JP4754358B2 - Adsorption tower for gas purification and method for regenerating adsorbent in adsorption tower - Google Patents

Description

  The present invention relates to an adsorption tower for gas purification containing an adsorbent and a method for regenerating the adsorbent in the adsorption tower.

In general, a pressure / temperature swing (PTSA) type or temperature swing (TSA) type heat regenerative gas purifier continuously performs the purification, heat regeneration, and cooling steps while switching a plurality of adsorption towers. Purified gas is supplied.
Therefore, in this method, shortening the heating and cooling process time leads to downsizing / improvement of the adsorption tower. In the heating process, the adsorbent can be effectively regenerated by heating the adsorbent to an appropriate temperature (about 150 ° C. to 300 ° C.), but it becomes an excessively high temperature (for example, a temperature exceeding 300 ° C.). If it is too high, the performance of the adsorbent may be deteriorated. Therefore, heating the temperature distribution in the adsorption tower immediately before the end of the heating process as much as possible is important to maximize the performance of the adsorbent.

With respect to this point, conventionally, the following methods have been adopted as a method for regenerating the adsorbent packed in the adsorption tower.
(1) A method in which the regeneration gas is heated by a heater and the adsorbent is heated by a high-temperature regeneration gas (Patent Document 1).
(2) A method in which a heater is inserted inside the adsorption tower and the adsorbent is directly heated by the heater while purging the interior of the adsorption tower with a regeneration gas at room temperature to heat the adsorption tower itself.

Japanese Patent Publication No. 64-7810

  However, in the method of heating and regenerating by introducing the heated regeneration gas into the adsorption tower, the regeneration gas with a small specific heat and a small flow rate is used as a heat transfer medium for heating. Therefore, the adsorption tower itself and the piping between the heater and the adsorption tower are used. It is easily affected by heat capacity and heat loss, and requires a lot of heating time.

On the other hand, in a method in which a heater is inserted inside the adsorption tower and the adsorbent is directly heated by the heater and the inside of the adsorption tower is purged with a regeneration gas at normal temperature, the adsorbent can be directly heated. Compared to the case of using regenerative gas, the adsorbent can be heated in a short time, and the heating process time can be shortened. However, in the adsorption tower, the temperature on the outlet side is higher than that on the inlet side where the regeneration gas is introduced due to heat transfer by the room temperature regeneration gas, and the temperature distribution of the adsorbent in the adsorption tower is uneven. Become.
Furthermore, in the prior art, there is no point that is particularly devised with respect to cooling, and therefore, a lot of cooling time is required for cooling after regeneration.

  The present invention has been made in view of the above points, and it is possible to perform heating regeneration of the adsorbent in the adsorption tower and cooling after the regeneration in a short time, and further, the temperature distribution of the adsorbent in the adsorption tower during the heat regeneration. The purpose is to improve the non-uniformity.

To achieve the above object, the gas purification adsorption tower of the present invention is an adsorption tower for introducing a raw material gas into a cylinder containing an adsorbent and purifying the raw material gas with the adsorbent, wherein the adsorption column An outer cylinder provided with a gap outside the inner cylinder containing the agent, a heater provided inside the inner cylinder for heating the adsorbent, and a regeneration gas for introducing the regeneration gas to the upper end side of the inner cylinder An introduction portion, a regeneration gas discharge port for discharging the regeneration gas introduced into the inner cylinder from the lower end side of the inner cylinder, an upper vent hole provided on the upper end side of the outer cylinder and communicating with the inside of the gap; A lower vent hole provided on the lower end side of the cylinder and communicating with the gap.

  In the present invention, the adsorbent is heated and regenerated by operating the heater to heat the adsorbent in the inner cylinder and introducing the normal temperature regenerative gas from the regeneration gas introduction section on the upper end side. In this case, since the adsorbent can be directly heated, the heating process can be completed in a short time. In such a heating process, heat transfer is performed by the regeneration gas flowing from the upper part of the inner cylinder to the lower part. However, in the ventilation space formed by the gap between the inner cylinder and the outer cylinder, it flows from the lower ventilation hole. The airflow is heat-exchanged on the surface of the inner cylinder and the temperature rises, and an ascending airflow is generated by a so-called chimney effect that is discharged from the upper vent, and heat is conveyed from the lower part of the inner cylinder to the upper part by the ascending airflow. In other words, the effects of both are offset by the “downward” heat transfer by the regenerative gas inside the inner cylinder and the “upward” heat transfer by the rising air flow outside the inner cylinder, and are stored in the inner cylinder. The temperature distribution of the adsorbent during heating can be kept uniform.

  In order to cool the adsorbent that has reached a high temperature after the heating process is completed, a normal temperature regenerative gas is introduced into the inner cylinder. Cooling by the rising air current in the ventilation space formed by the gap between the inner cylinder and the outer cylinder is also performed at the same time. Therefore, the cooling process can be completed in a shorter time than before.

The upper vent hole and the lower vent hole provided in the outer cylinder are formed in an annular shape so as to continuously circulate around the circumferential surface of the cylinder, or intermittently circulate around the circumferential surface of the cylinder. it is preferable that a plurality of formed side by side in a ring shape. As a result, the temperature uniformity of the inner cylinder is further improved.

  Furthermore, the present invention is a method of regenerating an adsorption tower using the above-described gas purification adsorption tower. During regeneration, the heater is operated and the regeneration gas is introduced into the inner cylinder from the regeneration gas introduction section. Introduce and discharge from the regeneration gas outlet, stop the heater at the time of cooling after regeneration, introduce normal temperature regeneration gas into the inner cylinder from the regeneration gas introduction part, and exhaust from the regeneration gas outlet It is characterized by. In such a case,

  This makes it possible to perform heating regeneration and cooling after regeneration in a shorter time than in the past.

  The present invention also relates to a method for regenerating the adsorbent in the adsorption tower by using two or more gas purification adsorption towers as described above. In the regeneration, the heater in one adsorption tower is operated and the regeneration is performed. Gas is introduced into the inner cylinder from the regenerative gas introduction section, discharged from the regenerative gas discharge port, and when cooling after regeneration, the heater in the one adsorption tower is stopped and the refinement purified in another adsorption tower The gas is introduced into the inner cylinder as a regeneration gas from the regeneration gas introduction portion of the one adsorption tower, and is discharged from the regeneration gas discharge port.

  Thus, you may use the refinement | purification gas refine | purified with the other adsorption tower for the regeneration gas used at the time of the cooling after reproduction | regeneration. When the purified gas purified in another adsorption tower is used as the regeneration gas for one adsorption tower, it can be precooled after cooling with cold water, a refrigerant coil, etc., and then introduced into the regeneration gas introduction section of one adsorption tower. , The cooling time after regeneration can be further shortened.

  According to the present invention, the adsorbent in the adsorption tower can be heated and regenerated and cooled after the regeneration in a short time, and the non-uniform temperature distribution of the adsorbent in the adsorption tower at the time of heating and regeneration is improved as compared with the prior art. can do.

  Hereinafter, preferred embodiments of the present invention will be described. FIG. 1 shows the front of the gas purification apparatus 1, FIG. 2 shows a partially broken cross section of the back, and FIG. 3 shows a cross section of the side. This gas purification apparatus 1 has two adsorption towers 11 and 12 in a substantially box-shaped main body 2 as a whole.

  The main body 2 has an outer shape composed of a front plate 2a, a left plate 2b, a right plate 2c, a top plate 2d, and a back plate 2e each formed of a panel. An opening 3 is provided in the lower part of the front plate 2a, and a ventilation plate 3a made of a mesh plate, punching metal or the like is attached to the opening 3. The upper side of the front plate 2a is inclined, and instruments, switches, etc. are provided on the surface of the inclined surface. A large number of slits 2f are formed below the inclined portion. An opening 4 is formed in the upper part of the back plate 2e, and a ventilation plate 4a made of a mesh plate, punching metal or the like is attached to the opening 4. A free caster 5 is provided on the lower surface of the main body 2.

  Since the adsorption towers 11 and 12 housed in the main body 2 have the same configuration, the configuration of the adsorption tower 11 will be described based on FIGS. 4, 5 and 6 as a representative. , A double pipe structure having an outer cylinder 22 arranged with a gap d outside the inner cylinder 21. Top plates 23 and 24 are provided at the upper end of the adsorption tower 11, while bottom plates 25 and 26 are provided at the lower end of the adsorption tower 11, and both the inner cylinder 21 and the outer cylinder 22 are closed. Since the sheath heater 32 is set with the top plate 24, an electrode cover 27 is attached to the top of the top plate 23.

Inside the inner cylinder 21, an adsorbent 31 used for gas purification such as silica gel, zeolite, activated alumina, or the like is accommodated. A sheath heater 32 is provided in the inner cylinder 21 as a heater for directly heating the adsorbent 31. The sheath heater 32 has a rod shape (may be a coil shape) as shown in FIGS. 5 and 6, and is supported by the top plate 24. The sheath heater 32 is concentrically arranged and is parallel to the inner cylinder 21 at equal intervals. This is arranged in the inner cylinder 21. The means for directly heating the adsorbent is not limited to an electric heater. For example, a coil may be embedded in the adsorbent 31 and a compressed CO ₂ refrigerant may be introduced into the coil.

  As the material of the outer cylinder 22, for example, a lagging material in which a steel plate is stacked on a ceramic cylinder is used. On the outer periphery of the outer cylinder 22 on the upper end side, a plurality of upper ventilation holes 22a formed as round holes on the same peripheral surface are formed in an annular shape at equal intervals. Further, a plurality of lower vent holes 22b formed in a round hole are formed in a ring shape at equal intervals on the outer periphery of the outer cylinder 22 on the lower end side. The upper vent hole 22a and the lower vent hole 22b communicate with the gap d. As the shapes of the upper vent hole 22a and the lower vent hole 22b, an arbitrary shape such as a slit can be selected in addition to a round hole.

  Further, one of the top plate at the upper end and the bottom plate at the lower end of the outer cylinder 22 is omitted, and the upper and lower ends of the inner cylinder 21 are closed, but the outer cylinder 22 is supported by one of the upper end top plate and the lower end top plate. An imaginary circle having the same curvature as that of the inner cylinder 21 may be opened and opened at the end. The upper and lower ventilation holes of the outer cylinder 22 are not connected with connecting pipes or the like, so that the cooling air can be continuously distributed to the outer wall of the inner cylinder 21 by natural convection without air blowing means, as will be described later.

  A raw material gas circulation port 21a is formed in the outer periphery on the upper end side of the inner cylinder 21, and a gas pipe 33 connected to the raw material gas circulation port 21a is drawn out of the adsorption tower 11 from the upper vent hole 22a. ing. At the bottom of the adsorption tower 11, a connection port for a gas pipe 34 communicating with the inner cylinder 21 is provided. At the time of refining the raw material gas, the raw material gas is introduced into the inner tube 21 from the gas pipe 34 that communicates with the inner tube 21 and has a connection port in a through hole provided in the bottom plates 25 and 26, and is purified by the adsorbent 31. The purified gas after being discharged is discharged from the gas pipe 33. That is, the source gas flows from the bottom to the top. Further, at the time of regeneration of the adsorption tower 11, regeneration gas is introduced from the gas pipe 33 into the inner cylinder 21, and after the adsorbent 31 is regenerated, it is discharged from the gas pipe 34. That is, the source gas flows from top to bottom. As described above, in this embodiment, the gas pipe 34 shares the source gas introduction pipe at the time of purification and the regeneration gas discharge pipe at the time of regeneration, and the regeneration gas exhaust pipe at the time of purification and the regeneration gas at the time of regeneration. The gas introduction pipe is shared with the gas pipe 33. Of course, the present invention is not limited to this, and each may be provided independently.

  Next, the system of the gas purification apparatus 1 will be described. As shown in FIG. 7, the gas pipes 33, 33 of the two adsorption towers 11, 12 merge to form a purified gas discharge pipe 41, which leads from the gas purification apparatus 1 to the outside. The purified gas discharge pipe 41 is provided with a gas filter 42 and a valve 43.

  The gas pipes 34, 34 connected to the lower portions of the two adsorption towers 11, 12 are branched in the middle, and one of the branched pipes is connected by a header pipe 51. The header pipe 51 is connected to one end of a source gas introduction pipe 52. The other end of the source gas introduction pipe 52 communicates with a source gas supply source (not shown, for example, a high-pressure air blower such as an air compressor or a cylinder) outside the gas purification apparatus 1. The raw material gas introduction pipe 52 is provided with a valve 53. In addition, an electromagnetic valve 54 is provided on the adsorption tower 11 side from the connection portion of the header pipe 51 with the source gas introduction pipe 52, and an electromagnetic valve 55 is provided on the adsorption tower 12 side from the connection portion.

  The other system into which the gas pipes 34, 34 coming out from the lower portions of the two adsorption towers 11, 12 are branched is connected by a header pipe 63 via corresponding fin tubes 61, 62. The fin tubes 61 and 62 are provided with a large number of fins on the outer periphery to enhance the heat dissipation effect, and are provided, for example, at a position lower than the upper ventilation hole 22a. One end of a regeneration gas discharge pipe 64 is connected to the header pipe 63, and one end of the regeneration gas discharge pipe 64 leads to a regeneration gas processing system (not shown) outside the gas purification apparatus 1. An electromagnetic valve 65 is provided on the adsorption tower 11 side from the connection portion of the header pipe 63 with the regeneration gas discharge pipe 64, and an electromagnetic valve 66 is provided on the adsorption tower 12 side from the connection portion.

  The regeneration gas discharge pipe 64 is provided with a gas filter 67 and a flow meter 68 in order from the upstream side. A drain pipe 69 for discharging moisture in the regeneration gas trapped by the filter is drawn out from the gas filter 67.

  The gas purification apparatus 1 has the above configuration, and an example of its operation will be described next. Since the gas purification apparatus 1 is equipped with two adsorption towers 11 and 12, for example, when the adsorption tower 12 performs a gas purification operation, the other adsorption tower 11 performs regeneration. Driving is done. That is, when the raw material gas at normal temperature is introduced from the raw material gas introduction pipe 52 into the gas purifier 1 with the electromagnetic valves 54 and 66 closed and the electromagnetic valves 55 and 65 opened, the header pipe 51, gas The pipe 34 is introduced into the inner cylinder 21 of the adsorption tower 12 from below, and is purified by the adsorbent 31 in the inner cylinder 21. Then, the purified purified gas after purification flows from the gas pipe 33 connected to the upper part of the inner cylinder 21 through the purified gas discharge pipe 41 to the outside of the gas purification apparatus 1, for example, production of electronic parts and electronic materials. Supplied to the device. At this time, the sheath heater 32 of the adsorption tower 12 is OFF.

  A part of the purified gas flowing through the gas pipe 33 is introduced as a regeneration gas into the inner cylinder 21 of the adsorption tower 11 via the gas pipe 33 on the adsorption tower 11 side. At this time, since the regeneration operation is performed in the adsorption tower 11, the sheath heater 32 provided in the inner cylinder 21 of the adsorption tower 11 is ON, and the adsorbent 31 is directly heated as shown in FIG. . Therefore, the time until the adsorbent 31 reaches a predetermined regeneration temperature is short. Since the dried regeneration gas is introduced from the upper end side of the inner cylinder 21, the adsorbent 31 is heated and regenerated, and moisture generated during the regeneration is transported by the regeneration gas, and the gas pipe below the adsorption tower 11. 34 is discharged. In other words, the regeneration gas inlet side is set to the upper side and the outlet side is set to the lower side, so that the drain generated in the adsorption tower is entrained by the airflow in the same direction. Then, the high-temperature regeneration gas that has come out of the adsorption tower 11 is lowered through the fin tube 61 and is discharged from the regeneration gas discharge pipe 64 to the outside of the gas purification apparatus 1.

  By the way, during the above operation, when the adsorbent 31 in the inner cylinder 21 is regenerated by the regeneration gas in the adsorption tower 11, the heat in the inner cylinder 21 is heated by the regeneration gas introduced from the upper part. Therefore, the temperature in the lower part of the inner cylinder 21 is higher than that in the upper part of the inner cylinder 21 as it is, and the temperature above and below the inner cylinder 21, that is, the temperature in the vertical direction of the adsorbent 31 is not uniform. turn into.

  However, in the adsorption tower 11 in the present embodiment, the outer cylinder 22 is disposed with a gap d on the outer periphery of the inner cylinder 21, and the upper air holes 22 a, Since the lower ventilation hole 22b is formed, as shown in FIG. 5, the atmosphere around the lower ventilation hole 22b enters the gap d through the lower ventilation hole 22b, and enters the gap d along the surface of the inner cylinder 21. And is discharged from the upper ventilation hole 22a to the surroundings. In other words, the gap d becomes a ventilation space, and heat is transferred from the lower portion to the upper portion of the inner cylinder 21 by the rising air flow due to the so-called chimney effect. As a result, the influence of both is offset by the above-described heat transfer in the “downward direction” by the regenerated gas inside the inner cylinder 21 and the “upward” heat transfer by the upward air flow outside the inner cylinder 21, The temperature distribution of the adsorbent 31 being heated that is accommodated in the inner cylinder 21 can be kept uniform.

  Further, when viewed from the whole gas purification apparatus 1, the flow of the air flow at the time of regeneration is as shown in FIG. That is, the air around the apparatus enters the main body 2 through the opening 3 at the lower part of the front plate 2a, is guided to the lower part of the adsorption tower 11, and is introduced into the lower vent hole 22b at the lower part of the outer cylinder 22. The heated air discharged from the upper vent 22a at the upper part of the outer cylinder 22 is combined with the high-temperature air discharged from the fin tube 61 from the opening 4 of the back plate 2e to the outside of the main body 2. Discharged. Therefore, the gas purifier 1 as a whole also promotes the inflow of the air around the apparatus from the lower opening 3 of the front plate 2a into the lower part in the main body 2, that is, the lower part of the outer cylinder 22, by the so-called chimney effect. Fresh, normal temperature air is always supplied to the lower ventilation hole 22b formed in the lower part of the air.

  In the conventional technology with a heater inside the adsorption tower, when rock wool is wound around the outer circumference of the adsorption tower to a thickness of 50 mm and heat-cured (the rock wool is wrapped around the outer circumference of the adsorption tower is a well-known technique) In the case of the present embodiment, the inventors actually relate the relationship between the position in the height direction in the adsorption tower / inner cylinder 21 and the temperature in the adsorption tower / inner cylinder 21 at the position. When verified, the results shown in the graph of FIG. 8 were obtained. The same sheath heater 32 is used as the heater.

  According to this result, when rock wool is wound 50 mm and heat-cured, the temperature increases toward the lower part of the adsorption tower due to heat transfer from the upper part of the regeneration gas, and exceeds 300 ° C near the lower part. It has been. On the other hand, in this embodiment, the temperature uniformity is significantly improved, and the temperature does not exceed 300 ° C. at any position.

  In the present embodiment, as described above, the sheath heater 32 is arranged in the inner cylinder 21 so as to heat the adsorbent 31 directly. The adsorbent 31 can be heated and regenerated uniformly and in a short time.

  When the heat regeneration is completed in this way, the sheath heater 32 is turned off, and the regeneration gas at normal temperature is kept flowing in the inner cylinder 21 as it is, thereby performing a cooling process after regeneration. Even in such a case, according to the present embodiment, the atmosphere around the lower ventilation hole 22b enters the gap d through the lower ventilation hole 22b, and rises in the gap d along the surface of the inner cylinder 21, so that the upper ventilation hole Since the heat is released from 22a to the surroundings, the release of heat from the inner cylinder 21 is further promoted, and the time until the adsorbent 31 is cooled to a predetermined temperature, compared with the case of cooling only by supplying the regeneration gas. , Shorter than before. In addition, since the chimney effect similar to that at the time of the above-described heating regeneration can be obtained also in the entire gas purification apparatus 1 housing the adsorption towers 11 and 12, the cooling process after the heating regeneration is promoted from this point.

  FIG. 9 shows normal temperature (25 ° C.) regeneration gas in the adsorption tower and inner cylinder in this embodiment and in the case where rock wool is wound around the outer periphery of the adsorption tower at a thickness of 50 mm and heat-cured. The time-dependent change of the average temperature inside the adsorption tower and inside the inner cylinder 21 when the flow rate is supplied to the inside of the flow rate at 12 L / min is shown. As can be seen from this result, the present embodiment can be cooled to a predetermined temperature (25 ° C.) in a much shorter time, and the cooling time after heating regeneration is shortened.

  In the gas purification apparatus 1 according to the present embodiment, since the purified gas from the other adsorption tower 12 is used as the regeneration gas used at the time of regeneration, it is not necessary to prepare a separate dry regeneration gas. . In such a case, as described above, since the heating regeneration time and the cooling time after the heating regeneration are both shorter than before, the amount used for regenerating the purified gas is small. When the purified gas from another adsorption tower 12 is used, the cooling time can be further shortened if it is used as a regeneration gas after being cooled by a precooler or the like. Such a precooler may be provided in the gas purification apparatus 1 or may be installed outside the gas purification apparatus 1. When provided in the gas purification apparatus 1, it may be installed so as to be interposed between the purification outlet and the regeneration inlet.

  In the cooling process after heating regeneration, cooling with regeneration gas can be performed without using regeneration gas, and in this case, the consumption of regeneration gas can be further reduced and the operating cost can be reduced. It is possible to lower. In the present invention, a more general name of the adsorption tower is used. However, the name is not limited to “adsorption cylinder”, “adsorber”, “adsorption device”, etc., and the adsorbent is substantially stored in the gas. The apparatus used for the purification and purification is an adsorption tower as referred to in the present invention.

  INDUSTRIAL APPLICABILITY The present invention is useful for heating an adsorption tower or a catalyst cylinder in which an adsorbent for purifying gas is stored in the cylinder.

It is a front view of the gas purification apparatus which has the adsorption tower concerning this Embodiment. It is a partially broken rear view of the gas purification apparatus which has the adsorption tower concerning this Embodiment. It is side surface sectional drawing of the gas purification apparatus which has the adsorption tower concerning this Embodiment. It is a side view of the adsorption tower concerning this Embodiment. It is side surface sectional drawing of the adsorption tower concerning this Embodiment. It is the sectional view on the AA line of FIG. It is explanatory drawing which shows the system | strain of the gas purification apparatus which has the adsorption tower concerning this Embodiment. It is explanatory drawing which shows the temperature in the tower of the adsorption tower height direction in the adsorption tower concerning this Embodiment and a prior art. It is a graph which shows the change of the in-cylinder average temperature with progress of the cooling time in the adsorption tower concerning this Embodiment, and a prior art.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Gas purification apparatus 11,12 Adsorption tower 21 Inner cylinder 22 Outer cylinder 22a Upper ventilation hole 22b Lower ventilation hole 31 Adsorbent 32 Sheath heater 33,34 Gas pipe

Claims (5)

An adsorption tower for introducing a raw material gas into a cylinder containing an adsorbent and purifying the raw material gas with the adsorbent,
An outer cylinder provided with a gap outside the inner cylinder containing the adsorbent;
A heater provided inside the inner cylinder for heating the adsorbent;
A regenerative gas introduction section for introducing a regenerative gas into the upper end side of the inner cylinder;
A regeneration gas discharge port for discharging the regeneration gas introduced into the inner cylinder from the lower end side of the inner cylinder;
An upper vent hole provided on the upper end side of the outer cylinder and leading into the gap;
A lower vent hole provided on the lower end side of the outer cylinder and leading into the gap;
An adsorption tower for gas purification, characterized by comprising: The upper vent in the peripheral surface of the outer cylinder, are formed into an annular shape so as around the peripheral surface of the cylindrical continuously, or formed with a plurality arranged in an annular shape so as around the intermittent circumferential surface of the cylindrical The adsorption tower for gas purification according to claim 1, characterized in that: The lower vent in the peripheral surface of the outer cylinder, are formed into an annular shape so as around the peripheral surface of the cylindrical continuously, or formed with a plurality arranged in an annular shape so as around the intermittent circumferential surface of the cylindrical The adsorption tower for gas purification according to claim 1 or 2, characterized by the above-mentioned. A method for regenerating an adsorbent in an adsorption tower using the gas purification adsorption tower according to any one of claims 1 to 3,
At the time of regeneration, the heater is operated and a normal temperature regeneration gas is introduced into the inner cylinder from the regeneration gas introduction part, and is discharged from the regeneration gas discharge port.
During cooling after regeneration, the heater is stopped, and at room temperature, the regeneration gas is introduced into the inner cylinder from the regeneration gas introduction part and discharged from the regeneration gas discharge port. Playback processing method. A method for regenerating an adsorbent in an adsorption tower using two or more adsorption towers for gas purification according to any one of claims 1 to 3,
At the time of regeneration, the heater in one adsorption tower is operated, the regeneration gas is introduced into the inner cylinder from the regeneration gas introduction part, and is discharged from the regeneration gas discharge port.
At the time of cooling after regeneration, the heater in the one adsorption tower is stopped, and the purified gas purified in the other adsorption tower is introduced into the inner cylinder as a regeneration gas from the regeneration gas introduction part of the one adsorption tower. A method for regenerating the adsorbent in the adsorption tower, wherein the regeneration gas is discharged from a regeneration gas outlet.

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