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JP4481115B2 - Filter frame - Google Patents

Filter frame Download PDF

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Publication number
JP4481115B2
JP4481115B2 JP2004255656A JP2004255656A JP4481115B2 JP 4481115 B2 JP4481115 B2 JP 4481115B2 JP 2004255656 A JP2004255656 A JP 2004255656A JP 2004255656 A JP2004255656 A JP 2004255656A JP 4481115 B2 JP4481115 B2 JP 4481115B2
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Prior art keywords
frame
filter
pair
rail
frame member
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JP2006068642A (en
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隆志 谷口
孝二 石川
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Nichias Corp
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Nichias Corp
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Description

本発明は、例えば半導体の製造に用いられるクリーンルームの天井や壁面にフィルタ部材を取り付けるフィルタ用フレームに関する。
The present invention relates to a filter for frame mounting the filter member on the ceiling and walls of the clean room to be used for example in semiconductor manufacturing.

例えば、半導体を製造するためのクリーンルームには、天井や壁面等に、ゴミや塵を除去するためのフィルタ部材が装着されている。このフィルタ部材は、その周辺をフィルタ用フレームで保持し(図4参照)、フィルタ用フレームごとクリーンルームの天井や壁面等に装着される。   For example, in a clean room for manufacturing semiconductors, a filter member for removing dust and dust is mounted on a ceiling, a wall surface, and the like. The periphery of the filter member is held by a filter frame (see FIG. 4), and the filter frame is attached to the ceiling or wall surface of the clean room together with the filter frame.

フィルタ用フレームは、種々の構成のものが知られているが、フィルタ部材の縦辺及び横辺に対応した2対の枠材同士をネジで連結する構成が一般的である(例えば、特許文献1及び特許文献2参照)。
特開2004−132620号公報 特開2002−200408号公報
Although various types of filter frames are known, a structure in which two pairs of frame members corresponding to the vertical side and the horizontal side of the filter member are connected to each other with screws is generally used (for example, Patent Documents). 1 and Patent Document 2).
JP 2004-132620 A JP 2002-200408 A

しかし、フィルタ部材は、その大きさ、即ち縦辺や横辺の長さが多様であるため、フィルタ用フレームを構成する縦辺用枠材及び横辺用枠材も、それに応じて数多くの種類を用意しなければならない。また、縦辺用枠材と横辺用枠材とを接続用のブラケット等を用いて連結する構成のフィルタ用フレームでは、部品点数が更に増加し、それとともに作業工数も増すようになる。   However, since the filter members have various sizes, that is, lengths of the vertical side and the horizontal side, there are many kinds of vertical frame members and horizontal frame members constituting the filter frame. Must be prepared. Further, in the filter frame configured to connect the vertical side frame member and the horizontal side frame member using a connection bracket or the like, the number of parts is further increased, and the work man-hour is also increased.

本発明は、このような状況に鑑みてなされたものであり、フィルタ部材毎に多種の枠材を用意する必要がなく、連結のための部材も不要で、組み立て作業も簡易であるフィルタ用フレームを提供することを目的とする。   The present invention has been made in view of such a situation, and it is not necessary to prepare various frame materials for each filter member, a member for connection is unnecessary, and a filter frame that is easy to assemble. The purpose is to provide.

上記目的を達成するために、本発明は下記のフィルタ用フレームを提供する。
(1)保持対象となるフィルタ部材の一方の辺に対応する一対の枠材と、他方の辺に対応する一対の枠材とをそれぞれ対向配置し、前記枠材同士をネジで連結して構成されるフィルタ用フレームであって、
底面部と、底面部の両端からそれぞれ同一方向に立設された左右一対の側面部と、底面部の側面部側の面に該底面部の全長にわたり設けられ、かつ、内壁にネジ溝が形成されたレール部とを一体に有するフレーム用枠材を、フィルタ部材の一方の辺の長さに対応させて切断してなる第1の枠材を一対、レール部同士が対向するように対向配置し、
前記フレーム用枠材を、フィルタ部材の他方の辺の長さに対応させて切断してなり、かつ、両端部において側面部の高さに相当する長さで両側面部及びレール部が切除され、底面部にレール部に対応してネジ孔が形成された切欠部を有する第2の枠材を一対、レール部同士が対向するように第1の枠材と直交させて対向配置するとともに、
第1の枠材の端部を第2の枠材の切欠部に係合させ、第2の枠材のネジ孔と第1の枠材のレール部とをネジで連結してなることを特徴とするフィルタ用フレーム
(2)レール部は、その全長にわたりスリットが形成されていることを特徴とする上記(1)記載のフィルタ用フレーム
To achieve the above object, the present invention provides the following filter frame.
(1) A pair of frame members corresponding to one side of the filter member to be held and a pair of frame members corresponding to the other side are arranged to face each other, and the frame members are connected with screws. A filter frame ,
A bottom part, a pair of left and right side parts erected in the same direction from both ends of the bottom part, and a surface on the side part side of the bottom part are provided over the entire length of the bottom part, and a screw groove is formed on the inner wall. It has been a frame for frame members that Yusuke integrally with the rail portion, so that the first frame member made by cutting in correspondence to the length of one side of the filter member pair, rail portions face each other Placed opposite to
The frame material is cut in accordance with the length of the other side of the filter member, and both side portions and rail portions are cut at a length corresponding to the height of the side surface at both ends, A pair of second frame members having a notch portion in which screw holes are formed corresponding to the rail portions on the bottom surface portion, and arranged to face each other orthogonal to the first frame material so that the rail portions face each other,
The end portion of the first frame member is engaged with the notch portion of the second frame member, and the screw hole of the second frame member and the rail portion of the first frame member are connected by screws. Filter frame .
(2) The filter frame according to (1) above, wherein the rail portion has a slit formed over its entire length.

本発明によれば、同一のフレーム用枠材を、目的とするフィルタ部材の縦辺及び横辺の長さに合わせて切断し、一方をそのまま使用し、他方に切欠部を形成すればよく、部材が共通化されるため、従来のようにフィルタ部材毎に縦辺用枠材及び横辺用枠材を用意する必要がない。また、組み立てに際して、ブラケット等の別の接続部材が不要で、組み立て作業も簡易となる。これらの効果により、コストの低減を図ることができる。   According to the present invention, the same frame frame material may be cut according to the lengths of the target filter member along the vertical and horizontal sides, using one as it is, and forming the notch in the other, Since the members are made common, it is not necessary to prepare the frame material for the vertical side and the frame material for the horizontal side for each filter member as in the prior art. Further, when assembling, another connecting member such as a bracket is unnecessary, and the assembling work is also simplified. These effects can reduce the cost.

以下、本発明の実施形態を図面に基づいて詳細に説明する。   Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

(フレーム用枠材)
図1(A)は本発明に係るフィルタ用フレームを構成するフレーム用枠材を示す側面図、図1(B)はその正面(端面)図である。フレーム用枠材11Aは、例えばアルミニウム等により長尺の棒状部材として形成されているもので、底面部21の両側からそれぞれ同方向に略直角に、所定の高さ(H)で左右一対の側面部22が立設して断面略コ字状を呈する基部30が形成され、更に底面部21の側面部22が形成された側の面には、全長にわたり略パイプ状のレール部23が付設されている。
(Frame material for frames)
FIG. 1A is a side view showing a frame material constituting a filter frame according to the present invention, and FIG. 1B is a front (end face) view thereof. The frame material 11A is formed as a long rod-shaped member, for example, from aluminum or the like, and is a pair of left and right side surfaces at a predetermined height (H) substantially perpendicular to each other in the same direction from both sides of the bottom surface portion 21. A base portion 30 having a substantially U-shaped cross section is formed by standing the portion 22, and a substantially pipe-shaped rail portion 23 is attached to the entire surface of the bottom surface portion 21 on which the side surface portion 22 is formed. ing.

レール部23は、その内壁にネジ溝14が形成されている。また、周面の一部に長さ方向に沿って連続したスリット15が形成されてもよい。尚、レール部23は、図の例では2本形成されているが、基部30の幅等、構造によっては1本、あるいは3本以上でも構わない。   The rail portion 23 has a thread groove 14 formed on the inner wall thereof. Moreover, the slit 15 continued along the length direction may be formed in a part of the peripheral surface. In addition, although the two rail parts 23 are formed in the example of a figure, depending on structures, such as the width | variety of the base 30, it may be 1 or 3 or more.

上記のフレーム用枠材11Aは、押出成形により基部30及びレール部23に相当するパイプ状物を一体に成形し、所定長さに切断した後、パイプ状物の内壁にネジ溝15を形成し、必要によりスリット15を形成することによりレール部23を形成すればよく、当業者であれば容易に作製することができる。   The above-mentioned frame material 11A is formed by integrally forming pipe-like objects corresponding to the base 30 and the rail part 23 by extrusion molding, cutting them to a predetermined length, and then forming screw grooves 15 on the inner wall of the pipe-like object. The rail portion 23 may be formed by forming the slit 15 if necessary, and can be easily manufactured by those skilled in the art.

(フィルタ用フレーム)
本発明のフィルタ用フレームは、平面形状が四角形状のフィルタ部材を保持するものであり、保持対象のフィルタ部材の縦辺に相当する一対の縦辺用枠材と、横辺に相当する一対の横辺用枠材とをそれぞれ対向配置し、これら枠材同士をネジで連結して構成される(図4参照)。そして、図1に示したフレーム用枠材11Aを、フィルタ部材の一方の辺(ここでは縦辺)の長さに合わせて切断し、それをそのまま縦辺用枠材として使用する。
(Filter frame)
The filter frame of the present invention holds a filter member having a square planar shape, a pair of vertical side frame members corresponding to the vertical sides of the filter member to be held, and a pair of horizontal sides corresponding to the horizontal sides. The lateral frame members are arranged opposite to each other, and these frame members are connected to each other with screws (see FIG. 4). Then, the frame frame member 11A shown in FIG. 1 is cut according to the length of one side (here, the vertical side) of the filter member, and used as it is as the vertical side frame member.

一方、フィルタ部材の他方の辺(ここでは横辺)を保持する横辺用枠材は、図2に示す構造を有する。尚、図2(A)はその側面図、図2(B)は正面(端面)図、図2(C)は基部の内部を示す上面図である。図示されるように、横辺用枠材11Bは、図1に示したフレーム用枠材を、保持対象となるフィルタ部材の横辺の長さに合わせて切断し、更にその両端の一部を切除して切欠部31を形成したものである。   On the other hand, the lateral side frame member that holds the other side (here, the lateral side) of the filter member has a structure shown in FIG. 2A is a side view, FIG. 2B is a front (end face) view, and FIG. 2C is a top view showing the inside of the base. As shown in the figure, the frame material 11B for the lateral side cuts the frame frame material shown in FIG. 1 according to the length of the lateral side of the filter member to be held, and further, part of both ends thereof. The cutout 31 is formed by excision.

切除部分を図中一点鎖線で示すが、側面部22,22の両端22a,22a及びレール部23,23の両端23a,23aを、縦辺用枠材11Aの高さ(H)分だけ切除され、切欠部31が形成される。また、この切欠部31において、底面部21はそのまま残り、残った平板部21aには、縦辺用枠体11Aのレール部23,23に対応してネジ孔16,16が形成される。   Although the cut portion is indicated by a one-dot chain line in the drawing, both ends 22a and 22a of the side surface portions 22 and 22 and both ends 23a and 23a of the rail portions 23 and 23 are cut by the height (H) of the vertical side frame member 11A. A notch 31 is formed. Moreover, in this notch part 31, the bottom face part 21 remains as it is, and screw holes 16 and 16 are formed in the remaining flat plate part 21a corresponding to the rail parts 23 and 23 of the vertical frame 11A.

上記の縦辺用枠材11Aと横辺用枠材11Bとを用いてフィルタ用フレームとするには、図3に部分的に拡大して示すように、縦辺用枠材11Aと横辺用枠材11Bとを直交配置し、横辺用枠材11Bの切欠部31と縦辺用枠材11Aの端部とを係合させる。これにより、切欠部31において、縦辺用枠材11Aの端面24aと横辺用枠材11Bの平板部21aとが当接し、縦辺用枠材11Aの側面部22の下面24bと横辺用枠材11Bの側面部22の切除端面25とが当接して、縦辺用枠材11Aの平板部21aが縦辺用枠材11Aの端面24aの全体を覆って閉じた状態となる。それとともに、縦辺用枠材11Aのレール部23と、横辺用枠材11Bのネジ孔16とが位置合わせてされる。そして、ネジ13を横辺用枠材11Bのネジ孔16を通じて縦辺用枠材11Aのレール部23のネジ溝14に螺合させて締め付けることにより、縦辺用枠材11Aと横辺用枠材11Bとが連結される。   In order to obtain a filter frame using the vertical side frame member 11A and the horizontal side frame member 11B, as shown in FIG. 3 partially enlarged, the vertical side frame member 11A and the horizontal side frame member are used. The frame member 11B is arranged orthogonally, and the cutout portion 31 of the lateral side frame member 11B is engaged with the end of the longitudinal side frame member 11A. Thereby, in the notch 31, the end surface 24a of the longitudinal side frame member 11A and the flat plate portion 21a of the lateral side frame member 11B come into contact with each other, and the lower surface 24b of the side surface part 22 of the longitudinal side frame member 11A and the lateral side The cut end surface 25 of the side surface portion 22 of the frame member 11B comes into contact with the flat plate portion 21a of the longitudinal side frame member 11A so as to cover the entire end surface 24a of the longitudinal side frame member 11A. At the same time, the rail portion 23 of the vertical frame member 11A and the screw hole 16 of the horizontal frame member 11B are aligned. Then, the screw 13 is screwed into the screw groove 14 of the rail portion 23 of the longitudinal side frame member 11A through the screw hole 16 of the lateral side frame member 11B, and tightened, whereby the longitudinal side frame member 11A and the lateral side frame are secured. The material 11B is connected.

尚、横辺用枠材11Bのネジ孔16が本来の位置から外れて、即ち上記の組み付け状態において縦辺用枠材11Aのレール部23と一致しない位置に形成されることがあるが、レール部23にスリット15が形成されていると、この位置ズレを許容してネジ止めすることが可能になる。   In addition, although the screw hole 16 of the frame material 11B for horizontal sides may be formed at a position that does not match the rail portion 23 of the frame material 11A for vertical sides in the above-described assembled state, If the slits 15 are formed in the part 23, this positional deviation can be allowed and screwed.

図4は、フィルタ部材10に本発明のフィルタ用フレーム11を装着した状態を示す外観図であるが、図3に示す連結は図中のA〜Dに示す4箇所で同様に行われる。尚、フィルタ部材10は、縦辺用枠材11A及び横辺用枠材11Bのそれぞれの側面部で保持される。   FIG. 4 is an external view showing a state in which the filter frame 11 of the present invention is mounted on the filter member 10, and the connection shown in FIG. 3 is similarly performed at four locations indicated by A to D in the drawing. In addition, the filter member 10 is hold | maintained in each side part of the frame material 11A for vertical sides, and the frame material 11B for horizontal sides.

発明のフィルタ用フレームの縦辺用枠材を示す図であり、(A)はその側面図、(B)はその正面図である。It is a figure which shows the frame material for the vertical sides of the filter frame of this invention, (A) is the side view, (B) is the front view. 本発明のフィルタ用フレームの横辺用枠材を示す図であり、(A)はその側面図、(B)はその正面図、(C)はその上面図である。It is a figure which shows the frame material for horizontal sides of the frame for filters of this invention, (A) is the side view, (B) is the front view, (C) is the top view. 本発明のフィルタ用フレームの組み立て手順を説明する要部分解斜視図である。It is a principal part disassembled perspective view explaining the assembly procedure of the filter frame of the present invention. 本発明のフィルタ用フレームの組み立て状態を示す概略外観図である。It is a schematic external view which shows the assembly state of the filter frame of this invention.

符号の説明Explanation of symbols

10 フィルタ部材
11 フィルタ用フレーム
11A 縦辺用枠材
11B 横辺用枠材
13 ネジ
14 ネジ溝
16 ネジ孔
21 底面部
21a 平板部
22 側面部
22a 切除部
23 レール部
23a 切除部
31 切欠部
DESCRIPTION OF SYMBOLS 10 Filter member 11 Filter frame 11A Vertical frame material 11B Horizontal frame material 13 Screw 14 Screw groove 16 Screw hole 21 Bottom surface part 21a Flat plate part 22 Side surface part 22a Cut part 23 Rail part 23a Cut part 31 Notch part

Claims (2)

保持対象となるフィルタ部材の一方の辺に対応する一対の枠材と、他方の辺に対応する一対の枠材とをそれぞれ対向配置し、前記枠材同士をネジで連結して構成されるフィルタ用フレームであって、
底面部と、底面部の両端からそれぞれ同一方向に立設された左右一対の側面部と、底面部の側面部側の面に該底面部の全長にわたり設けられ、かつ、内壁にネジ溝が形成されたレール部とを一体に有するフレーム用枠材を、フィルタ部材の一方の辺の長さに対応させて切断してなる第1の枠材を一対、レール部同士が対向するように対向配置し、
前記フレーム用枠材を、フィルタ部材の他方の辺の長さに対応させて切断してなり、かつ、両端部において側面部の高さに相当する長さで両側面部及びレール部が切除され、底面部にレール部に対応してネジ孔が形成された切欠部を有する第2の枠材を一対、レール部同士が対向するように第1の枠材と直交させて対向配置するとともに、
第1の枠材の端部を第2の枠材の切欠部に係合させ、第2の枠材のネジ孔と第1の枠材のレール部とをネジで連結してなることを特徴とするフィルタ用フレーム
A filter configured by disposing a pair of frame members corresponding to one side of the filter member to be held and a pair of frame members corresponding to the other side, and connecting the frame members with screws. Frame for
A bottom part, a pair of left and right side parts erected in the same direction from both ends of the bottom part, and a surface on the side part side of the bottom part are provided over the entire length of the bottom part, and a screw groove is formed on the inner wall. It has been a frame for frame members that Yusuke integrally with the rail portion, so that the first frame member made by cutting in correspondence to the length of one side of the filter member pair, rail portions face each other Placed opposite to
The frame material is cut in accordance with the length of the other side of the filter member, and both side portions and rail portions are cut at a length corresponding to the height of the side surface at both ends, A pair of second frame members having a notch portion in which screw holes are formed corresponding to the rail portions on the bottom surface portion, and arranged to face each other orthogonal to the first frame material so that the rail portions face each other,
The end portion of the first frame member is engaged with the notch portion of the second frame member, and the screw hole of the second frame member and the rail portion of the first frame member are connected by screws. Filter frame .
レール部は、その全長にわたりスリットが形成されていることを特徴とする請求項1記載のフィルタ用フレームThe filter frame according to claim 1, wherein the rail portion has a slit formed over the entire length thereof.
JP2004255656A 2004-09-02 2004-09-02 Filter frame Expired - Fee Related JP4481115B2 (en)

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JP4481115B2 true JP4481115B2 (en) 2010-06-16

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