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JP4843424B2 - Glass sealing cover for crystal resonator and method for manufacturing crystal resonator using the same - Google Patents

Glass sealing cover for crystal resonator and method for manufacturing crystal resonator using the same Download PDF

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Publication number
JP4843424B2
JP4843424B2 JP2006240716A JP2006240716A JP4843424B2 JP 4843424 B2 JP4843424 B2 JP 4843424B2 JP 2006240716 A JP2006240716 A JP 2006240716A JP 2006240716 A JP2006240716 A JP 2006240716A JP 4843424 B2 JP4843424 B2 JP 4843424B2
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glass
sealing
cover
low
sealing glass
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JP2008066885A (en
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克典 赤根
弘明 柳下
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Nihon Dempa Kogyo Co Ltd
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Nihon Dempa Kogyo Co Ltd
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Description

本発明は水晶振動子用のガラス封止カバー及びこれを用いた表面実装用の水晶振動子(以下、表面実装振動子とする)を技術分野とし、特にガラス封止を確実にして生産性を高めたガラス封止カバーに関する。   The present invention has a technical field of a glass sealing cover for a crystal unit and a surface mounting crystal unit (hereinafter referred to as a surface mounting unit) using the same, and in particular, the glass sealing is ensured to increase productivity. It relates to an elevated glass sealing cover.

(発明の背景)
表面実装振動子は小型・軽量であることから、特に携帯機器等に周波数や時間の基準源として内蔵される。このようなものの一つに、ガラス封止カバーを用いて容器本体内に水晶片を密閉封入した表面実装振動子がある。
(Background of the Invention)
Since the surface-mounted resonator is small and light, it is built in as a reference source for frequency and time, especially in portable devices. One of these is a surface-mounted vibrator in which a crystal piece is hermetically sealed in a container body using a glass sealing cover.

(従来技術の一例)
第3図及び第4図は一従来例を説明する図で、第3図(a)は表面実装振動子の断面図、同図(b)は同カバーを除く平面図、同図(c)は水晶片の平面図、第4図(a)はガラス封止カバーの一主面の平面図、同図(b)はA−A一部断面図、同図(c)は容器本体への接合時の一部断面とした短辺方向の側面図である。
(Example of conventional technology)
3 and 4 are diagrams for explaining one conventional example. FIG. 3 (a) is a cross-sectional view of a surface mount vibrator, FIG. 3 (b) is a plan view excluding the cover, and FIG. Is a plan view of a crystal piece, FIG. 4 (a) is a plan view of one main surface of a glass sealing cover, FIG. 4 (b) is a partial cross-sectional view along A-A, and FIG. It is the side view of the short side direction made into the partial cross section at the time of joining.

表面実装振動子は平面外形が矩形状の容器本体1内に水晶片2を収容し、同矩形状としたガラス封止カバー3を接合して水晶片2を密閉封入する。容器本体1は凹状とする積層セラミックからなり、内底面に水晶端子4を、外底面に表面実装用の実装端子5を有する。水晶端子4は実装端子5に積層面及びスルーホール5aを経て電気的に接続する。   The surface-mounted vibrator accommodates a crystal piece 2 in a container body 1 having a rectangular planar outer shape, and a glass sealing cover 3 having the same rectangular shape is joined to hermetically enclose the crystal piece 2. The container body 1 is made of a laminated ceramic having a concave shape, and has a crystal terminal 4 on the inner bottom surface and a mounting terminal 5 for surface mounting on the outer bottom surface. The crystal terminal 4 is electrically connected to the mounting terminal 5 through the laminated surface and the through hole 5a.

水晶片2は両主面に励振電極6を有し、例えば一端部両側に引出電極7を延出する。そして、引出電極7の延出した一端部両側を内底面の水晶端子4に、導電性接着剤8によって固着する。なお、水晶片2は板面面積が大きいほど設計を容易にすることから、小型化になるほど容器本体1の内周との間隙が小さくなる。   The crystal piece 2 has excitation electrodes 6 on both main surfaces, and for example, extraction electrodes 7 extend on both sides of one end. Then, both ends of the extended end portion of the extraction electrode 7 are fixed to the crystal terminal 4 on the inner bottom surface by the conductive adhesive 8. In addition, since the crystal piece 2 is easier to design as the plate surface area is larger, the gap between the container 2 and the inner periphery of the container body 1 is smaller as the size is reduced.

ガラス封止カバー3はカバー母体を例えばセラミックとして、容器本体1の平面外形よりも小さくする。これにより、容器本体1の外周からの飛び出しを防止する。そして、カバー母体の一主面の周回する外周に封着ガラス9を有する。封着ガラス9は溶着によって設けられ、融点温度が約280〜500℃の低融点ガラスとする。   The glass sealing cover 3 is made smaller than the planar outer shape of the container body 1 by using, for example, ceramic as a cover base. Thereby, jumping out from the outer periphery of the container main body 1 is prevented. And it has the sealing glass 9 in the outer periphery which the one main surface of a cover base | substrate rotates. The sealing glass 9 is provided by welding and is a low melting glass having a melting point temperature of about 280 to 500 ° C.

封着ガラス9の内周は容器本体の内周に一致し、所謂スルーパスを長くして気密性を高める。そして、例えば対向する一組の短辺に対向したガス抜き穴10を有する。ガス抜き穴10は凹状として封着ガラス9の一部に高さの小さい低背域11を設けて形成される。   The inner periphery of the sealing glass 9 coincides with the inner periphery of the container body, and the so-called through path is lengthened to improve the airtightness. And it has the vent hole 10 which opposes a pair of short side which opposes, for example. The gas vent hole 10 is formed in a concave shape by providing a low profile region 11 having a small height in a part of the sealing glass 9.

そして、容器本体1の開口端面にガラス封止カバー3ーの外周を当接し、封着ガラス9を加熱溶融する。これにより、容器本体1の開口端面を封止し、水晶片2を密閉封入する。加熱溶融は例えばN(窒素)ガス雰囲気中で処理され、容器内にはNガスが封入される。Nガスの不活性化ガスによって経時変化特性を良好に維持する。   Then, the outer periphery of the glass sealing cover 3 is brought into contact with the opening end surface of the container main body 1, and the sealing glass 9 is heated and melted. Thereby, the opening end surface of the container main body 1 is sealed, and the crystal piece 2 is hermetically sealed. Heating and melting is performed, for example, in an N (nitrogen) gas atmosphere, and N gas is sealed in the container. Good aging characteristics are maintained by the inert gas of N gas.

この場合、封着ガラス9にガス抜き穴10がない場合には、ガラスの溶融初期時(低温時)に、ガラス封止カバー3が容器本体1に全面的に接合して閉塞する。そして、さらに温度が上昇すると、ガス(N)の膨張によって容器の内圧が高まる。このため、第5図に示したように、ガラス封止カバー3ーの浮き上がりを生じて「同図(a)」、高さ寸法を大きくしたり、傾斜面を生じたりする。あるいは、封着ガラス9の吹き出しを生じたりして、同図(b)」、いずれの場合でも接合不良となる。   In this case, when the sealing glass 9 does not have the gas vent hole 10, the glass sealing cover 3 is entirely bonded to the container body 1 and closed at the initial stage of glass melting (at low temperature). And if temperature rises further, the internal pressure of a container will increase by expansion of gas (N). For this reason, as shown in FIG. 5, the glass sealing cover 3 is lifted to cause “the same figure (a)”, and the height dimension is increased or an inclined surface is generated. Alternatively, the sealing glass 9 is blown out, and (b) in FIG.

これに対し、封着ガラス9にガス抜き穴10がある場合には、容器の内圧が高まっても適度にガスが抜けて、同図(c)に示したように、封着ガラス9がカバーの内側寄りに、及び容器本体1の内側面に濡れだし、ガラス封止カバー3を平行として正常に封止する。   On the other hand, when the sealing glass 9 has the gas vent hole 10, even if the internal pressure of the container is increased, the gas is appropriately released, and the sealing glass 9 is covered as shown in FIG. The inside of the container body 1 and the inner surface of the container body 1 are wetted, and the glass sealing cover 3 is normally sealed in parallel.

(従来技術の問題点)
しかしながら、上記構成の表面実装振動子では、封着ガラス9に低背域11を設けてガス抜き穴10を形成するので、低背域11での封着ガラス9の厚みは必然的に小さくなる。このため、加熱溶融時には、ガス抜き穴10(低背域11)での封着ガラス9と容器本体1の開口端面との濡れ性が悪く接合が疎となる。あるいは、ガス抜き穴10からの吹き出しを生じて、気密不良を起こし、生産性を低下させる問題があった。
(Problems of conventional technology)
However, in the surface mount vibrator having the above-described configuration, the sealing glass 9 is provided with the low-profile region 11 and the gas vent hole 10 is formed. Therefore, the thickness of the sealing glass 9 in the low-profile region 11 is necessarily reduced. . For this reason, at the time of heating and melting, the wettability between the sealing glass 9 in the gas vent hole 10 (low profile region 11) and the opening end surface of the container body 1 is poor and the bonding becomes sparse. Or there existed a problem which produced the blow-off from the gas vent hole 10, raise | generates an airtight defect, and reduces productivity.

このことから、封着ガラス9の厚みを全体的に大きくして、低背域11での濡れ性を高めることが考えられた。しかし、この場合には、封着ガラス9の量が多くなり、カバー母体の外周に溶着する際、あるいは容器本体1への接合時に、面積の大きいカバーの4角部に凝集する。このため、4角部から封着ガラス9が容器本体1内に流入する。そして、水晶片2に付着して振動特性を悪化させ、特性不良として廃品となる問題があった。   From this, it was considered that the thickness of the sealing glass 9 was increased as a whole and the wettability in the low-back region 11 was improved. However, in this case, the amount of the sealing glass 9 increases, and when it is welded to the outer periphery of the cover base or when it is joined to the container body 1, it aggregates at the four corners of the cover having a large area. For this reason, the sealing glass 9 flows into the container main body 1 from the four corners. Then, there is a problem that it adheres to the crystal piece 2 to deteriorate the vibration characteristics and becomes a waste product as a characteristic defect.

これらは、容器本体1の平面外形が小さくなるほど(例えば3.2×2.5mm)、容器本体1の枠幅も狭くなって(例えば0.3mm程度)、封着ガラス9のガス抜き穴10の制御が困難になる。また、容器本体1の内積も小さくなって、水晶片2と内周との間隙も狭くなるので、封着ガラス9の流入による問題が大きくなる。例えば水晶片2の外形は2.0×1.4mm程度となって、内周との間隙は概ね0.25mm以下となる。   As the planar outer shape of the container body 1 becomes smaller (for example, 3.2 × 2.5 mm), the frame width of the container body 1 becomes narrower (for example, about 0.3 mm), and the control of the vent hole 10 of the sealing glass 9 becomes difficult. become. Moreover, since the inner product of the container main body 1 is reduced and the gap between the crystal piece 2 and the inner periphery is also reduced, the problem due to the inflow of the sealing glass 9 is increased. For example, the external shape of the crystal piece 2 is about 2.0 × 1.4 mm, and the gap with the inner periphery is about 0.25 mm or less.

(発明の目的)
本発明は、容器本体に対する接合を確実にして生産性を高めたガラス封止カバー、及びこれを用いて封着ガラスの付着を防止して振動特性を良好に維持した表面実装振動子を提供することを目的とする。
(Object of invention)
The present invention provides a glass sealing cover that improves the productivity by ensuring bonding to a container body, and a surface-mounted vibrator that uses this to prevent adhesion of sealing glass and maintain good vibration characteristics. For the purpose.

(第1解決手段)
本発明は、特許請求の範囲(請求項1)に示したように、周回する封着ガラスをカバー母体の外周に有するとともに、前記封着ガラスはガス抜き穴を形成する厚みの小さい低背域を有し、水晶片が収容される凹状とした容器本体の開口端面を封止する水晶振動子用のガラス封止カバーにおいて、前記封着ガラスの少なくとも前記低背域は前記カバー母体の内方に突出した構成とする。
(第2解決手段)
また、本発明は、特許請求の範囲(請求項4)に示したように、水晶片と、前記水晶片を収容する凹部を有する容器本体と、前記容器本体の開口端面に封着ガラスによって接合されて前記水晶片を密閉封入するカバー母体と、を有する水晶振動子の製造方法において、前記カバー母体に前記封着ガラスを溶着させて、前記カバー母体と、前記カバー母体の外周を周回するとともに、凹状のガス抜き穴を形成する高さの小さい低背域を有して、少なくとも前記低背域は前記カバー母体の内方に突出した前記封着ガラスと、を有するガラス封止カバーを作製するガラス封止カバー作製工程と、前記水晶片を前記凹部に収容した前記容器本体の開口端面に前記封着ガラスを対向させて前記ガラス封止カバーを載置する載置工程と、前記封着ガラスを加熱溶融させて前記カバー母体と前記容器本体とを接合する接合工程と、を有する構成とする。
(First solving means)
As shown in the claims (Claim 1), the present invention has a sealing glass that circulates on the outer periphery of the cover base body, and the sealing glass has a low-profile low-profile region that forms a vent hole. the a, in the glass sealing cover for the crystal oscillator for sealing the open end face of the container body has a concave that crystal blank is accommodated, at least the low profile area of the sealing glass is inside of the cover base It is set as the structure which protruded.
(Second solution)
Further, according to the present invention, as shown in the claims (Claim 4), a crystal piece, a container main body having a concave portion for accommodating the crystal piece, and an opening end surface of the container main body are joined by sealing glass. And a cover matrix for hermetically enclosing the quartz crystal piece, wherein the sealing glass is welded to the cover matrix to circulate around the cover matrix and the outer periphery of the cover matrix. A glass sealing cover having a low profile area with a small height to form a concave vent hole, and at least the low profile area projecting inward of the cover matrix. A glass sealing cover manufacturing step, a mounting step of mounting the glass sealing cover with the sealing glass facing the opening end surface of the container body in which the crystal piece is accommodated in the recess, and the sealing Glass By hot melting a structure having a bonding step of bonding the container body and the cover base.

(第1解決手段による効果)
第1解決手段のガラス封止カバーであれば、ガス抜き穴を形成する低背域はカバー母体の内側に突出するので、低背域での幅は大きくなってガス抜き穴での封着ガラスの量を多くする。この場合、低背域の高さを小さくしたことによって減少した分を補填する程度の幅(突出長)とする。したがって、容器本体に対する封止時には、ガス抜き穴のない均一の高さとしたときと同程度のガラス量となるので、容器本体の開口端面に対する濡れ性を良好に維持する。
(Effects of the first solving means)
In the case of the glass sealing cover of the first solving means, the low-profile region that forms the vent hole protrudes to the inside of the cover base, so that the width in the low-profile region becomes large and the sealing glass at the vent hole Increase the amount of. In this case, the width (protrusion length) is set so as to compensate for the decrease caused by reducing the height of the low-profile area. Accordingly, when the container body is sealed, the glass amount is about the same as that when the container body has a uniform height without a vent hole, so that the wettability with respect to the opening end surface of the container body is maintained well.

そして、封着ガラスの低背域を除く高さは従来と同じで、封着ガラスの量を全体的に多くするものでもないので、封着ガラスが4角部に凝集して容器本体内に流入することを防止する。したがって、容器本体に対する接合を確実にして生産性を高められる。   And the height of the sealing glass excluding the low profile is the same as the conventional one, and it does not increase the amount of the sealing glass as a whole, so the sealing glass aggregates in the four corners and enters the container body. Prevent inflow. Therefore, it is possible to improve the productivity by reliably joining the container body.

(第1解決手段の実施態様項)
本発明の請求項2では、請求項1において、前記低背域とともに前記低背域の少なくとも一端側の前記低背域よりも高さの大きい前記封着ガラスが前記カバー母体の内方に突出する。これによれば、低背域よりも少なくとも一端側の高さの大きい封着ガラスをも突出するので、ガス抜き穴部での封着ガラスの量を多くする。また、一端側の高さの大きい方から低い方へ流入して、ガス抜き穴を閉塞しやすい。
(Embodiment section of first solving means)
According to a second aspect of the present invention, in the first aspect, the sealing glass having a height higher than the low-back region at least one end side of the low-back region together with the low-back region protrudes inward of the cover matrix. To do. According to this, since the sealing glass whose height at least on one end side is larger than the low profile region also protrudes, the amount of the sealing glass in the gas vent hole is increased. Moreover, it flows in from the one where the height of one end side is larger to the lower one, and the gas vent hole is easily closed.

同請求項3では、請求項1において、前記低背域とともに前記低背域の両端側の前記低背域よりも高さの大きい前記封着ガラスが前記カバー母体の内方に突出する。これによれば、低背域の両端側の高さの大きい封着ガラスを突出するので、ガス抜き穴部での封着ガラスの量をさらに多くする。また、両端側の高さの大きい方から低い方へ流入するので、ガス抜き穴をさらに閉塞しやすい。 In the third aspect of the present invention, in the first aspect, the sealing glass having a height higher than that of the low-back area on both ends of the low-back area together with the low-back area protrudes inward of the cover matrix . According to this, since the sealing glass with a large height on both end sides of the low profile region protrudes, the amount of the sealing glass in the gas vent hole is further increased. Moreover, since it flows in from the one where the height of both end sides is large to the one where it is low, it is easier to close the vent hole.

(第2解決手段による効果)(Effects of the second solving means)
第2解決手段の製造方法であれば、ガラス封止カバー作製工程で、ガス抜き穴を形成する低背域はカバー母体の内側に突出するように封着ガラスを溶着するので、低背域での幅は大きくなってガス抜き穴での封着ガラスの量を多くする。したがって、接合工程では、低背域の両端側の高さの大きい封着ガラスが低背域に流入するとともに、毛細管現象によって容器本体の開口端面との間に侵入するため、低背域の厚みが小さくなることによって生ずる容器本体の開口端面に対する濡れ性の悪化を防止してこれを良好にし、容器本体に対する接合を密にする。  If it is a manufacturing method of the 2nd solution means, in a glass sealing cover preparation process, since the low back area which forms a vent hole will weld sealing glass so that it may protrude inside a cover mother body, Increases the amount of sealing glass in the vent hole. Therefore, in the joining process, the sealing glass having a large height on both ends of the low-back area flows into the low-back area and enters between the opening end face of the container body by capillary action, so the thickness of the low-back area This prevents the deterioration of the wettability with respect to the opening end surface of the container main body caused by the decrease in the thickness of the container main body.

(第2解決手段の実施態様項)(Embodiment section of second solving means)
本発明の請求項5では、前記ガラス封止カバー作製工程において、前記載置工程後に前記低背域が前記容器本体の開口端面の内周より内側に突出するように、前記封着ガラスを溶着させる構成とする。これによれば、ガス抜き穴の低背域を除く封着ガラスは容器本体の内周にまで形成できるので、所謂スルーパスを長くできて気密を確実にする。  In Claim 5 of this invention, in the said glass sealing cover preparation process, the said sealing glass is welded so that the said low back area may protrude inside from the inner periphery of the opening end surface of the said container main body after the said installation process. It is set as the structure made to do. According to this, since the sealing glass excluding the low-profile region of the vent hole can be formed up to the inner periphery of the container body, a so-called through path can be lengthened to ensure airtightness.

第1図は本発明の一実施形態を説明するガラス封止カバーの一主面の平面図、同図(b)はA−A一部断面図である。なお、前従来例と同一部分には同番号を付与してその説明は簡略又は省略する。   FIG. 1 is a plan view of one main surface of a glass sealing cover for explaining an embodiment of the present invention, and FIG. In addition, the same number is attached | subjected to the same part as a prior art example, and the description is simplified or abbreviate | omitted.

ガラス封止カバー3は前述のようにカバー本体をセラミックとし、一主面の外周には周回する封着ガラス9が溶着によって設けられる。ここでも、封着ガラス9と容器本体1との内周は一致し、外周は容器本体よりも小さくする。そして、矩形状としたガラス封止カバー3の対向する短辺の中央部に高さの小さい低背域11が設けられた凹状のガス抜き穴10を有する。   As described above, the glass sealing cover 3 is made of ceramic as the cover body, and the sealing glass 9 that circulates around the outer periphery of one main surface is provided by welding. Also here, the inner periphery of the sealing glass 9 and the container main body 1 coincide, and the outer periphery is made smaller than the container main body. And it has the concave-shaped degassing hole 10 in which the low-profile area 11 with small height was provided in the center part of the short side which the glass sealing cover 3 made into the rectangular shape opposes.

この実施形態では、封着ガラス9のガス抜き穴10を形成する低背域11及びその両端側の高さの大きい封着ガラス9を含めたガス抜き穴部の幅を大きくして、容器本体1の枠内周から内方に突出させる。ここでは、低背域11よって減少した封着ガラス9の量以上となる程度に突出させる。そして、前述同様に、ガラス封止カバー3の外周を容器本体1の開口端面に当接して位置決めし、Nガス雰囲気中で封着ガラス9を加熱溶融する。これにより、容器本体1内の水晶片2を密閉封入する(前第3図参照)。   In this embodiment, the width of the gas vent hole portion including the low-profile region 11 forming the gas vent hole 10 of the sealing glass 9 and the sealing glass 9 having a large height on both ends thereof is increased, and the container body 1 is projected inward from the inner periphery of the frame. Here, it is made to protrude to the extent which becomes more than the quantity of the sealing glass 9 reduced by the low profile region 11. And as above-mentioned, the outer periphery of the glass sealing cover 3 contacts and positions the opening end surface of the container main body 1, and the sealing glass 9 is heat-melted in N gas atmosphere. Thereby, the crystal piece 2 in the container body 1 is hermetically sealed (see the previous FIG. 3).

このような構成であれば、ガラス封止カバー3の封着ガラス9の溶融時には、前述同様、ガス抜き穴10によって加熱による高圧ガス(N)が適度に抜けて、正常に封止される「前第5図(c)」。そして、低背域11及びその両端側のガス抜き穴部を突出させるので、ガス抜き穴部での封着ガラス9の量が多くなる。   With such a configuration, when the sealing glass 9 of the glass sealing cover 3 is melted, the high-pressure gas (N) by heating is appropriately discharged through the gas vent hole 10 as described above, and is normally sealed. Previous FIG. 5 (c) ". And since the low vent region 11 and the gas vent holes on both ends thereof are projected, the amount of the sealing glass 9 in the gas vent holes increases.

この場合は、高さの大きい両端側の封着ガラス9が低背域11に流入するとともに、毛細管現象によって容器本体1の開口端面との間に侵入する。したがって、低背域11の厚みが小さくことによって生ずる容器本体1の開口端面に対する濡れ性の悪化を防止してこれを良好にし、容器本体1に対する接合を密にする。そして、接合が密であることから、ガス抜き穴10からの吹き出しもなく、機密性を確実にする。   In this case, the sealing glass 9 on both end sides having a large height flows into the low-profile region 11 and enters between the opening end surface of the container body 1 by capillary action. Therefore, the deterioration of the wettability with respect to the opening end surface of the container main body 1 caused by the small thickness of the low-profile region 11 is prevented and improved, and the bonding to the container main body 1 is made dense. And since a junction is dense, there is no blowing from the degassing hole 10, and confidentiality is ensured.

そして、ガス抜き穴部のみを突出させて4角部の周辺は従来同様なので、溶融時には封着ガラス9の凝集もなく、容器本体内1への流入を防止する。したがって、封着ガラス9が水晶片2へ付着することもないので、振動特性を良好に維持する。   And since only the gas vent hole part is protruded and the periphery of the four corners is the same as the conventional one, there is no aggregation of the sealing glass 9 at the time of melting, and the inflow into the container body 1 is prevented. Therefore, since the sealing glass 9 does not adhere to the crystal piece 2, the vibration characteristics are maintained well.

(他の事項)
上記実施形態では、低背域11及びその両端側のガス抜き穴部を突出させが、例えば低背域11及びその一端側のみであっても「第2図(a)」、あるいは低背域11のみであっても「同図(b)」同様の効果を奏する。また、ガス抜き穴10は対向する短辺方向に設けたが、長辺方向等であってもよいことは勿論である。
(Other matters)
In the above embodiment, the low-profile region 11 and the gas vent holes at both ends thereof are protruded. For example, even in the low-profile region 11 and only one end thereof, “FIG. 2 (a)” or the low profile region Even if only 11 is provided, the same effect as in FIG. Further, although the gas vent hole 10 is provided in the opposing short side direction, it is needless to say that it may be in the long side direction or the like.

また、窒素雰囲気中での封止としたが、例えば真空チャンバ内での封止であっても完全な真空ではないので、容器本体にカバーを当接した初期状態では例えば内圧が高まり、ガスの吹き出しを生ずるので、真空封止の場合でも有用となる。   In addition, although the sealing is performed in a nitrogen atmosphere, for example, even in the vacuum chamber, since the vacuum is not complete, for example, in the initial state in which the cover is in contact with the container body, the internal pressure increases, Since the blowout is generated, it is useful even in the case of vacuum sealing.

本発明の一実施形態を説明するガラス封止カバーの一主面の平面図、同図(b)はA−A一部断面図である。The top view of the one main surface of the glass sealing cover explaining one Embodiment of this invention, the figure (b) is AA partial sectional drawing. 本発明の他の実施形態を説明する図で、同図(ab)ともにガラス封止カバーの一主面の平面図である。It is a figure explaining other embodiment of this invention, and the same figure (ab) is a top view of one main surface of a glass sealing cover. 従来例を説明する図で、同3図(a)は表面実装振動子の断面図、同図(b)は同カバーを除く平面図、同図(c)は水晶片の平面図である。FIG. 3A is a cross-sectional view of a surface-mounted vibrator, FIG. 3B is a plan view excluding the cover, and FIG. 3C is a plan view of a crystal piece. 従来例を説明する図で、同図(a)ガラス封止カバーの一主面の平面図、同図(b)はA−A一部断面図、同図(c)は容器本体への接合時の一部断面とした短辺方向の側面図である。It is a figure explaining a prior art example, The figure (a) The top view of one main surface of a glass sealing cover, The figure (b) is AA partial sectional drawing, The figure (c) is the joining to a container main body. It is the side view of the short side direction made into the partial cross section at the time. 従来例を説明する図で、同図(ab)は不良品の例(一部断面図)、同図(c)は良品の例(一部断面図)である。FIG. 4B is a diagram for explaining a conventional example. FIG. 4A is an example of a defective product (partial sectional view), and FIG. 3C is an example of a non-defective product (partial sectional view).

1 容器本体、2 水晶片、3 ガラス封止カバー、4 水晶端子、5 実装電極、6 励振電極、7 引出電極、8 導電性接着剤、9 封着ガラス、10 ガス抜き穴、11 低背域、   DESCRIPTION OF SYMBOLS 1 Container body, 2 Crystal piece, 3 Glass sealing cover, 4 Crystal terminal, 5 Mounting electrode, 6 Excitation electrode, 7 Extraction electrode, 8 Conductive adhesive, 9 Sealing glass, 10 Gas vent hole, 11 Low profile ,

Claims (5)

周回する封着ガラスをカバー母体の外周に有するとともに、前記封着ガラスは凹状のガス抜き穴を形成する高さの小さい低背域を有し、水晶片が収容される凹状とした容器本体の開口端面を封止する水晶振動子用のガラス封止カバーにおいて、前記封着ガラスの少なくとも前記低背域は前記カバー母体の内方に突出したことを特徴とする水晶振動子用のガラス封止カバー。 A sealing glass that wraps around the outer periphery of the cover base, and the sealing glass has a low profile with a small height that forms a concave vent hole, and is a concave container body that accommodates a crystal piece. in glass sealing cover for the crystal oscillator for sealing the opening end face, at least the low profile area of the sealing glass is glass sealing for the crystal oscillator, characterized in that inwardly projecting of the cover base cover. 請求項1において、前記低背域とともに前記低背域の少なくとも一端側の前記低背域よりも高さの大きい前記封着ガラスが前記カバー母体の内方に突出した水晶振動子用のガラス封止カバー。 2. The glass seal for a crystal resonator according to claim 1, wherein the sealing glass having a height higher than that of the low-back region and at least one end of the low-back region is projected inward of the cover base. Stop cover. 請求項1において、前記低背域とともに前記低背域の両端側の前記低背域よりも高さの大きい前記封着ガラスが前記カバー母体の内方に突出した水晶振動子用のガラス封止カバー。 2. The glass seal for a crystal resonator according to claim 1, wherein the sealing glass having a height higher than that of the low-back area on both ends of the low-back area together with the low-back area protrudes inward of the cover matrix. cover. 水晶片と、前記水晶片を収容する凹部を有する容器本体と、前記容器本体の開口端面に封着ガラスによって接合されて前記水晶片を密閉封入するカバー母体と、を有する水晶振動子の製造方法において、  A method of manufacturing a crystal resonator, comprising: a crystal piece; a container main body having a concave portion that accommodates the crystal piece; and a cover base that is bonded to an opening end surface of the container main body by a sealing glass and hermetically encloses the crystal piece. In
前記カバー母体に前記封着ガラスを溶着させて、前記カバー母体と、前記カバー母体の外周を周回するとともに、凹状のガス抜き穴を形成する高さの小さい低背域を有して、少なくとも前記低背域は前記カバー母体の内方に突出した前記封着ガラスと、を有するガラス封止カバーを作製するガラス封止カバー作製工程と、  The sealing glass is welded to the cover base, and the cover base and the cover base have a low profile with a small height that circulates around the outer periphery of the cover base and forms a concave vent hole. The low-back region has a glass sealing cover manufacturing step for preparing a glass sealing cover having the sealing glass protruding inward of the cover matrix,
前記水晶片を前記凹部に収容した前記容器本体の開口端面に前記封着ガラスを対向させて前記ガラス封止カバーを載置する載置工程と、  A placing step of placing the glass sealing cover with the sealing glass facing the opening end surface of the container body in which the crystal piece is accommodated in the recess;
前記封着ガラスを加熱溶融させて前記カバー母体と前記容器本体とを接合する接合工程と、を有することを特徴とする水晶振動子の製造方法。  A method of manufacturing a crystal resonator, comprising: a joining step of joining the cover base body and the container body by heating and melting the sealing glass.
前記ガラス封止カバー作製工程において、前記載置工程後に前記低背域が前記容器本体の開口端面の内周より内側に突出するように、前記封着ガラスを溶着させる、請求項4に記載の水晶振動子の製造方法。  In the said glass sealing cover preparation process, the said sealing glass is welded so that the said low back area may protrude inside from the inner periphery of the opening end surface of the said container main body after the said mounting process. A method for manufacturing a crystal unit.
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