JP4126826B2 - Angular velocity sensor - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention has a mass part having a weight part that can be driven and vibrated in a predetermined direction, and a detection part that is disposed opposite to the mass part with an interval, and acts on the mass part when an angular velocity occurs. The present invention relates to an angular velocity sensor in which an interval between opposing portions of a mass portion and a detection portion is changed by Coriolis force, and an angular velocity is detected based on a change amount of the interval.
[0002]
[Prior art]
Such an angular velocity sensor is generally shown in FIG. This includes a frame portion J1, a weight portion (vibrator) J3 connected to the frame portion J1 via two first beams J2, and a comb electrode J4 formed on the outer periphery of the frame portion J1. And a comb-shaped detection electrode J7 as a detection unit that protrudes from the base J6 and is opposed to the comb-shaped electrode J4. In addition, the mass part J5 is connected to the base part J6 via two second beams J8. Such a sensor can be generally manufactured by processing an SOI substrate by a known micromachine technique.
[0003]
In FIG. 2, first, the weight portion J3 having a mass m is driven to vibrate at a speed v in the X direction by the spring force of the first beam J2 by an excitation mechanism (not shown) using electrostatic force or electromagnetic force. . When an angular velocity Ω is applied to the entire sensor under the vibration of the velocity v, a force of Fc = 2 mvΩ, that is, a Coriolis force Fc acts on the weight portion J3 in the Y direction (a direction orthogonal to the drive vibration). Then, by this Coriolis force Fc, the entire mass portion J5 is displaced in the Y direction by an amount proportional to the Coriolis force due to the balance between the spring constant of the second beam J8 and the Coriolis force. By detecting this amount of displacement as the amount of change in the distance between the electrodes J4 and J7, that is, the change in capacitance between the two electrodes, the angular velocity can be detected.
[0004]
[Problems to be solved by the invention]
Incidentally, in FIG. 2, when an acceleration having a component in the Y direction or the Y direction (referred to as external acceleration) is applied, the weight portion J3 is moved in the Y direction even though no angular velocity is applied to the weight portion J3. The displacement causes the capacitance between the electrodes J4 and J7 to change, and a signal is output as if the angular velocity is applied. Thus, an error occurs in the sensor output due to the influence of the external acceleration.
[0005]
In order to prevent this phenomenon, conventionally, as shown in FIG. 3, two mass parts J5 each having a weight part (vibrator) J3 are provided, and each of the weight parts J3 is driven to vibrate in the opposite phases at the same frequency. (Velocity v in FIG. 3), and a method of canceling the external acceleration component applied to each using a differential circuit is generally used.
[0006]
However, when the method shown in FIG. 3 is adopted, two weight parts (vibrators) and two driving means (excitation mechanisms) for driving the weight parts are required, and coupled vibration is generated by the two mass parts J5. In order to assemble the system and always vibrate at the same frequency, it is necessary to provide a coupled beam J9 and connect the weight portions J3 to each other. For this reason, there is a problem that the sensor adopting this method has a complicated structure and increases the physique (chip size) of the sensor due to an increase in the number of components.
[0007]
In view of the above problems, an object of the present invention is to provide an angular velocity sensor that can detect the Coriolis force caused by the angular velocity without being influenced by external acceleration without increasing the size of the physique.
[0008]
[Means for Solving the Problems]
In the conventional angular velocity sensor as shown in FIGS. 2 and 3, the present invention has a structure in which the detection unit is fixed to an external force. Therefore, when external acceleration is applied, the mass unit is a movable structure. This is done by paying attention to the fact that only the influence of external acceleration (displacement due to external acceleration) occurs.
[0009]
First, in the first aspect of the present invention, a mass part (20) having a weight part (22) capable of being driven to vibrate in a predetermined direction, and a detection part (30) disposed opposite to the mass part with an interval therebetween. And when the angular velocity is generated during the drive vibration of the weight portion, the distance between the facing portion of the mass portion and the detection portion is changed by the Coriolis force acting on the mass portion. In the angular velocity sensor configured to detect the angular velocity, the detection unit is connected to the base (10) via the electrode beam (35), and when the external acceleration is applied by the electrode beam , the detection unit is operated by the Coriolis force. It is characterized in that it can be displaced in the same direction as the mass portion in the direction of the action.
[0010]
As a result, even when external acceleration is applied, the detection unit (30) is displaced in the same direction as the mass unit (20) in the direction in which the Coriolis force acts. The effect of acceleration is not added. Therefore, unlike the conventional case, there is no need to form a coupled vibration system with two mass parts. Therefore, according to the present invention, it is possible to provide an angular velocity sensor that can detect the Coriolis force caused by the angular velocity without being influenced by external acceleration without increasing the size of the physique.
[0011]
Further, according to the present invention, the mass portion (20) having the weight portion (22) capable of being driven to vibrate in a predetermined direction and the mass portion are opposed to the base portion (10) with an interval therebetween. In the angular velocity sensor that detects the angular velocity based on the amount of change in the facing distance between the mass portion and the detection portion that is changed by the Coriolis force when the angular velocity is generated, the arranged detection portion (30) is connected. Are connected to the substrate by a first beam portion (25) and a second beam portion (35) that can be elastically expanded and contracted in the direction in which the Coriolis force acts, and are configured by a mass portion and a first beam portion. And the vibration system constituted by the detection section and the second beam section have the same resonance frequency in the direction of Coriolis force action.
[0012]
Thus, as in the first aspect of the invention, when external acceleration is applied, the detection portion (30) is displaced in the same manner as the mass portion (20) in the direction in which the Coriolis force acts. The effect of external acceleration is not added to the amount of change in the interval at the section. Therefore, unlike the conventional case, there is no need to form a coupled vibration system with two mass parts. Therefore, according to the present invention, an angular velocity sensor having the same effect as that of the first aspect of the invention can be provided.
[0013]
Here, in the angular velocity sensor of claim 2, as in the invention of claim 3, the mass of the detection part (30) is m1, the spring constant of the second beam part (35) is k1, and the mass part (20). Is m2 and the spring constant of the first beam part (25) is k2, the relationship between these parameters can be expressed as k1 = k2 · m1 / m2.
[0014]
In addition, the code | symbol in the bracket | parenthesis of each said means is an example which shows a corresponding relationship with the specific means as described in embodiment mentioned later.
[0015]
DETAILED DESCRIPTION OF THE INVENTION
DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments shown in the drawings will be described below. FIG. 1 is a plan view showing an embodiment of an angular velocity sensor 100 of the present invention applied to an application for detecting angular velocity, such as a gyro sensor. The angular velocity sensor 100 forms a groove by etching or the like on a semiconductor substrate such as a silicon substrate, and roughly includes a rectangular frame-like base portion 10 positioned at the peripheral edge of the substrate and a frame in the base portion 10. It is divided into the mass part 20 and the detection part 30 which are located.
[0016]
The angular velocity sensor 100 uses, for example, an SOI (silicon on insulator) substrate in which both silicon substrates are bonded via an oxide film, one of the two silicon substrates is used as a support substrate, and the other silicon substrate and the oxide film are used. Then, by applying a well-known micromachining technique such as trench etching or sacrificial layer etching, the above-described portions 10 to 30 are formed on the other silicon substrate.
[0017]
The mass portion 20 includes a rectangular frame-shaped frame portion 21, a rectangular weight portion 22 located in the frame portion 21, and two rectangular frame-shaped vibrating beams 23 that connect the frame portion 21 and the weight portion 22. And. The vibrating beam 23 has an elastic function capable of expanding and contracting in the X direction shown in the drawing, and the vibrating beam 23 allows the weight portion 22 to vibrate (drive vibration) in the X direction with respect to the frame portion 21. . In addition, comb-like comb-teeth electrodes (mass part electrodes) 24 that protrude from the frame part 21 are formed on the sides of the outer periphery of the frame part 21 that face in the X direction.
[0018]
Further, the frame portion 21 is connected to the base portion 10 via a rectangular frame-shaped detection beam (first beam portion in the present invention) 25 on the outer periphery of the side facing in the Y direction. The detection beam 25 has an elastic function capable of expanding and contracting in the Y direction shown in the figure, and the weight portion 22 and the frame portion 21, that is, the mass portion 20 vibrate in the Y direction (detection vibration). It is possible.
[0019]
Two detection units 30 are provided on both sides of the mass unit 20 in the X direction (left-right direction in the drawing). Each detection unit 30 includes a rectangular electrode weight 31 as a mass part in the detection unit, and a comb-shaped detection electrode 32 protruding from the electrode weight 31 on the outer periphery of the electrode weight 31. Here, the detection electrode 32 and the comb-tooth electrode 24 in the detection unit 30 are arranged to face each other with a gap in the Y direction so as to mesh with each other in the gap between the comb teeth.
[0020]
Further, the electrode weight 31 is connected to the base 10 via a rectangular frame-shaped electrode beam (second beam portion in the present invention) 35 on the outer periphery of the side facing in the Y direction. The electrode beam 35 has an elastic function capable of expanding and contracting in the Y direction shown in the drawing, and the electrode weight 31 (detection unit 30) can vibrate in the Y direction by the electrode beam 35.
[0021]
Further, the angular velocity sensor 100 has an excitation mechanism (not shown) using electrostatic force, electromagnetic force, or the like as drive means for driving and vibrating the weight portion 22 in the X direction. The angular velocity is detected in a state where the weight portion 22 is driven to vibrate by the excitation mechanism. When the weight portion 22 in the mass portion 20 is driven and vibrated in the X direction by the elastic force (spring force) of the vibrating beam 23 and the driving force of the excitation mechanism, the angular velocity Ω is about the vertical axis in FIG. When generated, Coriolis force acts on the weight portion 22 in the Y direction.
[0022]
Then, due to the balance between the Coriolis force and the spring force of the detection beam 25, the entire mass unit 20 is displaced in the Y direction, and the interval between the facing portions of the comb electrode 24 and the detection electrode 32 facing in the Y direction changes. . The angular velocity Ω is detected by detecting the amount of change in the distance as a capacitance change between the electrodes 24 and 32 via a wiring portion (not shown) formed in the base 10.
[0023]
Thus, in the angular velocity sensor 100, the mass unit 20 and the detection unit 30 can be vibrated in the Y direction by the spring functions of the detection beam 25 and the electrode beam 35, respectively. A vibration system (mass part vibration system) configured by the mass unit 20 and the detection beam 25 and a vibration system (detection unit vibration system) configured by the detection unit 30 and the electrode beam 35 are arranged in the Y direction or the Y direction. When an acceleration having a component (external acceleration) is applied, the mass unit 20 and the detection unit 30 are similarly displaced in the Y direction.
[0024]
As a result, even when external acceleration is applied, the detection unit 30 is displaced in the same manner as the mass unit 20 in the Y direction in which the Coriolis force acts. The effect of external acceleration is not added to the amount of change in the distance between the opposite portions. Therefore, unlike the conventional case, it is not necessary to form a coupled vibration system with two mass parts, without increasing the physique of the sensor, and without being affected by external acceleration, the Coriolis force caused by the angular velocity substantially. Only can be detected.
[0025]
Next, specific means for the mass part vibration system and the detection part vibration system for similarly displacing the mass unit 20 and the detection unit 30 in the Y direction when external acceleration is applied will be described. First, considering that the displacement due to the external acceleration is the same between the mass unit 20 and the detection unit 30, the following is obtained.
[0026]
The mass of the electrode weight 31 is m1, the spring constant of the electrode beam (second beam portion) 35 is k1, the mass of the weight portion 22 and the frame portion 21 is m2, and the spring constant of the detection beam (first beam portion) 25 is Let k2. Since the mass of the detection electrode 32 and the mass of the comb electrode 24 are small enough to be substantially negligible with respect to the mass m1 and the mass m2, respectively, the mass m1 and the mass m2 are the mass of the detection unit in the present invention. This corresponds to the mass of the mass part referred to in the present invention. In this case, when the external acceleration G is applied, the force F1 applied to the mass m1 and the force F2 applied to the m2 are respectively expressed by the following formula 1.
[0027]
[Expression 1]
F1 = G1 · m1
F2 = G2 · m2
Assuming that the displacement amount of the electrode weight 31 due to the forces F1 and F2 is A1, and the displacement amounts of the weight portion 22 and the frame portion 21 are A2, these displacement amounts A1 and A2 are respectively expressed by the following Equation 2.
[0028]
[Expression 2]
A1 = F1 / k1
A2 = F2 / k2
Since it is necessary to determine k1 and k2 so that these displacement amounts are the same by the force due to the external acceleration, when A1 = A2, the relationship shown in the following Equation 3 is derived.
[0029]
[Equation 3]
k1 = k2 · m1 / m2 (this is the relational expression 1)
By determining the spring constants of the beams 25 and 35 as in the relational expression 1, the mass unit 20 and the detection unit 30 can be similarly displaced in the Y direction when an external acceleration is applied, and the external acceleration is Can be canceled.
[0030]
In addition, even when the resonance frequency in the Y direction (direction of action of the Coriolis force) is the same in the mass part vibration system and the detection part vibration system, the mass part 20 and the detection part 30 are connected to each other when the external acceleration is applied. It can be similarly displaced in the direction, and the external acceleration can be canceled.
[0031]
Considering the aspect of matching the resonance frequencies, the configuration of both the vibration systems can be realized as follows. Hereinafter, the mass m1 of the electrode weight 31, the spring constant k1 of the electrode beam 35, the mass m2 of the weight portion 22 and the frame portion 21, and the spring constant k2 of the detection beam 25 are the same as described above.
[0032]
Here, when ω1 is the resonance frequency of the electrode weight 31 (corresponding to the resonance frequency of the detection unit vibration system) and ω2 is the resonance frequency of the weight part 22 and the frame part 21 (corresponding to the resonance frequency of the mass part vibration system), Resonance frequencies ω1 and ω2 are respectively expressed by the following Equation 4.
[0033]
[Expression 4]
ω1 = (k1 / m1) ^1/2
ω2 = (k2 / m2) ^1/2
Here, in order to make both resonance frequencies ω1 and ω2 coincide with each other, assuming that ω1 = ω2, the same relation as the relational expression 1 is obtained as shown in the following mathematical expression 5.
[0034]
[Equation 5]
k1 = k2 · m1 / m2
As described above, the base 10, the mass portion 20 having the weight portion 22 and the comb-tooth electrode (mass-portion electrode) 24, and the detection electrode 32 arranged to face the comb-tooth electrode 24 with a space therebetween are provided. In the angular velocity sensor that detects the angular velocity based on the change amount by changing the facing distance between the electrodes 24 and 32 by the Coriolis force acting on the mass portion 20 when the angular velocity is generated during the drive vibration of the portion 22. An electrode weight 31 as a mass part is integrated with the detection electrode 32, the electrode weight 31 is connected to the base 10 by an electrode beam 35, and the masses m1 and m2 and the spring constants k1 and k2 are expressed by the above relational expression 1. With such a relationship, an angular velocity sensor that meets the object of the present invention can be provided.
[0035]
(Other embodiments)
In addition, the shape of the mass part electrode and the detection electrode for detecting the capacitance change by the change in the facing interval is not limited to the comb-like shape. Moreover, in the said embodiment, when external acceleration was added using the beams 25 and 35, the detection part 30 and the mass part 20 were displaced similarly to each other, but it is not limited to a beam, A spring member having a spring function may be used.
[Brief description of the drawings]
FIG. 1 is a plan view showing an embodiment of an angular velocity sensor of the present invention.
FIG. 2 is a plan view showing a conventional angular velocity sensor.
FIG. 3 is a plan view showing a conventional angular velocity sensor employing a coupled vibration system.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 ... Base part, 20 ... Mass part, 22 ... Weight part, 25 ... Detection beam, 30 ... Detection part, 35 ... Electrode beam.

Claims (3)

A mass portion (20) having a weight portion (22) capable of being driven to vibrate in a predetermined direction, and a detection portion (30) disposed opposite to the mass portion with an interval;
When an angular velocity is generated during the drive vibration of the weight portion, the interval between the opposing portions of the mass portion and the detection portion is changed by the Coriolis force acting on the mass portion, and the angular velocity is based on the change amount. In the angular velocity sensor adapted to detect
The detector is connected to the base (10) via the electrode beam (35),
The angular velocity sensor according to claim 1, wherein when the external acceleration is applied by the electrode beam, the detection unit can be displaced in the direction of the Coriolis force in the same manner as the mass unit. A base (10);
A mass part (20) having a weight part (22) coupled to the base part and capable of driving vibration in a predetermined direction;
A detection unit (30) connected to the base unit and disposed opposite to the mass unit with an interval;
When an angular velocity is generated during the drive vibration of the weight portion, the interval between the opposing portions of the mass portion and the detection portion is changed by the Coriolis force acting on the mass portion, and the angular velocity is based on the change amount. In the angular velocity sensor adapted to detect
The mass part is connected to the base by a first beam part (25) that can be elastically expanded and contracted in the direction of action of the Coriolis force, and the detection part can be elastically expanded and contracted in the direction of action of the Coriolis force. Connected to the base by a second beam portion (35),
The vibration system constituted by the mass part and the first beam part and the vibration system constituted by the detection part and the second beam part have the same resonance frequency in the acting direction of the Coriolis force. An angular velocity sensor characterized by The mass of the detection part (30) is m1, the spring constant of the second beam part (35) is k1, the mass of the mass part (20) is m2, and the spring constant of the first beam part (25) is When k2
k1 = k2 · m1 / m2
The angular velocity sensor according to claim 2, wherein:

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