JP4068821B2 - Coating drawing line measuring method and apparatus - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method and an apparatus for measuring the height and width of a liquid, and more particularly, to a method and an apparatus for measuring the shape of a liquid drawn and drawn, particularly the application height, at high speed and with high accuracy.
[0002]
[Prior art]
The technology for applying and drawing a liquid material on a desired drawing pattern on a workpiece is used in, for example, semiconductor manufacturing processes and liquid crystal panel manufacturing processes. It is important to reduce the yield and improve the productivity. For this reason, the liquid shape applied and drawn on the workpiece is inspected, and the quality of the applied shape is evaluated as good / bad.
[0003]
For the evaluation of such a coated shape, an inspection method in which the width and height of a drawn shape is measured in a non-contact manner for a linear-shaped coated drawing is generally used. To measure the width of a drawn shape, A method in which a drawing line at a position to be measured is picked up by an imaging means and the image information is processed by image processing. In addition, in order to measure the height of a drawing shape, a liquid in which a dot-like laser beam is drawn and formed This is a method in which the height of one point of the liquid surface is measured and the laser beam is focused by measuring the height of the liquid from the difference in the position where the reflected light reflected by the liquid surface forms an image. The surface position is sequentially scanned in the width direction of the drawing shape, and the obtained height data is compared to obtain the liquid height, or the work is performed so that the liquid on which the band-like light is drawn and formed is lying down. Liquid that is applied and drawn by irradiating the surface with a band of light at a desired depression angle To form a bright line on the plane representing the outline of the step surface shape of the liquid, a method for determining the height of the liquid is known an image information obtained by imaging the emission lines in the imaging means and image processing.
[0004]
[Problems to be solved by the invention]
However, it was obtained by projecting a point laser beam to one point of the drawn liquid and measuring the liquid height, and sequentially scanning the position of the liquid surface where the laser beam is focused in the width direction of the drawn shape. In the method of calculating the liquid height by comparing the height data, it is only necessary to measure one point on the surface of the liquid in one measurement. To measure the liquid height, it is necessary to scan this measurement in the coating width direction. There is a disadvantage that it takes time. In addition, if the line width increases, the number of measurement points increases, which requires more time. In addition, there is a disadvantage that the measurement accuracy decreases because the number of measurement points is reduced when measuring in a short time. It was.
[0005]
In addition, a thin and converged band-shaped light is projected onto the drawing line from an oblique direction to form a bright line representing the outline of the step shape of the drawing line on the liquid surface, which is the drawing line. Since the bright line needs to lie down on the surface of the liquid, if the length direction of the bright line is equal to the length direction of the drawing line, the bright line cannot lie down on the liquid and measurement is impossible. In addition, even when the bright line lies on the surface of the liquid, as the length direction of the bright line and the length direction of the drawing line become equal, the area of the liquid surface on which the bright line is formed becomes wider, resulting in a decrease in imaging accuracy. There is a problem that the measurement error becomes large, and in order to avoid this, even in a complicated drawing pattern, a rotating mechanism that rotates the table on which the work is placed or the belt-like light generating means is provided, and the length of the bright line is increased. Direction and drawing line There is also known a technique that improves the measurement accuracy by making the vertical direction perpendicular to the workpiece surface. However, if the measurement is performed continuously at high speed over the entire length of the drawing line, the rotation speed of the rotating mechanism also increases, which causes vibration. As a result, there was a problem that the measurement accuracy was lowered.
[0006]
Therefore, in order to solve these problems, the present invention measures the coating drawing shape, particularly the height and width, continuously at high speed with high accuracy, and measures the coating height and coating width of the coating drawing shape at high speed. It is an object to provide a method and apparatus.
[0007]
[Means for Solving the Problems]
In order to solve the above-mentioned problem, the first aspect of the liquid height measuring method is characterized in that the band-shaped light is applied to both ends of the coating outline line in the length direction of the coating drawing line formed by coating on the plate-like workpiece. In the liquid height measurement method for obtaining the coating height by performing image processing on the image information of the bright line shape formed on the surface of the coating drawing line lying at a desired angle with respect to the length direction of the coating drawing line, at least two The bright line is formed by one of the strip-shaped light generating means among the strip-shaped light generating means having different directions, and the image information is one imaging means for the bright line formed by any of the strip-shaped light generating means. It is characterized by image- taking by.
[0008]
The second invention is characterized in that, in the first invention, the band-shaped light generating means for forming the bright line is switched in accordance with the drawing direction of the coating drawing line, and the third invention is either the first or the second. The present invention is characterized in that the band-shaped light generating means for forming the bright line is switched by the band-shaped light shielding means, and the fourth invention is the invention according to any one of the first , second and third aspects, wherein The fifth aspect of the invention is characterized in that a desired position is measured by successively lying down with a bright line, and the desired position is measured in any one of the first to fourth aspects of the invention. Two coating contour lines in the length direction, and bright lines on the surface of the coating drawing lines formed by band-like light lying on the two coating contour lines at a desired angle with respect to the length direction of the coating drawing lines; Application width and application from one image information including The sixth invention is characterized in that, in any one of the first to fifth inventions, the strip-shaped light is placed on a table, and a jig having a known size is irradiated with the strip-shaped light. The bright line formed on the jig surface is imaged by the imaging means, and compared with the bright line position formed on the jig surface imaged immediately before calibration, the position and the depression angle with respect to the workpiece surface, the horizontal angle and the rotation angle with respect to the optical axis are set. It adjusts and adjusts the irradiation angle of strip | belt-shaped light, It is characterized by the above-mentioned.
[0009]
In order to solve the above-mentioned problem, the seventh aspect of the invention relates to a plate-shaped workpiece and both ends of the coating outline line in the length direction of the coating drawing line formed on the workpiece by the length direction of the coating drawing line. a desired angle in the transverse截and the coating image line surface coating height measurement of the linear liquid for measuring the height of the strip-shaped light generating means for forming a bright line moved relatively to the coating draw line with respect to In the apparatus , at least two strip-shaped light generating means having different directions and bright lines formed by the strip-shaped light generating means for measuring the height of the coating drawing line are provided to any of the strip-shaped light generating means. And an imaging means capable of imaging .
[0010]
An eighth invention is characterized in that, in the seventh invention, at least one set of strip-shaped light generating means is arranged so that the bright lines formed on the workpiece surface are orthogonal to each other. In the seventh or eighth invention, the bright line position is continuously shifted in the length direction of the coating drawing line, and the tenth invention is any of the seventh, eighth, or ninth invention, wherein the bright line is The eleventh aspect of the invention is characterized in that, in any one of the seventh to tenth aspects, the image picked up by the image pickup means is the above two. When the coating outline line and the strip light simultaneously include the bright lines on the surface of the coating drawing line formed by laying the two coating outline lines at a desired angle with respect to the length direction of the coating drawing line, The coating width can be measured, and the first According to the invention of any one of the seventh to eleventh aspects, the belt-like light generating means is installed on the table, the jig having a known size is irradiated with the belt-like light, and the bright line formed on the jig surface is imaged means. Compared with the bright line position formed on the jig surface imaged immediately before calibration, the position and the depression angle with respect to the workpiece surface, the horizontal angle and the rotation angle with respect to the optical axis are adjusted to adjust the irradiation angle of the strip light It is characterized by that.
[0014]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 is a schematic diagram for explaining the operation of the present invention when the present invention is applied to a drawing line 2 composed of a line segment AB and a line segment BC bent at a point B on the work 1. FIG. 1 (a) is a schematic diagram for measuring the liquid height in the line segment AB, and FIG. 1 (b) is a schematic diagram for measuring the liquid height in the line segment BC. FIG. 2 is a diagram showing the shape of the bright line 5 projected on the drawing line 2 in FIG. 1, and the axis of the strip light 3 projected from the first strip light generation means 21 in FIG. When the drawing line 2 is lying with the strip light 3 in the state where the direction coincides with the axial direction of the drawing line 2, an arc shape as shown in FIG. 2 (a) is formed, and the first strip shape in FIG. 1 (a) is formed. When the drawing line 2 is laid down with the band-like light 3 in a state where the axial direction of the band-like light 3 projected from the light generating means 21 does not coincide with the axial direction of the drawing line 2, as shown in FIG. It is formed in an arc shape.
[0015]
The image pickup means 25 picks up an image including a region including two positions (D and E) where the bright line 5 and the bright line 5 intersect with the contour line in the drawing line traveling direction, and uses this as image information. 25 and the position information of the first strip light generating means 21 is image-processed to determine the height of the liquid. Here, since the bright line 5 on the liquid surface is displayed sufficiently brighter than the liquid surface, the image means 25 can obtain image information that can clearly distinguish the liquid surface of the drawing line 2 from the bright line 5.
[0016]
Also, depending on the color of the liquid surface that forms the drawing line, if it is difficult to clearly distinguish the bright line from the color of the liquid surface, adjust the light amount of the light source. The surface of the drawing line 2 and the bright line 5 can be clearly distinguished by exchanging the light source with the light source or by irradiating the surface of the liquid with band-like light through a filter.
[0017]
For example, as shown in FIG. 1, the liquid height of the drawing line 2 applied and formed on the surface of the workpiece 1 is measured. The drawing line 2 includes a line segment AB and a line segment BC. Here, the imaging means 25 is irradiated at a position perpendicular to the surface of the work 1, and the surface of the drawing line 2 is irradiated to the surface of the work 1 at a depression angle of 45 ° with the band-shaped light 3 and the band-shaped light 4. The first strip light generating means 21 is arranged so that the strip light 3 is perpendicular to the length direction of the line segment AB of the drawing line 2 between the line segments AB, and between the line segments BC of the drawing line 2 In the case where the second strip light generation means 22 is arranged so that the strip light 4 is orthogonal to the length direction of the line segment BC of the drawing line 2, the image processing means applies a bright line lying on the liquid. In the straight line on the image connecting two positions ( E and D) intersecting the outline, the point (F) on the bright line that is farthest in the direction orthogonal to the straight line on the screen is the bright line indicating the highest point of the liquid. Connect two positions that intersect the outline of the bright line from the point on the bright line that indicates the highest point of the liquid. The length of the perpendicular line drawn so as to be orthogonal to a straight line on the image and (F-F '), the irradiation angle of irradiating the bright line, based on the triangulation measuring method from obtaining the height of the liquid.
[0018]
It should be noted that even if the imaging means and the strip light generating means are arranged at another desired known angle with respect to the workpiece surface, it can be easily obtained by the principle of rotational conversion and triangulation.
[0019]
As described above, the present invention measures the coating height by performing image processing on an image including a desired coating height measurement position, so that the liquid height is projected by projecting a point laser beam to one point of the drawn liquid. Compared with the method of measuring the liquid surface where the laser beam is focused, sequentially scanning the position of the liquid surface in the width direction of the drawing shape, and comparing the obtained height data to obtain the liquid height Measuring only one point on the surface of the liquid, it is not necessary to scan this measurement in the direction of the coating width to measure the height of the liquid. In addition, even if the drawing shape is a wide line shape, the number of measurements does not change, so the measurement time does not vary due to the drawing shape, and the measurement accuracy does not fall.
[0020]
In addition, since the measurement can be appropriately performed in the direction of travel of the drawing line to obtain the liquid height at a desired position, the liquid height is obtained by continuously capturing images and processing the captured image data later. Therefore, there is no need to stop the movement, and measurement can be performed while moving at a desired speed.
[0021]
Further, in the line segment BC of the drawing line 2 that is continuous with the line segment AB of the drawing line 2 across the bending point B, the bright line 5 is projected on the liquid surface between the line segments BC of the drawing line 2 by the strip light 4. The image pickup means picks up an image including a region including two positions where the bright line 5 and the bright line 5 intersect with the outline of the drawing line 2 in the advancing direction to obtain image information, and the image information, the image pickup means, and the strip light generation means The position information is image-processed to determine the height of the liquid.
[0022]
That is, since the strip light 4 is perpendicular to the drawing direction between the line segments BC of the drawing line 2, the line segment connecting the two points where the coating outline line and the bright line between the line segments BC of the drawing line 2 intersect with each other is as shown in FIG. Similarly, it is orthogonal to the length direction of the line segment BC of the drawing line 2.
[0023]
At this time, when the surface of the liquid between the BCs of the drawing line 2 is lying with the band-like light 3, the shape of the bright line becomes the bright line 5, but since the position coordinates of the intersection of the coating outline line and the bright line are known, rotation calculation and The liquid height can be obtained by triangulation. As shown in Fig. 2 (b) , the bright line extends in the length direction of the liquid, and the imaging means is projected on the liquid surface for measurement. When the bright line 5 to be captured needs to be imaged over the entire range, the resolution of the captured image is lowered, so that the measurement accuracy is lowered, and the line segment AB of the drawing line 2 and the line segment BC are orthogonal to each other. Since it is impossible to lie down on the liquid surface between the BCs of the drawing line 2 with the belt-like light 3, the height is obtained from the bright line irradiated with the belt-like light 2 because the belt-like light crawls the liquid. It is impossible.
[0024]
Thus, in order to enable measurement without depending on the application direction of the drawing line, at least two or more strip-shaped light generating means are indispensable. In other words, to obtain the height of the liquid by laying down the liquid with one of the plurality of strips of light, the appropriate one of the strips of light is appropriately selected to lay down the liquid. Therefore, it is possible to measure the coating height in a drawing pattern having a complicated shape at a desired position.
[0025]
Further, the strip light generating means is arranged so that at least one set of strip light is orthogonal to the work surface. Since the set of strip-shaped light to form a linearly independent emission lines in the workpiece surface, which is formed on the workpiece surface, in any drawing pattern, there is no direction of the straight line to be unmeasurable, with respect to the drawing direction of any angle Even measurement is possible. In addition, since it is possible to measure without any rotation mechanism in any angle of the drawing direction, it is possible to perform precise height measurement without generating unnecessary vibration.
[0026]
Preferably, the necessary number of strip-shaped light generating means are arranged so that the bright line and the traveling direction of the liquid region where the bright line lies are at least perpendicular to at least the straight line portion of the coating drawing line. Since the liquid and the bright line projected by the belt-shaped light generating means are always orthogonal, the rotation calculation is not necessary, the calculation is simplified, and the liquid surface area where the bright line is formed does not become wide. In addition to being able to obtain the coating height at high speed, it is possible to image at a high magnification, so that highly accurate measurement can be performed.
[0027]
As shown in FIGS. 3 and 4, the liquid height measuring device of the present invention includes a table and table driving means for supporting a plate-shaped workpiece, and coating in the length direction of coating drawing lines formed on the workpiece. At least two or more belt-shaped light generating means for forming bright lines on the surface of the coating drawing line by lying on both ends of the outline line at a desired angle with respect to the length direction of the coating drawing line, It is composed of an image pickup means for picking up the two coating contour lines in the length direction and the bright line, and a control means, but in order to flexibly cope with a change in the coating pattern, an image pickup means, a strip light generation means, Is preferably configured to be adjusted to a desired angle by an adjusting means (not shown).
[0028]
<Table / table driving means>
The table and the table driving means are provided on the upper surface of the table 13 having the work attachment means, the X-axis motor 14 and the Y-axis motor 16 provided on the horizontal machine frame 11 and moving the table 13 in the X-axis and Y-axis directions, A Z-axis table 18 that can be adjusted in the vertical direction by a Z-axis motor 19 provided in the vertical machine frame 12, a first band-shaped light generating means 21 disposed on the Z-axis table 18, and a second band-shaped light generation Consists of a means 22, a light shielding means A16, a light shielding means B17, and an imaging means 25, and the table 13 is moved and stopped at a desired position on the XY plane by the forward or reverse rotation of the X-axis motor 14 and the Y-axis motor 16. Since the Z-axis table 18 moves up and down by the forward and reverse rotations of the Z-axis motor 19, the focus of the imaging means 25 is adjusted according to the thickness of the workpiece and the coating height. To be able to have configured.
In FIG. 3, 15 is an X-axis ball screw, 17 is a Y-axis ball screw, and 20 is a Z-axis ball screw.
[0029]
<Striped light generating means / light shielding means>
A pair of band-shaped light generating means is provided. The first band-shaped light generating means 21 and the second band-shaped light generating means 22 are configured such that the laser light emitted from the laser light source passes through the slit and becomes a band-shaped parallel light. A laser light source and a slit are arranged so as to project band-like light onto the work surface at a depression angle of 45 ° with respect to the work surface. Further, the bright line 5 projected on the workpiece surface by the first strip light generating means 21 and the bright line 5 projected on the workpiece surface by the second strip light generating means 5 on the workpiece surface as shown in FIG. It is arranged so as to be orthogonal, and drawing lines in all directions can be laid down.
In order to form bright lines clearly, it is preferable that the light amount of the light source is adjustable, and even if the drawing line is a complicated pattern, the strip light is always orthogonal to the length direction of the drawing line. Therefore, it is preferable to install as many light sources as necessary.
[0030]
Further, the first band-shaped light generating means 21 and the second band-shaped light generating means 22 are configured such that the light shielding means 23 and 24 for switching the light source for projecting the bright line formed on the liquid surface are configured as a shutter mechanism, for example. Thus, it is possible to switch between light shielding and illumination instantaneously. Therefore, when the first light shielding means 23 is activated, the belt-like light 3 projected by the belt-like light generating means 21 is blocked by the first light shielding means 23 so that the bright line 5 is not projected on the surface of the workpiece 1. When the second light shielding means 24 is operated, the belt-like light 4 projected by the belt-like light generating means 22 is blocked by the second light shielding means 24 so that the bright line 5 is not projected on the surface of the work 1.
[0031]
By preventing the light emission from becoming unstable on the liquid surface due to unstable light intensity at the initial stage of light emission, and further eliminating the need to repeat light emission and extinction, the light emission and quenching operations are repeated. It is possible to minimize the degradation of the light source that occurs.
[0032]
<< Imaging means and image processing >>
The imaging means 25 has an imaging camera arranged perpendicularly to the position of the strip-like light generating means 21 and 22 for forming the bright line 5 perpendicular to the liquid length direction and the surface of the work 1 at any position of the coating pattern. Set up.
The image picked up by the image pickup means 25 is processed by the image processing means 26 as image information. From the input unit 32, the position coordinates of the drawing line 2 for measuring the height of the liquid are input in advance. Since position coordinates at a plurality of locations can be designated, it is possible to measure the liquid height at a plurality of locations on the drawing line.
[0033]
The table driving motor, the imaging means (imaging camera), and the light shielding means (light source shutter) configured as described above are connected to the main controller as shown in FIG. 6, and the measurement start signal is the main control. When input to the unit 31, the table 13 sequentially moves the coordinate position input by the input unit 32 to measure the liquid height.
It is possible to move the table 13 continuously without stopping and to take an image of the desired measurement position of the drawing line 2 with the imaging means 25 and measure the coating height.
[0034]
While the coating height between the line segments AB of the drawing line 2 is measured, the light shielding means B blocks the path of the light source B, the strip light A from the light source A lies on the liquid, and the bright line A is projected on the liquid surface. Has been. When the measurement is sequentially performed at a desired measurement position between the line segment AB from the start point between the line segments AB and the bending point B is reached, a signal is sent from the main control unit to the light shielding means A so as to block the path of the light source A, and A signal is sent to the light shielding means B so as to open the path of the light source B. Accordingly, bright lines are formed by the light source B on the liquid surface.
[0035]
Further, in order to measure the height of the liquid at a plurality of positions on the drawing line 2, after the image of the first position of the measurement position is captured, the liquid application height is image-processed before the image of the second position is captured. The process of imaging the liquid after the second position and the process of determining the coating height from the captured image are processed in parallel. It is also possible to obtain the liquid height collectively.
Since the drawing pattern is defined in advance, the positions of the image pickup means and the band-like light generation means and the irradiation angle with respect to the liquid are set in accordance with the drawing pattern, thereby reducing the calculation processing load of the image processing means 26. Can do.
[0036]
Furthermore, since the bright line on the surface of the drawing line represents the cross-sectional shape of the drawing line, it is possible to immediately detect dents, scrapes, dust deposits, disconnections, etc. on the surface of the drawing line, and it is possible to detect defects at high speed. it can.
[0037]
The band-shaped light generating means 21 and 22 having the above-described configuration are installed in advance so as to lie on the drawing line 2 at a predetermined angle at a predetermined position, but the position of the band-shaped lights 3 and 4 is displaced due to long-term use. Therefore, it is desirable to perform calibration work at regular intervals. This work is performed by irradiating a jig whose size is known in advance with a band-shaped light, imaging bright lines formed on the jig surface with an imaging means, and bright line positions formed on the jig surface taken immediately after calibration. As compared with the above, the irradiation angle of the strip light is adjusted by adjusting the position of the strip light generation means and the depression angle with respect to the workpiece surface, the horizontal angle and the rotation angle with respect to the optical axis.
In addition, without adjusting the strip light generation means, image processing is performed on the image information of the bright lines formed on the surface of the jig, and the irradiation angle of the strip light generation means is calculated and compared with the irradiation angle before the calibration work. It is also possible to correct the height measurement output and obtain an accurate measurement value.
The calibration jig is always installed on the table so that it can be calibrated as necessary.
[0038]
In addition, since the present invention captures the contour line of the drawing line and the bright line within the same field of view, it measures the width of the liquid by performing image processing on the contour line of the drawing line with an image for measuring the height of the drawing line. Is also possible.
Therefore, the width and height of the liquid can be obtained by image processing of one image.
[0039]
【The invention's effect】
As described above, according to the present invention, among the at least two or more strip-shaped light emitting means, the liquid is laid down with one strip-shaped light and the height of the liquid is obtained. In addition, since the measurement does not require the strip light generating means or the rotating operation of the workpiece, the generation of vibrations can be effectively eliminated, and the liquid height can be measured at high speed and with high accuracy.
[Brief description of the drawings]
FIG. 1 is a schematic diagram for explaining the operation of the present invention when the present invention is applied.
2 is a plan view of a bright line projected on a drawing line in FIG. 1. FIG.
FIG. 3 is a perspective view of an embodiment of the height measuring device of the present invention.
FIG. 4 is a front view of an embodiment of the height measuring apparatus according to the present invention.
5 is a state diagram of bright lines appearing on a war in the height measuring apparatus shown in FIGS. 3 and 4. FIG.
FIG. 6 is a block diagram of a height measuring apparatus according to the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Work 2 Drawing line 3 Band light projected from 1st strip light generation means 4 Strip light 5 projected from 2nd strip light generation means Bright line 11 Horizontal machine frame 12 Vertical machine frame 13 Table 14 X-axis motor 15 X-axis ball screw 16 Y-axis motor 17 Y-axis ball screw 18 Z-axis table 19 Z-axis motor 20 Z-axis ball screw 21 First strip light generating means 22 Second strip light generating means 23 First light shield means 24 Second light shield Means 25 Imaging means 26 Image processing means 31 Main controller 32 Input means

Claims (7)

A method for measuring a coating drawing line to obtain a coating height and a coating width of a coating drawing line formed in two or more different directions on a plate-like workpiece placed on a table ,
One selected according to the drawing direction of the coating drawing line by a plurality of light sources arranged in two or more different directions, and a strip-shaped light generating means having a plurality of shutter mechanisms for switching light shielding and illumination of each light source. A band-shaped light lying in the length direction at a desired angle is projected from the light source, and the outline of the coating drawing line and the bright line formed on the surface thereof are imaged within the same field of view by one imaging means, A method for measuring a coating drawing line in which a bright line shape in image information is subjected to image processing to measure a coating height, and an outline line in the image information is subjected to image processing to measure a coating width . Relative movement of the table and the belt-shaped light generating means, and the surface from the start point to the end point of the linear liquid is continuously laid down with bright lines to measure the coating height at a desired position. The method for measuring a coated drawing line according to claim 1 . Bright lines magnitude placed on the table is irradiated with strip light to a known jig, a bright line formed on the jig surface imaged by the imaging means, formed captured the jig surface after calibration straight 3. The method for measuring a coated drawing line according to claim 1, wherein the irradiation angle of the band-like light is adjusted by adjusting the position and the depression angle with respect to the workpiece surface, the horizontal angle and the rotation angle with respect to the optical axis. . A table flush surface on a two or more different directions in the coating drawing line are formed plate-shaped workpiece is mounted, strip light lateral截the length direction of the coating drawing line at a desired angle a strip-shaped light generating means for projecting a table and means for the strip-shaped light generating means for relatively moving one of the imaging for imaging a bright line formed on the outline and the surface of the coating drawing lines in the same field of view Image processing means for measuring the coating height by performing image processing on the bright line shape in the captured image information, measuring the coating width by image processing on the contour line in the image information, and these control means. a measuring apparatus for coating drawing line with,
The belt-shaped light generating means has a plurality of light sources arranged in two or more different directions, and a plurality of shutter mechanisms for switching between light shielding and illumination of each light source,
The apparatus for measuring a coated drawing line, wherein the control unit switches one light source for forming a bright line by the shutter mechanism in accordance with a drawing direction of the coated drawing line . The strip light generating means, coating drawing line of the measuring device according to claim 4, characterized in that the bright line formed on the work surface to have a disposed light sources so as to be orthogonal. 6. The coating drawing line according to claim 4 , wherein the control unit moves the table and the strip light generation unit relative to each other to continuously shift the bright line position in the length direction of the coating drawing line. measuring device. The strip light generating means, the size installed on the table is irradiated with strip light to a known jig, a bright line formed on the jig surface imaged by the imaging means, the jig taken after calibration straight compared to the formed bright line position on the surface, the depression angle with respect to the position and the workpiece surface, to 4 claims, characterized in that by adjusting the angle of rotation can adjust the illumination angle of the strip-like light with respect to the horizontal angle and the optical axis 6. The coating drawing line measuring device according to any one of 6 above.

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