JP4063159B2 - Manufacturing method of fine structure element - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
  The present invention relates to a method for manufacturing a fine structure element.To the lawIt is related.
[0002]
[Prior art]
  As an image display device, a dot matrix image display device such as a liquid crystal panel (liquid crystal display device), a CRT display device, or a plasma display device is often used. The dot matrix image display device expresses an image by a large number of pixels arranged two-dimensionally and periodically. At this time, a so-called sampling noise is generated due to the periodic arrangement structure, and a phenomenon in which the image quality is deteriorated (the image looks rough) is observed. And the method of reducing the phenomenon in which an image quality deteriorates is proposed (for example, refer patent document 1).
[0003]
[Patent Document 1]
          JP-A-8-122709
[0004]
[Problems to be solved by the invention]
  In a dot matrix image display device, a light shielding portion called a black matrix is provided in a region between pixels in order to reduce unnecessary light. In recent years, as a usage mode of an image display device, a large screen is often observed from a relatively short distance. For this reason, the observer may recognize the black matrix image. As described above, the conventional dot matrix image display device has a problem that the image quality is deteriorated due to the black matrix image, such as an image with less smoothness or an image having roughness. In the above-mentioned Patent Document 1, it is difficult to improve the original image by reducing the deterioration of the image quality caused by the black matrix image due to the influence of higher-order diffraction.
[0005]
  For this reason, it is conceivable that the light from the image display device is incident on the prism group so that the observer does not recognize the light blocking portion such as the black matrix. The flat part of the prism group transmits the light from the image display device as it is. The refractive surface of the prism group refracts and transmits light from the image display device. Such light transmitted through the prism group generates light whose optical path is deflected by the refractive surface of the prism, in addition to light that travels straight after exiting the flat portion. A pixel image is formed on the black matrix by the light deflected in the optical path. This can reduce the recognition of the black matrix.
[0006]
  The shape of each prism element constituting the above-described prism group is a micron-order fine shape. In the prior art, a fine prism element is manufactured by cutting a predetermined region. Here, even if it is based on the same processing data, it is difficult to repeatedly form a prism element having a desired shape in a predetermined region for the following three reasons. The first reason is that the repeated positioning accuracy of a processing machine that performs cutting is insufficient. If repeated positioning accuracy is insufficient, it becomes difficult to form a fine shape at a desired position. The second reason is that the servo mechanism that controls the positioning of the processing machine is easily affected by disturbances such as temperature, atmospheric pressure, and vibration. The third reason is that it is difficult to match the positional relationship between the machining tool bit and the workpiece to be machined with submicron accuracy, while the relative position within the machine itself can be controlled at the nano level and high-precision machining is possible. It is possible.
[0007]
  For example, FIG. 13 shows a cross-sectional configuration diagram in which fine V-shaped grooves are formed on a parallel plate by a conventional technique. Processing starts at position A of the parallel plate 1300 and ends at position B. At this time, as described above, when the servo mechanism of the processing machine is affected by disturbances such as temperature, atmospheric pressure, and vibration, the surface on the processing side does not become a straight line as indicated by a dotted line 1301, but a concave surface, for example, turn into. Thus, when the servo mechanism is affected by the external environment (disturbance), it is difficult to form a desired shape with sufficient accuracy. These problems become more prominent when manufacturing an irregularly shaped micro-shaped element rather than a single shape. Furthermore, when manufacturing a fine-shaped element, it is difficult and problematic to perform a plurality of processings on the same part of the workpiece.
[0008]
  The present invention has been made in view of the above, and a method of manufacturing a fine structure element capable of accurately manufacturing a desired fine shape element regardless of the external environmentThe lawThe purpose is to provide.
[0009]
[Means for Solving the Problems]
  In order to solve the above-mentioned problems and achieve the purpose,BookIn the invention, the first shape is formed of a dividing step of dividing the processing region into five or more sub-regions, and a refracting surface formed in a flat portion and a V-shaped groove in any one of the sub-regions. A first groove forming step for forming the groove, and a flat portion and a V-shaped groove are formed in a sub-region at a position farther than a sub-region adjacent to the one sub-region with respect to the one sub-region. A second groove forming step of forming the second shape of the groove formed of a refracting surface, and the second groove forming step using the sub-region in which the groove of the second shape is formed as a new reference. A step of repeating groove formation, a first flat portion forming step of forming a flat portion of the first shape in any one of the sub-regions, and the one sub-region on the basis of the one sub-region. The first sub-region is located farther from the sub-region adjacent to the region. A second flat portion forming step for forming a flat portion having the shape of the second portion, and a flat portion for repeatedly performing the second flat portion forming step using the sub-region in which the flat portion having the second shape is formed as a new reference. A formation repeating step, and after finishing the processing of the groove between the first shape and the second shape, processing the flat portion of the first shape and the second shape, The first shape and the second shape are different shapes, and it is possible to provide a method for manufacturing a microstructure element, which is characterized in that the first shape is different from the second shape.
[0010]
  In the manufacturing method of the prior art, in the processing region, the processing position is continuously moved from the position where the processing is started, and processing such as cutting is sequentially performed. In such a manufacturing method, the influence of disturbance is directly reflected in the processing result. On the contrary,BookIn the invention, first, the machining area is divided into five or more sub machining areas. Next, a first shape is formed in any one sub-region. After the first shape is formed, the second shape is formed in a sub-region at a position separated by at least one sub-region without being adjacent to the sub-region in which the first shape is formed. Further, after the second shape is formed, the second shape is formed in a further sub-region at a position separated by at least one sub-region, not adjacent to the sub-region in which the second shape is formed. To do. Such a process is repeated until shape processing is performed on all the sub-regions. Thereby, the fluctuation | variation of the processing position resulting from the influence of an external environment (disturbance) can be disperse | distributed. As a result, a desired finely shaped element can be accurately manufactured regardless of the external environment.
[0011]
[0012]
  Thereby, even if it is an irregular shape, a desired fine shape can be formed with sufficient accuracy.
[0013]
  Also,BookAccording to a preferred aspect of the invention, a trial machining step for forming a first shape based on machining data for a trial machining region different from the machining region, and a first shape formed in the trial machining step are measured. A first shape based on the corrected shape data, a feedback step for correcting the machining data by feeding back the difference between the measured data obtained in the shape measuring step and the machining data to the machining data. It is desirable to perform a formation process and a repetition process. The micro-shaped element is formed based on the processing data. A phenomenon in which a desired machining accuracy cannot be obtained due to the fact that the shape is not formed according to the machining data due to the influence of disturbance, a setting failure of the relative position between the machining tool and the workpiece, or the like occurs. In this aspect, the first processed shape is actually measured in advance in the trial processing region. For measurement of the fine shape, it is desirable to use an atomic force microscope or a laser microscope. Then, the measurement data of the measured micro-shaped element is compared with the original processing data, and the difference between the two data is calculated. The calculated difference is fed back to the machining data. Next, the first shape forming process and the repetition process are performed based on the machining data corrected by the difference amount. Thereby, the shape process in which the influence of disturbance etc. was reduced can be performed.
[0014]
  According to a preferred aspect of the present invention, it is desirable that the trial processing step, the first shape forming step, and the repeating step include a step of performing shape processing twice or more at the same position. Thereby, for example, even when a fine shape is processed by changing the angle of the cutting tool at the same position, a desired fine shape can be obtained.
[0015]
  Also,BookAccording to a preferred aspect of the invention, in the shape measuring step, it is desirable to measure at least one of the pitch, angle, depth, and flat surface roughness of the first shape. Thereby, the pitch, angle, depth, and flat surface roughness of the fine structure element can be accurately formed.
[0016]
[0017]
[0018]
[0019]
DETAILED DESCRIPTION OF THE INVENTION
  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.
  Embodiments of the present invention will be described below in detail with reference to the drawings. In addition, this invention is not limited by this embodiment.
[0020]
(Description of the entire projector)
FIG. 1 shows, as a reference form, a schematic configuration of a projector having a microstructure element manufactured by a manufacturing method according to the present invention.
  First refer to FIG.,Explain the schematic configuration of the projector. MaReferring to FIG. 1, an ultra-high pressure mercury lamp 101 that is a light source unit includes red light (hereinafter referred to as “R light”) that is first color light and green light (hereinafter referred to as “G light”) that is second color light. And blue light (hereinafter referred to as “B light”) which is the third color light. The integrator 104 uniformizes the illuminance distribution of the light from the ultrahigh pressure mercury lamp 101. The light whose illuminance distribution is made uniform is converted into polarized light having a specific vibration direction, for example, s-polarized light by the polarization conversion element 105. The light converted into the s-polarized light is incident on the R light transmitting dichroic mirror 106R constituting the color separation optical system. Hereinafter, the R light will be described. The R light transmitting dichroic mirror 106R transmits R light and reflects G light and B light. The R light transmitted through the R light transmitting dichroic mirror 106R is incident on the reflection mirror 107. The reflection mirror 107 bends the optical path of the R light by 90 degrees. The R light whose optical path is bent enters the spatial light modulator for first color light 110R that modulates the R light as the first color light according to the image signal. The spatial light modulator for first color light 110R is a transmissive liquid crystal display device that modulates R light according to an image signal. Since the polarization direction of the light does not change even if it passes through the dichroic mirror, the R light incident on the first color light spatial light modulator 110R remains as s-polarized light.
[0021]
  The first color light spatial light modulator 110R includes a λ / 2 phase difference plate 123R, a glass plate 124R, a first polarizing plate 121R, a liquid crystal panel 120R, and a second polarizing plate 122R. The detailed configuration of the liquid crystal panel 120R will be described later. The λ / 2 phase difference plate 123R and the first polarizing plate 121R are arranged in contact with a light-transmitting glass plate 124R that does not change the polarization direction. Thereby, the problem that the first polarizing plate 121R and the λ / 2 phase difference plate 123R are distorted by heat generation can be avoided. In FIG. 1, the second polarizing plate 122R is provided independently. However, the second polarizing plate 122R may be disposed in contact with the exit surface of the liquid crystal panel 120R or the entrance surface of the cross dichroic prism 112.
[0022]
  The s-polarized light incident on the first color light spatial light modulator 110R is converted into p-polarized light by the λ / 2 phase difference plate 123R. The R light converted into p-polarized light passes through the glass plate 124R and the first polarizing plate 121R as it is and enters the liquid crystal panel 120R. The p-polarized light incident on the liquid crystal panel 120R is converted into s-polarized light by modulation according to the image signal. The R light converted into s-polarized light by the modulation of the liquid crystal panel 120R is emitted from the second polarizing plate 122R. In this way, the R light modulated by the first color light spatial light modulator 110R is incident on the cross dichroic prism 112, which is a color synthesis optical system.
[0023]
  Next, the G light will be described. The light paths of the G light and the B light reflected by the R light transmitting dichroic mirror 106R are bent by 90 degrees. The G light and the B light whose optical paths are bent enter the B light transmitting dichroic mirror 106G. The B light transmitting dichroic mirror 106G reflects the G light and transmits the B light. The G light reflected by the B light transmitting dichroic mirror 106G is incident on the second color light spatial light modulator 110G that modulates the G light, which is the second color light, according to the image signal. The spatial light modulator for second color light 110G is a transmissive liquid crystal display device that modulates G light according to an image signal. The second color light spatial light modulator 110G includes a liquid crystal panel 120G, a first polarizing plate 121G, and a second polarizing plate 122G. Details of the liquid crystal panel 120G will be described later.
[0024]
  The G light incident on the second color light spatial light modulator 110G is converted into s-polarized light. The s-polarized light incident on the second color light spatial light modulator 110G passes through the first polarizing plate 121G as it is and enters the liquid crystal panel 120G. The s-polarized light incident on the liquid crystal panel 120G is converted into p-polarized light by modulation according to the image signal. The G light converted into p-polarized light by the modulation of the liquid crystal panel 120G is emitted from the second polarizing plate 122G. Thus, the G light modulated by the second color light spatial light modulator 110G enters the cross dichroic prism 112, which is a color synthesis optical system.
[0025]
  Next, the B light will be described. The B light transmitted through the B light transmitting dichroic mirror 106G passes through the two relay lenses 108 and the two reflection mirrors 107, and the third light that modulates the B light as the third color light in accordance with the image signal. The light enters the color light spatial light modulator 110B. The spatial light modulator for third color light 110B is a transmissive liquid crystal display device that modulates B light according to an image signal.
[0026]
  The reason why the B light passes through the relay lens 108 is that the optical path length of the B light is longer than the optical path lengths of the R light and the G light. By using the relay lens 108, it is possible to guide the B light transmitted through the B light transmitting dichroic mirror 106G directly to the third color light spatial light modulator 110B. The spatial light modulator for third color light 110B includes a λ / 2 phase difference plate 123B, a glass plate 124B, a first polarizing plate 121B, a liquid crystal panel 120B, and a second polarizing plate 122B. Note that the configuration of the spatial light modulation device 110B for the third color light is the same as the configuration of the spatial light modulation device 110R for the first color light described above, and thus detailed description thereof is omitted.
[0027]
  The B light incident on the spatial light modulator for third color light 110B is converted into s-polarized light. The s-polarized light incident on the third color light spatial light modulator 110B is converted into p-polarized light by the λ / 2 phase difference plate 123B. The B light converted into p-polarized light passes through the glass plate 124B and the first polarizing plate 121B as it is, and enters the liquid crystal panel 120B. The p-polarized light incident on the liquid crystal panel 120B is converted into s-polarized light by modulation according to the image signal. The B light converted into the s-polarized light by the modulation of the liquid crystal panel 120B is emitted from the second polarizing plate 122B. The B light modulated by the third color light spatial light modulator 110B is incident on the cross dichroic prism 112 which is a color synthesis optical system. As described above, the R light transmissive dichroic mirror 106R and the B light transmissive dichroic mirror 106G constituting the color separation optical system convert the light supplied from the ultrahigh pressure mercury lamp 101 to the R light that is the first color light and the second light. The light is separated into G light, which is colored light, and B light, which is third color light.
[0028]
  The cross dichroic prism 112, which is a color synthesis optical system, is configured by arranging two dichroic films 112a and 112b perpendicularly to an X shape. The dichroic film 112a reflects B light and transmits R light and G light. The dichroic film 112b reflects R light and transmits B light and G light. As described above, the cross dichroic prism 112 has the R light and G light modulated by the first color light spatial light modulation device 110R, the second color light spatial light modulation device 110G, and the third color light spatial light modulation device 110B, respectively. And B light. The projection lens 114 projects the light combined by the cross dichroic prism 112 onto the screen 116. Thereby, a full color image can be obtained on the screen 116.
[0029]
  As described above, the light incident on the cross dichroic prism 112 from the first color light spatial light modulator 110R and the third color light spatial light modulator 110B is set to be s-polarized light. The light incident on the cross dichroic prism 112 from the second color light spatial light modulator 110G is set to be p-polarized light. In this way, by changing the polarization direction of the light incident on the cross dichroic prism 112, the light emitted from the spatial light modulators for the respective color lights in the cross dichroic prism 112 can be effectively combined. The dichroic films 112a and 112b are usually excellent in the reflection characteristics of s-polarized light. For this reason, R light and B light reflected by the dichroic films 112a and 112b are s-polarized light, and G light transmitted through the dichroic films 112a and 112b is p-polarized light.
[0030]
(Configuration of LCD panel)
  Next, using FIG.As a reference form, it has a microstructure element manufactured by the manufacturing method according to the present inventionDetails of the liquid crystal panel will be described. The projector 100 described with reference to FIG. 1 includes three liquid crystal panels 120R, 120G, and 120B. These three liquid crystal panels 120R, 120G, and 120B differ only in the wavelength region of light to be modulated, and have the same basic configuration. Therefore, the following description will be made with the liquid crystal panel 120R as a representative example.
[0031]
  FIG. 2 is a perspective sectional view of the liquid crystal panel 120R. The R light from the ultrahigh pressure mercury lamp 101 is incident on the liquid crystal panel 120R from the lower side of FIG. A counter substrate 202 having a transparent electrode and the like is formed inside the incident side dust-proof transparent plate 201. A TFT substrate 205 having TFTs (thin film transistors), transparent electrodes, and the like is formed inside the emission-side dust-proof transparent plate 206. Then, the incident side dustproof transparent plate 201 and the emission side dustproof transparent plate 206 are bonded together with the counter substrate 202 and the TFT substrate 205 facing each other. A liquid crystal layer 204 for image display is sealed between the counter substrate 202 and the TFT substrate 205. In addition, a black matrix forming layer 203 is provided on the incident light side of the liquid crystal layer 204 for shielding light.
[0032]
  A prism group 210 including a plurality of prism elements 211 is formed on the exit side surface of the exit side dust-proof transparent plate 206. Details of the configuration and operation of the prism group 210 will be described later. In the configuration shown in FIG. 1, the first polarizing plate 121R and the second polarizing plate 122R are provided separately from the liquid crystal panel 120R. However, instead of this, a polarizing plate may be provided between the entrance-side dust-proof transparent plate 201 and the counter substrate 202, between the exit-side dust-proof transparent plate 206 and the TFT substrate 205, or the like. Further, the prism group 210 may be formed on the second polarizing plate 122R or formed on the R light incident surface of the cross dichroic prism 112.
[0033]
(Embodiment 1)
(Prism group shapeAnd manufacturing method)
A manufacturing method according to Embodiment 1 of the present invention will be described.
  FIG. 3 shows a configuration in which the prism group 310 in an intermediate process is viewed from the perspective direction when the prism group 210 is manufactured. In the following description, for the sake of convenience, the prism group 210 shown in FIG. Even in the prism group having the opposite shapes, the optical effect is basically the same as that of the prism group shown in FIG.
[0034]
  The exit-side dust-proof transparent plate 206 is a rectangular parallel plate glass. Then, a prism element 211 is formed on one surface of the parallel plate glass by a method described later. First, the processing procedure will be described. One surface of the emission-side dust-proof transparent plate 206, which is a processing region, is divided into six strip-shaped sub-regions SB1, SB2, SB3, SB4, SB4, SB5, and SB6. The number of divisions may be five or more.
[0035]
  A flat portion 311a and a refracting surface 311b having the first shape are formed in any one of the sub-regions SB1. A V-shaped groove is formed by two refractive surfaces 311b. Next, the flat portion 313a and the refracting surface 313b, which are the second shapes, are formed in the sub-region SB3 located farther than the sub-region SB2 adjacent to the one sub-region SB1 with the one sub-region SB1 as a reference. Subsequently, with reference to the sub-region SB3 in which the second shape is formed, the sub-region SB5 at a position farther than the sub-region SB4 adjacent to the sub-region SB3 in which the second shape is formed has the second shape. A flat portion 315a and a refractive surface 315b are formed. Then, the same procedure is repeated to sequentially form a V-shaped groove including a flat portion and a refracting surface for the sub-region SB2, the sub-region SB4, and the sub-region SB6.
[0036]
  Thereby, the fluctuation | variation of the processing position resulting from the influence of an external environment (disturbance) can be disperse | distributed. As a result, it is possible to accurately manufacture the prism element 211 that is a desired fine-shaped element regardless of disturbance. And the process of the procedure similar to the above is performed in the direction substantially orthogonal to the longitudinal direction of the V-shaped groove. As a result, it is possible to manufacture a prism group 210 including a plurality of prism elements 211 arranged in a substantially orthogonal grid pattern.
[0037]
  Further, the flat portion 311a and the refracting surface 311b are continuously formed. The flat portion 311a and the refracting surface 311b are treated as one unit shape. Thus, in the present embodiment, the first shape and the second shape are the same. In the above-described process, fine shapes are formed discretely at random positions so that the adjacent unit shapes do not continue. Thus, by making the flat part 311a and the refracting surface 311b into one unit shape, the area of the refracting surface 311b corresponding to the slope of the V-shaped groove can be made relatively constant.
[0038]
  More preferably, it is desirable to always process a fine shape in a sub-region at a position separated by a predetermined interval. For example, the processing area is divided into 25 sub-areas SB1 to SB25. Then, after processing with the sub-region SB1 as a starting point, the sub-region SB6 at a position separated from the four sub-regions is processed. Thereafter, similarly, the sub-region SB11, the sub-region SB16, and the sub-region SB21 are processed in order. Next, returning to the sub-region SB2, processing is performed from this point. Next, the sub-region SB7 at a position separated from the four sub-regions is processed. Thereafter, similarly, the sub-region SB12, the sub-region SB17, and the sub-region SB22 are processed in order. Returning to the sub-region SB3 again, processing is performed. This procedure is repeated until all 25 sub-regions are processed. Thereby, the influence of a disturbance etc. can be disperse | distributed uniformly over a processed surface.
[0039]
(Embodiment 2)
  FIG. 4 relates to Embodiment 2 of the present invention.Manufactured by manufacturing methodThe cross-sectional structure of the prism group 410 is shown. In the first embodiment, the V-shaped grooves have substantially the same depth and substantially the same pitch. In such a configuration, diffracted light may be generated due to the periodicity of the structure of the prism group. Diffracted light degrades the quality of the projected image.
[0040]
  In the present embodiment, the first shape and the second shape are different. In the fine shape processing procedure, after cutting a certain V-shaped groove, data is set using a random number so that the neighborhood is not continuously processed as in the first embodiment. V-shaped grooves are sequentially cut based on the set data. After the cutting of the V-shaped groove along the straight line parallel to the predetermined direction is completed, the V-shaped groove is similarly formed in a direction substantially orthogonal to the predetermined direction. Then, when the machining of the V-shaped groove is completed in the two orthogonal directions, the flat portion 411a is then cut. When processing of one flat portion 411a is completed, processing of another flat portion at a preset position is performed. In this way, by performing cutting in a random order, it is possible to prevent the influence of disturbance from concentrating on a predetermined region. For this reason, the prism group 410 which is a fine structure element can be formed over all regions with uniform accuracy. Further, the diffracted light can be reduced by configuring the prism group 410 with a random fine shape. As a result, the observer can observe a high-quality projected image.
[0041]
  Further, the unit area on the liquid crystal panel 120R that is effectively projected onto the screen 116 is determined based on the F number of the integrator 104 and the F number of the projection lens 114 shown in FIG. Specifically, when the F number of the integrator 104 and the F number of the projection lens 114 are different, the unit area is defined by the smaller F number. Further, when the F number of the integrator 104 and the F number of the projection lens 114 are the same, the unit area is defined by the same F number.
[0042]
  The liquid crystal panel 120R is illuminated by the integrator 104 in a superimposed manner. For this reason, the area ratio between the flat portion and the refracting surface in the unit area of the liquid crystal panel 120R corresponds to the light amount ratio between the transmitted light from the flat surface and the refracted light from the refracting surface. In the present embodiment, each unit area on the liquid crystal panel 120R is configured such that the sum of the areas of the refracting surfaces facing the predetermined direction and the sum of the areas of the flat portions are the same. Thereby, the light quantity of the refracted light from each unit area on the liquid crystal panel 120R and the directly transmitted light can be made substantially the same. As a result, the observer can observe a high-quality projected image without recognizing the black matrix portion of the black matrix forming layer 203.
[0043]
(V groove manufacturing method)
  Next, the manufacturing method of a V-shaped groove | channel is demonstrated based on Fig.5 (a) and 5 (b). Two refractive surfaces 311b form a V-shaped groove. When forming the V-shaped groove, as shown in FIG. 5A, the cutting is performed from a substantially vertical direction with respect to the emission-side dust-proof transparent plate 206 using a cutting tool 500 having an angle θv. At this time, the cutting depth is set to a depth d1 that is larger than the depth d0 that the prism element 211 originally needs. The machining fluctuation amount due to the influence of the machining machine disturbance is added to the cutting depth with respect to the originally required depth d0. Thereby, even when a processing machine receives the influence of disturbance, generation | occurrence | production of an unprocessed area can be reduced. Further, when forming the flat portion 311a, as shown in FIG. 5B, the cutting is performed with the cutting tool 500 inclined by an angle θv / 2 with respect to the emission-side dust-proof transparent plate 206.
[0044]
(Embodiment 3)
(Flowchart of manufacturing method)
  A manufacturing procedure of the V-shaped groove according to the third embodiment of the present invention will be described with reference to FIG. First, in step S601, the operator inputs processing data such as a processing position, a processing angle, a processing depth, a bite rotation speed, a processing speed, and the like for forming a desired fine shape to the control unit of the processing machine. Then, a tool having a required shape is attached to the tool holder of the processing machine. In step S602, a workpiece that is a workpiece is set in a holder of a processing machine. The workpiece is, for example, a parallel plate glass. In step S603, trial processing of, for example, a V-shaped groove, which is a first shape, is performed in a test processing region different from the region where the parallel plate glass prism group is formed. As the test processing region, a peripheral region of parallel plate glass or the like can be used.
[0045]
  In step S604, without removing the parallel plate glass from the work holder, the fine shape of the trial-processed V-shaped groove is measured using a laser microscope or an atomic force microscope. To do. The parameter of the measurement data is preferably at least one of pitch, angle, depth, and flat surface roughness.
[0046]
  In step S605, the difference between the measurement data and the machining data is fed back to the machining data. In step S606, the machining data is corrected based on the fed back difference value. Specifically, the cutting angle of the cutting tool, the cutting depth, the pitch, the parameters for flat surface processing, etc. are corrected. For example, the machining angle, cutting depth, groove pitch, and flat surface machining parameters are corrected by bite angle correction, bite depth correction, feed pitch correction, and feed pitch correction, respectively. This is the end of the trial machining process. Next, based on the corrected data, in step S607, as shown in FIG. 5B, the cutting tool 500 is inclined by an angle θv / 2 to form the flat portion 311a. In step S608, as shown in FIG. 5A, a V-shaped groove composed of the refractive surface 311b is formed.
[0047]
  In step S609, it is determined whether processing of the V-shaped groove has been completed. If the determination result is false, in step 610, the position of the machining head holding the cutting tool 500 is moved according to the procedure described above. Then, the processes of steps S607 and S608 are repeated. If the determination result in step S609 is true, the processing is terminated.
[0048]
  As described above, a phenomenon in which a desired machining accuracy cannot be obtained occurs due to the fact that the shape is not formed according to the machining data due to the influence of disturbance, a relative position setting failure between the machining tool and the workpiece. In the manufacturing method of the present embodiment, the processed first shape is actually measured in advance in the trial processing region. Then, the measurement data of the measured micro-shaped element is compared with the original processing data, and the difference between the two data is calculated. The calculated difference is fed back to the machining data. Next, the first shape forming process and the repetition process are performed based on the machining data corrected by the difference amount. Thereby, the shape process in which the influence of disturbance etc. was reduced can be performed.
[0049]
  In addition, the parallel flat plate which comprises an injection | emission side dust-proof transparent plate is not restricted to a glass member, For example, transparent resin, such as an acryl, may be sufficient. Furthermore, a metal mold can also be manufactured by performing a plating process on a parallel plate on which a fine shape is formed. Moreover, in order to manufacture a metal mold | die directly, you may process hard members, such as heavy alloy (brand name), by the above-mentioned method. Then, the prism group 210 is manufactured by a transfer process using the processed hard member as a mold. Even in the prism group formed by replication by transfer, the area of the flat portion and the area of the refracting surface per unit area are the same in the unit area on the mold and the transferred prism group. For this reason, even if the unevenness of the shape is reversed, the function as the optical element is the same.
[0050]
(Embodiment 4)
  A manufacturing method of the V-shaped groove of the microstructure element according to the fourth embodiment of the present invention will be described with reference to FIGS. 7 (a) and 7 (b). The cutting tool 700 has an opening angle of an angle θv. As shown in FIG. 7A, the V-shaped groove is cut using the V-shaped portion of the cutting tool 700. This is a so-called hail process. Next, a procedure for cutting a V-shaped groove will be further described with reference to FIGS. 8 (a), 8 (b), and 8 (c). For example, consider a case where a V-shaped groove is formed by two cutting operations. In FIG. 8A, cutting is performed once using the cutting tool 700 in the state of the first position 800a. Next, with the V-shaped apex position Ca as the center, the cutting tool 700 is moved so as to be at the second position 800b. More specifically, as shown in FIG. 8B, the first cutting is performed in the state of the vertex position Cb. At this time, the central axis AX substantially orthogonal to the emission-side dust-proof transparent plate 206 that is a parallel plate and the one refracting surface 711b of the cutting tool 700 form an angle θb. Next, as shown in FIG. 8C, the second cutting is performed in the state of the vertex position Cc. In this state, the central axis AX and the other refracting surface 711b form an angle θc. Then, the byte 700 is controlled so that the vertex position Cb and the vertex position Cc coincide with the vertex position Ca. Further, the cutting tool 700 is controlled so that the vertex angle θv of the V-shaped groove becomes the sum of the angle θb and the angle θc. After cutting the V-shaped groove formed of the two refracting surfaces 711b, the flat portion 711a is processed as shown in FIG. 7B. In processing the flat portion 711a, the tip of the cutting tool is fed and the pitch is set to the micron order. Thereby, Rz flatness of about Rz3 / 100 micrometers can be achieved.
[0051]
  The procedure for forming the V-shaped groove includes a step of performing shape processing twice or more as shown in FIGS. 8B and 8C at the same position Ca in the trial processing step. Is different from the third embodiment. Since the same procedure as that of the third embodiment is duplicated, it will be omitted. In the present embodiment, first, after trial cutting at the first position 800a, the angle θb is measured with a laser microscope or AFM. Next, after the trial cutting process at the second position 800b, the angle θc is measured. Thus, the angle θv (FIG. 8A) for forming the slope of the V-shaped groove can be calculated by the following equation.
  θv = θb + θc
[0052]
  Further, in the two trial cutting processes, the vertex position θb and the vertex position θc are measured, and the machining data is corrected so that these positions coincide with each other at the vertex position θa. Furthermore, regarding the flat portion 711a, the flat surface roughness is measured. In addition, it is desirable that the measurement data parameter is at least one of pitch, angle, and depth. As described above, in this embodiment, the machining angle, the vertex position, and the flat surface roughness are corrected by the bite angle correction, the virtual vertex position correction, and the feed pitch correction, respectively. Thereby, even when the fine shape is processed by swinging the angle of the cutting tool at the same position, a desired fine shape can be obtained.
[0053]
(Embodiment 5)
  Next, a manufacturing procedure of the microstructure element according to the fifth embodiment will be described with reference to FIG. This embodiment is different from the above embodiments in that the flat portion is processed after processing the V-shaped groove at random positions. First, in step S901, the operator inputs processing data such as a processing position, a processing angle, a processing depth, a bite rotation speed, a processing speed, and the like for forming a desired fine shape to the control unit of the processing machine. Then, a tool having a required shape is attached to the tool holder of the processing machine. In step S902, a workpiece that is a workpiece is set in a holder of a processing machine. The workpiece is, for example, a parallel plate glass. In step S903, trial processing is performed on the refracting surface 711b, which is a first shape, for example, a V-shaped groove and a flat portion 711a in a test processing region different from the region where the prism group of parallel plate glass is formed. Do. As the test processing region, a peripheral region of parallel plate glass or the like can be used. In step S904, the same measurement as in the above embodiments is performed without removing the workpiece from the processing machine.
[0054]
  In step 905, the difference between the measurement data and the machining data is fed back to the machining data. In step 906, the machining data is corrected based on the fed back difference value. Specifically, the bite vertex position, machining angle, cutting depth, pitch, parameters for flat surface machining, etc. are corrected. Next, after finishing the trial processing, the prism group is processed. In step S907, cutting of the V-shaped groove is performed based on the machining data corrected by the feedback. For example, the depth of the V-shaped groove is cut at a depth added with the error amount of the processing apparatus. Next, in step S908, the machining head is moved to a random position. In step S909, it is determined whether or not the V-shaped groove has been cut. If the determination result in step S909 is false, a V-shaped groove is further cut. For example, after forming a V-shaped groove along the first straight line, the processing head is moved to form a V-shaped groove parallel to the first straight line and along a second line not adjacent to the first straight line. To do. When the processing of the V-shaped groove in one direction is completed, the same procedure is repeated in the direction substantially orthogonal to the one direction to randomly form the V-shaped groove. Thus, by forming the V-shaped grooves at random positions, it is possible to uniformly disperse the variation in the cutting depth, that is, the variation in the area of the V-shaped slope, on the parallel plate.
[0055]
  If the determination result in step S909 is true, the flat portion 711a is cut in step S910. Then, in step S911, it is determined whether or not all the flat portions 711a have been cut. If the determination result in step S911 is false, in step S912, the machining head holding the cutting tool 700 is moved to a position set in advance at random. Then, the cutting process in step S910 is repeated. If the determination result in step S911 is true, the processing is terminated.
[0056]
(Embodiment 6)
  FIG. 10A shows a method for manufacturing a microstructure element according to Embodiment 6 of the present invention. The tip of the processing grindstone 1000 has an angle θv that is the same as the apex angle θv of the V-shaped groove formed by the two refracting surfaces 1011b. The processing grindstone 1000 forms a predetermined depth with respect to the z direction of the emission-side dust-proof transparent plate 206 that is a parallel plate while rotating about the axis AX1. As described above, the predetermined depth is a depth obtained by adding the amount of deflection of the precision of the processing machine to the depth of the V-shaped groove.
[0057]
  FIG. 10B shows a method of forming the flat portion 1011 a with the processing grindstone 1000. The processing grindstone 1000 is rotated by a predetermined amount in the z direction. And it stops at the position of the flat part 1011a, and cuts the flat part 1011a along the y direction. Thus, as shown in FIG. 11A, first, the refracting surface 1011b constituting the V-shaped groove is repeatedly formed according to the procedure described in the first embodiment. Next, the flat portion 1011a is formed by the same procedure. FIG. 11B shows a cross-sectional configuration of a prism group 1110 that is a microstructure element manufactured according to this embodiment. As in the above embodiments, the V-shaped groove formed of the refractive surface 1011b and the flat portion 1011a can be cut with desired accuracy.
[0058]
  Moreover, Ni type | mold can also be manufactured using electroless plating with respect to the fine-shaped element obtained with the manufacturing method which concerns on each said embodiment. When a by-product by transfer is formed by the Ni type, an inexpensive microstructure element can be easily manufactured.
[0059]
(Spatial light modulator)
  FIG.As a reference form,Main departureClearlyAffectHaving a microstructure element manufactured by a manufacturing method1 shows a perspective cross section of a spatial light modulator 1200. The spatial light modulator 1200 is a transmissive liquid crystal spatial light modulator. Note that FIG. 12 shows only a main configuration, and illustration of a polarizing plate and the like is omitted. The V-groove group 1202 which is an inorganic vertical alignment layer is fixed to the counter substrate 1201 with an optically transparent adhesive. A transparent electrode 1203 such as an ITO film is formed in a V-shaped groove of the V-groove group 1202. Similarly, a V-groove group 1206 is fixed to the TFT substrate 1208 with an optical transparent adhesive, and a transparent electrode 1205 is formed in the V-groove portion. A thin film transistor (TFT) portion 1207 is formed on the TFT substrate 1208. Liquid crystal 1204 is sealed between the counter substrate 1201 and the TFT substrate 1208.
[0060]
  In a state where no voltage is applied between the transparent electrodes, the liquid crystal molecules are aligned along the V-shaped grooves that are alignment films. On the other hand, when a voltage is applied between the transparent electrodes, the liquid crystal molecules are arranged so as to be aligned in the vertical direction as shown in FIG. Thereby, the amount of transmitted light can be controlled according to the applied voltage.
[0061]
  Further, according to the present inventionManufactured by manufacturing methodThe fine structure element can be applied to a screen of a rear projector, for example. The screen of the rear projector has a function of a Fresnel lens and a light diffusion function in order to effectively guide light toward the observer. Therefore, according to the present inventionManufactured by manufacturing methodBy forming the fine structure element on the screen surface, incident light can be diffused and emitted toward the observer. Thus, the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention.
[Brief description of the drawings]
[Figure 1]referenceFormAs1 is a schematic configuration diagram of a projector.
[Figure 2]referenceFormAsThe schematic block diagram of the liquid crystal panel.
FIG. 3 shows a first embodiment.Manufactured by the manufacturing methodSchematic of a prism group.
FIG. 4 is a second embodiment.Manufactured by the manufacturing methodSchematic of a prism group.
5A is an explanatory diagram of a method for manufacturing a prism group, and FIG. 5B is another explanatory diagram of a method for manufacturing the prism group.
FIG. 6 is a flowchart of a method for manufacturing a prism group according to the third embodiment.
7A and 7B are explanatory diagrams of a method for manufacturing a prism group.
FIGS. 8A, 8B, and 8C are explanatory views of a method for manufacturing a V-shaped groove according to the fourth embodiment.
FIG. 9 is a flowchart of a method for manufacturing a prism group according to the fifth embodiment.
10A and 10B are explanatory views of a method for manufacturing a prism group according to the sixth embodiment.
FIGS. 11A and 11B are explanatory views of a method for manufacturing a prism group according to Embodiment 6. FIGS.
FIG.referenceFormAsThe perspective structure figure of the spatial light modulation device of.
FIG. 13 is a configuration diagram of a conventional prism group.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 100 Projector, 101 Super high pressure mercury lamp, 104 Integrator, 105 Polarization conversion element, 106R R light transmission dichroic mirror, 106GB B light transmission dichroic mirror, 107 Reflection mirror, 108 Relay lens, 110R Spatial light modulation device for 1st color light, 110G Spatial light modulator for second color light, 110B Spatial light modulator for third color light, 112 Cross dichroic prism, 112a, 112b Dichroic film, 114 Projection lens, 116 Screen, 120R, 120G, 120B Liquid crystal panel, 121R, 121G, 121B First polarizing plate, 123R, 123B λ / 2 retardation plate, 124R, 124B glass plate, 201 incident-side dustproof transparent plate, 202 counter substrate, 203 black matrix forming layer, 204 Liquid crystal layer, 205 TFT substrate, 206 Exit side dustproof transparent plate, 210 Prism group, 211 Prism element, 311a, 312a, 313a, 314a, 315a, 316a Flat part, 311b, 312b, 313b, 314b, 315b, 316b Refractive surface, SB1, SB2, SB3, SB4, SB5, SB6 sub-region, 310 prism group, 410 prism group, 411a, 412a flat part, 411b, 412b refracting surface, 500 bytes, 700 bytes, 711a flat part, 711b refracting surface, 800a first 1 position, 800b second position, Ca, Cb, Cc apex position, 1000 processing grindstone, 1011a flat part, 1011b refracting surface, 1110 prism group, 1201 counter substrate, 1202 V groove group, 1203 transparent electrode, 1204 liquid Crystal, 1205 transparent electrode, 1206 V groove group, 1208 TFT substrate, 1207 TFT

Claims (4)

A dividing step of dividing the processing area into five or more sub-areas;
A first groove forming step of forming a first shape groove formed of a flat portion and a refracting surface formed in a V-shaped groove in any one of the sub-regions;
A second shape having a flat portion and a refracting surface formed in a V-shaped groove in a sub-region located farther than a sub-region adjacent to the one sub-region with respect to the one sub-region. A second groove forming step for forming the groove;
A groove formation repeating step in which the second groove forming step is repeated with the sub-region in which the second shape groove is formed as a new reference;
A first flat portion forming step of forming the flat portion of the first shape in any one of the sub-regions;
A second flat portion forming step of forming the flat portion of the second shape in a sub-region at a position farther than a sub-region adjacent to the one sub-region with respect to the one sub-region;
A flat portion formation repeating step of repeatedly performing the second flat portion forming step with the sub-region in which the flat portion of the second shape is formed as a new reference,
Including
After the processing of the groove between the first shape and the second shape is completed, the flat portion between the first shape and the second shape is processed,
The first shape and the second shape are different shapes.
A method for manufacturing a microstructure element, characterized in that: A trial machining step for forming the first shape based on machining data for a trial machining area different from the machining area;
A shape measuring step for measuring the first shape formed in the trial processing step;
A feedback step of correcting the machining data by feeding back the difference between the measurement data obtained in the shape measurement step and the machining data to the machining data;
2. The method for manufacturing a microstructure element according to claim 1, wherein the first shape forming step and the repeating step are performed based on the corrected processing data.   3. The manufacturing of a microstructure element according to claim 2, wherein the trial processing step, the first shape forming step, and the repeating step include a step of performing shape processing twice or more at the same position. Method.   4. The method of manufacturing a microstructure element according to claim 2, wherein in the shape measurement step, at least one of a pitch, an angle, a depth, and a flat surface roughness of the first shape is measured. .

Images