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JP4687366B2 - Semiconductor chip storage tray and semiconductor chip transfer method - Google Patents

Semiconductor chip storage tray and semiconductor chip transfer method Download PDF

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JP4687366B2
JP4687366B2 JP2005297270A JP2005297270A JP4687366B2 JP 4687366 B2 JP4687366 B2 JP 4687366B2 JP 2005297270 A JP2005297270 A JP 2005297270A JP 2005297270 A JP2005297270 A JP 2005297270A JP 4687366 B2 JP4687366 B2 JP 4687366B2
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semiconductor chip
chip storage
base plate
storage tray
area
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和夫 矢澤
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Seiko Epson Corp
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Description

本発明は、半導体チップ収容トレイ及び半導体チップの搬送方法に関する。特に本発明は、従来と比べて半導体チップの搬送コストを低くすることができる半導体チップ収容トレイ及び半導体チップの搬送方法に関する。   The present invention relates to a semiconductor chip storage tray and a semiconductor chip transport method. In particular, the present invention relates to a semiconductor chip storage tray and a method for transporting semiconductor chips, which can reduce the cost of transporting semiconductor chips as compared with the prior art.

図6は、従来の半導体チップ収容トレイ100の構成及び使用方法を説明する為の斜視図である。半導体チップ収容トレイ100はリバーシブルであり、積み重ねて使用される。図7は、半導体チップ収容トレイ100の使用時の断面図である。   FIG. 6 is a perspective view for explaining the configuration and usage of the conventional semiconductor chip storage tray 100. The semiconductor chip storage tray 100 is reversible and is used by being stacked. FIG. 7 is a cross-sectional view of the semiconductor chip storage tray 100 when in use.

半導体チップ収容トレイ100は、上面に格子状の上面リブ102を有しており、また、下面に格子状の下面リブ103を有している。半導体チップ収容トレイ100が積み重ねられた場合、下段の半導体チップ収容トレイ100の上面リブ102と、上段の半導体チップ収容トレイ100の下面リブ103は、端面が相互に向き合う。そして、上面リブ102及び下面リブ103によって、半導体チップ110を収容するエリア101aが、相互に分離される。半導体チップ110は、能動面を上にした状態で、エリア101aに収容される。   The semiconductor chip storage tray 100 has a lattice-like upper surface rib 102 on the upper surface, and has a lattice-like lower surface rib 103 on the lower surface. When the semiconductor chip storage tray 100 is stacked, the end surfaces of the upper surface rib 102 of the lower semiconductor chip storage tray 100 and the lower surface rib 103 of the upper semiconductor chip storage tray 100 face each other. Then, the area 101 a that accommodates the semiconductor chip 110 is separated from each other by the upper surface rib 102 and the lower surface rib 103. The semiconductor chip 110 is accommodated in the area 101a with the active surface facing upward.

半導体チップ110を、裏面が上を向いた状態で半導体チップ収容トレイ100から取り出す場合、積み重ねられた半導体チップ収容トレイ100の上下を反転させる必要がある。この場合、搬送時及び反転時に、半導体チップ110がエリア101a内で上下動することを抑制する必要がある。従来は、積み重ねられた半導体チップ収容トレイ100の相互間に紙120を挟んでいた。   When the semiconductor chip 110 is taken out from the semiconductor chip storage tray 100 with the back surface facing up, it is necessary to invert the stacked semiconductor chip storage tray 100. In this case, it is necessary to prevent the semiconductor chip 110 from moving up and down in the area 101a during conveyance and reversal. Conventionally, the paper 120 is sandwiched between the stacked semiconductor chip storage trays 100.

上記した従来技術では、積み重ねられた半導体チップ収容トレイの相互間に紙を挟む必要があった。このため、半導体チップを半導体チップ収容トレイに収容する場合、紙そのもののコスト及び紙を挟むための作業コストを要していた。また、半導体チップを半導体チップ収容トレイから取り出す場合、紙を取り外すための作業コストを要していた。従って、半導体チップの搬送コストが高くなっていた。   In the prior art described above, it is necessary to sandwich paper between the stacked semiconductor chip storage trays. For this reason, when the semiconductor chip is stored in the semiconductor chip storage tray, the cost of the paper itself and the operation cost for sandwiching the paper are required. Moreover, when taking out a semiconductor chip from a semiconductor chip storage tray, the operation | work cost for removing paper was required. Therefore, the cost for transporting the semiconductor chip is high.

本発明は上記のような事情を考慮してなされたものであり、その目的は、従来と比べて半導体チップの搬送コストを低くすることができる半導体チップ収容トレイ及び半導体チップの搬送方法を提供することにある。   The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a semiconductor chip storage tray and a semiconductor chip transport method that can reduce the cost of transporting semiconductor chips as compared with the prior art. There is.

上記課題を解決するため、本発明に係る半導体チップ収容トレイは、複数積み重ねて使用される半導体チップ収容トレイであって、
ベース板と、
前記ベース板の上面に設けられ、該ベース板上の空間を複数のエリアに分割するために、該エリアの境界に沿って部分的に設けられた上面リブと、
前記ベース板の下面に設けられ、該ベース板下の空間を分割し、前記半導体チップ収容トレイが複数積み重ねられた場合に前記上面リブに嵌る下面リブとを具備する。
In order to solve the above problems, a semiconductor chip storage tray according to the present invention is a semiconductor chip storage tray that is used by stacking a plurality of stacks,
A base plate,
An upper surface rib provided on the upper surface of the base plate and partially provided along a boundary of the area to divide the space on the base plate into a plurality of areas;
A lower surface rib that is provided on the lower surface of the base plate, divides the space under the base plate, and fits into the upper surface rib when a plurality of the semiconductor chip storage trays are stacked.

この半導体チップ収容トレイによれば、前記半導体チップ収容トレイが複数積み重ねられた場合に、前記上面リブに前記下面リブが嵌るため、上段の前記ベース板と下段の前記ベース板の間隔は、従来と比べて小さくなる。このため、紙を間に挟まなくても、半導体チップが前記エリア内で上下動することを抑制できる。従って、半導体チップの搬送コストを低くすることができる。
なお、前記下面リブは、平面的な位置関係において前記上面リブと重ならない位置に配置され、かつ、該下面リブの高さは前記上面リブの高さと略同一であるのが好ましい。
According to this semiconductor chip storage tray, when a plurality of the semiconductor chip storage trays are stacked, the lower surface rib fits into the upper surface rib, so the distance between the upper base plate and the lower base plate is Smaller than that. For this reason, it is possible to suppress the semiconductor chip from moving up and down within the area without interposing paper. Therefore, the cost for transporting the semiconductor chip can be reduced.
In addition, it is preferable that the lower surface rib is disposed at a position not overlapping the upper surface rib in a planar positional relationship, and the height of the lower surface rib is substantially the same as the height of the upper surface rib.

前記エリアの平面形状が略長方形である場合、前記上面リブ及び前記下面リブそれぞれは、前記エリアの4辺それぞれに沿って設けられているのが好ましい。このようにすると、前記半導体チップを前記エリア内に収容する際、及び前記半導体チップ収容トレイの上下を反転させた後に前記エリアから取り出す際それぞれにおいて、前記半導体チップが回転することを抑制できる。   When the planar shape of the area is substantially rectangular, it is preferable that each of the upper surface rib and the lower surface rib is provided along each of the four sides of the area. If it does in this way, when the semiconductor chip is accommodated in the area and when the semiconductor chip accommodation tray is turned upside down and taken out from the area, it is possible to suppress the rotation of the semiconductor chip.

前記上面リブ及び前記下面リブの一方は、例えば前記エリアの4隅それぞれに設けられたL字状、T字状、又は十字状のリブであり、前記上面リブ及び前記下面リブの他方は、例えば前記エリアの4辺それぞれの略中央部に設けられた直線状のリブである。   One of the upper surface rib and the lower surface rib is, for example, an L-shaped, T-shaped, or cross-shaped rib provided at each of the four corners of the area, and the other of the upper surface rib and the lower surface rib is, for example, It is a linear rib provided at substantially the center of each of the four sides of the area.

本発明に係る他の半導体チップ収容トレイは、複数積み重ねて使用される半導体チップ収容トレイであって、
ベース板と、
前記ベース板の上面に設けられ、該ベース板上の空間を複数のエリアに分割するために、該エリアの境界に沿って設けられた複数の上面ピン部材と、
前記ベース板の下面に設けられ、該ベース板下の空間を分割し、前記半導体チップ収容トレイが複数積み重ねられた場合に前記上面ピン部材と重ならない位置にある複数の下面ピン部材とを具備する。
Another semiconductor chip storage tray according to the present invention is a semiconductor chip storage tray used by stacking a plurality of,
A base plate,
A plurality of upper surface pin members provided along the boundary of the area, in order to divide the space on the base plate into a plurality of areas, provided on the upper surface of the base plate;
A plurality of lower surface pin members which are provided on the lower surface of the base plate, divide a space under the base plate, and which do not overlap the upper surface pin member when a plurality of the semiconductor chip receiving trays are stacked; .

前記上面ピン部材の高さは前記下面ピン部材の高さと略同一であるのが好ましい。
前記エリアの平面形状が略長方形である場合、前記上面ピン部材及び前記下面ピン部材それぞれは、前記エリアの4辺それぞれに配置されているのが好ましい。この場合、前記上面ピン部材及び前記下面ピン部材の一方は、例えば前記エリアの4隅それぞれの近傍に設けられており、前記上面ピン部材及び前記下面ピン部材の他方は、例えば前記エリアの4辺それぞれの中央部に設けられている。
Preferably, the height of the upper surface pin member is substantially the same as the height of the lower surface pin member.
When the planar shape of the area is substantially rectangular, the upper surface pin member and the lower surface pin member are preferably disposed on each of the four sides of the area. In this case, one of the upper surface pin member and the lower surface pin member is provided, for example, in the vicinity of each of the four corners of the area, and the other of the upper surface pin member and the lower surface pin member is, for example, four sides of the area. It is provided in each central part.

本発明に係る半導体チップの搬送方法は、
ベース板と、
前記ベース板の上面に設けられ、該ベース板上の空間を複数のエリアに分割するために、該エリアの境界に沿って部分的に設けられた上面リブと、
前記ベース板の下面に設けられ、該ベース板下の空間を分割し、前記半導体チップ収容トレイが複数積み重ねられた場合に前記上面リブに嵌る下面リブと、
を具備する半導体チップ収容トレイを複数準備し、
前記複数の半導体チップ収容トレイそれぞれの前記複数のエリアそれぞれに、半導体チップを、上面が上を向いた状態で収容し、
前記半導体チップを収容した前記複数の半導体チップ収容トレイを積み重ね、積み重ねた状態で前記複数の半導体チップ収容トレイを搬送し、
積み重ねた状態の前記複数の半導体チップ収容トレイの上下を反転させた後、前記複数の半導体チップ収容トレイそれぞれを取り外しつつ、前記半導体チップを、下面が上を向いた状態で、前記複数の半導体チップ収容トレイそれぞれから取り出すものである。
A method for transporting a semiconductor chip according to the present invention includes:
A base plate,
An upper surface rib provided on the upper surface of the base plate and partially provided along a boundary of the area to divide the space on the base plate into a plurality of areas;
A lower surface rib that is provided on the lower surface of the base plate, divides the space under the base plate, and fits into the upper surface rib when a plurality of the semiconductor chip storage trays are stacked;
Preparing a plurality of semiconductor chip storage trays,
In each of the plurality of areas of each of the plurality of semiconductor chip storage trays, a semiconductor chip is stored with the upper surface facing upward,
Stacking the plurality of semiconductor chip storage trays containing the semiconductor chips, transporting the plurality of semiconductor chip storage trays in a stacked state,
After reversing the top and bottom of the plurality of semiconductor chip storage trays in a stacked state, the plurality of semiconductor chips are placed with the bottom surface facing upward while removing each of the plurality of semiconductor chip storage trays. It is taken out from each storage tray.

本発明に係る他の半導体チップの搬送方法は、
ベース板と、
前記ベース板の上面に設けられ、該ベース板上の空間を複数のエリアに分割するために、該エリアの境界に沿って設けられた複数の上面ピン部材と、
前記ベース板の下面に設けられ、該ベース板下の空間を分割し、前記半導体チップ収容トレイが複数積み重ねられた場合に前記上面ピン部材と重ならない位置にある複数の下面ピン部材と、
を具備する半導体チップ収容トレイを複数準備し、
前記複数の半導体チップ収容トレイそれぞれに、複数の半導体チップを、上面が上を向いた状態で収容し、
前記複数の半導体チップ収容トレイを積み重ね、積み重ねた状態で前記複数の半導体チップ収容トレイを前記複数の半導体チップとともに搬送し、
積み重ねた状態の前記複数の半導体チップ収容トレイの上下を反転させた後、前記複数の半導体チップ収容トレイそれぞれを取り外しつつ、前記半導体チップを、下面が上を向いた状態で、前記複数の半導体チップ収容トレイそれぞれから取り出すものである。
Another method for transporting semiconductor chips according to the present invention is as follows.
A base plate,
A plurality of upper surface pin members provided along the boundary of the area, in order to divide the space on the base plate into a plurality of areas, provided on the upper surface of the base plate;
A plurality of lower surface pin members which are provided on the lower surface of the base plate, divide the space under the base plate, and are not overlapped with the upper surface pin member when a plurality of the semiconductor chip accommodation trays are stacked;
Preparing a plurality of semiconductor chip storage trays,
In each of the plurality of semiconductor chip storage trays, a plurality of semiconductor chips are stored in a state where the upper surface faces upward,
Stacking the plurality of semiconductor chip storage trays, transporting the plurality of semiconductor chip storage trays together with the plurality of semiconductor chips in a stacked state;
After reversing the top and bottom of the plurality of semiconductor chip storage trays in a stacked state, the plurality of semiconductor chips are placed with the bottom surface facing upward while removing each of the plurality of semiconductor chip storage trays. It is taken out from each storage tray.

発明を実施するための形態BEST MODE FOR CARRYING OUT THE INVENTION

以下、図面を参照して本発明の実施形態について説明する。図1は、本発明の第1の実施形態に係る半導体チップ収容トレイ1を斜め上方から見た図であり、図2は、半導体チップ収容トレイ1を斜め下方から見た図である。半導体チップ収容トレイ1は、略正方形のベース板1aの上面に上面リブ2を設け、かつベース板1aの下面に下面リブ3を設けたものである。半導体チップ収容トレイ1の上面には、半導体チップを収容するためのエリア1bが複数マトリックス状に設けられている。エリア1bの平面形状は略長方形であるが、上面リブ2及び下面リブ3は、それぞれエリア1b相互間の境界に沿って、互いに重ならないように部分的に設けられている。
なお、半導体チップ収容トレイ1は、例えばポリスチレン等のプラスチック樹脂で形成され、金型を用いた射出成形により製造される。
Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a view of the semiconductor chip storage tray 1 according to the first embodiment of the present invention as viewed obliquely from above, and FIG. 2 is a view of the semiconductor chip storage tray 1 as viewed from diagonally below. The semiconductor chip storage tray 1 is provided with an upper surface rib 2 on the upper surface of a substantially square base plate 1a and a lower surface rib 3 on the lower surface of the base plate 1a. On the upper surface of the semiconductor chip storage tray 1, a plurality of areas 1b for storing semiconductor chips are provided in a matrix. The planar shape of the area 1b is substantially rectangular, but the upper surface rib 2 and the lower surface rib 3 are partially provided along the boundary between the areas 1b so as not to overlap each other.
The semiconductor chip storage tray 1 is made of, for example, a plastic resin such as polystyrene, and is manufactured by injection molding using a mold.

本実施形態において、上面リブ2は直線状であり、エリア1bの4辺それぞれの略中央部に配置されている。下面リブ3は、十字状、L字状又はT字状であり、エリア1bの4つの角それぞれに配置されている。   In the present embodiment, the upper surface rib 2 is linear and is disposed at substantially the center of each of the four sides of the area 1b. The lower surface rib 3 has a cross shape, an L shape, or a T shape, and is disposed at each of the four corners of the area 1b.

半導体チップ収容トレイ1は、複数のエリア1bそれぞれに半導体チップを収容した後、複数積み重ねられる。上面リブ2はエリア1bの4辺それぞれに配置されているため、半導体チップがエリア1b内で回転することが抑制される。その後、半導体チップ収容トレイ1は、複数積み重ねられた状態で搬送される。   A plurality of semiconductor chip storage trays 1 are stacked after storing semiconductor chips in each of the plurality of areas 1b. Since the upper surface rib 2 is disposed on each of the four sides of the area 1b, the semiconductor chip is prevented from rotating in the area 1b. Thereafter, a plurality of semiconductor chip storage trays 1 are conveyed in a stacked state.

複数の半導体チップ収容トレイ1が積み重ねられた状態において、下段側の半導体チップ収容トレイ1の上面リブ2は、上段側の半導体チップ収容トレイ1の下面リブ3の隙間に嵌る。また、上段側の下面リブ3は、下段側の上面リブ2の隙間に嵌る。このようにして、下段側の上面リブ2と、上段側の下面リブ2とが噛み合い、エリア1b相互間の境界を略隙間無く囲む。これにより、エリア1bに収容された半導体チップが、搬送時に隣のエリア1bに移動することが防止される。   In a state where a plurality of semiconductor chip storage trays 1 are stacked, the upper surface rib 2 of the lower semiconductor chip storage tray 1 fits into the gap between the lower surface ribs 3 of the upper semiconductor chip storage tray 1. Further, the lower rib 3 on the upper stage side fits into the gap between the upper surface rib 2 on the lower stage side. In this manner, the upper-side rib 2 on the lower stage side and the lower-surface rib 2 on the upper stage side mesh with each other, and surround the boundary between the areas 1b with almost no gap. Thereby, the semiconductor chip accommodated in the area 1b is prevented from moving to the adjacent area 1b during transportation.

複数の半導体チップ収容トレイ1は、搬送先で、積み重ねられた状態で上下を反転させられる。これにより、半導体チップを、裏面が上に向いた状態で半導体チップ収容トレイ1から取り出すことができる。なお、下面リブ3はエリア1bの4辺それぞれに配置されているため、取り出し時に半導体チップがエリア1b内で回転することが抑制される。   The plurality of semiconductor chip storage trays 1 are turned upside down while being stacked at the transport destination. Thereby, a semiconductor chip can be taken out from the semiconductor chip storage tray 1 with the back surface facing upward. Since the lower surface ribs 3 are arranged on each of the four sides of the area 1b, the semiconductor chip is prevented from rotating in the area 1b when taken out.

図3は、半導体チップ収容トレイ1の使用時の状態を説明する為の断面図である。上記したように、半導体チップ収容トレイ1は、使用時に複数積み重ねられる。上面リブ2と下面リブ3の高さは略同一であり、かつ、上面リブ2及び下面リブ3は、平面配置において相互に重ならないように配置されている。このため、上段のベース板1aと下段のベース板1aの間隔は、上面リブ2の高さに等しくなり、従来と比べて小さくなる(例えば半分)。従って、紙を使用しなくても、搬送時及び反転時に半導体チップ10がエリア1b内で上下動することを、抑制できる。   FIG. 3 is a cross-sectional view for explaining a state in use of the semiconductor chip storage tray 1. As described above, a plurality of semiconductor chip storage trays 1 are stacked during use. The heights of the upper surface rib 2 and the lower surface rib 3 are substantially the same, and the upper surface rib 2 and the lower surface rib 3 are arranged so as not to overlap each other in a planar arrangement. For this reason, the distance between the upper base plate 1a and the lower base plate 1a is equal to the height of the upper surface rib 2 and is smaller (for example, half) than in the prior art. Therefore, it is possible to suppress the semiconductor chip 10 from moving up and down in the area 1b during conveyance and reversal without using paper.

以上、本発明の第1の実施形態によれば、半導体チップ収容トレイ1の上面に設けられた上面リブ2、及び下面に設けられた下面リブ3それぞれを、エリア1b相互間の境界に沿って、相互に重ならないように配置している。このため、複数の半導体チップ収容トレイ1を積み重ねた場合、上段のベース板1aと下段のベース板1aの間隔は、上面リブ2の高さに等しくなり、従来と比べて小さくなる。   As described above, according to the first embodiment of the present invention, the upper surface rib 2 provided on the upper surface of the semiconductor chip storage tray 1 and the lower surface rib 3 provided on the lower surface are respectively arranged along the boundary between the areas 1b. They are arranged so as not to overlap each other. For this reason, when a plurality of semiconductor chip storage trays 1 are stacked, the distance between the upper base plate 1a and the lower base plate 1a is equal to the height of the upper surface rib 2 and is smaller than the conventional one.

従って、紙を使用しなくても、搬送時及び反転時に半導体チップ10がエリア1b内で上下動することを、抑制できる。このため、半導体チップの搬送コストを低くすることができる。   Therefore, it is possible to suppress the semiconductor chip 10 from moving up and down in the area 1b during conveyance and reversal without using paper. For this reason, the conveyance cost of a semiconductor chip can be lowered.

図4は、本発明の第2の実施形態に係る半導体チップ収容トレイ1を斜め上方から見た図であり、図5は、図4に示した半導体チップ収容トレイ1を斜め下方から見た図である。本実施形態に係る半導体チップ収容トレイ1は、上面リブ2の代わりに上面ピン2aを有している点、及び下面リブ3の代わりに下面リブ3aを有している点を除いて、第1の実施形態に係る半導体チップ収容トレイ1と同一の構成である。また、本実施形態に係る半導体チップ収容トレイ1の使用方法も、第1の実施形態に係る半導体チップ収容トレイ1の使用方法と同一である。以下、第1の実施形態と同一の構成については同一の符号を付し、説明を省略する。   FIG. 4 is a view of the semiconductor chip storage tray 1 according to the second embodiment of the present invention as viewed obliquely from above, and FIG. 5 is a view of the semiconductor chip storage tray 1 shown in FIG. 4 as viewed from obliquely below. It is. The semiconductor chip storage tray 1 according to this embodiment is the first except that it has an upper surface pin 2a instead of the upper surface rib 2 and a lower surface rib 3a instead of the lower surface rib 3. This is the same configuration as the semiconductor chip storage tray 1 according to the embodiment. The method for using the semiconductor chip storage tray 1 according to the present embodiment is also the same as the method for using the semiconductor chip storage tray 1 according to the first embodiment. Hereinafter, the same components as those of the first embodiment are denoted by the same reference numerals, and description thereof is omitted.

上面ピン2a及び下面ピン3aそれぞれは、エリア1bの4辺それぞれに、相互に重ならないように配置されている。上面ピン2aは、エリア1bの4辺それぞれの略中央部に複数(例えば2本)配置されている。下面ピン3aは、エリア1bの4つの角それぞれの近傍に、角を挟むように配置されている。
本実施形態によっても、第1の実施形態と同一の効果を得ることができる。
Each of the upper surface pin 2a and the lower surface pin 3a is disposed on each of the four sides of the area 1b so as not to overlap each other. A plurality of (for example, two) upper surface pins 2a are arranged at substantially the center of each of the four sides of the area 1b. The lower surface pins 3a are arranged in the vicinity of the four corners of the area 1b so as to sandwich the corners.
Also according to this embodiment, the same effect as that of the first embodiment can be obtained.

尚、本発明は上述した実施形態に限定されるものではなく、本発明の主旨を逸脱しない範囲内で種々変更して実施することが可能である。例えば第1の実施形態において、上面リブ2及び下面リブ3の配置を、互いが重ならない範囲で変えてもよい。この場合、上面リブ2及び下面リブ3それぞれが、エリア1bの4辺それぞれに位置するようにするのが好ましい。また、第2の実施形態において、上面ピン2a及び下面ピン3aの配置を、互いに重ならない範囲で変えてもよい。   Note that the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention. For example, in 1st Embodiment, you may change arrangement | positioning of the upper surface rib 2 and the lower surface rib 3 in the range which does not mutually overlap. In this case, it is preferable that the upper surface rib 2 and the lower surface rib 3 are positioned on each of the four sides of the area 1b. In the second embodiment, the arrangement of the upper surface pins 2a and the lower surface pins 3a may be changed within a range that does not overlap each other.

第1の実施形態に係る半導体チップ収容トレイ1を斜め上方から見た図。The figure which looked at the semiconductor chip accommodation tray 1 which concerns on 1st Embodiment from diagonally upward. 半導体チップ収容トレイ1を斜め下方から見た図。The figure which looked at the semiconductor chip accommodation tray 1 from diagonally downward. 半導体チップ収容トレイ1の使用時の状態を説明する為の断面図。Sectional drawing for demonstrating the state at the time of use of the semiconductor chip accommodation tray. 第2の実施形態に係る半導体チップ収容トレイ1を斜め上方から見た図。The figure which looked at the semiconductor chip accommodation tray 1 which concerns on 2nd Embodiment from diagonally upward. 図4に示した半導体チップ収容トレイ1を斜め下方から見た図。The figure which looked at the semiconductor chip accommodation tray 1 shown in FIG. 4 from diagonally downward. 従来の半導体チップ収容トレイ100の構成及び使用方法を説明する斜視図。The perspective view explaining the structure and usage method of the conventional semiconductor chip storage tray 100. FIG. 半導体チップ収容トレイ100の使用時の断面図。Sectional drawing at the time of use of the semiconductor chip accommodation tray 100. FIG.

符号の説明Explanation of symbols

1,100…半導体チップ収容トレイ、1a,101a…ベース板、1b…エリア、2,102…上面リブ、2a…上面ピン、3,103…下面リブ、3a…下面ピン、10,110…半導体チップ,120…紙 DESCRIPTION OF SYMBOLS 1,100 ... Semiconductor chip accommodation tray, 1a, 101a ... Base board, 1b ... Area, 2,102 ... Upper surface rib, 2a ... Upper surface pin, 3,103 ... Lower surface rib, 3a ... Lower surface pin, 10, 110 ... Semiconductor chip 120 ... paper

Claims (4)

複数積み重ねて使用される半導体チップ収容トレイであって、
ベース板と、
前記ベース板の上面に設けられ、該ベース板上の空間を複数のエリアに分割するために、該エリアの境界に沿って設けられた複数の上面ピン部材と、
前記ベース板の下面に設けられ、該ベース板下の空間を分割し、前記半導体チップ収容トレイが複数積み重ねられた場合に前記上面ピン部材と重ならない位置にある複数の下面ピン部材と、
を具備する半導体チップ収容トレイ。
A semiconductor chip storage tray used by stacking a plurality of stacks,
A base plate,
A plurality of upper surface pin members provided along the boundary of the area, in order to divide the space on the base plate into a plurality of areas, provided on the upper surface of the base plate;
A plurality of lower surface pin members which are provided on the lower surface of the base plate, divide the space under the base plate, and are not overlapped with the upper surface pin member when a plurality of the semiconductor chip accommodation trays are stacked;
A semiconductor chip storage tray.
前記上面ピン部材の高さは前記下面ピン部材の高さと同一である請求項1に記載の半導体チップ収容トレイ。 The semiconductor chip storage tray according to claim 1 , wherein a height of the upper surface pin member is the same as a height of the lower surface pin member. 前記エリアの平面形状は長方形であり、
前記上面ピン部材及び前記下面ピン部材それぞれは、前記エリアの4辺それぞれに配置されている請求項1又は2に記載の半導体チップ収容トレイ。
The planar shape of the area is a rectangle ,
The semiconductor chip storage tray according to claim 1 , wherein each of the upper surface pin member and the lower surface pin member is disposed on each of four sides of the area.
ベース板と、
前記ベース板の上面に設けられ、該ベース板上の空間を複数のエリアに分割するために、該エリアの境界に沿って設けられた複数の上面ピン部材と、
前記ベース板の下面に設けられ、該ベース板下の空間を分割し、前記半導体チップ収容トレイが複数積み重ねられた場合に前記上面ピン部材と重ならない位置にある複数の下面ピン部材と、
を具備する半導体チップ収容トレイを複数準備し、
前記複数の半導体チップ収容トレイそれぞれに、複数の半導体チップを、上面が上を向いた状態で収容し、
前記複数の半導体チップ収容トレイを積み重ね、積み重ねた状態で前記複数の半導体チップ収容トレイを前記複数の半導体チップとともに搬送し、
積み重ねた状態の前記複数の半導体チップ収容トレイの上下を反転させた後、前記複数の半導体チップ収容トレイそれぞれを取り外しつつ、前記半導体チップを、下面が上を向いた状態で、前記複数の半導体チップ収容トレイそれぞれから取り出す、半導体チップの搬送方法。
A base plate,
A plurality of upper surface pin members provided along the boundary of the area, in order to divide the space on the base plate into a plurality of areas, provided on the upper surface of the base plate;
A plurality of lower surface pin members which are provided on the lower surface of the base plate, divide the space under the base plate, and are not overlapped with the upper surface pin member when a plurality of the semiconductor chip accommodation trays are stacked;
Preparing a plurality of semiconductor chip storage trays,
In each of the plurality of semiconductor chip storage trays, a plurality of semiconductor chips are stored in a state where the upper surface faces upward,
Stacking the plurality of semiconductor chip storage trays, transporting the plurality of semiconductor chip storage trays together with the plurality of semiconductor chips in a stacked state;
After reversing the top and bottom of the plurality of semiconductor chip storage trays in a stacked state, the plurality of semiconductor chips are placed with the bottom surface facing upward while removing each of the plurality of semiconductor chip storage trays. A method of transporting semiconductor chips, which is taken out from each storage tray.
JP2005297270A 2005-10-12 2005-10-12 Semiconductor chip storage tray and semiconductor chip transfer method Expired - Fee Related JP4687366B2 (en)

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