JP4624491B2 - Fluid equipment module - Google Patents

Description

  The present invention relates to a technology for making a resin valve or a metallic valve for controlling a fluid into a block module having a connection structure that can be easily assembled and saves space.

Various chemical solutions are used in the semiconductor manufacturing process, and various fluid control valves are used for supplying the chemical solutions. Fluid control valves are connected to piping and used in equipment. As equipment becomes smaller, not only fluid control valves can be made smaller, but manifolds should be used to reduce the number of joints and piping. Technology has also been released.
When the fluid control valve is manifolded, a method often used in the prior art is a method of blocking and integrally forming a portion constituting the flow path.
However, if the fluid control valve is made into an integral block, the specifications differ depending on the needs of the user, so it is necessary to prepare many types of blocks for the body part or to process them according to the needs. Since this method has poor versatility and needs to be made to order according to specifications, it is costly. Therefore, a block module having a connection structure as disclosed in Patent Document 1 and Patent Document 2 has been devised. ing.

Patent Document 1 discloses a technique related to a connection structure of a connection opening of a block body.
An annular concave groove is formed around the flow path opening provided on the connection surface of one block body, and an annular protrusion is formed around the flow path opening provided on the connection surface of the other block body, This block body is provided with four bolt holes perpendicular to the connecting surface. When the two block bodies are combined, an annular protrusion is inserted into the annular groove portion and crimped, and through bolts as fastening members are inserted into the four bolt holes and tightened.
Therefore, it is possible to make a manifold block by arranging a plurality of block bodies in a horizontal row and fastening with through bolts, and it is possible to save space without requiring joints or piping on the connecting surfaces of the block bodies. It is. Further, since the annular protrusion is inserted into the annular groove and plastically deformed, it is possible to ensure sealing performance.

Patent Document 2 discloses a technique related to a pipe member connection structure.
An annular groove is formed around the channel opening provided on the connection surface of one block body, and an annular groove is also formed around the channel opening provided on the connection surface of the other block body. A joint fitting portion is formed on the connecting surface of each block body. When the two block bodies are combined, a manifold block can be obtained by inserting a substantially annular sleeve into the annular groove and inserting a pin into the joint fitting portion to connect them.
Further, by arranging the plate on the bottom surface without using the joint fitting portion and screwing the block body from the back, it is possible to arrange the block body in the direction of the side surface 4 instead of in a horizontal row.
The sleeve used at the time of connecting the block bodies is provided with an O-ring, and seals in the radial direction against the annular concave groove portion, so that a seal that does not leak even if tightened with bolts from the side as in Patent Document 1 is realized. Since it is possible to make a manifold, it is possible to save space.

Japanese Patent Laid-Open No. 2001-116155 JP 2004-316667 A

However, the prior art has the following problems.
(1) There is a risk of loosening due to the effect of creep.
When adopting a structure in which a bolt hole is provided at right angles to the connecting surface as shown in Patent Document 1 and tightened with a through-bolt, the axial seal of the flow path is possible. Since it is tightened only by the seating surface, there is a risk of loosening due to the effect of creep.
This creep action refers to the action of the resin deforming due to pressure fluctuations and temperature changes over a long period of time. When resin is used for the block body to provide corrosion resistance, the crimping force of the connecting part However, there is a problem that liquid is leaked from the flow path. In particular, fluorine-based resins such as PTFE and PFA are often used in the semiconductor manufacturing process because high corrosion resistance is required. However, these materials are prone to creep, and the more the number of manifold stations, the more The effect of creep action becomes large and becomes a problem.

(2) An axial seal cannot be used.
When a pin coupling method as shown in Patent Document 2 or a method of fixing with bolts from the back using a plate is adopted, there is a possibility that rattling may occur because there is no function of absorbing clearance, and the structure Furthermore, axial sealing means cannot be used.
The radial sealing means tends to be expensive because the number of parts is increased and the processing becomes complicated as compared with the axial sealing means.
Here, the axial seal refers to a means for sealing using a force acting perpendicularly to the connecting surface between the blocks. The radial seal acts in the radial direction of the flow path when the flow paths are joined at the joint surface between the blocks, that is, in the normal direction of a circle formed by cutting the flow path at the joint surface between the blocks. Means to seal using force.

In other words, in the technology disclosed in Patent Document 1 or Patent Document 2 which is the prior art, (1) there is a risk of loosening due to the effect of creep action, (2) the axial seal cannot be used, etc. There was a problem.
When creep action occurs, liquid leakage from the flow path may occur as described above, but in the semiconductor manufacturing process etc., there are cases where corrosive chemicals, chemicals harmful to the human body, etc. are used. Ensuring sealability is an essential issue. Further, if the axial seal cannot be used, it is necessary to use a relatively expensive radial seal means, and the degree of freedom in design is reduced.

  The present invention has been made to solve the above-described problems, and it is an object of the present invention to provide a fluid device module and a fluid device module connection structure having high design flexibility while ensuring sealing performance.

In order to solve the above problems, the fluid device module and the fluid device module connection structure of the present invention have the following configurations.
(1) A hexahedron having a device mounting surface for mounting a first fluid control device on an upper surface, a first channel hole on a first side surface, and connection protrusions formed on the upper and lower portions of the first channel hole. A hexahedron having a first block, a device mounting surface for mounting the second fluid control device on the upper surface, a second flow path hole on the first side surface, and connection protrusions formed on the upper and lower portions of the second flow path hole And an upper side connection including an upper side pressing surface that abuts on both sides of a connection projection provided on one side of the upper portion of the first block and a connection projection provided on an upper side of the second block. A lower side connecting member having a member, a connecting protrusion provided on one side of the lower part of the first block, and a lower side pressing surface that contacts both sides of the connecting protrusion provided on the lower side of the second block; A connection protrusion of the first block And a taper surface is formed on at least one of the connection protrusion of the second block, or the upper side pressing surface and the lower side pressing surface, and the upper side connection member and the lower side connection member are connected by fastening means. Is moved in the proximity direction, the first block and the second block are joined so that the first flow path hole and the second flow path hole communicate with each other, the upper side connecting member and the The lower side connecting member is arranged in parallel with each other, and the fastening means is attached from the device mounting surface side with a pair of fastening bolts across the first flow path hole and the second flow path hole. It is characterized by that.

(2) In the fluid device module described in (1), a third flow path hole is provided on the first side surface, connection protrusions are formed on the upper and lower portions of the third flow path hole, and a joint portion is formed on the second side surface. The first block includes a fourth flow path hole on the second side surface, and connection protrusions are formed on the upper and lower portions of the fourth flow path hole . Provided on one side of the lower part of the first block, an upper side connecting member having a connection protrusion provided on one side of the upper part and an upper side pressing surface that contacts both sides of the connection protrusion provided on one side of the upper part of the joint block. And a lower side connection member having a lower side pressing surface that contacts both sides of the connection projection provided on one side of the lower part of the joint block, and the connection projection of the first block and the joint Block connection protrusion, or above A taper surface is formed on at least one of the one side pressing surface and the lower one side pressing surface, and the upper side connecting member and the lower side connecting member are moved in the proximity direction by the fastening means. The first block and the joint block are joined so that the third flow path and the fourth flow path communicate with each other, and the upper side connection member and the lower side connection member are arranged in parallel to each other. The fastening means is attached from the device mounting surface side by a pair of fastening bolts across the third flow path hole and the fourth flow path hole .

(3) The fluid device module described in (1) or (2), further comprising a reinforcing collar penetrating the first block and the second block, wherein the reinforcing collar is made of a material of the first block and the second block. The fastening means is disposed through the reinforcing collar.

(4) In the fluid device module according to any one of (1) to (3), at least a first fluid control device provided in the first block or a second fluid control device provided in the second block. Either one is provided inside the block.

(5) A first block having a device mounting surface for mounting the first fluid control device on the upper surface, a first flow path hole on the first side surface, and connection protrusions formed on the upper and lower portions of the first flow path hole. And a second block having a device attachment surface for attaching the second fluid control device on the upper surface, a second flow path hole on the first side surface, and connection protrusions formed on the upper and lower portions of the second flow path hole; An upper connection member provided with a connection protrusion provided on the upper part of the first block and an upper pressing surface contacting both sides of the connection protrusion provided on the upper part of the second block; and provided on a lower part of the first block. And a lower connection member having a lower pressing surface that contacts both sides of the connection protrusion provided at the lower part of the second block, and the connection protrusion of the first block and the connection of the second block Protrusion, or the upper pressing surface and the lower side A taper surface is formed on at least one of the pressure surfaces, and the upper connection member and the lower connection member are moved in the proximity direction by the fastening means, whereby the first flow path hole and the second flow path hole The first block and the second block are joined so as to communicate with each other, and the first fluid control device and the second fluid control device are attached to the device attachment surface provided on the top surfaces of the first block and the second block. The fastening member also serves as a mounting screw for attaching the screw.

(6) In the fluid device module described in any one of (1) to ( 4 ), the lower connection member is formed of an integral plate.

(7) A first block having a device mounting surface for mounting the first fluid control device on the upper surface, a first flow path hole on the first side surface, and connection protrusions formed on the upper and lower portions of the first flow path hole. And a second block having a device attachment surface for attaching the second fluid control device on the upper surface, a second flow path hole on the first side surface, and connection protrusions formed on the upper and lower portions of the second flow path hole; An upper connection member provided with a connection protrusion provided on the upper part of the first block and an upper pressing surface contacting both sides of the connection protrusion provided on the upper part of the second block; and provided on a lower part of the first block. And a lower connection member having a lower pressing surface that contacts both sides of the connection protrusion provided at the lower part of the second block, and the connection protrusion of the first block and the connection of the second block Protrusion, or the upper pressing surface and the lower side A taper surface is formed on at least one of the pressure surfaces, and the upper connection member and the lower connection member are moved in the proximity direction by the fastening means, whereby the first flow path hole and the second flow path hole The first block and the second block are joined so as to communicate with each other, and the fastening means is configured such that the upper connecting member and the upper pressing surface of the upper connecting member are opposed to the lower pressing surface. wherein a lower connecting member disposed, a pressure receiving plate disposed across the elastic members to an upper portion of the upper connecting member, a connecting plate disposed on top of the pressure receiving plate, the connecting plate, the pressure A plate, a connecting rod that penetrates the upper connecting member and is connected to the lower connecting member, and is rotatably held by the connecting plate and presses the pressure receiving plate by operating the plate. And a bar, a clamping attachment which is provided, wherein by operating the fastening attachment, characterized in that possible the second block and the first block is joined and disassembled.

(8) A first block having a device mounting surface for mounting the first fluid control device on the upper surface, a first flow path hole on the first side surface, and connection protrusions formed on the upper and lower portions of the first flow path hole. And a second block having a device attachment surface for attaching the second fluid control device on the upper surface, a second flow path hole on the first side surface, and connection protrusions formed on the upper and lower portions of the second flow path hole; An upper connection member provided with a connection protrusion provided on the upper part of the first block and an upper pressing surface contacting both sides of the connection protrusion provided on the upper part of the second block; and provided on a lower part of the first block. And a lower connection member having a lower pressing surface that contacts both sides of the connection protrusion provided at the lower part of the second block, and the connection protrusion of the first block and the connection of the second block Protrusion, or the upper pressing surface and the lower side A taper surface is formed on at least one of the pressure surfaces, and the upper connection member and the lower connection member are moved in the proximity direction by the fastening means, whereby the first flow path hole and the second flow path hole The first block and the second block are joined so as to communicate with each other, and the connection protrusion formed in a conical shape having the first flow path hole therein is formed on a first side surface of the first block. The connection projection formed in a conical shape having the second flow path hole therein is provided on the first side surface of the second block, and the connection projection of the first block and the second block are connected to each other. The projection is clamped by the fastening means in a state sandwiched between the upper connection member and the lower connection member, so that the connection projection of the first block and the connection projection of the second block are Press surface and lower side It is pressed by the pressure surface, and the first passage hole and the second flow path hole, characterized in that the communicating.

(9) In the fluid device module according to any one of (1) to (4) and (6), a device mounting surface for mounting the third fluid control device is provided on the upper surface, and the fifth flow path hole is provided on the first side surface. A third block that is a hexahedron having connection projections formed on the upper and lower portions of the fifth flow path hole, and the first block has a sixth flow path hole on a third side surface adjacent to the first side surface. A connection protrusion is formed on one side of the upper part and the lower part of the sixth flow path hole, and a connection protrusion provided on one side of the upper part of the first block and one side of the upper part of the third block. An upper side connection member having an upper side pressing surface that contacts both sides of the connection projection, a connection projection provided on one side of the lower portion of the first block, and both sides of the connection projection provided on the lower side of the third block Lower side with a lower side pressing surface that contacts It includes a connection member, wherein the first block of the connecting projection and the connecting projection of the third block, or the upper side pressing surface and at least one or the other with the tapered surface of the lower side pressing surface is formed, the fastening The first block and the third block are arranged so that the fifth channel and the sixth channel communicate with each other when the upper side connecting member and the lower side connecting member are moved in the proximity direction by means. The block is joined , the upper side connection member and the lower side connection member are arranged in parallel to each other, and the fastening means includes the fifth flow path hole and the sixth flow path hole. It mounts from the said apparatus mounting surface side with a pair of fastening bolts, and is characterized by the above-mentioned .

  As used herein, fluid equipment refers to equipment for controlling or measuring fluid such as a fluid control valve, check valve, and pressure gauge, or a block constituting a simple flow path for mounting these fluid control equipment. It points to that. Therefore, it is not particularly necessary to provide a valve body or a drive unit, and includes devices widely used for fluids.

Next, the operation and effect of the fluid device module having the above configuration and the fluid device module connection structure will be described.
First, the invention described (1), pressing the connecting protrusion formed on the first block and second block, the upper side pressing surface provided on the upper side connecting member and the lower side connecting member and the lower side pressing surface As a result, the first block and the second block are coupled, and the first flow path hole and the second flow path hole communicate with each other, so that the connection projection of the first block and the connection projection of the second block or the upper side pressing at the time of coupling Force is generated in the thrust direction and the radial direction by the tapered surface formed on at least one of the surface and the lower side pressing surface, and the first flow path hole and the second flow are generated by the radial seal or the axial seal. Since leakage from the connection portion with the passage hole can be prevented, it is possible to provide a fluid device module having high design flexibility while ensuring sealing performance.
The force in the thrust direction here refers to a force acting perpendicularly to the device mounting surfaces provided in the first block and the second block. Further, the radial force refers to a force acting in parallel with the device mounting surface.
As described above, the radial and thrust forces are generated at the connecting portion, so that leakage does not easily occur due to creep action and a gap is generated between the first block and the second block. Nor.
By adopting such a structure, even it went increasing the manifold stations, rather than together as in the technique disclosed in Patent Document 1, by the lower side connecting member and the upper side connecting member Since each connection portion is individually coupled, even if a creep action occurs, there is no change in the sealing performance of the connection portion between the first flow path hole and the second flow path hole.
Further, the fluid device module of the invention described in (1) is excellent in workability because it can be assembled and disassembled basically by accessing from the device mounting surface side of the block. Furthermore, since such a structure is adopted, joining and disassembling work can be performed with access from the same direction. Thus, maintenance by access from the same direction leads to a reduction in maintenance space that must be secured and a reduction in maintenance time.

Moreover, invention described in (2) can raise the freedom degree of a connection by providing a joint block other than a 1st block and a 2nd block.
In other words, the second block can be connected to any location of the first side surface to the fourth side surface of the first block, the joint block can be connected to the other side surface, and the joint is provided on an arbitrary surface. Is possible. Since the joint can be provided at an arbitrary position, the degree of freedom in design is increased, and the length of the pipe connected to the joint can be shortened.

  Moreover, since the invention described in (3) includes a high-strength reinforcing collar that penetrates the first block and the second block, and a fastening member is disposed through the reinforcing collar, for example, the first block and When the material of the second block is composed of a low-rigidity member such as a resin, the fastening force generated by tightening using a connecting member such as a bolt, or between the first block and the second block The deformation of the first block and the second block can be prevented by the repulsive force of the sealing member provided. The deformation of the first block and the second block caused by the influence of the fastening force of the fastening member and the repulsive force of the seal member may affect the connection portion of the first flow path hole and the second flow path hole and cause leakage. However, by using the reinforcing collar, it is possible to prevent deformation that may cause such leakage.

In the invention described in (4), since the fluid control device is provided inside the block, it is possible to provide a smart fluid device module capable of realizing space saving.
In the invention described in (5), since the fastening member also serves as a screw for attaching the first fluid control device and the second fluid control device, the upper connection is provided below the first fluid control device and the second fluid control device. Members can be placed. When the first block and the second block are arranged side by side, the components attached to the upper surface of each block are the first fluid control device, the second fluid control device, and the upper connection member. A width just enough to line up is required. However, according to the present invention, since the upper connecting member can be arranged under the first fluid control device and the second fluid control device, the length of the manifold can be reduced by the width of the upper connecting member when the manifold is formed. This contributes to further space saving of equipment.

Further, the invention described (6), since the lower side connecting member is formed of a unitary plate, fewer parts.
In addition, since the invention described in (7) can be connected and disassembled by operating the fastening attachment, the first block and the second block can be connected and disassembled. Can be raised. In semiconductor manufacturing processes, facilities are being reduced in size, so the work space is often narrow. Accordingly, the workability and workability are improved, so that the time required for maintenance can be shortened.
In addition, since there is no variation in the tightening force, it is possible to perform the work with the same tightening force without any variation in construction by the operator, and to reduce the connection failure.

  In the invention described in (8), the connection protrusion formed in the conical shape having the first flow path hole and the connection protrusion formed in the conical shape having the second flow path hole are arranged on the upper connection member and the lower side. Since it is the structure which joins the 1st block and the 2nd block by pinching with a connecting member, the part which joins the 1st channel hole and the 2nd channel hole, the upper connecting member and the lower connecting member to press Thus, the sealability of the connection portion between the first flow path hole and the second flow path hole can be improved.

  In the invention described in (9), since the first block, the second block, and the third block can be freely arranged and connected, not only the blocks are manifolded in series but also on a plane. Therefore, it is possible to provide a fluid device module having a complicated flow path configuration. Since this combination can be arbitrarily determined by the user, it can meet various needs.

A fluid device module and a fluid device module connection structure according to an embodiment of the present invention will be described in detail with reference to the drawings.
First, the configuration of the first embodiment of the present invention will be described.
(First embodiment)
FIG. 1 is a perspective view of the fluid device module of the first embodiment.
2 is an exploded perspective view of the fluid device module of the first embodiment, and FIG. 3 is an exploded perspective view of the fluid device module in a further disassembled state.
The fluid device module 10 is a manifold block configured by combining three blocks 11 as shown in FIG.
The block 11 has a substantially square block shape, and a device mounting surface (not shown) for mounting the first fluid control valve 16 to the third fluid control valve 18 is formed on the upper surface. Note that the three blocks 11 have the same reference numerals for convenience of explanation, but need not have the same structure. In the circuit design, it is not hindered to increase or decrease the flow paths as appropriate. In addition, the first fluid control valve 16 to the third fluid control valve 18 have different reference numerals for convenience of explanation, but may be fluid control valves that perform the same function, or may perform other functions. Absent. It should be selected appropriately for the convenience of circuit design.
Further, as shown in FIG. 3, a channel hole 11b is formed on the side surface. Block connection projections 11a are provided at the upper and lower ends of the flow path hole 11b.
The block connection protrusion 11a has a tapered surface. When two blocks 11 are arranged so that the flow passage holes 11b are connected, the taper surface of the block connection protrusion 11a is angled with the taper surface of the other block connection protrusion 11a. Form. Although not shown in the drawing, a channel hole 11b is also provided on the surface opposite to the surface on which the channel hole 11b is provided, and block connection protrusions 11a are provided on the upper end portion and the lower end portion thereof. Yes.
A joint 20 is provided on the side surface adjacent to the side surface where the flow path hole 11b is provided. Note that the joint 20 shown in FIGS. 1 to 3 has a simple cylindrical shape due to the drawing. All of the joints 20 shown in the present specification are shown in the same form, but in this part, a fitting according to the material of the tube such as a caulking joint or a one-touch joint may be provided, or an Rc screw or the like is provided to screw the joint. It may be configured to be a type or to be connected by providing a flange.

The joint block 12 arranged next to the block 11 is provided with a joint 20, and a flow path hole 12 b communicating with the joint 20 is also provided on the back side (not shown).
Joint block connection protrusions 12a having the same shape as the block connection protrusions 11a are provided at the upper and lower portions of the flow path holes 12b provided in the joint block 12.
The block 11 and the joint block 12 are arranged on the lower connection member 14 and are fastened to the lower connection member 14 with fastening bolts 15 serving as fastening means via the upper connection member 13. The device module 10 is obtained.
The upper connecting member 13 is formed with a V-groove upper pressing surface 13a composed of two tapered surfaces, and has a hole through which the fastening bolt 15 passes.
The lower connecting member 14 has a single plate shape, and a plurality of lower pressing surfaces 14b are formed on the side where the block 11 and the joint block 12 abut. The lower pressing surface 14b is formed in a V-groove shape with two tapered surfaces, and a female screw portion 14a is formed at the top. The fastening bolt 15 is fastened to the female screw portion 14a.

  The upper connection member 13 and the lower connection member 14 are preferably made of a material that is more rigid than the block 11 and the joint block 12. This is because the upper connecting member 13 is a member that directly contacts the seating surface of the fastening bolt 15 and needs to transmit the fastening force of the fastening bolt 15 to the block 11 and the joint block 12 uniformly. Further, the lower connection member 14 needs to be formed with a female screw portion 14a, and it is necessary to transmit force uniformly to the block 11 and the joint block 12 by being pulled up by the fastening bolt 15. By sandwiching the block 11 and the joint block 12 with the equal force between the upper connection member 13 and the lower connection member 14, the blocks 11 and the block 11 and the joint block 12 can be firmly joined.

In FIG. 4, sectional drawing of the fluid apparatus module of 1st Example is shown.
Note that the fluid device module 10 shown in FIG. 4 has two units, and the third fluid control valve 18 and the block 11 to which the third fluid control valve 18 is attached are omitted, but the first fluid control valve 16 is omitted. The internal structure of the block 11 to which the second fluid control valve 17 is attached is the same.
The flow path formed in the fluid device module 10 is such that the flow path hole 12b provided in the joint block 12 and the flow path hole 11b provided in the block 11 communicate with each other, and the flow path holes 11b provided in the adjacent blocks 11 communicate with each other. Are formed in communication. And the joint 20 provided in the joint block 12 of both ends is connected. Moreover, since the 1st fluid control valve 16 thru | or the 3rd fluid control valve 18 is attached to the upper part of the block 11, it is connecting, respectively.

It should be noted that any method as shown in FIG. 30 may be employed for the connection portion between the flow path hole 12b and the flow path hole 11b and the connection portion between the flow path holes 11b.
FIG. 30 shows the structure of the connecting portion, FIG. 30 (a) shows a cross section of an axial seal using an O-ring, and FIG. 30 (b) shows an axial direction using a seal member. FIG. 30C shows a cross section of the radial seal using an O-ring, and FIG. 30D shows a cross section of the radial seal using an annular seal.
When the axial seal using the O-ring 74 of FIG. 30A is performed, an O-ring groove is formed on the side surface of the block 11 and around the flow path hole 11b, and the O-ring is attached to the O-ring groove. This is a method of sealing by the elastic force of the O-ring acting in the radial direction by combining the blocks 11 or the blocks 11 and the joint block 12 so as to be fitted and crushing the O-ring.

When the axial seal using the seal member 75 of FIG. 30B is performed, a recess which is a side surface of the block 11 and is slightly shallower than half of the thickness of the disk-shaped seal member 75 around the flow path hole 11b. The blocks 11 or the block 11 and the joint block 12 are combined, and sealing is performed by crushing the seal member 75 in the radial direction.
The material of the seal member 75 may be rubber, or may be a soft resin that is important for PTFE. Any member that has a function of sealing by being crushed with a constant pressing force may be used.
When performing radial sealing using the O-ring 74 of FIG. 30C, a cylindrical convex portion is formed around the flow path hole 11b provided in one block 11, and the outer peripheral portion of the cylindrical convex portion. An O-ring groove is formed and an O-ring 74 is fitted, and a recess is formed around the flow path hole 11b of the other block 11 so that the protrusion is fitted. The ring 74 is crushed in the radial direction and sealed.
When the radial seal using the annular seal 76 of FIG. 30D is performed, an annular groove is formed around the flow passage hole 11b provided in the block 11, and the annular seal 76 is fitted. Sealing can be performed by collapsing in the radial direction.

The following operations and effects are exhibited by the configuration of the fluid device module of the first embodiment described above.
First, when connecting the block 11 and the joint block 12, the block connection protrusion 11 a and the joint block connection protrusion 12 a provided at the upper part and the lower part are provided on the upper pressing surface 13 a and the lower connection member 14 provided in the upper connection member 13. The thrust in the thrust direction and the radial direction is generated in the block 11 and the joint block 12 by being pressed by the lower pressing surface 14b.
This is because the block connecting protrusion 11a, the joint block connecting protrusion 12a, the upper pressing surface 13a, and the lower pressing surface 14b are provided with tapered surfaces, and thus occurs when the fastening bolt 15 is fastened to the female screw portion 14a. The force in the thrust direction is decomposed in the thrust direction and the radial direction by the tapered surface.

The radial force generated at this time enables the O-ring 74 to be effectively crushed even when an axial seal using the O-ring 74 as shown in FIG. To be demonstrated. The same applies to the case of using the seal member 75 of FIG. It is also possible to use the radial seal shown in FIGS. 30 (c) and 30 (d).
Thrust direction force and radial direction force generated when the block 11 and the joint block 12 are assembled by the upper connection member 13 and the lower connection member 14 are the block connection protrusion 11a, the joint block connection protrusion 12a, and the upper pressing surface 13a. And it is possible to adjust by changing the angle of the taper surface provided in the lower pressing surface 14b. Further, since the radial force generated during the assembly functions as a guide function that moves the blocks 11 and the block 11 and the joint block 12 in a close contact direction, there is also an effect of facilitating the assembly. As described above, since any of the sealing means of the radial direction seal and the axial direction seal can be adopted, the degree of freedom in design is expanded.

  Moreover, when what is used as the sealing member of the fluid device module 10 is the O-ring 74 shown in FIG. 30A or the sealing member 75 shown in FIG. In the prior art, it is necessary to arrange bolts provided at right angles to the joint surface at the diagonal of the flow path and tighten them uniformly, but in the case of the method of the first embodiment, the upper connection member 13 and the lower connection Since the force in the thrust direction and the radial direction is generated by tightening the member 14 up and down, if the O-ring 74 or the seal member 75 is provided at a predetermined position, the O-ring can be uniformly tightened by tightening the fastening bolt 15. Since 74 and the seal member 75 are crushed, there is a merit that good sealability can be obtained.

Further, by providing the joint block 12 separately from the block 11, for example, when the joint 20 is damaged, the joint block 12 can be replaced only by the joint block 12, and as shown in FIGS. If the joint 20 provided on the front surface of the joint 11 is also configured to be connected by providing the joint block 12, the degree of design freedom can be further increased.
FIG. 5 shows a perspective view of an example in which a large number of blocks are arranged on a plane in the fluid device module of the first embodiment.
The fluid device module 10 shown in FIG. 5 is configured in a state in which nine 3 × 3 blocks 11 are arranged and the first fluid control valve 16 is provided for each. The joint block 12 can be attached at an arbitrary place. However, the fluid device module 10 shown in FIG. 4 is in a state in which the device and the joint block 12 are assembled to all attachable portions, and it is unlikely that the fluid circuit actually used will have such a form. FIG. 6 shows a cross-sectional view of the fluid device module 10 in a state in which the blocks 11 are arranged in 3 × 3.
The joint block 12, the upper connection member 13, and the lower connection member 14 have the same shape as that shown in FIG. The block 11 is substantially the same, but the flow paths formed inside are different. Further, a flow path block 77 having no device mounting surface on the upper surface and having only a flow channel formed therein, a check valve block 73 having no device mounting surface on the upper surface and having a check valve 71 inside, A sensor block 72 or the like to which a pressure sensor (not shown) is attached is also provided, but basically has the same shape as the appearance of the block 11 shown in FIG. 1 and includes a block connection protrusion 11a.

Even a complicated fluid circuit as shown in FIG. 6 can be realized by the fluid device module 10 configured to attach the joint block 12 to the block 11. And the fluid apparatus module 10 with many variations can be comprised by providing the flow path block 77 and the non-return valve block 73 as needed.
However, the basic unit is composed of limited parts such as the block 11, the joint block 12, the check valve block 73, the flow path block 77, the upper connection member 13, the lower connection member 14, and the like. Even in the case of realizing a complicated fluid circuit as shown in FIG. 6, it is only necessary to add a hole in the flow path to these parts stocked as stock, and the complex fluid circuit is provided in a short period of time. The fluid device module 10 can be produced.
Since the lower connection member 14 of the first embodiment is plate-shaped, it is necessary to prepare a plurality of patterns depending on the number of blocks 11 to be attached and the arrangement position.

Moreover, since the fluid apparatus module 10 of 1st Example can be assembled | attached and disassembled by the access from the apparatus attachment surface side of the block 11, it is excellent in workability.
This is because the block 11 and the joint block 12 are fastened to the female screw portion 14 a provided on the lower connection member 14 by fastening the fastening bolt 15 inserted from the upper surface of the upper connection member 13, and the block 11. This is because the joint block 12 is joined.
Since such a structure is adopted, joining and disassembling work can be performed by accessing from the same direction. Thus, maintenance by access from the same direction leads to a reduction in maintenance space that must be secured and a reduction in maintenance time.

Next, a second embodiment of the present invention will be described.
(Second embodiment)
In FIG. 7, the perspective view of the fluid apparatus module of 2nd Example is shown. 8 is an exploded perspective view of the fluid device module of the second embodiment, and FIG. 9 is a further exploded perspective view of the exploded perspective view of FIG.
The fluid device module 10 of the second embodiment is similar in basic configuration to the fluid device module 10 of the first embodiment. Therefore, the description will focus on the different parts. In addition, the same code | symbol is attached | subjected to the part of the same structure.
The fluid device module 10 is a manifold block configured by combining three blocks 21.
The block 21 provided with the device mounting surface for attaching the first fluid control valve 16 to the third fluid control valve 18 on the upper surface is provided with a channel hole 21b on the side surface, and block connection protrusions 21a on the upper and lower sides of the channel hole 21b. ing. The block connection protrusion 21a has a tapered surface.
In addition to the joint 20 provided on the adjacent side surface, a block trapezoidal protrusion 21c is provided. A tapered surface having the same angle as that of the block connection protrusion 21a is provided on the upper and lower portions of the block trapezoidal protrusion 21c. Further, the block trapezoidal protrusion 21 c is also provided on the side surface facing the side surface on which the joint 20 is provided.

The joint block 22 arranged next to the block 21 is provided with a joint 20, and a flow path 22 b communicating with the joint 20 is also provided on the back side (not shown).
A joint block connection protrusion 22a having the same shape as the block connection protrusion 21a is provided on the upper and lower parts of the joint 20 provided in the joint block 22.
And the joint block trapezoid protrusion 22c is provided so that it may become symmetrical with the block trapezoid protrusion 21c provided in the block 21. FIG.
The upper connecting member 23 has a U-shape, and is provided with an upper pressing surface 23a configured in a V-groove shape by two tapered surfaces (not shown), and presses the block trapezoidal protrusion 21c and the joint block trapezoidal protrusion 22c. Two upper pressing arms 23b configured as described above are provided.
The lower connecting member 24 is in the form of a single plate, and a plurality of lower pressing surfaces 24b are formed on the side where the block 21 and the joint block 22 abut. The lower pressing surface 24b is formed in a V-groove shape with two tapered surfaces, and a female screw portion 24a is formed at the top. The fastening bolt 15 is fastened to the female screw portion 24a.

  The lower connecting member 24 includes a lower pressing arm 24c configured to press the block trapezoidal protrusion 21c included in the block 21 and the joint block trapezoidal protrusion 22c included in the joint block 22. In the case of the fluid device module 10 in which three blocks 21 are assembled, the lower pressing arm 24c is provided at four places on one side, for a total of eight places. The lower pressing arm 24c may be formed integrally with the lower connecting member 24, or may be produced as a separate part and combined.

The following operations and effects are shown by the configuration of the fluid device module of the second embodiment described above.
The block 21, the joint block 22, the upper connection member 23, and the lower connection member 24 are assembled in the same manner as in the first embodiment to form the fluid device module 10. However, the block trapezoidal protrusion 21c, Since the joint block 22 is provided with a joint block trapezoidal protrusion 22c, the upper connection member 23 is provided with an upper pressing arm 23b, and the lower connection member 24 is provided with a lower pressing arm 24c. The block trapezoidal protrusion 21 c and the joint block trapezoidal protrusion 22 c are pressed, and the fastening force with the fastening bolt 15 is easily applied to the entire outer periphery of the block 21.
In the case where the block 21 and the joint block 22 are made of a material such as resin having low rigidity and the fluid flowing in the fluid device module 10 is to be used at a high pressure, the block as shown in the first embodiment is used. In the case where the members 11 are pressed together or only at the upper part and the lower part of the block 11 and the joint block 12, there is a possibility that a force acts in the direction of swelling at the center part which is the height of the flow path hole 11b to cause deformation.

If the block 11 and the joint block 12 are deformed around the middle of the upper connecting member 13 and the lower connecting member 14 as described above, there is a risk of leakage. In order to prevent such a situation, the block 21 is provided with a block trapezoidal protrusion 21c, the joint block 22 is provided with a joint block trapezoidal protrusion 22c, the upper connecting member 23 is provided with an upper pressing arm 23b, and the lower connecting member 24 is provided with a lower pressing arm 24c. As a result, a force is generated in the radial direction even in the middle of the upper connecting member 23 and the lower connecting member 24.
Compared to the first embodiment, in the case of the configuration of the second embodiment, the shape is complicated and costs are increased. However, there is an effect of preventing the possibility of leakage, so that We can respond to your needs.
Especially when using chemicals that are corrosive to fluids or liquids that are harmful to the human body, such as semiconductor manufacturing equipment, if the chemicals are expensive by improving the reliability during equipment operation by preventing leakage Since it is possible to reduce the running cost by preventing leakage, there is a merit even if the initial cost is slightly increased.

Next, a third embodiment of the present invention will be described.
(Third embodiment)
In FIG. 10, the perspective view of the fluid apparatus module of 3rd Example is shown. FIG. 11 is an exploded perspective view, and FIG. 12 is a perspective view showing a state where only a part is removed.
The basic configuration of the fluid device module 10 of the third embodiment is the same as that of the fluid device module 10 of the first embodiment. Parts with the same number shall show the same function.
The third embodiment is different from the first embodiment in that the lower connection member 14 is separated into a lower connection member 25 and a lower plate 26. The lower connecting member 25 is prepared one by one corresponding to the upper connecting member 13, and the female screw portion is used to fix the first fluid control valve 16 to the third fluid control valve 18 to the block 11 with the device mounting bolt 19. A lower plate 26 having a shape formed thereon is prepared at the lower portion of the block 11.

The following operations and effects are exhibited by the configuration of the fluid device module of the third embodiment described above.
Thus, by providing the lower connection member 25 individually, the block 11 can be partially removed as shown in FIG.
That is, the block 11 to which the second fluid control valve 17 is attached is fixed, for example, to the joint block 12 in order from the end due to the seal material provided between the blocks 11 in the fluid device module 10 of the first embodiment. The fastening bolt 15 of the upper connecting member 13 is loosened, the fastening bolt 15 of the upper connecting member 13 that fixes the block 11 to which the first fluid control valve 16 is attached is loosened, and in some cases, the third fluid control valve 18 is attached. After loosening the fastening bolt 15 of the upper connecting member 13 for fixing the block 11 to be mounted, the block 11 to which the joint block 12 and the first fluid control valve 16 are attached is removed, and then the second fluid control valve 17 is attached. The block 11 is removed.

However, in the fluid device module 10 of the third embodiment, the second fluid control valve 17 is attached by removing the fastening bolts 15 of the upper connection member 13 that fixes the left and right of the block 11 to which the second fluid control valve 17 is attached. The block 11 can be removed. Therefore, there is an advantage that the block 11 assembled in the middle can be easily replaced.
In the case of the fluid device module 10 according to the third embodiment, maintenance can be performed even when the fluid device module 10 is configured such that a plurality of blocks 11 are arranged in a plane as shown in FIG. 5 of the first embodiment. Since it becomes easy, the merit is high.

Next, a fourth embodiment of the present invention will be described.
(Fourth embodiment)
In FIG. 13, the perspective view of the fluid apparatus module of 4th Example is shown. FIG. 14 is an exploded perspective view thereof.
The fluid device module 10 of the fourth embodiment is configured such that the fluid device module 10 of the third embodiment can be attached to a rail 27 such as a DIN rail.
The rail 27 has a lip attached to the edge of a U-shaped member, and is the same type as that used to attach a sensor controller or the like.
As shown in FIG. 14, the attachment member 28 is attached to the rail 27, and the lower connection member is attached so that the attachment screw 29 can be tightened to the lower connection member 25 through the through hole 28 b provided in the attachment member 28. 25 is provided with a female screw portion 25b.
The attachment member 28 attached to the rail 27 can be fixed with the lip of the rail 27 sandwiched by the fixing screw 28a, and can slide on the rail 27 when the fixing screw 28a is loosened.

The following operations and effects are exhibited by the configuration of the fluid device module of the fourth embodiment described above.
The fluid device module 10 according to the fourth embodiment in which the fluid device module 10 according to the third embodiment can be attached to the rail 27 has an advantage that wall mounting or the like is facilitated by the rail 27 when installed in the facility or the like.
Although not shown in FIGS. 13 and 14, the rail 27 can be of a type having a long hole at the bottom, and even if there is no long hole, a hole is drilled and bolted. Therefore, after the rail 27 is attached to the wall surface, the attachment member 28 can be attached to the lower connection member 25 and fixed to the rail 27.
Since such a rail 27 is commercially available, there is a merit that workability is improved simply by providing the lower connecting member 25 with the female screw portion 25b.

In semiconductor production lines and the like, there is a strong demand for shortening the length of the piping flow path as much as possible due to the demand for equipment reduction and the use of expensive chemicals. If the length of the flow path is long, it takes time to purge the fluid remaining in the pipe, and the fluid remaining in the pipe is wasted.
The fluid device module 10 can be reduced in size by eliminating the joints and piping by attaching the first fluid control valve 16 to the third fluid control valve 18 to the block 11. As a result of downsizing, if the fluid device module 10 can be installed as close to other equipment as possible, the convenience is further enhanced.
By being able to attach to the rail 27 as in the fourth embodiment, it becomes easy to attach to the wall surface or ceiling surface, etc., so that the user who wants to install the fluid device module 10 in a place as close to other equipment as possible Can meet your needs.
Further, in the fluid device module 10 of the fourth embodiment, by loosening the fixing screw 28a, the fluid device module 10 can have a degree of freedom in the direction of the rail 27 without the fluid device module 10 falling off. There is an advantage that it is not necessary to remove the module 10 from the pipe and work, and the work can be easily performed while being attached to a wall surface or a ceiling surface.

Next, a fifth embodiment of the present invention will be described.
(5th Example)
FIG. 15 is a perspective view of the fluid device module of the fifth embodiment. FIG. 16 is an exploded perspective view thereof.
The fluid device module 10 of the fifth embodiment is similar to the fluid device module 10 of the third embodiment, but the shape of the block 31 corresponding to the block 11 is different. In addition, what attached | subjected the same symbol shall show the same function.
The fluid device module 10 is a manifold block configured by combining three blocks 31. The block 31 having a device mounting surface for attaching the first fluid control valve 16 to the third fluid control valve 18 on the upper surface is provided with a block connection protrusion 31a with the body of the block 31 partially recessed. This is different from the block 11 of the third embodiment.

The block connection protrusion 31a provided in the upper part is formed by being dug down so that the top part thereof is the same as the height of the device mounting surface of the block 31, and the lower plate 35 is also attached to the block connection protrusion 31a provided in the lower part. It is dug down to the same level as the surface to be formed. Note that the lower connection member 34 is not provided with a female screw portion and is provided with a through hole 34a. Further, unlike the upper connection member 13 and the lower connection member 14 provided in the fluid device module 10 of the third embodiment, the upper connection member 33 and the lower connection member 34 are provided with four through holes instead of two. The device mounting bolts 19 or the fastening bolts 15 of two on each side can be penetrated.
As shown in FIG. 16, the assembly procedure includes three blocks 31 and two joint blocks 32. The upper connection member 33 and the lower connection member 34 are connected to each other by a block connection protrusion 31a, a joint block connection protrusion 32a, and The block connection protrusions 31a are set so as to press each other, the lower plate 35 is disposed below the lower connection member 34, and the first fluid control valve 16 and the third fluid control valve 18 are disposed from the upper side of the upper connection member 33. It is fixed by fastening with the device mounting bolt 19 and the fastening bolt 15.
Therefore, the upper connection member 33 and the lower connection member 34 are connected to each other at the end where the joint block 32 and the block 31 are fastened. The mounting bolt 19 will penetrate.

The following operations and effects are shown by the configuration of the fluid device module of the fifth embodiment described above.
Such a block 31, joint block 32, upper connection member 33, lower connection member 34, and lower plate 35, and the first fluid control valve 16 to the third fluid control valve 18 are used to provide the fluid device of the fifth embodiment. Although the module 10 is configured, as described above, the upper connection member 33 is sandwiched between the block 31, the joint block 32, and the first fluid control valve 16 to the third fluid control valve 18, and the lower connection member 34 is the lower plate. 35 is attached so as to be sandwiched between the block 31 and the joint block 32, the width of the fluid device module 10 of the fifth embodiment is shorter than that of the fluid device module 10 of the first to fourth embodiments. .

That is, when compared with the first embodiment in which the upper connecting member 13 is disposed between the first fluid control valve 16 and the second fluid control valve 17, the second fluid control is immediately adjacent to the first fluid control valve 16. Since the valve 17 can be disposed, the fluid device module 10 can be reduced in size.
This employs a method in which the upper connection member 33 and the lower connection member 34 are sandwiched and fixed, and therefore, for example, the second fluid control valve 17 needs to be arranged next to the first fluid control valve 16 with the upper connection member 33 interposed therebetween. This is because the size can be reduced accordingly.
This configuration is an effective means particularly when the blocks 31 are arranged in series to form a manifold.
It is also possible to configure without using the lower plate 35 by further changing the form of the fifth embodiment, for example, by providing a screw hole in the lower connection member 34. In this case, the device mounting bolt 19 is passed through the first fluid control valve 16 to the third fluid control valve 18 and penetrates the upper connection member 33 and the block 31 and is fastened to the lower connection member 34 provided with a screw hole. Thus, the fluid device module 10 is configured. In this way, the lower plate 35 can be reduced, leading to cost reduction.

Next, a sixth embodiment of the present invention will be described.
(Sixth embodiment)
In FIG. 17, the perspective view of the fluid apparatus module of 6th Example is shown.
The fluid device module 10 of the sixth embodiment is configured such that the concept of the fluid device module 10 of the fifth embodiment can be expanded and arranged in multiple rows as shown in FIG.
The fluid control valve 16a to the fluid control valve 18c are numbered for convenience of explanation, but the same one may be arranged in 9 × 3 × 3, or a plurality of different fluid control valves may be arranged. It doesn't matter. If necessary, the number of rows can be increased.
FIG. 18 shows a perspective view of the fluid device module of the sixth embodiment. FIG. 18 shows a part of FIG. 17 extracted, and three blocks are taken out for explanation. 19 is an exploded perspective view of the fluid device module of the sixth embodiment, and FIG. 20 is a further exploded perspective view of the exploded perspective view of FIG.

Of the fluid device module 10 shown in FIG. 17 of the sixth embodiment, the fluid control valve 16b, the fluid control valve 17b, and the fluid control valve 17c, the corresponding block 36, the joint block 37, the upper connecting member 38, FIG. 18 shows the lower connection member 39 extracted, but its basic configuration is similar to the basic configuration of the fluid device module 10 of the fifth embodiment.
That is, in the fluid device module 10 of the fifth embodiment, the upper connection member 33 and the lower connection member 34 are combined with the block 31 and the joint block 32, and the first fluid control valves 16 to 3 are arranged from the upper part of the upper connection member 33. Although the fluid control valve 18 is assembled and fastened to the female screw hole provided in the lower plate 35 with the equipment mounting bolt 19, the fluid control valve 16b, the fluid equipment module 10 of the sixth embodiment is also fixed. In the fluid control valve 17b and the fluid control valve 17c, the joint block 37 and the lower connection member 39 are combined with the upper connection member 38 interposed therebetween. The mounting bolt 19 is used for fastening.

However, the upper connection member 38 and the lower connection member 39 can press the block connection protrusion 36a provided in the adjacent block 36. As shown in FIG. 20, the central portion is a cross and the side portion is T-shaped. In addition, as shown in FIG. 17, the corner portion has an L-shape, and is formed with a V-groove upper pressing surface 38a and a lower pressing surface 39a. The side connection member 39 is formed with bolt holes 38b and bolt holes 39b at four locations, and the L-shaped upper connection member 38 and lower connection member 39 are formed with bolt holes 38b and bolt holes 39b at three locations. The device mounting bolt 19 and the fastening bolt 15 can be passed.
The block 36 of the sixth embodiment is provided with block connection protrusions 36a at the upper end and the lower end as in the other embodiments. The block connection protrusions 36 a are provided at eight locations, and other blocks 36 or joint blocks 37 can be connected to the four surfaces of the block 36.
A device mounting surface is formed on the upper surface of the block 36, and notches are provided at the four corners so that the upper connection member 38 and the lower connection member 39 are fitted. Although difficult to confirm in the figure, through holes for passing the device mounting bolts 19 are provided at the four corners of the block 36.
The joint block 37 has the same configuration as that of the other embodiments, but both ends have cutouts so that the upper connection member 38 and the lower connection member 39 can be attached. It has become. A through-hole for passing the fastening bolt 15 is provided in the notched portion.

The following operations and effects are exhibited by the configuration of the fluid device module of the sixth embodiment described above.
Similar to the fluid device module 10 of the fifth embodiment, the fluid device module 10 of the sixth embodiment has an advantage that the distance between the blocks can be shortened. Since this has a similar structure to the basic structure of the joint 20 of the fifth embodiment, the equipment mounting bolt 19 penetrates the joint block 37, the upper connection member 38, and the lower connection member 39, and the lower plate. This is because it is fastened to 35.
Accordingly, the fluid device module 10 can be reduced in size, and the space effect can be achieved while obtaining the same effects as the multi-row fluid device module 10 shown in FIG. 5 of the first embodiment.
As in the first embodiment, a pressure gauge, a check valve, or the like (not shown) can be attached to the block 36, and when a large device can be attached, two spaces of the block 36 or four It is also possible to produce a block using one space and attach the block 36 and the joint block 37 around the block.

Next, a seventh embodiment of the present invention will be described.
(Seventh embodiment)
FIG. 21 is a perspective view of the fluid device module of the seventh embodiment. FIG. 22 shows an exploded perspective view of the fluid device module of the seventh embodiment, and FIG. 23 shows a further exploded perspective view of the exploded perspective view of FIG.
The fluid device module 10 of the seventh embodiment differs from the fluid device module 10 of the first to fifth embodiments in its connection structure. In addition, the part to which the same code | symbol is attached | subjected shall show the same function.
The block 41 having the device mounting surface for attaching the first fluid control valve 16 to the third fluid control valve 18 on the upper surface is provided with a conical block connection protrusion 41a around a flow path hole 41b provided on the side surface. The block connection protrusion 41a may be formed in a conical shape so that the area increases toward the outside. For example, the block connection protrusion 41a may be provided by another member so as to be screwed into the side surface of the block 41.

And the joint part 42 is comprised by two, the joint part connection protrusion 42a part of the same shape as the block connection protrusion 41a, and the joint 20 part.
Although not shown in FIG. 21 to FIG. 23, an O-ring groove and an O-ring as shown in FIG. 30A, for example, are provided on the end face of the block connection protrusion 41a or the joint part connection protrusion 42a. 74 is provided. Sealing means such as the sealing member 75 shown in FIG. In this structure, it is not very advantageous to provide a radial seal. However, if the outer diameters of the block connection protrusion 41a and the joint part connection protrusion 42a are increased, the structure shown in FIGS. 30 (c) and 30 (d) is used. Such radial sealing means may be provided.
The lower connecting member 44 is formed with a lower pressing surface 44b in which the abacus bead is halved so that the block connecting protrusion 41a included in the block 41 and the joint part connecting protrusion 42a included in the joint part 42 can be pressed. ing. And the internal thread part 44a is formed in the both sides.
The upper connecting member 43 is formed with an upper pressing surface 43b (not shown) in which the abacus bead is halved so that the block connecting protrusion 41a included in the block 41 and the joint part connecting protrusion 42a included in the joint part 42 can be pressed. ing. The upper pressing surface 43b has substantially the same shape as the lower pressing surface 44b.

The upper connection member 43 and the lower connection member 44 are fixed as shown in FIG. 21 by sandwiching the block connection protrusion 41a and the joint part connection protrusion 42a. Then, the block 41 and the joint part 42 are joined.
As shown in FIG. 21, the upper connection member 43 and the lower connection member 44 are fastened to the fastening bolt 15, and there is a slight gap at the mating surface portion of the upper connection member 43 and the lower connection member 44. It is designed so that the force in the radial direction and the thrust direction is surely generated when the block 41 and the joint part 42 are joined. Of course, it may be designed so that there is no gap between the contact surfaces of the upper connecting member 43 and the lower connecting member 44 in a state of being tightened with a specified torque.

The following operations and effects are exhibited by the configuration of the fluid device module of the seventh embodiment described above.
The fluid device module 10 of the seventh embodiment is configured such that the distance between the block connection protrusion 41a and the joint part connection protrusion 42a is close to the flow path formed in the fluid device module 10 and the force is generated evenly. Thus, there is an advantage that leakage from a connection portion between the flow path hole 41b provided in the block 41 and the flow path hole 42b (not shown) provided in the joint part 42 can be prevented.
In this way, the block connection protrusion 41a and the joint part connection protrusion 42a are formed in a conical shape, and the upper pressure surface 43a of the upper connection member 43 and the lower pressure surface 44b of the lower connection member 44 are connected to the block connection protrusion 41a and the joint. By configuring the parts connection projections 42a so that they can be pressed, the distance from the central flow path to the pressing surface is substantially constant, and as a result, the pressing force is evenly generated on the bonding surface. Sealing force can be secured.

In particular, in the case of the axial seal as shown in FIGS. 30A and 30B, the radial force that is the direction in which the joint surfaces of the block 41 and the block 41 or the block 41 and the joint part 42 approach is not evenly applied. Then, the force applied to the sealing material such as the O-ring 74 and the sealing member 75 is not uniform, and if the conditions are bad, there is a possibility that leakage occurs from a portion where the force is weak.
When using fluids that are harmful to the human body, such as semiconductor production lines, or fluids with high unit prices, it is necessary to avoid leakage of liquids as much as possible, especially when fluids are transported at high pressure in the flow path. Since there is a high risk of occurrence, there is a high merit that a uniform sealing force can be secured.
In the case of the fluid device module 10 according to the seventh embodiment, maintenance can be performed even when the fluid device module 10 in which a plurality of blocks 11 are arranged in a plane as shown in FIG. 5 of the first embodiment is configured. Since it becomes easy, the merit is high.

Next, an eighth embodiment of the present invention will be described.
(Eighth embodiment)
FIG. 24 is a perspective view of the fluid device module of the eighth embodiment, and FIG. 25 is an exploded perspective view of the fluid device module of the eighth embodiment.
The configuration of the fluid device module 10 of the eighth embodiment is substantially the same as the configuration of the fluid device module 10 of the third embodiment. Therefore, the block 51 corresponds to the block 11, the joint block 52 corresponds to the joint block 12, the upper connection member 53 corresponds to the upper connection member 13, and the lower connection member 54 corresponds to the lower connection member 14. Yes.
However, as shown in FIG. 25, the block 51 and the joint block 52 are each provided with two bolt hole cliffs on the taper surfaces provided on the block connection protrusion 51a and the joint block connection protrusion 52a. The reinforcing collar 55 is inserted into the.
The reinforcing collar 55 has a length slightly shorter than the bolt holes provided in the block 51 and the joint block 52, and is dimensioned to fit into the bolt holes without any gap.

The material of the reinforcing collar 55 is preferably a metal having high corrosion resistance such as stainless steel or a resin having relatively high rigidity.
And the dimension of the bolt hole provided in the block 51 and the joint block 52 is also made large to such an extent that the fastening collar 15 can penetrate the fastening bolt 15 and the fastening bolt 15 can penetrate.
Unlike the upper connection member 13 of the third embodiment, the upper connection member 53 is provided with four bolt holes through which the fastening bolts 15 penetrate instead of two. Correspondingly, the lower connection member 54 is also provided with four female screw portions. These are provided at positions corresponding to bolt holes provided in the block 51 and the joint block 52.

The following operations and effects are exhibited by the configuration of the fluid device module of the eighth embodiment described above.
The reinforcing collar 55 inserted into the bolt holes of the block 51 and the joint block 52 serves to prevent the block 51 and the joint block 52 from being deformed.
The block 51 and the joint block 52 are assembled to the upper connection member 53 and the lower connection member 54 by pressing the block connection protrusion 51a and the joint block connection protrusion 52a from above and below. Therefore, when the block 51 and the joint block 52 are made of a material such as a resin having relatively low rigidity, an O-ring 74 or a seal member 75 provided between the blocks 51 or between the block 51 and the joint block 52. The force which tries to pull away from the joint surfaces of the blocks 51 and the joint block 52 acts by the axial direction sealing members.
Further, when there is a temperature change of the fluid flowing through the flow path formed in the fluid device module 10, there is a possibility that the creeping action may further cause deformation in a direction in which the fluid device module 10 is pulled away from the joint surface.
When such deformation occurs, an axial seal member such as the O-ring 74 or the seal member 75 is positioned around the flow path, and as a result, the seal performance of the flow path portion is the weakest. .
In order to prevent this, as shown in the second and seventh embodiments, the method of pressing the entire outer periphery is more reliable, but there is also a problem that the processing cost is increased.

However, in the eighth embodiment, the reinforcing collar 55 is inserted into the block 51 and the joint block 52, so that it occurs around the middle of the upper connecting member 53 and the lower connecting member 54, that is, in the vicinity where the flow path is formed inside. In addition, a force is applied to the reinforcing collar 55 having high rigidity with respect to the force that the blocks 51 and the block 51 and the joint block 52 are about to separate from the connection portion, and as a result, deformation can be suppressed. That is, the reinforcing collar 55 serves as a reinforcement against the deformation of the block 51 and the joint block 52 in the radial direction.
Such an effect is also effective when the flow path provided in the block 51 or the joint block 52 is not formed around the middle of the upper connection member 53 and the lower connection member 54.
The insertion of the reinforcing collar 55 into the block 51 and the joint block 52 in this way can be performed at low cost because the processing is relatively easy.
Note that the fluid device module 10 of the eighth embodiment can correspond to the fluid device module 10 in which the block 11 is arranged on a plane as shown in FIG. 5 to form a complicated flow path.
Further, the same effect can be obtained even if the reinforcing collar 55 shown in the eighth embodiment is inserted into the block 31 of the fifth embodiment.

Next, a ninth embodiment of the present invention will be described.
(Ninth embodiment)
FIG. 26 shows a perspective view of the fluid device module of the ninth embodiment. FIG. 27 is an exploded perspective view of the fluid device module of the ninth embodiment.
The fluid device module 10 of the ninth embodiment has substantially the same configuration as the fluid device module 10 of the third embodiment, but uses a fastening attachment 60 instead of the upper connection member 13 and the lower connection member 14. It is different in point. In addition, about the thing to which the same symbol is attached | subjected, the same function shall be shown.

FIG. 28 shows a perspective view of the fastening attachment. FIG. 29 shows a perspective view of a modified example of the fastening attachment.
The fastening attachment 60 includes an upper connection member 61 corresponding to the upper connection member 13 and a lower connection member 62 corresponding to the lower connection member 14, and a pressure receiving plate sandwiching a spring 64 above the upper connection member 61. 63 is arranged. A connection plate 65 is disposed above the pressure receiving plate 63, and the connection plate 65 includes two connection rods 66 that pass therethrough. The connecting rod 66 passes through the pressure receiving plate 63 and the upper connection member 61 and is connected to the lower connection member 62. A lever 67 is rotatably attached to the connection plate 65 by a hinge.

As shown in FIG. 27, the fastening attachment 60 joins the blocks 11 to each other and the block 11 and the joint block 12 by the upper connecting member 61 and the lower connecting member 62 in a state where the lever 67 stands, and the lever 67 sleeps. In this state, the blocks 11 and the block 11 and the joint block 12 can be disassembled.
This is because the pressure receiving plate 63 is pushed when one end of a lever 67 that is pivotally attached to the connecting plate 65 by a hinge is in a standing state from the sleeping state, and is provided at the lower portion of the pressure receiving plate 63. The spring 64 presses the upper connecting member 61. On the other hand, the connecting rod 66 penetrating the connecting plate 65 is connected to the lower connecting member 62, and the connecting rod 66 has a stopper on the connecting plate 65 side. This is realized by the action that the connecting member 62 approaches.

Note that, as shown in FIG. 29, the lever 67 may be provided with an L-shaped lever 68 that is L-shaped.
The fastening attachment 60 includes the L-shaped lever 68 instead of the lever 67, so that the blocks 11 and the block 11 and the joint block 12 can be joined together while the lever is lying down, and can be disassembled while standing.
By adopting the L-shaped lever 68 in the fastening attachment 60 in this way, there is an effect that the fluid device module 10 is not accidentally disassembled such as a thing hitting the fluid device module 10.

The following operations and effects are exhibited by the configuration of the fluid device module of the ninth embodiment described above.
Since the fluid device module 10 is joined by the fastening attachment 60, the same effect as that of the third embodiment is obtained, and the lever 67 or the L-shaped lever 68 of the fastening attachment 60 is directly and manually operated for joining and disassembly. Since it is not necessary to use a tool for operating the screw, the workability is improved.
In semiconductor manufacturing processes, facilities are being reduced in size, so the work space is often narrow. Therefore, there is an advantage that the time required for maintenance can be shortened by improving the workability and workability.

Although the embodiments of the present invention have been described, the present invention is not limited to the above-described embodiments, and various applications are possible.
For example, as described in the first to ninth embodiments, the upper pressing surface formed on the upper connecting member, the lower pressing surface formed on the lower connecting member, the block connecting protrusion formed on the block, and the joint block The joint block connection protrusions formed on the upper connection member are each expressed as a tapered surface, but are formed on the upper pressure surface formed on the upper connection member, the lower pressure surface formed on the lower connection member, or the block. Any one of the block connection protrusion and the joint block connection protrusion formed on the joint block is not required to be a tapered surface. In other words, since one of the functions of guiding the other is realized by a tapered surface, it is considered that the same function is achieved even if one side is a simple protrusion and one side is a tapered surface. Of course, in consideration of the hardness of the surface of each material and the sliding resistance, it is sufficient that the thrust force can be realized in such a way that it can be decomposed into both radial and thrust forces.

  Further, for example, the joint 11 is provided in the block 11 of the first embodiment, and the joint 20 is connected by the joint block 12, but the position where the joint 20 is provided is appropriately determined. Does not prevent you from changing. In order to arrange the block 11 as shown in FIG. 5 or FIG. 6, the block 11 may be configured so that the joint block 12 can be assembled on the entire surface without providing the joint 20. Assembling with the surfaces having no flow path hole 11b is not hindered. By providing the joint 20 directly on the block 11, versatility is lost, but a space-saving configuration is possible. Therefore, these arrangements should be appropriately determined in consideration of user convenience. About the position which provides such a coupling 20, it is applicable to any of 3rd Example, 4th Example, 5th Example, 8th Example, and 9th Example. In the second embodiment and the seventh embodiment, there are restrictions on the shapes of the upper connecting member and the lower connecting member, so this point needs to be noted.

  In addition, for convenience of explanation, the first to ninth embodiments are shown with the fastening bolts 15 and the device mounting bolts 19 exposed, but these bolts may be made of resin or necessary. It does not interfere with the use of lining treatment on the part. Depending on the environment in which the fluid device module 10 is used and the fluid to be used, the use atmosphere may be corrosive. Corrosion may occur even when a highly corrosion-resistant metal such as stainless steel or titanium is used. It can be used if measures are taken. Moreover, it does not prevent performing the same process also about the fastening attachment 60 of 9th Example.

The perspective view of the fluid apparatus module which concerns on 1st Example of this invention is shown. The disassembled perspective view which decomposed | disassembled FIG. 1 about the fluid apparatus module which concerns on 1st Example of this invention is shown. 1 is a further exploded perspective view of the fluid device module according to the first embodiment of the present invention. FIG. Sectional drawing of the state which made the fluid apparatus module which concerns on 1st Example of this invention into 2 series is shown. In the fluid apparatus module which concerns on 1st Example of this invention, the instruction | indication of the example which arranged many blocks on the plane is shown. Sectional drawing of the example which arranged many blocks on the plane in the fluid apparatus module which concerns on 1st Example of this invention, and formed the complicated fluid circuit is shown. The perspective view of the fluid apparatus module which concerns on 2nd Example of this invention is shown. The disassembled perspective view which decomposed | disassembled FIG. 7 about the fluid apparatus module which concerns on 2nd Example of this invention is shown. The disassembled perspective view which further decomposed | disassembled FIG. 7 about the fluid apparatus module which concerns on 2nd Example of this invention is shown. The perspective view of the fluid apparatus module which concerns on 3rd Example of this invention is shown. The disassembled perspective view which decomposed | disassembled FIG. 10 about the fluid apparatus module which concerns on 3rd Example of this invention is shown. The disassembled perspective view which removed the block of the middle of FIG. 10 about the fluid apparatus module which concerns on 3rd Example of this invention is shown. The perspective view of the fluid apparatus module which concerns on 4th Example of this invention is shown. The disassembled perspective view which decomposed | disassembled FIG. 13 about the fluid apparatus module which concerns on 4th Example of this invention is shown. The perspective view of the fluid apparatus module which concerns on 5th Example of this invention is shown. The disassembled perspective view which decomposed | disassembled FIG. 15 about the fluid apparatus module which concerns on 5th Example of this invention is shown. The perspective view of the fluid apparatus module which concerns on 6th Example of this invention is shown. The perspective view in the state which extracted a part among fluid equipment modules concerning the 6th example of the present invention is shown. The disassembled perspective view which decomposed | disassembled FIG. 18 about the fluid apparatus module which concerns on 6th Example of this invention is shown. FIG. 19 is an exploded perspective view of the fluid device module according to the sixth embodiment of the present invention, in which FIG. 19 is further disassembled. The perspective view of the fluid apparatus module which concerns on 7th Example of this invention is shown. The disassembled perspective view which decomposed | disassembled FIG. 21 about the fluid apparatus module which concerns on 7th Example of this invention is shown. The disassembled perspective view which further decomposed | disassembled FIG. 21 about the fluid apparatus module which concerns on 7th Example of this invention is shown. The perspective view of the fluid apparatus module which concerns on 8th Example of this invention is shown. The disassembled perspective view which decomposed | disassembled FIG. 24 about the fluid apparatus module which concerns on 8th Example of this invention is shown. The perspective view of the fluid apparatus module which concerns on 9th Example of this invention is shown. The disassembled perspective view which decomposed | disassembled FIG. 26 about the fluid apparatus module which concerns on 9th Example of this invention is shown. The perspective view of the fastening attachment which concerns on 9th Example of this invention is shown. The perspective view of another example of the fastening attachment which concerns on 9th Example of this invention is shown. (A) Structural sectional drawing of the axial seal using the O-ring which concerns on the Example of this invention is shown. (B) Structural sectional drawing of the axial seal using the seal rubber which concerns on the Example of this invention is shown. (C) Structural sectional drawing of the radial seal using the O-ring which concerns on the Example of this invention is shown. (D) Structural sectional drawing of the radial seal using the annular seal which concerns on the Example of this invention is shown.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Fluid equipment module 11 Block 11a Block connection protrusion 11b Flow path hole 12 Joint block 12a Joint block connection protrusion 12b Flow path hole 13 Upper connection member 13a Upper pressure surface 14 Lower connection member 14a Female thread part 14b Lower pressure surface 15 Fastening Bolt 16 First fluid control valve 17 Second fluid control valve 18 Third fluid control valve 19 Equipment mounting bolt 20 Joint

Claims (9)

A first block which is a hexahedron having a device mounting surface for mounting a first fluid control device on the upper surface, a first flow path hole on the first side surface, and connection protrusions formed on the upper and lower portions of the first flow path hole. When,
A second block which is a hexahedron having a device attachment surface for attaching the second fluid control device on the upper surface, a second flow path hole on the first side surface, and connection protrusions formed on the upper and lower portions of the second flow path hole. When,
An upper side connecting member having an upper side pressing surface that contacts both sides of a connection projection provided on one side of the upper portion of the first block and a connection projection provided on an upper side of the second block;
A lower side connecting member having a connection protrusion provided on one side of the lower part of the first block and a lower side pressing surface abutting on both sides of the connection protrusion provided on the lower side of the second block;
With
A taper surface is formed on at least one of the connection protrusion of the first block and the connection protrusion of the second block, or the upper side pressing surface and the lower side pressing surface,
The first block and the second channel hole are communicated with each other by moving the upper side connection member and the lower side connection member in the proximity direction by the fastening means. The second block is joined;
The upper side connecting member and the lower side connecting member are arranged in parallel to each other;
The fluid device module , wherein the fastening means is attached from the device attachment surface side with a pair of fastening bolts across the first flow path hole and the second flow path hole . The fluid device module according to claim 1,
A first block is provided with a third flow path hole, a connection projection is formed on the upper and lower parts of the third flow path hole, and a joint block is formed on the second side face.
The first block includes a fourth channel hole on the second side surface, and connection protrusions are formed on the upper and lower portions of the fourth channel hole,
An upper side connecting member provided with a connection protrusion provided on one side of the upper part of the first block and an upper side pressing surface that contacts both sides of the connection protrusion provided on one side of the joint block;
A lower side connecting member having a connection protrusion provided on one side of the lower part of the first block and a lower side pressing surface that contacts both sides of the connection protrusion provided on the lower side of the joint block;
With
A taper surface is formed on at least one of the connection protrusion of the first block and the connection protrusion of the joint block, or the upper side pressing surface and the lower side pressing surface,
By moving the upper side connecting member and the lower side connecting member in the proximity direction by the fastening means, the first block and the fourth block are communicated with each other so that the third channel and the fourth channel are communicated with each other. The joint block is joined ,
The upper side connecting member and the lower side connecting member are arranged in parallel to each other;
The fluid device module , wherein the fastening means is attached from the device attachment surface side by a pair of fastening bolts across the third flow path hole and the fourth flow path hole . In the fluid device module according to claim 1 or 2,
A reinforcing collar penetrating the first block and the second block;
The reinforcing collar has higher strength than the material of the first block and the second block,
The fluid device module, wherein the fastening means is disposed through the reinforcing collar. In the fluid equipment module according to any one of claims 1 to 3,
At least one of the first fluid control device provided in the first block and the second fluid control device provided in the second block is provided inside the block. A first block having a device attachment surface for attaching the first fluid control device on the upper surface, a first flow path hole on the first side surface, and connection protrusions formed on the upper and lower portions of the first flow path hole;
A second block having a device attachment surface for attaching the second fluid control device on the upper surface, a second flow path hole on the first side surface, and connection protrusions formed on the upper and lower sides of the second flow path hole;
An upper connection member provided with a connection protrusion provided on the upper part of the first block and an upper pressing surface contacting both sides of the connection protrusion provided on the upper part of the second block;
A lower connection member including a connection protrusion provided at a lower portion of the first block and a lower pressing surface contacting both sides of the connection protrusion provided at a lower portion of the second block;
With
A tapered surface is formed on at least one of the connection protrusion of the first block and the connection protrusion of the second block, or the upper pressing surface and the lower pressing surface,
When the upper connecting member and the lower connecting member are moved in the proximity direction by the fastening means, the first block and the second block so that the first channel hole and the second channel hole communicate with each other. That the blocks are joined,
The fluid device, wherein the fastening member also serves as an attachment screw for attaching the first fluid control device and the second fluid control device attached to the device attachment surface provided on the upper surfaces of the first block and the second block module. In the fluid equipment module according to any one of claims 1 to 4 ,
The fluid device module according to claim 1, wherein the lower side connecting member is formed of an integral plate. A first block having a device attachment surface for attaching the first fluid control device on the upper surface, a first flow path hole on the first side surface, and connection protrusions formed on the upper and lower portions of the first flow path hole;
A second block having a device attachment surface for attaching the second fluid control device on the upper surface, a second flow path hole on the first side surface, and connection protrusions formed on the upper and lower sides of the second flow path hole;
An upper connection member provided with a connection protrusion provided on the upper part of the first block and an upper pressing surface contacting both sides of the connection protrusion provided on the upper part of the second block;
A lower connection member including a connection protrusion provided at a lower portion of the first block and a lower pressing surface contacting both sides of the connection protrusion provided at a lower portion of the second block;
With
A tapered surface is formed on at least one of the connection protrusion of the first block and the connection protrusion of the second block, or the upper pressing surface and the lower pressing surface,
When the upper connecting member and the lower connecting member are moved in the proximity direction by the fastening means, the first block and the second block so that the first channel hole and the second channel hole communicate with each other. That the blocks are joined,
The fastening means includes
The upper connecting member;
The lower connection member disposed such that the upper pressing surface of the upper connection member faces the lower pressing surface;
A pressure receiving plate disposed on an upper part of the upper connecting member with an elastic member interposed therebetween;
A connecting plate disposed on top of the pressure receiving plate;
A connecting rod that penetrates the connecting plate, the pressure receiving plate, and the upper connecting member and is connected to the lower connecting member;
A lever that is rotatably held by the connecting plate and operates to press the pressure receiving plate;
Is a tightening attachment provided with
The fluid device module, wherein the first block and the second block can be joined and disassembled by operating the tightening attachment. A first block having a device attachment surface for attaching the first fluid control device on the upper surface, a first flow path hole on the first side surface, and connection protrusions formed on the upper and lower portions of the first flow path hole;
A second block having a device attachment surface for attaching the second fluid control device on the upper surface, a second flow path hole on the first side surface, and connection protrusions formed on the upper and lower sides of the second flow path hole;
An upper connection member provided with a connection protrusion provided on the upper part of the first block and an upper pressing surface contacting both sides of the connection protrusion provided on the upper part of the second block;
A lower connection member including a connection protrusion provided at a lower portion of the first block and a lower pressing surface contacting both sides of the connection protrusion provided at a lower portion of the second block;
With
A tapered surface is formed on at least one of the connection protrusion of the first block and the connection protrusion of the second block, or the upper pressing surface and the lower pressing surface,
When the upper connecting member and the lower connecting member are moved in the proximity direction by the fastening means, the first block and the second block so that the first channel hole and the second channel hole communicate with each other. That the blocks are joined,
The first projection of the first block is provided with the connection protrusion formed in a conical shape having the first flow path hole therein,
The first projection of the second block is provided with the connection protrusion formed in a conical shape having the second flow path hole therein,
The connection protrusion of the first block and the connection protrusion of the second block are fastened by the fastening means in a state of being sandwiched between the upper connection member and the lower connection member. A fluid device characterized in that a connection protrusion and a connection protrusion of the second block are pressed by the upper pressing surface and the lower pressing surface, and the first flow path hole and the second flow path hole communicate with each other. module. The fluid device module according to any one of claims 1 to 4 and claim 6 ,
A device mounting surface for mounting the third fluid control device on the upper surface;
A third block which is a hexahedron having a fifth flow path hole on the first side surface, and a connection protrusion formed on the upper and lower sides of the fifth flow path hole;
The first block is:
A sixth flow path hole is provided on the third side surface adjacent to the first side surface,
Connection protrusions are formed on one side of the upper part and the lower part of the sixth flow path hole,
An upper side connection member having a connection protrusion provided on one side of the upper part of the first block and an upper side pressing surface that contacts both sides of the connection protrusion provided on the upper side of the third block;
A lower side connecting member having a connection protrusion provided on one side of the lower portion of the first block and a lower side pressing surface that contacts both sides of the connection protrusion provided on the lower side of the third block;
With
A taper surface is formed on at least one of the connection protrusion of the first block and the connection protrusion of the third block, or the upper side pressing surface and the lower side pressing surface,
The first block and the sixth flow path are communicated with each other by moving the upper side connection member and the lower side connection member in the proximity direction by the fastening means. The third block is joined ,
The upper side connecting member and the lower side connecting member are arranged in parallel to each other;
The fluid device module , wherein the fastening means is attached from the device attachment surface side with a pair of fastening bolts across the fifth flow path hole and the sixth flow path hole .

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