JP4687902B2 - Photosensitive resin composition, display panel spacer and display panel - Google Patents
Photosensitive resin composition, display panel spacer and display panel Download PDFInfo
- Publication number
- JP4687902B2 JP4687902B2 JP2006155917A JP2006155917A JP4687902B2 JP 4687902 B2 JP4687902 B2 JP 4687902B2 JP 2006155917 A JP2006155917 A JP 2006155917A JP 2006155917 A JP2006155917 A JP 2006155917A JP 4687902 B2 JP4687902 B2 JP 4687902B2
- Authority
- JP
- Japan
- Prior art keywords
- weight
- photosensitive resin
- resin composition
- ether
- solvent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 239000011342 resin composition Substances 0.000 title claims description 38
- 125000006850 spacer group Chemical group 0.000 title claims description 27
- 229920001577 copolymer Polymers 0.000 claims description 41
- 239000002904 solvent Substances 0.000 claims description 38
- 150000001875 compounds Chemical class 0.000 claims description 37
- 239000000758 substrate Substances 0.000 claims description 22
- 238000009835 boiling Methods 0.000 claims description 19
- 239000000203 mixture Substances 0.000 claims description 19
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 claims description 18
- 230000005855 radiation Effects 0.000 claims description 18
- 125000003700 epoxy group Chemical group 0.000 claims description 13
- 150000001732 carboxylic acid derivatives Chemical class 0.000 claims description 9
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 claims description 9
- 239000003505 polymerization initiator Substances 0.000 claims description 9
- 239000012046 mixed solvent Substances 0.000 claims description 8
- 229920005989 resin Polymers 0.000 claims description 8
- 239000011347 resin Substances 0.000 claims description 8
- 238000002156 mixing Methods 0.000 claims description 6
- CNJRPYFBORAQAU-UHFFFAOYSA-N 1-ethoxy-2-(2-methoxyethoxy)ethane Chemical compound CCOCCOCCOC CNJRPYFBORAQAU-UHFFFAOYSA-N 0.000 claims description 4
- 150000001244 carboxylic acid anhydrides Chemical class 0.000 claims description 4
- 125000000217 alkyl group Chemical group 0.000 claims description 3
- 125000004432 carbon atom Chemical group C* 0.000 claims description 3
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 3
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 claims description 2
- 229920000642 polymer Polymers 0.000 claims description 2
- 239000005977 Ethylene Substances 0.000 claims 1
- -1 3, 4-epoxybutyl Chemical group 0.000 description 56
- 239000000243 solution Substances 0.000 description 40
- 229910052757 nitrogen Inorganic materials 0.000 description 28
- 238000000576 coating method Methods 0.000 description 24
- 239000011248 coating agent Substances 0.000 description 23
- DNIAPMSPPWPWGF-UHFFFAOYSA-N monopropylene glycol Natural products CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 20
- 239000000178 monomer Substances 0.000 description 18
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 14
- 238000001035 drying Methods 0.000 description 14
- 238000000034 method Methods 0.000 description 14
- 238000003860 storage Methods 0.000 description 13
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 12
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 12
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 10
- 239000004094 surface-active agent Substances 0.000 description 10
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 9
- WVDDGKGOMKODPV-UHFFFAOYSA-N Benzyl alcohol Chemical compound OCC1=CC=CC=C1 WVDDGKGOMKODPV-UHFFFAOYSA-N 0.000 description 9
- 239000000126 substance Substances 0.000 description 9
- 150000002148 esters Chemical class 0.000 description 8
- 239000007870 radical polymerization initiator Substances 0.000 description 8
- QYGBYAQGBVHMDD-XQRVVYSFSA-N (z)-2-cyano-3-thiophen-2-ylprop-2-enoic acid Chemical compound OC(=O)C(\C#N)=C/C1=CC=CS1 QYGBYAQGBVHMDD-XQRVVYSFSA-N 0.000 description 7
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 7
- 150000005215 alkyl ethers Chemical class 0.000 description 7
- 239000007864 aqueous solution Substances 0.000 description 7
- 238000011156 evaluation Methods 0.000 description 7
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 7
- 239000007787 solid Substances 0.000 description 7
- 238000001291 vacuum drying Methods 0.000 description 7
- NQBXSWAWVZHKBZ-UHFFFAOYSA-N 2-butoxyethyl acetate Chemical compound CCCCOCCOC(C)=O NQBXSWAWVZHKBZ-UHFFFAOYSA-N 0.000 description 6
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 6
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 6
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- 229940022663 acetate Drugs 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 6
- VPVSTMAPERLKKM-UHFFFAOYSA-N glycoluril Chemical compound N1C(=O)NC2NC(=O)NC21 VPVSTMAPERLKKM-UHFFFAOYSA-N 0.000 description 6
- 239000004973 liquid crystal related substance Substances 0.000 description 6
- 239000002245 particle Substances 0.000 description 6
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 5
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 5
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 5
- 230000001588 bifunctional effect Effects 0.000 description 5
- LJZJMIZQMNDARW-UHFFFAOYSA-N decan-3-yl 2-methylprop-2-enoate Chemical compound CCCCCCCC(CC)OC(=O)C(C)=C LJZJMIZQMNDARW-UHFFFAOYSA-N 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 5
- 238000006116 polymerization reaction Methods 0.000 description 5
- 229920001296 polysiloxane Polymers 0.000 description 5
- 238000002360 preparation method Methods 0.000 description 5
- 238000003756 stirring Methods 0.000 description 5
- 238000003786 synthesis reaction Methods 0.000 description 5
- UAJRSHJHFRVGMG-UHFFFAOYSA-N 1-ethenyl-4-methoxybenzene Chemical compound COC1=CC=C(C=C)C=C1 UAJRSHJHFRVGMG-UHFFFAOYSA-N 0.000 description 4
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 4
- WYGWHHGCAGTUCH-UHFFFAOYSA-N 2-[(2-cyano-4-methylpentan-2-yl)diazenyl]-2,4-dimethylpentanenitrile Chemical compound CC(C)CC(C)(C#N)N=NC(C)(C#N)CC(C)C WYGWHHGCAGTUCH-UHFFFAOYSA-N 0.000 description 4
- UHFFVFAKEGKNAQ-UHFFFAOYSA-N 2-benzyl-2-(dimethylamino)-1-(4-morpholin-4-ylphenyl)butan-1-one Chemical compound C=1C=C(N2CCOCC2)C=CC=1C(=O)C(CC)(N(C)C)CC1=CC=CC=C1 UHFFVFAKEGKNAQ-UHFFFAOYSA-N 0.000 description 4
- XLLIQLLCWZCATF-UHFFFAOYSA-N 2-methoxyethyl acetate Chemical compound COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 4
- VAJVDSVGBWFCLW-UHFFFAOYSA-N 3-Phenyl-1-propanol Chemical compound OCCCC1=CC=CC=C1 VAJVDSVGBWFCLW-UHFFFAOYSA-N 0.000 description 4
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 4
- DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 description 4
- 125000004849 alkoxymethyl group Chemical group 0.000 description 4
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 4
- 125000003709 fluoroalkyl group Chemical group 0.000 description 4
- 125000000524 functional group Chemical group 0.000 description 4
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- WGYKZJWCGVVSQN-UHFFFAOYSA-N propylamine Chemical compound CCCN WGYKZJWCGVVSQN-UHFFFAOYSA-N 0.000 description 4
- 239000011734 sodium Substances 0.000 description 4
- 229910052708 sodium Inorganic materials 0.000 description 4
- YXIWHUQXZSMYRE-UHFFFAOYSA-N 1,3-benzothiazole-2-thiol Chemical compound C1=CC=C2SC(S)=NC2=C1 YXIWHUQXZSMYRE-UHFFFAOYSA-N 0.000 description 3
- RRQYJINTUHWNHW-UHFFFAOYSA-N 1-ethoxy-2-(2-ethoxyethoxy)ethane Chemical compound CCOCCOCCOCC RRQYJINTUHWNHW-UHFFFAOYSA-N 0.000 description 3
- FPZWZCWUIYYYBU-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl acetate Chemical compound CCOCCOCCOC(C)=O FPZWZCWUIYYYBU-UHFFFAOYSA-N 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- WFDIJRYMOXRFFG-UHFFFAOYSA-N Acetic anhydride Chemical compound CC(=O)OC(C)=O WFDIJRYMOXRFFG-UHFFFAOYSA-N 0.000 description 3
- 239000004593 Epoxy Substances 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 239000012965 benzophenone Substances 0.000 description 3
- 235000019445 benzyl alcohol Nutrition 0.000 description 3
- VYHBFRJRBHMIQZ-UHFFFAOYSA-N bis[4-(diethylamino)phenyl]methanone Chemical compound C1=CC(N(CC)CC)=CC=C1C(=O)C1=CC=C(N(CC)CC)C=C1 VYHBFRJRBHMIQZ-UHFFFAOYSA-N 0.000 description 3
- 238000007334 copolymerization reaction Methods 0.000 description 3
- 229940019778 diethylene glycol diethyl ether Drugs 0.000 description 3
- SZXQTJUDPRGNJN-UHFFFAOYSA-N dipropylene glycol Chemical compound OCCCOCCCO SZXQTJUDPRGNJN-UHFFFAOYSA-N 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000003595 mist Substances 0.000 description 3
- 229940051841 polyoxyethylene ether Drugs 0.000 description 3
- 229920000056 polyoxyethylene ether Polymers 0.000 description 3
- 230000009257 reactivity Effects 0.000 description 3
- SSLASPHAKUVIRG-UHFFFAOYSA-N (2-methylcyclohexyl) prop-2-enoate Chemical compound CC1CCCCC1OC(=O)C=C SSLASPHAKUVIRG-UHFFFAOYSA-N 0.000 description 2
- YSBPNMOAQMQEHE-UHFFFAOYSA-N (2-methyloxiran-2-yl)methyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC1(C)CO1 YSBPNMOAQMQEHE-UHFFFAOYSA-N 0.000 description 2
- XPNGNIFUDRPBFJ-UHFFFAOYSA-N (2-methylphenyl)methanol Chemical compound CC1=CC=CC=C1CO XPNGNIFUDRPBFJ-UHFFFAOYSA-N 0.000 description 2
- FRASJONUBLZVQX-UHFFFAOYSA-N 1,4-naphthoquinone Chemical compound C1=CC=C2C(=O)C=CC(=O)C2=C1 FRASJONUBLZVQX-UHFFFAOYSA-N 0.000 description 2
- KBPLFHHGFOOTCA-UHFFFAOYSA-N 1-Octanol Chemical compound CCCCCCCCO KBPLFHHGFOOTCA-UHFFFAOYSA-N 0.000 description 2
- SDJHPPZKZZWAKF-UHFFFAOYSA-N 2,3-dimethylbuta-1,3-diene Chemical compound CC(=C)C(C)=C SDJHPPZKZZWAKF-UHFFFAOYSA-N 0.000 description 2
- OJVAMHKKJGICOG-UHFFFAOYSA-N 2,5-hexanedione Chemical compound CC(=O)CCC(C)=O OJVAMHKKJGICOG-UHFFFAOYSA-N 0.000 description 2
- OISVCGZHLKNMSJ-UHFFFAOYSA-N 2,6-dimethylpyridine Chemical compound CC1=CC=CC(C)=N1 OISVCGZHLKNMSJ-UHFFFAOYSA-N 0.000 description 2
- VXQBJTKSVGFQOL-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethyl acetate Chemical compound CCCCOCCOCCOC(C)=O VXQBJTKSVGFQOL-UHFFFAOYSA-N 0.000 description 2
- MHDULSOPQSUKBQ-UHFFFAOYSA-N 2-(2-chlorophenyl)-1-[2-(2-chlorophenyl)-4,5-diphenylimidazol-2-yl]-4,5-diphenylimidazole Chemical compound ClC1=CC=CC=C1C(N1C2(N=C(C(=N2)C=2C=CC=CC=2)C=2C=CC=CC=2)C=2C(=CC=CC=2)Cl)=NC(C=2C=CC=CC=2)=C1C1=CC=CC=C1 MHDULSOPQSUKBQ-UHFFFAOYSA-N 0.000 description 2
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 2
- LEJBBGNFPAFPKQ-UHFFFAOYSA-N 2-(2-prop-2-enoyloxyethoxy)ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOC(=O)C=C LEJBBGNFPAFPKQ-UHFFFAOYSA-N 0.000 description 2
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 2
- PFHOSZAOXCYAGJ-UHFFFAOYSA-N 2-[(2-cyano-4-methoxy-4-methylpentan-2-yl)diazenyl]-4-methoxy-2,4-dimethylpentanenitrile Chemical compound COC(C)(C)CC(C)(C#N)N=NC(C)(C#N)CC(C)(C)OC PFHOSZAOXCYAGJ-UHFFFAOYSA-N 0.000 description 2
- JFWFAUHHNYTWOO-UHFFFAOYSA-N 2-[(2-ethenylphenyl)methoxymethyl]oxirane Chemical compound C=CC1=CC=CC=C1COCC1OC1 JFWFAUHHNYTWOO-UHFFFAOYSA-N 0.000 description 2
- OCKQMFDZQUFKRD-UHFFFAOYSA-N 2-[(3-ethenylphenyl)methoxymethyl]oxirane Chemical compound C=CC1=CC=CC(COCC2OC2)=C1 OCKQMFDZQUFKRD-UHFFFAOYSA-N 0.000 description 2
- ZADXFVHUPXKZBJ-UHFFFAOYSA-N 2-[(4-ethenylphenyl)methoxymethyl]oxirane Chemical compound C1=CC(C=C)=CC=C1COCC1OC1 ZADXFVHUPXKZBJ-UHFFFAOYSA-N 0.000 description 2
- XFCMNSHQOZQILR-UHFFFAOYSA-N 2-[2-(2-methylprop-2-enoyloxy)ethoxy]ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCOCCOC(=O)C(C)=C XFCMNSHQOZQILR-UHFFFAOYSA-N 0.000 description 2
- HCLJOFJIQIJXHS-UHFFFAOYSA-N 2-[2-[2-(2-prop-2-enoyloxyethoxy)ethoxy]ethoxy]ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOCCOCCOC(=O)C=C HCLJOFJIQIJXHS-UHFFFAOYSA-N 0.000 description 2
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 2
- FDSUVTROAWLVJA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol;prop-2-enoic acid Chemical compound OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OCC(CO)(CO)COCC(CO)(CO)CO FDSUVTROAWLVJA-UHFFFAOYSA-N 0.000 description 2
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 2
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 2
- LWRBVKNFOYUCNP-UHFFFAOYSA-N 2-methyl-1-(4-methylsulfanylphenyl)-2-morpholin-4-ylpropan-1-one Chemical compound C1=CC(SC)=CC=C1C(=O)C(C)(C)N1CCOCC1 LWRBVKNFOYUCNP-UHFFFAOYSA-N 0.000 description 2
- BNCADMBVWNPPIZ-UHFFFAOYSA-N 2-n,2-n,4-n,4-n,6-n,6-n-hexakis(methoxymethyl)-1,3,5-triazine-2,4,6-triamine Chemical compound COCN(COC)C1=NC(N(COC)COC)=NC(N(COC)COC)=N1 BNCADMBVWNPPIZ-UHFFFAOYSA-N 0.000 description 2
- CPDZRCNACBWVFG-UHFFFAOYSA-N 2-n,2-n,4-n,4-n,6-n,6-n-hexakis(propoxymethyl)-1,3,5-triazine-2,4,6-triamine Chemical compound CCCOCN(COCCC)C1=NC(N(COCCC)COCCC)=NC(N(COCCC)COCCC)=N1 CPDZRCNACBWVFG-UHFFFAOYSA-N 0.000 description 2
- KUDUQBURMYMBIJ-UHFFFAOYSA-N 2-prop-2-enoyloxyethyl prop-2-enoate Chemical compound C=CC(=O)OCCOC(=O)C=C KUDUQBURMYMBIJ-UHFFFAOYSA-N 0.000 description 2
- VATRWWPJWVCZTA-UHFFFAOYSA-N 3-oxo-n-[2-(trifluoromethyl)phenyl]butanamide Chemical compound CC(=O)CC(=O)NC1=CC=CC=C1C(F)(F)F VATRWWPJWVCZTA-UHFFFAOYSA-N 0.000 description 2
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 2
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 2
- NTPLXRHDUXRPNE-UHFFFAOYSA-N 4-methoxyacetophenone Chemical compound COC1=CC=C(C(C)=O)C=C1 NTPLXRHDUXRPNE-UHFFFAOYSA-N 0.000 description 2
- SSIZVBOERWVGFR-UHFFFAOYSA-N 5-(oxiran-2-yl)pentyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCCCCC1CO1 SSIZVBOERWVGFR-UHFFFAOYSA-N 0.000 description 2
- FIHBHSQYSYVZQE-UHFFFAOYSA-N 6-prop-2-enoyloxyhexyl prop-2-enoate Chemical compound C=CC(=O)OCCCCCCOC(=O)C=C FIHBHSQYSYVZQE-UHFFFAOYSA-N 0.000 description 2
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- LCFVJGUPQDGYKZ-UHFFFAOYSA-N Bisphenol A diglycidyl ether Chemical class C=1C=C(OCC2OC2)C=CC=1C(C)(C)C(C=C1)=CC=C1OCC1CO1 LCFVJGUPQDGYKZ-UHFFFAOYSA-N 0.000 description 2
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 2
- SOGAXMICEFXMKE-UHFFFAOYSA-N Butylmethacrylate Chemical compound CCCCOC(=O)C(C)=C SOGAXMICEFXMKE-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- IEPRKVQEAMIZSS-UHFFFAOYSA-N Di-Et ester-Fumaric acid Natural products CCOC(=O)C=CC(=O)OCC IEPRKVQEAMIZSS-UHFFFAOYSA-N 0.000 description 2
- IEPRKVQEAMIZSS-WAYWQWQTSA-N Diethyl maleate Chemical compound CCOC(=O)\C=C/C(=O)OCC IEPRKVQEAMIZSS-WAYWQWQTSA-N 0.000 description 2
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
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Landscapes
- Liquid Crystal (AREA)
- Materials For Photolithography (AREA)
Description
本発明は、感光性樹脂組成物、表示パネル用スペーサーおよび表示パネルに関する。さらに詳しくは、液晶表示パネルやタッチパネルなどの表示パネルに用いられるスペーサーを形成するための材料として好適な感光性樹脂組成物、当該組成物から形成された表示パネル用スペーサーおよび当該スペーサーを具備してなる表示パネルに関する。 The present invention relates to a photosensitive resin composition, a display panel spacer, and a display panel. More specifically, a photosensitive resin composition suitable as a material for forming a spacer used in a display panel such as a liquid crystal display panel or a touch panel, a display panel spacer formed from the composition, and the spacer. It relates to a display panel.
液晶表示パネルには、従来から、2枚の基板間の間隔(セルギャップ)を一定に保つため、所定の粒径を有するガラスビーズ、プラスチックビーズ等のスペーサー粒子が使用されているが、これらスペーサー粒子は、ガラス基板などの透明基板上にランダムに散布されるため、画素形成領域にスペーサー粒子が存在すると、スペーサー粒子の写り込み現象を生じたり、入射光が散乱を受け、液晶パネルのコントラストが低下するという問題があった。
そこで、これらの問題を解決するために、スペーサーをフォトリソグラフィーにより形成する方法が採用されるようになってきた。この方法は、感光性樹脂組成物を基板上に塗布し、所定のマスクを介して紫外線を露光したのち現像して、ドット状やストライプ状のスペーサーを形成するものであり、画素形成領域以外の所定の場所にのみスペーサーを形成することができるため、前述したような問題は基本的には解決される。
Conventionally, liquid crystal display panels use spacer particles such as glass beads and plastic beads having a predetermined particle size in order to keep the distance (cell gap) between two substrates constant. Since particles are randomly distributed on a transparent substrate such as a glass substrate, the presence of spacer particles in the pixel formation region may cause a phenomenon of spacer particle reflection or scattering of incident light, resulting in a contrast of the liquid crystal panel. There was a problem of lowering.
In order to solve these problems, a method of forming a spacer by photolithography has been adopted. In this method, a photosensitive resin composition is applied onto a substrate, exposed to ultraviolet rays through a predetermined mask, and then developed to form dot-like or stripe-like spacers. Since the spacer can be formed only at a predetermined place, the above-described problem is basically solved.
ところで、液晶表示パネルの製造において、生産性向上、大型画面への対応との観点から、基板サイズの大型化が進行している。基板サイズは、300mm×400mmの第一世代、370mm×470mmの第二世代、620mm×750mmの第三世代、960mm×1100mmの第四世代を経て、1,100mm×1,300mmの第五世代が現在主流となっている。さらに、1,500mm×1,850mmの第六世代、1,850mm×2,100mmの第七世代と基板サイズは今後さらに大型化する。
基板サイズが小型、例えば370mm×470mm以下の場合、感光性樹脂組成物は基板上中央に滴下され、スピン塗布法により塗布される。この方法では、塗布に多量の感光性樹脂組成物溶液を必要とし、さらに大型基板には対応できないという欠点がある。
基板サイズが960mm×1,100mm以下の場合は、感光性樹脂組成物溶液の省液を目的として、スリット&スピン法で塗布が行われている。この方法はスリットノズルから感光性樹脂組成物溶液を基板面に塗布し、その後基板を回転することにより、均一な塗膜を形成する。この方法の場合、省液には効果があるが、第五世代以降の基板サイズへの対応は難しい。
By the way, in the manufacture of a liquid crystal display panel, the substrate size has been increased from the viewpoint of improving productivity and adapting to a large screen. Substrate sizes are 300mm x 400mm first generation, 370mm x 470mm second generation, 620mm x 750mm third generation, 960mm x 1100mm fourth generation, then 1,100mm x 1,300mm fifth generation Currently mainstream. Further, the sixth generation of 1,500 mm × 1,850 mm, the seventh generation of 1,850 mm × 2,100 mm, and the substrate size will be further increased in the future.
When the substrate size is small, for example, 370 mm × 470 mm or less, the photosensitive resin composition is dropped onto the center of the substrate and applied by a spin coating method. This method has a drawback that a large amount of the photosensitive resin composition solution is required for coating, and it cannot be applied to a large substrate.
When the substrate size is 960 mm × 1,100 mm or less, the coating is performed by the slit & spin method for the purpose of saving the photosensitive resin composition solution. In this method, a photosensitive resin composition solution is applied to a substrate surface from a slit nozzle, and then the substrate is rotated to form a uniform coating film. This method is effective for saving liquid, but it is difficult to cope with the substrate size from the fifth generation onward.
このような背景から、基板サイズの大型化に伴い、スリットダイコーターによる塗布が行われるようになってきている。しかし、スリットダイコーターの場合、良好な塗布膜を得るためには溶剤種の選択が重要となる。樹脂溶解性の悪い溶剤を使用すると、保存安定性が悪化する。また、高沸点の溶剤を使用すると、塗布工程後の減圧乾燥工程で必要時間が長くなる。減圧乾燥工程時間が増大することは、生産性向上の観点から望ましくない。逆に低沸点溶剤のみを使用すると、スリットノズルの先端が乾きやすく、塗布時に縦筋を生じやすい。更に、スリットダイコーターを用いて塗布した塗膜表面の全面に、雲状のムラ(以下、「モヤムラ」という。)が観察されることがある。このようなモヤムラが発生すると、液晶パネルの歩留まりを低下させることとなり、問題となっている。このような理由から、スリットダイコーター法において、樹脂の保存安定性が良好で減圧乾燥工程時間が短く且つ塗膜表面が良好な感光性樹脂組成物溶液が強く望まれていた。
From such a background, as the substrate size increases, coating by a slit die coater has been performed. However, in the case of a slit die coater, selection of the solvent type is important in order to obtain a good coating film. If a solvent having poor resin solubility is used, the storage stability deteriorates. Moreover, when a high boiling point solvent is used, a required time becomes long in the reduced-pressure drying step after the coating step. An increase in the vacuum drying process time is undesirable from the viewpoint of improving productivity. On the other hand, when only a low boiling point solvent is used, the tip of the slit nozzle tends to dry, and vertical stripes are likely to occur during application. Further, the entire surface of the coated film surface by using a slit die coater, a cloud-like unevenness (hereinafter, referred to as "Moyamura".) Is sometimes observed. When such haze is generated, the yield of the liquid crystal panel is lowered, which is a problem. For these reasons, in the slit die coater method, there has been a strong demand for a photosensitive resin composition solution that has good resin storage stability, a short drying time for reduced pressure, and a good coating surface.
そこで、本発明の目的は、樹脂の保存安定性が良好で減圧乾燥工程時間が短く、スリットノズルが乾きにくく且つ塗膜表面が良好な、スリットダイコーター法に好適な感光性樹脂組成物溶液を提供することにある。
本発明の他の目的は、上記感光性樹脂組成物溶液から形成された表示パネル用スペーサーおよびそれを備えた表示パネルを提供することにある。
本発明のさらに他の目的および利点は以下の説明から明らかになろう。
Accordingly, an object of the present invention is to provide a photosensitive resin composition solution suitable for the slit die coater method, in which the storage stability of the resin is good, the vacuum drying process time is short, the slit nozzle is difficult to dry, and the coating film surface is good. It is to provide.
Another object of the present invention is to provide a display panel spacer formed from the photosensitive resin composition solution and a display panel including the same.
Still other objects and advantages of the present invention will become apparent from the following description.
本発明によると、前記目的および利点は、第一に、
アルカリ可溶性共重合体〔A〕、エチレン性不飽和結合を有する重合性化合物〔B〕、感放射線性重合開始剤〔C〕および溶剤〔D〕を含有する感光性樹脂組成物であって、
前記溶剤〔D〕が、
下記式(1)
A photosensitive resin composition comprising an alkali-soluble copolymer [A], a polymerizable compound having an ethylenically unsaturated bond [B], a radiation-sensitive polymerization initiator [C], and a solvent [D],
The solvent [D] is
Following formula (1)
(式中、R1〜R5はそれぞれ独立に水素原子または炭素数1〜6のアルキル基であり、nは1〜6の整数である。)
で表される化合物2〜20重量%、
ジエチレングリコールジメチルエーテルおよびジエチレングリコールメチルエチルエーテルの少なくともいずれか一方30〜75重量%、および
沸点が100℃〜150℃の溶剤20〜55重量%を含有する混合溶剤でありそしてスリットダイコーターにより基板に塗布される、ことを特徴とする前記感光性樹脂組成物によって達成される。
本発明によると、前記目的および利点は、第二に、
本発明の感光性樹脂組成物から形成された表示パネル用スペーサーによって達成される。
本発明によると、前記目的および利点は、第三に、
本発明の表示パネル用スペーサーを備えた表示パネルによって達成される。
(Wherein, R 1 to R 5 are each independently a hydrogen atom or an alkyl group having 1 to 6 carbon atoms, n represents an integer from 1 to 6.)
2 to 20% by weight of a compound represented by
30 to 75% by weight of at least one of diethylene glycol dimethyl ether and diethylene glycol methyl ethyl ether, and
Boiling point is applied to a substrate by mixing a solvent and a slit die coater containing 20-55 wt% solvent 100 ° C. to 150 DEG ° C., is accomplished by the photosensitive resin composition characterized by.
According to the present invention, the objects and advantages are secondly:
This is achieved by a display panel spacer formed from the photosensitive resin composition of the present invention.
According to the present invention, the object and advantages are thirdly:
This is achieved by a display panel having the display panel spacer of the present invention.
本発明の感光性樹脂組成物は、高感度でマスクパターンの設計サイズを忠実に再現でき、かつ基板との密着性に優れ、1,500J/m2以下の露光量で十分なスペーサー形状および膜厚を得ることを可能とし、また強度、耐熱性等にも優れ、低露光量領域におけるスペーサーの形状、膜厚の制御性に優れ、保存期間中、使用中に異物が発生しにくい。 The photosensitive resin composition of the present invention has high sensitivity, can faithfully reproduce the design size of the mask pattern, has excellent adhesion to the substrate, and has a sufficient spacer shape and film with an exposure amount of 1,500 J / m 2 or less. It is possible to obtain a thickness, and is excellent in strength, heat resistance, etc., excellent in controllability of the spacer shape and film thickness in a low exposure amount region, and hardly generates foreign matters during storage and use.
本発明において用いられる感光性樹脂組成物は、アルカリ可溶性共重合体〔A〕、エチレン性不飽和結合を有する重合性化合物〔B〕、感放射線性重合開始剤〔C〕ならびに上記式(1)で表される化合物2〜20重量%、
ジエチレングリコールジメチルエーテルおよびジエチレングリコールメチルエチルエーテルの少なくともいずれか一方30〜75重量%、および
沸点が100℃〜150℃の溶剤20〜55重量%を含有する混合溶剤〔D〕からなる。
The photosensitive resin composition used in the present invention, A alkali-soluble copolymer (A), a polymerizable compound having an ethylenically unsaturated bond (B), the radiation-sensitive polymerization initiator (C) and the above equation (1 compound 2 20 wt% expressed in)
30 to 75% by weight of at least one of diethylene glycol dimethyl ether and diethylene glycol methyl ethyl ether, and
It consists of a mixed solvent [D] containing 20 to 55% by weight of a solvent having a boiling point of 100 to 150 ° C.
−アルカリ可溶性共重合体〔A〕−
上記〔A〕成分は、例えば(a1)エチレン性不飽和カルボン酸および/またはエチレン性不飽和カルボン酸無水物と(a2)エポキシ基含有エチレン性不飽和化合物と(a3)他のエチレン性不飽和化合物との共重合体(以下、「共重合体〔A〕」という。)からなる。
共重合体〔A〕を構成する各成分のうち、(a1)エチレン性不飽和カルボン酸および/またはエチレン性不飽和カルボン酸無水物(以下、これらをまとめて「不飽和カルボン酸系単量体(a1)」という。)としては、例えばアクリル酸、メタクリル酸、クロトン酸、2−メタクリロイロキシエチルコハク酸、2−メタクリロイロキシエチルヘキサヒドロフタル酸等のモノカルボン酸;マレイン酸、フマル酸、シトラコン酸、メサコン酸、イタコン酸等のジカルボン酸;前記ジカルボン酸の無水物等を挙げることができる。
これらの不飽和カルボン酸系単量体(a1)のうち、共重合反応性、得られる共重合体のアルカリ水溶液に対する溶解性および入手が容易である点から、アクリル酸、メタクリル酸、無水マレイン酸等が好ましい。
不飽和カルボン酸系単量体(a1)は、単独でまたは2種以上を混合して使用することができる。
共重合体〔A〕において、不飽和カルボン酸系単量体(a1)に由来する繰返し単位の含有率は、好ましくは5〜50重量%、さらに好ましくは10〜40重量%、特に好ましくは15〜30重量%である。不飽和カルボン酸系単量体(a1)に由来する繰返し単位の含有率が5重量%未満であると、アルカリ水溶液に対する溶解性が低下する傾向があり、一方50重量%を超えると、アルカリ水溶液に対する溶解性が大きくなりすぎるおそれがある。
-Alkali-soluble copolymer [A]-
The component [A] is, for example, (a1) ethylenically unsaturated carboxylic acid and / or ethylenically unsaturated carboxylic acid anhydride, (a2) an epoxy group-containing ethylenically unsaturated compound, and (a3) other ethylenically unsaturated compounds. It consists of a copolymer with a compound (hereinafter referred to as “copolymer [A]”).
Among the components constituting the copolymer [A], (a1) an ethylenically unsaturated carboxylic acid and / or an ethylenically unsaturated carboxylic acid anhydride (hereinafter referred to as “unsaturated carboxylic acid monomer”) Examples of (a1) "include monocarboxylic acids such as acrylic acid, methacrylic acid, crotonic acid, 2-methacryloyloxyethyl succinic acid, 2-methacryloyloxyethyl hexahydrophthalic acid; maleic acid, fumaric acid And dicarboxylic acids such as citraconic acid, mesaconic acid and itaconic acid; and anhydrides of the dicarboxylic acid.
Among these unsaturated carboxylic acid monomers (a1), acrylic acid, methacrylic acid, maleic anhydride are available from the viewpoints of copolymerization reactivity, solubility of the resulting copolymer in an alkaline aqueous solution and easy availability. Etc. are preferred.
The unsaturated carboxylic acid monomer (a1) can be used alone or in admixture of two or more.
In the copolymer [A], the content of the repeating unit derived from the unsaturated carboxylic acid monomer (a1) is preferably 5 to 50% by weight, more preferably 10 to 40% by weight, and particularly preferably 15%. ~ 30% by weight. If the content of the repeating unit derived from the unsaturated carboxylic acid monomer (a1) is less than 5% by weight, the solubility in an alkaline aqueous solution tends to decrease, whereas if it exceeds 50% by weight, the alkaline aqueous solution There is a possibility that the solubility in is too large.
また、(a2)エポキシ基含有エチレン性不飽和化合物(以下、「エポキシ基含有単量体(a2)」という。)としては、例えば、アクリル酸グリシジル、アクリル酸2−メチルグリシジル、アクリル酸3,4−エポキシブチル、アクリル酸6,7−エポキシヘプチル、アクリル酸3,4−エポキシシクロヘキシル等のアクリル酸エポキシアルキルエステル;メタクリル酸グリシジル、メタクリル酸2−メチルグリシジル、メタクリル酸3,4−エポキシブチル、メタクリル酸6,7−エポキシヘプチル、メタクリル酸3,4−エポキシシクロヘキシル等のメタクリル酸エポキシアルキルエステル;α−エチルアクリル酸グリシジル、α−n−プロピルアクリル酸グリシジル、α−n−ブチルアクリル酸グリシジル、α−エチルアクリル酸6,7−エポキシヘプチル等のα−アルキルアクリル酸エポキシアルキルエステル;o−ビニルベンジルグリシジルエーテル、m−ビニルベンジルグリシジルエーテル、p−ビニルベンジルグリシジルエーテル等のグリシジルエーテルを挙げることができる。 Examples of the (a2) epoxy group-containing ethylenically unsaturated compound (hereinafter referred to as “epoxy group-containing monomer (a2)”) include, for example, glycidyl acrylate, 2-methylglycidyl acrylate, 3, 4-epoxybutyl, acrylic acid 6,7-epoxyheptyl, acrylic acid epoxy alkyl ester such as 3,4-epoxycyclohexyl acrylate; glycidyl methacrylate, 2-methylglycidyl methacrylate, 3,4-epoxybutyl methacrylate, Methacrylic acid epoxyalkyl esters such as 6,7-epoxyheptyl methacrylate, 3,4-epoxycyclohexyl methacrylate; glycidyl α-ethyl acrylate, glycidyl α-n-propyl acrylate, glycidyl α-n-butyl acrylate, α-ethylacrylic acid 6, - alpha-alkyl acrylic acid epoxy esters and epoxy heptyl; can be exemplified o- vinylbenzyl glycidyl ether, m- vinylbenzyl glycidyl ether, glycidyl ethers such as p- vinylbenzyl glycidyl ether.
これらのエポキシ基含有単量体(a2)のうち、共重合反応性およびスペーサーの強度の点から、メタクリル酸グリシジル、メタクリル酸2−メチルグリシジル、メタクリル酸6,7−エポキシヘプチル、o−ビニルベンジルグリシジルエーテル、m−ビニルベンジルグリシジルエーテル、p−ビニルベンジルグリシジルエーテル等が好ましい。
エポキシ基含有単量体(a2)は、単独でまたは2種以上を混合して使用することができる。
共重合体〔A〕において、エポキシ基含有単量体(a2)に由来する繰返し単位の含有率は、好ましくは10〜70重量%、さらに好ましくは20〜60重量%、特に好ましくは30〜50重量%である。エポキシ基含有単量体(a2)に由来する繰返し単位の含有率が10重量%未満であると、得られるスペーサーの強度が低下する傾向があり、一方70重量%を超えると、得られる共重合体の保存安定性が低下する傾向がある。
Among these epoxy group-containing monomers (a2), from the viewpoint of copolymerization reactivity and spacer strength, glycidyl methacrylate, 2-methylglycidyl methacrylate, 6,7-epoxyheptyl methacrylate, o-vinylbenzyl Glycidyl ether, m-vinylbenzyl glycidyl ether, p-vinylbenzyl glycidyl ether and the like are preferable.
The epoxy group-containing monomer (a2) can be used alone or in admixture of two or more.
In the copolymer [A], the content of the repeating unit derived from the epoxy group-containing monomer (a2) is preferably 10 to 70% by weight, more preferably 20 to 60% by weight, and particularly preferably 30 to 50%. % By weight. When the content of the repeating unit derived from the epoxy group-containing monomer (a2) is less than 10% by weight, the strength of the obtained spacer tends to be reduced. The storage stability of the coalesced tends to be reduced.
さらに、(a3)他のエチレン性不飽和化合物(以下、単に「他の単量体(a3)」という。)としては、例えば、アクリル酸メチル、アクリル酸i−プロピル等のアクリル酸アルキルエステル;メタクリル酸メチル、メタクリル酸エチル、メタクリル酸n−ブチル、メタクリル酸sec−ブチル、メタクリル酸t−ブチル等のメタクリル酸アルキルエステル;アクリル酸シクロヘキシル、アクリル酸2−メチルシクロヘキシル、アクリル酸トリシクロ[ 5.2.1.02,6] デカン−8−イル、アクリル酸2−(トリシクロ[ 5.2.1.02,6] デカン−8−イルオキシ)エチル、アクリル酸イソボロニル等のアクリル酸脂環式エステル;メタクリル酸シクロヘキシル、メタクリル酸2−メチルシクロヘキシル、メタクリル酸トリシクロ[ 5.2.1.02,6] デカン−8−イル、メタクリル酸2−(トリシクロ[ 5.2.1.02,6] デカン−8−イルオキシ)エチル、メタクリル酸イソボロニル等のメタクリル酸脂環式エステル;アクリル酸フェニル、アクリル酸ベンジル等のアクリル酸のアリールエステルあるいはアラルキルエステル;メタクリル酸フェニル、メタクリル酸ベンジル等のメタクリル酸のアリールエステルあるいはアラルキルエステル;マレイン酸ジエチル、フマル酸ジエチル、イタコン酸ジエチル等のジカルボン酸ジアルキルエステル;メタクリル酸2−ヒドロキシエチル、メタクリル酸2−ヒドロキシプロピル等のメタクリル酸ヒドロキシアルキルエステル;メタクリル酸テトラヒドロフルフリル、メタクリル酸テトラヒドロフリル、メタクリル酸テトラヒドロフピラン−2−メチル等の酸素一原子を含む不飽和複素五または六員環メタクリル酸エステル;スチレン、α−メチルスチレン、m−メチルスチレン、p−メチルスチレン、p−メトキシスチレン等のビニル芳香族化合物;1,3−ブタジエン、イソプレン、2,3−ジメチル−1,3−ブタジエン等の共役ジエン系化合物のほか、アクリロニトリル、メタクリロニトリル、アクリルアミド、メタクリルアミド、塩化ビニル、塩化ビニリデン、酢酸ビニル等を挙げることができる。 Furthermore, (a3) other ethylenically unsaturated compounds (hereinafter simply referred to as “other monomers (a3)”) include, for example, acrylic acid alkyl esters such as methyl acrylate and i-propyl acrylate; Methacrylic acid alkyl esters such as methyl methacrylate, ethyl methacrylate, n-butyl methacrylate, sec-butyl methacrylate, t-butyl methacrylate; cyclohexyl acrylate, 2-methylcyclohexyl acrylate, tricycloacrylate [5.2 .1.0 2,6 ] decan-8-yl, acrylic acid 2- (tricyclo [5.2.1.0 2,6 ] decan-8-yloxy) ethyl, acrylic acid alicyclic, etc. Esters: cyclohexyl methacrylate, 2-methylcyclohexyl methacrylate, trimethyl methacrylate B [5.2.1.0 2,6] decan-8-yl methacrylate, 2 (tricyclo [5.2.1.0 2,6] decan-8-yloxy) ethyl, such as methacrylic acid isobornyl Methacrylic acid alicyclic ester; aryl ester or aralkyl ester of acrylic acid such as phenyl acrylate and benzyl acrylate; aryl ester or aralkyl ester of methacrylic acid such as phenyl methacrylate and benzyl methacrylate; diethyl maleate and diethyl fumarate Dialkyl esters of dicarboxylic acids such as diethyl itaconate; hydroxyalkyl esters of methacrylic acid such as 2-hydroxyethyl methacrylate and 2-hydroxypropyl methacrylate; tetrahydrofurfuryl methacrylate, tetrahydrofuryl methacrylate, methacrylate Unsaturated hetero 5- or 6-membered methacrylic acid ester containing one oxygen atom such as tetrahydrofupyran-2-methyl lurate; styrene, α-methyl styrene, m-methyl styrene, p-methyl styrene, p-methoxy styrene, etc. In addition to conjugated diene compounds such as 1,3-butadiene, isoprene and 2,3-dimethyl-1,3-butadiene, acrylonitrile, methacrylonitrile, acrylamide, methacrylamide, vinyl chloride, vinylidene chloride And vinyl acetate.
これらの他の単量体(a3)のうち、共重合反応性および得られる共重合体のアルカリ水溶液に対する溶解性の点から、アクリル酸2−メチルシクロヘキシル、メタクリル酸t−ブチル、メタクリル酸トリシクロ[ 5.2.1.02,6] デカン−8−イル、スチレン、p−メトキシスチレン、メタクリル酸テトラヒドロフルフリル、1,3−ブタジエン等が好ましい。
共重合体〔A〕において、他の単量体(a3)は、単独でまたは2種以上を混合して使用することができる。
共重合体〔A〕において、他の単量体(a3)に由来する繰返し単位の含有率は、好ましくは10〜70重量%、さらに好ましくは20〜50重量%、特に好ましくは30〜50重量%である。他の単量体(a3)に由来する繰返し単位の含有率が10重量%未満であると、得られる共重合体の保存安定性が低下する傾向にあり、一方70重量%を超えると、得られる共重合体のアルカリ水溶液に対する溶解性が低下する傾向がある。
Among these other monomers (a3), from the viewpoint of copolymerization reactivity and solubility of the resulting copolymer in an alkaline aqueous solution, 2-methylcyclohexyl acrylate, t-butyl methacrylate, tricyclomethacrylate [ 5.2.1.0 2,6 ] Decan-8-yl, styrene, p-methoxystyrene, tetrahydrofurfuryl methacrylate, 1,3-butadiene and the like are preferable.
In the copolymer [A], the other monomer (a3) can be used alone or in admixture of two or more.
In the copolymer [A], the content of the repeating unit derived from the other monomer (a3) is preferably 10 to 70% by weight, more preferably 20 to 50% by weight, particularly preferably 30 to 50% by weight. %. When the content of the repeating unit derived from the other monomer (a3) is less than 10% by weight, the storage stability of the resulting copolymer tends to be lowered. There exists a tendency for the solubility with respect to the aqueous alkali solution of the copolymer obtained to fall.
共重合体〔A〕は、カルボキシル基および/またはカルボン酸無水物基とエポキシ基とを有しており、アルカリ水溶液に対して適度の溶解性を有するとともに、特別な硬化剤を併用しなくとも加熱により容易に硬化させることができる。当該共重合体を含有する感光性樹脂組成物は、現像する際に現像残りおよび膜減りを生じることなく、所定パターンのスペーサーを容易に形成することができる。
共重合体〔A〕は、例えば、不飽和カルボン酸系単量体(a1)、エポキシ基含有単量体(a2)および他の単量体(a3)を、適当な溶媒中、ラジカル重合開始剤の存在下で重合することにより製造することができる。
共重合体〔A〕の製造に用いられる溶媒としては、例えば、アルコール、エーテル、グリコールエーテル、エチレングリコールアルキルエーテルアセテート、ジエチレングリコール、ジプロピレングリコール、プロピレングリコールモノアルキルエーテル、プロピレングリコールアルキルエーテルアセテート、プロピレングリコールアルキルエーテルプロピオネート、芳香族炭化水素、ケトン、エステルなどを挙げることができる。
The copolymer [A] has a carboxyl group and / or a carboxylic anhydride group and an epoxy group, has an appropriate solubility in an alkaline aqueous solution, and does not require the use of a special curing agent. It can be easily cured by heating. The photosensitive resin composition containing the copolymer can easily form a spacer having a predetermined pattern without developing residue and film loss during development.
For example, the copolymer [A] is obtained by starting radical polymerization of an unsaturated carboxylic acid monomer (a1), an epoxy group-containing monomer (a2), and another monomer (a3) in an appropriate solvent. It can manufacture by superposing | polymerizing in presence of an agent.
Examples of the solvent used for the production of the copolymer [A] include alcohol, ether, glycol ether, ethylene glycol alkyl ether acetate, diethylene glycol, dipropylene glycol, propylene glycol monoalkyl ether, propylene glycol alkyl ether acetate, propylene glycol. Examples include alkyl ether propionates, aromatic hydrocarbons, ketones and esters.
これらの具体例としては、アルコールとして、例えばメタノール、エタノール、ベンジルアルコール、2−フェニルエチルアルコール、3−フェニル−1−プロパノールなど;
エーテル類として、例えばテトラヒドロフランなど;
グリコールエーテルとして、例えばエチレングリコールモノメチルエーテル、エチレングリコールモノエチルエーテルなど;
エチレングリコールアルキルエーテルアセテートとして、例えばメチルセロソルブアセテート、エチルセロソルブアセテート、エチレングリコールモノブチルエーテルアセテート、エチレングリコールモノエチルエーテルアセテートなど;
ジエチレングリコールとして、例えばジエチレングリコールモノメチルエーテル、ジエチレングリコールモノエチルエーテル、ジエチレングリコールジメチルエーテル、ジエチレングリコールジエチルエーテル、ジエチレングリコールエチルメチルエーテルなど;
ジプロピレングリコールとして、例えばジプロピレングリコールモノメチルエーテル、ジプロピレングリコールモノエチルエーテル、ジプロピレングリコールジメチルエーテル、ジプロピレングリコールジエチルエーテル、ジプロピレングリコールエチルメチルエーテルなど;
Specific examples thereof include alcohols such as methanol, ethanol, benzyl alcohol, 2-phenylethyl alcohol, and 3-phenyl-1-propanol;
Ethers such as tetrahydrofuran;
Examples of glycol ethers include ethylene glycol monomethyl ether and ethylene glycol monoethyl ether;
Examples of ethylene glycol alkyl ether acetate include methyl cellosolve acetate, ethyl cellosolve acetate, ethylene glycol monobutyl ether acetate, and ethylene glycol monoethyl ether acetate;
Examples of diethylene glycol include diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, and diethylene glycol ethyl methyl ether.
Examples of dipropylene glycol include dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, dipropylene glycol dimethyl ether, dipropylene glycol diethyl ether, and dipropylene glycol ethyl methyl ether;
プロピレングリコールモノアルキルエーテルとして、例えばプロピレングリコールモノメチルエーテル、プロピレングリコールモノエチルエーテル、プロピレングリコールモノプロピルエーテル、プロピレングリコールモノブチルエーテルなど;
プロピレングリコールアルキルエーテルアセテートとして、例えばプロピレングリコールメチルエーテルアセテート、プロピレングリコールエチルエーテルアセテート、プロピレングリコールプロピルエーテルアセテート、プロピレングリコールブチルエーテルアセテートなど;
プロピレングリコールアルキルエーテルプロピオネートとして、例えばプロピレングリコールメチルエーテルプロピオネート、プロピレングリコールエチルエーテルプロピオネート、プロピレングリコールプロピルエーテルプロピオネート、プロピレングリコールブチルエーテルプロピオネートなど;
芳香族炭化水素として、例えばトルエン、キシレンなど;
ケトンとして、例えばメチルエチルケトン、シクロヘキサノン、4−ヒドロキシ−4−メチル−2−ペンタノンなど;
Examples of propylene glycol monoalkyl ethers include propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monopropyl ether, propylene glycol monobutyl ether;
Examples of propylene glycol alkyl ether acetates include propylene glycol methyl ether acetate, propylene glycol ethyl ether acetate, propylene glycol propyl ether acetate, propylene glycol butyl ether acetate;
As propylene glycol alkyl ether propionate, for example, propylene glycol methyl ether propionate, propylene glycol ethyl ether propionate, propylene glycol propyl ether propionate, propylene glycol butyl ether propionate, etc .;
Aromatic hydrocarbons such as toluene, xylene, etc .;
Examples of ketones include methyl ethyl ketone, cyclohexanone, 4-hydroxy-4-methyl-2-pentanone, etc .;
エステルとして、例えば酢酸メチル、酢酸エチル、酢酸プロピル、酢酸ブチル、2−ヒドロキシプロピオン酸エチル、2−ヒドロキシ−2−メチルプロピオン酸メチル、2−ヒドロキシ−2−メチルプロピオン酸エチル、ヒドロキシ酢酸メチル、ヒドロキシ酢酸エチル、ヒドロキシ酢酸ブチル、乳酸メチル、乳酸エチル、乳酸プロピル、乳酸ブチル、3−ヒドロキシプロピオン酸メチル、3−ヒドロキシプロピオン酸エチル、3−ヒドロキシプロピオン酸プロピル、3−ヒドロキシプロピオン酸ブチル、2−ヒドロキシ−3−メチルブタン酸メチル、メトキシ酢酸メチル、メトキシ酢酸エチル、メトキシ酢酸プロピル、メトキシ酢酸ブチル、エトキシ酢酸メチル、エトキシ酢酸エチル、エトキシ酢酸プロピル、エトキシ酢酸ブチル、プロポキシ酢酸メチル、プロポキシ酢酸エチル、プロポキシ酢酸プロピル、プロポキシ酢酸ブチル、ブトキシ酢酸メチル、ブトキシ酢酸エチル、ブトキシ酢酸プロピル、ブトキシ酢酸ブチル、2−メトキシプロピオン酸メチル、2−メトキシプロピオン酸エチル、2−メトキシプロピオン酸プロピル、2−メトキシプロピオン酸ブチル、2−エトキシプロピオン酸メチル、2−エトキシプロピオン酸エチル、2−エトキシプロピオン酸プロピル、2−エトキシプロピオン酸ブチル、2−ブトキシプロピオン酸メチル、2−ブトキシプロピオン酸エチル、2−ブトキシプロピオン酸プロピル、2−ブトキシプロピオン酸ブチル、3−メトキシプロピオン酸メチル、3−メトキシプロピオン酸エチル、3−メトキシプロピオン酸プロピル、3−メトキシプロピオン酸ブチル、3−エトキシプロピオン酸メチル、3−エトキシプロピオン酸エチル、3−エトキシプロピオン酸プロピル、3−エトキシプロピオン酸ブチル、3−プロポキシプロピオン酸メチル、3−プロポキシプロピオン酸エチル、3−プロポキシプロピオン酸プロピル、3−プロポキシプロピオン酸ブチル、3−ブトキシプロピオン酸メチル、3−ブトキシプロピオン酸エチル、3−ブトキシプロピオン酸プロピル、3−ブトキシプロピオン酸ブチルなどのエステルをそれぞれ挙げることができる。 Examples of esters include methyl acetate, ethyl acetate, propyl acetate, butyl acetate, ethyl 2-hydroxypropionate, methyl 2-hydroxy-2-methylpropionate, ethyl 2-hydroxy-2-methylpropionate, methyl hydroxyacetate, hydroxy Ethyl acetate, hydroxybutyl acetate, methyl lactate, ethyl lactate, propyl lactate, butyl lactate, methyl 3-hydroxypropionate, ethyl 3-hydroxypropionate, propyl 3-hydroxypropionate, butyl 3-hydroxypropionate, 2-hydroxy -3-methylbutanoate, methyl methoxyacetate, ethyl methoxyacetate, propyl methoxyacetate, butyl methoxyacetate, methyl ethoxyacetate, ethyl ethoxyacetate, propyl ethoxyacetate, butyl ethoxyacetate, propoxy Methyl acetate, ethyl propoxyacetate, propyl propoxyacetate, butyl propoxyacetate, methyl butoxyacetate, ethyl butoxyacetate, propyl butoxyacetate, butylbutoxyacetate, methyl 2-methoxypropionate, ethyl 2-methoxypropionate, 2-methoxypropionic acid Propyl, butyl 2-methoxypropionate, methyl 2-ethoxypropionate, ethyl 2-ethoxypropionate, propyl 2-ethoxypropionate, butyl 2-ethoxypropionate, methyl 2-butoxypropionate, ethyl 2-butoxypropionate Propyl 2-butoxypropionate, butyl 2-butoxypropionate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, propyl 3-methoxypropionate, 3-methoxypropyl Butyl pionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, propyl 3-ethoxypropionate, butyl 3-ethoxypropionate, methyl 3-propoxypropionate, ethyl 3-propoxypropionate, 3-propoxypropion Examples thereof include esters such as propyl acid, butyl 3-propoxypropionate, methyl 3-butoxypropionate, ethyl 3-butoxypropionate, propyl 3-butoxypropionate, and butyl 3-butoxypropionate.
これらのうち、エチレングリコールアルキルエーテルアセテート、ジエチレングリコール、ジプロピレングリコール、プロピレングリコールモノアルキルエーテル、プロピレングリコールアルキルエーテルアセテートが好ましく、就中、ジエチレングリコールジメチルエーテル、ジエチレングリコールエチルメチルエーテル、ジプロピレングリコールジメチルエーテル、ジプロピレングリコールエチルメチルエーテル、プロピレングリコールメチルエーテル、プロピレングリコールメチルエーテルアセテートが特に好ましい。
前記溶媒は、単独でまたは2種以上を混合して使用することができる。
Of these, ethylene glycol alkyl ether acetate, diethylene glycol, dipropylene glycol, propylene glycol monoalkyl ether, and propylene glycol alkyl ether acetate are preferred. Among them, diethylene glycol dimethyl ether, diethylene glycol ethyl methyl ether, dipropylene glycol dimethyl ether, dipropylene glycol ethyl Particularly preferred are methyl ether, propylene glycol methyl ether, and propylene glycol methyl ether acetate.
The said solvent can be used individually or in mixture of 2 or more types.
また、前記重合に用いられるラジカル重合開始剤としては、特に限定されるものではなく、例えば、2,2’−アゾビスイソブチロニトリル、2,2’−アゾビス−(2,4−ジメチルバレロニトリル)、2,2’−アゾビス−(4−メトキシ−2,4−ジメチルバレロニトリル)、4,4’−アゾビス(4―シアノバレリアン酸)、ジメチル2,2’−アゾビス(2−メチルプロピオネート)、2,2’−アゾビス(4−メトキシ−2,4−ジメチルバレロニトリル)等のアゾ化合物;ベンゾイルペルオキシド、ラウロイルペルオキシド、t−ブチルペルオキシピバレート、1,1−ビス(t−ブチルペルオキシ)シクロヘキサン等の有機過酸化物;過酸化水素等を挙げることができる。また、ラジカル重合開始剤として過酸化物を用いる場合には、それと還元剤とを併用して、レドックス型開始剤としてもよい。
これらのラジカル重合開始剤は、単独でまたは2種以上を混合して使用することができる。
The radical polymerization initiator used for the polymerization is not particularly limited, and for example, 2,2′-azobisisobutyronitrile, 2,2′-azobis- (2,4-dimethylvalero). Nitrile), 2,2′-azobis- (4-methoxy-2,4-dimethylvaleronitrile), 4,4′-azobis (4-cyanovaleric acid), dimethyl 2,2′-azobis (2-methylpro) Azo compounds such as pionate), 2,2′-azobis (4-methoxy-2,4-dimethylvaleronitrile); benzoyl peroxide, lauroyl peroxide, t-butylperoxypivalate, 1,1-bis (t-butyl) Peroxy) organic peroxides such as cyclohexane; hydrogen peroxide and the like. Moreover, when using a peroxide as a radical polymerization initiator, it is good also as a redox type initiator combining it and a reducing agent.
These radical polymerization initiators can be used alone or in admixture of two or more.
このようにして得られた共重合体〔A〕は、溶液のまま感放射線性樹脂組成物の調製に供しても、また溶液から分離して感放射線性樹脂組成物の調製に供してもよい。
共重合体〔A〕のゲルパーミエーションクロマトグラフィ(GPC)によるポリスチレン換算重量平均分子量(以下、「Mw」という。)は、好ましくは2,000〜100,000、より好ましくは5,000〜50,000である。Mwが2,000未満であると、得られる被膜の現像性、残膜率等が低下したり、またパターン形状、耐熱性等が損なわれるおそれがあり、一方100,000を超えると、解像度が低下したり、パターン形状が損なわれるおそれがある。
The copolymer [A] thus obtained may be used for the preparation of the radiation-sensitive resin composition in the form of a solution, or may be separated from the solution and used for the preparation of the radiation-sensitive resin composition. .
The polystyrene-converted weight average molecular weight (hereinafter referred to as “Mw”) of the copolymer [A] by gel permeation chromatography (GPC) is preferably 2,000 to 100,000, more preferably 5,000 to 50, 000. If the Mw is less than 2,000, the developability and the remaining film ratio of the resulting film may be reduced, and the pattern shape, heat resistance, etc. may be impaired. There exists a possibility that it may fall or a pattern shape may be impaired.
−エチレン性不飽和結合を有する重合性化合物〔B〕−
感光性樹脂組成物における〔B〕成分は、エチレン性不飽和結合を有する重合性化合物(以下、「重合性化合物〔B〕」という。)である。
重合性化合物〔B〕としては、特に限定されるものではないが、単官能、2官能または3官能以上の(メタ)アクリル酸エステルが、重合性が良好であり、得られるスペーサーの強度が向上する点から好ましい。
前記単官能(メタ)アクリル酸エステルとしては、例えば、2−ヒドロキシエチルアクリレート、2−ヒドロキシエチルメタクリレート、ジエチレングリコールモノエチルエーテルアクリレート、ジエチレングリコールモノエチルエーテルメタクリレート、イソボロニルアクリレート、イソボロニルメタクリレート、3−メトキシブチルアクリレート、3−メトキシブチルメタクリレート、2−アクリロイルオキシエチル−2−ヒドロキシプロピルフタレート、2−メタクリロイルオキシエチル−2−ヒドロキシプロピルフタレート等を挙げることができ、また市販品として、例えば、アロニックスM−101、同M−111、同M−114(東亜合成(株)製);KAYARAD TC−110S、同TC−120S(日本化薬(株)製);ビスコート158、同2311(大阪有機化学工業(株)製)等を挙げることができる。
-Polymerizable compound [B] having an ethylenically unsaturated bond-
[B] component in the photosensitive resin composition is a polymerizable compound having an ethylenically unsaturated bond (hereinafter referred to as “polymerizable compound [B]”).
Although it does not specifically limit as polymeric compound [B], Monofunctional, bifunctional, or trifunctional or more (meth) acrylic acid ester has good polymerizability, and the strength of the spacer obtained is improved. This is preferable.
Examples of the monofunctional (meth) acrylic acid ester include 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, diethylene glycol monoethyl ether acrylate, diethylene glycol monoethyl ether methacrylate, isobornyl acrylate, isobornyl methacrylate, 3- Examples thereof include methoxybutyl acrylate, 3-methoxybutyl methacrylate, 2-acryloyloxyethyl-2-hydroxypropyl phthalate, and 2-methacryloyloxyethyl-2-hydroxypropyl phthalate. Commercial products include, for example, Aronix M- 101, M-111, M-114 (manufactured by Toa Gosei Co., Ltd.); KAYARAD TC-110S, TC-120S (manufactured by Nippon Kayaku Co., Ltd.); Viscoat 158, 2311 (manufactured by Osaka Organic Chemical Industry Co., Ltd.) and the like can be mentioned.
また、前記2官能(メタ)アクリル酸エステルとしては、例えば、エチレングリコールジアクリレート、エチレングリコールジメタクリレート、ジエチレングリコールジアクリレート、ジエチレングリコールジメタクリレート、テトラエチレングリコールジアクリレート、テトラエチレングリコールジメタクリレート、1,6−ヘキサンジオールジアクリレート、1,6−ヘキサンジオールジメタクリレート、1,9−ノナンジオールジアクリレート、1,9−ノナンジオールジメタクリレート、ビスフェノキシエタノールフルオレンジアクリレート、ビスフェノキシエタノールフルオレンジメタクリレート等を挙げることができ、また市販品として、例えば、アロニックスM−210、同M−240、同M−6200(東亜合成(株)製)、KAYARAD HDDA、同HX−220、同R−604(日本化薬(株)製)、ビスコート260、同312、同335HP(大阪有機化学工業(株)製)等を挙げることができる。 Examples of the bifunctional (meth) acrylic acid ester include ethylene glycol diacrylate, ethylene glycol dimethacrylate, diethylene glycol diacrylate, diethylene glycol dimethacrylate, tetraethylene glycol diacrylate, tetraethylene glycol dimethacrylate, 1,6- Hexanediol diacrylate, 1,6-hexanediol dimethacrylate, 1,9-nonanediol diacrylate, 1,9-nonanediol dimethacrylate, bisphenoxyethanol full orange acrylate, bisphenoxyethanol full orange methacrylate, etc. As commercial products, for example, Aronix M-210, M-240, M-6200 (manufactured by Toa Gosei Co., Ltd.) KAYARAD HDDA, the HX-220, the R-604 (manufactured by Nippon Kayaku Co.), Viscoat 260, the 312, can be exemplified by the same 335HP (manufactured by Osaka Organic Chemical Industry Ltd.) and the like.
さらに、前記3官能以上の(メタ)アクリル酸エステルとしては、例えば、トリメチロールプロパントリアクリレート、トリメチロールプロパントリメタクリレート、ペンタエリスリトールトリアクリレート、ペンタエリスリトールトリメタクリレート、ペンタエリスリトールテトラアクリレート、ペンタエリスリトールテトラメタクリレート、ジペンタエリスリトールペンタアクリレート、ジペンタエリスリトールペンタメタクリレート、ジペンタエリスリトールヘキサアクリレート、ジペンタエリスリトールヘキサメタクリレート、トリ(2−アクリロイルオキシエチル)フォスフェート、トリ(2−メタクリロイルオキシエチル)フォスフェート等を挙げることができる。
特に9官能以上の(メタ)アクリレートは、アルキレン直鎖および脂環構造を有し、2個以上のイソシアネート基を含む化合物と分子内に1個以上の水酸基を含有する3官能、4官能および5官能の(メタ)アクリレート化合物を反応させて得られるウレタンアクリレート化合物が挙げられる。
Furthermore, as the tri- or higher functional (meth) acrylic acid ester, for example, trimethylolpropane triacrylate, trimethylolpropane trimethacrylate, pentaerythritol triacrylate, pentaerythritol trimethacrylate, pentaerythritol tetraacrylate, pentaerythritol tetramethacrylate, Dipentaerythritol pentaacrylate, dipentaerythritol pentamethacrylate, dipentaerythritol hexaacrylate, dipentaerythritol hexamethacrylate, tri (2-acryloyloxyethyl) phosphate, tri (2-methacryloyloxyethyl) phosphate, etc. it can.
In particular, a (meth) acrylate having 9 or more functional groups has an alkylene straight chain and an alicyclic structure, a compound containing two or more isocyanate groups, and a trifunctional, tetrafunctional and 5 functional group containing one or more hydroxyl groups in the molecule. The urethane acrylate compound obtained by making a functional (meth) acrylate compound react is mentioned.
上記市販品として、例えば、アロニックスM−309、同M−400、同M−405、同M−450、同M−7100、同M−8030、同M−8060、同TO−1450(東亜合成(株)製)、KAYARAD TMPTA、同DPHA、同DPCA−20、同DPCA−30、同DPCA−60、同DPCA−120(日本化薬(株)製)、ビスコート295、同300、同360、同GPT、同3PA、同400(大阪有機化学工業(株)製)等を挙げることができる。9官能以上の多官能ウレタンアクリレートの市販品は、例として、ニューフロンティア R−1150(以上、第一工業製薬(株)製)、KAYARAD DPHA−40H(以上、日本化薬(株)製)等が挙げられる。
これらの単官能、2官能または3官能以上の(メタ)アクリル酸エステルのうち、3官能以上の(メタ)アクリル酸エステルがさらに好ましく、特に、トリメチロールプロパントリアクリレート、ペンタエリスリトールトリアクリレート、ペンタエリスリトールテトラアクリレート、ジペンタエリスリトールペンタアクリレートおよびジペンタエリスリトールヘキサアクリレートが好ましい。
前記単官能、2官能または3官能以上の(メタ)アクリル酸エステルは、単独であるいは2種以上を組み合わせて使用することができる。
感光性樹脂組成物において、重合性化合物〔B〕の使用量は、共重合体〔A〕100重量部に対して、好ましくは50〜140重量部、さらに好ましくは60〜120重量部である。重合性化合物〔B〕の使用量が50重量部未満では、現像時に現像残りが発生するおそれがあり、一方140重量部を超えると、得られるスペーサーの硬度が低下する傾向がある。
As said commercial item, for example, Aronix M-309, M-400, M-405, M-450, M-7100, M-8030, M-8060, M-8060, TO-1450 (Toa Gosei ( KAYARAD TMPTA, DPHA, DPCA-20, DPCA-30, DPCA-60, DPCA-60, DPCA-120 (manufactured by Nippon Kayaku Co., Ltd.), Biscote 295, 300, 360, GPT, 3PA, 400 (produced by Osaka Organic Chemical Industry Co., Ltd.) and the like. Commercially available products of polyfunctional urethane acrylates having 9 or more functional groups include, for example, New Frontier R-1150 (manufactured by Daiichi Kogyo Seiyaku Co., Ltd.), KAYARAD DPHA-40H (manufactured by Nippon Kayaku Co., Ltd.) Is mentioned.
Among these monofunctional, bifunctional, or trifunctional or higher (meth) acrylic acid esters, trifunctional or higher functional (meth) acrylic acid esters are more preferable, and in particular, trimethylolpropane triacrylate, pentaerythritol triacrylate, pentaerythritol. Tetraacrylate, dipentaerythritol pentaacrylate and dipentaerythritol hexaacrylate are preferred.
The monofunctional, bifunctional, or trifunctional or higher (meth) acrylic acid ester can be used alone or in combination of two or more.
In the photosensitive resin composition, the amount of the polymerizable compound [B] used is preferably 50 to 140 parts by weight, and more preferably 60 to 120 parts by weight with respect to 100 parts by weight of the copolymer [A]. If the amount of the polymerizable compound [B] used is less than 50 parts by weight, there may be a residual image during development, while if it exceeds 140 parts by weight, the hardness of the resulting spacer tends to decrease.
−感放射線重合開始剤〔C〕−
感放射線重合開始剤は、放射線に感応して、〔B〕エチレン性不飽和結合を有する重合性化合物の重合を開始しうる活性種を生じる成分である。
このような感放射線重合開始剤としては、例えば、感放射線ラジカル重合開始剤が好ましい。
前記感放射線ラジカル重合開始剤としては、例えば、ベンジル、ジアセチル等のα−ジケトン類;ベンゾイン等のアシロイン類;ベンゾインメチルエーテル、ベンゾインエチルエーテル、ベンゾインイソプロピルエーテル等のアシロインエーテル類;チオキサントン、2,4−ジエチルチオキサントン、チオキサントン−4−スルホン酸、ベンゾフェノン、4,4’−ビス(ジメチルアミノ)ベンゾフェノン、4,4’−ビス(ジエチルアミノ)ベンゾフェノン等のベンゾフェノン類;アセトフェノン、p−ジメチルアミノアセトフェノン、4−(α,α’−ジメトキシアセトキシ)ベンゾフェノン、2,2’−ジメトキシ−2−フェニルアセトフェノン、p−メトキシアセトフェノン、2−メチル−2−モルフォリノ−1−(4−メチルチオフェニル)−1−プロパノン、2−ベンジル−2−ジメチルアミノ−1−(4−モルフォリノフェニル)−ブタン−1−オン等のアセトフェノン類;アントラキノン、1,4−ナフトキノン等のキノン類;フェナシルクロライド、トリブロモメチルフェニルスルホン、トリス(トリクロロメチル)−s−トリアジン等のハロゲン化合物;2,4,6−トリメチルベンゾイルジフェニルホスフィンオキサイド、ビス(2,6−ジメトキシベンゾイル)−2,4,4−トリメチルペンチルホスフィンオキサイド、ビス(2,4,6−トリメチルベンゾイル)フェニルホスフィンオキサイド等のアシルホスフィンオキサイド類;ジ−t−ブチルパーオキサイド等の過酸化物等を挙げることができる。
-Radiation-sensitive polymerization initiator [C]-
The radiation-sensitive polymerization initiator is a component that generates an active species capable of initiating polymerization of a polymerizable compound having an ethylenically unsaturated bond [B] in response to radiation.
As such a radiation sensitive polymerization initiator, for example, a radiation sensitive radical polymerization initiator is preferable.
Examples of the radiation-sensitive radical polymerization initiator include α-diketones such as benzyl and diacetyl; acyloins such as benzoin; acyloin ethers such as benzoin methyl ether, benzoin ethyl ether and benzoin isopropyl ether; thioxanthone, 2, Benzophenones such as 4-diethylthioxanthone, thioxanthone-4-sulfonic acid, benzophenone, 4,4′-bis (dimethylamino) benzophenone, 4,4′-bis (diethylamino) benzophenone; acetophenone, p-dimethylaminoacetophenone, 4 -(Α, α'-dimethoxyacetoxy) benzophenone, 2,2'-dimethoxy-2-phenylacetophenone, p-methoxyacetophenone, 2-methyl-2-morpholino-1- (4-methylthiopheny Acetophenones such as 1-propanone and 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butan-1-one; quinones such as anthraquinone and 1,4-naphthoquinone; phenacyl Halogen compounds such as chloride, tribromomethylphenylsulfone, tris (trichloromethyl) -s-triazine; 2,4,6-trimethylbenzoyldiphenylphosphine oxide, bis (2,6-dimethoxybenzoyl) -2,4,4- Examples include acylphosphine oxides such as trimethylpentylphosphine oxide and bis (2,4,6-trimethylbenzoyl) phenylphosphine oxide; peroxides such as di-t-butyl peroxide.
また、感放射線ラジカル重合開始剤の市販品としては、例えば、IRGACURE−124、同−149、同−184、同−369、同−500、同−651、同−819、同−907、同−1000、同−1700、同−1800、同−1850、同−2959、Darocur−1116、同−1173、同−1664、同−2959、同−4043(以上、チバ・スペシャルティ・ケミカルズ社製)、KAYACURE−DETX、同−MBP、同−DMBI、同−EPA、同−OA(以上、日本化薬(株)製)、LUCIRIN TPO(BASF社製)、VICURE−10、同−55(以上、STAUFFER社製)、TRIGONALP1(AKZO社製)、SANDORAY 1000(SANDOZ社製)、DEAP(APJOHN社製)、QUANTACURE−PDO、同−ITX、同−EPD(以上、WARD BLEKINSOP社製)等を挙げることができる。
これらの感放射線ラジカル重合開始剤は、単独でまたは2種以上を混合して使用することができる。
また、前記感放射線ラジカル重合開始剤と共に、感放射線増感剤を1種以上併用することによって、空気中の酸素による失活の少ない、高感度の感放射線性樹脂組成物を得ることも可能である。
Moreover, as a commercial item of a radiation sensitive radical polymerization initiator, IRGACURE-124, the same -149, the same -184, the same -369, the same -500, the same -651, the same -819, the same -907, the same- 1000, -1700, -1800, -1850, -1959, Darocur-1116, -1173, -1664, -2959, -4093 (above, manufactured by Ciba Specialty Chemicals), KAYACURE -DETX, the same -MBP, the same -DMBI, the same -EPA, the same -OA (above, manufactured by Nippon Kayaku Co., Ltd.), the LUCIRIN TPO (made by BASF), the VICURE-10, the same -55 (above, STAUFFER) ), TRIGONALP1 (manufactured by AKZO), SANDORAY 1000 (manufactured by SANDOZ), DEAP (AP OHN Co., Ltd.), QUANTACURE-PDO, the -ITX, same -EPD (or more, can be mentioned WARD BLEKINSOP Co., Ltd.), and the like.
These radiation-sensitive radical polymerization initiators can be used alone or in admixture of two or more.
In addition, by using one or more radiation sensitizers together with the radiation-sensitive radical polymerization initiator, it is possible to obtain a highly sensitive radiation-sensitive resin composition that is less deactivated by oxygen in the air. is there.
本発明の感光性樹脂組成物における各成分の使用量は、〔B〕エチレン性不飽和結合を有する重合性化合物が、アルカリ可溶性共重合体〔A〕100重量部に対して、好ましくは10〜150重量部、さらに好ましくは20〜120重量部であり、〔C〕感放射線重合開始剤が、アルカリ可溶性共重合体〔A〕100重量部に対して、好ましくは1〜40重量部、さらに好ましくは3〜35重量部である。
〔B〕重合性化合物の使用量が10重量部未満では、膜厚の均一な塗膜を形成することが困難となる傾向があり、一方150重量部を超えると、基板との密着性が低下する傾向がある。また、〔C〕感放射線重合開始剤の使用量が1重量部未満では、耐熱性、表面硬度や耐薬品性が低下する傾向があり、一方40重量部を超えると、透明性が低下する傾向がある。
The amount of each component used in the photosensitive resin composition of the present invention is preferably such that [B] the polymerizable compound having an ethylenically unsaturated bond is 100 parts by weight of the alkali-soluble copolymer [A]. 150 parts by weight, more preferably 20 to 120 parts by weight, and [C] the radiation-sensitive polymerization initiator is preferably 1 to 40 parts by weight, more preferably 100 parts by weight of the alkali-soluble copolymer [A]. Is 3 to 35 parts by weight.
[B] If the amount of the polymerizable compound used is less than 10 parts by weight, it tends to be difficult to form a coating film having a uniform film thickness. On the other hand, if it exceeds 150 parts by weight, the adhesion to the substrate decreases. Tend to. In addition, when the amount of the [C] radiation sensitive polymerization initiator used is less than 1 part by weight, the heat resistance, surface hardness and chemical resistance tend to decrease, whereas when it exceeds 40 parts by weight, the transparency tends to decrease. There is.
−溶剤〔D〕−
感光性樹脂組成物は、その使用に際して、共重合体〔A〕、重合性化合物〔B〕、感放射線重合開始剤〔C〕等の構成成分を適当な溶剤に溶解してなる、組成物溶液として調製されるのが好ましい。
前記組成物溶液の調製に使用される溶剤〔D〕としては、感光性樹脂組成物を構成する各成分を均一に溶解し、かつ各成分と反応しないものが用いられる。
このような溶剤としては、上述した共重合体〔A〕を製造するために使用できる溶媒として例示したものと同様のものを挙げることができる。
このような溶剤のうち、スリットダイコーターを用いて感光性樹脂組成物の塗布を行うために、塗膜表面のモヤムラの抑制に有効な点から、下記式(1)
-Solvent [D]-
The photosensitive resin composition is a composition solution obtained by dissolving constituent components such as a copolymer [A], a polymerizable compound [B], and a radiation-sensitive polymerization initiator [C] in an appropriate solvent. It is preferable to be prepared as
As the solvent [D] used for the preparation of the composition solution, a solvent that uniformly dissolves each component constituting the photosensitive resin composition and does not react with each component is used.
As such a solvent, the thing similar to what was illustrated as a solvent which can be used in order to manufacture the copolymer [A] mentioned above can be mentioned.
Among these solvents, since the photosensitive resin composition is applied using a slit die coater, the following formula (1)
(式中、R1〜R5はそれぞれ独立に水素原子または炭素数1〜6のアルキル基であり、nは1〜6の整数である。)
で表される化合物を含有する混合溶剤が用いられる。全混合溶剤100重量部に占める上記式(1)で表される化合物の含量は2〜20重量%である。2重量%未満であると、モヤムラに対して効果がなく、20重量%を超えると、減圧乾燥時間が長くなり、パネルの生産性が悪化する。
上記式(1)で表される化合物としては、例えばベンジルアルコール、2−メチルベンジルアルコール、3−フェニル−1−プロパノール、2−メチルフェネチルアルコール、2、4−ジメチルベンジルアルコール、4−エチルベンジルアルコール、4−フェニル−1−ブタノール、5−フェニル−1−ペンタノール、4−ブチルベンジルアルコール、6−フェニル−1−ヘキサノール、2,3、4,5,6−ペンタメチルベンジルアルコールを挙げることができる。これらのうち、特にベンジルアルコールが、沸点やその他組成物の溶解性の点から望ましい。
(Wherein, R 1 to R 5 are each independently a hydrogen atom or an alkyl group having 1 to 6 carbon atoms, n represents an integer from 1 to 6.)
A mixed solvent containing a compound represented by the formula: The content of the compound represented by the above formula (1) in 100 parts by weight of the total mixed solvent is 2 to 20% by weight. If the amount is less than 2% by weight, there is no effect on moyamur, and if it exceeds 20% by weight, the drying time under reduced pressure becomes long, and the productivity of the panel deteriorates.
Examples of the compound represented by the formula (1) include benzyl alcohol, 2-methylbenzyl alcohol, 3-phenyl-1-propanol, 2-methylphenethyl alcohol, 2,4-dimethylbenzyl alcohol, 4-ethylbenzyl alcohol. 4-phenyl-1-butanol, 5-phenyl-1-pentanol, 4-butylbenzyl alcohol, 6-phenyl-1-hexanol, 2,3,4,5,6-pentamethylbenzyl alcohol. it can. Of these, benzyl alcohol is particularly desirable from the viewpoint of boiling point and other composition solubility.
混合溶剤は樹脂液の保存安定性を得るため、ジエチレングリコールアルキルエーテル系溶剤すなわちジエチレングリコールジメチルエーテル、ジエチレングリコールメチルエチルエーテルを含有する。全混合溶剤100重量部に占めるジエチレングリコールアルキルエーテル系溶剤の含量は30〜75重量%である。30重量%未満であると、樹脂液の保存安定性が悪化し、75重量%を超えると減圧乾燥時間が長くなる。
また、パネルの生産性の点から減圧乾燥時間は短い方が好ましい。減圧乾燥時間を短くする観点から、混合溶剤は、上記式(1)で表される化合物のほかに沸点(1気圧における沸点、以下同じ。)が100℃〜150℃の溶剤を含有する。沸点が100℃未満の場合、溶剤臭気が問題になることがあり、150℃を超える場合は減圧乾燥時間の短縮に効果がない。全混合溶剤100重量部に占める沸点が100℃〜150℃の溶剤が占める含量は20〜55重量%である。20重量%未満の場合は減圧乾燥時間の短縮に効果がなく、55重量%を超えた場合保存安定性が悪化することがある。併用できる沸点が100℃〜150℃の溶剤としては、例えばプロピレングリコールモノメチルエーテルアセテート、プロピレングリコールモノメチルエーテル、酢酸ブチル、メチルセロソルブ、エチルセロソルブ、メチルセロソルブアセテート、メチルイソブチルケトン、シクロヘキサノン、無水酢酸、トルエン、クロロベンゼン、プロピルアセテート等が挙げられる。
Solvent mixture to obtain the storage stability of the resin solution, containing di ethylene glycol alkyl ether solvent i.e. diethylene glycol dimethyl ether, diethylene glycol methyl ethyl ether. The content of the diethylene glycol alkyl ether solvent in 100 parts by weight of the total mixed solvent is 30 to 75% by weight. When it is less than 30% by weight, the storage stability of the resin liquid is deteriorated, and when it exceeds 75% by weight, the drying time under reduced pressure becomes long.
In addition, it is preferable that the drying time under reduced pressure is short from the viewpoint of panel productivity. From the viewpoint of shortening the vacuum drying time, solvent mixture, in addition to the boiling point of the compound represented by the above formula (1) (boiling point at 1 atm, the same below.) Are you containing 100 ° C. to 150 DEG ° C. of the solvent. When the boiling point is less than 100 ° C., solvent odor may be a problem. When the boiling point exceeds 150 ° C., the drying time under reduced pressure is not effective. The content of the solvent having a boiling point of 100 ° C. to 150 ° C. in 100 parts by weight of the total mixed solvent is 20 to 55% by weight. When the amount is less than 20% by weight, the drying time under reduced pressure is not effective. When the amount exceeds 55% by weight, the storage stability may be deteriorated. Examples of the solvent having a boiling point of 100 ° C. to 150 ° C. that can be used in combination include propylene glycol monomethyl ether acetate, propylene glycol monomethyl ether, butyl acetate, methyl cellosolve, ethyl cellosolve, methyl cellosolve acetate, methyl isobutyl ketone, cyclohexanone, acetic anhydride, toluene, Examples include chlorobenzene and propyl acetate.
また、スリットダイコーターを用いて感光性樹脂組成物の塗布を行う場合、ノズル先端が乾き、塗膜に縦筋を生じたり、異物の原因になることがある。混合溶剤の構成成分として高沸点溶剤を併用することで、ノズルの先端の乾きを抑えることができる。ノズルの先端の乾きを抑えるのに効果がある溶剤としては、沸点が180℃〜250℃の溶剤(上記式(1)で表される化合物を除く。)が好ましい。沸点が180℃未満ではノズルの乾き防止に対して効果がなく、250℃を超えると減圧乾燥時間に影響し、また、塗膜の中に高沸点溶剤が残る可能性があり、好ましくない。全混合溶剤100重量部に占める沸点が180℃〜250℃の溶剤の含量は3〜15重量%が好ましい。3重量%未満の場合はノズルの先端の乾きを抑えるに効果がなく、15重量%を超える場合は減圧乾燥時間に影響し、また、塗膜の中に高沸点溶剤が残る可能性がある。併用できる高沸点溶剤としては、例えばエチレングリコールモノブチルエーテルアセテート、ジエチレングリコールモノエチルエーテルアセテート、ジエチレングリコールモノブチルエーテルアセテート、ジエチレングリコールジエチルエーテル、N−メチルホルムアミド、N,N−ジメチルホルムアミド、N−メチルホルムアニリド、N−メチルアセトアミド、N,N−ジメチルアセトアミド、N−メチルピロリドン、ジメチルスルホキシド、ベンジルエチルエーテル、ジヘキシルエーテル、アセトニルアセトン、イソホロン、カプロン酸、カプリル酸、1−オクタノール、1−ノナノール、酢酸ベンジル、安息香酸エチル、シュウ酸ジエチル、マレイン酸ジエチル、γ−ブチロラクトン、炭酸エチレン、炭酸プロピレン、フェニルセロソルブアセテートなどが挙げられる。これらのうち、エチレングリコールモノブチルエーテルアセテート、ジエチレングリコールモノエチルエーテルアセテート、ジエチレングリコールモノブチルエーテルアセテート、ジエチレングリコールジエチルエーテル、N−メチルピロリドンが好ましい。 Moreover, when apply | coating the photosensitive resin composition using a slit die coater, a nozzle tip may dry, a vertical stripe may be produced in a coating film, and it may become a cause of a foreign material. By using a high boiling point solvent in combination as a component of the mixed solvent, it is possible to suppress drying of the nozzle tip. As a solvent effective in suppressing the drying of the nozzle tip, a solvent having a boiling point of 180 ° C. to 250 ° C. (excluding the compound represented by the above formula (1)) is preferable. If the boiling point is less than 180 ° C., there is no effect for preventing the nozzle from drying, and if it exceeds 250 ° C., the drying time under reduced pressure is affected. The content of the solvent having a boiling point of 180 ° C. to 250 ° C. in 100 parts by weight of the total mixed solvent is preferably 3 to 15% by weight. If it is less than 3% by weight, there is no effect in suppressing the drying of the nozzle tip, and if it exceeds 15% by weight, the drying time under reduced pressure is affected, and a high boiling point solvent may remain in the coating film. Examples of the high-boiling solvent that can be used in combination include ethylene glycol monobutyl ether acetate, diethylene glycol monoethyl ether acetate, diethylene glycol monobutyl ether acetate, diethylene glycol diethyl ether, N-methylformamide, N, N-dimethylformamide, N-methylformanilide, N- Methylacetamide, N, N-dimethylacetamide, N-methylpyrrolidone, dimethylsulfoxide, benzylethyl ether, dihexyl ether, acetonylacetone, isophorone, caproic acid, caprylic acid, 1-octanol, 1-nonanol, benzyl acetate, benzoic acid Ethyl, diethyl oxalate, diethyl maleate, γ-butyrolactone, ethylene carbonate, propylene carbonate, phenyl celloso Etc. Bed acetate. Of these, ethylene glycol monobutyl ether acetate, diethylene glycol monoethyl ether acetate, diethylene glycol monobutyl ether acetate, diethylene glycol diethyl ether, and N-methylpyrrolidone are preferred.
−添加剤−
感光性樹脂組成物には、本発明の所期の効果を損なわない範囲内で、必要に応じて、前記成分以外の添加剤を配合することもできる。
例えば、塗布性を向上するために、界面活性剤を配合することができる。その界面活性剤は、フッ素系界面活性剤およびシリコーン系界面活性剤を好適に用いることができる。
フッ素系界面活性剤としては、末端、主鎖および側鎖の少なくともいずれかの部位にフルオロアルキルまたはフルオロアルキレン基を有する化合物を好適に用いることができ、その具体例としては、1,1,2,2−テトラフロロオクチル(1,1,2,2−テトラフロロプロピル)エーテル、1,1,2,2−テトラフロロオクチルヘキシルエーテル、オクタエチレングリコールジ(1,1,2,2−テトラフロロブチル)エーテル、ヘキサエチレングリコール(1,1,2,2,3,3−ヘキサフロロペンチル)エーテル、オクタプロピレングリコールジ(1,1,2,2−テトラフロロブチル)エーテル、ヘキサプロピレングリコールジ(1,1,2,2,3,3−ヘキサフロロペンチル)エーテル、パーフロロドデシルスルホン酸ナトリウム、1,1,2,2,8,8,9,9,10,10−デカフロロドデカン、1,1,2,2,3,3−ヘキサフロロデカン、フルオロアルキルベンゼンスルホン酸ナトリウム、フルオロアルキルホスホン酸ナトリウム、フルオロアルキルカルボン酸ナトリウム、フルオロアルキルポリオキシエチレンエーテル、ジグリセリンテトラキス(フルオロアルキルポリオキシエチレンエーテル)、フルオロアルキルアンモニウムヨージド、フルオロアルキルベタイン、フルオロアルキルポリオキシエチレンエーテル、パーフルオロアルキルポリオキシエタノール、パーフルオロアルキルアルコキシレート、フッ素系アルキルエステル等を挙げることができる。
-Additives-
In the photosensitive resin composition, additives other than the above-mentioned components can be blended as necessary within the range not impairing the intended effect of the present invention.
For example, in order to improve applicability, a surfactant can be blended. As the surfactant, a fluorine-based surfactant and a silicone-based surfactant can be suitably used.
As the fluorosurfactant, a compound having a fluoroalkyl or fluoroalkylene group in at least one of the terminal, main chain and side chain can be suitably used. Specific examples thereof include 1,1,2 , 2-tetrafluorooctyl (1,1,2,2-tetrafluoropropyl) ether, 1,1,2,2-tetrafluorooctyl hexyl ether, octaethylene glycol di (1,1,2,2-tetrafluoro) Butyl) ether, hexaethylene glycol (1,1,2,2,3,3-hexafluoropentyl) ether, octapropylene glycol di (1,1,2,2-tetrafluorobutyl) ether, hexapropylene glycol di ( 1,1,2,2,3,3-hexafluoropentyl) ether, perfluorododecylsulfonic acid sodium Lilium, 1,1,2,2,8,8,9,9,10,10-decafluorododecane, 1,1,2,2,3,3-hexafluorodecane, sodium fluoroalkylbenzenesulfonate, fluoroalkyl Sodium phosphonate, sodium fluoroalkylcarboxylate, fluoroalkyl polyoxyethylene ether, diglycerin tetrakis (fluoroalkyl polyoxyethylene ether), fluoroalkyl ammonium iodide, fluoroalkyl betaine, fluoroalkyl polyoxyethylene ether, perfluoroalkyl poly Examples include oxyethanol, perfluoroalkyl alkoxylates, and fluorine-based alkyl esters.
また、これらの市販品としては、例えばBM−1000、BM−1100(以上、BM CHEMIE社製)、メガファックF142D、同F172、同F173、同F183、同F178、同F191、同F471、同F476(以上、大日本インキ化学工業(株)製)、フロラードFC 170C、FC−171、FC−430、FC−431(以上、住友スリーエム(株)製)、サーフロンS−112、同S−113、同S−131、同S−141、同S−145、同S−382、同SC−101、同SC−102、同SC−103、同SC−104、同SC−105、同SC−106(以上、旭硝子(株)製)、エフトップEF301、同303、同352(以上、新秋田化成(株)製)、フタージェントFT−100、同FT−110、同FT−140A、同FT−150、同FT−250、同FT−251、同FTX−251、同FTX−218、同FT−300、同FT−310、同FT−400S(以上、(株)ネオス製)等を挙げることができる。 Examples of these commercially available products include BM-1000, BM-1100 (manufactured by BM CHEMIE), MegaFuck F142D, F172, F173, F183, F178, F191, F191, F471, and F476. (Above, manufactured by Dainippon Ink & Chemicals, Inc.), Florard FC 170C, FC-171, FC-430, FC-431 (above, manufactured by Sumitomo 3M), Surflon S-112, S-113, S-131, S-141, S-145, S-382, SC-101, SC-102, SC-103, SC-104, SC-105, SC-106 ( Asahi Glass Co., Ltd.), Ftop EF301, 303, 352 (above, Shin-Akita Kasei Co., Ltd.), Footent FT-100, FT-11 0, FT-140A, FT-150, FT-250, FT-251, FTX-251, FTX-218, FT-300, FT-310, FT-400S (above, ( (Neos Co., Ltd.).
また、シリコーン系界面活性剤としては、例えばトーレシリコーンDC3PA、同DC7PA、同SH11PA、同SH21PA、同SH28PA、同SH29PA、同SH30PA、同SH−190、同SH−193、同SZ−6032、同SF−8428、同DC−57、同DC−190(以上、東レ・ダウコーニング・シリコーン(株)製)、TSF−4440、TSF−4300、TSF−4445、TSF−4446、TSF−4460、TSF−4452(以上、GE東芝シリコーン(株)製)等の商品名で市販されているものを挙げることができる。
また、前記以外の界面活性剤としては、例えば、ポリオキシエチレンラウリルエーテル、ポリオキシエチレンステアリルエーテル、ポリオキシエチレンオレイルエーテル等のポリオキシエチレンアルキルエーテル;ポリオキシエチレンn−オクチルフェニルエーテル、ポリオキシエチレンn−ノニルフェニルエーテル等のポリオキシエチレンアリールエーテル;ポリオキシエチレンジラウレート、ポリオキシエチレンジステアレート等のポリオキシエチレンジアルキルエステル等のノニオン系界面活性剤や、市販品として、KP341(信越化学工業(株)製)、ポリフローNo.57、95(共栄社化学(株)製)等を挙げることができる。
これらの界面活性剤は、単独でまたは2種以上を混合して使用することができる。
界面活性剤の配合量は、共重合体〔A〕100重量部に対して、好ましくは5重量部以下、さらに好ましくは2重量部以下である。界面活性剤の配合量が5重量部を超えると、塗布時に膜荒れを生じやすくなる傾向がある。
また、基体との密着性をさらに向上させるために、接着助剤を配合することができる。
Examples of the silicone-based surfactant include Torre Silicone DC3PA, DC7PA, SH11PA, SH21PA, SH28PA, SH29PA, SH30PA, SH-190, SH-193, SZ-6032, SF -8428, DC-57, DC-190 (above, manufactured by Toray Dow Corning Silicone Co., Ltd.), TSF-4440, TSF-4300, TSF-4445, TSF-4446, TSF-4460, TSF-4442 (The above-mentioned, GE Toshiba Silicone Co., Ltd. product) etc. can be mentioned what is marketed.
Examples of the surfactant other than the above include polyoxyethylene alkyl ethers such as polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, polyoxyethylene oleyl ether; polyoxyethylene n-octylphenyl ether, polyoxyethylene Polyoxyethylene aryl ethers such as n-nonylphenyl ether; nonionic surfactants such as polyoxyethylene dialkyl esters such as polyoxyethylene dilaurate and polyoxyethylene distearate, and commercially available products such as KP341 (Shin-Etsu Chemical ( Manufactured by Co., Ltd.), Polyflow No. 57, 95 (manufactured by Kyoeisha Chemical Co., Ltd.) and the like.
These surfactants can be used alone or in admixture of two or more.
The blending amount of the surfactant is preferably 5 parts by weight or less, and more preferably 2 parts by weight or less with respect to 100 parts by weight of the copolymer [A]. When the compounding amount of the surfactant exceeds 5 parts by weight, there is a tendency that film roughening tends to occur during coating.
Moreover, in order to further improve the adhesion to the substrate, an adhesion assistant can be blended.
前記接着助剤としては、官能性シランカップリング剤が好ましく、その例としては、カルボキシル基、メタクリロイル基、イソシアネート基、エポキシ基等の反応性官能基を有するシランカップリング剤を挙げることができ、より具体的には、トリメトキシシリル安息香酸、γ−メタクリロイルオキシプロピルトリメトキシシラン、ビニルトリアセトキシシラン、ビニルトリメトキシシラン、γ−イソシアナートプロピルトリエトキシシラン、γ−グリシドキシプロピルトリメトキシシラン、2−(3,4−エポキシシクロヘキシル)エチルトリメトキシシラン等を挙げることができる。
これらの接着助剤は、単独でまたは2種以上を混合して使用することができる。
接着助剤の配合量は、共重合体〔A〕100重量部に対して、好ましくは20重量部以下、さらに好ましくは10重量部以下である。接着助剤の配合量が20重量部を超えると、現像残りが生じやすくなる傾向がある。
As the adhesion assistant, a functional silane coupling agent is preferable, and examples thereof include a silane coupling agent having a reactive functional group such as a carboxyl group, a methacryloyl group, an isocyanate group, an epoxy group, More specifically, trimethoxysilylbenzoic acid, γ-methacryloyloxypropyltrimethoxysilane, vinyltriacetoxysilane, vinyltrimethoxysilane, γ-isocyanatopropyltriethoxysilane, γ-glycidoxypropyltrimethoxysilane, 2- (3,4-epoxycyclohexyl) ethyltrimethoxysilane and the like can be mentioned.
These adhesion assistants can be used alone or in admixture of two or more.
The compounding amount of the adhesion assistant is preferably 20 parts by weight or less, more preferably 10 parts by weight or less with respect to 100 parts by weight of the copolymer [A]. When the blending amount of the adhesion assistant exceeds 20 parts by weight, there is a tendency that a development residue tends to occur.
その他添加剤を加えることができる。保存安定性の向上などを目的として添加される。具体的には、硫黄、キノン類、ヒドロキノン類、ポリオキシ化合物、アミン、ニトロニトロソ化合物が挙げられる。その例として、4−メトキシフェノール、N−ニトロソ−N−フェニルヒドロキシルアミンアルミニウムなどが挙げられる。これらは、共重合体〔A〕100重量部に対して、好ましくは3.0重量部以下、より好ましくは0.001〜0.5重量部で用いられる。3.0重量部を超える場合は、十分な感度が得られず、パターン形状が悪化する。
また、耐熱性向上のため、N−(アルコキシメチル)グリコールウリル化合物、N−(アルコキシメチル)メラミン化合物および2官能以上のエポキシ基を1分子中に有する化合物を添加することができる。前記N−(アルコキシメチル)グリコールウリル化合物の具体例としては、N,N,N’,N’−テトラ(メトキシメチル)グリコールウリル、N,N,N’,N’−テトラ(エトキシメチル)グリコールウリル、N,N,N’,N’−テトラ(n−プロポキシメチル)グリコールウリル、N,N,N’,N’−テトラ(i−プロポキシメチル)グリコールウリル、N,N,N’,N’−テトラ(n−ブトキシメチル)グリコールウリル、N,N,N’,N’−テトラ(t−ブトキシメチル)グリコールウリル等を挙げることができる。これらのうち特に、N,N,N’,N’−テトラ(メトキシメチル)グリコールウリルが好ましい。前記N−(アルコキシメチル)メラミン化合物の具体例としては、N,N,N’,N’,N”,N”−ヘキサ(メトキシメチル)メラミン、N,N,N’,N’,N”,N”−ヘキサ(エトキシメチル)メラミン、N,N,N’,N’,N”,N”−ヘキサ(n−プロポキシメチル)メラミン、N,N,N’,N’,N”,N”−ヘキサ(i−プロポキシメチル)メラミン、N,N,N’,N’,N”,N”−ヘキサ(n−ブトキシメチル)メラミン、N,N,N’,N’,N”,N”−ヘキサ(t−ブトキシメチル)メラミン等を挙げることができる。これらのうち特に、N,N,N’,N’,N”,N”−ヘキサ(メトキシメチル)メラミンが好ましい。これらの市販品としては、ニカラックN−2702、MW−30M(以上 三和ケミカル(株)製)等が挙げられる。
Other additives can be added. It is added for the purpose of improving storage stability. Specific examples include sulfur, quinones, hydroquinones, polyoxy compounds, amines, and nitronitroso compounds. Examples thereof include 4-methoxyphenol and N-nitroso-N-phenylhydroxylamine aluminum. These are preferably used in an amount of 3.0 parts by weight or less, more preferably 0.001 to 0.5 parts by weight, based on 100 parts by weight of the copolymer [A]. When the amount exceeds 3.0 parts by weight, sufficient sensitivity cannot be obtained, and the pattern shape deteriorates.
In order to improve heat resistance, an N- (alkoxymethyl) glycoluril compound, an N- (alkoxymethyl) melamine compound, and a compound having a bifunctional or higher functional epoxy group in one molecule can be added. Specific examples of the N- (alkoxymethyl) glycoluril compound include N, N, N ′, N′-tetra (methoxymethyl) glycoluril, N, N, N ′, N′-tetra (ethoxymethyl) glycol. Uril, N, N, N ′, N′-tetra (n-propoxymethyl) glycoluril, N, N, N ′, N′-tetra (i-propoxymethyl) glycoluril, N, N, N ′, N Examples include '-tetra (n-butoxymethyl) glycoluril, N, N, N', N'-tetra (t-butoxymethyl) glycoluril, and the like. Of these, N, N, N ′, N′-tetra (methoxymethyl) glycoluril is particularly preferable. Specific examples of the N- (alkoxymethyl) melamine compound include N, N, N ′, N ′, N ″, N ″ -hexa (methoxymethyl) melamine, N, N, N ′, N ′, N ″. , N ″ -hexa (ethoxymethyl) melamine, N, N, N ′, N ′, N ″, N ″ -hexa (n-propoxymethyl) melamine, N, N, N ′, N ′, N ″, N "-Hexa (i-propoxymethyl) melamine, N, N, N ', N', N", N "-hexa (n-butoxymethyl) melamine, N, N, N ', N', N", N “-Hexa (t-butoxymethyl) melamine” and the like. Of these, N, N, N ′, N ′, N ″, N ″ -hexa (methoxymethyl) melamine is particularly preferable. Examples of these commercially available products include Nicalac N-2702, MW-30M (manufactured by Sanwa Chemical Co., Ltd.) and the like.
2官能以上のエポキシ基を1分子中に有する化合物としては、エチレングリコールジグリシジルエーテル、ジエチレングリコールジグリシジルエーテル、ポリエチレングリコールジグリシジルエーテル、プロピレングリコールジグリシジルエーテル、トリプロピレングリコールジグリシジルエーテル、ポリプロピレングリコールジグリシジルエーテル、ネオペンチルグリコールジグリシジルエーテル、1,6−ヘキサンジオールジグリシジルエーテル、グリセリンジグリシジルエーテル、トリメチロールプロパントリグリシジルエーテル、水添ビスフェノールAジグリシジルエーテル、ビスフェノールAジグリシジルエーテル等が挙げられる。これら市販品の具体例としては、エポライト40E,エポライト100E,エポライト200E,エポライト70P,エポライト200P,エポライト400P,エポライト40E,エポライト1500NP,エポライト1600,エポライト80MF,エポライト100MF,エポライト4000、エポライト3002(以上 共栄社化学(株)製)等が挙げられる。これらは単独もしくは2種以上の組み合わせで使用できる。 Examples of compounds having two or more functional epoxy groups in one molecule include ethylene glycol diglycidyl ether, diethylene glycol diglycidyl ether, polyethylene glycol diglycidyl ether, propylene glycol diglycidyl ether, tripropylene glycol diglycidyl ether, and polypropylene glycol diglycidyl. Examples include ether, neopentyl glycol diglycidyl ether, 1,6-hexanediol diglycidyl ether, glycerin diglycidyl ether, trimethylolpropane triglycidyl ether, hydrogenated bisphenol A diglycidyl ether, and bisphenol A diglycidyl ether. Specific examples of these commercially available products include Epolite 40E, Epolite 100E, Epolite 200E, Epolite 70P, Epolite 200P, Epolite 400P, Epolite 40E, Epolite 1500NP, Epolite 1600, Epolite 80MF, Epolite 100MF, Epolite 4000, Epolite 3002 (and more) Chemical Co., Ltd.). These can be used alone or in combination of two or more.
このように調製された組成物溶液は、必要に応じて、孔径が例えば0.2〜0.5μm程度のミリポアフィルタ等によりろ過して、使用に供することもできる。
感光性樹脂組成物は、特に、液晶パネルやタッチパネルなどの表示パネル用スペーサーを形成するための材料として好適である。
The composition solution prepared in this way can be used for use after filtration through a Millipore filter having a pore size of, for example, about 0.2 to 0.5 μm, if necessary.
The photosensitive resin composition is particularly suitable as a material for forming a spacer for a display panel such as a liquid crystal panel or a touch panel.
表示パネル用スペーサー
感光性樹脂組成物を用いて表示パネル用スペーサーを形成する際には、組成物溶液を基板の表面に塗布したのち、プレベークして溶剤を除去することにより、塗膜を形成する。
組成物溶液の塗布方法は、スリットダイ塗布法である。
また、プレベークの条件は、各構成成分の種類、配合割合などによっても異なるが、例えば70〜90℃で1〜15分間程度である。
次いで、プレベークされた塗膜に、所定パターンのマスクを介し露光して重合させたのち、現像液により現像し、不要な部分を除去して、パターンを形成する。
露光に使用される放射線としては、可視光線、紫外線、遠紫外線、荷電粒子線、X線等を適宜に選択できるが、波長が190〜450nmの範囲にある放射線が好ましい。
In forming a spacer for a display panel using the display panel spacer for the photosensitive resin composition is, after applying the composition solution to a surface of the substrate, by removing the solvent by prebaking to form a coating film .
The coating method of the composition solution is a slit die coating method.
Moreover, although the conditions of prebaking differ also with the kind of each structural component, a mixture ratio, etc., it is about 1 to 15 minutes at 70-90 degreeC, for example.
Next, the pre-baked coating film is exposed and polymerized through a mask having a predetermined pattern, and then developed with a developing solution, and unnecessary portions are removed to form a pattern.
As radiation used for exposure, visible light, ultraviolet light, far ultraviolet light, charged particle beam, X-ray and the like can be appropriately selected, but radiation having a wavelength in the range of 190 to 450 nm is preferable.
現像方法としては、例えば、液盛り法、浸漬法、シャワー法等の何れでもよく、現像時間は、例えば30〜180秒間である。
前記現像液としては、例えば、水酸化ナトリウム、水酸化カリウム、炭酸ナトリウム、ケイ酸ナトリウム、メタケイ酸ナトリウム、アンモニア等の無機アルカリ;エチルアミン、n−プロピルアミン等の1級アミン;ジエチルアミン、ジ−n−プロピルアミン等の2級アミン;トリメチルアミン、メチルジエチルアミン、エチルジメチルアミン、トリエチルアミン等の3級アミン;ジメチルエタノールアミン、メチルジエタノールアミン、トリエタノールアミン等の3級アルカノールアミン;ピロール、ピペリジン、N−メチルピペリジン、N−メチルピロリジン、1,8−ジアザビシクロ[5.4.0]−7−ウンデセン、1,5−ジアザビシクロ[4.3.0]−5−ノネン等の脂環族3級アミン;ピリジン、コリジン、ルチジン、キノリン等の芳香族3級アミン;テトラメチルアンモニウムヒドロキシド、テトラエチルアンモニウムヒドロキシド等の4級アンモニウム塩等のアルカリ性化合物の水溶液を使用することができる。
また、前記アルカリ性化合物の水溶液には、メタノール、エタノール等の水溶性有機溶媒および/または界面活性剤を適当量添加することもできる。
現像後、例えば流水洗浄等により、例えば30〜90秒間洗浄して、不要な部分を除去したのち、圧縮空気や圧縮窒素を吹きつけて乾燥させることにより、所定のパターンが形成される。
As the developing method, for example, any of a liquid filling method, a dipping method, a shower method and the like may be used, and the developing time is, for example, 30 to 180 seconds.
Examples of the developer include inorganic alkalis such as sodium hydroxide, potassium hydroxide, sodium carbonate, sodium silicate, sodium metasilicate, and ammonia; primary amines such as ethylamine and n-propylamine; diethylamine and di-n. Secondary amines such as propylamine; tertiary amines such as trimethylamine, methyldiethylamine, ethyldimethylamine and triethylamine; tertiary alkanolamines such as dimethylethanolamine, methyldiethanolamine and triethanolamine; pyrrole, piperidine and N-methylpiperidine Alicyclic tertiary amines such as N-methylpyrrolidine, 1,8-diazabicyclo [5.4.0] -7-undecene, 1,5-diazabicyclo [4.3.0] -5-nonene; Collidine, lutidine, kino Aromatic tertiary amines such as emissions; tetramethylammonium hydroxide, the aqueous solution of an alkaline compound such as quaternary ammonium salts such as tetraethyl ammonium hydroxide may be used.
In addition, an appropriate amount of a water-soluble organic solvent such as methanol or ethanol and / or a surfactant can be added to the aqueous solution of the alkaline compound.
After development, for example, by washing with running water, for example, for 30 to 90 seconds, unnecessary portions are removed, and then compressed air or compressed nitrogen is blown to dry to form a predetermined pattern.
その後、このパターンを、ホットプレート、オーブン等の加熱装置により、所定温度、例えば150〜250℃で、所定時間、ホットプレート上では例えば5〜30分間、オーブン中では例えば30〜90分間、加熱処理することにより、目的とするスペーサーを得ることができる。 Thereafter, the pattern is heated by a heating device such as a hot plate or an oven at a predetermined temperature, for example, 150 to 250 ° C., for a predetermined time, for example, for 5 to 30 minutes on the hot plate, or for 30 to 90 minutes in the oven. By doing so, the target spacer can be obtained.
以下に、実施例および比較例を示して、本発明をさらに具体的に説明するが、本発明は、これらの実施例に限定されるものではない。
合成例1
冷却管、撹拌機を備えたフラスコに、2,2’−アゾビス(2,4−ジメチルバレロニトリル)5重量部、ジエチレングリコールエチルメチルエーテル200重量部を仕込み、引き続いてメタクリル酸18重量部、メタクリル酸グリシジル40重量部、スチレン5重量部、メタクリル酸トリシクロ[ 5.2.1.02,6]デカン−8−イル32重量部を仕込んで、窒素置換したのち、さらに1,3−ブタジエン5重量部を仕込み、緩やかに攪拌しつつ、溶液の温度を70℃に上昇させ、この温度を5時間保持して重合させて、共重合体〔A−1〕の溶液を得た。
この溶液の固形分濃度は33.1重量%であり、共重合体〔A−1〕のMwは11,000であった。
合成例2
冷却管、撹拌機を備えたフラスコに、2,2’−アゾビス(2,4−ジメチルバレロニトリル)5重量部、ジエチレングリコールジメチルエーテル200重量部を仕込み、引き続いてメタクリル酸18重量部、メタクリル酸グリシジル40重量部、スチレン5重量部、メタクリル酸トリシクロ[ 5.2.1.02,6]デカン−8−イル32重量部を仕込んで、窒素置換したのち、さらに1,3−ブタジエン5重量部を仕込み、緩やかに攪拌しつつ、溶液の温度を70℃に上昇させ、この温度を5時間保持して重合させて、共重合体〔A−2〕の溶液を得た。
この溶液の固形分濃度は33.0重量%であり、共重合体〔A−2〕のMwは11,000であった。
EXAMPLES Hereinafter, the present invention will be described more specifically with reference to examples and comparative examples. However, the present invention is not limited to these examples.
Synthesis example 1
A flask equipped with a condenser and a stirrer was charged with 5 parts by weight of 2,2′-azobis (2,4-dimethylvaleronitrile) and 200 parts by weight of diethylene glycol ethyl methyl ether, followed by 18 parts by weight of methacrylic acid and methacrylic acid. After charging 40 parts by weight of glycidyl, 5 parts by weight of styrene, and 32 parts by weight of tricyclo [5.2.1.0 2,6 ] decan-8-yl methacrylate, and substituting with nitrogen, 5 weights of 1,3-butadiene is further added. The temperature of the solution was raised to 70 ° C. while gently stirring, and this temperature was maintained for 5 hours for polymerization to obtain a solution of copolymer [A-1].
The solid content concentration of this solution was 33.1% by weight, and the Mw of the copolymer [A-1] was 11,000.
Synthesis example 2
A flask equipped with a condenser and a stirrer was charged with 5 parts by weight of 2,2′-azobis (2,4-dimethylvaleronitrile) and 200 parts by weight of diethylene glycol dimethyl ether, followed by 18 parts by weight of methacrylic acid, 40 of glycidyl methacrylate. Parts by weight, 5 parts by weight of styrene, 32 parts by weight of tricyclo [5.2.1.0 2,6 ] decan-8-yl methacrylate, and after purging with nitrogen, 5 parts by weight of 1,3-butadiene was further added. While stirring and gently stirring, the temperature of the solution was raised to 70 ° C., and this temperature was maintained for 5 hours for polymerization to obtain a solution of copolymer [A-2].
The solid content concentration of this solution was 33.0% by weight, and Mw of the copolymer [A-2] was 11,000.
合成例3
冷却管、撹拌機を備えたフラスコに、2,2’−アゾビス(2,4−ジメチルバレロニトリル)5重量部、ジエチレングリコールエチルメチルエーテル100重量部とプロピレングリコールモノメチルエーテルアセテート100重量部を仕込み、引き続いてメタクリル酸10重量部、メタクリル酸グリシジル40重量部、スチレン5重量部、メタクリル酸トリシクロ[ 5.2.1.02,6]デカン−8−イル40重量部を仕込んで、窒素置換したのち、さらに1,3−ブタジエン5重量部を仕込み、緩やかに攪拌しつつ、溶液の温度を70℃に上昇させ、この温度を5時間保持して重合させて、共重合体〔A−3〕の溶液を得た。
この溶液の固形分濃度は33.2重量%であり、共重合体〔A−3〕のMwは10,000であった。
合成例4
冷却管、撹拌機を備えたフラスコに、2,2’−アゾビス(2,4−ジメチルバレロニトリル)5重量部、ジエチレングリコールジメチルエーテル100重量部とプロピレングリコールモノメチルエーテル100重量部を仕込み、引き続いてメタクリル酸10重量部、メタクリル酸グリシジル40重量部、スチレン5重量部、メタクリル酸トリシクロ[ 5.2.1.02,6]デカン−8−イル40重量部を仕込んで、窒素置換したのち、さらに1,3−ブタジエン5重量部を仕込み、緩やかに攪拌しつつ、溶液の温度を70℃に上昇させ、この温度を5時間保持して重合させて、共重合体〔A−4〕の溶液を得た。
この溶液の固形分濃度は33.1重量%であり、共重合体〔A−4〕のMwは10,000であった。
Synthesis example 3
A flask equipped with a condenser and a stirrer was charged with 5 parts by weight of 2,2′-azobis (2,4-dimethylvaleronitrile), 100 parts by weight of diethylene glycol ethyl methyl ether and 100 parts by weight of propylene glycol monomethyl ether acetate, and subsequently. 10 parts by weight of methacrylic acid, 40 parts by weight of glycidyl methacrylate, 5 parts by weight of styrene, 40 parts by weight of tricyclo [5.2.1.0 2,6 ] decan-8-yl methacrylate, Further, 5 parts by weight of 1,3-butadiene was added, the temperature of the solution was raised to 70 ° C. while gently stirring, and this temperature was maintained for 5 hours to polymerize to obtain a copolymer [A-3]. A solution was obtained.
The solid content concentration of this solution was 33.2% by weight, and the Mw of the copolymer [A-3] was 10,000.
Synthesis example 4
A flask equipped with a condenser and a stirrer was charged with 5 parts by weight of 2,2′-azobis (2,4-dimethylvaleronitrile), 100 parts by weight of diethylene glycol dimethyl ether and 100 parts by weight of propylene glycol monomethyl ether, followed by methacrylic acid. 10 parts by weight, 40 parts by weight of glycidyl methacrylate, 5 parts by weight of styrene, and 40 parts by weight of tricyclo [5.2.1.0 2,6 ] decan-8-yl methacrylate were charged and replaced with nitrogen. , 3-Butadiene is charged in 5 parts by weight, the temperature of the solution is raised to 70 ° C. while gently stirring, and polymerization is carried out while maintaining this temperature for 5 hours to obtain a solution of the copolymer [A-4]. It was.
The solid content concentration of this solution was 33.1% by weight, and the Mw of the copolymer [A-4] was 10,000.
実施例1
組成物溶液の調製
共重合体〔A〕として合成例1で得た共重合体〔A−1〕の溶液100重量部(固形分として)、重合性化合物〔B〕としてKAYARAD DPHA(日本化薬(株)製)100重量部、光重合開始剤〔C〕として2−ベンジル−2−N,N−ジメチルアミノ−1−(4−モルホリノフェニル)−1−ブタノン(商品名「IRGACURE 369」、チバ・スペシャリティー・ケミカルズ社製)15重量部を混合し、固形分濃度が25.5重量%になり、且つ溶剤としてジエチレングリコールエチルメチルエーテル、プロピレングリコールモノメチルエーテルアセテート、ベンジルアルコールおよびエチレングリコールモノブチルエーテルアセテートの重量比が55:30:10:5になるように混合し、溶解したのち、孔径0.2μmのPTFE(ポリテトラフルオロエチレン)フィルタでろ過して、組成物溶液(S−1)を調製した。
Example 1
Preparation of composition solution As copolymer [A], 100 parts by weight (as solids) of the solution of copolymer [A-1] obtained in Synthesis Example 1, and KAYARAD DPHA (Nippon Kayaku) as polymerizable compound [B] 100 parts by weight manufactured by (Co., Ltd.), 2-benzyl-2-N, N-dimethylamino-1- (4-morpholinophenyl) -1-butanone (trade name “IRGACURE 369”) as a photopolymerization initiator [C], Ciba Specialty Chemicals Co., Ltd.) is mixed with 15 parts by weight to give a solid concentration of 25.5% by weight, and diethylene glycol ethyl methyl ether, propylene glycol monomethyl ether acetate, benzyl alcohol and ethylene glycol monobutyl ether acetate as solvents. After mixing and dissolving to a weight ratio of 55: 30: 10: 5, the pores And filtered through a 0.2μm PTFE (polytetrafluoroethylene) filter to prepare a composition solution (S-1).
(I)樹脂液保存安定性の評価
実施例1で調製した樹脂組成物溶液における粘度を、東京計器(株)製 ELD型粘度計を用いて測定した。その後、該組成物を25℃にて静置しつつ、25℃における溶液粘度を毎日測定した。調製直後の粘度を基準に5%増粘するのに要した日数を求め、この日数を表1に示した。この日数が20日以上のとき、保存安定性は良好といえる。
(II)減圧乾燥(VCD)時間の評価
550×650mmのクロム成膜ガラス上に、調製した組成物溶液を、スリットダイコーター(TR632105−CL、東京応化工業(株)製)を用いて硬化後の膜厚が4μmになるような条件で塗布した。その後、減圧度が常圧から0.5Torrに到達するまでの時間(以下VCD時間という)を測定した。VCD時間は短い方が有利である。
(III)塗布性(塗膜表面のモヤムラ)の評価
550×650mmのクロム成膜ガラス上に、調製した組成物溶液を、スリットダイコーターを用いて塗布した。0.5Torrまで減圧乾燥した後、ベーク炉中、100℃にて2分間プレベークして塗膜を形成し、さらに2000J/m2の露光量で露光することにより、クロム成膜ガラスの上面からの膜厚が4μmの膜を形成した。
膜表面をナトリウムランプにて照らし、目視にて塗布膜面を確認した。モヤムラがはっきりと確認できた場合は×、僅かに確認できた場合は△、殆ど確認されなかった場合は〇とした。
(IV)スリットノズルの乾き性評価
550×650mmのクロム成膜ガラス上に、調製した組成物溶液を、スリットダイコーターを用いて塗布した。塗布後はノズル先端の洗浄を行わずに、そのまま放置した。10分後、ノズル先端の洗浄をおこなうことなく同様の塗布を行い、(III)塗布性(塗膜表面のモヤムラ)の評価と同様な塗膜を作製した。
膜表面をナトリウムランプにて照らし、目視にて塗布膜面を確認した。縦筋ムラがはっきりと確認できた場合は×、僅かに確認できた場合は△、殆ど確認されなかった場合は〇とした。
(I) Evaluation of storage stability of resin solution The viscosity of the resin composition solution prepared in Example 1 was measured using an ELD viscometer manufactured by Tokyo Keiki Co., Ltd. Thereafter, the solution viscosity at 25 ° C. was measured every day while the composition was allowed to stand at 25 ° C. The number of days required to increase the viscosity by 5% based on the viscosity immediately after the preparation was determined, and the number of days is shown in Table 1. When this number of days is 20 days or more, it can be said that the storage stability is good.
(II) Evaluation of vacuum drying (VCD) time On the 550 × 650 mm chromium film-forming glass, the prepared composition solution was cured using a slit die coater (TR632105-CL, manufactured by Tokyo Ohka Kogyo Co., Ltd.). The film thickness was 4 μm. Thereafter, the time until the degree of reduced pressure reached 0.5 Torr from normal pressure (hereinafter referred to as VCD time) was measured. A shorter VCD time is advantageous.
(III) Evaluation of applicability (moisture unevenness of coating film surface) The prepared composition solution was applied on a 550 × 650 mm chromium-deposited glass using a slit die coater. After drying under reduced pressure to 0.5 Torr, pre-baking in a baking oven at 100 ° C. for 2 minutes to form a coating film, and further exposing at an exposure amount of 2000 J / m 2 , the chromium film from the top surface A film having a thickness of 4 μm was formed.
The surface of the film was illuminated with a sodium lamp, and the coated film surface was visually confirmed. The mark was X when the mist was clearly confirmed, △ when the mist was slightly confirmed, and ◯ when the mist was hardly confirmed.
(IV) Dryability Evaluation of Slit Nozzle The prepared composition solution was applied on a 550 × 650 mm chromium-deposited glass using a slit die coater. After coating, the nozzle tip was not washed and left as it was. After 10 minutes, the same coating was performed without cleaning the nozzle tip, and a coating film similar to (III) evaluation of coating property (moisture unevenness on the coating film surface) was produced.
The surface of the film was illuminated with a sodium lamp, and the coated film surface was visually confirmed. When the vertical stripe unevenness was clearly confirmed, it was evaluated as x, when it was slightly confirmed, Δ, when it was hardly confirmed, it was evaluated as ◯.
実施例2〜16、比較例1〜3
実施例1において、〔A〕成分〜〔D〕成分として、表1に記載の通りの種類、量を使用した他は、実施例1と同様にして組成物溶液を調製した。組成物溶液の固形分濃度の調整においては、〔D〕成分の混合比が表1に記載のとおりとなるように行った。得られた組成物〔S−2〕〜〔S−16〕および〔s−1〕〜〔s−3〕につき、実施例1と同様にして樹脂液保存安定性の評価および塗布評価を行った結果を表1に示した。
実施例15および16は参考例である。
Examples 2-16, Comparative Examples 1-3
In Example 1, a composition solution was prepared in the same manner as in Example 1, except that the types and amounts shown in Table 1 were used as the components [A] to [D]. Adjustment of the solid content concentration of the composition solution was performed so that the mixing ratio of the component [D] was as shown in Table 1. With respect to the obtained compositions [S-2] to [S-16] and [s-1] to [s-3], evaluation of resin solution storage stability and coating evaluation were performed in the same manner as in Example 1. The results are shown in Table 1.
Examples 15 and 16 are reference examples.
表1中、成分の略称は次の化合物を示す。
(B−1):KAYARAD DPHA(日本化薬(株)製)
(B−2):KAYARAD DPHA−40H(日本化薬(株)製)
(C−1):2−(4−メチルベンジル)−2−ジメチルアミノ−1−(4−モルホリノフェニル)−ブタノン−1(チバ・スペシャルティー・ケミカルズ社製 イルガキュア369)
(C−2):2−メチル−1−[4−(メチルチオ)フェニル]−2−モルホリノプロパン−1−オン(チバ・スペシャルティー・ケミカルズ社製 イルガキュア907)
(C−3):2,2’−ビス(o−クロロフェニル)−4,4’,5,5’−テトラフェニル−1,2’−ビイミダゾール
(C−4):4,4’−ビス(ジエチルアミノ)ベンゾフェノン
(C−5):2−メルカプトベンゾチアゾール
(D−1):ジエチレングリコールエチルメチルエーテル
(D−2):ジエチレングリコールジメチルエーテル
(D−3):プロピレングリコールモノメチルエーテルアセテート
(D−4):プロピレングリコールモノメチルエーテル
(D−5):ベンジルアルコール
(D−6):エチレングリコールモノブチルエーテルアセテート
(D−7):ジエチレングリコールモノエチルエーテルアセテート
表1中、−印は、該成分が添加されていないことを示す。
In Table 1, the abbreviations of the components indicate the following compounds.
(B-1): KAYARAD DPHA (manufactured by Nippon Kayaku Co., Ltd.)
(B-2): KAYARAD DPHA-40H (manufactured by Nippon Kayaku Co., Ltd.)
(C-1): 2- (4-methylbenzyl) -2-dimethylamino-1- (4-morpholinophenyl) -butanone-1 (Irgacure 369 manufactured by Ciba Specialty Chemicals)
(C-2): 2-methyl-1- [4- (methylthio) phenyl] -2-morpholinopropan-1-one (Irgacure 907 manufactured by Ciba Specialty Chemicals)
(C-3): 2,2′-bis (o-chlorophenyl) -4,4 ′, 5,5′-tetraphenyl-1,2′-biimidazole (C-4): 4,4′-bis (Diethylamino) benzophenone (C-5): 2-mercaptobenzothiazole (D-1): diethylene glycol ethyl methyl ether (D-2): diethylene glycol dimethyl ether (D-3): propylene glycol monomethyl ether acetate (D-4): Propylene glycol monomethyl ether (D-5): benzyl alcohol (D-6): ethylene glycol monobutyl ether acetate (D-7): diethylene glycol monoethyl ether acetate In Table 1,-indicates that the component is not added Indicates.
Claims (7)
前記溶剤〔D〕が、
下記式(1)
で表される化合物2〜20重量%、
ジエチレングリコールジメチルエーテルおよびジエチレングリコールメチルエチルエーテルの少なくともいずれか一方30〜75重量%、および
沸点が100℃〜150℃の溶剤20〜55重量%を含有する混合溶剤でありそしてスリットダイコーターにより基板に塗布される、ことを特徴とする前記感光性樹脂組成物。 A photosensitive resin composition comprising an alkali-soluble copolymer [A], a polymerizable compound having an ethylenically unsaturated bond [B], a radiation-sensitive polymerization initiator [C], and a solvent [D],
The solvent [D] is
Following formula (1)
2 to 20% by weight of a compound represented by
30 to 75% by weight of at least one of diethylene glycol dimethyl ether and diethylene glycol methyl ethyl ether, and
Boiling point is applied to a substrate by mixing a solvent and a slit die coater containing 20-55 wt% solvent 100 ° C. to 150 DEG ° C., the photosensitive resin composition characterized by.
Use according photosensitive resin composition according to any one of claim 1 to 4, and the photosensitive resin composition applied to a substrate by a slit die coater.
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