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JP4369720B2 - Piezoelectric actuator and electronic device using the same - Google Patents

Piezoelectric actuator and electronic device using the same Download PDF

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JP4369720B2
JP4369720B2 JP2003364557A JP2003364557A JP4369720B2 JP 4369720 B2 JP4369720 B2 JP 4369720B2 JP 2003364557 A JP2003364557 A JP 2003364557A JP 2003364557 A JP2003364557 A JP 2003364557A JP 4369720 B2 JP4369720 B2 JP 4369720B2
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rotating body
piezoelectric
piezoelectric actuator
displacement
piezoelectric element
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JP2005130637A (en
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朗弘 飯野
政雄 春日
鈴木  誠
京志 本村
哲也 野邉
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Seiko Instruments Inc
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Description

本発明は圧電素子の変形により、移動体に一方向の変位だけを伝え移動体を駆動する圧電アクチュエータ及びその応用に関する。   The present invention relates to a piezoelectric actuator that transmits only a displacement in one direction to a moving body by a deformation of a piezoelectric element and drives the moving body, and an application thereof.

近年電子機器の小型化が進み、そこで用いられるアクチュエータの小型化も要求されている。このアクチュエータの代表例として電磁型のモータの回転力により減速歯車列を介して稼働部材を駆動する方式が一般に行われており、そこで用いられるDCモータやステッピングモータの小型化が進んでいる。   In recent years, electronic devices have been miniaturized, and actuators used there have also been required to be miniaturized. As a typical example of this actuator, a system in which an operating member is driven via a reduction gear train by the rotational force of an electromagnetic motor is generally performed, and miniaturization of DC motors and stepping motors used therein is progressing.

また一方では、新原理のアクチュエータの開発も盛んに行われており、発生力の大きな圧電素子を用いたものにも期待が掛かっている。例えば稼働部材と、これを一方向に移動可能にガイドする軸との間に摩擦力を生じさせておき、軸の先端に設けた圧電素子を周期的に変形させたときに生じる稼働部材の慣性力により稼働部材を稼働する方式が開発されている(例えば、非特許文献1参照。)。また、このようなアクチュエ−タは、カメラのズーム機構やオートフォーカス機構への応用も試みられている。
吉田龍一、岡本康弘、マイクロ圧電アクチュエータ 精密工学会誌Vol.68、NO.5,2002
On the other hand, actuators based on a new principle have been actively developed, and expectations are also high for those using piezoelectric elements with a large generated force. For example, the inertia of the working member generated when a frictional force is generated between the working member and the shaft that guides the working member so as to be movable in one direction, and the piezoelectric element provided at the tip of the shaft is periodically deformed. A method of operating the operating member by force has been developed (see, for example, Non-Patent Document 1). Further, such an actuator has been tried to be applied to a zoom mechanism and an autofocus mechanism of a camera.
Ryuichi Yoshida, Yasuhiro Okamoto, Journal of Precision Engineering, Vol. 68, NO. 5,2002

しかしながら電磁モータは小型化が難しいばかりでなく、小型化してもトルクが極めて弱くなってしまう為、その分だけ減速歯車列が必要となり機構自体の大きさは小さくするのが難しかった。   However, the electromagnetic motor is not only difficult to miniaturize, but even if the motor is miniaturized, the torque becomes extremely weak. Therefore, a reduction gear train is required, and it is difficult to reduce the size of the mechanism itself.

また圧電素子の変形により生じる慣性力を利用したものは直動動作のため応用する機器が限られてしった。この場合、稼働部材をダイレクトに稼働させることができるというメリットはあるが、アクチュエータを搭載する機器に落下や振動が生じた場合、稼働部が動いてしまう恐れが有った。そこで、その対応策として稼働部材と軸の間の摩擦力を大きくすることが考えられるが、この場合には稼働部材を駆動するには圧電素子に大きな電圧を印加しなければならず、消費電力の増大並びに昇圧回路等駆動回路の複雑化、大型化を招く恐れがあった。そして、稼働部材をガイドする軸を必要とする構造から設計の自由度に制限を与え、機器への塔載に障害となる恐れがあった。   In addition, devices using the inertial force generated by the deformation of the piezoelectric element are limited in equipment to be applied because of the linear motion. In this case, there is a merit that the operating member can be operated directly, but there is a possibility that the operating part may move when a device in which the actuator is mounted is dropped or vibrated. Therefore, it is conceivable to increase the frictional force between the working member and the shaft as a countermeasure. In this case, in order to drive the working member, a large voltage must be applied to the piezoelectric element. As a result, there is a risk that the drive circuit such as a booster circuit becomes complicated and large in size. In addition, the structure that requires a shaft that guides the operating member limits the degree of freedom in design, which may hinder the installation of the device.

上記課題を解決する本発明の第1の態様は、回転可能に配置される回転体と、一端が同一の固定部材に固定され他端が前記回転体の回転軸線方向端面に接し、その変形により前記回転体の径方向と直交する接線方向に往復変位する二つの圧電素子と、前記二つの圧電素子の第一の方向の変位の加速度もしくは速度と、前記第一の方向と反対の第二の方向の変位の加速度もしくは速度とが異なると共に前記二つの圧電素子の変位方向が互いに反対方向となる様な駆動信号を前記圧電素子に供給する駆動回路とからなる圧電アクチュエータにある。 According to a first aspect of the present invention for solving the above-mentioned problems, a rotating body arranged rotatably, one end is fixed to the same fixing member, and the other end is in contact with the end surface in the rotation axis direction of the rotating body , Two piezoelectric elements reciprocally displaced in a tangential direction perpendicular to the radial direction of the rotating body, acceleration or speed of displacement of the two piezoelectric elements in a first direction, and a second opposite to the first direction There is a piezoelectric actuator comprising a drive circuit that supplies a drive signal to the piezoelectric element such that the acceleration or speed of the direction displacement is different and the displacement directions of the two piezoelectric elements are opposite to each other .

本発明の第2の態様は、第1の態様において、回転可能に配置される回転体と、
前記回転体の回転軸線方向に配置された固定板と、 一端が前記固定板に接し、他端が前記回転体に固定され、前記回転体の径方向と直交する接線方向に往復変位する二つの圧電素子と、前記二つの圧電素子の第一の方向の変位の加速度もしくは速度と、前記第一の方向と反対の第二の方向の変位の加速度もしくは速度とが異なると共に前記二つの圧電素子の変位方向が互いに反対方向となる様な駆動信号を前記圧電素子に供給する駆動回路とからなることを特徴とする圧電アクチュエータにある。
According to a second aspect of the present invention, in the first aspect, a rotating body that is rotatably arranged;
A fixed plate disposed in the rotation axis direction of the rotating body; two fixed ends that are in contact with the fixed plate, the other end fixed to the rotating body, and reciprocally displaced in a tangential direction perpendicular to the radial direction of the rotating body. The acceleration or speed of displacement in the first direction of the two piezoelectric elements is different from the acceleration or speed of displacement in the second direction opposite to the first direction, and the two piezoelectric elements The piezoelectric actuator is characterized by comprising a drive circuit for supplying a drive signal with displacement directions opposite to each other to the piezoelectric element .

本発明の第3の態様は、第1または2の態様において、前記圧電素子は屈曲変形をすることを特徴とする圧電アクチュエータにある。   According to a third aspect of the present invention, in the piezoelectric actuator according to the first or second aspect, the piezoelectric element bends and deforms.

本発明の第4の態様は、第1または2の態様において、前記圧電素子は、せん断変形することを特徴とする圧電アクチュエータにある。   According to a fourth aspect of the present invention, in the piezoelectric actuator according to the first or second aspect, the piezoelectric element undergoes shear deformation.

本発明の第5の態様は、第1から4のいずれかの態様において、前記圧電素子の変位量を規制する規制部材が設けられていることを特徴とする圧電アクチュエータにある。   A fifth aspect of the present invention is the piezoelectric actuator according to any one of the first to fourth aspects, wherein a restriction member for restricting a displacement amount of the piezoelectric element is provided.

本発明の第6の態様は、第1から5のいずれかの態様において、前記回転体に設けられたカムと、前記カムの動きに連動し直動動作する移動体を有することを特徴とする圧電アクチュエータにある。   According to a sixth aspect of the present invention, in any one of the first to fifth aspects, the cam includes a cam provided on the rotating body, and a moving body that moves linearly in conjunction with the movement of the cam. It is in the piezoelectric actuator.

本発明の第7の態様は、第1から6のいずれかの態様における圧電アクチュエータを備えた電子機器にある。   According to a seventh aspect of the present invention, there is provided an electronic apparatus including the piezoelectric actuator according to any one of the first to sixth aspects.

本発明によれば、回転体もしくは固定部材に固定した圧電素子の変形の特定成分を回転体に伝え、回転体の回転動作が実現でき、回転体自体の慣性力を駆動力に使えるため大きな発生力が得られる。この様な原理を用いることで、電磁型のモータや共振を用いた例えば超音波モータよりも消費電流を抑えられるとともに、停止時は全く電力を消費しない。そして、圧電素子には屈曲変形をするものを用いることにより、大きな圧電素子の変形が得られ、低電圧での駆動が可能となる。また、圧電定数が大きなせん断変形用圧電素子を用いることにより、低電圧で大きな駆動力を得ることができるだけでなく、高い周波数まで駆動でき回転体の高速動作が実現できる。   According to the present invention, a specific component of the deformation of the piezoelectric element fixed to the rotating body or the fixed member is transmitted to the rotating body, the rotating body can be rotated, and the inertial force of the rotating body itself can be used as a driving force. Power is obtained. By using such a principle, current consumption can be suppressed as compared with, for example, an ultrasonic motor or an ultrasonic motor using resonance, and power is not consumed at all when stopped. By using a piezoelectric element that bends and deforms, a large deformation of the piezoelectric element can be obtained, and driving at a low voltage is possible. Further, by using a shear deformation piezoelectric element having a large piezoelectric constant, not only a large driving force can be obtained at a low voltage, but also a high frequency can be driven and a high-speed operation of the rotating body can be realized.

そして、これら圧電素子の変位量を規制する規制部材を設けることで、落下や振動等によって発生する圧電素子の大変形、強いては破壊を防止することができる。   By providing a regulating member that regulates the amount of displacement of these piezoelectric elements, it is possible to prevent large deformation or even destruction of the piezoelectric elements caused by dropping or vibration.

また回転体に設けられたカムと、カムの動きに連動し直動動作する移動体を有する機構とすれば移動体の直動動作が可能となるため、例えばレンズを移動体とすることによりカメラのオートフォーカス機構やズーム機構が極めて小型な構成で実現できる。そしてこのようなカムを使用する構成により小さな電力で重い移動体を稼働できるばかりでなく、保持力も大きく落下や振動等が生じた際にも移動体の位置ずれが生じにくい。   Further, if the mechanism has a cam provided on the rotating body and a moving body that moves linearly in conjunction with the movement of the cam, the moving body can be moved directly. The autofocus mechanism and zoom mechanism can be realized with an extremely small configuration. The configuration using such a cam can not only operate a heavy moving body with a small amount of electric power, but also has a large holding force and is less likely to be displaced when a drop or vibration occurs.

この様に本発明の圧電アクチュエータを電子機器の駆動源に用いることにより駆動回路の小型・簡素化、電子機器の小型化、低消費電力化、信頼性の向上が可能となる。   In this way, by using the piezoelectric actuator of the present invention as a drive source of an electronic device, it is possible to reduce the size and simplification of the drive circuit, reduce the size of the electronic device, reduce power consumption, and improve reliability.

本発明では回転体と、一端が固定部材に固定され、他端が回転体に接する様に配置された圧電素子とからなり、圧電素子の第一の方向の変位の加速度もしくは速度と第二の方向の変位の加速度もしくは速度とが異なるような変形を圧電素子にさせることで、圧電素子一方の変位成分だけを回転体に伝え、回転体を駆動する。   The present invention comprises a rotating body and a piezoelectric element arranged so that one end is fixed to a fixing member and the other end is in contact with the rotating body. The acceleration or speed of displacement in the first direction of the piezoelectric element and the second By causing the piezoelectric element to deform such that the acceleration or speed of the displacement in the direction is different, only the displacement component of one of the piezoelectric elements is transmitted to the rotating body, and the rotating body is driven.

また、別な例として回転体と、一端が回転体に固定され、他端が固定部材に接する様に配置された圧電素子とからなり、圧電素子の第一の方向の変位の加速度もしくは速度と第二の方向の変位の加速度もしくは速度とが異なるように変形させることで、圧電素子の一方の変位成分だけを固定部材に伝え、回転体を駆動する。   As another example, a rotating body and a piezoelectric element arranged so that one end is fixed to the rotating body and the other end is in contact with the fixing member, the acceleration or speed of displacement of the piezoelectric element in the first direction By deforming so that the acceleration or velocity of the displacement in the second direction is different, only one displacement component of the piezoelectric element is transmitted to the fixed member, and the rotating body is driven.

ここで特に圧電素子には屈曲変形をするものか、せん断変形するものを用いる。そして、圧電素子の変位量を規制する規制部材を設けることで、耐衝撃性を向上させる。
また、回転体に設けられたカムと、カムの動きに連動し直動動作する移動体を有する構造とすることで、移動体の直動動作が可能となる。
(実施の形態1)
本発明の実施の形態について、図面を基に説明する。図1は本発明の実施の形態1にかかわる圧電アクチュエータ10の構成を示した図である。固定板4には圧電素子で構成されるバイモルフ1a、1bの一端が固定されている。円筒形状の回転体3の内周部は固定板4の厚み方向に設けられた段部4aで回転可能に案内されている。ここで、図示しないが加圧ばね等によって回転体3をバイモルフ1a、1bの他端に加圧接触させ、両者の間に適度な摩擦力を確保する。
Here, in particular, a piezoelectric element that is bent or sheared is used. And the impact resistance is improved by providing a regulating member that regulates the displacement amount of the piezoelectric element.
In addition, by adopting a structure having a cam provided on the rotating body and a moving body that moves linearly in conjunction with the movement of the cam, the moving body can be moved directly.
(Embodiment 1)
Embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a diagram showing a configuration of a piezoelectric actuator 10 according to Embodiment 1 of the present invention. One end of bimorphs 1 a and 1 b made of piezoelectric elements is fixed to the fixed plate 4. The inner peripheral part of the cylindrical rotating body 3 is rotatably guided by a step part 4 a provided in the thickness direction of the fixed plate 4. Here, although not shown, the rotating body 3 is brought into pressure contact with the other ends of the bimorphs 1a and 1b by a pressure spring or the like, and an appropriate frictional force is secured between the two.

次に、本発明の圧電アクチュエータ10の駆動原理について、図2、図3を用いて説明する。図3で、バイモルフ素子1は例えば、回転体3の径方向と直交する接線方向(図中矢印の方向)に分極処理された圧電素子6a、6bを重ねて接合し構成されている。圧電素子6a、6bの接合面と他方の面には、圧電素子6aの他方の面側から順に電極5a、5b、5cが設けられている。ここで電極5bをGNDとし、電極5a、5cを短絡し、図示していない駆動回路により電圧を印可すると一方の圧電素子は伸び、一方の圧電素子は縮む為、バイモルフ素子1は全体として屈曲変位を示す。そして、電圧の極性を変えると変形の方向も逆になる。ここで図3(b)の様に、駆動信号を交番電圧とするとともに電圧を上げる際のスピードと下げる際のスピードを変えると、バイモルフ素子1の変形のスピードも、変形する方向である第一の方向と、第一の方向と逆方向である第二の方向とによって異なる。   Next, the driving principle of the piezoelectric actuator 10 of the present invention will be described with reference to FIGS. In FIG. 3, the bimorph element 1 is configured, for example, by superposing and joining piezoelectric elements 6 a and 6 b polarized in a tangential direction (in the direction of the arrow in the figure) perpendicular to the radial direction of the rotating body 3. Electrodes 5a, 5b, and 5c are provided in order from the other surface side of the piezoelectric element 6a on the bonding surface and the other surface of the piezoelectric elements 6a and 6b. Here, when the electrode 5b is GND, the electrodes 5a and 5c are short-circuited, and when a voltage is applied by a drive circuit (not shown), one piezoelectric element expands and one piezoelectric element contracts, so that the bimorph element 1 is bent and displaced as a whole. Indicates. When the polarity of the voltage is changed, the direction of deformation is also reversed. Here, as shown in FIG. 3B, when the drive signal is an alternating voltage and the speed at which the voltage is raised and the speed at which the voltage is lowered are changed, the deformation speed of the bimorph element 1 is also the first direction in which the deformation occurs. And a second direction that is opposite to the first direction.

例えば図3(a)に示した駆動信号をバイモルフ素子1に加える。バイモルフ素子1は圧電素子5の先端に耐摩耗性に優れた樹脂やセラミクスからなる摩擦材2を接合することで、耐久性を向上させる。このバイモルフ素子1の変形によって摩擦材2と接する回転体3も移動するが、バイモルフ素子1の変形のスピードが速い場合には回転体3と摩擦材2の間には滑りが生じ、回転体3の移動量は極めて小さいか、動かない。図2(a)の状態から図2(b)の状態に、急速にバイモルフ素子1を変形させた後、その際の変形の速度よりもゆっくりと図2(a)の状態に戻し、可能であれば、そこで急に停止させれば、図2のCW方向に回転体を回転させることができる。回転体3の大きな慣性力を利用するにあたり、バイモルフ素子1の変位を急激に途中で止める為に、例えば図3(c)の駆動信号を印加しても構わない。また、図3(d)の様に、図3(a)の駆動信号に対して電圧を上げる際のスピードと下げる際のスピードを逆にすると回転体3の回転方向も逆(CCW方向)となる。   For example, the drive signal shown in FIG. 3A is applied to the bimorph element 1. The bimorph element 1 improves durability by bonding a friction material 2 made of a resin or ceramic having excellent wear resistance to the tip of the piezoelectric element 5. Due to the deformation of the bimorph element 1, the rotating body 3 in contact with the friction material 2 also moves. However, when the deformation speed of the bimorph element 1 is high, slip occurs between the rotating body 3 and the friction material 2, and the rotating body 3. The amount of movement is very small or does not move. After the bimorph element 1 is rapidly deformed from the state of FIG. 2A to the state of FIG. 2B, it can be returned to the state of FIG. 2A more slowly than the deformation speed at that time. If there is, if it stops suddenly there, the rotating body can be rotated in the CW direction of FIG. When using the large inertial force of the rotating body 3, in order to stop the displacement of the bimorph element 1 abruptly, for example, a drive signal shown in FIG. 3C may be applied. Further, as shown in FIG. 3D, when the speed at which the voltage is raised and the speed at which the voltage is lowered are reversed with respect to the drive signal of FIG. 3A, the rotating direction of the rotating body 3 is also reversed (CCW direction). Become.

この様に、バイモルフ素子1の第一の方向の変形により生じる回転体3の移動量と、第二の方向(第一の方向と逆方向)により生じる回転体3の移動量に差を持たせるような駆動信号であれば、図3に示したものに限らない。要求される出力仕様や回路構成に応じて適当なものを採用すれば良い。またバイモルフ素子1の代わりに圧電素子と金属等の弾性部材を用いてユニモルフを構成したものを用いても構わない。そして、バイモルフ素子1の個数は限定しない。   In this way, the moving amount of the rotating body 3 generated by the deformation of the bimorph element 1 in the first direction is different from the moving amount of the rotating body 3 generated by the second direction (the direction opposite to the first direction). Such a drive signal is not limited to that shown in FIG. Appropriate ones may be adopted according to required output specifications and circuit configurations. Moreover, you may use what comprised the unimorph using elastic members, such as a piezoelectric element and a metal, instead of the bimorph element 1. FIG. The number of bimorph elements 1 is not limited.

また、本実施の形態において、圧電素子は回転体の径方向と直交する接線方向に分極処理されているが、分極方向や電圧のかけ方は異なっていたとしても、結果として回転体の径方向と直交する接線方向に変形を発生させる構成であれば良い。
(実施の形態2)
本発明の実施の形態2を図面に基づいて説明する。図4は本発明の実施の形態2にかかわる圧電アクチュエータ20の構成を示したものである。基本的な圧電アクチュエータ20の構成は、実施の形態1に示したものと同じであるので、相違点のみを説明する。
In the present embodiment, the piezoelectric element is polarized in a tangential direction orthogonal to the radial direction of the rotating body. However, even if the polarization direction and the method of applying voltage are different, as a result, the radial direction of the rotating body Any configuration may be used as long as the deformation is generated in the tangential direction orthogonal to the line.
(Embodiment 2)
A second embodiment of the present invention will be described with reference to the drawings. FIG. 4 shows the configuration of the piezoelectric actuator 20 according to the second embodiment of the present invention. Since the basic configuration of the piezoelectric actuator 20 is the same as that shown in the first embodiment, only the differences will be described.

図4において、圧電素子で構成されるバイモルフ素子1a、1bの一端は、回転体7の側面に設けられた支持部7a、7bに固定されている。円筒形状の回転体7の内周部は、固定板4の厚み方向に設けられた段部4aで回転可能に案内されている。バイモルフ素子1a、1bの他端は、固定板4と接しており実施の形態1と同様に駆動させることにより、回転体7が回転する。即ち、バイモルフ素子1の第一の方向の変形を急激にし固定板4との間に出来るだけ滑りを生じさせ、第二の方向(第一の方向と逆方向)の変形を緩やかにすることでバイモルフ素子1の他端と固定板4の間には滑りをなるべく生じさせずに回転体7を移動させる。   In FIG. 4, one ends of the bimorph elements 1 a and 1 b formed of piezoelectric elements are fixed to support portions 7 a and 7 b provided on the side surface of the rotating body 7. An inner peripheral portion of the cylindrical rotating body 7 is rotatably guided by a step portion 4 a provided in the thickness direction of the fixed plate 4. The other ends of the bimorph elements 1a and 1b are in contact with the fixed plate 4 and are driven in the same manner as in the first embodiment, whereby the rotating body 7 is rotated. In other words, the deformation of the bimorph element 1 in the first direction is abruptly caused to slip as much as possible between the bimorph element 1 and the deformation in the second direction (the direction opposite to the first direction). The rotating body 7 is moved between the other end of the bimorph element 1 and the fixed plate 4 without causing any slippage.

ところで、回転体7の側面には規制部材7c、7dが設けられており、この規制部材7c、7dの溝部にバイモルフ素子1は収まっている。この規制部材7c、7dはバイモルフ素子1の変形量を規制するものであり、駆動信号による変形量よりも大きく破壊に至る変形量よりは小さい隙間となっている。従って、規制部材7c、7dの溝部は通常の動作においては何ら影響を与えないが、落下や外部の振動時に発生するバイモルフ素子の変形を規制し、これらによって破壊されない信頼性の高い圧電アクチュエータ20が実現される。
(実施の形態3)
本発明の実施の形態3について、図面を基に説明する。図5は、本発明の実施の形態3の圧電アクチュエータ30の構成の一部を示した図である。基本的には実施の形態2の構成と同じ為、相違点、即ち回転体8と圧電素子9の関係並びに圧電素子の動作についてのみ述べる。円筒形状の回転体8の下面には、圧電素子9a,9bの一端が固定されている。回転体8の内周部は、図示しない固定板4の厚み方向に設けられた段部4aで回転可能に案内されている。ここで、図示しないが加圧ばね等によって回転体8を固定板4に加圧接触させ、両者の間に適度な摩擦力を確保する。
Incidentally, restricting members 7c and 7d are provided on the side surface of the rotating body 7, and the bimorph element 1 is accommodated in the groove portions of the restricting members 7c and 7d. The regulating members 7c and 7d regulate the deformation amount of the bimorph element 1, and are gaps that are larger than the deformation amount due to the drive signal and smaller than the deformation amount leading to destruction. Therefore, although the groove portions of the regulating members 7c and 7d do not have any influence in normal operation, the highly reliable piezoelectric actuator 20 that regulates the deformation of the bimorph element that occurs at the time of dropping or external vibration and is not destroyed by these is provided. Realized.
(Embodiment 3)
A third embodiment of the present invention will be described with reference to the drawings. FIG. 5 is a diagram showing a part of the configuration of the piezoelectric actuator 30 according to the third embodiment of the present invention. Since the configuration is basically the same as that of the second embodiment, only the difference, that is, the relationship between the rotating body 8 and the piezoelectric element 9 and the operation of the piezoelectric element will be described. One end of the piezoelectric elements 9 a and 9 b is fixed to the lower surface of the cylindrical rotating body 8. The inner peripheral portion of the rotating body 8 is rotatably guided by a step portion 4a provided in the thickness direction of the fixed plate 4 (not shown). Here, although not shown, the rotating body 8 is brought into pressure contact with the fixed plate 4 by a pressure spring or the like, and an appropriate frictional force is secured between the two.

次に、本発明の圧電アクチュエータ30の駆動原理について、回転体8を圧電素子9a,9b側から見た図6を用いて説明する。圧電素子9は回転体8の径方向と直交する接線方向で、図5(a)において矢印で示される方向に分極処理されている。圧電素子9a,9bの回転体8と反対側の面及び回転体8側の面には、それぞれ電極12a,12b及び12c,12dが設けられており、図示していない駆動回路によって、それぞれ回転体8と反対側の面、回転体8側の面の電極の間に電圧を印加することにより、圧電素子9a,9bはせん断変形する。ここで電極12b,12dをGNDとし、電極12a,12cに電圧を印可すると圧電素子9a,9bは図6(b)に示す様に変形する。従って、図6(a)の状態から図6(b)の状態への圧電素子9a,9bの変形のスピードと図6(b)の状態から図6(a)の状態への圧電素子9a,9bの変形のスピードを異ならせ、この二つの状態を交互に連続して行わせることにより、実施の形態2に示した原理に基づき回転体8は回転する。   Next, the driving principle of the piezoelectric actuator 30 according to the present invention will be described with reference to FIG. 6 in which the rotating body 8 is viewed from the piezoelectric elements 9a and 9b side. The piezoelectric element 9 is polarized in the tangential direction orthogonal to the radial direction of the rotating body 8 and in the direction indicated by the arrow in FIG. Electrodes 12a, 12b and 12c, 12d are provided on the surface of the piezoelectric elements 9a, 9b opposite to the rotating body 8 and the surface on the rotating body 8, respectively, and each rotating body is driven by a drive circuit (not shown). When a voltage is applied between the electrodes on the surface opposite to the surface 8 and the surface on the rotating body 8 side, the piezoelectric elements 9a and 9b undergo shear deformation. Here, when the electrodes 12b and 12d are set to GND and a voltage is applied to the electrodes 12a and 12c, the piezoelectric elements 9a and 9b are deformed as shown in FIG. 6B. Accordingly, the deformation speed of the piezoelectric elements 9a, 9b from the state of FIG. 6 (a) to the state of FIG. 6 (b) and the piezoelectric elements 9a, 9a, 9b from the state of FIG. 6 (b) to the state of FIG. The rotating body 8 rotates based on the principle shown in the second embodiment by making the deformation speed of 9b different and causing these two states to be performed alternately and continuously.

ここで圧電素子9a,9bに加える駆動信号の形態としては、図3に示したものと同様のものでも構わないが、その限りではない。即ち、圧電素子9a,9bの第一の方向の変形の加速度と第二の方向(逆方向)の変形の加速度とが異なるような駆動信号を印加すればよく、必要な回転体8のスピード等の出力特性に応じて最適化すればよい。また、回転体8を逆転させる際には、正転時の第一の方向の変形の加速度と第二の方向(逆方向)の変形の加速度の関係が逆になるような駆動信号を印加すればよい。言い換えれば、圧電素子9の第一の方向の変形により生じる回転体8の移動量と、第二の方向(第一の方向と逆方向)により生じる回転体8の移動量に、差を持たせるように圧電素子9を変形させれば、その方法に限定を与えるものではない。また、圧電素子9は固定板4側に固定しても良い。   Here, the form of the drive signal applied to the piezoelectric elements 9a and 9b may be the same as that shown in FIG. 3, but is not limited thereto. That is, it is only necessary to apply a drive signal so that the acceleration of deformation in the first direction of the piezoelectric elements 9a and 9b and the acceleration of deformation in the second direction (reverse direction) are different. May be optimized according to the output characteristics. Further, when the rotating body 8 is reversely rotated, a drive signal is applied so that the relationship between the acceleration of deformation in the first direction and the acceleration of deformation in the second direction (reverse direction) at the time of forward rotation is reversed. That's fine. In other words, there is a difference between the amount of movement of the rotating body 8 caused by the deformation of the piezoelectric element 9 in the first direction and the amount of movement of the rotating body 8 caused by the second direction (the direction opposite to the first direction). If the piezoelectric element 9 is deformed as described above, the method is not limited. The piezoelectric element 9 may be fixed to the fixed plate 4 side.

また、本実施の形態において、圧電素子は回転体の径方向と直交する接線方向に分極処理されているが、分極方向や電圧のかけ方は異なっていたとしても、結果として回転体の径方向と直交する接線方向に変形を発生させる構成であれば良い。
(実施の形態4)
本実施の形態は、本発明の圧電アクチュエータを電子機器の駆動源に適用した例を示すものである。移動体に設けたピンが、圧電アクチュエータの回転体に設けた溝に係合する構成とすることにより、回転体が回転すると移動体が上下に移動することが出来る。従って例えば移動体をレンズとすれば、カメラのズーム機構やオートフォーカス機構等が実現できる。
In the present embodiment, the piezoelectric element is polarized in a tangential direction orthogonal to the radial direction of the rotating body. However, even if the polarization direction and the method of applying voltage are different, as a result, the radial direction of the rotating body Any configuration may be used as long as the deformation is generated in the tangential direction orthogonal to the line.
(Embodiment 4)
This embodiment shows an example in which the piezoelectric actuator of the present invention is applied to a drive source of an electronic device. By adopting a configuration in which the pin provided on the moving body engages with the groove provided on the rotating body of the piezoelectric actuator, the moving body can move up and down as the rotating body rotates. Therefore, for example, if the moving body is a lens, a zoom mechanism, an autofocus mechanism, or the like of the camera can be realized.

図7は、実施の形態1で示した圧電アクチュエータ10を用いた例である。回転体3の側面には、周方向に対して傾斜した溝(カム)3aが設けられている。回転体3の内周部には移動体13が配置され、移動体13の側面にはピン14が接続されている。ピン14は図示しない案内溝によって移動体13の厚み方向(図中矢印方向)にのみ移動可能に案内されているとともに回転体3の溝(カム)3aに係合しているため回転体3の回転動作に伴って図中矢印方向に移動可能となる。   FIG. 7 shows an example using the piezoelectric actuator 10 shown in the first embodiment. A groove (cam) 3 a that is inclined with respect to the circumferential direction is provided on a side surface of the rotating body 3. A moving body 13 is disposed on the inner periphery of the rotating body 3, and a pin 14 is connected to a side surface of the moving body 13. The pin 14 is guided by a guide groove (not shown) so as to be movable only in the thickness direction of the moving body 13 (in the direction of the arrow in the figure), and is engaged with a groove (cam) 3a of the rotating body 3, so It can move in the direction of the arrow in the figure along with the rotation.

ここでは、実施の形態1の圧電アクチュエータ10を用いた例について示したが、圧電アクチュエータは本発明の原理に基づくものであれば、その形態にこだわらない。また、実施の形態2に示した構造を組み合わせることにより、信頼性の高い電子機器が実現できる。   Here, an example using the piezoelectric actuator 10 according to the first embodiment has been described, but the piezoelectric actuator is not particularly limited as long as it is based on the principle of the present invention. In addition, by combining the structures described in Embodiment Mode 2, a highly reliable electronic device can be realized.

本発明の圧電アクチュエータの移動体を例えばレンズとすれば、カメラのズーム機構、オートフォーカス機構等の電子機器へ応用できる。   If the moving body of the piezoelectric actuator of the present invention is a lens, for example, it can be applied to electronic devices such as a zoom mechanism and an autofocus mechanism of a camera.

本発明の実施の形態1にかかわる圧電アクチュエータの構成を示す図である。It is a figure which shows the structure of the piezoelectric actuator concerning Embodiment 1 of this invention. 本発明の実施の形態1にかかわる圧電アクチュエータの圧電素子の動作の様子を示す図である。It is a figure which shows the mode of operation | movement of the piezoelectric element of the piezoelectric actuator concerning Embodiment 1 of this invention. 本発明の実施の形態1にかかわる圧電アクチュエータの駆動信号の例を示す図である。It is a figure which shows the example of the drive signal of the piezoelectric actuator concerning Embodiment 1 of this invention. 本発明の実施の形態2にかかわる圧電アクチュエータの構成を示す図である。It is a figure which shows the structure of the piezoelectric actuator concerning Embodiment 2 of this invention. 本発明の実施の形態3にかかわる圧電アクチュエータの構成を示す図である。It is a figure which shows the structure of the piezoelectric actuator concerning Embodiment 3 of this invention. 本発明の実施の形態3にかかわる圧電アクチュエータの駆動原理を示す図である。It is a figure which shows the drive principle of the piezoelectric actuator concerning Embodiment 3 of this invention. 本発明の実施の形態1から3にかかわる圧電アクチュエータを電子機器に応用した例を示す図である。It is a figure which shows the example which applied the piezoelectric actuator concerning Embodiment 1 to 3 of this invention to the electronic device.

符号の説明Explanation of symbols

3,7,8 回転体
4 固定板
13 移動体
14 ピン
6,9 圧電素子
5,12 電極
3, 7, 8 Rotating body 4 Fixed plate 13 Moving body 14 Pin 6, 9 Piezoelectric element 5, 12 Electrode

Claims (7)

回転可能に配置される回転体と、
前記回転体の回転軸線方向に配置された同一の固定部材に一端が固定され他端が前記回転体の回転軸線方向に延出し前記回転体の端面に接し、前記回転体の径方向と直交する接線方向に往復変位する二つの圧電素子と、
前記二つの圧電素子の第一の方向の変位の加速度もしくは速度と、前記第一の方向と反対の第二の方向の変位の加速度もしくは速度とが異なると共に前記二つの圧電素子の変位方向が互いに反対方向となる様な駆動信号を前記圧電素子に供給する駆動回路とからなる圧電アクチュエータ。
A rotating body arranged rotatably,
One end is fixed to the same fixing member arranged in the rotation axis direction of the rotating body, the other end extends in the rotation axis direction of the rotating body , contacts the end surface of the rotating body, and is orthogonal to the radial direction of the rotating body. Two piezoelectric elements that reciprocate in the tangential direction;
The acceleration or velocity of the displacement in the first direction of the two piezoelectric elements is different from the acceleration or velocity of the displacement in the second direction opposite to the first direction, and the displacement directions of the two piezoelectric elements are mutually different. A piezoelectric actuator comprising a drive circuit for supplying a drive signal in the opposite direction to the piezoelectric element.
回転可能に配置される回転体と、
前記回転体の回転軸線方向に配置された固定板と、
一端が前記回転体に固定され、他端が前記固定板方向に延出し前記固定板に接し前記回転体の径方向と直交する接線方向に往復変位する二つの圧電素子と、
前記二つの圧電素子の第一の方向の変位の加速度もしくは速度と、前記第一の方向と反対の第二の方向の変位の加速度もしくは速度とが異なると共に前記二つの圧電素子の変位方向が互いに反対方向となる様な駆動信号を前記圧電素子に供給する駆動回路とからなる圧電アクチュエータ。
A rotating body arranged rotatably,
A fixed plate arranged in the rotation axis direction of the rotating body;
One end fixed to said rotary member, and two piezoelectric elements for reciprocally displaced in the tangential direction the other end is perpendicular to the radial direction of the rotating body in contact with rolled out the fixing plate to the fixed plate direction,
The acceleration or velocity of the displacement in the first direction of the two piezoelectric elements is different from the acceleration or velocity of the displacement in the second direction opposite to the first direction, and the displacement directions of the two piezoelectric elements are mutually different. A piezoelectric actuator comprising a drive circuit for supplying a drive signal in the opposite direction to the piezoelectric element.
前記圧電素子は屈曲変形をすることを特徴とする請求項1または2に記載の圧電アクチュエータ。   The piezoelectric actuator according to claim 1, wherein the piezoelectric element is bent and deformed. 前記圧電素子はせん断変形することを特徴とする請求項1または2に記載の圧電アクチュエータ。   The piezoelectric actuator according to claim 1, wherein the piezoelectric element undergoes shear deformation. 前記圧電素子の変位量を規制する規制部材が設けられていることを特徴とする請求項1から4のいずれか一項に記載の圧電アクチュエータ。   The piezoelectric actuator according to any one of claims 1 to 4, further comprising a regulating member that regulates a displacement amount of the piezoelectric element. 前記回転体に設けられたカムと、前記カムの動きに連動し直動動作する移動体を有
することを特徴とする請求項1から5のいずれか一項に記載の圧電アクチュエータ。
6. The piezoelectric actuator according to claim 1, further comprising: a cam provided on the rotating body; and a moving body that linearly moves in conjunction with the movement of the cam.
請求項1から6のいずれか一項に記載の圧電アクチュエータを備えた電子機器。   The electronic device provided with the piezoelectric actuator as described in any one of Claim 1 to 6.
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