is attached to the main body 11.

3A and 3B are diagrams showing the configuration of another embodiment of the pressure sensor of the present invention, in which FIG. 3A is a cross-sectional view of the main part, and FIG. In this figure and the following figures, the same components as those in FIG.
As shown in FIG. 3, in this embodiment, the cross section of the pressure introduction path 31 is a rectangle with a long horizontal direction. In this example, it is a rectangle having a cross section of 0.4 mm in length and 1.6 mm in width so as to have the same cross-sectional area as in FIGS. In this case, even if a thickness of 0.45 mm is provided between the outer periphery of the pressure introduction path 31 and the outer periphery of the adapter 15, the upper end of the pressure transmission path 17 and the lower end of the pressure introduction path 31 are The distance between them (stepped portion) is 0.41 mm, which can be made larger than the case of FIG. 8 (0.15 mm).
Thereby, even if hot water enters, it is possible to lengthen the time until the invaded hot water reaches the sensor chip 13 and to increase the fluid resistance of the pressure transmission medium 20. Compared to the pressure sensor, the pressure sensor is highly reliable and durable.

FIG. 4 is a view for explaining still another embodiment of the pressure sensor of the present invention. In this embodiment, as shown in FIG. 4, the cross section of the pressure introduction path 32 has a shape in which a protrusion is formed on the inner wall of the pressure introduction path 32 so that the inner peripheral length of the pressure introduction path 32 becomes longer. ing.
Thereby, since the fluid resistance of the pressure transmission medium 20 is increased, the amount of the pressure transmission medium 20 flowing out from the pressure introduction path 32 is reduced, and the amount of hot water entering is reduced.

5A and 5B are diagrams for explaining still another embodiment of the pressure sensor of the present invention, in which FIG. 5A is a cross-sectional view of the main part and FIG. 5B is a right side view thereof.
In this embodiment, a convex portion 41 is provided above the pressure introduction path 18. Thereby, when the pressure transmission medium 20 having a specific gravity greater than that of hot water is used, the invaded hot water is collected in the convex portion 41, so that the time to reach the sensor chip 13 can be made longer.
In the illustrated example, the pressure introduction path 18 is formed by the groove formed on the outer peripheral portion of the adapter 15 and the inner wall of the opening of the joint portion 12, as in the embodiment shown in FIG. 2. The convex portion 41 is formed by providing a concave portion on the inner wall of the opening of the joint portion 12.
Note that the present invention is not limited to this, and also in the embodiment shown in FIG. 3 and the like, it is possible to improve the durability of the pressure sensor by forming a convex portion on the upper portion of the pressure introduction path 18.

6A and 6B are diagrams for explaining still another embodiment of the pressure sensor of the present invention, in which FIG. 6A is a cross-sectional view of the main part, and FIG. 6B is a right side view thereof.
In the embodiment described above, the sensor chip 13, the pedestal 14, and the pressure transmission path 17 are aligned with the center position of the joint portion 12 in any of the cases of FIGS. 1, 2, 3, and 5. It was arranged to be. In this embodiment, the sensor chip 13, the base 14, and the pressure transmission path 17 are arranged below the joint portion 12, thereby increasing the length of the stepped portion.
That is, as shown in FIG. 6, in this embodiment, the sensor chip 13, the base 14, and the pressure transmission path 17 are disposed below the center position of the opening of the joint portion 12. Thus, when the dimensions are the same as those in FIGS. 1 and 2, the distance between the upper end of the pressure transmission path 17 and the lower end of the pressure introduction path 18 (stepped portion) may be 2.1 mm. it can. Thereby, durability can be improved more.
When the pressure transmission path 17 is arranged below in this way, the step portion formed on the inner wall of the opening portion of the joint portion 12 for positioning and preventing rotation of the adapter 15 is the same as that in the above-described embodiment. Similarly to the stepped portion 16, if it is formed at the lower part of the opening, the main body is enlarged. Therefore, in this embodiment, the step portion 42 (FIG. 6B) is formed on the inner wall of the side portion of the opening portion of the joint portion 12. Although not shown, a flat surface portion corresponding to the step portion 42 is formed on the side surface of the outer peripheral portion of the adapter 15. Here, the step portion 42 is formed on the left side portion in the figure, but it may be formed on the right side portion.

FIG. 7 is a view for explaining the configuration of still another embodiment of the pressure sensor of the present invention, in which (a) is a cross-sectional view of the main part and (b) is a right side view thereof.
In the embodiment shown in FIGS. 1 and 2, the pressure introducing path 18 is formed by a groove formed in the outer peripheral portion of the adapter 15 and an inner wall of the opening formed in the joint portion 12. It was. In this embodiment, as shown in FIG. 7, the pressure introduction path 43 is formed by a groove formed on the inner wall of the opening of the joint portion 12 and the outer peripheral portion of the adapter 15. Here, the case where it is applied to the embodiment shown in FIG. 6 is shown, but the sensor chip 13, the base 14 and the pressure transmission path 17 are arranged so as to be aligned with the center position of the joint portion 12. In this case, this embodiment may be applied.
When the pressure introduction path 43 is formed by the groove formed on the inner wall of the opening of the joint portion 12 as described above, the distance between the step portions can be further increased, and the same dimensions as those in FIGS. As shown in the figure, the distance between the step portions can be set to 2.5 mm. Thereby, durability can be improved more.
In the case of this embodiment, the adapter 15 may have a simple cylindrical shape, and it is not necessary to provide a step for positioning and preventing rotation. However, since groove processing is performed on the joint portion 12 side, it is disadvantageous in terms of strength when the dimensions are the same.

  In addition, you may make it combine each embodiment mentioned above. For example, the embodiment shown in FIG. 4 may be applied to the case of the embodiment shown in FIG. 6 or FIG. 7, or the embodiment shown in FIG. You may apply in the case of embodiment shown in FIG.

It is sectional drawing which shows the structure of 1st Embodiment of the pressure sensor of this invention. It is sectional drawing and the right view of the principal part of 1st Embodiment of the pressure sensor of this invention. It is sectional drawing and the right view of the principal part which show the structure of 2nd Embodiment of the pressure sensor of this invention. It is a figure which shows the cross section of the pressure introduction path in 3rd Embodiment of the pressure sensor of this invention. It is sectional drawing and the right view of the principal part which show the structure of 4th Embodiment of the pressure sensor of this invention. It is sectional drawing of the principal part which shows the structure of 5th Embodiment of the pressure sensor of this invention, and a right view. It is sectional drawing of the principal part which shows the structure of 6th Embodiment of the pressure sensor of this invention, and a right view. It is sectional drawing of the principal part which shows the structure of the conventional pressure sensor, and a right view.

Explanation of symbols

  11: Main body housing, 12: Joint part, 13: Semiconductor sensor chip, 14: Base, 15: Adapter, 16: Step part, 17: Pressure transmission path, 18: Pressure introduction path, 19: Pressure transmission chamber, 20: Pressure Transmission medium, 21: circuit board, 22: connector, 23: pin, 24: adhesive, 25: coating material, 26: cover, 31, 32: pressure introduction path, 41: convex portion formed in the pressure introduction path, 42: Stepped portion, 43: Pressure introduction path

Claims (6)

A body housing with a pressure transmission path;
A semiconductor sensor chip connected to the body housing;
An adapter to be inserted into an opening formed in the joint portion of the main body housing;
A pressure introduction path communicating between the joint part of the main body housing and the end of the adapter and the pressure transmission path;
A pressure sensor having a pressure transmission medium filled in the pressure transmission path and the pressure introduction path,
The pressure introduction path is formed in a horizontally long shape in which the cross-sectional length is longer than the vertical length when the direction of gravity is the vertical direction and the direction perpendicular thereto is the horizontal direction. position, the pressure sensor tip of the joint part and the adapter when installed so as to be positioned at a predetermined position, characterized in that it is formed to be higher than the pressure transmission path.   The pressure sensor according to claim 1, wherein the pressure introduction path is formed by a groove formed in an outer peripheral portion of the adapter and an inner wall of a joint portion of the main body housing.   The pressure sensor according to claim 1, wherein the pressure introduction path is formed by an outer peripheral portion of the adapter and a groove formed in an inner wall of a joint portion of the main body housing.   The pressure sensor according to claim 1, wherein the pressure introduction path has a cross-sectional shape in which irregularities are formed. The pressure sensor according to claim 1, wherein a convex portion in a direction opposite to the direction of gravity is formed at an intermediate position of the pressure introduction path.   The pressure sensor according to claim 1, wherein the pressure transmission medium is a fluorinated oil having a specific gravity greater than that of water.

Images