JP4035943B2 - Liquid ejector - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a liquid ejecting apparatus that ejects a liquid droplet from a nozzle opening by vibration of a piezoelectric vibrator.
[0002]
[Prior art]
A liquid ejecting apparatus using a piezoelectric vibrator (in the following description, an example applied to an ink jet recording head, referred to as “recording head”) generally has a piezoelectric vibrator 6 on its upper surface as shown in FIG. The actuator unit 1 that is adhered and formed with the pressure generating chamber 2 corresponding to the piezoelectric vibrator 6, and the flow path unit that is formed with the nozzle opening 3 and the ink storage chamber 4 and is adhered to the lower surface of the actuator unit 1. 5, pressure is generated in the pressure generating chamber 2 by the vibration of the piezoelectric vibrator 6, and ink droplets are ejected from the nozzle openings 3.
[0003]
The actuator unit 1 includes a pressure generating chamber forming plate 10 in which a space for forming the pressure generating chamber 2 is formed, and a vibration plate 11 that is positioned on the upper surface of the pressure generating chamber forming plate 10 and closes the upper surface opening of the space. And a communication hole forming plate 14 located on the lower surface of the pressure generating chamber forming plate 10. The communication hole forming plate 14 is formed with a communication hole 12 for communicating the ink storage chamber 4 and the pressure generating chamber 2 and a communication path 8 for communicating the pressure generating chamber 2 and the nozzle opening 3.
[0004]
In the actuator unit 1, a common lower electrode 19 is formed on the upper surface of the diaphragm 11. A plate-like piezoelectric vibrator 6 is formed on the upper surface of the lower electrode 19, and individual upper electrodes 20 are formed on the upper surface of the piezoelectric vibrator 6. A drive signal is input to the piezoelectric vibrator 6 through the lower electrode 19 and the upper electrode 20.
[0005]
On the other hand, the flow path unit 5 includes an ink storage chamber forming plate 16 in which a space for forming the ink storage chamber 4 is formed, and a nozzle that is formed in the lower surface of the ink storage chamber forming plate 16 with the nozzle opening 3 formed therein. The plate 17 and a supply port forming plate 18 located on the upper surface of the ink storage chamber forming plate 16 are configured. The ink storage chamber forming plate 16 is formed with a communication path 8 that allows the pressure generating chamber 2 and the nozzle opening 3 to communicate with each other. In addition, the supply port forming plate 18 is provided with an ink supply port 9 for supplying ink from the ink storage chamber 4 to the pressure generation chamber 2 through the communication hole 12, and the pressure generation chamber 2 and the nozzle opening 3. A communication passage 8 is formed for communicating the.
[0006]
The actuator unit 1 is formed by laminating a diaphragm 11 made of ceramics, a pressure generating chamber forming plate 10 and a communication hole forming plate 14 and firing them integrally. On the other hand, in the flow path unit 5, a supply port forming plate 18, an ink storage chamber forming plate 16, and a nozzle plate 17 made of stainless steel are laminated via an adhesive layer 15. The actuator unit 1 and the flow path unit 5 are joined via an adhesive layer 15.
[0007]
[Problems to be solved by the invention]
However, in the recording head, the pressure generation chamber 2, the ink storage chamber 4, and the ink supply port 9 are formed on separate plates, that is, a pressure generation chamber forming plate 10, an ink storage chamber forming plate 16, and a supply port forming plate 18, respectively. Yes. For this reason, it is necessary to stack a plurality of parts in order to connect the pressure generating chamber 2 with the ink storage chamber 4 and the nozzle opening 3, which complicates the structure and the manufacturing process and causes an increase in cost. In addition, since the actuator unit 1 is made of ceramics and the flow path unit 5 is made of stainless steel, and these are joined with an adhesive, distortion and peeling occur due to differences in thermal contraction rate and linear expansion coefficient of the bonded portion. There is a fear. Furthermore, since the ink is in direct contact with the stainless steel and the adhesive, for example, an ink having an etching action on the stainless steel or an ink that elutes the adhesive cannot be used. The actual situation is that there is a limit to the application field.
[0008]
The present invention has been made in view of such circumstances, and a first object is to provide a liquid ejecting apparatus capable of reducing the cost by simplifying the structure and the manufacturing process, and improving the liquid resistance of the flow path. A second object of the present invention is to provide a liquid ejecting apparatus in which there are fewer restrictions on the type of liquid used and the field of application.
[0009]
[Means for Solving the Problems]
In order to achieve the above object, a liquid ejecting apparatus according to the present invention includes a nozzle plate having a nozzle opening, a pressure generating chamber communicating with the nozzle opening, and a flow path other than the pressure generating chamber communicating with the pressure generating chamber. A flow path forming plate in which a space is formed, a vibration plate laminated on the flow path forming plate to seal the opening, and a flexural vibration mode piezoelectric vibration that vibrates the vibration plate to generate pressure in the pressure generation chamber. Including the child.
[0010]
That is, in the liquid ejecting apparatus of the present invention, a nozzle plate having a nozzle opening formed therein, a pressure generation chamber communicating with the nozzle opening, and a flow path space other than the pressure generation chamber communicating with the pressure generation chamber are formed. And a flow path forming plate. In this way, the pressure generating chamber and the flow path space other than the pressure generating chamber communicating with the pressure generating chamber are formed on one flow path forming plate, so that the recording head is configured as compared with the conventional case. The number of parts is reduced, the structure and manufacturing process are simplified, and the cost can be reduced.
[0011]
In the liquid ejecting apparatus according to the aspect of the invention, when the flow path space other than the pressure generation chamber is a liquid storage chamber for storing the liquid supplied to the pressure generation chamber, or the liquid is supplied from the liquid storage chamber to the pressure generation chamber. When the liquid supply path and the nozzle opening and the liquid supply path forming plate in which the communication path for communicating the pressure generation chamber is formed, the pressure generation chamber and the liquid storage chamber are provided on one flow path forming plate. As a result, the number of parts constituting the recording head is reduced, and the structure and the manufacturing process are simplified to reduce the cost.
[0012]
In the liquid ejecting apparatus according to the aspect of the invention, the supply port for supplying the liquid from the liquid supply path to the pressure generating chamber and the liquid supply path and the liquid storage chamber are communicated between the liquid supply path forming plate and the flow path forming plate. When supply port forming plates with communication holes are stacked, a liquid supply port exists between the pressure generation chamber and the liquid supply path, so that pressure fluctuations in the pressure generation chamber are generated in the liquid storage chamber. Transmission is mitigated and crosstalk through the liquid storage chamber is suppressed.
[0013]
In the liquid ejecting apparatus of the present invention, a space constituting a part of the liquid storage chamber is formed in a portion corresponding to the liquid storage chamber of both the supply port forming plate and the liquid supply path forming plate or the liquid supply path forming plate. In this case, the supply port forming plate and the liquid supply path forming plate are also provided with a space serving as a liquid storage chamber so that the space can be used effectively, and the capacity of the liquid storage chamber can be afforded. Resistance is reduced and crosstalk through the liquid reservoir is also reduced.
[0014]
In the liquid ejecting apparatus of the present invention, when the flow path space other than the pressure generation chamber is a liquid supply path that supplies liquid to the pressure generation chamber, or the liquid that is supplied to the pressure generation chamber via the liquid supply path In the case where a liquid storage chamber forming plate in which a liquid storage chamber is stored is provided, the pressure generating chamber and the liquid supply path are formed on one flow path forming plate, and the parts constituting the recording head correspondingly As a result, the structure and the manufacturing process are simplified and the cost can be reduced.
[0015]
In the liquid ejecting apparatus according to the aspect of the invention, when a space constituting a part of the liquid storage chamber is formed in a portion corresponding to the liquid storage chamber of the flow path forming plate, the liquid storage apparatus also stores the liquid in the flow path forming plate. A space serving as a chamber can be provided so that the space can be used effectively, the capacity of the liquid storage chamber can be increased, flow resistance is reduced, and crosstalk through the liquid storage chamber is also reduced.
[0016]
In the liquid ejecting apparatus of the present invention, when the vibration plate, the flow path forming plate, and the nozzle plate are formed of ceramics, all of the flow paths that come into contact with the liquid are formed of ceramics. Liquidity is dramatically improved. Therefore, the type of liquid to be used is not limited, and for example, a liquid that has an etching action on stainless steel or a liquid that elutes an adhesive can be used, and there are almost no restrictions on the characteristics of the liquid to be used. Further, since the chemical stability of the flow path is improved and elution of organic substances is eliminated, for example, it can be used in the food field, the medical field, and the like, and there are almost no restrictions in the field of application.
[0017]
In the liquid ejecting apparatus of the present invention, when the laminated body of the flow path forming plate, the vibration plate, and the nozzle plate is integrally formed without an adhesive layer, the bonding operation is not necessary. There is no risk of distortion or peeling due to differences in thermal contraction rate or linear expansion coefficient.
[0018]
In the liquid ejecting apparatus of the present invention, the laminated body of the flow path forming plate, the vibration plate, and the nozzle plate is formed by laminating and firing the ceramic material green sheets corresponding to the flow path forming plate, the sealing plate, and the nozzle plate, respectively. If formed, it is suitable for the production of ceramic products for firing a laminate of green sheets.
[0019]
In the liquid ejecting apparatus of the present invention, the nozzle plate is not formed with a nozzle opening, and a notch is formed in the inner peripheral surface of the space corresponding to the pressure generating chamber of the flow path forming plate, and the flow path forming plate After the green sheets of ceramic material corresponding to the vibration plate and nozzle plate are laminated, the nozzle opening is formed at the end of the recording head when the cutout recess communicates with the outside to form the nozzle opening. The so-called edge type recording head can be formed with ceramics relatively easily.
[0020]
DETAILED DESCRIPTION OF THE INVENTION
Next, embodiments of the present invention will be described in detail.
[0021]
1 to 3 are diagrams showing an embodiment of a liquid ejecting apparatus of the present invention. In this embodiment, an example in which the liquid ejecting apparatus of the invention is applied to an ink jet recording head is shown. The recording head includes a nozzle plate 17 in which a plurality of nozzle openings 3 are formed, a supply path forming plate 21 in which a communication path 8 communicating with the nozzle plate is formed, and nozzle openings through the communication path 8. 3 is provided with a flow path forming plate 13 in which a pressure generating chamber 2 communicating with 3 is formed, and a vibration plate 11 stacked on the flow path forming plate 13.
[0022]
In addition to the pressure generation chamber 2, an ink storage chamber 4 for storing ink supplied to the pressure generation chamber 2 is formed on the flow path formation plate 13 as a flow path space communicating with each pressure generation chamber 2. ing. The supply path forming plate 21 is provided with an ink supply path 7 for supplying the ink in the ink storage chamber 4 to the pressure generation chamber 2 so as to correspond to each pressure generation chamber 2. That is, in the flow path forming plate 13, the pressure generating chambers 2 and the ink storage chambers 4 are not in communication with each other, and the pressure generating chambers 2 are connected via the ink supply paths 7 formed in the supply path forming plate 21. The ink storage chamber 4 communicates with the ink storage chamber 4. The space corresponding to the pressure generating chamber 2, the ink storage chamber 4, and the ink supply path 7 penetrates the flow path forming plate 13 or the supply path forming plate 21 up and down.
[0023]
In this example, the nozzle openings 3 are arranged so as to form two nozzle rows, and the pressure generating chambers 2 are also arranged in two rows so as to correspond to the nozzle rows. A common ink storage chamber 4 is provided in each row of pressure generation chambers 2.
[0024]
On the other hand, a comb-like lower electrode 19 is formed on the upper surface of the diaphragm 11. Each comb tooth portion 19 </ b> A of the lower electrode 19 is formed in a portion corresponding to the pressure generating chamber 2. A flat plate-like piezoelectric vibrator 6 is formed on the upper surface of each comb-tooth portion 19A of the lower electrode 19, and an individual upper electrode 20 is formed on the upper surface of the piezoelectric vibrator 6. A drive signal is applied to each piezoelectric vibrator 6 through the upper electrode 20 and the lower electrode 19.
[0025]
A supply path forming plate 21 is stacked on the nozzle plate 17, and a flow path forming plate 13 is stacked on the supply path forming plate 21 to block the opening of the flow path on the upper surface of the flow path forming plate 13. Thus, the diaphragm 11 having the piezoelectric vibrator 6, the upper electrode 20 and the lower electrode 19 formed thereon is laminated.
[0026]
In the recording head, when a drive signal is applied to the piezoelectric vibrator 6, the piezoelectric vibrator 6 contracts in the lateral direction. At this time, the lower surface side fixed to the vibration plate 11 of the piezoelectric vibrator 6 does not contract, but only the upper surface side contracts. Therefore, the piezoelectric vibrator 6 and the vibration plate 11 bend downward and compress the pressure generating chamber 2. . Then, as the pressure in the pressure generation chamber 2 rises, the ink in the pressure generation chamber 2 is ejected as ink droplets from the nozzle openings 3, and dots are formed on the recording paper or the like to perform printing. Next, when the piezoelectric vibrator 6 is discharged and returns to the original state, the pressure generation chamber 2 is depressurized, and new ink is supplied from the ink storage chamber 4 to the pressure generation chamber 2 through the ink supply path 7.
[0027]
The above recording head can be produced, for example, as follows. That is, first, a green sheet molded body of ceramics is prepared, and the green sheet molded body is punched to form parts corresponding to the nozzle plate 17, the flow path forming plate 13, the supply path forming plate 21, and the vibration plate 11. At this time, spaces corresponding to the ink storage chamber 4, the pressure generation chamber 2, the ink supply path 7, the communication path 8, and the nozzle opening 3 are formed by punching or the like.
[0028]
Then, the green sheet molded bodies corresponding to the nozzle plate 17, the supply path forming plate 21, the flow path forming plate 13, and the vibration plate 11 are laminated in a predetermined order and then fired, so that the ceramics can be made without using an adhesive. An integrally formed recording head can be obtained.
[0029]
The ceramic material constituting the recording head is not particularly limited, and various materials can be used. For example, various carbides such as silicon carbide, titanium carbide, chromium carbide, niobium carbide, vanadium carbide, zirconium carbide, molybdenum carbide, boron carbide, zirconium oxide (zirconia), aluminum oxide, magnesium oxide, silicon oxide, titanium oxide, beryllium oxide And various oxides such as aluminum nitride, silicon nitride, beryllium nitride and boron nitride, various borides such as zirconium boride, chromium boride and titanium boride, and composite compounds such as sialon. be able to. These may be used alone or in combination.
[0030]
Among these, zirconia which is excellent in mechanical strength and toughness and excellent in corrosion resistance is particularly suitable as a material for the liquid ejecting apparatus.
[0031]
In the recording head, since the pressure generating chamber 2 and the ink storage chamber 4 are formed on one flow path forming plate 13, the number of parts constituting the recording head is reduced correspondingly, and the structure and the manufacturing process are simplified. Cost reduction. Further, since the vibration plate 11, the flow path forming plate 12, the supply path forming plate 21, and the nozzle plate 17 are formed of ceramics, and the flow paths that come into contact with ink are all formed of ceramics, the ink resistance of the flow paths is improved. Improve dramatically. Therefore, the type of ink to be used is not limited, and for example, an ink having an etching action on stainless steel or an ink that elutes an adhesive can be used, and there are almost no restrictions on the characteristics of the ink to be used. Further, since the chemical stability of the flow path is improved and elution of organic substances is eliminated, for example, it can be used in the food field, the medical field, and the like, and there are almost no restrictions in the field of application.
[0032]
Furthermore, in the recording head, when the laminated body of the flow path forming plate 13, the vibration plate 11, the supply path forming plate 21, and the nozzle plate 17 is integrally formed without using an adhesive layer, bonding is performed. This eliminates the need for this work, and there is no risk of distortion or peeling due to differences in thermal shrinkage rate or linear expansion coefficient. Furthermore, since it has a laminated structure, it is suitable for production from a green sheet molded body of ceramics.
[0033]
FIG. 4 shows a liquid ejecting apparatus according to the second embodiment of the present invention. In this recording head, a space 22 constituting a part of the ink storage chamber 4 is formed in a portion corresponding to the ink storage chamber 4 of the supply path forming plate 21. Other than that, it is the same as that of the said 1st Embodiment, and attaches | subjects the same code | symbol to the same part.
[0034]
In this recording head, the supply path forming plate 21 is also provided with a space 22 serving as the ink storage chamber 4 so that the space can be used effectively, the capacity of the ink storage chamber 4 can be increased, and the flow path resistance is reduced. In addition, crosstalk through the ink storage chamber 4 is also reduced. Other than that, there exists an effect similar to the said 1st Embodiment.
[0035]
FIG. 5 shows a liquid ejecting apparatus according to a third embodiment of the invention. In this recording head, an ink supply port 9 for supplying ink from the ink supply path 7 to the pressure generating chamber 2, an ink storage chamber 4, and an ink supply path 7 are provided between the flow path forming plate 13 and the supply path forming plate 21. A supply port forming plate 18 in which a communication hole 12 that communicates with each other and a communication passage 8 that communicates between the nozzle opening 3 and the pressure generating chamber 2 are formed is laminated. Other than that, it is the same as that of the said 1st Embodiment, and attaches | subjects the same code | symbol to the same part.
[0036]
In this recording head, since the ink supply port 9 exists between the pressure generation chamber 2 and the ink supply path 7, the pressure fluctuation in the pressure generation chamber 2 is reduced from being transmitted to the ink storage chamber 4, and the ink storage is performed. Crosstalk through the chamber 4 is suppressed. Other than that, there exists an effect similar to the said 1st Embodiment.
[0037]
6 and 7 show a liquid ejecting apparatus according to a fourth embodiment of the invention. This recording head has no supply path forming plate 21, and an ink storage chamber 4 that stores ink supplied to the pressure generation chamber 2 and a communication path 8 that connects the pressure generation chamber 2 and the nozzle opening 3 are formed. An ink storage chamber forming plate 16 is provided. An ink supply path 7 for supplying the ink in the ink storage chamber 4 to the pressure generation chamber 2 is formed in the flow path forming plate 13 as a flow path space other than the pressure generation chamber 2 communicating with the pressure generation chamber 2. Yes. Other than that, it is the same as that of the said 1st Embodiment, and attaches | subjects the same code | symbol to the same part.
[0038]
In this recording head, since the pressure generating chamber 2 and the ink supply path 7 are formed on one flow path forming plate 13, the number of parts constituting the recording head is reduced correspondingly, and the structure and manufacturing process are simplified. Cost reduction. Other than that, there exists an effect similar to the said 1st Embodiment.
[0039]
FIG. 8 shows a liquid ejecting apparatus according to a fifth embodiment of the invention. This recording head has basically the same structure as the recording head of the fourth embodiment. In this recording head, a space 22 constituting a part of the ink storage chamber 4 is formed in a portion corresponding to the ink storage chamber 4 of the flow path forming plate 13. Other than that, it is the same as that of the said 4th Embodiment, and attaches | subjects the same code | symbol to the same part.
[0040]
In this recording head, the flow path forming plate 13 is also provided with a space 22 serving as the ink storage chamber 4 so that the space can be used effectively, the capacity of the ink storage chamber 4 can be increased, and the flow path resistance is reduced. In addition, crosstalk through the ink storage chamber 4 is also reduced. Other than that, there exists an effect similar to the said 4th Embodiment.
[0041]
9 and 10 show a liquid ejecting apparatus according to a sixth embodiment of the invention. This recording head has basically the same structure as the recording head of the fourth embodiment. In this recording head, a space 22 constituting a part of the ink storage chamber 4 is provided in a portion corresponding to the ink storage chamber 4 of the flow path forming plate 13 so as to correspond to each pressure generation chamber 2. Other than that, it is the same as that of the said 4th Embodiment, and attaches | subjects the same code | symbol to the same part.
[0042]
In this recording head, the flow path forming plate 13 is also provided with a space 22 serving as the ink storage chamber 4 so that the space can be used effectively, the capacity of the ink storage chamber 4 can be increased, and the flow path resistance is reduced. In addition, crosstalk through the ink storage chamber 4 is also reduced. Other than that, there exists an effect similar to the said 4th Embodiment.
[0043]
11 and 12 show a liquid ejecting apparatus according to a seventh embodiment of the invention. In this recording head, only one row of the pressure generating chambers 2 is formed, and the nozzle openings 3 are not formed in the nozzle plate 17. A notch recess 23 is formed on the inner peripheral surface of the space corresponding to the pressure generating chamber 2 of the flow path forming plate 13 on the side opposite to the ink storage chamber 4. Then, after laminating green sheets of ceramic materials corresponding to the flow path forming plate 13, the supply path forming plate 21, the vibration plate 11, and the nozzle plate 17, respectively, the laminate is cut along the chain line B, A nozzle opening is formed by communicating the notch recess 23 with the outside. Other than that, it is the same as that of the said 1st Embodiment, and attaches | subjects the same code | symbol to the same part.
[0044]
In this recording head, a so-called edge type recording head in which nozzle openings are formed at the end of the recording head can be formed relatively easily with ceramics. Other than that, there exists an effect similar to the said 1st Embodiment.
[0045]
In each of the above embodiments, an example in which each plate such as the nozzle plate 17, the flow path forming plate 13, the ink storage chamber forming plate 16, and the supply path forming plate 21 is formed from ceramics has been described. Instead, each of the plates can be made of a metal material such as stainless steel, nickel, chromium, single crystal silicon, or a photosensitive glass material.
[0046]
In each of the above embodiments, the liquid ejecting apparatus of the present invention is applied to an ink jet recording head. However, the present invention is not limited to this. For example, the liquid to be discharged is a fuel such as gasoline. It can also be used as a fuel injection device for an internal combustion engine. Furthermore, the present invention can also be applied to the formation of an organic light emitting layer for a display body in which an organic light emitting layer is formed on a transparent electrode formed in a matrix on a transparent substrate. Thus, in the liquid ejecting apparatus of the present invention, various liquids can be applied as the liquid to be ejected, and can be applied to various industrial fields.
[0047]
【The invention's effect】
As described above, according to the liquid ejecting apparatus of the present invention, the pressure generating chamber and the channel space other than the pressure generating chamber communicating with the pressure generating chamber are formed on one channel forming plate. Therefore, the number of parts constituting the recording head is reduced as compared with the conventional case, the structure and the manufacturing process are simplified, and the cost can be reduced.
[Brief description of the drawings]
FIG. 1 is an exploded perspective view showing an embodiment of a liquid ejecting apparatus of the invention.
FIG. 2 is an explanatory diagram showing a channel structure of the liquid ejecting apparatus.
FIG. 3 is a cross-sectional view taken along line AA of the liquid ejecting apparatus.
FIG. 4 is a cross-sectional view showing a second embodiment of the liquid ejecting apparatus of the invention.
FIG. 5 is a cross-sectional view showing a third embodiment of the liquid ejecting apparatus of the invention.
FIG. 6 is an explanatory diagram showing a flow channel structure according to a fourth embodiment of the liquid ejecting apparatus of the invention.
FIG. 7 is a cross-sectional view showing the liquid ejecting apparatus.
FIG. 8 is a cross-sectional view showing a fifth embodiment of the liquid ejecting apparatus of the invention.
FIG. 9 is an explanatory diagram showing a flow channel structure according to a sixth embodiment of the liquid ejecting apparatus of the invention.
FIG. 10 is a cross-sectional view showing the liquid ejecting apparatus.
FIG. 11 is an explanatory diagram showing a flow channel structure according to a seventh embodiment of the liquid ejecting apparatus of the invention.
FIG. 12 is an AA cross-sectional view showing the liquid ejecting apparatus.
FIG. 13 is a cross-sectional view illustrating a conventional liquid ejecting apparatus.
[Explanation of symbols]
2 Pressure generation chamber 3 Nozzle opening 4 Ink storage chamber 6 Piezoelectric vibrator 11 Vibration plate 13 Flow path forming plate 17 Nozzle plate

Claims (3)

A nozzle plate with a nozzle opening,
A flow path forming plate formed with a pressure generation chamber communicating with the nozzle opening and a liquid storage chamber communicating with the pressure generation chamber and storing liquid supplied to the pressure generation chamber;
A liquid supply path forming plate in which a liquid supply path for supplying liquid from the liquid storage chamber to the pressure generation chamber is formed;
Layered between the liquid supply path forming plate and the flow path forming plate, a supply port for supplying liquid from the liquid supply path to the pressure generating chamber and a communication hole for connecting the liquid supply path and the liquid storage chamber are formed. A supply port forming plate ;
A liquid ejecting apparatus comprising: a vibration plate that is stacked on the flow path forming plate and seals an opening; and a piezoelectric vibrator that vibrates the vibration plate and generates pressure in a pressure generation chamber. A nozzle plate with a nozzle opening,
A pressure generating chamber communicating with the nozzle opening, and a flow path forming plate formed with a liquid supply path communicating with the pressure generating chamber and supplying a liquid to the pressure generating chamber;
A liquid storage chamber forming plate in which a liquid storage chamber for storing liquid to be supplied to the pressure generation chamber via the liquid supply path is formed ;
A liquid ejecting apparatus comprising: a vibration plate that is stacked on the flow path forming plate and seals an opening; and a piezoelectric vibrator that vibrates the vibration plate and generates pressure in a pressure generation chamber. The liquid ejecting apparatus according to claim 2, wherein a space constituting a part of the liquid storage chamber is formed in a portion corresponding to the liquid storage chamber of the flow path forming plate.

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