JP4729292B2 - Magnetic head for perpendicular recording and magnetic disk drive equipped with the same - Google Patents

Description

  The present invention relates to a perpendicular recording magnetic head, a method of manufacturing the perpendicular recording magnetic head, and a magnetic disk device on which the perpendicular recording magnetic head is mounted.

  In a magnetic disk device, data on a recording medium is read and written by a magnetic head. In order to increase the recording capacity per unit area of the magnetic disk, it is necessary to improve the surface recording density. However, the current in-plane recording method has a problem that when the size of the recording bit is reduced, the recording bit disappears due to thermal fluctuation and the surface recording density cannot be increased. In order to solve this problem, a perpendicular recording method for recording a magnetization signal in a direction perpendicular to the medium has been studied, and research and development are in progress.

Regarding the reproducing head, the same head for both the perpendicular recording method and the in-plane recording method, for example, a giant magnetoresistive head (GMR head) or a tunnel magnetoresistive head (TMR head) can be used.
On the other hand, for the recording head, the same ring head as in the in-plane recording can be used, but since the ring head performs recording using only the vertical component of the magnetic flux circulating from the upper magnetic pole to the lower magnetic pole, the magnetic field strength is weak, There is a problem that the magnetic field gradient in the vertical direction is not steep. For this reason, a single pole head has been proposed as a recording head suitable for perpendicular recording. In the case of a single magnetic pole head, as shown in FIG. 2, the recording magnetic field distribution has a width depending on the main magnetic pole film thickness 4, and the main magnetic pole shape greatly affects the magnetization pattern of the medium.

Japanese Patent Laid-Open No. 2002-092221

  In order to improve the recording density, it is necessary to improve the track density and the linear recording density. However, in terms of increasing the recording density, there is a common obstacle to the perpendicular and in-plane recording methods. There is correspondence. The yaw angle refers to the inclination of the magnetic head on the magnetic disk with respect to the track traveling direction. Specifically, the track traveling direction at the main magnetic pole position of the recording head and the longitudinal direction of the slider on which the recording head is mounted. Say the angle between. As shown in FIG. 3A, when the yaw angle is 0 degree, the recording width depends on the geometrical track width 5 of the main magnetic pole and does not depend on the main magnetic pole film thickness 4, but FIG. When the yaw angle is added as shown in FIG. 2, that is, when the yaw angle is other than 0 degrees, the recording width is effectively increased depending on the main pole film thickness, and the adjacent track is erased. .

  In order to always set the yaw angle to 0, there is a method using a two-stage actuator. However, since the two-stage actuator is expensive, an increase in manufacturing cost becomes a problem.

As a countermeasure against the case where the yaw angle is attached, Japanese Patent Application No. 2000-286842 discloses that the main magnetic pole shape as seen from the air bearing surface of the head is trapezoidal as shown in FIG. A technique for preventing erasure of adjacent tracks is disclosed. Here, α in FIG. 4A is an angle formed by the hypotenuse of the trapezoid and the track traveling direction.
However, when the air bearing surface of the main pole is trapezoidal, the recording magnetic field strength is reduced. FIG. 4B shows the relationship between the maximum magnetic field strength and α of the main pole whose air bearing surface has a trapezoidal shape.
It can be seen that increasing α increases the magnetic field strength. Japanese Patent Application No. 2000-76333 discloses a technique for reducing the protrusion of the magnetic pole to the adjacent track by removing a part of the magnetic pole of the recording head and preventing the erasure of the adjacent track. However, also in this case, the head magnetic field strength is reduced. As the size of the recording bit decreases, the problem of thermal fluctuation becomes more prominent, so the coercive force of the medium tends to increase as a countermeasure against thermal fluctuation. Since the recording magnetic field of the head is required to have a necessary and sufficient magnitude so that recording can be performed on the medium, a decrease in the recording magnetic field strength is a great obstacle to improving the surface recording density.

  The present invention is equipped with a perpendicular recording magnetic head having a main magnetic pole shape that does not erase adjacent tracks even when the yaw angle is applied without reducing the recording magnetic field intensity, and a method for manufacturing the perpendicular recording magnetic head. A magnetic disk device is provided.

  The present inventors have found that erasing of adjacent tracks due to the yaw angle can be prevented by reducing or increasing the recording magnetic field strength by forming the slope portion at the tip of the main pole of the single pole head. It was. In the single magnetic pole head of the present invention, the surface of the main magnetic pole located on the upstream side of the rotation direction of the recording medium opposed to the recording head, that is, on the leading side, is inclined with respect to the air bearing surface of the main magnetic pole. That is, a tapered surface is provided at the main magnetic pole tip. By providing the taper surface in this manner, the generated recording magnetic field strength can be increased as compared with the case where no taper is provided.

Further, by optimizing the inclination of the taper surface with respect to the air bearing surface of the main magnetic pole, not only the recording magnetic field can be strengthened but also the generated recording magnetic field can be further reduced. Specifically, an angle formed by the tapered surface and the main magnetic pole air bearing surface (hereinafter, abbreviated as the main magnetic pole tip angle) is set to 45 degrees or more and 75 degrees or less.
The tapered surface may be provided not on the trailing side of the main pole but on the leading side. Further, it may be provided on both the trailing side and the leading side.

There are the following three types of manufacturing methods for the main magnetic pole having such a tapered surface.
The first manufacturing method includes a step of forming a resist pattern on the inorganic insulating film, a step of etching the inorganic insulating film using the resist pattern as a mask to form a slope, a step of removing the resist pattern, Manufacturing in which a step of forming a resist pattern on an inorganic insulating film, a step of forming a magnetic film on the inorganic insulating film, a step of removing the resist pattern, and a step of planarizing the magnetic film by polishing Is the method.
As a polishing method, a chemical mechanical polishing method is generally used, but other appropriate methods may be used.

  The second manufacturing method is a method of forming a tapered surface by a so-called lift-off method, in which a resist pattern is formed on the inorganic insulating film, the inorganic insulating film is sputtered, and the resist pattern and the inorganic insulating film attached thereto are deposited. And forming a slope, forming a resist pattern on the inorganic insulating film, forming a magnetic film on the inorganic insulating film, removing the resist pattern, and the magnetic film Is a manufacturing method in which the steps of flattening by polishing are sequentially performed.

  The third manufacturing method is a manufacturing method in which a step of forming a resist pattern on the magnetic film and a step of forming a slope by etching the magnetic film using the resist pattern as a mask are sequentially performed.

  By manufacturing the main magnetic pole in this way, it is possible to provide an excellent single magnetic pole head that prevents the recording magnetic field strength from decreasing or increases the magnetic field strength and does not erase adjacent tracks. Also, a perpendicular magnetic recording medium having a soft magnetic underlayer and a magnetic recording apparatus equipped with this single-pole head provide a magnetic recording apparatus that has superior heat fluctuation resistance and high surface recording density compared to the in-plane recording system. Can do.

  Geometric track width without increasing or decreasing the maximum recording magnetic field strength even when there is a yaw angle by using a shape with a tapered surface on the leading or trailing end of the main pole. Further, it is possible to provide a perpendicular recording magnetic head that suppresses the increase in recording width and eliminates erasure of adjacent tracks. By mounting this head, a magnetic disk device without erasure of adjacent tracks can be manufactured.

(Example 1)
Hereinafter, the present invention will be described with reference to the drawings. FIG. 5 is a schematic view of a medium-head system of a magnetic disk apparatus using the present invention (however, the magnification in the figure is not uniform). The magnetic disk device records and reproduces a magnetization signal on a magnetic disk 11 by a magnetic head 14 attached to a slider 13 fixed to the tip of a suspension arm 12. The magnetic head moves in the radial direction of the disk (seek operation) by the swing operation of the suspension arm. At this time, a yaw angle S is generated as shown in FIG. In the current magnetic recording apparatus, the range of the yaw angle S is about ± 30 °. FIG. 6 shows a schematic diagram of the relationship between the perpendicular recording / reproducing head and the magnetic disk. The perpendicular recording / reproducing head includes a recording head unit 16 and a reproducing head unit 17. The recording head is a so-called single pole head, and the reproducing head has a structure including a reproducing element disposed between a soft magnetic first shield layer and a second shield layer. As the reproducing element, since it has high sensitivity, a giant magnetoresistive element (GMR element), a tunnel magnetoresistive element (TMR element), or the like is used. FIG. 7 shows a schematic diagram of a perpendicular recording / reproducing head. The magnetic field generated from the main magnetic pole of the single magnetic pole head passes through the recording layer and the backing layer, forms a magnetic circuit that enters the upper shield 3 as an auxiliary magnetic pole, and records a magnetization pattern on the recording layer.

  FIG. 8 shows the main magnetic pole shape of the magnetic head of the present invention. The leading main pole located on the upstream side in the disk rotation direction has an inclined shape with a corner on the air bearing surface side. FIG. 1 shows the relationship between the tip angle q and the maximum magnetic field strength in this shape, and the relationship between the half-value width and the tip angle in the disk rotation direction of the recording magnetic field distribution generated from the main pole. The magnetic field strength increases and then decreases until the tip angle is close to 45 degrees, but a larger magnetic field strength is obtained when the tip angle is between 0 and 75 degrees than when the main magnetic pole tip is not angled. . Since it is considered that the magnetic flux tends to concentrate on the pointed portion of the magnetic material, this is considered to be because the amount of magnetic flux flowing from the corner of the main pole to the backing layer is reduced.

  In addition, the half-value width of the magnetic field in the disk rotation direction is reduced, that is, the recording magnetic field is more converged from the relationship between the half-value width in the disk rotation direction and the tip angle of the distribution of the recording magnetic field generated from the main magnetic pole shown in FIG. I understand. This is considered to be because the air bearing surface exposed main magnetic pole film thickness 22 is reduced by providing the tapered surface. The full width at half maximum decreases rapidly until the tip angle is around 45 degrees, and the subsequent change is small. As described above, in order to obtain the recording magnetic field convergence effect, it is effective to set the tip angle q in the range of 45 degrees or more and 75 degrees or less.

  FIG. 9 shows the recording magnetic field distribution in the disk rotation direction of the single magnetic pole head of the present invention and the conventional single magnetic pole head having a tip angle of 0 degree. It can be seen that the single magnetic pole head of the present invention has a larger maximum magnetic field strength and a smaller recording magnetic field width than the prior art. At this time, the trailing-side magnetic field gradient that greatly affects the recording magnetization pattern has not deteriorated. Therefore, even when the yaw angle is added, the recording width is not widened, and erasure of adjacent tracks can be prevented.

(Example 2)
In the first embodiment, a tapered surface is provided on the leading side of the main magnetic pole tip, but a tapered surface may be provided on the trailing side of the main magnetic pole. As shown in FIG. 10 (a), the shape of a single magnetic pole head is shown in which the trailing side main magnetic pole located on the downstream side in the disk rotation direction is inclined at the air bearing surface side. Even in this case, the magnetic field width in the disk rotation direction can be narrowed without degrading or increasing the magnetic field strength, and even when the yaw angle is added, the increase in the recording width is suppressed from the geometric track width, and the adjacent track is reduced. Thus, it is possible to provide a magnetic head for perpendicular recording that eliminates the above-mentioned erasure.

(Example 3)
In Example 3, as shown in FIG. 10B, tapered surfaces were provided on both the leading side and the trailing side of the main magnetic pole tip. The leading and trailing angles may be set independently. Even in this case, even if the angle of the main pole on the air bearing surface side is inclined, the magnetic field width in the disk rotation direction can be narrowed without increasing or increasing the magnetic field strength, and the yaw angle is added. However, it is possible to provide a perpendicular recording magnetic head that suppresses the increase in the recording width from the geometric track width and does not erase adjacent tracks.

Example 4
Example 4 is an example in which the tapered surface provided at the tip of the main magnetic pole is a curved surface.
In the manufacturing process, the tapered surface may be a curved surface instead of a flat surface, but the same effect can be obtained even if the tapered surface is a curved surface.
FIG. 11 is a cross-sectional view of the single pole head as viewed from the track width direction. In this case, the tapered surface provided at the tip of the main pole is a curved surface. In FIG. 11, the length indicated by h is the projected length with respect to the flying height direction of the curve formed by the curved tapered surface when the main magnetic pole tip is viewed from the track direction, and the length indicated by W is The length of the curved surface formed by the curved tapered surface with respect to the air bearing surface.
Even in this case, if the angle q defined by the inverse tangent of W / h, that is, q = arcTan (W / h) is in the range of 45 degrees to 75 degrees, the tip angle is 45 degrees or more. The same effect as that obtained when the angle is set to 75 degrees or less can be obtained.

(Example 5)
FIGS. 12 and 13 show process diagrams of the method of manufacturing the single pole head shown in the first embodiment. For ease of understanding, the scales such as the film thickness in the figure are not constant. FIG. 12A shows a resist pattern formed on the inorganic insulating film. A reproducing head portion and an auxiliary magnetic pole layer are formed below the inorganic insulating film. As the inorganic insulating film, SiC, AlN, Ta ₂ O ₅ , TiC, TiO ₂ , and SiO ₂ can be used in addition to Al ₂ O ₃ which has been conventionally used.
(B) shows the result of etching the inorganic insulating film using this resist pattern as a mask. For simplicity, the reproducing head portion and the auxiliary magnetic pole layer are omitted in the drawings after FIG. Since the resist end portion is behind the resist, it is difficult to etch, and a slope as shown in FIG. 12B is formed by etching. As an etching gas, BCl _3, or a mixed gas of BCl ₃ and Cl ₂ is preferred in the case of using Al ₂ O _3, AlN as an insulating film. In the case of SiC, AlN, Ta ₂ O ₅ , TiC, TiO ₂ , and SiO ₂ , fluorine-based CHF ₃ , CF ₄ , SF ₆ , and C ₄ F ₈ can be used because they are easily etched.

The state where the resist is removed after the etching is shown in FIG. In (d), a resist pattern is formed. FIG. 13 (e) shows a state where a magnetic film is plated. Since the saturation magnetic flux density is large and the soft magnetic characteristics are good, Fe ₅₅ Ni ₄₅ , CoNiFe, or the like can be used as the material of the magnetic film. The plating base film may be a magnetic film having the same composition as the plating film or a non-magnetic film.
(F) shows the place where the resist is removed. (G) shows a state where the main magnetic pole is formed by flattening the air bearing surface of the magnetic film by polishing. For the planarization, a polishing method such as chemical mechanical polishing (CMP) may be used. In the process of projecting the air bearing surface, the air bearing surface may be positioned at the alternate long and short dash line. With this manufacturing method, the single pole head for vertical use according to the present invention having a tapered surface on the leading side can be manufactured.
This example shows a manufacturing method of a single pole head when a taper surface is provided on the leading side of the main pole, but the taper surface is formed on the trailing side by reversing the resist formation pattern. A single pole head can be manufactured.

(Example 6)
FIG. 14 shows a process chart of another manufacturing method of the single pole head of the present invention by the lift-off method. As in FIG. 12, a reproducing head portion and an auxiliary magnetic pole layer are formed below the inorganic insulating film, but are omitted for simplicity. First, a resist pattern having a shape as shown in FIG. 14 is formed on the inorganic insulating film. A reproducing head and a soft magnetic film for the auxiliary magnetic pole are formed under the inorganic insulating film, but they are omitted in the drawing. The location where the resist pattern is formed is shown in FIG. Next, in order to form a slope, sputtering is performed on the resist pattern and the inorganic insulating film. The place where sputtering was performed is shown in FIG. The angle of the slope can be controlled by adjusting the target-substrate distance during sputtering, the gas pressure during sputtering, the angle of the substrate relative to the target, and the like.

  After sputtering, the resist and the inorganic insulating film attached thereto are removed. (C) shows the resist removed. In (d), a resist pattern is formed. (E) shows the magnetic film plated. (F) shows that the resist is removed. (G) shows a state in which the top surface of the magnetic film is planarized to form the main magnetic pole. In the process of projecting the air bearing surface, the air bearing surface may be positioned at the alternate long and short dash line. By this manufacturing method, the magnetic head for perpendicular recording of the present invention having an inclination on the leading side can be manufactured.

(Example 7)
FIG. 15 shows a process chart of another manufacturing method of the single pole head of the present invention. (A) shows a state where a resist pattern having a shape as shown in the figure is formed on an inorganic insulating film and a magnetic film to be a main magnetic pole in this order. FIG. 4B shows the magnetic film etched using this resist pattern as a mask. The state where the resist is removed after the etching is shown in FIG. In the process of projecting the air bearing surface, the air bearing surface may be positioned at the alternate long and short dash line. By this manufacturing method, the perpendicular recording magnetic head of the present invention having an inclination on the trailing side can be manufactured.

The figure which showed the relationship of the magnetic field width and front-end | tip angle of a disk magnetic field strength and front-end | tip angle of the single magnetic pole head of this invention, and a disc rotation direction. FIG. 6 is a diagram for explaining a general distribution of a head magnetic field perpendicular component in a disk rotation direction by a combination of a two-layer recording medium having a conventional backing layer and a single magnetic pole head. Schematic of the relationship between the main magnetic pole of the conventional perpendicular recording magnetic head and the track on the disk. FIG. 4 is a schematic diagram of a main magnetic pole shape of a conventional single-pole head, and a diagram showing a relationship between the main magnetic pole shape and a head magnetic field vertical component. The conceptual diagram explaining the generation | occurrence | production reason of a yaw angle. 1 is a schematic diagram showing the relationship between a magnetic head for perpendicular recording and a magnetic disk according to the present invention. Schematic showing the concept of perpendicular recording. FIG. 3 is a schematic diagram showing a main magnetic pole shape of a single magnetic pole head described in Embodiment 1 of the present invention. The magnetic field strength distribution in the disk running direction of the single pole head described in the first embodiment of the present invention. Schematic which shows the main pole shape of the single pole head described in Example 2 and 3 of this invention. Schematic which shows the main magnetic pole shape of the single pole head described in Example 4 of this invention. Schematic of the main magnetic pole formation process of the single pole head described in Example 5 of the present invention. Schematic of the main magnetic pole formation process of the single pole head described in Example 5 of the present invention. Schematic of the main magnetic pole formation process of the single pole head described in Example 6 of the present invention. Schematic of the main magnetic pole formation process of the single pole head described in Example 7 of the present invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Main magnetic pole, 2 ... Coil, 3 ... Auxiliary magnetic pole, 4 ... Main magnetic pole film thickness, 5 ... Geometric track width, 6 ... Recording width, 7 ... Reproducing element, 8 ... Bottom shield, 9 ... Self track, 10 ... adjacent track, 11 ... magnetic disk, 12 ... suspension arm, 13 ... slider, 14 ... magnetic head, 15 ... rotary actuator, 16 ... recording head, 17 ... disk rotation direction, 18 ... reproducing head, 19 ... recording layer, 20 ... backing layer, 21 ... air bearing surface, 22 ... air bearing surface exposed main pole film thickness, 23 ... disk radial direction, 24 ... trailing side, 25 ... leading side, 26 ... adjacent track erase region, 27 ... resist, 28 ... inorganic Insulating film, 29 ... magnetic film, q ... tip angle, qt ... trailing side tip angle.

Claims (9)

Forming a first resist pattern on the inorganic insulating film;
Etching the inorganic insulating film using the first resist pattern as a mask to form a slope;
Removing the first resist pattern;
Forming a second resist pattern on the inorganic insulating film on which the slope is formed;
Forming a groove in the second resist pattern;
Forming a magnetic film having a shape in which the width in the track width direction is larger in the rear part than in the front part on the inorganic insulating film by filling the groove with a magnetic material;
Removing the second resist pattern; polishing and planarizing the magnetic film;
Cutting the inorganic insulating film and the magnetic film such that a part of the slope is exposed on the air bearing surface;
A method of manufacturing a single magnetic pole head, wherein the main magnetic pole is formed by sequentially performing the steps. Forming a first resist pattern on the inorganic insulating film;
Forming an inorganic insulating film having a slope on the inorganic insulating film by sputtering an inorganic insulating film material on the inorganic insulating film and the first resist pattern;
Removing the first resist pattern and the inorganic insulating film attached on the first resist pattern;
Forming a second resist pattern on the inorganic insulating film from which the first resist pattern has been removed;
Forming a groove in the second resist pattern;
Forming a magnetic film having a shape in which the width in the track width direction is larger in the rear part than in the front part on the inorganic insulating film by filling the groove with a magnetic material;
Removing the second resist pattern;
Polishing and planarizing the magnetic film;
Cutting the inorganic insulating film and the magnetic film such that a part of the slope is exposed on the air bearing surface;
A method of manufacturing a single magnetic pole head, wherein the main magnetic pole is formed by sequentially performing the steps. Forming a resist pattern on the magnetic film;
Etching the magnetic film using the resist pattern as a mask to form a slope;
Removing the resist pattern;
Cutting the magnetic film such that a part of the slope is exposed on the air bearing surface;
A method of manufacturing a single magnetic pole head, characterized in that a main magnetic pole having a shape in which the width in the track width direction is larger in the rear portion than in the front end portion is formed by a process including: A method of manufacturing a single pole head according to claim 1,
A method of manufacturing a single magnetic pole head, wherein an angle formed by the slope is greater than 0 degree and 75 degrees or less. A method of manufacturing a single pole head according to claim 4 ,
A method of manufacturing a single magnetic pole head, wherein an angle formed by the slope is 45 degrees or more and 75 degrees or less. A method of manufacturing a single pole head according to claim 2,
A method of manufacturing a single magnetic pole head, wherein an angle formed by the slope is greater than 0 degree and 75 degrees or less. A method of manufacturing a single pole head according to claim 6 ,
A method of manufacturing a single magnetic pole head, wherein an angle formed by the slope is 45 degrees or more and 75 degrees or less. A method of manufacturing a single pole head according to claim 3,
A method of manufacturing a single magnetic pole head, wherein an angle formed by the slope is greater than 0 degree and 75 degrees or less. A method of manufacturing a single pole head according to claim 8 ,
A method of manufacturing a single magnetic pole head, wherein an angle formed by the slope is 45 degrees or more and 75 degrees or less.

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