JP3803130B2 - Polishing apparatus and polishing method - Google Patents

Description

[0001]
[Industrial application fields]
The present invention relates to a polishing apparatus and a polishing method, and more particularly to a structure for maintaining a clean atmosphere of a polishing apparatus that polishes a polishing object such as a semiconductor wafer to a flat and mirror surface.
[0002]
[Prior art]
In recent years, as semiconductor devices are highly integrated, circuit wiring is becoming finer and the distance between wirings is becoming narrower. In particular, in the case of photolithography of 0.5 μm or less, the flatness of the imaging surface of the stepper is required because the depth of focus becomes narrow.
Therefore, it is necessary to flatten the surface of the semiconductor wafer, but polishing is performed by a polishing apparatus as one means of this flattening method.
[0003]
Conventionally, since this type of polishing apparatus uses an abrasive liquid that is a suspension with abrasive grains for polishing, the mist of the liquid is scattered and the abrasive grains are scattered by drying after adhering, or a chemical liquid is applied to the abrasive liquid. If used, toxic gas may be generated. Further, since there is a concern about the dust generation from the power drive unit for using a relatively large power in the polishing apparatus, the installation location of the apparatus may be outside the clean room.
[0004]
However, since wafer processing devices other than polishing processing, such as etching processing and sputtering processing devices, are installed in the clean room, putting the polishing device outside the clean room will cause the polishing process to deviate from a series of semiconductor manufacturing processes. This hinders full automation of the manufacturing process. For this reason, in recent years, the entire polishing apparatus is covered with a casing and then installed in the same clean room as other wafer processing apparatuses.
[0005]
This kind of polishing apparatus needs to be devised so as not to let dust generated inside the apparatus go out, and as one of the methods, a polishing apparatus that can be installed in a clean room by the applicant of Japanese Patent Application No. 5-342830. Has been proposed.
[0006]
Also, wafers to which abrasive fluid has adhered after polishing must be cleaned for the next wafer processing step, but when the polishing apparatus is installed in a clean room, the polished wafer is cleaned in the polishing apparatus. It is desirable to carry it out into a clean room in a clean state. This is because the wafer to which the abrasive liquid adheres contaminates the clean room. For this reason, the thing provided with the washing | cleaning apparatus inside polishing apparatus came to be manufactured.
[0007]
[Problems to be solved by the invention]
Since the polishing process generates much more dust and mist due to the process than other wafer processes, when the polishing apparatus is installed in a clean room, the generated dust and mist contaminates the clean room. .
Further, when a cleaning device is provided in the polishing apparatus, there is a problem that dust or mist generated by the polishing process contaminates the cleaning apparatus.
Further, in the case where a cleaning device is provided in the polishing apparatus, there is a problem that dust and mist generated by the polishing process are cleaned to contaminate a cleaned wafer.
Furthermore, there is a problem in that a power drive unit that drives a large component or the like constituting the polishing apparatus is contaminated by a contaminant generated by the polishing process.
[0008]
In addition, a polishing apparatus that can be installed in a clean room may have a structure in which a wafer is roughly cleaned with a brush immediately after the polishing is completed, and then the robot receives the wafer in a wet state and carries it into the cleaning room for delivery to the cleaning machine. . On the other hand, as the number of types of films to be polished increases, polishing abrasives having a high abrasive concentration and those having strong acidity and alkalinity have come to be used. For this reason, while the wafer is received in the cleaning chamber and transferred to the cleaning machine, water droplets dripped onto the installation floor from the wafer and robot dries, and the abrasive grains remaining in the rough cleaning rise and contaminate the cleaned wafer. There are concerns about problems such as generation of harmful gases from wafers and robot adhering water.
[0009]
The present invention has been made in view of the above circumstances, is easy to maintain, can efficiently prevent dust and mist contamination caused by polishing, and is generated by a polishing apparatus and polishing that can be installed in a clean room. An object of the present invention is to provide a polishing method capable of efficiently preventing contamination of dust and mist. In addition, a polishing device that can be safely installed in a clean room without any secondary contamination of the wafer after cleaning and a safe generation of harmful generation gas without secondary contamination of the wafer after cleaning. It is an object of the present invention to provide a polished polishing method.
[0010]
[Means for Solving the Problems]
In order to achieve the above-described object, one aspect of the polishing apparatus of the present invention includes a load / unload block that transfers a cassette containing a polishing object; a transport block that moves the polishing object from the cassette; A polishing block for polishing the polishing object; a cleaning block for cleaning the polishing object after polishing; a polishing apparatus having a box-like structure in which wall plates are provided around and on the ceiling so as to cover the whole. A partition is provided so as to be a first chamber in which the polishing block is disposed, and a second chamber in which the load / unload block, the transfer block, and the cleaning block are disposed, and a cassette delivery port is provided in the second chamber, The partition wall is provided with a transfer hole for an object to be polished between the first chamber and the second chamber, and a control block for controlling the operation of the apparatus is disposed in the second chamber. It is characterized in.
[0011]
Further, a shutter for opening and closing the hole may be provided in a delivery hole for the polishing object of the partition wall.
[0012]
Further, the partition wall is provided with a hole separately from the delivery hole for the object to be polished, and a movable slat is attached to the hole to form an opening area-adjusted beam.
[0013]
Of the two chambers, in the first chamber in which the polishing block is arranged, a partition wall is provided in a planar shape with the lower surface of the turntable as a boundary, the first chamber is divided into two vertically and penetrates into the two upper and lower chambers. A tube may be provided, a valve may be provided between each tube and each chamber, one end of the valve may be connected to the main tube, and the main tube may be opened to the outside of the apparatus.
[0014]
Further, in the second chamber in which the load / unload block, the transport block, the cleaning block, and the control block are arranged, a pipe penetrating the cleaning tank of the cleaning block is provided, and a valve is provided between the pipe and the tank. You may make it connect a pipe | tube to one end and open this pipe | tube outside the apparatus.
[0015]
  Another aspect of the polishing apparatus of the present invention includes a first chamber in which a polishing block for polishing a polishing object is disposed; and a second chamber in which a cleaning block for cleaning the polishing object after polishing is disposed. A box-shaped polishing apparatus; a filter block including a fan and a filter is disposed on a ceiling of the polishing apparatus;MultipleA duct header having a plurality of holes is disposed; the duct header and the filter block are connected by a pipe.
  The cleaning block includes a cleaning tank, and a duct for exhausting the cleaning tank is attached to the cleaning tank.
  The polishing block is provided with a duct for exhausting the inside of the polishing block.
[0016]
Further, a slat may be attached to the hole of the duct header so that the opening area of the hole can be adjusted.
[0017]
Further, a chemical filter may be provided at the air suction port of the fan in the filter block.
[0018]
The ceiling of the second chamber may be released, a fan may be attached to the lower surface of the duct header, and the fan outlet may be opened to the outside of the apparatus.
[0019]
Moreover, you may make it form an air flow from the one where internal pressure is high to the low one in order of the clean room where the polishing apparatus is arrange | positioned, the said 2nd chamber, and the said 1st chamber.
[0020]
In addition, the object to be polished is introduced into the first chamber through the second chamber, the object to be polished in the first chamber is transferred from the first chamber to the second chamber, and the second chamber The cleaned polishing object may be taken out from the second chamber to the clean room.
[0021]
  In addition, a plurality of cleaning devices may be arranged in the cleaning block in the order of increasing cleanliness in the opposite direction to the air flow in the second chamber..
[0022]
The polishing apparatus of the present invention has an exterior unit, a partition that partitions the exterior unit into a first chamber and a second chamber, and the partition has a first opening through which the object to be polished passes. A polishing block having a turntable with a polishing cloth affixed to the upper surface, a top ring that supports a polishing object on the turntable and presses against the polishing cloth, and the polishing block is disposed in the first chamber. A cleaning block for cleaning the polished object after polishing is provided in the second chamber, the cleaning block cleaning the polishing object while supplying a cleaning liquid, and drying for drying the cleaned polishing object. And a transfer device for transferring a polishing object after polishing from the polishing block to the cleaning block through the first opening, and means for exhausting air discharged from the polishing block. It may be made from.
[0023]
Moreover, you may further provide the duct header which has several opening arrange | positioned at the lower part of the said 2nd chamber, and the exhaust fan which discharges | emits the exhaust_gas | exhaustion of the said 2nd chamber through this duct.
[0024]
According to the above-described aspect of the polishing apparatus of the present invention, the first chamber in which the polishing block is installed communicates with the clean room via the second chamber in which other block portions such as a cleaning block are installed. In other words, the first room and the clean room are not in direct communication. For this reason, the pollutant generated in the first chamber does not directly contaminate the clean room.
[0025]
In addition, since the polishing block and other block portions such as the cleaning block are blocked by the partition walls, it is possible to suppress contamination generated by the polishing block from contaminating the cleaning device and the like.
[0026]
Further, the first chamber in which the polishing block is installed and the second chamber in which the other block portions are installed are exhausted independently so that the pressure decreases in the order of the clean room, the second chamber, and the first chamber. Therefore, clean air suitable for the exhaust is supplied from the clean room. For this reason, since the cleaned clean wafer is transferred in a direction opposite to the flow of clean air in the polishing apparatus, dust and mist generated by the polishing process may contaminate the clean wafer. There is no.
[0027]
Furthermore, since the first chamber in which the polishing block is arranged is divided into the polishing processing unit and the power driving unit and each is independently evacuated, the power driving unit is not contaminated by contaminants generated by the polishing process.
[0028]
  Further, according to the above-described aspect of the polishing apparatus of the present invention, the HEPA filter and the fan for blowing clean air having a wind speed of 0.3 to 0.4 m / s on the wafer surface to the moving range of the wafer on the ceiling of the cleaning chamber. A built-in filter block is provided, and a hole capable of adjusting the opening area for collecting the air blown down is provided on the floor surface of the cleaning chamber.MultipleAn open pipe is provided, the filter block and the pipe are connected by a duct so that air can circulate, and a chemical filter can be attached to the suction side of the HEPA filter.
[0029]
Accordingly, clean air is uniformly blown into the wafer movement range of the cleaning chamber, so that dust scattering is suppressed and contamination of the object to be polished by the dust can be prevented. In addition, the harmful gas generated is excluded by the chemical filter.
Further, when the apparatus is installed in a place where there is a sufficiently clean air downflow, the ceiling is opened and the filter block is unnecessary, and the lowered air is exhausted to the floor of the installation room.
[0030]
【Example】
Hereinafter, embodiments of a polishing apparatus according to the present invention will be described with reference to the drawings.
[0031]
FIG. 1 shows a state where the polishing apparatus 50 according to the first embodiment of the present invention is installed in a clean room. The side surface 3A where the cassette delivery port 1 and the operation panel 2 of the apparatus 50 are located protrudes as a partition wall 3 into the working zone 4 with high cleanliness, and the other side surface 3B and the ceiling 3C are released into the utility zone 5 with low cleanness. . The polishing apparatus 50 includes a load / unload block that transfers a cassette containing wafers, a transfer block that moves the wafers from the cassette, a polishing block that polishes the wafer, and a cleaning block that cleans the polished wafer. The control block for controlling the operation of the apparatus is arranged on a common base, and a wall plate is provided around the ceiling and the ceiling so as to cover the whole, and is configured in a box shape.
[0032]
FIG. 2 is a view showing the inside of the apparatus. The polishing block 6 and the other load / unload block 7, the transport block 8, the cleaning block 9, and the control block 10 are partitioned by the partition wall 11 and arranged independently on the common base 12.
[0033]
1 is placed on the stage 14 of the load / unload block 7, and the number of wafers 16 stored by the sensing sensor 15 and the position of the storage shelf 17 are measured (wafers of the wafers). And the information is stored in the computer 18 in the control block 10. When the mapping is completed, the finger 20 of the robot 19 mounted on the transfer block 8 takes out the wafer 16.
[0034]
The wafer 16 taken out from the cassette 13 passes through the wafer transfer hole 21 of the partition wall 11 while being captured by the fingers 20 of the robot 19, is mounted on the top ring 22 of the polishing block 6, and is polished on the rotary table 23. . A polishing cloth is attached to the surface of the rotary table 23, and the rotary table 23 rotates in a state where the abrasive liquid flows down, and the wafer 16 mounted on the top ring is polished.
[0035]
The polished wafer 16 is transferred to the cleaning block 9 by the robot 19 and mounted in the cleaning tank 24 in the block. When the cleaning is completed, the wafer 16 is mounted in the drying tank 25 in the same block, and after draining and drying, the robot 19 takes out the wafer 16 from the cleaning block 9 and returns it to the storage shelf 17 of the cassette 13. Thus, the polishing of one wafer is completed, but the remaining wafers are continuously polished, and the cassette 13 is replaced when the processing of all the wafers is completed.
[0036]
According to the polishing apparatus of the present invention, the semiconductor wafer is polished by the polishing block, and the polished semiconductor wafer is transferred from the polishing block to the cleaning block. Then, the semiconductor wafer is cleaned with a cleaning liquid and dried. Therefore, the semiconductor wafer is removed from the polishing apparatus after being cleaned and dried.
[0037]
FIG. 3 is a view of the inside of the polishing apparatus as viewed from the side. The polishing apparatus 50 is partitioned by a partition wall 11 and includes a first chamber 27 in which the polishing block 6 is disposed, the load / unload block 7, the transfer block 8, the cleaning block 9, and the control block 10. It consists of the second chamber 26.
[0038]
A polishing liquid receiver 28 for preventing and collecting abrasive liquid is attached around the rotary table 23 in the first chamber 27, and this serves as a partition to divide the first chamber 27 into two upper and lower chambers 27a and 27b. Yes. A duct 29 is attached to the upper chamber 27a together with the opening adjustment valve 30, and a duct 31 is attached to the lower chamber 27b together with the opening adjustment valve 32. Both ducts join together and are connected to the exhaust pipe (not shown) of the clean room through the exhaust port 33.
[0039]
The abrasive mist generated during polishing is exhausted from the exhaust port 33 through the duct 29 of the upper chamber 27a. Further, dust from the drive belt of the drive unit 34 of the rotary table 23 is exhausted from the exhaust port 33 through the duct 31. The partition wall 11 is provided with a hole 36 in addition to the wafer delivery hole 21, and a movable blade 35 is attached to the hole to form an opening area-adjusted type of beam.
[0040]
As for the air suitable for the exhaust of the upper chamber 27a, first, air in the working zone 4 having a high cleanliness flows from the cassette transfer port 1 into the second chamber 26, and then this air is supplied to the wafer transfer hole 21 provided in the partition wall 11 and It flows into the upper chamber 27a through the hole 36 whose opening area is adjusted by the movable blade 35. This inflow air volume is adjusted by the movable blade 35 and the valve 30.
[0041]
The amount of dust generated in the lower chamber 27b is very small compared to the abrasive mist, and therefore the amount of exhaust in the same chamber may be small. Therefore, the valve 32 is throttled and slightly negative in the same chamber, and the air is between the components. It is compensated by a slight leak from the gap.
[0042]
Ducts 37a and 37b and opening area adjusting valves 38 and 39 are attached to the washing tank 24 and the drying tank 25 of the washing block 9 of the second chamber 26, respectively, and the ducts 37a and 37b are joined together from the exhaust port 40 to the clean room. Connected to an exhaust pipe (not shown). Accordingly, the mist of the cleaning water generated in the cleaning tank 24 and the drying tank 25 is exhausted from the exhaust port 40 through the ducts 37a and 37b. The intake corresponding to the exhaust is made from the cassette delivery port 1 in common with the intake of the second chamber 27 described above, and the air volume is adjusted by valves 38 and 39.
[0043]
A shutter 41 is attached to the opening 21 of the partition wall so that the dust in the first chamber 27 does not flow backward from the opening 21 toward the second chamber 26 after the first chamber 27 is opened during maintenance or the like. 41 is closed.
[0044]
Instead of the movable blade 35, the size of the hole 36 may be adjusted, and a shutter for opening and closing the hole 36 may be further provided. An opening / closing door may be provided instead of the shutter.
[0045]
FIG. 4 is a cross-sectional view of the polishing apparatus as viewed from above. A polishing block 6, a cleaning block 9, a transport block 8, a control block 10, and the like are installed inside the box-shaped polishing apparatus. Further, the polishing block 6 is located on the back side when viewed from the working zone 4 through the partition wall 3.
[0046]
The clean air inflow passage of the polishing apparatus will be described with reference to FIG. Each chamber of the first chamber 27 including the polishing block and the second chamber 26 including the cleaning block is independent, and the internal pressure decreases in the order of the clean room 4, the second chamber 26, and the first chamber 27. So that it is exhausted. Exhaust air is exhausted through the duct 33 and the duct 40 in the figure. For this reason, clean air in the clean room (working zone) 4 flows from the wafer transfer port into the second chamber 26 provided with a cleaning block and the like, and a part thereof flows toward the duct 40 provided in the second chamber. Further, a portion of the clean air that has flowed into the second chamber passes through the opening 21 provided in the partition wall 11 and flows into the first chamber 27 in which the polishing block is disposed, and flows toward the duct 33. FIG. 5 shows the flow of clean air with arrows.
[0047]
In this way, since the internal air pressure is exhausted so that the pressure decreases in the order of the clean room, the second chamber, and the first chamber, clean air flows from the low pollution level to the high level, and a reverse flow occurs. Absent. For this reason, the pollutant generated in the polishing apparatus does not flow out into the clean room and is contaminated, and the highly contaminated air in the first chamber does not flow out into the second chamber and contaminates the cleaning device or the like. .
[0048]
Further, the exhaust, intake, and atmospheric pressure of each chamber in the polishing apparatus can be arbitrarily adjusted by a movable vane plate in another hole of the partition wall and a valve provided in the duct. For this reason, it can be arbitrarily controlled by an adjusting means with less airflow in the apparatus.
[0049]
Furthermore, since the interior is divided into simple shapes, the direction of the airflow in the apparatus becomes clear and the exhaust design is easy. Also, the exhaust duct can be simply configured. For this reason, the pressure loss caused by bending the exhaust duct into a complicated path or increasing the length of the tube and the pressure loss caused by complicated division of the internal shape are reduced, and high exhaust efficiency can be obtained.
[0050]
Next, the passage path of the wafer in the polishing apparatus will be described with reference to FIG. The wafer is carried into the polishing apparatus from the working zone 4, passes through the second chamber 26 in which the cleaning block and the like are arranged, is transferred to the first chamber 27 in which the polishing block is arranged, and is polished. Since the polishing process uses an abrasive liquid, the abrasive liquid adheres to the polished wafer and is contaminated. In order to bring the polished wafer into a clean state and carry it out into the clean room, the wafer is transferred from the first chamber to the cleaning device 9a in the second chamber. The wafer cleaned here is transferred to the cleaning device 9b for cleaning with a higher cleanliness. The cleaned wafer is dried in the cleaning device 9 b and transferred to the working zone 4. The arrows in the figure indicate the flow of the wafer.
[0051]
In this manner, the cleaned wafer is unloaded in the direction opposite to the clean air flow described above. Therefore, the wafer is cleaned by the cleaning device and is transported in a clean direction, so that the cleaned wafer is carried out without being contaminated.
[0052]
In order to obtain the above-described effects, the following arrangement of the cleaning device is considered in the present invention. When a plurality of cleaning steps are performed by individual cleaning apparatuses, the plurality of cleaning apparatuses are arranged in a direction opposite to the flow of clean air according to the cleanliness of the wafer after cleaning. That is, an apparatus for increasing the cleanliness of a cleaned wafer is disposed upstream of the clean air flow. For example, in FIG. 6, the cleaning device 9b is installed upstream of clean air (working zone 4 side) in order to clean the wafer with higher cleanliness than the cleaning device 9a. As a result, the above-described effects can be obtained in wafer transfer between a plurality of cleaning apparatuses.
[0053]
FIG. 7 shows a state where the polishing apparatus 50 according to the second embodiment of the present invention is installed in a clean room. The side face 3A of the apparatus 50 with the cassette delivery port 1 and the operation panel 2 protrudes as a partition wall 3 into the working zone 4 having a high cleanness, and the other side face 3B and the ceiling 3C are released to the utility zone 5 having a low cleanness degree. . The polishing apparatus 50 includes a load / unload block that transfers a cassette containing wafers, a transfer block that moves the wafers from the cassette, a polishing block that polishes the wafer, and a cleaning block that cleans the polished wafer. The control block for controlling the operation of the apparatus is arranged on a common base, and wall plates (outer grooves) are provided around the ceiling and the ceiling so as to cover the whole, and is configured in a box shape. A filter block 60 is mounted on the ceiling 3C to circulate clean air in a cleaning space containing a load / unload block, a transport block, a cleaning block, and a control block.
[0054]
FIG. 8 shows the inside of the apparatus. The polishing block 6 and the other load / unload block 7, the transport block 8, the cleaning block 9, and the control block 10 are partitioned by the partition wall 11 and are independently arranged on the common base 12.
[0055]
7 is placed on the stage 14 of the load / unload block 7 and the number of wafers 16 stored by the sensing sensor 15 and the position of the storage rack 17 are measured (wafer mapping). The information is stored in the computer 18 in the control block 10. When the mapping is completed, the finger 20 of the robot 19 mounted on the transfer block 8 takes out the wafer 16.
[0056]
The wafer 16 taken out from the cassette 13 passes through the wafer transfer hole 21 of the partition wall 11 while being captured by the fingers 20 of the robot 19, is mounted on the top ring 22 of the polishing block 6, and is polished on the rotary table 23. . A polishing cloth is attached to the surface of the rotary table 23, and the rotary table 23 rotates in a state where the abrasive liquid flows down, and the wafer 16 mounted on the top ring is polished.
[0057]
The polished wafer 16 is roughly cleaned with an attached cleaning machine (not shown) attached to the top ring 22 and then transferred to the cleaning block 9 by the robot 19 and mounted in the cleaning tank 24 in the block. Is done. When the cleaning is completed, the wafer 16 is mounted in the drying tank 25 in the same block, and after draining, the robot 16 takes out the wafer 16 from the cleaning block 9 and returns it to the storage shelf 17 of the cassette 13. Thus, the polishing of one wafer is completed, but the cassette 13 is replaced when the remaining wafers are continuously polished and all the wafers have been processed.
[0058]
FIG. 9 is a view of the inside of the polishing apparatus as seen from the side. The polishing apparatus 50 is partitioned by a partition wall 11, a cleaning chamber (second chamber) 26 in which the load / unload block 7, the transfer block 8, the cleaning block 9, and the control block 10 are disposed, and the polishing block 6. And a polishing chamber (first chamber) 27 in which is disposed.
[0059]
Mist and generated gas of abrasive liquid generated during polishing are exhausted from the exhaust port 29 together with dust on the drive belt of the drive unit 34 of the rotary table 23. Also, the mist of cleaning water generated in the cleaning tank 24 and the drying tank 25 is exhausted from the exhaust port 31. These exhaust gases are discharged out of the apparatus 50 through an exhaust pipe 51 shown in FIG. The air suitable for these exhaust gases flows from the cassette delivery port 1 into the second chamber 26 where the clean air in the clean room includes the cleaning block, and further, the air flowing from the intake port of the filter block 60 enters the second chamber 26. It is supplied to the first chamber 27 from the blowout, the wafer delivery hole 21 provided in the partition wall 11 and the hole 40 whose opening area is adjusted.
[0060]
A fan 41 is built in the filter block 60, a HEPA filter 42 having a filtration accuracy of 0.1 μm is attached to the outlet side of the fan 41, and a chemical filter 43 for adsorbing and removing harmful gases is attached to the inlet side of the fan 41. ing. The clean air from the filter 42 is blown down to the moving range of the robot 19 and the range including the cleaning tank 24 and the drying tank 25, that is, the moving range of the wafer, and the speed is effective in preventing cross-contamination between adjacent wafers. 0.3 to 0.4 m / s. A part of the blown-down air flows into the first chamber 27 described above and also into the openings of the cleaning tank 25 and the drying tank 26 and is exhausted outside the apparatus. Descent to the floor.
[0061]
A duct header 45, which is a flat box-like tube, is attached to the floor surface. The duct header 45 is provided with a large number of holes 46, and the holes 46 are provided with blades 47 whose opening area can be adjusted. The duct header 45 is connected to the filter block 60 by a duct 48. Air descending to the floor of the apparatus is sucked from the hole 46, collected in the duct header 45, and sucked into the chemical filter 43 through the duct 48.
[0062]
Therefore, the harmful gas emitted from the cleaning liquid containing a little abrasive liquid adhering to the wafer 16 and the finger 20 of the robot 19 entering the second chamber 26 in the wet state after the rough cleaning from the first chamber 27 is It is filtered and removed by the chemical filter 43 together with the descending air. In addition, the abrasive grains from the cleaning liquid that dries on the floor surface are also prevented from being scattered by the descending air, and a part thereof is filtered by the filter 42 together with the air.
[0063]
Replenishment of the air exhausted to the outside of the apparatus, that is, makeup air, is replenished from the opening 53 provided with the wing plate 49 provided in the filter block 60 and only slightly replenished from the cassette delivery port 1. ing. The air descending speed of the second chamber 26 is adjusted by adjusting the wing plate 47 of the duct header 45 and the wing plate 49 of the makeup opening 53.
[0064]
FIG. 10 shows a third embodiment of the present invention. The filter block 60 is removed from the ceiling of the second chamber 26 and the ceiling of the second chamber 26 is removed and released. An exhaust fan 41 is attached to the lower surface of the duct header 45. This is a case where no harmful gas is generated from the abrasive liquid and the down flow in the clean room is used when the entire apparatus is installed in a clean room with high cleanliness. The descending air is exhausted out of the apparatus by the exhaust fan 41. Also in this embodiment, a flat tube (duct header) having a large number of holes on the upper surface is arranged on the base of the cleaning chamber, and air passes through the flat duct header 45 and is exhausted out of the apparatus by the exhaust fan 41.
[0065]
Note that the duct header 45 is not necessarily a flat tubular body, but may have a rectangular parallelepiped shape, for example, as long as it can collect the descending air.
Further, the filtration accuracy of the filter, the necessity of installing the chemical filter, and the like should be appropriately selected according to the cleanliness required for the clean room and the type of abrasive liquid used for polishing.
[0066]
In the above-described embodiment, the example of the semiconductor wafer is described as the object to be polished. However, it is needless to say that the present invention can be similarly applied to an object to be polished such as a glass substrate or a ceramic substrate.
[0067]
【The invention's effect】
According to the polishing apparatus and the polishing method of the present invention, the semiconductor wafer is polished by the polishing block, and the polished semiconductor wafer is transferred from the polishing block to the cleaning block. Then, the semiconductor wafer is cleaned and dried. Therefore, the semiconductor wafer is removed from the polishing apparatus after being cleaned and dried.
And the outstanding effect enumerated below is acquired.
(1) Contaminants generated in the first chamber in which the polishing block is disposed do not directly contaminate the clean room.
(2) Moreover, it can suppress that the contaminant which generate | occur | produces in a grinding | polishing block contaminates a washing | cleaning apparatus etc.
(3) Further, dust and mist generated by the polishing process do not contaminate a clean wafer cleaned by the cleaning device.
(4) Moreover, the power drive unit is not contaminated by contaminants generated by the polishing process.
(5) Moreover, the airflow in each chamber in the apparatus can be arbitrarily adjusted with a small amount of adjusting means.
(6) In addition, the direction of the airflow in the apparatus becomes clear, and the exhaust design becomes easy.
(7) Further, the pressure loss is reduced, and high exhaust efficiency is obtained.
(8) Further, since contamination of the wafer is reliably suppressed in the apparatus and harmful gas is removed, the properties of the abrasive liquid used are not restricted, and as a result, it can cope with polishing of many kinds of films. Moreover, a polishing apparatus that can be installed in a clean room can be provided.
[Brief description of the drawings]
FIG. 1 is a partially transparent perspective view showing an installation state of a polishing apparatus according to a first embodiment of the present invention.
2 is an internal perspective view of the polishing apparatus shown in FIG. 1. FIG.
FIG. 3 is an explanatory view of the inside of the polishing apparatus shown in FIG. 1 as viewed from the side.
4 is a cross-sectional view of the polishing apparatus shown in FIG. 1 as viewed from above.
FIG. 5 is an explanatory diagram showing the air flow in FIG. 4;
6 is an explanatory diagram showing the flow of the wafer in FIG. 4. FIG.
FIG. 7 is a partially transparent perspective view showing an installation state of a polishing apparatus according to a second embodiment of the present invention.
8 is an internal perspective view of the polishing apparatus shown in FIG.
FIG. 9 is an explanatory view of the inside of the polishing apparatus shown in FIG. 7 as viewed from the side.
FIG. 10 is an explanatory view showing the inside from the side of a polishing apparatus according to a third embodiment of the present invention.
[Explanation of symbols]
1 Cassette delivery port
2 Operation panel
3 partition walls
4 working (clean) zone
5 Utility Zone
6 Polishing block
7 Load / unload block
8 Transport block
9 Washing block
10 Control block
11 Bulkhead
12 Common base
21 Opening (hole)
22 Top ring
23 Rotating table
24 Washing tank
25 Drying tank
26 Room 2
27 Room 1
41 fans
42 Filter
43 Chemical Filter
45 Duct header
50 Polishing equipment
60 filter blocks

Claims (22)

A load / unload block for delivering a cassette containing an object to be polished;
A transport block for moving the object to be polished from the cassette;
A polishing block for polishing the polishing object;
A cleaning block for cleaning the object to be polished after polishing;
A polishing apparatus in which a wall plate is provided around and on the ceiling so as to cover the whole, and configured in a box shape;
A first chamber in which the polishing block is disposed;
A partition is provided to be a second chamber in which the load / unload block, the transfer block, and the cleaning block are arranged,
The second chamber has a cassette delivery port,
The partition is provided with a transfer hole for an object to be polished between the first chamber and the second chamber,
In the second chamber, a control block for controlling the operation of the apparatus is arranged ,
The polishing apparatus is disposed in a clean room, and forms a flow of air in the order of the clean room, the second chamber, and the first chamber from the higher internal pressure to the lower one . A load / unload block for delivering a cassette containing an object to be polished;
A transport block for moving the object to be polished from the cassette;
A polishing block for polishing the polishing object;
A cleaning block for cleaning the object to be polished after polishing;
A polishing apparatus in which a wall plate is provided around and on the ceiling so as to cover the whole, and configured in a box shape;
A first chamber in which the polishing block is disposed;
A partition is provided to be a second chamber in which the load / unload block, the transfer block, and the cleaning block are arranged,
The second chamber has a cassette delivery port,
The partition is provided with a transfer hole for an object to be polished between the first chamber and the second chamber,
In the second chamber, a control block for controlling the operation of the apparatus is arranged,
The septum is provided separately from the hole and the transfer hole of the polishing object, features and to Lupo Risshingu apparatus that forms a radically opening area adjustable type by attaching the movable blade plate in the hole. A first chamber provided with a polishing block for polishing an object to be polished;
A box-shaped polishing apparatus comprising a second chamber in which a cleaning block for cleaning the polished object after polishing is disposed;
Disposing a filter block containing a fan and a filter on the ceiling of the polishing apparatus;
Arranging a duct header having a plurality of holes inside the polishing apparatus;
A pipe is connected between the duct header and the filter block ;
The polishing apparatus is disposed in a clean room, and the air flow is formed in the order of the clean room, the second chamber, and the first chamber from the higher internal pressure to the lower one ;
Polishing device.   The polishing apparatus according to claim 3, wherein the cleaning block has a cleaning tank, and a duct for exhausting the cleaning tank is attached to the cleaning tank.   5. The polishing apparatus according to claim 3, wherein a duct for exhausting the inside of the polishing block is attached to the polishing block. In a polishing apparatus for cleaning after polishing an object to be polished,
A first chamber provided with a polishing block for polishing an object to be polished;
A second chamber provided with a cleaning block for cleaning an object to be polished after polishing,
In the first chamber, a box-shaped polishing apparatus provided with a partition on a plane with the lower surface of the turntable as a boundary,
The polishing apparatus is arranged in a clean room, and is configured such that the internal pressure decreases in the order of the clean room in which the polishing apparatus is installed, the second chamber, and the first chamber, and the internal pressure increases in the order from low to high. A polishing apparatus characterized in that an air flow is formed in the direction . The partition wall is provided between the first chamber in which the polishing block is disposed and the second chamber in which the cleaning block is disposed, and a delivery hole for a polishing object in both chambers is provided in the partition wall. 6. The polishing apparatus according to 6 . In the first chamber, a partition wall is provided in a planar shape with the lower surface of the turntable as a boundary, the first chamber is vertically divided into two, pipes penetrating the upper and lower chambers are provided, and each pipe is connected to the main pipe. 7. A polishing apparatus according to claim 6 , wherein the main pipe is opened outside the apparatus. In a polishing apparatus for cleaning after polishing an object to be polished,
A load / unload block for delivering a cassette containing a polishing object;
A polishing block for polishing an object to be polished;
A transport block for moving an object to be polished;
A cleaning block for cleaning an object to be polished after polishing;
An exhaust duct that exhausts air from inside the polishing apparatus to the outside of the polishing apparatus,
A filter block having a fan and a chemical filter is arranged on the ceiling of the polishing apparatus, a duct header is attached to the floor surface of the polishing apparatus, and the air that has fallen into a hole opened in the duct header is sucked ,
A partition is provided between the first chamber in which the polishing block is arranged and the second chamber in which the cleaning block is arranged, and the partition is provided with a delivery hole for an object to be polished in both chambers,
In the first chamber, a partition wall is provided in a planar shape with the lower surface of the turntable as a boundary, the first chamber is vertically divided into two, pipes penetrating the upper and lower chambers are provided, and each pipe is connected to the main pipe. A polishing apparatus characterized in that the main pipe is opened outside the apparatus. The polishing apparatus according to claim 9, wherein the duct header is connected to the filter block by a duct. The polishing apparatus according to claim 9, wherein the load / unload block is provided with a sensor for mapping a polishing object stored in a cassette placed on a stage. The polishing apparatus is disposed in a clean room, the clean room, the second chamber, claim 9, wherein the one in which the internal pressure in the first chamber of the order has a flow of air to lower the higher The polishing apparatus as described. The cleaning block, in the opposite direction to the flow of air in the second chamber, according to claim 1 or 3 or 6 or 9, wherein in that a plurality of cleaning devices in the order in which cleanliness is high Polishing device. A polishing method for cleaning a semiconductor wafer after polishing,
A first chamber having a polishing block for polishing a semiconductor wafer; and a second chamber having a cleaning block for cleaning the polished semiconductor wafer. The first chamber is planar on the lower surface of the turntable. A box-shaped polishing apparatus provided with a partition wall is installed in a clean room and exhausted so that the internal pressure becomes lower in the order of the clean room, the second chamber, and the first chamber,
In the order of the clean room, the second chamber, the first chamber, an air flow is formed from the higher internal pressure to the lower one,
A polishing method comprising polishing a semiconductor wafer with a polishing block, transporting the polished semiconductor wafer to a cleaning block, and cleaning and drying the polished semiconductor wafer with the cleaning block. A load / unload block for delivering a cassette containing a polishing object;
A polishing block for polishing an object to be polished;
A cleaning block for cleaning an object to be polished after polishing;
A partition wall separating the polishing block and the cleaning block;
The polishing block is provided with a planar partition that further divides the polishing block into upper and lower chambers,
It is configured so that the internal pressure becomes lower in the order of the clean room, the cleaning block, and the polishing block ,
A polishing apparatus, wherein an air flow is formed in the order of the clean room, the cleaning block, and the polishing block from the highest internal pressure to the lowest . The polishing apparatus according to claim 15 , wherein an exhaust duct is provided in each of the chambers divided above and below the polishing block . 17. The polishing apparatus according to claim 16, wherein an opening adjusting valve is provided in each of the exhaust ducts. A polishing block for polishing an object to be polished;
A cleaning block for cleaning an object to be polished after polishing;
A partition wall separating the first chamber in which the polishing block is disposed and the second chamber in which the cleaning block is disposed;
A filter block having a filter and a fan for blowing clean air into the second chamber;
A polishing apparatus in which a pipe having a plurality of holes on the upper surface is arranged in the lower part of the second chamber, and the pipe and the filter block communicate with each other.
The polishing apparatus is disposed in a clean room, and forms a flow of air in the order of the clean room, the second chamber, and the first chamber from the higher internal pressure to the lower one . The polishing apparatus according to claim 18 , wherein the speed of clean air blown down is 0.3 to 0.4 m / s. The cleaning cleaning tank arranged in the block, a drying chamber and each exhaust duct is provided in the, in claim 18 or 19 part of the clean air Fukiorosa is characterized in that it is exhausted to the outside of the apparatus The polishing apparatus as described. Polishing device according to any one of claims 18 to 20, characterized in that said filter block is opened to replenish the make-up air is provided. A polishing block for polishing an object to be polished;
A cleaning block for cleaning an object to be polished after polishing;
A partition wall separating the first chamber in which the polishing block is disposed and the second chamber in which the cleaning block is disposed;
A filter block having a filter and a fan for blowing clean air into the second chamber;
A pipe having a plurality of holes on the upper surface is arranged at the bottom of the second chamber, and the pipe and the filter block are communicated with each other .
A polishing apparatus characterized in that a blade is provided on the tube so that the opening areas of the plurality of holes can be adjusted .

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