JP4551670B2 - Mold manufacturing method - Google Patents

Description

  The present invention relates to a method for manufacturing a mold for molding a workpiece.

Conventionally, as this type of mold, a structure formed of glassy carbon is known (see, for example, Patent Document 1).
JP 2003-165729 A (page 3-6)

  However, since this mold is formed of glassy carbon, the impact resistance during press molding is not excellent.

Further, the mold surface of this type of mold is formed by polishing. However, there is a limit to the accuracy of the polishing process, and polishing to a fine shape is not possible. Therefore, relatively large molded products such as camera lenses are targeted. For this reason, for example, there is a problem that it is not easy to form a fine mold surface corresponding to a microlens used for a liquid crystal panel by polishing.

  This invention is made | formed in view of such a point, and it aims at providing the manufacturing method of the shaping | molding die which can make a fine process easy.

The method for manufacturing a mold according to claim 1 is a method for manufacturing a mold for molding a molding object, and the surface of the mold material having at least glassy carbon and carbon nanofibers is processed deepest in the mold material. The mold is manufactured by irradiating a focused ion beam from a portion to the surface side of the mold material stepwise at a predetermined depth while expanding a processing region .

Then, the surface of the mold material having at least glassy carbon and carbon nanofibers is processed in steps from the deepest portion of the mold material to the surface side of the mold material in steps at predetermined depths. By processing by irradiating while expanding the area and manufacturing the mold, the surface of the mold manufactured from this mold material can be smoothed even if the mold material has a different depth Therefore, fine processing of this mold becomes easy.

  According to a second aspect of the present invention, there is provided a mold manufacturing method according to the first aspect, wherein the focused ion beam is irradiated substantially perpendicularly to the surface of the mold material.

Then, when processing at least the surface of the mold material, the surface of the mold manufactured from the mold material is manufactured by irradiating the focused ion beam substantially perpendicularly to the surface of the mold material to manufacture the mold. Can be molded more smoothly, so that fine processing of the mold becomes easier .

The method for manufacturing a mold according to claim 3 is the method for manufacturing a mold according to claim 1 or 2, wherein the distance from the irradiation position of the focused ion beam to the surface of the mold material irradiated with the focused ion beam is different. The irradiation intensity of the focused ion beam is changed corresponding to the above.

  Then, when processing at least the surface of the mold material, the irradiation intensity of the focused ion beam is set corresponding to the difference in distance from the irradiation position of the focused ion beam to the surface of the mold material irradiated with the focused ion beam. By changing, even if the distance from the irradiation position of the focused ion beam to the surface of the mold material irradiated with the focused ion beam is different, the surface of the mold material can be processed uniformly. Since the surface of a mold manufactured from this mold material can be molded smoothly, fine processing of the mold becomes easier.

According to a fourth aspect of the present invention, there is provided a method of manufacturing a mold according to the third aspect of the present invention, wherein the irradiation intensity of the focused ion beam is changed based on processing data of the mold material prepared in advance.

  Then, by changing the irradiation intensity of the focused ion beam based on the processing data of the mold material prepared in advance, the distance from the irradiation position of the focused ion beam to the surface of the mold material irradiated with the focused ion beam It is possible to prevent the difference in the processing level of the mold material due to the difference between the two. Therefore, since the surface of the mold manufactured from the mold material can be more easily and smoothly molded, fine processing of the mold becomes easier.

The method for manufacturing a mold according to claim 5 is the method for manufacturing a mold according to claim 3 , wherein the focused ions when the mold material is processed based on a result of processing the mold material with a focused ion beam. It changes the irradiation intensity of the beam.

  Then, based on the result of processing the mold material with the focused ion beam, by changing the irradiation intensity of the focused ion beam when processing the mold material, the focused ion beam is changed from the irradiation position of the focused ion beam. It is possible to prevent a difference in the processing level of the mold material due to a difference in the distance to the surface of the mold material irradiated. Therefore, since the surface of the mold manufactured from the mold material can be more easily and smoothly molded, fine processing of the mold becomes easier.

According to a sixth aspect of the present invention, there is provided a method for producing a mold according to the third aspect, wherein the irradiation intensity of the focused ion beam is changed while the irradiation intensity of the focused ion beam is measured.

  Then, by measuring the irradiation intensity of the focused ion beam and changing the irradiation intensity of the focused ion beam, the distance from the irradiation position of the focused ion beam to the surface of the mold material irradiated with the focused ion beam It is possible to prevent the difference in the processing level of the mold material due to the difference between the two. Therefore, since the surface of the mold manufactured from the mold material can be more easily and smoothly molded, fine processing of the mold becomes easier.

The method for producing a mold according to claim 7 is the method for producing a mold according to any one of claims 1 to 6, wherein the carbon nanofibers are vapor-grown carbon fibers.

  And the surface of this type | mold material becomes harder by setting it as the surface of the type | mold material which has at least glassy carbon and a vapor growth carbon fiber.

The method for producing a mold according to claim 8 is the method for producing a mold according to any one of claims 1 to 6, wherein the carbon nanofiber is a cup-stacked carbon fiber.

  And the surface of this type | mold material becomes harder by setting it as the surface of the type | mold material which has at least glassy carbon and a cup stack type | mold carbon fiber.

According to the method for manufacturing a mold according to claim 1, the surface of the mold material having at least glassy carbon and carbon nanofibers is transferred from the deepest portion of the mold material to the surface side of the mold material. The surface of the mold can be molded smoothly by processing by irradiating the focused ion beam stepwise for each depth while expanding the processing area, so that the surface of the mold can be molded smoothly. Can be easily done.

According to the method for manufacturing a mold according to claim 2, in addition to the effect of the method for manufacturing the mold according to claim 1, when processing the mold material, the focused ions are substantially perpendicular to the surface of the mold material. By irradiating the beam, the surface of the mold manufactured from the mold material can be more smoothly molded, so that fine processing of the mold can be facilitated .

According to the method of manufacturing the mold according to claim 3, in addition to the effect of the method of manufacturing the mold according to claim 1 or 2 wherein, when processing the mold material, the focused ion beam from the irradiation position of the focused ion beam The surface of the mold material can be uniformly processed by changing the irradiation intensity of the focused ion beam in accordance with the difference in the distance to the surface of the mold material irradiated with the The surface of the mold can be formed smoothly, and fine processing of the mold can be facilitated.

According to the method for manufacturing a mold according to claim 4 , in addition to the effect of the method for manufacturing a mold according to claim 3 , the irradiation intensity of the focused ion beam is changed based on the processing data of the mold material prepared in advance. Therefore, the difference in the processing level of the mold material due to the difference in the distance from the irradiation position of the focused ion beam to the surface of the mold material irradiated with the focused ion beam can be prevented. The surface of the mold to be manufactured can be more easily and smoothly molded, and fine processing of the mold can be facilitated.

According to the method for manufacturing a mold according to claim 5 , in addition to the effect of the method for manufacturing a mold according to claim 3 , the mold material is processed based on the result of processing the mold material with a focused ion beam. By changing the irradiation intensity of the focused ion beam, the distance from the irradiation position of the focused ion beam to the surface of the mold material irradiated with the focused ion beam is different. Therefore, the surface of the mold manufactured from this mold material can be more easily and smoothly molded, and the fine processing of the mold can be facilitated.

According to the method for manufacturing a mold according to claim 6 , in addition to the effect of the method for manufacturing the mold according to claim 3 , the irradiation intensity of the focused ion beam is changed while measuring the irradiation intensity of the focused ion beam. Therefore, the difference in the processing level of the mold material due to the difference in the distance from the irradiation position of the focused ion beam to the surface of the mold material irradiated with the focused ion beam can be prevented. The surface of the mold to be manufactured can be more easily and smoothly molded, and fine processing of the mold can be facilitated.

According to the method of manufacturing the mold according to claim 7, in addition to the effects of claims 1 to 6 a method of manufacturing the mold according to any one, the surface of the mold material having at least glassy carbon and the vapor-grown carbon fibers By doing so, the surface of this mold material can be made harder.

According to the method for producing a mold according to claim 8 , in addition to the effect of the method for producing a mold according to any one of claims 1 to 6 , the surface of the mold material having at least glassy carbon and cup-stacked carbon fibers, By doing so, the surface of this mold material can be made harder.

  Hereinafter, an embodiment of a mold according to the present invention will be described with reference to FIGS.

  1 to 7, reference numeral 1 denotes a press die 1 for manufacturing an optical device as a molding die. The press die 1 melts a material containing glass, specifically, a glass material, and forms a molding object. This is a molding die for manufacturing an optical device such as a microlens or a microchannel by high-temperature press molding. At this time, the press die 1 manufactures a microlens having a side of about 7 μm.

  In this press die 1, an optical device can also be manufactured by high-temperature press molding with a softened glass material. Furthermore, this press die 1 is a composite material containing glassy carbon (GC) and at least vapor grown carbon fibers (VGCF) which are carbon nanofibers (CNF). It is molded by a mold material 2 as a mold material. That is, this press die 1 contains vapor grown carbon fiber as a composite material.

  Here, the glassy carbon is one of carbons that are amorphous in crystallography, that is, show an amorphous structure. That is, this glassy carbon is a high-strength carbonaceous material having an amorphous, homogeneous and dense structure obtained by firing carbonization of a thermosetting resin. On the other hand, the vapor grown carbon fiber is a highly crystalline carbon nanofiber synthesized by growing by a vapor phase method. That is, this vapor grown carbon fiber is obtained by thermally decomposing hydrocarbon gas using fine particles of metal such as iron (Fe), cobalt (Co), nickel (Ni) as a catalyst. It is obtained by pyrolyzing benzene vapor or methane gas at a temperature of around 1100 ° C using iron fine particles as a catalyst. The net surface is oriented parallel to the fiber axis and has an annual ring shape. Extremely high tensile strength and tensile strength. Has elastic modulus.

  Therefore, the press die 1 manufactured from the mold material 2 which is a composite material of these glassy carbon and vapor grown carbon fiber is excellent in material properties such as strength and hardness, and has a fine and smooth surface peculiar to glassy carbon. It has unique properties. In other words, the press die 1 has high strength and high hardness material properties to suppress the occurrence of chipping and cracking due to the impact of the press, and it is difficult for the surface of the die to be damaged. It has low wettability with molten glass, almost no reactivity, and exhibits excellent performance in releasability from cooled and solidified glass.

  Next, the manufacturing method of the shaping | molding die of one said embodiment is demonstrated.

  First, as shown in FIGS. 1 and 2, based on CAD (Computer Aided Design) data 11 prepared in advance, BMP (bit map) data 12 obtained by slicing the CAD data 11 horizontally into 40 divisions at equal intervals. Create At this time, the CAD data 11 is provided with a plurality of, for example, twelve recesses 3 having a rectangular shape in a top view and a cross-sectional concave arc shape. These recesses 3 are formed in a matrix along the vertical direction and the horizontal direction, respectively, and are provided in a shape corresponding to the microlens.

  Next, a focused ion beam (FIB) B is applied to the surface of the mold material 2 based on the 40-divided BMP data 12 on the front end side. Here, the focused ion beam B is irradiated at an irradiation angle close to a right angle to the surface of the mold material 2, for example, within a range of ± 5 ° from a position perpendicular to the surface of the mold material 2. At this time, as shown in FIGS. 3 and 4, the concave portion 3 formed on the surface of the mold member 2 has a substantially dot-like shape that is the apex portion of the microlens, that is, the deepest portion of the mold member 2 that must be processed. The mold material 2 is processed by irradiating the focused ion beam B in a substantially point shape substantially perpendicular to the region 4 (step 1).

  In other words, the focused ion beam B is uniformly irradiated to the deepest region 4 to be processed of the mold material 2, and the deepest region 4 to be processed is sputter processed to a predetermined depth. At this time, the irradiation position of the focused ion beam B is fixed, and the irradiation intensity, that is, the power of the focused ion beam B is also fixed.

  Thereafter, as shown in FIGS. 5 to 12, based on the second to 40th BMP data 12 on the front end side among the 40 divided BMP data 12, the portion processed in Step 1 is the center, While the region 4 to be processed by the irradiation of the focused ion beam B is gradually expanded into a circular shape, the focused ion beam B is applied to the surface of the mold material 2 to irradiate the mold material 2 substantially vertically. Processing (step 2 to step 40).

  That is, the focused ion beam B is irradiated stepwise from the smaller area 4 to the larger area 4 of the mold 2 to be processed. At this time, when processing with the focused ion beam B in each step, the focused ion beam B is also irradiated to the region 4 processed in all the steps before each step. The region 4 irradiated with B is gradually deeply sputtered.

  In other words, the region 4 to be processed of the mold member 2 is divided into a predetermined amount of depth, for example, every 0.2 μm, and a plurality of focused ion beams B are sequentially stepped from the deepest region 4 to be processed. Irradiate and scan multiple times. At this time, the surface of the mold 2 is sputtered to a predetermined depth by one irradiation of the focused ion beam B. Therefore, when the depth of the deepest processed region 4 of the mold 2 is 5 μm, the deepest processed region 4 is irradiated with the focused ion beam B a total of 25 times and scanned.

  At this time, when the focused ion beam B is irradiated a plurality of times, the focused ion beam B is again irradiated and sputtered on the peripheral portion 5 of the region 4 previously processed with the focused ion beam B. The corners of the peripheral edge 5 of the previously processed region 4 are rounded and become gentle. Therefore, by irradiating and scanning the focused ion beam B a plurality of times stepwise from a portion where the mold material 2 is deeply processed, the peripheral edge of the processing surface of the mold material 2 formed for each scan of the focused ion beam B The part 5 becomes smooth, and the final processed surface of the mold 2 becomes smoother.

  Further, as shown in FIGS. 9 and 10, as a result of expanding the region 4 to be irradiated with the focused ion beam B into a circular shape, from the region 4 adjacent to the region 4 to a portion through a predetermined distance gap. When the processing is performed, the processing is performed so that the peripheral portion 5 of the processing region is linear with respect to the adjacent region 4. At this time, the peripheral edge portion 5 processed into a linear shape in the region 4 is processed into an arc shape corresponding to a state in which the region 4 irradiated with the focused ion beam B is gradually expanded into a circular shape.

  Thereafter, when the region 4 to be irradiated with the focused ion beam B is further expanded, as shown in FIGS. 11 and 12, the region 4 adjacent to this region 4 is focused in a rectangular shape parallel to each region 4. The ion beam B is irradiated and scanned. As a result, by performing focused ion beam processing up to step 40, the press die 1 in which the concave portions 3 which are the mold surface shapes for the microlens corresponding to the CAD data 11 are formed in a matrix is manufactured and manufactured.

  As described above, according to the above-described embodiment, the press die 1 is manufactured from the mold material 2 that is a composite material of glassy carbon and vapor grown carbon fiber, whereby the press die 1 has high strength and high hardness. However, when this press die 1 is processed by polishing or laser, there is a limit to the accuracy of the processed surface of this press die 1 and polishing to a fine shape is impossible. Therefore, a relatively large object such as a camera lens is an object. For this reason, for example, it is not easy to mold a press surface which is a fine mold surface corresponding to a microlens or the like used for a liquid crystal panel.

  Therefore, when manufacturing a press mold 1 of a relatively small object such as a microlens, the surface of the mold material 2 is irradiated with a focused ion beam B that can be finely sputtered to process the mold material 2. . As a result, the press surface which is the processing surface of the surface of the press die 1 can be smoothly processed and formed, and the smoothness of the press surface can be improved. Therefore, since the fine processing of the press die 1 having excellent impact resistance during press molding can be easily performed, the press die 1 is suitable for the mold material 2 of a micron-sized optical device such as a microlens. Therefore, since the press mold 1 with high accuracy can be manufactured, an optical device such as a microlens with high accuracy can be obtained.

  At this time, the surface of the mold material 2 is substantially perpendicular to the surface of the mold material 2, more specifically perpendicular to the surface of the mold material 2 than when the focused ion beam B is irradiated at a certain irradiation angle to the surface of the mold material 2. By irradiating the focused ion beam B within a range of ± 5 ° from the position, the surface of the mold material 2 can be processed and molded more smoothly, and the smoothness of the press surface formed on the surface of the mold material 2 can be further improved. Fine processing of the press die 1 manufactured from the mold material 2 can be facilitated.

  Further, the focused ion beam B is irradiated in a stepwise manner from the apex portion of the microlens in the concave portion 3 formed on the surface of the mold material 2, that is, from the region 4 where the mold material 2 must be processed deepest. A recess 3 serving as a press surface is formed on the surface. As a result, the peripheral portion of the processing surface at each stage is obtained by irradiating and scanning the focused ion beam B in a stepwise manner from a small area to a large area of the region 4 to be processed of the mold material 2. Since the 5 corners are sputtered and rounded gently, the processed surface of the mold 2 can be made smoother.

  Therefore, even if it is the concave arc-shaped recessed part 3 from which the depth which processes this mold material 2 changes with places, since the inner peripheral surface of each recessed part 3 of the press die 1 manufactured from this mold material 2 can be shape | molded smoothly, this Fine processing of the press die 1 can be facilitated. On the other hand, when the focused ion beam B is irradiated stepwise from a large area to a small area of the region 4 to be processed of the mold material 2 to process the surface of the mold material 2, Since the peripheral portion of the processed surface remains stepped, the surface of the mold material 2 cannot be processed smoothly.

  In the above embodiment, the surface of the mold member 2 is processed with the focused ion beam B in which the irradiation position and the irradiation intensity are fixed. When the mold member 2 is processed, the irradiation position of the focused ion beam B is processed. The irradiation intensity of the focused ion beam B can be changed in accordance with the difference in distance from the surface of the mold material 2 irradiated with the focused ion beam B.

  Specifically, the irradiation intensity of the focused ion beam B is changed each time while checking the CAD data 11 based on the CAD data 11 which is the processing data of the mold 2 prepared in advance, or the focused ion beam B Table data is created as after-data, which is the result of processing an arbitrary mold material 2 at, and based on this table data, the irradiation intensity of the focused ion beam B when processing a new mold material 2 is changed or focused. While monitoring and measuring the irradiation intensity of the ion beam B, the irradiation intensity of the focused ion beam B is appropriately changed.

  As a result, even when the distance from the irradiation position of the focused ion beam B to the surface of the mold material 2 irradiated with the focused ion beam B is different, the inner periphery of the recess 3 that is the processing surface of the mold material 2 The surface can be processed uniformly and flush. Therefore, since the press surface which is the surface of the press die 1 manufactured from this mold material 2 can be formed smoothly and the smoothness of the press surface can be improved, fine processing of the press die 1 can be facilitated.

Furthermore, the molded product other than the optical devices such as microlenses, for example, a micro motor scan, microchannel, swallowed the capsule endoscope to manipulate the electromagnetic waves from the outside in a state placed in the interior of the human body such as lenses However, it can be used in correspondence.

  Here, the manufacturing method of the press die 1 described above is suitable for processing a so-called micron (μm) size lens mold, but for processing a so-called millimeter (mm) size relatively large lens mold 2. Not suitable. In this case, however, the surface of the mold 2 is processed to some extent by laser or cutting, and then the processed surface of the mold 2 is irradiated with the focused ion beam B to process the processed surface of the mold 2. Thus, even a large lens mold 2 can be used correspondingly.

  Furthermore, the press die 1 formed entirely with a composite material of glassy carbon and vapor grown carbon fiber has been described, but at least the surface with which the glass material comes into contact with the press die 1, that is, the inner If only the surface is formed of the composite material, the same effects as those of the above-described embodiment can be obtained. For example, a composite material of glassy carbon and vapor-grown carbon fiber is laminated on a substrate composed of a ceramic material such as silicon carbide or alumina oxide or tungsten carbide, and a press surface is formed on the laminated portion. It may be formed. Note that even a melted glass material or a softened glass material can be used by making the press die 1 correspond.

  Next, the characteristic change by the difference in the mixing ratio of the composite material of the molding die of the above-described embodiment will be described.

  First, by changing the mixing ratio as the CNF content which is the filler content of the vapor-grown carbon fiber with respect to GC20 which is glassy carbon fired at 2000 ° C., this vapor-grown carbon fiber is 0.5 vol% ( vol%) VGCF 0.5%, VGCF 1.0%, VGCF 1.5%, VGCF 12%, VGCF 15 which are composite material 2 mixed by 1% by volume, 1.5% by volume, 12% by volume and 15% by volume % Of each manufactured.

  In addition, the cup stack type carbon fiber (CSCF), which is a carbon nanofiber as a cup laminated type of CNF with respect to the GC 20, is changed in mixing ratio so that the cup stack type carbon fiber is 1% by volume, 2%. Each of CSCF 1%, CSCF 2%, CSCF 3%, and CSCF 12%, which are composite mold materials 2 mixed by volume%, 3 volume%, and 12 volume%, is manufactured. Furthermore, as a comparative example, a mold member 2 made only of GC20 is also manufactured.

In this state, the surfaces of these mold materials 2 were irradiated with a focused ion beam B, and the surfaces of these mold materials 2 were sputtered. At this time, as an FIB apparatus for irradiation of the focused ion beam B, SMI2050 (manufactured by Seiko Instruments Inc.) was used. At this time, the ion source of the FIB apparatus is liquid gallium, the beam diameter of the focused ion beam B irradiated by the FIB apparatus is 110 nm, the acceleration voltage of the focused ion beam B is 30 kV, and the sample current is The processing shape was set to 1318 pA, the processing time was set to 15 minutes, and the processing shape was set to 10 × 10 × depth (μm ³ ).

  As a result, as shown in FIG. 13, when the surface of the processed surface of the mold material 2 was photographed with the tilt angle inclined by 30 ° with respect to the surface of the mold material 2, the smaller the mixing ratio of VGCF and CSCF, Since the smoothness of the processed surfaces of these mold materials 2 has been improved, the processed surfaces of these mold materials 2 can be made smooth.

  At this time, as shown in FIG. 14, the roughness (Ra) of the measurement range of 3 μm × 3 μm in the processed surface (10 μm × 10 μm) which is the surface of each mold member 2 is used as a measuring device as a scanning probe microscope (SPM- 9500 series (manufactured by Shimadzu Corporation) was used to calculate the average value, and the smaller the mixing ratio of VGCF and CSCF, the smaller the Ra value of the processed surface of these mold materials 2; The surface can be smoothed.

Further, when the Vickers hardness of each mold member 2 was measured by an indenter press-fitting method with a maximum load of 0.25 N and a load speed of 4.8 × 10 ⁻³ N / sec, as shown in FIGS. 15 and 16, When the mixing ratio of the vapor-grown carbon fiber was about 1.5% and the mixing ratio of the cup stack type carbon fiber was about 2%, the Vickers hardness was the highest.

Further, when the Young's modulus of each mold member 2 was measured by a repeated indentation method in which the maximum load was 0.25 N, the number of repetitions was 3, and the load speed was 4.8 × 10 ⁻³ N / sec, As shown in FIG. 17, the Young's modulus (GPa) becomes the largest when the mixing ratio of the vapor growth carbon fiber is about 1.5% and the mixing ratio of the cup stack type carbon fiber is about 2%. It was.

  Similarly, when the thermal conductivity of each mold member 2 was measured by a laser flash method, as shown in FIGS. 15 and 18, the mixing ratio of the vapor growth carbon fibers was about 15%, and the cup stack type carbon fibers The thermal conductivity (W / m · K) was the highest when the mixing ratio was about 12%. That is, it is considered that the higher the mixing ratio of the vapor grown carbon fiber or the cup stack type carbon fiber in each mold material 2, the higher the thermal conductivity. In particular, when 15% by volume of vapor-grown carbon fiber was mixed with each mold material 2, the thermal conductivity was improved to be comparable to titanium (about 20 W / m · K).

  Further, when the processing depth of the surface of the mold material 2 by the irradiation of the focused ion beam B was examined, as shown in FIGS. 19 and 20, the mixing ratio of the vapor growth carbon fiber was about 1.5%, and the cup stack When the mixing ratio of the mold carbon fibers was about 2%, the processing depth of the mold material 2 surface by irradiation with the focused ion beam B became the deepest.

It is explanatory drawing which shows CAD data used for the manufacturing method of the shaping | molding die of one embodiment of this invention. It is explanatory drawing which shows CAD data same as the above. It is explanatory drawing which shows the BMP data in step 1 used for the manufacturing method of a mold same as the above. It is explanatory sectional drawing which shows the state which irradiates a focused ion beam to a type | mold material based on BMP data in step 1 same as the above. It is explanatory drawing which shows the BMP data in step 10 used for the manufacturing method of a mold same as the above. It is explanatory sectional drawing which shows the state which irradiates a focused ion beam to a type | mold material based on BMP data in step 10 same as the above. It is explanatory drawing which shows the BMP data in step 20 used for the manufacturing method of a mold same as the above. It is explanatory sectional drawing which shows the state which irradiates a focused ion beam to a type | mold material based on BMP data in step 20 same as the above. It is explanatory drawing which shows the BMP data in step 30 used for the manufacturing method of a mold same as the above. It is explanatory sectional drawing which shows the state which irradiates a focused ion beam to a type | mold material based on BMP data in step 30 same as the above. It is explanatory drawing which shows the BMP data in step 40 used for the manufacturing method of a mold same as the above. It is explanatory sectional drawing which shows the state which irradiated the type | mold material with the focused ion beam based on the BMP data in step 40 same as the above. It is a photograph which shows the surface of the shaping | molding die at the time of changing the mixing ratio of a vapor growth carbon fiber or a cup stack type carbon fiber in the Example of this invention. It is a table | surface which shows the roughness of the surface of a shaping | molding die at the time of changing the mixing ratio of a vapor growth carbon fiber or a cup stack type carbon fiber in the Example of this invention. It is a table | surface which shows the measurement result of a mold same as the above. It is a graph which shows the Vickers hardness of a shaping | molding die same as the above. It is a graph which shows the Young's modulus of a shaping | molding die same as the above. It is a graph which shows the heat conductivity of a shaping | molding die same as the above. It is a table | surface which shows the processing depth of a shaping | molding die same as the above. It is a graph which shows the processing depth of a shaping | molding die same as the above.

DESCRIPTION OF SYMBOLS 1 Press mold as a mold 2 Mold material as a mold material B Focused ion beam

Claims (8)

A method of manufacturing a mold for molding a workpiece,
The surface of the mold material having at least glassy carbon and carbon nanofibers is processed with a focused ion beam step by step from the deepest part of the mold material to the surface side of the mold material at a predetermined depth. A method for producing a mold, characterized in that the mold is produced by processing by irradiation while spreading . The method of manufacturing a mold according to claim 1, wherein the focused ion beam is irradiated substantially perpendicularly to the surface of the mold material . 3. The irradiation intensity of the focused ion beam is changed in accordance with the difference in distance from the irradiation position of the focused ion beam to the surface of the mold material irradiated with the focused ion beam. Manufacturing method of the mold. The method of manufacturing a mold according to claim 3, wherein the irradiation intensity of the focused ion beam is changed based on processing data of the mold material prepared in advance. The method for manufacturing a mold according to claim 3 , wherein the irradiation intensity of the focused ion beam when processing the mold material is changed based on the result of processing the mold material with the focused ion beam. The method of manufacturing a mold according to claim 3, wherein the irradiation intensity of the focused ion beam is changed while measuring the irradiation intensity of the focused ion beam. The method for producing a mold according to any one of claims 1 to 6 , wherein the carbon nanofiber is a vapor-grown carbon fiber. The method for producing a molding die according to any one of claims 1 to 6 , wherein the carbon nanofiber is a cup-stacked carbon fiber.