JP4648161B2 - Double arm row type substrate transfer robot - Google Patents

Description

  The invention of the present application relates to a double arm array type substrate transfer robot, and is used to transfer a semiconductor substrate (wafer) or a liquid crystal substrate, particularly in a semiconductor device or liquid crystal device manufacturing apparatus. The present invention relates to a double arm array type substrate transfer robot that can be reduced in weight and reduced in production cost.

  2. Description of the Related Art Conventionally, in a semiconductor device or liquid crystal device manufacturing apparatus, a semiconductor substrate (wafer) or a liquid crystal substrate is transferred between a cassette that accommodates a plurality of them and a processing apparatus that performs various processes on each of them. In addition, a double arm row type substrate transfer robot is used (see Patent Documents 1 and 2).

Here, the double-arm array substrate transfer robot described in Patent Document 1 will be described with reference to FIGS. 11 to 13.
FIG. 11 is a schematic longitudinal sectional view of the substrate transfer robot, FIG. 12 is a skeleton diagram of the arm extension mechanism, and FIG. 13 is a perspective view of the substrate transfer robot.

  As shown in these drawings, the double arm row type substrate transfer robot 1 has an arm expansion / contraction mechanism (arm row) composed of first to third arms symmetrically with respect to a vertical plane. A pair (two rows) is provided. In the two rows of arm expansion / contraction mechanisms A and B (double arm row), the centers P1 and P1 ′ of the first support shafts 4 and 4 ′ that form the rotation axes of the first arms 5 and 5 ′ have a rotation base. 3 are arranged at positions symmetrical with respect to the pivot axis Q and are offset outward by an equal distance x. Each of the first support shafts 4, 4 ′ is provided with a second motor M 2, M 2 ′, which is a driving source for the rotation, fixed inside the rotation base 3.

  Further, the centers P4 and P4 ′ of the substrates 30 and 30 ′ respectively held by the hands 10 and 10 ′ integrally attached to the third arms 9 and 9 ′ are the centers P1 and P1 of the first support shafts 4 and 4 ′. A third support shaft 8, which forms the rotation axis of the third arm 9, 9 ', in a direction opposite to the direction in which' is arranged offset by an equal distance x at a position symmetrical to the pivot axis Q, It is arranged to be offset inward by an equal distance x with respect to the centers P3 and P3 ′ of 8 ′ (see FIG. 12).

  The fixed straight line J is a straight line passing through the centers P4, P4 ′ of the substrates 30, 30 ′ and the pivot axis Q in plan view, which is the centers P1, P1 ′ of the first support shafts 4, 4 ′. Corresponding to the perpendicular bisector of the straight lines P1 and P1 ′ connecting the two, constituting a robot advance / retreat R axis as a control axis. The centers P4 and P4 ′ of the substrates 30 and 30 ′ move forward and backward on this straight line.

  The rotation base 3 is commonly used for turning the arm telescopic mechanism on each side of the arm rows A and B, and the rotation angle θ around the turning axis Q (robot turning θ axis) of the rotation base 3 is as it is. This is the turning angle of each arm telescopic mechanism.

  The structure and the operation mechanism of the arm expansion / contraction mechanism on each side of the arm rows A and B are the same, and both the arm expansion / contraction mechanisms share the pivot axis Q and are moved to a predetermined position by the second motors M2 and M2 ′. By being driven to expand and contract with a phase difference, the centers P4 and P4 ′ of the substrates 30 and 30 ′ are viewed in plan and moved forward and backward on the fixed straight line J with a predetermined phase difference, and the substrates 30 and 30 ′ are moved to a cassette or It can be inserted into and removed from the processing device.

Hereinafter, the structure and operation mechanism of the arm expansion / contraction mechanism on the arm row A side will be described in more detail.
First, as a structure part common to the arm rows A and B, the double arm row type substrate transfer robot 1 includes a rotating base 3 inside a robot body 2 as shown in FIG. The rotating base 3 has a cylindrical container shape in which a stepped cylindrical body is closed by a bottom wall and a top wall, and has a pivot axis Q. The first motor M1 is rotationally driven via a reduction gear G1. The first motor M <b> 1 is housed and fixed in an elevating base 55 installed below the rotary base 3. The rotary base 3 is rotatably supported by the robot body 2 at the stepped portion of the stepped cylindrical body and is hermetically supported by a magnetic fluid seal.

  Inside the rotary base 3, second motors M2 and M2 ′ are fixed to the upper part thereof. Here, the first support shaft 4 that is rotationally driven via the speed reducer G2 by the second motor M2 that is the drive source of the arm expansion / contraction mechanism on the arm row A side is offset from the turning axis Q by a predetermined distance x. These are arranged in parallel with each other, protrude from the top of the rotary base 3 and protrude so as to be able to rotate independently of the rotation of the rotary base 3. Therefore, the first support shaft 4 revolves due to the rotation of the rotation base 3, but its rotation caused by the second motor M <b> 2 is not affected by the rotation of the rotation base 3.

  One end of a first arm 5 is fixedly attached to the first support shaft 4. The other end of the first arm 5 is rotated 2: 1 with the rotation of the first arm 5 through a transmission mechanism including pulleys 11 and 12 and a timing belt 13 in the body of the first arm 5. The second support shaft 6 to be rotated at a gear ratio is protruded from the first arm 5 so as to be able to rotate independently of the rotation of the first arm 5.

  The pulley 11 is configured by a cylindrical portion that protrudes upward from the top of the rotary base 3, and this cylindrical portion is allowed to enter the body of the first arm 5 so as not to come out. The reduction gear G2 is accommodated in this cylindrical part at intervals. The pulley 12 is constituted by a lower large-diameter portion of the second support shaft 6 made of a stepped hollow cylindrical body, and this large-diameter portion is accommodated in the body of the first arm 5 so as not to be pulled out. The timing belt 13 is stretched between these pulleys 11 and 12, and the gear ratio of these pulleys 11 and 12 is 2: 1.

  Therefore, if the first arm 5 is now rotated by an angle φ together with the first support shaft 4 by the rotation of the first support shaft 4 that is rotationally driven by the second motor M2, the timing belt is rotated by this rotation. Since the timing belt 13 relatively travels on the pulley 12 by the same length as 13 travels relatively on the pulley 11, the travel of the timing belt 13 causes the second support shaft 6 to rotate. This amount is 2φ which is twice the rotation angle φ of the first arm 5 (first support shaft 4), and its direction is opposite to the direction of rotation of the first arm 5.

  One end of the second arm 7 is fixedly attached to a portion (small diameter portion) where the second support shaft 6 protrudes from the other end of the first arm 5. The other end of the second arm 7 is rotated 1: 2 through a transmission mechanism including pulleys 21 and 22 and a timing belt 23 in the body of the second arm 7 as the second arm 7 rotates. The third support shaft 8 to be rotated at a gear ratio is projected from the second arm 7 in a state where the third support shaft 8 can rotate independently of the rotation of the second arm 7. The distance between the second and third spindles 6 and 8 is the same as the distance between the first and second spindles 4 and 6.

  The pulley 21 is configured by a cylindrical portion integrally formed so as to protrude upward from the other end portion of the first arm 5, and this cylindrical portion cannot be pulled out into the body of the second arm 7. It is made to enter. The small-diameter portion of the second support shaft 6 is inserted through the cylindrical portion at an interval and protrudes from the other end portion of the first arm 5. The pulley 22 is constituted by a lower large-diameter portion of the third support shaft 8 made of a stepped hollow cylindrical body, and this large-diameter portion is accommodated in the body of the second arm 7 so as not to be pulled out. The timing belt 23 is stretched between these pulleys 21 and 22, and the gear ratio of these pulleys 21 and 22 is 1: 2.

  Therefore, now, if the second arm 7 is rotated by an angle 2φ together with the second support shaft 6 by the rotation of the second support shaft 6, the timing belt 23 travels relatively on the pulley 21 by this rotation. Since the timing belt 23 travels relatively on the pulley 22 by the same length as the length to be rotated, the amount of rotation of the third support shaft 8 by this travel of the timing belt 23 is the second arm 7 (second The rotation angle 2φ of the two support shafts 6) is ½ of the rotation angle, and the direction is opposite to the rotation direction of the second arm 7. This means that the third support shaft 8 does not change its posture even when the first arm 5 rotates. Moreover, since the distance between the second and third support shafts 6 and 8 is the same as the distance between the first and second support shafts 4 and 6, the center P3 of the third support shaft 8 is always the first. It exists on the straight line J1 which passes along the center P1 of 1 spindle 4, This straight line J1 is parallel to the fixed straight line J (refer FIG. 12).

The reason why the center P3 of the third support shaft 8 is always on the straight line J1 passing through the center P1 of the first support shaft 4, and the reason why this straight line J1 is parallel to the fixed straight line J will be described in a little more detail.
First, in a state where the center P3 of the third support shaft 8 overlaps the center P1 of the first support shaft 4, the center P2 of the second support shaft 6 is at a position P20 shown in FIG. 12, and this position P20 is a special position. It is a position and makes a special point in plan view.

  In this state, if the first arm 5 is now rotated by the angle φ in the direction of the illustrated arrow, the center P2 of the second support shaft 6 is displaced from the initial position P20 to the illustrated position P2, and ∠P2 P1 · P20 = φ.

On the other hand, the center P3 of the third support shaft 8 is displaced from the position overlapping P1 to the position P3 shown in the figure, and is an angle formed by two arms (first arm 5 and second arm 7) sandwiching P2, that is, The apex angles ∠P3, P2, and P1 of ΔP2, P3, and P1 are 2φ. Since these two arms are equal in length, ΔP2, P3, and P1 are isosceles triangles, and the bisector of the apex angle ∠P3, P2, and P1 (= 2φ) is the base of the triangle A right angle is formed with respect to the straight lines P3 and P1, and this is divided into two equal parts. Therefore, ∠P3 · P1 · P2 = (90 ° −φ)
∠P3 ・ P1 ・ P20 = ∠P3 ・ P1 ・ P2 + ∠P2 ・ P1 ・ P20 = (90 ° -φ) + φ = 90 °
Becomes constant. From this, it can be seen that the center P3 of the third support shaft 8 is on the straight line J1 passing through the center P1 of the first support shaft 4 and perpendicular to the straight lines P1 and P20.

On the other hand, P1 is offset from Q by x and P4 is offset from P3 by x in the direction opposite to the direction in which P1 is offset by Q, so a straight line passing through P4 and Q That is, the fixed straight line J is a straight line passing through P3 and P1, that is, a straight line separated from the straight line J1 by x and parallel thereto. In other words, the straight line J1 passing through P3 and P1 is separated from the fixed straight line J passing through P4 and Q by x, and is a straight line parallel thereto.
From the above, the reason why the center P3 of the third support shaft 8 is always on the straight line J1 passing through the center P1 of the first support shaft 4 and parallel to the fixed straight line J will be described.

Here, since the arm expansion / contraction mechanisms on both sides of the arm rows A and B are arranged symmetrically with respect to the vertical plane, they are arranged symmetrically even when viewed in plan. Therefore, the substrate 30 '
A straight line passing through the centers P4 ′ and Q of the center line overlaps with a constant straight line J passing through P4 and Q in plan view. That is, P4 and P4 ′ are on a fixed straight line J in plan view, and move forward and backward on the straight line while maintaining a predetermined phase difference. The vertical plane passing through the fixed straight line J is a reference plane on which the arm expansion and contraction mechanisms on both sides of the arm rows A and B are symmetrically arranged, and is the same as the above-described vertical plane. Since P1 and P1 ′ are in a point-symmetrical position with respect to the pivot axis Q and at the same time in a plane-symmetrical position with respect to the vertical plane, the straight lines P1 and P1 ′ are orthogonal to the vertical plane. , Orthogonal to the constant straight line J. Therefore, Q, P1, P1 ′, P20, P20 ′ (not shown. This P20 ′ is the second in the state where the center P3 ′ of the third support shaft 8 ′ overlaps the center P1 ′ of the first support shaft 4 ′. The position where the center P2 ′ of the support shaft 6 ′ is located.) Is on the same straight line in plan view.

  One end of a third arm 9 is fixedly attached to the third support shaft 8. A hand 10 for holding the substrate 30 is fixed to the other end of the third arm 9. As described above, since the third support shaft 8 does not change its posture even when the first arm 5 rotates, the third arm 9, the hand 10, and the substrate 30 also change their posture according to the rotation of the first arm 5. There is nothing. Therefore, the substrate 30 is moved forward and backward by the arm expansion / contraction mechanism on the arm row A side so that its center P4 is always on the fixed straight line J without changing its posture.

  Similarly, the substrate 30 'is moved forward and backward by the arm expansion / contraction mechanism on the arm row B side so that its center P4' is always on the fixed straight line J without changing its posture. Will be apparent to those skilled in the art from the foregoing description.

  The fixed straight line J forms a fixed straight line in the x ′ y ′ relative coordinate system assumed on the rotation base 3. The distance R from the center P4, P4 ′ of the substrate 30, 30 ′ always on the fixed straight line J to the pivot axis Q indicates the extension amount of the arm expansion / contraction mechanism, and the wafer substrate 30, 30 ′ is placed in the cassette. It is an important measure of the amount of work when delivering and taking out. Since the amount is determined by the amount of rotation of the first arms 5 and 5 ′, it can be controlled by controlling the amount of rotation of the second motors M2 and M2 ′ that rotationally drive the first support shafts 4 and 4 ′. it can.

  As described above, the fixed straight line J forms a fixed straight line in the x ′ y ′ relative coordinate system. Therefore, in the xy absolute coordinate system, the direction depends only on the rotation angle θ of the rotation base 3. The turning axis Q that forms the rotation center of the rotating base 3 corresponds to the robot turning θ axis that serves as a control axis when the rotation angle θ of the rotating base 3 is controlled.

  The substrate transfer robot 1 further includes an elevating mechanism 50 that elevates and lowers the rotary base 3 and the arm expansion / contraction mechanisms on both sides of the arm rows A and B. The elevating mechanism 50 includes a third motor M3 serving as a driving source, pulleys 52 and 53, a timing belt 54, and an elevating base 55 for transmitting the output of the third motor M3 to the ball screw mechanism 51. Thus, by the rotation of the third motor M3, the elevating base 55 that accommodates the first motor M1 is raised and lowered, whereby the rotary base 3 installed above the elevating base 55 and the expansion and contraction of both arms The entire mechanism is moved up and down in the vertical Z-axis direction. Therefore, the substrate transfer robot 1 has a robot raising / lowering Z-axis as a third control axis in addition to the two control axes of the robot rotation θ axis and the robot advance / retreat R axis. The control device 40 controls these motors in an integrated manner. As a result, the substrate transfer robot 1 can freely cope with a plurality of cassettes arranged at different height positions.

As described above, the substrate transfer robot 1 has three control axes including the robot turning θ axis, the robot advance / retreat R axis, and the robot lifting / lowering Z axis. M1, a second motor M2, M2 ′ and a third motor M3 are provided.
As described above, since the substrate transfer robot 1 includes at least four motors, the number of transmission mechanisms increases accordingly, the apparatus becomes complicated and large, and the apparatus becomes expensive. The second motors M2 and M2 ′ transmit their outputs to the first arms 5 and 5 ′ via the speed reducers G2 and G2 ′ and the first shafts 4 and 4 ′. 4, 4 'center P1, P1'
Must be disposed across the pivot axis Q of the rotating base 3, the diameter of the rotating base 3 is increased, and a bearing for rotatably mounting the rotating base 3 to the main body 2 or this bearing There is a problem that the size of the magnetic seal for holding the portion hermetically becomes large and the apparatus is further increased in size, and the apparatus becomes more expensive due to the use of a large-diameter bearing and magnetic seal.

  In addition, since the second motors M2 and M2 ′ are fixedly provided in the rotary base 3, the cable for supplying power to them needs to have a length corresponding to the turning angle of the rotary base 3. Further, in order to prevent the disconnection, the turning angle of the rotary base 3 is conversely limited, and there is a problem that the usability as an apparatus is poor.

  In the same type of substrate transfer robot that has a plurality of sets of transmission mechanisms comprising a combination of a pair of pulleys and a timing belt spanned between them, the arm expansion / contraction mechanism is maximized. In order to reduce the load (moment load) applied to the bearing portion when extended, it has been proposed to support the arm expansion / contraction mechanism in an auxiliary manner using the attractive force or repulsive force of the permanent magnet (Patent Document 3). reference). However, this is limited to the use of permanent magnets only for those that work in that way.

  In addition, in a single arm row type substrate transfer robot, a four-bar link mechanism is used to move the hand (fork) linearly on the same straight line without changing its posture, and its right and left base ends There has also been proposed one in which the first and second drive arm portions constituting the arm portion are rotated by magnetic coupling of permanent magnets (see Patent Document 4). However, this is applicable only to the single arm row type substrate transfer robot, and not applicable to the double arm row type substrate transfer robot.

Further, a single or double arm row type substrate transfer robot is also known that employs a so-called direct drive system in which the expansion / contraction drive and the turning drive of the arm expansion / contraction mechanism are performed using an actuator such as a single motor ( (See Patent Documents 3 and 5). However, these are not robots that use a permanent magnet as a drive source.
JP 2002-166376 A Japanese Patent Laid-Open No. 11-033951 Japanese Patent Laid-Open No. 08-172121 Japanese Patent Application Laid-Open No. 10-092899 Japanese Patent Laid-Open No. 01-183383

  The invention of the present application solves the above-mentioned problems of the conventional double arm array substrate transfer robot, reduces the required number of motors, simplifies the structure, reduces the weight, and reduces the manufacturing cost. It is an object of the present invention to provide a double-arm array type substrate transfer robot that uses a permanent magnet as a drive source, and is suitable for use as a vacuum robot.

  The above problems can be solved by the following invention described in each claim of the present application. That is, according to the first aspect of the present invention, at least the first and second arms are sequentially knotted to constitute one row of arm expansion / contraction mechanisms, and such arm expansion / contraction mechanisms are arranged in two rows on the left and right. A hand is knotted at the tip of the last stage arm in each of the left and right rows, and the first arm in each of the left and right rows is rotated forward and backward with a phase difference, thereby In the double-arm row type substrate transfer robot configured such that the arm expansion and contraction mechanism expands and contracts with a phase difference, and the left and right rows of hands move linearly with a phase difference, the arm driving means further includes The arm driving means includes a second permanent magnet corresponding to the first permanent magnet provided in the first arm in each of the left and right rows, and the arm driving means rotates forward and backward. The second The permanent magnet rotates forward and backward, and the first arm in each of the left and right rows rotates forward and backward with a phase difference through the magnetic coupling between the second permanent magnet and the first permanent magnet. This is a double arm array type substrate transfer robot.

  Since the invention described in claim 1 is configured as described above, in the double arm row type substrate transfer robot, in order to extend and retract the arm extension mechanisms of the left and right rows with a phase difference, Since the motors are not directly used to rotate the first arm of the row forward and backward with a phase difference individually, the two motors can be reduced. Instead, even if one motor is required to rotate the arm driving means forward and backward, it is possible to reduce at least one motor by subtraction. Thereby, various effects as described below can be obtained.

  First, since the arm expansion and contraction mechanisms in the left and right rows can be driven by a single motor (actuator), it is possible to reduce the size and weight of the robot, and use permanent magnets instead of the reduced motors. Dust generation from the power transmission system is reduced. As a result, a double arm row type substrate transfer robot suitable for a vacuum robot can be obtained.

  Next, since the permanent magnet is used to rotate the first arm in each of the left and right rows in the forward and reverse directions with a phase difference, the drive system of the arm expansion / contraction mechanism can have a simple structure. In addition, since there is no drive transmission source at the base of the first arm in each of the left and right rows, the outer shape of the arm can be made small (minimum rotation radius is small) and low, and the arm telescopic mechanism is rotated around the θ axis. The outer shape of the swivel base can also be made small. As a result, the entire drive system (drive unit) of the arm expansion / contraction mechanism, the structure of the double arm row type substrate transfer robot can be simplified, reduced in size and reduced in weight, and the production cost is reduced. be able to.

  Next, since the outer shape of the swivel base can be made small, this is the robot main body (the outer body base of the robot corresponding to the robot main body 2 in the conventional double arm array type substrate transfer robot 1. See FIG. 10. ) Or a vacuum chamber, and the bearing and magnetic fluid seal required for airtight support can be made small in diameter and with a simple structure, and a multi-stage magnetic fluid seal Also from this aspect, the structure of the double-arm array substrate transfer robot can be simplified and reduced in weight, and the manufacturing cost can be reduced.

  Next, since at least one motor can be reduced from the drive system of the arm expansion / contraction mechanism, the motor speed reducer can be reduced correspondingly, and the multi-stage magnetic fluid seal can be reduced. The vibration transmission delay due to these components can be reduced, and the detection that the arm expansion / contraction mechanism in each of the left and right columns has collided with some object (which may be a counterpart arm expansion / contraction mechanism) can also be detected by a vibration sensor or the like. .

Next, since permanent magnets are used to rotate the first arm in each of the left and right rows with a phase difference, the arm expansion and contraction mechanisms in the left and right columns are some sort of object (even in the case of the counterpart arm expansion and contraction mechanism). In the event of an excessive collision, the robot can escape and minimize the collision damage to the robot and the transported object.
As described above, various effects can be achieved.

  Further, the invention described in claim 2 is the double arm row type substrate transfer robot according to claim 1, wherein the arm expansion and contraction mechanisms of the left and right rows each have a transmission mechanism therein, and the transmission The mechanism is such that the first arm of each left and right row rotates forward and backward in the horizontal plane with a phase difference, so that the arm expansion and contraction mechanism of each left and right column expands and contracts with a phase difference, It is characterized in that it moves linearly on the same straight line in a horizontal direction with a phase difference without changing its posture.

  According to the second aspect of the invention, with this configuration, the first arm in each of the left and right rows rotates forward and backward in a horizontal plane with a phase difference, so that the arm expansion and contraction mechanism in each of the left and right rows has a phase difference. The left and right rows have a transmission mechanism that extends and retracts so that the left and right hands move linearly on the same straight line in a horizontal direction with a phase difference without changing the posture. It is possible to collect the entire apparatus in a compact manner by accommodating it in the arm expansion / contraction mechanism. In addition, dust generation from the transmission mechanism can be contained.

  According to a third aspect of the present invention, in the double arm row type substrate transfer robot according to the first or second aspect, the arm driving means comprises a rotating disk, and the rotating disk is arranged in each of the left and right columns. The right and left rows of the left and right rows are arranged concentrically with the rotation support shafts of the left and right rows of the first arms, and the left and right rows of the rotary disc on the side facing the first arms. A second permanent magnet is provided at a predetermined position facing one arm.

  According to the third aspect of the present invention, the arm driving means can be made a simple structure by this configuration, and the drive control can be easily performed by the rotation control of the rotary disk.

  Furthermore, the invention described in claim 4 is the double-arm row type substrate transfer robot according to any one of claims 1 to 3, wherein the first arm in each of the left and right rows is an arm extension / retraction of each of the left and right rows. A stopper is provided to determine the limit so that the mechanism cannot be rotated backward via magnetic coupling beyond the position when the mechanism is at the minimum turning position.

According to the fourth aspect of the present invention, with this configuration, the arm driving means rotates forward and backward with a simple configuration, whereby the second permanent magnet rotates forward and backward. An operation in which the first arm in each of the left and right rows rotates forward and backward with a phase difference through the magnetic coupling between the magnet and the first permanent magnet can be reliably and smoothly performed.

  As described above, according to the double arm row type substrate transfer robot of the present invention, the first arm of each of the left and right rows is individually subjected to a phase difference in order to extend and retract the arm expansion and contraction mechanisms of the left and right rows with a phase difference. Since the motor is not directly used for forward / reverse rotation with the motor, two motors can be reduced. Even if one motor is required to rotate the arm driving means forward and backward, at least one motor can be reduced. Thereby, various effects as described below can be obtained.

First, since the arm expansion and contraction mechanisms in the left and right rows can be driven by a single motor (actuator), it is possible to reduce the size and weight of the robot, and use permanent magnets instead of the reduced motors. Dust generation from the power transmission system is reduced. As a result, a double arm row type substrate transfer robot suitable as a vacuum robot can be obtained.

  Next, since the permanent magnet is used to rotate the first arm in each of the left and right rows in the forward and reverse directions with a phase difference, the drive system of the arm expansion / contraction mechanism can have a simple structure. In addition, since there is no drive transmission source at the base of the first arm in each of the left and right rows, the outer shape of the arm can be made small (minimum rotation radius is small) and low, and the arm telescopic mechanism is rotated around the θ axis. The outer shape of the swivel base can also be made small. As a result, the entire drive system (drive unit) of the arm expansion / contraction mechanism, the structure of the double arm row type substrate transfer robot can be simplified, reduced in size and reduced in weight, and the production cost is reduced. be able to.

  Next, since the outer shape of the swivel base can be made small, this is the robot main body (the outer body base of the robot corresponding to the robot main body 2 in the conventional double arm array type substrate transfer robot 1. See FIG. 11. ) Or a vacuum chamber, and the bearing and magnetic fluid seal required for airtight support can be made small in diameter and with a simple structure, and a multi-stage magnetic fluid seal Also from this aspect, the structure of the double-arm array substrate transfer robot can be simplified and reduced in weight, and the manufacturing cost can be reduced.

  Next, since at least one motor can be reduced from the drive system of the arm expansion / contraction mechanism, the motor speed reducer can be reduced correspondingly, and the multi-stage magnetic fluid seal can be reduced. The vibration transmission delay due to these components can be reduced, and the detection that the arm expansion / contraction mechanism in each of the left and right columns has collided with some object (which may be a counterpart arm expansion / contraction mechanism) can also be detected by a vibration sensor or the like. .

Next, since permanent magnets are used to rotate the first arm in each of the left and right rows with a phase difference, the arm expansion and contraction mechanisms in the left and right columns are some sort of object (even in the case of the counterpart arm expansion and contraction mechanism). In the event of an excessive collision, the robot can escape and minimize the collision damage to the robot and the transported object.
As described above, various effects can be achieved.
Various effects as described above can be further exhibited.

  At least the first and second arms are sequentially knotted to form a single-row arm expansion / contraction mechanism, and such arm expansion / contraction mechanisms are provided in two rows on the left and right. A hand is knotted at the tip, and by rotating the first arm of each left and right row forward and backward with a phase difference, the arm expansion and contraction mechanism of each left and right row expands and contracts with a phase difference. In the double-arm row type substrate transfer robot configured so that the hands of each row move linearly with a phase difference, the arm drive device further includes arm drive means, and the arm drive means includes the first arm of each of the left and right rows. Corresponding to the first permanent magnet included in the second permanent magnet, and when the arm driving means rotates forward and backward, the second permanent magnet rotates forward and backward. Two permanent magnets and the first The first arm of each side column via magnetic coupling between the permanent magnet is such that forward and reverse rotation with a phase difference.

  Each of the left and right arm extension / contraction mechanisms has a transmission mechanism therein, and the transmission mechanism is configured such that the first arm of each of the left and right columns rotates forward and backward in a horizontal plane with a phase difference. The arm expansion and contraction mechanism expands and contracts with a phase difference so that the left and right hands move linearly on the same straight line in a horizontal direction with a phase difference without changing the posture. Shall.

  This arm driving means is composed of a rotating disk, and this rotating disk is provided directly below the first arm in each of the left and right rows and concentric with the rotation support shaft of the first arm in each of the left and right rows. A second permanent magnet is provided at a position facing the first arm of each of the left and right rows on the side facing the first arm of each of the left and right rows. The first arm of each of the left and right rows exceeds the position (of the first arm of each of the left and right rows) when the arm expansion / contraction mechanism of each of the left and right rows is at the minimum turning position, via the magnetic coupling of both permanent magnets. A stopper that determines the limit (of the first arm in each of the left and right rows) is provided so as not to be rotated in reverse.

Next, an embodiment of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a perspective view of a portion above the turning base of the double arm row type substrate transfer robot of this embodiment, and FIG. 2 is a plan view of the double arm row type substrate transfer robot. FIG. 3 is a side view of the double arm row type substrate transfer robot, showing a state when the arm expansion / contraction mechanism (double arm row) is in the minimum turning position. FIG. 4A and 4B are diagrams showing the structure of the first arm bearing portion of the arm expansion / contraction mechanism, wherein FIG. 4A is a side sectional view thereof, and FIG. 4B is a plan view thereof, partially broken away. FIGS. 5 to 9 are diagrams respectively showing a state in which the arm expansion / contraction mechanisms (double arm column) of the two rows are sequentially displaced from the state when the arm is in the minimum turning position. The parts corresponding to the respective parts of the conventional double-arm array substrate transfer robot are given numerical symbols obtained by adding 100 to the reference numerals used in the conventional double-arm array substrate transfer robot. .

  Compared with the conventional double arm array substrate transfer robot 1 shown in FIGS. 11 to 13, the double arm array substrate transfer robot 101 of this embodiment has a basic configuration of the drive system of the arm expansion / contraction mechanism. In this regard, only the means for rotating the first arm 105, 105 ′ in each of the left and right rows with a phase difference in the horizontal plane in the forward and reverse directions is different.

  That is, in the conventional double-arm row type substrate transfer robot 1, the second motor M2, the first arm 5, 5 'in each of the left and right rows is rotated in the forward and reverse directions with a phase difference in the horizontal plane. Although M2 ′ relies on the first support shafts 4 and 4 ′ to rotate forward and backward with a phase difference, the double-arm array substrate transfer robot 101 of this embodiment is illustrated in FIG. As shown, arm driving means 160 having second permanent magnets 162, 162 ′ is provided corresponding to the first permanent magnets 167, 167 ′ provided in the first arms 105, 105 ′ of the left and right rows. This is because the second permanent magnets 162 and 162 ′ are rotated forward and backward by rotating the arm driving means 160 forward and backward. Therefore, the first support shafts 4 and 4 ′, which are the rotation axes of the first arms 5 and 5 ′ used in the conventional double arm row substrate transport robot 1, are used for the double arm row substrate transport of this embodiment. The robot 101 has been removed.

Referring to FIG. 1 in more detail, the double arm array type substrate transfer robot 101 of this embodiment includes an arm driving means 160 including a rotating disk 161. The arm driving means 160 includes second permanent magnets 162 and 162 ′ corresponding to the first permanent magnets 167 and 167 ′ provided in the first arms 105 and 105 ′ in the left and right rows, respectively. Yes. As a result, when the arm driving means 160 is rotated forward and backward, the second permanent magnets 162 and 162 ′ are rotated forward and backward integrally with the arm driving means 160, and the first permanent magnets 167 and 167 ′ and the second permanent magnets 167 and 167 ′ are rotated. Magnetic couplings generated between the permanent magnets 162 and 162 ′ respectively attract the first arms 105 and 105 ′ in the left and right columns, and rotate them forward and backward with a phase difference.
In the present embodiment, the arm driving means 160 is composed of the rotating disk 161. However, the arm driving means 160 is not necessarily limited thereto, and may be composed of a rotating body provided with two second permanent magnets at predetermined positions. For example, a permanent magnet may be attached to both ends of a single rod-like body, or a permanent magnet may be attached to each tip of a V-shaped member.

  The rotating disk 161 is provided immediately below the first arm 105, 105 ′ in each of the left and right rows and concentric with a rotation support shaft 163 that supports the rotation of the first arm 105, 105 ′ in each of the left and right rows. It rotates around the rotation spindle 163. The second permanent magnets 162, 162 ′ are embedded and provided at predetermined positions facing these arms on the side facing the first arms 105, 105 ′ of the left and right rows of the rotating disk 161, respectively. Yes.

  As shown in FIG. 2, the “predetermined position” where the second permanent magnets 162 and 162 ′ are provided is the arm expansion and contraction mechanisms A and B in the left and right columns (this “arm expansion and contraction mechanism A in the left and right columns, “B” is synonymous with “arm extension mechanism on each side of arm rows A and B” described in the background section.) When the arm is in the minimum turning position, the first arms 105 and 105 ′ in the left and right rows are The position is determined as a position in the vicinity of the outer peripheral edge on the surface of the rotating disk 161 immediately below a certain position (hereinafter referred to as “arm initial position”). The time when this position overlaps with the arm initial position is the time when the rotating disk 161 is at the initial position (hereinafter referred to as “rotating disk initial position”). The rotating disk 161 rotates clockwise and counterclockwise from the initial position of the rotating disk. However, the first arm 105, 105 'in each of the left and right rows is provided with a stopper that determines the limit so that the first arm 105, 105' cannot be rotated in reverse by the magnetic coupling described above beyond the initial arm position.

  For example, the first arm 105 is attracted by the magnetic coupling between the corresponding first permanent magnet 167 and the second permanent magnet 162 when the rotating disk 161 rotates clockwise from the initial position of the rotating disk. In order not to rotate in the same direction, a stopper is provided to stop this at the initial arm position. Similarly, when the rotary disk 161 rotates counterclockwise starting from the initial position of the rotary disk, the first arm 105 ′ moves between the corresponding first permanent magnet 167 ′ and second permanent magnet 162 ′. A stopper is provided to stop this at the initial arm position so that it is not attracted by magnetic coupling and rotated in the same direction.

Here, as a method of providing these stoppers, since the rotation support shaft 163 serves as a fixed shaft, for example, as shown in FIG. Arc-shaped circumferential grooves 168 and 168 ′ that limit the rotation range of the arms 105 and 105 ′ are formed, and the circular contact grooves with the outer peripheral surface of the rotation support shaft 163 of these arms are formed on the circular contact grooves 168 and 168 ′. By implanting pins 169 and 169 ′ that move in the arcuate circumferential grooves, the pins 169 and 169 ′ move with the rotation of the arm and collide with the rear end surfaces of the arcuate circumferential grooves 168 and 168 ′, It is possible to rely on a method that prevents further reverse rotation of the arm. The locations where the arcuate circumferential grooves 168 and 168 ′ and the pins 169 and 169 ′ are installed may be interchanged between the rotation support shaft 163 and the arms 105 and 105 ′. FIG. 4 shows only the stopper structure on the first arm 105 side.

  Thus, by providing the stoppers for stopping the first arms 105 and 105 ′ in the left and right rows at their initial positions, the first arms 105 and 105 ′ in the left and right rows are fixed from the positions. Between the position of the straight line J, the arm drive unit 160 rotates positively and smoothly positively and smoothly as the arm drive unit 160 rotates counterclockwise and clockwise. As a result, the left and right arm expansion / contraction mechanisms A and B expand and contract, and the hands 110 and 110 ′ knotted at the tips of the second arms 107 and 107 ′ move forward and backward on the fixed straight line J with a phase difference.

  The mechanism in which the arm expansion / contraction mechanisms A and B in the left and right columns are expanded and contracted by the rotation of the first arms 105 and 105 ′ in the left and right columns is a corresponding mechanism in the conventional double arm column type substrate transfer robot 1. It can be the same as that described above, and can be configured by using two sets of transmission mechanisms each composed of a combination of two pulleys built in each of these arm extension / contraction mechanisms and a timing belt spanned between these pulleys. In this case, fixed pulleys 111 and 111 ′ (see FIG. 4A) that are allowed to enter the base end portions of the first arms 105 and 105 ′ in the left and right rows in a state unrelated to the rotation of these arms. The pulley corresponding to the pulleys 11 and 11 ′ in the double-arm row type substrate transfer robot 1) is used for a part of the axial length of the portion where the rotating support shaft 163 supports these arms in rotation. Can do.

  In the double arm row type substrate transfer robot 101 of this embodiment, as described above, the first arms 105 and 105 ′ in the left and right rows are rotatably supported in common by the rotation support shaft 163. The rotation centers P 1 and P 1 ′ of the first arms 105 and 105 ′ are aligned with the center of the rotation support shaft 163 and concentrated at one point, which overlaps the pivot axis Q of the rotation base 3. As a result, the centers P4 and P4 ′ (not shown) of the substrates held by the hands 110 and 110 ′ are the rotation axes of the third arms 109 and 109 ′ as in the conventional double-arm array substrate transfer robot 1. The third support shaft (not shown) forming the center P3, P3 ′ is not offset by an equal distance x (in the direction of the fixed straight line J). Further, the third arms 109 and 109 ′ themselves are not necessary, and these are also used by the hands 110 and 110 ′ (see FIG. 1).

  Further, as described above, the first arm 105, 105 ′ in each of the left and right rows is rotatably supported by the rotation support shaft 163, so that the rotation base 103 (see FIG. 3) is a conventional double arm row substrate. Compared with the rotation base 3 in the transfer robot 1, a smaller diameter can be used, and the rotation base 103 can be downsized.

Here, the functions performed by the rotation support shaft 163 will be summarized. The rotating support shaft 163 can fulfill various functions as follows.
First, (1) the base ends of the first arms 105 and 105 'in each of the left and right rows are supported by bearings and become the center of rotation of these arms to support the rotation. Next, (2) a portion of the axial length of the portion that rotatably supports these arms is released from the function as a bearing and functions as a pulley (see the pulley 111 in FIG. 4A). This pulley constitutes one component of a transmission mechanism comprising a combination of two pulleys and a timing belt incorporated in each of the left and right arm extension / contraction mechanisms A and B, respectively. Next, (3) a stopper structure (for example, arcuate circumferential grooves 168, 168 ′) that defines the limit of the first arms 105, 105 ′ in the left and right rows is provided. Next, (4) function as a turning axis that is integrated with the rotation base 103 and rotates around the robot turning θ axis.

  Here, in particular, in order for the rotation support shaft 163 to function as the pivot axis of (4), other joints including the bearing portions at the base end portions of the first arms 105 and 105 ′ in each of the left and right rows. By applying a magnetic damper or the like to the part, it is necessary to devise such a part to keep its state unless an external force exceeding the above-described magnetic coupling is applied.

Next, a mechanism for rotating the arm driving means 160 forward and reverse will be described.
As shown in FIG. 3, the central boss portion of the rotary disk 161 is extended to the inside of the rotary base 103, and the pulley fixed to the boss portion and the output shaft of the second motor M2. A timing belt 166 is stretched between the two. Accordingly, by controlling forward / reverse rotation of the second motor M2, it is possible to control forward / reverse rotation of the rotary disk 161 and the arm driving means 160, and thereby the expansion / contraction of the arm expansion / contraction mechanisms A, B in the left and right columns. The amount can be controlled to control the forward / backward movement of the hands 110, 110 ′ on the fixed straight line J. The second motor M <b> 2 is fixed inside the rotation base 103.

  The second motor M2 is different from the second motor M2 in the conventional double-arm row substrate transport robot 1. This means a second motor provided next to the first motor M1 along with the first motor M1 and the third motor M3 described below. However, both the second motor M2 in the present embodiment and the second motor M2 in the conventional double-arm row type substrate transfer robot 1 both serve as drive sources for the arm expansion / contraction mechanisms in both the left and right rows or in either row. In common.

  The rotation base 103 and the arm driving means 160, which is a structure above the rotation base 103, the arm expansion / contraction mechanisms A and B in the left and right rows, the hands 110 and 110 'in the left and right rows, and the like are rotated by the first motor M1. A configuration for turning around (robot turning θ-axis), and for moving them up and down along the robot lifting / lowering Z-axis (the robot lifting / lowering Z-axis coincides with the robot turning θ-axis) by the third motor M3. This configuration is basically not different from the corresponding configuration in the conventional double-arm array type substrate transfer robot 1, and therefore detailed description thereof is omitted.

  Here, the rotation drive of the arm drive means 160, the rotation base 103 and the components above it (the arm drive means 160, the arm expansion / contraction mechanisms A and B in the left and right rows, the hands 110 and 110 ′ in the left and right rows) ), As described above, instead of using the second motor M2 and the first motor M1, respectively, as shown in FIG. It can be modified to a system (direct drive system) that is performed by directly connecting the arm driving means 160 and the rotation base 103 to the motor MI via a magnetic coupling or the like. In FIG. 10, the rotation support shaft 163 and the rotation base 103 are in a fixed relationship, and these rotate integrally. The motor MII moves the lifting base 155 up and down via the ball screw mechanism 151, whereby the rotary base 103 and the arm driving means 160, which is a structure above the rotating base 103, and the arm expansion and contraction mechanisms A and B in the left and right rows, The left and right rows of hands 110, 110 ′, etc. are moved up and down along the robot lifting Z axis.

  In this way, by changing the drive system of the arm drive means 160 and the rotation base 103 to the direct drive system, the entire drive system (drive unit) of the arm expansion and contraction mechanisms A and B in the left and right rows can be doubled. The structure of the arm row type substrate transfer robot 101 can be simplified, reduced in size and reduced in weight, and the manufacturing cost can be reduced. Further, since the motor MI is fixed around the turning axis Q (does not rotate), the cable for supplying power to them is irrelevant to the turning angle of the rotating base 103 and can be shortened, and is convenient as an apparatus. Will improve. Refer to Patent Documents 3 and 5 for this direct drive system.

  A vibration sensor 165 is attached to an appropriate portion of the rotation support shaft 163. The vibration sensor 165 can detect that the arm expansion / contraction mechanisms A and B in the left and right columns collide with some object (which may be a counterpart arm expansion / contraction mechanism) as vibration of the rotation support shaft 163.

Next, the operation of the arm expansion / contraction mechanisms A and B in the left and right rows in the double arm row substrate transport robot 101 of this embodiment will be described in detail with reference to FIGS. 2 and 5 to 9.
First, the arm expansion / contraction mechanisms A and B in the left and right rows are at the minimum turning position where the first arms 105 and 105 ′ are retracted (reversely rotated) and the hands 110 and 110 ′ are overlapped. At this time, ΔP2, P3, P1, ΔP2 ′, P3 ′, P1 ′ are equilateral triangles, and the second permanent magnets 162, 162 ′ provided on the rotating disk 161 are the first arms 105, 105 ′. Are directly below the first permanent magnets 167 and 167 ′ (see FIG. 2).

  Next, the rotating disk 161 rotates counterclockwise (rotation angle τ), and the second permanent magnet 162 rotates the first arm 105 in the same direction (forward rotation) while attracting the first permanent magnet 167. Let At the same time, the hand 110 moves forward along the fixed straight line J. At this time, even if the second permanent magnet 162 ′ attracts the first permanent magnet 167 ′, the first arm 105 ′ is restrained by the limit stopper, so that it rotates in the same direction (reverse rotation). There is nothing (see FIG. 5). When the rotating disk 161 rotates 90 ° in the same direction, the arm expansion / contraction mechanism A in the left column extends so that the first arm 105 and the second arm 107 form an angle of 120 ° (see FIG. 6). When the rotating disk 161 is further rotated by 30 ° in the same direction, the arm expansion / contraction mechanism A in the left row is aligned and extends to the maximum, but normally, the arm expansion / contraction mechanism A has an appropriate expansion amount before extending so far. The rotation angle of the rotating disk 161 is suppressed.

  Next, the rotating disk 161 rotates clockwise, and the second permanent magnet 162 rotates the first arm 105 in the same direction (reverse rotation) while attracting the first permanent magnet 167. At the same time, the hand 110 moves backward along the fixed straight line J (see FIG. 7). When the rotating disk 161 rotates in the same direction and returns to the initial position of the rotating disk, the left column arm extension mechanism A returns to the initial arm position and stops. At this time, the second permanent magnet 162 'has returned to the position immediately below the first permanent magnet 167' (rotary disk initial position) (see FIG. 8).

  Next, the rotating disk 161 rotates clockwise, and the second permanent magnet 162 'rotates the first arm 105' in the same direction (forward rotation) while attracting the first permanent magnet 167 '. At the same time, the hand 110 ′ moves forward along the fixed straight line J. At this time, even if the second permanent magnet 162 attracts the first permanent magnet 167, the first arm 105 is stopped by the limit stopper, so that it does not rotate (reversely rotate) in the same direction. . When the rotating disk 161 is rotated 90 ° in the same direction, the arm expansion / contraction mechanism B in the right row extends so that the first arm 105 ′ and the second arm 107 ′ form an angle of 120 ° (see FIG. 9). reference). When the rotating disk 161 is further rotated by 30 ° in the same direction, the arm expansion / contraction mechanism B in the right row is aligned and extends to the maximum, but normally, it is set to an appropriate expansion amount before extending so far. The rotation angle of the rotating disk 161 is suppressed.

  Next, the rotating disk 161 rotates counterclockwise, and the second permanent magnet 162 'rotates the first arm 105' in the same direction (reverse rotation) while attracting the first permanent magnet 167 '. At the same time, the hand 110 'moves backward along the fixed straight line J. When the rotating disk 161 rotates in the same direction and returns to the initial position of the rotating disk, the arm expansion / contraction mechanism B in the right row returns to the initial arm position and stops. At this time, the second permanent magnet 162 has returned to the position immediately below the first permanent magnet 167 (rotary disk initial position), and is in the initial state (see FIG. 2). Although the above steps are not shown in the drawing, the above-described step of returning to the initial arm position and stopping by rotating the rotating disk 161 in the opposite direction after the left arm expansion / contraction mechanism A is extended to the maximum, The same.

Since the double-arm array substrate transfer robot 101 of the present embodiment is configured as described above, the following effects can be obtained.
In the double arm row type substrate transfer robot 101, in order to extend and contract the arm expansion / contraction mechanisms A and B in the left and right rows with a phase difference, the first arms 105 and 105 ′ in the left and right rows are individually moved in a horizontal plane. Since the motor is not directly used for the forward / reverse rotation with the phase difference as in the prior art, two motors (conventional motors M2 and M2 ′; see FIG. 11). ) Can be reduced. Instead, even if one motor M2 is required to newly rotate the arm driving unit 160 forward and backward, at least one motor can be subtracted. Thereby, various effects as described below can be obtained.

  First, since the arm expansion / contraction mechanisms A and B in the left and right rows can be driven by one motor (actuator) M2, the robot can be reduced in size and weight, and the permanent magnet 162 can be used instead of the reduced motor. , 162 ′, 167, and 167 ′ are used, dust generation from the power transmission system is reduced. As a result, a double arm row type substrate transfer robot suitable for a vacuum robot can be obtained.

  Next, the permanent magnets 162, 162 ′, 167, 167 ′ are used to rotate the first arm 105, 105 ′ of each of the left and right rows in a horizontal plane with a phase difference, so that the arm can be expanded and contracted. The drive system of mechanisms A and B can have a simple structure. In addition, since there is no drive transmission source at the root of the first arm 105, 105 ′ in each of the left and right rows, the outer shape of the arm can be made small (minimum minimum radius of rotation) and low, and the arm expansion / contraction mechanisms A, B The outer shape of the turning base 103 that rotates the shaft around the θ axis can be made small. As a result, the entire drive system (drive unit) of the arm expansion / contraction mechanisms A and B, and the structure of the double arm row type substrate transfer robot 101 can be simplified, reduced in size, and reduced in weight. Can be made cheaper.

  Next, since the outer shape of the swivel base 103 can be made small, this is made into a robot main body 102 (not shown. Robot outer body base corresponding to the robot main body 2 in the conventional double arm array type substrate transfer robot 1. The bearings and magnetic fluid seals that are required to support the vacuum chamber 164 in a rotatable and airtight manner can be made with a small diameter and a simple structure. From the surface, the structure of the double-arm array substrate transfer robot 101 can be simplified, reduced in size, and reduced in weight, and the manufacturing cost can be reduced.

  Next, since at least one motor can be reduced from the drive systems of the arm expansion / contraction mechanisms A and B, the motor speed reducer can be reduced correspondingly, and the multistage magnetic fluid seal can be reduced. The vibration transmission delay due to these can be reduced, and the vibration sensor can detect that the arm expansion / contraction mechanisms A and B in the left and right rows collide with some object (which may be the other arm expansion / contraction mechanism). become.

Next, since the permanent magnets 162, 162 ′, 167, 167 ′ are used to rotate the first arm 105, 105 ′ in each of the left and right rows in the horizontal plane with a phase difference, the left and right each When the arm expansion / contraction mechanisms A and B in a row collide excessively with any object (which may be a counterpart arm expansion / contraction mechanism), they can escape, minimizing the damage caused by the collision to the robot or transported object. be able to.
As described above, various effects can be achieved.

  Further, the left and right arm expansion / contraction mechanisms A and B each have a transmission mechanism therein, and the transmission mechanism has a phase difference between the first arms 105 and 105 ′ in the left and right columns. By rotating in the reverse direction, the arm expansion and contraction mechanisms A and B in the left and right rows expand and contract with a phase difference, and the left and right rows of hands 110 and 110 'have a phase difference and a horizontal direction without changing the posture. Since the transmission mechanism is linearly moved on the same straight line in a plan view, the transmission mechanism is accommodated in the arm expansion / contraction mechanisms A and B in the left and right rows so that the entire apparatus is compactly integrated. be able to. In addition, dust generation from the transmission mechanism can be contained.

  The arm driving means 160 is composed of a rotating disk 161, and the rotating disk 161 is directly below the first arm 105, 105 ′ in each of the left and right rows, and the rotation support of the first arm 105, 105 ′ in each of the left and right rows. A second permanent magnet 162, 162 ′ is provided at a predetermined position facing the first arm 105, 105 ′ of the rotating disk 161 on the side facing the first arm 105, 105 ′. Therefore, the arm driving means 160 can have a simple structure, and the drive control can be performed easily by the rotation control of the rotary disk 161.

  Further, the first arm 105, 105 ′ in each of the left and right rows has its position (of the first arm 105, 105 ′ in each of the left and right rows) when the arm expansion / contraction mechanisms A, B in the left and right rows are at the minimum turning position. Beyond that, a stopper is provided to determine the limit so that the first permanent magnets 167 and 167 ′ and the second permanent magnets 162 and 162 ′ cannot be reversely rotated through the magnetic coupling. With the simple structure, the arm driving means 160 rotates forward and backward, so that the first and second arms 105 and 105 'in the left and right rows can rotate forward and backward with a phase difference reliably and smoothly. be able to.

Furthermore, the rotational drive of the arm drive means 160, the rotation base 103 and the components above it (the arm drive means 160, the arm expansion and contraction mechanisms A and B in the left and right rows, the hands 110 and 110 'in the left and right rows) If the drive system of the swivel drive is a direct drive system and the drive is performed by a single motor MI, one motor can be further reduced, and the arm expansion and contraction mechanism for each of the left and right rows The structure of the entire A and B drive system (drive unit), the double arm array substrate transfer robot 101 can be further simplified, reduced in size and weight, and the production cost is further reduced. be able to.
In this case, since the direct drive motor MI is fixed around the turning axis Q (does not rotate), the cable for supplying power to these is independent of the turning angle of the rotating base 103 and is the shortest. This improves the usability as a device.
In addition, various effects can be achieved.

The invention of the present application is not limited to the above embodiments, and various modifications can be made without departing from the scope of the invention.
In addition, the basic idea of the present invention that the first arm 105, 105 ′ is rotationally driven by the arm driving means 160 having the second permanent magnet 162, 162 ′ is to reduce the number of permanent magnets by one, It is also possible to apply this to a single arm array type substrate transfer robot.

It is a perspective view of the upper part rather than the turning base of the double arm row type substrate transfer robot of one embodiment of the present invention. It is a top view of the same double arm row type substrate conveyance robot, and is a view showing a state when two rows of arm expansion / contraction mechanisms (double arm row) are at the minimum turning position. FIG. 3 is a schematic side view of the double arm array substrate carrying robot, showing a part thereof in cross section. It is a figure which shows the structure of the 1st arm bearing part of the arm expansion-contraction mechanism, Comprising: (a) is the sectional side view, (b) is the top view, Comprising: It is a figure which fractures | ruptures and shows it. It is a figure which shows the state which displaced from the state when the arm expansion-contraction mechanism of the said 2 rows is in the minimum turning position. It is a figure which shows the state which displaced further from the state when the arm expansion-contraction mechanism of the said 2 rows is in the minimum turning position. It is a figure which shows the state which displaced further from the state when the arm expansion-contraction mechanism of the said 2 rows is in the minimum turning position. It is a figure which shows the state which displaced further from the state when the arm expansion-contraction mechanism of the said 2 rows is in the minimum turning position. It is a figure which shows the state which displaced further from the state when the arm expansion-contraction mechanism of the said 2 rows is in the minimum turning position. It is a schematic side view of the modification of the double arm row | line | column type board | substrate conveyance robot, Comprising: It is a figure which shows a part in cross section. It is a schematic longitudinal cross-sectional view of the conventional double arm row | line | column type substrate conveyance robot. It is a skeleton figure of the arm expansion-contraction mechanism of the double arm row type substrate transfer robot. It is a perspective view of the double arm row type substrate transfer robot.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1, 1 '... Board | substrate conveyance robot, 2 ... Robot main body, 3 ... Rotation base 4, 4' ... 1st spindle 5, 5 '... 1st arm, 6, 6' ... 2nd spindle, 7, 7 '... second arm, 8, 8' ... third support shaft, 9, 9 '... third arm, 10, 10' ... hand, 11, 11 ', 12, 12' ... pulley, 13, 13 '... Timing belt, 21, 21', 22, 22 '... Pulley, 23, 23' ... Timing belt, 30, 30 '... Substrate, 40 ... Control device, 50 ... Elevating mechanism, 51 ... Ball screw mechanism, 52, 53 ... Pulley, 54 ... Timing belt, 55 ... Elevating base, 101 ... Double arm row type substrate transfer robot, 103 ... Rotating base, 105, 105 '... First arm, 107, 107' ... Second arm, 110 , 110 '... hand, 151 ... ball screw mechanism, 155 ... lift base, 160 ... arm driving hand , 161: rotating disk, 162, 162 ′: second permanent magnet, 163: rotating spindle, 164: vacuum chamber, 165: vibration sensor, 166: timing belt, 167, 167 ′: first permanent magnet, 168 168 '... arc-shaped circumferential groove, 169, 169' ... pin, A, B ... arm row, M1, M2, M2 ', M3 ... first to third motors, MI, MII ... first, second Motor, G1, G2 ... reducer, J ... constant straight line, P1-P3, P1'-P3 '... center of first to third support shafts, P4, P4' ... center of substrate, Q ... pivot axis.

Claims (4)

At least the first and second arms are sequentially knotted to form a one-row arm expansion / contraction mechanism, and such arm expansion / contraction mechanisms are provided in two rows on the left and right.
A hand is knotted at the tip of the last stage arm of each left and right row,
By rotating the first arm in each of the left and right rows forward and backward with a phase difference, the arm expansion and contraction mechanism in each of the left and right rows expands and contracts with a phase difference, and the hands in the left and right rows have a phase difference. In a double arm array type substrate transfer robot configured to linearly move,
Arm driving means is further provided;
The arm driving means has a second permanent magnet corresponding to the first permanent magnet provided in the first arm in each of the left and right rows,
When the arm driving means rotates forward and backward, the second permanent magnet rotates forward and backward, and the left and right columns of the left and right rows are magnetically coupled via the magnetic coupling between the second permanent magnet and the first permanent magnet. A double-arm array type substrate transfer robot, wherein the first arm is configured to rotate forward and backward with a phase difference. The arm expansion and contraction mechanism in each of the left and right rows has a transmission mechanism inside,
In the transmission mechanism, the first arm in each of the left and right rows rotates forward and backward in a horizontal plane with a phase difference, so that the arm expansion and contraction mechanism in each of the left and right rows expands and contracts with a phase difference. 2. The double according to claim 1, wherein the hand moves linearly on the same straight line in a horizontal direction with a phase difference without changing its posture. Arm row type substrate transfer robot. The arm driving means comprises a rotating disk,
The rotating disk is provided immediately below the first arm in each of the left and right rows, concentrically with the rotation support shaft of the first arm in each of the left and right rows,
The second permanent magnet is provided at a predetermined position facing the first arm in each of the left and right rows on the side facing the first arm in each of the left and right rows of the rotating disk. Item 3. The double arm row type substrate transfer robot according to Item 1 or 2. The first arm in each of the left and right rows is limited so that the first arm in each of the left and right rows cannot be rotated in reverse via the magnetic coupling beyond the position when the arm expansion / contraction mechanism is at the minimum turning position. 4. The double-arm row type substrate transfer robot according to claim 1, further comprising a stopper for determining

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