JP4895406B2 - Magnetic head suspension - Google Patents

Description

  The present invention relates to a magnetic head suspension for supporting a magnetic head slider that reads and / or writes data to a storage medium such as a hard disk.

  As the capacity of magnetic disk drives increases, the accuracy of positioning of the magnetic head slider with respect to the target track is required. For this reason, in addition to the coarse movement of the magnetic head slider in the seek direction by the main actuator such as a voice coil motor. Thus, a magnetic head suspension is proposed that includes a pair of piezoelectric members that act as sub-actuators, and that enables fine movement of the magnetic head slider in the seek direction by the pair of piezoelectric members (see, for example, Patent Documents 1 to 3 below). ).

  Specifically, the magnetic head suspension includes a load bending portion that generates a load for pressing the magnetic head slider toward the disk surface, a load beam portion for transmitting the load to the magnetic head slider, and the load bending. A support part that supports the load beam part via a part and is swung directly or indirectly around a rocking center by a main actuator, and the load beam part and the support part in a state of supporting the magnetic head slider. And a pair of piezoelectric members attached to the support portion.

  The support portion is positioned between the proximal end region and the distal end region with respect to the longitudinal direction of the suspension, a proximal end region connected directly or indirectly to the main actuator, a distal end region to which the load bending portion is connected, and the suspension longitudinal direction. And a pair of left and right connecting beams connecting the base end region and the tip end region on the outer side in the suspension width direction from the opening region.

  Each of the pair of piezoelectric members includes a piezoelectric main body, a voltage supply side electrode layer, and a ground side electrode layer, and extends or extends in a direction orthogonal to the thickness direction according to voltage application to the pair of electrode layers. Shorten.

  In the magnetic head suspension, the pair of piezoelectric members are fixed to the tip region in a state in which the pair of piezoelectric members are symmetrical with respect to each other with respect to the center line in the longitudinal direction of the suspension and have different expansion / contraction directions with respect to each other. A proximal end portion is fixed to the proximal end region.

  In the magnetic head suspension having such a configuration, by applying a voltage between the pair of electrode layers of the pair of piezoelectric members to extend one piezoelectric member and shorten the other piezoelectric member, The distal end region can be swung in the seek direction with respect to the proximal end region while elastically deforming the connecting beam, and thereby the load bending portion, the load beam portion, and the flexure portion are provided in the distal end region. The magnetic head slider supported via the head can be finely moved in the seek direction.

  By the way, in order to simplify the structure for applying a voltage to the pair of piezoelectric members, a voltage supply wiring is provided in the wiring integrated flexure portion while using the wiring integrated flexure portion as the flexure portion, and the voltage supply wiring is provided. A configuration has been proposed in which a voltage is supplied to the voltage supply-side electrode layer via the.

  Specifically, the wiring integrated flexure portion is in a state in which the head mounting area for supporting the magnetic head slider on the side close to the disk surface and the side opposite to the disk surface are in contact with the load beam portion and the support portion. A flexure metal substrate including a main body region to be fixed, an insulating layer laminated on a surface of the flexure metal substrate facing the disk surface, one end electrically connected to the magnetic head slider, and the other end externally And a signal wiring laminated on a surface of the insulating layer facing the disk surface in a state where it can be electrically connected to the disk.

  The wiring-integrated flexure portion having such a configuration includes the voltage supply wiring on the side opposite to the disk surface in the insulating layer, and the ground-side electrode layer is located above (side away from the disk surface). In addition, a configuration is proposed in which the piezoelectric member is disposed so that the voltage supply side electrode layer is positioned below (on the side close to the disk surface), and voltage is supplied to the voltage supply side electrode layer from the voltage supply wiring. ing.

  However, in the conventional magnetic head suspension, sufficient consideration has not been made in terms of preventing the voltage supply side electrode layer from contacting the support portion. When the voltage supply side electrode layer is in contact with and short-circuited with the support portion generally formed of a conductive metal plate such as stainless steel, the piezoelectric member can be applied even when a voltage is applied between the pair of electrode layers. Can not be stretched.

  Specifically, in the magnetic head suspension described in Patent Documents 1 to 3, the tip region of the support portion is provided with a tip-side receiving portion that opens on the opposite side to the disk surface and opens in the opening region. In the base end region of the support portion, a base end side receiving portion that opens on the upper side opposite to the disk surface and in the opening region is provided.

  In the magnetic head suspensions described in Patent Documents 1 and 2, the front end side notch for cutting off the upper surface of the front end region opposite to the disk surface and the edge intersecting the base end surface facing the base end side in the longitudinal direction of the suspension. A base-side cutout portion is formed to cut out an edge where the top surface opposite to the disk surface of the base end region and the front end surface facing the front end side in the longitudinal direction of the suspension intersect. The distal end side notch portion and the proximal end side notch portion constitute the distal end side receiving portion and the proximal end side receiving portion, respectively.

On the other hand, in the magnetic head suspension described in Patent Document 3, the tip side plate is fixed to the lower surface (the surface facing the disk surface) of the tip region so that at least a part thereof is located in the opening region in plan view. In addition, a base-side support plate is fixed to the lower surface of the base end region so that at least a part thereof is located in the opening region in plan view.
In Patent Document 3, the distal end receiving portion is formed by the proximal end surface of the distal end region facing the suspension longitudinal direction proximal end side and the distal end plate, and the distal end of the proximal end region facing the distal end side of the suspension longitudinal direction. The base end side receiving portion is formed by the surface and the base end plate.

  In the magnetic head suspension described in Patent Documents 1 to 3, the piezoelectric member includes a piezoelectric body, the voltage supply-side electrode layer provided on the lower surface of the piezoelectric body facing the disk surface, and the piezoelectric member. The ground-side electrode layer provided on the upper surface of the main body facing away from the disk surface, and the ground-side electrode layer and the voltage supply-side electrode layer are respectively corresponding to the entire upper surface and the lower surface. It is the size that covers.

  The piezoelectric member includes a lower surface facing the disk surface of the voltage supply side electrode layer and the distal end between a distal end surface facing the distal end side in the longitudinal direction of the suspension and a proximal end surface facing the suspension proximal end side of the distal end side receiving portion. Between the upper surface of the side receiving portion facing away from the disk surface, between the proximal end surface facing the suspension longitudinal direction proximal end side and the distal end surface of the proximal end side receiving portion facing the suspension distal end side, and the voltage The supply side electrode layer is fixed to the support portion by an insulating adhesive interposed between a lower surface facing the disc surface of the supply side electrode layer and an upper surface facing the disc surface of the base end side receiving portion. .

In other words, in the magnetic head suspensions described in Patent Documents 1 to 3, the distal end side and the proximal end side of the voltage supply side electrode layer are connected to the upper surface of the distal end side receiving portion and the proximal end side receiver via an insulating adhesive. It is fixed to the upper surface of each part.
Accordingly, when the parallelism of the piezoelectric element to the support portion is lost during the mounting operation of the piezoelectric element to the support portion, the voltage supply side electrode layer is intended to serve as the distal end side receiving portion and the proximal end side receiving portion. On the contrary, there is a problem that a situation in which they are in contact with each other or a situation in which both of them are too close to each other to maintain insulation (insulation deterioration occurs) is likely to occur.

JP 2002-251854 A JP 2009-080915 A JP 2002-050140 A

The present invention has been made in view of the above prior art, and is a magnetic head suspension capable of performing fine movement of the magnetic head slider by expansion and contraction of a pair of left and right piezoelectric members in addition to coarse movement of the magnetic head slider by a main actuator. The piezoelectric member is grounded on the piezoelectric body and the voltage supply side electrode layer provided on the lower surface of the piezoelectric body close to the disk surface and the upper surface of the piezoelectric body on the side separated from the disk surface. In the magnetic head suspension having the side electrode layer, the voltage supply side electrode layer can be effectively prevented from being short-circuited, and the manufacturing process of the pair of piezoelectric members can be simplified and voltage can be supplied to the voltage supply side electrode layer. purpose of providing a magnetic head suspension to obtain achieving simplification of the electrical connection structure for grounding the electrical connection structure and the ground-side electrode layer To.

In order to achieve the above object, the present invention provides a load bending portion for generating a load for pressing the magnetic head slider toward the disk surface, a load beam portion for transmitting the load to the magnetic head slider, The load beam is supported in a state of supporting the load beam portion through a load bending portion and swinging in a seek direction around a swing center directly or indirectly by a main actuator, and the magnetic head slider is supported. And the flexure part supported by the support part and the magnetic head slider to be finely moved in the seek direction so that they are symmetrical with respect to the suspension longitudinal center line and have different expansion / contraction directions with respect to each other. A magnetic head suspension comprising a pair of left and right piezoelectric members mounted on a support, wherein the support is A proximal end region connected directly or indirectly to the actuator, a distal end region to which the load bending portion is connected, an opening region located between the proximal end region and the distal end region in the suspension longitudinal direction, in suspension width direction outward side of the aperture region and a pair of connecting beams connecting between said proximal region and said distal region, said pair of piezoelectric members, each in the piezoelectric body and before Symbol piezoelectric body a voltage supply side electrode layer provided on the lower surface of the piezoelectric body so as to form a lower surface of the tip and distal exposed surface base end is exposed and the proximal side exposed surface of the side close to the disk surface before SL as the the disk surface in the piezoelectric body to have a and provided on the upper surface of the opposite grounded electrode layers are formed by a single piezoelectric member forming body, wherein the piezoelectric member forming body A piezoelectric body forming body integrally including the piezoelectric body in the pair of piezoelectric members; a voltage supply side electrode layer forming body forming the voltage supply side electrode layer in the pair of piezoelectric members; and the pair of piezoelectric members. At least one of the voltage supply side electrode layer formation body and the ground side electrode layer formation body with respect to the suspension longitudinal center line. A pair of electrode plates arranged symmetrically with respect to each other and electrically separated from each other, each of which forms a corresponding electrode layer of the pair of piezoelectric members; The piezoelectric member is placed at a predetermined mounting position so that the voltage supply side electrode layer is located in the opening region in plan view with the voltage supply side electrode layer facing the disk surface. When positioned, there are provided a distal end side support surface and a proximal end side support surface that face the distal end side exposed surface and the proximal end side exposed surface, respectively, and the piezoelectric member includes the distal end side exposed surface and the proximal end exposed surface. Directly or indirectly fixed to the support portion through an insulating adhesive interposed between the distal end support surface and between the proximal end exposed surface and the proximal end support surface. The piezoelectric member forming body has a ground wiring that is electrically connected to the ground-side electrode layer forming body having one end disposed on the upper surface and has the other end positioned on the lower surface to form a ground terminal. to provide a magnetic head suspension are.

The piezoelectric main body may have a thick portion, and a distal end side thin portion and a proximal end side thin portion extending from the thick portion to the distal end side and the proximal end side in the suspension longitudinal direction.
The thick portion includes a base region located substantially at the same position as the thin portion with respect to the thickness direction, and a bulging region extending from the base region to one side in the thickness direction.

In one aspect, the voltage supply side electrode layer is such that the surface on one side in the thickness direction of the distal end side thin portion and the proximal end thin portion acts as the distal end exposed surface and the proximal end exposed surface. It is provided on the surface on one side in the thickness direction of the bulging region.
Of the upper surface of the tip region and the base region opposite to the disk surface, at least a portion adjacent to the opening region functions as the tip side support surface and the base end side support surface.

In another embodiment, in the voltage supply side electrode layer, at least a part of the surface on the other side in the thickness direction of the distal end side thin portion and the proximal end thin portion is the distal end side exposed surface and the proximal end exposed surface. It is provided on the surface of the piezoelectric body on the other side in the thickness direction so as to act.
The front end region is provided with a front end receiving portion that opens on the opposite side to the disk surface and opens to the opening region, and the proximal end region has an upper side opposite to the disk surface and the proximal end side that opens on the opening region. A receiving part is provided.
The upper surfaces of the distal end side receiving portion and the proximal end side receiving portion opposite to the disk surface act as the distal end side support surface and the proximal end side support surface.

Good Mashiku, the piezoelectric body forming body, to that the polarization direction of a portion forming the piezoelectric body of the piezoelectric member polarized direction and the other part forming the piezoelectric body of one of the piezoelectric member is different Is done.

The voltage supply side electrode layer forming body is a pair of electrode plates that are arranged symmetrically with respect to each other with respect to a suspension longitudinal center line and are electrically separated from each other. It may have a pair of electrode plates that respectively form the voltage supply side electrode layers.
The ground terminal of the ground wiring is positioned between the pair of electrode plates in the suspension width direction.

  Preferably, a portion of the ground wiring located on the lower surface of the piezoelectric member forming body extends in the suspension width direction using the distal end side exposed surface or the proximal end side exposed surface.

  According to the magnetic head suspension of the present invention, each of the pair of piezoelectric members includes the piezoelectric body, the voltage supply-side electrode layer provided on the lower surface of the piezoelectric body close to the disk surface, and the piezoelectric body. A ground-side electrode layer provided on the upper surface opposite to the disk surface, and the voltage supply-side electrode layer is exposed at the distal end side and the proximal end side of the lower surface of the piezoelectric body, Provided on the lower surface of the piezoelectric body so as to form a proximal-side exposed surface, and on the support portion of the magnetic head suspension, when the piezoelectric member is positioned at a predetermined mounting position, the distal-side exposed surface and A distal end side support surface and a proximal end side support surface that are respectively opposed to the proximal end side exposed surface are provided, and the piezoelectric member is disposed between the distal end side exposed surface and the distal end side support surface and the proximal end side. Exposed surface and base Since it is directly or indirectly fixed to the support part via an insulating adhesive interposed between the side support surface and the voltage supply side electrode layer, it is effective to cause a short circuit unexpectedly. Can be prevented.

According to the magnetic head suspension of the present invention, the pair of piezoelectric members includes a piezoelectric body forming body integrally including the piezoelectric body in the pair of piezoelectric members and the voltage supply side electrode in the pair of piezoelectric members. Since the voltage supply side electrode layer formation body for forming the layer and the ground side electrode layer formation body for forming the ground side electrode layer in the pair of piezoelectric members are formed by a single piezoelectric member formation body, The manufacturing process of the pair of piezoelectric members can be simplified.

Furthermore, according to the magnetic head suspension of the present invention, the piezoelectric member forming body is electrically connected to the ground-side electrode layer forming body having one end disposed on the upper surface and the other end is disposed on the lower surface. Since a ground wiring is provided to form a ground terminal, the electrical connection structure for supplying a voltage to the voltage supply side electrode layer and the electrical connection structure for grounding the ground side electrode layer are simplified. Can be achieved.

FIG. 1 is a top perspective view of a magnetic head suspension according to Comparative Example 1 of the present invention. 2A and 2B are a top view and a bottom view of the magnetic head suspension according to the comparative example 1, respectively. FIG. 3 is a cross-sectional view taken along line III-III in FIG. 4 is a top perspective view of a pair of piezoelectric members in the magnetic head suspension according to the comparative example 1. FIG. 5A and 5B are a top view and a side view of the piezoelectric member, respectively. FIG. 6 is a top view of the magnetic head suspension according to the comparative example 1 with the pair of piezoelectric members removed. FIG. 7 is a cross-sectional view corresponding to FIG. 3 in a state including a collet used when the piezoelectric member is attached to the support portion. FIGS. 7 (a) and 7 (b) are respectively views of the collet. An example and another example are shown. 8A to 8D are flowcharts of an example of a method for manufacturing the piezoelectric member in the magnetic head suspension according to the comparative example 1. FIG. FIGS. 9A to 9D are flowcharts of an example of a manufacturing method of a modified example of the piezoelectric member. FIG. 10 is an upper perspective view of the magnetic head suspension 2 according to the comparative example 2 of the present invention. 11A and 11B are a top view and a bottom view of the magnetic head suspension according to the comparative example 2, respectively. FIG. 12 is a sectional view taken along line XII-XII in FIG. FIG. 13 is an upper perspective view of a pair of piezoelectric members in the magnetic head suspension according to the comparative example 2. FIG. 14A and 14B are a top view and a side view of the piezoelectric member shown in FIG. 13, respectively. FIGS. 15A and 15B are a top view and a bottom view, respectively, of the magnetic head suspension according to the comparative example 2 with the pair of piezoelectric members removed. FIG. 16 is a cross-sectional view corresponding to FIG. 12 in a state including an example and other examples of the collet. FIGS. 17A to 17C are a perspective view, a side view, and a bottom view, respectively, of the piezoelectric member forming body with the ground wiring removed . FIGS. 18A to 18D are a perspective view, a top view, a side view, and a bottom view, respectively, of the piezoelectric member forming body provided with the ground wiring .

Below, the preferred embodiment of the magnetic head suspension according to the present invention will be described with reference to the accompanying drawings.
FIG. 1 is a perspective view of a magnetic head suspension 1 according to a comparative example viewed from the upper side opposite to the disk surface.
FIGS. 2A and 2B are a top view (a plan view seen from the side opposite to the disk surface) and a bottom view (a bottom view seen from the disk surface side) of the magnetic head suspension 1, respectively. Show. Further, FIG. 3 shows a cross-sectional view taken along line III-III in FIG.

  As shown in FIGS. 1 to 3, the magnetic head suspension 1 includes a load bending portion 20 that generates a load for pressing the magnetic head slider toward the disk surface, and the load to the magnetic head slider (not shown). The load beam portion 30 is transmitted to the load bending portion 20, and the load beam portion 30 is supported via the load bending portion 20, and directly or indirectly around the oscillation center by a main actuator in a seek direction parallel to the disk surface. A swinging support portion 10, a flexure portion 40 supported by the load beam portion 30 and the support portion 10 while supporting the magnetic head slider, and a suspension for finely moving the magnetic head slider in the seek direction. The support portion is symmetrical with respect to each other with respect to the longitudinal center line CL and has different expansion / contraction directions with respect to each other. And a pair of right and left piezoelectric member 60 attached to 0.

  The support portion 10 is a member that supports the load beam portion 30 via the load bending portion 20 in a state where the support portion 10 is directly or indirectly connected to the main actuator such as a voice coil motor. It is supposed to have.

In the illustrated embodiment, the support portion 10 is a base plate provided with a boss portion 15 that is joined to the tip of a carriage arm (not shown) connected to the main actuator by caulking.
The support part 10 is preferably formed by a stainless plate having a thickness of 0.1 mm to 0.8 mm, for example.

  As shown in FIGS. 1 and 2, the support portion 10 includes a proximal end region 11 that is directly or indirectly connected to the main actuator, a distal end region 12 to which the load bending portion 20 is connected, and a suspension longitudinal length. A pair of left and right openings connecting the base region 11 and the tip region 12 on both sides in the suspension width direction of the opening region 13 with respect to the direction, the opening region 13 located between the base region 11 and the tip region 12. The connecting beam 14 includes a pair of left and right connecting beams 14 that are symmetrical with respect to the suspension longitudinal center line CL.

In the illustrated embodiment, as shown in FIGS. 2A and 2B, the support portion 10 includes the distal end region 12, the pair of connecting beams 14, the proximal end region 11, and the boss portion 15. The first support portion forming plate 10 (1) and the second support portion forming plate 10 (2) joined to the portion forming the base end region 11 of the first support portion forming plate 10 (1). ).

As described above, the load beam portion 30 is a member for transmitting the load generated by the load bending portion 20 to the magnetic head slider, and therefore requires a predetermined rigidity.
In the illustrated embodiment, as shown in FIGS. 1 and 2, the load beam portion 30 is formed by bending a flat plate-like main body portion 31 from both ends in the width direction of the main body portion 31 to the side opposite to the disk surface. The flange portion 32 is provided, and the flange portion 32 ensures rigidity.
The load beam portion 30 is preferably formed by a stainless plate having a thickness of 0.02 mm to 0.1 mm, for example.

Specifically, the load beam portion 30 has a protrusion 35 called a so-called dimple at the tip.
The protrusion 35 protrudes, for example, about 0.05 mm to 0.1 mm in a direction close to the disk surface. The protrusion 35 is in contact with the back surface (the surface opposite to the disk surface) of the head mounting area 43 in the flexure section 40, and the load is applied to the head mounting area 43 of the flexure section 40 through the protrusion 35. Is transmitted to.

In the illustrated embodiment, the load beam portion 30 further integrally has a lift tab 34 that extends from the distal end of the main body portion 31 toward the distal end side in the suspension longitudinal direction. The lift tab 34 engages with a ramp provided in the magnetic disk device when the magnetic head suspension 1 is swung by the main actuator so that the magnetic head slider is positioned radially outward of the disk surface. And a member for separating the magnetic head slider from the disk surface along the z direction (a direction perpendicular to the disk surface).

  The load bending portion 20 has a proximal end portion connected to the support portion 10 and a distal end portion connected to the load beam portion 30, and the magnetic head slider is directed to the disk surface based on its own elastic deformation. A pressing load is generated.

As shown in FIGS. 1 and 2, in the illustrated embodiment, the load bending portion 20 has a pair of left and right leaf springs 21 disposed so that the plate surface faces the disk surface.
Preferably, the pair of leaf springs 21 are bent in advance in a direction in which the magnetic head slider approaches the disk surface before the magnetic head suspension 1 is mounted on the magnetic disk device, and the magnetic head The suspension 1 is configured to generate the pressing load by being bent back when mounted on the magnetic disk device.

The load bending part 20 is formed of, for example, a stainless plate having a thickness of 0.02 mm to 0.1 mm.
In the illustrated embodiment, as shown in FIGS. 1 and 2, the load bending portion 20 is formed integrally with the load beam portion 30.

That is, the magnetic head suspension 1 according to the comparative example 1 has a load beam portion / load bending portion forming member that integrally forms the load beam portion 30 and the load bending portion 20, and the load beam portion / load bending portion. In a state where the upper surface of the portion forming member opposite to the disk surface is in contact with the lower surface of the support section 10 facing the disk surface in the tip region 12, the load beam portion forming member is supported by the support portion 10. It is welded to.

The flexure unit 40 is joined to the load beam unit 30 and the support unit 10 while supporting the magnetic head slider.
Specifically, as shown in FIG. 2 (b), the flexure portion 40 includes a body region 41 joined by welding or the like to a surface of the load beam portion 30 and the support portion 10 facing the disk surface, A pair of support pieces 42 extending from the main body region 41 to the distal end side and the head mounting region 43 supported by the support pieces 42 are provided.

The head mounting area 43 supports the magnetic head slider on a surface facing the disk surface.
As described above, the protrusion 35 is in contact with the back surface of the head mounting area 43. Therefore, the head mounting area 43 can flexibly swing in the roll direction and the pitch direction with the protrusion 35 as a fulcrum. It has become.
The flexure portion 40 is made to be less rigid than the load beam portion 30 so that the head mounting region 43 can swing in the roll direction and the pitch direction.
The flexure portion 40 is preferably formed by a stainless plate having a thickness of about 0.01 mm to 0.025 mm, for example.

In the comparative example , the flexure unit 40 is integrally provided with a signal wiring for transmitting a write signal and / or a read signal to the magnetic head slider as a printed circuit.
That is, the flexure unit 40 includes a flexure metal substrate 400 integrally including the main body region 41, the pair of support pieces 42, and the head mounting region 43, and a flexure wiring body 410 laminated on the flexure metal substrate 400. have.
The flexure wiring body 410 includes an insulating layer 411 (see FIG. 3) stacked on a surface of the flexure metal substrate 400 facing the disk surface, and a signal wiring stacked on the surface of the insulating layer 411 facing the disk surface. 412 (see FIG. 2B) and a protective layer (not shown) surrounding the signal wiring 412.

In the illustrated embodiment, the flexure metal substrate 400 includes the body region 31 of the load beam portion 30, the tip region 12 of the support portion 10, and the support portion 10 as shown in FIG. Each is joined to the base region 11 by welding.

FIG. 4 shows a perspective view of the pair of piezoelectric members 60 as viewed from above, which is opposite to the disk surface.
5A and 5B are a top view (a plan view seen from the side opposite to the disk surface) and a side view of the piezoelectric member 60, respectively.

As shown in FIGS. 4 and 5, the piezoelectric member 60 includes a piezoelectric body 61 made of PZT (lead zirconate titanate), a voltage supply side electrode layer 65, and a ground side electrode layer 66. .
The piezoelectric body 61 has a thickness of 0.05 mm to 0.3 mm, for example, and the electrode layers 65 and 66 are made of Ag or Au having a thickness of 0.05 μm to several μm, for example.

  The pair of piezoelectric members 60 have a distal end portion and a proximal end portion connected to the distal end region 12 and the proximal end region 11 of the support portion 10, respectively, with respect to each other with respect to the suspension longitudinal center line CL. Are arranged so that the directions of expansion and contraction are different from each other.

  In other words, one of the pair of piezoelectric members 60 expands and the other shortens in accordance with the voltage applied between the voltage supply side electrode layer 65 and the ground side electrode layer 66, thereby the tip region 12. Is moved in the seek direction with respect to the base end region 11, and the magnetic head slider can be finely moved in the seek direction.

In the illustrated form, the voltage supply side electrode layer 65 is disposed on the lower surface of the piezoelectric body 61 on the side close to the disk surface.
This is to simplify the voltage supply structure to the voltage supply side electrode layer 65.

  That is, as shown in FIGS. 2B and 3, the flexure portion 40 further includes a voltage supply wiring 415 laminated on a surface of the insulating layer 411 facing the disk surface in addition to the components. Have.

FIG. 6 shows a top view of the magnetic head suspension with the pair of piezoelectric members 60 removed.
As shown in FIGS. 3 and 6, in the illustrated embodiment, the voltage supply wiring 415 is opposed to the voltage supply side electrode layer 65 through an opening formed at one end of the insulating layer 411. The one end is electrically connected to the voltage supply side electrode layer 65 through a conductive adhesive 95.
3 and 6 is a member that surrounds a part or front of the opening in order to suppress the spread of the conductive adhesive 65, and is formed of, for example, metal.

On the other hand, the ground electrode layer 66 is disposed on the upper surface of the piezoelectric body 61 opposite to the disk surface, as shown in FIGS. 3 and 5B.
In the illustrated embodiment, the ground-side electrode layer 66 is connected to the support portion 10 (in the illustrated embodiment, the tip end) via a conductive adhesive 97, as shown in FIGS. It is electrically connected to region 12).

Further, the magnetic head suspension 1 according to the illustrated embodiment has the following configuration in order to effectively prevent a short circuit of the voltage supply side electrode layer 65.

  That is, as shown in FIGS. 3 and 5 (b), the voltage supply side electrode layer 65 has the lower surface of the piezoelectric body 61 exposed at the distal end side and the proximal end side, and the distal end side exposed surface 61F and the base surface are exposed. It is provided on the lower surface of the piezoelectric body 61 so as to form the end-side exposed surface 61R.

  On the other hand, the piezoelectric member 60 is predetermined on the support portion 10 so that the voltage supply side electrode layer 65 faces the disk surface and the voltage supply side electrode layer 65 is located in the opening region 13 in plan view. A distal end side support surface 10F and a proximal end side support surface 10R that face the distal end side exposed surface 61F and the proximal end side exposed surface 61R, respectively, are provided.

In the illustrated form, as shown in FIG. 3, a portion of the upper surface of the distal end region 12 adjacent to the opening region 13 acts as the distal end side support surface 10 </ b> F, and of the upper surface of the proximal end region 11, A portion adjacent to the opening region 13 acts as the base end side support surface 10R.

  As shown in FIG. 3, the piezoelectric member 60 is formed between the distal end side exposed surface 61F and the distal end side support surface 10F, and between the proximal end side exposed surface 61R and the proximal end side support surface 10R. It is directly or indirectly fixed to the support portion 10 via insulating adhesives 90F and 90R inserted between the two.

Thus, in the magnetic head suspension 1 according to the comparative example 1 , the distal-side exposed surface 61F in which the voltage supply-side electrode layer 65 does not exist on the distal end side and the proximal end side of the lower surface of the piezoelectric body 61 and The proximal-side exposed surface 61R is provided, and the distal-side exposed surface 61F and the proximal-side exposed surface 61R are insulative adhesive on the distal-side supporting surface 10F and the proximal-side supporting surface 10R of the support portion 10. It is fixed via 90F and 90R.
According to such a configuration, it is possible to effectively prevent the voltage supply-side electrode layer 65 from coming into contact with the support portion 10 and causing a short circuit.

Furthermore, the magnetic head suspension 1 according to the comparative example 1 has the following configuration.
That is, as shown in FIGS. 3 and 4, the piezoelectric body 61 includes a thick part 62, a distal-side thin part 63 </ b> F extending from the thick part 62 to the distal end side and the proximal end side in the suspension longitudinal direction, and the proximal end. It has a side thin portion 63R.
The thick portion 62 includes a base region 62 (1) positioned substantially at the same position as the thin portions 63F and 63R in the thickness direction, and a bulging region 62 (1) extending from the base region 62 (1) to one side in the thickness direction. 2).

  With respect to the piezoelectric body 61 having such a configuration, the voltage supply-side electrode layer 65 has a surface on one side in the thickness direction of the distal-side thin portion 63F and the proximal-side thin portion 63R and the distal-side exposed surface 61F. It is provided only on the surface on one side in the thickness direction of the bulging region 62 (2) so as to act as the base end side exposed surface 61R.

  The surface on one side in the thickness direction of the distal end side thin portion 63F is fixed to the upper surface of the distal end region 12 of the support portion 10 via the insulating adhesive 90F, and the thickness direction of the proximal end side thin portion 63R. The surface on one side is fixed to the upper surface of the base end region 11 of the support portion 10 via the insulating adhesive 90R, so that the bulging region 62 (2) is in the opening region 13 in the thickness direction. The piezoelectric member 60 is mounted on the support portion 10 with the voltage supply side electrode layer 65 positioned on the side close to the disk surface.

  According to the magnetic head suspension 1 having such a configuration, the pair of piezoelectric members 60 with respect to the support portion 10 while positioning at least a part of the pair of piezoelectric members 60 in the opening region 13 in the thickness direction. The accuracy with respect to the mounting position can be improved.

That is, the expansion / contraction operation of the pair of piezoelectric members 60 is transmitted to the distal end region 12 as a force that swings the distal end region 12 with respect to the proximal end region 11 in a direction parallel to the disk surface. Oscillates in a direction parallel to the disk surface, so that the magnetic head slider moves in the seek direction.
Therefore, from the viewpoint of efficiently transmitting the expansion / contraction operation of the pair of piezoelectric members 60 to the tip region 12, the pair of piezoelectric members 60 is positioned in the opening region 13 as much as possible in the thickness direction. Is desirable.

  The mounting operation of the piezoelectric member 60 to the support portion 10 can be performed by moving the piezoelectric member 60 to a predetermined mounting position in a state where the piezoelectric member 60 is sucked and held. This is performed using a collet that can be released and place the piezoelectric member 60 on a predetermined mounting position of the support portion 10.

  Specifically, the piezoelectric member 60 includes a collet 500A having a tapered positioning surface 510A (see FIG. 7A) or a collet 500B having a positioning surface 510B defined by a horizontal plane and a vertical plane (see FIG. 7B). The piezoelectric member 60 is moved to a predetermined mounting position of the support portion 10 by sucking and holding, and thereafter the piezoelectric member 60 is applied with the insulating adhesives 90F and 90R by releasing the suction. The support unit 10 is placed and fixed at a predetermined mounting position.

  Therefore, in order to accurately position the piezoelectric member 60 at the mounting position, it is necessary to accurately control the holding position when the piezoelectric member 60 is held by the collets 500A and 500B.

In this regard, in the magnetic head suspension 1 according to the comparative example 1 , the state in which the bulging region 62 (2) is positioned in the opening region 13 in the thickness direction is used as a reference in FIGS. As shown in the drawing, the upper end edge 64F where the upper surface of the thin end portion 63F and the front end surface facing the front end in the longitudinal direction of the suspension intersect is above the upper surface of the front end region 12 (on the side away from the disk surface). The base end side upper edge 64R that is located and intersects the upper surface of the base end side thin portion 63R and the base end surface facing the base end side in the longitudinal direction of the suspension is above the upper surface of the base end region 11 (separated from the disk surface). Is located).

  Therefore, the bulging region 62 (2) is used in the thickness direction with respect to the opening region while the distal upper edge 64F and the proximal upper edge 64R are used as positions positioned by the collet positioning surfaces 510A and 510B. 13 can be located.

8A to 8D are flowcharts showing an example of a method for manufacturing the piezoelectric member 60. FIG.
In the first step shown in FIG. 8A, a wafer 161 for forming the piezoelectric body 61 is prepared.
In the second step shown in FIG. 8B, the first conductive member 165 for forming the voltage supply side electrode layer 65 on the first end surface corresponding to the lower surface of the piezoelectric body 61 among the both end surfaces of the wafer 161. The second conductive member 166 for forming the ground-side electrode layer 66 on the second end surface corresponding to the upper surface of the piezoelectric body 61 among the both end surfaces of the wafer 161 is provided by sputtering or vapor deposition.

In the illustrated embodiment, the ground-side electrode layer 66 is not in the entire upper surface of the piezoelectric body 61 but in a region facing the voltage supply-side electrode layer 65 (that is, as shown in FIG. 5B). , Only on the upper surface of the thick portion 62.
Therefore, the formation of the second conductive member 166 in the second step is performed in a state where the ground-side electrode layer 66 covers an unnecessary region with a mask.

  Next, in a third step shown in FIG. 8C, dicing is performed from the first end face side of the wafer 161, and the thin portion 163 corresponding to the distal end side thin portion 63F and the proximal end thin portion 63R. A piezoelectric member assembly 160 is formed by connecting a plurality of piezoelectric members 60 via the.

  Then, in the fourth step shown in FIG. 8D, the thin portion 163 is cut to form a plurality of the piezoelectric members 60 from the piezoelectric member assembly 160.

In the illustrated embodiment, as described above, the piezoelectric member 60 has the ground-side electrode layer 66 only in a region facing the voltage supply-side electrode layer 65 on the upper surface of the piezoelectric body 61. .
Therefore, in the second step, the second conductive member that forms the ground-side electrode layer 66 after the mask is disposed on the second end surface of the wafer 161 corresponding to the upper surface of the piezoelectric body 61. 166 is provided on the second end face of the wafer 161 by vapor deposition or sputtering.

Instead of the piezoelectric member 60, a piezoelectric member 60 ′ in which the ground side electrode layer 66 is provided over the entire upper surface of the piezoelectric body 61 may be employed.
FIGS. 9A to 9D are flowcharts showing an example of a method for manufacturing the piezoelectric member 60 ′.
As shown in FIG. 9B, the masking in the second step is eliminated in the method for manufacturing the piezoelectric member 60 ′.

Below, another comparative example of a magnetic head suspension according to the present invention will be described with reference to the accompanying drawings.
FIG. 10 is a perspective view of the magnetic head suspension 2 according to the comparative example 2 as viewed from above, which is the side opposite to the disk surface.
FIGS. 11A and 11B are a top view (a plan view seen from the side opposite to the disk surface) and a bottom view (a bottom view seen from the disk surface side) of the magnetic head suspension 2, respectively. Show. Further, FIG. 12 shows a cross-sectional view along the line XII-XII in FIG.
In the figure, the same members as those in Comparative Example 1 are denoted by the same reference numerals, and detailed description thereof is omitted.

The magnetic head suspension 2 according to the comparative example 2 has a pair of piezoelectric members 60B instead of the pair of piezoelectric members 60 with the magnetic head suspension 1 according to the comparative example 1 as a reference.

FIG. 13 is a perspective view of the pair of piezoelectric members 60B as viewed from above, which is the opposite side to the disk surface.
14A and 14B show a top view (a plan view seen from the side opposite to the disk surface) and a side view of the piezoelectric member 60B, respectively.

13 and 14, the piezoelectric member 60B includes a piezoelectric body 61, a voltage supply side electrode layer 65, and a ground side electrode layer 66. The piezoelectric body 61 includes the thick portion 62 and the thick wall portion. A distal end-side thin portion 63F extending from the portion 62 toward the suspension longitudinal direction distal end, a proximal-side thin portion 63R extending from the thick portion 62 toward the suspension longitudinal direction proximal end, and the thick portion 62 includes a base region 62 (1) located substantially at the same position as the thin portions 63F and 63R in the thickness direction, and a bulging region 62 (2) extending from the base region 62 (1) to one side in the thickness direction. And in common with the piezoelectric member 60 in the first comparative example .

On the other hand, in the piezoelectric member 60B, as shown in FIGS. 13 and 14, the voltage supply-side electrode layer 65 has a surface on the other side in the thickness direction of the piezoelectric body 61 (that is, the bulging region 62 (2)). And at least a part of the surface on the other side in the thickness direction of the distal-side thin portion 63F and the proximal-side thin portion 63R is provided on the distal-side exposed surface 61F and the proximal end. The piezoelectric member 60 is different from the piezoelectric member 60 in the comparative example 1 in that it functions as the side exposed surface 61R.

That is, in the magnetic head suspension 2 according to the comparative example 2 , as shown in FIG. 12, in the piezoelectric member 60B, the bulging area 62 (2) is separated from the disk surface more than the base area 62 (1). It is mounted on the support portion 10 so as to be located in the opening region 13 of the support portion 10 in a plan view in a state where the support portion 10 is located on the side to be operated (that is, the upper side).

That is, in Comparative Example 2 , in the state where the surface on the other side in the thickness direction of the piezoelectric body 61 is close to the disk surface (that is, in the state where the base region 62 (1) faces the disk surface), The entire piezoelectric member 60B is located in the opening region 13 in plan view.

In the magnetic head suspension 2 having such a configuration, at least a part of the surface of the piezoelectric body 61 on the other side in the thickness direction of the distal-side thin portion 63F and the proximal-side thin portion 63R is the distal-side exposed surface 61F. It acts as the base end side exposed surface 61R.
That is, in the voltage supply side electrode layer 65, at least a part of the surface on the other side in the thickness direction of the distal end side thin portion 63R and the proximal end side thin portion 63R is the distal end side exposed surface 61F and the proximal end side exposed surface. The piezoelectric body 61 is provided on the other surface in the thickness direction so as to act as 61R.

  On the other hand, the front end region 12 of the support portion 10 is provided with a front end side receiving portion 19F that opens both on the upper side opposite to the disk surface and in the opening region 13, and is provided in the base end region 11 of the support portion 10. Is provided with a base-side receiving portion 19R that opens on both the upper side opposite to the disk surface and the opening area 13.

FIGS. 15A and 15B are a top view and a bottom view of the magnetic head suspension 2 with the pair of piezoelectric members 60B removed, respectively.
As shown in FIGS. 12 and 15, in Comparative Example 2 , the support portion 10 is near the proximal edge of the distal end region 12 in a state where at least a part is located in the opening region 13 in plan view. The distal end side support plate 120 fixed to the lower surface (opposite surface to the disk surface) of the support portion 10 so as to be positioned at the base portion, and the base end in a state where at least a part is located in the opening region 13 in plan view A proximal-side support plate 110 fixed to the lower surface (the surface facing the disk surface) of the support portion 10 is provided so as to be positioned in the vicinity of the distal-end edge of the region 11.

The distal end side support plate 120 cooperates with the distal end region 12 to form the distal end side receiving portion 19F.
That is, as shown in FIG. 12, in Comparative Example 2 , the top surface of the front end side support plate 120 (the surface opposite to the disk surface) and the end surface of the front end region 12 facing the base end side in the suspension longitudinal direction are used. The tip side receiving portion 19F is formed.

The base end side support plate 110 cooperates with the base end region 11 to form the base end side receiving portion 19R.
That is, as shown in FIG. 12, in Comparative Example 2 , the upper surface (surface opposite to the disk surface) of the base end side support plate 110 and the end surface of the base end region 11 facing the suspension longitudinal front end side. Thus, the base end side receiving portion 19R is formed.

In Comparative Example 2 , as shown in FIG. 15 (b), the distal end side support plate 120 is integrally formed with the load beam portion 30 and the load bending portion 20.
That is, the magnetic head suspension 2 includes a load beam portion / load bending portion / tip-side support plate forming member that integrally forms the load beam portion 30, the load bending portion 20, and the tip-side support plate 120. .

  On the other hand, the base end side support plate 110 is integrally formed with the second support portion forming plate 10 (2) forming the support portion 10, as shown in FIG. 15 (b).

In Comparative Example 2 , as described above, the support portion 10 includes the distal end side support plate 120 and the proximal end side support plate 110, and the end surface of the distal end region 12 facing the suspension longitudinal direction proximal end side and the The distal end receiving portion 19F is formed by the upper surface of the distal end side support plate 120, and the proximal end is formed by the end surface facing the distal end side in the suspension longitudinal direction of the proximal end region 11 and the upper surface of the proximal end side support plate 110. Although the side receiving portion 19R is formed, other configurations are possible .

  That is, although not shown in the drawings, a distal end side notch portion is formed by notching a region including a proximal end upper edge where the upper surface of the distal end region 12 and the proximal end surface facing the longitudinal direction of the suspension intersect. Forming a notch on the base end side that cuts out a region including an upper edge on the tip end side where the upper surface of the base end region 11 and the tip end surface facing the tip end in the longitudinal direction of the suspension intersect, It is also possible to form the distal end side receiving portion 19F and the proximal end side receiving portion 19R by the proximal end side cutout portion.

With respect to the support portion 10 having such a configuration, as shown in FIG. 12, the surface on the other side in the thickness direction of the distal end side thin portion 63F acting as the distal end side exposed surface 61F is interposed through the insulating adhesive 90F. The surface on the other side in the thickness direction of the proximal-side thin portion 63R that is fixed to the upper surface of the distal-side receiving portion 19F that acts as the distal-side support surface 10F and that acts as the proximal-side exposed surface 61R It is fixed to the upper surface of the base end side receiving portion 19R acting as the base end side support surface 10R via an insulating adhesive 90R.
According to the magnetic head suspension 2 having such a configuration, as in the comparative example 1, it is possible to effectively prevent a short circuit of the voltage supply side electrode layer 65.

  Furthermore, in the magnetic head suspension 2, as shown in FIG. 12, in the state where the piezoelectric member 60 B is located at the mounting position, the distal-side upper edge 62 F and the proximal-side upper side of the bulging region 62 (2) The edge 62R is separated from the proximal-side upper edge of the distal end region 12 and the distal-side upper edge of the proximal end region.

  According to such a configuration, as shown in FIGS. 12, 16 (a) and 16 (b), the top side where the top surface of the bulging area 62 (2) and the tip surface facing the tip side in the suspension longitudinal direction intersect The upper edge 62F and the upper surface 62A of the collet 500A, 500B are positioned by the positioning surface 510A, 510B of the base end side where the upper surface of the bulging area 62 and the base end surface facing the base end in the longitudinal direction of the suspension intersect. The piezoelectric member 60B can be positioned in the opening region 13 as much as possible in the thickness direction while being sucked and held by the collets 500A and 500B while being used as a part.

Accordingly, also in the magnetic head suspension 2 according to the comparative example 2 , as in the comparative example 1, the pair of piezoelectric members 60B are positioned in the opening region 13 as much as possible in the thickness direction, and the support portion Thus, the accuracy of the mounting position of the pair of piezoelectric members 60 </ b> B with respect to 10 can be improved.

Incidentally, in the above Comparative Examples, the although the pair of piezoelectric members 60 (60B) are separate bodies with respect to each other, in this embodiment, before Symbol pair of piezoelectric members 60 (60B) is a single the piezoelectric member forming body that are integrally formed.

17 (a) to 17 (c) respectively show a lower perspective view, a side view, and a bottom view of the piezoelectric member forming body 600 in a state where the following ground wiring 710 is deleted .
As shown in FIG. 17, prior Ki圧 conductive member forming body 600 includes a piezoelectric body forming body 610 having the piezoelectric body 61 in the pair of piezoelectric members 60 (60B) integrally, said pair of piezoelectric members 60 ( 60B), a voltage supply side electrode layer forming body 650 that forms the voltage supply side electrode layer 65, and a ground side electrode layer forming body 660 that forms the ground side electrode layer 66 in the pair of piezoelectric members 60 (60B). Is included.

At least one of the voltage supply side electrode layer forming body 650 and the ground side electrode layer forming body 660 (in the illustrated form, the voltage supply side electrode layer forming body 650) is mutually connected with respect to the suspension longitudinal center line CL. A pair of electrode plates 671 and 672 arranged symmetrically with respect to each other and electrically separated from each other, and corresponding electrode layers of the pair of piezoelectric members 60 (60B) (in the illustrated form, the voltage supply) Each of the side electrode layers 65) has a pair of electrode plates 670.
Thus, by using the piezoelectric member forming body 600 in which the pair of piezoelectric members 60 (60B) are integrated, the manufacturing process can be simplified.

  The other of the voltage supply side electrode layer formation body 650 and the ground side electrode layer formation body 660 (the ground side electrode layer 660 in the illustrated embodiment) may have a single electrode plate. Or a pair of electrode plates arranged symmetrically with respect to each other with respect to the center line CL in the longitudinal direction of the suspension and electrically separated from each other, and corresponding electrode layers (illustrated) of the pair of piezoelectric members In this embodiment, it is also possible to have a pair of electrode plates that respectively form the ground side electrode layer 66).

Preferably, a polarization direction of a portion of the piezoelectric body forming body 610 forming the piezoelectric body 61 of the one piezoelectric member 60 (60B) and the piezoelectric body 61 of the other piezoelectric member 60 (60B) are formed. The polarization direction of the part can be made different.
According to such a preferable configuration, by applying the same voltage to the voltage supply side electrode layer 65 of the pair of piezoelectric members 60 (60B), one of the pair of piezoelectric members 60 (60B) is extended, and the other Can be compressed.

18 (a) to 18 (d) respectively show a lower perspective view, a top view, a side view, and a bottom view of the piezoelectric member forming body 700 in a state where the ground wiring 710 is provided .

  Specifically, one end of the ground wiring 710 is electrically connected to the ground-side electrode layer forming body 660 disposed on the upper surface (the surface opposite to the disk surface) of the piezoelectric member forming body 700; The other end portion forms a ground terminal 715 disposed on the lower surface (the surface facing the disk surface) of the piezoelectric member forming body 700.

According to prior Symbol piezoelectric member forming body 700, the piezoelectric member forming both the electrical connection structure for grounding the electrical connection and the ground-side electrode layer 66 for supplying a voltage to the voltage supply side electrode layer 65 It can be provided on the lower surface (surface facing the disk surface) side of the body 700, whereby the electrical connection structure can be simplified.

As shown in FIG. 18, prior Symbol piezoelectric member forming body 700, the voltage supply side electrode layer formed body 650, electric against and to each other are arranged symmetrically with respect to each other with respect to the suspension longitudinal center line CL A pair of voltage supply side electrode plates 651 and 652, which are separated from each other, and which form the voltage supply side electrode layer 65 of the pair of piezoelectric members 60 (60B), respectively. have.

In such a configuration, preferably, the ground terminal 715 is disposed between the pair of voltage supply side electrode plates 651 and 652 in the suspension width direction.
According to such a configuration, the presence of the grounding electrical connection structure connected to the ground terminal 715 provides the movement characteristics of the magnetic head slider in the seek direction due to the expansion and contraction of the pair of piezoelectric members 60 (60B). It can prevent effectively inhibiting.

In prior Symbol piezoelectric member forming body 700, as shown in FIG. 18 (a) and (d), a portion located on the lower surface of the piezoelectric member forming body 700 of the ground line 710, the distal-side exposed surface 61F Alternatively, the base end side exposed surface 61R is used to extend in the suspension width direction.
According to such a configuration, the ground terminal 715 can be positioned between the pair of voltage supply side electrode plates 651 and 652 in the suspension width direction without increasing the size of the piezoelectric member forming body 700.

1, 2 Magnetic head suspension 10 Support portion 10F Tip side support surface 10R Base end side support surface 11 Base end region 12 Tip region 13 Open region 14 Connecting beam 19F Tip side receiving portion 19R Base end receiving portion 20 Load bending portion 30 Load Beam section 40 Flexure sections 60, 60 ', 60B Piezoelectric member 61 Piezoelectric body 61F Tip side exposed surface 61R Base end side exposed surface 62 Thick part 62 (1) Base region 62 (2) Swelling region 63F Tip side thin part 63R Base side thin-walled portion 65 Voltage supply side electrode layer 66 Ground side electrode layers 90F, 90R Insulating adhesive 600, 700 Piezoelectric member forming body 610 Piezoelectric body forming body 650 Voltage supply side electrode layer forming body 651, 652 Electrode plate 660 Ground Side electrode layer forming body 671, 672 Electrode plate 710 Ground wiring 715 Ground terminal

Claims (6)

A load bending part for generating a load for pressing the magnetic head slider toward the disk surface, a load beam part for transmitting the load to the magnetic head slider, and supporting the load beam part via the load bending part And a support portion that is swung directly or indirectly by a main actuator in a seek direction around a swing center, and a flexure portion that is supported by the load beam portion and the support portion while supporting the magnetic head slider. A pair of left and right piezoelectric members mounted on the support portion so as to be symmetrical with respect to each other with respect to the longitudinal center line of the suspension and to have different expansion / contraction directions with respect to each other in order to finely move the magnetic head slider in the seek direction; A magnetic head suspension comprising:
The support portion is positioned between the proximal end region and the distal end region with respect to the longitudinal direction of the suspension, a proximal end region connected directly or indirectly to the main actuator, a distal end region to which the load bending portion is connected, and the suspension longitudinal direction. And a pair of left and right connecting beams that connect between the base end region and the tip end region on the outer side in the suspension width direction from the opening region,
The pair of piezoelectric members, so that each forms a piezoelectric body and before Symbol lower surface of the tip and distal exposed surface base end is exposed on the side close to the disk surface in the piezoelectric body and the proximal end side exposed surface said to have a and provided on the upper surface of the opposite grounded electrode layer and the disk surface in the voltage supply side electrode layer and the front Symbol piezoelectric body provided on the lower surface of the piezoelectric body, a single piezoelectric Formed by a member forming body,
The piezoelectric member forming body includes a piezoelectric body forming body integrally including the piezoelectric body in the pair of piezoelectric members, and a voltage supply side electrode layer forming body that forms the voltage supply side electrode layer in the pair of piezoelectric members. A ground-side electrode layer forming body that forms the ground-side electrode layer in the pair of piezoelectric members,
At least one of the voltage supply side electrode layer formation body and the ground side electrode layer formation body is a pair of electrodes disposed symmetrically with respect to each other with respect to the suspension longitudinal center line and electrically separated from each other A pair of electrode plates that respectively form corresponding electrode layers of the pair of piezoelectric members;
The piezoelectric member is positioned at a predetermined mounting position on the support portion so that the voltage supply side electrode layer is located in the opening region in a plan view with the voltage supply side electrode layer facing the disk surface. A distal end side support surface and a proximal end side support surface respectively facing the distal end side exposed surface and the proximal end side exposed surface are provided,
The piezoelectric member is interposed between the distal-side exposed surface and the distal-side support surface and through an insulating adhesive interposed between the proximal-side exposed surface and the proximal-side support surface. Fixed directly or indirectly to the support ,
The piezoelectric member forming body includes a ground wiring that is electrically connected to the ground-side electrode layer forming body having one end disposed on the upper surface and that has the other end positioned on the lower surface to form a ground terminal. Magnetic head suspension characterized by that. The piezoelectric body has a thick portion, a distal-side thin portion and a proximal-side thin portion extending from the thick portion to the distal end side and the proximal side in the suspension longitudinal direction,
The thick portion includes a base region located substantially at the same position as the thin portion in the thickness direction, and a bulging region extending from the base region to one side in the thickness direction,
The voltage supply-side electrode layer is formed in the bulging region such that the surface on one side in the thickness direction of the distal-side thin portion and the proximal-side thin portion acts as the distal-side exposed surface and the proximal-side exposed surface. It is provided on the surface on one side in the thickness direction,
Of the upper surface opposite to the disk surface of the distal end region and the proximal end region, at least a portion adjacent to the opening region functions as the distal end side support surface and the proximal end side support surface. The magnetic head suspension according to claim 1. The piezoelectric body has a thick portion, a distal-side thin portion and a proximal-side thin portion extending from the thick portion to the distal end side and the proximal side in the suspension longitudinal direction,
The thick portion includes a base region located substantially at the same position as the thin portion in the thickness direction, and a bulging region extending from the base region to one side in the thickness direction,
The voltage supply side electrode layer is configured such that at least a part of the surface on the other side in the thickness direction of the distal end side thin portion and the proximal end thin portion acts as the distal end exposed surface and the proximal end exposed surface. It is provided on the surface on the other side in the thickness direction of the piezoelectric body,
The front end region is provided with a front end receiving portion that opens on the opposite side to the disk surface and opens to the opening region, and the proximal end region has an upper side opposite to the disk surface and the proximal end side that opens on the opening region. A receiving part is provided,
The upper surface on the opposite side to the disk surface of the said front end side receiving part and the said base end side receiving part is acting as the said front end side support surface and the said base end side support surface. Magnetic head suspension. The piezoelectric body forming body is characterized in that a polarization direction of a portion of the one piezoelectric member forming the piezoelectric body is different from a polarization direction of a portion of the other piezoelectric member forming the piezoelectric body. The magnetic head suspension according to claim 1 . The voltage supply side electrode layer forming body is a pair of electrode plates that are arranged symmetrically with respect to each other with respect to a suspension longitudinal center line and are electrically separated from each other. A pair of electrode plates each forming the voltage supply side electrode layer;
Magnetic head suspension according to any one of claims 1 to 4, characterized in that said ground terminal of the grounding line is located in the pair of electrode plates relates suspension width direction. Portion positioned on the lower surface of the piezoelectric member forming body out of the ground wiring to claim 5, characterized in that extending in the suspension width direction by using the distal end side exposed surface or the proximal end side exposed surface The magnetic head suspension described.

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