JP4007165B2 - Functional liquid delivery method, functional liquid delivery apparatus, and droplet ejection apparatus to a functional liquid droplet ejection head - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a functional liquid feed to a functional liquid droplet ejection head that feeds a functional liquid from a sub-tank interposed between a main tank that stores the functional liquid and the functional liquid droplet ejection head to the functional liquid droplet ejection head. The present invention relates to a method, a functional liquid feeding device, and a droplet discharge device.
[0002]
[Prior art]
The droplet discharge device maintains the pressure in the flow path in the head of the functional droplet discharge head at a predetermined pressure, and discharges the functional droplet with high accuracy by the pumping action of the piezoelectric element incorporated in the functional droplet discharge head. ing. In such a liquid droplet ejection device, the functional liquid tank connected to the functional liquid droplet ejection head is installed at a position lower than the functional liquid droplet ejection head, thereby ensuring the ejection performance of the functional liquid droplet ejection head, The functional liquid is prevented from dripping from the functional liquid droplet ejection head.
[0003]
By the way, in an industrial liquid droplet ejection device that requires higher ejection performance, it is difficult to accurately adjust the functional liquid pressure in the functional liquid tank that fluctuates with the driving of the functional liquid droplet ejection head. Therefore, a sub tank is interposed between the functional liquid tank and the functional liquid droplet discharge head, and the liquid level of the functional liquid stored in the sub tank is always maintained within a predetermined range, and the pressure in the sub tank is adjusted. It is considered to secure the above-described pressure difference by adjusting.
[0004]
As a method for adjusting the pressure in the tank, it is known that the ink tank is raised and lowered in an ink jet recording apparatus conventionally known as a kind of droplet discharge apparatus (see, for example, Patent Document 1).
[0005]
[Patent Document 1]
Japanese Patent Application Laid-Open No. 10-244686 (pages 2 to 3 and pages 5 to 8)
[0006]
[Problems to be solved by the invention]
However, such a configuration requires a mechanism and a space for raising and lowering the sub tank, so that the installation position of the sub tank is limited and the entire apparatus is increased in size. In addition, it is extremely difficult to accurately control the pressure in the sub tank by moving the sub tank up and down.
[0007]
Accordingly, the present invention provides a functional liquid droplet ejection head that has a high degree of freedom in the installation position of the sub tank and that can stably eject functional liquid from the functional liquid droplet ejection head by appropriately controlling the pressure in the sub tank. It is an object of the present invention to provide a functional liquid feeding method, a functional liquid feeding apparatus, and a droplet discharge apparatus.
[0008]
[Means for Solving the Problems]
The present invention provides a functional liquid droplet ejection head that feeds a functional liquid to a functional liquid droplet ejection head from a sub tank in which the liquid level of the stored functional liquid is managed within a predetermined range by receiving the replenishment of the functional liquid. In this functional liquid delivery method, the functional liquid droplet ejection head ejects functional liquid droplets by the pumping action of the piezoelectric element. The subtank is a sealed tank, and the subtank is supplied from the subtank based on the detected pressure in the subtank. The pressure in the sub tank is controlled so that the function liquid feeding pressure is constant.
[0009]
According to this configuration, since the pressure in the sub tank is controlled based on the detected pressure in the sub tank so that the function liquid feeding pressure sent from the sub tank to the functional liquid droplet ejection head is constant, the sub tank is installed. Regardless of the position, the functional liquid can be sent from the sub tank to the functional liquid enemy discharge head stably and appropriately. Specifically, when the actual water head difference between the sub tank and the functional droplet discharge head is larger than the pre-specified water head difference, the pressure in the sub tank is increased, and the actual water head difference is determined from the pre-specified water head difference. Is smaller, the pressure in the sub-tank is reduced to set the functional liquid feeding pressure to a predetermined constant pressure. Note that the hydraulic head pressure of the functional liquid droplet ejection head is higher than the hydraulic head pressure of the sub tank.
[0010]
In this case, on the premise of liquid feeding under pressure, the relative height position of the liquid level of the functional liquid stored in the sub tank is defined in advance with respect to the nozzle surface of the functional liquid droplet ejection head, and the function of storing in the sub tank When the liquid level of the liquid is set above the specified relative height position, it is preferable to control the pressure in the sub tank to be negative.
[0011]
According to this configuration, when the liquid level of the functional liquid stored in the sub tank is located above the specified relative height position, that is, the water head difference between the functional liquid droplet ejection head and the sub tank is smaller than the predetermined water head difference. In this case, since the pressure in the sub tank is negatively controlled, the water head difference between the functional liquid droplet ejection head and the sub tank can be adjusted to substantially the same value as the predetermined water head difference. The functional liquid can be discharged accurately and stably. In addition, even if the water head pressure in the sub-tank becomes higher than the water head pressure in the functional liquid droplet ejection head, the functional liquid is prevented from dripping from the functional liquid droplet ejection head by controlling the pressure in the sub tank to be negative. Can do.
[0012]
In this case, a functional liquid filling step for filling the functional liquid droplet ejection head from the sub tank to the functional liquid is further provided. In the functional liquid filling step, the pressure in the flow path in the head of the functional liquid droplet ejection head becomes the necessary filling pressure. Thus, it is preferable to control the pressure in the sub tank.
[0013]
According to this configuration, in the functional liquid filling process of filling the functional liquid droplet from the sub tank to the functional liquid droplet discharge head, the functional liquid feeding pressure from the sub tank is set to a necessary filling pressure to appropriately fill the functional liquid. Since the pressure in the sub-tank is controlled to be pressurized, the functional liquid discharge head can be appropriately and efficiently filled with the functional liquid. That is, since the necessary filling pressure is satisfied, the functional liquid can be filled into the functional liquid droplet ejection head while maintaining a sufficient flow rate, and the functional liquid can be filled in a short time and the functional liquid can be ejected from the sub tank. Air (bubbles) in the functional liquid flow path reaching the head can be efficiently discharged.
[0014]
In this case, a cleaning process for forcibly discharging the functional liquid from all nozzles of the functional liquid droplet ejection head is further provided. In the cleaning process, the pressure in the flow path in the head of the functional liquid droplet ejection head It is preferable to pressurize and control the pressure in the sub tank so as to obtain a forced discharge pressure for forcibly discharging the functional liquid from all the nozzles of the head.
[0015]
According to this configuration, the pressure in the sub-tank is controlled so that the pressure in the sub-tank is higher than the pressure in the functional liquid droplet ejection head, so that the functional liquid is forced from all nozzles of the functional liquid droplet ejection head. The nozzles of the functional liquid droplet ejection head can be prevented from being clogged. Further, when cleaning the functional liquid droplet ejection head, it is not necessary to separately provide a cleaning device such as a suction pump, and the device can be miniaturized.
[0016]
In this case, it is preferable to use an ejector for controlling the pressure in the sub tank.
[0017]
According to this configuration, since the ejector operates continuously, stable control can be performed as compared with the case where pressure control is performed using a pump or the like that operates intermittently.
[0018]
The present invention provides a functional liquid to a functional liquid droplet ejection head that receives functional liquid replenishment and sends the functional liquid from a sub-tank in which the liquid level of the stored functional liquid is managed within a predetermined range to the functional liquid droplet ejection head A liquid feeding device, in which the functional liquid droplet ejection head ejects functional liquid droplets by the pump action of the piezoelectric element, a sub tank configured by a sealed tank, and a pressure detection means for detecting the pressure in the sub tank, A pressure increasing / decreasing means for increasing / decreasing the pressure in the sub tank, and a control means for controlling the pressure increasing / decreasing means so that the function liquid feeding pressure from the sub tank is constant based on a detection result by the pressure detecting means. It is characterized by that.
[0019]
According to this configuration, the function liquid feeding pressure from the sub tank can be made constant by increasing or decreasing the pressure in the sub tank constituted by the sealed tank based on the detection result detected by the pressure detecting means. Therefore, regardless of the water head difference between the sub tank and the functional liquid droplet ejection head, that is, the positional relationship between the sub tank and the functional liquid droplet ejection head, the functional liquid can be appropriately sent from the sub tank to the functional liquid droplet ejection head. it can.
[0020]
In this case, the sub tank further includes a main tank for replenishing the functional liquid, and the sub tank is provided with a liquid level detecting means for detecting the liquid level of the functional liquid stored in the sub tank. It is preferable to replenish the functional fluid to the sub tank based on the detection result of the position detecting means.
[0021]
According to this configuration, since the functional liquid is replenished from the main tank based on the detection result of the liquid level detecting means provided in the sub tank, the liquid level fluctuation of the functional liquid stored in the sub tank is kept within a predetermined range. Therefore, the pressure in the sub tank can be adjusted appropriately.
[0022]
In this case, the main tank preferably replenishes the sub tank with the functional liquid when the functional liquid droplet ejection head is not driven.
[0023]
According to this configuration, since the functional liquid is not supplied to the sub tank when the functional liquid droplet ejection head is driven, the functional liquid droplet ejection head is not affected, and the functional liquid droplet ejection is stably performed. The functional liquid can be discharged from the head.
[0024]
In this case, the sub tank is preferably provided with a space for absorbing pressure fluctuations in the sub tank.
[0025]
According to this configuration, it is possible to prevent sudden pressure fluctuations in the sub-tank caused by increasing or decreasing the pressure in the sub-tank by the space provided in the sub-tank for absorbing pressure fluctuations. Therefore, it is possible to reduce the influence of the sudden pressure fluctuation on the functional liquid feeding pressure and to perform stable functional liquid feeding.
[0026]
In this case, on the premise of liquid feeding under atmospheric pressure, the relative height position of the liquid level of the functional liquid stored in the sub tank is defined in advance with respect to the nozzle surface of the functional liquid droplet ejection head. The functional liquid stored in the sub-tank is disposed so that the liquid level of the functional liquid is higher than a predetermined relative height position, and the pressure-increasing / decreasing means has a secondary side connected to the sub-tank via a suction channel. The ejector includes a working fluid supply unit that is connected to the primary side of the ejector via a supply channel and supplies the working fluid to the ejector, and a pressure adjusting unit that adjusts the suction pressure of the ejector. It is preferable to control the pressure adjusting means.
[0027]
According to this configuration, when the sub tank is disposed at a position where the water head difference between the functional liquid droplet ejection head and the sub tank is smaller than the water head difference defined on the premise of liquid feeding under atmospheric pressure, the ejector While adjusting the suction pressure, suction force can be applied to the sub tank from the secondary side of the ejector, and the pressure in the sub tank can be negatively controlled. Since the ejector does not have a movable part, it is relatively small and can save space in the apparatus as compared with the case where pressure control is performed using a pump or the like. Also, since the ejector is continuously applied with force, unlike the case where force is applied while pulsating like a pump, it is possible to perform accurate and stable pressure control.
[0028]
In this case, it is preferable that the pressure adjusting means is a flow rate adjusting valve that is interposed in the supply flow path and adjusts the flow rate of the working fluid supplied to the ejector.
[0029]
According to this configuration, since the suction pressure of the ejector can be adjusted by adjusting the flow rate of the working fluid supplied to the ejector, the pressure in the sub tank can be managed appropriately.
[0030]
In this case, the primary side of the ejector is connected to the sub-tank via a discharge flow path, and a suction flow path opening / closing valve composed of a three-way valve having an air release port is interposed in the suction flow path. The flow path is provided with a discharge flow path opening / closing valve composed of a three-way valve having an air release port, and the control means switches between the suction flow path opening / closing valve and the discharge flow path opening / closing valve, thereby It is preferable that the pressure can be increased or decreased.
[0031]
According to this configuration, by switching the suction flow path opening / closing valve and the discharge flow path opening / closing valve and switching the flow path communicating with the sub tank, not only the negative pressure of the sub tank is controlled by suction, but also the exhaust is discharged from the ejector. The pressure in the sub-tank can be controlled by using the pressure of the working fluid. Therefore, since the ejector can be used in both the negative pressure control and the pressurization control, the apparatus can be downsized and a complicated apparatus configuration is not required.
[0032]
In this case, it further includes a flow path opening / closing valve that is provided in a functional liquid flow path that connects the sub tank and the functional liquid droplet ejection head, and that opens and closes the functional liquid flow path. It is preferable to control the opening / closing of the flow path opening / closing valve in synchronization.
[0033]
According to this configuration, the flow path opening / closing valve can be closed in synchronization with the driving of the pressure-increasing / decreasing means, and the liquid supply of the functional liquid to the functional liquid droplet ejection head can be stopped reliably. That is, it is possible to reliably prevent the functional liquid from dripping from the functional liquid droplet ejection head even if air leakage occurs in the sub tank when the pressure increasing / decreasing means is not driven.
[0039]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, a first embodiment of the present invention will be described with reference to the accompanying drawings. FIG. 1 is an external perspective view of a droplet discharge device to which the present invention is applied, and FIG. 2 is a right side view of the droplet discharge device to which the present invention is applied. Although details will be described later, the droplet discharge device 1 introduces a functional liquid such as special ink or a light-emitting resin liquid into the functional droplet discharge head 31 to form a functional liquid droplet on a workpiece W such as a substrate. A film part is formed.
[0040]
As shown in both figures, the droplet discharge device 1 includes a discharge means 2 for discharging a functional liquid, a maintenance means 3 for maintaining the discharge means 2, and a liquid (for example, a functional liquid) to each means. In addition, a liquid supply / recovery means 4 for recovering unnecessary liquid and an air supply means 5 (working fluid supply means) for supplying compressed air for driving / controlling each means are provided. The main part of the discharge means 2 is disposed on a stone surface plate 12 provided on the gantry 11, and a common machine base 13 integrally attached thereto includes a maintenance means 3, a liquid supply / recovery means 4, and The main part of the air supply means 5 is disposed. These means are controlled by the control means 6. Hereinafter, each means will be described.
[0041]
The ejection unit 2 includes a head unit 21 having a functional liquid droplet ejection head 31 that ejects a functional liquid, a main carriage 22 that supports the head unit 21, and a head unit 21 (functional liquid droplet ejection head) via the main carriage 22. 31) and an XY movement mechanism 23 for moving the workpiece 31 relative to the workpiece W.
[0042]
As shown in FIG. 3, the head unit 21 includes twelve functional liquid droplet ejection heads 31, a sub carriage 32 on which the functional liquid droplet ejection head 31 is mounted, and each functional liquid droplet ejection head 31 attached to the sub carriage 32. And a head holding member 33. The sub-carriage 32 is divided into twelve functional droplet discharge heads 31 each in six, and is fixed to the sub-carriage 32 at a predetermined angle to ensure a sufficient coating density on the workpiece W. Further, the sub-carriage 32 is provided with a pipe joint 43 for pipe-connecting each functional liquid droplet ejection head 31 and a liquid supply tank 152 (sub tank) described later. Note that the number and arrangement of the functional liquid droplet ejection heads 31 are not limited to those described above, and are arbitrary. For example, if a functional liquid droplet ejection head 31 dedicated to the purpose of use is used, the functional liquid droplet ejection heads 31 function. There is no need to tilt the droplet discharge head 31.
[0043]
As shown in FIG. 4, the functional liquid droplet ejection head 31 has a so-called double structure, a functional liquid introduction part 34 having two connection needles 35, and a double head substrate connected to the functional liquid introduction part 34. 36 and a head main body 37 which is connected to the lower side of the functional liquid introduction section 34 and has an in-head flow path filled with the functional liquid therein. Each connection needle 35 is connected to the liquid supply tank 152 via the pipe adapter 42, and the functional liquid introduction unit 34 is supplied with the functional liquid from each connection needle 35. The head main body 37 has a double pump section 38 and a nozzle forming plate 39 on which a large number of discharge nozzles 41 are formed. In the functional liquid droplet discharge head 31, the discharge nozzle 41 is operated by the action of the pump section 38. Functional droplets are discharged from the liquid crystal. The lower surface of the nozzle forming plate 39 is a nozzle forming surface 40 (nozzle surface), and the functional liquid droplet ejection head 31 is interposed via a head holding member 33 so that the nozzle forming surface 40 protrudes downward. It is fixed to the sub-carriage 32 (see FIG. 4).
[0044]
As shown in FIG. 2, the main carriage 22 is attached to a hanging member 51 having an external appearance “I” shape fixed to a Y-axis table 55 described later, and a lower surface of the hanging member 51 (head unit). 31 is composed of a θ table 52 for correcting the position in the θ direction, and a carriage body 53 attached so as to be suspended below the θ table 52. The carriage body 53 has a rectangular opening for loosely fitting the head unit 21 so that the head unit 21 is positioned and fixed. The carriage body 53 is provided with a work recognition camera (not shown) for recognizing the work W.
[0045]
The X / Y moving mechanism 23 has a suction table 56 that sucks (fixes) the workpiece W, and moves the workpiece W in the X-axis direction (main scanning direction) via the suction table 56. A Y-axis table 55 that moves the head unit 21 in the Y-axis direction (sub-scanning direction) via the carriage 22. The XY movement mechanism 23 is disposed on the stone surface plate 12 described above, and can maintain the flatness of the workpiece W and can accurately move the head unit 21 (see FIG. 1).
[0046]
Here, a series of operations of the discharge means 2 will be briefly described. First, as a preparation before discharging the functional liquid, position correction of the head unit 21 and the set work W is performed. Next, the XY movement mechanism 23 (X axis table 54) reciprocates the workpiece W in the main scanning (X axis) direction. In synchronization with the reciprocation of the workpiece W, the plurality of functional droplet ejection heads 31 are driven, and the functional droplet is selectively ejected onto the workpiece W. When the workpiece W reciprocates once, the XY movement mechanism 23 (Y-axis table 55) moves the head unit 21 in the sub-scanning (Y-axis) direction. Then, the reciprocating motion of the work W in the main scanning direction and the driving of the functional liquid droplet ejection head 31 are performed again. In the present embodiment, the workpiece W is moved in the main scanning direction with respect to the head unit 21, but the head unit 21 may be moved in the main scanning direction. Alternatively, the head unit 21 may be fixed and the work W may be moved in the main scanning direction and the sub-scanning direction.
[0047]
Next, the maintenance means 3 will be described. The maintenance means 3 maintains the functional liquid droplet ejection head 31 so that the functional liquid droplet ejection head 31 can appropriately eject the functional liquid, and includes a flushing unit 61, a suction unit 62, and a wiping unit 63. (See FIG. 1).
[0048]
The flushing unit 61 receives functional liquids that are sequentially ejected by the flushing operation of a plurality (12) of functional liquid droplet ejection heads 31 at the time of ejecting liquid droplets, that is, preliminary ejection from all the ejection nozzles 41. belongs to. The flushing unit 61 is fixed to the X-axis table 54, and a pair of flushing boxes 71 that receive the discharged functional liquid are fixed with the suction table 56 interposed therebetween. Since the flushing box 71 moves toward the head unit 21 together with the workpiece W along with the main scanning, the flushing operation can be sequentially performed from the ejection nozzle 41 of the functional liquid droplet ejection head 31 facing the flushing box 71. The functional liquid received in the flushing box 71 is stored in a waste liquid tank 241 described later. In the flushing operation of the present embodiment, preliminary ejection from all the ejection nozzles 41 is performed. For example, only a part of the ejection nozzles 41 is allowed to perform preliminary ejection only, for example, the ejection nozzles 41 to be used. It is good also as a structure which performs preliminary discharge.
[0049]
The suction unit 62 is provided on the common machine base 13 described above, and is used to fill the functional liquid droplet ejection head 31 with the functional liquid or to remove the functional liquid thickened in the functional liquid droplet ejection head 31. As in the case of cleaning, the functional liquid forcibly ejected from all the ejection nozzles 41 of the functional liquid droplet ejection head 31 is received.
[0050]
As shown in FIGS. 5 and 8, the suction unit 62 is in close contact with each functional liquid droplet ejection head 31 and includes 12 caps 91 that receive the functional liquid forcedly ejected (from the functional liquid droplet ejection head 31). The cap unit 81 provided, the elevating mechanism 82 for moving the cap 91 up and down by moving the cap unit 81 up and down, and the functional tank received in the cap 91 are reused in the tank 221 (described later). A suction pump 83 for feeding liquid, a cap suction tube 84 for connecting each cap 91 and the suction pump 83, and a support member 85 for supporting the cap unit 81.
[0051]
As shown in FIG. 5, the cap unit 81 has twelve caps 91 arranged on a cap base 92 corresponding to the arrangement of twelve functional liquid droplet ejection heads 31 mounted on the head unit 21. Yes, each cap 91 can be brought into close contact with each corresponding functional liquid droplet ejection head 31.
[0052]
As shown in FIG. 6, the cap 91 includes a cap body 93 and a cap holder 95. The cap main body 93 is urged upward by two springs 94 and is held by the cap holder 95 in a state where it can be moved slightly up and down. On the upper surface of the cap main body 93, concave portions 96 including two rows of ejection nozzles 41 of the functional liquid droplet ejection head 31 are formed, and a seal packing 97 is attached to the peripheral portion of the concave portion 96. An absorbent material 98 that absorbs the functional liquid is laid on the bottom of the recess 96 in a state of being pressed by the presser frame 99.
[0053]
When the functional liquid is forcibly ejected from the functional liquid droplet ejection head 31, the seal packing 97 is pressed against the nozzle forming surface 40 of the functional liquid droplet ejection head 31 so that the cap 91 is brought into close contact with the functional liquid droplet ejection head 31. The nozzle forming surface 40 is sealed so as to include 41 rows of the discharge nozzles. Each cap 91 is provided with a cap atmosphere release valve 100 so that the atmosphere can be released to the bottom surface of the recess 96 (see FIG. 6). Then, at the final stage of the forced discharge of the functional liquid, the functional liquid impregnated in the absorbent 99 can be sucked by the suction pump 83 by opening the cap air release valve 100 and releasing the air. Yes.
[0054]
The elevating mechanism 82 is composed of an air cylinder and includes two elevating cylinders 111 and 112 having different strokes. Then, the raising position of the cap unit 81 can be switched between a relatively high first position and a relatively low second position by the selective operation of the lifting cylinders 111 and 112, and when the cap unit 81 is in the first position. When each cap 91 is in close contact with each functional liquid droplet ejection head 31 and the cap unit 81 is in the second position, a slight gap is generated between each functional liquid ejection head 31 and each cap 91. ing.
[0055]
The suction pump 83 is constituted by a piston pump, and sends the forcedly discharged functional liquid from the cap 91 to the reuse tank 221 by applying a suction force to the cap 91. In the liquid droplet ejection device 1 of the present embodiment, the function when functional liquid is not ejected (when the functional liquid droplet ejection head 31 is not driven), that is, when the ejection of the functional liquid to the workpiece W is temporarily stopped. Each cap 91 also serves as a functional liquid receiver that receives the functional liquid discharged by the flushing operation of the droplet discharge head 31, and receives the functional liquid at the second position. The flushing functional liquid received by each cap 91 is also sucked by the suction pump 83 and sent to the reuse tank 221.
[0056]
The cap suction tube 84 includes a cap suction tube 121 and a branch cap suction tube 122 that branches the cap suction tube 121 into a plurality (twelve) according to the number of caps 91. A cap 91 and a suction pump 83 are connected via a tube 122.
[0057]
The wiping unit 63 is provided on the common machine base 13 in the same manner as the suction unit 62, and the nozzle forming surface of each functional liquid droplet ejection head 31 contaminated by the functional liquid adhered by the forced ejection of the functional liquid droplet ejection head 31 or the like. 40 is wiped off while moving in the X-axis direction. As shown in FIG. 1, the wiping unit 63 includes a winding unit 132 that winds up a wiping sheet (not shown) for wiping, and a wiping roller (shown) for bringing the wiping sheet into contact with the nozzle forming surface 40. And a wiping unit 133 having (omitted).
[0058]
The wiping unit 63 feeds the wiping sheet from the winding unit 132 in a state sufficiently close to the functional liquid droplet ejection head 31, and feeds the wiping sheet fed using the wiping roller to the nozzle forming surface 40 of the functional liquid droplet ejection head 31. Wipe off dirt while pressing. Note that the wiping sheet that has been fed is supplied with a cleaning liquid from a cleaning liquid supply system 143, which will be described later, so that the functional liquid adhering to the functional liquid droplet ejection head 31 can be efficiently wiped off.
[0059]
Next, the liquid supply / recovery means 4 will be described. The liquid supply / recovery means 4 includes a functional liquid supply system 141 that supplies a functional liquid to each functional liquid droplet ejection head 31 of the head unit 21 and a functional liquid recovery system that recovers the functional liquid sucked by the suction unit 62 of the maintenance means 3. 142, a cleaning liquid supply system 143 that supplies the wiping unit 63 with a solvent of a functional material for cleaning, and a waste liquid recovery system 144 that recovers the functional liquid received by the flushing unit 61. As shown in FIG. 2, in the storage chamber 14 of the common machine base 13, the pressurized tank 151 of the functional liquid supply system 141, the reuse tank 221 of the functional liquid recovery system 142, and the cleaning liquid supply are sequentially arranged from the right side in the figure. The cleaning liquid tank 231 of the system 143 is arranged side by side. A waste liquid tank 241 of a waste liquid recovery system 144 formed in a small size is provided in the vicinity of the reuse tank 221 and the cleaning liquid tank 231.
[0060]
The functional liquid supply system 141 stores a pressurized tank 151 (main tank) that stores a large amount (3 L) of functional liquid, stores the functional liquid sent from the pressurized tank 151, and each functional liquid droplet ejection head 31. A liquid supply tank 152 for supplying the functional liquid to the liquid, a pressure-reducing means 153 for increasing / decreasing the pressure in the liquid supply tank 152, and a supply for supplying the functional liquid from the pressure tank 151 to the functional liquid droplet ejection head 31. And a liquid supply tube 154 that forms a liquid passage. The functional liquid stored in the pressurized tank 151 is pumped to the liquid supply tank 152 at a constant pressure by compressed air (inert gas) introduced from the air supply means 5 when the functional liquid droplet ejection head 31 is not ejected. The
[0061]
The liquid supply tank 152 is fixed on the tank base 161 disposed on the common machine base 13 described above. As shown in FIG. 7, the liquid supply tank 152 stores the functional liquid, and detects a rectangular tank main body 162 closed in a flange form, and the liquid level of the functional liquid stored in the tank main body 162. A liquid level detector 163, a pan 166 on which the tank main body 162 is placed, and a tank stand 167 that supports the tank main body 162 via the pan 166 are provided. In the present embodiment, the pan 166 is disposed at a position higher than the nozzle formation surface 40 of the functional liquid droplet ejection head 31, and the liquid level of the functional liquid stored in the tank body 162 is the functional liquid droplet ejection head 31. It is higher than the position of the nozzle forming surface 40.
[0062]
The tank main body 162 is connected with a liquid supply tube 154 connected to the pressurized tank 151 from the upper surface thereof. A liquid level adjusting valve 212 is interposed in the liquid supply tube 154 that connects the tank body 162 and the pressurized tank 151. The tank main body 162 is formed of a sealed tank and is connected to the pressure increasing / decreasing means 153. The tank body 162 is provided with a tank pressure detection sensor 171 (pressure detection means) that detects the pressure in the tank body 162. The tank body 162 is made relatively large in order to prevent sudden pressure fluctuations in the tank by increasing or decreasing the pressure in the liquid supply tank 152. In addition to the space for storing the functional liquid, the tank body 162 has a sufficient amount of space for absorbing pressure fluctuations.
[0063]
Further, on the upper surface of the tank main body 162, six connectors 172 for the liquid supply tube 154 extending to the head unit 21 side and one connector 173 for opening to the atmosphere are provided. Six liquid supply tubes 154 extending from the liquid supply tank 152 to the functional liquid droplet ejection head 31 are branched into two via T-shaped joints 213 to form a total of 12 branched liquid supply tubes 211. . The twelve branch liquid supply tubes 211 are connected to a piping joint 43 provided in the head unit 21 as a device-side piping member, and supply the functional liquid to each functional liquid droplet ejection head 31. Each branch liquid supply tube 211 is provided with a head side supply valve 214 for opening and closing the branch liquid supply tube 211 and is controlled to be opened and closed by the control means 6 (see FIG. 8).
[0064]
As shown in FIG. 7, the liquid level detector 163 appropriately discharges the functional liquid from the overflow detector 164 that detects the overflow of the tank main body 162 and the management liquid level of the tank main body 162, that is, the functional liquid droplet discharge head 31. The control liquid level detector 165 (liquid level detection means) detects the lower limit level of the liquid level that can be generated. The liquid level adjustment valve 212 is controlled to open and close based on the detection result of the management liquid level detector 165, thereby adjusting the amount of functional liquid supplied from the pressurized tank 151 to the liquid supply tank 152. .
[0065]
Specifically, when the management liquid level detector 165 detects that the liquid level of the functional liquid stored in the liquid supply tank 152 has fallen below the lower limit level of the management liquid level, the non-functioning liquid droplet ejection head 31 is turned off. At the time of driving, the liquid level adjustment valve 212 is opened. Then, the functional liquid is replenished from the pressurizing tank 151 to the liquid supply tank 152 at a constant pressure. After a predetermined time has passed, the liquid level adjustment valve 212 is closed to stop the supply of the functional liquid. As described above, when the liquid level falls below the lower limit of the control liquid level, the liquid supply tank 152 can be supplied with a substantially constant amount of the functional liquid by replenishing the functional liquid at a constant pressure for a certain period of time. The liquid level of the liquid supply tank 152 can be controlled within the range of the management liquid level.
[0066]
The tank stand 167 includes a mounting plate 168 and two columnar members 169 erected on the mounting plate 168, and the height and inclination of the tank body 162 are determined by the two columnar members 169. (Liquid level inclination) can be finely adjusted.
[0067]
The pressure increasing / decreasing means 153 includes the air supplying means 5 and an ejector 191 for reducing the pressure in the liquid supply tank 152, and is used for adjusting the pressure in the liquid supply tank 152. Yes (details will be described later). As shown in FIG. 8, the air supply means 5 and the ejector 191 are connected to the liquid supply tank 152 via a tank suction tube 204 and an air supply tube 183, respectively.
[0068]
As shown in FIG. 8, the air supply means 5 includes an inert gas (N ₂ ) Compressed air is supplied to each part such as the ejector 191 and the liquid supply tank 152, and the air pump 181 (compressor) that compresses the inert gas and the compressed air from the air pump 181 according to the supply destination A regulator 182 that maintains a constant pressure, and an air supply pipe 183 that connects the air pump 181 and each part by piping and supplies compressed air to each part. The air supply tube 183 connecting the air pump 181 and the regulator 182 is provided with an air filter 184 for removing dust in the compressed air (functional liquid) and a separator 185 for removing oil. Yes. An air supply valve 186 is interposed in the air supply tube 183 connected to the liquid supply tank 152. The air supply valve 186 is normally closed, but is opened when pressurizing and controlling the pressure in the liquid supply tank 152 (details will be described later).
[0069]
As shown in FIG. 8, the ejector 191 is connected to the air supply means 5, communicates with the supply port 192 (primary side) that receives supply of compressed air as the working fluid, and the inside of the liquid supply tank 152, and sucks it. A suction port 193 for acting force (secondary side) and a supply port 192 for discharging the supplied working fluid and the sucked bubbles and functional liquid from the suction port 193 (on the primary side) And a discharge port 194. That is, a negative pressure is generated inside the ejector 191 by an accompanying flow generated with the supply of compressed air, and the air in the liquid supply tank 152 is sucked through the suction port 193, whereby the pressure in the liquid supply tank 152 is increased. The pressure is reduced.
[0070]
As shown in FIG. 8, an air supply tube 183 connecting the ejector 191 and the air supply unit 5 includes a pressure controller 201 (control unit) connected to the control unit 6 and a working fluid supplied to the ejector 191, that is, An electropneumatic regulator 202 (pressure adjusting means) for adjusting the flow rate of the compressed air is provided, and the suction force of the ejector 191 can be adjusted. An orifice 203 is interposed between the electropneumatic regulator 202 and the ejector 191, and the compressed air passing through the electropneumatic regulator 202 passes through the orifice 203 and is supplied to the ejector 191 as a laminar flow. . The electropneumatic regulator 202 is composed of a solenoid valve and a booster, and adjusts the flow rate of the compressed air sent from the air pump 181.
[0071]
A tank suction tube 204 (suction channel) connecting the suction port 193 of the ejector 191 and the liquid supply tank 152 is connected to a tank suction valve 205 (suction channel on / off valve) having a three-way valve having an air release port. ) Is provided. The tank suction valve 205 is normally opened, and the tank suction tube 204 is in communication. A vacuum pump may be used instead of the ejector 191 as means for reducing the pressure in the liquid supply tank 152.
[0072]
The functional liquid recovery system 142 is for storing the functional liquid sucked by the suction pump 83 of the suction unit 62, and is connected to the reuse tank 221 for storing the sucked functional liquid and the suction pump 83, and sucked functions. And a recovery tube 222 that guides the liquid to the reuse tank 221.
[0073]
The cleaning liquid supply system 143 is for supplying a cleaning liquid to a wiping sheet (not shown) of the wiping unit 63, and includes a cleaning liquid tank 231 for storing the cleaning liquid and a cleaning liquid supply tube (not shown) for supplying the cleaning liquid in the cleaning liquid tank 231. (Omitted). The cleaning liquid is supplied by introducing compressed air from the air supply means 5 to the cleaning liquid tank 231. Further, a functional liquid solvent having a relatively high volatility is used as the cleaning liquid, so that the functional liquid adhering to the functional liquid droplet ejection head 31 can be wiped off efficiently.
[0074]
The waste liquid recovery system 144 is for recovering the functional liquid discharged to the flushing unit 61. The waste liquid recovery system 144 is connected to the waste liquid tank 241 that stores the recovered functional liquid and the flushing unit 61 (flushing box 71). A waste liquid tube (not shown) that guides the functional liquid discharged to the flushing box 71.
[0075]
Next, the control means 6 will be described. The control unit 6 includes a control unit for controlling the operation of each unit. The control unit stores a control program and control data and has a work area for performing various control processes. Yes. And the control means 6 is connected with each above-mentioned means, and controls the whole apparatus.
[0076]
By the way, the water head difference between the functional liquid droplet ejection head 31 and the liquid supply tank 152 is defined in advance, and the liquid from the functional liquid droplet ejection head 31 is assumed on the assumption that the functional liquid is fed under atmospheric pressure. In order to prevent dripping and to ensure an appropriate functional liquid feeding pressure, the liquid supply tank 152 is kept slightly minus water head (for example, 25 mm ± 0.5 mm) from the functional liquid droplet ejection head 31. That is, by setting the liquid supply tank 152 so that the liquid level of the functional liquid stored in the liquid supply tank 152 is lower than the nozzle formation surface 40 of the functional liquid droplet ejection head 31 by a predetermined height, Holding the difference. As described above, in the liquid supply of the functional liquid under the atmospheric pressure, the relative height difference between the nozzle forming surface 40 of the functional liquid droplet ejection head 31 and the liquid level of the liquid supply tank 152 is regulated. The installation position of the liquid tank 152 is remarkably limited, which causes the apparatus to be enlarged.
[0077]
Therefore, the droplet discharge device 1 according to the present embodiment is defined by controlling the pressure in the liquid supply tank 152 based on the tank pressure detection sensor 171 described above, without assuming liquid feeding under atmospheric pressure. We are trying to secure the difference in water head. Then, by keeping the pressure in the liquid supply tank 152 constant, the function liquid supply pressure from the liquid supply tank 152 is made substantially constant.
[0078]
As described above, since the liquid supply tank 152 is installed at a position higher than the nozzle formation surface 40 of the functional liquid droplet ejection head 31, in this embodiment, the pressure in the liquid supply tank 152 is usually increased or decreased. Negative pressure control is performed using the ejector 191 of the means 153. 8 and 9, the tank pressure detection sensor 171 constantly detects the pressure in the liquid supply tank 152, including when the functional liquid droplet ejection head 31 is driven. Sent to the pressure controller 201. Then, the pressure controller 201 controls the electropneumatic regulator 202 based on the detection result of the tank pressure detection sensor 171 so that the pressure in the liquid supply tank 152 becomes constant, and adjusts the flow rate of the compressed air supplied to the ejector 191. To do. In this way, by adjusting the flow rate of the compressed air supplied to the ejector 191 by feeding back the pressure in the liquid supply tank 152 as needed, the pressure change in the liquid supply tank 152 is followed, The pressure can be controlled to an appropriate constant pressure.
[0079]
Although it is conceivable to adjust the pressure in the liquid supply tank 152 by detecting the pressure in the functional liquid flow path such as the liquid supply tube 154 or the flow path in the head of the functional liquid droplet ejection head 31, Since it is difficult to accurately detect the pressure of the flowing functional liquid flow path, in order to accurately compensate for the water head difference from the functional liquid droplet ejection head 31, based on the pressure in the liquid supply tank 152, It is preferable to adjust the pressure in the liquid supply tank 152.
[0080]
When the driving of the air supply means 5 is stopped, all the head side supply valves 214 are closed. This reliably prevents the functional liquid from dripping from the functional liquid droplet ejection head 31 when the liquid droplet ejection apparatus 1 is not driven.
[0081]
In addition, as described above, the air supply tube 152 connected to the air supply means 5 is connected to the liquid supply tank 152, and not only the negative pressure control of the pressure in the liquid supply tank 152 but also the pressure control is performed. It can be done. Then, when the functional liquid droplet ejection head 31 is filled with the functional liquid, such as when a new functional liquid droplet ejection head 31 is introduced, or the functional liquid is forcibly ejected from all the ejection nozzles of the functional liquid droplet ejection head 31. In this case, the pressure in the liquid supply tank 152 is controlled to be increased.
[0082]
A series of operations will be described by taking as an example a case where the functional liquid droplet ejection head 31 is filled with a functional liquid. First, the X / Y moving mechanism 23 is driven, and the head unit 21 is first caused to face the suction unit 62 disposed on the common machine base 13. Then, the lifting mechanism 82 of the suction unit 62 is driven to raise the cap unit 81 to the first position, and the caps 91 are brought into close contact with the corresponding functional liquid droplet ejection heads 31.
[0083]
Next, the tank suction valve 205 provided in the tank suction tube 204 is closed to stop the negative pressure control of the liquid supply tank 152, and the tank suction tube 204 is closed and switched to the atmosphere release port. . Subsequently, the air supply valve 186 that has been closed is opened, and compressed air is sent to the liquid supply tank 152. Thereby, the pressure in the liquid supply tank 152 is increased, and the functional liquid stored in the liquid supply tank 152 is pressurized and fed to the functional liquid droplet ejection head 31. The supply amount of the compressed air sent to the liquid supply tank 152 is such that the functional liquid supply pressure from the liquid supply tank 152 is sufficient to fill the functional liquid droplet ejection head 31 with the functional liquid (necessary filling pressure). It is adjusted by the regulator 182 so that it becomes.
[0084]
When the filling of the functional liquid into the functional liquid droplet ejection head 31 is completed, the air supply valve 186 is closed again and the tank suction valve 205 is opened. Then, the negative pressure control of the liquid supply tank 152 is started again, and a water head difference between the liquid supply tank 152 and the functional liquid droplet ejection head 31 which is defined in advance so as to be a predetermined functional liquid feed pressure is ensured.
[0085]
When the functional liquid is forcibly ejected from all the ejection nozzles 41 of the functional liquid droplet ejection head 31, the functional liquid feeding pressure from the liquid supply tank 152 forces the functional liquid from all the ejection nozzles 41 of the functional liquid droplet ejection head 31. The pressure in the liquid supply tank 152 is increased so that the forced discharge pressure is sufficient for discharging, but the series of operations is substantially the same as when the functional liquid discharge head 31 is filled with the functional liquid.
[0086]
In the present embodiment, the pressure in the liquid supply tank 152 is increased or decreased by directly sucking the air in the liquid supply tank 152 or directly introducing the compressed air into the liquid supply tank 152. The liquid supply tank 152 may be accommodated in a pressurization box (not shown) made of aluminum or the like, and the liquid supply tank 152 may be pressurized via the pressurization box. Specifically, a vent hole or the like is provided in the liquid supply tank 152 and communicates with the inside of the pressurization box so that the pressure in the pressurization box and the liquid supply tank 152 are kept at the same pressure. Then, the pressure in the liquid supply tank 152 is increased or decreased by increasing or decreasing the pressure in the pressure box by the pressure increasing / decreasing means 153. According to this configuration, since the liquid supply tank 152 is pressurized via the pressurization box, the pressure in the liquid supply tank 152 is controlled more uniformly than the configuration in which the liquid supply tank 152 is directly pressurized or depressurized. The pressure in the liquid supply tank 152 can be stably controlled.
[0087]
Next, a second embodiment of the present invention will be described. The basic configuration of the droplet discharge device 1 of the present embodiment is substantially the same as that of the first embodiment described above, and the pressure in the liquid supply tank 152 is negatively controlled based on the pressure in the liquid supply tank 152. Yes. However, in the droplet discharge device 1 of the second embodiment, as a means for increasing the pressure in the liquid supply tank 152, compressed air is not sent directly from the air supply means 5 to the liquid supply tank 152, but the ejector 191 is discharged. This is different from the first embodiment in that compressed air discharged from the outlet 194 is used. Therefore, only the parts different from the first embodiment will be described here.
[0088]
As shown in FIG. 10, the discharge port 194 of the ejector 191 is connected to the liquid supply tank 152 via the air discharge tube 251. The air discharge tube 251 is provided with a second air supply valve 252 (discharge flow path opening / closing valve), and the second air supply valve 252 is a three-way valve having an air release port. The second air supply valve 252 is closed during the negative pressure control of the liquid supply tank 152 and switched to the atmosphere release port. When the pressure in the liquid supply tank 152 is increased, the tank suction valve 205 is closed, the tank suction tube 204 is closed and switched to the atmosphere release port, and the second air supply valve 252 is opened. The compressed air discharged from the discharge port 194 of the ejector 191 is sent to the liquid supply tank 152.
[0089]
Next, a third embodiment of the present invention will be described. The liquid droplet ejection apparatus 1 of the present embodiment also has the same basic configuration as the liquid droplet ejection apparatus 1 of the first embodiment described above, but the liquid supply is higher than the height of the nozzle formation surface 40 of the functional liquid droplet ejection head 31. The tank 152 (the liquid level of the functional liquid stored in the tank) is set low, and the water head difference between the functional liquid droplet ejection head 31 and the liquid supply tank 152 is a water head defined on the assumption that liquid feeding is performed under atmospheric pressure. It is bigger than the difference. Accordingly, in the present embodiment, an appropriate water head difference is maintained by pressurizing and controlling the pressure in the liquid supply tank 152. In the droplet discharge device 1 of this embodiment, the ejector 191 is not provided as in the above-described embodiment, and the air supply means 5 is connected to the liquid supply tank 152 (see FIG. 11). . This is because there is no need to negatively control the pressure in the liquid supply tank 152 in order to prevent liquid dripping from the functional liquid droplet ejection head 31.
[0090]
As shown in FIG. 11, a pressure controller 201 connected to a tank pressure detection sensor 171 is interposed in an air supply tube 183 connecting the air supply means 5 and the liquid supply tank 152, and the tank pressure detection sensor The detection result of 171 is fed back, and the supply amount (pressure) of compressed air introduced into the liquid supply tank 152 is adjusted. In general, the pressure in the liquid supply tank 152 is maintained at a predetermined constant pressure so that the functional liquid delivery pressure is such that the functional liquid can be ejected stably and appropriately from the functional liquid droplet ejection head 31. The liquid supply tank 152 is provided with an air release valve 155.
[0091]
When the functional liquid droplet ejection head 31 is filled with a functional liquid or when the functional liquid droplet ejection head 31 is cleaned, the supply amount of compressed air introduced into the liquid supply tank 152 is increased from the normal time. Thus, sufficient functional liquid feeding pressure can be secured for performing each step. When the filling and cleaning of the functional liquid is completed, since the pressure in the liquid supply tank 152 is higher than usual, the air release valve 155 is opened to reduce the pressure in the liquid supply tank 152. Again, a predetermined constant pressure is maintained.
[0092]
As described above, the droplet discharge device 1 according to the first to third embodiments is based on the pressure in the liquid supply tank 152 so that the functional liquid supply pressure becomes a predetermined constant pressure. Therefore, the installation position of the liquid supply tank 152 is not limited.
[0093]
Here, the case where the above-described droplet discharge device 1 is applied to the manufacture of a liquid crystal display device will be described. FIG. 12 shows a cross-sectional structure of the liquid crystal display device 301. As shown in the figure, a liquid crystal display device 301 is composed of an upper substrate 311 and a lower substrate 312 in which a transparent conductive film (ITO film) 322 and an alignment film 323 are formed on a facing surface with a glass substrate 321 as a main body, and both upper and lower substrates. A plurality of spacers 331 interposed between the upper and lower substrates 311 and 312, and a liquid crystal 333 filled between the upper and lower substrates 311 and 312; A phase substrate 341 and a polarizing plate 342 a are stacked on the back surface of the substrate 311, and a polarizing plate 342 b and a backlight 343 are stacked on the back surface of the lower substrate 312.
[0094]
In a normal manufacturing process, patterning of the transparent conductive film 322 and application of the alignment film 323 are performed to separately manufacture the upper substrate 311 and the lower substrate 312, and then a spacer 331 and a sealing material 332 are formed on the lower substrate 312. In this state, the upper substrate 311 is bonded. Next, liquid crystal 333 is injected from the inlet of the sealing material 332, and the inlet is closed. Thereafter, the phase substrate 341, both polarizing plates 342a and 342b, and the backlight 343 are stacked.
[0095]
The above-described droplet discharge device 1 can be used, for example, for forming the spacer 331 and injecting the liquid crystal 333. Specifically, a spacer material (for example, an ultraviolet curable resin or a thermosetting resin) or a liquid crystal constituting the cell gap is introduced as a functional liquid, and these are uniformly ejected (applied) to a predetermined position. First, the lower substrate 312 printed in a ring shape with the sealing material 332 is set on the suction table, and the spacer material is discharged onto the lower substrate 312 at rough intervals, and the spacer material is solidified by irradiation with ultraviolet rays. Next, a predetermined amount of liquid crystal 333 is uniformly ejected and injected inside the sealing material 332 of the lower substrate 312. Thereafter, a separately prepared upper substrate 311 and a lower substrate 312 coated with a predetermined amount of liquid crystal are introduced into a vacuum and bonded together.
[0096]
Thus, before the upper substrate 311 and the lower substrate 312 are bonded together, the liquid crystal 333 is uniformly applied (filled) into the cell, so that the liquid crystal 333 does not reach the details such as the corners of the cell. Can solve the problem.
[0097]
In addition, it is also possible to perform the printing of the sealing material 332 with the droplet discharge device 1 by using an ultraviolet curable resin or a thermosetting resin as the functional liquid (sealing material). Similarly, the alignment film 323 can be formed by the droplet discharge device 1 by introducing a polyimide resin as a functional liquid (alignment film material).
[0098]
Since the droplet discharge device 1 described above is small without limitation in the installation position of the liquid supply tank 152, space can be saved when the liquid crystal display device 301 is manufactured using the droplet discharge device 1. The liquid crystal display device 301 can be manufactured efficiently.
[0099]
By the way, the above-described droplet discharge device 1 can be used for manufacturing various electro-optical devices (devices) in addition to the above-described liquid crystal display device 301 mounted on an electronic apparatus such as a mobile phone or a personal computer. . That is, it can be applied to the manufacture of organic EL devices, FED devices, PDP devices, electrophoretic display devices, etc., and these can be manufactured efficiently.
[0100]
An example in which the above-described droplet discharge device 1 is applied to the manufacture of an organic EL device will be briefly described. As shown in FIG. 13, the organic EL device 401 includes a substrate 421, a circuit element portion 422, a pixel electrode 423, a bank portion 424, a light emitting element 425, a cathode 426 (counter electrode), and a sealing substrate. A wiring of a flexible substrate (not shown) and a driving IC (not shown) are connected to the organic EL element 411 composed of 427. The circuit element portion 422 is formed on the substrate 421, and a plurality of pixel electrodes 423 are aligned on the circuit element portion 422. Bank portions 424 are formed in a lattice shape between the pixel electrodes 423, and light emitting elements 425 are formed in the recess openings 431 generated by the bank portions 424. The cathode 426 is formed on the entire upper surface of the bank portion 424 and the light emitting element 425, and a sealing substrate 427 is laminated on the cathode 426.
[0101]
In the manufacturing process of the organic EL device 401, after the bank portion 424 is formed at a predetermined position on the circuit element portion 422 and the substrate 421 (work W) on which the pixel electrode 423 is formed in advance, the light emitting element 425 is appropriately disposed. Then, a plasma treatment for forming the light emitting element 425 and a light emitting element 425 and a cathode 426 (counter electrode) are formed. The sealing substrate 427 is stacked on the cathode 426 and sealed to obtain the organic EL element 411. Then, the cathode 426 of the organic EL element 411 is connected to the wiring of the flexible substrate, and is connected to the driving IC. The organic EL device 401 is manufactured by connecting the wiring of the circuit element unit 422.
[0102]
The droplet discharge device 1 is used for forming the light emitting element 425. Specifically, a light emitting element material (functional liquid) is introduced into the functional droplet discharge head 31, and the light emitting element material is discharged corresponding to the position of the pixel electrode 423 of the substrate 421 on which the bank portion 424 is formed. This is dried to form a light emitting element 425. It should be noted that the formation of the pixel electrode 423 and the cathode 426 described above can also be created using the droplet discharge device 1 by using corresponding liquid materials.
[0103]
Further, as other electro-optical devices, devices including the above-described preparation formation as well as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. By using the droplet discharge device 1 described above for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.
[0104]
【The invention's effect】
As described above, in the functional liquid feeding method and the functional liquid feeding apparatus to the functional liquid droplet ejection head of the present invention, the pressure in the liquid tank is detected and the pressure in the liquid tank is based on this. Therefore, the functional liquid can be appropriately fed to the functional liquid droplet ejection head regardless of the installation position of the liquid supply tank. In addition, since the ejector is used in the negative pressure control of the liquid supply tank, it is possible to reduce the size as compared with the configuration using the pump, and more stable and appropriate because there is no pulsation like the pump. It is possible to control the pressure in the liquid supply tank. Further, by adjusting the flow rate of the compressed air supplied to the ejector, the pressure in the liquid supply tank can be accurately controlled by following the pressure fluctuation of the liquid supply tank.
[0105]
The droplet discharge device of the present invention uses the above-described functional liquid delivery device having a high degree of freedom with respect to the installation position of the liquid supply tank. For example, a liquid supply tank is provided immediately above the functional droplet ejection head. The liquid supply tank can be installed regardless of the position of the functional liquid droplet ejection head as in the case of installing the apparatus, and the apparatus can be downsized. Further, it is possible to change the discharge amount of the functional liquid droplets discharged from the functional liquid enemy discharge head by changing the pressure in the liquid supply tank. Further, in the present invention, since the functional liquid is not supplied under atmospheric pressure, stable discharge performance can be obtained even at a high altitude.
[0106]
In addition, the electro-optical device manufacturing method, the electro-optical device, and the electronic apparatus according to the present invention are manufactured using the above-described droplet discharge device, so that the manufacturing space can be reduced and the manufacturing can be efficiently performed. It can be performed.
[Brief description of the drawings]
FIG. 1 is an external perspective view of a functional liquid droplet ejection apparatus according to an embodiment.
FIG. 2 is a right side view of the functional liquid droplet ejection apparatus according to the present embodiment.
FIG. 3 is a plan view of the head unit.
4A is an external perspective view of a functional liquid droplet ejection head, and FIG. 4B is a cross-sectional view when the functional liquid droplet ejection head is attached to a pipe adapter.
FIG. 5 is an external perspective view of a suction unit.
FIG. 6 is a cross-sectional view around the cap of the suction unit.
FIG. 7 is an external perspective view of a liquid supply tank.
FIG. 8 is a schematic view around the functional liquid supply system and the suction unit in the first embodiment of the present invention.
FIG. 9 is a schematic diagram showing a control method around an ejector according to the present invention.
FIG. 10 is a schematic diagram around a functional liquid supply system and a suction unit in a second embodiment of the present invention.
FIG. 11 is a schematic diagram around a functional liquid supply system and a suction unit in a third embodiment of the present invention.
FIG. 12 is a cross-sectional view of a liquid crystal display device manufactured using the manufacturing method of the present invention.
FIG. 13 is a cross-sectional view of an organic EL device manufactured using the manufacturing method of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Droplet discharge device 2 Discharge means
3 Maintenance means 4 Functional liquid supply / recovery means
5 Air supply means 6 Control means
31 Function droplet discharge head 40 Nozzle formation surface
62 Suction unit 151 Pressurized tank
152 Liquid supply tank 153 Pressure increasing / decreasing means
154 Liquid supply tube 163 Liquid level detector
186 Air supply valve 191 Ejector
201 Pressure controller 202 Electropneumatic regulator
204 Tank suction tube 205 Tank suction valve
212 Liquid level adjustment valve 214 Head side supply valve
251 Air discharge tube 252 Second air supply valve
301 Liquid crystal display device 401 Organic EL device
W Work

Claims (14)

The functional liquid to the functional liquid droplet ejection head that sends the functional liquid to the functional liquid droplet ejection head from the sub tank in which the liquid level of the stored functional liquid is managed within a predetermined range by receiving the functional liquid replenishment A liquid delivery method,
In the case where the functional liquid droplet ejection head ejects functional liquid droplets by the pumping action of the piezoelectric element,
A functional liquid droplet ejection head, wherein the sub-tank is a sealed tank, and the pressure in the sub-tank is controlled based on the detected pressure in the sub-tank so that the function liquid feeding pressure from the sub-tank is constant. Functional liquid delivery method to On the premise of liquid feeding under atmospheric pressure, the relative height position of the liquid level of the functional liquid stored in the sub tank is defined in advance with respect to the nozzle surface of the functional liquid droplet ejection head,
The pressure in the sub-tank is controlled to be negative when the liquid level of the functional liquid stored in the sub-tank is set to a position higher than the specified relative height position. Functional liquid feeding method to a functional liquid droplet ejection head. A functional liquid filling step of filling the functional liquid droplet discharge head from the sub tank with the functional liquid;
The pressure in the sub-tank is controlled in the functional liquid filling step so that the pressure in the flow path in the head of the functional liquid droplet ejection head becomes a necessary filling pressure. Functional liquid feeding method to a functional liquid droplet ejection head. A cleaning step of forcibly discharging the functional liquid from all nozzles of the functional liquid droplet ejection head;
In the cleaning step, the pressure in the flow path in the head of the functional liquid droplet ejection head is set to a forced discharge pressure for forcibly discharging the functional liquid from all nozzles of the functional liquid droplet ejection head. 4. The method of feeding a functional liquid to a functional liquid droplet ejection head according to claim 1, wherein the pressure is controlled to be increased.   The method for feeding a functional liquid to a functional liquid droplet ejection head according to claim 1, wherein an ejector is used for pressure control in the sub tank. Functional liquid feeding device to a functional liquid droplet ejection head that feeds the functional liquid to a functional liquid droplet ejection head from a sub-tank in which the liquid level of the stored functional liquid is received within a predetermined range. Because
In the case where the functional liquid droplet ejection head ejects functional liquid droplets by the pumping action of the piezoelectric element,
The sub-tank composed of a sealed tank;
Pressure detecting means for detecting the pressure in the sub tank;
Pressure increasing / decreasing means for increasing / decreasing the pressure in the sub tank;
A functional liquid droplet ejection head comprising: control means for controlling the pressure-increasing and depressurizing means so that the function liquid feeding pressure from the sub-tank becomes constant based on a detection result by the pressure detecting means. Functional liquid delivery device to. A main tank for replenishing the functional fluid to the sub tank;
The sub tank is provided with a liquid level detecting means for detecting the liquid level of the functional liquid stored in the sub tank,
The functional liquid feeding device to the functional liquid droplet ejection head according to claim 6, wherein the main tank replenishes the functional liquid to the sub tank based on a detection result of the liquid level detection unit.   8. The functional liquid feeding device to the functional liquid droplet ejection head according to claim 7, wherein the main tank replenishes the functional liquid to the sub tank when the functional liquid droplet ejection head is not driven.   9. The functional liquid delivery device to a functional liquid droplet ejection head according to claim 6, wherein the sub tank is provided with a space for absorbing pressure fluctuation in the sub tank. Assuming liquid feeding under atmospheric pressure, the relative height position of the liquid level of the functional liquid stored in the sub tank with respect to the nozzle surface of the functional liquid droplet ejection head is defined in advance,
The sub tank is disposed such that the liquid level of the functional liquid stored in the sub tank is positioned above the predetermined relative height position,
The pressure-increasing / decreasing means includes an ejector having a secondary side connected to the sub-tank via a suction channel;
A working fluid supply means connected to the primary side of the ejector via a supply flow path for supplying a working fluid to the ejector;
Pressure adjusting means for adjusting the suction pressure of the ejector,
10. The functional liquid delivery device to a functional liquid droplet ejection head according to claim 6, wherein the control means controls the pressure adjusting means.   The functional liquid droplet ejection head according to claim 10, wherein the pressure adjusting unit includes a flow rate adjusting valve that is interposed in the supply flow path and adjusts the flow rate of the working fluid supplied to the ejector. Functional liquid delivery device to. The primary side of the ejector is connected to the sub tank via a discharge channel,
The suction flow path is provided with a suction flow path opening / closing valve composed of a three-way valve having an air release port,
In the discharge flow path, a discharge flow path opening / closing valve composed of a three-way valve having an air release port is interposed,
12. The control device according to claim 10 or 11, wherein the control means is configured to be able to increase or decrease the pressure in the sub tank by switching and controlling the suction flow path opening / closing valve and the discharge flow path opening / closing valve. A functional liquid feeding device to the functional liquid droplet ejection head described. A flow path opening / closing valve that is interposed in a functional liquid flow path connecting the sub tank and the functional liquid droplet ejection head, and that opens and closes the functional liquid flow path;
13. The functional liquid to the functional liquid droplet ejection head according to claim 6, wherein the control unit controls the opening / closing of the flow path on-off valve in synchronization with the driving of the pressure increasing / decreasing unit. Liquid delivery device. A functional liquid feeding device to the functional liquid droplet ejection head according to any one of claims 6 to 13,
A liquid droplet ejection apparatus comprising: a functional liquid droplet ejection head that ejects a functional liquid onto a workpiece.

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