JP4521507B2 - Accelerator and X-ray generator using the accelerator - Google Patents

Description

  The present invention includes an acceleration tube having a plurality of acceleration parts separated by a cutoff part that cuts off microwaves without disturbing the progress of the electron beam, and a configuration in which other acceleration means are provided coaxially in a single acceleration part. X-ray generation using an accelerating device and an accelerating device capable of generating electron beams of the same or different properties from a single accelerating tube by selectively connecting a plurality of microwave sources or microwave pulses to the device Relates to the device.

Accelerators are used for nondestructive inspection, radiation diagnosis, and radiation therapy for diagnosing the state of an inspection object, but the output energy of a single accelerator tube is often fixed.
For example, in radiotherapy, a high-energy accelerator tube used for treatment and a low-energy accelerator tube used to obtain a lesion image for the purpose of confirming the result of diagnosis or treatment are required. That is, since the required energy level is greatly different, different acceleration tubes are used (for example, Patent Document 3).

  In the radiotherapy apparatus of Patent Document 3, as shown in FIG. 1 of the same document, a small electronic linac that emits therapeutic X-rays 3a and a real-time imager that emits X-rays 3b that are weak fan beam X-rays for diagnosis. 74 X-ray sources 77A and 77B, and a doctor can perform treatment while observing an image generated during treatment based on X-ray transmission data detected by the real-time imager 74.

Proposals have been made to match the optical axes of the source so that no wrinkles occur between low-energy X-rays and high-energy X-rays (X-rays for examination or simulation and X-rays for treatment). Yes.
The invention of the charged particle accelerator described in Patent Document 1 is a prior art that selectively uses an electron beam that is a charged particle and an X-ray by making an X-ray target appear and disappear in the X-ray emission axis of the accelerator in FIG. An example is disclosed.
The embodiment shown in FIGS. 1 to 3 and FIG. 6 of the same document discloses an accelerator that uses high-energy X-rays and low-energy X-rays.
X-rays transmitted through a high-energy transmission target and a low-energy reflection target arranged at 45 degrees on the axis of the electron beam, which is a charged particle accelerated by an accelerator, are used for high energy. Used as X-rays. X-rays reflected from a low-energy reflective target using a thermionic emission cathode provided separately from the accelerator electron gun are used as high-energy X-rays. In this embodiment, since the direction of the low-energy thermionic beam is different from the traveling direction of the high-energy electron beam, there is a problem that the degree of coaxiality between the low-energy X-ray and the high-energy X-ray is not accurate. .

The invention of the acceleration tube and the radiation generator using the acceleration tube described in Patent Document 2 proposes a structure in which the second anode is mechanically projected and retracted in the acceleration tube. There is a problem that the temporal response is made dependent on mechanical movement.
JP-A-6-54917 JP-A-9-204996 JP 2004-97646 A

As described above, there is a strong request for increasing the average beam power of the electron beam generated by the acceleration device as well as a request for generating an electron beam having different characteristics in the coaxial direction.
An object of the present invention is to selectively connect two or more microwave sources having the same or different characteristics to a single accelerator tube to obtain the same or different types of electron beams and increase the average beam power of the electron beams. To provide an X-ray generator capable of generating X-rays having the same or different characteristics in the coaxial direction and improving the energy of X-rays using these accelerators is there.
A more specific object of the present invention is to output electron beams having different energy and current amounts using a single accelerator tube, or to increase the average power of one accelerator tube.
For this purpose, a plurality of power sources (microwave source and booster circuit) are connected, and the accelerator tube is divided into a plurality of regions to receive power from the connected power sources, and power is supplied to the regions using pulses. An object of the present invention is to provide an accelerator connected by a microwave switch and an X-ray generator using the accelerator.

In order to achieve the object, an X-ray generator according to claim 1 according to the present invention comprises:
In an X-ray generator for exciting an X-ray target by an accelerator that selectively connects outputs of a plurality of microwave sources to a single accelerator tube and accelerates an electron beam emitted from an electron gun,
A microwave switch using a ferrite tube or a vacuum tube connected to the accelerating tube by alternately switching outputs of the plurality of microwave sources, and
Wherein a control circuit for controlling the operation of each microwave source, and before Kemah microwave switch,
It is characterized by comprising.

According to the present invention, the X-ray generator according to claim 2 is:
An X-ray generator using an accelerator that selectively connects outputs of a plurality of microwave sources to an accelerating tube to accelerate an electron beam and generates electron beams having the same or different characteristics,
An accelerating tube comprising first and second accelerating units separated by a blocking unit that blocks microwaves without interfering with the progress of the electron beam;
A first electron gun;
A second electron gun provided in association with the blocking portion;
An X-ray target;
A control circuit for controlling the operation and connection of each microwave source;
It is characterized by comprising.

The X-ray generator according to claim 3 of the present invention is the X-ray generator according to claim 2 ,
The control circuit is characterized in that when the first microwave source is connected to the first acceleration unit, the second acceleration unit is controlled to be in an inoperative state.

The X-ray generator according to claim 4 of the present invention is the X-ray generator according to claim 2 ,
The second electron gun includes a ring cathode that allows the output electron beam of the first acceleration unit to pass through and an acceleration focusing electrode that accelerates and converges electrons generated by the ring cathode.

The X-ray generator according to claim 5 of the present invention is:
An X-ray generator using an accelerator that selectively connects outputs of a plurality of microwave sources to an accelerating tube to accelerate an electron beam and generates electron beams having the same or different characteristics,
An electron gun,
An accelerating tube comprising first and second accelerating units separated by a blocking unit that blocks microwaves without interfering with the progress of the electron beam;
First and second microwave sources respectively connected to the first and second acceleration units;
An X-ray target that is excited by an electron beam that has passed through the second acceleration section to generate X-rays;
A control circuit for controlling the operation of the first and second microwave sources;
It is characterized by comprising.

The X-ray generator according to claim 6 of the present invention is the X-ray generator according to claims 1 to 5 ,
The control circuit controls the operation of the electron gun in conjunction with the operation of the microwave source.

The X-ray generator according to claim 7 of the present invention is the X-ray generator according to claims 1 to 5 ,
The plurality of microwave sources generate microwaves having the same or different characteristics.
This feature can be selected in various ways according to any combination of microwave source operation parameters (frequency, voltage, repetition frequency, burst width).

An accelerating device according to an eighth aspect of the present invention is the X-ray generator according to the first aspect , wherein outputs of a plurality of microwave sources are selectively connected to a single accelerating tube to accelerate an electron beam, An accelerator that generates the same or different electron beams,
A pulse generation circuit for outputting a high voltage pulse;
A plurality of microwave sources connected to high-pressure pulses output from the pulse generation circuit and supplying microwave pulses having the same or different characteristics;
The output of each microwave source is characterized by being connected to a microwave switch of the X-ray generator.

The acceleration device according to claim 9 according to the present invention comprises:
An acceleration device that selectively connects outputs of a plurality of microwave sources to an acceleration unit to accelerate an electron beam, and generates an electron beam having the same or different characteristics,
An accelerating tube comprising first and second accelerating units separated by a blocking unit that blocks microwaves without interfering with the progress of the electron beam;
A first electron gun;
A second electron gun provided in association with the blocking portion;
First and second microwave sources;
A pulse generation circuit for controlling the operation of the first and second microwave sources;
It is characterized by comprising.

The acceleration device according to claim 10 of the present invention is the acceleration device according to claim 9 ,
The second electron gun includes a ring cathode that transmits an output electron beam of a first acceleration unit and an acceleration focusing electrode that accelerates and converges electrons generated by the ring cathode.

According to the present invention, electron beams having different energy intensity and current amount can be output from one accelerator tube, and the average power of one accelerator tube can be changed.
This effect will be further explained. The output energy of the microwave source is 5 Mw (or 6 Kw) in the klystron, the pulse width (pw) is 6 μsec, and the period is determined to be 200 pps. Although it is not easy to increase it, according to the present invention, this problem can be solved by the above-described configuration.

Further, there is another effect that a plurality of electron beams having different energies that share the central axis of the electron beam can be output from one accelerator tube. This effect will also be described with further application examples. In the non-destructive inspection, more detailed image information can be obtained by synthesizing images captured using X-rays having different energies, so that the reliability of the non-destructive inspection can be improved. Conventionally, detailed image information could not be obtained unless two or more X-ray tubes with different irradiation energies (electron beams accelerated by an accelerating tube collide with an X-ray target to generate X-rays). However, according to the present invention, this can be measured at one time with one accelerator tube.
Since X-rays output from the same accelerator tube are used, irradiation points of high-energy X-rays and low-energy X-rays are aligned, so that more accurate image information can be obtained. That is, in order to perform radiotherapy while confirming the result of radiotherapy, it is necessary to separately prepare an acceleration tube for imaging (for diagnosis) and an acceleration tube for treatment. By using a high-frequency microwave pulse source and a low-power microwave pulse source, treatment and diagnosis can be performed in real time with a single accelerator tube.
If the output of the microwave source can be adjusted, the degree of freedom in selecting the irradiation dose distribution during radiotherapy can be increased.

  Embodiments of an acceleration device and an X-ray generator according to the present invention will be described below with reference to the drawings and the like. The present invention relates to an acceleration device and an X-ray generation device having the acceleration device as a main part. First, the X-ray generation device will be described, and then the configuration and operation of the acceleration device will be referred to.

(First Embodiment of X-ray Generator) FIG. 1A is a block diagram showing a first embodiment of an X-ray generator according to the present invention.
In this X-ray generator, an X-ray target 17 is excited by an accelerator that selectively connects outputs of a plurality of microwave sources 12 and 13 to a single accelerator tube 16 to accelerate an electron beam.
The microwave switch 14 selectively connects the plurality of microwave sources 12 and 13 to the acceleration tube 16. The control circuit 11 controls the operations of the microwave sources 12 and 13 and the microwave switch 14. The control circuit 11 is provided with an electron gun controller 11A, microwave source controllers 11B and 11D, and a microwave switch controller 11C.

The electron gun control unit 11A controls the power of the heater of the electron gun 15 to efficiently emit electrons from the electron gun, and supplies a negative high voltage to the negative electrode (not shown).
The microwave source control unit 11 </ b> B controls the oscillation and stoppage of the microwave of the first microwave source 12. Similarly, the microwave source control unit 11D controls the oscillation and stoppage of the microwave of the second microwave source 13.
The microwave switch control unit 11C controls the microwave switch 14, supplies the microwave of the first microwave source 12 to the acceleration tube 16 for a certain period of time, and transmits the microwave of the second microwave source 13 for the other certain period of time to the acceleration tube. 16 is controlled.

  The microwave switch 14 uses a conventional microwave switch using a ferrite or gap discharge tube, and enables high power switching.

In the first microwave source 12 and the second microwave source 13, the oscillation time of the sinusoidal microwave is as short as 5 μsec. By supplying electric power in this short time, the instantaneous electric power can be very large, and the energy of the accelerated electrons reaches 10 MeV.
The time interval between the start of oscillation of the first microwave source and the start of the next oscillation is 3.3 msec. The repetition period is 300 pps, which is 300 pulses per second.
The frequencies of the first microwave source 12 and the second microwave source 13 are basically the same frequency. However, as described later, in order to increase the acceleration efficiency when using two acceleration units, the first microwave source 12 and the second microwave source 13 have the same frequency. The frequencies of the wave source 12 and the second microwave source 13 are selected as the resonance frequency of the cavity of each acceleration unit.
Even if the capabilities of the first microwave source 12 and the second microwave source 13 are substantially the same, the supply power can be changed depending on the difference in connection time.
The acceleration tube 16 alternately receives the microwave output of the first microwave source 12 and the microwave output of the second microwave source 13. Accelerated electrons accelerated by the microwave output from these microwave sources collide with the X-ray target 17 disposed in the X-ray target chamber 18 to generate X-rays.

FIG. 1B is a cross-sectional plan view of a part of the electron gun 15, the acceleration tube 16, and the X-ray target chamber 18 in the first embodiment of the X-ray generator according to the present invention.
The acceleration tube 16 has a plurality of cavities therein. The microwave output from the microwave switch 14 is supplied to this cavity. Each cavity receives power from the coupling cavities 16A-16N. Therefore, the electrons from the electron gun 15 are accelerated one after another by the electric field of each cavity. As described above, the outputs of the first microwave source 12 and the second microwave source 13 are sequentially supplied to the single acceleration tube 16 via the microwave switch 14.

FIG. 6 is a waveform diagram for explaining the operation of the first embodiment of the acceleration device according to the present invention. The operation will be described assuming that the X-ray generator shown in FIG. 1A uses this acceleration device.
The output timing of each of the microwave sources 12 and 13 is the timing shown in FIG. The microwave pulse P1 of the first microwave source 12 oscillates at the timing shown in the upper part of FIG. The number of microwave oscillation groups repeated per second is about 300 pps.
On the other hand, the microwave pulse P2 of the second microwave source 13 oscillates at the timing shown in the middle stage of FIG. Similarly, the number of microwave oscillation groups repeated per second is about 300 pps. Therefore, the microwave pulse supplied to the acceleration tube 16 has a waveform shown in the lower part of FIG.
That is, the microwave microwave pulse P2 output from the second microwave source 13 is inserted between the microwave pulses P1 output from the first microwave source 12. That is, if P1 and P2 are the same, it is effectively 600 pps.
The control circuit 11 performs synchronous control to alternately output the P1 microwave output and the P2 microwave output.

Since the first embodiment of the X-ray generator according to the present invention is configured and operated as described above, the following features are obtained.
1) The microwave source can be operated with the maximum capability of the microwave source instantaneously by pulse control, and the instantaneous power can be increased.
2) Since heat consumption is suppressed by the pulse control, for example, the pulse peak power reaches 16 MW with an efficiency of 50% in a period of 45 KV applied voltage, 6 K A peak current, and 5 μsec. The klystron used in the microwave source can increase the output power to the limit of electrical characteristics.
3) Since X-rays with different intensities can be generated with a single accelerator tube by using a plurality of microwave sources, X-ray therapy (diagnostic X-ray and therapeutic X-ray response) Fast real-time control enables treatment of moving organs such as the heart) and nondestructive testing.
4) Since high-energy electrons and low-energy electrons travel on the same acceleration tube axis and are accelerated, the generated X-ray generation axes coincide. As a result, accurate diagnosis and treatment can be performed simultaneously with X-ray therapy, and highly accurate non-destructive testing can be performed with non-destructive testing.

(Second Embodiment of X-ray Generator) FIG. 2A is a block diagram showing a second embodiment of the X-ray generator according to the present invention.
In this embodiment, an acceleration tube including first and second acceleration units 25 and 27 separated by a structure (hereinafter simply referred to as a blocking unit) that blocks microwaves without hindering the progress of the electron beam is used.
FIG. 2B is a cross-sectional plan view of a part of the first acceleration unit 25, the blocking unit 26, and a part of the second acceleration unit 27 in the second embodiment of the X-ray generator according to the present invention.
The control circuit 21 includes an electron gun control unit 21A, microwave source control units 21B and 21D, and a blocking unit electron gun which is a control unit of an electron gun (including a ring cathode 262 and an acceleration focusing electrode 263) provided in the blocking unit 26. A control unit 21C is provided.
The electron gun control unit 21A controls the electric power of the electron gun heater to efficiently emit electrons from the electron gun, and supplies a negative high voltage to the negative electrode.
The microwave source control unit 21 </ b> B controls the oscillation and stoppage of the microwave of the first microwave source 22. Similarly, the microwave source control unit 21D controls the oscillation and stoppage of the microwave of the second microwave source 23. The blocking unit electron gun control unit 21 </ b> C supplies a high negative voltage (300 KV) between the ring cathode 262 and the acceleration focusing electrode 263 in the blocking unit 26. As a result, electrons are emitted from the ring cathode 262 and accelerated and converged.

The first microwave source 22 supplies microwaves to the first acceleration unit 25. Similarly, the second microwave source 22 supplies microwaves to the second acceleration unit 27.
The timing at which the microwave is supplied is that the microwave of the first microwave source 22 is supplied to the first accelerating unit 25 for a certain period of time by the microwave source control unit 21B and the microwave source control unit 21D, Control is performed so that the microwave of the microwave source 23 is supplied to the second acceleration unit 27.
The frequencies of the first microwave source 22 and the second microwave source 23 are basically the same frequency, but may be selected to be different frequencies. The output power of the first microwave source 22 and the second microwave source 23 may be the same or different, and can be freely selected according to the application to be used. Here, the case of different power will be described.
The electrons emitted from the electron gun 24 are strongly accelerated by the first acceleration unit 25 by the microwave output of the first microwave source 22. The electron energy is about 10 Mev.
During this period, the blocking unit 26 and the second accelerating unit 27 do not receive the microwave output from the second microwave source 23, so that the accelerated electrons continue to travel and excite the X-ray target 28 to generate X-rays. generate.
On the other hand, during the period when the microwave oscillation of the first microwave source 22 is stopped, the ring cathode 262 in the blocking unit 26 receives a high negative voltage and emits electrons. Then, since the output power of the second microwave source 23 is supplied to the second acceleration unit 27, the electrons are accelerated by the second acceleration unit 27. The electron energy is about 1 Mev. Since the first microwave source 22 and the second microwave source 23 oscillate alternately, electrons having different velocities collide with the X-ray target 28. Therefore, X-rays with different intensities are emitted alternately. When the tube length of the first acceleration unit 25 is longer than the tube length of the second acceleration unit 27, first, strong X-rays are emitted, and then relatively weak X-rays are emitted. For example, as a medical device for X-ray therapy, relatively weak X-rays can be used for diagnosis and strong X-rays can be used for therapy.

As illustrated in FIG. 2B, a blocking unit 26 is provided at a portion that blocks the first acceleration unit 25 and the second acceleration unit 27.
An insulating material 261 made of a ceramic circular tube wall constitutes the blocking portion 26. The blocking unit 26 is provided with an electron gun.
This electron gun is composed of an acceleration converging electrode 263 whose tube axis portion is open and a ring cathode 262 whose tube shaft portion is similarly open.
Electrons emitted from the electron gun 24 and electrons emitted from the ring cathode 262 are accelerated alternately by the respective acceleration units.
The outputs of the first microwave source 22 and the second microwave source 23 are sequentially supplied to the acceleration units 25 and 27 connected in this way.

FIG. 9 is a waveform diagram for explaining the operation of the second embodiment of the acceleration device according to the present invention. The operation will be described on the assumption that the X-ray generator shown in FIG. 2A uses this accelerator.
The output timing of each of the microwave sources 22 and 23 is the timing shown in FIG. That is, the microwave pulse P2 output from the second microwave source 23 is output between the microwave pulses P1 output from the first microwave source 22. However, in the case of this control, as described above, the microwave outputs of P1 and P2 are different. Therefore, X-rays having different intensities are output alternately.
The control circuit 21 performs synchronous control so as to alternately output the P1 microwave output and the P2 microwave output.

Since the second embodiment of the X-ray generator according to the present invention is configured as described above, the following operation features can be obtained.
1) By using a plurality of microwave sources, X-rays with different intensities can be generated with a single accelerator tube. Therefore, in terms of application, X-ray therapy (diagnostic X-ray response and therapeutic X-ray response) Fast real-time control enables treatment of moving organs such as the heart) and nondestructive testing.
2) An example of the operation of this apparatus is shown below.
Microwave source 22 Frequency 2856MHz
Peak power 6Mw
Average power 6Kw
Pulse width 6μsec
Repeat 180pps
Microwave source 23 Frequency 2856MHz
Peak power 100Kw
Average power 1Kw
Pulse width 60μsec
Repeat 180pps

(Third Embodiment of X-ray Generator) FIG. 3A is a block diagram showing a third embodiment of the X-ray generator according to the present invention, and FIG. 3B shows a third embodiment of the X-ray generator according to the present invention. The plane sectional view of a part of acceleration tube in a form, acceleration means, and a part of X-ray target room is shown.
The accelerator includes an electron gun 34 and an acceleration tube 35 that accelerates electrons from the electron gun 34. The acceleration means 36 includes another electron gun, and is provided on the acceleration tube 35 integrally with the tube axis.
The microwave source 32 supplies microwaves to the acceleration tube 35. The X-ray target 38 generates X-rays by an electron beam that has passed through the acceleration means 36. The acceleration voltage supply unit 33 supplies an acceleration electric field to the acceleration means 36. The control circuit 31 controls the operation of the microwave source 32 and the acceleration voltage supply unit 33.

The control circuit 31 includes an electron gun control unit 31A, a microwave source control unit 31B, and an acceleration voltage supply unit control unit 31C.
The electron gun control unit 31A controls the power of the electron gun heater to efficiently emit electrons from the electron gun 34, and supplies a negative high voltage to the negative electrode (not shown).
The microwave source control unit 31B controls the microwave oscillation and stop of the microwave source 32. Similarly, the acceleration voltage supply unit control unit 31 </ b> C controls generation and stoppage of the pulse voltage of the acceleration voltage supply unit 33. The acceleration voltage supply unit control unit 31 </ b> C causes the acceleration voltage supply unit 33 to supply a pulsed negative high voltage (300 KV) between the ring cathode 362 and the acceleration convergence electrode 363 in the acceleration unit 36.
As a result, electrons are emitted from the ring cathode 362, accelerated and converged, and the X-ray target 38 disposed in the X-ray target chamber 39 is excited to generate X-rays.
The microwave source 32 supplies microwaves to the acceleration tube 35. Similarly, the acceleration voltage supply unit 33 supplies a pulsed negative high voltage to the acceleration means 36.

The timing at which the microwave and the pulsed voltage are supplied is that the microwave of the microwave source 32 is supplied to the accelerating tube 35 by the microwave source control unit 31B and the acceleration voltage supply control unit 31C and is accelerated for another fixed time. Control is performed so that a pulsed voltage of 300 KV from the voltage supply unit 33 is supplied to the acceleration means 36.
The electrons emitted from the electron gun 34 are strongly accelerated by the acceleration tube 35 by the microwave output of the microwave source 32. During this period, the accelerating means 36 does not receive a pulsed voltage from the acceleration voltage supply unit 33. Therefore, the accelerated electrons continue to travel and excite the X-ray target 38 to generate X-rays.
On the other hand, during the period when the microwave oscillation of the microwave source 32 is stopped, the ring cathode 362 in the acceleration means 36 receives a negative high pulse voltage and emits electrons. The emitted electrons collide with the X-ray target 38 and X-rays are generated.
Since the microwave source 32 and the acceleration voltage supply unit 33 operate alternately, electrons having different velocities collide with the X-ray target 38 alternately. Therefore, strong X-rays having different intensities and relatively weak X-rays are emitted alternately. For example, as a medical device for X-ray therapy, weak X-rays can be used for diagnosis and strong X-rays can be used for therapy.

As shown in FIG. 3B, the accelerating means 36 includes an insulating material 361 made of a ceramic circular tube wall, an acceleration converging electrode 363 in which the tube shaft portion is open, and a ring cathode in which the tube shaft portion is similarly opened. An electron gun composed of 362 is included. When a negative pulsed high voltage is applied to the ring cathode 362 with respect to the acceleration focusing electrode 363, the acceleration means 36 emits electrons from the ring cathode 362 and causes the X-ray target 38 disposed in the X-ray target chamber 39 to move. Excited.
The control circuit 31 performs synchronous control so that the output of the microwave source 32 and the pulsed voltage of the acceleration voltage supply unit 33 are alternately output.
FIG. 10 is a waveform diagram for explaining the operation of the third embodiment of the accelerator according to the present invention. The timing of control of the third embodiment of the X-ray generator according to the present invention will be described using this waveform diagram. That is, the pulse voltage Q of the acceleration voltage supply unit 33 is output between the outputs P of the microwave source 32.

The features of the operation of the third embodiment of the X-ray generator according to the present invention are as follows.
1) Since X-rays with different intensities can be generated by the accelerating tube and the accelerating means, in terms of application, X-ray therapy (moving of the heart etc. by real-time control with quick response of diagnostic X-ray and therapeutic X-ray) It can also be used for non-destructive testing.
2) An operation example of the above-described third embodiment will be described below.
Microwave source 32 Frequency 2856MHz
Peak power 6Mw
Average power 6Kw
Pulse width 6μsec
Repeat 180pps
Pulse power supply 33 Pulse width 60μsec ~ 3msec
Voltage 120KV
Peak current 10mA
Repeat 180pps

(Fourth Embodiment of X-ray Generator) FIG. 4A is a block diagram showing a fourth embodiment of the X-ray generator according to the present invention, and FIG. 4B shows a fourth embodiment of the X-ray generator according to the present invention. The plane sectional view of the electron gun in the form, the 1st acceleration part, the interception part, the 2nd acceleration part, and the X-ray target room is shown.
The accelerating tube includes first and second accelerating units 45 and 46 separated by a structure (blocking unit 43) that blocks the microwave without interfering with the progress of the electron beam.
The electron gun 44 is connected to the first acceleration unit 45. First and second microwave sources 41 and 42 are used. The X-ray target 47 is provided in an X-ray target chamber 48 connected to the second acceleration unit 46. The X-ray target 47 is excited by an electron beam that has passed through the second acceleration unit 46 to generate X-rays. The control circuit 40 controls the operations of the first and second microwave sources 41 and 42.
The control circuit 40 includes an electron gun control unit and a microwave source control unit.
In particular, in the present embodiment, the blocking unit 43 is provided between the first acceleration unit 45 and the second acceleration unit 46.
The electron gun control unit controls the power of the heater of the electron gun in order to efficiently emit electrons from the electron gun 44, and supplies a negative high voltage to the negative electrode (note that connection lines are omitted in FIG. 4A). .
The microwave source control unit controls the oscillation and stoppage of the microwave of the first microwave source 41. Similarly, the oscillation and stop of the microwave of the second microwave source 42 are controlled.
The first microwave source 41 supplies microwaves to the first acceleration unit 45. Similarly, the second microwave source 42 supplies microwaves to the second acceleration unit 46.
When the microwave is supplied, the microwave source controller supplies the microwave of the first microwave source 41 to the first accelerating unit 45 for a certain period of time, and the microwave of the second microwave source 42 for the other certain period of time. The second acceleration unit 46 is controlled to be supplied.

The frequencies of the first microwave source 41 and the second microwave source 42 are basically the same frequency, but different frequencies can be selected. The output power of the first microwave source 41 and the second microwave source 42 may be the same or different, and can be freely selected depending on the application to be used.
The electrons emitted from the electron gun 44 are accelerated by the first acceleration unit 45 by the microwave output of the first microwave source 41.
In this embodiment, the tube length of the first acceleration unit 45 is set to about 10 cm, and the tube length of the second acceleration tube 46 is set to about 80 cm.
The electron energy accelerated by the first acceleration unit 45 is about 1 MeV. The accelerated electron beam passes through the blocking part 43, further passes through the second acceleration part 46 that is not electrically excited, and collides with the X-ray target 47 disposed in the X-ray target chamber 48.
On the other hand, since the first acceleration unit 45 is not excited during the period in which the second acceleration unit 46 is excited, the electrons emitted from the electron gun 44 pass through the blocking unit 43 without being accelerated, Enter the 2-accelerator tube 46. Since the tube length of the 2nd acceleration part 46 is about 80 cm, an electron is accelerated strongly and an electron energy reaches the level of 10 Mev. These electrons excite the X-ray target 47 and generate high-energy X-rays.

As shown in FIG. 4B, a blocking unit 43 is disposed at a portion connecting the first acceleration unit 45 and the second acceleration unit 46. The blocking part 43 electrically insulates the left and right acceleration parts 45 and 46.
The timing for exciting the microwaves of the first acceleration unit 45 and the second acceleration unit 46 is temporally separated. The shape of the acceleration cavity at both ends of the blocking part 43 is determined in consideration of the responsiveness of the coupling cavities 45A, 45B, 46A to 46N. The electrical continuity of the acceleration cavity that is the path of the microwave is eliminated, and the first acceleration unit 45 to which the first microwave source 41 is connected and the second acceleration unit 46 to which the second microwave source 42 is connected are electrically separated. I am trying. The structure is such that electrons from the electron gun 44 generate relatively weak X-rays by the electron beam accelerated by the first acceleration unit 45 and strong X-rays by the electron beam accelerated by the second acceleration unit 46. The second electron gun is not provided.
With the excitation vibration waveform as shown in FIG. 9, the generated X-rays are generated by a combination of relatively weak X-rays divided in time and strong X-rays. As a medical device for X-ray therapy, weak X-rays can be used for diagnosis and strong X-rays can be used for therapy.

Features of the operation of the fourth embodiment of the X-ray generator according to the present invention are as follows.
1) Since a plurality of microwave sources can be used to generate X-rays with different intensities with a single accelerating tube having two accelerating portions, X-ray therapy (diagnostic X-ray and Similar to the above-described embodiment, it can be used for non-destructive testing and treatment of movable organ parts such as the heart by real-time control with fast response of therapeutic X-rays.
2) An operation example of the fourth embodiment will be described below.
Microwave source 41 Frequency 2856 MHz
Peak power 200Kw
Average power 2Kw
Pulse width 60μsec
Repeat 180pps
Microwave source 42 Frequency 2856 MHz
Peak power 6Mw
Average power 6Kw
Repeat 180pps

  The acceleration device according to the present invention can be used not only for the X-ray generator described above but also for other applications. Basically, it differs by applying excitation microwaves of the same characteristics or different characteristics (combination of frequency, burst interval, repetition frequency, average power, peak power) to one accelerator section or multiple accelerator sections. A characteristic acceleration electron output can be obtained.

(First Embodiment of Accelerator) FIG. 5 is a block diagram showing a first embodiment of the accelerator according to the present invention.
This is an accelerating device that selectively connects outputs of a plurality of microwave sources 51 and 52 to an accelerating tube 55 and accelerates an electron beam to generate electron beams having the same or different characteristics.
The pulse generation circuit 50 outputs a high voltage pulse. The plurality of microwave sources 51 and 52 supply the microwave pulse by the high-pressure pulse output from the pulse generation circuit 50.
The electron gun 54 is connected to an acceleration tube 55. A plurality of microwave sources 51 and 52 are connected to the microwave switch 53 as inputs, respectively, and the microwave sources 51 and 52 are selectively connected to the acceleration tube 55.
The pulse generation circuit 50 includes a power source that feeds power from the microwave sources 51 and 52 to the acceleration tube 55, a time schedule table that specifies the feeding time of the power source, and switching of the microwave switch 53 based on the time schedule table. A control unit for selecting connection of the power source and controlling the electron gun is provided. The control unit of the pulse generation circuit 50 selects from the first microwave source 51 and the second microwave source 52 to be fed to the acceleration tube 55. The control unit controls the timing at which the electron gun 54 outputs an electron beam and the timing at which one of the microwave sources 51, 52 is connected to the acceleration tube 55.

For example, for the purpose of X-ray diagnosis or treatment, non-destructive inspection, the pulse generation circuit 50 includes the configuration shown in the block diagram of FIG. 1A, that is, an electron gun control unit, a microwave source control unit, and a microwave switch control unit. It can also be set as the structure containing. The electron gun control unit controls the power of the heater of the electron gun in order to efficiently emit electrons from the electron gun 54, and supplies a negative high voltage to the negative electrode of the electron gun 54 (note that connection lines are not shown) )
The microwave source control unit controls the oscillation and stop of the microwave of the first microwave source 51 and similarly the oscillation and stop of the microwave of the second microwave source 52. The microwave switch control unit controls the microwave switch 53, supplies the microwave of the first microwave source 51 to the acceleration tube 55 for a certain period of time, and supplies the microwave of the second microwave source 52 for the other certain period of time to the acceleration tube 55. The timing to supply to is controlled.
As the microwave switch 53, the same switch as the microwave switch 14 of the X-ray generator can be used.

In the first microwave source 51 and the second microwave source 52, the oscillation time of the sinusoidal microwave is as short as 5 μsec. By supplying electric power in this short time, the instantaneous electric power can be very large, and the energy of the accelerated electrons reaches 10 MeV. The time interval between the start of oscillation of the first microwave source 51 and the start of oscillation of the second microwave source 52 is 3.3 msec. The repetition period is 300 pps, which is 300 pulses per second.
The frequencies of the first microwave source 51 and the second microwave source 52 are basically the same frequency, but in order to increase the efficiency of the accelerating tube, the frequencies of the first microwave source 51 and the second microwave source 52 are The resonance frequency of the cavity of the acceleration tube is selected.
In this example, the output power of the first microwave source 51 and the second microwave source 52 is substantially the same.

Further, the output timing of each microwave is the timing shown in FIG.
The output P1 of the first microwave source 51 and the output P2 of the second microwave source 52 are sequentially supplied to one acceleration tube 55 via the microwave switch 53 at the timing shown in the drawing. As a result, the acceleration tube 55 alternately receives the microwave output P1 of the first microwave source 51 and the microwave output P2 of the second microwave source 52.
Accelerated electrons accelerated by the microwave output of these microwave sources are transmitted through the window or emitted into another vacuum chamber.
The pulse generation circuit 50 performs synchronous control so that the P1 microwave output and the P2 microwave output are alternately output.

The operation of the first embodiment of the accelerator according to the present invention has the following characteristics.
1) Since the microwave source is pulse-controlled, the instantaneous power is large.
2) Since heat consumption is suppressed by the pulse control, for example, the pulse peak power reaches 16 MW with an efficiency of 50% in a period of 45 KV applied voltage, 6 K A peak current, and 5 μsec. The klystron used in the microwave source can increase the output power to the limit of electrical characteristics.
3) By using a plurality of microwave sources, electron beams having different intensities can be generated with a single accelerator tube.
4) Since high-energy electrons and low-energy electrons travel along the same acceleration tube axis and accelerate, the generation axes of electron beams of high-energy electrons and low-energy electrons coincide.

(Second Embodiment of Accelerator) FIG. 7 is a block diagram showing a second embodiment of the accelerator according to the present invention.
The first acceleration unit 74 and the second acceleration unit 76 are blocked by a blocking unit 75 in a microwave manner. The first acceleration unit 74 accelerates the electron beam output from the electron gun 73 with microwave power.
The 2nd acceleration part 76 accelerates the electron beam which the electron gun provided in the interruption | blocking part 75 output with microwave power. The electron gun provided in the blocking unit 75 supplies electrons so as not to obstruct the path of electrons accelerated by the first acceleration unit 74.
The electron gun provided in the blocking unit 75 includes a ring cathode type electron gun and an acceleration focusing electrode.
A plurality of microwave power sources, in this example, a first microwave source 71 and a second microwave source 72 supply power to the acceleration units 74 and 76.
The pulse generation circuit 70 includes a power source that supplies power to the acceleration units 74 and 76 from the first microwave source 71 and the second microwave source 72, a time schedule table that specifies a power supply time by the power source, a selection unit, and a control. Is provided. The selection unit of the pulse generation circuit 70 selects the microwave sources 71 and 72 to be fed.
The control unit performs control so that the timing at which the electron guns provided in the electron gun 73 and the blocking unit 75 output the electron beam and the timing at which the power source selects the microwave sources 71 and 72 to which power is to be supplied match.

For the purpose of, for example, X-ray diagnosis or treatment, non-destructive inspection, etc., the pulse generation circuit 70 controls a configuration similar to the configuration in the block diagram shown in FIG. 2A, that is, an electron gun (including an electron gun of a blocking unit). And a microwave source control unit.
The electron gun control unit controls the power of the heater of the electron gun in order to efficiently emit electrons from the electron gun 73 and the electron gun provided in the blocking unit 75, and the electron gun provided in the electron gun 73 and the blocking unit 75. A negative high voltage is supplied to the negative electrode (not shown in the connection line). The microwave source control unit controls the oscillation and stop of the microwave of the first microwave source 71 and the oscillation and stop of the microwave of the second microwave source 72. The electron gun control unit supplies a high negative voltage to a ring cathode (not shown, but having the same configuration as 262 shown in FIG. 2B) in the electron gun provided in the blocking unit 75. As a result, electrons are emitted from the ring cathode.
The first microwave source 71 supplies microwaves to the first acceleration unit 74. Similarly, the second microwave source 72 supplies microwaves to the second acceleration unit 76.
As for the timing of supplying the microwave, the pulse generating circuit 70 supplies the microwave of the first microwave source 71 to the first accelerating unit 74 for a certain period of time, and the microwave of the second microwave source 72 for the other certain period of time. The timing to be supplied to the 2-accelerator 76 is reached. The timing is shown in FIG.
The output P1 of the first microwave source 71 and the output P2 of the second microwave source 72 are sequentially supplied to the acceleration units 74 and 76 at the timing shown in the drawing. Thus, the acceleration units 74 and 76 receive the microwave output P1 of the first microwave source 71 and the microwave output P2 of the second microwave source 72, respectively.
Accelerated electrons accelerated by the microwave output of these microwave sources are transmitted through the window or emitted into another vacuum chamber.
The pulse generation circuit 70 performs synchronous control so as to alternately output the P1 microwave output and the P2 microwave output.
The frequency of the output P1 of the first microwave source 71 and the output P2 of the second microwave source 72 are basically the same frequency, but different frequencies can also be selected. The output power of the first microwave source 71 and the second microwave source 72 may be the same or different, and can be freely selected depending on the application to be used. Here, the case of different power will be described.

Electrons emitted from the electron gun 73 are strongly accelerated by the first acceleration unit 74 by the microwave output of the first microwave source 71. The electron energy is about 10 Mev.
During this period, the electron gun provided in the blocking unit 75 and the second accelerating unit 76 do not receive the microwave output from the second microwave source 72, so that the accelerating electrons continue to travel and are emitted to the outside.
On the other hand, during the period when the microwave oscillation of the first microwave source 71 is stopped, the ring cathode in the electron gun provided in the blocking unit 75 receives a high negative voltage and emits electrons. The electron gun control unit supplies a high negative voltage to a ring cathode (not shown, but equivalent to 262 shown in FIG. 2B) in the electron gun provided in the blocking unit 75. As a result, electrons are emitted from the ring cathode.
And since the output electric power of the 2nd microwave source 72 is supplied to the 2nd acceleration part 76, an electron is accelerated by the 2nd acceleration part 76. FIG. The electron energy is about 1 Mev. Since the first microwave source 71 and the second microwave source 72 oscillate alternately, electrons having different velocities are emitted to the outside.

The operation of the second embodiment of the accelerator according to the present invention has the following characteristics.
1) By using a plurality of microwave sources, it is possible to generate different electron beams at each acceleration unit. In addition, since the same electron beam can be generated, the application range such as sterilization, X treatment, diagnosis, and non-destructive inspection is expanded.
2) An example of the operation of this embodiment is shown below.
Microwave source 71 Frequency 2856 MHz
Peak power 6Mw
Average power 6Kw
Pulse width 6μsec
Repeat 180pps
Microwave source 72 Frequency 2856MHz
Peak power 100Kw
Average power 1Kw
Pulse width 60μsec
Repeat 180pps

(Third Embodiment of Accelerator) FIG. 8 is a block diagram showing a third embodiment of the accelerator according to the present invention.
The acceleration unit 84 accelerates the electron beam output from the electron gun 83 with the connected microwave power. The acceleration unit 86 accelerates the electron beam output from the electron gun provided in the blocking unit 85 by the pulse voltage from the connected acceleration voltage supply unit 82.
The electron gun provided in the blocking unit 85 includes a ring cathode type electron source for supplying electrons and an acceleration converging electrode so as not to interfere with the path of electrons accelerated by the acceleration unit 84.
The microwave source 81 and the acceleration voltage supply unit 82 supply power to the acceleration unit 84 and the acceleration means 86. The pulse generation circuit 80 includes a power source that supplies power from the microwave source 81 and the acceleration voltage supply unit 82 to the acceleration unit 84 and the acceleration unit 86, and a time schedule table that specifies the power supply time by the power source, a selection unit, and a control unit. Is provided. The selection unit of the pulse generation circuit 80 selects the microwave source 81 and the acceleration voltage supply unit 82 to be fed.
The control unit matches the timing at which the electron gun 83 and the electron gun provided in the blocking unit 85 output the electron beam and the timing at which the power source selects the microwave source 81 and the acceleration voltage supply unit 82 to which power should be supplied. To control.

The pulse generation circuit 80 may have a configuration similar to the configuration in the block diagram shown in FIG. 3A for the purpose of, for example, X-ray diagnosis or treatment, non-destructive inspection, and the like. That is, it can be configured to include the electron gun 83, the blocking unit 85 and the control unit of the electron gun included in the acceleration means 86, the control unit of the microwave source 81, and the control unit of the acceleration voltage supply unit 82 in FIG.
The electron gun control unit controls the power of the heater of the electron gun in order to efficiently emit electrons from the electron gun 83 and the electron gun provided in the blocking unit 85, and is provided in the electron gun 83 and the blocking unit 85. A negative high voltage is supplied to the negative electrode of the electron gun (the connection lines are not shown). The microwave source control unit controls the oscillation and stoppage of the microwave of the microwave source 81. Similarly, the acceleration voltage supply unit control unit controls generation and stop of the high voltage pulse voltage of the acceleration voltage supply unit 82.
The acceleration voltage supply unit 82 supplies a pulsed negative high voltage (300 KV) to a ring cathode (not shown, but the same configuration as the ring cathode 362 shown in FIG. 3B) in the acceleration means 86.

The microwave source 81 supplies microwaves to the acceleration unit 84. Similarly, the acceleration voltage supply unit 82 supplies a pulsed negative high voltage to the acceleration means 86.
The timing of supplying the microwave and the pulsed voltage is such that the microwave of the microwave source 81 is supplied to the acceleration unit 84 by the microwave source control unit and the acceleration voltage supply unit control unit provided in the pulse generation circuit 80, It is time to supply a 300 KV pulse voltage to the acceleration means 86 in the acceleration voltage supply unit 82 for another fixed time.
Electrons emitted from the electron gun 83 are strongly accelerated by the acceleration unit 84 by the microwave output of the microwave source 81. During this period, the acceleration means 86 does not receive a pulsed voltage from the acceleration voltage supply unit 82, so the accelerated electrons continue to travel and are emitted to the outside.
On the other hand, during the period when the microwave oscillation of the microwave source 81 is stopped, the ring cathode in the acceleration means 86 receives a negative high pulse voltage, and electrons are emitted, accelerated and converged, and emitted and emitted to the outside.

Since the microwave source 81 and the acceleration voltage supply unit 82 operate alternately, electrons having different energies are alternately emitted to the outside.
The pulse generation circuit 80 performs important operation control for maintaining synchronization for alternately outputting the microwave output and the pulse voltage.
The timing of control is shown in FIG.
The output P of the microwave source 81 and the output Q of the acceleration voltage supply unit 82 are sequentially supplied to the acceleration unit 84 and the acceleration means 86 at the timing shown in the drawing. Thereby, the acceleration part 84 and the acceleration means 86 receive the microwave output P of the microwave source 81 and the microwave output Q of the acceleration voltage supply part 82, respectively.
Accelerated electrons accelerated by the microwave output of the microwave source and the acceleration voltage of the acceleration voltage supply section pass through the window or are emitted into another vacuum chamber.
The pulse generation circuit 80 performs synchronous control so as to alternately output a P microwave output and a Q acceleration voltage output.
The output P of the microwave source 81 is a microwave, whereas the output Q of the acceleration voltage supply unit 82 is a pulse direct current waveform.

The operation of the third embodiment of the accelerator according to the present invention has the following characteristics.
1) Two types of electron beams having different intensities can be generated by an acceleration tube having an output from a microwave source and an acceleration voltage supply unit and an accelerating means provided coaxially therewith.
2) It is particularly characterized in that an electron beam having a weak pulse waveform is obtained by the acceleration means, and the application range such as sterilization, X treatment, diagnosis, non-destructive inspection is expanded as in the above-described embodiment. Since it can be miniaturized, it can be used as a portable device.
3) An example of the operation of this apparatus is shown below.
Microwave source 81 Frequency 2856MHz
Peak power 6Mw
Average power 6Kw
Pulse width 6μsec
Repeat 180pps
Pulse power supply 82 Pulse width 60μsec ~ 3msec
Voltage 120KV
Peak current 10mA
Repeat 180pps

1 is a block diagram showing a first embodiment of an X-ray generator according to the present invention. 1 is a cross-sectional plan view of a part of an electron gun, an acceleration tube, and an X-ray target chamber in a first embodiment of an X-ray generator according to the present invention. It is a block diagram which shows 2nd Embodiment of the X-ray generator by this invention. It is plane sectional drawing of a part of 1st acceleration part, interruption | blocking part, and a part of 2nd acceleration part in 2nd Embodiment of the X-ray generator by this invention. It is a block diagram which shows 3rd Embodiment of the X-ray generator by this invention. It is a plane sectional view of a part of an accelerating tube, acceleration means, and an X-ray target room in a 3rd embodiment of the X-ray generator by the present invention. It is a block diagram which shows 4th Embodiment of the X-ray generator by this invention. It is a plane sectional view of a part of electron gun, the 1st acceleration part, the interception part, the 2nd acceleration part, and the X-ray target room in a 4th embodiment of the X-ray generator by the present invention. 1 is a block diagram showing a first embodiment of an acceleration device according to the present invention. It is a wave form diagram which shows the microwave voltage added to the acceleration tube for demonstrating operation | movement of 1st Embodiment of the acceleration apparatus by this invention. It is a block diagram which shows 2nd Embodiment of the acceleration apparatus by this invention. It is a block diagram which shows 3rd Embodiment of the acceleration apparatus by this invention. It is a microwave voltage waveform diagram added to the acceleration part for demonstrating operation | movement of 2nd Embodiment of the acceleration apparatus by this invention. It is a voltage waveform figure added to the acceleration tube (acceleration part) and acceleration means for demonstrating operation | movement of 3rd Embodiment of the acceleration apparatus by this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 11 Control circuit 11A Electron gun control part 11B, 11D Microwave source control part 11C Microwave switch control part 12 1st microwave source 13 2nd microwave source 14 Microwave switch 15 Electron gun 16 Accelerating tube 16A-16N Coupling cavity 17 X Line target 18 X-ray target chamber 21 Control circuit 21A Electron gun control unit 21B, 21D Microwave source control unit 21C Blocking unit Electron gun control unit 22 First microwave source 23 Second microwave source 24 Electron gun 25 First acceleration unit 26 Blocking unit (including electron gun)
27 Second Acceleration Unit 28 X-ray Target 29 X-ray Target Chamber 261 Insulating Material 262 Ring Cathode 263 Acceleration Focusing Electrode 31 Control Circuit 31A Electron Gun Control Unit 31B Microwave Source Control Unit 31C Acceleration Voltage Supply Unit Control Unit 32 Microwave Source 33 Acceleration Voltage Supply unit 34 Electron gun 35 Acceleration tube 36 Acceleration means (including electron gun)
38 X-ray target 39 X-ray target chamber 361 Insulating material 362 Ring cathode 363 Acceleration focusing electrode 40 Control circuit 41 First microwave source 42 Second microwave source 43 Blocking portion 44 Electron gun 45 First acceleration portion 45A, 45B Coupling cavity 46 2nd acceleration part 46A-46N Coupling cavity 47 X-ray target 48 X-ray target room 50 Pulse generation circuit 51 1st microwave source 52 2nd microwave source 53 Microwave switch 54 Electron gun 55 Accelerating tube 70 Pulse generation circuit 71 First microwave source 72 Second microwave source 73 Electron gun 74 First acceleration unit 75 Blocking unit (including electron gun)
76 Second Acceleration Unit 80 Pulse Generation Circuit 81 Microwave Source 82 Acceleration Voltage Supply Unit 83 Electron Gun 84 Acceleration Tube 85 Blocking Unit (Including Electron Gun)
86 Acceleration means

Claims (10)

In an X-ray generator for exciting an X-ray target by an accelerator that selectively connects outputs of a plurality of microwave sources to a single accelerator tube and accelerates an electron beam emitted from an electron gun,
A microwave switch using a ferrite tube or a vacuum tube connected to the accelerating tube by alternately switching outputs of the plurality of microwave sources, and
Wherein a control circuit for controlling the operation of each microwave source, and before Kemah microwave switch,
An X-ray generation apparatus comprising: An X-ray generator using an accelerator that selectively connects outputs of a plurality of microwave sources to an accelerating tube to accelerate an electron beam and generates electron beams having the same or different characteristics,
An accelerating tube comprising first and second accelerating units separated by a blocking unit that blocks microwaves without interfering with the progress of the electron beam;
A first electron gun;
A second electron gun provided in association with the blocking portion;
An X-ray target;
A control circuit for controlling the operation and connection of each microwave source;
An X-ray generation apparatus comprising: The X-ray generator according to claim 2 ,
The control circuit controls the second acceleration unit to an inoperative state when the first microwave source is connected to the first acceleration unit. The X-ray generator according to claim 2 ,
The second electron gun comprises an X-ray generator comprising a ring cathode that allows an output electron beam of a first acceleration unit to pass through, and an acceleration focusing electrode that accelerates and converges electrons generated by the ring cathode. An X-ray generator using an accelerator that selectively connects outputs of a plurality of microwave sources to an accelerating tube to accelerate an electron beam and generates electron beams having the same or different characteristics,
An electron gun,
An accelerating tube comprising first and second accelerating units separated by a blocking unit that blocks microwaves without interfering with the progress of the electron beam;
First and second microwave sources respectively connected to the first and second acceleration units;
An X-ray target that is excited by an electron beam that has passed through the second acceleration section to generate X-rays;
A control circuit for controlling the operation of the first and second microwave sources;
An X-ray generation apparatus comprising: In the X-ray generator of Claims 1-5 ,
The X-ray generator according to claim 1, wherein the control circuit controls the operation of the electron gun in conjunction with the operation of the microwave source. In the X-ray generator of Claims 1-5 ,
The X-ray generation apparatus, wherein the plurality of microwave sources generate microwaves having the same or different characteristics. 2. The X-ray generator according to claim 1 , wherein the outputs of a plurality of microwave sources are selectively connected to a single accelerator tube to accelerate the electron beam and generate electron beams having the same or different characteristics. And
A pulse generation circuit for outputting a high voltage pulse;
A plurality of microwave sources connected to high-pressure pulses output from the pulse generation circuit and supplying microwave pulses having the same or different characteristics;
The output of each microwave source accelerator, characterized in that it is connected to the microwave switch of the X-ray generator. An acceleration device that selectively connects outputs of a plurality of microwave sources to an acceleration unit to accelerate an electron beam, and generates an electron beam having the same or different characteristics,
An accelerating tube comprising first and second accelerating units separated by a blocking unit that blocks microwaves without interfering with the progress of the electron beam;
A first electron gun;
A second electron gun provided in association with the blocking portion;
First and second microwave sources;
A pulse generation circuit for controlling the operation of the first and second microwave sources;
An accelerating device comprising: The acceleration device according to claim 9 , wherein
The acceleration device according to claim 2, wherein the second electron gun includes a ring cathode that transmits an output electron beam of a first acceleration unit and an acceleration focusing electrode that accelerates and converges electrons generated by the ring cathode.

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