JP4708078B2 - Linear motor - Google Patents

Description

  The present invention relates to a linear motor.

  Japanese Patent Application Laid-Open No. 2-151256 (Patent Document 1) discloses a linear motor including an inductor constituting a stator and an armature constituting a mover. The inductor has a tooth part row composed of a plurality of tooth parts arranged with a predetermined pitch. The armature is wound around a yoke, a magnetic pole portion disposed at a predetermined interval along the yoke, and having a magnetic pole surface forming portion at an end facing the inductor tooth row, and a plurality of magnetic pole portions. Armature windings, and permanent magnets that are arranged in the plurality of magnetic pole surface forming portions and change the magnetic path of the magnetic flux passing through the magnetic pole surface forming portions. The permanent magnets are respectively disposed in the magnetic pole surface forming portion, and are disposed with a predetermined pitch so that the magnetization directions of two adjacent permanent magnets are reversed. In this linear motor, three permanent magnets are arranged in the magnetic pole surface forming portion.

Japanese Patent Application Laid-Open No. 2-280655 (Patent Document 2) also shows a linear motor including an inductor constituting a stator and an armature constituting a mover. The inductor has a tooth part row composed of a plurality of tooth parts arranged with a predetermined pitch. The armature is wound around a yoke, a magnetic pole portion disposed at a predetermined interval along the yoke, and having a magnetic pole surface forming portion at an end facing the inductor tooth row, and a plurality of magnetic pole portions. Armature windings, and permanent magnets that are arranged in the plurality of magnetic pole surface forming portions and change the magnetic path of the magnetic flux passing through the magnetic pole surface forming portions. The permanent magnets are respectively disposed in the magnetic pole surface forming portion, and are disposed with a predetermined pitch so that the magnetization directions of two adjacent permanent magnets are reversed. In this linear motor, one permanent magnet is arranged in the magnetic pole surface forming portion. A plurality of small teeth projecting in a direction opposite to the tooth row of the inductor is formed on the magnetic pole surface forming portion.
JP-A-2-151256 JP-A-2-280655

  However, in these conventional linear motors, in order to increase the thrust, it is necessary to reduce the pitch between the teeth of the inductor teeth row to reduce the distance between the inductor and the armature. For this reason, there is a problem that the drive frequency becomes high and there is a limit to increase the speed, and the position setting of the inductor and the armature becomes troublesome. There is also a problem that a cogging force depending on the pitch between the teeth of the inductor is generated. Therefore, it is not particularly suitable for a precision stage that requires speed stability.

  In addition, in the linear motor disclosed in Patent Document 2, small teeth facing the teeth of the inductor must be formed on the magnetic pole surface forming portion, which is complicated to manufacture. Moreover, since the opening of the slot is large, there is a problem that the thrust cannot be increased.

  An object of the present invention is to provide a linear motor capable of increasing the speed.

  Another object of the present invention is to provide a linear motor that can easily set the position of the inductor and the armature by increasing the distance between the inductor and the armature.

  Another object of the present invention is to provide a linear motor capable of reducing the cogging force.

  The linear motor to be improved by the present invention includes an inductor and an armature. The inductor has a tooth part row composed of a plurality of tooth parts arranged with a predetermined pitch τp. The armature is connected to a yoke extending in a direction in which a plurality of tooth portions are arranged, a plurality of pole columns arranged at predetermined intervals along the yoke and connected to the yoke, and ends of the plurality of pole columns. A plurality of magnetic pole portions each having a magnetic pole surface forming portion opposed to a tooth row of the inductor, a plurality of armature windings respectively exciting the plurality of magnetic pole surface forming portions, and a plurality of magnetic pole surface forming portions And an armature having one or more permanent magnets that change the magnetic path of the magnetic flux passing through the magnetic pole surface forming portion. One of the inductor and the armature is a mover, and the other is a stator. In the present invention, every other pole pole is wound with every other armature winding. Further, the width dimension of the magnetic pole surface forming portion in the direction in which the plurality of magnetic pole surface forming portions are arranged is larger than the width dimension of the pole column in the direction in which the plurality of magnetic pole surface forming portions are arranged, and is adjacent to the plurality of magnetic pole surface forming portions. The magnetic pole face forming portions to be coupled are mutually coupled. And in the center part of a plurality of magnetic pole surface formation parts, one permanent magnet magnetized in the direction where a plurality of magnetic pole surface formation parts are arranged is arranged, respectively, and these permanent magnets are two adjacent magnetic poles. The permanent magnets are arranged with a predetermined pitch τm so that the magnetization directions of the two permanent magnets respectively disposed in the surface forming portion are reversed.

  In other words, the plurality of magnetic pole portions include a non-winding magnetic pole portion including an unwinding pole column in which the armature winding is not wound and a non-winding magnetic pole surface forming portion connected to the non-winding pole column, A wound magnetic pole portion including a wound pole column around which the armature winding is wound and a wound magnetic pole surface forming portion connected to the wound pole column is arranged alternately. Further, the width dimension of the non-wound pole surface forming part in the direction in which the plurality of magnetic pole surface forming parts are arranged is larger than the width dimension of the non-wound pole column in the direction in which the plurality of magnetic pole surface forming parts are arranged, The width dimension of the wound magnetic pole surface forming portion in the direction in which the magnetic pole surface forming portions are arranged is larger than the width dimension of the wound pole column in the direction in which the plurality of magnetic pole surface forming portions are arranged. The adjacent unwrapped magnetic pole surface forming portion and the wound magnetic pole surface forming portion are coupled to each other. In addition, one permanent magnet magnetized in the direction in which the plurality of magnetic pole surface forming portions are arranged is arranged in the center of each of the plurality of unwrapped magnetic pole surface forming portions and the plurality of wound magnetic pole surface forming portions. These permanent magnets have a predetermined pitch so that the magnetization directions of the two permanent magnets respectively disposed inside the adjacent unwrapped magnetic pole surface forming portion and wound magnetic pole surface forming portion are opposite to each other. They are lined up with τm.

  As in the present invention, every other pole pole is wound with armature windings (unwrapped magnetic pole portions and wound magnetic pole portions are arranged alternately), and adjacent magnetic pole surface forming portions (adjacent If the unwrapped magnetic pole surface forming part and the wound magnetic pole surface forming part) are coupled to each other, the opening by the slot is closed and the area of the magnetic pole surface of the armature facing the inductor is increased. Further, if one permanent magnet is arranged in each of the plurality of magnetic pole surface forming portions (the unwrapped magnetic pole surface forming portion and the wound magnetic pole surface forming portion), the unwrapped magnetic pole portion, the wound magnetic pole portion, and the armature winding By setting the dimensions of the lines appropriately, the pitch of the permanent magnets at regular intervals can be set relatively freely. Therefore, the thrust of the motor with respect to the size of the armature can be increased, and the speed of the linear motor can be increased. Also, by increasing the pitch of the teeth of the inductor and the pitch of the permanent magnets compared to the distance between the inductor and the armature, the distance between the inductor and the armature can be increased. The decrease in thrust becomes smaller. Therefore, it is possible to easily set the position of the inductor and the armature.

  Further, in the present invention, the width dimension of the non-wound magnetic pole surface forming part in the direction in which the plurality of magnetic pole surface forming parts are arranged is larger than the width dimension of the non-wound pole column in the direction in which the plurality of magnetic pole surface forming parts are arranged. The width dimension of the wound magnetic pole surface forming portion in the direction in which the magnetic pole surface forming portions are arranged is made larger than the width dimension of the wound magnetic pole column in the direction in which the plurality of magnetic pole surface forming portions are arranged. The occupied volume of the child winding can be increased, and the amount of heat generated by the armature winding can be suppressed.

  The pitch τp of the tooth row and the pitch τm of the permanent magnet row can be set to a relationship of τm = τp × (6n ± 1) / (6n) (n is a natural number). By setting in this way, the pitch τm of the permanent magnet array with respect to the pitch τp of the teeth section of the inductor is slightly shifted, so that the cogging force generated by the teeth of each inductor is canceled and the cogging of the entire armature The power can be reduced.

  The number of armature windings may be N phases × M (N is an integer of 2 or more, M is an integer of 1 or more).

  The armature can be configured to have an armature unit and a plurality of winding members. In this case, the armature unit comprises a yoke, an unwound pole column, an unwound magnetic pole surface forming portion, and a wound magnetic pole surface forming portion, and the winding member is wound with the wound pole column and the winding pole. The armature winding is wound around the pole column. Then, the winding member may be fitted to the armature unit by being fitted to the yoke and the winding magnetic pole surface forming portion. In this way, the unwrapped magnetic pole portions and the wound magnetic pole portions are alternately arranged and adjacent to each other by simply attaching the wound member to the armature unit by fitting. An armature combined with the forming portion can be easily formed.

  A gap is formed between the armature winding, the unwound magnetic pole surface forming portion, and the wound magnetic pole surface forming portion, and the inside of the gap, the surface of the unwrapped magnetic pole surface forming portion, and the surface of the magnetic pole surface forming portion In addition, a cooling pipe for cooling the armature winding can be arranged in a folded state. If it does in this way, a plurality of winding members can be attached to an armature unit after attaching a cooling pipe to an armature unit by setting a gap and a shape and size of a cooling pipe suitably. Therefore, the cooling pipe and the armature unit can be easily attached and detached.

  The inductor tooth row can be skewed. That is, the longitudinal direction of the tooth part of the tooth part row can be inclined with respect to the direction orthogonal to the moving direction of the mover. In this way, the cogging force of the linear motor can be further reduced.

  It is preferable that the length dimension of the winding member in the longitudinal direction in which the armature winding is wound is shorter than the length dimension of the portion adjacent to the armature winding of the unwound pole column. In this way, the dimension by which the armature winding protrudes from the armature unit can be reduced.

  A linear motor to be improved by another invention of the present application includes a pair of inductors and an armature. Each of the pair of inductors has a tooth part row composed of a plurality of tooth parts arranged with a predetermined pitch τp. The armature includes a plurality of pole poles extending in a direction in which a pair of inductors face each other and a plurality of pairs of magnetic poles that are connected to both ends of the pole poles and respectively face a tooth row of the pair of inductors. A plurality of magnetic pole portions each having a surface forming portion; a plurality of armature windings for exciting the plurality of pairs of magnetic pole surface forming portions; and a magnetic pole surface forming portion disposed in each of the plurality of pairs of magnetic pole surface forming portions. And one or more permanent magnets that change the magnetic path of the magnetic flux passing through. One of the inductor and the armature is a mover, and the other is a stator. In the present invention, every other pole pole is wound with every other armature winding. Further, the width dimension of the magnetic pole surface forming portion in the direction in which the plurality of pairs of magnetic pole surface forming portions are arranged is larger than the width dimension of the pole column in the direction in which the plurality of magnetic pole surface forming portions are arranged. The adjacent magnetic pole surface forming portions of one of the plurality of magnetic pole surface forming portions of the plurality of pairs of magnetic pole surface forming portions are coupled to each other to form the other magnetic pole surface of the other of the plurality of pairs of magnetic pole surface forming portions. Adjacent magnetic pole face forming portions are connected to each other. And in each center part of a plurality of a pair of unwinding magnetic pole surface formation parts and a plurality of a pair of winding magnetic pole surface formation parts, one magnetized in the direction in which a plurality of a pair of magnetic pole surface formation parts are arranged Permanent magnets are respectively arranged, and these permanent magnets are arranged with a predetermined pitch τm so that the magnetization directions of the two permanent magnets respectively disposed in two adjacent magnetic pole surface forming portions are reversed. It is out.

  In other words, the plurality of magnetic pole portions extend in the direction in which the pair of inductors face each other, and a pair of non-winding pole columns where the armature winding is not wound and a pair of non-winding pole columns connected to both ends of the non-winding pole columns. Connected to both ends of a non-winding magnetic pole portion provided with a winding magnetic pole surface forming portion, a winding pole column that extends in the opposing direction of a pair of inductors, and in which an armature winding is wound, and the winding pole column Winding magnetic pole portions including a pair of wound magnetic pole surface forming portions are alternately arranged. In addition, the width dimension of the pair of unwound magnetic pole surface forming parts in the direction in which the plurality of pairs of magnetic pole surface forming parts are arranged is larger than the width dimension of the unwound pole column in the direction in which the plurality of pairs of magnetic pole surface forming parts are arranged. The width dimension of the pair of wound magnetic pole surface forming portions in the direction in which the plurality of pairs of magnetic pole surface forming portions are arranged is larger than the width dimension of the wound pole column in the direction in which the plurality of pairs of magnetic pole surface forming portions are aligned. It has become. And, one unwrapped magnetic pole surface forming portion of the pair of unwrapped magnetic pole surface forming portions and one wound magnetic pole surface forming portion of the pair of wound magnetic pole surface forming portions adjacent to the unwrapped magnetic pole surface forming portion, Are coupled to each other, and the other unwrapped magnetic pole surface forming portion of the pair of unwrapped magnetic pole surface forming portions and the other winding of the pair of wound magnetic pole surface forming portions adjacent to the unwrapped magnetic pole surface forming portion. The magnetic pole surface forming portion is coupled to each other. In the center of each of the plurality of pairs of unwrapped magnetic pole surface forming portions and the plurality of pairs of unwrapped magnetic pole surface forming portions, 1 is magnetized in the direction in which the plurality of pairs of magnetic pole surface forming portions are aligned. Each of the permanent magnets is arranged, and these permanent magnets are opposite to each other in the magnetization direction of the two permanent magnets respectively arranged inside the adjacent non-wound magnetic pole surface forming portion and the wound magnetic pole surface forming portion. Are arranged with a predetermined pitch τm.

  According to the present invention, similarly to the linear motor described above, the thrust of the motor with respect to the size of the armature can be increased, and the speed of the linear motor can be increased. Also, by increasing the pitch of the teeth of the inductor and the pitch of the permanent magnets compared to the distance between the inductor and the armature, the distance between the inductor and the armature can be increased. The decrease in thrust becomes smaller. Therefore, it is possible to easily set the position of the inductor and the armature. In addition, the volume occupied by the winding can be increased without reducing the magnetic resistance, and the amount of heat generated by the winding can be suppressed.

  In the linear motor of the present invention, since a pair of inductors can be arranged in the horizontal direction of the armature, the magnetic attractive force between the armature and the pair of inductors can be canceled, and the armature It can be stably disposed between a pair of inductors.

  Even in such a linear motor, if the pitch τp and the pitch τm are set to have a relationship of τm = τp × (6n ± 1) / (6n) (n is a natural number), When the pitch τm of the permanent magnet row slightly deviates from the pitch τp of the tooth portion row, the cogging force generated by the tooth portion of each inductor is canceled, and the cogging force of the entire armature can be reduced.

  The number of armature windings may be N phases × M (N is an integer of 2 or more, M is an integer of 1 or more).

  The armature can be configured to have an armature unit and a plurality of winding members. In this case, the armature unit integrally configures the unwound pole column, the pair of unwound magnetic pole surface forming portions, and the pair of wound magnetic pole surface forming portions. The armature winding is wound around the pole pole. And a winding member should just be fitted to an armature unit by fitting to a pair of winding magnetic pole surface formation part. In this way, the unwrapped magnetic pole portions and the wound magnetic pole portions are alternately arranged and adjacent to each other by simply attaching the wound member to the armature unit by fitting. An armature combined with the forming portion can be easily formed.

  A gap is formed between the armature winding and one unwrapped magnetic pole surface forming portion of the pair of unwrapped magnetic pole surface forming portions and one wound magnetic pole surface forming portion of the pair of wound magnetic pole surface forming portions. The first cooling pipe for cooling the armature winding is arranged in a zigzag folded state in the gap, on the surface of the one non-winding magnetic pole surface forming portion, and on the surface of the one winding magnetic pole surface forming portion. can do. In addition, there is a gap between the armature winding and the other unwound magnetic pole surface forming part of the pair of unwound magnetic pole surface forming parts and the other wound magnetic pole surface forming part of the pair of wound magnetic pole surface forming parts. A second cooling pipe for cooling the armature winding is formed in a folded state in the gap, on the surface of the other non-winding magnetic pole surface forming portion, and on the surface of the other winding magnetic pole surface forming portion. Can be arranged. In this way, after attaching the first cooling pipe and the second cooling pipe to the armature unit by appropriately setting the shape and dimensions of the gap, the first cooling pipe and the second cooling pipe. A plurality of winding members can be attached to the armature unit. Therefore, the cooling pipe and the armature unit can be easily attached and detached.

  The teeth of the pair of inductors can be skewed in different directions. That is, the longitudinal direction of the tooth portion of one inductor can be inclined in different directions with respect to the direction orthogonal to the moving direction of the mover. In this way, the cogging force in the pitching direction caused by the skew can be offset, and the force applied to the guide member that supports the mover can be reduced.

  The length dimension in the longitudinal direction in which the armature winding of the winding member is wound is preferably shorter than the length dimension of the portion adjacent to the armature winding of the unwound pole column. In this way, the dimension by which the armature winding protrudes from the armature unit can be reduced.

  According to the present invention, armature windings are wound every other plurality of pole poles (unwrapped magnetic pole portions and wound magnetic pole portions are arranged alternately), and adjacent magnetic pole surface forming portions (non-winding portions) Since the winding magnetic pole surface forming portion and the winding magnetic pole surface forming portion are coupled to each other, the opening by the slot is closed, and the area of the magnetic pole surface of the armature facing the inductor is increased. In addition, since one permanent magnet is disposed in each of the plurality of magnetic pole surface forming portions (the unwrapped magnetic pole surface forming portion and the wound magnetic pole surface forming portion), the wound magnetic pole portion, the unwrapped magnetic pole portion, and the armature winding By setting the dimensions of the lines appropriately, the pitch of the permanent magnets at regular intervals can be set relatively freely. Therefore, the thrust of the motor with respect to the size of the armature can be increased, and the speed of the linear motor can be increased. Also, by increasing the pitch of the teeth of the inductor and the pitch of the permanent magnets compared to the distance between the inductor and the armature, the distance between the inductor and the armature can be increased. The decrease in thrust becomes smaller. Therefore, it is possible to easily set the position of the inductor and the armature.

  Further, in the present invention, the width dimension of the non-wound magnetic pole surface forming part in the direction in which the plurality of magnetic pole surface forming parts are arranged is larger than the width dimension of the non-wound pole column in the direction in which the plurality of magnetic pole surface forming parts are arranged. The width dimension of the wound magnetic pole surface forming portion in the direction in which the magnetic pole surface forming portions are arranged is made larger than the width dimension of the wound magnetic pole column in the direction in which the plurality of magnetic pole surface forming portions are arranged. The occupied volume of the child winding can be increased, and the amount of heat generated by the armature winding can be suppressed.

  The best mode for carrying out the present invention will be described below with reference to the drawings. FIG. 1 is a side view of a linear motor according to a first embodiment of the present invention. As shown in FIG. 1, the linear motor of this example includes an inductor 1 that constitutes a stator, an armature 3 that constitutes a mover, a movable stage 5, and a base 7. The inductor 1 has a tooth row 11 composed of a plurality of tooth portions 9 arranged with a predetermined pitch τp in the moving direction of the armature 3 (arrow D), and a plurality of steel plates made of a magnetic material are provided. It is configured by stacking. As shown in FIG. 2, the tooth row 11 of the inductor 1 is skewed. That is, the longitudinal direction of the tooth portion 9 of the tooth row 11 is inclined with respect to a direction (vertical direction in FIG. 2) orthogonal to the moving direction of the armature 3. 2 is a plan view of the linear motor as viewed from above in FIG. 1 with the movable stage 5 removed.

  As shown in FIGS. 1 and 2, the armature 3 includes an armature unit 13, six winding members 15, and a permanent magnet row 17. As shown in FIG. 3, the armature unit 13 includes a yoke 21, seven unwound pole columns 23, seven unwound magnetic pole surface forming portions 25, and six wound magnetic pole surface forming portions 27. Configured. The yoke 21 has a rectangular parallelepiped extending in the same direction as the tooth row 11. In this yoke 21, three grooves 21a having a T-shaped cross section extending in a direction orthogonal to the tooth row 11 and opening upward are formed at equal intervals. As shown in FIG. 1, the movable stage 5 is fixed to the three grooves 21a by a fitting structure. The movable stage 5 is slidably supported on a pair of side walls 7 a of a base 7 disposed on both sides of the inductor 1. In FIG. 1, only one side wall 7a of the pair of side walls 7a is shown. With such a configuration, the armature 3 is arranged to be movable with a predetermined interval with respect to the inductor 1.

  Returning to FIG. 3, the seven non-winding pole columns 23 are pole columns on which armature windings 16 </ b> A to 16 </ b> F (described later) are not wound, and are connected along the yoke 21 at equal intervals. The seven unwrapped magnetic pole surface forming portions 25 are connected to the ends of the seven unwrapped pole columns 23, respectively, and are disposed so as to face the tooth row 11. The width dimension of the non-winding magnetic pole surface forming portion 25 in the direction in which the non-winding magnetic pole surface forming portion 25 and the winding magnetic pole surface forming portion 27 are arranged is such that the non-winding magnetic pole surface forming portion 25 and the winding magnetic pole surface forming portion 27 are aligned. It is larger than the width dimension of the unwound pole column 23 in the direction of alignment.

  The six wound magnetic pole surface forming portions 27 are arranged so as to be alternately adjacent to the seven unwrapped magnetic pole surface forming portions 25. The width dimension of the wound magnetic pole surface forming portion 27 in the direction in which the unwrapped magnetic pole surface forming portion 25 and the wound magnetic pole surface forming portion 27 are arranged is the same as that of the unwrapped magnetic pole surface forming portion 25 and the wound magnetic pole surface forming portion 27. The direction is larger than the width dimension of a wound pole column 39 to be described later. Each of the six wound magnetic pole surface forming portions 27 is coupled to the adjacent non-wound magnetic pole surface forming portion 25. As a result, a gap 29 is formed between the two unwound pole columns 23 adjacent to the yoke 21 and the wound magnetic pole surface forming portion 27. Between the unwrapped magnetic pole surface forming portion 25 and the wound magnetic pole surface forming portion 27, a hole 31 into which a screw (not shown) for bundling a plurality of electromagnetic steel plates constituting the armature unit 13 is inserted communicates with the air gap 29. It is formed as follows. This hole 31 does not hinder the magnetic flux generated between the wound magnetic pole surface forming portion 27 and the inductor 1 described later and the flow of magnetic flux generated between the non-wrapped magnetic pole surface forming portion 25 and the inductor 1. Has shape and dimensions.

  In addition, in the respective central portions of the unwrapped magnetic pole surface forming portion 25 and the wound magnetic pole surface forming portion 27, the surface facing the inductor 1, the unwrapped magnetic pole surface forming portion 25, and the wound magnetic pole surface forming portion 27. Permanent magnet fitting grooves 35 that are open in a direction orthogonal to the direction in which the magnets are arranged are formed one by one. As shown in FIG. 1, a plurality of permanent magnets 37 magnetized in the direction in which the non-wound magnetic pole surface forming portion 25 and the wound magnetic pole surface forming portion 27 are arranged in the plurality of permanent magnet fitting grooves 35, respectively. It is mated. A permanent magnet row 17 is formed by a plurality of permanent magnets 37. These permanent magnets 37 have a predetermined pitch τm so that the magnetization directions of the two permanent magnets 37 disposed in the adjacent unwrapped magnetic pole surface forming portion 25 and the wound magnetic pole surface forming portion 27 are opposite to each other. Are lined up. In this example, the pitch τp of the tooth row 11 and the pitch τm of the permanent magnet row 17 have a relationship of τm = τp × (6n ± 1) / (6n) (n is a natural number).

  As shown in FIG. 4, the six winding members 15 each have a winding pole 39 and armature windings 16A to 16F. The wound pole column 39 integrally includes a substantially rectangular parallelepiped pole body 39a and a pair of fitting portions 39b provided at both ends of the pole column body 39a. Armature windings 16A to 16F are respectively wound around the pole body 39a. The fitting part 39b has a shape in which the cross-sectional area increases as the distance from the pole body 39a increases. The six winding members 15 are attached to the armature unit 13 in a state of being disposed in the gap 29. Specifically, one fitting portion 39b of the pair of fitting portions 39b of the winding member 15 is fitted into the fitting groove 21b formed in the yoke 21, and the other fitting portion 39b is the winding magnetic pole. The winding member 15 is attached to the armature unit 13 by being fitted into a fitting groove 27 a formed in the surface forming portion 27. Further, as shown in FIG. 2, the length dimension L <b> 1 in the longitudinal direction in the direction in which the armature windings 16 </ b> A to 16 </ b> F of the wound pole column 39 of the winding member 15 are wound is the electric machine of the unwound pole column 23. It is shorter than the length dimension L2 of the part adjacent to the child windings 16A to 16F. For this reason, in this example, the dimension L3 in which the armature windings 16A to 16F protrude from the armature unit 13 can be reduced. In this example, as shown in FIG. 1, the non-winding pole column 23 and the non-winding magnetic pole surface forming portion 25 constitute an unwinding magnetic pole portion 41, and the winding pole column 39 and the winding magnetic pole surface forming portion. 27 constitutes a wound magnetic pole portion 43. As a result, the armature 3 has a configuration in which the unwrapped magnetic pole portions 41 and the wound magnetic pole portions 43 are alternately arranged. In other words, the armature windings 16A to 16F are respectively wound around every other magnetic pole part (43) of the magnetic pole parts (41, 43).

  Further, between the armature windings 16 </ b> A to 16 </ b> F, the unwound magnetic pole surface forming portion 25, and the wound magnetic pole surface forming portion 27 (a portion where the hole 31 and the air gap 29 communicate with each other), a gap 45 having a triangular cross section is provided. Will be formed respectively. Cooling pipes 47 for cooling the armature windings 16A to 16F are arranged in a zigzag manner in the gaps 45, on the surface of the unwrapped magnetic pole surface forming portion 25, and on the surface of the wound magnetic pole surface forming portion 27. ing.

  As shown in FIG. 5, the cooling pipe 47 includes a plurality of pipe portions 47 a extending in the same direction as the tooth row 11, a pipe portion 47 b extending in a direction perpendicular to the direction in which the tooth row 11 extends, and a pipe portion 47 a. And a tube portion 47c extending in the direction. The tube portion 47a is positioned on the surface of the wound magnetic pole surface forming portion 27, the tube portion 47b is positioned in the gap 45, and the tube portion 47c is positioned on the surface of the unwrapped magnetic pole surface forming portion 25. The cooling pipe 47 is arranged.

  In this example, the cooling pipe 47 and the winding member 15 were attached to the armature unit 13 as follows. First, the cooling pipe 47 is moved in the direction in which the pipe part 47b extends (in the direction of arrow A) so that the pipe part 47b is positioned in the gap 29 of the armature unit 13, and one opening 29a (see FIG. 2) to be inserted into the gap 29. Next, the cooling pipe 47 is moved in a direction perpendicular to the direction in which the pipe portion 47b extends (direction perpendicular to the arrow A), the pipe portion 47a is positioned on the surface of the winding magnetic pole surface forming portion 27, and the pipe portion 47b. Is positioned in the gap 45, and the tube portion 47c is positioned on the surface of the non-winding magnetic pole surface forming portion 25. Next, the winding member 15 is inserted into the gap 29 from one opening 29 a of the gap 29, and the pair of fitting portions 39 b of the winding member 15 are inserted into the fitted grooves 21 b of the yoke 21 and the winding pole surface. The fitting of the cooling pipe 47 and the winding member 15 is completed by fitting into the fitted grooves 27a of the forming portion 27, respectively. According to this example, the cooling pipe 47 and the winding member 15 can be easily attached and detached by the fitting structure.

In the linear motor of this example, U-phase currents in opposite directions flow through every other two armature windings 16A and 16D, and every other two armature windings 16C and armatures. A V-phase current in the opposite direction flows through the winding 16F, and a W-phase current in the opposite direction flows through every other two armature windings 16B and 16E. And, for example, around the armature winding 16A, as shown in FIG. 6, the permanent magnet 37 in the wound magnetic pole surface forming portion 27 → the tooth portion 9 of the inductor 1 → the tooth portion adjacent to the left side in the drawing. 9 → Permanent magnet 37 in non-winding magnetic pole surface forming portion 25 → Non-winding pole column 23 → Wound member 15 → Permanent magnet 37 in winding magnetic pole surface forming portion 27 and magnetic flux M1 flow. Further, the permanent magnet 37 in the wound magnetic pole surface forming portion 27 → the tooth portion 9 of the inductor 1 → the tooth portion 9 adjacent to the right side in the drawing → the permanent magnet 37 in the unwrapped magnetic pole surface forming portion 25 → unwinding. The permanent magnet 37 and the magnetic flux M2 flow in the pole pole 23 → the winding member 15 → the wound magnetic pole surface forming portion 27. Then, as shown in FIG. 7, a change occurs in the magnetic flux generated in each magnetic pole portion 41, 43 and thrust is generated in the direction of arrow F <b> 1, and the armature 3 reciprocates with respect to the inductor 1. In FIG. 7, a relatively strong magnetic flux is indicated by a solid line, and a relatively weak magnetic flux is indicated by a broken line.

  According to the linear motor of this example, the non-wound magnetic pole portions 41 and the wound magnetic pole portions 43 are alternately arranged, and the adjacent non-winding magnetic pole surface forming portions 25 and the wound magnetic pole surface forming portions 27 are coupled to each other. Therefore, the opening by the slot is closed, and the area of the magnetic pole surface of the armature 3 facing the inductor 1 is increased. Since one permanent magnet 37 is disposed in each of the non-winding magnetic pole surface forming portion 25 and the wound magnetic pole surface forming portion 27, the non-winding magnetic pole portion 41, the winding magnetic pole portion 43, and the armature winding 16A. By appropriately setting the dimensions of ˜16F, the equally spaced pitches of the permanent magnets in the permanent magnet row can be set relatively freely. Therefore, the thrust of the motor with respect to the size of the armature 3 can be increased, and the speed of the linear motor can be increased. Further, by increasing the pitch τp of the tooth portion 9 of the inductor 1 and the pitch τm of the permanent magnet as compared with the distance between the inductor 1 and the armature 3, the space between the inductor 1 and the armature 3 is increased. Even if the distance between the two is increased, the reduction in thrust is reduced. Therefore, the position setting of the inductor 1 and the armature 3 can be easily performed.

  Further, in the linear motor of this example, the width dimension in the extending direction of the tooth part row 11 of the non-winding magnetic pole surface forming portion 25 is made larger than the width dimension in the extending direction of the tooth part row 11 of the non-winding pole column 23, Since the width dimension of the winding magnetic pole surface forming part 27 in the extending direction of the tooth row 11 is made larger than the width dimension of the winding pole column 39 in the extending direction of the tooth row 11, the armature is not reduced without reducing the magnetic resistance. The occupied volume of the windings 16A to 16F can be increased, and the amount of heat generated by the armature windings 16A to 16F can be suppressed. FIG. 8 is a front view of the linear motor according to the second embodiment of the present invention, and FIG. 9 is a plan view of the main part of the linear motor (a view of FIG. 8 taken along line IX-IX). FIG. 10 is a schematic view of the main part of the linear motor as seen from the side surface (schematic view of FIG. 8 as seen from line XX). As shown in each figure, the linear motor of this example includes a pair of inductors 101A and 101B that constitute a stator, an armature 103 that constitutes a mover, a movable stage 105, a base 107, and a position detection device 108. Have. Each of the pair of inductors 101A and 101B has a tooth portion row 111 composed of a plurality of tooth portions 109 arranged with a predetermined pitch τp in the moving direction of the armature 103 (arrow D in FIG. 9). A plurality of steel plates made of a magnetic material are laminated. As shown in FIG. 10, each tooth row 111 of the pair of inductors 101A and 101B is skewed in different directions. That is, the longitudinal direction of the tooth portion 109 of one inductor 101 </ b> A is inclined with respect to the direction orthogonal to the moving direction of the armature 103. The longitudinal direction of the tooth portion 109 of the other inductor 101B is inclined in a direction different from that of the tooth portion 109 of the one inductor 101A. In this example, when it is assumed that the tooth portion row 111 is not skewed, the end portion of the tooth portion 109 of the tooth portion row 111 is shifted in the extending direction of the tooth portion row 111 of the tooth portion 109 when the tooth portion row 111 is actually skewed. The length is τp / 6n (n is a natural number).

  As shown in FIG. 9, the armature 103 includes an armature unit 113, six winding members 115, and a pair of permanent magnet rows 117 </ b> A and 117 </ b> B. As shown in FIG. 11, the armature unit 113 includes seven unwrapped pole columns 119, seven pairs of unwrapped magnetic pole surface forming portions 121A and 121B, and seven pairs of wound magnetic pole surface forming portions 123A and 123B. And are integrated. The seven non-wound pole columns 119 are pole columns on which an armature winding described later is not wound, and are arranged at equal intervals in the direction in which the tooth portion row 111 extends. The seven pairs of unwrapped magnetic pole surface forming portions 121A and 121B are connected to both ends of the seven unwrapped pole columns 119, respectively. Of the seven pairs of non-winding magnetic pole surface forming portions 121A and 121B, one of the seven non-winding magnetic pole surface forming portions 121A and the tooth portion row 111 of one inductor 101A of the pair of inductors 101A and 101B It arrange | positions so that it may oppose. Of the seven pairs of non-winding magnetic pole surface forming portions 121A and 121B, the seven other non-winding magnetic pole surface forming portions 121B are connected to the tooth row 111 of the other inductor 101B of the pair of inductors 101A and 101B. It arrange | positions so that it may oppose. The width dimension of each of the pair of non-winding magnetic pole surface forming portions 121A and 121B in the direction in which the pair of non-winding magnetic pole surface forming portions 121A and 121B is arranged is such that the pair of non-winding magnetic pole surface forming portions 121A and 121B are aligned. It is larger than the width dimension of the unwound pole column 119 in the direction.

The six pairs of wound magnetic pole surface forming portions 123A and 123B are arranged so as to oppose the respective tooth row 111 of the pair of inductors 101A and 101B. Further, the width dimension of the pair of wound magnetic pole surface forming portions 123A and 123B in the direction in which the six pairs of wound magnetic pole surface forming portions 123A and 123B are arranged is the same as that of the six pairs of wound magnetic pole surface forming portions 123A and 123B. It is larger than the width dimension of a wound pole column 139 described later in the direction of alignment. Of the six pairs of wound magnetic pole surface forming portions 123A and 123B, one of the six wound magnetic pole surface forming portions 123A is arranged so as to be alternately adjacent to one non-wound magnetic pole surface forming portion 121A. . Then, one of the six wound magnetic pole surface forming portions 123A is coupled to one adjacent non-wound magnetic pole surface forming portion 121A. Of the six pairs of wound magnetic pole surface forming portions 123A and 123B, the six other wound magnetic pole surface forming portions 123B are arranged alternately adjacent to the other non-wound magnetic pole surface forming portion 121B. . The six other wound magnetic pole surface forming portion 12 3 B is bonded to the adjacent non-wound magnetic pole surface forming portion 12 1 B and mutual other.

With the above configuration, a gap 125 is formed between the two adjacent unwound pole columns 119 and the pair of wound magnetic pole surface forming portions 123A and 123B. Further, between one unwrapped magnetic pole surface forming portion 121A and one wound magnetic pole surface forming portion 123A, and between the other unwrapped magnetic pole surface forming portion 121B and the other wound magnetic pole surface forming portion 123B. Each of the holes 127 is formed so as to communicate with the gap 125. As shown in FIG. 8, screw attachment tools 129 are arranged at both ends of the armature unit 113 from which the hole 127 extends. A through hole 129 a communicating with the hole 127 is formed in the screw attachment 129. The armature unit 113 is fixed to the movable stage 105 by a screw 131 that passes through the hole 127 and the through hole 129a. The movable stage 105 is slidably supported via a pulley 133 on a pair of side walls 107a of a base 107 disposed on both sides of the pair of inductors 101A and 101B. For this reason, the armature 103 is arranged to be movable with respect to the pair of inductors 101A and 101B at a predetermined interval from the pair of inductors 101A and 101B. In this example, the detector 108a of the position detection device 108 is arranged on one side wall of the pair of side walls 107a, and the detector 108b facing the detector 108a with a predetermined interval is arranged on the movable stage 105. ing. Thereby, the position of the armature 103 is detected.

  Returning to FIG. 11, at the center of each of the one unwrapped magnetic pole surface forming portion 121A and the one wound magnetic pole surface forming portion 123A, there is a surface facing one inductor 101A and one unwinding portion. Permanent magnet fitting grooves 135 are formed one by one so as to open in a direction perpendicular to the direction in which the magnetic pole surface forming portion 121A and one winding magnetic pole surface forming portion 123A are arranged. As shown in FIG. 9, in the plurality of permanent magnet fitting grooves 135, a plurality of permanent magnets magnetized in the direction in which one non-winding magnetic pole surface forming portion 121A and one winding magnetic pole surface forming portion 123A are arranged. Magnets 137 are respectively fitted. These permanent magnets 137 are arranged such that the magnetization directions of the two permanent magnets 137 arranged in one adjacent unwrapped magnetic pole surface forming portion 121A and one wound magnetic pole surface forming portion 123A are opposite to each other. They are arranged with a predetermined pitch τm. In addition, the center of each of the other non-winding magnetic pole surface forming portion 121B and the other winding magnetic pole surface forming portion 123B is also provided with a surface facing the other inductor 101A and the other non-winding magnetic pole surface forming portion 121B. And the permanent magnet fitting groove | channel 135 opened in the direction orthogonal to the direction where the other winding magnetic pole surface formation part 123B is located in a line is formed one by one. In the plurality of permanent magnet fitting grooves 135, a plurality of permanent magnets 137 magnetized in the direction in which the other non-winding magnetic pole surface forming portion 121B and the other winding magnetic pole surface forming portion 123B are aligned are respectively fitted. ing. These permanent magnets 137 are arranged such that the magnetization directions of the two permanent magnets 137 arranged in the other non-wound magnetic pole surface forming portion 121B and the other wound magnetic pole surface forming portion 123B are opposite to each other. They are arranged with a predetermined pitch τm. In this example, the pitch τp of the tooth row 111 and the pitch τm of the permanent magnet row 117 have a relationship of τm = τp × (6n ± 1) / (6n) (n is a natural number).

  As shown in FIG. 12, each of the six winding members 115 has a winding pole 139 and armature windings 141A to 141F. The wound pole 139 integrally has a substantially rectangular parallelepiped pole body 139a and a pair of fitting portions 139b provided at both ends of the pole body 139a. Armature windings 141 </ b> A to 141 </ b> F are wound around the pole body 139 a. The fitting portion 139b has a shape in which the cross-sectional area increases as the distance from the pole body 139a increases. The six winding members 115 are attached to the armature unit 113 in a state of being disposed in the gap 125. Specifically, one fitting portion 139b of the pair of fitting portions 139b of the winding member 115 is fitted into the fitting groove 123a formed in one winding magnetic pole surface forming portion 123A, and the other fitting is performed. The winding member 115 is attached to the armature unit 113 by fitting the joint portion 139b into the fitting groove 123a formed in the other winding magnetic pole surface forming portion 123B. Further, as shown in FIG. 8, the length dimension L5 in the longitudinal direction in the direction in which the armature windings 141A to 141F of the wound pole column 139 of the winding member 115 are wound is equal to that of the unwound pole column 119. It is shorter than the length dimension L6 of the portion adjacent to the child windings 141A to 141F. For this reason, in this example, the dimension L7 in which the armature windings 141A to 141F protrude from the armature unit 113 can be reduced. In this example, as shown in FIG. 9, the non-winding pole column 119 and the pair of non-winding magnetic pole surface forming portions 121A and 121B form an unwinding magnetic pole portion 143, and the winding pole column 139 and the pair of non-winding pole columns 139 A wound magnetic pole portion 145 is configured by the wound magnetic pole surface forming portions 123A and 123B. As a result, the armature 103 has a configuration in which the unwrapped magnetic pole portions 143 and the wound magnetic pole portions 145 are alternately arranged. In other words, the armature windings 141A to 141F are respectively wound around every other magnetic pole part (145) of the magnetic pole parts (143, 145).

  In addition, the armature windings 141A to 141F and one of the pair of unwound magnetic pole surface forming portions 121A and 121B, one of the unwrapped magnetic pole surface forming portions 121A and one of the pair of wound magnetic pole surface forming portions 123A and 123B are wound. A gap 147A having a triangular cross section is formed between the magnetic pole surface forming portion 123A (a portion where the hole 127 and the gap 125 communicate with each other). A first cooling pipe 149A for cooling the armature windings 141A to 141F is formed in the gap 147A, the surface of one non-winding magnetic pole surface forming portion 121A, and the surface of one winding magnetic pole surface forming portion 123A. Are arranged in a folded state. Further, the other windings of the armature windings 141A to 141F, the other non-winding magnetic pole surface forming portions 121A and 121B, the other non-winding magnetic pole surface forming portion 121B, and the pair of wound magnetic pole surface forming portions 123A and 123B. A gap 147B having a triangular cross section is also formed between the magnetic pole surface forming portion 123B (a portion where the hole 127 and the gap 125 communicate with each other). A second cooling pipe 149B for cooling the armature windings 141A to 141F is formed in the gap 147B, the surface of the other non-wound magnetic pole surface forming portion 121B, and the surface of the other wound magnetic pole surface forming portion 123B. Are arranged in a folded state. The first and second cooling pipes 149A and 149B have basically the same structure as the cooling pipe 47 shown in FIG. In the same manner as in the first embodiment, the first and second cooling pipes 149A and 149B are attached, and then the winding member 115 is attached, whereby the first and second cooling pipes 149A and 149B and the windings are attached. The mounting member 115 can be easily detached.

In the linear motor of this example, U-phase currents in opposite directions flow through every other armature winding 141A and armature winding 141D, and every second armature winding 141C and armature. A V-phase current in the opposite direction flows through the winding 141F, and a W-phase current in the opposite direction flows through every other two armature windings 141B and 141E. As shown in FIG. 13, the permanent magnet 137 in the non-winding magnetic pole surface forming portion 121A → the tooth portion 109 of the inductor 101A → the tooth portion 109 adjacent to the right side in the drawing → the inside of the winding magnetic pole surface forming portion 123A Permanent magnet 137 → permanent magnet 137 in wound magnetic pole surface forming portion 123B → tooth portion 109 of inductor 101B → tooth portion 109 adjacent to the left side in the drawing → permanent magnet 137 in unwrapped magnetic pole surface forming portion 121B → The permanent magnet 137 and the magnetic flux M11 in the non-winding magnetic pole surface forming portion 121A flow. Also, permanent non-wound instrumentation magnetic pole surface forming portion 12 first permanent magnet 137 → the inductor 101A teeth 109 → wound magnetic pole surface forming portion 12 3 A of teeth 109 → towards drawing adjacent to the left side of the A magnet 137 → wound magnetic pole surface forming portions 12 3 teeth 109 → non-wound instrumentation magnetic pole surface forming portion 12 1 in B which is adjacent to the right side toward the tooth portion 109 → drawing of the permanent magnet 137 → inductor 101B in B Permanent magnet 137 → permanent magnet 137 and magnetic flux M12 in unwrapped magnetic pole surface forming portion 12 1 A flow. Thereby, thrust is generated in the directions of arrows F2 and F3, and the armature 103 reciprocates with respect to the pair of inductors 101A and 101B.

  According to the linear motor of this example, since the pair of inductors 101A and 101B can be arranged in the horizontal direction of the armature 103, the magnetic attraction force between the armature 103 and the pair of inductors 101A and 101B is increased. The armature 103 can be stably disposed between the pair of inductors 101A and 101B.

In the above example, the armature 103 includes one armature unit 113. However, as shown in FIG. 14, the armature includes a plurality (three in this example) of armature units 213, 313A, and 313B. It can also comprise. In this case, the fitting convex portion 213a and the fitting concave portion 213b are formed on the surface of the armature unit 213 facing the adjacent armature units 313A and 313B. In addition, a fitting convex portion 313a and a fitting concave portion 313b are formed on each surface of the armature units 313A and 313B facing the adjacent armature unit 213 . The fitting convex part 213a and the fitting convex part 313a have a shape in which the cross-sectional area increases toward the adjacent armature unit. The to-be-fitted concave portion 213b and the to-be-fitted concave portion 313b have shapes that can be fitted to the fitting convex portion 313a and the fitting convex portion 213a, respectively. And the fitting convex part 313a and the to-be-fitted recessed part 213b are fitted, the fitting convex part 213a and the to-be-fitted recessed part 313b are fitted, and three armature units 213, 313A, and 313B are connected. . In this way, an armature having a desired number of magnetic poles can be easily formed by preparing a plurality of armature units.

1 is a side view of a linear motor according to a first embodiment of the present invention. It is the top view of the linear motor which removed the movable stage and was seen from the upper direction of FIG. It is a side view of the armature unit used for the linear motor shown in FIG. It is a side view of the winding member used for the linear motor shown in FIG. It is a top view of the cooling pipe used for the linear motor shown in FIG. It is a figure used in order to demonstrate the flow of the magnetic flux of the linear motor shown in FIG. It is a figure used in order to demonstrate the flow of the magnetic flux of the linear motor shown in FIG. 1, and the motion of a linear motor. It is a front view of the linear motor of the 2nd Embodiment of this invention. It is a top view (figure which looked at FIG. 8 from the IX-IX line) of the principal part of the linear motor shown in FIG. It is the schematic diagram which looked at the principal part of the linear motor shown in FIG. 8 from the side (schematic diagram which looked at FIG. 8 from the XX line). It is a top view of the armature unit used for the linear motor shown in FIG. It is a top view of the winding member used for the linear motor shown in FIG. It is a figure used in order to explain the flow of magnetic flux of the linear motor shown in FIG. It is a figure used in order to explain the case where an armature is provided with a plurality of armature units.

DESCRIPTION OF SYMBOLS 1 Inductor 3 Armature 9 Tooth part 11 Tooth part row | line | column 13 Armature unit 15 Winding member 16A-16F Armature winding 17 Permanent magnet row | line | column 21 Yoke 23 Unwound pole pole 25 Unwound pole surface formation part 27 Winding Mounted pole surface forming portion 37 Permanent magnet 39 Wound pole column 41 Unwrapped magnetic pole portion 43 Wound magnetic pole portion 47 Cooling pipes 101A, 101B A pair of inductors 103 Armature 109 Tooth portion 111 Tooth portion row 113 Armature unit 115 Winding Mounting members 117A, 117B A pair of permanent magnet rows 119 Unwrapped pole columns 121A, 121B A pair of unwrapped magnetic pole surface forming portions 123A, 123B A pair of wound magnetic pole surface forming portions 137 Permanent magnets 139 Wound pole columns 141A-141F Armature winding 143 Unwinding magnetic pole part 145 Winding magnetic pole part 149A First cooling pipe 149B Second cooling pipe

Claims (14)

An inductor having a tooth row composed of a plurality of teeth arranged with a predetermined pitch τp;
The yoke extending in the direction in which the plurality of tooth portions are arranged, the plurality of pole columns arranged at predetermined intervals along the yoke and connected to the yoke and the ends of the plurality of pole columns, respectively. A plurality of magnetic pole portions each having a plurality of magnetic pole surface forming portions opposed to the tooth row of the inductor, a plurality of armature windings respectively exciting the magnetic pole surface forming portions, and the plurality of magnetic poles An armature having one or more permanent magnets arranged in a surface forming portion to change a magnetic path of a magnetic flux passing through the magnetic pole surface forming portion;
A linear motor in which one of the inductor and the armature is a mover and the other is a stator,
The plurality of magnetic pole portions include a non-winding magnetic pole portion including an unwinding pole column around which the armature winding is not wound and a non-winding magnetic pole surface forming portion connected to the non-winding pole column, A wound magnetic pole portion including a wound pole column around which the armature winding is wound and a wound magnetic pole surface forming portion connected to the wound pole column is configured to be alternately arranged,
The width dimension of the non-winding magnetic pole surface forming part in the direction in which the plurality of magnetic pole surface forming parts are arranged is larger than the width dimension of the unwinding pole column in the direction in which the plurality of magnetic pole surface forming parts are arranged,
The width dimension of the wound magnetic pole face forming portion in the direction in which the plurality of magnetic pole face forming portions are arranged is larger than the width dimension of the wound pole column in the direction in which the plurality of magnetic pole face forming portions are arranged,
The adjacent unwrapped magnetic pole surface forming part and the wound magnetic pole surface forming part are coupled to each other,
Each of the permanent magnets magnetized in the direction in which the plurality of magnetic pole surface forming portions are arranged in the center of each of the plurality of unwrapped magnetic pole surface forming portions and the plurality of wound magnetic pole surface forming portions, respectively. Has been placed,
The permanent magnet has a predetermined pitch τm so that the magnetization directions of the two permanent magnets respectively disposed inside the adjacent unwrapped magnetic pole surface forming portion and the wound magnetic pole surface forming portion are opposite to each other. are aligned with,
The armature has an armature unit and a plurality of winding members,
The armature unit is configured such that the yoke, the unwound pole column, the unwound magnetic pole surface forming portion, and the wound magnetic pole surface forming portion are integrated.
The wound member has the wound pole pole and the armature winding wound around the wound pole pole,
The linear motor , wherein the winding member is fitted to the yoke and the winding magnetic pole surface forming portion and attached to the armature unit . The armature unit is formed by laminating a plurality of electromagnetic steel plates,
Between the unwrapped magnetic pole surface forming portion and the wound magnetic pole surface forming portion, a hole is formed into which a screw for bundling the plurality of electromagnetic steel sheets constituting the armature unit is inserted, and the hole is It has a shape and size that do not hinder the flow of magnetic flux generated between the wound magnetic pole surface forming portion and the inductor and the flow of magnetic flux generated between the unwrapped magnetic pole surface forming portion and the inductor. The linear motor according to claim 1.   The linear motor according to claim 1, wherein the pitch τp and the pitch τm have a relationship of τm = τp × (6n ± 1) / (6n) (n is a natural number).   3. The linear motor according to claim 1, wherein the number of the plurality of armature windings is N phase × M (N is an integer of 2 or more, M is an integer of 1 or more). A gap is formed between the armature winding, the unwrapped magnetic pole surface forming portion, and the wound magnetic pole surface forming portion,
A cooling pipe for cooling the armature winding is arranged in a zigzag state in the gap, the surface of the non-winding magnetic pole surface forming portion, and the surface of the winding magnetic pole surface forming portion,
The gap and the cooling pipe have shapes and dimensions that allow the plurality of winding members to be attached to the armature unit after the cooling pipe is attached to the armature unit. The linear motor according to claim 1 . The linear motor according to claim 1 , wherein the tooth row of the inductor is skewed. A length dimension in a longitudinal direction of the winding member in a direction in which the armature winding is wound is shorter than a length dimension of a portion adjacent to the armature winding of the unwound pole pole. The linear motor according to claim 1 . A pair of inductors each having a tooth row composed of a plurality of teeth arranged with a predetermined pitch τp;
A plurality of pole columns extending in opposite directions of the pair of inductors and a plurality of pairs of magnetic pole surfaces connected to both ends of the plurality of pole columns and respectively facing the tooth row of the pair of inductors A plurality of magnetic pole portions each having a forming portion; a plurality of armature windings for exciting the plurality of pairs of magnetic pole surface forming portions; and the magnetic pole surfaces disposed in the pair of magnetic pole surface forming portions, respectively. An armature having one or more permanent magnets that change the magnetic path of the magnetic flux passing through the forming portion;
A linear motor in which one of the inductor and the armature is a mover and the other is a stator,
The plurality of magnetic pole portions extend in a direction in which the pair of inductors face each other, and a pair of non-winding pole columns that are not wound with the armature winding and are connected to both ends of the non-winding pole columns. A non-winding magnetic pole portion including a wound magnetic pole surface forming portion, a wound pole column extending in a direction in which the pair of inductors face each other and wound with the armature winding, and the wound pole column A winding magnetic pole portion including a pair of winding magnetic pole surface forming portions connected to both ends is arranged alternately.
The width dimension of the pair of unwrapped magnetic pole surface forming portions in the direction in which the plurality of pairs of magnetic pole surface forming portions are aligned is the width dimension of the unwrapped pole column in the direction in which the plurality of pairs of magnetic pole surface forming portions are aligned. It ’s bigger,
The width dimension of the pair of wound magnetic pole surface forming portions in the direction in which the plurality of pairs of magnetic pole surface forming portions are arranged is larger than the width dimension of the wound pole column in the direction in which the plurality of pairs of magnetic pole surface forming portions are arranged. And
One unwrapped magnetic pole surface forming portion of the pair of unwrapped magnetic pole surface forming portions and one wound magnetic pole surface forming portion of the pair of wound magnetic pole surface forming portions adjacent to the unwrapped magnetic pole surface forming portion; Are connected to each other,
The other non-winding magnetic pole surface forming portion of the pair of non-winding magnetic pole surface forming portions and the other winding magnetic pole surface forming portion of the pair of wound magnetic pole surface forming portions adjacent to the non-winding magnetic pole surface forming portion. Are connected to each other,
1 is magnetized in the direction in which the plurality of pairs of magnetic pole surface forming portions are arranged in the center of each of the plurality of pairs of unwrapped magnetic pole surface forming portions and the plurality of pairs of wound magnetic pole surface forming portions. Each of the two permanent magnets is arranged,
The permanent magnet has a predetermined pitch τm so that the magnetization directions of the two permanent magnets respectively disposed inside the adjacent unwrapped magnetic pole surface forming portion and the wound magnetic pole surface forming portion are opposite to each other. are aligned with,
The armature has an armature unit and a plurality of winding members,
The armature unit is configured such that the unwrapped pole column, the pair of unwrapped magnetic pole surface forming portions, and the pair of wound magnetic pole surface forming portions are integrated.
The wound member has the wound pole pole and the armature winding wound around the wound pole pole,
The linear motor , wherein the winding member is fitted to the armature unit by being fitted to the pair of winding magnetic pole surface forming portions . The armature unit is formed by laminating a plurality of electromagnetic steel plates,
Between the unwrapped magnetic pole surface forming portion and the wound magnetic pole surface forming portion, a hole is formed into which a screw that bundles the plurality of electromagnetic steel plates constituting the armature unit is inserted, and the hole is It has a shape and size that do not hinder the flow of magnetic flux generated between the wound magnetic pole surface forming portion and the inductor and the flow of magnetic flux generated between the unwrapped magnetic pole surface forming portion and the inductor. The linear motor according to claim 8. Wherein the pitch .tau.p said pitch τm, τm = τp × (6n ± 1) / (6n) (n is a natural number) linear motor according to claim 8 or 9 has a relationship. The number of the plurality of armature windings, N-phase × M (N is an integer of 2 or more, M is an integer of 1 or more) linear motor according to claim 8 or 9 consisting of. Between the armature winding and one unwrapped magnetic pole surface forming portion of the pair of unwrapped magnetic pole surface forming portions and one wound magnetic pole surface forming portion of the pair of wound magnetic pole surface forming portions. , Each gap is formed,
A first cooling pipe for cooling the armature winding is in a zigzag folded state in the gap, the surface of the one non-winding magnetic pole surface forming portion, and the surface of the one winding magnetic pole surface forming portion. Has been placed,
Between the armature winding and the other unwrapped magnetic pole surface forming portion of the pair of unwrapped magnetic pole surface forming portions and the other wound magnetic pole surface forming portion of the pair of wound magnetic pole surface forming portions. , Each gap is formed,
A second cooling pipe for cooling the armature winding is in a zigzag folded state in the gap, the surface of the other non-winding magnetic pole surface forming portion, and the surface of the other winding magnetic pole surface forming portion. Has been placed,
The gap, the first cooling pipe, and the second cooling pipe are connected to the armature after the first cooling pipe and the second cooling pipe are attached to the armature unit. The linear motor according to claim 8 , wherein the linear motor has a shape and a dimension that can be attached to the unit. The linear motor according to claim 8 , wherein the tooth row of the pair of inductors is skewed in different directions. A length dimension in a longitudinal direction of the winding member in a direction in which the armature winding is wound is shorter than a length dimension of a portion adjacent to the armature winding of the unwound pole pole. The linear motor according to claim 8 .

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