JP3917348B2 - Arc evaporation source, vacuum deposition apparatus and vacuum deposition method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an arc evaporation source, a vacuum evaporation apparatus, and a vacuum evaporation method.
[0002]
[Prior art]
In the previous application (Japanese Patent Application No. Hei 11-8045), the applicant of the present application generates an evaporating substance that generates only an evaporating substance that serves as a cathode for arc discharge and a magnetic field line that substantially intersects the evaporating surface of the evaporating substance. By providing a magnetic field generation source that surrounds the arc, the magnetic field lines intersecting the evaporation surface almost perpendicularly make it difficult for the arc spot to be unevenly distributed on the evaporation surface, and the evaporation material is evenly consumed.
In the previous application, use of a permanent magnet as a magnetic field generation source is disclosed.
[0003]
[Problems to be solved by the invention]
The permanent magnet surrounding the evaporating material needs to be arranged very close to the evaporating material in order to maintain a predetermined magnetic force on the evaporation surface and to reliably control the behavior of the arc spot. For this reason, the magnet is exposed to a high temperature atmosphere during arc discharge due to the heat generated by the arc spot. In particular, it is inevitable that the temperature of the magnet increases due to the arrangement of surrounding the evaporated substance.
Here, it is known that a magnet loses magnetism when it exceeds the Curie point (temperature), but normally the magnet does not immediately demagnetize at the Curie point, but gradually rises in temperature and approaches the Curie point. Decrease.
[0004]
According to the nature of this magnet, if a permanent magnet is simply provided so as to surround the evaporating substance, the magnetic force of the magnet immediately decreases by lowering the temperature after discharge, and the effect that the evaporating substance is uniformly consumed by the lines of magnetic force cannot be continued.
Although it is generally known that a coil is arranged as necessary near the evaporation substance, in the case of a coil, since it is not demagnetized even at a high temperature, the problem of reduction in magnetic force does not occur.
The subject of the present invention is that when a permanent magnet is provided to control the behavior of the arc spot, even if the permanent magnet is exposed to a high temperature atmosphere, it is maintained in a temperature range where the magnetic force does not decrease, and the arc spot behavior controllability is maintained. It is to last.
[0005]
As another problem of the present invention, in JP-A-5-171427, etc., the anode in arc discharge is a vacuum chamber, but in this case, the arc length from the cathode becomes longer, and the electrons from the cathode become longer. As a result, there is a problem that the number of collisions of the cathode evaporating material and the reactive gas increases during the flight. Because of this problem, the arc discharge voltage rises and the discharge tends to become unstable.
[0006]
[Means for Solving the Problems]
The features of the arc evaporation source according to the present invention for solving the above-described problems are: an evaporating substance that serves as a cathode for arc discharge; a permanent magnet that is disposed so as to surround the evaporating substance and controls the behavior of the arc spot by a magnetic force; in arc evaporation source and a, a cooling unit for cooling the permanent magnets, said cooling unit comprises a cooling chamber in which cooling medium is supplied to the interior, the permanent magnet is disposed in the cooling chamber portion The cooling chamber is an anode for arc discharge, and the anode is disposed on or near the magnetic field lines of the permanent magnet .
[0007]
With such a configuration, even if arc discharge is performed, the permanent magnet can be maintained in a temperature range where the magnetic force does not decrease by being cooled by the cooling unit, and the behavior controllability of the arc spot can be maintained.
Moreover, as a cooling part, what cools a magnet by supplying cooling media, such as water or another liquid, air, or another gas, to an evaporation source is preferable. As such a cooling unit, for example, appropriate means such as cooling by providing a circulation pipe of a cooling medium around the magnet can be adopted.
[0008]
Before SL cooling unit includes a cooling chamber through which cooling medium is supplied to the interior, good cooling efficiency because the permanent magnet is disposed within the cold却室. In the case of providing a permanent magnet in the cooling chamber portion, to the permanent magnet may be directly exposed to the cooling medium, a suitable member (e.g., a cover member for preventing rust) covered by indirectly cooling Also good.
In addition, if the cooling chamber is made of a magnetic material, the magnetic field generated by the permanent magnet is less likely to act outside the cooling chamber, making it impossible to give a magnetic field to the evaporation source. The chamber can be prevented from affecting the magnetic field.
[0009]
In addition, the cooling chamber should just be comprised so that a cooling medium can distribute | circulate, and the shape is not specifically limited.
While electrons emitted from the cathode by arc discharge attempts to fly along the magnetic field lines cage to the winding stick properties magnetic field lines, the cooling chamber in which the magnet is a starting point of the magnetic field lines (or end) of inherent becomes the anode Therefore, it can fly in the magnetic field by the shortest route and reach the anode. As a result, the chance of collision of the cathode evaporating substance and the reactive gas during the flight is reduced, the arc discharge voltage is reduced, and the discharge stability is improved. Moreover, since the cooling chamber is the anode, the temperature rise of the anode can be prevented.
[0010]
Furthermore, it is preferable to have an isolation member made of an insulator for isolating between the cooling chamber and the evaporated substance. In this case, a short circuit between the cooling chamber as the anode and the evaporated substance as the cathode is prevented.
Further, it is preferable that a cover body made of a conductor covering the range is detachably provided in a range where electrons from the cathode enter the cooling chamber as the anode.
The location where the electrons of the anode enter may increase in temperature due to abnormal discharge or insufficient cooling, resulting in melting. Maintenance is facilitated by providing a cover body that can be removed and replaced in order to prevent melting of the cooling chamber as the anode.
[0011]
Moreover, it is preferable that the said cover body is provided in the side surface by the side of the to-be-processed object of the said cooling chamber.
Furthermore, in the present invention, the cooling unit includes a cooling chamber in which a cooling medium is supplied, and the cooling medium is formed so that the cooling medium supplied to the cooling chamber can cool the evaporating substance together with the permanent magnet. It is preferable to have it.
It is preferable that the evaporated substance is cooled from the viewpoint of preventing the generation of droplets due to high temperature. However, not only the magnet but also the evaporated substance can be cooled by the cooling medium supplied to the cooling chamber, so that the simple structure is efficient. Cooling is possible.
[0012]
Further, as a more preferable form of the arc evaporation source, the cooling chamber is formed of a non-magnetic material, the permanent magnet is disposed inside the cooling chamber, and the evaporated substance is disposed outside the cooling chamber. Can do.
According to another aspect of the present invention, there is provided an arc evaporation source including an evaporating material serving as a cathode for arc discharge and a permanent magnet disposed so as to surround the evaporating material, and the evaporation surface of the magnet and the evaporating material. The anode of arc discharge is arrange | positioned on the locus | trajectory of the magnetic force line formed between these, or the locus | trajectory vicinity.
[0013]
Since the electrons emitted from the cathode due to the arc discharge tend to fly along the magnetic field lines due to the property of wrapping around the magnetic field lines, the arc discharge anode is arranged on or in the vicinity of the magnetic field lines connecting the magnet and the evaporation surface. If so, the electrons fly along the magnetic field lines and reach the anode, so the flight route becomes shorter. For this reason, the chance of collision of the cathode evaporating substance and the reactive gas during the flight is reduced.
And it is suitable to set it as the vacuum evaporation apparatus provided with the above arc evaporation sources in the vacuum vessel.
[0014]
Further, it is preferable to use a vacuum vapor deposition method in which a film is formed on an object to be processed using the arc evaporation source as described above.
[0015]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 shows a vacuum vapor deposition apparatus 1 according to a first embodiment of the present invention. In this vacuum vapor deposition apparatus 1, an arc evaporation source 9 having an evaporating substance 3 serving as a cathode is provided in a vacuum vessel 2, and an arc discharge is generated between an arc discharge power source 4 and an anode (not shown) to remove the evaporating substance 3. Evaporation and ionization are performed to deposit a film on the coating object (substrate) 5.
[0016]
FIG. 2 shows a schematic configuration of the evaporation source 9, and this evaporation source is a ring-shaped evaporation substance (target) 3 and a ring shape arranged so as to be coaxial with the central axis X of the evaporation substance. The permanent magnet 7, the ring-shaped magnetic body (for example, carbon steel material) 13 arranged with a slight gap 12 that can maintain insulation on the outer periphery of the evaporating substance 3 on the inner periphery side of the magnet 7, and the evaporating substance 3 And a permanent magnet (magnetic line direction changing means) 14 disposed in the center of the back side (opposite side of the evaporation surface 11).
The ring-shaped permanent magnet 7 is for controlling the behavior of the arc spot on the evaporation surface 11, is configured to have magnetic poles on both end surfaces in the axial direction X, and is disposed so as to surround the outer periphery of the evaporation material 3. ing. This ring-shaped permanent magnet 7 has an end surface (front surface) on the side of the coating object 5 to be an N pole and the other end surface to an S pole (see FIGS. 3 to 5). The arrangement of the magnetic poles may be reversed.
[0017]
The permanent magnet 14 provided on the back side of the evaporating substance is for changing the direction of the lines of magnetic force generated by the ring-shaped permanent magnet 7, and the workpiece 5 side in the axial direction is the S pole, and the axial direction The opposite side is an N pole (see FIG. 5). Thus, the magnetic poles of the ring-shaped permanent magnet 7 and the permanent magnet 14 on the back of the evaporation surface are provided in opposite directions. Therefore, if the magnetic pole of the permanent magnet 7 is opposite to that described above, the magnetic pole of the magnet 14 is also arranged in reverse. The magnet 14 may be a coil / electromagnet.
FIG. 3 shows the configuration of the evaporation source 9 configured as a unit. The evaporation source unit 9 is attached to the vacuum vessel 2 so that the upper side in FIG. 3 faces the workpiece 5 side. The unit 9 has a unit main body 25 in which a front side body 26 on which the evaporative substance 3 and the like are supported and a back side body 27 attached to the back of the front side body 26 are fixed by screws 8. The unit body 25 is made of stainless steel that is a non-magnetic material. As the material of the unit body 25, other non-magnetic material such as copper or aluminum may be adopted.
[0018]
The unit main body 25 is conductive, and the main body 25 is connected to the negative side of the arc discharge power source 4. And since the evaporative substance 3 is provided so that the front side body 26 may be contact | connected, the evaporative substance 3 can act as a cathode of arc discharge.
The inside of the unit body 25 is formed hollow. This internal space is a cooling unit for cooling the magnet 7 and the like, and is configured as a cooling chamber 30 through which water as a cooling medium flows. In order to seal the cooling chamber 30, a seal 31 is provided at a joint portion between the front side body 26 and the back side body 27.
[0019]
The cooling chamber 30 is provided with a ring-shaped permanent magnet 7 so as to surround the evaporation substance 3. The permanent magnet 7 is fixed to the front side body 26 with screws.
The front side body 26 has a concave portion 34 in which the evaporating substance 3 and the magnetic body 13 are accommodated in the center. A cooling plate 37 that closes the opening 35 is provided at the bottom of the recess 34. In order to seal the cooling chamber, a seal 38 is provided at the joint between the cooling plate 37 and the front side body 26. The evaporating substance 3 is attached to the front side body 26 via the cooling plate 37, and the evaporating substance 3 is cooled by the cooling plate 37. The cooling plate 37 is made of copper because it has a high thermal conductivity and is a nonmagnetic material.
[0020]
The magnet 14 for changing the direction of the lines of magnetic force generated by the ring-shaped magnet 7 is disposed on the back side of the cooling plate 37 (inside the cooling chamber 30).
The ring-shaped magnetic body 13 is attached to the front side body 26 with screws 41 via an insulator 40 provided at the bottom of the recess 34. The insulator 40 is for electrically insulating the front side body 26 and the magnetic body 13, and the magnetic body 13 and the evaporated substance 3 are disposed with a gap 12. Is also insulated from the evaporation material 3.
[0021]
Therefore, the magnetic body 13 is in an electrically floating state from the front side body 26 and the evaporated substance 3. Magnetic body 13, its an object 5 end 13a and the evaporation surface 11 is located in flush with the transition from the magnetic member 13 is insulated, the arc spot to the magnetic substance 1 3 This is definitely prevented.
The back side body 27 is formed with a supply port 43 for supplying water, which is a cooling medium, from the outside of the vacuum vessel 2 into the cooling chamber 30 and a discharge port 44 through which water is discharged. One supply port 43 is provided at the center of the back side body 27, and a plurality of discharge ports 44 are provided from the outer periphery of the back side body 27. The cooling water is supplied from the outside of the vacuum vessel 2 by a pump (not shown). The cooling water that has flowed into the cooling chamber 30 from the supply port 43 cools the magnet 14 and cools the evaporated substance 3 through the cooling plate 37. Further, the cooling water flows in the outer peripheral direction, cools the magnet 7, and is discharged through the discharge port 44.
[0022]
By flowing the cooling water during the arc discharge, the magnets 7 and 14 and the evaporating substance 3 are prevented from being heated at a high temperature, and the magnets 7 and 14 do not deteriorate in magnetic force.
In addition, the position and number of the supply port 43 and the discharge port 44 are not limited. For example, the supply port 43 and the discharge port 44 may be replaced. In this case, since the magnet 7 is close to the supply port, the magnet 7 is cooled by cooler water, and the cooling efficiency of the magnet 7 is good. Further, the supply port 43 and the discharge port 44 may be provided in the front side body 26. For example, a supply port and a discharge port can be provided at positions indicated by B and C in FIG. In this case, when the unit 9 is attached to the vacuum vessel 2, the lower one of B and C is used as the supply port, and the upper one is used as the discharge port so that air is accumulated in the cooling chamber 30. From the viewpoint of preventing the above.
[0023]
FIG. 4 shows the lines of magnetic force generated around the evaporating substance 3 when only the permanent magnet 7 is present. As shown in the figure, the lines of magnetic force emitted from the permanent magnet 7 penetrate the evaporation surface substantially perpendicularly (normal direction of the evaporation surface 11). The permanent magnet 7 is arranged so that the axial center position thereof and the position of the evaporation surface 11 substantially coincide with each other so that the lines of magnetic force penetrate the evaporation surface almost vertically. Such magnetic field lines substantially perpendicular to the evaporation surface 11 prevent the stagnation of the arc spot, and the evaporation surface 11 can be evenly consumed.
Strictly speaking, the direction of the magnetic field lines is slightly inclined outward with respect to the normal direction standing on the evaporation surface 11, compared with the magnetic field lines that penetrate the vicinity of the central portion of the evaporation surface 11. is doing. That is, the magnetic field lines are formed so as to diverge as approaching the workpiece 5 side.
[0024]
Due to the feature that the arc easily moves in the inclination direction of the magnetic field lines, the diverging magnetic field lines cause a problem that the arc jumps out of the evaporation surface 11 and misfires. Further, since the magnetic flux density is inversely proportional to the square of the distance from the magnet, the magnetic flux density is small near the center of the evaporation surface 11. Such attenuation of the magnetic flux density causes a problem that the arc spot stagnates in the center due to the feature that the arc spot moves to the side where the magnetic flux density is weaker.
When the magnetic body 13 and the magnet 14 are provided, the lines of magnetic force in FIG. 4 are as shown in FIG. That is, among the lines of magnetic force formed by the magnet 7, those passing through the vicinity of the outer peripheral edge of the evaporation surface 11 are drawn into the magnetic body 13 through which the lines of magnetic force easily penetrate. For this reason, magnetic force lines inclined toward the center of the evaporation surface 11 with respect to the normal line of the evaporation surface 11 are formed on the outer periphery of the evaporation surface 11. A1 to A3 indicate the tangential direction of the magnetic force lines at the points where the magnetic force lines intersect the evaporation surface, and it can be seen that the inclination of the magnetic force lines toward the center is larger toward the outer peripheral side of the evaporation surface. Accordingly, the arc spot approaching the outer periphery of the evaporation surface 11 is pushed back toward the center of the evaporation surface due to the feature that the arc easily moves in the direction of the magnetic field lines, thereby preventing misfire due to the jumping out of the arc spot.
[0025]
Further, by providing the magnet 14, the magnetic force lines penetrating near the central portion of the evaporation surface 11 are drawn into the magnet 14 and inclined outward with respect to the normal direction of the evaporation surface 11. For this reason, even if the magnetic flux density is low, concentration of the arc at the center of the evaporation surface 11 is prevented by the feature that the arc easily moves in the inclination direction of the lines of magnetic force. Further, the presence of the magnet 14 increases the magnetic flux density at the center of the evaporation surface 11, so that the attenuation of the magnetic flux density at the center of the evaporation surface 11 is also improved. Therefore, the concentration of the arc is prevented, and further uniform consumption of the evaporation surface 11 can be realized as compared with that in FIG.
[0026]
As described above, since both the magnet 7 and the magnet 14 forming the magnetic lines for controlling the behavior of the arc spot are cooled, the effect can be maintained without demagnetization due to high temperature.
FIG. 6 shows a permanent magnet 17 as a modification of the permanent magnet 7. The permanent magnet 17 is configured to form a magnetic field similar to that of the permanent magnet 7 by arranging a large number of permanent magnets in a ring shape. That is, a plurality of bar magnets 21 having magnetic poles at both ends in the longitudinal direction are arranged in an annular shape with the magnetic poles aligned in the same direction to constitute a ring-shaped magnet substantially similar to the permanent magnet 7.
[0027]
FIG. 7 shows an evaporation source unit 29 according to the second embodiment of the present invention. This second embodiment is different from the first embodiment in that the front side body 26 is mainly the first front side body 26a that supports the evaporating substance 3 and the like, and the second front side body in which the ring-shaped magnet 7 is accommodated. The cooling chamber 30 is separated into a first cooling chamber 30a for cooling the evaporating substance 3 and a second cooling chamber 30b for cooling the ring-shaped magnet 7. The first cooling chamber 30a and the second cooling chamber are provided with cooling water supply ports 43a and 43b and discharge ports 44a and 44b, respectively, so that the cooling water can flow separately.
[0028]
Other configurations are substantially the same as those of the first embodiment, and thus the same reference numerals are given and description thereof is omitted.
8 to 10 show an evaporation source unit 39 according to the third embodiment of the present invention.
The evaporation source unit 39 includes an evaporating substance (target) 3 serving as a cathode, a cathode support (target body; cathode body) 46 that supports the evaporating substance, and a ring-shaped magnet 7 disposed so as to surround the evaporating substance 3. And a magnet casing (cooling chamber) 47 in which the ring-shaped magnet 7 is disposed.
[0029]
Since the evaporation source unit 39 according to the third embodiment has a configuration similar to that of the evaporation source unit 29 of the second embodiment, the same operation as the evaporation source unit 29 of the second embodiment can be achieved. However, as a particularly different point, firstly, the cathode support 46 (corresponding to the first front side body 26a of the second embodiment) and the magnet casing 47 (second front side body 26b of the second embodiment). And secondly, the magnet casing 47 is connected to the positive side of the arc power source 4 to serve as an anode for arc discharge. It is a point.
[0030]
As described above, in the third embodiment, the evaporation source 39 includes the anode (magnet casing 47) in addition to the evaporation material 3 serving as a cathode for arc discharge.
As shown in FIG. 9, the electrons emitted from the evaporating substance 3 connected to the arc power source 4 move along the magnetic field lines due to the property of winding around the magnetic field lines. Further, the magnet that is the end point (or start point) of the magnetic field lines is cooled by being surrounded by a magnet casing 47 (anode) connected to the “+ side” of the arc power supply 4, and the electrons that have moved along the magnetic field lines remain as they are. To be absorbed. Therefore, as shown in FIG. 10, electrons fly from the “cathode” to the “anode” through the most ideal trajectory.
[0031]
As described above, by arranging the anode 47 on or near the magnetic field line formed so as to connect the magnet 7 and the evaporation surface 11, electrons can reach the anode through the shortest flight route. it can. For this reason, the collision opportunity of the cathode evaporative substance and the reactive gas during the flight is reduced, and the flight route becomes ideal, so that the arc discharge voltage is reduced and the discharge stability is greatly improved. In addition, this effect increases the resistance of arc discharge to disturbances, so that abnormalities such as arc pop-out and sudden misfire are less likely to occur.
[0032]
In addition, although both poles (anode / cathode) in the arc discharge rise in temperature due to current flow, since the magnet casing 47 constituting the cooling chamber 30b is used as the anode, the casing 47 serving as the anode has cooling water in the cooling chamber 30b. Cooled by. That is, the structure can be simplified because the magnet 7 can be cooled and the anode 47 can be cooled.
Note that, from the viewpoint of improving the electronic flight route, the anode does not need to be a cooling chamber constituent member, and the anode may be provided on the magnetic field lines or in the vicinity of the magnetic field lines separately from the members configuring the cooling chamber 30b.
[0033]
As described above, since the magnet casing 47 is used as an anode, the evaporating substance 3 and the cathode support 46 and the magnet casing 47 need to be electrically insulated. For this reason, the isolation member 48 made of an insulator is provided. Is provided. However, in order to electrically insulate them from each other, for example, a gap may be provided between the cathode support 46 and the magnet casing 47. In this case, a simple structure is obtained.
On the other hand, if the gap is simply provided, dust or the like may accumulate in the gap and short-circuit may occur, but this can be prevented by providing the isolation member 48 as in the third embodiment. Discharge stability is increased.
[0034]
Note that in the third embodiment, the same points as in the first and second embodiments are denoted by the same reference numerals, and description thereof is omitted.
FIG. 11 shows an evaporation source unit 49 according to the fourth embodiment. The evaporation source unit 49 is different from the evaporation source unit 39 of the third embodiment in that a conductive cover body 51 is provided in a range 47 a in which electrons enter in the magnet casing 47.
The cover body 51 is made of a material having good thermal conductivity (for example, copper), and is detachably provided to the magnet casing 47 constituting the cooling chamber by screws 52. The cover body 51 is provided so as to cover the side surface 47a on the workpiece 5 side of the magnet casing 47 which is a range where electrons enter.
[0035]
Since the surface of the “anode” where the electrons enter is likely to be contaminated, maintenance can be improved by providing a removable cover body 51.
In addition, since the temperature of the “anode” is likely to rise, if abnormal discharge or insufficient cooling occurs, the temperature rises abnormally and, in some cases, melting damage occurs. The inside of the magnet casing 47 is water-cooled, and if penetration occurs due to melting, cooling water flows out (leaks) into the vacuum vessel 2. However, if the cover body 51 is provided, the magnet casing 47 is melted. Can be prevented, and the occurrence of coolant leakage can be reduced.
[0036]
In addition, in 4th Embodiment, the same point as 1st-3rd Embodiment attached | subjected the same code | symbol, and abbreviate | omitted description.
[0037]
【The invention's effect】
As described above, according to the present invention, the permanent magnet for controlling the behavior of the arc spot is maintained in a temperature range in which the magnetic force does not decrease by being cooled by the cooling unit even when arc discharge is performed. The behavior controllability of can be maintained.
Further, when the cooling chamber in which the magnet is disposed is used as an anode, the flight route of electrons is shortened and the discharge is stabilized.
[Brief description of the drawings]
FIG. 1 is a schematic configuration diagram of a vacuum evaporation apparatus according to the present invention.
FIG. 2 is a front view showing a schematic configuration of an evaporation source.
FIG. 3 is a cross-sectional view of an evaporation source according to the first embodiment.
FIG. 4 is a diagram illustrating a state of magnetic lines of force formed by a ring-shaped permanent magnet.
FIG. 5 is a diagram showing a state of magnetic field lines of an evaporation source.
FIG. 6 is a view showing a modification of the ring-shaped permanent magnet.
FIG. 7 is a cross-sectional view of an evaporation source according to a second embodiment.
FIG. 8 is a cross-sectional view of an evaporation source according to a third embodiment.
FIG. 9 is a diagram showing the lines of magnetic force and the movement of electrons in the third embodiment.
FIG. 10 is a diagram showing an arc discharge route in the third embodiment.
FIG. 11 is a cross-sectional view of an evaporation source according to a fourth embodiment.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Vacuum evaporation apparatus 2 Vacuum container 3 Evaporation substance 4 Arc discharge power supply 7 Permanent magnet 9 Arc evaporation source 12 Gap 13 Magnetic body 14 Permanent magnet 29 Arc evaporation source 30 Cooling chamber 39 Arc evaporation source 47 Magnet casing 48 Isolation member 49 Arc evaporation source 51 Cover body

Claims (8)

An evaporating substance (3) serving as a cathode for arc discharge, a permanent magnet (7) disposed so as to surround the evaporating substance (3) and controlling the behavior of the arc spot by magnetic force, and the permanent magnet (7) are cooled. in luer over click evaporation source provided with a cooling unit, a to,
The cooling unit includes a cooling chamber (30) into which a cooling medium is supplied,
The permanent magnet (7) is disposed inside the cooling chamber (30),
The cooling chamber (30) is an anode for arc discharge,
An arc evaporation source , wherein the anode is disposed on or near the magnetic field lines of the permanent magnet . It said arc evaporation source according to claim 1, further comprising a separating member (48) made of an insulator for insulating and isolating between the cooling chamber (30) and said evaporation material (3). A cover body (51) made of a conductor covering the range (47a) is detachably provided in a range (47a) in which electrons from the cathode enter the cooling chamber (30) as the anode. The arc evaporation source according to claim 1 or 2, characterized by the above. The arc evaporation source according to claim 3, wherein the cover body (51) is provided on a side surface (47a) of the cooling chamber on the workpiece side (5) . According to claim 1, wherein the cooling chamber (30) is supplied to the cooling medium, characterized in that the said evaporation material with permanent magnets (7) (3) also coolable cooling chamber (30) is formed Arc evaporation source. The cooling chamber (30) is formed of a nonmagnetic material,
6. The arc evaporation source according to claim 5, wherein the evaporating substance (3) is arranged outside the cooling chamber (30) . A vacuum evaporation apparatus comprising the arc evaporation source according to any one of claims 1 to 6 in a vacuum vessel (2) . The vacuum evaporation method which forms a film in a to-be-processed object (5) using the arc evaporation source of any one of Claims 1-6.

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