JP4184222B2 - Gas discharge panel and gas light emitting device - Google Patents

Description

  The present invention relates to a gas discharge tube such as a gas discharge panel and a gas light emitting device, and more particularly to a high-definition plasma display panel.

  In recent years, expectations for high-definition and large-screen televisions such as high-definition television are increasing, and CRT, liquid crystal display (hereinafter referred to as LCD), plasma display panel (hereinafter referred to as PDP). In the field of each display, development of a display suitable for this is underway.

  CRTs that have been widely used as television displays have been excellent in terms of resolution and image quality, but are not suitable for large screens of 40 inches or more in that the depth and weight increase with the size of the screen. is there. LCDs have excellent performance such as low power consumption and low driving voltage, but there are technical difficulties in producing a large screen, and the viewing angle is limited.

On the other hand, the PDP can realize a large screen even with a small depth, and a 50-inch class product has already been developed.
PDPs are roughly classified into a direct current type (DC type) and an alternating current type (AC type). At present, the AC type suitable for increasing the size is the mainstream.
In a general AC surface discharge type PDP, a front cover plate and a back plate are arranged in parallel via a partition, and a discharge gas is enclosed in a discharge space partitioned by the partition. A display electrode is disposed on the front cover plate, and is covered with a dielectric layer made of lead glass. On the back plate, an address electrode and a barrier rib, and red, green, or blue UV-excited fluorescence. And a phosphor layer made of a body.

  As the composition of the discharge gas, a mixed gas system of helium [He] and xenon [Xe] or a mixed gas system of neon [Ne] and xenon [Xe] is generally used. In consideration of suppressing the voltage to 250 V or less, it is usually set in the range of about 100 to 500 Torr (for example, M. Nobrio, T. Yoshioka, Y. Sanano, K. Nunomura, SID94 'Digest 727-730). 1994).

The light emission principle of a PDP is basically the same as that of a fluorescent lamp. When a glow discharge is generated by applying it to an electrode, ultraviolet rays are generated from Xe, and the phosphor is excited to emit light, but the discharge energy is converted into ultraviolet rays. Since the efficiency and the efficiency of conversion to visible light in the phosphor are low, it is difficult to obtain a high luminance like a fluorescent lamp.
In this regard, Applied Physics Vol. 51, no. 3 1982, pages 344 to 347 show that only about 2% of electric energy is used for ultraviolet radiation in He-Xe, Ne-Xe gas composition PDPs, and finally used for visible light. Is about 0.2% (Optical Technology Contact Vol. 34, No. 1 1996, page 25, FLAT PANEL DISPLAY 96 'Part 5-3, NHK Technology Research Vol. 31, No. 1, Showa 54 Year page 18).

Under such a background, there is a demand for a technique for improving the light emission efficiency to realize high luminance and reducing the discharge voltage in a discharge panel such as a PDP.
Such a request also exists from the display market. For example, in the current PDP for a 40-42 inch class television, in the case of NTSC pixel level (640 pixels × 480 pixels, cell pitch 0.43 mm × 1.29 mm, 1 cell area 0.55 mm ² ), Panel efficiency and screen brightness of about 1.2 lm / w and 400 cd / m ² have been obtained (for example, FLAT-PANEL DISPLAY 1997 Part5-1 P198).

On the other hand, in a full-spec 42-inch class high-definition television expected in recent years, the number of pixels is 1920 × 1125 and the cell pitch is 0.15 mm × 0.48 mm. In this case, the area of one cell is 0.072 mm ² , which is 1/7 to 1/8 as compared with the case of NTSC. Therefore, when a 42-inch high-definition television PDP is created with a conventional cell configuration, the panel efficiency is 0.15 to 0.17 lm / w and the screen brightness is reduced to about 50 to 60 cd / m ^2. Is expected to.

Therefore, in a 42-inch high-definition television PDP, if the brightness (500 cd / m ² ) comparable to the current NTSC CRT is to be obtained, the efficiency will be increased by 10 times or more (5 lm / w or more). (For example, see “Flat Panel Display 1997, Part 5-1, page 200”).
In order to obtain good image quality in the PDP, it is also important to adjust the white balance by improving not only the luminance but also the color purity.

Various studies and inventions have been made on the problems of improving luminous efficiency and color purity.
For example, as an attempt to devise the composition of the discharge gas, Japanese Patent Publication No. 5-51133 describes an invention using a mixed gas of three components of argon (Ar) -neon (Ne) -xenon (Xe). .

By adding argon in this way, it is possible to reduce the emission of visible light from neon and improve the color purity, but it cannot be expected much about the improvement of the luminous efficiency.
Japanese Patent No. 2616538 describes using a mixed gas of three components of helium (He) -neon (Ne) -xenon (Xe).

The luminous efficiency obtained thereby is improved as compared with the case of two-component gases such as helium (He) -xenon (Xe) and neon (Ne) -xenon (Xe), but is about 1 lm / w at the pixel level of NTSC. Therefore, a technique that can further improve the luminous efficiency is desired.
The present invention has been made based on such a background, and in a gas discharge panel such as a PDP, the panel luminance and the conversion efficiency of the discharge energy into visible light are improved and the color purity is good. The main purpose is to provide a device capable of obtaining a sufficient light emission.

In order to achieve the above object, according to the present invention, in the gas discharge panel, the sealing pressure of the gas medium is set to 800 to 4000 Torr, which is higher than before.
The main reason why the luminous efficiency is improved by this configuration is as follows.
In the conventional PDP, the gas medium sealing pressure is usually less than 500 Torr, and the ultraviolet rays generated by the discharge are mostly resonance lines (center wavelength 147 nm).

On the other hand, when the enclosure pressure is high as described above (that is, when the number of atoms enclosed in the discharge space is large), the ratio of molecular beams (center wavelengths 154 nm and 173 nm) increases. Here, since the resonance line has self-absorption, the molecular beam hardly has self-absorption, so that the amount of ultraviolet rays irradiated to the phosphor layer increases, and the luminance and the light emission efficiency are improved.
In addition, in ordinary phosphors, the conversion efficiency from ultraviolet rays to visible light tends to be larger on the long wavelength side, which can be said to be a reason for improving luminance and light emission efficiency.

  By the way, in a gas discharge panel, neon (Ne) or xenon (Xe) is generally included in a gas medium, but when the sealing pressure is relatively low, color purity is deteriorated by visible light from neon (Ne). On the other hand, when the filled gas pressure is high as in the present invention, visible light from neon (Ne) is almost absorbed inside the plasma, and is not easily released to the outside. Accordingly, the color purity is improved as compared with the conventional PDP.

  Further, in the conventional PDP, the discharge form is the first type glow discharge. However, when it is set to a high pressure of 800 to 4000 Torr as in the present invention, it is considered that the line glow discharge or the second type glow discharge is likely to occur. . Accordingly, this increases the electron density in the positive column of the discharge, and energy is supplied in a concentrated manner, so that it can be said that the amount of ultraviolet light emission increases.

Furthermore, since the sealing pressure exceeds atmospheric pressure (760 Torr), there is an effect that impurities in the atmosphere are prevented from entering the PDP.
Note that the characteristics described in the embodiments can be seen in the ranges of 800 to 4000 Torr of the sealing pressure, in the ranges of 800 Torr to less than 1000 Torr, 1000 Torr to less than 1400 Torr, 1400 Torr to less than 2000 Torr, and 2000 Torr to 4000 Torr.

Further, if the gas medium to be sealed is changed to a conventional gas composition such as neon-xenon or helium-xenon, and a quaternary rare gas mixture composed of helium, neon, xenon, and argon is used as the gas medium, the amount of xenon Can obtain high luminance and high luminous efficiency even in a relatively small amount. That is, a PDP having a low discharge voltage and high luminous efficiency can be obtained.
Here, it is preferable that the argon content is 0.5 volume% or less and the helium content is less than 55 volume% in order to reduce the discharge voltage.

If such a quaternary gas medium is sealed at a high pressure of 800 Torr to 4000 Torr, it is particularly effective to improve luminance and luminous efficiency while suppressing an increase in discharge voltage.
In addition, in the case of a panel configuration in which the display electrode and the address electrode are arranged to face each other across the discharge space, if the sealing pressure is set to a high pressure, the voltage at the time of addressing tends to increase. If the address electrode is laminated on the surface of either the front cover plate or the back plate via a dielectric layer, addressing can be performed at a relatively low voltage even when the sealing pressure is high. .

As described above, in the gas discharge panel according to the present invention, the gas medium sealing pressure is set in a range of 800 to 4000 Torr (each range of the above regions 1 to 4), which is higher than the conventional one, thereby emitting light more than before. Efficiency and panel brightness can be improved.
Further, the gas medium to be sealed is a mixture of rare gases containing helium, neon, xenon, and argon, instead of the conventional gas composition, and preferably the Ar content is 0.5 volume% or less and the He content is By setting it to less than 55% by volume, the light emission efficiency can be improved and the discharge voltage can be lowered. In addition, if the display electrode and the address electrode are stacked on the surface of either the front cover plate or the back plate via a dielectric layer, the addressing can be performed at a relatively low voltage even when the sealing pressure is high. It can be performed.

The present invention as described above is effective for power saving of the gas discharge panel, and particularly effective for improving the luminance and saving power of the high-definition PDP.
In addition to gas discharge panels, it is effective for improving the luminance and saving labor of general gas discharge tubes including gas light emitting devices such as fluorescent lamps.

Embodiments of the present invention will be described below.
(Embodiment 1)
(Overall structure and manufacturing method of PDP)
FIG. 1 is a perspective view showing an outline of an AC surface discharge type PDP according to the present embodiment.

  This PDP includes a front panel 10 in which display electrodes (discharge electrodes) 12a and 12b, a dielectric layer 13 and a protective layer 14 are arranged on a front glass substrate 11, and an address electrode 22 and a dielectric on a rear glass substrate 21. The rear panel 20 on which the layer 23 is arranged is configured to be arranged in parallel with each other with a gap in the state where the display electrodes 12a, 12b and the address electrode 22 face each other. The gap between the front panel 10 and the rear panel 20 is partitioned by a stripe-shaped partition wall 30 to form a discharge space 30, and a discharge gas is sealed in the discharge space 40.

In the discharge space 40, a phosphor layer 31 is disposed on the back panel 20 side. The phosphor layer 31 is repeatedly arranged in the order of red, green, and blue.
The display electrodes 12 a and 12 b and the address electrode 22 are both striped silver electrodes. The display electrodes 12 a and 12 b are arranged in a direction perpendicular to the partition walls 30, and the address electrodes 22 are arranged in parallel to the partition walls 30.

The display electrode 12a, 12b and the address electrode 22 intersect with each other so that a cell that emits red, green, and blue light is formed.
The dielectric layer 13 is a layer made of lead glass or the like having a thickness of about 20 μm disposed so as to cover the entire surface of the front glass substrate 11 on which the display electrodes 12a and 12b are disposed.
The protective layer 14 is a thin layer made of magnesium oxide (MgO) and covers the entire surface of the dielectric layer 13.

The partition wall 30 protrudes from the surface of the dielectric layer 23 of the back panel 20.
When this PDP is driven, a pulse voltage is applied between the display electrodes 12a and 12b after applying address discharge between the display electrode 12a and the address electrode 22 of the cell to be lit using a drive circuit. Then, ultraviolet light is emitted by performing a sustain discharge, and light is emitted by converting this into visible light by the phosphor layer 31.

The PDP having such a configuration is manufactured as follows.
Front panel fabrication:
The front panel 10 forms display electrodes 12 a and 12 b on a front glass substrate 11, forms a dielectric layer 13 by applying and baking lead-based glass thereon, and further forms a dielectric layer 13 on the surface of the dielectric layer 13. The protective layer 14 is formed and fine irregularities are formed on the surface thereof.

The display electrodes 12a and 12b are formed by a method in which a silver electrode paste is screen-printed and fired.
The composition of the lead-based dielectric layer 13 is 70% by weight of lead oxide [PbO], 15% by weight of boron oxide [B ₂ O ₃ ], and 15% by weight of silicon oxide [SiO ₂ ], and is a screen printing method. And formed by firing. Specifically, it is formed by applying a composition formed by mixing an organic binder [10% ethyl cellulose dissolved in α-terpineol] by screen printing, followed by baking at 580 ° for 10 minutes, The film thickness was set to 20 μm.

  The protective layer 14 is made of an alkaline earth oxide (magnesium oxide [MgO] in this case), and is a (100) or (110) oriented dense crystal structure film on its surface. It has a structure with fine irregularities. In the present embodiment, such a protective layer made of (100) or (110) oriented MgO is formed by CVD (thermal CVD, plasma CVD), and then formed on this surface. Unevenness is formed using a plasma etching method. In addition, the formation method of the protective layer 14 and the uneven | corrugated formation method to the surface are explained in full detail later.

Back panel fabrication:
An address electrode 22 is formed on the rear glass substrate 21 by screen printing a silver electrode paste and then firing, and then the lead electrode glass is screen-printed and fired on the same as in the case of the front panel 10. A dielectric layer 23 is formed. Next, glass partition walls 30 are fixed at a predetermined pitch. A phosphor layer 31 is formed by applying and baking one of a red phosphor, a green phosphor, and a blue phosphor in each space sandwiched between the barrier ribs 30. As the phosphors of the respective colors, phosphors generally used for PDP can be used, but the following phosphors are used here.

Red phosphor: (Y _x Gd _1-x ) BO ₃ : Eu ³⁺
Green phosphor: BaAl ₁₂ O ₁₉ : Mn
Blue phosphor: BaMgAl ₁₄ O ₂₃ : Eu ²⁺
Production of PDP by panel bonding:
Next, the front panel and the rear panel thus manufactured are bonded together using sealing glass, and the discharge space 30 partitioned by the partition walls 30 is exhausted to a high vacuum (8 × 10 ⁻⁷ Torr). Then, a PDP is manufactured by enclosing a discharge gas having a predetermined composition at a predetermined pressure.

(Discharge gas pressure and composition)
The charging pressure of the discharge gas is set in a range higher than the conventional general sealing pressure and in a range of 800 to 4000 Torr exceeding the atmospheric pressure (760 Torr). Thereby, the luminance and the light emission efficiency can be improved as compared with the conventional case.
In this embodiment, in order to enclose the discharge gas at a high pressure, not only the outer peripheral portions of the front panel and the rear panel but also the sealing glass is applied on the partition wall 30 at the time of panel bonding. (For details, see Japanese Patent Application No. 9-344636). As a result, a PDP that can sufficiently withstand gas filling at a high pressure of about 4000 Torr can be manufactured.

  As the discharge gas to be sealed, helium (He), neon (Ne), xenon is used instead of the conventional helium-xenon or neon-xenon gas composition in order to improve luminous efficiency and lower discharge voltage. It is desirable to use a mixture of rare gases containing (Xe) and argon (Ar). Here, the argon content is preferably 0.5% by volume or less and the helium content is preferably less than 55% by volume. As a specific example of the gas composition, He (30%)-Ne (67.9%) ) -Xe (2%)-Ar (0.1%) (% in the gas composition formula represents volume%, and so on).

As will be described in detail later, the setting of the discharge gas composition and the setting of the sealing pressure both contribute to the light emission efficiency and the panel brightness of the PDP. By combining the setting, the light emission efficiency and the panel luminance can be greatly improved while suppressing an increase in the discharge voltage as compared with the conventional case.
In addition, when the sealing pressure is normal pressure or less (about 500 Torr or less in the past), the color purity is likely to be reduced due to the emission of visible light from neon (Ne), but when the sealing pressure becomes a high pressure of 800 Torr or more, Even if visible light is generated from neon (Ne), it is almost absorbed inside the plasma and is therefore hardly emitted to the outside. Therefore, color purity can be improved as compared with the case where the sealing pressure is normal pressure or less (about 500 Torr or less).

Further, if the enclosed pressure exceeds atmospheric pressure, impurities in the atmosphere are prevented from entering the discharge space 30.
In the present embodiment, the cell size of the PDP is set to a cell pitch of 0.2 mm or less and an inter-electrode distance d between the display electrodes 12a and 12b is set to 0.1 mm or less so as to be compatible with a 40-inch class high-definition television.

The upper limit value of 4000 Torr for the sealing pressure is set in consideration of keeping the discharge voltage within a practical range.
(About the method of forming the MgO protective layer and the method of forming irregularities on the surface)
FIG. 2 is a schematic view of a CVD apparatus used when forming the protective layers 14 and 24. This CVD apparatus can perform both thermal CVD and plasma CVD. The apparatus main body 45 includes a glass substrate 47 (display electrodes and dielectric layers 13 on the glass substrate 11 in FIG. 1). A heater portion 46 for heating the formed body) is provided, and the inside of the apparatus main body 45 can be depressurized by an exhaust device 49. A high frequency power supply 48 for generating plasma is installed in the apparatus main body 45.

  The Ar gas cylinders 41 a and 41 b supply argon [Ar] gas as a carrier to the apparatus main body 45 via vaporizers (bubblers) 42 and 43. The vaporizer 42 heats and stores a metal chelate that is a raw material (source) of MgO, and blows Ar gas from an Ar gas cylinder 41a, whereby the metal chelate can be evaporated and sent to the apparatus main body 45. ing.

The vaporizer 43 heats and stores a cyclopentadienyl compound, which is a raw material (source) of MgO, and blows Ar gas from an Ar gas cylinder 41b to evaporate the cyclopentadienyl compound and send it to the apparatus main body 45. Be able to.
Specific examples of source supplied from the vaporizer 42 and the carburetor 43, Magnesium Dipivaloyl Methane [Mg (C 11 H 19 O 2) 2], Magnesium Acetylacetone [Mg (C 5 H 7 O 2) 2], Cyclopentadienyl Magnesium [Mg (C ₅ H ₅ ) ₂ ] and Magnesium Trifluoroacetylacetone [Mg (C ₅ H ₅ F ₃ O ₂ ) ₂ ].

The oxygen cylinder 44 supplies oxygen [O2], which is a reaction gas, to the apparatus main body 45.
When performing thermal CVD:
A glass substrate 47 is placed on the heater unit 46 with the dielectric layer facing up, heated to a predetermined temperature (350 to 400 ° C.), and the reaction vessel is evacuated to a predetermined pressure by the exhaust device 49.

Then, the alkaline earth metal chelate or cyclopentadienyl compound serving as a source is heated to a predetermined temperature (refer to the column of “vaporizer temperature” in each table below) in the vaporizer 42 or the vaporizer 43. However, Ar gas is fed from the Ar gas cylinder 41a or 41b. At the same time, oxygen is supplied from the oxygen cylinder 44.
As a result, the metal chelate or cyclopentadienyl compound fed into the apparatus main body 45 reacts with oxygen, and an MgO protective layer is formed on the surface of the dielectric layer of the glass substrate 47.

When performing the plasma CVD method Although it is performed in substantially the same manner as in the case of the thermal CVD, the heating temperature of the glass substrate 47 by the heater unit 46 is set to about 250 to 300 ° C. and heated to 10 Torr using the exhaust device 49. The MgO protective layer is formed while generating plasma in the apparatus body 45 by driving the high-frequency power supply 48 and applying a high-frequency electric field of 13.56 MHz, for example.

Thus, the MgO protective layer formed by the thermal CVD method or the plasma CVD method has a (100) plane or (110) plane orientation when the crystal structure is examined by X-ray analysis. On the other hand, the MgO protective layer formed by the conventional vacuum deposition method (EB method) has a (111) plane orientation when the crystal structure is examined by X-ray analysis.
In the formation of the MgO protective layer by the CVD method, which of (100) plane orientation and (110) plane orientation is formed can be adjusted by controlling the flow rate of oxygen as a reaction gas.

Next, the formation of irregularities on the protective layer by the plasma etching method will be described.
FIG. 3 is a schematic view of a plasma etching apparatus for forming fine pyramidal irregularities on the MgO protective layer.
In the device main body 52, there is a substrate 53 on which a protective layer made of MgO is formed (that is, the display electrodes 12a and 12b, the dielectric layer 13 and the protective layer 14 formed on the glass substrate 11 in FIG. 1). The inside of the device main body 52 can be decompressed by the exhaust device 56, and Ar gas can be supplied from the Ar gas cylinder 51. The apparatus body 52 is provided with a high frequency power source 54 for generating plasma and a bias power source 55 for irradiating the generated ions.

Using this plasma etching apparatus, first, the inside of the reaction vessel is depressurized by the exhaust device 56 (0.001 to 0.1 Torr), and Ar gas is fed from an Ar gas cylinder.
The high frequency power supply 54 is driven to generate an argon plasma by applying a high frequency electric field of 13.56 MHz. Then, the surface of the MgO protective layer is sputtered by driving the bias power supply 55 and applying (−200 V) to the substrate 53 and irradiating with Ar ions for 10 minutes.

By this sputtering, pyramidal irregularities can be formed on the surface of the MgO protective layer.
In addition, the dimension of the unevenness formed on the surface can be controlled by adjusting the sputtering time, the applied voltage, and the like. In forming the irregularities, it is considered appropriate that the surface roughness is about 30 nm to 100 nm.

It can be confirmed with a scanning electron microscope that the unevenness formed on the surface by sputtering in this way is a pyramid shape.
The protective layer subjected to such treatment has the following features and effects. (1) Since the MgO protective layer has a (100) plane or (110) plane orientation, the secondary electron emission coefficient (γ value) is large. Therefore, it contributes to the reduction of the driving voltage of the PDP and the improvement of the panel brightness.

(2) Since the surface of the MgO protective layer has a pyramidal concavo-convex structure, an electric field concentrates on the top of the projection during discharge, and many electrons are emitted from this top. Therefore, the line glow and the second type glow discharge are easily generated, and such a discharge can be stably generated.
In addition, when the line glow discharge or the second type glow discharge is stably generated, a high plasma density may be obtained locally as compared with the conventional case where the first type glow discharge is generated. Therefore, it is considered that a large amount of ultraviolet rays (mainly wavelength 173 nm) is generated in the discharge space, and high panel luminance can be obtained.

(Explanation about the form of glow discharge)
Here, the line glow discharge and the second type glow discharge will be described.
“Linear glow discharge” and “second-type glow discharge” are described as follows in the discharge handbook (published on June 1, 1991, P138).
Kekez, Barrart, Craggs et al. Phys. D. Appl. Phys. , Vol. 13, p. In 1886 (1970), the discharge state has shifted to flashover, Townsend discharge, first type glow discharge, second type glow discharge, and arc discharge. ]
FIG. 4 is a graph showing the current waveform of the transient glow and arc transition published in this paper.

The first type glow discharge corresponds to a normal glow discharge, and the second type glow discharge corresponds to a period when discharge energy is being supplied to the positive column intensively.
In FIG. 4, the first type glow discharge is a period from ta to tc when the current value is slightly low and stable, and the second type glow discharge is a period from td to te. The filament glow discharge is a period from tc to td when the first type glow discharge is changed to the second type glow discharge. Then, arc discharge starts from the second type glow discharge.

In this way, the first type glow discharge is stable, whereas the linear glow discharge and the second type glow discharge are considered to have a high possibility of transition to arc discharge because the current is unstable. Transition to arc discharge is not desirable because the discharge gas is thermally ionized with heat generation.
By the way, the discharge in the PDP is conventionally performed by the first type glow discharge, but in the present embodiment, the filament glow discharge or the second type glow discharge can be generated relatively stably. Conceivable. As a result, it is expected that the electron density in the positive column of the discharge can be increased, energy can be supplied intensively, and the amount of ultraviolet light emitted can be increased.

(Relationship between enclosed pressure in discharge gas and luminous efficiency)
The reason why the luminous efficiency is improved by setting the discharge gas sealing pressure in the range of 800 to 4000 Torr, which is higher than the conventional one.
First, since it is considered that setting the sealing pressure high is advantageous for generating the discharge form such as the above-mentioned linear glow discharge or the second type glow discharge, this point is the reason for the increase in the amount of ultraviolet light emission. It can be mentioned as one.

Next, as will be described below, the wavelength of ultraviolet rays can be shifted to the longer wavelength side (154 nm and 173 nm).
The PDP's ultraviolet light emission mechanism is roughly classified into two types: a resonance line and a molecular beam. In the past, since the discharge pressure of the discharge gas was less than 500 Torr, the ultraviolet emission from Xe was mainly 147 nm (resonance line of Xe atoms). However, by setting the enclosure pressure to 760 Torr or more, the ultraviolet light emission is longer. The ratio of a certain 173 nm (excitation wavelength by the molecular beam of Xe molecule) increases. And the ratio of the molecular beam of wavelength 154nm and 173nm can be enlarged rather than the resonance line of wavelength 147nm.

FIG. 5 is a characteristic diagram showing how the relationship between the wavelength of emitted ultraviolet light and the amount of light emission changes when the sealed gas pressure is changed in a PDP using a He—Xe-based discharge gas. Therefore, it is described in “O Plus E No. 195, 1996, P. 98”.
In this figure, the peak areas at a wavelength of 147 nm (resonance line) and a wavelength of 173 nm (molecular beam) in the graph represent the amount of light emission. Therefore, the relative light emission amount of each wavelength can be known from the peak area of such a graph.

At a pressure of 100 Torr, the light emission amount at a wavelength of 147 nm (resonance line) occupies most, but as the pressure is increased, the proportion of the light emission amount at a wavelength of 173 nm (molecular beam) increases. The amount of emitted light is larger than the amount of emitted light at a wavelength of 147 nm (resonance line).
As the wavelength of the ultraviolet light shifts to the long wavelength side as described above, the effects of (1) an increase in the amount of emitted ultraviolet light and (2) an improvement in the conversion efficiency of the phosphor are obtained. Each will be described below.
(1) Increasing the amount of ultraviolet light emission FIG. 6 illustrates the energy order of Xe and various reaction paths.

The resonance line is emitted when electrons in the atom move from one energy level to another energy level, and in the case of Xe, 147 nm ultraviolet rays are mainly emitted.
However, the resonance line has a phenomenon called induced absorption, and a part of the emitted ultraviolet light is absorbed by Xe in the ground state. These phenomena are generally called self-absorption.
On the other hand, in the molecular beam, as shown in FIG. 6, ultraviolet rays are emitted when two excited atoms approach a certain distance or less, and the two atoms return to the ground state. For this reason, absorption is hardly seen.

In order to confirm these qualitatively, the following simple theoretical calculations were performed and compared with the experimental results.
First, when the generation amount (V147) of the resonance line is assumed to be an electron density ne and an atom density n0,
V147 = a · ne · n0,
The amount of absorption (Vabs) is expressed as follows, where the absorption coefficient is b (usually about 10 ⁻⁶ ) and the plasma length is l.
Vabs = exp (−b · n · l).

On the other hand, since Xe atoms in an excited state are generated close to each other in the molecular beam, the generation amount (V173) is V173 = C · n ⁴ + d · n ^{3 to} C · n ⁴ . Molecular beams have little absorption, but considering geometrical physical scattering,
V173 = C · n ⁴ −n ^2/3
Therefore, the total UV amount V is
V = a · ne · n0−c · exp (−b · n · l) + C · n ⁴ −n ^2/3 Here, a, b, and c are arbitrary constants.

The calculated values of the resonance line, molecular beam, and total ultraviolet ray with respect to changes in the discharge gas pressure are shown in the graph of FIG. In FIG. 7, the horizontal axis is an arbitrary axis, but it can be seen that a gas pressure of a certain level or more is necessary in order to sufficiently obtain the molecular beam effect.
In addition, using Ne (95%)-Xe (5%) normally used in PDP as the discharge gas, and examining the ultraviolet output against the gas pressure in a vacuum chamber experiment, the experimental result is shown in FIG. As indicated by the ● mark, the characteristics were close to the theoretical predictions described above.

(2) Improvement of phosphor conversion efficiency FIGS. 8A, 8B and 8C are characteristic diagrams showing the relationship between the excitation wavelength and the relative radiation efficiency for each color phosphor. No. 195, 1996, P. 99 ".
From FIG. 8, it can be seen that the phosphor of any color has a larger relative radiation efficiency at the long wavelength 173 nm than at the wavelength 147 nm.

Therefore, if the wavelength of ultraviolet light is shifted from 147 nm (Xe resonance line) to 173 nm (molecular beam of Xe atoms) of long wavelength and the ratio of long wavelength increases, the luminous efficiency of the phosphor tends to increase. It can be said.
(Relationship between sealing pressure, luminous efficiency and discharge voltage)
The following consideration can be made from the trend of change in total ultraviolet rays in FIG.

When the gas pressure is in the range of 400 to 1000 Torr, the ultraviolet output increases as the gas pressure is increased, but becomes saturated near 1000 Torr, and the increase in the ultraviolet output is almost eliminated.
When the gas pressure is further increased, the ultraviolet output increases again from around 1400 Torr, and continues to increase until it exceeds 2000 Torr.

When the gas pressure is further increased from this region, there is a region in which the increase in the ultraviolet output becomes somewhat gentle, which is considered to be due to the effect of the physical scattering term and the like. Although not shown in FIG. 7, as expected from the above theoretical formula, the ultraviolet light output increases as the gas pressure is further increased beyond this region.
Based on the above consideration, the preferable range (800 to 4000 Torr) of the discharge gas filling pressure is further set to 800 to 1000 Torr (region 1), 1000 to 1400 Torr (region 2), 1400 to 2000 Torr (region 3), 2000 to 2000. The area was divided into four areas of 4000 Torr (area 4).

The value of 800 Torr is theoretically effective when it exceeds 760 Torr, but is set to this value from an industrial point of view in consideration of the manufacturing conditions such as the temperature during encapsulation being higher than room temperature.
Regarding these four regions, it can be considered as follows.
Considering only the amount of UV output, of course, the highest pressure region 4 is considered to be the best.

  On the other hand, in the PDP, the discharge start voltage Vf can be expressed as a function of the product of the sealing pressure P and the interelectrode distance d [Pd product] and is called Paschen's law (Electronic Display Device, Ohm Corporation). , 1984, see P113-114). When the gas pressure increases, the Pd product increases and the discharge voltage tends to increase. Here, if the interelectrode distance is set to be small, the Pd product can be suppressed. However, as the interelectrode distance d is reduced, a more advanced dielectric insulation technique is required.

Therefore, it is considered that the technical difficulty increases in the order of the regions 1, 2, 3, and 4.
For example, in FIG. 7, in the PDP corresponding to A in the figure, the discharge start voltage is 200V, but in the PDP corresponding to B in the figure, the discharge start voltage is 450V.
As a result, the PDP corresponding to the region 1 has a discharge start voltage of about 250 V or less and can use the dielectric insulation technology of the conventional PDP and the withstand voltage technology of the driver circuit. In this case, an advanced technique is required to set the inter-electrode distance d to be considerably small, and it is considered that the cost increases.
(Discharge Gas Composition, Luminous Efficiency, and Discharge Voltage) As described above, the discharge gas composition is a mixture of rare gases including helium (He), neon (Ne), xenon (Xe), and argon (Ar). Used, the argon content is set to 0.5 volume% or less and the helium content is set to less than 55 volume%, so that a relatively low discharge start voltage (250 V or less, desirably 220 V or less) even when sealed at high pressure. ).

That is, by using a gas having such a composition, the gas having a composition such as Ne (95%)-Xe (5%) or He (95%)-Xe (5%) is used. The discharge start voltage can be greatly reduced.
Hereinafter, this point will be described in more detail based on experiments.
(Experiment 1: Preliminary experiment on discharge gas composition)
Based on the PDP of this embodiment, various discharge gas compositions shown in the table of FIG. 9 were set, and the Pd product was changed to various values, and discharge start voltages were measured.

The Pd product was set by setting the electrode interval d to 20, 40, 60, and 120 μm and changing the gas pressure P within a range of 100 Torr to 2500 Torr.
Here, when a small Pd product is set, a relatively small electrode interval d is mainly used (for example, when the Pd product is 1 to 4, the electrode interval d is set to 20 μm and the pressure P is set to about 500 to 2000 Torr). In the case of setting a relatively large Pd product, the value of each Pd product was set by mainly using a relatively large electrode distance d (60, 120 μm).

The graph of FIG. 9 shows the results of this experiment, and shows the relationship between the Pd product and the discharge start voltage.
Further, the table in FIG. 9 shows measured values of brightness (around a discharge voltage of 250 V) for a PDP having a Pd product of about 4 (filling pressure is 2000 Torr) using each composition gas.
Results and discussion;
From the table of FIG. 9, the He—Xe system and the He—Ne—Xe system have higher brightness than the Ne—Xe system (particularly, the He—Ne—Xe system has higher brightness) and have the effect of increasing the electron temperature. It is considered that containing He is effective for improving the luminance.

Further, from the graph of FIG. 9, the He—Xe system (marked by ▲) tends to have a higher discharge start voltage than the Ne—Xe system (marked by ◆), and is a practically desirable discharge start voltage region (220 V or less). You can see that it is not in.
On the other hand, in the graph of FIG. 9, the gas in which 0.1% of Ar is added to the Ne—Xe system (marked by ○) is more effective than the He—Xe system, Ne—Xe system, and He—Ne—Xe system. Thus, it can be seen that the discharge start voltage is lowered, and the graph passes through the desired use region where the discharge start voltage is 220 V or less and the Pd product is 3 or more.

However, the discharge start voltage is not so low in the gas (marked by ■) where 0.5% of Ar is added to the Ne—Xe system. From this, it can be seen that it is preferable to add a relatively small amount (0.5% or less) of Ar in order to lower the discharge start voltage.
In FIG. 9, the preferable range of use is a range where the Pd product is 3 or more. Currently, it is difficult to set the distance between the electrodes to be smaller than 10 μm. It is desirable to do.

As described above, when He is mixed with the Ne—Xe system, the light emission efficiency is improved, but the discharge start voltage tends to be increased. By further mixing Ar, the discharge voltage is lowered and the light emission efficiency is equal to or higher. There is a possibility. Here, it can be inferred that a relatively small amount of Ar is good.
In this experiment, the Pd product was set by changing the gas pressure P within the range of 100 Torr to 2500 Torr. However, even if the gas pressure P was set within the range of 2500 Torr to 4000 Torr, the same result as the graph of FIG. Is obtained.

Further, it is known that in the range where the Xe content is low (a range of about 10% or less), the amount of Xe and the light emission efficiency are in a substantially proportional relationship. It has been experimentally confirmed that if the amount of Xe is changed, the luminous efficiency changes accordingly.
(Experiment 2: Comparison of He—Ne—Xe—Ar gas and Ne—Xe gas)
In the PDP of the above embodiment, He (30%)-Ne (67.9%)-Xe (2%)-Ar (0.1%) (referred to as "discharge gas A") is used as the discharge gas. For the case where it is used and the case where Ne (95%)-Xe (5%) (described as “discharge gas Z”) is used, a product in which the Pd product is changed to various values is prepared. The discharge start voltage was measured.

The setting of the Pd product was performed by setting the electrode distance d to 20, 40, 60, and 120 μm and changing the gas pressure P within the range of 100 Torr to 2500 Torr as in Experiment 1 above.
FIG. 10 is a graph showing the relationship between the Pd product and the discharge start voltage as a result of this experiment.

From this graph, it can be seen that in the case of the discharge gas Z, if the Pd product is reduced from about 12 to about 4, the discharge start voltage can be reduced by about 130V from 450V to 320V.
On the other hand, in the case of the discharge gas A, even with the same Pd product 12, the discharge start voltage can be reduced by about 130 V compared to the discharge gas Z, and if the Pd product is reduced from 12 to 4, the discharge start voltage is further about 90 V. It can be seen that it can be reduced.

Therefore, when the discharge gas A is used, even when the sealing pressure is set high, the discharge voltage can be lowered to a practical level without reducing the interelectrode distance d so much.
In addition, when using the discharge gas A, it was confirmed by a separate comparative experiment of luminous efficiency that it is possible to achieve the same luminance even at a considerably lower voltage than when the discharge gas Z was used. In the case of using the discharge gas A, the luminous efficiency about 1.5 times that in the case of using the discharge gas Z was obtained.

  Such an effect of the discharge gas A is considered to be obtained by combining the improvement of the light emission efficiency by containing He described in Experiment 1 and the reduction of the discharge voltage by adding a small amount of Ar. . As a result of this experiment, a mixed gas of He—Ne—Xe—Ar system is used as the discharge gas, and it is preferable that the Ar content is set to 0.5% by volume or less to improve luminous efficiency and discharge voltage. It is effective for reduction.

In this experiment, the Pd product was set by changing the gas pressure P within the range of 100 Torr to 2500 Torr. However, even when the gas pressure P was set within the range of 2500 Torr to 4000 Torr, the same result as the graph of FIG. Is obtained.
(Experiment 3: He—Ne—Xe gas and He—Ne—Xe—Ar gas)
In the PDP of the above embodiment (interelectrode distance d = 40 μm), He (50%)-Ne (48%)-Xe (2%), He (50%)-Ne (48%)- Xe (2%)-Ar (0.1%), He (30%)-Ne (68%)-Xe (2%), He (30%)-Ne (67.9%)-Xe (2%) ) -Ar (0.1%) various composition gases were used to produce PDPs having various Pd products. And about each produced PDP, the brightness | luminance and the discharge start voltage were measured.

The table in FIG. 11 shows the measured brightness value (discharge voltage 250 V) for a PDP having a Pd product of 4 (filling pressure is 2000 Torr) using each composition gas.
The brightness measurement values shown in the table of FIG. 11 are considerably higher than the brightness measurement values of He—Xe, Ne—Xe, and Ne—Xe—Ar gases shown in the table of FIG. It shows a high value. Thus, it can be seen that using a He—Ne—Xe gas and a He—Ne—Xe—Ar gas is effective in improving luminance.
FIG. 11 shows the measurement result of the discharge start voltage, and is a graph showing the relationship between the Pd product and the discharge start voltage for each composition gas.

From these graphs and tables, it can be seen that the discharge gas with a small amount of Ar added has a lower discharge start voltage and the luminance is slightly improved as compared with the He-Ne-Xe-based discharge gas. .
In particular, when a gas of He (30%)-Ne (67.9%)-Xe (2%)-Ar (0.1%) is used, the luminance is relatively good and the Pd product is 3 to 3. If it is set to a range of about 6 (Torr · cm) (for example, the distance between electrodes d = 60 μm, the sealing pressure is 1000 Torr), the discharge start voltage can be put into a practically desirable discharge start voltage region (220 V or less). I understand.

In the case of this gas composition, the discharge start voltage shows a minimum value in the vicinity of the Pd product 4, and the Pd product is set to 4 (for example, when the sealing pressure is 2000 Torr, the distance between electrodes d = 20 μm). It is understood that is desirable.
In this experiment, the Xe amount in each composition gas was set to 2%. However, when the Xe amount is set to another value of 10% or less, the absolute value of the discharge start voltage changes. However, the same tendency as the graph shown in FIG. 11 is obtained.

In this experiment, the He content was set to 50% or less. However, in such a He—Ne—Xe—Ar based discharge gas, when the He content was set to 55% by volume or more, the discharge voltage was reduced. A separate experiment has shown that it tends to be quite high.
Therefore, in order to keep the discharge voltage low, it can be said that the content of He is preferably specified to be less than 55% by volume.

(Experiment 4: Experiment of Ar amount in He—Ne—Xe—Ar gas)
In order to investigate the optimum amount of argon in the four mixed gases, X = 0.01,0 in He (30%)-Ne ((68-X)%)-Xe (2%)-Ar (X%). Experiments were conducted to measure the discharge starting voltage and the luminous efficiency when changing to .05, 0.1, 0.5, and 1.
The luminous efficiency is measured by measuring the sustaining voltage Vm applied from the drive circuit to the panel and the current I flowing at that time, and then measuring the luminance L with a luminance meter (the luminance measurement area at that time is S). ) And the luminous efficiency η was obtained by the following formula 1.

η = π · S · L / Vm · I (1)
FIG. 12 shows an example of the result, and is a graph when the sealing pressure is set to 2000 Torr.
From this figure, the luminous efficiency is almost constant when the amount of Ar is 0.1% or less, but when the amount of Ar is in the range of 0.1% to 0.5%, the luminous efficiency increases as the amount of Ar increases. It can be seen that when it gradually decreases and exceeds 0.5%, it rapidly decreases as the amount of Ar increases.

On the other hand, the discharge start voltage has a minimum value when the amount of Ar is 0.1%, and in the range of 0.1% to 0.5%, the light emission efficiency gradually increases as the amount of Ar increases. It can be seen that when it exceeds 0.5%, it rapidly increases as the amount of Ar increases.
Therefore, it can be seen that the amount of Ar added is preferably 0.5% or less. Although the case where the amount of He and the amount of Xe are changed is not shown, the results similar to those in the graph of FIG. 12 are obtained although the light emission efficiency and the absolute value of the discharge start voltage are changed. Further, when the sealing pressure is set near normal pressure, the same result as in the graph of FIG. 12 is obtained.

(Embodiment 2)
FIG. 13 is a schematic cross-sectional view of an AC surface discharge type PDP according to the present embodiment.
This PDP is the same as the PDP in the first embodiment. In the first embodiment, the display electrodes are provided on the front panel side and the address electrodes are provided on the rear panel side. The difference is that the address electrode 61 and the display electrodes 63a and 63b are provided on the front panel side via the first dielectric layer 62.

In FIG. 13, for the sake of convenience, the pair of display electrodes 63a and 63b is shown in cross section, but actually, the pair of display electrodes 63a and 63b intersects with the address electrode 61 and the partition wall 30 as in FIG. In the direction.
In this PDP, the front panel 10 is manufactured as follows.
The front panel 10 is produced by forming the address electrode 61 on the front glass substrate 11 and forming the first dielectric layer 62 on the lead electrode using lead glass. Then, the display electrodes 63a and 63b are formed on the surface of the first dielectric layer 62, and the second dielectric layer 64 is formed thereon using lead-based glass. Then, the protective layer 65 made of MgO can be formed on the surface of the second dielectric layer 64.

The materials and formation methods of the address electrode 61, the display electrodes 63a and 63b, the dielectric layers 62 and 64, and the protective layer 65 are the same as those described in the first embodiment, and the protective layer 65 is also used in this embodiment. It is desirable to form irregularities on the surface of the substrate by plasma etching.
Also in the present embodiment, the same effect as described in the first embodiment can be obtained by setting the composition of the discharge gas and the sealing pressure in the same manner as in the first embodiment.

Further, in the present embodiment, since the address electrode 61 and the display electrodes 63a and 63b are provided on the front panel side via the first dielectric layer 62, even if the discharge gas sealing pressure is high, the low address Addressing can be performed with voltage.
That is, when the discharge space is interposed between the address electrode and the display electrode as in the first embodiment, Paschen's law is applied to the address discharge. Here, if the distance between the address electrode and the display electrode is reduced, it is considered that stable address discharge is possible even at a low address voltage. However, since it cannot be reduced so much in practice, in order to perform stable address discharge. The address voltage must be increased as the discharge gas sealing pressure is set higher.

On the other hand, in the PDP of the present embodiment, since no discharge space is interposed between the address electrode 61 and the display electrodes 63a and 63b, a low address voltage can be obtained even if the discharge gas sealing pressure is set high. Can perform stable addressing.
FIG. 14 is a schematic cross-sectional view of another AC surface discharge type PDP according to the present embodiment.
In the PDP of FIG. 13, the address electrode 61 and the display electrodes 63a and 63b are provided on the front panel 10 side through the first dielectric layer 62. However, in the PDP of FIG. And display electrodes 73 a and 73 b are provided on the back panel 20 side through the first dielectric layer 72.

  The back panel 20 is manufactured by forming the address electrode 71 on the back glass substrate 21 and forming the first dielectric layer 72 using lead glass on the address electrode 71. Then, display electrodes 73a and 73b are formed on the surface of the first dielectric layer 72, and a second dielectric layer 74 is formed thereon using lead-based glass. Then, the protective layer 75 made of MgO can be formed on the surface of the second dielectric layer 74.

This PDP has the same effect as the PDP in FIG.
In addition, since the address electrode 71 and the display electrodes 73a and 73b are provided on the rear panel side of the PDP, visible light generated in the discharge space is extracted to the front without being obstructed by the electrodes. In this respect, it is advantageous for improving the luminance as compared with the PDP of FIG.

  (Experiment 5)

No. in Table 1 The PDPs 1 to 6 are examples produced based on the first and second embodiments. The PDPs 1 to 4 are manufactured based on FIG. 5 is produced based on FIG. 14 of the second embodiment. The PDP 6 is manufactured based on the first embodiment.
The cell size of the PDP is set such that the partition wall height is set to 0.08 mm, the partition wall interval (cell pitch) is set to 0.15 mm, and the distance d between the display electrodes is set to 0.1 mm in accordance with a 42-inch high-definition television display. Set to 05 mm.

The dielectric layer is composed of 70% by weight of lead oxide [PbO], 15% by weight of boron oxide [B ₂ O ₃ ] and 15% by weight of silicon oxide [SiO ₂ ], and 10% ethyl cellulose in an organic binder [α-terpineol. The composition formed by mixing with the dissolved one was applied by screen printing and then baked at 580 ° for 10 minutes, and the film thickness was set to 20 μm.
The protective layer was formed by plasma CVD. As a result of X-ray diffraction of the crystal plane of the formed MgO protective layer, the (100) plane or (110) plane orientation was obtained.

The composition of the discharge gas to be sealed is He (30%)-Ne (67.9%)-Xe (2%)-Ar (0.1%), and as shown in the column of sealed pressure in Table 1, 500 Encapsulated at a pressure in the range of ~ 200 Torr.
No. produced in this way. For 1 to 6 PDPs, panel brightness and stable address voltage were measured.

The stable address voltage was determined by observing the state of the image while changing the address voltage, measuring the minimum address voltage necessary for obtaining a stable image, and setting this as the stable address voltage.
Table 1 shows the measurement results of the panel brightness and the stable address voltage.
Results and discussion:
No. Comparing the luminance between 1 and 4, it can be seen that the luminance increases as the encapsulation voltage increases to 100 Torr and 2000 Torr compared to the one with the encapsulation pressure equal to or lower than normal pressure.

No. Comparing the stable address voltage between 1 and 4, it was slightly increased as the sealing pressure increased. The stable address voltages of 1 to 5 are No. It can be seen that the value is considerably lower than the stable address voltage of 6.
This indicates that the configuration of the PDP of the second embodiment is effective for keeping the address voltage low even when the sealing pressure is high.

No. 3 and no. When the luminance is compared with No. 5, It can be seen that 5 indicates a slightly higher luminance value.
(Other matters)
The present invention is not limited to the PDP of the above embodiment, but can be applied to general PDPs and gas discharge panels.

For example, the protective layer is not limited to the CVD method as described above, and may be formed by a vacuum deposition method. Further, the glass substrate, the dielectric layer, the phosphor material, and the method for forming the protective layer are not limited to those described above. Further, the material of the protective layer is not limited to MgO alone, but may be MgO added with Ba, Sr, hydrocarbon (CH) or the like.
In the above embodiment, an example is shown in which the phosphor layer is provided only on the rear panel side. However, the luminance can be further improved by providing the phosphor layer also on the front panel side.

Further, if the phosphor material for forming the phosphor layer is coated with a protective layer made of MgO with a thickness of several tens of nanometers, it is possible to further improve the luminance and the luminous efficiency.
Moreover, in the said embodiment, although the example in which a pair of display electrode is arrange | positioned in parallel on the surface of either one of a front glass substrate and a back glass substrate was shown, on a front glass substrate and a back glass substrate The same can be applied to the PDP in which the display electrodes are disposed facing each other.

Moreover, in the said embodiment, although the partition 30 was fixed on the back glass substrate 21 and the example which comprises a back panel was shown, it can apply widely also to the thing etc. with which the partition was attached to the front panel side. .
Further, the composition of the discharge gas is not limited to the Ne—Xe, He—Ne—Xe, He—Ne—Xe—Ar, and the like, and the krypton-xenon discharge gas (for example, Kr (90% ) -Xe (10%)) or a krypton-neon-xenon-based discharge gas, a high luminance and high luminous efficiency can be expected even when the sealing pressure is set to 800 to 4000 Torr.

Further, the present invention is not limited to a gas discharge panel, and a discharge space in which an electrode and a phosphor layer are disposed and a gas medium is enclosed is formed in a container, and ultraviolet light is emitted along with discharge to emit the fluorescence. The present invention can also be applied to a gas discharge device that emits light by converting it into visible light in the body layer.
For example, the present invention can be applied to a fluorescent lamp in which a discharge gas is sealed in a cylindrical glass container having a phosphor layer formed on the inner surface, and has the composition described in the above embodiment. By using a discharge gas, a product having high luminance, high luminous efficiency, and low discharge voltage can be obtained, and an excellent effect can be expected particularly by sealing at a sealing pressure in the range of 800 to 4000 Torr.

1 is a schematic cross-sectional view of a counter alternating current discharge type PDP according to Embodiment 1. FIG. It is the schematic of the CVD apparatus used when forming the protective layer of the said PDP. It is the schematic of the plasma etching apparatus which forms a pyramid-shaped fine unevenness | corrugation in a MgO protective layer. It is a graph which shows the current waveform of a transient glow and an arc transition. It is a characteristic view which shows the relationship between the wavelength of an ultraviolet-ray when a sealing gas pressure is changed, and light emission amount. The energy ranking of Xe and various reaction paths are illustrated. It is a characteristic view which shows the relationship between discharge gas pressure, a resonance line, a molecular beam, and total ultraviolet rays. It is a characteristic view which shows the relationship between an excitation wavelength and relative radiation efficiency about each color fluorescent substance. 5 is a graph and a chart showing the results of Experiment 1. 10 is a graph showing the results of Experiment 2. 6 is a graph and a chart showing the results of Experiment 3. 10 is a graph showing the results of Experiment 4. 6 is a schematic cross-sectional view of an AC surface discharge type PDP according to Embodiment 2. FIG. 6 is a schematic cross-sectional view of an AC surface discharge type PDP according to Embodiment 2. FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Front panel 11 Front glass substrate 12a, 12b Display electrode 13,23 Dielectric layer 14,24 Protective layer 20 Rear panel 21 Rear glass substrate 22 Address electrode 30 Partition 31 Phosphor layer 40 Discharge space 61 Address electrode 62, 64 Dielectric Layer 63a, 63b Display electrode 65 Protection layer 71 Address electrode 72, 74 Dielectric layer 73a, 73b Display electrode 75 Protection layer

Claims (2)

A discharge space in which a gas medium is sealed is formed between a pair of plates arranged opposite to each other, and an electrode and a phosphor layer are arranged on at least one of the opposed surfaces of the pair of plates. A gas discharge panel that emits ultraviolet light and emits light by converting it into visible light in the phosphor layer,
The electrode is
At least part of which is covered with a dielectric layer,
The dielectric layer is
The crystal structure is formed by thermal chemical vapor deposition or plasma chemical vapor deposition and oriented in the (100) plane or (110) plane, and the surface is covered with a magnesium oxide film having pyramidal irregularities ,
The sealing pressure of the gas medium is
A gas discharge panel having a pressure of 800 Torr or more and 4000 Torr or less . A gas discharge panel according to claim 1 ;
A display device comprising a drive circuit for driving the discharge panel by applying a voltage to the electrodes.

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