JP3996391B2 - Manufacturing method of fine periodic structure - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a fine periodic structure in which a plurality of columnar bodies are erected on a base portion at a predetermined arrangement pitch, and a fine periodic structure for manufacturing a fine periodic structure in which a plurality of through holes are formed at a predetermined arrangement pitch The present invention relates to a method for manufacturing a body.
[0002]
[Prior art]
As a method for manufacturing this type of fine periodic structure, a method for manufacturing a photonic crystal disclosed in Japanese Patent Application Laid-Open No. 2001-91777 is known. In this case, the photonic crystal is an example of a fine periodic structure in which two types of optical materials (including the case where one is air) having different refractive indexes are periodically arranged in the wavelength order of light. It is configured. In this manufacturing method, first, a casting mold (2) is manufactured by forming a plurality of bottomed cylindrical holes (1) having a diameter of about several tens of μm in a metal plate at a predetermined arrangement pitch. Next, after the mold (2) is accommodated in the container (3), a liquid polymer (4, a solvent for photonic crystal molding) is put into the plurality of holes (1) formed in the mold (2). Pour. Next, after the liquid polymer (4) is cured, the mold (2) and the container (3) are removed from the cured product. Thereby, the photonic crystal (5) is completed. The publication also discloses a manufacturing method using a mold (7) in which a plurality of bottomless cylindrical holes (6) are formed instead of the above-described holes (1). In this manufacturing method, the mold (7) is accommodated in the container (8), whereby the hole (6) of the mold (7) is closed by the bottom plate of the container (8). Pour liquid polymer (4). Next, after the liquid polymer (4) is cured, the mold (7) and the container (8) are removed from the cured product. Thereby, the photonic crystal (5) is completed.
[0003]
[Problems to be solved by the invention]
However, the conventional photonic crystal manufacturing method has the following problems. That is, in the conventional photonic crystal manufacturing method, the bottomed cylindrical hole (6) closed by the mold (2) in which the bottomed cylindrical hole (1) is formed or the bottom plate of the container (3). The photonic crystal (5) is manufactured by pouring the liquid polymer (4) into the mold (7) in which is formed. In this case, the holes (1, 6) formed in both molds (2, 7) are, for example, formed with a very small diameter of about 48 μm and a depth of about 500 μm. Therefore, when the liquid polymer (4) is poured into the holes (1, 6), air does not escape from the holes (1, 6) and remains in the holes (1, 6) as bubbles. . When the liquid polymer (4) is cured in such a state, unintentional defects (missing columnar bodies as an example) that cause a significant deterioration in the optical properties are present in the crystal structure of the photonic crystal (5). There is a problem that occurs. In this case, in this publication, in order to prevent bubbles from remaining in the holes (1, 6), a method in which a liquid polymer is poured in a state where a container and a mold are placed in a vacuum apparatus and evacuated. Is also disclosed. However, this manufacturing method has a problem that the manufacturing cost of the photonic crystal increases due to the use of an expensive vacuum apparatus. In addition, each time the liquid polymer is poured, the vacuum apparatus must be evacuated, so that it takes a long time to produce the photonic crystal.
[0004]
The present invention has been made in view of such problems, and provides a method for manufacturing a fine periodic structure that can reduce manufacturing costs and work time without causing unintended defects in the periodic structure. The main purpose.
[0005]
[Means for Solving the Problems]
In order to achieve the above object, the method of manufacturing a fine periodic structure according to claim 1 is a method of manufacturing a fine periodic structure in which a plurality of columnar bodies are erected on a base portion at a predetermined arrangement pitch. A method comprising: a mold body in which a plurality of through holes for molding the plurality of columnar bodies are formed at the predetermined arrangement pitch; and a bottom plate that closes the plurality of through holes in the mold body. Submerging the plurality of through-holes in the mold body with the solution by submerging in a solution for molding a structure, and then bringing the bottom plate into close contact with one surface of the mold body in the solution, thereby the plurality of the plurality of through holes by the bottom plate. The through hole is closed, the mold body and the bottom plate in this state are taken out of the solution, the solution in the through hole is cured, the bottom plate is peeled from the mold body, and the mold body is removed. Producing the fine periodic structure by.
[0006]
The method for producing a fine periodic structure according to claim 2 is the method for producing a fine periodic structure according to claim 1, wherein a plate-like substrate is brought into close contact with the upper surface of the mold body taken out of the solution, After reversing the mold body, the bottom plate, and the substrate in a state, the solution in the through hole is cured.
[0007]
The method of manufacturing a fine periodic structure according to claim 3, wherein the fine periodic structure is manufactured by manufacturing a fine periodic structure in which a plurality of through holes are formed at a predetermined arrangement pitch. A plurality of columnar bodies for molding the mold body, the mold body having a plurality of communication holes formed in the top plate, and the mold body; A plurality of columnar shapes in the mold body are formed by sinking a bottom plate that is formed so as to be in contact with a lower end portion of the columnar body in the main body and closes a bottom opening portion of the mold main body in a solution for molding a fine periodic structure. After the solution is impregnated in the gap of the body, the bottom plate is closed by the bottom plate by bringing the bottom plate into close contact with one surface of the mold body in the solution, and the mold body and the bottom plate in that state are closed in front. Removed out of the solution to cure the solution of the container body, to produce the fine periodic structure by removing the mold body with peeling the bottom plate from the mold body.
[0008]
DETAILED DESCRIPTION OF THE INVENTION
DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, preferred embodiments of a method for producing a fine periodic structure according to the invention will be described with reference to the accompanying drawings.
[0009]
First, a photonic crystal 1 manufactured according to the method for manufacturing a fine periodic structure according to the present invention will be described with reference to the drawings.
[0010]
The photonic crystal 1 is an example of a fine periodic structure according to the present invention, and is an ultra-compact optical circuit used for optical circuit components such as an optical multiplexer / demultiplexer, a wavelength multi-polymerization demultiplexer, and a spectrometer (diffraction grating). As a light-emitting element or light-receiving element for photoluminescence or laser beam, various sensors (detection elements such as gas, strain, temperature, voltage, and current), as well as millimeter wave and microwave shielding materials and antennas used. As shown in FIG. 1, the photonic crystal 1 includes a flat base portion 2 formed on a substrate 13 and a plurality of columnar portions 3 erected on the base portion 2 at a predetermined arrangement pitch. , 3... Are integrally molded. In this case, when the photonic crystal 1 is manufactured, the substrate 13 functions as a support when the photonic crystal 1 (the base portion 2 and the columnar portions 3, 3,...) Is molded, and the photonic crystal 1 is completed. In this state, it also functions as a base portion of the photonic crystal 1 in combination with the base portion 2.
[0011]
Further, as will be described later, the photonic crystal 1 includes a photonic crystal material solution (hereinafter also referred to as “solution”) R (see FIG. 3) such as an organic material solution, an inorganic material solution, and an organic-inorganic composite material solution. ), The material used as the solution R, the shape, diameter, height, arrangement pattern, and number of standing columns of the columnar portion 3 are determined according to the optical characteristics required for the photonic crystal 1. Properly specified and manufactured. In the embodiment of the present invention, as an example, the diameter of the columnar portion 3 is defined as 50 μm, the height is defined as 500 μm, the shape is defined as a columnar shape, and the interval between adjacent columnar portions 3 and 3 is defined as 50 μm. 1 is manufactured. 1 to 6, in order to facilitate understanding of the present invention, 16 columnar parts 3, 3... Are erected on the base part 2. Innumerable columnar portions 3, 3... Are erected on the base portion 2. Further, the mold 10 (see FIG. 2) used in the manufacturing method described later is actually configured to be capable of forming innumerable columnar portions 3, 3,.
[0012]
Next, the manufacturing method of the fine periodic structure according to the present invention will be described with reference to the drawings, taking the manufacturing method of the photonic crystal 1 as an example.
[0013]
First, as shown in FIG. 2, a mold 10 for forming the photonic crystal 1 is manufactured. The mold 10 includes a mold body 11 corresponding to a mold body in the present invention, and a flat bottom plate 12 formed so as to be in surface contact with the lower surface (one surface) of the mold body 11. In this case, the mold body 11 and the bottom plate 12 are made of an inorganic material such as SiO ₂ , Si, SiC, metal, metal oxide, or a nanocomposite material in which an inorganic material and an organic material are combined (nanometer size Composite material). The mold body 11 has a recess 11a for molding the base portion 2 of the photonic crystal 1 on the upper surface, and a plurality of through holes 11b, 11b for molding the columnar portions 3, 3,. .. Are formed in communication from the bottom of the recess 11 a to the lower surface of the mold body 11. In this case, the through holes 11b, 11b,... Have a predetermined arrangement pitch with respect to the above-described material using a fine structure processing apparatus such as a laser beam drawing apparatus, an electron beam drawing apparatus, and a reactive ion etching apparatus. After being formed by the above process, it is processed with high precision by wet etching or dry etching so that the diameter is 50 μm, the length is 500 μm, and the interval between adjacent through holes 11b and 11b is 50 μm. Is done. Further, the lower surface of the mold body 11 (the lower surface in FIG. 2) is formed flat. On the other hand, the bottom plate 12 is formed in a flat surface so as to be in surface contact with the lower surface (one surface) of the mold body 11 so as to close the through holes 11b, 11b,.
[0014]
Next, as shown in FIG. 3, first, the mold 10 is submerged in the solution R in the order of the bottom plate 12 and the mold body 11, and the solution R is impregnated in the through holes 11 b, 11 b. At this time, since the through holes 11b, 11b,... Of the mold body 11 are formed to communicate from the bottom of the recess 11a to the lower surface of the mold body 11, the air in the through holes 11b, 11b,. . Therefore, the solution R surely impregnates the through holes 11b and 11b. Next, the bottom plate 12 is brought into close contact with the lower surface of the mold body 11 in the solution R, whereby each end portion of the through holes 11b, 11b,. Next, as shown in FIG. 4, the mold body 11 is taken out of the solution R with the bottom plate 12 in close contact, and then the substrate 13 is in close contact with the upper surface of the mold body 11. As a result, the upper opening portion of the recess 11 a in the mold body 11 is closed by the substrate 13.
[0015]
Next, as shown in FIG. 5, the mold body 11, the bottom plate 12, and the substrate 13 in that state are inverted, and then the solution R is cured. In this case, depending on the characteristics of the material used as the solution R, light or heat is applied to the solution R from the outside of the mold 10 or the solution R is hydrolyzed (so-called sol-gel method). The solution R is cured (crosslinked). In this case, the solution R is cured while the mold body 11, the bottom plate 12, and the substrate 13 are inverted, so that the solution R is cured in close contact with the substrate 13 by its own weight. The base portion 2 and the substrate 13 are securely fixed. Next, after the solution R is cured, as shown in FIG. 6, the bottom plate 12 is peeled from the mold body 11, and then the mold body 11 is removed from the cured solution R. As a result, the cured solution R and the mold 10 are separated to form the base portion 2 on the substrate 13, and the columnar portions 3, 3. Composed. Note that, after the bottom plate 12 is peeled, only the mold body 11 can be melted and removed by immersing the mold body 11 integrated with the cured solution R and the substrate 13 in a stripping solution.
[0016]
As described above, according to this photonic crystal manufacturing method, the mold body 11 having the plurality of through holes 11b, 11b,... And the bottom plate 12 are submerged in the solution R, and the through holes 11b, 11b,. Unlike the conventional manufacturing method, after impregnating the solution R with the solution R, the bottom plate 12 is brought into close contact with the lower surface of the mold body 11 in the solution R to close the through holes 11b, 11b. It is possible to reliably impregnate the solution R while smoothly discharging the air in 11b, 11b. For this reason, air can be reliably discharged from the through holes 11b, 11... Without evacuating using an expensive vacuum device. As a result, an unintended defect in the crystal structure of the photonic crystal (column 3) The photonic crystal 1 having ideal optical characteristics as designed can be manufactured at a low cost and in a short time without causing a lack or the like. In addition, by reversing the mold body 11, the bottom plate 12, and the substrate 13 in a state where the solution R is uncured, the base portion 2 of the photonic crystal 1 and the substrate 13 can be securely fixed.
[0017]
The present invention is not limited to the configuration shown in the above-described embodiment of the present invention. For example, in the embodiment of the present invention, the manufacturing method for manufacturing the photonic crystal 1 in which a large number of the columnar portions 3, 3... With the same shape are erected at equal intervals of 50 μm has been described. In addition, the present invention can also be applied to a method of manufacturing an optical multiplexer / demultiplexer 31 having a cladding portion 31a and a core portion (waveguide portion) 31b having different pitches of the columnar portions 3, 3,. In this optical multiplexer / demultiplexer 31, the cladding part 31a reflects light of a specific wavelength, and the core part 31b functions as a waveguide part for guiding the light of the specific wavelength in a predetermined direction. Therefore, the periodic structure such as the standing position and shape of the columnar parts 3, 3... In the cladding part 31 a and the periodic structure such as the standing position and shape of the columnar parts 3, 3. It is necessary to manufacture by changing each other. Therefore, when the method for manufacturing the photonic crystal 1 according to the present invention is applied, the through holes 11b, 11b,... In the mold body 11 include a portion corresponding to the clad portion 31a and a portion corresponding to the core portion 31b. The periodic structure of the columnar portions 3, 3... Can be changed by appropriately changing the formation pitch of. In the figure, the individual illustrations of the columnar portions 3, 3,. Furthermore, in the embodiment of the present invention, the example in which the substrate 13 is adhered to the upper surface of the mold body 11 after the mold body 11 and the bottom plate 12 are taken out from the solution R has been described, but the present invention is not limited to this. In the solution R, both the bottom plate 12 and the substrate 13 may be brought into close contact with the mold body 11. Further, the size, shape, standing pitch, and the like of the columnar portion 3 exemplified in the embodiment of the present invention are not particularly limited, and may be appropriately changed according to the optical characteristics required for the photonic crystal 1. it can.
[0018]
Further, in the method for manufacturing a fine periodic structure according to the present invention, for example, the photonic crystal 51 shown in FIG. 9 is manufactured using the mold 60 shown in FIG. In this case, the photonic crystal 51 is a fine periodic structure in which a plurality of through holes 53, 53,... Are formed at a predetermined arrangement pitch in place of the columnar portions 3, 3,. In the same manner as the photonic crystal 1 described above, it is used as various micro optical circuits, light emitting elements, light receiving elements, various sensors, shield materials, antennas, and the like. On the other hand, the mold for molding the photonic crystal 51 includes a mold body 61 corresponding to the mold body in the present invention and a bottom plate 12 as shown in FIG. In this case, the mold body 61 is provided with a plurality of columnar portions 63, 63,... For forming through holes 53, 53,. A plurality of air holes (communication holes in the present invention) 62a, 62a,... For discharging the air between the columnar portions 63, 63,. .
[0019]
When producing a photonic crystal using the mold 60, first, the mold 60 is submerged in the solution R in the order of the bottom plate 12 and the mold body 61, and the gap between the columnar portions 63, 63,. Impregnate solution R. At this time, the air between the columnar portions 63, 63,... Is smoothly discharged from the air holes 62a, 62a of the mold body 61. Therefore, the solution R surely impregnates the gap between the columnar parts 63, 63. Next, the bottom plate 12 is brought into close contact with the lower surface of the mold body 61 in the solution R, whereby the bottom opening portion of the mold body 61 is closed by the bottom plate 12. At this time, the bottom plate 12 is brought into contact with the lower ends of the columnar portions 63, 63,. Next, after the mold body 61 is taken out of the solution R with the bottom plate 12 in close contact, the solution R in the mold 60 is cured (crosslinked). Subsequently, after the solution R is cured, the bottom plate 12 is peeled off from the mold body 61, and then the mold body 61 is removed from the cured solution R. Thereby, the cured solution R and the mold 60 are separated, and the photonic crystal 51 in which the plurality of through holes 53 are formed is molded. As described above, according to the method of manufacturing the photonic crystal 51 using the mold 60, the air between the columnar portions 63, 63,... Can be smoothly discharged in the same manner as the method of manufacturing the photonic crystal 1 described above. In addition, since the solution R can be reliably impregnated, the photonic crystal 51 having ideal optical characteristics as designed can be produced at low cost and in a short time without causing unintended defects in the crystal structure of the photonic crystal 51. Can be manufactured.
[0020]
【The invention's effect】
As described above, according to the method for manufacturing a fine periodic structure according to claim 1, a mold body in which a plurality of through holes for molding a plurality of columnar bodies are formed at a predetermined arrangement pitch, and a plurality of through holes The bottom plate is closed in a solution for forming a fine periodic structure, and the plurality of through holes are impregnated with the solution, and then the bottom plate is brought into close contact with one surface of the mold body in the solution to close the plurality of through holes with the bottom plate. Then, the mold body and bottom plate in that state are taken out of the solution and the solution in the through hole is cured to produce a fine periodic structure, so that the air in the through hole can be removed without using an expensive vacuum device or the like. Since the solution can be surely impregnated while being smoothly discharged, a fine periodic structure having an ideal periodic structure as designed can be manufactured at a low cost and in a short time. In this case, a photonic crystal having ideal optical characteristics can be manufactured at a low cost and in a short time by manufacturing the photonic crystal according to the manufacturing method of the fine periodic structure.
[0021]
According to the method for manufacturing a fine periodic structure according to claim 2, the flat substrate is brought into close contact with the upper surface of the mold main body taken out of the solution, and the mold main body, the bottom plate and the substrate in the state are inverted. By subsequently curing the solution in the through hole, the fine periodic structure (cured solution) and the substrate can be securely fixed.
[0022]
Furthermore, according to the method for manufacturing a fine periodic structure according to claim 3, the plurality of columnar bodies for forming the plurality of through holes are erected at a predetermined arrangement pitch on the lower surface of the top plate in the container body having the bottom opening. And a mold body in which a plurality of communication holes are formed in the top plate, and a bottom plate that is formed so as to be able to contact the lower end portion of the columnar body in the mold body and closes the bottom opening portion of the mold body. After being immersed in a molding solution and impregnating the solution into the gaps between the plurality of columnar bodies, the bottom plate is brought into close contact with one surface of the mold body in the solution, and the bottom opening portion is closed with the bottom plate. The expensive periodic apparatus is used in the same manner as in the method of manufacturing a fine periodic structure according to claim 1 by manufacturing the fine periodic structure by taking out the solution from the solution and curing the solution in the container. Pillar without Because while discharging air between the body smoothly solution can be reliably impregnated with, it is possible to produce a fine periodic structure having an ideal periodic structure as designed inexpensively and in a short time.
[Brief description of the drawings]
FIG. 1 is an external perspective view of a photonic crystal 1 manufactured according to a method for manufacturing a photonic crystal (fine periodic structure) according to an embodiment of the present invention.
FIG. 2 is an external perspective view of a mold 10 for producing a photonic crystal 1;
3 is a side cross-sectional view of a state in which a mold 10 is submerged in a solution R in the manufacturing process of the photonic crystal 1. FIG.
4 is a side cross-sectional view showing a state in which a mold 10 is taken out from a solution R in the manufacturing process of the photonic crystal 1. FIG.
FIG. 5 is a side cross-sectional view of a state in which the mold 10 with the substrate 13 taken out from the solution R is brought into close contact with the substrate 13;
6 is a side cross-sectional view of a state where a mold 10 is removed from a cured solution R (photonic crystal 1). FIG.
FIG. 7 is an external perspective view of a photonic crystal 31 manufactured according to a method of manufacturing a photonic crystal (fine periodic structure) according to another embodiment of the present invention.
8 is an external perspective view of a mold 60 for manufacturing the photonic crystal 51. FIG.
FIG. 9 is an external perspective view of a photonic crystal 51 manufactured according to a method of manufacturing a photonic crystal (fine periodic structure) according to another embodiment of the present invention.
[Explanation of symbols]
1, 31, 51 Photonic crystal 2 Base part 3 Columnar part 10, 60 Mold 11, 61 Mold body 11a Recess 11b Through hole 12 Bottom plate 13 Substrate 31a Waveguide part 53 Through hole 62 Top plate 62a Air hole 63 Columnar part R Solution

Claims (3)

A method for producing a fine periodic structure for producing a fine periodic structure in which a plurality of columnar bodies are erected on a base portion at a predetermined arrangement pitch,
A mold body in which a plurality of through holes for molding the plurality of columnar bodies is formed at the predetermined arrangement pitch, and a bottom plate that closes the plurality of through holes in the mold body are used for molding a fine periodic structure. Submerging the plurality of through-holes in the mold body with the solution and then closing the plurality of through-holes with the bottom plate by bringing the bottom plate into close contact with one surface of the mold body in the solution. The mold body and the bottom plate in that state are taken out of the solution, the solution in the through hole is cured, the bottom plate is peeled from the mold body, and the mold body is removed to remove the fine periodic structure. Manufacturing method of fine periodic structure which manufactures body. 2. A flat substrate is brought into close contact with the upper surface of the mold body taken out of the solution, and the mold body, the bottom plate, and the substrate in that state are inverted, and then the solution in the through hole is cured. The manufacturing method of the described fine periodic structure. A method for producing a fine periodic structure, which produces a fine periodic structure in which a plurality of through holes are formed at a predetermined arrangement pitch,
A mold in which a plurality of columnar bodies for molding the plurality of through-holes are erected at the predetermined arrangement pitch on the lower surface of the top plate in a container body having a bottom opening, and a plurality of communication holes are formed in the top plate A main body and a bottom plate that is formed so as to be able to contact a lower end portion of the columnar body in the mold body and closes a bottom opening portion of the mold body are submerged in a solution for molding a fine periodic structure, and the mold body In the solution, after the solution is impregnated in the gap between the plurality of columnar bodies, the bottom plate is brought into close contact with one surface of the mold main body to close the bottom opening portion with the bottom plate, and the mold main body in that state The bottom plate is taken out of the solution to harden the solution in the container, and the bottom plate is removed from the mold body and the mold body is removed to produce the fine periodic structure. Method for producing a fine periodic structure to be.

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