JP4167204B2 - Fluid coupling and integrated unit integrated unit - Google Patents

Description

  The present invention is a tank that is used for taking in and out a plurality of fluids in and out of a tank, for example, by enclosing and pressurizing air or N2 gas inside a tank filled with liquid and sending the liquid to a use point. The present invention relates to a fluid coupling and a joint-integrated integrated unit attached to an opening of the joint.

  In factories that manufacture semiconductors and liquid crystals, chemical solutions are supplied to multiple devices from a single chemical supply source using branch piping. When supplying a chemical solution to one of the A devices, the pressure and flow rate in the line fluctuate depending on the usage status of other devices, even if it is attempted to control the supply of the chemical solution with the same pressure from the factory. The flow rate and pressure of the chemical supplied to the device are not constant. Therefore, conventionally, a tank for storing a chemical solution is installed in each apparatus, and a chemical solution supplied from a factory is once stored in the tank and then sent to a use point at a predetermined pressure and flow rate. Supply from the tank to the use point is performed by gas pressurization or pump suction.

FIG. 14 is a conceptual diagram showing a liquid supply adjustment system using a tank. FIG. 15 is an external perspective view showing a tank equipped with a fluid coupling. The tank 100 is provided with a lid 101 at its opening, and fluid couplings 201, 202, 203, and 204 are formed projecting therefrom. And four lines are connected to the fluid coupling 201-204. The liquid supply line 110 is for supplying a chemical solution into the tank 100, and an on-off valve 111 is provided in the middle. The gas supply line 120 is for supplying a gas for pressurizing the chemical solution, and is provided with a pressure reducing valve 121, a pressure gauge 122, and an on-off valve 123. The gas exhaust line 130 is for exhausting the gas in the tank 100, and an on-off valve 131 is piped on the way. The fourth discharge line 140 extends to the bottom in the tank 100, and the chemical solution is connected to the use point outside the tank 100.
Japanese Utility Model Publication No. 5-57588

  By the way, the conventional fluid coupling 201-204 which connects the four lines 110-140 and the tank 100 is attached to the lid | cover 101 of a tank opening part for each line 110-140. Therefore, since the conventional fluid couplings 201 to 204 have a large number of assemblies with respect to the tank 100, the risk of leakage of liquid or gas is high. And when welding was used for the assembly, processing cost was high.

In the case of the conventional example shown in FIGS. 14 and 15, on-off valves 111, 123, 131 are piped on lines 110, 120, 130 configured by connecting pipes to fluid couplings 201-204, and on line 120. In addition, a pressure reducing valve 121 and a pressure gauge 122 are piped. Therefore, the circuit portion around the tank 100 becomes complicated, and maintenance is difficult.
Furthermore, it is necessary to use, for example, tetrafluoroethylene resin (PTFE, PFA) depending on the chemicals to be handled. However, if four fluid couplings 201 to 204 are to be attached to the lid 101, it is difficult to manufacture complicated shapes. However, the tetrafluoroethylene resin, which is relatively expensive, makes the tank 100 expensive.

  SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a fluid coupling and a joint-integrated integrated unit with a simplified configuration that are used for taking in and out a plurality of fluids in and out of a tank in order to solve such problems.

The fluid coupling according to the present invention is attached to an opening of a tank to allow a plurality of fluids to be taken in and out of the tank, and connects a plurality of fluid lines inside and outside the tank. The block body can be fixed to the block body, and a plurality of flow paths that connect the inside and the outside of the tank are formed in the block body.
The fluid coupling according to the present invention includes a cylindrical insertion portion that can be inserted in an airtight manner by holding a sealing member in the cylindrical opening of the tank in the block body, and a lateral groove formed in an annular shape above the insertion portion. The lock nut hooked in the lateral groove is screwed to the outside of the opening of the tank and is attached to the tank.

  On the other hand, the joint-integrated integrated unit of the present invention is attached to an opening of a tank to allow a plurality of fluids to be taken in and out of the tank, and connects a plurality of fluid lines inside and outside the tank, A fluid coupling formed with a plurality of flow paths connecting the inside and the outside of the tank to a block body that can be secured to the opening of the tank, and fixed to the outside opening of each flow path formed in the fluid coupling, The fluid device connected to the fluid line is provided integrally.

Further, in the joint integrated type unit of the present invention, the fluid coupling has a liquid flow path for supplying liquid into the tank, a gas supply flow path opened to the outside of the tank, and a gas exhaust flow path opened in the tank. A fluid device connected to the gas supply / exhaust channel is formed, and fluid devices fixed to the liquid tank, the gas supply channel, and the tank outside opening of the gas exhaust channel of the fluid coupling are open / close valves. It is characterized by that.
Further, in the joint integrated type unit of the present invention, the fluid coupling has a liquid flow path for supplying liquid into the tank, a gas supply flow path opened to the outside of the tank, and a gas exhaust flow path opened in the tank. A flow path connected to the gas supply / exhaust flow path, and a discharge flow path connected to a pipe inserted into the tank to discharge the liquid in the tank to the outside, a liquid flow path of the fluid coupling, The fluid devices fixed to the openings outside the tank of the gas supply channel and the gas exhaust channel are on-off valves.

Further, the joint-integrated integrated unit of the present invention is characterized in that the discharge channel and the gas supply / exhaust channel are formed in a double manner.
The joint-integrated integrated unit of the present invention includes a lock nut that is screwed into the fluid joint, and a ferrule that includes a wedge portion that is joined to a taper formed on the inner peripheral surface of the fluid joint. It is characterized by being clamped by the fluid coupling via.

Therefore, the present invention has a configuration in which a plurality of flow paths that connect the inside and the outside of the tank are formed in a block body that can be fixed to the opening of the tank. Thus, it is possible to provide a fluid coupling having a simplified configuration that can be taken in and out.
In addition, the present invention has a configuration in which an insertion portion is inserted into the block body in the cylindrical opening of the tank, and a lock nut hooked in the lateral groove is screwed outside the opening of the tank and attached to the tank. Became very simple.

  The present invention also provides a fluid coupling in which a plurality of flow paths connecting the inside and the outside of a tank are formed in a block body that can be fixed to the opening of the tank, and an outer opening of each flow path formed in the fluid coupling. Since the fluid device fixed to the fluid line and connected to the fluid line are integrated, the fluid device on the line is integrated and the circuit around the tank can be simplified.

In addition, since the present invention has a double configuration of the discharge flow channel and the gas supply / exhaust flow channel, it is possible to reduce the flow channel configuration, the number of processing, and the like, and to reduce the size and the cost.
Further, according to the present invention, when the lock nut is tightened into the fluid coupling through the ferrule, the ferrule is pushed into the fluid coupling and bites into the pipe, so that the pipe can be prevented from coming off and the airtightness in the tank is secured. be able to.

Next, an embodiment of a fluid coupling and a joint-integrated integrated unit according to the present invention will be described below with reference to the drawings. FIG. 1 is an external perspective view showing a tank equipped with a fluid coupling and a joint-integrated integrated unit according to the first embodiment. The tank 1 has an opening 2 at the upper end and a discharge port 3 that connects the line to the use point at the bottom. A joint integrated type integrated unit 10 having a fluid joint 11 as a base block is attached to the opening 2 as shown in the figure. The fluid coupling 11 is a block in which a flow path for performing chemical supply, gas supply, and gas exhaust is formed, and is fixed to the opening 2 by a lock nut 4. Then, on-off valves 12, 13, and 14 are integrally fixed to the fluid coupling 11 as a fluid device to constitute a joint integrated type integrated unit 10. Here, FIG. 4 is a block diagram showing a state in which a fluid line is connected to the tank 1 via the joint-integrated integrated unit 10.

  A fluid coupling 11 indicated by a broken line is attached to the opening 2 of the tank 1, and a liquid supply flow path 15 for supplying a chemical solution into the tank 1 and a chemical solution in the tank 1 are pumped to the fluid coupling 11. The gas supply / exhaust flow path 16 is formed by branching the gas supply flow path 16a for supplying air and N2 gas and the gas exhaust flow path 16b for exhausting air and N2 gas in the tank 1 to the outside. Yes. Then, on-off valves 12, 13, 14 are connected to the flow paths 15, 16 a, 16 b formed in the fluid coupling 11 to constitute a joint integrated type integrated unit 10. In the joint integrated unit 10, a liquid supply line 110 is connected to the on-off valve 12, a gas supply line 120 is connected to the on-off valve 13, and a gas exhaust line 130 is connected to the on-off valve 14 as in the conventional example. Yes. The gas supply line 120 is provided with a pressure reducing valve 121 and a pressure gauge 122.

  Next, FIG. 2 and FIG. 3 are the AA sectional view and the BB sectional view of FIG. 1 showing the fluid coupling 11 and the joint-integrated integrated unit 10 in detail. The fluid coupling 11 is a prismatic block as shown in FIG. 1, and as shown in FIG. 2, a columnar insertion portion 11a that can be inserted into the cylindrical opening 2 of the tank 1 and a taper 11b. An annular lateral groove 11c through which the lock nut 4 is hooked is formed. In such a fluid coupling 11, the lock nut 4 is fitted in the lateral groove 11 c, and the insertion portion 11 a holding the O-ring is inserted in the opening 2. The lock nut 4 is screwed into a male screw formed outside the opening 2 and the insertion portion 11a of the fluid coupling 11 is pushed into the opening 2 in an airtight manner by tightening.

  As shown in FIG. 2, the fluid coupling 11 is formed with a vertical hole in which a liquid supply channel 15 and a gas supply / exhaust channel 16 are opened on the bottom surface. The liquid supply channel 15 has a horizontal hole in the vertical hole. The gas supply / exhaust flow channel 16 is formed with a gas supply flow channel 16a and a gas exhaust flow channel 16b that are branched to the left and right as shown in FIG. . On the fluid coupling 11, on-off valves 12, 13, and 14 having the same structure are provided at the side opening of the liquid supply passage 15 on the side of the block and the openings of the gas supply passage 16a and the gas exhaust passage 16b. The joint-integrated integrated unit 10 is configured to be fixed to each other. This on-off valve is a spool valve that opens and closes by operating the spool with compressed air.

  The on-off valve 12 (the same applies to the on-off valves 13 and 14) includes a block provided with a port 31 connected to a chemical liquid line and a gas line and air ports 32 and 33 for supplying and exhausting compressed air for operating the spool 34. The body 35 is formed. A spool 34 that is movable by compressed air from the air ports 32 and 33 is slidably loaded in the body 35, and a valve body 36 attached to the tip of the spool 34 closes the opening of the flow path 37. The communication with the port 31 is blocked. As shown in FIG. 1, the body 35 is screwed to the fluid coupling 11 with bolts, and the flow path 37 and the liquid supply flow path 15, the gas supply flow path 16a, or the gas exhaust flow path 16b are connected to the connection portion. 2 and 3 are hermetically sealed by a sealing member 38 having an H-shaped cross section.

Next, the operation of the tank 1 equipped with the fluid coupling 11 and the joint-integrated integrated unit 10 will be described.
First, when sending the chemical | medical solution with which the tank 1 was filled to a use point, the on-off valves 12 and 14 are closed and the on-off valve 13 is opened. When the operating air is supplied to the air port 33, the on-off valves 12, 14, 13 slide the spool 34 toward the fluid coupling 11, and the valve body 36 at the tip contacts the valve seat formed in the opening of the flow path 37. Close in contact. Therefore, the liquid supply flow path 15 and the gas supply / exhaust flow path 16 of the fluid coupling 11 are disconnected from the port 31 to which the liquid supply line 110 and the like are connected. On the other hand, when working air is supplied to the air port 32, the spool 34 slides away from the fluid coupling 11, and the valve body 36 at the tip is separated from the valve seat formed in the opening of the flow path 37. Open the valve. Accordingly, the liquid supply passage 15 or the gas supply / exhaust passage 16 of the fluid coupling 11 and the port 31 communicate with each other.

  Therefore, pressurized N 2 gas (or air) is sent from the gas supply line 120 into the tank 1 through the gas supply passage 16 a and the gas supply / exhaust passage 16 of the fluid coupling 11. At this time, since the tank 1 made of tetrafluoroethylene resin (PTFE, PFA) has a low strength, the pressure reducing valve 121 prevents the pressure from exceeding a predetermined pressure. In the tank 1, the pressure of the gas layer is increased by the supplied N2 gas, and the chemical liquid in the liquid layer is pressurized from above. Therefore, the chemical solution is discharged from the discharge port 3 formed at the bottom of the tank 1 and supplied to the use point. At this time, the pressure and flow rate of the chemical liquid sent from the discharge port 3 to the use point are adjusted by adjusting the pressure of the supply gas while measuring the pressure applied to the chemical liquid in the tank 1 by the pressure gauge 122.

  Next, when the tank 1 is filled with the chemical solution, the on-off valve 13 is closed and the on-off valves 12, 14 are opened. Therefore, the chemical liquid sent through the liquid supply line 110 passes through the opened on-off valve 12, flows through the liquid supply flow path 15 of the fluid coupling 11, and is supplied into the tank 1. In the tank 1, the liquid level of the liquid layer rises due to the supply of the chemical liquid, and the volume of the upper gas layer is reduced, whereby the N2 gas in the tank 1 is pressurized. Therefore, the N2 gas in the tank 1 flows to the gas supply / exhaust flow path 16 of the fluid coupling 11 and flows to the gas exhaust flow path 16b without flowing to the gas supply flow path 16a because the on-off valve 13 is closed. Further, the gas is exhausted from the gas exhaust line 130 through the on-off valve 14. Thus, the chemical solution is filled into the tank 1 while discharging N2 gas.

Therefore, according to this embodiment, since the liquid supply passage 15 and the gas supply / exhaust passage 16 are formed in the block body to be attached to the opening 2 of the tank 1 and configured as the fluid coupling 11, It can be a fluid coupling, and can be mounted by inserting the layer insertion portion 11a into the opening 2 and screwing the lock nut 4 and is extremely easy to handle. In addition, machining costs can be significantly reduced as compared with the conventional case where welding is performed by simple attachment. Moreover, since it is only necessary to mount the fluid coupling 11 at the opening 2, it is easier to manage liquid leakage and gas leakage than a conventional one where a plurality of couplings are attached.
On the other hand, in the joint-integrated integrated unit 10 in which the on-off valves 12, 13, and 14 are integrated with the fluid coupling 11, the complicated tank periphery can be simplified, and the fluid circuit constituted by the lines 110, 120, and 130 is provided. It was possible to reduce the space. As a result of the integration, the on-off valves 12, 13, and 14 are concentrated in one place, so that replacement and the like are facilitated, and maintenance is improved.

Next, a second embodiment of a fluid coupling and a joint-integrated integrated unit according to the present invention will be described. FIG. 5 is an external perspective view showing a tank equipped with the fluid coupling and joint-integrated integrated unit of the second embodiment, and FIG. 6 specifically shows the fluid joint and joint-integrated integrated unit. It is CC sectional drawing of. In addition, the same code | symbol is attached | subjected and demonstrated about the structure similar to the said 1st Embodiment.
A joint-integrated integrated unit 50 having a fluid joint 51 as a base block is attached to the opening 2 of the tank 1 in the same manner as in the first embodiment. In this embodiment, the discharge port 52 for supplying the chemical solution in the tank 1 to the use point is formed in the joint integrated type unit 50.

  As shown in FIG. 6, in addition to the liquid supply channel 15 and the gas supply / exhaust channel 16, the fluid coupling 51 is provided with a through-hole 53 penetrating vertically, and a discharge pipe 54 is inserted into the through-hole 53. Yes. The discharge pipe 54 is inserted into the through hole 53, and the holding pipe 55 is screwed into the upper end opening of the through hole 53 so as to overlap the discharge pipe 54, and the lock nut 56 is screwed into the holding pipe 55. As a result, the holding pipe 55 is fastened to the discharge pipe 54 by the lock nut 56. The discharge pipe 54 protrudes upward from the fluid coupling 51 and extends to the bottom in the tank 1.

  Therefore, in this embodiment, when the chemical liquid filled in the tank 1 is sent to the use point, the on-off valves 12 and 14 are closed and the on-off valve 13 is opened. The N 2 gas is fed into the tank 1 from the gas supply line 120 through the gas supply / exhaust flow path 16, the liquid layer is pressurized by the supply gas, and the chemical liquid flows into the discharge pipe 54 from the bottom of the tank 1 and is used. To be sent to. Also in this case, by adjusting the pressure of the supply gas while measuring the pressure applied to the chemical solution in the tank 1 by the pressure gauge 122, the pressure and flow rate of the chemical solution sent from the discharge port 3 to the use point are adjusted. .

  On the other hand, when filling the tank 1 with the chemical solution, the on-off valve 13 is closed and the on-off valves 12, 14 are opened. Therefore, the chemical solution sent through the liquid supply line 110 passes through the opened on-off valve 12, flows through the liquid supply passage 15, and is supplied into the tank 1. In the tank 1, the liquid level of the liquid layer rises due to the supply of the chemical solution, and the volume of the upper gas layer is reduced to pressurize the N 2 gas in the tank 1. Therefore, the N 2 gas in the tank 1 flows to the gas supply / exhaust flow path 16 and is discharged from the gas exhaust line 130 through the on-off valve 14. Thus, the chemical solution is filled into the tank 1 while discharging N2 gas.

Therefore, in this embodiment as well as the first embodiment, a through hole 53 is formed in the block body mounted on the opening 2 of the tank 1 in addition to the liquid supply channel 15 and the gas supply / exhaust channel 16. The fluid coupling 51 having a simple configuration in which the discharge pipe 54 is inserted can be obtained, and the handling by the lock nut 4 is extremely easy. Such a simple attachment makes it possible to remarkably reduce the processing cost, and since the tank 1 is mounted at one location, management of liquid leakage and gas leakage becomes easy.
On the other hand, in the joint-integrated integrated unit 50 in which the on-off valves 12, 13, and 14 are integrated with the fluid joint 51, the complicated tank periphery can be simplified, and the fluid circuit constituted by the lines 110, 120, and 130 is provided. It was possible to reduce the space. As a result of the integration, the on-off valves 12, 13, and 14 are concentrated in one place, so that replacement and the like are facilitated, and maintenance is improved.

Next, a third embodiment of a fluid coupling and a joint-integrated integrated unit according to the present invention will be described. FIG. 7 is an external perspective view showing a tank equipped with the fluid coupling and joint-integrated integrated unit of the third embodiment, and FIG. 8 specifically shows the fluid joint and joint-integrated integrated unit. It is DD sectional drawing of. In addition, the same code | symbol is attached | subjected and demonstrated about the structure similar to the said 1st Embodiment.
A joint-integrated integrated unit 60 having a fluid joint 61 as a base block is attached to the opening 2 of the tank 1 in the same manner as in the first embodiment. In this embodiment, the discharge port 62 for supplying the chemical solution in the tank 1 to the use point is formed in the joint integrated type unit 60.

As shown in FIG. 8, in addition to the liquid supply flow path 15 and the gas supply / exhaust flow path 16, the fluid coupling 61 has a discharge flow path 63 composed of a vertical hole and a horizontal hole in the same manner as the liquid supply flow path 15. Discharge pipes 65, 66 are connected by joints 67, 68 to the opening of the discharge flow path 63 pierced and projecting from the gas-liquid separation means 61. The discharge pipe 65 extends to the bottom in the tank 1, and the discharge pipe 66 protrudes laterally from the fluid coupling 61.

  Therefore, in this embodiment, when the chemical liquid filled in the tank 1 is sent to the use point, the on-off valves 12 and 14 are closed and the on-off valve 13 is opened. N 2 gas is fed into the tank 1 from the gas supply line 120 through the gas supply / exhaust flow path 16, the liquid layer is pressurized by the supply gas, and the chemical solution flows into the discharge pipe 65 from the bottom of the tank 1, and the fluid coupling It passes through the discharge flow path 63 of 61 and is sent to the use point via the discharge pipe 66. Also in this case, by adjusting the pressure of the supply gas while measuring the pressure applied to the chemical solution in the tank 1 by the pressure gauge 122, the pressure and flow rate of the chemical solution sent from the discharge port 3 to the use point are adjusted. .

  On the other hand, when filling the tank 1 with the chemical solution, the on-off valve 13 is closed and the on-off valves 12, 14 are opened. Therefore, the chemical solution sent through the liquid supply line 110 passes through the opened on-off valve 12, flows through the liquid supply passage 15, and is supplied into the tank 1. In the tank 1, the liquid level of the liquid layer rises due to the supply of the chemical solution, and the volume of the upper gas layer is reduced to pressurize the N 2 gas in the tank 1. Therefore, the N 2 gas in the tank 1 flows to the gas supply / exhaust flow path 16 and is discharged from the gas exhaust line 130 through the on-off valve 14. Thus, the chemical solution is filled into the tank 1 while discharging N2 gas.

Therefore, in this embodiment as well as the first embodiment, the discharge passage 63 is formed in addition to the liquid supply passage 15 and the gas supply / exhaust passage 16 in the block body attached to the opening 2 of the tank 1. The fluid coupling 61 having a simple configuration can be obtained, and the handling by the lock nut 4 is extremely easy. Such a simple attachment makes it possible to remarkably reduce the processing cost, and since the tank 1 is mounted at one location, management of liquid leakage and gas leakage becomes easy.
On the other hand, in the joint integrated type unit 60 in which the on-off valves 12, 13, and 14 are integrated with the fluid joint 61, the complicated tank periphery can be simplified, and the fluid circuit constituted by the lines 110, 120, and 130 can be simplified. It was possible to reduce the space. As a result of the integration, the on-off valves 12, 13, and 14 are concentrated in one place, so that replacement and the like are facilitated, and maintenance is improved.

Next, a fourth embodiment of a fluid coupling and a joint-integrated integrated unit according to the present invention will be described. FIG. 9 is a block diagram showing a tank equipped with a fluid coupling and a joint-integrated integrated unit according to the fourth embodiment.
A joint-integrated integrated unit 70 having a fluid joint 71 as a base block is attached to the opening 6 of the tank 5 in the same manner as in the first embodiment. In this embodiment, the chemical solution in the tank 5 is supplied from the joint-integrated integrated unit 70 to the use point, and the pump 72 is used.

  That is, in this embodiment, the chemical solution in the tank 5 is not pressurized with gas or the like, but the chemical solution in the tank 5 is sucked up using the pump 72 and sent to the use point. For this reason, in the joint-integrated unit 70, the pump 72 is integrally assembled with the fluid coupling 71 of the block. The fluid coupling 71 is provided with an intake flow path 73 and a discharge flow path 74, and a pipe 75 connected to the discharge flow path 74 extends to the bottom in the tank 5.

Therefore, in order to send the chemical solution filled in the tank 5 in advance to the use point, the pump 72 is driven. Thereby, the chemical solution in the tank 5 flows through the discharge flow path 74 via the pipe 75 and is sent to the use point. At this time, since the inside of the tank 5 is depressurized, outside air flows through the intake passage 73.
Therefore, in the present embodiment as well, as in the first to third embodiments, the fluid coupling 71 having a simple configuration in which the intake passage 73 and the discharge passage 74 are formed in the block body attached to the opening 6 of the tank 5. It is extremely easy to handle. Further, the processing cost can be remarkably reduced by simple attachment, and since it is attached to the tank 5 at one place, it is easy to manage liquid leakage and gas leakage. Further, in the joint-integrated integrated unit 70 in which the pump 75 is integrated with the fluid joint 71, the complicated tank periphery can be simplified, and maintenance is improved by integration.

Next, a fifth embodiment of a fluid coupling and a joint-integrated integrated unit according to the present invention will be described. FIG. 10 is an external perspective view showing a tank equipped with the fluid coupling and joint integrated type integrated unit of the fifth embodiment, and FIG. 11 specifically shows the fluid joint and joint integrated type integrated unit. It is EE sectional drawing of. FIG. 12 is a cross-sectional view taken along the line FF of FIG. 10 specifically showing the fluid coupling and the coupling-integrated integrated unit. In addition, the same code | symbol is attached | subjected and demonstrated about the structure similar to the said 1st Embodiment. 13 is a cross-sectional view taken along the line G-G in FIG. 10 specifically showing the fluid coupling and the coupling-integrated integrated unit.
A joint-integrated integrated unit 80 having a fluid joint 81 as a base block is attached to the opening 2 of the tank 1 in the same manner as in the first embodiment. In this embodiment, the discharge flow path 89 through which the chemical solution in the tank 1 flows to the use point and the gas supply / exhaust flow path 88 for supplying / exhausting the N 2 gas in the tank 1 are formed in a double manner to the use point. A discharge port 82 for supplying the chemical solution in the tank 1 is formed in the joint integrated type integrated unit 80.

  As shown in FIGS. 11 and 12, the fluid coupling 81 is provided with a through-hole 83 penetrating vertically in addition to the liquid supply channel 15. A joint portion 85 is provided coaxially at the upper end opening of the through hole 83, and a discharge pipe 84 is inserted from the joint portion 85 into the through hole 83. A male screw is formed on the outer peripheral surface of the joint portion 85, and a lock nut 87 is screwed through a ferrule 86 attached to the discharge pipe 84. A taper is formed on the inner periphery of the opening of the joint portion 85, and the ferrule 86 is engaged so that the tip of the wedge-shaped cross section overlaps the taper of the joint portion 85. Therefore, when the lock nut 87 is tightened into the joint portion 85, the ferrule 86 is pushed into the joint portion 85 and bites into the discharge pipe 84 to prevent the discharge pipe 84 from coming off, and the discharge pipe 84 and the through hole 83. Seal between.

  While the discharge pipe 84 protrudes upward from the fluid coupling 81, the discharge pipe 84 extends to the bottom in the tank 1 and forms a discharge flow path 89 for supplying the chemical solution in the tank 1 to the use point. The fluid coupling 81 is formed so as to overlap the through-hole 83 from the side surface on the tank 1 side so that a bottomed hole having a diameter larger than that of the through-hole 83 communicates with the gas supply channel 16a and the gas exhaust channel 16b. As shown, a gas supply / exhaust flow path 88 is provided around the discharge pipe 84. That is, in the fluid coupling 81, the discharge flow path 89 and the gas supply / exhaust flow path 88 are doubled.

  Therefore, in this embodiment, when the chemical liquid filled in the tank 1 is sent to the use point, the on-off valves 12 and 14 are closed and the on-off valve 13 is opened. N2 gas is fed into the tank 1 from the gas supply line 120 through the gas supply flow path 16a and the gas supply / exhaust flow path 88, the liquid layer is pressurized by the supply gas, and the chemical liquid is discharged from the bottom of the tank 1 to the discharge pipe 84. It flows in and is sent out to a use point. Also in this case, by adjusting the pressure of the supply gas while measuring the pressure applied to the chemical solution in the tank 1 by the pressure gauge 122, the pressure and flow rate of the chemical solution sent from the discharge port 82 to the use point are adjusted. .

  On the other hand, when filling the tank 1 with the chemical solution, the on-off valve 13 is closed and the on-off valves 12, 14 are opened. Therefore, the chemical solution sent through the liquid supply line 110 passes through the opened on-off valve 12, flows through the liquid supply passage 15, and is supplied into the tank 1. In the tank 1, the liquid level of the liquid layer rises due to the supply of the chemical solution, and the volume of the upper gas layer is reduced to pressurize the N 2 gas in the tank 1. Therefore, the N 2 gas in the tank 1 flows from the gas supply / exhaust flow path 88 to the gas exhaust flow path 16 b and is discharged from the gas exhaust line 130 through the on-off valve 14. Thus, the chemical solution is filled into the tank 1 while discharging N2 gas.

  By the way, in this embodiment, although the discharge pipe 84 is penetrated to the through-hole 83, the ferrule 86 seals between the opening part of the joint part 85 and the discharge pipe 84, and the airtightness inside and outside the tank 1 is maintained. Yes. For this reason, the chemical solution and the N2 gas are efficiently replaced. Further, since the discharge flow path 89 is provided inside the gas supply / exhaust flow path 88, for example, even if the discharge pipe 84 is cracked in the gas supply / exhaust flow path 88, the chemical liquid does not leak to the outside. Safety is enhanced.

  Therefore, in the present embodiment, similarly to the first embodiment, in addition to the liquid supply flow path 15, the through hole 83 is formed in the block body attached to the opening 2 of the tank 1 to insert the discharge pipe 84. The fluid coupling 81 having a simple configuration can be obtained, and the handling by the lock nut 4 is extremely easy. In addition, since the N2 gas supply / exhaust flow path 88 and the discharge flow path 89 are doubled, the number of holes opened in the side surface of the fluid coupling 81 is reduced, the opening area is reduced, and the fluid coupling 81 is configured. The material cost and the number of processing are reduced, and the flow path configuration is simplified. Such simple attachment and flow path configuration, and further reduction in material cost and the number of processings, can greatly reduce the processing cost, and the size and cost can be reduced. Further, since the tank 1 is mounted at one place, it is easy to manage liquid leakage and gas leakage.

  On the other hand, the joint-integrated integrated unit 80 in which the on-off valves 12, 13, and 14 are integrated with the fluid joint 81 can simplify the surroundings of the complicated tank, and the fluid circuit constituted by the lines 110, 120, and 130. It was possible to reduce the space. In particular, since the discharge flow path 89 and the gas supply / exhaust flow path 88 are doubled, the fluid coupling 81 has a compact and simple flow path configuration, further reducing the size of the unit and further reducing the space of the fluid circuit. In addition, the manufacturing cost could be reduced. As a result of the integration, the on-off valves 12, 13, and 14 are concentrated in one place, so that replacement and the like are facilitated, and maintenance is improved.

As mentioned above, although embodiment of the fluid coupling and coupling integrated type integrated unit concerning this invention was described, this invention is not limited to such embodiment, A various change is possible in the range which does not deviate from the meaning.
For example, in the above-described embodiment, the on-off valves 12, 13, and 14 are integrally fixed to the fluid coupling 11 as an example of the joint-integrated integrated unit 10 or the like. A flow rate adjusting valve, an orifice, or a pressure gauge other than the on-off valve may be used, and is not limited to a specific fluid device.
Further, for example, in the first to third embodiments, the gas supply channel 16a and the gas exhaust channel 16b are connected to the gas supply / exhaust channel 16 to branch one channel. The flow path and the gas exhaust flow path may be separated into two flow paths.

It is the external appearance perspective view which showed the tank equipped with the fluid coupling of 1st Embodiment, and the coupling integrated type integration unit. It is AA sectional drawing of FIG. 1 which showed the fluid coupling and coupling integrated type integrated unit of 1st Embodiment. FIG. 2 is a cross-sectional view taken along the line BB in FIG. 1 illustrating the fluid coupling and the coupling-integrated integrated unit according to the first embodiment. It is the block diagram which showed the state by which the fluid line was connected to the tank via the coupling integrated type integration unit. It is the external appearance perspective view which showed the tank which mounted | wore with the fluid coupling of 2nd Embodiment, and a coupling integrated type integrated unit. It is CC sectional drawing of FIG. 5 which showed the fluid coupling and coupling integrated type integrated unit of 2nd Embodiment. It is the external appearance perspective view which showed the tank which mounted | wore with the fluid coupling and joint integrated type integrated unit of 3rd Embodiment. It is DD sectional drawing of FIG. 7 which showed the fluid coupling and joint integrated type integrated unit of 3rd Embodiment. It is the block diagram which showed the state by which the fluid line was connected to the tank of 4th Embodiment via the coupling integrated type integrated unit. It is the external appearance perspective view which showed the tank equipped with the fluid coupling of 5th Embodiment, and the coupling integrated type integration unit. It is EE sectional drawing of FIG. 10 which showed the fluid coupling and coupling integrated type integrated unit of 5th Embodiment. It is FF sectional drawing of FIG. 10 which showed the fluid coupling and coupling integrated type integrated unit of 5th Embodiment. It is GG sectional drawing of FIG. 10 which showed the fluid coupling and coupling integrated type integrated unit of 5th Embodiment. It is the conceptual diagram which showed the liquid supply adjustment system using a tank. It is the external appearance perspective view which showed the tank with which the conventional fluid coupling was mounted | worn.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Tank 2 Opening part 4 Lock nut 10 Joint integrated unit 11 Fluid coupling 12, 13, 14 On-off valve 15 Liquid supply flow path 16 Gas supply / exhaust flow path 16a Gas supply flow path 16b Gas exhaust flow path

Claims (5)

A plurality of fluids are attached to the opening of the tank for taking in and out of the tank, and connect the fluid lines inside and outside the tank,
  A liquid flow path for supplying liquid into the tank, a gas supply flow path and a gas exhaust flow path opened to the outside of the tank, and a gas supply / exhaust flow path opened to the inside of the tank. A fluid coupling formed with a flow path connected to
  Fluid equipment fixed to the liquid tank, gas supply flow path, and tank exhaust opening of the gas exhaust flow path, respectively.
  The joint-integrated integrated unit, wherein the fluid joint and the fluid device are integrally provided. A plurality of fluids are attached to the opening of the tank for taking in and out of the tank, and connect the fluid lines inside and outside the tank,
  A liquid flow path for supplying liquid into the tank, a gas supply flow path and a gas exhaust flow path opened to the outside of the tank, and a gas supply / exhaust flow path opened to the inside of the tank. A fluid coupling formed with a flow path connected to the pipe and a discharge flow path connected to a pipe inserted into the tank to discharge the liquid in the tank to the outside;
  Fluid equipment fixed to the liquid tank, gas supply flow path, and tank exhaust opening of the gas exhaust flow path, respectively.
  The joint-integrated integrated unit, wherein the fluid joint and the fluid device are integrally provided. In the joint-integrated integrated unit according to claim 2,
  The joint-integrated integrated unit, wherein the discharge channel and the gas supply / exhaust channel are formed in a double manner. In the joint-integrated integrated unit according to claim 2 or 3,
  A lock nut screwed into the fluid coupling;
  A ferrule having a wedge portion joined to a taper formed on the inner peripheral surface of the fluid coupling,
  The joint-integrated integrated unit, wherein the lock nut is fastened to the fluid joint via the ferrule. The joint-integrated integrated unit according to any one of claims 1 to 4,
  A joint integrated type integrated unit, wherein the fluid device is an on-off valve.

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