JP4552491B2 - Sheet punching device and manufacturing method of multilayer ceramic electronic component - Google Patents

Description

  The present invention relates to a sheet punching device and a method of manufacturing a multilayer ceramic electronic component using the same, and more particularly, to a sheet punching device capable of surely correcting the position of a sheet to be punched in the planar rotational direction and the same. The present invention relates to a method for manufacturing the multilayer ceramic electronic component used.

  A multilayer ceramic capacitor, which is one of typical multilayer ceramic electronic components, includes, for example, a plurality of internal electrodes 52a and 52b stacked in a ceramic element 51 via a ceramic layer 53, as shown in FIG. The internal electrodes 52a and 52b facing each other through the ceramic layer 53 are alternately drawn out to the opposite end faces 54a and 54b of the ceramic element 51 and connected to the external electrodes 55a and 55b formed on the end faces. have.

And the multilayer ceramic capacitor which has such a structure is normally manufactured through the process of laminating | stacking a ceramic green sheet.
In other words, a multilayer ceramic capacitor is a ceramic green sheet (dummy sheet) in which a conductive green paste is printed and applied to laminate a ceramic green sheet having an internal electrode pattern formed on its surface, and no internal electrodes are formed on both upper and lower sides. Are laminated, pressure-bonded, divided (cut) into individual elements, fired, and then subjected to a process of forming external electrodes at both ends of the fired laminated body (ceramic element).

By the way, as the ceramic green sheets laminated as described above, those punched into a predetermined shape using a punching device are usually used (see Patent Document 1).
In the case of punching out the ceramic green sheet, the ceramic green sheet is adjusted in position (positioning) and then punched out so as not to cause misalignment of the internal electrode patterns in the stacking process. In this position adjustment (positioning), in addition to the position adjustment in the X direction and the Y direction when the ceramic green sheet is viewed in a plan view, as schematically shown in FIG. Here, the position adjustment (positioning) is performed in the rotation direction (θ direction) when the ceramic green sheet 61 held by the carrier film 60 is viewed in a plan view.
In performing the position adjustment in the rotational direction,
(1) As shown in FIG. 9, the punching table 62 on which the ceramic green sheet 61 is placed is rotated to adjust the position in the rotational direction (θ direction), and then a punching head having a sheet suction function. After lowering 63 and punching out the ceramic green sheet 61, the punched ceramic green sheet 61 is adsorbed and transferred to the next process,
(2) As shown in FIG. 10, a ceramic green sheet 61 is rotated by the position correction mechanism 64 using equipment having a rotation direction position correction mechanism 64 separately from the punching table 62, and the rotation direction (θ direction). After adjusting the position, the punching head 63 having a sheet suction function is lowered to punch out the ceramic green sheet, and then the punched ceramic green sheet is adsorbed and transferred to the next process. It has been.

However, in the conventional sheet punching device, the ceramic green sheet 61 is rotated by rotating the entire punching table 62, or the ceramic green sheet 61 is moved by a rotational position correction mechanism 64 provided separately from the punching table 62. Since the rotation is performed, in order to adjust the position by rotating the ceramic green sheet, a large space is required, and there is a problem that it is difficult to perform a compact facility layout.
In addition, a large driving source is required, and there is a problem that driving energy increases.
Japanese Patent Application Laid-Open No. 2001-210569

  The present invention solves the above-described problems, and is a sheet punching device capable of correcting the position in the rotational direction of a sheet by rotating the sheet in a plane, and enables a compact equipment layout. To provide a sheet punching device that requires less driving energy and can reduce costs, and a multilayer ceramic electronic component manufacturing method that can efficiently manufacture multilayer ceramic electronic components using the sheet punching device Let it be an issue.

In order to solve the above problems, the sheet punching device of the present invention (Claim 1)
A table body provided with suction holes for vacuum-sucking and holding the sheet in a region outside the sheet punching region corresponding to a region where the sheet placed on the upper surface is punched;
Of the table body, so as to support the Oite sheet inside the sheet punching area, together are disposed in the central area of the table body, a suction hole for sucking and holding by vacuum suction a sheet A rotation direction correction table that rotates the sheet in a plane by rotating independently of the table main body while sucking and holding the sheet, and correcting the position of the sheet in the rotation direction;
And a punching head provided with means for punching out the sheet supported by the table main body and the rotation direction correction table, and means for holding the punched sheet.

  In the sheet punching device according to claim 2, a seal member for preventing vacuum leakage from a gap between the table body and the rotation direction correction table is disposed between the table body and the rotation direction correction table. It is characterized by being installed.

  The sheet punching device according to claim 3 is characterized in that the table main body and the rotation direction correction table include means for blowing gas from the suction holes.

  The sheet punching device according to claim 4 is characterized in that the table body and the rotation direction correction table blow gas from the suction hole, the flow rate of the gas, the timing of blowing the gas, and the gas from the suction hole. A control mechanism for controlling switching between a blowing state and a vacuum suction state from the suction hole is provided.

  The sheet punching apparatus according to claim 5 is characterized in that the sheet is a sheet in which a ceramic green sheet is held on a carrier film.

  Moreover, the manufacturing method of the multilayer ceramic electronic component of the present invention (Claim 6) comprises the step of punching out the ceramic green sheet held on the carrier film using the sheet punching device according to Claim 5. It is said.

Moreover, the manufacturing method of the multilayer ceramic electronic component of the present invention (claim 7) is as follows:
A method for producing a multilayer ceramic electronic component using the sheet punching device according to claim 5,
(a) The ceramic green sheet held on the carrier film is carried onto the table body and the rotation direction correction table with suction from at least one suction hole of the table body and the rotation direction correction table turned on. Sheet loading process;
(b) With the suction from the suction hole of the table body turned off and the suction from the suction hole of the rotation direction correction table turned on, the rotation direction correction table was operated to change the rotation direction of the ceramic green sheet. A rotational position correction process for correcting the position;
(c) State in which the punching head is lowered and supported by the table body and the rotation direction correction table with suction from at least one suction hole of the table body and the rotation direction correction table turned on. Punching process of punching ceramic green sheets,
(d) With the suction from the suction hole of the rotation direction correction table turned off, or the blow from the suction port turned on, and the suction from the suction hole of the table body turned on, the punching head is raised to A peeling step of peeling the extracted ceramic green sheet from the carrier film;
(e) After raising the punching head, turn off the suction from the suction hole of the rotation direction correction table and the table body, or turn on the blow from the suction port, and turn the rotation direction correction table and the table body. And removing the punching residue of the upper carrier film and the ceramic green sheet to prepare for the next loading of the ceramic green sheet held on the carrier film.

  The method for manufacturing a multilayer ceramic electronic component according to claim 8 is characterized in that in the step (d), blowing from the suction hole of the rotation direction correction table is turned on.

  According to a ninth aspect of the present invention, there is provided a method for manufacturing a multilayer ceramic electronic component, wherein in the step (e), blow from the suction hole of the rotation direction correction table and the table body is turned on.

The sheet punching device of the present invention (Claim 1) has a suction hole for sucking and holding the sheet by vacuum suction in a region outside the sheet punching region corresponding to the region where the sheet placed on the upper surface is punched out. a table body but arranged, of the table body, so as to support the Oite sheet inside the sheet punching area, together with being disposed in the central area of the table body to suck and hold the sheet by vacuum suction by a suction hole, independently of the table body in a state of suction-holding the sheet rotation for, by rotating the sheet in a plane, the rotation direction correction table for correcting the position of the rotation direction of the sheet, the table A punching head having a main body and a means for punching a sheet supported by the rotation direction correction table, so that the equipment is compact. Layouts together becomes possible, it becomes possible to achieve reduction and energy saving of equipment cost.

  That is, in the sheet punching device of the present invention, since the rotation direction correction table is arranged inside the table body, when driving the rotation direction correction table, a space larger than the table body is not required. Compared to the sheet punching apparatus, it is possible to reduce the size of the equipment, the compact equipment layout, the size of the drive source, and the like, thereby realizing energy saving and high speed operation of the equipment.

Further, as in the sheet punching device according to claim 2, by providing a seal member between the table body and the rotation direction correction table, a vacuum leak from the gap between the table body and the rotation direction correction table occurs. Therefore, the rotation direction correction table can be rotated without any problem, and the present invention can be further effectively realized.
Examples of the sealing member include silicone resin, synthetic rubber, and natural rubber. By applying grease to the seal member, it is possible to prevent vacuum leakage while keeping the sliding resistance small.

  Further, as in the sheet punching device according to the third aspect of the present invention, the structure is provided with means for blowing gas from the suction holes of the table body and the rotation direction correction table, so that the table body and the rotation direction correction table are sucked and held. The sheet can be released quickly and reliably, and the present invention can be further effectively realized.

  Further, as in the sheet punching device of claim 4, the table main body and the rotation direction correction table blow the gas from the suction hole, the blow pressure when blowing the gas from the suction hole, the flow rate of the gas, the timing of blowing the gas, With a configuration equipped with a control mechanism for controlling the switching between the vacuuming state and the vacuuming state from the suction hole, highly reliable rotational position correction can be performed with the sheet held securely. This makes it possible to carry out the sheet efficiently and reliably, and to make the present invention more effective.

Further, as in the sheet punching apparatus according to claim 5, when the ceramic green sheet is held on the carrier film, the ceramic green sheet on the carrier film is surely positioned in an accurately adjusted state. In addition, it is possible to efficiently peel and deliver the punched ceramic green sheet from the carrier film.
Therefore, it is possible to obtain a highly reliable ceramic green sheet used for manufacturing a multilayer ceramic electronic component.

  Further, according to the method for manufacturing a multilayer ceramic electronic component of the present invention (Claim 6), the sheet is punched out using the sheet punching device according to Claim 5 through a step of punching out the ceramic green sheet held on the carrier film. A ceramic electronic component is manufactured, and a multilayer ceramic electronic component is manufactured using a highly reliable ceramic green sheet punched out in a position-adjusted state. Electronic components can be manufactured efficiently.

  In addition, the manufacturing method of the multilayer ceramic electronic component of the present invention (Claim 7) uses the sheet punching device according to Claim 5, and (a) suctions from at least one suction hole of the table body and the rotation direction correction table. In a state of being turned on, the ceramic green sheet held on the carrier film is carried onto the table body and the rotation direction correction table, and (b) the suction from the suction hole of the table body is turned off, the suction hole of the rotation direction correction table The rotation direction correction table is operated in a state where the suction from is turned on to correct the position of the ceramic green sheet in the rotation direction, and (c) suction from at least one suction hole of the table body and the rotation direction correction table The punching head is lowered while the is turned on, and is supported by the table body and the rotation direction correction table. Punching the ceramic green sheet, (d) Turn off the suction from the suction hole of the rotation direction correction table, or turn on the blow from the suction port, and raise the punching head with the suction from the suction hole of the table body turned on After removing the punched ceramic green sheet from the carrier film, (e) turn off the suction from the suction hole of the rotation direction correction table and the table body, or turn on the blow from the suction port to correct the rotation direction. Since the punching residue of the carrier film and the ceramic green sheet on the table and the table body is removed, the ceramic green sheet held on the carrier film is prepared for the next carry-in of the ceramic green sheet. To ensure that it is correctly positioned. Kukoto with becomes available, it is possible to carry out the delivery of the ceramic green sheet that has been punched out efficiently. Therefore, it is possible to provide a highly reliable ceramic green sheet punched into a predetermined shape used for manufacturing a multilayer ceramic electronic component.

  The method for manufacturing a multilayer ceramic electronic component according to claim 8 is characterized in that in the step (d), the blow from the suction hole of the rotation direction correction table is turned on. It becomes possible to peel from a carrier film reliably.

  In the method of manufacturing the multilayer ceramic electronic component according to claim 8, since the blow from the suction hole of the rotation direction correction table and the table body is turned on in the step (e), the rotation direction correction table and the table body The punching residue of the carrier film and the ceramic green sheet can be reliably removed.

  The features of the present invention will be described in more detail below with reference to examples of the present invention.

  FIG. 1 is a perspective view schematically showing a main part configuration of a sheet punching device for punching a ceramic green sheet 1 (hereinafter also simply referred to as “sheet”) held on a carrier film 10, and FIG. FIG. 3 is a cross-sectional view showing a main part configuration.

  This sheet punching device is provided with a suction hole 4 for vacuum-suctioning and holding the sheet 1 in a region 3 outside the sheet punching region 2 corresponding to a region where the sheet 1 placed on the upper surface is punched out. The table body 5 is provided, and the table body 5 is provided inside the sheet punching region 2 and includes a suction hole 14 for sucking and holding the sheet 1 by vacuum suction. By rotating, the sheet 1 is rotated in a plane and the rotation direction correction table 15 for correcting the position of the sheet 1 in the rotation direction, and the sheet 1 supported by the table body 5 and the rotation direction correction table 15 are supported. Means (blade in this embodiment) 6 (see FIGS. 3, 4 and 5) and means for holding the punched sheet 1 (in this embodiment, vacuum suction is performed through the suction hole 7 to And a punching head 8 provided with suction means) for holding the sheet 1.

  A seal member (O-ring made of silicone resin) 9 is provided between the table body 5 and the rotation direction correction table 15 to prevent vacuum leakage from the gap between the table body and the rotation direction correction table. Has been. In this embodiment, the O-ring 9 is attached to the rotation direction correction table 15 side in such a manner that a gap of about 50 μm is formed between the O-ring 9 and the table body 5. Note that grease is applied to the O-ring 9 so that a vacuum does not leak from a gap between the O-ring 9 and the rotation direction correction table 15 can be smoothly rotated. Yes.

  Further, in the sheet punching device of this embodiment, the table body 5 and the rotation direction correction table 15 are provided so that the sheet 1 held by the table body 5 and the rotation direction correction table 15 can be reliably released. Means for blowing gas from the suction holes 4 and 14 are provided.

  Further, the table main body 5 and the rotation direction correction table 15 have a blow pressure when the gas is blown from the suction hole, a gas flow rate, a timing for blowing the gas, a state in which the gas is blown from the suction hole, and a vacuum from the suction hole. A control mechanism is provided for controlling switching between the suction state and the suction state.

Next, a method for punching a sheet using the above-described sheet punching apparatus will be described.
In the following, FIGS. 3, 4, 5 and 6 for explaining the operation of each step of the sheet punching apparatus of this embodiment, the suction holes 4, 14 of the table body 5 and the rotation direction correction table 15 in each step. An explanation will be given with reference to FIG. 7 showing the timing of suction, blow, and stop (neutral) of gas from
4-6, the part which attached | subjected the same code | symbol as FIG. 3 has shown the part which is the same or corresponds.

(1) First, as shown in FIGS. 3 and 7, suction from the suction hole 14 of the rotation direction correction table 15 is turned on while the punching head 8 is located at the top dead center, and the suction of the table body 5 is performed. With the suction from the hole 4 turned off, the ceramic green sheet 1 held on the carrier film 10 is carried onto the table body 5 and the rotation direction correction table 15.
Note that, in the sheet 1 loading step, the sheet 1 is loaded with the suction from the suction hole 14 of the rotation direction correction table 15 turned on and the suction from the suction hole 4 of the table body 5 turned off. This is to reduce the number of times of switching between the suction, neutral and blow of the table main body 5 and the rotation direction correction table 15, and depending on the case, the suction from the suction holes 4 and 14 of both the table main body 5 and the rotation direction correction table 15 is possible. It is possible to turn on the suction, and the sheet 1 is carried in with the suction from the suction hole 14 of the rotation direction correction table 15 turned off and the suction from the suction hole 4 of the table body 5 turned on. It is also possible.

  (2) Then, with the suction from the suction hole 4 of the table body 5 turned off and the suction from the suction hole 14 of the rotation direction correction table 15 turned on, the rotation direction (θ direction) (see FIG. 1 (see FIGS. 1, 2 and 3) is determined, and the rotation direction correction table 15 is driven (rotated) to correct the position of the sheet 1 in the rotation direction.

  (3) Then, after stopping the rotation of the rotation direction correction table 15, as shown in FIGS. 4 and 7, the suction from the suction holes 4 and 14 of the table body 5 and the rotation direction correction table 15 is turned on, In addition, with the suction of the punching head 8 turned on, the punching head 8 is lowered and the blade 6 is lowered to punch the sheet 1 supported by the table body 5 and the rotation direction correction table 15.

(4) Then, as shown in FIGS. 5 and 7, the blow from the suction hole 14 of the rotation direction correction table 15 is turned on, the suction from the suction hole 4 of the table body 5 is turned on, and the punching head 8 The punching head 8 is raised with the suction turned on. At this time, since the blow from the suction hole 14 of the rotation direction correction table 15 is on, the center portion of the carrier film 10 is lifted, curved, and punched out. As shown in FIG. 6, the carrier film 10 is reliably peeled off.
In addition, it becomes possible to lift the carrier film 10 by peeling while performing the blow from the suction hole 14 of the rotation direction correction table 15, and to forcibly create a line peeling state, which causes damage to the sheet 1. It becomes possible to reduce.
Further, in the process of peeling the punched ceramic green sheet 1, the movement of the carrier film 10 is controlled by controlling the blow pressure, flow rate, timing, switching to suction, etc. from the suction hole 14 of the rotation direction correction table 15. It becomes possible to control more highly and to correct the distortion of the sheet 1 more effectively.
The sheet 1 punched and peeled off from the carrier film 10 as described above is adsorbed by the punching head 8 and carried to a predetermined process.

(5) Thereafter, the punching head 8 is raised with the suction turned on, and then the blow from the suction holes 14 and 4 of the rotation direction correction table 15 and the table body 5 is turned on, and the rotation direction correction table 15 and The carrier film 10 on the table main body 5 and the punching residue of the ceramic green sheet 1 are removed to prepare for the next sheet carry-in.
In addition, the ceramic green sheet (sheet) 1 punched out without displacement as described above and peeled off from the carrier film is subjected to steps such as lamination, pressure bonding, cutting, firing, and formation of external electrodes by a known method. Thus, for example, a multilayer ceramic electronic component such as a multilayer ceramic capacitor having a structure as shown in FIG. 8 can be efficiently manufactured.

  In the sheet punching apparatus of the above embodiment, the rotation direction correction table 15 is disposed inside the table body 5, so that a larger space than the table body 5 is required when the rotation direction correction table 15 is driven. As compared with the conventional sheet punching device provided with the rotation direction correcting means outside, a compact equipment layout is possible.

  Furthermore, since the equipment can be made compact and light, the drive source can be downsized to save energy. In addition, since the facility can be reduced in size and weight, high-speed operation can be performed and productivity can be improved.

  Further, since the O-ring 9 is disposed between the table body 5 and the rotation direction correction table 15, the rotation direction correction table 15 can be smoothly rotated while preventing vacuum leakage. Thus, position correction in the rotational direction can be performed with high accuracy and efficiency. That is, when the sheet 1 is peeled after the sheet 1 is punched, the peeling is performed with only the outer side of the sheet 1 sucked and held from the back side. However, when the O-ring 9 is not provided, the vacuum leakage from the gap Therefore, the ability to suck and hold the carrier film 10 is reduced, and the carrier film 10 may be attracted to the suction head 8, but by sealing with the O-ring 9, the carrier film 10 and the table body 5 and the rotation direction correction table 15 become a sealed space, so that high adsorption performance can be secured, and the sheet 1 can be reliably peeled off.

  In addition, while providing a slight gap between the O-ring 9 and the table body 5, grease is applied to the O-ring 9 to ensure airtightness and smooth slidability. With a simple structure, it is possible to perform sealing and smooth rotation, and it is possible to perform highly reliable correction.

  In the above embodiment, the case where the ceramic green sheet 1 held on the carrier film 10 is punched has been described as an example. However, the present invention can also be applied particularly when punching a sheet not held on the carrier film. It is.

  The invention of the present application is not limited to the above-described embodiments. The type of sheet to be punched, the specific shape and configuration of the table body and the rotation direction correction table, the position and number of suction holes, the punching head Various applications and modifications are made within the scope of the invention with respect to the specific configuration, the specific shape of the seal member that prevents vacuum leakage from the gap between the table body and the rotation direction correction table, and the types of constituent materials. It is possible.

  Furthermore, a specific configuration for performing suction and blow from the suction holes of the table body and the rotation direction correction table, blow pressure when blowing gas from the suction holes, gas flow rate, timing of blowing gas, and suction Regarding the configuration of the control mechanism for controlling the switching between the state in which gas is blown from the hole and the state in which vacuum is sucked from the suction hole, various applications and modifications can be added within the scope of the invention. It is.

As described above, the sheet punching device of the present invention has the rotation direction correction table disposed inside the table body, and therefore does not require a larger space than the table body when driving the rotation direction correction table. Compared with the conventional sheet punching device, it is possible to reduce the size of the equipment, the compact equipment layout, the size of the drive source, and the like, thereby realizing energy saving and high speed operation of the equipment.
Therefore, the present invention can be widely applied to a process of manufacturing a multilayer ceramic electronic component manufactured through a process of punching out a ceramic green sheet held on a carrier film.

It is a perspective view which shows typically the principal part structure of a sheet punching apparatus. It is a top view which shows the principal part structure of the sheet punching apparatus of FIG. It is sectional drawing which shows the principal part structure of the sheet punching apparatus of FIG. It is a figure explaining the operation | movement in each process of the sheet punching apparatus of the Example in this invention. It is a figure explaining the operation | movement in each process of the sheet punching apparatus of the Example in this invention. It is a figure explaining the operation | movement in each process of the sheet punching apparatus of the Example in this invention. It is a figure which shows the timing of the suction | attraction | suction of the gas from a suction hole, blow, and a stop (neutral) in each process of the sheet | seat punching apparatus of the Example in this invention, and operation | movement of a punching head. It is sectional drawing which shows the structure of a multilayer ceramic capacitor. It is a figure which shows the conventional sheet punching apparatus typically. It is a figure which shows typically the other conventional sheet punching apparatus.

Explanation of symbols

1 Ceramic green sheet (sheet)
2 Sheet punching area 3 Area outside sheet punching area 4 Suction hole 5 Table body 6 Means for punching sheet (blade)
7 Suction hole 8 Punching head 9 Seal member (O-ring made of silicone resin)
10 Carrier film 14 Suction hole 15 Rotation direction correction table

Claims (9)

A table body provided with suction holes for vacuum-sucking and holding the sheet in a region outside the sheet punching region corresponding to a region where the sheet placed on the upper surface is punched;
Of the table body, so as to support the Oite sheet inside the sheet punching area, together are disposed in the central area of the table body, a suction hole for sucking and holding by vacuum suction a sheet A rotation direction correction table that rotates the sheet in a plane by rotating independently of the table main body while sucking and holding the sheet, and correcting the position of the sheet in the rotation direction;
A sheet punching apparatus comprising: a punching head provided with means for punching a sheet supported by the table body and the rotation direction correction table; and a means for holding the punched sheet.   The sealing member for preventing the vacuum leak from the clearance gap between the said table main body and the said rotation direction correction table is arrange | positioned between the said table main body and the said rotation direction correction table. The sheet punching device according to 1.   3. The sheet punching device according to claim 1, wherein the table main body and the rotation direction correction table include means for blowing gas from the suction hole.   The table main body and the rotation direction correction table are blown pressure from the suction hole, the flow rate of the gas, the timing of blowing the gas, the state of blowing the gas from the suction hole and the vacuum suction from the suction hole The sheet punching device according to claim 3, further comprising a control mechanism for controlling switching of the state of being performed.   The sheet punching apparatus according to any one of claims 1 to 4, wherein the sheet is obtained by holding a ceramic green sheet on a carrier film.   A method for producing a multilayer ceramic electronic component, comprising the step of punching out a ceramic green sheet held on a carrier film using the sheet punching device according to claim 5. A method for producing a multilayer ceramic electronic component using the sheet punching device according to claim 5,
(a) The ceramic green sheet held on the carrier film is carried onto the table body and the rotation direction correction table with suction from at least one suction hole of the table body and the rotation direction correction table turned on. Sheet loading process;
(b) With the suction from the suction hole of the table body turned off and the suction from the suction hole of the rotation direction correction table turned on, the rotation direction correction table was operated to change the rotation direction of the ceramic green sheet. A rotational position correction process for correcting the position;
(c) State in which the punching head is lowered and supported by the table body and the rotation direction correction table with suction from at least one suction hole of the table body and the rotation direction correction table turned on. Punching process of punching ceramic green sheets,
(d) While the suction from the suction hole of the rotation direction correction table is turned off or the blow from the suction port is turned on and the suction from the suction hole of the table body is turned on, the punching head is raised to A peeling step of peeling the extracted ceramic green sheet from the carrier film;
(e) After raising the punching head, the rotation direction correction table and the table body are turned off by turning off the suction from the suction holes of the rotation direction correction table and the table body or by turning on the blow from the suction port. A removal preparation of the carrier film and the ceramic green sheet on the upper side, and a preparation step for carrying in the next loading of the ceramic green sheet held on the carrier film. Production method.   8. The method of manufacturing a multilayer ceramic electronic component according to claim 7, wherein in the step (d), blowing from the suction hole of the rotation direction correction table is turned on.   9. The method of manufacturing a multilayer ceramic electronic component according to claim 7, wherein in the step (e), blow from the suction hole of the rotation direction correction table and the table body is turned on.

Images