JP4673420B2 - Multilayer piezoelectric vibrator, ultrasonic motor, and electronic device with ultrasonic motor - Google Patents

Description

  The present invention relates to an ultrasonic motor used for a timepiece, a camera, a printer, a storage device, and the like, and more particularly, to an ultrasonic motor having a large driving force.

  Recently, in the field of micromechanics, an ultrasonic motor that uses an elliptical motion as a combined vibration of a stretching vibration and a bending vibration generated in a piezoelectric element to which a drive signal such as an alternating voltage is applied has been attracting attention. .

  Here, the ultrasonic motor 4 and the ultrasonic motor 5 as a conventional ultrasonic motor will be described with reference to FIG.

  As shown in FIG. 13 (A), the ultrasonic motor 4 is provided with a projection 41 for taking out an output for moving the moving body by pressing against the moving body (not shown) on one end face of the rectangular piezoelectric element 40. Structure.

  Here, the piezoelectric element 40 has four polarization regions 40a, polarization regions 40b, polarization regions 40c, and polarization regions 40d that are polarized in the same direction in the thickness direction and arranged in two rows of two. These polarization regions 40a, 40b, 40c, and 40d have electrodes, respectively. Further, the electrode on the polarization region 40a located diagonally and the electrode on the polarization region 40d are short-circuited using a lead wire or the like, and the electrode on the polarization region 40b and the electrode on the polarization region 40c are similarly connected to the lead wire. Etc. are short-circuited. The ultrasonic motor 4 moves the moving body in the positive direction when a driving signal is input to the polarization regions 40a and 40d, and moves the moving body when the driving signal is input to the polarization regions 40b and 40c. Move in the opposite direction.

  The ultrasonic motor 5 has a piezoelectric element 50 shown in FIG. 13B as a power source. Similar to the piezoelectric element 40, the piezoelectric element 50 has four polarization regions 50 a, a polarization region 50 b, a polarization region 50 c, and a polarization region 50 d that are polarized in the same polarity in the thickness direction and are arranged in two rows by two. . These polarization regions 50a, 50b, 50c, and 50d have electrodes that are insulated from each other.

  The ultrasonic motor 5 receives the drive signal X having the same phase in the polarization regions 50a and 50d, and the drive signal whose phase is advanced by 90 degrees from the drive signal X in the polarization regions 50b and 50c. A moving body (not shown) is moved in the forward direction. Further, when a drive signal whose phase is delayed by 90 degrees from the drive signal X is input to the polarization regions 50b and 50c, the ultrasonic motor 5 moves a moving body (not shown) in the reverse direction.

JP-A-8-237971

  However, since the ultrasonic motor 4 uses only half the polarization region of the piezoelectric element 40 as a power source, a large output cannot be obtained.

  Further, although the ultrasonic motor 5 uses the entire polarization region of the piezoelectric element 50 as a power source, a circuit for shifting the phase of the input signal by 90 degrees is necessary. In particular, in the case of performing self-excited oscillation driving that drives the ultrasonic motor using self-excited oscillation, the configuration of the self-excited oscillation drive circuit becomes complicated because two input signals having different phases are used. was difficult.

  Furthermore, since the ultrasonic motor 4 uses the piezoelectric element 40 and the ultrasonic motor 5 uses the piezoelectric element 50 as both the stretching vibration source and the bending vibration source, a large stretching vibration or bending vibration cannot be obtained. . That is, the conventional ultrasonic motors 4 and 5 cannot obtain a sufficient output. For this reason, in order to obtain a large output using the ultrasonic motors 4 and 5, as shown in FIG. 14, for example, it is necessary to arrange a plurality of ultrasonic motors 4 in parallel using a dedicated jig, and the size can be reduced. Was hindering. Even in this case, since the vibration escapes from the dedicated jig, the output of the ultrasonic motor is reduced.

  In addition, the stretching vibration and the bending vibration cannot be controlled independently of each other, and accordingly, the moving speed and driving force of the moving body cannot be controlled widely.

  SUMMARY OF THE INVENTION An object of the present invention is to provide an ultrasonic motor that can be reduced in size with a low voltage and a large output.

  In order to solve the above problems, the present invention provides a first piezoelectric vibrator having electrodes provided on the front and back surfaces and a second piezoelectric vibration having electrodes provided on the front and back surfaces. A laminated piezoelectric vibrator configured by laminating a plurality of elements, each of the front and back electrodes of the first piezoelectric vibrator and the front and back electrodes of the second piezoelectric vibrator on side surfaces of the laminated piezoelectric vibrator; The laminated piezoelectric vibrator is characterized in that the first piezoelectric vibrator and the second piezoelectric vibrator can be driven independently of each other.

  The first piezoelectric vibrator and the second piezoelectric vibrator excite vibrations different from each other, in particular the first piezoelectric vibrator excites bending vibration, and the second piezoelectric vibrator expands and contracts. It is characterized by exciting.

  Further, the present invention is characterized in that the ultrasonic motor obtains a driving force by the vibration of the laminated piezoelectric vibrator.

  According to the present invention, the first piezoelectric vibrator generates a large bending vibration. In addition, the second piezoelectric vibrator as a stretching vibration source provided separately from the first piezoelectric vibrator generates a large stretching vibration. Further, since the first piezoelectric vibrator and the second piezoelectric vibrator are integrally formed, the bending vibration and the stretching vibration are combined without omission. Therefore, an ultrasonic motor with a large output can be manufactured.

  For this reason, when obtaining the same output as before, the ultrasonic motor can be reduced in size.

  Further, by separately controlling the first piezoelectric vibrator and the second piezoelectric vibrator, the stretching vibration and the bending vibration can be controlled separately.

  Further, by changing the number ratio of the first piezoelectric vibrator and the second piezoelectric vibrator, the ratio of the magnitude of the stretching vibration and the bending vibration can be changed.

  Furthermore, the present invention is an electronic apparatus with an ultrasonic motor having the ultrasonic motor described above.

Here, examples of the electronic device include an electronic timepiece, a measuring instrument, a camera, a printer, a printing machine, a machine tool, a robot, a moving device, and a storage device. According to the present invention, compared to a conventional ultrasonic motor. Since the above-described ultrasonic motor having a large output is used, the size of the ultrasonic motor and its peripheral circuit can be reduced, and thus the electronic device with the ultrasonic motor can be reduced in size. .

  In addition, since the self-excited oscillation driving can be easily applied as a driving method of the ultrasonic motor, the peripheral circuit can be further downsized.

  According to the present invention, the first piezoelectric vibrator generates a large bending vibration. In addition, the second piezoelectric vibrator as a stretching vibration source provided separately from the first piezoelectric vibrator generates a large stretching vibration. Further, since the first piezoelectric vibrator and the second piezoelectric vibrator are integrally formed, the bending vibration and the stretching vibration are combined without omission. Therefore, an ultrasonic motor with a large output can be manufactured.

  In the case of the same output as the conventional one, the ultrasonic motor is downsized.

  Further, by separately controlling the first piezoelectric vibrator and the second piezoelectric vibrator, the stretching vibration and the bending vibration can be controlled separately.

  Furthermore, since the ultrasonic motor is driven by one input signal, the self-excited transmission circuit is simplified, and therefore, the self-excited transmission control can be easily performed.

  According to the present invention, in addition to obtaining the same effect as the above-described invention, the output is further increased because a plurality of the first piezoelectric vibrators and the second piezoelectric vibrators are used.

  Furthermore, according to the present invention, since the above-described ultrasonic motor having a larger output than that of a conventional ultrasonic motor is used, the size of the ultrasonic motor and its peripheral circuits are reduced. Is miniaturized.

  When self-excited oscillation control is used as a method for controlling the ultrasonic motor, the positioning accuracy of the movable part of the electronic device with the ultrasonic motor can be improved and the electronic device can be downsized.

1 is a diagram showing a configuration of an ultrasonic motor 1 as a first embodiment of the present invention. 1 is a diagram illustrating a configuration of a piezoelectric element 10 used in an ultrasonic motor 1. FIG. FIG. 2 is a diagram showing the structure of a piezoelectric vibrator 11 and a piezoelectric vibrator 12 used in a piezoelectric element 10 and electrodes 16a to 16g. FIG. 4 is a diagram showing the operation of the ultrasonic motor 1. FIG. 4 is a diagram showing the operation of the ultrasonic motor 1. It is a figure which shows the structure of the ultrasonic motor 2 as a 2nd embodiment of this invention. FIG. 3 is a diagram showing the structure of a piezoelectric vibrator 21 and a piezoelectric vibrator 22 used in the piezoelectric element 20 of the ultrasonic motor 2 and electrodes 26a to 26g. FIG. 4 is a diagram showing the operation of the ultrasonic motor 2. FIG. 4 is a diagram showing the operation of the ultrasonic motor 2. FIG. 3 is a diagram showing the structure of a piezoelectric vibrator 31 and a piezoelectric vibrator 32 used in a piezoelectric element 30 and electrodes 36a to 36f. It is a figure which shows operation | movement of the ultrasonic motor 3 of 3rd implementation of this invention. It is a block diagram which shows the structure of the electronic device 6 with an ultrasonic motor as the 4th embodiment of this invention. It is a figure which shows the structure of the ultrasonic motor 4 and the ultrasonic motor 5 as a prior art example. It is a figure which shows the method of using the ultrasonic motor 4 and the ultrasonic motor 5 as a prior art example in parallel.

  Hereinafter, an embodiment to which the present invention is applied will be described in detail with reference to FIGS.

  FIGS. 1 to 5 are diagrams for explaining an ultrasonic motor 1 according to a first embodiment. FIGS. 6 to 9 are diagrams for explaining an ultrasonic motor 2 according to a second embodiment. FIG. 10 to FIG. 11 are views showing the third embodiment.

FIG. 12 is a diagram for explaining an electronic apparatus using an ultrasonic motor according to the fourth embodiment.
<First embodiment>
FIG. 1 is a diagram showing the entire configuration of the ultrasonic motor 1.

  As shown in the top view of FIG. 1A and the front view of FIG. 1B, the ultrasonic motor 1 is in contact with the piezoelectric element 10, the support member 13 that supports the piezoelectric element 10, and the end face of the piezoelectric element 10. And a target portion 14 having a moving body 14 a that is moved by the piezoelectric element 10. That is, the ultrasonic motor 1 is an ultrasonic motor that moves the moving body 14 a in a direction parallel to the end face of the piezoelectric element 10.

  As shown in FIG. 2, the piezoelectric element 10 includes, for example, four piezoelectric vibrators 11 (first piezoelectric vibrators) as a flexural vibration source that are integrally laminated, and a piezoelectric vibrator that serves as an insulator on the piezoelectric vibrator 10. For example, four piezoelectric vibrators 12 (second piezoelectric vibrators) serving as expansion / contraction vibration sources are integrally stacked via 18. The piezoelectric element 10 has an electrode (not shown in FIG. 2) described later.

  In addition, you may provide the processus | protrusion driven in contact with the moving body 14a in the approximate center of an end surface.

  Here, the polarization state of the piezoelectric vibrator 11 and the piezoelectric vibrator 12 and the structure of the electrodes of the piezoelectric element 10 will be described with reference to FIG.

  3A is a view showing the side surface 10a (see FIG. 2) of the piezoelectric element 10, and FIG. 3F is a view showing the side surface 10b (see FIG. 2). FIG. 3B is an odd-numbered top view and even-numbered bottom view of the piezoelectric vibrator 11, and FIG. 3C is an odd-numbered bottom view and even-numbered top view of the piezoelectric vibrator 11. FIG. 3D is an odd-numbered top view and even-numbered bottom view of the piezoelectric vibrator 12, and FIG. 3E is an odd-numbered bottom view and an even-numbered top view of the piezoelectric vibrator 12. It is. That is, the joint surface of each piezoelectric vibrator becomes a common electrode.

  First, the polarization states of the piezoelectric vibrator 11 and the piezoelectric vibrator 12 will be described.

  As shown in FIGS. 3B and 3C, the piezoelectric vibrator 11 is divided into four polarization regions 11a, 11b, 11b, which are generated by being divided into two parts in the vertical direction and two parts in the horizontal direction. The polarization region 11c and the polarization region 11d have a structure in which the polarization direction is alternately reversed in the stacking direction. That is, the polarization region 11a and the polarization region 11d are polarized such that the upper surface becomes +, for example, and the polarization region 11b and the polarization region 11c are polarized such that the upper surface becomes −, for example.

  Further, as shown in FIG. 3D and FIG. 3E, the piezoelectric vibrator 12 is polarized so that almost the entire surface is one polarization region, for example, the upper surface becomes + in the stacking direction.

  Next, the structure of the electrodes of the piezoelectric element 10 will be described with reference to FIG.

  The piezoelectric element 10 includes an electrode 16a, an electrode 16b, an electrode 16c, an electrode 16d, an electrode 16e, an electrode 16f, and an electrode 16g.

  Among these, the electrodes 16 a to 16 e are electrodes for inputting signals to the piezoelectric vibrator 11, and the electrodes 16 f and 16 g are electrodes for inputting signals to the piezoelectric vibrator 12.

  The electrode 16a substantially covers one surface of the polarization region 11a of the piezoelectric vibrator 11, and a part thereof is drawn out to the side surface 10a. That is, the upper surfaces of the polarization regions 11a, 11a, 11a, and 11a of the four piezoelectric vibrators 11, 11, 11, and 11 are all the same by the electrode 16a that is continuous through the portion drawn to the side surface 10a. It becomes a potential.

  Similarly, the electrode 16b substantially covers one surface of the polarization region 11b of the piezoelectric vibrator 11, and a part thereof is drawn out to the side surface 10a. That is, the upper surfaces of the polarization regions 11b, 11b, 11b, and 11b of the four piezoelectric vibrators 11, 11, 11, and 11 are all the same by the electrode 16b that is continuous through the portion drawn to the side surface 10a. It becomes a potential.

  The electrode 16c substantially covers one surface of the polarization region 11c of the piezoelectric vibrator 11, and a part thereof is drawn out to the side surface 10b. That is, one surface of the polarization regions 11c, 11c, 11c, and 11c of the four piezoelectric vibrators 11, 11, 11, and 11 is all formed by the electrode 16c that is continuous through the portion drawn out to the side surface 10b. It becomes the same potential. Similarly, the electrode 16d substantially covers one surface of the polarization region 11d of the piezoelectric vibrator 11, and a part thereof is drawn to the side surface 10b. That is, one surface of the polarization regions 11d, 11d, 11d, and 11d of the four piezoelectric vibrators 11, 11, 11, and 11 is all formed by the electrode 16d that is continuous through the portion that is led out to the side surface 10b. It becomes the same potential.

  The electrode 16e covers all the other surfaces of the four polarization regions 11a, 11b, 11c, and 11d of the piezoelectric vibrator 11, and a part of the electrode 16e is drawn to the side surface 10a. That is, the other surfaces of the four polarization regions of the four piezoelectric vibrators 11, 11, 11, 11 are all at the same potential by the electrode 16d that is continuous through the portion drawn to the side surface 10a. .

  Further, in the piezoelectric vibrator 11, when the same drive signal is input to the electrodes 16a, 16b, 16c, and 16d using the electrode 16e as a reference electrode, the polarization regions 11b and 11c contract when the polarization regions 11a and 11d expand, Conversely, when the polarization regions 11a and 11d contract, the polarization regions 11b and 11c expand. Moreover, since the layers are laminated in a direction orthogonal to the displacement direction, the strains contributed by the four piezoelectric vibrators are the same. Accordingly, the piezoelectric vibrator 11 performs bending vibration in the lateral direction.

  That is, since the drive signals input to the same polarization region are the same, the four piezoelectric vibrators 11, 11, 11, and 11 all bend and vibrate in the same direction. Therefore, a large bending vibration occurs in the piezoelectric element 10. Unlike the conventional example shown in FIG. 13, only the bending vibration is excited in the piezoelectric vibrator 11.

  The electrode 16f substantially covers the upper surface of the polarization region 12a of the piezoelectric vibrator 12, and a part of the electrode 16f is drawn to the side surface 10b. That is, the upper surfaces of the polarization regions 12a, 12a, 12a, and 12a of the four piezoelectric vibrators 12, 12, 12, and 12 are all the same by the electrode 16f that is continuous through the portion drawn out to the side surface 10b. It becomes a potential.

  Similarly, the electrode 16g substantially covers the other surface of the polarization region 12a of the piezoelectric vibrator 12, and a part thereof is drawn out to the side surface 10a. That is, the other surface of the polarization region 12a of the four piezoelectric vibrators 12 has the same potential due to the electrode 16g continuous through the portion drawn out to the side surface 10a.

  Further, in the piezoelectric vibrator 12, when a drive signal is input to the electrode 16f with the electrode 16g as a reference, the polarization region 12a expands or contracts, so that the piezoelectric vibrator 12 expands and contracts in the longitudinal direction.

  That is, since the drive signals input to the same polarization region are the same, the four piezoelectric vibrators 12, 12, 12, 12 perform the same stretching vibration. Therefore, a large stretching vibration is generated in the piezoelectric element 10.

  Next, an example of a manufacturing procedure of the piezoelectric element 10 will be described.

  First, a piezoelectric ceramic powder in which a predetermined material is mixed in a predetermined ratio is kneaded with an organic solvent, if necessary, and formed into a predetermined shape and calcined. The conditions for this calcining are almost the same as those for producing ordinary piezoelectric ceramics.

  Next, the electrode conductor paste is divided and applied to one surface of the calcined piezoelectric ceramic so as to correspond to each polarization region. That is, the first piezoelectric ceramic 11 and 18 piezoelectric ceramic is divided into four parts, and the second is applied to almost the entire surface excluding the peripheral portion. Apply different electrodes alternately. Further, one surface of the piezoelectric ceramic to be the piezoelectric vibrator 12 is alternately coated with the first sheet, the second sheet, and the electrodes 16f and 16g.

  Next, a total of five piezoelectric ceramics to be the piezoelectric vibrators 11 and 13 coated with the electrode conductive paste are stacked, and four piezoelectric ceramics to be the piezoelectric vibrator 12 coated with the electrode conductive paste are stacked thereon. After letting it go, bake it. The conditions for the main baking are almost the same as those for producing a normal piezoelectric ceramic. By this main baking, the piezoelectric vibrators 11, 11, 11, 11 and the piezoelectric vibrator 18 and the piezoelectric vibrators 12, 12, 12, 12 are integrally formed.

  Next, the electrodes 16a, 16b, 16c, 16d, 16e, 16f, and 16g are formed in a predetermined structure by applying an electrode paste to a predetermined position on the side surface of the baked piezoelectric ceramic and drying it. . Therefore, the joint surface of each piezoelectric vibrator becomes a common electrode.

  Next, the polarization regions 11a, 11b, 11c, 11d, 11e, 12a, and 12b are polarized in a predetermined direction by applying a predetermined voltage to the electrodes 16a to 16d and the electrode 16g with reference to the electrode 16e. Thus, the piezoelectric element 10 is completed. At this time, no voltage is applied to the intermediate piezoelectric vibrator 18 and therefore no polarization treatment is performed. Then, it acts as an insulator between the piezoelectric vibrators 11 and 12. Incidentally, the insulator 18 may use other materials regardless of the piezoelectric vibrator.

  The operation of the ultrasonic motor 1 having the above-described structure will be described with reference to FIGS.

  FIG. 4B and FIG. 5B are diagrams showing a connection structure between the ultrasonic motor 1 and the AC power source 6 (signal source).

  That is, in the ultrasonic motor 1, the electrode 16e and the electrodes 16a, 16b, 16c, 16d of the piezoelectric vibrator 11 are connected to the AC power source 6 via the switches 17a, 17b (switching means), respectively. The electrode 16f of the piezoelectric vibrator 12 is directly connected to the output side of the AC power source 6, and the electrode 16g is directly connected to the reference potential side. Therefore, the connection direction of the electrodes 16a to 16e, that is, whether these electrodes are connected to the output side of the AC power supply 6 or to the ground potential side is switched by the switch 17a and the switch 17b.

  4 and 5, the constituent elements of the ultrasonic motor 1 other than the piezoelectric element 10 are omitted for convenience of explanation, and here, for convenience, the piezoelectric element 10 includes the piezoelectric vibrator 11 and the piezoelectric vibrator. 12 is formed by stacking them one by one with the insulator 18 in between.

  First, as shown in FIG. 4B, the ultrasonic motor when the electrodes 16a, 16b, 16c, and 16d are connected to the output side and the electrode 16e is connected to the ground potential side via the switch 17a and the switch 17b. The operation of No. 1 will be described with reference to (A), (C), and (D) of FIG.

  4A shows a state of stretching vibration of the piezoelectric vibrator 12, and FIG. 4C shows a state of bending vibration of the piezoelectric vibrator 11, respectively, as a top view. FIG. The drive state when the ultrasonic motor 1 is seen from the top is shown.

  When the output potential of the AC power supply 6 becomes higher than the reference potential, the polarization region 11a and the polarization region 11d of the piezoelectric vibrator 11 extend in the longitudinal direction, and the polarization region 11b and the polarization region 11c contract in the longitudinal direction. Therefore, the piezoelectric vibrator 11 bends as shown in the white view of FIG. 4C, and its end face is inclined in the direction indicated by the arrow Y.

  At this time, as described above, since the piezoelectric vibrator 12 is almost entirely polarized in the same direction as the polarization region 11a, the piezoelectric vibrator 12 extends in the longitudinal direction as shown in the white view of FIG. It extends in the direction indicated by arrow X.

  When the output potential of the AC power supply 6 becomes lower than the reference potential, the end face of the piezoelectric vibrator 11 is inclined in the direction of the arrow Y ′ opposite to the arrow Y, and the end face of the piezoelectric vibrator 12 is the arrow X. Shrinks in the opposite direction by 180 degrees.

  That is, the bending vibration generated in the piezoelectric vibrator 11 and the stretching vibration generated in the piezoelectric vibrator 12 are combined. As a result, the end face of the piezoelectric element 10 moves elliptically in the direction indicated by the arrow Z in FIG. The ultrasonic motor 1 moves a moving body (not shown) in pressure contact with the end face in the direction indicated by the arrow Z.

  Next, as shown in FIG. 5B, the electrodes 16a, 16b, 16c, and 16d are connected to the reference potential side and the electrode 16e is connected to the output side, contrary to FIG. The operation will be described with reference to FIGS.

  5A shows a state of stretching vibration of the piezoelectric vibrator 12, and FIG. 5C shows a state of bending vibration of the piezoelectric vibrator 11, using a top view, respectively. The driving state when the ultrasonic motor 1 is viewed from above is shown.

  When the output potential of the AC power supply 6 becomes higher than the reference potential, the polarization region 11a and the polarization region 11d of the piezoelectric vibrator 11 contract in the longitudinal direction, and the polarization region 11b and the polarization region 11c extend in the longitudinal direction. Accordingly, the piezoelectric vibrator 11 bends as shown in the white view of FIG. 5C, and its end face is inclined in the direction indicated by the arrow Y ′.

  At this time, as described above, since the piezoelectric vibrator 12 is almost entirely polarized in the same direction as the polarization region 11a, the piezoelectric vibrator 12 extends in the longitudinal direction as shown in the white view of FIG. It extends in the direction indicated by arrow X.

  When the output potential of the AC power supply 6 becomes lower than the reference potential, the end face of the piezoelectric vibrator 11 is inclined in the direction of the arrow Y opposite to the arrow Y ′, and the end face of the piezoelectric vibrator 12 is the arrow X. Shrink in the opposite direction by 180 degrees.

  For this reason, the end face of the piezoelectric element 10 elliptically moves in the direction indicated by the arrow Z ′ in FIG. 5D. Therefore, the ultrasonic motor 1 moves the moving body (not shown) in pressure contact with the end face to the arrow. It is moved in the direction indicated by Z ′, that is, in the direction opposite to the arrow Z in FIG.

  That is, since the electrode 16e of the piezoelectric vibrator 11 of the ultrasonic motor 1 is connected to the AC power source 6 via the switch 17a and the electrodes 16a, 16b, 16c, and 16d are connected to the AC power source 6 via the switch 17b, the switch 17a, The direction in which the ultrasonic motor 1 moves the moving body 14a can be reversed only by switching both 17b.

  As described above, the ultrasonic motor 1 according to the first embodiment of the present invention includes the piezoelectric vibrators 12, 12, 12, 12 serving as the stretching vibration source and the piezoelectric vibrators 11, 11, 11 serving as the bending vibration source. , 11, and so on, for example, by separately setting and changing the reference potential of the piezoelectric vibrator 11 and the reference potential of the piezoelectric vibrator 12, the stretching vibration and the bending vibration can be controlled separately. .

  In addition, since the drive signal is input from the AC power source 6 to all of the polarization regions 11a, 11b, 11c, and 11d of the piezoelectric vibrator 11 to cause bending vibration, only the bending vibration is excited and the driving force is large. The output of the motor 1 is larger than that of a conventional ultrasonic motor.

  In addition, since a plurality of piezoelectric vibrators 11 and 12 are used, the output is further increased.

  Further, since the ultrasonic motor 1 is driven by one input signal, the configuration of the self-excited transmission circuit is simplified, and therefore, the self-excited transmission control can be easily performed.

  Further, when the electrode 16e of the piezoelectric vibrator 11 is connected to the AC power source 6 via the switch 17a and the electrodes 16a, 16b, 16c, and 16d via the switch 17b, respectively, only two switches 17a and 17b are switched. The ultrasonic motor 1 moves the moving body 14a in the opposite direction.

  As a matter of course, the piezoelectric vibrators 11 and 12 can be driven by adding signals having different phases, for example, signals of 90 degrees or -90 degrees.

  In the present embodiment, the piezoelectric element 10 has four piezoelectric vibrators 11 integrally laminated and four piezoelectric vibrators 12 integrally laminated thereon, but the present invention is not limited thereto. The structure is not limited, and the piezoelectric vibrator 11 and the piezoelectric vibrator 12 may be alternately and integrally laminated. Of course, the number of the piezoelectric vibrators 11 and 12 may be set arbitrarily, and it is not necessary to make both the same number. In particular, since the two vibration forces can be controlled independently by using different numbers, the number ratio is set according to the required motor specifications.

  Further, the electrodes 16a, 16b, 16c, and 16d do not need to be separated, and the ultrasonic motor 1 operates without any problem even when short-circuited as one electrode.

  Further, the electrode 16e of the piezoelectric vibrator 11 is connected to the AC power source 6 via the switch 17a, and the electrodes 16a, 16b, 16c, and 16d are connected to the AC power source 6 via the switch 17b. However, the present invention is not limited to this. In contrast to the present embodiment, the electrodes 16a to 16d of the piezoelectric vibrator 11 are connected to one side of the AC power source 6 and the electrode 16e is directly connected to the AC power source 6 without a switch. Further, the electrode 16f and the electrode 16g of the piezoelectric vibrator 12 may be connected to the AC power source 6 via the switch 17a and the switch 17b.

<Second Embodiment>
Hereinafter, an ultrasonic motor 2 as a second embodiment of the present invention will be described.

  As shown in the front view of FIG. 6, the ultrasonic motor 2 includes a piezoelectric element 20, a support member 23 that supports the piezoelectric element 20, and a moving body 24 a that is in contact with the end face of the piezoelectric element 20 and is moved by the piezoelectric element 20. And a target unit 24. That is, the ultrasonic motor 2 is an ultrasonic motor that moves the moving body 24 a in a direction parallel to the laminated surface of the piezoelectric elements 20.

  The piezoelectric element 20 is pressed against the moving body 24a by a force applied via a support member 23 from a pressing mechanism (not shown) having an elastic body, for example.

  For example, the piezoelectric element 20 includes four piezoelectric vibrators 21 (first piezoelectric vibrators) serving as bending vibration sources and four piezoelectric vibrators 22 (second piezoelectric vibrators) serving as stretching vibration sources. In addition, the two are overlapped and integrally laminated, and the protrusions 25 and 25 are provided on the lower surface thereof so as to be driven in contact with the moving body 24a.

  The piezoelectric element 20 has an electrode (not shown in FIG. 6) described later.

  In addition, the piezoelectric vibrators 21 and 22 ensure insulation from adjacent piezoelectric vibrators or electrodes by sandwiching an insulator 28 (not shown), for example.

  Further, the protrusions 25 and 25 are provided at portions corresponding to antinodes of bending vibration generated in the piezoelectric vibrator 21, respectively.

  Here, the polarization state of the piezoelectric vibrator 21 and the piezoelectric vibrator 22 and the structure of the electrodes of the piezoelectric element 20 will be described with reference to FIG.

  FIG. 7A is a diagram showing a side surface 20a of the piezoelectric element 20, and FIG. 7F is a diagram showing a side surface 20b located on the opposite side of the side surface 20a. FIG. 7B is a diagram showing one surface of the piezoelectric vibrator 21, and FIG. 7C is a diagram showing the other surface of the piezoelectric vibrator 21. FIG. 7D is a diagram showing one surface of the piezoelectric vibrator 22, and FIG. 7E is a diagram showing the other surface of the piezoelectric vibrator 22. In addition, illustration of the protrusion 25 is abbreviate | omitted here.

  First, the polarization states of the piezoelectric vibrator 21 and the piezoelectric vibrator 22 will be described.

  As shown in FIG. 7B and FIG. 7C, the piezoelectric vibrator 21 includes four polarization regions 21a, polarization regions 21b, polarization regions 21c, and polarization regions 21d generated by being divided into four in the vertical direction. The structure is alternately polarized in the stacking direction. That is, the polarization region 21a and the polarization region 21c are polarized so that the upper surface becomes +, for example, and the polarization region 21b and the polarization region 21d are polarized so that the upper surface becomes −, for example.

  Further, as shown in FIGS. 7D and 7E, the piezoelectric vibrator 22 is polarized so that almost the entire surface is one polarization region, for example, the upper surface becomes + in the stacking direction.

  Next, the structure of the electrodes of the piezoelectric element 20 will be described.

  As shown in FIG. 7, the piezoelectric element 20 includes an electrode 26a, an electrode 26b, an electrode 26c, an electrode 26d, an electrode 26e, an electrode 26f, and an electrode 26g.

  Among these, the electrodes 26 a to 26 e are electrodes for inputting signals to the piezoelectric vibrator 21, and the electrodes 26 f to 26 g are electrodes for inputting signals to the piezoelectric vibrator 22.

  The electrode 26a substantially covers the upper surface of the polarization region 21a of the piezoelectric vibrator 21, and a part thereof is drawn out to the side surface 20a. That is, one surface of the polarization regions 21a, 21a, 21a, and 21a of the four piezoelectric vibrators 21, 21, 21, and 21 is all formed by the electrode 26a that is continuous through the portion drawn to the side surface 20a. It becomes the same potential.

  Similarly, the electrode 26b substantially covers one surface of the polarization region 21b of the piezoelectric vibrator 21, and a part thereof is drawn out to the side surface 20b. That is, one surface of the polarization regions 21b, 21b, 21b, and 21b of the four piezoelectric vibrators 21, 21, 21, and 21 is all formed by the electrode 26b that is continuous through the portion drawn to the side surface 20b. It becomes the same potential.

  The electrode 26c substantially covers one surface of the polarization region 21c of the piezoelectric vibrator 21, and a part thereof is drawn out to the side surface 20b. That is, one surface of the polarization regions 21c, 21c, 21c, and 21c of the four piezoelectric vibrators 21, 21, 21, and 21 is all formed by the electrode 26c that is continuous through the portion that is drawn to the side surface 20b. It becomes the same potential.

  Similarly, the electrode 26d substantially covers one surface of the polarization region 21d of the piezoelectric vibrator 21, and a part thereof is drawn out to the side surface 20a. That is, one surface of the polarization regions 21d, 21d, 21d, and 21d of the four piezoelectric vibrators 21, 21, 21, and 21 is all formed by the electrode 26d that is continuous through the portion drawn to the side surface 20a. It becomes the same potential.

  The electrode 26e covers all the lower surfaces of the four polarization regions 21a, 21b, 21c, and 21d of the piezoelectric vibrator 21, and a part thereof is drawn out to the side surface 20a. That is, the other surfaces of the four polarization regions of the four piezoelectric vibrators 21, 21, 21, 21 are all at the same potential by the electrode 26 e that is continuous through the part drawn out to the side surface 20 a. .

  Therefore, in the piezoelectric vibrator 21, when the same drive signal is input to the electrodes 26a, 26b, 26c, and 26d using the electrode 26e as a reference electrode, the polarization regions 21b and 21d contract when the polarization regions 21a and 21c expand. Conversely, when the polarization regions 21a and 21d contract, the polarization regions 21b and 21c expand. Therefore, the piezoelectric vibrator 21 performs bending vibration in the thickness direction.

  That is, since the drive signals input to the same polarization region are the same, all the four piezoelectric vibrators 21, 21, 21, and 21 bend and vibrate in the same direction. Therefore, a large bending vibration is generated in the piezoelectric element 20.

  The electrode 26f substantially covers one surface of the polarization region 22a of the piezoelectric vibrator 22, and a part thereof is drawn out to the side surface 20b. That is, one surface of the polarization regions 22a, 22a, 22a, and 22a of the four piezoelectric vibrators 22, 22, 22, and 22 is all formed by the electrode 26f that is continuous through the portion drawn out to the side surface 20b. It becomes the same potential.

  Similarly, the electrode 26g substantially covers the other surface of the polarization region 22a of the piezoelectric vibrator 22, and a part of the electrode 26g is drawn to the side surface 20a. That is, the lower surfaces of the polarization regions 22a of the four piezoelectric vibrators 22 are all set to the same potential by the electrodes 26g that are continuous through the portion drawn to the side surface 20a.

  Therefore, in the piezoelectric vibrator 22, when a drive signal is input to the electrode 26f with the electrode 26g as a reference, the polarization region 22a expands or contracts. Accordingly, the piezoelectric vibrator 22 expands and contracts in the longitudinal direction. Therefore, a large stretching vibration is generated in the piezoelectric element 20.

  That is, since the drive signals input to the same polarization region are the same, the four piezoelectric vibrators 22, 22, 22, and 22 perform the same stretching vibration.

  The procedure for manufacturing the ultrasonic motor 2 is the same as the procedure for manufacturing the ultrasonic motor 1.

  The operation of the ultrasonic motor 2 having the above-described structure will be described with reference to FIGS.

  FIG. 8C and FIG. 9C are diagrams showing a connection structure between the ultrasonic motor 2 and the AC power source 6.

  That is, in the ultrasonic motor 2, the electrode 26e and the electrodes 26a, 26b, 26c, and 26d of the piezoelectric vibrator 21 are connected to the AC power source 6 through the switches 27a and 27b (switching means), respectively. The electrode 26f of the piezoelectric vibrator 22 is directly connected to the output side of the AC power source 6, and the electrode 26g is directly connected to the reference potential side.

  Therefore, the connection direction of the electrodes 26a to 26e, that is, whether these electrodes are connected to the output side of the AC power supply 6 or the ground potential side is switched by the switch 27a and the switch 27b.

  8 and 9, the components of the ultrasonic motor 2 other than the piezoelectric element 20 are omitted for convenience of explanation, and the piezoelectric element 20 includes the piezoelectric vibrator 21 and the piezoelectric vibrator 22 one by one. In addition, a structure in which the insulators 28 are stacked integrally with the insulator 28 interposed therebetween.

  First, as shown in FIG. 8C, the ultrasonic motor when the electrodes 26a, 26b, 26c, and 26d are connected to the ground potential side and the electrode 26e is connected to the output side via the switch 27a and the switch 27b. 2 will be described with reference to FIGS.

  FIG. 8A shows a state of stretching vibration of the piezoelectric vibrator 22, and FIG. 8B shows a state of bending vibration of the piezoelectric vibrator 21 using a cross-sectional view. FIG. The drive state when the ultrasonic motor 2 is seen from the side is shown.

  When the output potential of the AC power supply 6 becomes higher than the reference potential, the polarization region 21a and the polarization region 21c of the piezoelectric vibrator 21 extend in the longitudinal direction, and the polarization region 21b and the polarization region 21d contract in the longitudinal direction. Therefore, the piezoelectric vibrator 21 bends as shown in the hatched diagram of FIG. 8B, and a predetermined portion on the lower surface thereof bends in the direction indicated by the arrow Y.

  At this time, as described above, since the piezoelectric vibrator 22 is almost entirely polarized in the same direction as the polarization region 21a, the piezoelectric vibrator 22 extends in the longitudinal direction as shown in the hatched diagram in FIG. It extends in the direction indicated by X.

  When the output potential of the AC power supply 6 becomes lower than the reference potential, the predetermined portion of the lower surface of the piezoelectric vibrator 21 bends in the direction of the arrow Y ′ opposite to the arrow Y, and the lower surface of the piezoelectric vibrator 22 Shrinks in the direction 180 degrees opposite to the arrow X.

  For this reason, the predetermined portion of the lower surface of the piezoelectric element 20 moves elliptically in the direction indicated by the arrow Z in FIG. 8D, and therefore the ultrasonic motor 2 is a moving body (not shown) that is in pressure contact with the end surface. ) In the direction indicated by arrow Z.

  Next, as shown in FIG. 9C, the electrodes 26a, 26b, 26c, and 26d are connected to the output side and the electrode 26e is connected to the reference potential side, contrary to FIG. The operation will be described with reference to FIGS.

  FIG. 9A shows a state of stretching vibration of the piezoelectric vibrator 22 and FIG. 9C shows a state of bending vibration of the piezoelectric vibrator 21 using a cross-sectional view, respectively. ) Shows a driving state when the ultrasonic motor 2 is viewed from the side.

  When the output potential of the AC power supply 6 becomes higher than the reference potential, the polarization region 21a and the polarization region 21d of the piezoelectric vibrator 21 contract in the longitudinal direction, and the polarization region 21b and the polarization region 21c extend in the longitudinal direction. Therefore, the piezoelectric vibrator 21 bends as shown by the oblique line in FIG. 9B, and the predetermined portion of the lower surface is bent in the direction indicated by the arrow Y ′.

  At this time, as described above, since the piezoelectric vibrator 22 is almost entirely polarized in the same direction as the polarization region 21a, the piezoelectric vibrator 22 extends in the longitudinal direction as shown by the hatched diagram in FIG. It extends in the direction indicated by X.

  When the output potential of the AC power supply 6 becomes lower than the reference potential, the predetermined portion of the lower surface of the piezoelectric vibrator 21 bends in the direction of the arrow Y opposite to the arrow Y ′, and the lower surface of the piezoelectric vibrator 22 Shrinks in the direction 180 degrees opposite to the arrow X.

  For this reason, the predetermined part of the lower surface of the piezoelectric element 20 moves elliptically in the direction indicated by the arrow Z ′ in FIG. 9D, and therefore the ultrasonic motor 2 is in contact with the end face (see FIG. 9). (Omitted) is moved in the direction indicated by the arrow Z ′, that is, in the direction opposite to the arrow Z in FIG.

  That is, since the ultrasonic motor 2 has the electrode 26e of the piezoelectric vibrator 21 connected to the AC power source 6 via the switch 27a and the electrodes 26a, 26b, 26c, and 26d via the switch 27b, the signal phase is changed. The moving direction of the moving body 24a can be reversed only by switching both the switches 27a and 27b without having the phase circuit to be changed.

  As described above, the ultrasonic motor 2 according to the second embodiment of the present invention includes the piezoelectric vibrators 22, 22, 22, 22 serving as the stretching vibration source and the piezoelectric vibrators 21, 21, 21 serving as the bending vibration source. , 21 are integrally laminated, for example, by separately setting / changing the reference potential of the piezoelectric vibrator 21 and the reference potential of the piezoelectric vibrator 22, the stretching vibration and the bending vibration can be controlled separately. .

  In addition, since the drive signal is input to all of the polarization regions 21a, 21b, 21c, and 21d of the piezoelectric vibrator 21 to bend and vibrate, the output of the ultrasonic motor 2 is larger than that of the conventional ultrasonic motor.

  In addition, since a plurality of thin piezoelectric vibrators 21 and 22 are used, the piezoelectric vibrator 21 can be driven at a low voltage, and the output is further increased.

  Further, since the ultrasonic motor 2 is driven by one input signal, a self-excited transmission circuit can be easily configured.

  Further, when the electrode 26e of the piezoelectric vibrator 21 is connected to the AC power source 6 via the switch 27a and the electrodes 26a, 26b, 26c, and 26d via the switch 27b, respectively, only the two switches 27a and 27b are switched. The ultrasonic motor 2 moves the moving body 24a in the reverse direction.

  As a matter of course, the piezoelectric vibrators 21 and 22 can be driven by applying signals having different phases. In the piezoelectric element 20 of the present embodiment, the number of the piezoelectric vibrators 21 and 22 may be arbitrarily set, and it is not necessary that both are equal.

  Further, the electrodes 26a, 26b, 26c, and 26d do not need to be separated, and the ultrasonic motor 2 operates without any problem even if the electrodes are short-circuited to one.

  Further, the electrode 26e of the piezoelectric vibrator 21 is connected to the AC power source 6 via the switch 27a, and the electrodes 26a, 26b, 26c, and 26d are connected to the AC power source 6 via the switch 27b. However, the present invention is not limited to this. In contrast to the present embodiment, the electrodes 26a to 26d of the piezoelectric vibrator 21 are connected to one side of the AC power source 6 and the electrode 26e is connected to the other side directly to the AC power source 6 without a switch. Further, the electrode 26f and the electrode 26g of the piezoelectric vibrator 22 may be connected to the AC power source 6 through the switch 27a and the switch 27b.

<Third embodiment>
The third embodiment of the present invention will be described below with reference to FIGS. The third embodiment of the present invention is basically the same as the first embodiment and the second embodiment, and a piezoelectric vibrator 31 (first piezoelectric vibrator) as a flexural vibration source and stretching vibration. It comprises a piezoelectric vibrator 32 (second piezoelectric vibrator) as a source. The difference is that the piezoelectric vibrator 18 that is an insulator is not provided, and the piezoelectric vibrator 31 and the piezoelectric vibrator 32 have a common electrode 36e.

  Hereinafter, the polarization state and the electrode structure will be described based on a modification of the first embodiment.

  FIG. 10A is a diagram showing the side surface 30a of the piezoelectric element 30, and FIG. 10F is a diagram showing the side surface 30b. FIG. 10B is an odd-numbered top view and even-numbered bottom view of the piezoelectric vibrator 31, and FIG. 10C is an odd-numbered bottom view and even-numbered top view of the piezoelectric vibrator 31. 10D is an odd-numbered top view and an even-numbered bottom view of the piezoelectric vibrator 32, and FIG. 10E is an odd-numbered bottom view and an even-numbered top view of the piezoelectric vibrator 32. It is. That is, the joint surface of each piezoelectric vibrator becomes a common electrode.

  First, the polarization states of the piezoelectric vibrator 31 and the piezoelectric vibrator 32 will be described.

  As shown in FIGS. 10B and 10C, the piezoelectric vibrator 31 is divided into four polarization regions 31a, 31b, which are generated by being divided into two parts in the vertical direction and two parts in the horizontal direction. The polarization region 31c and the polarization region 31d are structured to be alternately polarized in the stacking direction. That is, the polarization region 31a and the polarization region 31d are polarized such that the upper surface becomes +, for example, and the polarization region 31b and the polarization region 31c are polarized such that the upper surface becomes −, for example.

  Further, as shown in FIG. 10 (D) and FIG. 10 (E), the piezoelectric vibrator 32 is polarized so that almost the entire surface becomes one polarization region, for example, the upper surface becomes +.

  Next, the structure of the electrodes of the piezoelectric element 30 will be described with reference to FIG.

  The piezoelectric element 30 includes an electrode 36a, an electrode 36b, an electrode 36c, an electrode 36d, an electrode 36e, and an electrode 36f.

  Among these, the electrodes 36 a to 36 e are electrodes for inputting signals to the piezoelectric vibrator 31, and the electrodes 36 e and 36 f are electrodes for inputting signals to the piezoelectric vibrator 32. Therefore, the electrode 36 e serves as an electrical common part of the piezoelectric vibrator 31 and the piezoelectric vibrator 32.

  The electrode 36a substantially covers one surface of the polarization region 31a of the piezoelectric vibrator 31, and a part thereof is drawn out to the side surface 30a. That is, the upper surfaces of the polarization regions 31a, 31a, 31a, and 31a of the four piezoelectric vibrators 31, 31, 31, and 31 are all the same by the electrodes 36a that are continuous through the portion drawn to the side surface 30a. It becomes a potential.

  Similarly, the electrode 36b substantially covers one surface of the polarization region 31b of the piezoelectric vibrator 31, and a part thereof is drawn out to the side surface 30a. That is, the upper surfaces of the polarization regions 31b, 31b, 31b, and 31b of the four piezoelectric vibrators 31, 31, 31, and 31 are all the same by the electrodes 36b that are continuous through the part drawn out to the side surface 30a. It becomes a potential.

  The electrode 36c substantially covers one surface of the polarization region 31c of the piezoelectric vibrator 31, and a part thereof is drawn out to the side surface 30b. That is, one surface of the polarization regions 31c, 31c, 31c, and 31c of the four piezoelectric vibrators 31, 31, 31, and 31 is all formed by the electrode 36c that is continuous through the portion drawn out to the side surface 30b. It becomes the same potential.

  Similarly, the electrode 36d substantially covers one surface of the polarization region 31d of the piezoelectric vibrator 31, and a part thereof is drawn to the side surface 30b. That is, one surface of the polarization regions 31d, 31d, 31d, and 31d of the four piezoelectric vibrators 31, 31, 31, and 31 is all formed by the electrode 36d that is continuous through the portion drawn out to the side surface 30b. It becomes the same potential.

  The electrode 36e covers the other surface of the four polarization regions 31a, 31b, 31c, 31d of the piezoelectric vibrator 31 and the other surface of the polarization region 32a of the piezoelectric vibrator 32, and part of the electrode 36e is a side surface 30a. Has been drawn to. That is, the other surface of the four polarization regions of the four piezoelectric vibrators 31, 31, 31, 31 and one surface of the four piezoelectric vibrators 32, 32, 32, 32 are drawn to the side surface 30a. The electrodes 36e continuous through the portion all have the same potential.

  Furthermore, in the piezoelectric vibrator 31, when the same drive signal is input to the electrodes 36a, 36b, 36c, 36d using the electrode 36e as a reference electrode, the polarization regions 31b, 31c contract when the polarization regions 31a, 31d expand, Conversely, when the polarization regions 31a and 31d contract, the polarization regions 31b and 31c expand. Accordingly, the piezoelectric vibrator 31 performs bending vibration in the lateral direction.

  That is, since the drive signals input to the same polarization region are the same, the four piezoelectric vibrators 31, 31, 31, 31 all bend and vibrate in the same direction. Moreover, since the layers are laminated in a direction orthogonal to the displacement direction, the strains contributed by the four piezoelectric vibrators are the same. Therefore, a large bending vibration is generated in the piezoelectric element 30. Unlike the conventional example of FIG. 13, only the bending vibration is excited in the piezoelectric vibrator 31.

  The electrode 36f substantially covers the upper surface of the polarization region 32a of the piezoelectric vibrator 32, and a part thereof is drawn out to the side surface 30b. That is, the upper surfaces of the polarization regions 32a, 32a, 32a, and 32a of the four piezoelectric vibrators 32, 32, 32, and 32 are all the same by the electrode 36f that is continuous through the portion drawn to the side surface 30b. It becomes a potential.

  Further, in the piezoelectric vibrator 32, when a drive signal is input to the electrode 36f with the electrode 36e as a reference, the polarization region 32a expands or contracts, so that the piezoelectric vibrator 32 expands and contracts in the longitudinal direction.

  That is, since the drive signals input to the same polarization region are the same, the four piezoelectric vibrators 32, 32, 32, 32 perform the same stretching vibration. Therefore, a large stretching vibration is generated in the piezoelectric element 30.

  The operation of the ultrasonic motor 3 having the above-described structure will be described with reference to FIG.

  FIG. 11 is a diagram showing a connection structure between the ultrasonic motor 3 and the AC power source 6 (signal source).

  That is, in the ultrasonic motor 3, the electrodes 36 a, 36 b, 36 c, and 36 d of the piezoelectric vibrator 31 are connected to the AC power source 6 through the phase inversion circuit 19. The electrode 36f of the piezoelectric vibrator 32 is directly connected to the output side of the AC power source 6, and the electrode 36e is directly connected to the reference potential side. For this reason, the signal applied to the electrodes 36a, 36b, 36c, and 36d with respect to the electrode 36f is changed in phase by the phase inversion circuit 19.

  In FIG. 11, the components of the ultrasonic motor 3 other than the piezoelectric element 30 are omitted for convenience of explanation, and here, for convenience, the piezoelectric element 30 includes a piezoelectric vibrator 31 and a piezoelectric vibrator 32. It is a structure in which one sheet is laminated integrally.

  When the phase reversing circuit 19 does not reverse the phase of the signal from the AC power supply 6, the ultrasonic motor 3 exhibits the same driving state as that in FIG.

  That is, when the output potential of the AC power supply 6 becomes higher than the reference potential, the polarization region 31a and the polarization region 31d of the piezoelectric vibrator 31 extend in the longitudinal direction, and the polarization region 31b and the polarization region 31c contract in the longitudinal direction. Accordingly, the piezoelectric vibrator 31 bends as shown in the white view of FIG. 4C, and its end face is inclined in the direction indicated by the arrow Y.

  At this time, as described above, since the piezoelectric vibrator 32 is almost entirely polarized in the same direction as the polarization region 31a, the piezoelectric vibrator 32 extends in the longitudinal direction as shown in the white view of FIG. It extends in the direction indicated by arrow X.

  When the output potential of the AC power supply 6 becomes lower than the reference potential, the end face of the piezoelectric vibrator 31 is inclined in the direction of the arrow Y ′ opposite to the arrow Y, and the end face of the piezoelectric vibrator 32 is the arrow X. Shrinks in the opposite direction by 180 degrees.

  That is, the bending vibration generated in the piezoelectric vibrator 31 and the stretching vibration generated in the piezoelectric vibrator 32 are combined. As a result, the end face of the piezoelectric element 30 moves elliptically in the direction indicated by the arrow Z in FIG. The ultrasonic motor 3 moves the moving body (not shown) in pressure contact with the end face in the direction indicated by the arrow Z.

  Next, when the phase of the signal from the AC power source 6 is reversed by 180 degrees by the phase reversing circuit 19, the driving state is the same as in FIG.

  When the output potential of the AC power supply 6 becomes higher than the reference potential, the polarization region 31a and the polarization region 31d of the piezoelectric vibrator 31 contract in the longitudinal direction, and the polarization region 31b and the polarization region 31c extend in the longitudinal direction. Accordingly, the piezoelectric vibrator 31 bends as shown in the white view of FIG. 5C, and its end face is inclined in the direction indicated by the arrow Y ′.

  At this time, as described above, since the piezoelectric vibrator 32 is almost entirely polarized in the same direction as the polarization region 31a, the piezoelectric vibrator 32 extends in the longitudinal direction as shown in the white view of FIG. It extends in the direction indicated by arrow X.

  When the output potential of the AC power supply 6 becomes lower than the reference potential, the end face of the piezoelectric vibrator 31 is inclined in the direction of the arrow Y opposite to the arrow Y ′, and the end face of the piezoelectric vibrator 32 is the arrow X. Shrink in the opposite direction by 180 degrees.

  For this reason, the end face of the piezoelectric element 30 moves elliptically in the direction indicated by the arrow Z ′ in FIG. 5D, and therefore the ultrasonic motor 3 moves the moving body (not shown) in pressure contact with the end face to the arrow. It is moved in the direction indicated by Z ′, that is, in the direction opposite to the arrow Z in FIG.

  That is, since the electrodes 36a, 36b, 36c, and 36d of the piezoelectric vibrator 31 of the ultrasonic motor 3 are connected to the AC power source 6 via the phase inversion circuit 19, it is determined whether or not the phase of the signal of the AC power source 6 is reversed. The direction in which the ultrasonic motor 3 moves the moving body 34a can be reversed simply by selecting.

  As described above, the ultrasonic motor 3 according to the third embodiment of the present invention includes the piezoelectric vibrators 32, 32, 32, 32 as the stretching vibration source and the piezoelectric vibrators 31, 31, 31 as the bending vibration source. , 31, and so on, for example, by separately setting and changing the input signal of the piezoelectric vibrator 31 and the input signal of the piezoelectric vibrator 32, the stretching vibration and the bending vibration can be controlled separately. .

  In addition, since a drive signal is input from the AC power supply 6 to all of the polarization regions 31a, 31b, 31c, and 31d of the piezoelectric vibrator 31 to bend and vibrate, only the bending vibration is excited and the driving force is large. The output of the motor 3 is larger than that of a conventional ultrasonic motor.

  In addition, since a plurality of piezoelectric vibrators 31 and 32 are used, the output is further increased.

  In addition, since the ultrasonic motor 3 is driven by one input signal, the configuration of the self-excited oscillation circuit is simplified, and therefore self-excited oscillation control can be easily performed.

  Furthermore, the ultrasonic motor 3 can switch the moving direction of the moving body 14a only by selecting whether or not to reverse the phase of the signal by the phase inverting circuit 19.

  As a matter of course, the piezoelectric vibrators 31 and 32 can be driven by adding signals having different phases, for example, signals of 90 degrees or -90 degrees.

  In this embodiment, the piezoelectric element 30 has four piezoelectric vibrators 31 integrally laminated and four piezoelectric vibrators 32 integrally laminated thereon, but the present invention is not limited thereto. The structure is not limited, and the piezoelectric vibrator 31 and the piezoelectric vibrator 32 may be alternately and integrally laminated. Needless to say, the number of piezoelectric vibrators 31 and 32 may be set arbitrarily, and it is not necessary to make both the same number. In particular, since the two vibration forces can be controlled independently by using different numbers, the number ratio is set according to the required motor specifications.

  Further, the electrodes 36a, 36b, 36c, and 36d do not need to be separated, and the ultrasonic motor 3 operates without any problem even when short-circuited as one electrode.

  Furthermore, although the electrodes 36a, 36b, 36c, and 36d of the piezoelectric vibrator 31 are connected to the AC power source 6 via the phase inversion circuit 19, the present invention is not limited to this, and the present embodiment and On the contrary, the electrodes 36a to 36d of the piezoelectric vibrator 31 are directly connected to the AC power supply 6 without passing through the phase inversion circuit 19 on one side of the AC power supply 6, and the electrode 36f of the piezoelectric vibrator 32 is connected to the phase inversion circuit. You may connect to AC power supply 6 via 19.

  In this embodiment, the drive circuit is complicated by adding the phase inversion circuit 19 as compared with the first embodiment and the second embodiment, but does not have the piezoelectric vibrator 18 serving as an insulator. Since the piezoelectric vibrators 31 and 32 that contribute to driving are provided in the same space, further miniaturization and higher output can be achieved.

  Further, as compared with the case where a signal with a phase of 90 degrees or -90 degrees as shown in the conventional example is produced, the circuit configuration is simple and the self-excited oscillation circuit is easy to configure because it is only necessary to invert the signal.

<Fourth embodiment>
FIG. 12 is a block diagram of an electronic device 6 with an ultrasonic motor in which the ultrasonic motor according to the present invention is applied to the electronic device.

  The ultrasonic motor-equipped electronic device 6 includes a piezoelectric element 31 that has been subjected to a predetermined polarization process, a vibrating body 32 bonded to the piezoelectric element 31, a moving body 33 that is moved by the vibrating body 32, and the vibrating body 32 and the moving body 33. This is realized by including a pressurizing mechanism 34 that pressurizes the transmission mechanism 35, a transmission mechanism 35 that moves in conjunction with the moving body 33, and an output mechanism 36 that moves based on the operation of the transmission mechanism 35.

  Here, as the piezoelectric vibrator 31, the piezoelectric element 10 or the piezoelectric element 20 is used. Further, switches 17a and 17b or switches 27a and 27b are provided between the AC power source (not shown) as appropriate.

  As the transmission mechanism 35, for example, a transmission wheel such as a gear or a friction wheel is used. As the output mechanism 36, for example, a shutter drive mechanism or a lens drive mechanism in a camera, and a pointer drive mechanism or a calendar drive mechanism in an electronic timepiece are used as a storage medium in the information storage device when used in a storage device. A head drive mechanism that drives a head that reads and writes information is used in a machine tool, such as a blade feed mechanism or a machining member feed mechanism.

  Examples of the electronic device 6 with an ultrasonic motor include an electronic timepiece, a measuring instrument, a camera, a printer, a printing machine, a machine tool, a robot, a moving device, and a storage device.

  The electronic device 6 with an ultrasonic motor is an ultrasonic motor that is smaller and has a larger output than a conventional ultrasonic motor, and uses a self-oscillation drive with a simple circuit configuration for driving. The size and peripheral circuits thereof are reduced in size, so that they are reduced in size as compared with conventional electronic devices. In addition, a plurality of piezoelectric vibrators each having a small thickness can be stacked to be driven at a low voltage, and can be directly driven by a battery power source.

  In addition, if an output shaft is attached to the moving body 33 and a power transmission mechanism for transmitting torque from the output shaft is provided, the drive mechanism is configured by a single ultrasonic motor.

1, 2 Ultrasonic motor 3 Electronic equipment with ultrasonic motor 6 AC power supply (signal source)
10, 20, 30 Piezoelectric element 11, 21, 31 Piezoelectric vibrator (first piezoelectric vibrator)
12, 22, 32 Piezoelectric vibrator (second piezoelectric vibrator)
13, 23 Support member 14, 24 Target part 14a, 24a Moving body 25 Protrusion 17a, 17b, 27a, 27b Switch (switching means)

Claims (5)

A first piezoelectric vibrator having electrodes provided on the front and back surfaces;
The second piezoelectric vibrator having electrodes provided on the front and back surfaces and the third piezoelectric vibrator provided between the first piezoelectric vibrator and the second piezoelectric vibrator are fired after lamination. An integrated laminated piezoelectric vibrator,
Each of the front and back electrodes of the first piezoelectric vibrator and each of the front and back electrodes of the second piezoelectric vibrator have portions drawn to the same side surface of the laminated piezoelectric vibrator ,
The portions drawn out from the electrodes to the same side surface are provided at positions that do not overlap in the stacking direction of the first piezoelectric vibrator and the second piezoelectric vibrator, and are drawn out from the electrodes to the same side surface. The parts are electrically connected to the electrodes provided on the side surfaces of the laminated piezoelectric vibrator so as not to short-circuit each other,
The laminated piezoelectric vibrator, wherein the third piezoelectric vibrator acts as an insulator so that the first piezoelectric vibrator and the second piezoelectric vibrator can be independently driven.   The multilayer piezoelectric vibrator according to claim 1, wherein the first piezoelectric vibrator and the second piezoelectric vibrator excite different vibrations.   The multilayer piezoelectric vibrator according to claim 2, wherein the first piezoelectric vibrator excites bending vibration, and the second piezoelectric vibrator excites stretching vibration.   An ultrasonic motor characterized in that a driving force is obtained by vibration of the laminated piezoelectric vibrator according to any one of claims 1 to 3.   An electronic apparatus with an ultrasonic motor, comprising the ultrasonic motor according to claim 4.

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