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JP4851214B2 - Package substrate division method - Google Patents

Package substrate division method Download PDF

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JP4851214B2
JP4851214B2 JP2006083737A JP2006083737A JP4851214B2 JP 4851214 B2 JP4851214 B2 JP 4851214B2 JP 2006083737 A JP2006083737 A JP 2006083737A JP 2006083737 A JP2006083737 A JP 2006083737A JP 4851214 B2 JP4851214 B2 JP 4851214B2
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cutting
cutting blade
package substrate
dividing
package
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JP2007258590A (en
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高志 渡邊
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Disco Corp
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    • H01L2224/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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    • H01L24/42—Wire connectors; Manufacturing methods related thereto
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    • H01L24/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Dicing (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)

Description

本発明は、デバイス側に突出して電極が形成された分割予定ラインによって複数のデバイスが区画され形成されたパッケージ基板を、切削ブレードによって切削し個々のパッケージデバイスに分割するとともに電極を各パッケージデバイス毎に分極するパッケージ基板の分割方法に関するものである。   The present invention cuts a package substrate on which a plurality of devices are partitioned and formed by a dividing line in which electrodes are formed so as to protrude toward the device side by using a cutting blade to divide the package substrate into individual package devices, and to separate the electrodes for each package device. The present invention relates to a method for dividing a package substrate that is polarized.

従来から、ＩＣ，ＬＳＩ等のデバイスが形成されたパッケージ基板は、ダイシング装置などの分割装置によって個々のパッケージデバイスに分割され、携帯電話、パソコン等の電子機器に利用される。   Conventionally, a package substrate on which devices such as IC and LSI are formed is divided into individual package devices by a dividing device such as a dicing device, and is used for electronic devices such as mobile phones and personal computers.

ここで、デバイスは、例えばＱＦＮ（Quad Flat Non-leaded Package）と称される技術によってパッケージングされる。ＱＦＮと称されるこの技術は、デバイスが配設される領域を区画する分割予定ラインに沿って複数の電極が形成された厚みが１５０μｍ程度の金属枠体と、分割予定ラインによって区画された領域に配設された複数のデバイスと、複数のデバイスが配設された側に樹脂が充填されて形成された厚みが５００μｍ程度の樹脂層と、でデバイスをパッケージングするというものである。   Here, the device is packaged by a technique called QFN (Quad Flat Non-leaded Package), for example. This technique, called QFN, has a metal frame having a thickness of about 150 μm in which a plurality of electrodes are formed along a planned division line that divides a region where devices are arranged, and a region defined by the planned division line. The device is packaged with a plurality of devices disposed on the substrate and a resin layer having a thickness of about 500 μm formed by filling the resin on the side where the plurality of devices are disposed.

このようなＱＦＮによって構成されたパッケージ基板は、パッケージの樹脂充填工程後のダイシング工程で切削ブレードによって分割予定ラインを切削することにより個々のデバイス毎に分割される（例えば、特許文献１参照）。   The package substrate constituted by such QFN is divided into individual devices by cutting a division line by a cutting blade in a dicing process after the resin filling process of the package (see, for example, Patent Document 1).

特開２００３−１２４４２１号公報（図１）Japanese Patent Laying-Open No. 2003-124421 (FIG. 1) 特開２００５−３９０８８号公報JP 2005-39088 A

しかしながら、ダイシング装置の切削手段に装着された切削ブレードを分割予定ラインに位置づけて分割予定ラインを切削して個々のパッケージデバイス毎に分割すると、柔らかくて延性を有する電極の切断部にバリが発生して隣接する電極同士が短絡するという問題がある。また、電極の切削端部が盛り上がりデバイスの品質が低下するという問題がある。   However, if the cutting blade mounted on the cutting means of the dicing machine is positioned on the planned dividing line and the planned dividing line is cut and divided into individual package devices, burrs are generated in the soft and ductile electrode cutting part. There is a problem that adjacent electrodes are short-circuited. Moreover, there is a problem that the cutting edge of the electrode is raised and the quality of the device is lowered.

ここで、切削ブレードによる分割予定ラインの切削速度を低下させてゆっくり切削すれば、切断部におけるバリの発生を抑制し得るものの、バリの発生をなくすことはできない。また、切削速度を低下させる分、パッケージデバイスの生産性が低下してしまう。   Here, if the cutting speed of the line to be divided by the cutting blade is reduced and the cutting is performed slowly, the generation of burrs at the cut portion can be suppressed, but the generation of burrs cannot be eliminated. In addition, the productivity of the package device is reduced by the reduction in the cutting speed.

また、切削ブレードで切削した後に、切削ブレードよりも軟質で同等以上の幅を有するバリ除去用の切削ブレード等により切削部分をなぞることによりバリを除去するようにした対応策もある（例えば、特許文献２参照）。しかしながら、特許文献２のものは、一旦発生したバリを除去するためのバリ除去工程を備えるもので、バリ除去を完全に行うためには、バリ除去工程を極力丁寧に行う必要があり、パッケージデバイスの生産性が低下してしまう。   There is also a countermeasure that removes burrs by tracing the cutting portion with a cutting blade for removing burrs that is softer than the cutting blade and has a width equal to or greater than that after cutting with the cutting blade (for example, patents) Reference 2). However, Patent Document 2 includes a burr removal process for removing a burr once generated. In order to completely remove the burr, it is necessary to perform the burr removal process as carefully as possible. Productivity will be reduced.

本発明は、上記に鑑みてなされたものであって、分割予定ラインの切削による分割時にバリの発生を極力抑えてパッケージデバイスの生産性を向上させることができるパッケージ基板の分割方法を提供することを目的とする。   The present invention has been made in view of the above, and provides a package substrate dividing method capable of improving the productivity of a package device by suppressing the generation of burrs as much as possible at the time of division by cutting a planned division line. With the goal.

上述した課題を解決し、目的を達成するために、本発明に係るパッケージ基板の分割方法は、デバイス側に突出して電極が形成された分割予定ラインによって複数のデバイスが区画され形成されたパッケージ基板を保持し、送り機構によって移動可能な移動基台に支持された回転可能なチャックテーブルと、前記パッケージ基板を支持するダイシングフレームと、前記ダイシングフレームを支持するフレームクランプと、前記分割予定ラインを規制する間隔で切刃が２枚配されて前記パッケージ基板に規制溝形成を行う第一の切削ブレードと、前記第一の切削ブレードの切刃の幅より大きい幅で構成された第二の切削ブレードとを有する切削装置を用い、前記パッケージ基板を前記第一の切削ブレードおよび前記第二の切削ブレードによって切削し個々のパッケージデバイスに分割するとともに前記電極を各パッケージデバイス毎に分極するパッケージ基板の分割方法であって、前記分割予定ラインを規制する第一の側部と第二の側部とに前記第一の切削ブレードを位置づけて切削し、前記分割予定ラインに２条の規制溝を形成して前記電極と前記分割予定ラインとを分断する規制溝形成工程と、前記規制溝形成工程後に前記２条の規制溝の外側より幅が狭く該２条の規制溝の内側より幅の広い前記第二の切削ブレードを該２条の規制溝の中央部に位置づけて前記分割予定ラインを切削して個々のパッケージデバイスに分割する分割工程と、を含むことを特徴とする。 In order to solve the above-described problems and achieve the object, a method for dividing a package substrate according to the present invention includes a package substrate in which a plurality of devices are partitioned and formed by a division line that protrudes toward the device and has electrodes formed thereon. A chuck table that is supported by a movable base that is movable by a feed mechanism, a dicing frame that supports the package substrate, a frame clamp that supports the dicing frame, and a line to be divided is regulated. A first cutting blade having two cutting blades arranged at intervals to form a regulation groove in the package substrate, and a second cutting blade having a width larger than the width of the cutting blade of the first cutting blade using the cutting apparatus having the door, by the package substrate said first cutting blade and the second cutting blade Cutting Shi a method of dividing the package substrate to polarize the electrodes for each package device as well as divided into individual packaged devices, the in the first side and the second side for regulating the dividing lines cutting position the first cutting blade, a regulating groove forming step of separating the said dividing line and said electrode to form a control groove of two rows on the dividing line, the after the regulating groove forming step 2 individually Article cutting blade width than the inner broader the second restriction groove width is narrow the Article 2 from outside of the restricting groove of cutting the dividing lines positioned in the central portion of the restricting groove of Article 2 the And a dividing step of dividing the package device.

本発明に係るパッケージ基板の分割方法によれば、比較的薄い第一の切削ブレードによって２条の規制溝を形成して分割予定ラインと電極とを分断した後、分断した２条の規制溝の外側より狭く内側より広い第二の切削ブレードでパッケージ基板を切削して分割するようにしたので、電極部分の切削端面は比較的薄い第一の切削ブレードによる切削端面として形成されるため切削速度を速くしてもバリが生じにくいとともに電極の盛り上がりも減少させることができ、よって、パッケージデバイスの生産性および品質を向上させることができるという効果を奏する。また、比較的薄い第一の切削ブレードによる切削は、分割予定ラインと電極との分断に留まるため、該第一の切削ブレードの消耗を抑制することができるという効果を奏する。   According to the method for dividing a package substrate according to the present invention, the two restriction grooves are formed by the relatively thin first cutting blade to divide the division-scheduled line and the electrode, and then the divided restriction grooves are separated. Since the package substrate is cut and divided by the second cutting blade that is narrower than the outside and wider than the inside, the cutting end surface of the electrode portion is formed as a cutting end surface by the relatively thin first cutting blade, so that the cutting speed is reduced. Even if the speed is increased, burrs are less likely to occur, and the rise of the electrode can be reduced. Thus, the productivity and quality of the package device can be improved. Moreover, since the cutting with the relatively thin first cutting blade remains only at the division between the division line and the electrode, there is an effect that the consumption of the first cutting blade can be suppressed.

以下、本発明を実施するための最良の形態であるパッケージ基板の分割方法について図面を参照して説明する。本実施の形態は、ＱＦＮによるパッケージ基板の分割方法への適用例を示す。   Hereinafter, a package substrate dividing method which is the best mode for carrying out the present invention will be described with reference to the drawings. The present embodiment shows an application example to a method for dividing a package substrate by QFN.

まず、ＱＦＮによるパッケージ基板の作製方法および個々のパッケージデバイスへの分割方法の概要について説明する。図１は、パッケージ基板のベースとなる金属枠体１０の一部を示す平面図である。金属枠体１０は、例えば３ｍｍ×５ｍｍ程度の大きさのパッケージデバイスを１０×３０個分程度を同時に形成し得る大きさの矩形シート状のものであり、例えば銅などの導電性が良好で厚さ１５０μｍ程度の金属板をエッチング加工またはプレス加工することにより所定形状にパターン形成されている。   First, an outline of a method for manufacturing a package substrate by QFN and a method for dividing the package substrate into individual package devices will be described. FIG. 1 is a plan view showing a part of a metal frame 10 serving as a base of a package substrate. The metal frame 10 is, for example, a rectangular sheet having a size capable of simultaneously forming about 10 × 30 package devices having a size of about 3 mm × 5 mm. A metal plate having a thickness of about 150 μm is patterned into a predetermined shape by etching or pressing.

金属枠体１０は、個々のデバイスが配設される領域を区画するよう升目状に形成されたストリート１１部分によるフレーム構造を有している。また、金属枠体１０は、各ストリート１１部分によって区画される開口部の中央部に、半導体チップ等のデバイスを搭載するための矩形状のダイパッド１２と、対応するストリート１１部分の四隅から対角線上に延在してダイパッド１２を支持する４本のサポートバー１３とを有する。また、金属枠体１０は、各ストリート１１部分からダイパッド１２側に向けて櫛歯状に突出させた複数本ずつの電極１４を有する。ここで、隣り合う２つのダイパッド１２に対応する各電極１４はストリート１１部分を介して電気的に接続された状態で一体に形成されている。また、ストリート１１部分は、パッケージデバイスの製造工程において最終的にパッケージ基板をパッケージデバイス毎に分割するための分割予定ラインＣＬとして設定されている。すなわち、ストリート１１の全幅が分割予定ラインＣＬとなるものであり、分割予定ラインＣＬは、ストリート１１の第一の側部Ｅ１と第二の側部Ｅ２とによりライン幅が規制される。なお、サポートバー１３部分は、最終的にパッケージデバイスの外面に露出しないように金属枠体１０において他の部分よりも薄くなるようにエッチングされて形成されている。   The metal frame 10 has a frame structure with streets 11 formed in a grid shape so as to partition areas where individual devices are arranged. In addition, the metal frame 10 has a rectangular die pad 12 for mounting a device such as a semiconductor chip at the center of the opening defined by each street 11 portion, and diagonally from the four corners of the corresponding street 11 portion. And four support bars 13 that support the die pad 12. In addition, the metal frame 10 has a plurality of electrodes 14 each protruding in a comb shape from each street 11 portion toward the die pad 12 side. Here, each electrode 14 corresponding to two adjacent die pads 12 is integrally formed in a state of being electrically connected via the street 11 portion. Further, the street 11 portion is set as a planned division line CL for finally dividing the package substrate into package devices in the manufacturing process of the package device. In other words, the entire width of the street 11 is the division line CL, and the line width of the division line CL is regulated by the first side E1 and the second side E2 of the street 11. Note that the support bar 13 portion is formed by etching so as to be thinner than other portions in the metal frame 10 so as not to be exposed to the outer surface of the package device.

図２は、図１中のＡ−Ａ線断面部分で示すＱＦＮによるパッケージ基板の作製方法および個々のデバイスへの分割方法の工程図である。まず、図２（ａ）に示すように、図１に示したような金属枠体１０の裏面には樹脂充填のためのＱＦＮ用アセンブリテープ２１を接着しておく。次いで、図２（ｂ）に示すように、金属枠体１０の各ダイパッド１２上にエポキシ系樹脂等の接着剤を塗布し、半導体チップ等の個々のデバイス２２の裏面側をダイパッド１２上に接着する。さらに、各デバイス２２の各電極と金属枠体１０における対応する各電極１４の内部電極部とをボンディングワイヤ２３によって電気的に接続する。   FIG. 2 is a process diagram of a method for manufacturing a package substrate by QFN and a method for dividing the device into individual devices, which is indicated by a cross-sectional portion taken along line AA in FIG. First, as shown in FIG. 2A, an assembly tape 21 for QFN for resin filling is bonded to the back surface of the metal frame 10 as shown in FIG. Next, as shown in FIG. 2B, an adhesive such as an epoxy resin is applied to each die pad 12 of the metal frame 10, and the back side of each device 22 such as a semiconductor chip is adhered to the die pad 12. To do. Furthermore, each electrode of each device 22 and the internal electrode portion of each corresponding electrode 14 in the metal frame 10 are electrically connected by a bonding wire 23.

次に、図２（ｃ）に示すように、一括モールディング方式により、金属枠体１０のデバイス２２が配設されている側の全面を充填樹脂２４で厚さ５００μｍ程度に被覆する。そして、ＱＦＮ用アセンブリテープ２１を金属枠体１０から剥離して除去することにより、各デバイス２２が金属枠体１０による金属層と充填樹脂２４による樹脂層２５とによりパッケージングされたパッケージ基板２６が完成する。さらに、充填樹脂２４の表面側に支持テープ２７を接着した後、図２（ｄ）に示すように、パッケージ基板２６を裏返して分割予定ラインＣＬ部分で切断することにより、デバイス２２毎のパッケージデバイス３０が完成するように分割する。この切断工程において、ストリート１１部分が第一の側部Ｅ１〜第二の側部Ｅ２の全幅に渡って除去されることで、電極１４が各パッケージデバイス３０毎に分極され、電気的に独立した状態となる。この後、支持テープ２７上から個々のパッケージデバイス３０を取り出す。   Next, as shown in FIG. 2C, the entire surface of the metal frame 10 on which the device 22 is disposed is covered with a filling resin 24 to a thickness of about 500 μm by a batch molding method. Then, by removing the QFN assembly tape 21 from the metal frame 10 and removing it, the package substrate 26 in which each device 22 is packaged by the metal layer formed by the metal frame 10 and the resin layer 25 formed by the filling resin 24 is formed. Complete. Further, after bonding the support tape 27 to the surface side of the filling resin 24, as shown in FIG. 2 (d), the package substrate 26 is turned over and cut at the portion to be divided CL, whereby a package device for each device 22 is obtained. Split so that 30 is completed. In this cutting step, the street 11 portion is removed over the entire width of the first side portion E1 to the second side portion E2, so that the electrode 14 is polarized for each package device 30 and electrically independent. It becomes a state. Thereafter, the individual package devices 30 are taken out from the support tape 27.

図３は、分割された一つのパッケージデバイス３０の外観構造を示す斜視図である。パッケージデバイス３０は、例えば３ｍｍ×５ｍｍ程度の大きさである。図３に示すように、外部接続端子となる各電極１４の外部電極部分が充填樹脂２４と同一面上に露出する。また、サポートバー１３部分の表面は充填樹脂２４により被覆されており、外部に露出しない。   FIG. 3 is a perspective view showing an external structure of one divided package device 30. The package device 30 has a size of about 3 mm × 5 mm, for example. As shown in FIG. 3, the external electrode portion of each electrode 14 serving as an external connection terminal is exposed on the same surface as the filling resin 24. The surface of the support bar 13 is covered with the filling resin 24 and is not exposed to the outside.

ここで、本実施の形態は、図２（ｄ）に示したようなパッケージ基板２６をパッケージデバイス３０に分割する分割方法に特徴を有する。図４は、本実施の形態の分割方法を示す説明図である。まず、図４（ａ）に示すように、分割予定ラインＣＬのライン幅Ｗを規制する第一の側部（エッジ）Ｅ１と第二の側部（エッジ）Ｅ２とのそれぞれの内側位置に切削幅ｔ１が比較的薄い第一の切削ブレード４０を位置づけて充填樹脂２４に達する程の深さにストリート１１を切削し、分割予定ラインＣＬの両側に溝幅Ｗ１＝ｔ１の細い２条の規制溝４１ａ，４１ｂを形成して電極１４と分割予定ラインＣＬとを分断する（規制溝形成工程）。ここで、切削ブレード４０は、例えばダイアモンド砥粒をＮｉメッキした電鋳ブレードである。   Here, the present embodiment is characterized by a dividing method for dividing the package substrate 26 into the package devices 30 as shown in FIG. FIG. 4 is an explanatory diagram showing the dividing method according to the present embodiment. First, as shown in FIG. 4A, cutting is performed at respective inner positions of the first side portion (edge) E1 and the second side portion (edge) E2 that regulate the line width W of the planned division line CL. The first cutting blade 40 having a relatively small width t1 is positioned, the street 11 is cut to a depth that reaches the filling resin 24, and two narrow regulation grooves having a groove width W1 = t1 on both sides of the division line CL. 41a and 41b are formed and the electrode 14 and the division | segmentation scheduled line CL are parted (regulation groove | channel formation process). Here, the cutting blade 40 is an electroformed blade in which diamond abrasive grains are plated with Ni, for example.

このような２条の規制溝４１ａ，４１ｂの形成に際しては、切刃が１枚の第一の切削ブレードによって規制溝４１ａ，４１ｂを順次形成するようにしてもよいが、例えば、図４（ａ）中に示すように、スペーサ４２により分割予定ラインＣＬのライン幅Ｗを規制する間隔Ｗｉを持って切刃４０ａ，４０ｂが２枚配設された第一の切削ブレード４０を用いることにより、２条の規制溝４１ａ，４１ｂを同時に形成するようにしてもよい。   When forming the two restriction grooves 41a and 41b, the cutting blade may form the restriction grooves 41a and 41b sequentially with one first cutting blade. For example, FIG. As shown in the figure, by using the first cutting blade 40 in which two cutting blades 40a, 40b are arranged with a spacing Wi that regulates the line width W of the division line CL by the spacer 42, 2 The regulation grooves 41a and 41b may be formed at the same time.

２条の規制溝４１ａ，４１ｂを形成した後、図４（ｂ）に示すように、２条の規制溝４１ａ，４１ｂの外側間の幅Ｗｏ（＝Ｗ）より幅が狭く２条の規制溝４１ａ，４１ｂの内側間の幅Ｗｉ（＝Ｗ−２Ｗ１）より幅の広い比較的厚い幅ｔ２を有する第二の切削ブレード４３を２条の規制溝４１ａ，４１ｂの中央部に位置づけて分割予定ラインＣＬ（ストリート１１）を充填樹脂２４とともに支持テープ２７に達するまで切断することにより、パッケージ基板２６を個々のデバイス２２毎に分割し、パッケージデバイス３０を完成する（分割工程）。ここで、切削ブレード４３は、例えばダイアモンド砥粒をＮｉメッキした電鋳ブレードである。   After forming the two restriction grooves 41a and 41b, as shown in FIG. 4B, the width is narrower than the width Wo (= W) between the outer sides of the two restriction grooves 41a and 41b. The second cutting blade 43 having a relatively thick width t2 wider than the width Wi (= W−2W1) between the inner sides of 41a and 41b is positioned at the center of the two restriction grooves 41a and 41b, and is scheduled to be divided. By cutting CL (street 11) together with the filling resin 24 until it reaches the support tape 27, the package substrate 26 is divided into individual devices 22 to complete the package device 30 (division step). Here, the cutting blade 43 is an electroformed blade in which diamond abrasive grains are plated with Ni, for example.

ここで、寸法関係の一例について説明する。標準的な例として、例えば分割予定ラインＣＬ（ストリート１１）のライン幅Ｗが３００μｍの場合、第一の切削ブレード４０の幅ｔ１は３０μｍ、第二の切削ブレード４３の幅ｔ２は２７０μｍ〜２８０μｍとされる。ライン幅Ｗは、仕様により、１００μｍ〜５００μｍ程度の広がり、すなわちＷ＝３００μｍ±２００μｍであるので、第一の切削ブレード４０の幅ｔ１もその仕様に対応してｔ１＝３０μｍ±１０μｍ程度、第二の切削ブレード４３の幅ｔ２もその仕様に対応してｔ２＝２７０〜２８０μｍ±２００μｍ程度のものを用いるようにすればよい。或いは、第一の切削ブレード４０の幅ｔ１は固定とし、第二の切削ブレード４３の幅ｔ２のみを変更するようにしてもよい。要は、Ｗｏ＞ｔ２＞Ｗｉを満たす範囲内で、第一の切削ブレード４０の幅ｔ１が、第二の切削ブレード４３の幅ｔ２より細ければよい。   Here, an example of a dimensional relationship will be described. As a standard example, for example, when the line width W of the planned division line CL (street 11) is 300 μm, the width t1 of the first cutting blade 40 is 30 μm, and the width t2 of the second cutting blade 43 is 270 μm to 280 μm. Is done. The line width W is about 100 μm to 500 μm depending on the specification, that is, W = 300 μm ± 200 μm. Therefore, the width t1 of the first cutting blade 40 corresponds to the specification, t1 = about 30 μm ± 10 μm, The width t2 of the cutting blade 43 may be about t2 = 270 to 280 μm ± 200 μm corresponding to the specification. Alternatively, the width t1 of the first cutting blade 40 may be fixed, and only the width t2 of the second cutting blade 43 may be changed. In short, the width t1 of the first cutting blade 40 should be narrower than the width t2 of the second cutting blade 43 within a range satisfying Wo> t2> Wi.

上述したように本実施の形態によれば、比較的薄い切削ブレードによって銅などの金属を切削した場合にはバリが発生しにくいという実験結果に基づき、比較的薄い第一の切削ブレード４０によって２条の細い規制溝４１ａ，４１ｂを形成して分割予定ラインＣＬと電極１４とを分断した後、分断した２条の規制溝４１ａ，４１ｂの外側より狭く内側より広い第二の切削ブレード４３でパッケージ基板２６を切削して分割するようにしたので、電極１４部分の切削端面は、比較的厚い第二の切削ブレード４３による切削端面としては形成されず、比較的薄い第一の切削ブレード４０による切削端面として形成されるため、切削速度を速くしてもバリが生じにくいとともに電極１４の盛り上がりも減少し、よって、パッケージデバイス３０の生産性および品質が向上する。   As described above, according to the present embodiment, when the metal such as copper is cut with a relatively thin cutting blade, burrs are hardly generated. After forming the narrow regulation grooves 41a and 41b to divide the dividing line CL and the electrode 14, the second cutting blade 43 is narrower than the outside of the two separated regulation grooves 41a and 41b and packaged by the second cutting blade 43. Since the substrate 26 is cut and divided, the cutting end surface of the electrode 14 portion is not formed as a cutting end surface by the relatively thick second cutting blade 43, but is cut by the relatively thin first cutting blade 40. Since it is formed as an end surface, even if the cutting speed is increased, burrs are hardly generated and the rise of the electrode 14 is reduced. Sex and quality is improved.

ここで、比較的薄い第一の切削ブレード４０の切削によればバリが発生しにくいことから、第二の切削ブレード４３を用いずに第一の切削ブレード４０によってパッケージ基板２６をフルカットすることも考えられる。しかしながら、第一の切削ブレード４０は薄い分、切削動作に伴う消耗が激しいことから、本実施の形態のように、第一の切削ブレード４０による切削を、分割予定ラインＣＬと電極１４との分断に留め、最終的な分割用の切削は比較的厚くて消耗の少ない第二の切削ブレード４３で行わせることにより、第一の切削ブレード４０の消耗を抑制することができる。   Here, since the burr is not easily generated by cutting the relatively thin first cutting blade 40, the package substrate 26 is fully cut by the first cutting blade 40 without using the second cutting blade 43. Is also possible. However, since the first cutting blade 40 is thin and wear due to the cutting operation is severe, the cutting by the first cutting blade 40 is divided between the division line CL and the electrode 14 as in the present embodiment. The final cutting for division is performed by the second cutting blade 43 which is relatively thick and consumes little, so that the consumption of the first cutting blade 40 can be suppressed.

また、分割予定ラインＣＬ（ストリート１１）のライン幅Ｗをｔ１程度に細くすれば、比較的薄くてバリの発生しにくい第一のブレード４０を用いて１本の溝を切削するだけでパッケージ基板２６をフルカットすることも可能となる。しかしながら、上述の第一のブレード４０の消耗の問題に加えて、元々パッケージ基板２６の分割予定ラインＣＬ（ストリート１１）等の既存のパターン仕様は、比較的厚めの切削ブレード幅等に対応させて設計されているため、分割予定ラインＣＬ（ストリート１１）のライン幅Ｗをｔ１程度に細くすることは大幅な仕様変更を要することとなる。この点、本実施の形態によれば、パッケージ基板２６の既存のパターン仕様に対応可能な分割方法となる。   Further, if the line width W of the planned dividing line CL (street 11) is reduced to about t1, the package substrate can be obtained by cutting only one groove using the first blade 40 which is relatively thin and hardly generates burrs. 26 can be fully cut. However, in addition to the problem of wear of the first blade 40 described above, the existing pattern specifications such as the division line CL (street 11) of the package substrate 26 originally correspond to a relatively thick cutting blade width or the like. Since it is designed, reducing the line width W of the division planned line CL (street 11) to about t1 requires a significant specification change. In this regard, according to the present embodiment, the dividing method is applicable to the existing pattern specifications of the package substrate 26.

ところで、図４（ａ）（ｂ）に示したような規制溝形成工程と分割工程とは、それぞれ別個の装置を用いて別個に行うようにしてもよいが、図５に示すような切削装置を用いて一括して行うようにしてもよい。図５は、分割処理用の切削装置の構成例を示す概略斜視図である。切削装置５０は、パッケージ基板２６を保持するチャックテーブル５１と、パッケージ基板２６を支持したダイシングフレームＦを支持するフレームクランプ５１ａと、チャックテーブル５１に保持されたパッケージ基板２６に作用して規制溝形成を行う第一の切削手段６０と、切削を行う第二の切削手段７０とを有する。チャックテーブル５１は、図示しない駆動源に連結されて回転可能である。また、チャックテーブル５１を支持する移動基台５２は、ボールネジ、ナット、パルスモータ等による送り機構によってＸ軸方向に移動可能に設けられている。   Incidentally, the regulation groove forming step and the dividing step as shown in FIGS. 4A and 4B may be performed separately using separate devices, but the cutting device as shown in FIG. You may make it carry out collectively using. FIG. 5 is a schematic perspective view showing a configuration example of a cutting apparatus for division processing. The cutting device 50 acts on the chuck table 51 that holds the package substrate 26, the frame clamp 51 a that supports the dicing frame F that supports the package substrate 26, and the package substrate 26 that is held on the chuck table 51 to form a regulation groove. A first cutting means 60 for performing cutting, and a second cutting means 70 for performing cutting. The chuck table 51 is connected to a drive source (not shown) and is rotatable. The moving base 52 that supports the chuck table 51 is provided so as to be movable in the X-axis direction by a feed mechanism such as a ball screw, a nut, or a pulse motor.

図６は、第一の切削手段６０の構成例を示す分解斜視図であり、図７は、第二の切削手段７０の構成例を示す分解斜視図である。第一の切削手段６０は、図６に示すように、スペーサ４２（図４参照）で所定間隔隔てた２枚の切刃４０ａ，４０ｂを有する第一の切削ブレード４０と、第一の切削ブレード４０を支持するマウント６１と、マウント６１に連結されるスピンドル６２と、スピンドル６２を回転可能に支持するハウジング６３と、第一の切削ブレード４０をマウント６１に固定する挟持フランジ６４とを備える。第二の切削手段７０は、図７に示すように、第二の切削ブレード４３と、第二の切削ブレード４３を支持するマウント７１と、マウント７１に連結されるスピンドル７２と、スピンドル７２を回転可能に支持するハウジング７３と、第二の切削ブレード４３をマウント７１に固定する挟持フランジ７４とを備える。   FIG. 6 is an exploded perspective view showing a configuration example of the first cutting means 60, and FIG. 7 is an exploded perspective view showing a configuration example of the second cutting means 70. As shown in FIG. 6, the first cutting means 60 includes a first cutting blade 40 having two cutting blades 40a and 40b separated by a spacer 42 (see FIG. 4), and a first cutting blade. 40, a mount 62 that supports the mount 61, a housing 63 that rotatably supports the spindle 62, and a clamping flange 64 that fixes the first cutting blade 40 to the mount 61. As shown in FIG. 7, the second cutting means 70 rotates the second cutting blade 43, a mount 71 that supports the second cutting blade 43, a spindle 72 coupled to the mount 71, and the spindle 72. A housing 73 that can be supported and a clamping flange 74 that fixes the second cutting blade 43 to the mount 71 are provided.

また、第一の切削手段６０の−Ｘ軸方向隣りには、パッケージ基板２６のストリート１１（分割予定ラインＣＬ）を検出するための図示しないアライメント部を備えている。アライメント部は、パッケージ基板２６の表面を撮像する可視光線用や赤外線用のカメラ５３を有し、このカメラ５３によって取得した画像を基に、あらかじめ記憶されているキーパターンとのパターンマッチングなどの処理を行うことで、規制溝形成や切断を行うべきストリート１１部分を検出し、分割予定ラインＣＬの第一の側部Ｅ１、第二の側部Ｅ２の内側位置への第一のブレード４０の位置づけや、規制溝４１ａ，４１ｂ間の中央部への第二の切削ブレード４３の位置づけに供する。   Further, an alignment unit (not shown) for detecting the street 11 (division line CL) of the package substrate 26 is provided adjacent to the first cutting means 60 in the −X-axis direction. The alignment unit includes a visible light or infrared camera 53 that images the surface of the package substrate 26, and processing such as pattern matching with a key pattern stored in advance based on an image acquired by the camera 53. To detect the portion of the street 11 where the restriction groove should be formed or cut, and the first blade 40 is positioned at the inner side of the first side E1 and the second side E2 of the division line CL. Or it serves for positioning of the 2nd cutting blade 43 to the center part between regulation grooves 41a and 41b.

第一の切削手段６０および第二の切削手段７０は、ボールネジ、ナット、パルスモータ等による図示しない切り込み送り機構によってＺ軸方向に昇降移動可能に設けられ、また、ボールネジ、ナット、パルスモータ等による図示しない割り出し送り機構によってＹ軸方向に移動可能に設けられている。   The first cutting means 60 and the second cutting means 70 are provided so as to be movable up and down in the Z-axis direction by a not-shown cutting feed mechanism such as a ball screw, nut, pulse motor or the like, and also by a ball screw, nut, pulse motor or the like. It is provided so as to be movable in the Y-axis direction by an index feed mechanism (not shown).

また、切削装置５０は、カセット部５４、搬出入手段５５、搬送手段５６、洗浄手段５７および搬送手段５８を備える。カセット部５４は、パッケージ基板２６が貼付けられたダイシングフレームＦを複数枚収納するものである。搬出入手段５５は、カセット部５４に収納されたダイシングフレームＦを搬送手段５６が搬送可能な載置領域に搬出するとともに、パッケージ基板２６が処理済みのダイシングフレームＦをカセット部５４に搬入するものである。搬送手段５６は、搬出入手段５５によって載置領域に搬出されたダイシングフレームＦをチャックテーブル５１上に搬送するものである。また、洗浄手段５７は、パッケージ基板２６が第一の切削手段６０および第二の切削手段７０による処理済みのダイシングフレームＦを洗浄するものである。搬送手段５８は、パッケージ基板２６が第一の切削手段６０および第二の切削手段７０による処理済みのダイシングフレームＦをチャックテーブル５１上から洗浄手段５７へ搬送するものである。   Further, the cutting device 50 includes a cassette unit 54, a carry-in / out means 55, a transport unit 56, a cleaning unit 57, and a transport unit 58. The cassette unit 54 stores a plurality of dicing frames F to which the package substrate 26 is attached. The unloading / unloading means 55 unloads the dicing frame F stored in the cassette section 54 to a placement area that can be conveyed by the conveying means 56 and also loads the processed dicing frame F into the cassette section 54. It is. The conveying means 56 conveys the dicing frame F carried out to the placement area by the carrying-in / out means 55 onto the chuck table 51. The cleaning means 57 is for the package substrate 26 to clean the dicing frame F that has been processed by the first cutting means 60 and the second cutting means 70. The conveying means 58 is for the package substrate 26 to convey the dicing frame F processed by the first cutting means 60 and the second cutting means 70 from the chuck table 51 to the cleaning means 57.

パッケージ基板２６は、金属枠体１０側を上にしてチャックテーブル５１上に載置されて保持される。そして、チャックテーブル５１が＋Ｘ軸方向に移動することで、パッケージ基板２６がカメラ５３の直下に位置づけられ、カメラ５３によって撮像される。その撮像画像を基にアライメント部によってストリート１１の第一の側部Ｅ１、第二の側部Ｅ２が検出され、第一の側部Ｅ１、第二の側部Ｅ２の内側位置と第一の切削ブレード４０の切刃４０ａ，４０ｂとのＹ軸方向の位置合わせが行われる。さらに、チャックテーブル５１を＋Ｘ軸方向に移動させるとともに、切り込み送り部によって第一の切削ブレード４０を所定位置まで下降させ、検出されたストリート１１の第一の側部Ｅ１、第二の側部Ｅ２の内側位置に対して切刃４０ａ，４０ｂを切り込ませることにより、分割予定ラインＣＬの両側に沿ってストリート１１部分を切削し、２条の規制溝４１ａ，４１ｂを同時に形成する。   The package substrate 26 is placed and held on the chuck table 51 with the metal frame 10 side up. Then, as the chuck table 51 moves in the + X-axis direction, the package substrate 26 is positioned immediately below the camera 53 and is imaged by the camera 53. Based on the captured image, the first side E1 and the second side E2 of the street 11 are detected by the alignment unit, and the inner positions of the first side E1 and the second side E2 and the first cutting are detected. Positioning in the Y-axis direction with the cutting edges 40a, 40b of the blade 40 is performed. Further, the chuck table 51 is moved in the + X-axis direction, and the first cutting blade 40 is lowered to a predetermined position by the cutting feed unit, and the detected first side E1 and second side E2 of the street 11 are detected. By cutting the cutting blades 40a and 40b into the inner position, the street 11 portion is cut along both sides of the planned dividing line CL, and two restriction grooves 41a and 41b are formed simultaneously.

そして、割り出し送り部によって第一の切削ブレード４０をストリート１１の間隔ずつ割り出し送りさせながら順次同様の規制溝形成を行う。同一方向のストリート１１の両側に全て２条の規制溝４１ａ，４１ｂを形成した後は、チャックテーブル５１を９０度回転させて縦横を入れ替えて同様の規制溝形成を行うことによって、パッケージ基板２６の表面上の全てのストリート１１の両側に２条の規制溝４１ａ，４１ｂが形成される。   And the same regulation groove | channel formation is sequentially performed, indexing and feeding the 1st cutting blade 40 by the space | interval of the street 11 by the index feeding part. After all the two restriction grooves 41a and 41b are formed on both sides of the street 11 in the same direction, the package table 26 is formed by rotating the chuck table 51 by 90 degrees and changing the vertical and horizontal directions to form the same restriction grooves. Two regulation grooves 41a and 41b are formed on both sides of all the streets 11 on the surface.

その後、第二の切削ブレード４３による切断を行うために、チャックテーブル５１を＋Ｘ軸方向に移動させるとともに、切削ブレード４３を高速回転させながら切り込み送り部によって所定位置まで下降させ、位置づけられた２条の規制溝４１ａ，４１ｂの中央部に向けて切削ブレード４３を切り込ませることにより、分割予定ラインＣＬに沿って２条の規制溝４１ａ，４１ｂ間を切断する。   Thereafter, in order to perform the cutting by the second cutting blade 43, the chuck table 51 is moved in the + X-axis direction, and the cutting blade 43 is moved down to a predetermined position by the cutting feed portion while rotating at high speed. By cutting the cutting blade 43 toward the center of the restriction grooves 41a and 41b, the two restriction grooves 41a and 41b are cut along the planned dividing line CL.

そして、割り出し送り部によって切削ブレード４３をストリート１１の間隔ずつ割り出し送りさせながら順次同様の切断を行う。同一方向のストリート１１を全て切断した後は、チャックテーブル５１を９０度回転させて縦横を入れ替えて同様の切断を行うことによって、パッケージ基板２６の全てのストリート１１が切断により除去され、デバイス２２毎にパッケージデバイス３０が分割形成される。パッケージデバイス３０に分割された後のパッケージ基板２６は、チャックテーブル５１から搬送手段５８によって洗浄手段５７に搬送され、洗浄手段５７による洗浄を受けた後、搬送手段５６によってカセット部５４に搬入される。   Then, the same cutting is sequentially performed while the cutting blade 43 is indexed and fed at intervals of the street 11 by the indexing and feeding unit. After all the streets 11 in the same direction are cut, the streets 11 of the package substrate 26 are removed by cutting by rotating the chuck table 51 by 90 degrees and exchanging the vertical and horizontal directions. The package device 30 is divided and formed. After being divided into package devices 30, the package substrate 26 is transferred from the chuck table 51 to the cleaning unit 57 by the transfer unit 58, and after being cleaned by the cleaning unit 57, is transferred to the cassette unit 54 by the transfer unit 56. .

なお、本実施の形態では、第一の切削ブレード４０による２条の規制溝４１ａ，４１ｂの形成が全て終了してから切削ブレード４３による切断を行うようにしたが、１本のストリート１１に対して２条の規制溝４１ａ，４１ｂが形成される毎に、切削ブレード４３による切断を続けて行うように、規制溝形成と切断とをストリート１１単位で交互に行うようにしてもよい。   In the present embodiment, the cutting with the cutting blade 43 is performed after the formation of the two restriction grooves 41a and 41b by the first cutting blade 40 is completed. Thus, each time the two regulation grooves 41a and 41b are formed, the regulation groove formation and the cutting may be alternately performed in units of streets 11 so that the cutting with the cutting blade 43 is continuously performed.

なお、本実施の形態では、ＱＦＮによるパッケージ基板２６の分割方法への適用例を示したが、このような適用例に限らず、例えばチップＬＥＤのパッケージ基板等のその他のパッケージ基板の分割方法にも適用可能である。   In the present embodiment, the application example to the method of dividing the package substrate 26 by QFN has been shown. However, the present invention is not limited to such an application example, and the present invention is not limited to such an application method. Is also applicable.

パッケージ基板のベースとなる金属枠体の一部を示す平面図である。It is a top view which shows a part of metal frame used as the base of a package board | substrate. 図１中のＡ−Ａ線断面部分で示すＱＦＮによるパッケージ基板の作製方法および個々のデバイスへの分割方法の工程図である。It is process drawing of the manufacturing method of the package board | substrate by QFN shown in the AA line cross-section part in FIG. 1, and the division | segmentation method to each device. 分割された一つのパッケージデバイスの外観構造を示す斜視図である。It is a perspective view showing the appearance structure of one divided package device. 本実施の形態の分割方法を工程順に示す説明図である。It is explanatory drawing which shows the division | segmentation method of this Embodiment in process order. 切削装置の構成例を示す概略斜視図である。It is a schematic perspective view which shows the structural example of a cutting device. 第一の切削手段の構成例を示す分解斜視図である。It is a disassembled perspective view which shows the structural example of a 1st cutting means. 第二の切削手段の構成例を示す分解斜視図である。It is a disassembled perspective view which shows the structural example of a 2nd cutting means.

符号の説明Explanation of symbols

１４ 電極
２２ デバイス
２６ パッケージ基板
３０ パッケージデバイス
４０ 第一の切削ブレード
４０ａ，４０ｂ 切刃
４１ａ，４１ｂ 規制溝
４３ 第二の切削ブレード
ＣＬ 分割予定ライン
Ｅ１ 第一の側部
Ｅ２ 第二の側部 14 Electrode 22 Device 26 Package substrate 30 Package device 40 First cutting blades 40a, 40b Cutting blades 41a, 41b Restriction groove 43 Second cutting blade CL Scheduled division line E1 First side E2 Second side

Claims (1)

デバイス側に突出して電極が形成された分割予定ラインによって複数のデバイスが区画され形成されたパッケージ基板を保持し、送り機構によって移動可能な移動基台に支持された回転可能なチャックテーブルと、前記パッケージ基板を支持するダイシングフレームと、前記ダイシングフレームを支持するフレームクランプと、前記分割予定ラインを規制する間隔で切刃が２枚配されて前記パッケージ基板に規制溝形成を行う第一の切削ブレードと、前記第一の切削ブレードの切刃の幅より大きい幅で構成された第二の切削ブレードとを有する切削装置を用い、前記パッケージ基板を前記第一の切削ブレードおよび前記第二の切削ブレードによって切削し個々のパッケージデバイスに分割するとともに前記電極を各パッケージデバイス毎に分極するパッケージ基板の分割方法であって、
前記分割予定ラインを規制する第一の側部と第二の側部とに前記第一の切削ブレードを位置づけて切削し、前記分割予定ラインに２条の規制溝を形成して前記電極と前記分割予定ラインとを分断する規制溝形成工程と、
前記規制溝形成工程後に、前記２条の規制溝の外側より幅が狭く該２条の規制溝の内側より幅の広い前記第二の切削ブレードを該２条の規制溝の中央部に位置づけて前記分割予定ラインを切削して個々のパッケージデバイスに分割する分割工程と、を含む
ことを特徴とするパッケージ基板の分割方法。 A rotatable chuck table supported on a movable base that holds a package substrate in which a plurality of devices are partitioned and formed by a dividing line in which electrodes are formed protruding to the device side, and supported by a movable base that is movable by a feed mechanism; A dicing frame for supporting the package substrate, a frame clamp for supporting the dicing frame, and a first cutting blade for forming a regulation groove on the package substrate by arranging two cutting blades at an interval for regulating the division line And a second cutting blade having a width larger than the width of the cutting edge of the first cutting blade, and the package substrate is used as the first cutting blade and the second cutting blade. To separate individual package devices and separate the electrodes for each package device. A method of dividing the package substrate,
The dividing lines and cutting position the said first cutting blade and the first side and the second side for regulating the said and the electrode to form a control groove of two rows on the dividing lines A regulation groove forming step for dividing the division planned line;
After the regulating groove forming step, the two rows wide the second cutting blade than the inner width of regulating groove width than the outer narrow the Article 2 of regulating groove of positioning the central portion of the restricting groove of Article 2 the A dividing step of cutting the dividing line into individual package devices, and dividing the package substrate.
JP2006083737A 2006-03-24 2006-03-24 Package substrate division method Active JP4851214B2 (en)

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