JP4013785B2

JP4013785B2 - High voltage IC

Info

Publication number: JP4013785B2
Application number: JP2003049640A
Authority: JP
Inventors: 龍彦藤平; 幸雄矢野; 重行大日方; 直樹熊谷
Original assignee: Fuji Electric Device Technology Co Ltd
Current assignee: Fuji Electric Co Ltd
Priority date: 1995-04-12
Filing date: 2003-02-26
Publication date: 2007-11-28
Anticipated expiration: 2015-07-28
Also published as: JP2004006674A

Description

【０００１】
【発明の属する技術分野】
この発明は、パワーデバイスの制御駆動用などに用いられる高耐圧ＩＣで、パワーデバイスとは別の半導体基板または同一半導体基板上に形成される高耐圧ＩＣに関する。
【０００２】
【従来の技術】
ここでは参考文献が多数あるため、文献名はまとめて番号を付けて〔発明が解決しようとする課題〕の項の最後に記載し、文章中では文献名の番号を[ ]で示すことに留めた。また参考文献のUSP Noの後に（）で示した内容は特許内容を簡単に説明したものである。
パワーデバイス[1] 〜[4] は、モータ制御用のインバータやコンバータ、照明用のインバータ、各種電源およびソレノイドやリレーの駆動用スイッチ等の多くの分野で広く利用されている。このパワーデバイスの駆動や制御は、従来個別の半導体素子や電子部品を組み合わせて構成した電子回路[5],[6] によっていたが、近年ＬＳＩ（高集積度ＩＣ、ＩＣとは集積回路のこと）技術を利用した数十Ｖ級の低耐圧ＩＣ[7],[8] や数百Ｖ級の高耐圧ＩＣ[9],[10]が実用化されており、さらに駆動・制御回路とパワーデバイスとを同一半導体基板に集積化したパワーＩＣ[11],[12] が用いられインバータやコンバータなどの変換装置などの小型化や高信頼性が図られている。
【０００３】
図３３はモータ制御用インバータのパワー部分を中心に説明する回路構成図である。三相モータＭｏを駆動するために用いるパワーデバイス（ここではＩＧＢＴであるＱ１〜Ｑ６とダイオードであるＤ１〜Ｄ６を示す）はブリッジ回路を構成し同一パッケージに収納されたパワーモジュール[13]の構造をしている。ここでＩＧＢＴとは絶縁ゲート型バイポーラトランジスタのことである。主電源Ｖ_CCは通常直流１００〜４００Ｖと高電圧である。主電源Ｖ_CCの高電位側をＶ_CCH、低電位側をＶ_CCLと表した場合、Ｖ_CCH に接続されるＩＧＢＴＱ１〜Ｑ３を駆動するためには、ＩＧＢＴのゲート電極の電位はこれよりさらに高電位となるため、駆動回路にはフォトカプラ（ＰＣ：ＰｈｏｔｏＣｏｕｐｌｅｒ）や高耐圧ＩＣ（ＨＶＩＣ：ＨｉｇｈＶｏｌｔａｇｅＩｎｔｅｇｒａｔｅｄＣｉｒｃｕｉｔ）が用いられる。駆動回路の入出力端子Ｉ／Ｏ（Ｉｎｐｕｔ／Ｏｕｔｐｕｔ）は通常マイクロコンピュータへ接続され、そのマイクロコンピュータによりインバータ全体の制御がなされる。
【０００４】
図３４は図３３で用いられる高耐圧ＩＣ（ＨＶＩＣ）の内部構成ユニットのブロック図を示す。その構成をつぎに説明する。入出力端子Ｉ／Ｏを通してマイクロコンピュータと信号のやりとりを行い、どのＩＧＢＴをオンさせ、どれをオフさせるかの制御信号を発生させる制御回路ＣＵ（ＣｏｎｔｒｏｌＵｎｉｔ）と、この制御回路ＣＵからの信号を入力ラインＳＩＮ４〜６で受けてＩＧＢＴのゲートドライブ用の出力ラインＯＵＴ４〜６から信号を出力し、またＩＧＢＴの過電流を電流検出端子[14]ＯＣ４〜６で、過熱を温度端子[15]ＯＴ４〜６で検出し、異常信号を出力ラインＳＯＵＴ４〜６で出力し、図３３の主電源Ｖ_CCの低電位側Ｖ_CCLに接続するＩＧＢＴＱ４〜Ｑ６を駆動する、ゲート駆動回路ＧＤＵ（ＧａｔｅＤｒｉｖｅＵｎｉｔ）４〜６と、ＧＤＵ４〜６と同じ機能で主電源Ｖ_CCの高電位側Ｖ_CCHに接続するＱ１からＱ３を駆動するゲート駆動回路ＧＤＵ１〜３と、Ｖ_CCLレベルの制御回路ＣＵの信号とＶ_CCH レベルとＶ_CCLレベルの間を行き来するＧＤＵ１〜３の信号（ＳＩＮ１〜３、ＳＯＵＴ１〜３）との間を媒介する働きをするレベルシフト回路ＬＳＵ（ＬｅｖｅｌＳｈｉｆｔＵｎｉｔ）とから構成されている。ＧＤＵ１〜３のドライブ電源（図３５参照）Ｖ_DD1〜Ｖ_DD3の高電位側をＶ_DDH1〜Ｖ_DDH3、低電位側をＶ_DDL1〜Ｖ_DDL3で示し、ＧＤＵ４〜６のドライブ電源は共通電源Ｖ_DDC（図３５でも省略されている）であり、この共通電源Ｖ_DDCの高電位側をＶ_DDHC、低電位側をＶ_DDLCで示す。またＧＤＵ４〜６およびＣＵのドライブ共通電源Ｖ_DDCは１０〜２０Ｖ程度であり、この共通電源Ｖ_DDCの低電位側Ｖ_DDLCは図３３の主電源Ｖ_CCの低電位側Ｖ_CCLに接続する。
【０００５】
図３５は図３４のＧＤＵ１とＩＧＢＴＱ１のさらに詳細な接続図を示す。ここではその他のＧＤＵとＩＧＢＴは省略している。ＧＤＵ１のドライブ電源Ｖ_DD1は１０〜２０Ｖ程度であり、その低電位側Ｖ_DDL1はＩＧＢＴＱ1 のエミッタ端子Ｅに即ちインバータ出力のＵ相に接続され、ＩＧＢＴＱ１のコレクタ端子Ｃが主電源Ｖ_CCの高電位側Ｖ_CCHに接続されている。このため、ＩＧＢＴＱ１がオンした時はＶ_DDL1の電位はＶ_CCHの電位とほぼ等しくなり、またＩＧＢＴＱ１がオフした時はＶ_DDL1の電位はＶ_CCLの電位とほぼ等しくなる。従って、ＧＤＵ１と他の回路ユニットとの間には主電源Ｖ_CCの電圧より、さらに高い絶縁耐圧が必要であり、このことはＧＤＵ２、３についても同様である。そしてレベルシフト回路ＬＳＵはそれ自体が高耐圧でなければならない。同図においてＩＧＢＴＱ１は電流検出端子[16]Ｍと温度検出素子θおよび温度検出端子[17]Ｔｅｍｐを備え、ゲート駆動回路ＧＤＵ１は電流検出端子ＯＣ１や温度検出端子ＯＴ１によりＩＧＢＴＱ１の異常を検出し、異常信号を出力ラインＳＯＵＴ１から出力する。ＯＵＴ１はゲート駆動端子である。
【０００６】
図３６は図３３と同一回路をインテリジェントパワーモジュール[18]と呼ばれる製品を用いて構成した構成図である。この場合ゲート駆動回路ＧＤＵ１〜ＧＤＵ６は、低耐圧ＩＣや個別電子部品および半導体素子からなり、パワーデバイス（Ｑ１〜Ｑ６、Ｄ１〜Ｄ６）とともにパワーデバイス側のパッケージに備えられている。この場合でも、外付けの駆動回路としてはフォトカプラ（ＰＣ）や高耐圧ＩＣ（ＨＶＩＣ）が用いられる。
図３７は図３６のＩＧＢＴＱ１およびＧＤＵ１のまわりの回路を詳細に示したものである。ＳＩＮ１およびＳＯＵＴ１は外部の構成となるＰＣやＨＶＩＣに接続される。
【０００７】
またその他の構成例として、ＧＤＵ１とＱ１を１チップ（同一の半導体基板）に集積化するパワーＩＣ技術[19],[20] や図３６の全ての回路を１チップに集積化するパワーＩＣ技術[11],[12] も開示されている。
図３８は図３４に示した高耐圧ＩＣ（ＨＶＩＣ）のチップの平面図を示し、各回路ユニットの配置が分かるように描いている。他の回路ユニットから高耐圧で分離される必要のあるＧＤＵ１は接合分離[21],[22],[10]や誘電体分離[23],[11],[12]により電気的に分離された島の中に形成されており、その周縁部を高耐圧接合終端構造[11],[21] ＨＶＪＴ（絶縁するために高電圧が印加される接合の終端部の構造をいう）により囲まれている。レベルシフト回路ＬＳＵの中には主電源Ｖ_CCの低電位側の電位Ｖ_CCLレベルの信号をドライブ電源Ｖ_DD1の低電位側の電位Ｖ_DDL1レベルの信号（入力ラインＳＩＮ１の信号）にレベルシフトするための高耐圧ｎチャネルＭＯＳＦＥＴ（ＨＶＮ）が設けられている。この高耐圧ｎチャネルＭＯＳＦＥＴには、中心のドレイン電極Ｄ_Nを囲んで高耐圧接合終端構造[10],[11] ＨＶＪＴが設けられている。またＧＤＵ１の分離された島の中にはＶ_DDL1レベルの信号（出力ラインＳＯＵＴ１の信号）をＶ_CCLレベルの信号にレベルシフトするための高耐圧ｐチャネルＭＯＳＦＥＴ（ＨＶＰ）が設けられており、この場合もドレイン電極Ｄ_Pを囲んで高耐圧接合終端構造ＨＶＪＴが設けられている。そして、ＧＤＵ１の入力ラインＳＩＮ１と出力ラインＳＯＵＴ１が、高耐圧接合終端構造ＨＶＪＴの上を通ってＧＤＵ１とＬＳＵの間にそれぞれ跨がって配線されている。また各ＧＤＵには図３５で示したＯＵＴ端子、ＯＣ端子、ＯＴ端子が配置され、ＧＤＵ１〜ＧＤＵ３にはＶ_DDH1〜Ｖ_DDH3の端子、Ｖ_DDL1〜Ｖ_DDL3の端子が配置され、またＧＤＵ４〜ＧＤＵ６にはＶ_DDHCの端子とＶ_DDLCの端子が配置されている。同図ではＧＤＵ１とＧＤＵ４の詳細な説明をし、他のＧＤＵは詳細な配置説明は省略した。
【０００８】
【発明が解決しようとする課題】
前記した従来の高耐圧ＩＣやパワーＩＣの課題は６００Ｖを越える高耐圧化が困難なこと、製造コストが高いことなどであるが、さらに詳細に説明すると次のようになる。
（１）分離技術に関する課題
先に述べたように、他の部分と電位の大きく異なる回路ユニット（例えば図３８のＧＤＵ１、２、３）を他の部分から電気的に高耐圧で分離する分離技術には誘電体分離[11],[12],[23]、接合分離[10],[21],[22]、自己分離[20],[24] などの技術がある。しかし誘電体分離や接合分離は分離構造が複雑で製造コストが高く、耐圧が高くなるほど、この製造コストがさらに高くなる。また自己分離は製造コストは低く抑えられるが、ＣＭＯＳ（相補形ＭＯＳＦＥＴ）構成では高耐圧化技術が未だ開発されておらず、一方、高耐圧化が可能なＮＭＯＳ（ｎチャネルＭＯＳＦＥＴ）構成ではアナログ回路（先で述べた電流検出回路や温度検出回路を指す）の高精度化が極めて困難である。（２）高耐圧接合終端構造ＨＶＪＴに関する課題
高耐圧接合終端構造は、縦型パワーデバイス用のもの[25],[26] 、横型高耐圧デバイス用のもの[27],[28],[29]など個々の用途別に各種構造が開示されている。しかしながら、高耐圧化したＩＣであるＨＶＩＣやパワーデバイスを集積した高耐圧パワーＩＣにおいては、集積回路ユニット間の高耐圧接合終端構造（図３８のＧＤＵ１〜３の回り）、高耐圧横型ｎチャネルＭＯＳＦＥＴ用の高耐圧接合終端構造（図３８のＨＶＮのＤ_Nの回り）、高耐圧横型ｐチャネルＭＯＳＦＥＴ用の高耐圧接合終端構造（図３８のＨＶＰのＤ_Pの回り）、さらには縦型パワーデバイス用の高耐圧接合終端構造など多くの用途の高耐圧接合終端構造を同一チップ上に形成する必要がある。従来のような汎用性の少ない構造で高耐圧ＩＣやパワーＩＣを実現しようとすると、多くの異なる高耐圧接合終端構造ＨＶＪＴを同一チップ上に形成しなければならず、製造コストが高くなる。（３）配線下の高耐圧接合終端構造に関する課題
高耐圧ＩＣでは、電位の大きく異なる集積回路ユニット（例えば図３８のＧＤＵ１とＬＳＵ）間での信号のやり取りを行うため、高耐圧接合終端構造ＨＶＪＴ上に配線を通すことが必要とされる。ところが、高耐圧接合終端構造ＨＶＪＴ上を配線を通すとこの配線の電位の影響を受けて、高耐圧接合終端構造ＨＶＪＴの耐圧が低下する問題がある[30]。この問題を解決するために、いくつかの構造[10],[11],[12],[31] が提案されているが、構造が複雑なため製造コストが高くなる。またこれらの提案されている構造では配線の影響を皆無にできなく、耐圧低下の程度を少なくしている丈であり、６００Ｖ程度の耐圧までは実用化できても、それ以上の耐圧のものはまだ実現していない。
【０００９】
この発明は、前記課題を解決するために、高耐圧に耐える第二領域および第四領域を設け、縦型パワーデバイスの高耐圧接合終端構造、集積回路ユニット間を分離する高耐圧接合終端構造、ｎチャネルまたはｐチャネルの高耐圧横型ＭＯＳＦＥＴの高耐圧接合終端構造など幅広く利用できる汎用性が高く、低コストな高耐圧接合終端構造とし、配線が横切っても耐圧が低下せずに高耐圧が維持できる、低コストな高耐圧接合終端構造とすることで、製造コストの低い高耐圧ＩＣを提供することができる。参考文献〔１〕USP 4,364,073(IGBT関連)〔２〕USP 4,893,165(ノンパンチスルー形IGBT関連)〔３〕USP 5,008,725(パワーMOSFET関連)〔４〕EP 0,071,916、特開昭58-39065に対応( 高速ダイオード内蔵パワーMOSFET関連)〔５〕USP 5,091,664(駆動回路関連)〔６〕USP 5,287,023(駆動回路関連)〔７〕USP 4,947,234(低耐圧ICとパワーデバイス関連)〔８〕USP 4,937,646(低耐圧ICとパワーデバイス関連)〔９〕A.Wegener and M.Amato "A HIGH VOLTAGE INTERFACE IC FOR HALF-BRIDGECIRCUITS" Electrochemical Society Extended Abstracts, vol.89-1,pp.476-478(1989)〔１０〕T.Terashima et al "Structure of 600V IC and A New Voltage Sensing Device" IEEE Proceeding of the 5th International Symposium on Power Semiconductor Devices and ICs,pp.224-229(1993)〔１１〕K.Endo et al "A 500V 1A 1-chip Inverter IC with a New Electric Field Reduction Structure" IEEE Proceeding of the 6th International Symposium on Power Semiconductor Devices and ICs,pp.379-383(1994)〔１２〕N.Sakurai et al "A three-phase inverter IC for AC220V with a drasticall small chip size and highly intelligent functions" IEEE Proceeding of The 5th International Symposium on Power Semiconductor Devices andICs,pp.310-315(1993)〔１３〕M.Mori et al "A HIGH POWER IGBT MODULE FOR TRACTION MOTOR DRIVE"IEEE Proceeding of the 5th International Symposium on Power Semiconductor Devices and ICs,pp.287-289(1993)〔１４〕USP 5,159,516 （電流検出方法関連）〔１５〕USP 5,070,322 （温度検出方法関連）〔１６〕USP 5,097,302 （電流検出用素子関連)〔１７〕USP 5,304,837 （温度検出用素子関連)〔１８〕K.Reinmuth et al "Intelligent Power Modules for Driving Systems"IEEE Proceeding of the 6th International Symposium on Power Semiconductor Devices and ICs,pp.93-97(1994)〔１９〕USP 4,677,325 (IPS関連）〔２０〕USP 5,053,838 (IPS関連）〔２１〕R.Zambrano et al "A New Edge Structure for 2kVolt Power IC Operation" IEEE Proceeding of the 6th International Symposium on Power Semiconductor Devices and ICs,pp.373-378(1994)〔２２〕M.F.Chang et al "Lateral HVIC with 1200-V Bipolar and Field-Effect Devices"IEEE Transactions on Electron devices, vol.ED-33, No.12, pp.1992-2001(1986)〔２３〕T.Ohoka et al "A WAFER BONDED SOI STRUCTURE FOR INTELLIGENT POWER ICs" IEEE Proceeding of the 5th International Symposium on Power Semiconductor Devices and ICs,pp.119-123(1993)〔２４〕J.P.MILLER "A VERY HIGH VOLTAGE TECHNOLOGY(up to 1200V) FOR VERTICAL SMART POEWR ICs" Electrochemical Society Extended Abstracts, vol.89-1, pp.403-404(1989)〔２５〕USP 4,399,449 （パワーデバイスのHVJT関連)〔２６〕USP 4,633,292 （パワーデバイスのHVJT関連)〔２７〕USP 4,811,075 （横型MOSFETのHVJT関連)〔２８〕USP 5,258,636 （横型MOSFETのHVJT関連)〔２９〕USP 5,089,871 （横型MOSFETのHVJT関連）〔３０〕P.K.T.MOK and C.A.T.SALAMA "Interconnect Induced Breakdown in HVIC's" Electrochemical Society Extended Abstracts, vol. 89-1, pp. 437
-38(1989)〔３１〕USP 5,043,781 ( パワーIC関連)
【００１０】
【課題を解決するための手段】
この発明は前記の目的を達成するために、第一導電形の第一領域と、第一領域の第一主面の表面層に選択的に形成された第二導電形の第二領域と、第二領域の表面層に選択的に形成された第一導電形の第三領域と、第三領域と離れて第二領域の表面層に選択的に形成された第一導電形の第一ソース領域および第一ドレイン領域と、第一ソース領域および第一ドレイン領域に挟まれた第二領域の表面上に絶縁膜を介して形成された第一ゲート電極とを備える第一導電形チャネルのＭＩＳトランジスタと、第三領域の表面層に選択的に形成された第二導電形の第二ソース領域および第二ドレイン領域と、第二ソース領域および第二ドレイン領域に挟まれた第三領域の表面上に絶縁膜を介して形成された第二ゲート電極を備えた第二導電形チャネルのＭＩＳトランジスタと、前記第二領域内に形成された第一導電形チャネルのＭＩＳトランジスタと前記第三領域内に形成された第二導電形チャネルのＭＩＳトランジスタとを取り囲み第二領域内に形成された第一導電形の領域からなる第一の高耐圧接合終端構造と、前記第二領域内にループ状に形成された第一導電形の領域からなる第二の高耐圧接合終端構造と、該第二の高耐圧接合終端構造のループの内側のドレイン電極とループの外側のゲート電極とソース電極とからなる高耐圧ＭＩＳトランジスタとを備え、第一の高耐圧接合終端構造の第一導電形の領域と第二の高耐圧接合終端構造の第一導電形の領域とが連結した同一の層である。
【００１１】
【００１２】
また第一導電形の第一領域と、第一領域の第一主面の表面層に選択的に形成された第二導電形の第二領域と、第二領域の表面層に選択的に形成された第一導電形の第三領域と、第三領域と離れて第二領域の表面層に選択的に形成された第一導電形の第一ソース領域および第一ドレイン領域と、第一ソース領域および第一ドレイン領域に挟まれた第二領域の表面上に絶縁膜を介して形成された第一ゲート電極とを備える第一導電形チャネルのＭＩＳトランジスタと、第三領域の表面層に選択的に形成された第二導電形の第二ソース領域および第二ドレイン領域と、第二ソース領域および第二ドレイン領域に挟まれた第三領域の表面上に絶縁膜を介して形成された第二ゲート電極を備えた第二導電形チャネルのＭＩＳトランジスタと、前記第二領域内に形成された第一導電形チャネルのＭＩＳトランジスタと前記第三領域内に形成された第二導電形チャネルのＭＩＳトランジスタとを取り囲み第二領域内に形成された第一導電形の領域からなる第一の高耐圧接合終端構造と、前記第二領域内に切り欠きを有するループ状（一部開いているループの形をしている状態をいう）に形成された第一導電形の領域からなる第二の高耐圧接合終端構造と、該第二の高耐圧接合終端構造のループの内側のドレイン電極とループの外側のゲート電極とソース電極とからなる高耐圧ＭＩＳトランジスタとを備え、ドレイン電極からの第一の出力配線が第二領域上に延在している領域下（前記の一部ループが開いている部分に相当する）の第二領域表面に第一導電形の領域を形成せず、かつ第一の高耐圧接合終端構造の第一導電形の領域と第二の高耐圧接合終端構造の第一導電形の領域とが連結した同一の層である。
【００１３】
この発明によれば、他の回路ユニットから高耐圧で分離された回路ユニット（例えば図２や図６のＧＤＵ１）のための高耐圧接合終端構造と第二導電形チャネルの高耐圧ＭＩＳトランジスタ（例えば図６のＨＶＮ）の高耐圧接合終端構造とを同じ工程で同一チップ上に作り込めるので、低コストな高耐圧ＩＣが得られる。電位の大きく異なる回路ユニット間の信号の伝達を行う（レベルシフトのこと）ための第二導電形チャネルの高耐圧ＭＩＳトランジスタの第一のドレイン電極の第一の出力配線をこれと電位差の比較的小さい第二領域上へ延ばすだけなので、この第一の出力配線が大きな電位差のある高耐圧接合終端構造部分を横切らず小さな電位差の高耐圧接合構造部分だけを横切る。したがって、課題の第３項で述べた配線が横切る高耐圧接合終端構造部分における耐圧低下の問題から完全に逃げることができる。これは、この発明の非常に大きな効果であり、複雑な構造を必要としないので、低コストでありながら、耐圧低下は全く発生しないので、数千Ｖの耐圧の高耐圧ＩＣでも実現可能となる。この構造は図１９、図２０、図２２で説明されている。
【００１４】
また、他の回路ユニットから高耐圧で分離された回路ユニット（例えば図２や図６のＧＤＵ１）のための高耐圧接合終端構造と第一導電形チャネルの高耐圧ＭＩＳトランジスタ（例えば図６のＨＶＰ）の高耐圧接合終端構造とを同じ工程で同一チップ上に作り込めるので、低コストな高耐圧ＩＣが得られる。
さらに、電位の大きく異なる回路ユニット間の信号の伝達を行う（レベルシフトのこと）ための第一導電形チャネルの高耐圧ＭＩＳトランジスタの第二のドレイン電極の第二の出力配線をこれと電位差の比較的小さい第一領域上（もしくは第一領域表面に形成された他の領域上）へ延ばすだけなので、この第二の出力配線が大きな電位差のある高耐圧接合終端構造部分を横切らず小さな電位差の高耐圧接合構造部分だけを横切る。したがって、課題の第３項で述べた配線が横切る高耐圧接合終端構造部分における耐圧低下の問題から完全に逃げることができる。これは、この発明の非常に大きな効果であり、複雑な構造を必要としないので、低コストでありながら、耐圧低下は全く発生しないので、数千Ｖの耐圧の高耐圧ＩＣでも実現可能となる。この構造は図１９、図２０、図２２で説明されている。
【００１５】
そして、より一層低コストで高耐圧ＩＣを製造できる。
【００１６】
【発明の実施の形態】
図１はこの発明の第１参考例の要部断面図を示す。図３８の高耐圧接合終端構造ＨＶＪＴに囲まれたＧＤＵ１〜３の部分にこの発明が適用されている。以下、一部実施例を除き第一導電形をｐ形、第二導電形をｎ形として説明する。
高耐圧ＩＣ（ＨＶＩＣ）はホウ素をドープしたｐ形半導体基板からなる第一領域１と、その表面層に選択的にリンのイオン注入を行って高温の熱拡散により形成したｎ形の第二領域２と、第二領域２の表面層に選択的にホウ素のイオン注入を行って高温の熱拡散により形成したｐ形の第三領域３と、第二領域２の表面層に選択的にリンをイオン注入し高温の熱拡散により形成したｎ形の第五領域５と、第三領域３の表面層に選択的にホウ素をイオン注入し高温の熱拡散により形成されたｐ形の第六領域６と、第二領域２の表面層に選択的に形成したｐ形の高濃度領域１１（第一ソース領域と第一ドレイン領域になる）とこのｐ形の高濃度領域１１に挟まれた第二領域２上にゲート絶縁膜１３を介して形成されたゲート電極となる多結晶シリコン膜１５とで構成されるｐチャネルＭＯＳＦＥＴ（ｐｃｈＭＯＳＦＥＴ）と、第三領域３の表面層に選択的に形成されたｎ形の高濃度領域１２（第二ソース領域と第二ドレイン領域になる）とこのｎ形の高濃度領域１２に挟まれた第三領域３上にゲート絶縁膜１３を介して形成されたゲート電極となる多結晶シリコン膜１５とで構成されるｎチャネルＭＯＳＦＥＴ（ｎｃｈＭＯＳＦＥＴ）と、第一領域１と第二領域２との間の第一のｐｎ接合１０４に高い逆バイアス電圧が印加されたときに表面付近での電界集中によるブレークダウンが生じないように、第一領域１を囲んで設けられた高耐圧接合終端構造ＨＶＪＴとからなる。ｐ形の高濃度領域１１は高濃度のホウ素がドープされ、ｎ形の高濃度領域は高濃度のリンがドープされている。ゲート絶縁膜１３は厚みが２００〜５００Å程度のシリコン酸化膜で形成される。第一領域１上、第二領域２上および第五領域５上の一部にフィールド絶縁膜１４が厚み５０００〜１００００Å程度のシリコン酸化膜で形成され、その上に選択的に導電膜であるリンドープされたｎ形の多結晶シリコン膜１５が厚さ３０００〜６０００Å程度で形成される。また、この多結晶シリコン膜１５は第三領域３と第二領域２の向かい合う領域にも同図に示すように形成される。層間絶縁膜１６は例えば常圧ＣＶＤ等により形成された、厚さ５０００〜１００００ÅのＢＰＳＧ膜である。第一金属膜１７は第一主面側の配線や電極として用いる例えば厚さ５０００〜１００００Å程度のＡｌ−１％Ｓｉ膜である。第一領域１の不純物濃度は１０¹³〜１０¹⁵ｃｍ^-3程度であり、例えば６００Ｖ耐圧の高耐圧ＩＣでは１．５×１０¹⁴ｃｍ^-3以下、１２００Ｖ耐圧の高耐圧ＩＣでは８×１０¹³ｃｍ^-3以下というように必要とする耐圧により適切な不純物濃度が異なる。第一領域１の不純物濃度と第二領域２の不純物のドープ量（ドーピング量）は第一領域１と第二領域２との間の第一のｐｎ接合１０４が高電圧に逆バイアスされたときでも第一のｐｎ接合１０４の両側に拡がる空乏層１０１の第二領域２側での空乏層端１０２が第三領域３へは届かず第二領域２内に止まるように設定される。これを満たすには、第三領域３下の第三領域３と第一領域１とに挟まれた第二領域２の部分の正味のドープ量を１×１０¹²ｃｍ^-2以上、３×１０¹³ｃｍ^-2以下にすることが効果的である。典型的な例を次に示す。第二領域２の形成を５×１０¹²〜１×１０¹³ｃｍ^-2のドープ量のリンの選択的なイオン注入と１１５０℃、３〜１０時間程度の熱拡散を行いその深さを３〜８μｍ程度に設定し、第三領域３の形成を１×１０¹³〜５×１０¹³ｃｍ^-2のドープ量のホウ素の選択的なイオン注入と１１００℃、２〜１０時間程度の熱拡散により行い、その深さを１〜４μｍ程度に設定する。第五領域５および第六領域６のドープ量は１×１０¹⁴〜１×１０¹⁵ｃｍ^-2程度、ｐ形およびｎ形の高濃度領域１１、１２のドープ量は１×１０¹⁵〜１×１０¹⁶ｃｍ^-2程度である。高耐圧接合終端構造ＨＶＪＴは、従来技術の引用文献の中から色々な構造を用いることが可能であり、また引用した以外の構造も用いることもできる。第二領域２内に設けた比較的高濃度にドープされたｎ形の第五領域５は、第一領域１をコレクタ、第二領域２をベース、第三領域３をエミッタとする寄生バイポーラトランジスタのベース抵抗を低く抑えて、その誤動作を防ぐためのものである。この第五領域５は、第三領域に対向する第二領域２の表面層や第一領域１に対向する第二領域２の表面層に形成し、できる限り第三領域３の回りを概ね囲うように設けたり、第二領域２表面上でＭＯＳＦＥＴなどの素子を形成しない領域（フィールド領域）の大半を覆うように設けたりすることで誤動作を防止する効果が高まる。また第三領域３内に設けた比較的高濃度にドープされたｐ形の第六領域６は第二領域２をコレクタ、第三領域３をベース、ｎ形の高濃度領域１２をエミッタとする寄生バイポーラトランジスタのベース抵抗を低く抑えてその誤動作を防ぐものである。この第六領域６においても、前記第五領域５の形成と同様の配置上の工夫することで効果を高めることができる。
【００１７】
同図に示した高耐圧ＩＣ（ＨＶＩＣ）の例は第一導電形がｐ形、第二導電形がｎ形であるので、第一領域１は図３４のＶ_DDLC即ち図３３のＶ_CCL に接続され、第三領域３は図３４のＶ_DDL1即ち図３３のＵ相に接続され、第二領域２は１５Ｖ程度のドライブ電源Ｖ_DD1から高電位側の出力Ｖ_DDH1が接続される。また同図では簡略化のため、第二領域２および第三領域３内にｐチャネルＭＯＳＦＥＴとｎチャネルＭＯＳＦＥＴのみを図示したが、実際はこれらの素子以外に抵抗やコンデンサ、ダイオードやバイポーラトランジスタなどの各種デバイスを多数集積化して形成することができ、これらのデバイスを用いてゲート駆動回路ＧＤＵ１（図３３および図３５）を構成することができる。そして、後述する構造の高耐圧ｎチャネルＭＯＳＦＥＴ（ＨＶＮ）や高耐圧ｐチャネルＭＯＳＦＥＴ（ＨＶＰ）を図３８に示したように加え、ＧＤＵ１とＬＳＵとの間の信号配線である入力ラインＳＩＮ１と出力ラインＳＯＵＴ１を形成すれば図３３〜図３５に説明した高耐圧ＩＣとなる。
【００１８】
図２は第２参考例を示す要部構造図で、同図（ａ）は図３８におけるＧＤＵ１と高耐圧接合終端構造ＨＶＪＴに対応する部分の要部平面図で、同図（ｂ）は同図（ａ）のＸ−Ｘで切断した要部断面図である。同図（ａ）において、ＧＤＵ１は高耐圧接合終端構造ＨＶＪＴに周囲を囲まれた第二領域２および第四領域４に形成されている。同図（ｂ）において、第二領域２に囲まれて、第二領域２とは分離されたｎ形の第四領域４が設けられ、この第二領域２と第四領域４とに跨がって多結晶シリコンからなるループ状の第一導電膜７がフィールド絶縁膜１４を介して設けられている。この第一導電膜７と図１の多結晶シリコン膜１５とは同様の働きをする。同図（ｂ）では第四領域４は一つしか描いていないが、当然必要により複数（もしくは多数）設けることもできる。第四領域４は第二領域２の形成と同時にリンを選択的にイオン注入するときのマスクのパターン形状を変えるだけで形成される。この第四領域４にはｎｐｎトランジスタを形成した例が示してあり、第六領域６の形状と同時に形成したベース領域３１、ｎ形の高濃度領域１２の形成と同時に形成したエミッタ領域３２およびコレクタとしての第二領域２を備え、第二領域２内に設けるのと同じ理由で第四領域４にも第五領域５を設けている。第二領域２内と第三領域３内とにｐチャネルＭＯＳＦＥＴ（ｐｃｈＭＯＳＦＥＴ）とｎチャネルＭＯＳＦＥＴ（ｎｃｈＭＯＳＦＥＴ）とを設けた例を示しているが、第二領域２および第三領域３には前記同様多くの種類のデバイスを集積化することができ、また同様に第四領域４にも第三領域３と同様のｐ形の領域（図示されていないが仮に第七領域と呼ぶこととする）を設けて、この第四領域４および第七領域に多くの種類のデバイスを集積化することができる。第四領域４は第二領域２のドライブ電源Ｖ_DD1 と異なる電源Ｖ_EE1 （例えば１５ＶのＶ_DD1を降圧安定化したアナログ回路用の１０Ｖ電源やロジック回路用の５Ｖ電源など）の回路ユニットとして利用でき、また同図（ｂ）に示すようにコレクタ（Ｃ）が第二領域２から独立したバイポーラトランジスタとしても利用することができるので、この第四領域４の利用により回路設計の自由度が非常に大きくなる。
【００１９】
また同図（ｂ）において、第二領域２と第四領域４に挟まれた第一領域１表面上にはフィールド絶縁膜１４を介して第二領域２と第四領域４とに跨がる導電膜７が設けられており、高電圧が印加される第一領域１と第二領域２との間の第一のｐｎ接合１０４と第一領域１と第四領域４との間の第四のｐｎ接合１０５が不連続であることによる電界集中を防止し、高い耐圧が確保できるようになっている。この導電膜７は浮遊電位状態（フローティング）にしておくよりも、第二領域２もしくは第四領域４に電気的に接続し、電位的に安定化しておく方が好ましい。また第二領域２と第四領域４の間の分離耐圧を高くとりたい場合には、第一導電形がｐ形の場合は、この第一導電膜７を第二領域２と第四領域４のうち低電位側の領域に接続し、ｎ形の場合は高電位側の領域に接続するとよい。こうすれば、第一導電膜７をゲートとする寄生のＭＯＳＦＥＴがオンし難くなるからである。
【００２０】
図３は第３参考例を示す要部構造図で、同図（ａ）はゲート駆動回路ユニットを１チップ化したときの平面図、同図（ｂ）はその断面図、同図（ｃ）はゲート駆動回路ユニット（１チップ化されている）とパワーデバイス（例えばＩＧＢＴとダイオード）とがヒートシンク上に形成された断面図である。ここでは前記説明とは導電形を逆にし、第一導電形をｎ形、第二導電形をｐ形とした。
同図（ａ）において、ｎ形の第一領域１上に高耐圧接合終端構造ＨＶＪＴに囲まれてｐ形の第二領域２が設けられている。この図は図２、３、６のゲート駆動回路ユニットであるＧＤＵ１部分だけを１チップに集積化した高耐圧ＩＣ（ＧＤＵＩＣ１）の平面図を示す。
【００２１】
同図（ｂ）において、ｎ形の第一領域１に形成されたｐ形の第二領域２およびｎ形の第三領域３に、ｎチャネルＭＯＳＦＥＴ（ｎｃｈＭＯＳＦＥＴ）とｐチャネルＭＯＳＦＥＴ（ｐｃｈＭＯＳＦＥＴ）がそれぞれ形成されている。この第二領域２および第三領域３にも当然多くの種類のデバイスが集積化できる。この高耐圧ＩＣ（ＧＤＵＩＣ１）の裏面には、例えばＴｉ／Ｎｉ／Ａｕの三層の金属膜からなる第二金属膜１８が設けられ、はんだで金属板と固着できるようにしてある。
同図（ｃ）において、高耐圧ＩＣ（ＧＤＵＩＣ１）がｎチャネル形の縦型パワーデバイスＱ１（ＩＧＢＴなど）およびダイオードＤ１と共に図３３および図３５のＶ_CCH に接続されることになる金属板３３上にはんだ接合で固着される。この場合、第一導電形がｎ形であるので、この高耐圧ＩＣ（ＧＤＵＩＣ１）の裏面をパワーデバイスの裏面（コレクタまたはドレイン）が固着している金属板３３に接着しても、第一領域１と第二領域２との間の第一のｐｎ接合１０４は常に逆バイアスとなり、第二領域２に形成された各種デバイスは第一領域１から電気的に絶縁され、動作上全く問題ない。尚、金属板３３は例えばセラミックからなる絶縁板３４を介して銅やアルミニウムからなるヒートシンク３５上に設置されている。
【００２２】
図４は第４参考例の要部構造図を示し、同図（ａ）はＧＤＵ１の部分だけを１チップに集積化した高耐圧ＩＣであるＧＤＵＩＣ１の平面図、同図（ｂ）はその断面図、同図（ｃ）はＧＤＵＩＣ１をパワーデバイスＱ１のエミッタ（もしくはソース）電極上に固着した断面図である。同図（ａ）は図３（ａ）と同じであるため説明は省略する。同図（ｂ）において、第一領域１および第三領域３はｐ形、第二領域２はｎ形である。また同図（ｃ）において、ＧＤＵＩＣ１とパワーデバイスＱ１のエミッタ（もしくはソース）電極との固着は例えばエポキシ系の接着剤が使用できる。またこの場合も第一導電形がｐ形であればｐｎ接合１０４は常に逆バイアスとなるので、前記で述べたように動作上全く問題ない。
【００２３】
図５は第５参考例の要部構造図を示し、同図（ａ）は平面図、同図（ｂ）は断面図である。同図（ａ）において、高耐圧接合終端構造ＨＶＪＴでｎチャネル形の縦型パワーデバイスＱ１（ここではＩＧＢＴを示す）が囲まれ、さらにＧＤＵ１がこのパワーデバイスＱ１で囲まれている。
同図（ｂ）において、Ｑ１のｐ形のベース領域３６に囲まれた第二領域２がｎ形のドリフト領域４０である第一領域１の表面層に形成されている。第二領域２とＱ１のベース領域３６の間の第一領域１の表面にフィールド絶縁膜１４を介して第一導電膜７が形成される。この第一導電膜７はＱ１のエミッタ電極と共に図２の第一導電膜７と同じ働きをする。Ｑ１はＩＧＢＴを示し、第一領域１の第二主面側にｎ⁺ バッファ層３８およびｐ⁺ 基板３９があり、ｐ⁺基板３９表面上に第二金属膜１８が形成され、周縁部はパッシベーション膜１９（例えば１００００Åのシリコン窒化膜）が被覆されている。
【００２４】
図６は第６参考例の要部平面図、図７は第７実施例の要部平面図を示す。図３の参考例ではＧＤＵ１のみの例を示したが、これらの図は図３４および図３８に示すものに対応した参考例で、図６は高耐圧接合終端構造ＨＶＪＴがＧＤＵ４〜ＧＤＵ６とＣＵおよびＬＳＵを一括して取り囲んでいる参考例を示し、図７は高耐圧接合終端構造ＨＶＪＴが図３８の各回路ユニットを一括して取り囲んでいる参考例を示す。図７は図６と比べ、入力ラインＳＩＮ１、出力ラインＳＯＵＴ１の各配線が横切る高耐圧接合終端構造ＨＶＪＴの数が少ないため、（図６は３個、図７は２個）、耐圧低下が起こり難い。また各回路ユニットの説明は前記と同様のため省略する。
【００２５】
図８以降において、図中の番号の（）内の番号は、図１ないし図５の参考例に対応する番号と同じ製造方法で、それらと同時に同一チップ上に形成され得るものであることを示している。また第一導電形をｐ形、第二導電形をｎ形とした場合で説明する。当然逆の導電形にしてもよい。
図８は第８参考例でダイオードに用いた場合の高耐圧接合終端構造図を示し、同図（ａ）は要部断面図、同図（ｂ）、同図（ｃ）は平面図である。
同図（ａ）において、第一領域１はホウ素をドープした半導体基板で濃度は１０¹³〜１０¹⁵ｃｍ^-3程度である。この濃度は必要とする耐圧により異なる。第八領域８は、第一領域１の表面からの選択的なリンのイオン注入（ドーズ量：３×１０¹²〜１×１０¹³ｃｍ^-2程度）と１１５０℃、３〜１０時間程度の熱拡散により形成し、その拡散深さは３〜８μｍ程度である。第九領域９は、第八領域８の表面からの選択的なホウ素のイオン注入（ドーズ量：１×１０¹²〜１．５×１０¹³ｃｍ^-2程度）と１１５０℃、１〜５時間程度の熱拡散により形成し、その拡散深さは１．５〜５μｍ程度である。ｎ形の高濃度領域４５は、カソード電極Ｋと第八領域８の電気的接続を良好にするために設けた領域で、例えば選択的なリンのイオン注入（ドーズ量：１×１０¹⁴〜１×１０¹⁵ｃｍ^-2程度）と１０００〜１１００℃程度の熱処理により第五領域（図１参照のこと）と同時に形成される。ｐ形の高濃度領域４６は、アノード電極Ａと第九領域９の電気的接続を良好にするために設けた領域で、例えば選択的なホウ素のイオン注入（１×１０¹⁴〜１×１０¹⁵ｃｍ^-2程度）と１０００〜１１００℃程度の熱処理により第六領域６（図１参照のこと）と同時に形成される。フィールド絶縁膜１４および第九領域９上の絶縁膜４１は熱酸化膜で、膜厚は５０００〜１００００Å程度である。カソード電極Ｋとアノード電極Ａは例えばＡｌ−１％Ｓｉからなる第一金属膜１７からなり、膜厚は５０００〜１００００Å程度である。パッシベーション膜１９は、例えばアモルファスシリコン膜やシリコンリッチのＳｉＮ膜（窒化膜）で膜厚は５０００〜１５０００Å程度である。この場合、抵抗性フィールドプレートとして用いるために、高抵抗膜４４として第九領域９上の絶縁膜４１上にカソード電極Ｋと共通の第二導電膜４２とアノード電極Ａと共通の第三導電膜４３の双方に接触して設けられている。高抵抗膜４４の抵抗率はシート抵抗で１０¹³〜１０¹¹Ω／□程度である。第二導電膜４２および第三導電膜４３は、フィールドプレートとして第九領域９の上の絶縁膜４１上へ延在している。第九領域下の第一領域１と第九領域とに挟まれた第八領域部分１１６の正味のドーピング量は１×１０¹¹ｃｍ^-2以上、４×１０¹²ｃｍ^-2以下となるように設定されており、第九領域９の正味のドーピング量は１×１０¹¹ｃｍ^-2以上、２×１０¹²ｃｍ^-2以下となるように設定されている。これにより、第一領域１と第八領域８の間の第二のｐｎ接合１１１と第八領域８と第九領域９の間の第三のｐｎ接合１１２がともに逆バイアスされたときに、第二のｐｎ接合１１１の両側に拡がる第二の空乏層１１３と第三のｐｎ接合１１２の両側に拡がる第三の空乏層１１４とは第八領域８内で結合し、また第三の空乏層１１４は第九領域９の表面１１５まで達している。つまり、この高耐圧接合終端構造ＨＶＪＴのアノード電極Ａとカソード電極Ｋとに平面上で挟まれた第八領域８および第九領域９には、第一領域１まで達する空乏層（結合した第二の空乏層１１３と第三の空乏層１１４）が水平方向にも垂直方向にも拡がり、その結果高い耐圧が得られる。垂直方向に拡がるのは第一領域１が低濃度であるためである。第二導電膜４２は、第二導電形の高濃度領域４５近辺での電界集中を防ぐために、第三導電膜４３は、ｐ形の高濃度領域４６近辺での電界集中を防ぐために有効である。高抵抗膜４４は、第二導電膜４２と第三導電膜４３の間を高抵抗膜４４を介して流れる電流が、高抵抗膜４４に沿って生ずる水平方向の滑らかな電位分布を第九領域９上の絶縁膜４１の容量を介して絶縁膜下の半導体領域内へ静電的に作用させ、半導体領域の空乏層中の電位分布を水平方向に滑らかに安定化させるので、より一層小さい高耐圧接合終端構造の水平距離で高耐圧を得るために効果的である。
【００２６】
同図（ｂ）は、同図（ａ）の高耐圧接合終端構造の平面的な配置図を示し、同図（ａ）に一点鎖線で示した中心線を軸に同心円上の配置で、アノード電極Ａとカソード電極Ｋに挟まれた高耐圧接合終端構造ＨＶＪＴが円形のループで帯状に設けられている。この配置は小さい活性面積のデバイスに適する。
同図（ｃ）も、同図（ａ）の高耐圧接合終端構造ＨＶＪＴの平均的な配置の例であり、この場合大きい活性面積のデバイスに適するように櫛歯状に配置されたアノード電極Ａとカソード電極Ｋに挟まれた高耐圧接合終端構造ＨＶＪＴが、櫛歯の間をぬって曲がりくねった形のループで、帯状に設けられている。
【００２７】
尚、ループ状とは、帯状で、かつ円形や櫛歯形などの形状をした環状のものをいう。
図９は第９参考例の要部断面構造を示す。これは別の参考例であり、従来から高耐圧ＩＣに用いられている接合分離の構造に本発明を適用したものである。図８（ａ）との違いは、第八領域８が第一領域１上へのエピタキシャル成長により形成された層であり、したがって、この第八領域８を他の部分から電気的に分離するための高濃度のｐ形の分離領域４７を設けている点である。その他の部分は図８（ａ）と全く同じであり同じ番号を付けている。エピタキシャル成長により形成された第八領域８は厚さが５〜１５μｍ程度でリンが１×１０¹⁵から１×１０¹⁶ｃｍ^-3程度ドープされている。分離領域４７は、第八領域８のエピタキシャル成長後第九領域９の形成前に、例えばドーズ量が１×１０¹⁵ｃｍ^-2のホウ素の選択的なイオン注入と１２００℃、２〜１０時間程度の熱拡散により形成する。第八領域８のエピタキシャル成長による形成と分離領域４７の形成に関する分、図８の参考例よりコストは高くなり、また分離領域４７の形成のために、高温の熱処理が必要となり、この高温の熱処理で発生するシリコン結晶内の欠陥による良品率の低下も多少招くが、接合分離という従来技術の上にそのまま適用できるという便利さがある。同図の平面的な配置は図８（ｂ）、（ｃ）と同様である。
【００２８】
図１０は第１０参考例の要部断面図を示す。第一領域１、第八領域８、第九領域９、フィールド絶縁膜１４、第九領域９上の絶縁膜４１（１４）、第二導電膜４２および第三導電膜４３、パッシベーション膜１９、および高抵抗膜４４（１９）は図８の参考例と同じである。本参考例が違う点は、高耐圧接合終端構造ＨＶＪＴを挟んで、一方の側にｎ形の高濃度領域５０（１２）を介して第八領域８と電気的に接続された第一のドレイン電極Ｄ１（この場合、第二の導電体４２と共通）を備え、他方の側に第九領域９と電気的につながったｐ形のベース領域４８と、このベース領域４８中に選択的に設けられた高濃度のｎ形のソース領域４９と、第八領域８とソース領域４９とに挟まれたベース領域４８表面のｎチャネル領域５２と、少なくともチャネル領域上に設けられた第一のゲート絶縁膜５１および第三のゲート電極Ｇ１と、少なくとも前記ｎ形のソース領域４９に電気的に接続された第一のソース電極Ｓ１（この場合第三導電膜４３と共通）とを備えたｎ形チャネル（この場合ｎチャネル）の高耐圧ＭＩＳトランジスタ（この場合ＭＯＳＦＥＴ）であることと、第三のゲート電極Ｇ１と第一のソース電極Ｓ１との間の電気的な絶縁を行うための層間絶縁膜１６を備え、これがさらに第九領域９上の絶縁膜４１（１６）としても用いられる点である。同図の平面的配置も、図中の一点鎖線のいずれかを中心にした図８（ｂ）のような同心円状の配置や、図中の一点鎖線での折り返しによる同図（ｃ）のような櫛歯状の配置など、いろいろな配置が可能である。
【００２９】
図１１は、第１１参考例の要部断面図を示す。第一領域１、第八領域８、第九領域９、フィールド絶縁膜１４、第九領域９上の絶縁膜４１（１４）、第二および第三の導電体４２および４３、パッシベーション膜１９、および高抵抗膜４４（１９）は図８の参考例と同じである。本参考例が違う点は、高耐圧接合終端構造ＨＶＪＴを挟んで、一方の側に第八領域８表面上に選択的に形成されたｐ形のソース領域５６（１１）と、第九領域９とｐ形のソース領域５６（１１）とに挟まれた第八領域８表面のｐ形チャネル領域５４と、少なくともｐ形チャネル領域５４上に形成された第二のゲート絶縁膜５３（１３）およびこのゲート絶縁膜５３（１３）上の第四のゲート電極Ｇ２と、少なくとも前記ｐ形のソース領域５６（１１）と電気的に接続された第二のソース電極Ｓ２とを備え、他方の側に第九領域９とｐ形の高濃度領域５５（１１）を介して電気的に接続した第二のドレイン電極Ｄ２とを備えていることである。
【００３０】
図１２は第１２参考例の要部断面図を示す。高耐圧接合終端構造ＨＶＪＴに囲まれ、ｎ形の第八領域８とｎ形の第二領域２とを同一拡散工程で同時に形成し、第二領域２の表面層に選択的に形成されたｐ形の第三領域３と、第二領域２の表面層に形成されたｐ形チャネルのＭＩＳトランジスタと、第三領域３の表面層に形成されたｎ形チャネルのＭＩＳトランジスタとを形成する。また第二領域２と第八領域８を連結して一体の領域を形成してもよい。これ以降の図の説明で第八領域の番号を８（２）としたのは第二領域と同一工程で第八領域を形成し得ることを示している。また同図の平面的な配置は、図６のＧＤＵ１がその例となる。
【００３１】
図１３は第１実施例の要部平面図を示す。図３８の従来例との相違点は第一の出力配線６１と第二の出力配線６２下の電界強度を弱めるために、ＧＤＵ１を取り囲む第一の高耐圧接合終端構造ＨＶＪＴ１と、ＧＤＵ１内およびＬＳＵ内に形成される横型ＭＯＳＦＥＴを取り囲む第二の高耐圧接合終端構造ＨＶＪＴ２とが同一構造の高耐圧接合終端構造ＨＶＪＴで構成され、かつ一体となっている点である。このように構成することで、第一の出力配線６１および第二の出力配線６２と、これらの出力配線の下の高耐圧接合終端構造ＨＶＪＴの電位差を他の高耐圧接合終端構造ＨＶＪＴより小さくできる。そのため、これらの出力配線６１、６２の電位が高耐圧接合終端構造部の半導体表面の電位分布に及ぼす影響を軽減し、耐圧低下を防止できる。図中の符号は図３８と同一であるので、その説明は省略する。第一の出力配線６１、第二の出力配線６２は図３８のＳＩＮ１とＳＯＵＴ１に対応する。Ｓ１、Ｓ２は第一、第二のソース電極を示し、Ｄ１、Ｄ２は第一、第二のドレイン電極を示す。
【００３２】
図１４は電位差の強弱を図１３の平面図に示した図である。出力配線６１、６２付近では電位差が小さく、その他の箇所では大きい。
図１５は第２実施例の要部断面図で、図１３のＡ−Ａ線切断部の要部断面図と電位分布図を示し、同図（ａ）は要部断面図、同図（ｂ）は電位分布図である。
図１６は第２実施例の要部断面図で、図１３のＢ−Ｂ線切断部の要部断面図と電位分布図を示し、同図（ａ）は要部断面図、同図（ｂ）は電位分布図である。
【００３３】
図１７は第２実施例の要部断面図で、図１３のＣ−Ｃ線切断部の要部断面図と電位分布図を示し、同図（ａ）は要部断面図、同図（ｂ）は電位分布図である。
図１５ないし図１７において、図１３で示す高耐圧接合終端構造ＨＶＪＴがＧＤＵ１用と高耐圧ｎチャネルＭＯＳＦＥＴ（ＨＶＮ）用と高耐圧ｐチャネルＭＯＳＦＥＴ（ＨＶＰ）用とがそれぞれ共用の一体構造とすることで、高耐圧ｎおよびｐチャネルＭＯＳＦＥＴ（高耐圧ＭＩＳトランジスタの一つ）のドレイン電極Ｄ１、Ｄ２のまわりの高耐圧接合終端構造ＨＶＪＴのうち、ソース電極Ｓ１、Ｓ２のある側に面している高耐圧接合終端構造ＨＶＪＴ部分には約４００Ｖ程度（図１５ではＤ１の左側、図１６ではＤ２の右側）の高い電圧が印加されるのに対し、反対側に面している高耐圧接合終端構造ＨＶＪＴ部分には１５Ｖ程度の微小な電圧（図１５ではＤ１の右側、図１６ではＤ２の左側、つまり第一、第二の出力配線６１、６２のある側）が印加される丈である。この僅かな電位差しかない高耐圧接合終端構造ＨＶＪＴを横切らせて、第一、第二の出力配線６１、６２を配置することで、半導体領域の電位分布に殆ど影響を与えず配線することができる。したがって耐圧低下を生じさせずに配線できる。
【００３４】
図１８ないし図２０は第３実施例の要部断面図を示し、図１３のＡ−Ａ線、Ｂ−Ｂ線、Ｃ−Ｃ線の各切断部に相当する要部断面図を示す。これは第２実施例の変形例である。
図１８ないし図２０と図１５ないし図１７との違いは高電圧に曝される側の半導体領域にｎ形の高濃度領域５８を第一領域１と第二領域８（又は２）に跨がって埋め込み、さらにソース電極Ｓ１側である低電位側にｐ形の高濃度領域４７を第一領域１に接するように形成することでさらに前記の効果を高めている。
図２１は第４実施例の要部平面図を示す。図１３との違いは高耐圧接合終端構造ＨＶＪＴの平面的な配置のされ方であり、この実施例では第一、第二の出力配線６１、６２の近傍において、高耐圧接合終端構造ＨＶＪＴを設けていない点である。これは図１３〜図１７において説明したように、この領域には大きな電位差が発生しないので、必ずしも高耐圧接合終端構造ＨＶＪＴを設ける必要がない。
【００３５】
図２２ないし図２６は第４実施例の要部断面図と電位分布を示す。
図２２は図２１のＡ−Ａ線切断部の要部断面図と電位分布図を示し、同図（ａ）は要部断面図、同図（ｂ）は電位分布図である。図１５との違いは、第一の出力配線６１下の第九領域９がこの場合なくしてあり、第八領域８のみが設けられていることである。これは先に説明したように、この領域には大きな電位差が発生しないので高耐圧接合終端構造ＨＶＪＴを設ける必要がないためである。
図２３は図２１のＢ−Ｂ線切断部の要部断面図と電位分布図を示し、同図（ａ）は要部断面図、同図（ｂ）は電位分布図である。図１６との違いは、第二の出力配線６２下の第九領域９が設けられていないことであり、理由は図２２の場合と同じである。
【００３６】
図２４は図２１のＣ−Ｃ線切断部の要部断面図と電位分布図を示し、同図（ａ）は要部断面図、同図（ｂ）は電位分布図である。これらは図１７と同じであるので説明は省略する。
図２５は図２１のＸ−Ｘ線切断部の要部断面図と電位分布図を示し、同図（ａ）は要部断面図、同図（ｂ）は電位分布図である。第一の出力配線６１下には第九領域９が設けられていない。その理由は先に述べた通りで、この領域には大きな電位差が発生しないためである。
図２６は図２１のＹ−Ｙ線切断部の要部断面図と電位分布図を示し、同図（ａ）は要部断面図、同図（ｂ）は電位分布図である。第二の出力配線６２下には第九領域が設けられていない。その理由は先に述べた通りで、この領域には大きな電位差が発生しないためである。
【００３７】
図２７ないし図３１は第５実施例の要部断面図と電位分布図を示し、第４実施例の変形例である。
図２７は図２１のＡ−Ａ線切断部の要部断面図と電位分布図を示し、同図（ａ）は要部断面図、同図（ｂ）は電位分布図である。図２２との違いは、第一の出力配線６１下の第九領域９および第八領域８の両方とも設けられていない部分があることである。この理由も先に述べたのと同じである。ただし、この実施例のように第八領域８、第九領域９の両領域がなく、第一領域１の表面が第一の出力配線６１下にある場合には、後に示す図３０で説明するような注意が必要である。
【００３８】
図２８は図２１のＢ−Ｂ線切断部の要部断面図と電位分布図を示し、同図（ａ）は要部断面図、同図（ｂ）は電位分布図である。図２３との違いは、第二の出力配線６２下に第九領域９および第八領域の両領域とも設けられていないことであり、その理由は図２７の場合と同じである。
図２９は図２１のＣ−Ｃ線切断部の要部断面図と電位分布図を示し、同図（ａ）は要部断面図、同図（ｂ）は電位分布図である。これらは図１７と同じであるので説明は省略する。
図３０は図２１のＸ−Ｘ線切断部の要部断面図と電位分布図を示し、同図（ａ）は要部断面図、同図（ｂ）は電位分布図である。第一の出力配線６１下には第九領域９および第八領域８の両領域とも設けられていない。その理由は先に述べた通りで、この領域には大きな電位差が発生しないためである。ただし、第八領域８に挟まれた第一領域１が半導体基板の表面に達する部分は電位的に安定にするため、第一の出力配線６１で完全に覆った方がよい。そうしない場合にはその部分で耐圧低下が生じる場合があるからである。
【００３９】
図３１は図２１のＹ−Ｙ線切断部の要部断面図と電位分布図を示し、同図（ａ）は要部断面図、同図（ｂ）は電位分布図である。第二の出力配線６２下には第九領域および第八領域８の両領域とも設けられていない。その理由は先に述べた通りで、この領域には大きな電位差が発生しないためである。
図３２は第６実施例の要部平面図を示す。
この場合は高耐圧接合終端構造ＨＶＪＴは単なるループ状に設けられている。前記した図１３や図２１の場合は高耐圧接合終端構造ＨＶＪＴは平面的配置で凸凹形状に設けられていた。その理由は高耐圧ｎチャネルトランジスタＨＶＮのドレインＤ１とＧＤＵ１を形成する第二領域８（又は２）（例えば図１５）との距離および高耐圧ｐチャネルトランジスタＨＶＰのドレインＤ２とｐ形の高濃度領域５７（例えば図１９）との距離をそれぞれ大きくとることによって寄生的なもれ電流を小さくするためであった。
【００４０】
しかし図３２の場合は、高耐圧接合終端構造ＨＶＪＴが凸凹のない形状に設けられている。この場合は、図１３や図２１に比較して高耐圧接合終端構造の占める面積が小さくなるという利点がある。ただし、この場合は、前述した寄生的なもれ電流が大きくなり、高耐圧ＩＣの無効な消費電力の増大につながるデメリットも大きい。６００Ｖを越えるような高耐圧ＩＣの場合は図２１の実施例の方が適している。
【００４１】
【発明の効果】
この発明によれば、第一の高耐圧接合終端構造と第二の高耐圧接合終端構造で耐圧を確保するので、高耐圧接合終端構造部上に橋渡しする配線で耐圧低下が生じなくなる。またパワーデバイスを固着する金属板に温度検出部などを備える高耐圧ＩＣを固着したり、パワーデバイス上にこの高耐圧ＩＣを固着したり、また同一半導体基板にパワーデバイスとこの高耐圧ＩＣを集積することで高精度の温度検出ができる。以上のことから、低コストで高性能な高耐圧ＩＣの実現が可能となる。
【図面の簡単な説明】
【図１】この発明の第１参考例の要部断面図
【図２】この発明の第２参考例を示す要部構造図で、（ａ）はＧＤＵ１と高耐圧接合終端構造ＨＶＪＴに対応する部分の要部平面図で、（ｂ）は（ａ）のＸ−Ｘで切断した要部断面図
【図３】この発明の第３参考例を示す要部構造図で、（ａ）はゲート駆動回路ユニットを１チップ化したときの平面図、（ｂ）はその断面図、（ｃ）はゲート駆動回路ユニットとパワーデバイスとがヒートシンク上に形成された断面図
【図４】この発明の第４参考例の要部構造図を示し、（ａ）はＧＤＵ１の部分だけを１チップに集積化した高耐圧ＩＣであるＧＤＵＩＣ１の平面図、（ｂ）はその断面図、（ｃ）はＧＤＵＩＣ１をパワーデバイスＱ１のエミッタ（もしくはソース）電極上に固着した断面図
【図５】この発明の第５参考例の要部構造図を示し、（ａ）は平面図、（ｂ）は断面図
【図６】この発明の第６参考例の要部平面図
【図７】この発明の第７参考例の要部平面図
【図８】この発明の第８参考例でダイオードに用いた場合の高耐圧接合終端構造図を示し、（ａ）は要部断面図、（ｂ）は平面図、（ｃ）は別の平面図
【図９】この発明の第９参考例の要部断面構造図
【図１０】この発明の第１０参考例の要部断面図
【図１１】この発明の第１１参考例の要部断面図
【図１２】この発明の第１２参考例の要部断面図
【図１３】この発明の第１実施例の要部平面図
【図１４】図１３に電位差の強弱を示した図
【図１５】この発明の第２実施例で図１３のＡ−Ａ線切断部の要部断面図と電位分布図を示し、（ａ）は要部断面図、（ｂ）は電位分布図
【図１６】この発明の第２実施例で図１３のＢ−Ｂ線切断部の要部断面図と電位分布図を示し、（ａ）は要部断面図、（ｂ）は電位分布図
【図１７】この発明の第２実施例で図１３のＣ−Ｃ線切断部に相当する要部断面図と電位分布図を示し、同図（ａ）は要部断面図、同図（ｂ）は電位分布図
【図１８】この発明の第３実施例で図１３のＡ−Ａ線切断部に相当する要部断面図
【図１９】この発明の第３実施例で図１３のＢ−Ｂ線切断部に相当する要部断面図
【図２０】この発明の第３実施例で図１３のＣ−Ｃ線切断部に相当する要部断面図
【図２１】この発明の第４実施例の要部平面図
【図２２】この発明の第４実施例で図２１のＡ−Ａ線切断部の要部断面図と電位分布図を示し、（ａ）は要部断面図、（ｂ）は電位分布図
【図２３】この発明の第４実施例で図２１のＢ−Ｂ線切断部の要部断面図と電位分布図を示し、（ａ）は要部断面図、（ｂ）は電位分布図
【図２４】この発明の第４実施例で図２１のＣ−Ｃ線切断部の要部断面図と電位分布図を示し、（ａ）は要部断面図、（ｂ）は電位分布図
【図２５】この発明の第４実施例で図２１のＸ−Ｘ線切断部の要部断面図と電位分布図を示し、（ａ）は要部断面図、（ｂ）は電位分布図
【図２６】この発明の第４実施例で図２１のＹ−Ｙ線切断部の要部断面図と電位分布図を示し、（ａ）は要部断面図、（ｂ）は電位分布図
【図２７】この発明の第５実施例で図２１のＡ−Ａ線切断部に相当する要部断面図と電位分布図を示し、（ａ）は要部断面図、（ｂ）は電位分布図
【図２８】この発明の第５実施例で図２１のＢ−Ｂ線切断部に相当する要部断面図と電位分布図を示し、（ａ）は要部断面図、（ｂ）は電位分布図
【図２９】この発明の第５実施例で図２１のＣ−Ｃ線切断部に相当する要部断面図と電位分布図を示し、（ａ）は要部断面図、（ｂ）は電位分布図
【図３０】この発明の第５実施例で図２１のＸ−Ｘ線切断部に相当する要部断面図と電位分布図を示し、（ａ）は要部断面図、（ｂ）は電位分布図
【図３１】この発明の第５実施例で図２１のＹ−Ｙ線切断部に相当する要部断面図と電位分布図を示し、（ａ）は要部断面図、（ｂ）は電位分布図
【図３２】この発明の第６実施例の要部平面図
【図３３】モータ制御用インバータのパワー部分を中心に説明する回路構成図
【図３４】図３３で用いられる高耐圧ＩＣの内部構成のブロック図
【図３５】図３４のＧＤＵ１とＩＧＢＴＱ１のさらに詳細な接続図
【図３６】図３３と同一回路をインテリジェントパワーモジュールと呼ばれる製品を用いて構成した構成図
【図３７】図３６のＩＧＢＴＱ１のまわりの回路を詳細に示した構成図
【図３８】図３４に示した高耐圧ＩＣのチップの平面図
【符号の説明】
１第一領域
２第二領域
３第三領域
４第四領域
５第五領域
６第六領域
７第一導電膜
８第八領域
９第九領域
１１ｐ形の高濃度領域
１２ｎ形の高濃度領域
１３ゲート絶縁膜
１４フィールド絶縁膜
１５多結晶シリコン膜
１６層間絶縁膜
１７第一金属膜
１８第二金属膜
１９パッシベーション膜
３１ベース領域
３２エミッタ領域
３３金属板
３４絶縁板
３５ヒートシンク
３６ベース領域
３７ソース領域
３８ｎ⁺ バッファ層
３９ｐ⁺ 基板
４０ｎ形ドリフト領域
４１第九領域上の絶縁膜
４２第二導電膜
４３第三導電膜
４４高抵抗膜
４５ｎ形の高濃度領域
４６ｐ形の高濃度領域
４７ｐ形の分離領域
４８ベース領域
４９ｎ形のソース領域
５０ｎ形の高濃度領域
５１第一のドレイン電極
５２ｎ形のチャネル領域
５３第二のゲート絶縁膜
５４ｐ形のチャネル領域
５５ｐ形の高濃度領域
５６ｐ形のソース領域
５７ｐ形の高濃度領域
５８ｎ形の埋め込み領域
６１第一の出力配線
６２第二の出力配線
１０１空乏層
１０２空乏層端
１０４第一のｐｎ接合
１０５第四のｐｎ接合
１１１第二のｐｎ接合
１１２第三のｐｎ接合
１１３第二の空乏層
１１４第三の空乏層
１１５第九領域の表面
２０２第二領域（ＬＳＵ側）
２０５第五領域（ＬＳＵ側）
２１１ｐ形の高濃度領域
ＨＶＩＣ高耐圧ＩＣ
ＨＶＪＴ高耐圧接合終端構造
ｎｃｈＭＯＳＦＥＴｎチャネルＭＯＳＦＥＴ
ｐｃｈＭＯＳＦＥＴｐチャネルＭＯＳＦＥＴ
Ｖ_DD1 ドライブ電源
Ｓソース端子
Ｓ１第一のソース電極（端子）
Ｓ２第二のソース電極（端子）
Ｄドレイン端子
Ｄ１第一のドレイン電極（端子）
Ｄ２第二のドレイン電極（端子）
Ｇゲート端子
Ｇ１第三のゲート電極（端子）
Ｇ２第四のゲート電極（端子）
ＮＰＮｎｐｎトランジスタ
Ｅエミッタ端子
Ｂベース端子
Ｃコレクタ端子
Ｖ_EE1 電源
Ｑ１パワーデバイス（ＩＧＢＴ）
Ｑ２パワーデバイス（ＩＧＢＴ）
Ｑ３パワーデバイス（ＩＧＢＴ）
Ｑ４パワーデバイス（ＩＧＢＴ）
Ｑ５パワーデバイス（ＩＧＢＴ）
Ｑ６パワーデバイス（ＩＧＢＴ）
Ｄ１パワーデバイス（ダイオード）
Ｄ２パワーデバイス（ダイオード）
Ｄ３パワーデバイス（ダイオード）
Ｄ４パワーデバイス（ダイオード）
Ｄ５パワーデバイス（ダイオード）
Ｄ６パワーデバイス（ダイオード）
Ｍｏモータ
Ｖ_CC 主電源
ＰＣフォトカプラ
Ｉ／Ｏ入出力端子
ＣＵ制御回路
ＬＳＵレベルシフト回路
ＧＤＵ１ゲート駆動回路
ＧＤＵ２ゲート駆動回路
ＧＤＵ３ゲート駆動回路
ＧＤＵ４ゲート駆動回路
ＧＤＵ５ゲート駆動回路
ＧＤＵ６ゲート駆動回路
ＳＩＮ入力ライン
ＳＯＵＴ出力ライン
Ｖ_DDC 共通電源
Ｖ_DDHC 共通電源の高電位側
Ｖ_DDLC 共通電源の低電位側
Ｖ_DD ドライブ電源
Ｖ_DDH1 ドライブ電源の高電位側
Ｖ_DDH2 ドライブ電源の高電位側
Ｖ_DDH3 ドライブ電源の高電位側
Ｖ_DDL1 ドライブ電源の低電位側
Ｖ_DDL2 ドライブ電源の低電位側
Ｖ_DDL3 ドライブ電源の低電位側
ＯＵＴゲート駆動端子
ＯＣ電流検出端子
ＯＴ温度検出端子
Ｍ電流検出端子（ＩＧＢＴ側）
Ｔｅｍｐ温度検出端子（温度検出素子側）
θ 温度検出素子
Ｋカソード
Ａアノード
ＵＵ相
ＨＶＮ高耐圧ｎチャネルＭＯＳＦＥＴ
ＨＶＰ高耐圧ｐチャネルＭＯＳＦＥＴ
Ｄ_N ドレイン電極
Ｄ_P ドレイン電極[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a high breakdown voltage IC used for control drive of a power device and the like, and relates to a high breakdown voltage IC formed on a semiconductor substrate different from the power device or on the same semiconductor substrate.
[0002]
[Prior art]
Since there are many references here, the document names should be numbered together and listed at the end of the [Problem to be Solved by the Invention] section, and the number of the document name should be indicated by [] in the text. It was. The contents shown in parentheses after the USP No. in the reference document briefly explain the patent contents.
Power devices [1] to [4] are widely used in many fields such as inverters and converters for motor control, inverters for lighting, various power supplies, solenoid and relay drive switches, and the like. This power device has been driven and controlled by electronic circuits [5] and [6] that are configured by combining individual semiconductor elements and electronic components. However, in recent years, LSI (highly integrated IC, IC is an integrated circuit). ) Several tens of V class low voltage ICs [7], [8] and several hundred V class high voltage ICs [9], [10] using technology have been put into practical use. Power ICs [11] and [12], in which devices are integrated on the same semiconductor substrate, are used to achieve downsizing and high reliability of converters such as inverters and converters.
[0003]
FIG. 33 is a circuit diagram illustrating the power portion of the motor control inverter. The power device used to drive the three-phase motor Mo (here, IGBTs Q1 to Q6 and diodes D1 to D6 are shown) constitutes a bridge circuit and is a structure of the power module [13] housed in the same package I am doing. Here, IGBT is an insulated gate bipolar transistor. Main power supply V _CC Is usually a high voltage of 100 to 400 VDC. Main power supply V _CC The high potential side of _CCH , V on the low potential side _CCL V _CCH In order to drive the IGBTs Q 1 to Q 3 connected to the IGBT, the potential of the gate electrode of the IGBT becomes higher than this, so that a photocoupler (PC: Photo Coupler) or a high breakdown voltage IC (HVIC: High) is included in the drive circuit. (Voltage Integrated Circuit) is used. The input / output terminal I / O (Input / Output) of the drive circuit is normally connected to a microcomputer, and the microcomputer controls the entire inverter.
[0004]
FIG. 34 shows a block diagram of the internal configuration unit of the high voltage IC (HVIC) used in FIG. The configuration will be described next. A control circuit CU (Control Unit) that exchanges signals with the microcomputer through the input / output terminal I / O, generates a control signal for turning on and off which IGBT, and a signal from the control circuit CU. The signals are received by the input lines SIN4 to SIN6 and output from the IGBT gate drive output lines OUT4 to OUT6. The IGBT overcurrent is detected by the current detection terminals [14] OC4-6, and the overheat is detected by the temperature terminal [15] OT4. To 6 and output an abnormal signal on the output lines SOUT4 to SOUT6. _CC Low potential side V _CCL Gate drive circuits GDU (Gate Drive Unit) 4 to 6 for driving IGBTs Q4 to Q6 connected to the main power supply V with the same function as GDU4 to 6 _CC High potential side V _CCH Gate drive circuits GDU1 to GDU1 to drive Q1 to Q3 connected to V, and V _CCL Level control circuit CU signal and V _CCH Level and V _CCL It is composed of a level shift circuit LSU (Level Shift Unit) that acts as an intermediary between signals of GDU 1 to 3 (SIN 1 to 3, SOUT 1 to 3) that go back and forth between levels. Drive power supply for GDU 1 to 3 (see FIG. 35) V _DD1 ~ V _DD3 The high potential side of _DDH1 ~ V _DDH3 , V on the low potential side _DDL1 ~ V _DDL3 The GDU4-6 drive power supply is a common power supply V _DDC (This is also omitted in FIG. 35). _DDC The high potential side of _DDHC , V on the low potential side _DDLC It shows with. GDU4-6 and CU drive common power supply V _DDC Is about 10-20V, and this common power supply V _DDC Low potential side V _DDLC Is the main power supply V in FIG. _CC Low potential side V _CCL Connect to.
[0005]
FIG. 35 shows a more detailed connection diagram between GDU1 and IGBT Q1 of FIG. Other GDUs and IGBTs are omitted here. GDU1 drive power supply V _DD1 Is about 10 to 20V, and its low potential side V _DDL1 Is connected to the emitter terminal E of the IGBT Q1, that is, to the U phase of the inverter output, and the collector terminal C of the IGBT Q1 is connected to the main power source V. _CC High potential side V _CCH It is connected to the. Therefore, when IGBTQ1 is turned on, V _DDL1 The potential of V is V _CCH When the IGBT Q1 is turned off. _DDL1 The potential of V is V _CCL Is substantially equal to the potential. Therefore, the main power supply V is not connected between the GDU 1 and other circuit units. _CC A higher withstand voltage is required than the above voltage, and this is the same for the GDUs 2 and 3. The level shift circuit LSU must itself have a high breakdown voltage. In the figure, the IGBT Q1 includes a current detection terminal [16] M, a temperature detection element θ, and a temperature detection terminal [17] Temp. An abnormal signal is output from the output line SOUT1. OUT1 is a gate drive terminal.
[0006]
FIG. 36 is a configuration diagram in which the same circuit as FIG. 33 is configured using a product called an intelligent power module [18]. In this case, the gate drive circuits GDU1 to GDU6 are composed of a low breakdown voltage IC, individual electronic components, and semiconductor elements, and are provided in the power device side package together with the power devices (Q1 to Q6, D1 to D6). Even in this case, a photocoupler (PC) or a high voltage IC (HVIC) is used as an external drive circuit.
FIG. 37 shows a detailed circuit around the IGBT Q1 and GDU1 of FIG. SIN1 and SOUT1 are connected to an external PC or HVIC.
[0007]
As another configuration example, power IC technology [19], [20] for integrating GDU1 and Q1 on one chip (same semiconductor substrate) and power IC technology for integrating all the circuits in FIG. 36 on one chip. [11], [12] are also disclosed.
FIG. 38 is a plan view of the high breakdown voltage IC (HVIC) chip shown in FIG. 34, which is drawn so that the arrangement of each circuit unit can be understood. GDU1 that needs to be separated from other circuit units with high withstand voltage is electrically separated by junction separation [21], [22], [10] and dielectric separation [23], [11], [12] Is formed in the island, and its peripheral part is surrounded by a high-voltage junction termination structure [11], [21] HVJT (refers to the structure of the junction termination where high voltage is applied to insulate) ing. In the level shift circuit LSU, the main power supply V _CC V on the low potential side _CCL Level signal to drive power supply V _DD1 V on the low potential side _DDL1 A high breakdown voltage n-channel MOSFET (HVN) is provided for level shifting to a level signal (signal on the input line SIN1). This high breakdown voltage n-channel MOSFET has a central drain electrode D. _N A high-voltage junction termination structure [10], [11] HVJT is provided. There is a VDU in the isolated island of GDU1. _DDL1 Level signal (output line SOUT1 signal) is V _CCL A high breakdown voltage p-channel MOSFET (HVP) for level shifting to a level signal is provided, and also in this case, the drain electrode D _P Is surrounded by a high voltage junction termination structure HVJT. The input line SIN1 and the output line SOUT1 of the GDU1 are routed between the GDU1 and the LSU over the high voltage junction termination structure HVJT. Further, each GDU is provided with the OUT terminal, OC terminal, and OT terminal shown in FIG. 35, and GDU1 to GDU3 have V terminals. _DDH1 ~ V _DDH3 Terminal, V _DDL1 ~ V _DDL3 Terminals are arranged, and GDU4 to GDU6 have V _DDHC Terminal and V _DDLC Terminals are arranged. In the same figure, GDU1 and GDU4 are described in detail, and detailed arrangement description of other GDUs is omitted.
[0008]
[Problems to be solved by the invention]
The problems of the conventional high withstand voltage IC and power IC described above are that it is difficult to achieve a high withstand voltage exceeding 600 V, and the manufacturing cost is high. The details will be described as follows.
(1) Issues related to separation technology
As described above, dielectric separation [11] is a separation technique for electrically separating a circuit unit (for example, GDU1, 2, and 3 in FIG. 38) having a significantly different potential from other parts from other parts with high withstand voltage. ], [12], [23], junction separation [10], [21], [22], self-separation [20], [24]. However, dielectric separation and junction separation have a complicated separation structure and a high manufacturing cost. The higher the withstand voltage, the higher the manufacturing cost. In addition, although the self-isolation can keep the manufacturing cost low, a high voltage withstanding technology has not yet been developed in the CMOS (complementary MOSFET) configuration, while an analog circuit is provided in the NMOS (n channel MOSFET) configuration capable of increasing the withstand voltage. It is extremely difficult to improve the accuracy of the current detection circuit and the temperature detection circuit described above. (2) Issues related to high voltage junction termination structure HVJT
Various structures are disclosed for each high-voltage junction termination structure, such as those for vertical power devices [25], [26] and those for horizontal high-voltage devices [27], [28], [29]. ing. However, in a high voltage power IC in which an HVIC or a power device that is a high voltage IC is integrated, a high voltage junction termination structure between integrated circuit units (around GDU1 to GDU1 in FIG. 38), a high voltage lateral n-channel MOSFET. High-voltage junction termination structure (HVN D in FIG. _N ), A high-voltage junction termination structure for a high-voltage lateral p-channel MOSFET (HVP D in FIG. 38) _P In addition, it is necessary to form a high voltage junction termination structure for many applications such as a high voltage junction termination structure for vertical power devices on the same chip. If a high voltage IC and a power IC are to be realized with a conventional structure with less versatility, many different high voltage junction termination structures HVJT must be formed on the same chip, which increases the manufacturing cost. (3) Issues related to high voltage junction termination structure under the wiring
In a high breakdown voltage IC, in order to exchange signals between integrated circuit units (for example, GDU1 and LSU in FIG. 38) having greatly different potentials, it is necessary to pass wiring over the high breakdown voltage junction termination structure HVJT. However, when a wiring is passed over the high-voltage junction termination structure HVJT, there is a problem that the breakdown voltage of the high-voltage junction termination structure HVJT decreases due to the influence of the potential of the wiring [30]. In order to solve this problem, several structures [10], [11], [12], [31] have been proposed, but the manufacturing cost increases due to the complexity of the structure. In addition, these proposed structures do not completely eliminate the influence of wiring, and have a length that reduces the degree of withstand voltage reduction. Even if it can be put to practical use up to a withstand voltage of about 600V, It has not been realized yet.
[0009]
In order to solve the above problems, the present invention provides a second region and a fourth region that can withstand a high breakdown voltage, a high breakdown voltage junction termination structure of a vertical power device, a high breakdown voltage junction termination structure that separates integrated circuit units, Highly versatile and low-cost high-voltage junction termination structure that can be used widely, such as n-channel or p-channel high-voltage lateral MOSFET high-voltage junction termination structure, and maintains high breakdown voltage without lowering the breakdown voltage even when wires cross. By using a low-cost, high-breakdown-voltage junction termination structure, a high-breakdown-voltage IC with a low manufacturing cost can be provided. References [1] USP 4,364,073 (IGBT-related) [2] USP 4,893,165 (non-punch-through IGBT-related) [3] USP 5,008,725 (power MOSFET-related) [4] EP 0,071,916, JP 58-39065 (high speed) (5) USP 5,091,664 (Drive circuit related) [6] USP 5,287,023 (Drive circuit related) [7] USP 4,947,234 (Low voltage IC and power device related) [8] USP 4,937,646 (Low voltage IC) (9) A. Wegener and M. Amato "A HIGH VOLTAGE INTERFACE IC FOR HALF-BRIDGECIRCUITS" Electrochemical Society Extended Abstracts, vol. 89-1, pp. 476-478 (1989) [10] T. Terashima et al "Structure of 600V IC and A New Voltage Sensing Device" IEEE Proceeding of the 5th International Symposium on Power Semiconductor Devices and ICs, pp.224-229 (1993) [11] K. Endo et al "A 500V 1A 1- chip Inverter IC with a New Electric Field Reduction Structure "IEEE Proceeding of the 6th International Symposium on Power Semiconductor Devices and ICs, pp. 379-383 (1994) [12] N. Sakurai et al "A three-phase inverter IC for AC220V with a drasticall small chip size and highly intelligent functions" IEEE Proceeding of The 5th International Symposium on Power Semiconductor Devices and ICs 310-315 (1993) [13] M. Mori et al "A HIGH POWER IGBT MODULE FOR TRACTION MOTOR DRIVE" IEEE Proceeding of the 5th International Symposium on Power Semiconductor Devices and ICs, pp. 287-289 (1993) [14] USP 5,159,516 (current detection method related) [15] USP 5,070,322 (temperature detection method related) [16] USP 5,097,302 (current detection element related) [17] USP 5,304,837 (temperature detection element related) [18] K .Reinmuth et al "Intelligent Power Modules for Driving Systems" IEEE Proceeding of the 6th International Symposium on Power Semiconductor Devices and ICs, pp. 93-97 (1994) [19] USP 4,677,325 (IPS related) [20] USP 5,053,838 (IPS Related) [21] R. Zambrano et al "A New Edge Structure for 2kVolt Power IC Ope ration "IEEE Proceeding of the 6th International Symposium on Power Semiconductor Devices and ICs, pp. 373-378 (1994) [22] MFChang et al" Lateral HVIC with 1200-V Bipolar and Field-Effect Devices "IEEE Transactions on Electron devices, vol.ED-33, No. 12, pp. 1992-2001 (1986) [23] T. Ohoka et al "A WAFER BONDED SOI STRUCTURE FOR INTELLIGENT POWER ICs" IEEE Proceeding of the 5th International Symposium on Power Semiconductor Devices and ICs 119-123 (1993) [24] JPMILLER "A VERY HIGH VOLTAGE TECHNOLOGY (up to 1200V) FOR VERTICAL SMART POEWR ICs" Electrochemical Society Extended Abstracts, vol.89-1, pp.403-404 (1989) [ 25] USP 4,399,449 (HVJT related to power device) [26] USP 4,633,292 (HVJT related to power device) [27] USP 4,811,075 (HVJT related to lateral MOSFET) [28] USP 5,258,636 (HVJT related to lateral MOSFET) [29] USP 5,089,871 (Related to HVJT of lateral MOSFET) [30] PKTMOK and CATSALAMA "Interconnect Induced Breakdown in HVIC's" Electrochemical Society Extended Abstracts, vol. 89-1, pp. 437
-38 (1989) [31] USP 5,043,781 (Power IC related)
[0010]
[Means for Solving the Problems]
In order to achieve the above object, the present invention provides a first region of the first conductivity type, a second region of the second conductivity type selectively formed on the surface layer of the first main surface of the first region, A first region of the first conductivity type selectively formed on the surface layer of the second region, and a first source of the first conductivity type selectively formed on the surface layer of the second region apart from the third region A first conductivity type channel MIS comprising: a region and a first drain region; and a first gate electrode formed on the surface of a second region sandwiched between the first source region and the first drain region via an insulating film Transistor, second source region and second drain region of second conductivity type selectively formed on surface layer of third region, and surface of third region sandwiched between second source region and second drain region Second conductivity type channel having a second gate electrode formed thereon through an insulating film And MIS transistor, the A MIS transistor having a first conductivity type channel formed in the second region and a MIS transistor having a second conductivity type channel formed in the third region. Surrounding Consisting of a region of the first conductivity type formed in the second region A first high-voltage junction termination structure; In second zone Formed in a loop shape first Conductive area Consist of Second high voltage junction termination structure, drain electrode inside loop of second high voltage junction termination structure, gate electrode and source electrode outside loop Consisting of High breakdown voltage MIS transistor, and a first high breakdown voltage junction termination structure first Of conductivity type and second high voltage junction termination structure first It is the same layer connected to the conductive type region.
[0011]
[0012]
Also, the first region of the first conductivity type, the second region of the second conductivity type selectively formed on the surface layer of the first main surface of the first region, and the surface layer of the second region selectively formed A first region of the first conductivity type, a first source region and a first drain region of the first conductivity type selectively formed on the surface layer of the second region apart from the third region, and the first source A first-conductivity-type channel MIS transistor comprising a first gate electrode formed through an insulating film on the surface of the second region sandwiched between the region and the first drain region, and a surface layer of the third region selected Formed on the surface of the second source region and the second drain region of the second conductivity type and the third region sandwiched between the second source region and the second drain region via an insulating film A second-conductivity-type channel MIS transistor having two gate electrodes; A MIS transistor having a first conductivity type channel formed in the second region and a MIS transistor having a second conductivity type channel formed in the third region. Surrounding Consisting of a region of the first conductivity type formed in the second region A first high voltage junction termination structure; In the second region Formed in a loop with a notch (referred to as a partially open loop) Consists of areas of the first conductivity type Second high voltage junction termination structure, drain electrode inside loop of second high voltage junction termination structure, gate electrode and source electrode outside loop Consisting of A high-breakdown-voltage MIS transistor, below the region where the first output wiring from the drain electrode extends on the second region (corresponding to the portion where the partial loop is open) The second area of the surface In first No region of conductivity type is formed, and the first high voltage junction termination structure first Of conductivity type and second high voltage junction termination structure first It is the same layer connected to the conductive type region.
[0013]
According to the present invention, a high breakdown voltage junction termination structure for a circuit unit (for example, GDU1 in FIGS. 2 and 6) isolated from other circuit units with a high breakdown voltage and a high breakdown voltage MIS transistor (for example, a second conductivity type channel) Since the high voltage junction termination structure of HVN) in FIG. 6 can be formed on the same chip in the same process, a low cost high voltage IC can be obtained. The first output wiring of the first drain electrode of the high withstand voltage MIS transistor of the second conductivity type channel for transmitting a signal between circuit units having greatly different potentials (level shift) is relatively different in potential difference from this. Since it extends only on the small second region, the first output wiring does not cross the high-voltage junction termination structure portion having a large potential difference and crosses only the high-voltage junction structure portion having a small potential difference. Therefore, it is possible to completely escape from the problem of the breakdown voltage reduction in the high breakdown voltage junction termination structure portion traversed by the wiring described in the third item of the problem. This is a very significant effect of the present invention, and does not require a complicated structure. Therefore, the breakdown voltage does not decrease at all while being low in cost, and can be realized even with a high breakdown voltage IC having a breakdown voltage of several thousand volts. . This structure is illustrated in FIG. 19, FIG. 20, and FIG.
[0014]
Further, a high voltage junction termination structure for a circuit unit (for example, GDU1 in FIGS. 2 and 6) separated from other circuit units at a high voltage and a first voltage channel MIS transistor (for example, HVP in FIG. 6). ) Can be fabricated on the same chip in the same process, so that a low-cost high voltage IC can be obtained.
Further, the second output wiring of the second drain electrode of the high voltage MIS transistor of the first conductivity type channel for performing signal transmission (level shift) between circuit units having greatly different potentials is connected to the second output wiring of the second drain electrode. Since it only extends over a relatively small first region (or another region formed on the surface of the first region), the second output wiring does not cross a high voltage junction termination structure portion having a large potential difference and has a small potential difference. Cross only the high pressure bonding structure. Therefore, it is possible to completely escape from the problem of the breakdown voltage reduction in the high breakdown voltage junction termination structure portion traversed by the wiring described in the third item of the problem. This is a very large effect of the present invention, and does not require a complicated structure. Therefore, although the cost is low, no breakdown of the breakdown voltage occurs at all. Therefore, even a high breakdown voltage IC having a breakdown voltage of several thousand volts can be realized. . This structure is illustrated in FIG. 19, FIG. 20, and FIG.
[0015]
And a high voltage IC can be manufactured at a much lower cost.
[0016]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 shows the first of the present invention. reference The principal part sectional drawing of an example is shown. The present invention is applied to the GDUs 1 to 3 surrounded by the high voltage junction termination structure HVJT in FIG. Hereinafter, the first conductivity type is assumed to be p-type and the second conductivity type is assumed to be n-type except for some embodiments.
The high breakdown voltage IC (HVIC) is a first region 1 made of a p-type semiconductor substrate doped with boron, and an n-type second region formed by high-temperature thermal diffusion by selectively implanting phosphorus ions into the surface layer. 2, p-type third region 3 formed by high-temperature thermal diffusion by selectively implanting boron ions into the surface layer of second region 2, and phosphorus selectively on the surface layer of second region 2. An n-type fifth region 5 formed by ion implantation and high-temperature thermal diffusion, and a p-type sixth region 6 formed by high-temperature thermal diffusion by selectively implanting boron into the surface layer of the third region 3. And a p-type high concentration region 11 (to be a first source region and a first drain region) selectively formed on the surface layer of the second region 2 and a second sandwiched between the p-type high concentration region 11. Polycrystalline silicon to be a gate electrode formed on the region 2 via the gate insulating film 13 A p-channel MOSFET (pchMOSFET) constituted by the film 15, and an n-type high concentration region 12 (which becomes a second source region and a second drain region) selectively formed in the surface layer of the third region 3; An n-channel MOSFET (nchMOSFET) composed of a polycrystalline silicon film 15 serving as a gate electrode formed on the third region 3 sandwiched between the n-type high-concentration regions 12 via a gate insulating film 13; The first region 1 is made to prevent breakdown due to electric field concentration near the surface when a high reverse bias voltage is applied to the first pn junction 104 between the first region 1 and the second region 2. The high-voltage junction termination structure HVJT is provided in an enclosed manner. The p-type high concentration region 11 is doped with high concentration boron, and the n-type high concentration region is doped with high concentration phosphorus. The gate insulating film 13 is formed of a silicon oxide film having a thickness of about 200 to 500 mm. A field insulating film 14 is formed of a silicon oxide film having a thickness of about 5000 to 10000 mm on a part of the first region 1, the second region 2 and the fifth region 5. The formed n-type polycrystalline silicon film 15 is formed with a thickness of about 3000 to 6000 mm. The polycrystalline silicon film 15 is also formed in a region where the third region 3 and the second region 2 face each other as shown in FIG. The interlayer insulating film 16 is a BPSG film having a thickness of 5000 to 10000 mm formed by, for example, atmospheric pressure CVD. The first metal film 17 is, for example, an Al-1% Si film having a thickness of about 5000 to 10000 mm used as a wiring or an electrode on the first main surface side. The impurity concentration of the first region 1 is 10 ¹³ -10 ¹⁵ cm ^-3 For example, in a high withstand voltage IC having a withstand voltage of 600 V, 1.5 × 10 ¹⁴ cm ^-3 Hereinafter, in a high voltage IC with a withstand voltage of 1200 V, 8 × 10 ¹³ cm ^-3 The appropriate impurity concentration differs depending on the required breakdown voltage as described below. The impurity concentration in the first region 1 and the doping amount (doping amount) of the impurity in the second region 2 are obtained when the first pn junction 104 between the first region 1 and the second region 2 is reverse-biased to a high voltage. However, the depletion layer end 102 on the second region 2 side of the depletion layer 101 spreading on both sides of the first pn junction 104 is set so as not to reach the third region 3 and to remain in the second region 2. To satisfy this, the second region sandwiched between the third region 3 and the first region 1 below the third region 3 2 The net dope amount of the portion is 1 × 10 ¹² cm ^-2 3 × 10 ¹³ cm ^-2 The following is effective. A typical example is shown below. The formation of the second region 2 is 5 × 10 ¹² ~ 1x10 ¹³ cm ^-2 The selective ion implantation of phosphorus with a doping amount of 1 and the thermal diffusion at 1150 ° C. for about 3 to 10 hours are performed, the depth is set to about 3 to 8 μm, and the formation of the third region 3 is 1 × 10 ¹³ ~ 5x10 ¹³ cm ^-2 This is performed by selective ion implantation of boron with a doping amount of 1100 ° C. and thermal diffusion for about 2 to 10 hours at 1100 ° C., and the depth is set to about 1 to 4 μm. The doping amount of the fifth region 5 and the sixth region 6 is 1 × 10 ¹⁴ ~ 1x10 ¹⁵ cm ^-2 The doping amount of the high concentration regions 11 and 12 of the p-type and n-type is 1 × 10 ¹⁵ ~ 1x10 ¹⁶ cm ^-2 Degree. The high-voltage junction termination structure HVJT can use various structures from cited documents of the prior art, and structures other than those cited can also be used. A relatively highly doped n-type fifth region 5 provided in the second region 2 is a parasitic bipolar transistor having the first region 1 as a collector, the second region 2 as a base, and the third region 3 as an emitter. This is to keep the base resistance of the substrate low and prevent its malfunction. The fifth region 5 is formed on the surface layer of the second region 2 facing the third region or the surface layer of the second region 2 facing the first region 1 and surrounds the third region 3 as much as possible. The effect of preventing malfunction can be enhanced by providing the cover so as to cover most of the region (field region) where the element such as MOSFET is not formed on the surface of the second region 2. The relatively heavily doped p-type sixth region 6 provided in the third region 3 has the second region 2 as a collector, the third region 3 as a base, and the n-type high concentration region 12 as an emitter. The base resistance of the parasitic bipolar transistor is kept low to prevent its malfunction. Also in the sixth region 6, the effect can be enhanced by devising the arrangement similar to the formation of the fifth region 5.
[0017]
In the example of the high breakdown voltage IC (HVIC) shown in the figure, the first conductivity type is p-type and the second conductivity type is n-type. _DDLC That is, V in FIG. _CCL The third region 3 is connected to V in FIG. _DDL1 That is, the second region 2 is connected to the U phase in FIG. _DD1 To high potential output V _DDH1 Is connected. For simplification, only the p-channel MOSFET and the n-channel MOSFET are shown in the second region 2 and the third region 3 for the sake of simplicity. However, in addition to these elements, various elements such as resistors, capacitors, diodes, and bipolar transistors are actually used. A large number of devices can be integrated, and the gate drive circuit GDU1 (FIGS. 33 and 35) can be configured using these devices. Then, a high breakdown voltage n-channel MOSFET (HVN) and a high breakdown voltage p-channel MOSFET (HVP) having a structure to be described later are added as shown in FIG. 38, and an input line SIN1 and an output line which are signal wirings between GDU1 and LSU. If SOUT1 is formed, the high voltage IC described with reference to FIGS.
[0018]
2 is the second reference FIG. 4A is a main part structure diagram showing an example, and FIG. 4A is a main part plan view of a part corresponding to GDU1 and the high voltage junction termination structure HVJT in FIG. 38, and FIG. It is principal part sectional drawing cut | disconnected by -X. In FIG. 2A, the GDU 1 is formed in the second region 2 and the fourth region 4 surrounded by the high voltage junction termination structure HVJT. In FIG. 2B, an n-type fourth region 4 is provided that is surrounded by the second region 2 and separated from the second region 2, and straddles the second region 2 and the fourth region 4. Thus, a loop-shaped first conductive film 7 made of polycrystalline silicon is provided via a field insulating film 14. The first conductive film 7 and the polycrystalline silicon film 15 shown in FIG. Although only one fourth region 4 is shown in FIG. 5B, a plurality (or many) of the fourth regions 4 can naturally be provided if necessary. The fourth region 4 is formed only by changing the pattern shape of the mask when phosphorus is selectively ion-implanted simultaneously with the formation of the second region 2. The fourth region 4 shows an example in which an npn transistor is formed. A base region 31 formed simultaneously with the shape of the sixth region 6, an emitter region 32 formed simultaneously with the formation of the n-type high concentration region 12, and a collector. The fifth region 5 is also provided in the fourth region 4 for the same reason as that provided in the second region 2. Although an example in which a p-channel MOSFET (pchMOSFET) and an n-channel MOSFET (nchMOSFET) are provided in the second region 2 and the third region 3 is shown, the second region 2 and the third region 3 are the same as described above. Many kinds of devices can be integrated. Similarly, the fourth region 4 has a p-type region similar to the third region 3 (not shown, but tentatively referred to as a seventh region). It is possible to integrate many kinds of devices in the fourth area 4 and the seventh area. The fourth area 4 is the drive power supply V of the second area 2 _DD1 Different power supply V _EE1 (For example, 15V V _DD1 Can be used as a circuit unit (such as a 10V power supply for an analog circuit and a 5V power supply for a logic circuit), and the collector (C) is bipolar with the second region 2 being independent as shown in FIG. Since it can also be used as a transistor, the use of the fourth region 4 greatly increases the degree of freedom in circuit design.
[0019]
In FIG. 2B, the surface of the first region 1 sandwiched between the second region 2 and the fourth region 4 extends over the second region 2 and the fourth region 4 via the field insulating film 14. A conductive film 7 is provided, and a first pn junction 104 between the first region 1 and the second region 2 to which a high voltage is applied, and a fourth between the first region 1 and the fourth region 4. Thus, electric field concentration due to the discontinuity of the pn junction 105 is prevented, and a high breakdown voltage can be secured. The conductive film 7 is preferably electrically connected to the second region 2 or the fourth region 4 and stabilized in potential rather than being in a floating potential state (floating). Further, when it is desired to obtain a high isolation breakdown voltage between the second region 2 and the fourth region 4, when the first conductivity type is p-type, the first conductive film 7 is connected to the second region 2 and the fourth region 4. Of these, it is preferable to connect to a low potential side region, and in the case of n-type, it is preferable to connect to a high potential side region. This is because it becomes difficult to turn on a parasitic MOSFET having the first conductive film 7 as a gate.
[0020]
3 is the third reference FIG. 1A is a plan view of a gate drive circuit unit formed into one chip, FIG. 1B is a cross-sectional view thereof, and FIG. 1C is a gate drive circuit unit (a). 1 is a cross-sectional view in which a single chip) and a power device (for example, an IGBT and a diode) are formed on a heat sink. Here, the conductivity type is reversed from the above description, the first conductivity type is n-type, and the second conductivity type is p-type.
In FIG. 2A, a p-type second region 2 is provided on an n-type first region 1 surrounded by a high voltage junction termination structure HVJT. This figure shows a plan view of a high voltage IC (GDUIC1) in which only the GDU1 portion, which is the gate drive circuit unit of FIGS.
[0021]
In FIG. 2B, an n-channel MOSFET (nchMOSFET) and a p-channel MOSFET (pchMOSFET) are respectively formed in a p-type second region 2 and an n-type third region 3 formed in the n-type first region 1. Is formed. Naturally, many kinds of devices can be integrated in the second region 2 and the third region 3. A second metal film 18 made of, for example, a three-layer metal film of Ti / Ni / Au is provided on the back surface of the high voltage IC (GDUIC1) so that it can be fixed to the metal plate with solder.
In FIG. 3C, the high voltage IC (GDUIC1) is an n-channel vertical power device Q1 (IGBT or the like) and a diode D1, and V in FIG. 33 and FIG. _CCH It is fixed by soldering on the metal plate 33 to be connected to. In this case, since the first conductivity type is n-type, even if the back surface of the high breakdown voltage IC (GDUIC1) is bonded to the metal plate 33 to which the back surface (collector or drain) of the power device is fixed, the first region The first pn junction 104 between the first region 2 and the second region 2 is always reverse-biased, and the various devices formed in the second region 2 are electrically isolated from the first region 1, and there is no problem in operation. The metal plate 33 is installed on a heat sink 35 made of copper or aluminum via an insulating plate 34 made of ceramic, for example.
[0022]
4 is the fourth reference FIG. 1A is a plan view of GDUIC1, which is a high voltage IC in which only the GDU1 portion is integrated on one chip, FIG. 2B is a cross-sectional view thereof, and FIG. ) Is a cross-sectional view in which GDUIC1 is fixed on the emitter (or source) electrode of power device Q1. Since FIG. 3A is the same as FIG. 3A, description thereof is omitted. In FIG. 2B, the first region 1 and the third region 3 are p-type, and the second region 2 is n-type. Further, in FIG. 3C, for example, an epoxy adhesive can be used for fixing the GDUIC 1 to the emitter (or source) electrode of the power device Q1. Also in this case, if the first conductivity type is p-type, the pn junction 104 is always reverse-biased, so that there is no problem in operation as described above.
[0023]
FIG. 5 shows the fifth reference The principal part structural drawing of an example is shown, The same figure (a) is a top view, The same figure (b) is sectional drawing. In FIG. 2A, an n-channel vertical power device Q1 (shown here as an IGBT) is surrounded by a high breakdown voltage junction termination structure HVJT, and GDU1 is further surrounded by the power device Q1.
In FIG. 2B, the second region 2 surrounded by the p-type base region 36 of Q 1 is formed in the surface layer of the first region 1 that is the n-type drift region 40. A first conductive film 7 is formed on the surface of the first region 1 between the second region 2 and the base region 36 of Q1 via the field insulating film 14. The first conductive film 7 functions in the same manner as the first conductive film 7 of FIG. 2 together with the emitter electrode of Q1. Q1 represents an IGBT, and n is formed on the second main surface side of the first region 1. ⁺ Buffer layer 38 and p ⁺ There is a substrate 39, p ⁺ A second metal film 18 is formed on the surface of the substrate 39, and the periphery is covered with a passivation film 19 (for example, a silicon nitride film of 10,000 mm).
[0024]
FIG. 6 is the sixth reference The principal part top view of an example and FIG. 7: show the principal part top view of 7th Example. Of FIG. reference In the example, only GDU1 is shown, but these figures correspond to those shown in FIGS. 34 and 38. reference For example, FIG. 6 shows that the high-voltage junction termination structure HVJT collectively surrounds GDU4 to GDU6, CU, and LSU. reference FIG. 7 shows an example, and FIG. 7 shows a high-voltage junction termination structure HVJT collectively enclosing each circuit unit of FIG. reference An example is shown. Compared with FIG. 6, the number of high voltage junction termination structures HVJT traversed by the wirings of the input line SIN 1 and the output line SOUT 1 is small in FIG. 7 (3 in FIG. 6 and 2 in FIG. 7). hard. The description of each circuit unit is omitted because it is the same as described above.
[0025]
In FIG. 8 and subsequent figures, the numbers in parentheses in the figures are those in FIG. 1 to FIG. reference It shows that the same manufacturing method as the number corresponding to the example can be formed on the same chip at the same time. The case where the first conductivity type is p-type and the second conductivity type is n-type will be described. Of course, the conductivity type may be reversed.
8 is the eighth reference The high voltage | pressure-resistant junction termination structure figure at the time of using for a diode by an example is shown, The figure (a) is principal part sectional drawing, The figure (b), The figure (c) is a top view.
In FIG. 5A, the first region 1 is a boron-doped semiconductor substrate having a concentration of 10 ¹³ -10 ¹⁵ cm ^-3 Degree. This concentration depends on the required pressure resistance. The eighth region 8 is a selective phosphorus ion implantation from the surface of the first region 1 (dose amount: 3 × 10 ¹² ~ 1x10 ¹³ cm ^-2 Degree) and 1150 ° C. for 3 to 10 hours, and the diffusion depth is about 3 to 8 μm. The ninth region 9 is a selective boron ion implantation from the surface of the eighth region 8 (dose amount: 1 × 10 ¹² ~ 1.5 × 10 ¹³ cm ^-2 Degree) and 1150 ° C. and thermal diffusion for about 1 to 5 hours, and the diffusion depth is about 1.5 to 5 μm. The n-type high concentration region 45 is a region provided in order to improve the electrical connection between the cathode electrode K and the eighth region 8. For example, selective phosphorus ion implantation (dose amount: 1 × 10 6). ¹⁴ ~ 1x10 ¹⁵ cm ^-2 And the fifth region (see FIG. 1) by heat treatment at about 1000 to 1100 ° C. The p-type high-concentration region 46 is a region provided for improving the electrical connection between the anode electrode A and the ninth region 9, for example, selective boron ion implantation (1 × 10 6). ¹⁴ ~ 1x10 ¹⁵ cm ^-2 And the sixth region 6 (see FIG. 1) by heat treatment at about 1000 to 1100 ° C. The field insulating film 14 and the insulating film 41 on the ninth region 9 are thermal oxide films, and the film thickness is about 5000 to 10,000 mm. The cathode electrode K and the anode electrode A are made of the first metal film 17 made of, for example, Al-1% Si, and the film thickness is about 5000 to 10,000 mm. The passivation film 19 is, for example, an amorphous silicon film or a silicon-rich SiN film (nitride film) and has a thickness of about 5000 to 15000 mm. In this case, the second conductive film 42 common to the cathode electrode K and the third conductive film common to the anode electrode A are formed on the insulating film 41 on the ninth region 9 as the high resistance film 44 for use as a resistive field plate. 43 in contact with both. The resistivity of the high resistance film 44 is 10 sheet resistance. ¹³ -10 ¹¹ It is about Ω / □. The second conductive film 42 and the third conductive film 43 extend as a field plate onto the insulating film 41 on the ninth region 9. The net doping amount of the eighth region portion 116 sandwiched between the first region 1 and the ninth region under the ninth region is 1 × 10 ¹¹ cm ^-2 4 × 10 ¹² cm ^-2 The net doping amount of the ninth region 9 is 1 × 10 9. ¹¹ cm ^-2 2 × 10 ¹² cm ^-2 It is set to be as follows. Thereby, when the second pn junction 111 between the first region 1 and the eighth region 8 and the third pn junction 112 between the eighth region 8 and the ninth region 9 are both reverse-biased, The second depletion layer 113 extending on both sides of the second pn junction 111 and the third depletion layer 114 extending on both sides of the third pn junction 112 are combined in the eighth region 8, and the third depletion layer 114 Reaches the surface 115 of the ninth region 9. That is, the eighth region 8 and the ninth region 9 sandwiched between the anode electrode A and the cathode electrode K of the high breakdown voltage junction termination structure HVJT on the plane are depleted layers (coupled second regions) reaching the first region 1. The depletion layer 113 and the third depletion layer 114) extend both in the horizontal direction and in the vertical direction, resulting in a high breakdown voltage. The reason for spreading in the vertical direction is that the first region 1 has a low concentration. The second conductive film 42 is effective for preventing electric field concentration in the vicinity of the second conductivity type high concentration region 45, and the third conductive film 43 is effective for preventing electric field concentration in the vicinity of the p type high concentration region 46. . The high resistance film 44 has a ninth horizontal region in which a smooth current distribution in the horizontal direction is generated along the high resistance film 44 when a current flowing between the second conductive film 42 and the third conductive film 43 via the high resistance film 44 is generated. 9 is electrostatically applied to the semiconductor region under the insulating film through the capacitance of the insulating film 41 on the upper surface 9, and the potential distribution in the depletion layer of the semiconductor region is smoothly stabilized in the horizontal direction. This is effective for obtaining a high breakdown voltage at the horizontal distance of the breakdown junction termination structure.
[0026]
FIG. 4B shows a plan layout of the high voltage junction termination structure of FIG. 4A, and shows a concentric arrangement with the center line indicated by a dashed line in FIG. A high withstand voltage junction termination structure HVJT sandwiched between the electrode A and the cathode electrode K is provided in a belt shape with a circular loop. This arrangement is suitable for small active area devices.
FIG. 8C is also an example of an average arrangement of the high voltage junction termination structure HVJT in FIG. 9A, and in this case, the anode electrode A arranged in a comb shape so as to be suitable for a device having a large active area. The high-voltage junction termination structure HVJT sandwiched between the cathode electrode K and the cathode electrode K is provided in a belt-like shape with a loop looped between the comb teeth.
[0027]
The loop shape means a belt-like and annular shape having a circular shape or a comb shape.
FIG. 9 shows the ninth reference The principal part cross-section of an example is shown. This is another reference This is an example, and the present invention is applied to a junction isolation structure conventionally used in a high voltage IC. The difference from FIG. 8A is a layer in which the eighth region 8 is formed by epitaxial growth on the first region 1, and therefore, the eighth region 8 is electrically isolated from other portions. A high concentration p-type isolation region 47 is provided. The other parts are the same as those in FIG. The eighth region 8 formed by epitaxial growth has a thickness of about 5 to 15 μm and phosphorus of 1 × 10 ¹⁵ To 1 × 10 ¹⁶ cm ^-3 It is doped to some extent. The isolation region 47 has a dose amount of, for example, 1 × 10 before the formation of the ninth region 9 after the epitaxial growth of the eighth region 8. ¹⁵ cm ^-2 This is formed by selective ion implantation of boron and thermal diffusion at 1200 ° C. for about 2 to 10 hours. The portion related to the formation of the eighth region 8 by epitaxial growth and the formation of the isolation region 47 is shown in FIG. reference The cost is higher than the example, and high-temperature heat treatment is required to form the isolation region 47, and the non-defective rate is slightly reduced due to defects in the silicon crystal generated by this high-temperature heat treatment. There is the convenience that it can be applied as it is on the technology. The planar arrangement in the figure is the same as in FIGS. 8B and 8C.
[0028]
FIG. 10 shows the tenth reference The principal part sectional drawing of an example is shown. The first region 1, the eighth region 8, the ninth region 9, the field insulating film 14, the insulating film 41 (14) on the ninth region 9, the second conductive film 42 and the third conductive film 43, the passivation film 19, and The high resistance film 44 (19) is shown in FIG. reference Same as example. Book reference The difference is that the first drain electrode D1 electrically connected to the eighth region 8 via the n-type high concentration region 50 (12) on one side across the high voltage junction termination structure HVJT. A p-type base region 48 that is electrically connected to the ninth region 9 on the other side, and is selectively provided in the base region 48. High-concentration n-type source region 49, n-channel region 52 on the surface of base region 48 sandwiched between eighth region 8 and source region 49, and first gate insulating film 51 provided on at least the channel region And an n-type channel (this is common to the third conductive film 43 in this case) having at least a first gate electrode G1 and at least a first source electrode S1 electrically connected to the n-type source region 49 (this case) N channel) high voltage MIS transistor And an interlayer insulating film 16 for performing electrical insulation between the third gate electrode G1 and the first source electrode S1, and further on the ninth region 9. It is also used as the insulating film 41 (16). The planar arrangement of the figure is also a concentric arrangement as shown in FIG. 8B centering on one of the dashed lines in the figure, or as shown in FIG. 8C by folding back along the dashed line in the figure. Various arrangements such as a comb-like arrangement are possible.
[0029]
FIG. 11 shows the eleventh reference The principal part sectional drawing of an example is shown. The first region 1, the eighth region 8, the ninth region 9, the field insulating film 14, the insulating film 41 (14) on the ninth region 9, the second and third conductors 42 and 43, the passivation film 19, and The high resistance film 44 (19) is shown in FIG. reference Same as example. Book reference The difference is that the p-type source region 56 (11) selectively formed on the surface of the eighth region 8 on one side and the ninth region 9 and p with the high voltage junction termination structure HVJT interposed therebetween. The p-type channel region 54 on the surface of the eighth region 8 sandwiched between the source region 56 (11) having a shape, the second gate insulating film 53 (13) formed on at least the p-type channel region 54, and the gate A fourth gate electrode G2 on the insulating film 53 (13) and a second source electrode S2 electrically connected to at least the p-type source region 56 (11) are provided. The region 9 and the second drain electrode D2 electrically connected through the p-type high concentration region 55 (11) are provided.
[0030]
FIG. 12 shows the twelfth reference The principal part sectional drawing of an example is shown. P surrounded by the high withstand voltage junction termination structure HVJT, and the n-type eighth region 8 and the n-type second region 2 are simultaneously formed in the same diffusion step, and selectively formed on the surface layer of the second region 2 The third region 3 having a shape, the p-channel MIS transistor formed in the surface layer of the second region 2, and the n-channel MIS transistor formed in the surface layer of the third region 3 are formed. Further, the second region 2 and the eighth region 8 may be connected to form an integral region. In the explanation of the subsequent drawings, the number of the eighth area is set to 8 (2), which means that the eighth area can be formed in the same process as the second area. An example of the planar arrangement of FIG. 6 is GDU1 of FIG.
[0031]
FIG. 1 The principal part top view of an Example is shown. The difference from the conventional example of FIG. 38 is that in order to weaken the electric field strength under the first output wiring 61 and the second output wiring 62, the first high-voltage junction termination structure HVJT1 surrounding GDU1, the GDU1 and the LSU The second high voltage junction termination structure HVJT2 surrounding the lateral MOSFET formed therein is composed of and integrated with the high voltage junction termination structure HVJT having the same structure. With this configuration, the potential difference between the first output wiring 61 and the second output wiring 62 and the high breakdown voltage junction termination structure HVJT below these output wirings can be made smaller than that of the other high breakdown voltage junction termination structures HVJT. . Therefore, the influence of the potentials of these output wirings 61 and 62 on the potential distribution on the semiconductor surface of the high breakdown voltage junction termination structure can be reduced, and the breakdown voltage can be prevented from lowering. The reference numerals in the figure are the same as those in FIG. The first output wiring 61 and the second output wiring 62 correspond to SIN1 and SOUT1 in FIG. S1 and S2 indicate first and second source electrodes, and D1 and D2 indicate first and second drain electrodes.
[0032]
FIG. 14 is a diagram showing the strength of the potential difference in the plan view of FIG. The potential difference is small in the vicinity of the output wirings 61 and 62, and large in other portions.
FIG. 2 13 is a cross-sectional view of a main part of the embodiment, and shows a cross-sectional view of the main part and a potential distribution diagram of the AA line cutting part of FIG. 13, where FIG. It is.
FIG. 2 13 is a cross-sectional view of a main part of the embodiment, and shows a cross-sectional view of the main part and a potential distribution diagram of the section cut along the line B-B in FIG. 13, where FIG. It is.
[0033]
FIG. 2 13 is a cross-sectional view of the main part of the embodiment, showing a cross-sectional view of the main part and a potential distribution diagram of the section cut along the line C-C in FIG. 13, where FIG. It is.
15 to 17, the high withstand voltage junction termination structure HVJT shown in FIG. 13 has a common integrated structure for GDU1, high withstand voltage n channel MOSFET (HVN), and high withstand voltage p channel MOSFET (HVP). In the high breakdown voltage junction termination structure HVJT around the drain electrodes D1 and D2 of the high breakdown voltage n and p channel MOSFET (one of the high breakdown voltage MIS transistors), the high facing the side where the source electrodes S1 and S2 are located. A high voltage of about 400 V (the left side of D1 in FIG. 15 and the right side of D2 in FIG. 16) is applied to the breakdown voltage junction termination structure HVJT, whereas the high breakdown voltage junction termination structure HVJT facing the opposite side is applied. A small voltage of about 15 V is applied to the portion (the right side of D1 in FIG. 15 and the left side of D2 in FIG. 16, that is, the first and second output wirings 61 and 62). Is a length of a side) is applied. By arranging the first and second output wirings 61 and 62 across the high withstand voltage junction termination structure HVJT having a slight potential difference, wiring can be performed with little influence on the potential distribution in the semiconductor region. . Therefore, wiring can be performed without causing a decrease in breakdown voltage.
[0034]
18 to 20 show the first 3 The principal part sectional drawing of an Example is shown, and principal part sectional drawing equivalent to each cutting part of the AA line of FIG. 13, a BB line, and CC line is shown. This is the second 2 It is a modification of an Example.
The difference between FIG. 18 to FIG. 20 and FIG. 15 to FIG. 17 is that the n-type high concentration region 58 is straddled between the first region 1 and the second region 8 (or 2) in the semiconductor region exposed to the high voltage. The above effect is further enhanced by forming the p-type high concentration region 47 in contact with the first region 1 on the low potential side which is the source electrode S1 side.
FIG. 4 The principal part top view of an Example is shown. The difference from FIG. 13 is how the high voltage junction termination structure HVJT is arranged in a plane. In this embodiment, the high voltage junction termination structure HVJT is provided in the vicinity of the first and second output wirings 61 and 62. That is not the point. As described with reference to FIGS. 13 to 17, since a large potential difference does not occur in this region, it is not always necessary to provide the high voltage junction termination structure HVJT.
[0035]
22 to 26 show the first 4 The principal part sectional drawing and potential distribution of an Example are shown.
22A and 22B show a cross-sectional view and a potential distribution diagram of the main part of the AA line cutting section of FIG. 21, where FIG. 22A is a cross-sectional view of the main part and FIG. The difference from FIG. 15 is that the ninth region 9 under the first output wiring 61 is eliminated in this case, and only the eighth region 8 is provided. This is because, as described above, since no large potential difference is generated in this region, it is not necessary to provide the high breakdown voltage junction termination structure HVJT.
FIG. 23 is a cross-sectional view of the main part and a potential distribution diagram of the section cut along the line BB in FIG. 21, where FIG. 23A is a cross-sectional view of the main part and FIG. The difference from FIG. 16 is that the ninth region 9 under the second output wiring 62 is not provided, and the reason is the same as in FIG.
[0036]
24A and 24B show a cross-sectional view and a potential distribution diagram of the main part of the section cut along the line C-C in FIG. 21, where FIG. Since these are the same as those in FIG.
FIG. 25 shows a cross-sectional view and a potential distribution diagram of the main part of the XX line cutting section of FIG. 21, wherein FIG. 25 (a) is a cross-sectional view of the main part and FIG. The ninth region 9 is not provided under the first output wiring 61. The reason is as described above, because a large potential difference does not occur in this region.
26A and 26B show a cross-sectional view and a potential distribution diagram of the main part of the YY line cutting portion of FIG. 21, where FIG. 26A is a cross-sectional view of the main part and FIG. The ninth region is not provided under the second output wiring 62. The reason is as described above, because a large potential difference does not occur in this region.
[0037]
27 to 31 show the first 5 The main part sectional view and potential distribution diagram of the example are shown. 4 It is a modification of an Example.
FIG. 27 shows a cross-sectional view of the main part and a potential distribution diagram of the section cut along the line AA in FIG. 21, wherein FIG. The difference from FIG. 22 is that there is a portion where neither the ninth region 9 nor the eighth region 8 under the first output wiring 61 is provided. The reason for this is the same as described above. However, when both the eighth region 8 and the ninth region 9 are not present as in this embodiment and the surface of the first region 1 is under the first output wiring 61, it will be described later with reference to FIG. Such attention is necessary.
[0038]
FIG. 28 shows a cross-sectional view of the main part and a potential distribution diagram of the section cut along the line BB in FIG. 21, wherein FIG. The difference from FIG. 23 is that neither the ninth area 9 nor the eighth area is provided under the second output wiring 62, and the reason is the same as in FIG.
FIG. 29 shows a cross-sectional view of a main part and a potential distribution diagram of the section cut along the line CC in FIG. 21, wherein FIG. 29A is a cross-sectional view of the main part and FIG. Since these are the same as those in FIG.
FIG. 30 shows a cross-sectional view and a potential distribution diagram of the main part of the XX line cutting section of FIG. 21, wherein FIG. 30 (a) is a cross-sectional view of the main part and FIG. Neither the ninth area 9 nor the eighth area 8 is provided under the first output wiring 61. The reason is as described above, because a large potential difference does not occur in this region. However, it is preferable to completely cover the portion where the first region 1 sandwiched between the eighth regions 8 reaches the surface of the semiconductor substrate with the first output wiring 61 in order to stabilize the potential. If this is not done, the breakdown voltage may drop in that portion.
[0039]
FIG. 31 shows a cross-sectional view and a potential distribution diagram of the main part of the YY line cutting part of FIG. 21, wherein FIG. 31 (a) is a main part cross-sectional view and FIG. Neither the ninth area nor the eighth area 8 is provided under the second output wiring 62. The reason is as described above, because a large potential difference does not occur in this region.
FIG. 32 shows the first 6 The principal part top view of an Example is shown.
In this case, the high voltage junction termination structure HVJT is provided in a simple loop shape. In the case of FIG. 13 and FIG. 21 described above, the high withstand voltage junction termination structure HVJT is provided in an uneven shape in a planar arrangement. The reason is that the distance between the drain D1 of the high breakdown voltage n-channel transistor HVN and the second region 8 (or 2) (for example, FIG. 15) forming the GDU1, and the drain D2 of the high breakdown voltage p-channel transistor HVP and the p-type high concentration region. This is to reduce the parasitic leakage current by increasing the distance from each of the terminals 57 (for example, FIG. 19).
[0040]
However, in the case of FIG. 32, the high breakdown voltage junction termination structure HVJT is provided in a shape without irregularities. In this case, there is an advantage that the area occupied by the high-breakdown-voltage junction termination structure is smaller than in FIGS. However, in this case, the parasitic leakage current described above becomes large, and there is a great demerit that leads to an increase in invalid power consumption of the high voltage IC. In the case of a high voltage IC exceeding 600V, the embodiment of FIG. 21 is more suitable.
[0041]
【The invention's effect】
According to this invention, First high voltage junction termination structure and second high voltage junction termination structure Since the withstand voltage is ensured by the wiring, a drop in the withstand voltage does not occur in the wiring that bridges the high withstand voltage junction termination structure. In addition, a high voltage IC having a temperature detector is fixed to a metal plate to which the power device is fixed, this high voltage IC is fixed on the power device, and the power device and this high voltage IC are integrated on the same semiconductor substrate. This makes it possible to detect temperature with high accuracy. From the above, it is possible to realize a high voltage IC with high performance at low cost.
[Brief description of the drawings]
FIG. 1 is a first view of the present invention; reference Example cross section
FIG. 2 is a second view of the present invention. reference BRIEF DESCRIPTION OF THE DRAWINGS It is principal part structure drawing which shows an example, (a) is a principal part top view of the part corresponding to GDU1 and high voltage | pressure-resistant junction termination structure HVJT, (b) is principal part sectional drawing cut | disconnected by XX of (a).
FIG. 3 shows the third aspect of the present invention. reference FIG. 2 is a structural diagram of a main part showing an example, in which (a) is a plan view when the gate drive circuit unit is made into one chip, (b) is a sectional view thereof, and (c) is a gate drive circuit unit and a power device on a heat sink. Cross section formed on
FIG. 4 shows the fourth aspect of the present invention. reference The main part structure figure of an example is shown, (a) is a top view of GDUIC1 which is a high voltage | pressure-resistant IC which integrated only the part of GDU1 on 1 chip, (b) is the sectional drawing, (c) is a power device of GDUIC1 Cross section fixed on the emitter (or source) electrode of Q1
FIG. 5 shows the fifth aspect of the present invention. reference The main part structure figure of an example is shown, (a) is a top view, (b) is a sectional view
FIG. 6 shows the sixth aspect of the present invention. reference Example top plan view
FIG. 7 shows the seventh aspect of the present invention. reference Example top plan view
FIG. 8 shows the eighth embodiment of the present invention. reference The high voltage | pressure-resistant junction termination structure figure at the time of using for a diode in an example is shown, (a) is principal part sectional drawing, (b) is a top view, (c) is another top view.
FIG. 9 shows the ninth aspect of the present invention. reference Example cross-sectional structure diagram
FIG. 10 shows the tenth aspect of the present invention. reference Example cross section
FIG. 11 shows the eleventh aspect of the present invention. reference Example cross section
FIG. 12 shows the twelfth aspect of the present invention. reference Example cross section
FIG. 13 shows the first aspect of the present invention. 1 Main part plan view of the embodiment
FIG. 14 is a diagram showing the strength of a potential difference in FIG.
FIG. 15 shows the first of the present invention. 2 FIG. 13 is a cross-sectional view of a main part and a potential distribution diagram of the section cut along the line AA in FIG.
FIG. 16 shows the first of the present invention. 2 FIG. 13 is a cross-sectional view of a main part and a potential distribution diagram of the section cut along the line B-B in FIG. 13, and FIG.
FIG. 17 shows the first of the present invention. 2 The main part sectional view and potential distribution diagram corresponding to the CC line cutting part of Drawing 13 are shown in an example, the figure (a) is a principal part sectional view, and the figure (b) is a potential distribution figure.
FIG. 18 shows the first aspect of the present invention. 3 Sectional drawing of the principal part equivalent to the AA line cutting | disconnection part of FIG. 13 in an Example.
FIG. 19 shows the first of the present invention. 3 Sectional drawing principal part equivalent to the BB line cutting | disconnection part of FIG. 13 in an Example.
FIG. 20 shows the first of the present invention. 3 Sectional drawing principal part equivalent to the CC line | wire cutting part of FIG. 13 in an Example.
FIG. 21 shows the first of the present invention. 4 Main part plan view of the embodiment
FIG. 22 shows the first of the present invention. 4 FIG. 21 is a cross-sectional view of a main part and a potential distribution diagram of the section cut along the line AA in FIG. 21, and FIG.
FIG. 23 shows the first of the present invention. 4 FIG. 21 is a cross-sectional view of a main part and a potential distribution diagram of the section cut along the line B-B in FIG. 21, and FIG.
FIG. 24 is the first view of the present invention. 4 FIG. 21 is a cross-sectional view of a main part and a potential distribution diagram of the section cut along the line C-C in FIG. 21, and FIG.
FIG. 25 shows the first of the present invention. 4 21 is a cross-sectional view of a main part and a potential distribution diagram of the XX line cutting section of FIG. 21 in the embodiment, (a) is a main part cross-sectional view, and (b) is a potential distribution diagram.
FIG. 26 shows the first of the present invention. 4 FIG. 21 is a cross-sectional view of a main part and a potential distribution diagram of the section cut along the YY line in FIG. 21, and FIG.
FIG. 27 shows the first of the present invention. 5 FIG. 21 shows an essential part cross-sectional view and potential distribution diagram corresponding to the AA line cutting part of FIG. 21 in the embodiment, (a) is an essential part cross-sectional view, and (b) is an electric potential distribution chart.
FIG. 28 shows the first of the present invention. 5 FIG. 21 is a cross-sectional view of a main part corresponding to the section cut along the line BB in FIG. 21 and a potential distribution diagram. FIG.
FIG. 29 shows the first of the present invention. 5 FIG. 21 shows an essential part sectional view and potential distribution diagram corresponding to the section cut along the line CC of FIG. 21 in the embodiment, (a) is a principal part sectional view, and (b) is a potential distribution chart.
FIG. 30 shows the first of the present invention. 5 FIG. 21 shows an essential part cross-sectional view and potential distribution diagram corresponding to the XX line cutting part of FIG. 21 in the embodiment, (a) is an essential part cross-sectional view, and (b) is an electric potential distribution diagram.
FIG. 31 shows the first of the present invention. 5 FIG. 21 is a cross-sectional view of a main part and a potential distribution diagram corresponding to the YY line cutting part in FIG.
FIG. 32 shows the first of the present invention. 6 Main part plan view of the embodiment
FIG. 33 is a circuit configuration diagram illustrating mainly the power portion of the motor control inverter.
34 is a block diagram of the internal configuration of the high voltage IC used in FIG. 33.
35 is a more detailed connection diagram between GDU1 and IGBT Q1 in FIG.
FIG. 36 is a configuration diagram in which the same circuit as FIG. 33 is configured using a product called an intelligent power module.
FIG. 37 is a block diagram showing in detail a circuit around the IGBT Q1 in FIG.
38 is a plan view of the high breakdown voltage IC chip shown in FIG. 34. FIG.
[Explanation of symbols]
1 First area
2 Second area
3 Third area
4 Fourth area
5 Fifth area
6 Sixth area
7 First conductive film
8 Eighth area
9 Ninth area
11 p-type high concentration region
12 n-type high concentration region
13 Gate insulation film
14 Field insulation film
15 Polycrystalline silicon film
16 Interlayer insulation film
17 First metal film
18 Second metal film
19 Passivation film
31 Base area
32 Emitter area
33 Metal plate
34 Insulation plate
35 heat sink
36 Base area
37 Source area
38 n ⁺ Buffer layer
39 p ⁺ substrate
40 n-type drift region
41 Insulating film on the ninth region
42 Second conductive film
43 Third conductive film
44 High resistance film
45 n-type high concentration region
46 p-type high concentration region
47 p-type separation region
48 Base area
49 n-type source region
50 n-type high concentration region
51 First drain electrode
52 n-type channel region
53 Second gate insulating film
54 p-type channel region
55 High concentration region of p-type
56 p-type source region
57 High concentration region of p-type
58 n-type buried region
61 First output wiring
62 Second output wiring
101 Depletion layer
102 Depletion layer edge
104 First pn junction
105 4th pn junction
111 second pn junction
112 Third pn junction
113 Second depletion layer
114 Third depletion layer
115 Surface of the ninth region
202 2nd area (LSU side)
205 Fifth area (LSU side)
211 p-type high concentration region
HVIC High voltage IC
HVJT high voltage junction termination structure
nchMOSFET nChannel MOSFET
pchMOSFET pchannel MOSFET
V _DD1 Drive power
S source terminal
S1 First source electrode (terminal)
S2 Second source electrode (terminal)
D Drain terminal
D1 First drain electrode (terminal)
D2 Second drain electrode (terminal)
G Gate terminal
G1 Third gate electrode (terminal)
G2 Fourth gate electrode (terminal)
NPN npn transistor
E Emitter terminal
B Base terminal
C Collector terminal
V _EE1 Power supply
Q1 Power device (IGBT)
Q2 Power device (IGBT)
Q3 Power device (IGBT)
Q4 Power device (IGBT)
Q5 Power device (IGBT)
Q6 Power device (IGBT)
D1 Power device (diode)
D2 Power device (diode)
D3 Power device (diode)
D4 Power device (diode)
D5 Power device (diode)
D6 Power device (diode)
Mo motor
V _CC Main power
PC photocoupler
I / O input / output terminal
CU control circuit
LSU level shift circuit
GDU1 gate drive circuit
GDU2 gate drive circuit
GDU3 gate drive circuit
GDU4 gate drive circuit
GDU5 gate drive circuit
GDU6 gate drive circuit
SIN input line
SOUT output line
V _DDC Common power supply
V _DDHC High potential side of common power supply
V _DDLC Low potential side of common power supply
V _DD Drive power
V _DDH1 High potential side of drive power supply
V _DDH2 High potential side of drive power supply
V _DDH3 High potential side of drive power supply
V _DDL1 Low potential side of drive power supply
V _DDL2 Low potential side of drive power supply
V _DDL3 Low potential side of drive power supply
OUT Gate drive terminal
OC current detection terminal
OT temperature detection terminal
M Current detection terminal (IGBT side)
Temp Temperature detection terminal (temperature detection element side)
θ Temperature sensing element
K cathode
A anode
U U phase
HVN high voltage n-channel MOSFET
HVP high voltage p-channel MOSFET
D _N Drain electrode
D _P Drain electrode

Claims

The first region of the first conductivity type, the second region of the second conductivity type selectively formed on the surface layer of the first main surface of the first region, and the surface layer of the second region are selectively formed. A first region of the first conductivity type, a first source region and a first drain region of the first conductivity type selectively formed on the surface layer of the second region apart from the third region, and the first source region And a first-conductivity-type channel MIS transistor comprising a first gate electrode formed on the surface of the second region sandwiched between the first drain regions via an insulating film, and selective to the surface layer of the third region A second source region and a second drain region of the second conductivity type formed on the second region, and a second region formed on the surface of the third region sandwiched between the second source region and the second drain region via an insulating film and MIS transistor of the second conductivity type channel having a gate electrode, said second region Consisting formed first conductivity type channel second conductivity type channel first conductivity type region formed to pick up the MIS transistor circumference only the second region of the formed MIS transistor and the third region of which a first high voltage junction terminating structure, wherein the second high voltage junction terminating structure comprising a first conductivity type region formed in a loop shape in the second region, the high voltage junction terminating structure of the second A high-voltage MIS transistor comprising a drain electrode inside the loop, a gate electrode and a source electrode outside the loop, and a first conductivity type region of the first high-voltage junction termination structure and a second high-voltage junction termination A high breakdown voltage IC comprising the same layer connected to a region of the first conductivity type of the structure.

The first region of the first conductivity type, the second region of the second conductivity type selectively formed on the surface layer of the first main surface of the first region, and the surface layer of the second region are selectively formed. A first region of the first conductivity type, a first source region and a first drain region of the first conductivity type selectively formed on the surface layer of the second region apart from the third region, and the first source region And a first-conductivity-type channel MIS transistor comprising a first gate electrode formed on the surface of the second region sandwiched between the first drain regions via an insulating film, and selective to the surface layer of the third region A second source region and a second drain region of the second conductivity type formed on the second region, and a second region formed on the surface of the third region sandwiched between the second source region and the second drain region via an insulating film and MIS transistor of the second conductivity type channel having a gate electrode, said second region Consisting formed first conductivity type channel second conductivity type channel first conductivity type region formed to pick up the MIS transistor circumference only the second region of the formed MIS transistor and the third region of which A first high breakdown voltage junction termination structure; a second high breakdown voltage junction termination structure comprising a first conductivity type region formed in a loop shape having a notch in the second region ; and the second high breakdown voltage A high-voltage MIS transistor comprising a drain electrode inside the loop of the junction termination structure and a gate electrode and a source electrode outside the loop, and the first output wiring from the drain electrode extends over the second region; the second region surface under the region are not formed region of the first conductivity type, and first conductivity type region of the first high voltage junction terminating structure and the first conductivity type of the second high voltage junction terminating structure Are connected to the same layer. High-voltage IC, wherein the door.