JP4833266B2 - Arm device - Google Patents

Description

The present invention includes a drive arm to rotate by the driven, and relates to an arm device having a follower arm which rotates with respect to the drive arm according to the rotation of the drive arm.

  Conventionally, an arm device 900 as shown in FIGS. 16 and 17 is known as an arm device (see, for example, Patent Document 1).

  The arm device 900 is driven to rotate with a drive arm 910 that rotates about a rotation shaft 911 and a driven arm 920 that rotates with respect to the drive arm 910 according to the rotation of the drive arm 910. Synchronous link having a plurality of linked links 931, 932, 933, 934, 935, 936 and synchronizing the rotation of the drive arm portion 910 and the driven arm portion 920 with the links 931, 932, 933, 934, 935, 936. Part 930 and a hand 940 attached to the distal end side of the follower arm part 920.

  Further, the synchronization link portion 930 is disposed between the drive arm portion 910 and the driven arm portion 920 in the direction indicated by the arrow 911a in which the rotation shaft 911 extends.

  Then, for example, as shown in FIG. 17, the arm device 900 sometimes passes the hand 940 side through a hole 991 formed in the wall portion 990 and performs work with the passed hand 940.

Japanese Unexamined Patent Publication No. 2000-208588 (pages 11-12 and 14-16)

  However, in the conventional arm device 900 described above, when at least a part of the drive arm portion 910 is inserted into the hole 991, the end 940a of the hand 940 opposite to the driven arm portion 920 side and the drive arm portion 910 The thickness 901 in the direction indicated by the arrow 911a with the end 910a opposite to the driven arm portion 920 side must be less than or equal to the width 992 in the direction indicated by the arrow 911a of the hole 991, and the width 992 is greater than the thickness 901. When it is small, there is a problem that the drive arm portion 910 cannot be inserted into the hole 991.

  Then, an object of this invention is to provide the arm apparatus which can make the front end side thin compared with the past.

In order to solve the above-described problems, an arm device of the present invention is driven to be driven and rotated about a rotation shaft on a proximal end side, and rotatably supported on a distal end side of the drive arm portion. And a driven arm portion disposed on one side of the drive arm portion in the direction in which the rotation shaft extends, and a plurality of links that are rotatably connected to each other and overlap in the direction in which the rotation shaft extends. And when the drive arm portion is driven, the drive arm portion and the driven arm portion are rotated in synchronization with each other in the opposite directions by the plurality of links. Each of the arm portions is configured as a parallel link mechanism, and extends and contracts using a common link that is a part of each parallel link mechanism as a joint. The links of the drive arm unit and the link of the driven arm unit that are rotatably connected to the common link are rotated in synchronization with each other in the opposite directions with respect to the common link. And three link portions integrally provided as a part of each of the common link, a part of the link of the drive arm part, and a part of the link of the driven arm part. A first link rotatably connected to a link of a portion, a second link rotatably connected to the first link and the common link, the second link and the follower A third link rotatably connected to a part of the link of the arm portion, and the first link , the second link, and the third link extend from the rotation shaft Do Wherein the driven arm side has been arranged on the opposite side with respect to the drive arm in countercurrent, preferably, the first link of the synchronous link portion, the second link and the third The link is arranged on the side where the common link moves when the drive arm portion and the driven arm portion contract with respect to the common link.

With this configuration, the arm device of the present invention, the first to third link synchronization link portion on the opposite side of the driven arm part side with respect to the drive arm in a direction rotational axis of the drive arm extends The thickness of the driven arm portion in the direction in which the rotation axis extends between the end of the driven arm portion opposite to the drive arm portion side and the end of the drive arm portion opposite to the driven arm portion side is extended. As compared with the prior art, the tip end side of the arm device can be made thinner.

The arm device according to any one of the above, and a storage unit that stores the arm device therein, the storage unit is formed with a communication port that communicates the inside and the outside. as at least a part of the driving link to the communication port when extended to the set length is inserted, it is also possible to configure the working device unit and the working device housed in the housing portion.

Thus, when the arm device is extended to a preset length, at least a part of the drive arm portion is inserted into the communication port, and the working device is compared with a configuration in which the drive arm portion is not inserted into the communication port. units and working devices as possible out be miniaturized.

  ADVANTAGE OF THE INVENTION According to this invention, the arm apparatus which can make a front end side thin compared with the past can be provided.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(First embodiment)
First, the configuration of the arm device according to the first embodiment will be described.

  1 to 6, the arm device 100 according to the present embodiment includes a drive arm unit 110 that rotates around a rotation shaft 111 when driven, and a drive arm unit 110 that rotates according to the rotation of the drive arm unit 110. A driven arm portion 130 that rotates relative to the driving arm portion 110 and a synchronous link portion 150 that synchronizes the rotation of the driving arm portion 110 and the driven arm portion 130 are provided.

Here, the drive arm unit 110 has a base 121, a link 122 supported by the base 121 so as to be rotatable around the rotation shaft 111, and a rotation at the rotation shaft 112 that is different from the rotation shaft 111. It has a supported link 123 ( a link that is part of the drive arm) , a link 122 and a link 124 (a common link) that is rotatably connected to the link 123, and includes a base 121, a link 122, and a link 123. The parallel link mechanism is configured by the link 124.

  The driven arm unit 130 includes a link 124, a link 141 and a link 142 that are rotatably connected to the link 124, and a hand attachment unit that is rotatably connected to the link 141 and the link 142 and attaches a hand (not shown). 143, and the link 124, the link 141, the link 142, and the hand attachment portion 143 constitute a parallel link mechanism.

In addition, the synchronization link unit 150 is rotatably connected to the link 124, the link 123, the link 124, and the link 142 ( three link portions integrally provided as a part of each of them; see FIGS. 2 and 5 ) . A link 161 (second link), a link 162 (third link) rotatably connected to the link 142 and link 161, and a link 163 (first link) rotatably connected to the link 123 and link 161 Link).

  The link 123, the link 124, the link 142, the link 161, the link 162, and the link 163 are connected to each other so that the link 123 and the link 142 rotate in the opposite direction in synchronization with the link 124. The unit 150 is configured to synchronize the rotation of the drive arm unit 110 and the driven arm unit 130 by the link 123, the link 124, the link 142, the link 161, the link 162, and the link 163.

  In addition, the link 161, the link 162, and a part of the link 163 of the synchronous link unit 150 are on the opposite side to the driven arm unit 130 side with respect to the drive arm unit 110 in the direction indicated by the arrow 111a in which the rotating shaft 111 extends. Has been placed.

  Further, the drive arm portion 110 is formed with a notch 122a through which a part of the link 161 overlapped in the direction indicated by the arrow 111a is passed on the opposite side to the driven arm portion 130 side in the direction indicated by the arrow 111a.

  The arm device 100 is simplified as shown in FIG.

  Next, the operation of the arm device according to the present embodiment will be described.

  When the link 122 is rotated about the rotation shaft 111 with respect to the base 121 by a motor (not shown), the drive arm portion 110 rotates about the rotation shaft 111.

  When the drive arm unit 110 rotates about the rotation axis 111, the synchronization link unit 150 synchronizes the rotation of the drive arm unit 110 and the driven arm unit 130, so that the driven arm unit 130 follows the rotation of the drive arm unit 110. Rotates relative to part 110.

  Therefore, the arm device 100 can contract as shown in FIG. 1 or extend as shown in FIG. 4 when the link 122 is rotated about the rotation shaft 111 with respect to the base 121 by the motor. it can. The arm device 100 can not only advance the hand mounting portion 143 with respect to the base 121 as shown in FIG. 4 from the state shown in FIG. 1, but also can attach the hand to the base 121 from the state shown in FIG. The part 143 can also be retracted.

  Further, when the base 121 is rotated around the rotation shaft 111 by a motor (not shown) different from the motor that rotates the link 122 relative to the base 121, the arm device 100 itself rotates around the rotation shaft 111. .

  As described above, the arm device 100 includes one of the link 161, the link 162, and the link 163 of the synchronous link unit 150 on the opposite side of the driven arm unit 130 with respect to the drive arm unit 110 in the direction indicated by the arrow 111a. 6 and 7, as shown in FIGS. 6 and 7, the end 130a of the driven arm portion 130 opposite to the driving arm portion 110 side and the driving arm portion 110 opposite to the driven arm portion 130 side are opposite to each other. The thickness 101 in the direction indicated by the arrow 111a with the side end 110a can be reduced as compared with the conventional case, and the tip side can be reduced as compared with the conventional case.

  Further, the arm device 100 has a notch 122a through which the driving arm 110 passes a part of the link 161 that overlaps in the direction indicated by the arrow 111a on the side opposite to the driven arm 130 in the direction indicated by the arrow 111a. Because of this, the end 150a of the synchronous link portion 150 disposed on the opposite side of the driven arm portion 130 side with respect to the driven arm portion 110 and the opposite end 150a of the driven arm portion 130 is provided. The thickness 102 in the direction indicated by the arrow 111a with the end 130a opposite to the drive arm portion 110 side is compared with the case where the drive arm portion 110 does not have the notch 122a. It can be made small while maintaining.

  The arm device 100 includes the synchronization link unit 150 in the present embodiment. However, according to the present invention, as long as the rotation of the drive arm unit 110 and the driven arm unit 130 is synchronized by the link, Instead of the synchronization link unit 150, another synchronization link unit may be provided. For example, the arm device 100 may include a synchronization link unit 930 as shown in FIG.

(Second Embodiment)
The configuration of the arm device according to the second embodiment will be described.

  In FIG. 8, the arm device 200 according to the present embodiment rotates with respect to the drive arm unit 210 according to the rotation of the drive arm unit 210 that rotates around the rotation shaft 211 when driven, and the drive arm unit 210. The driven arm unit 230 includes a plurality of links that are rotatably connected to each other, and a synchronization link unit 250 that synchronizes the rotation of the drive arm unit 210 and the driven arm unit 230 with the links.

  The drive arm unit 210, the driven arm unit 230, and the synchronization link unit 250 are configured as described below with reference to the drive arm unit 110, the driven arm unit 130, and the synchronization link unit 150 of the arm device 100 shown in FIG. It is the same as that of the structure. Therefore, in the following, only the configurations different from the configurations of the drive arm unit 110, the driven arm unit 130, and the synchronous link unit 150 among the configurations of the drive arm unit 210, the driven arm unit 230, and the synchronous link unit 250 will be described.

  The synchronous link portion 250 is disposed between the drive arm portion 210 and the driven arm portion 230 in the direction indicated by the arrow 211a in which the rotation shaft 211 extends.

  Further, the drive arm unit 210 is formed with a notch 222a that passes at least a part of the link of the synchronous link unit 250 overlapped in the direction indicated by the arrow 211a between the driven arm unit 230 in the direction indicated by the arrow 211a. ing.

  Note that the operation of the arm device 200 according to the present embodiment is substantially the same as the operation of the arm device 100 according to the first embodiment, and thus description thereof is omitted.

  As described above, the arm device 200 includes at least one of the links of the synchronous link unit 250 in which the driving arm unit 210 overlaps with the driven arm unit 230 in the direction indicated by the arrow 211a in the direction indicated by the arrow 211a. Since the notch 222a for passing the part is formed, the end 230a of the driven arm part 230 opposite to the drive arm part 210 side and the end 210a of the drive arm part 210 opposite to the driven arm part 230 side are provided. The thickness 201 in the direction indicated by the arrow 211a can be reduced as compared with the conventional one while maintaining the rigidity of the drive arm portion 210, and the tip side can be reduced in thickness as compared with the conventional one.

  According to the present invention, the driven arm unit 230 passes at least a part of the link of the synchronous link unit 250 overlapped with the drive arm unit 210 in the direction indicated by the arrow 211a in the direction indicated by the arrow 211a. A notch may be formed.

(Third embodiment)
The configuration of the arm device according to the third embodiment will be described.

  9 and 10, the arm device 260 according to the present embodiment is the same as the driving arm unit 110 (see FIGS. 4 and 6) in the arm device 100 according to the first embodiment (see FIGS. 4 and 6). Is replaced with the drive arm portion 270. Therefore, in the configuration of the arm device 260, the same configuration as the configuration of the arm device 100 is denoted by the same reference numeral as the configuration of the arm device 100, and detailed description thereof is omitted.

  The drive arm unit 270 is obtained by replacing the link 122 (see FIGS. 4 and 6) with the link 271 in the drive arm unit 110 (see FIGS. 4 and 6).

  The configuration of the link 122 and the configuration of the link 271 are the same except for the configuration described below.

  The link 122 is formed with a notch 122a (see FIGS. 4 and 6) through which a part of the link 161 overlapped in the direction indicated by the arrow 111a passes on the opposite side to the driven arm portion 130 side in the direction indicated by the arrow 111a. In contrast, in the link 271, a groove 271 a that allows a part of the link 161 and the link 163 to pass therethrough is formed in the center portion in the direction indicated by the arrow 111 a.

  Note that the operation of the arm device 260 according to the present embodiment is substantially the same as the operation of the arm device 100 according to the first embodiment, and a description thereof will be omitted.

  As described above, the arm device 260 has the groove 271a through which the drive arm portion 270 passes at least a part of the synchronous link portion 150. Therefore, the arm device 260 is different from the drive arm portion 270 side of the driven arm portion 130. The thickness in the direction indicated by the arrow 111a between the opposite end 130a and the end 270a opposite to the driven arm portion 130 side of the drive arm portion 270 can be reduced as compared with the conventional case. Thus, the tip side can be made thinner.

(Fourth embodiment)
The configuration of the arm device according to the fourth embodiment will be described.

  11 and 12, the arm device 280 according to the present embodiment is the same as the driving arm unit 110 (see FIGS. 4 and 6) in the arm device 100 according to the first embodiment (see FIGS. 4 and 6). Is replaced with the drive arm portion 290. Therefore, in the configuration of the arm device 280, the same configuration as the configuration of the arm device 100 is denoted by the same reference numeral as the configuration of the arm device 100, and detailed description thereof is omitted.

  The drive arm unit 290 is obtained by replacing the link 122 (see FIGS. 4 and 6) with a link 291 in the drive arm unit 110 (see FIGS. 4 and 6).

  The configuration of the link 122 and the configuration of the link 291 are the same except for the configuration described below.

  The link 122 is formed with a notch 122a (see FIGS. 4 and 6) through which a part of the link 161 overlapped in the direction indicated by the arrow 111a passes on the opposite side to the driven arm portion 130 side in the direction indicated by the arrow 111a. In contrast, the link 291 has a groove 291a through which a part of the link 161 passes.

  Note that the operation of the arm device 280 according to the present embodiment is substantially the same as the operation of the arm device 100 according to the first embodiment, and a description thereof will be omitted.

  As described above, the arm device 280 has the groove 291a through which the driving arm unit 290 passes at least a part of the synchronous link unit 150. Therefore, the arm device 280 is different from the driving arm unit 290 side of the driven arm unit 130. The thickness in the direction indicated by the arrow 111a between the opposite end 130a and the end 290a of the drive arm 290 opposite to the driven arm portion 130 can be reduced as compared with the conventional case. Thus, the tip side can be made thinner.

(Fifth embodiment)
The fifth embodiment is configured as a working device including the arm device according to the first embodiment .

  13 to 15, the working device 300 according to the present embodiment includes an arm device 100 according to the first embodiment and a storage chamber (main chamber) 315 a in which the arm device 100 is stored. And a working unit 310 having a storage portion 315. The storage unit 315 is provided with a communication port 316, a communication port 317, and a communication port 318 that allow the storage chamber 315a to communicate with the outside.

  In addition, the working device 300 is housed via the gate 321 that opens and closes the communication port 316, the gate 322 that opens and closes the communication port 317, the gate 323 that opens and closes the communication port 318, and the communication port 316. A communication portion 330 in which a communication chamber (side chamber) 330a communicating with the chamber 315a is formed, and a communication portion in which a communication chamber (side chamber) 340a communicating with the storage chamber 315a through the communication port 317 is formed. 340.

  Here, the storage chamber 315a, the communication chamber 330a, and the communication chamber 340a are decompressed by a decompression device (not shown).

The communication chamber 330a and the communication chamber 340a accommodate a processing apparatus (not shown) that processes wafers.

  Further, as shown in FIGS. 14 and 15, the arm device 100 has a storage chamber 315 a at a position where at least a part of the drive arm unit 110 is inserted into the communication port 316 when the arm device 100 extends beyond a preset length. It is stored in.

  Further, although not shown, the arm device 100 has a hand attached to the hand attachment portion 143.

  Next, the operation of the work device according to the present embodiment will be described.

  When the arm device 100 is in the state shown in FIG. 13, the gate portion 323 is opened, and a device (not shown) installed outside the storage portion 315 is armed via the communication port 318 and the gate portion 323 of the storage portion 315. After the wafer is held by the hand of the apparatus 100, the gate unit 323 is closed.

  When the gate portion 323 is closed, the arm device 100 itself rotates about 90 degrees in the direction indicated by the arrow 191 around the rotation shaft 111 and stops.

  When the arm device 100 stops rotating, the gate portion 321 opens, and the arm device 100 extends as shown in FIGS. 14 and 15 and enters the communication chamber 330a via the communication port 316 of the storage portion 315 and the gate portion 321. After moving the front end side to convey the wafer to the processing apparatus and contracting to move the front end side to the storage chamber 315a, the gate portion 321 is closed.

  When the gate unit 321 is closed, the processing apparatus starts processing the wafer.

  When the processing of the wafer by the processing apparatus is completed, the gate unit 321 is opened, and the arm apparatus 100 expands again to move the tip side to the communication chamber 330a, receives the wafer from the processing apparatus, contracts, and moves to the storage chamber 315a. After moving the side, the gate portion 321 is closed.

  When the gate unit 321 is closed, the arm device 100 itself rotates about 90 degrees in the direction indicated by the arrow 192 around the rotation shaft 111 and stops, and similarly to the wafer processing by the processing apparatus accommodated in the communication chamber 330a, Wafer processing is also performed by the processing apparatus accommodated in the communication chamber 340a.

  When the processing of the wafer by the processing apparatus stored in the communication chamber 340a is completed, the gate unit 323 is opened, and an apparatus (not shown) installed outside the storage unit 315 is connected to the communication port 318 and the gate of the storage unit 315. A wafer is received from the hand of the arm apparatus 100 via the unit 323.

  As described above, the arm device 100 is stored in the storage unit 315 at a position where at least a part of the drive arm unit 110 is inserted into the communication port 316 when the arm device 100 extends to a preset length. The storage unit 315 can reduce the volume as compared with a configuration in which the drive arm unit 110 is not inserted into the communication port 316. Therefore, the work unit 310 and the work device 300 can be reduced in size as compared with the configuration in which the drive arm unit 110 is not inserted into the communication port 316, and the burden on the decompression device that decompresses the storage chamber 315a is reduced. be able to.

  Further, as described above, since the arm device 100 can be made thinner on the tip side compared to the conventional one, the working unit 310 and the working device 300 have the rotating shaft 111 extending as shown in FIG. The width 316a of the communication port 316 in the direction indicated by the arrow 111a can be reduced compared to the conventional case.

  In the present embodiment, the working unit 310 and the working device 300 are configured such that the arm device 100 itself rotates and expands and contracts. However, according to the present invention, the arm device 100 itself does not rotate and is simply rotated. The structure which performs only expansion / contraction may be sufficient.

  Further, in the present embodiment, the work unit 310 and the work device 300 include the arm device 100 according to the first embodiment, but according to the present invention, the arm device according to the second embodiment. 200 (see FIG. 8), an arm device 260 (see FIG. 9) according to the third embodiment, or an arm device 280 (see FIG. 11) according to the fourth embodiment is provided instead of the arm device 100. Also good.

The top view in the state where the arm device concerning the 1st embodiment of the present invention contracted Schematic configuration diagram of the arm device in the state shown in FIG. Side view of the arm device viewed from the direction indicated by arrow A in FIG. FIG. 1 is a top view of the arm device shown in FIG. 1 in an extended state. Schematic configuration diagram of the arm device in the state shown in FIG. Side view of the arm device viewed from the direction indicated by arrow B in FIG. Schematic diagram of the arm device shown in FIG. Schematic diagram of an arm device according to a second embodiment of the present invention The top view in the state where the arm device concerning the 3rd embodiment of the present invention extended. The side view of the arm device seen from the direction shown by arrow C in FIG. The top view in the state where the arm device concerning the 4th embodiment of the present invention extended. The side view of the arm apparatus seen from the direction shown by the arrow D of FIG. Top surface sectional drawing of the working device which concerns on the 5th Embodiment of this invention FIG. 13 is a top sectional view of the working device in a state different from the state shown in FIG. Sectional drawing of the working device seen from the direction shown by arrow E in FIG. Schematic configuration diagram of a conventional arm device Schematic diagram of the arm device shown in FIG.

Explanation of symbols

100 Arm device 110 Drive arm part (parallel link mechanism)
111 Rotating shaft
122 links (links placed parallel to some links)
122a notch ( notch formed on the side opposite to the driven arm side)
123 link (part of link of drive arm)
124 common link 130 driven arm part (parallel link mechanism)
150 Synchronous link section
161 link (second link, multiple links)
162 links (third link, multiple links)
163 links (first link, multiple links)
200 Arm device 210 Drive arm part (parallel link mechanism)
211 Rotating shaft 222a Notch ( notch formed on the driven arm portion side of the drive arm portion)
230 Follower arm (parallel link mechanism)
250 Synchronous link portion 260 Arm device 270 Drive arm portion (parallel link mechanism)
271 links (links placed parallel to some links)
271 a groove (notch formed in drive arm)
300 working device 310 working unit 315 storage unit 316 communication port 330 communication unit

Claims (2)

A drive arm portion that rotates around a rotation shaft on the base end side by being driven;
A follower arm portion rotatably supported on the distal end side of the drive arm portion and disposed on one side in a direction in which the rotation shaft extends with respect to the drive arm portion;
A plurality of links that are rotatably connected to each other and overlap in a direction in which the rotation shaft extends, and when the driving arm unit is driven, the driving arm unit and the driven arm unit are connected by the plurality of links; A synchronization link unit that rotates in the opposite direction in synchronization with each other,
The drive arm unit and the driven arm unit are each configured as a parallel link mechanism and extend and contract using a common link that is a part of each parallel link mechanism as a joint,
The plurality of links of the synchronous link portion are configured such that a part of the link of the drive arm portion and a portion of the link of the driven arm portion that are rotatably connected to the common link are opposite to each other with respect to the common link. And having three link parts integrally provided as a part of the common link, a part of the link of the drive arm part, and a part of the link of the driven arm part so as to rotate in synchronization with the direction. a first link rotatably connected to a part of the link of the drive arm, a second link rotatably coupled to the first link and the common link, the A third link rotatably connected to a second link and a part of the link of the driven arm portion;
The first link , the second link, and the third link are disposed on a side opposite to the driven arm portion side with respect to the drive arm portion in a direction in which the rotation shaft extends. A feature arm device. The first link, the second link, and the third link of the synchronous link portion move relative to the common link when the drive arm portion and the driven arm portion contract. The arm device according to claim 1, wherein the arm device is arranged on a side to be operated.

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