JP4730026B2 - Flexible substrate connection structure, droplet discharge head, and droplet discharge apparatus - Google Patents

Description

  The present invention relates to a flexible substrate connection structure, a droplet discharge head, and a droplet discharge apparatus.

As one method for manufacturing a microdevice, a droplet discharge method (inkjet method) has been proposed. This droplet discharge method is a method in which a functional liquid containing a material for forming a device is formed into droplets and discharged from a droplet discharge head. The following patent document discloses an example of a technique related to a droplet discharge head (inkjet recording head). The droplet discharge heads disclosed in these patent documents have a structure in which a driving element (piezoelectric element) is connected to a driving device (driver IC) by wire bonding.
JP 2003-159800 A JP 2004-284176 A

  By the way, when manufacturing a microdevice based on the droplet discharge method, in order to meet the demand for further miniaturization of the microdevice, the distance between the nozzle openings provided in the droplet discharge head (nozzle pitch) Is desired to be as small (narrow) as possible. However, since a plurality of the piezoelectric elements are provided corresponding to the nozzle openings, when the nozzle pitch is reduced, the distance between the piezoelectric elements is also reduced (shortened) corresponding to the nozzle pitch. However, if the distance between the piezoelectric elements is reduced (shortened), it is very difficult to connect each of the plurality of piezoelectric elements and the driver IC by wire bonding because a short circuit easily occurs between the wires. Workability will be significantly impaired.

  Therefore, in order to solve the problem caused by the connection by such wire bonding, a driving element (flexible substrate) in which a wiring pattern is formed in advance can be used without causing inconvenience such as a short circuit. It is conceivable to make an electrical connection between the piezoelectric element) and the driving device (driver IC).

  However, in the liquid droplet ejection head as described above, the driving element is usually arranged on the bottom surface side of the concave portion formed in the base and the driving device is arranged outside the concave portion. When an electrical connection is to be made using a substrate, it is necessary to connect the flexible substrate to the base body with sufficient strength without causing peeling or the like.

  Furthermore, it is conceivable that the flexible substrate is connected to the substrate by an anisotropic conductive material such as an anisotropic conductive film (ACF) or an anisotropic conductive paste (ACP). For example, the conductive particles contained in the conductive material may conduct in the width direction of the flexible substrate, which may cause a short circuit between the wiring patterns formed in parallel with the flexible substrate. Therefore, it is desired to provide a flexible substrate connection structure that prevents such a short circuit.

  The present invention has been made in view of the above circumstances, and an object of the present invention is to reduce the nozzle pitch without deteriorating workability when connecting the drive device (driver IC) and the drive element (piezoelectric element). Flexible substrate connection that enables narrowing, secures the connection strength of the flexible substrate, and prevents short-circuiting between wiring patterns formed in parallel to the flexible substrate. It is an object to provide a structure, a droplet discharge head, and a droplet discharge device including the droplet discharge head.

In order to achieve the above object, the flexible substrate connection structure of the present invention includes a first conductive connection portion provided on a bottom surface portion of a recess formed in a base and a second conductive connection provided on the outside of the recess. A flexible substrate for electrically connecting a portion to the base body,
The flexible substrate is substantially J-shaped in a side view along the bottom surface portion of the concave portion and a pair of opposing side wall surfaces rising from both sides of the bottom surface portion to the surface of the base body. A bent portion formed by bending into a shape or a substantially U shape is formed,
On the surface of the flexible substrate facing the inner surface of the concave portion, a wiring pattern extending from the outer side of the concave portion on one side of the pair of opposing side wall surfaces to at least the bottom surface side of the concave portion. Are formed,
In the flexible substrate, a surface of the bent portion facing the inner surface side of the concave portion is adhered to the concave portion by an anisotropic conductive material,
The wiring pattern is electrically connected to the first conductive connection portion via the anisotropic conductive material at the bottom surface portion of the concave portion, and outside the concave portion on one side of the pair of side walls. The second conductive connection portion is electrically connected.

According to this flexible substrate connection structure, the first conductive connection portion and the second conductive connection portion are electrically connected by the flexible substrate on which a plurality of wiring patterns are formed. Even if the pitch between them becomes small (narrow), the connection between the first conductive connection portion and the second conductive connection portion can be easily performed without impairing the workability at the time of connection.
Further, with respect to the recess formed in the base, on the flexible substrate, the bottom portion of the recess, and a pair of opposing side wall surfaces rising from both sides of the bottom portion to the surface of the base, respectively, A bent portion formed by bending in a substantially J shape or substantially U shape when viewed from the side is formed, and a surface of the bent portion facing the inner surface of the recess is formed in the recess by an anisotropic conductive material. Since it is attached, by attaching a flexible substrate not only to the bottom surface portion and one side wall surface in the recess, but also to the other side wall surface, the connection strength is increased and sufficient connection strength is obtained. Can be secured.

Moreover, in the connection structure of the flexible substrate, it is preferable that the flexible substrate has an end portion on the other side of the pair of side walls extending outside the concave portion.
Thus, since the edge part of the flexible substrate stuck to the other side of a pair of side wall in the said recessed part has extended the outer side of the said recessed part, the said flexible board | substrate to this recessed part The sticking area is increased, and therefore the connection strength is further increased.

In this case, the wiring pattern passes from the outer side of the concave portion on one side of the pair of opposing side wall surfaces, passes through the bottom surface portion of the concave portion, and is on the other side of the pair of side wall surfaces. It is preferable to extend to the outside of the concave portion.
In this way, when the flexible substrate is connected in the recess by the anisotropic conductive material, a part of the conductive particles in the anisotropic conductive material is formed in the recess along the groove formed between the wiring patterns. It is discharged to the outside. That is, when the anisotropic conductive material melts, a part of the anisotropic conductive material flows out to the outside of the recess, so that the conductive particles in the anisotropic conductive material stay in the recess, and a plurality of wiring patterns By aggregating them so as to be continuous, it is possible to avoid short-circuiting between the plurality of wiring patterns.

In the flexible substrate connection structure, the second conductive connection portion is preferably a connection terminal of the device.
In this way, the connection structure can be made compact by mounting the device directly on the flexible substrate. In addition, when the connection structure is formed, the device is mounted on the flexible substrate in advance, and then the flexible substrate is stuck in the recess, thereby making the workability of the entire process including the device mounting easier. It becomes possible to.

In the flexible substrate connection structure, a concave groove is formed in the base body, a partition wall is provided in the concave groove along the length direction, and the concave portion is formed by the partition wall. The part divided | segmented and comprised may be sufficient.
In this way, for example, by forming two concave portions in one concave groove, it becomes possible to mount flexible substrates on both sides of the concave groove, respectively, thus increasing the mounting efficiency and high integration. Can be achieved.

The droplet discharge head of the present invention includes a device, a drive element driven by the device, and a base body formed with a recess, and the drive element or a conductive connection portion connected to the drive element on the bottom surface of the recess. In the droplet discharge head in which the device is arranged outside the recess,
The base is provided with a flexible substrate that electrically connects the device and the driving element or a conductive connection portion connected thereto,
The flexible substrate is substantially J-shaped in a side view along the bottom surface portion of the concave portion and a pair of opposing side wall surfaces rising from both sides of the bottom surface portion to the surface of the base body. A bent portion formed by bending into a shape or a substantially U shape is formed,
On the surface of the flexible substrate facing the inner surface of the concave portion, a wiring pattern extending from the outer side of the concave portion on one side of the pair of opposing side wall surfaces to at least the bottom surface side of the concave portion. Are formed,
In the flexible substrate, a surface of the bent portion facing the inner surface side of the concave portion is adhered to the concave portion by an anisotropic conductive material,
The wiring pattern is electrically connected to the driving element or a conductive connection portion connected to the driving element via the anisotropic conductive material at a bottom surface portion of the concave portion, and on one side of the pair of side walls. It is characterized in that it is made to conduct directly or indirectly to the device outside the recess.

According to this droplet discharge head, the drive element or the conductive connection part connected to the drive element and the device are electrically connected by the flexible substrate on which a plurality of wiring patterns are formed. Even if the pitch between the conductive connection portions is reduced (narrow), the drive element or the conductive connection portion connected to the drive element or the device can be easily connected without impairing workability at the time of connection. Therefore, it is possible to reduce the nozzle pitch.
Further, with respect to the recess formed in the base, on the flexible substrate, the bottom portion of the recess, and a pair of opposing side wall surfaces rising from both sides of the bottom portion to the surface of the base, respectively, A bent portion formed by bending in a substantially J shape or substantially U shape when viewed from the side is formed, and a surface of the bent portion facing the inner surface of the recess is formed in the recess by an anisotropic conductive material. Since it is attached, by attaching a flexible substrate not only to the bottom surface portion and one side wall surface in the recess, but also to the other side wall surface, the connection strength is increased and sufficient connection strength is obtained. Can be secured.

In the droplet discharge head, it is preferable that the flexible substrate has an end on the other side of the pair of side walls extending outside the recess.
Thus, since the edge part of the flexible substrate stuck to the other side of a pair of side wall in the said recessed part has extended the outer side of the said recessed part, the said flexible board | substrate to this recessed part The sticking area is increased, and therefore the connection strength is further increased.

In this case, the wiring pattern passes from the outer side of the concave portion on one side of the pair of opposing side wall surfaces, passes through the bottom surface portion of the concave portion, and is on the other side of the pair of side wall surfaces. It is preferable to extend to the outside of the concave portion.
In this way, when the flexible substrate is connected in the recess by the anisotropic conductive material, a part of the conductive particles in the anisotropic conductive material is formed in the recess along the groove formed between the wiring patterns. It is discharged to the outside. That is, when the anisotropic conductive material melts, a part of the anisotropic conductive material flows out to the outside of the recess, so that the conductive particles in the anisotropic conductive material stay in the recess, and a plurality of wiring patterns By aggregating them so as to be continuous, it is possible to avoid short-circuiting between the plurality of wiring patterns.

Further, in the droplet discharge head, a concave groove is formed in the base body, a partition wall is provided in the concave groove along the length direction, and the concave portion is divided by the partition wall. It may be a part constituted.
In this way, for example, by forming two concave portions in one concave groove, it becomes possible to mount flexible substrates on both sides of the concave groove, respectively, thus increasing the mounting efficiency and high integration. Can be achieved.

A droplet discharge apparatus according to the present invention includes the droplet discharge head described above.
According to this droplet discharge device, the drive element or the conductive connection portion connected to the drive element can be easily connected to the device, and therefore the droplet discharge head is provided that can reduce the nozzle pitch. When applied to the formation of various devices and patterns, it becomes possible to meet these further miniaturization requirements.
In addition, since the droplet discharge head having a sufficiently high connection strength of the flexible substrate to the concave portion is provided, the droplet discharge device itself can ensure long-term reliability.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following description, an XYZ orthogonal coordinate system is set, and the positional relationship of each member will be described with reference to this XYZ orthogonal coordinate system. The predetermined direction in the horizontal plane is the X-axis direction, the direction orthogonal to the X-axis direction in the horizontal plane is the Y-axis direction, and the direction orthogonal to each of the X-axis direction and the Y-axis direction (that is, the vertical direction) is the Z-axis direction. To do.

<Droplet ejection head>
An embodiment of a droplet discharge head of the present invention will be described with reference to FIGS. 1 is an external perspective view showing an embodiment of a droplet discharge head, FIG. 2 is a partially broken view of the perspective view of the droplet discharge head as viewed from below, and FIG. 3 is a view taken along line AA in FIG. Sectional drawing and FIG. 4 are the figures which looked at the flexible substrate from the lower surface side.
The droplet discharge head 1 is applied with the flexible substrate connection structure of the present invention, and includes a driver IC (device) 200, a piezoelectric element (driving element) 300 driven by the driver IC 200, and a recess 250. And a substrate formed by ejecting functional liquid droplets.

  As shown in FIG. 3, the liquid droplet ejection head 1 is connected to a nozzle substrate 16 having a nozzle opening 15 through which liquid droplets are ejected, and an upper surface of the nozzle substrate 16 to form a flow path through which the liquid droplets flow. In order to form the reservoir 100, connected to the flow path forming substrate 10, the vibration plate 400 connected to the upper surface of the flow path forming substrate 10 and displaced by driving the piezoelectric element (driving element) 300, and the upper surface of the vibration plate 400. The reservoir forming substrate 20, the flexible flexible substrate (flexible substrate) 500 provided on the upper surface side of the reservoir forming substrate 20, and the lower surface 500 A of the flexible substrate 500, A driver IC (device) 200 for driving and a wiring pattern provided on the lower surface 500A of the flexible substrate 500 and electrically connecting the driver IC 200 and the piezoelectric element 300 10, but it configured with a. In the present embodiment, the flow path forming substrate 10 and the reservoir forming substrate 20 and the like disposed on the flow path forming substrate 10 constitute a base formed by forming the concave portion 250.

  The operation of the droplet discharge head 1 is controlled by an external controller CT (see FIG. 1). The pressure generation chamber 12 in which the functional liquid before being discharged from the nozzle opening 15 is disposed is formed by a space surrounded by the flow path forming substrate 10, the nozzle substrate 16, and the vibration plate 400. . A reservoir 100 that preliminarily holds the functional liquid before being supplied to the pressure generating chamber 12 is formed by a space surrounded by the reservoir forming substrate 20 and the flow path forming substrate 10.

  The lower surface side of the flow path forming substrate 10 is open, and the nozzle substrate 16 is adhered to the lower surface of the flow path forming substrate 10 so as to cover the opening. The lower surface of the flow path forming substrate 10 and the nozzle substrate 16 are fixed to each other through, for example, an adhesive or a heat welding film. As shown in FIG. 2, a plurality of nozzle openings 15 for discharging droplets are formed in the nozzle substrate 16 in an aligned state. That is, a plurality of nozzle openings 15 are arranged in the Y-axis direction on the nozzle substrate 16, whereby the first nozzle opening group 15 </ b> A, the second nozzle opening group 15 </ b> B, the third nozzle opening group 15 </ b> C, and the fourth nozzle opening. Groups 15D are formed respectively.

The first nozzle opening group 15A and the second nozzle opening group 15B are arranged to face each other in the X-axis direction. The third nozzle opening group 15C is provided on the + Y side of the first nozzle opening group 15A, and the fourth nozzle opening group 15D is provided on the + Y side of the second nozzle opening group 15B. The third nozzle opening group 15C and the fourth nozzle opening group 15D are arranged to face each other in the X-axis direction.
In FIG. 2, each of the nozzle opening groups 15 </ b> A to 15 </ b> D is shown to be configured by six nozzle openings 15, but actually, for example, about 240 to 720 nozzle openings are provided. The unit 15 is configured.

  In the flow path forming substrate 10, a plurality of partition walls 11 are formed in the opening. The flow path forming substrate 10 is formed of a silicon single crystal that is a rigid body, and the plurality of partition walls 11 are formed by anisotropic etching of the silicon single crystal substrate that is a base material of the flow path forming substrate 10. ing. A plurality of pressure generating chambers 12 are formed by a space surrounded by the flow path forming substrate 10 having the plurality of partition walls 11, the nozzle substrate 16, and the diaphragm 400. A plurality of pressure generating chambers 12 are formed so as to correspond to the plurality of nozzle openings 15. That is, a plurality of pressure generation chambers 12 are provided side by side in the Y-axis direction so as to correspond to the plurality of nozzle openings 15 constituting each of the first to fourth nozzle opening groups 15A to 15D.

  A plurality of pressure generating chambers 12A corresponding to the first nozzle opening group 15A constitutes a first pressure generating chamber group 12A, and a plurality of pressure generating chambers 12 corresponding to the second nozzle opening group 15B are formed. Constitutes a second pressure generation chamber group 12B, and a plurality of pressure generation chambers 12 corresponding to the third nozzle opening group 15C constitutes a third pressure generation chamber group 12C, corresponding to the fourth nozzle opening group 15D. Thus, a fourth pressure generation chamber group 12D is configured by the plurality of pressure generation chambers 12 formed. The first pressure generation chamber group 12A and the second pressure generation chamber group 12B are disposed so as to face each other in the X-axis direction, and a partition wall 10K is formed between them. Similarly, a partition wall 10K is also formed between the third pressure generation chamber group 12C and the fourth pressure generation chamber group 12D, and these are arranged to face each other in the X-axis direction.

  Among the plurality of pressure generating chambers 12 forming the first pressure generating chamber group 12A, the end on the −X side is closed by the partition wall 10K described above, but the end on the + X side is connected to each other. 3 is connected to the reservoir 100 as shown in FIG. The reservoir 100 is introduced from the functional liquid inlet 25 and temporarily holds the functional liquid before being supplied to the pressure generation chamber 12, and is formed to extend in the Y axis direction on the reservoir forming substrate 20. The reservoir portion 21 is formed to extend in the Y-axis direction in the flow path forming substrate 10, and is formed to include a communication portion 13 that allows the reservoir portion 21 and each of the pressure generation chambers 12 to communicate with each other. .

  That is, the reservoir 100 is a functional liquid holding chamber (ink chamber) common to the plurality of pressure generating chambers 12 constituting the first pressure generating chamber group 12A. Then, the functional liquid introduced from the functional liquid introduction port 25 flows into the reservoir 100 through the introduction path 26 and passes through the supply path 14 to each of the plurality of pressure generation chambers 12 constituting the first pressure generation chamber group 12A. It comes to be supplied. Note that the pressure generation chambers 12 constituting the second, third, and fourth pressure generation chamber groups 12B, 12C, and 12D also communicate with the reservoir 100 similar to the above.

  The diaphragm 400 disposed between the flow path forming substrate 10 and the reservoir forming substrate 20 is provided on the elastic film 50 so as to cover the upper surface of the flow path forming substrate 10 and on the upper surface of the elastic film 50. The lower electrode film 60 is included. The elastic film 50 is made of, for example, silicon dioxide having a thickness of about 1 to 2 μm, and the lower electrode film 60 is made of, for example, platinum having a thickness of about 0.2 μm. In the present embodiment, the lower electrode film 60 is a common electrode for the plurality of piezoelectric elements 300.

  The piezoelectric element 300 for displacing the diaphragm 400, that is, the driving element in the present invention includes a piezoelectric film 70 provided on the upper surface of the lower electrode film 60 and an upper electrode film provided on the upper surface of the piezoelectric film 70. 80. The piezoelectric film 70 is formed with a thickness of about 1 μm, for example, and the upper electrode film 80 is formed with a thickness of about 0.1 μm, for example. The concept of the piezoelectric element 300 may include the lower electrode film 60 in addition to the piezoelectric film 70 and the upper electrode film 80. That is, the lower electrode film 60 in the present embodiment has both the function as the piezoelectric element 300 and the function as the diaphragm 400. In this embodiment, the elastic film 50 and the lower electrode film 60 function as the diaphragm 400. However, the elastic film 50 may be omitted, and the lower electrode film 60 may also serve as the elastic film (50). .

The piezoelectric element 300 is formed such that the upper electrode film 80 extends to the bottom surface portion of the recess 250 formed in the reservoir forming substrate 20, and the exposed portion on the bottom surface portion is the first of the present invention. The conductive connection portion 81 is a conductive connection portion.
In addition, a plurality of piezoelectric elements 300 are provided so as to correspond to the plurality of nozzle openings 15 and the pressure generation chambers 12, respectively. That is, the piezoelectric element 300 including the piezoelectric film 70 and the upper electrode film 80 is provided for each nozzle opening 15 (for each pressure generation chamber 12). As described above, the lower electrode film 60 functions as a common electrode for the plurality of piezoelectric elements 300, and the upper electrode film 80 functions as an individual electrode for the plurality of piezoelectric elements 300.

  A plurality of these piezoelectric elements 300 are juxtaposed in the Y-axis direction in correspondence with each of the nozzle openings 15 constituting the first nozzle opening group 15A, whereby the first piezoelectric element group 300A is formed. It is configured. Similarly, a part thereof is arranged in parallel in the Y-axis direction corresponding to each of the nozzle openings 15 constituting the second nozzle opening group 15B, thereby forming the second piezoelectric element group 300B. The first piezoelectric element group 300A and the second piezoelectric element group 300B are arranged to face each other in the X-axis direction. Further, third and fourth piezoelectric element groups (not shown) are configured so as to correspond to the nozzle openings 15 constituting the third and fourth nozzle opening groups 15C and 15D, respectively. The fourth piezoelectric element groups are arranged so as to face each other in the X-axis direction.

  A compliance substrate 30 having a sealing film 31 and a fixing plate 32 is bonded to the reservoir forming substrate 20. The sealing film 31 is made of a material having low rigidity and flexibility (for example, a polyphenylene sulfide film having a thickness of about 6 μm), and the upper part of the reservoir portion 21 is sealed by the sealing film 31. The fixing plate 32 is made of a hard material such as metal (for example, stainless steel having a thickness of about 30 μm). A region of the fixed plate 32 corresponding to the reservoir 100 is an opening 33 that is completely removed in the thickness direction. Under such a configuration, the upper portion of the reservoir 100 is sealed only by the flexible sealing film 31. Therefore, the flexible portion 22 that can be deformed by a change in internal pressure and It has become.

A functional liquid inlet 25 for supplying the functional liquid to the reservoir 100 is formed on the compliance substrate 30 outside the reservoir 100. Normally, when a functional liquid is supplied from the functional liquid introduction port 25 to the reservoir 100, a pressure change occurs in the reservoir 100 due to, for example, the flow of the functional liquid during driving of the piezoelectric element 300 or ambient heat. However, since the upper portion of the reservoir 100 is the flexible portion 22 sealed only by the sealing film 31 as described above, the flexible portion 22 is bent and deformed to absorb the pressure change. Therefore, the inside of the reservoir 100 is always maintained at a constant pressure. The other parts are held at a sufficient strength by the fixing plate 32.
The reservoir forming substrate 20 is provided with an introduction path 26 that allows the functional liquid inlet 25 to communicate with the side wall of the reservoir 100.

  In addition, a concave groove 700 extending in the Y-axis direction is formed in the central portion of the reservoir forming substrate 20 with respect to the X-axis direction. In the reservoir forming substrate 20 by the concave groove 700, the first sealing portion 20A for sealing the first piezoelectric element group 300A provided corresponding to the first pressure generating chamber group 12A, and the second pressure generating chamber group 12B. And a second sealing portion 20B for sealing the second piezoelectric element group 300B provided corresponding to the above. Similarly, a third sealing portion (not shown) for sealing a third piezoelectric element group (not shown) provided corresponding to the third pressure generation chamber group 12C, and a fourth pressure generation chamber group 12D. A fourth sealing portion (not shown) that seals a fourth piezoelectric element group (not shown) provided corresponding to is separated by a concave groove 700.

  A partition 710 is formed in the concave groove 700 along the length direction thereof. The partition 710 is directly formed on the reservoir forming substrate 20. The concave groove 700 is divided on both sides by a partition wall 710, and each of the divided portions is the concave portion 250. That is, in the present embodiment, the concave groove 700 is partitioned by the partition wall 710, so that two concave portions 250 are formed in the concave groove 700. And in these recessed parts 250, a part by the side of the flow-path formation board | substrate 10 (partition 10K) is exposed, and this exposed site | part becomes the bottom face part in the recessed part 250. FIG.

  On the other hand, a closed space that does not interfere with the operation of the piezoelectric element 300 is secured in a region of the reservoir forming substrate 20 facing the piezoelectric element 300, and this closed space serves as the piezoelectric element holding portion 24. The piezoelectric element holding part 24 is formed in each of the first to fourth sealing parts 20A to 20D (not shown) and covers the first to fourth piezoelectric element groups 300A to 300D (not shown). Is formed. Of the piezoelectric elements 300, at least the piezoelectric film 70 is sealed in the piezoelectric element holding portion 24.

  As described above, the reservoir forming substrate 20 also functions as a sealing member for blocking the piezoelectric element 300 from the external environment and sealing the piezoelectric element 300. That is, by sealing the piezoelectric element 300 with the reservoir forming substrate 20, it is possible to prevent deterioration or destruction of the piezoelectric element 300 due to an external environment such as moisture. Further, in the present embodiment, the piezoelectric element holding part 24 is only sealed, but for example, the piezoelectric element holding part 24 can be evacuated, or the piezoelectric element holding part 24 can be evacuated or a nitrogen or argon atmosphere or the like. The inside of the element holding portion 24 can be held at a low humidity, and the deterioration and destruction of the piezoelectric element 300 can be further reliably prevented.

  The reservoir forming substrate 20 is a rigid body, and as the material for forming the reservoir forming substrate 20, for example, a material substantially the same as the thermal expansion coefficient of the flow path forming substrate 10 such as glass or ceramic material is used. preferable. In this embodiment, a silicon single crystal substrate made of the same material as the flow path forming substrate 10 is used.

  Among the piezoelectric elements 300 sealed by the piezoelectric element holding part 24 of the first sealing part 20A, the end on the −X side of the upper electrode film 80 extends to the outside of the first sealing part 20A as described above. It extends and is exposed on the bottom surface of the recess 250 to form a conductive connection part (first conductive connection part) 81. In the present embodiment, a part of the lower electrode film 60 extends and is formed on the bottom surface of the recess 250, that is, on the flow path forming substrate 10. Accordingly, the insulating film 600 is formed between the lower electrode film 60 and the conductive connection portion 81 in order to prevent conduction between the lower electrode film 60 and the conductive connection portion 81 (upper electrode film 80). . Similarly, in the piezoelectric element 300 sealed by the piezoelectric element holding part 24 of the second sealing part 20B, the + X side end part of the upper electrode film 80 also extends to the outside of the second sealing part 20B. A conductive connection portion 81 is formed. Further, although not shown, a part of the upper electrode film 80 of the piezoelectric element 300 that is sealed by the third and fourth sealing portions 20C and 20D (not shown) is formed by the third and fourth sealing portions. It extends to the outside of the stop portions 20 </ b> C and 20 </ b> D and is exposed on the bottom surface portion of the recess 250, thereby forming a conductive connection portion 81.

The driver IC 200 for driving the piezoelectric element 300 is a device configured by, for example, a semiconductor integrated circuit (IC) including a circuit board and a driving circuit, and is connected to the lower surface 500A of the flexible substrate 500 in this embodiment. Yes.
The flexible substrate 500 is made of a flexible flexible circuit substrate, and is made of an insulating film-like member made of polyimide having a thickness of about 25 μm, for example. One side of the flexible substrate 500 extends to the first sealing portion 20A (20B), where the driver IC 200 is connected and the driver IC 200 is connected to the first sealing portion 20A (20B). It is fixed on the top.

  The other side of the flexible substrate 500 is bent and accommodated in the recess 250 and fixed. That is, as shown in the schematic diagram of FIG. 5, the flexible substrate 500 includes the bottom surface portion 250a of the recess 250 and side wall surfaces 250b and 250c located on both sides of the bottom surface portion 250a. The side wall surface 250b of the reservoir forming substrate 20 on one side and the side wall surface 250c of the partition wall 710 on the other side are bent into a substantially J shape (or a substantially U shape) in side view. A bent portion 505 is formed. The bent portion 505 is stuck in the recess 250 with the anisotropic conductive material 507.

  Here, the lower surface 500A of the flexible substrate 500, that is, the surface facing the inner surface side of the concave portion 250 in the bent portion 505 is formed from one side of the flexible substrate 500 to the other as shown in FIG. A plurality of wiring patterns 510 extending to the edge on the side are formed in parallel. A plurality of these wiring patterns 510 are formed in parallel corresponding to the number of the piezoelectric elements 300, and a conductive material such as copper is formed by a printing method, plating, etching, or the like. is there. Although simplified in FIG. 4, the wiring pattern 510 is formed to have a width of about 60 μm, and the interval between the wiring patterns 510 is also formed to be about 60 μm.

Then, as shown in FIG. 3, the wiring pattern 510 is connected to a connection terminal (not shown) of the driver IC 200 on one side of the flexible substrate 500, that is, the second conductive connection portion in the present invention. For example, they are directly connected and conducted through an anisotropic conductive material 507. That is, on one side of the flexible substrate 500, the driver IC 200 is flip-chip mounted at a predetermined position on the lower surface 500A, whereby the wiring pattern 510 and the connection terminal of the driver IC 200 are electrically connected. It is.
Further, the other side of the flexible substrate 500 is different from the conductive connection portion 81 formed by extending the upper electrode film 80 of the piezoelectric element 300 in the recess 250 as shown in FIG. Conduction is performed through the isotropic conductive material 507. Under such a configuration, the piezoelectric element 300 shown in FIG. 3 is electrically connected to a driver IC 200 for controlling the driving thereof.

  In FIG. 5, one side of the flexible substrate 500 is raised to the outside of the recess 250, and in this state, the driver IC 200 is connected and mounted outside the recess 250. Then, the flexible substrate 500 is bent, and the driver IC is fixed on the first sealing portion 20A (second sealing portion 20B) with an adhesive or the like as shown in FIG. However, it may be separated from the first sealing portion 20A (second sealing portion 20B) in the state shown in FIG.

  On the other side of the flexible substrate 500, the end of the side 506 that rises along the partition 710 of the bent portion 505 rises to the outside of the recess 250 and extends. An anisotropic conductive material 507 provided between the bent portion 505 and the inner surface of the concave portion 250 and sticking the flexible substrate 500 in the concave portion 250 is formed between the partition 710 and the flexible substrate 500. In the meantime, a part flows out and is fixed to the partition 710. Similarly, a part flows out and is fixed on the first sealing portion 20A (second sealing portion 20B).

  Therefore, the flexible substrate 500 has a bent portion 505 that is attached to the entire inner surface of the recess 250, particularly in the recess 250. For example, the flexible substrate 500 is attached only to the bottom surface and one side wall surface. Compared to, it is more firmly attached. The flow of the anisotropic conductive material 507 mainly occurs along the grooves formed between the wiring patterns 510, as will be described later.

  Here, for example, as shown in FIG. 4, four flexible substrates 500 are formed integrally, and a driver IC 200 is flip-chip mounted on a predetermined region of the lower surface 500A. A plurality (four) of driver ICs 200 are provided according to the first to fourth nozzle opening groups 15A to 15D.

  An opening 520 is formed in part of the flexible substrate 500. Specifically, the opening 520 is formed to extend in the Y-axis direction in a region between the first driver IC 200A and the second driver IC 200B and a region between the third driver IC 200C and the fourth driver IC 200D. Has been. A notch 521 is formed at each of both ends of the opening 520 in the Y-axis direction. With these cutout portions 521, a partial region (edge region) 530 of the flexible substrate 500 that faces the opening 520 can be bent (flexed) to the inside of the opening 520. The edge region 530 is a region between the drive circuit units 200A to 200D and the opening 520, and the edge portion 530E of the edge region 530 that faces the opening 520 is substantially linear along the Y-axis direction. Is formed. That is, in the present embodiment, the edge region 530 is a rectangular region whose longitudinal direction is the Y-axis direction, and is bent so that the edge portion 530E rotates about the Y-axis (θY direction). ing.

  Of the lower surface 500 </ b> A of the flexible substrate 500, a terminal portion 512 is configured by a part of the wiring pattern 510 in the edge region 530 (530 </ b> A, 530 </ b> B, 530 </ b> C, 530 </ b> D) in the opening 520. Specifically, in the first edge region 530A between the first driver IC 200A and the opening 520, a plurality of terminal portions 512 made of a wiring pattern 510 connected to the first driver IC 200A are formed. Here, the edge region 530A is bent along the inner surface of the recess 250 as shown in FIGS. 3 and 5 to form a bent portion 505. The edge region 530A, that is, a part of the terminal portion 512 formed of the wiring pattern 510 disposed in the bent portion 505 is opposed to the bottom surface portion in the concave portion 250, so that the anisotropic conductive as described above. The material is electrically connected to the conductive connection portion 81 through the material 507.

  The plurality of terminal portions 512 provided in the first edge region 530A are connected to each of the plurality of piezoelectric elements 300 (upper electrode film 80) constituting the first piezoelectric element group 300A. A plurality of (for example, 720) elements are arranged in the Y-axis direction so as to correspond to the plurality of piezoelectric elements 300 constituting the piezoelectric element group 300A, and constitute the first terminal group 512A. Therefore, when the terminal portion 512 and the piezoelectric element 300 are connected, the driver IC 200 and the piezoelectric element 300 are electrically connected via the wiring pattern 510 including the terminal portion 512.

  Similarly, in the second edge region 530B between the second driver IC 200B and the opening 520, a plurality of (for example, 720) in the Y-axis direction correspond to the plurality of piezoelectric elements 300 constituting the second piezoelectric element group 300B. 2nd terminal group 512B which consists of the terminal part 512 provided side by side is provided. The first edge region 530A and the second edge region 530B are disposed so as to face each other in the X-axis direction, and the first terminal group formed in each of the first and second edge regions 530A and 530B. The 512A and the second terminal group 512B are also configured to face each other in the X-axis direction.

  Similarly, in the third edge region 530C between the third drive circuit unit 200C and the opening 520, a plurality of elements in the Y-axis direction correspond to the plurality of piezoelectric elements 300 constituting the third piezoelectric element group 300C. A third terminal group 512C including terminal portions 512 provided in parallel (for example, 720) is provided, and the fourth edge region 530D between the fourth drive circuit portion 200D and the opening 520 includes a fourth terminal region 512C. A fourth terminal group 512D including a plurality of (for example, 720) terminal portions 512 arranged in the Y-axis direction so as to correspond to the plurality of piezoelectric elements 300 constituting the piezoelectric element group 300D is provided. The third edge region 530C and the fourth edge region 530D are arranged so as to face each other in the X-axis direction.

  Then, as shown in FIG. 3, the lower surface 500A of the flexible substrate 500 and the piezoelectric element 300 are opposed to each other, and the bent portion 505 formed in advance in each edge region 530 is aligned with the concave portion 250. When the bent portion 505 is pushed into the recess 250, the terminal portion 512 and the conductive connection portion 81 in each corresponding wiring pattern 510 are electrically connected via the anisotropic conductive material 507.

Here, the first piezoelectric element group 300A is disposed so as to correspond to the first terminal group 512A of the bent portion 505 formed in the first edge region 530A, and the second piezoelectric element group 300B includes the first piezoelectric element group 300B. Arranged so as to correspond to the second terminal group 512B of the bent portion 505 formed in the two edge region 530B. Therefore, the plurality of piezoelectric elements 300 (conductive connection portion 81) constituting the first piezoelectric element group 300A and the plurality of terminal portions 512 constituting the first terminal group 512A are respectively well connected, and the second piezoelectric element is connected. The plurality of piezoelectric elements 300 (conductive connection portion 81) constituting the element group 300B and the plurality of terminal portions 512 constituting the second terminal group 512B are each well connected.
Similarly, each of the plurality of piezoelectric elements 300 constituting the third and fourth piezoelectric element groups 300C and 300D and the plurality of terminal portions 512 constituting the third and fourth terminal groups 512C and 512D are also good. Connected to.

  Here, the bent portion 505 and the inner surface of the recess 250 of the flexible substrate 500 are, as described above, the anisotropic conductive material 507, that is, an anisotropic conductive film (ACF) or anisotropic conductive paste. (ACP: anisotropic conductive paste) Therefore, the terminal portion 512 and the conductive connection portion 81 in the wiring pattern 510 are conductive particles 508 contained in the anisotropic conductive material 507 as shown in FIG. Are electrically connected.

  As shown in FIG. 3, a resin 202 is disposed between one side of the flexible substrate 500 and the reservoir forming substrate 20, whereby the flexible substrate 500, the reservoir forming substrate 20, and the like. Is fixed by a resin mold made of the resin 202. Further, the resin 202 is also disposed inside the concave groove 700 so as to cover the partition wall 710, and a connection portion between the terminal portion 512 and the conductive connection portion 81 is resin-molded.

  Next, the operation of the droplet discharge head 1 having the above-described configuration will be described. In order to eject droplets of functional liquid (ink) from the droplet discharge head 1, the external controller CT shown in FIG. 1 drives an external functional liquid supply device (not shown) connected to the functional liquid inlet 25. . The functional liquid sent out from the external functional liquid supply device fills the internal flow path of the droplet discharge head 1 from the functional liquid introduction port 25 to the reservoir 100 until reaching the nozzle opening 15. Further, the external controller CT sends drive power and a command signal to the driver IC 200 and the like via the external signal input unit 580 provided on the flexible substrate 500. The flexible substrate 500 is provided with a wiring pattern (not shown) different from the wiring pattern, and a command signal or the like from the external signal input unit 580 is sent to the driver IC 200 via the wiring pattern. . The driver IC 200 applies a voltage between the lower electrode film 60 and the upper electrode film 80 corresponding to the pressure generation chamber 12 via the wiring pattern 510 including the terminal portion 512 based on a command from the external controller CT. By applying and displacing the elastic film 50, the lower electrode film 60, and the piezoelectric film 70, the pressure in each pressure generating chamber 12 is increased, and droplets are ejected from the nozzle openings 15.

<Method for manufacturing droplet discharge head>
Next, a method for manufacturing the droplet discharge head 1 will be described with reference to the schematic diagram of FIG. 5 and the flowchart of FIG. In the following description, a procedure for electrically connecting the driver IC 200 and the piezoelectric element 300 by connecting the flexible substrate 500 to the recess 250 will be mainly described. It is assumed that the manufacturing, connection and arrangement of the flow path forming substrate 10, the reservoir forming substrate 20, the piezoelectric element 300, etc. have already been completed.

  First, a wiring pattern 510 including a terminal portion 512 made of a conductive material such as copper is provided on a lower surface 500A of a flexible flexible substrate 500 made of polyimide or the like by a printing method, plating, etching, or the like. At the same time, the bent portions 505 are formed in the edge regions 530 in FIG. 4 described above (step SA1). The wiring pattern 510 including the terminal portion 512 is accurately formed according to the distance (nozzle pitch) between the nozzle openings 15, that is, the distance between the piezoelectric elements 300.

  Next, the driver IC 200 is flip-chip mounted on a predetermined region (mounting region) on one side of the lower surface 500A of the flexible substrate 500 (step SA2). Thereafter, the flexible substrate 500 and the driver IC 200 are fixed by the resin 201 (step SA3).

  Thus, by providing the driver IC (device) 200 on the flexible substrate 500 on which the wiring pattern 510 is provided, the entire droplet discharge head 1 can be made compact, and the wiring pattern 510 and the driver can be reduced. Positioning with the IC 200 can be easily performed. Further, by flip-chip mounting the driver IC 200 on the flexible substrate 500, electrical connection between the driver IC 200 and the wiring pattern 510 can be performed with good workability and good.

Next, an anisotropic conductive material 507 is interposed between the bent portion 505 and the concave portion 250 of the flexible substrate 500, and the bent portion 505 is pushed into the concave portion 250 in this state, so that terminals provided in the bent portion 505 are provided. The part 512 is connected to the conductive connection part (electrode film of the piezoelectric element) 81 that is electrically connected to the piezoelectric element 300 (step SA4).
As described above, since the bent portion 505 formed in advance is pushed into the recess 250, for example, the flexible substrate 500 is formed in the recess 250 in comparison with the case where a flat flexible substrate is pushed into the recess 250. The inner surface can be better aligned with and closely adhered to the inner surface, and therefore, the conductive connection portion 81 on the bottom surface portion of the recess 250 and the terminal portion 512 of the wiring pattern 510 can be aligned more easily and satisfactorily. .

  Further, the bent portion 505 is formed in a substantially J shape (or substantially U shape) in a side view, and the side opposite to the side on which the driver IC 200 is mounted rises to the outside of the recess 250 and extends. Therefore, when the flexible substrate 500 is pushed into the recess 250 and the terminal portion 512 is connected to the conductive connection portion 81, the dimension extending from the recess 250 on the side opposite to the side where the driver IC 200 is mounted is shown. By examining, it can be easily confirmed whether or not the terminal portion 512 and the conductive connection portion 81 are connected.

  Here, when an anisotropic conductive film is used as the anisotropic conductive material 507, the anisotropic conductive film is attached in advance to, for example, the lower surface of the bent portion 505, that is, the surface facing the inner surface side of the recess 250. Keep it. Then, the anisotropic conductive material 507 can be interposed between the bent portion 505 and the concave portion 250 by pushing the bent portion 505 into the concave portion 250 in this state. Further, when an anisotropic conductive paste is used as the anisotropic conductive material 507, it is applied in advance to the inner surface of the concave portion 250, and then the bent portion 505 is pushed into the concave portion 250. An anisotropic conductive material 507 can be interposed between 505 and the recess 250.

  When the bent portion 505 is pushed into the concave portion 250 and the terminal portion 512 is connected to the conductive connection portion 81, the upper surface side of the bent portion 505 is moved by the pressure heating tool 800 as shown by a two-dot chain line in FIG. Heat while pressing from above. That is, using an appropriate jig or the like, the bent portion 505 is pushed into the recess 250 while being aligned, then the jig or the like is removed, and then the pressure heating tool 800 is pressed against the bent portion 505. While pressing (pressing) at an appropriate pressure, for example, about 2 MPa to 3 MPa, heating is performed at about 140 ° C. to 230 ° C. for about 20 seconds to 5 seconds.

  In addition, you may make it pressurize and heat as it is using the pressurization heating tool 800 from the first pushing in, but in that case, heating by this pressurization heating tool 800 is performed until positioning is completed. It is desirable to avoid it. This is because, in particular, when an anisotropic conductive film is used as the anisotropic conductive material 507, the anisotropic conductive film is usually attached to the bent portion 505 in advance as described above. That is, when the pressure heating tool 800 is kept at a high temperature from the beginning, the pressure heating tool 800 is pressed against the bent portion 505, and the melting and curing of the thermosetting resin in the anisotropic conductive film starts. Because it ends up. Note that even when an anisotropic conductive paste is used as the anisotropic conductive material 507, the same thing occurs before the alignment is completed, so that it is preferable not to perform heating until the alignment is completed.

  When the bent portion 505 is pushed into the concave portion 250 in this way and the thermosetting resin in the anisotropic conductive material 507 is melted and cured, the conductive particles 508 in the anisotropic conductive material 507 are connected to the terminal portion 512. By being compressed and deformed between the conductive connecting portion 81 and being deformed, they are interposed therebetween, whereby the terminal portion 512 and the conductive connecting portion 81 are electrically connected. In addition, the terminal portion 512 and the conductive connection portion 81 are mechanically connected by maintaining the state by the curing of the thermosetting resin.

  At this time, in particular, the bent portion 505 is formed in a substantially J shape (or substantially U shape) when viewed from the side, and the side opposite to the side on which the driver IC 200 is mounted rises to the outside of the recess 250 and extends. In addition, since the wiring pattern 510 is formed up to the extending edge, the conductive particles 508 in the anisotropic conductive material 507 stay in the concave portion 250, and between these adjacent wiring patterns 510 and 510. By aggregating them so as to be continuous, it is avoided that the adjacent wiring patterns 510 and 510 are short-circuited.

That is, the conductive particles present in the groove-like gap formed between the adjacent wiring patterns 510 and 510 are pushed out of the recesses 250 together with the resin by the flow of the thermosetting resin, and then It is fixed by curing the resin.
Since the conductive particles 508 at this time are mainly swept away by the tip of the flow of the resin and then fixed, for example, the bent portion 505 is L-shaped in a side view, and the side opposite to the side where the driver IC 200 is mounted is a recess. When not rising along the side wall surface of 250, the flow path of the resin becomes short, and the conductive particles tend to aggregate in a state where the conductive particles are arranged between adjacent wiring patterns 510 (terminal portions 512). Therefore, if the agglomerated state is fixed in this manner, a short circuit between the wiring patterns 510 (terminal portions 512) is likely to be caused as described above.

  However, in the present embodiment, since the bent portion 505 and the wiring pattern 510 are extended to the outside of the recess 250, a part of the resin that has flowed is placed along the groove-like gap between the wiring patterns 510 and 510. It can be discharged out of the recess 250. When the resin is discharged to the outside of the recess 250 as described above, the flow rate of the resin is weakened outside the recess 250 and the flow pressure is released, so that the resin is held and cured. As the resin is discharged, some of the conductive particles also flow out to the outside of the recess 250, so that the conductive particles are aggregated and cured in a state of being arranged between the adjacent wiring patterns 510 (terminal portions 512). This avoids short-circuiting between the wiring patterns 510 (terminal portions 512).

Furthermore, since the resin that has protruded from the recess 250 and hardened fixes the wiring pattern 510 and the upper surface of the partition 710, the flexible substrate 500 is more firmly fixed to the recess 250, and the flexible substrate 500 is peeled off. Etc. can be surely prevented.
Further, the bent portion 505 is formed in a substantially J shape (or substantially U shape) in a side view, and the side opposite to the side on which the driver IC 200 is mounted is also raised along the side wall surface of the recess 250, and the interval therebetween is different. Since it is stuck with the isotropic conductive material 507, the sticking area of the flexible substrate 500 to the concave portion 250 can be increased, and the connection strength (sticking strength) can be sufficiently increased.

  In addition, the wiring pattern 510 including the terminal portion 512 corresponding to the nozzle pitch is accurately provided on the flexible substrate 500 by a printing technique. Even when the distance in the Y-axis direction is small (narrow), electrical connection between each of the plurality of piezoelectric elements 300 (conductive connection portions 81) provided in accordance with the nozzle pitch and the terminal portion 512 is improved in workability. And it can be performed well.

  Further, when pressed downward from above by the pressurizing and heating tool 800, in the present embodiment, the partition wall 10K (the flow path forming substrate 10) that is a rigid body is provided below the terminal portion 512 and the conductive connection portion 81. Is arranged. That is, the terminal part 512, the anisotropic conductive material 507, and the conductive connection part 81 are sandwiched between the pressure heating tool 800 that is a rigid body and the partition wall 10K that is a rigid body. Therefore, the terminal part 512 and the conductive connection part 81 can be satisfactorily connected by pressing the pressing member 800 toward the partition wall 10K. Moreover, the terminal part 512 and the conductive connection part 81 on the flexible substrate 500 after being connected can be favorably supported by the partition 10K which is a rigid body.

Note that the connection between the terminal portion 512 and the conductive connection portion 81 by pushing the bent portion 505 of the flexible substrate 500 into the concave portion 250 described above is connected to the two concave portions 250 of the concave groove 700 divided by the partition 710. For each. In this manner, the groove 700 is divided by the partition 710, and the two recesses 250 are formed in one groove 700, whereby the bent portions 505 of the flexible substrate 500 are formed on both sides of the groove 700, respectively. Therefore, mounting efficiency can be improved and high integration can be achieved.
In addition, since the anisotropic conductive material 507 is used to connect the terminal portion 512 in the bent portion 505 of the flexible substrate 500 and the conductive joint 81 in the concave portion 250, for example, a metal using a brazing material Processing can be performed at a lower temperature than in the case of employing bonding, and therefore, it is easier to cope with a narrow pitch of the wiring pattern 510.

After the connection work between the terminal portion 512 and the conductive connection portion 81 is completed as described above, the flexible substrate 500 and the reservoir forming substrate 20 are fixed by the resin 202, and the terminal portion 512 and the conductive connection portion 81 are fixed. Is covered (step SA5). Thereby, the position of the flexible substrate 500 can be fixed, and the flexible substrate 500 itself can be reinforced by the resin 202. Furthermore, the connection portion between the terminal portion 512 and the conductive connection portion 81 can be protected by the resin 202.
Further, particularly on the partition 710 side, the edge of the flexible substrate 50 that rises from the recess 250 and extends outward is cut to prevent contact with other parts. May be.

  In such a manufacturing method of the droplet discharge head 1, the flexible substrate 500 in which the conductive connection portion 81 of the piezoelectric element (driving element) 300 and the driver IC (device) 200 are formed with a plurality of wiring patterns 510. Therefore, even if the pitch between the piezoelectric elements 300 is reduced (narrow), for example, the connection between the conductive connection portion 81 connected to the piezoelectric elements 300 and the driver IC 200 can be improved in workability. It can be done easily without loss. Therefore, in the obtained droplet discharge head 1, the nozzle pitch can be easily narrowed and sufficiently narrowed.

  In this embodiment, after the flexible substrate 500 and the driver IC 200 are connected, the terminal portion 512 in the bent portion 505 and the conductive connection portion 81 of the piezoelectric element 300 are connected. After connecting the part 512 and the conductive connection part 81, the driver IC may be connected to the flexible substrate 500.

<Droplet ejection device>
Next, an example of the droplet discharge device IJ of the present invention provided with the above-described droplet discharge head 1 will be described with reference to FIG. FIG. 7 is a perspective view showing a schematic configuration of the droplet discharge device IJ.

  In FIG. 7, the droplet discharge device IJ includes a droplet discharge head 1, a drive shaft 4, a guide shaft 5, a controller CT, a stage 7, a cleaning mechanism 8, a base 9, and a heater 6. ing. The stage 7 supports the substrate P from which the functional liquid is discharged by the droplet discharge head 1, and includes a fixing mechanism (not shown) that fixes the substrate P at a reference position. The functional liquid is discharged from the nozzle opening of the droplet discharge head 1 onto the substrate P supported by the stage 7.

  A drive motor 2 is connected to the drive shaft 4. The drive motor 2 is composed of a stepping motor or the like. When a drive signal in the Y-axis direction is supplied from the controller CT, the drive shaft 4 is rotated. When the drive shaft 4 rotates, the droplet discharge head 1 moves in the Y-axis direction. The guide shaft 5 is fixed so as not to move with respect to the base 9. The stage 7 includes a drive motor 3. The drive motor 3 is composed of a stepping motor or the like. When a drive signal in the X-axis direction is supplied from the controller CT, the stage 7 is moved in the X-axis direction.

  The controller CT supplies a voltage for controlling droplet ejection to the droplet ejection head 1. Further, the controller CT supplies a drive pulse signal for controlling the movement of the droplet discharge head 1 in the Y-axis direction to the drive motor 2 and moves the stage 7 in the X-axis direction to the drive motor 3. A drive pulse signal for controlling is supplied.

The cleaning mechanism 8 cleans the droplet discharge head 1 and includes a drive motor (not shown). By driving the drive motor, the cleaning mechanism 8 moves in the X-axis direction along the guide shaft 5. The movement of the cleaning mechanism 8 is also controlled by the controller CT. Here, the heater 6 is means for heat-treating the substrate P by lamp annealing, and evaporates and dries the solvent contained in the functional liquid applied on the substrate P. The power on and off of the heater 6 is also controlled by the controller CT.
The droplet discharge device IJ discharges droplets onto the substrate P while relatively scanning the droplet discharge head 1 and the stage 7 supporting the substrate P.

In such a droplet discharge device IJ, as described above, the conductive connection portion 81 of the piezoelectric element (driving element) 300 and the driver IC (device) 200 can be easily connected. Therefore, when forming various devices or patterns using the droplet discharge head 1, there is a need for further miniaturization of the devices and patterns. Can respond.
In addition, since the droplet discharge head 1 having a sufficiently high connection strength of the flexible substrate 500 to the concave portion 250 is provided, the droplet discharge device IJ itself can ensure long-term reliability. Become.

  In the above-described embodiment, the functional liquid discharged from the droplet discharge head 1 includes a liquid crystal display device forming material for forming a liquid crystal display device, and an organic EL forming device for forming an organic EL display device. It includes materials, wiring pattern forming materials for forming wiring patterns of electronic circuits, and the like. Thereby, the droplet discharge apparatus IJ can manufacture each of the devices with the functional liquid discharged based on the droplet discharge method.

1 is an external perspective view of a droplet discharge head according to an embodiment of the present invention. It is the perspective view which looked at the droplet discharge head from the lower side. It is AA arrow sectional drawing of FIG. It is the figure which looked at the flexible substrate from the lower surface side. It is a figure which shows typically the principal part of a droplet discharge head and a part of manufacturing process. It is a flowchart for demonstrating an example of the manufacturing process of a droplet discharge head. It is an external appearance perspective view which shows an example of a droplet discharge device.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Droplet discharge head, 15 ... Nozzle opening, 15A-15D ... Nozzle opening group, 20 ... Reservoir formation board | substrate (sealing member), 81 ... Conductive connection part (1st conductive connection part), 200 ... Driver IC ( Device: second conductive connecting portion), 250 ... concave portion, 300 ... piezoelectric element (driving element), 500 ... flexible substrate, 505 ... bent portion, 507 ... anisotropic conductive material, 508 ... conductive particle, 510 ... wiring Pattern 512 Terminal portion 700 Groove 710 Partition IJ Droplet ejection device

Claims (10)

Connection of the flexible substrate for electrically connecting the first conductive connection portion provided on the bottom surface of the concave portion formed in the base and the second conductive connection portion provided outside the concave portion to the base Structure,
The flexible substrate is substantially J-shaped in a side view along the bottom surface portion of the concave portion and a pair of opposing side wall surfaces rising from both sides of the bottom surface portion to the surface of the base body. A bent portion formed by bending into a shape or a substantially U shape is formed,
On the surface of the flexible substrate facing the inner surface of the concave portion, a wiring pattern extending from the outer side of the concave portion on one side of the pair of opposing side wall surfaces to at least the bottom surface side of the concave portion. Are formed,
In the flexible substrate, a surface of the bent portion facing the inner surface side of the concave portion is adhered to the concave portion by an anisotropic conductive material,
The wiring pattern is electrically connected to the first conductive connection portion via the anisotropic conductive material at the bottom surface portion of the concave portion, and outside the concave portion on one side of the pair of side walls. A connection structure for a flexible substrate, wherein the connection structure is electrically connected to the second conductive connection portion.   The flexible substrate connection structure according to claim 1, wherein an end portion on the other side of the pair of side walls extends to the outside of the recess.   The wiring pattern extends from the outside of the concave portion on one side of the pair of opposing side wall surfaces to the outside of the concave portion on the other side of the pair of side wall surfaces through the bottom surface portion of the concave portion. 3. The flexible substrate connection structure according to claim 2, wherein the flexible substrate connection structure is extended.   The flexible substrate connection structure according to claim 1, wherein the second conductive connection portion is a connection terminal of a device.   A concave groove is formed in the base body, a partition wall is provided along the length direction in the concave groove, and the concave portion is a portion formed by dividing the concave groove by the partition wall. The connection structure of the flexible substrate according to any one of claims 1 to 4. A driving element driven by the device, and a base formed with a recess, the driving element or a conductive connection portion connected to the driving element is provided on the bottom surface of the recess, and the outside of the recess In the droplet discharge head in which the device is arranged,
The base is provided with a flexible substrate that electrically connects the device and the driving element or a conductive connection portion connected thereto,
The flexible substrate is substantially J-shaped in a side view along the bottom surface portion of the concave portion and a pair of opposing side wall surfaces rising from both sides of the bottom surface portion to the surface of the base body. A bent portion formed by bending into a shape or a substantially U shape is formed,
On the surface of the flexible substrate facing the inner surface of the concave portion, a wiring pattern extending from the outer side of the concave portion on one side of the pair of opposing side wall surfaces to at least the bottom surface side of the concave portion. Are formed,
In the flexible substrate, a surface of the bent portion facing the inner surface side of the concave portion is adhered to the concave portion by an anisotropic conductive material,
The wiring pattern is electrically connected to the driving element or a conductive connection portion connected to the driving element via the anisotropic conductive material at a bottom surface portion of the concave portion, and on one side of the pair of side walls. A droplet discharge head, wherein the droplet discharge head is directly or indirectly connected to the device outside the recess.   The droplet discharge head according to claim 6, wherein the flexible substrate has an end on the other side of the pair of side walls extending to the outside of the recess.   The wiring pattern extends from the outside of the concave portion on one side of the pair of opposing side wall surfaces to the outside of the concave portion on the other side of the pair of side wall surfaces through the bottom surface portion of the concave portion. 8. The droplet discharge head according to claim 7, wherein the droplet discharge head is formed to extend.   A concave groove is formed in the base body, a partition wall is provided along the length direction in the concave groove, and the concave portion is a portion formed by dividing the concave groove by the partition wall. The droplet discharge head according to any one of claims 6 to 8. A droplet discharge apparatus comprising the droplet discharge head according to claim 6.

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